JP5862884B2 - Decontamination method and decontamination system - Google Patents

Description

  In the present invention, the hydrogen peroxide aqueous solution is evaporated in the carrier air supplied through the air supply path in the gas generating means to generate hydrogen peroxide gas, and the hydrogen peroxide gas generated by the gas generating means is decontaminated. The present invention relates to a decontamination method for supplying decontamination target chambers together with carrier air to a decontamination target chamber as carrier gas through a gas conveyance path, and a decontamination system used for implementing the decontamination method.

  Specifically, for decontamination using hydrogen peroxide gas as a decontamination gas, a wet process in which hydrogen peroxide gas (that is, hydrogen peroxide vapor) supplied to the decontamination target chamber together with carrier air is condensed in the decontamination target chamber. There are decontamination and dry decontamination in which the hydrogen peroxide gas supplied to the decontamination target chamber together with the carrier air is maintained in a gas phase state without being condensed in the decontamination target chamber. The decontamination method for decontaminating the chamber to be decontaminated while preventing the corrosion of the indoor object by the highly corrosive hydrogen peroxide gas condensate by not condensing the hydrogen peroxide gas in the chamber to be decontaminated, and its decontamination The present invention relates to a decontamination system used for carrying out a dyeing method.

  Conventionally, with respect to this type of decontamination (especially dry decontamination), an aqueous hydrogen peroxide solution is evaporated in carrier air in a gas generating means to generate hydrogen peroxide gas, whereas a carrier supplied to the gas generating means A dehumidifying means for dehumidifying the air and a heating means for heating the carrier air are provided, and a plurality of temperature measuring means are provided in the gas conveying direction in the gas conveying path for conveying the hydrogen peroxide gas generated by the gas generating means together with the carrier air. There has been proposed a decontamination system that is arranged side by side and adjusts the heating means based on the difference in temperature measured by these temperature measuring means (see Patent Document 1).

  In other words, in this decontamination system, the carrier air is dehumidified and heated to promote the evaporation of the hydrogen peroxide solution in the gas generating means, and based on the difference in temperature measured by the plurality of temperature measuring means. It is determined whether or not the aqueous solution has completely evaporated. If the aqueous solution has not completely evaporated, the heating temperature of the carrier air by the heating means is increased to completely evaporate the aqueous hydrogen peroxide solution. .

JP 2003-339829 A

However, in the above-described conventional system, although the carrier air is dehumidified, moisture is generated due to evaporation of the hydrogen peroxide solution in the gas generating means (that is, evaporation of the solvent water) and moisture due to decomposition of the hydrogen peroxide gas after the generation. Occurrence (that is, moisture generation represented by 2H ₂ O ₂ → 2H ₂ O + O ₂ ) is a factor that increases the absolute humidity in the decontamination target room, and in particular, the indoor air in the decontamination target room is circulated through the circulation path. In the air circulation type decontamination system adopting the gas supply form in which the hydrogen peroxide gas generated by the gas generating means is supplied together with the carrier air to the circulation chamber air in the circulation path through the gas transport path as described above. Since the generated water is accumulated in the circulation system, the absolute humidity tends to increase particularly in the decontamination target room.

  On the other hand, the hydrogen peroxide gas has a higher absolute humidity x in the decontamination target chamber even at the same concentration, as shown by the isoconcentration line c1 and the isoconcentration line c2 in the wet air diagram of FIG. Condensation temperature td becomes high and condensation easily occurs. Therefore, in the above-described conventional system, even if the hydrogen peroxide aqueous solution can be completely evaporated in the gas conveyance path, the decontamination target due to the generation of moisture as described above. There is a possibility that condensation of hydrogen peroxide gas may occur in the decontamination target chamber due to an increase in the absolute humidity of the chamber, and there is a problem that stability and reliability of dry decontamination are low.

  In addition, since the above-described conventional system is equipped with a dehumidifying means for dehumidifying the carrier air, there is a problem that the system is enlarged and the initial cost and the running cost are high. In order to prevent the condensation of the hydrogen peroxide gas, which is caused by dehumidification of the carrier air, a dehumidifying means having a large dehumidifying capacity that can sufficiently cope with moisture generation as described above is required. As a result, there is a problem that the system is further increased in size and the initial cost and running cost are further increased.

  In view of this situation, the main problem of the present invention is to effectively solve the above problems by adopting a rational control method.

The first characteristic configuration of the present invention relates to a decontamination method,
In the gas generation means, hydrogen peroxide aqueous solution is evaporated in the carrier air supplied through the air supply path to generate hydrogen peroxide gas,
A decontamination method for decontaminating a decontamination target chamber by supplying the hydrogen peroxide gas generated by the gas generation means as a decontamination gas to the decontamination target chamber through a gas conveyance path together with carrier air,
Provide a heating means to heat the decontamination target chamber,
While adjusting the amount of hydrogen peroxide gas generated in the gas generating means to adjust the hydrogen peroxide gas concentration in the decontamination target chamber to the target concentration,
Based on the measured absolute humidity in the decontamination target chamber and the target concentration, the condensation temperature of the hydrogen peroxide gas in the decontamination target chamber is calculated in the measured absolute humidity state and the hydrogen peroxide gas concentration is the target concentration. do it,
The temperature of the decontamination target chamber is adjusted to a temperature higher than the calculated condensation temperature by adjusting the heating output of the heating means based on the calculated condensation temperature.

  That is, the condensation temperature td of the hydrogen peroxide gas in the decontamination target chamber can be obtained from the absolute humidity x of the decontamination target chamber and the hydrogen peroxide gas concentration c in the decontamination target chamber as shown in FIG. When the absolute humidity x and the hydrogen peroxide gas concentration c in the dyeing target chamber are at certain values, if the temperature t of the decontamination target chamber is higher than the condensation temperature td of the hydrogen peroxide gas in that state, In the decontamination target chamber in that state, the hydrogen peroxide gas is basically not condensed.

  Therefore, according to the decontamination method described above, the hydrogen peroxide gas concentration in the chamber to be decontaminated is adjusted to the target concentration, whereas the decontamination in the measured absolute humidity state and the hydrogen peroxide gas concentration at the target concentration. By calculating the condensation temperature of the hydrogen peroxide gas in the dyeing target chamber and adjusting the heating output of the heating means, the temperature of the decontamination target chamber is adjusted to a temperature higher than the calculated condensation temperature. Condensation of hydrogen oxide gas can be almost certainly prevented, thereby improving the stability and reliability of dry decontamination.

  Further, since the condensation of the hydrogen peroxide gas in the decontamination target chamber is prevented by adjusting the temperature of the decontamination target chamber in this way, a dehumidifying means for dehumidifying the carrier air is unnecessary or even if equipped. The capacity of the dehumidifying means can be used, thereby reducing the size of the decontamination system and effectively reducing the initial cost and the running cost.

The second feature configuration of the present invention relates to the decontamination method of the first feature configuration,
Supplying only fresh air as carrier air to the gas generating means through the air supply path;
As the hydrogen peroxide gas generated by the gas generating means is supplied to the decontamination target chamber through the gas transport path together with fresh air as carrier air, the interior of the decontamination target chamber has an air volume substantially equal to the supplied air volume. By discharging the air to the outside through the exhaust path, fresh air as carrier air is allowed to pass through the decontamination target chamber temporarily.

  According to this decontamination method, the moisture generated by the evaporation of the hydrogen peroxide solution in the gas generation means and the moisture generated by the decomposition of the hydrogen peroxide gas after the generation are temporarily passed to the decontamination target chamber. The fresh air to be removed can be efficiently excluded from the decontamination target chamber, and the increase in absolute humidity of the decontamination target chamber due to the generated moisture can be effectively suppressed.

  And by suppressing the increase in absolute humidity x in the decontamination target chamber in this way (see FIG. 2), the hydrogen peroxide gas condensation temperature td in the decontamination target chamber can be lowered, While reducing the energy consumption of the heating means required to adjust the temperature t of the chamber to be decontaminated to a temperature higher than the calculated condensation temperature td and making the dehumidifying means for dehumidifying the carrier air unnecessary or reducing the capacity, Condensation of the hydrogen peroxide gas in the decontamination target chamber can be more reliably prevented by adjusting the temperature of the decontamination target chamber described above and passing the fresh air as described above.

  In FIG. 3, the thick solid line graph and the thick broken line graph indicate the change in the hydrogen peroxide gas concentration c in the decontamination target chamber and the absolute humidity x in the decontamination target chamber in the decontamination method of the second characteristic configuration. Shows changes.

  In addition, the thin solid line graph and the thin broken line graph show that hydrogen peroxide gas generated by the gas generating means is circulated in the circulation path through the gas conveyance path together with the carrier air in the configuration in which the indoor air of the decontamination target chamber is circulated through the circulation path. Decontamination by an air circulation type decontamination method that adopts a gas supply mode for supplying indoor air (that is, a mode in which at least a part of each of the supplied hydrogen peroxide gas and carrier air is circulated to the decontamination target chamber). A change in the hydrogen peroxide gas concentration c ′ in the target room and a change in the absolute humidity x ′ in the decontamination target room are shown.

  From the graph of FIG. 3, it can also be seen that according to the decontamination method of the second characteristic configuration, the increase in absolute humidity x in the decontamination target chamber can be effectively suppressed.

  In carrying out this decontamination method, the fresh air as the carrier air does not adversely affect the decontamination of the decontamination target chamber, and prevents the increase in absolute humidity of the decontamination target chamber with respect to the generation of moisture as described above. As long as the air is obtained, any fresh air may be used regardless of outside air, indoor air, or purified air.

  Further, in the decontamination method of the second feature configuration, fresh air is temporarily passed through the decontamination target chamber as the carrier air. However, in carrying out the decontamination method of the first feature configuration, the decontamination target In a configuration in which the room air is circulated through the circulation path, the hydrogen supply gas generated by the gas generating means is supplied to the circulation room air in the circulation path through the gas conveyance path together with the carrier air (that is, supplied) A mode in which at least a part of each of the hydrogen peroxide gas and the carrier air is circulated to the decontamination target chamber may be employed.

  In that case, fresh air is supplied as carrier air to the gas generation means, and the fresh air is supplied together with the generated hydrogen peroxide gas to the circulation chamber air in the circulation path through the gas conveyance path, whereas the supply air volume is It is desirable that the circulation room air having substantially the same air volume is discharged to the outside through the exhaust passage, and in this gas supply mode, the air volume ratio of the supplied fresh air in the circulation air volume of the circulation room air is as large as possible.

The third characteristic configuration of the present invention relates to a decontamination system,
Gas generation means for generating hydrogen peroxide gas by evaporating the aqueous hydrogen peroxide solution in the carrier air supplied through the air supply path,
A decontamination system for decontaminating a decontamination target chamber by supplying the hydrogen peroxide gas generated by the gas generating means as a decontamination gas to the decontamination target chamber through a gas transport path together with carrier air,
A heating means for heating the decontamination target chamber, a humidity measurement means for measuring the absolute humidity of the decontamination target chamber, and a temperature measurement means for measuring the temperature of the decontamination target chamber are provided,
While providing a concentration control means for adjusting the amount of hydrogen peroxide gas generated in the gas generating means to adjust the hydrogen peroxide gas concentration in the decontamination target chamber to a target concentration,
Based on the absolute humidity measured by the humidity measuring means and the target concentration, the condensation temperature of the hydrogen peroxide gas in the decontamination target chamber in the measured absolute humidity state and the hydrogen peroxide gas concentration at the target concentration is calculated. The temperature control means for adjusting the temperature of the decontamination target chamber to a temperature higher than the calculated condensation temperature by adjusting the heating output of the heating means based on the calculated condensation temperature and the temperature measured by the temperature measuring means. It is in the point provided.

  According to this decontamination system, the concentration control unit adjusts the hydrogen peroxide gas concentration in the decontamination target chamber to the target concentration, whereas the temperature control unit adjusts the hydrogen peroxide gas concentration in the measured absolute humidity state. Since the condensation temperature of the hydrogen peroxide gas in the decontamination target chamber in the state of the target concentration is calculated and the temperature of the decontamination target chamber is adjusted to a temperature higher than the calculated condensing temperature, the above-described first characteristic configuration The decontamination method can be carried out easily and stably.

The fourth characteristic configuration of the present invention relates to the decontamination system of the third characteristic configuration,
The air supply path is an air path that supplies only fresh air to the gas generating means as carrier air,
As the hydrogen peroxide gas generated by the gas generating means is supplied to the decontamination target chamber through the gas transport path together with fresh air as carrier air, the room of the decontamination target chamber has an air volume substantially equal to the supplied air volume. An exhaust path for exhausting air to the outside is provided, and fresh air as carrier air is configured to pass through the decontamination target chamber temporarily.

  According to this decontamination system, the decontamination method having the second characteristic configuration described above can be implemented.

The fifth feature configuration of the present invention relates to the decontamination system of the third or fourth feature configuration,
The temperature control means sets the temperature of the decontamination target chamber by adjusting the heating output of the heating means based on the temperature measured by the temperature measuring means, with a temperature that is higher than the calculated condensing temperature by an estimated temperature difference as a target temperature. The point is that the temperature is adjusted to the target temperature.

  That is, even when the temperature of the chamber to be decontaminated (that is, the temperature of the indoor air) is adjusted to be higher than the condensation temperature of the hydrogen peroxide gas, the surface temperature of the chamber wall surface or the surface of the indoor article is excessive. When a location lower than the condensation temperature of the hydrogen oxide gas is locally present in the decontamination target chamber, the hydrogen peroxide gas may be locally condensed at that location.

  When the outside air is used as the carrier air, the absolute humidity of the decontamination target chamber fluctuates with the humidity fluctuation of the outside air, and the condensation temperature of the hydrogen peroxide gas fluctuates due to the fluctuation of the absolute humidity. There is a possibility that condensation of hydrogen peroxide gas may occur unexpectedly in the decontamination target chamber by delaying the temperature adjustment of the decontamination target chamber by adjusting the heating output.

  On the other hand, according to this decontamination system, as the expected temperature difference, in the decontamination target chamber due to the temperature difference between the temperature of the decontamination target chamber and the surface temperature of each part in the decontamination target chamber or the humidity fluctuation of the outside air If an appropriate temperature difference is set in consideration of the fluctuation range of the hydrogen peroxide gas condensation temperature, local condensation of hydrogen peroxide gas at locations where the surface temperature is low as described above, and humidity fluctuations in the outside air. It is possible to prevent accidental condensation of the hydrogen peroxide gas.

  In other words, this eliminates the need for a dehumidifying means for dehumidifying the carrier air, while reducing the capacity of the hydrogen peroxide gas in the decontamination target chamber more reliably. While improving stability and reliability further, the consumption of hydrogen peroxide aqueous solution can also be reduced further.

The sixth feature configuration of the present invention relates to the decontamination system of the fifth feature configuration,
The temperature control unit is configured to increase the expected temperature difference as the absolute humidity measured by the humidity measurement unit is lower.

  That is, as shown in FIG. 2, even if the variation range Δx of the absolute humidity x in the decontamination target chamber is the same, the variation range Δtd of the hydrogen peroxide gas condensation temperature td associated with the variation of the absolute humidity x is The lower the absolute humidity x, the larger the absolute humidity x.

  Therefore, according to the above decontamination system in which the expected temperature difference is increased as the measured absolute humidity in the decontamination target room is lower, the hydrogen peroxide gas in the decontamination target room regardless of the absolute humidity level in the decontamination target room. Compared to adopting a certain large temperature difference with a margin as the expected temperature difference while reliably preventing condensation, the higher the absolute humidity of the decontamination target room, the smaller the expected temperature difference and the decontamination target The target temperature of the room can be lowered, and accordingly, the energy consumption of the heating means can be further reduced, and the running cost can be further reduced.

The seventh feature configuration of the present invention relates to the decontamination system of any one of the third to sixth feature configurations,
A storage means for storing the correlation data of the three of the absolute humidity of the decontamination target chamber, the hydrogen peroxide gas concentration in the decontamination target chamber, and the condensation temperature of the hydrogen peroxide gas in the decontamination target chamber is provided,
The temperature control means is configured to collate the measured absolute humidity measured by the humidity measuring means and the target concentration with the correlation data, and removes the measured absolute humidity state and the hydrogen peroxide gas concentration at the target concentration. The point is that the condensation temperature of the hydrogen peroxide gas in the dyeing target chamber is calculated.

  According to this decontamination system, even if various concentrations are selected as the target concentration of the hydrogen peroxide gas concentration in the decontamination target chamber, the target concentration of the hydrogen peroxide gas concentration and the measured absolute humidity in the decontamination target chamber Is compared with the above correlation data, and the condensation temperature of hydrogen peroxide gas in the decontamination target chamber in the measured absolute humidity state and the hydrogen peroxide gas concentration at the target concentration can be calculated easily and accurately. Thus, the versatility of the system can be enhanced by arbitrarily selecting the target concentration of the hydrogen peroxide gas concentration.

The eighth characteristic configuration of the present invention relates to the decontamination system of any one of the third to seventh characteristic configurations,
The heating means is a carrier air heating means for heating carrier air supplied to the gas generating means through the air supply path.

  According to this decontamination system, the carrier air heated by the carrier air heating means is supplied to the decontamination target chamber through the gas generating means, and the carrier air heating means With the heating of the carrier air, the evaporation of the hydrogen peroxide solution in the gas generating means can be effectively promoted.

  Further, the system configuration can be simplified as compared with the case where the heating means dedicated to the decontamination target chamber is heated separately from the carrier air heating means.

A ninth feature configuration of the present invention relates to the decontamination system according to any one of the third to eighth feature configurations,
The gas generating means is characterized in that the hydrogen peroxide aqueous solution is jetted into the carrier air together with the compressed air so that the jetted hydrogen peroxide aqueous solution is refined and evaporated in the carrier air.

  In other words, gas generating means for generating hydrogen peroxide gas by evaporating the hydrogen peroxide aqueous solution in the carrier air includes a dripping heating method in which the hydrogen peroxide aqueous solution is dropped into a high-temperature heating container to evaporate, or a peroxide. Various types, such as an impregnation method in which an aqueous hydrogen solution is impregnated in an impregnated material and evaporated by exposure to carrier air, or a watering method in which an aqueous hydrogen peroxide solution is evaporated by sprinkling water against the carrier air One of the methods is conceivable.

  However, in the case of the gas generating means of the above-described two-fluid jet method in which the hydrogen peroxide aqueous solution is evaporated together with the compressed air into the carrier air, the jetted hydrogen peroxide aqueous solution is effective due to the compressed air jetted therewith. Therefore, the hydrogen peroxide aqueous solution can be efficiently evaporated in the carrier air.

  And while efficiently evaporating the aqueous hydrogen peroxide solution in this way, loss due to thermal decomposition of the hydrogen peroxide gas immediately after generation can be effectively avoided as compared with, for example, a dropping heating method, Combined with preventing the condensation of hydrogen peroxide gas by adjusting the temperature of the decontamination target chamber as described above, the consumption of the hydrogen peroxide solution can be further reduced, and the running cost is further reduced. be able to.

Configuration diagram of decontamination system Graph showing the relationship between concentration, humidity and temperature Graph showing changes in concentration and humidity

  FIG. 1 shows a dry decontamination system. Reference numeral 1 denotes a gas generator as a gas generating means. In the gas generator 1, a hydrogen peroxide solution L (for example, in a carrier air CA supplied through an air supply path 2 is used. The hydrogen peroxide gas G is generated by evaporating the hydrogen peroxide solution having a hydrogen peroxide concentration of 25% to 35%.

  That is, in this dry / humidity decontamination system, the hydrogen peroxide gas G (in other words, hydrogen peroxide hydrogen vapor) generated by the gas generator 1 is decontaminated as a gas for decontamination by the conveyance fan 3 along with the carrier air CA. By supplying the decontamination target chamber 5 through the path 4, the decontamination target chamber 5 is dry-decontaminated.

  As the carrier air CA supplied to the gas generator 1 through the air supply path 2, fresh outside air OA introduced from the outside is used. In the air supply path 2, fresh outside air OA as the carrier air CA is used. An air heater 6 is provided as a carrier air heating means for heating.

  In order to generate the hydrogen peroxide gas G, the gas generator 1 has a two-fluid jet type ejector in which a liquid supply path 8 and a compressed air path 9 from a liquid tank 7 storing the aqueous hydrogen peroxide solution L are connected. The hydrogen peroxide aqueous solution L supplied from the liquid tank 7 through the liquid supply passage 8 is heated by the air heater 6 together with the compressed air PA supplied from the compressed air passage 9. By jetting into the carrier air CA, the jetted compressed air PA effectively refines the jetted hydrogen peroxide solution L and promotes evaporation of the jetted hydrogen peroxide solution L in the carrier air CA.

Further, by generating the hydrogen peroxide gas G by the two-fluid jet type ejector 10, thermal decomposition of the hydrogen peroxide gas G immediately after the generation is suppressed, thereby reducing the consumption amount of the aqueous hydrogen peroxide solution L. In addition to reducing, the generation of moisture accompanying the thermal decomposition (2H ₂ O ₂ → 2H ₂ O + O ₂ ) is also suppressed.

  In addition, a flow rate adjusting valve 8 a for adjusting the supply flow rate of the hydrogen peroxide solution L to the ejector 10 is interposed in the liquid supply passage 8, and the compressed air to the ejector 10 is provided in the compressed air passage 9. A flow rate adjusting valve 9a for adjusting the supply air volume of PA is interposed.

  An exhaust path 11 is connected to the decontamination target chamber 5 together with the gas transport path 4, and the hydrogen peroxide gas G is supplied through the gas transport path 4 together with fresh outside air OA as the carrier air CA. The indoor air RA in the decontamination target chamber 5 is exhausted to the outside by the exhaust fan 12 through the exhaust path 11.

  In this dry decontamination system, the concentration measuring device 13 as a concentration measuring unit for measuring the hydrogen peroxide gas concentration c in the decontamination target chamber 5 and the humidity measuring unit for measuring the absolute humidity x in the decontamination target chamber 5 are used. Humidity measuring instrument 14, temperature measuring instrument 15 as temperature measuring means for measuring temperature t (room temperature) of decontamination target chamber 5, and measurement information (c, x, t by these measuring instruments 13 to 15) ) Is equipped with a controller 16 for controlling the decontamination operation.

  Further, the storage unit 16a as a storage means in the controller 16 includes an absolute humidity x of the decontamination target chamber 5 as shown in FIG. 2 and a hydrogen peroxide gas concentration c (= c1, c2) in the decontamination target chamber 5. ,...) And three-way correlation data D (x, c, td) between the condensation temperature td of the hydrogen peroxide gas G in the decontamination target chamber 5 are stored.

  The controller 16 is configured to execute the following control operations (A) to (D).

  (A) When a decontamination operation start command is given, the operation of the transport fan 3 and the exhaust fan 12 is started, and fresh outside air OA as the carrier air CA is supplied to the air supply path 2-gas generator 1-gas transport While being supplied to the decontamination target chamber 5 through the path 4, the room air RA in the decontamination target chamber 5 is discharged to the outside through the exhaust path 11.

  In parallel with this, the supply air volume (strictly speaking, excess air) of the fresh outside air OA as the carrier air CA is controlled by inverter control for the fan motors of the transport fan 3 and the exhaust fan 12 (or opening degree control for the air volume adjustment damper, etc.). (Including the supply air volume of the hydrogen oxide gas G) and the exhaust air volume of the indoor air RA exhausted to the outside through the exhaust passage 11 so that the total air volume of the fresh outside air OA as the carrier air CA is decontaminated. 5 is temporarily passed.

  Note that this air volume adjustment may be performed by an artificial opening adjustment operation for the air volume adjustment damper.

That is, by passing the fresh outside air OA as the carrier air CA transiently through the decontamination target chamber 5 in this way, moisture generation accompanying the evaporation of the hydrogen peroxide solution L in the gas generator 1 (that is, the solvent) (Water evaporation) and water generation (2H ₂ O ₂ → 2H ₂ O + O ₂ ) due to decomposition of the hydrogen peroxide gas G in the decontamination target chamber 5 and the like after generation, the generated water is used as carrier air CA. It is quickly removed from the decontamination target chamber 5 together with the fresh outside air OA, thereby preventing the absolute humidity x of the decontamination target chamber 5 from increasing due to the generation of moisture.

  (B) In this state, the flow rate adjustment valve 8a of the liquid supply path 8 is opened, and the flow rate adjustment valve 9a of the compressed air path 9 is opened, so that the hydrogen peroxide aqueous solution is discharged from the ejector 10 in the gas generator 1. L and compressed air PA are ejected to generate hydrogen peroxide gas G in the gas generator 1 and the generated hydrogen peroxide gas G is supplied to the decontamination target chamber 5 together with fresh outside air OA as carrier air CA. The hydrogen peroxide gas concentration c in the decontamination target chamber 5 is gradually increased.

  And if the measurement density | concentration c of the decontamination object chamber 5 by the density | concentration measuring device 13 rises to the target density | concentration cm of decontamination, based on the measurement density | concentration c and the target density | concentration cm by the density | concentration measuring device 13, the supply channel 8 and compressed air The hydrogen peroxide gas concentration c in the decontamination target chamber 5 is set to the target concentration cm by adjusting the flow rate adjusting valves 8a and 9a of the passage 9 to adjust the generation amount of the hydrogen peroxide gas G in the gas generator 1. Keep adjusted.

  That is, the controller 16 adjusts the generation amount of the hydrogen peroxide gas G in the gas generator 1 to adjust the hydrogen peroxide gas concentration c in the decontamination target chamber 5 to the decontamination target concentration cm. Function as.

  (C) On the other hand, in parallel with the concentration adjustment, the measured absolute humidity x of the chamber 5 to be decontaminated by the humidity measuring instrument 14 and the target concentration cm are correlated with the three-way correlation data D (x , C, td), and sequentially calculating the condensation temperature td of the hydrogen peroxide gas G in the decontamination target chamber 5 in the state where the measured absolute humidity state and the hydrogen peroxide gas concentration c are at the target concentration cm. For each calculation, a temperature that is higher than the calculated condensing temperature td by a predetermined expected temperature difference Δt is set as the target temperature tm (= td + Δt).

  Further, for the sequential setting of the target temperature tm, based on the measured temperature t of the decontamination target chamber 5 by the temperature measuring device 15 and the target temperature tm at that time, as carrier air heating means equipped in the air supply path 2 By adjusting the heating output of the air heater 6, the temperature t of the decontamination target chamber 5 is adjusted to the target temperature tm at that time.

  That is, the controller 16 calculates the condensation temperature td of the hydrogen peroxide gas G in the decontamination target chamber 5 in a state where the measured absolute humidity state and the hydrogen peroxide gas concentration c are at the target concentration cm, thereby performing the decontamination. It also functions as temperature control means for adjusting the temperature t of the target chamber 5 to the target temperature tm that is higher than the calculated condensation temperature td by the expected temperature difference Δt.

  Then, by adjusting the temperature t of the decontamination target chamber 5 to the target temperature tm at that time, the hydrogen peroxide gas concentration c in the decontamination target chamber 5 is adjusted to the target concentration cm, and the decontamination target chamber. In the dry decontamination of 5, the hydrogen peroxide gas G is reliably prevented from condensing in the decontamination target chamber 5, and the carrier air CA supplied to the gas generator 1 is dehumidified accordingly. Eliminates dehumidification means.

  Here, the expected temperature difference Δt is a decontamination target caused by a temperature difference between the temperature t of the decontamination target chamber 5 and the surface temperature ts of each part in the decontamination target chamber 5 or the humidity fluctuation of the outside air OA as the carrier air CA. This is a safety temperature difference determined in consideration of the fluctuation range of the hydrogen peroxide gas condensation temperature td in the chamber 5, and the temperature t in the decontamination target chamber 5 is estimated from the calculated condensation temperature td in the temperature adjustment. By adjusting the target temperature tm to a higher target temperature tm, condensation of the hydrogen peroxide hydrogen gas G locally occurs at a location where the surface temperature ts in the decontamination target chamber 5 is low, or peroxidation due to humidity fluctuations in the outside air OA. The indoor condensation of the hydrogen peroxide gas G due to fluctuations in the hydrogen gas condensation temperature td is also reliably prevented.

  As shown in FIG. 2, even if the variation range Δx of the absolute humidity x in the decontamination target chamber 5 is the same, the variation range Δtd of the hydrogen peroxide gas condensation temperature td accompanying the variation of the absolute humidity x is equal to the decontamination target chamber. 5, the controller 16 is configured to increase the expected temperature difference Δt as the measured absolute humidity x of the decontamination target chamber 5 by the humidity measuring instrument 14 is lower. Thus, the energy consumption of the air heater 6 is reduced as much as possible while reliably preventing the condensation of the hydrogen peroxide gas G in the decontamination target chamber 5 as described above.

  (D) If the state in which the hydrogen peroxide gas c in the decontamination target chamber 5 is maintained at the target concentration cm is continued for the set decontamination time T, then, as a process of ending the decontamination operation, peroxidation in the gas generator 1 The transport fan 3 and the exhaust fan 12 are operated in a state where the generation of the hydrogen gas G is stopped, and only the fresh outside air OA as the carrier air CA is passed through the decontamination target chamber 5 temporarily. The hydrogen peroxide gas concentration c in the decontamination target chamber 5 is efficiently reduced.

  Moreover, also in this completion | finish process, the above-mentioned temperature control of the decontamination object chamber 5 is continued, and condensation of the hydrogen peroxide gas G in the decontamination object chamber 5 is prevented.

  Then, when the measured hydrogen peroxide gas concentration c in the decontamination target chamber 5 by the concentration measuring device 13 decreases to a predetermined safe concentration cs, the operation of the air heater 6 is stopped and the operation of the transport fan 3 and the exhaust fan 12 is performed. Is stopped, the decontamination operation is terminated, and the next decontamination operation start command is awaited.

[Another embodiment]
Next, other embodiments of the present invention will be listed.

  In the above-described embodiment, the example in which the air heater 6 serving as the carrier air heating unit is also used as the heating unit for the decontamination target chamber has been described. However, the heating unit for adjusting the temperature of the decontamination target chamber 5 is excluded. Any heating system may be used such as one that heats in the dyeing target chamber 5.

  In the above-described embodiment, the condensation temperature td of the hydrogen peroxide gas G in the decontamination target chamber 5 in the measured absolute humidity state and the hydrogen peroxide gas concentration c at the target concentration cm is calculated, and this calculated condensation temperature is calculated. Although the temperature t of the decontamination target chamber 5 is adjusted to a temperature higher than td, in addition to this, the decontamination target chamber in a state where the measured absolute humidity state and the hydrogen peroxide gas concentration c are at the measured concentration When the condensation temperature td 'of the hydrogen peroxide gas G at 5 is calculated and the latter calculated condensation temperature td' is higher than the former calculated condensation temperature td, the temperature is set higher than the latter calculated condensation temperature td '. The temperature t of the decontamination target chamber 5 may be adjusted.

  That is, in this way, even if the hydrogen peroxide gas concentration c in the decontamination target chamber 5 becomes higher than the target concentration cm for some reason, the condensation of the hydrogen peroxide gas G in the decontamination target chamber 5 is prevented. can do.

  The humidity measuring means 13 for measuring the absolute humidity x in the decontamination target chamber 5 is not limited to directly measuring the absolute humidity x in the decontamination target chamber 5, and the measurement relative humidity r and measurement in the decontamination target chamber 5 are measured. The absolute humidity x in the decontamination target chamber 5 may be obtained based on the temperature t.

  In the above-described embodiment, the absolute humidity x of the decontamination target chamber 5, the hydrogen peroxide gas concentration c in the decontamination target chamber 5, and the condensation temperature td of the hydrogen peroxide gas G in the decontamination target chamber 5 The correlation data D (x, c, td) of the three parties is stored, and the absolute humidity x measured by the humidity measuring means 13 and the target concentration cm are collated with the correlation data D (x, c, td). In addition, an example of calculating the condensation temperature td of the hydrogen peroxide gas G in the decontamination target chamber 5 in a state where the measured absolute humidity state and the hydrogen peroxide gas concentration c are at the target concentration cm has been shown. Three correlations between the absolute humidity x of the decontamination target chamber 5, the target concentration cm of the hydrogen peroxide gas concentration c in the decontamination target chamber 5, and the condensation temperature td of the hydrogen peroxide gas G in the decontamination target chamber 5 Data D ′ (x, cm, td) is stored and this phase Hydrogen peroxide gas in the decontamination target chamber 5 in a state in which the measured absolute humidity x by the humidity measuring means 13 is collated with the data D ′ and the hydrogen peroxide gas concentration c is at the target concentration cm. The condensing temperature td of G may be calculated.

  The correlation data D and D ′ may be in any form such as a data table or a function expression.

  The present invention can be used for decontamination carried out in various fields using hydrogen peroxide gas as a decontamination gas.

DESCRIPTION OF SYMBOLS 1 Gas generating means 2 Air supply path CA Carrier air L Hydrogen peroxide aqueous solution G Hydrogen peroxide gas 4 Gas conveyance path 5 Decontamination target chamber 6 Heating means, carrier air heating means c Hydrogen peroxide gas concentration cm Target concentration x Absolute humidity td Condensing temperature t Temperature OA Fresh air RA Indoor air 11 Exhaust passage 14 Humidity measuring means 15 Temperature measuring means 16 Concentration control means, temperature control means Δt Expected temperature difference tm Target temperature D Correlation data 16a Storage means PA Compressed air

Claims (9)

In the gas generation means, hydrogen peroxide aqueous solution is evaporated in the carrier air supplied through the air supply path to generate hydrogen peroxide gas,
A decontamination method for decontaminating a decontamination target chamber by supplying the hydrogen peroxide gas generated by the gas generation means as a decontamination gas to the decontamination target chamber through a gas conveyance path together with carrier air,
Provide a heating means to heat the decontamination target chamber,
While adjusting the amount of hydrogen peroxide gas generated in the gas generating means to adjust the hydrogen peroxide gas concentration in the decontamination target chamber to the target concentration,
Based on the measured absolute humidity in the decontamination target chamber and the target concentration, the condensation temperature of the hydrogen peroxide gas in the decontamination target chamber is calculated in the measured absolute humidity state and the hydrogen peroxide gas concentration is the target concentration. do it,
A decontamination method for adjusting the temperature of the decontamination target chamber to a temperature higher than the calculated condensation temperature by adjusting the heating output of the heating means based on the calculated condensation temperature. Supplying only fresh air as carrier air to the gas generating means through the air supply path;
As the hydrogen peroxide gas generated by the gas generating means is supplied to the decontamination target chamber through the gas transport path together with fresh air as carrier air, the interior of the decontamination target chamber has an air volume substantially equal to the supplied air volume. The decontamination method according to claim 1, wherein fresh air as carrier air is temporarily passed through a decontamination target chamber by discharging the air to the outside through an exhaust path. Gas generation means for generating hydrogen peroxide gas by evaporating the aqueous hydrogen peroxide solution in the carrier air supplied through the air supply path,
A decontamination system for decontaminating a decontamination target chamber by supplying the hydrogen peroxide gas generated by the gas generating means as a decontamination gas to the decontamination target chamber through a gas transport path together with carrier air,
A heating means for heating the decontamination target chamber, a humidity measurement means for measuring the absolute humidity of the decontamination target chamber, and a temperature measurement means for measuring the temperature of the decontamination target chamber are provided,
While providing a concentration control means for adjusting the amount of hydrogen peroxide gas generated in the gas generating means to adjust the hydrogen peroxide gas concentration in the decontamination target chamber to a target concentration,
Based on the absolute humidity measured by the humidity measuring means and the target concentration, the condensation temperature of the hydrogen peroxide gas in the decontamination target chamber in the measured absolute humidity state and the hydrogen peroxide gas concentration at the target concentration is calculated. The temperature control means for adjusting the temperature of the decontamination target chamber to a temperature higher than the calculated condensation temperature by adjusting the heating output of the heating means based on the calculated condensation temperature and the temperature measured by the temperature measuring means. Decontamination system provided. The air supply path is an air path that supplies only fresh air to the gas generating means as carrier air,
As the hydrogen peroxide gas generated by the gas generating means is supplied to the decontamination target chamber through the gas transport path together with fresh air as carrier air, the room of the decontamination target chamber has an air volume substantially equal to the supplied air volume. The decontamination system according to claim 3, wherein an exhaust passage for discharging air to the outside is provided to allow fresh air as carrier air to pass through the decontamination target chamber temporarily.   The temperature control means sets the temperature of the decontamination target chamber by adjusting the heating output of the heating means based on the temperature measured by the temperature measuring means, with a temperature that is higher than the calculated condensing temperature by an estimated temperature difference as a target temperature. The decontamination system according to claim 3 or 4, wherein the decontamination system is configured to adjust to a target temperature.   The decontamination system according to claim 5, wherein the temperature control unit is configured to increase the expected temperature difference as the absolute humidity measured by the humidity measurement unit is lower. A storage means for storing the correlation data of the three of the absolute humidity of the decontamination target chamber, the hydrogen peroxide gas concentration in the decontamination target chamber, and the condensation temperature of the hydrogen peroxide gas in the decontamination target chamber is provided,
The temperature control means is configured to collate the measured absolute humidity measured by the humidity measuring means and the target concentration with the correlation data, and removes the measured absolute humidity state and the hydrogen peroxide gas concentration at the target concentration. The decontamination system according to any one of claims 3 to 6, wherein the condensation temperature of the hydrogen peroxide gas in the dyeing target chamber is calculated.   The decontamination system according to any one of claims 3 to 7, wherein the heating unit is a carrier air heating unit that heats carrier air supplied to the gas generation unit through the air supply path.   9. The gas generating means according to any one of claims 3 to 8, wherein the hydrogen peroxide aqueous solution is jetted into the carrier air together with the compressed air so that the jetted hydrogen peroxide aqueous solution is refined and evaporated in the carrier air. The decontamination system according to claim 1.

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