JP5858470B2 - Solid state laser equipment - Google Patents

Description

  The present invention relates to a laser device for oscillating laser light, and particularly to a solid-state laser device using a solid-state laser medium such as YAG or ruby and an excitation flash lamp.

  A solid-state laser device using YAG (yttrium, aluminum, garnet) or ruby as a laser medium generally has a rod-shaped solid laser medium, a flash lamp for exciting the solid laser medium, and light from the flash lamp. The reflecting mirror for condensing light toward the solid laser medium, a cooling water channel for cooling them, and a housing for fixing the solid laser medium, the flash lamp and the reflecting mirror in a predetermined relationship. (For example, refer to Patent Document 1).

  In such a solid-state laser apparatus, it is necessary to periodically clean the inside of the apparatus or replace parts due to a flash lamp being blown out. In order to perform these operations easily, several structures have been proposed so far (see, for example, Patent Document 2 and Patent Document 3). In these prior arts, for example, in Patent Document 2, the solid laser medium and the flash lamp are integrally attached to the lid of the opening of the housing, and the solid laser medium and the flash lamp are pulled out simultaneously when the lid is removed. It is structured so that parts can be easily replaced during work. Further, in Patent Document 3, by installing a guide rail, only the solid laser medium is taken out of the apparatus along the guide rail so that parts can be easily replaced.

Japanese Patent Application Laid-Open No. 60-089989 Japanese Patent Laid-Open No. 08-162694 JP-A-11-103105

In a flash lamp-pumped solid-state laser device, the life of the flash lamp is about 10 ⁷ times, so it is necessary to frequently replace the flash lamp particularly in a high-repetition laser device.

  However, in the solid-state laser device described in each of the above-mentioned patent documents, it is necessary to move the solid-state laser medium when replacing the flash lamp. It was very difficult.

  In the solid-state laser device of Patent Document 3, although the solid-state laser medium is taken out along the guide rail, it is necessary to move the solid-state laser medium every time the flash lamp is frequently replaced. There is a problem that it is difficult to ensure the reproducibility of the position and angle of the solid laser medium by attaching and detaching.

  An object of the present invention is to provide a solid-state laser device having a structure in which the position and angle of a solid-state laser medium do not change during a flash lamp replacement operation.

  The present invention separates the solid-state laser medium and the cooling water flow path for the flash lamp, and holds the solid-state laser medium in a partially assembled state called a flash lamp holding housing without filling the reflecting mirror with the cooling water. It has a structure that can be separated from the housing to be fitted and re-fitted.

  Specifically, in the solid-state laser device of the present invention, at least one solid-state laser medium, at least one flash lamp for exciting the solid-state laser medium, at least one reflecting mirror, and the solid-state laser A cooling channel for cooling the medium, the flash lamp, and the reflecting mirror; and a housing that holds the solid laser medium, the flash lamp, the reflecting mirror, and the cooling channel; In the solid-state laser device in which the reflecting mirror is installed so that the reflected light of the flash lamp is condensed on the solid-state laser medium, the case is separated from and fitted to a flash lamp holding case. The reflector is divided into a solid laser medium holding casing, and the reflecting mirror is arranged on the flash lamp holding casing side and the laser medium holding casing side. Furthermore, the cooling channel is a flash lamp cooling channel provided in the flash lamp holding housing, a solid laser medium cooling channel provided in the solid laser medium holding housing, The flash lamp holding housing side reflecting mirror cooling flow path provided in the flash lamp holding housing and the solid laser medium holding housing side reflecting mirror cooling flow path provided in the solid laser medium holding housing are divided.

  Preferably, in the above-described apparatus, the reflecting mirror also forms the confocal ellipse when the laser medium holding casing and the flash lamp holding casing are fitted to each other. It is divided into multiple parts on the body.

  According to the present invention, the solid laser medium and the flash lamp holding housing are separated, and at the same time, the respective cooling water flow paths are separated, so that the flash lamp mounted on the holding housing without moving the solid laser medium. Can be exchanged. Therefore, it is not necessary to adjust the optical axis of the laser after replacing the flash lamp, and the number of times the flash lamp is turned on when the optical axis is adjusted can be reduced to zero.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a configuration explanatory diagram of a solid-state laser device according to an embodiment of the present invention. FIG. 2 is an exploded view of a flash lamp holding housing of the solid-state laser device of FIG. 1. Sectional drawing cut along the BB line shown by FIG. 1 (B). Sectional drawing cut off along the AA line shown by FIG. 1 (A). The exploded block diagram of the solid-state laser apparatus for demonstrating the fixing method of a flash lamp holding | maintenance housing | casing and a laser medium holding | maintenance housing | casing. The flowchart for demonstrating flash lamp replacement | exchange operation | work. The structure explanatory view of other examples of the present invention. FIG. 8 is an exploded view of a flash lamp holding housing of the solid-state laser device of FIG. 7. The structure explanatory view of other examples of the present invention. FIG. 10 is an exploded view of a flash lamp holding housing of the solid-state laser device of FIG. 9.

  Next, an embodiment of a solid-state laser device according to the present invention will be described in detail with reference to the drawings. 1 to 4 show an embodiment of the present invention including one solid-state laser medium and one flash lamp.

  1A is a front view of a solid-state laser device (viewed from a direction perpendicular to the optical axis of the laser), and FIG. 1B is a side view thereof (viewed from the optical axis direction). is there. As can be seen from FIG. 1A, the solid-state laser device includes a rod-shaped solid-state laser medium 1 and a flash lamp 2 provided in parallel therewith. As shown in FIG. 1B, the solid laser medium 1 is mounted on a solid laser medium holding casing 3, and the flash lamp 2 is mounted on a flash lamp holding casing 4. The flash lamp holding case 3 and the solid laser medium holding case 4 are configured to be separable from each other.

  FIG. 2 shows a state where the holding housing is separated. As understood from FIG. 2, the flash lamp holding housing 4 is pulled out independently from the solid-state laser holding housing 3 in the direction perpendicular to the optical axis (on the left side of the paper) without affecting the solid laser holding housing 3. Can be done. After the flash lamp holding housing 4 is separated from the solid laser holding housing 3 and the flash lamp 2 is replaced, the flash lamp holding housing 4 is again solid as shown in FIG. The laser medium holding housing 3 can be fitted. When re-fitted, there may be a slight deviation from the first fitting position, but a certain amount of displacement does not cause a structural problem as described later.

  Next, with reference to FIG. 3 and FIG. 4, the internal structure of each housing described above will be described. For convenience of explanation, reference is first made to FIG. As shown in FIG. 4, the inner surfaces of the reflecting mirrors 31a and 31b constitute a confocal ellipse, and side plates 34 are attached to both sides. The side plate 34 is provided with a cooling water outflow inlet 16 to the laser medium 1, a cooling water outflow inlet 26 to the flash lamp 4, and cooling water outflow inlets 33a and 33b to the reflecting mirrors 31a and 31b.

  Next, referring to FIG. 3, the structure of the solid laser medium, the flash lamp, and the cooling channel of the reflecting mirror will be described in order.

  The cooling water flowing into the solid laser medium 1 passes from the cooling water outlet / inlet 16 through the flow path 17 shown in FIG. 3, through the gap between the solid laser medium 1 and the solid laser medium flow tube 11, and on the opposite side of the cooling water outlet / inlet 16. Break through. The solid-state laser medium 1 is fixed by the clamp 14 with the O-ring 15 interposed therebetween, and the flow tube 11 is fixed by the clamp 12 with the O-ring 13 interposed therebetween, thereby preventing the cooling water from flowing out.

  Similarly, the cooling water flowing to the flash lamp 2 passes from the cooling water outflow inlet 26 through the flow path 27, through the gap between the flash lamp 2 and the flash lamp flow tube 21, and to the cooling water outflow inlet 26 on the opposite side. The flash lamp 2 is fixed by the clamp 24 with the O-ring 25 interposed therebetween, and the flow tube 21 is fixed by the clamp 22 with the O-ring 23 interposed therebetween, thereby preventing the cooling water from flowing out.

  The cooling water flowing in the reflecting mirrors 31a and 31b flows into the flow path 32 in the reflecting mirrors 31a and 31b from the cooling water outflow inlets 33a and 33b, and flows out of the cooling water outflow inlets 33a and 33b after traversing the flow path 32. .

  Next, a method for fixing the flash lamp holding housing and the laser medium holding housing will be described with reference to the exploded configuration diagram of FIG. The solid laser medium holding casing 3 to which the solid laser medium 1 is mounted and the flash lamp holding casing 4 to which the flash lamp 2 is mounted are fixed with bolts as shown in FIG. That is, the solid laser medium holding housing 3 is securely attached by attaching it to the flash lamp holding housing 4, fixing the lower side with the bolt 41, and fixing the upper portion with the bolt 42 and the joining plate 43. it can.

  It should be noted that the mounting accuracy of the solid laser medium holding housing 3 and the flash lamp holding housing 4 only needs to be attached with standard machining accuracy. Originally, the axial center of the solid laser medium 1 and the axial center of the flash lamp 2 should be precisely mounted so that they are respectively at the two focal positions of the ellipsoidal mirror. By applying a polished glass-like process to the side surface, the light of the flash lamp 2 is scattered on the polished glass surface and uniformly illuminates the rod of the solid laser medium 1, thereby reducing the mounting accuracy. .

  Next, an example of the procedure for replacing the flash lamp will be described with reference to the flowchart of FIG.

  Remove the flash lamp electrode socket. The cooling water tube connecting the cooling water distributor, the flash lamp holding housing 4 and the laser medium holding housing 3 is removed from the tube fitting while draining water. The mounting bolts 41 and 42 of the flash lamp holding housing 4 are removed.

  As shown in FIG. 5A, the flash lamp holding housing 4 is detached from the laser medium holding housing 3.

  At another place, the screw of the O-ring pressing metal 24 of the flash lamp holding housing 3 is removed, and the pressing metal 24 is removed. Remove the O-ring 25 for watertightness. Pull out the flash lamp 2. Insert a new flash lamp 2 and install watertight O-rings 25 on both sides. Attach the retainer bracket 24 and tighten the screws evenly so that the water tightness is maintained with the O-ring.

  As shown in FIG. 5B, the flash lamp holding casing 4 is attached to the laser medium holding casing 3 and fixed with mounting bolts. A cooling water tube connecting the cooling water distributor, the flash lamp holding housing 4 and the laser medium holding housing 3 is connected to the tube fitting. Pour cooling water and conduct a water tightness check to make sure there are no water leaks. Install the electrode socket of the flash lamp. The above is an example of the procedure for replacing the flash lamp.

  As another embodiment of the present invention, FIGS. 7 and 8 show a case where the laser oscillation unit is one solid laser medium and three flash lamps. As still another embodiment of the present invention, FIGS. 9 and 10 show a case where the laser oscillation unit is two solid laser media and four flash lamps. As an exception, when there are two solid-state laser media and one flash lamp, the positional relationship between the solid-state laser medium and the flash lamp can be reversed in the first embodiment described so far.

  When the laser oscillation unit shown in FIGS. 9 and 10 is an embodiment in which the laser oscillation unit is two solid laser media and four flash lamps, two flash lamp holding housings that can be separated from and fitted to each other. And one solid laser medium holding case. Although not shown, each laser oscillation unit including one solid-state laser medium 1 and two flash lamps 2 is surrounded by a reflecting mirror, as in the first embodiment. These two reflecting mirrors are divided into a flash lamp holding case 4 side and a laser medium holding case 3 side, respectively.

  The cooling channel includes a flash lamp cooling channel provided in the flash lamp holding case, a solid laser medium cooling channel provided in the solid laser medium holding case, and the two flash lamp holding cases. It is divided into a flash lamp holding housing side reflecting mirror cooling channel provided in the body and a solid laser medium holding housing side reflecting mirror cooling channel provided in the solid laser medium holding housing.

  In the above-described embodiment, an ellipsoidal mirror is used as the reflecting mirror. However, in view of the gist of the present invention, the reflecting mirror is not limited to the ellipsoidal mirror and has an arbitrary shape such as a cylindrical reflecting mirror. It will be apparent that a reflector can be used.

DESCRIPTION OF SYMBOLS 1 Solid laser medium 2 Flash lamp 3 Solid laser medium holding | maintenance housing | casing 4 Flash lamp holding | maintenance housing | casing 5 Reflecting mirror 6 Side plate 7 Flow path 8 O-ring 9 Cooling water outflow inlet 11 Flow tube 12, 14 Press fitting 13, 15 O-ring 16 Cooling water outflow inlet 17 Flow path 21 Flow tubes 22, 24 Press fitting 23, 25 O-ring 26 Cooling water outflow inlet 27 Channel 31a, 31b Reflector 32 Channel 33a, 33b Cooling water outflow inlet 34 Side plate

Claims (1)

Each of the two laser oscillation units consisting of one solid-state laser medium and two flash lamps for exciting the solid-state laser medium,
Two reflectors each provided for the laser oscillation unit;
A cooling flow path for cooling the solid-state laser medium, the flash lamp, and the reflecting mirror;
The solid laser medium, the flash lamp, the reflecting mirror, and a casing that holds the cooling flow path, so that the reflected light of the flash lamp from the reflecting mirror is condensed on the solid laser medium. In the solid-state laser device where the reflector is installed,
The housing is divided and the one solid-state laser medium holding body together min Hanareka ability of two flash lamp holder housing,
Two flash lamp holding cases are fitted to the solid laser medium holding case so as to sandwich one solid laser medium holding case,
The two reflecting mirrors are each divided into the flash lamp holding housing side and the laser medium holding housing side,
The cooling channel is a flash lamp cooling channel provided in each of the two flash lamp holding cases, a solid laser medium cooling channel provided in the solid laser medium holding case, and the two It is divided into a flash lamp holding housing side reflecting mirror cooling flow path provided in each flash lamp holding housing and a solid laser medium holding housing side reflecting mirror cooling flow path provided in the solid laser medium holding housing ,
A structure capable of separating the relevant cooling lamp and the associated cooling flow path at the same time as separating the corresponding flash lamp holding casing from the solid laser medium holding casing without affecting the position and angle of the solid laser medium when the flash lamp is replaced. solid-state laser apparatus according to claim that it is.

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