JP5873242B2 - Straightness inspection method - Google Patents

Description

  The present invention relates to a linearity inspection method, and more particularly to a method for inspecting the linearity of an edge in a plan view of an inspection object while moving the inspection object.

  Conventionally, as a method for inspecting the linearity of an object to be inspected, there is a one-dimensional displacement sensor method in which a linearity is calculated by measuring a distance from the object to be inspected by a one-dimensional displacement sensor. Then, as an example of using this method, for example, inspecting the surface irregularities, as shown in Patent Document 1, the distance to the measurement surface of the object to be inspected is set on a movable body that is movable in the horizontal direction. Some optical sensors to be measured are arranged at the same height at equal intervals. In this system, the distance detection signals of three sensors are input every time the sensor interval moves, and the distance between the measurement surface and the reference horizontal plane of the moving body is calculated and stored sequentially for each interval by the multipoint method. Is to be measured and evaluated.

JP 7-146125 A

  However, since the thing of patent document 1 is provided with the guide body which moves an optical sensor, since installation space more than the full length of a to-be-inspected object is required, and inspection accuracy will fall if an to-be-inspected object moves, It is necessary to provide a fixing means for fixing the inspection object.

  Therefore, in order to incorporate in the middle of the production process, it is necessary to move the inspection object to another place separated from the line of the conveying means in order to provide a space for fixing and arranging the inspection object. When the conveying means is stopped at the time of inspection and incorporated on the production line, the conveying distance of the inspection object becomes longer by the length of the guide body that is equal to or longer than the entire length of the inspection object.

  As described above, the conventional ones have a problem that the installation location is likely to be limited, and a problem that costs and production time increase.

  In view of these circumstances, an object of the present invention is to provide a linearity inspection method capable of inspecting the linearity of the edge of an object to be inspected while reducing the restriction on the installation location and suppressing an increase in cost.

In order to solve the above problems, a linearity inspection method of the present invention is an inspection method for inspecting the linearity of an edge in a plan view of an object to be inspected using an inspection apparatus, and the inspection apparatus includes the inspection target. From the moving means for moving the inspection object from one end side to the other end side of the end side, the distance detection unit for detecting the distance to the end side of the moving inspection object, and the detection result of the distance detection unit An information processing unit for obtaining a linearity of the end side, and the distance detecting unit includes at least three sensors arranged at equal intervals along a moving direction of the inspection apparatus by the moving unit, and the moving unit Has a moving operation output unit that outputs information corresponding to the moving operation of the moving unit, and the information processing unit is configured to output the information to be inspected by the moving unit based on the information output from the moving operation output unit. Obtain the estimated amount of movement of the object Momentum is measured for each time the same value as the interval arranged in the moving direction of the sensor, the sensor of the distance detection section performs the detection operation of the distance to said end edges, measured at the plurality of detection points Among the results, the measurement results of the respective detection points measured in duplicate are overlapped, and the detection results are arranged and plotted, and an image diagram from one end to the other end of the inspection object is created, and this image diagram A reference straight line is obtained by connecting the detection points at one end and the other end of the inspection object with a straight line, and the reference straight line is compared with the image diagram so that the reference line is perpendicular to the reference straight line. The degree of linearity is calculated by obtaining a remote detection point, and the degree of linearity is output in a visually recognizable manner.The inspection apparatus further includes a work sensor that detects the position of the object to be inspected. The information processing unit A deviation between the actual movement amount of the inspection object and the estimated movement amount is detected on the basis of the position information of the inspection object output from the mark sensor and the estimated movement amount, and detection of this deviation According to the result, control for adjusting the operation timing of the detection operation of the distance detection unit is performed.

  By adopting such a configuration, it is possible to inspect the straightness of the edge of the object to be inspected while reducing restrictions on the installation location and suppressing an increase in cost as compared with the conventional one.

It is an apparatus block diagram in the linearity test | inspection method of an example of embodiment. It is a configuration explanatory view of the inspection operation. It is a figure of a processing flow of inspection operation. It is the figure which put together the measurement result for every measurement. It is an image figure which piled up each measurement result.

  Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

  In the linearity inspection method according to an example of the embodiment, a plate material such as a rectangular panel as shown in FIG. 1 is used as an inspection object 7, and the linearity of the edge 8 in a plan view of the inspection object 7 is measured using an inspection apparatus. It is what you want to use.

  The inspection apparatus includes a distance detection unit 2 that detects information corresponding to the distance to the edge 8 of the inspection object 7, an information processing unit 1 that obtains a linearity from the detection result obtained by the distance detection unit 2, Moving means 4 for moving the inspection object 7 with respect to the distance detection unit 2.

  In the linearity inspection method, the moving means 4 moves the inspection object 7 from the one end 9 side to the other end 10 side of the end side 8 with respect to the distance detection unit 2 while the distance detection unit 2 moves to the end side 8. A plurality of points are measured at substantially equal intervals, and the straightness of the edge 8 is obtained by the information processing unit 1 from the obtained information. Therefore, the moving direction T of the inspection object 7 is directed from the other end 10 side toward the one end 9 side.

  Specifically, as shown in FIG. 1, the moving means 4 is mainly composed of a plurality of rollers 5 arranged along the moving direction T. Each roller 5 is arranged such that the center of rotation is perpendicular to the moving direction T, and the moving means 4 also serves as a conveying means incorporated in a production apparatus for producing the inspected object 7. The inspection object 7 is conveyed in the moving direction T by the rotation of 5.

  Furthermore, the moving unit 4 includes a moving operation output unit 6 that outputs information corresponding to the operation of the moving unit 4 such as the rotation speed, rotation time, or conveyance pitch of the roller 5. An encoder that outputs encoder pulses to the processing unit 1 is used.

  The moving means 4 is configured by a long belt moving in the moving direction T in the moving direction T to convey the inspection object 7 placed on the belt, a self-propelled vehicle, or the like. 4 or the like may be used to move the inspected object 7.

  Further, the distance detection unit 2 is mainly composed of three sensors 3 arranged at substantially equal intervals along the movement direction T, and the sensor 3 is a plane on the end 8 side of the object 7 to be inspected. It arrange | positions to a visual side and opposes the edge 8 of the to-be-inspected object 7. FIG. And the sensor 3 is a one-dimensional displacement sensor which measures the distance to the edge 8 indirectly, for example using light, a sound wave, or magnetism.

  The distance detection unit 2 detects the information corresponding to the distance from the sensor 3 to the edge 8 by measuring the distance with the sensor 3, and outputs the detection result (detected information) to the information processing unit 1. doing.

  In the following description, the three sensors 3 will be described with reference to the state shown in FIG. 2, the sensor closest to the one end 9 of the edge 8 is defined as the first sensor 3, and the sensor closest to the other end 10 is defined as the first sensor 3. The third sensor 3 is the first sensor 3 and the third sensor 3 is the second sensor 3.

  The information processing unit 1 is mainly composed of an arithmetic device such as a computer, and the straight line of the edge 8 is obtained by performing information processing such as arithmetic processing and calculation processing using the detection result from the distance detection unit 2. Seeking a degree.

  The information processing unit 1 receives information corresponding to the operation of the moving unit 4 from the moving operation output unit 6, and the information processing unit 1 performs the inspection by the moving unit 4 based on the input information. The amount of movement of the object 7 is estimated.

  Then, the information processing unit 1 determines the timing at which the distance detection unit 2 performs the detection operation based on the estimated movement amount (estimated movement amount) of the inspection object 7, and at the determined timing, the distance detection unit 2 is controlled to perform the detection operation. Therefore, the information processing unit 1 not only obtains the linearity but also adjusts the control unit that controls the detection operation of the distance detection unit 2 and the operation timing of the distance detection unit 2 such as making the detection operation correspond to the movement operation. And also part.

  Hereinafter, the linearity inspection method will be described based on the processing flow shown in FIG. 3, but the flow of the detection operation (operation timing) by the distance detection unit 2 will be described first, and information processing for obtaining the linearity from the detection result will be described later. To do.

  In this method, as shown in FIG. 2, the position at which the first sensor 3 detects the edge 8 for the first time is defined as the start position on the one end 9 side, and a straight line extends from the start position. The inspection of the degree will be started. Then, as shown in FIG. 3, the first detection operation (initial measurement) is performed at the start position.

  Furthermore, since the distance measurement by the sensor 3 is performed instantaneously, each sensor 3 measures the distance to a different point on the edge 8 without stopping the conveyance of the inspection object 7 by the moving means 4. It is possible to do.

  In addition, after the first measurement, the information processing unit 1 causes the distance detection unit 2 to perform the second time when the estimated movement amount from the position of the first measurement becomes substantially the same value as the interval L aligned along the movement direction T of the sensor 3. Perform detection operation.

  At this time, since the detection operation is performed in a state where the sensor 3 is moved by the interval L, the first sensor 3 measures the detection point measured by the second sensor 3 at the first measurement, and the second sensor 3 The detection point measured by the third sensor 3 is measured. Then, the third sensor 3 measures a new detection point.

  After the second measurement, the information processing section 1 causes the distance detection section 2 to perform the third detection operation when the estimated movement amount from the position of the second measurement becomes substantially the same value as the interval L where the sensors 3 are arranged. Then, the information processing unit 1 causes the distance detection unit 2 to repeatedly perform the detection operation according to the estimated movement amount until the third sensor 3 cannot detect the edge 8 of the inspection object 7.

  Therefore, the distance detection unit 2 measures the edge 8 of the inspected object 7 a plurality of times at substantially equal intervals from the one end 9 side to the other end 10 side, and has been measured at the time of the previous measurement during the second and subsequent detection operations. These detection points are measured again by the first sensor 3 and the second sensor 3. As shown in FIG. 4, the distance detection unit 2 outputs, to the information processing unit 1, information obtained by collecting the measurement results of the three sensors 3 for each detection operation.

  Further, the number of detection points of the edge 8 detected by the distance detection unit 2 is an integer obtained by dividing the dimension of the range for obtaining the linearity that is substantially the entire length of the edge 8 by the interval L of the sensor 3 (this example). Then 11). The number of times that each sensor 3 performs the detection operation is the number of times obtained by further subtracting the value obtained by subtracting 1 from the number of sensors 3 (2 in this example) from the number of detection points (9 times in this example). Yes. Note that the interval L in which the sensors 3 are arranged is preferably set so that an integral multiple of the interval L is substantially the entire length of the edge 8.

  Hereinafter, the information processing for obtaining the linearity will be described. For convenience of explanation, as shown in FIG. 2, the respective detection points are arranged in order from the one end 9 side to the other end 10 side, respectively, a first detection point P1, a second detection point P2, a third detection point P3, ... It distinguishes as the 11th detection point P11.

  The information processing unit 1 stores the detection results output for each detection operation and, as shown in FIG. 5, creates an image diagram in which the detection results are superimposed and the measurement results are plotted for each detection point. Then, when the measurement to the other end 10 side of the end side 8 is completed and an image diagram of the end side 8 is created from the one end 9 side to the other end 10 side, as shown in FIG. The linearity is obtained from the measurement results and the created image diagram.

  The image diagram is created after the second measurement and stored in the information processing unit, and is updated every time a detection result is obtained (every measurement). In the image diagram, the measurement results of the respective detection points (two points) measured in duplicate are overlapped with the first measurement result as a reference, and the respective detection results are arranged side by side.

Specifically, the measurement result of the second detection point P2 measured by the first sensor 3 during the second measurement is superimposed on the measurement result of the second detection point P2 measured by the second sensor 3 during the first measurement. Then, the measurement result of the third detection point P3 measured by the second sensor 3 during the second measurement is superimposed on the measurement result of the third detection point P3 measured by the third sensor 3 during the first measurement.

  Furthermore, by superimposing the measurement results of the second detection point P2 and the third detection point P3, the measurement result of the fourth detection point P4 measured by the third sensor 3 during the second measurement is the first detection point P1. The position is defined relative to the measurement result. Therefore, the detection points from the first detection point P1 to the fourth detection point P4 are connected by connecting with a line.

  In addition, when the third measurement is performed, the measurement result at the time of measurement is further superimposed on the image diagram arranged by connecting the first detection point P1 to the fourth detection point P4. The line up to the fifth detection point P5 is connected, and the line connecting the detection points in the image diagram becomes longer. That is, the image diagram is a so-called bead-connected diagram in which the measurement results of the respective detection points are relatively connected with the first detection point as a reference, and the line connecting the detection points is the shape in plan view of the edge 8. Is schematically shown.

  In addition, after the image diagram is created, the information processing unit 1 calculates a virtual reference straight line S from the image diagram in which the detection point on the one end 9 side to the detection point on the other end 10 side are continuously connected, and detects the detection point. The straightness is obtained by comparing the connecting line with the reference straight line S.

  Specifically, as shown in FIG. 5, a virtual straight line passing through the first detection point P1 and the eleventh detection point P11 is calculated, and the straight line is set as a reference straight line S. Then, as shown in the image diagram, from the measurement result of each detection point whose position is relatively defined, a detection point farthest in the direction orthogonal to the reference straight line S is obtained, and the reference straight line S is obtained from the obtained detection point. Calculate the distance up to. Further, the calculation result is output as the straightness of the edge 8 to an external device such as a production device for the inspection object 7 or a display means.

  In this way, by measuring the edge 8 a plurality of times by the distance detection unit 2 while moving the inspection object 7, the number of sampling points (number of detection points) of the edge 8 is made larger than the number of sensors 3, The straightness of the edge 8 can be obtained.

  Therefore, compared with the prior art device in which the same number of the sensors 3 as the number of sampling points in this example are arranged, an increase in equipment cost of the inspection apparatus can be suppressed and substantially the same inspection accuracy can be obtained.

  In addition, the detection points at the time of multiple measurements are overlapped with those at the previous measurement, and the measurement results of the detection points measured at the same time are overlapped, so that the detection results of multiple times can be made to correspond to each other. .

  Therefore, at the time of information processing such as when creating an image diagram, it is possible to correct the variation in the inclination of the edge 8 with respect to the moving direction T in the detection result for each measurement. Since the inclination can be corrected, it is possible to suppress a decrease in inspection accuracy associated with the meandering of the inspection object 7 during movement during the inspection, and the presence / absence of meandering and the edge 8 for each measurement accompanying meandering. It is also possible to grasp a change in the inclination of the.

  In addition, since the image diagram is created, the reference straight line S can be obtained by information processing, and the linearity can be obtained without arranging a straight member or the like to be the reference straight line S on the side of the object 7 in plan view. Can be sought. Therefore, it is possible to reduce the management cost, installation cost, and the like of the reference straight line S while suppressing a decrease in inspection accuracy. Since a line imitating the edge 8 can be obtained from the image diagram, the line can be used as an index of linearity, and the operator can visually recognize the linearity.

  Further, since the conveying means of the production apparatus also serves as the moving means 4, the inspection apparatus can be placed in the middle of the production line without reducing the number of sampling points and the measurable range (upper limit of the total length of the measurable edge 8). An increase in the transport distance when incorporated into the can be suppressed.

  Specifically, the increment of the transport distance in the production process that occurs when the line is assembled is the width in which all the sensors 3 are arranged along the moving direction T (the sum of the distances L between the sensors 3), which is greater than the total length of the inspection object 7 Compared to the increasing conventional one, the transport distance can be suppressed.

  Since the inspection timing (detection operation timing) corresponds to the operation of the conveying means such as the rotation speed of the roller 5, the linearity can be inspected by being arranged during the production process.

  Therefore, even if it is incorporated in the production line, the restriction on the installation location can be relaxed, the increase in production time can be suppressed, and the inspection apparatus can be incorporated while suppressing the burden on the line and the increase in cost.

The inspection apparatus includes a workpiece sensor to detect the position of the object 7 in the mobile (not specifically shown). The work sensor outputs information corresponding to the position of the inspected object 7 to the information processing unit 1 so that the information processing unit 1 grasps an actual measurement value of the amount of movement of the inspected object 7 during movement. ing.

  Then, the information processing unit 1 compares the information from the work sensor with the estimated movement amount, and thereby the error of the actually measured value with respect to the set value (estimated movement amount) in the movement amount of the inspection object 7 at the time of movement. Information on presence / absence and error amount is obtained. Furthermore, the information processing unit 1 sets the operation timing so that the detection operation is performed when the measured value of the inspection object 7 becomes substantially the same as the set value based on the obtained information such as the presence or absence of the error and the amount. Control to adjust.

  Therefore, the work sensor and the information processing unit 1 constitute a deviation detection unit that detects a deviation between the set value of the movement amount of the inspection object 7 and the actual measurement value, and the information processing unit 1 further detects the detection result of the deviation detection unit. It also serves as an adjustment unit that adjusts the operation timing according to the above.

  As described above, by providing the deviation detection unit, the actual movement amount of the inspection object 7 is set to the movement amount such as the movement amount of the movement means 4 due to the slip of the inspection object 7 with respect to the movement means 4. The shift of the movement amount can be detected when it becomes smaller than. Then, by detecting the shift of the movement amount, it is possible to reduce an error in the detection result accompanying the shift of the movement amount, and to improve the accuracy of the linearity inspection. The deviation detection unit is not limited to the illustrated configuration, and includes a calculation device that is different from the information processing unit 1, and outputs a result of calculating an error or the like by the calculation device to the information processing unit 1. Also good. And it is good also as what starts a linearity test | inspection by detecting a start position with a work sensor.

  In addition, this linearity inspection method may be one that outputs an approximate expression of a curve connecting measurement results in an image diagram as an index of linearity, or one that outputs an image diagram as an index of linearity.

  In the above description, for convenience, information processing for updating the image diagram is performed for each measurement. However, the processing for creating the image diagram is omitted, and information that summarizes each measurement result for each measurement is calculated and processed. The degree may be obtained. And what produces an image figure after the measurement of the edge 8 or what does not memorize | store the information which summarized each measurement result for every measurement may be sufficient. Further, the linearity inspection method is not limited to the method of measuring each detection point while moving the inspection object 7, but may be a method of stopping the moving operation by the moving means 4 for each measurement.

  Further, the distance detection unit 2 may be configured such that four or more sensors 3 are arranged in the moving direction T. In the case where four or more sensors 3 are provided, the distance L between the sensors 3 may not be equal.

  In this case, with one of the intervals L of the sensor 3 as a reference, the remaining intervals are separated by an integral multiple of the reference interval. The period (estimated movement amount) at which the detection operation is performed is an integral multiple of a value obtained by subtracting 3 or more from the number of sensors 3 as a reference interval. Therefore, even if the inspection object 7 meanders, it is possible to inspect the linearity of the edge 8 while suppressing a decrease in inspection accuracy.

DESCRIPTION OF SYMBOLS 1 Information processing part 2 Distance detection part 3 Sensor 4 Moving means 7 Inspected object 8 End side 9 One end 10 Other end T Movement direction L Sensor arrangement interval

Claims (1)

An inspection method for inspecting the linearity of an edge in a plan view of an inspection object using an inspection device,
The inspection device includes:
Moving means for moving the inspection object from one end side to the other end side of the end side ;
A distance detection unit for detecting a distance to the edge of the inspection object in motion;
An information processing unit for obtaining a linearity of the edge from the detection result of the distance detection unit,
The distance detection unit has at least three sensors arranged at equal intervals along the moving direction of the inspection object by the moving unit,
The moving means has a moving operation output unit that outputs information corresponding to the operation of the moving means,
The information processing unit
Based on the information output from the moving operation output unit, obtain an estimated movement amount of the inspection object by the moving means,
Each time the estimated movement amount becomes the same value as the interval in the movement direction of the sensor, each sensor of the distance detection unit performs a distance detection operation to the end side,
Among the measurement results measured at a plurality of detection points, the measurement results of the respective detection points measured in duplicate are overlapped and plotted, and the respective detection results are arranged and plotted from one end to the other end of the inspection object. Create an image up to
The reference line is obtained by connecting the detection points at one end and the other end of the edge of the inspection object in this image diagram,
Comparing this reference line and the image diagram, calculating the linearity by obtaining the detection point furthest away in the direction orthogonal to the reference straight line, and outputting the linearity so as to be visible,
The inspection device includes:
A work sensor for detecting the position of the inspection object in motion;
The information processing unit
Based on the position information of the inspection object output from the work sensor and the estimated movement amount, a shift between the actual movement amount of the inspection object and the estimated movement amount is detected,
A linearity inspection method characterized by performing control for adjusting the operation timing of the detection operation of the distance detection unit in accordance with the detection result of the deviation.

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