JP5864196B2 - Vibrator - Google Patents

Description

    The present invention relates to a vibrator.

  2. Description of the Related Art In recent years, a piezoelectric vibrator using a vibrator piece made of a piezoelectric material such as quartz is used as a time source, a control signal timing source, a reference signal source, and the like in mobile phones and portable information terminal devices.

  5A and 5B are diagrams for explaining a conventional vibrator, in which FIG. 5A is a top view of the conventional vibrator, and FIG. 5B is a front view. FIG. 6 is a diagram for explaining the vibrator piece. As shown in FIG. 6, the vibrator is applied with an adhesive 103 on a ceramic base 102, and the vibrator piece 101 is fixed to the base 102 by mounting the vibrator piece 101 on the adhesive 103. ing. The vibrator piece 101 has a tuning fork shape in which a pair of vibrating legs 101b is extended from a base 101a, and an electrode 101c for vibrating the vibrator piece 101 and adjusting the frequency is formed on the surface thereof. ing. The base 102 on which the vibrator piece 101 is mounted is hermetically sealed with a metal cap 104. In addition, a manufacturing lot for tracing the manufacturing lot is printed by laser irradiation at the center of the metal cap 104.

  As the cap 104, in recent years, there has been an increasing need for cost reduction of vibrators, and glass caps and ceramic caps have also been proposed (see, for example, Patent Documents 1 and 2).

JP-A-10-256415 JP 2010-56930 A

  Ceramic caps and glass caps have the property of transmitting laser during printing by laser irradiation, and when laser printing is performed at the center of the cap, the electrodes formed on the vibrator piece may be trimmed. In addition, when a ceramic cap is irradiated with a laser, the binder contained in the ceramic is heated, part of which is gasified and the degree of vacuum in the space for mounting the vibrator piece formed by the base and the cap deteriorates. It may occur. When these phenomena occur, the vibrator has a problem in that the frequency and CI value (equivalent series resistance) fluctuate and affect the vibrator characteristics.

  Furthermore, depending on the conditions of laser irradiation, the irradiated laser passes through the cap and the base, and damages the jig that positions and fixes the vibrator during laser irradiation.

  In view of the above-described problems, the present invention provides a vibrator that does not affect the vibrator characteristics of the vibrator frequency and CI value during printing by laser irradiation, and does not damage the jig on which the vibrator is mounted. The purpose is to provide.

In a method of manufacturing a vibrator in which a vibrator piece is hermetically sealed in a cavity formed between a base substrate and a cap that are bonded to each other, the base substrate and the cap are bonded together after the base substrate and the cap are bonded. A method of manufacturing a vibrator that prints the cap surface with a laser on the joint.

The vibrating piece is formed of a base and at least two vibrating legs extending from the base, and a method of manufacturing a vibrator that prints on the base side of the vibrating leg.

A method of manufacturing a vibrator in which a fixed leg arranged at a predetermined interval from a vibrating leg is extended from a base.

A method of manufacturing a vibrator in which a base substrate and a cap are joined with a metal brazing material.

  In the present invention, by performing printing by laser irradiation at a position corresponding to the base and cap joint, trimming of the electrode formed on the crystal piece and deterioration of the vacuum degree due to release of gas contained in the cap are suppressed, and the frequency and CI value are reduced. Variation can be reduced.

  In the present invention, by further making the printing by laser irradiation on the base side, when the electrode is trimmed, the vibration leg tip having a large frequency fluctuation can be avoided, and even if the laser printing is removed from the joint, the frequency, CI value fluctuation can be reduced.

  By joining the base substrate and the cap with a metal brazing material, laser transmission can be suppressed to the jig on which the vibrator is mounted, and damage to the jig can be prevented.

The figure for demonstrating the vibrator | oscillator in this invention. The figure for demonstrating another form of the printing location of the vibrator | oscillator of this invention. The figure for demonstrating the vibrator element of Example 2 of this invention. The figure for demonstrating the vibrator | oscillator of Example 2 of this invention. The figure for demonstrating the conventional vibrator | oscillator. The figure for demonstrating a vibrator piece.

  The vibrator of the present invention will be described with reference to the drawings, taking a tuning fork type crystal vibrator as an example. 1A and 1B are diagrams for explaining a vibrator according to the present invention. FIG. 1A is a top view of a conventional vibrator, and FIG. 1B is a front view. The vibrator piece of the vibrator of this embodiment is the same as the vibrator piece of the prior art, and will be described with reference to FIG. The vibrator piece 101 is made of quartz, and a pair of vibrating legs 101b is extended from the base 101a, and electrodes 101c for vibrating the vibrator piece 101 and adjusting the frequency are formed on the surface thereof. The vibrator piece 101 is fixed to the base substrate 12 with an adhesive 13 applied on the ceramic base substrate 12. A cap 14 in which a cavity 14a for sealing the vibrator piece 101 is hermetically sealed is joined to the base substrate 12, and the vibrator piece 101 is hermetically sealed. Further, a discrimination symbol such as a production lot is engraved as a print 16 on the surface of the cap 14.

  Next, a method for manufacturing the vibrator will be described. First, the base substrate 12 is prepared, the adhesive 13 is applied to the base substrate 12, and the vibrator piece 101 is mounted. In a state where the vibrator piece 101 is mounted on the base substrate 12, a part of the electrode 101c of the vibrator piece 101 is removed, or an additional electrode is formed to adjust the frequency so that a desired oscillation frequency is obtained. After performing the frequency adjustment, the base substrate 12 on which the vibrator piece 101 is mounted and the cap 14 are bonded in a vacuum, and the vibrator piece 101 is hermetically sealed. A metal brazing material 15 is formed on each of the base substrate 12 and the cap 14 at a position corresponding to the joint portion, and the base substrate 12 and the cap 14 are joined by melting the brazing material 15. As the brazing material 15, an Au—Sn alloy is mainly used. The vibrator manufactured as described above is subjected to characteristic inspections such as frequency and CI value, and a manufacturing lot is printed by laser irradiation to be completed.

  The printing of the production lot by laser irradiation is performed at a position corresponding to the short side above the joint between the base substrate 12 and the cap 14 on the base 101 a side of the vibrator piece 101. By printing on the joint between the base substrate 12 and the cap 14, it is possible to prevent a part of the electrode 101c formed on the vibrator piece 101 from being removed, and the gas generated from the cap 14 is also contained in the cavity 14a. Can be suppressed, and fluctuations in the frequency and CI value of the vibrator can be reduced.

  Furthermore, by performing printing on the base 101a side of the vibrator piece 101, even if the print 16 is slightly deviated from the joint, it is not the electrode 101c on the vibration leg 101b side that most affects the frequency fluctuation, but the influence. It is only necessary to remove the electrode 101c formed on the base portion 101a with a small amount of vibration, and fluctuations in the frequency and CI value of the vibrator can be reduced. Here, in this embodiment, the printing 16 is performed on the short side of the cap 14, but the surface of the cap 14 on the joint between the base substrate 12 and the cap 14 may be used, and the effect is more effective particularly on the base 101 a side. Is big. FIG. 2 is a diagram for explaining another form of the printed portion of the vibrator of the present invention. As shown in FIG. 2, the print 16 may be formed on the long cap piece on the base side of the vibrator.

  Further, the base substrate 12 and the cap 14 are joined with a metal brazing material 15, so that even when the laser passes through the cap 14, the laser is reflected or absorbed by the brazing material 15, and the base substrate 12 or the laser is irradiated. It does not penetrate to the jig that positions and fixes the vibrator 101, and damage to the jig can be prevented.

  In this embodiment, a YVO4 laser is used as the laser for performing the printing 16. The YVO4 laser has a relatively short wavelength of 532 nm. The laser having a wavelength of 532 nm has a characteristic that it is harder to transmit than the commonly used 1064 nm wavelength, and the laser can be prevented from passing through the cap 14 and is useful for solving the problems of the present invention. In this embodiment, a YVO4 laser is used. However, the shorter the wavelength of the laser, the harder it is to transmit, and a YAG laser or the like may be used if the wavelength is short. However, since a laser beam of less than 532 nm is expensive, it is expensive to manufacture electronic parts such as vibrators. In this embodiment, a 532 nm laser beam is used.

  Next, another embodiment of the vibrator of the present invention will be described. FIG. 3 is a diagram for explaining the vibrator piece according to the second embodiment of the present invention. FIGS. 4A and 4B are diagrams for explaining the vibrator according to the second embodiment of the present invention, in which FIG. 4A is a top view and FIG. 4B is a front view. The vibrator piece 21 has a pair of vibrating legs 21b extending from the base 21a. Further, a fixed leg 21d that is arranged at a predetermined interval from the vibrating leg 21b extends from the base 21a. An electrode 21c for vibrating the vibrator piece 21 and adjusting the frequency is formed on the surface of the vibrator piece 21. In the vibrator piece 21 of this embodiment, a part of the fixed leg 21 d is bonded and fixed to the base substrate 22 with an adhesive 23. The base substrate 21 and the cap 24 have the same structure as in the first embodiment, and also in this embodiment, the vibrator piece 21 is hermetically sealed by the base substrate 22 and the cap 24. The manufacturing process is the same as that in the first embodiment.

  As shown in FIG. 4, the marking of the print 26 by the laser irradiation to the cap 24 is performed at a position corresponding to the short side of the base substrate 22 on the base portion 21a side of the vibrator piece 21 and the joint portion of the cap 24. By performing printing, the same effects as those described in Example 1 can be obtained.

  As described above, the vibrator of the present invention has been described by taking two types of vibrator pieces as an example. However, the present invention is not limited to this embodiment, and printing is performed on the cap surface corresponding to the joint between the base substrate and the cap. Needless to say, it is better to print at a position where the influence on the vibrator characteristics is low when the electrode of the vibrator piece is removed.

DESCRIPTION OF SYMBOLS 12 Base substrate 13 Adhesive 14 Cap 14a Cavity 15 Brazing material 16 Printing 21 Vibrating piece 21a Base 21b Vibrating leg 21c Electrode 21d Fixed leg 22 Base substrate 23 Adhesive 24 Cap 26 Printing 101 Vibrating piece 101a Base 101b Vibrating leg 101c Electrode 102 Base substrate 103 Adhesive 104 Cap

Claims (4)

In a method of manufacturing a vibrator in which a vibrator piece is hermetically sealed in a cavity formed between a base substrate and a cap that are bonded to each other, and after the base substrate and the cap are bonded, A method of manufacturing a vibrator, wherein the surface of the cap, which is on a joint with the cap, is printed with a laser. 2. The method of manufacturing a vibrator according to claim 1, wherein the vibration piece includes a base and at least two vibration legs extending from the base, and printing is performed on a base side of the vibration legs. . The method of manufacturing a vibrator according to claim 2, wherein a fixed leg arranged at a predetermined interval from the vibrating leg is extended from the base portion. 4. The method for manufacturing a vibrator according to claim 1, wherein the base substrate and the cap are joined with a metal brazing material. 5.

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