JP5860809B2 - マイクロ電子機械的システム（ｍｅｍｓ）干渉計 - Google Patents

マイクロ電子機械的システム（ｍｅｍｓ）干渉計 Download PDF

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JP5860809B2
JP5860809B2 JP2012528127A JP2012528127A JP5860809B2 JP 5860809 B2 JP5860809 B2 JP 5860809B2 JP 2012528127 A JP2012528127 A JP 2012528127A JP 2012528127 A JP2012528127 A JP 2012528127A JP 5860809 B2 JP5860809 B2 JP 5860809B2
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mirror
medium
interferometer
interference
interference beam
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JP2012528127A
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Japanese (ja)
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JP2013504066A5 (enExample
JP2013504066A (ja
Inventor
カリル、ディア・エー
モルタダ、バセム
ナビル、モハメッド
メダット、モスタファ
サダニイ、バサム・エー
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Si Ware Systems
SI Ware Systems Inc
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Si Ware Systems
SI Ware Systems Inc
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/45—Interferometric spectrometry
    • G01J3/453—Interferometric spectrometry by correlation of the amplitudes
    • G01J3/4532—Devices of compact or symmetric construction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/021—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using plane or convex mirrors, parallel phase plates, or particular reflectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/45—Interferometric spectrometry

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
JP2012528127A 2009-09-08 2010-09-08 マイクロ電子機械的システム（ｍｅｍｓ）干渉計 Active JP5860809B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US24053109P 2009-09-08 2009-09-08
US61/240,531 2009-09-08
PCT/US2010/048169 WO2011031791A1 (en) 2009-09-08 2010-09-08 Compensated mems ftir spectrometer architecture

Publications (3)

Publication Number Publication Date
JP2013504066A JP2013504066A (ja) 2013-02-04
JP2013504066A5 JP2013504066A5 (enExample) 2014-12-18
JP5860809B2 true JP5860809B2 (ja) 2016-02-16

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JP2012528127A Active JP5860809B2 (ja) 2009-09-08 2010-09-08 マイクロ電子機械的システム（ｍｅｍｓ）干渉計

Country Status (5)

Country Link
US (1) US8531675B2 (enExample)
EP (1) EP2475970B1 (enExample)
JP (1) JP5860809B2 (enExample)
SG (1) SG179018A1 (enExample)
WO (1) WO2011031791A1 (enExample)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012107962A (ja) * 2010-11-16 2012-06-07 Konica Minolta Holdings Inc 干渉計およびそれを備えた分光器
FR2985809B1 (fr) * 2012-01-16 2015-12-25 Laboratoire Nat De Metrologie Et Dessais Sonde optique interferometrique de mesure dimensionnelle
US8922787B2 (en) 2013-01-07 2014-12-30 Si-Ware Systems Spatial splitting-based optical MEMS interferometers
CN105890758B (zh) * 2014-12-31 2018-06-15 南开大学 一种同时采用mems平动与扭转微镜的微型傅里叶红外光谱仪
US9970819B2 (en) 2015-03-23 2018-05-15 Si-Ware Systems High performance parallel spectrometer device
JP6026597B1 (ja) * 2015-07-06 2016-11-16 浜松ホトニクス株式会社 光干渉計
JP5839759B1 (ja) 2015-07-30 2016-01-06 浜松ホトニクス株式会社 光干渉計
JP6943452B2 (ja) * 2016-06-15 2021-09-29 シーウェア システムズＳｉ−Ｗａｒｅ Ｓｙｓｔｅｍｓ 一体型スペクトルユニット
JP6704833B2 (ja) * 2016-10-27 2020-06-03 浜松ホトニクス株式会社 位置検出方法及び光モジュール
US11841268B2 (en) 2021-02-02 2023-12-12 Si-Ware Systems Compact material analyzer
US11774289B2 (en) 2021-11-02 2023-10-03 Saudi Arabian Oil Company Micro-electromechanical system (MEMS) interferometer for FT-MIR spectroscopy
US11635369B1 (en) 2021-11-02 2023-04-25 Saudi Arabian Oil Company Miniature FT-MIR using a MEMS interferometer with a metasurface emitter and detector

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3443871A (en) * 1965-12-07 1969-05-13 Optomechanisms Inc Single optical block interferometer means
US4278351A (en) * 1979-05-09 1981-07-14 Nasa Interferometer
US4735505A (en) * 1983-08-30 1988-04-05 The Perkin-Elmer Corporation Assembly for adjusting an optical element
US6967722B2 (en) * 1997-10-28 2005-11-22 Manning Christopher J Tilt-compensated interferometers
US6952266B2 (en) * 2003-01-15 2005-10-04 Inlight Solutions, Inc. Interferometer alignment
US7796267B2 (en) * 2006-09-28 2010-09-14 Si-Ware Systems System, method and apparatus for a micromachined interferometer using optical splitting

Also Published As

Publication number Publication date
SG179018A1 (en) 2012-04-27
EP2475970B1 (en) 2021-11-03
JP2013504066A (ja) 2013-02-04
US20110058180A1 (en) 2011-03-10
US8531675B2 (en) 2013-09-10
WO2011031791A1 (en) 2011-03-17
EP2475970A1 (en) 2012-07-18

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