JP5850190B1 - Biological information measuring module and biological information measuring device - Google Patents

Abstract

Provided are a biological information measurement module and a biological information measuring device capable of measuring accurate biological information without increasing noise components even when the wearing state changes. A light-emitting unit that emits light, a light-receiving unit that receives the light that has passed through an object, and a thin film stack, which are provided on the light-receiving unit on the light incident side. A biological information measuring module, wherein the optical filter has a thickness of the laminated body of 0.40 μm or less and 0.20 μm or more. [Selection] Figure 5

Description

  The present invention relates to a biological information measuring module and a biological information measuring device including the biological information measuring module.

  2. Description of the Related Art Conventionally, a measurement module that is worn on a part such as a wrist by a band or the like and measures biological information such as a wearer's pulse wave, and a wristwatch-like wrist device having a measurement function of the biological information are known. For example, Patent Document 1 discloses a biological information measuring device equipped with a biological information measuring module that is mounted on the arm (wrist) of a wearer (subject) and measures biological information such as pulse waves using an optical detection sensor. It is disclosed.

  In a biological information measurement module using such an optical detection sensor and a biological information measurement device using the same, a blood wave on the skin surface, which is a measurement object, is optically measured and converted into a pulse wave, etc. In order to improve measurement accuracy, it is important to reduce the noise component contained in the light received by the optical detection sensor. On the other hand, Patent Literature 1 proposes not to create a gap between the light receiving element and the surface of the skin that is the measurement target of the wearer (subject). In addition, there is a growing market need to leave a so-called life log in which measurement is performed over a long period of time and human life, performance, and experience are recorded as digital data such as video, audio, and position information. When performing such long-time measurement, it is necessary to wear the biological information measurement module and biological information measurement device for a long time, so that the biological information measurement module and the biological information are not disturbed during daily life or exercise. Miniaturization of information measuring equipment is indispensable.

International Publication No. 2014 / 091424A2

  However, in the biological information measurement module of Patent Document 1 and the biological information measurement device using the same, the wearing state changes depending on the movement or body movement of the wearer (subject) who is the user, and between the light receiving element and the skin surface. A gap may be generated, and it is difficult to reduce noise components. Therefore, even in a state where the wearing state changes due to the movement or body movement of the wearer (subject) who is the user, the noise component can be reduced, accurate biological information can be measured and a small size can be measured. A biological information measuring module and a small biological information measuring device using the same have been desired.

  SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following forms or application examples.

  Application Example 1 A biological information measurement module according to this application example includes a light emitting unit that emits light, a light receiving unit that receives the light that has passed through an object, and a laminate of thin films. The optical filter is characterized in that the thickness of the laminate is 0.40 μm or less and 0.20 μm or more.

  According to this application example, by setting the thickness of the laminated body to 0.20 μm or more, for example, it is possible to cut an optical component (noise component) unnecessary for measurement of biological information such as a pulse wave, and the accurate Biological information can be measured. When the thickness of the laminate is less than 0.20 μm, it hardly plays a role as an optical filter, and it is difficult to accurately measure biological information. On the other hand, as the thickness of the laminate constituting the optical filter increases, the time required for the formation increases, that is, the number of man-hours for forming the laminate increases, and the productivity decreases. Further, when the thickness of the laminate exceeds 0.40 μm, the effect (characteristic) as an optical filter is hardly changed, and the measurement accuracy is greatly improved even if the thickness of the laminate is larger than this. I can't hope that. That is, it can be said that there is no difference in the effect (characteristic) as an optical filter, and the thickness of the laminate exceeding 0.40 μm, which increases the number of formation steps, is unnecessary. Therefore, by setting the thickness of the laminated body constituting the optical filter to 0.40 μm or less and 0.20 μm or more, the light component (noise component) unnecessary for the measurement of biological information can be efficiently performed without reducing the productivity. Therefore, it is possible to provide a biological information measuring module that can be cut automatically and can accurately measure biological information. Further, by providing such an optical filter on the light receiving portion on the light incident side, it is possible to configure a smaller biological information measurement module without changing the size, that is, without increasing the size. Become.

  Application Example 2 In the biological information measurement module according to the application example, it is preferable that the optical filter has a thickness of the laminated body of 0.36 μm or less and 0.24 μm or more.

  According to this application example, since the effect (characteristic) as an optical filter can be further improved by setting the thickness of the laminated body to 0.24 μm or more, unnecessary light ( Even if a noise component) enters, light can be shielded, and accurate measurement can be performed. Moreover, by making the thickness of the laminated body 0.36 μm or less, productivity can be further improved, and both improvement in productivity and improvement in measurement accuracy can be achieved.

  Application Example 3 In the biological information measurement module according to the application example described above, it is preferable that the optical filter has a thickness of the laminated body of 0.31 μm or less and 0.27 μm or more.

  According to this application example, the effect (characteristic) as an optical filter can be further improved by setting the thickness of the laminated body to 0.27 μm or more, and therefore unnecessary light even when a certain amount of intense exercise is performed. (Noise component) can be shielded from light, and accurate measurement can be performed. Moreover, by making the thickness of the laminated body 0.31 μm or less, productivity can be further improved, and both improvement in productivity and improvement in measurement accuracy can be achieved.

  Application Example 4 In the biological information measurement module according to the application example described above, it is preferable that the stacked body has oxide films and nitride films stacked alternately.

  According to this application example, by alternately stacking the oxide film and the nitride film, the incident light becomes transmitted light and partly reflected light at the boundary surface between the oxide film and the nitride film. Further, a part of the reflected light is reflected again at the boundary surface and combined with the transmitted light. At this time, the light of the wavelength that matches the optical path length of the reflected light strengthens the reflected light and the transmitted light in phase, and the light of the wavelength that does not match the optical path length of the reflected light intensifies the phase of the reflected light and transmitted light. Will not match and weaken. As a result, only light having a required wavelength can reach the light receiving element. Therefore, a biological information measurement module capable of more accurate measurement can be obtained.

  Application Example 5 In the biological information measurement module according to the application example described above, the average film thickness of the nitride film is preferably smaller than the average film thickness of the oxide film.

According to this application example, since the material constituting the nitride film is relatively expensive, it is possible to form a stacked body at low cost by reducing the average film thickness of the nitride film.
The average film thickness of the nitride film is Σ (the film thickness of each nitride film) ÷ the number of nitride film stacks, and the average film thickness of the oxide film is Σ (the film thickness of each oxide film) ÷ the thickness of the oxide film The number of laminated films.

  Application Example 6 In the biological information measurement module according to the application example described above, the average film thickness of the nitride film is preferably larger than the average film thickness of the oxide film.

  According to this application example, for example, a light component (noise component) unnecessary for measurement of biological information such as a pulse wave is highly shielded, and a light component (noise component) unnecessary for measurement of biological information is sufficiently cut. Therefore, more accurate biological information can be measured.

  Application Example 7 In the biological information measurement module according to the application example described above, it is preferable that the lowermost layer of the stacked body is an oxide film.

  According to this application example, the oxide film has good adhesion to a substrate (for example, a silicon substrate) that is normally used as the base of the light receiving unit, and it is possible to suppress the risk of peeling and the like.

  Application Example 8 In the biological information measurement module according to the application example described above, the lowermost layer of the stacked body is preferably a nitride film.

  According to this application example, the nitride film has a higher refractive index than that of the oxide film. Therefore, the nitride film is used as a lowermost layer that is close to the light receiving portion, so that unnecessary light is reflected more effectively. can do.

  Application Example 9 In the biological information measurement module according to the application example described above, it is preferable that a resin film is provided on the optical filter.

  According to this application example, the waterproofness and antifouling property of the optical filter can be enhanced by the resin film.

  Application Example 10 In the biological information measurement module according to the application example described above, it is preferable that a reflective functional layer is provided on at least a part of the periphery of the light emitting unit.

  According to this application example, the light emitted in the peripheral direction of the light emitting unit can be reflected by the reflective functional layer to be light directed toward the object. Thereby, the intensity | strength (light emission intensity) of the light which goes to a target object can be raised, and it becomes possible to stabilize the measurement precision of biological information.

  Application Example 11 In the biological information measuring module according to the application example described above, it is preferable that a frame is provided between the light emitting unit and the light receiving unit.

  According to this application example, it is possible to prevent the light emitted from the light emitting unit from directly reaching (entering) the light receiving unit by the frame disposed between the light receiving unit and the light emitting unit. Thereby, light with less noise component can be incident on the light receiving unit, and the measurement accuracy of the biological information measurement module can be further improved.

  Application Example 12 In the biological information measurement module according to the application example described above, it is preferable that the frame is made of resin or metal.

  According to this application example, the resin or metal is a material that can be easily obtained and processed easily, and the frame can be easily formed.

  Application Example 13 In the biological information measurement module according to the application example described above, it is preferable that a support unit is provided, and the light emitting unit and the light receiving unit are supported on a support surface of the support unit.

  According to this application example, since the light emitting unit and the light receiving unit are supported by the support surface of the support unit, space can be saved, and a compact biological information measurement module can be realized.

  Application Example 14 In the biological information measurement module according to the application example described above, it is preferable that a light collecting member is provided on the light emitting unit on the light emission side.

  According to this application example, since the light emitted from the light emitting unit is collected by the light collecting member and travels toward the object, the intensity of the light can be increased, and the light incident on the light receiving unit is consequently increased. As a result, accurate measurement can be performed.

  Application Example 15 In the biological information measurement module described in the application example, it is preferable that a plurality of the light emitting units are provided.

  According to this application example, since a plurality of light emitting units are provided, sufficient light emission intensity can be secured, and biological information is detected by detecting light from the plurality of light emitting units. It is possible to provide a biological information measurement module with improved measurement accuracy.

  Application Example 16 In the biological information measurement module described in the application example, it is preferable that a plurality of the light receiving units are provided.

  According to this application example, since a plurality of light receiving units are provided, it is possible to receive a greater amount of light (strong light) and to obtain a biological information measurement module with improved measurement accuracy. It becomes.

  Application Example 17 A biological information measurement device according to this application example is characterized in that the biological information measurement module according to any one of the application examples is mounted.

  According to this application example, the biological information measuring module that can perform detection (measurement) more accurately and has a small size and excellent portability can detect stable biological information even during exercise. In addition, it is possible to provide a biological information measuring device that is small and excellent in portability (wearability).

(A), (B) is a perspective view which shows the external appearance of the biological information measuring device which concerns on Embodiment 1. FIG. FIG. 3 is a side view showing the appearance of the biological information measuring device according to the first embodiment. Explanatory drawing about mounting | wearing of biometric information measurement apparatus, and communication with a terminal device. The functional block diagram of a biological information measuring device. The structural example 1 of the sensor part as a biometric information measurement module is shown, (A) is a top view, (B) is a front sectional view. (A), (B) is the elements on larger scale of FIG. 5 (A) which shows the Example of the light-receiving part in the structural example 1 of a sensor part (front sectional drawing). The table | surface which shows the suitability determination which concerns on the thickness of the laminated body which comprises an optical filter. FIG. 3 is a plan view showing a configuration example 2 of a sensor unit as the biological information measurement module according to the first embodiment. FIG. 5 shows another configuration example of the sensor unit as the biological information measurement module according to the first embodiment, (A) is a plan view showing a configuration example 3, and (B) is a plan view showing the configuration example 4. FIG. Sectional drawing which shows the prior art example of the biological information measuring device which concerns on Embodiment 2. FIG. The perspective view which shows the biological information measuring device which concerns on Embodiment 2. FIG. The front view which shows the biological information measuring device which concerns on Embodiment 3. FIG. The perspective view which shows the biological information measuring device which concerns on Embodiment 4. FIG. Sectional drawing which shows the biological information measuring device which concerns on Embodiment 5. FIG. The flowchart of the method of manufacturing the biological information measuring device which concerns on Embodiment 2-5. The figure which shows the outline of the web page used as the starting point of the health manager in the biometric information measuring apparatus of Embodiment 6. FIG. The figure which shows an example of a nutrition web page. The figure which shows an example of an activity level web page. The figure which shows an example of a mental concentration web page. The figure which shows an example of a sleep web page. The figure which shows an example of a daily activity web page. The figure which shows an example of a health degree web page. The fragmentary sectional view which shows the modification of a light-receiving part. The fragmentary sectional view which shows the modification of a light emission part.

  Hereinafter, this embodiment will be described. In addition, this embodiment demonstrated below does not unduly limit the content of this invention described in the claim. In addition, all the configurations described in the present embodiment are not necessarily essential configuration requirements of the present invention.

(Embodiment 1)
1. Example of Overall Configuration of Biological Information Measuring Device FIGS. 1A, 1B, and 2 are schematic external views of the biological information measuring device (biological information detecting device) according to the first embodiment. 1A is a view of the biological information measuring device as viewed from the front direction side, FIG. 1B is a view of the living body information measurement device as viewed from an obliquely upward direction side in FIG. 1A, and FIG. It is the figure seen from the direction side.

  As shown in FIG. 1A, FIG. 1B, and FIG. 2, the biological information measuring device of this embodiment has a band part 10, a case part 30, and a sensor part 40 as a biological information measuring module. The case part 30 is attached to the band part 10. The sensor unit 40 is provided in the case unit 30. Further, the biological information measuring device has a processing unit 200 as shown in FIG. The processing unit 200 is provided in the case unit 30 and detects biological information based on a detection signal from the sensor unit 40. Note that the biological information measuring device of the present embodiment is not limited to the configuration shown in FIGS. 1A, 1B, and 2, and some of the components are omitted or replaced with other components. Various modifications such as adding other constituent elements are possible.

  As will be described later with reference to FIG. 5, the sensor unit 40 as a biological information measurement module includes a substrate 160, a light emitting unit 150, a light receiving unit 140, a wall unit 70 as a frame, and other members. The A configuration including these can be used as a light detection unit (not shown). In addition, the other members in the configuration example 1 are convex portions, pressing suppression portions, and the like realized by the translucent member, and the light detection unit according to the present embodiment includes these, that is, the entire sensor unit 40 is Modifications such as corresponding to the light detection unit are also possible.

  Returning to FIG. 1 and FIG. The band unit 10 is for wrapping around a wrist of a wearer (hereinafter also referred to as a user) to wear a biological information measuring device. The band part 10 has a band hole 12 and a buckle part 14. The buckle portion 14 has a band insertion portion 15 and a projection portion 16. The user inserts one end side of the band unit 10 into the band insertion unit 15 of the buckle unit 14 and inserts the protrusion 16 of the buckle unit 14 into the band hole 12 of the band unit 10, thereby attaching the biological information measuring device to the wrist. Attach to. In this case, depending on which band hole 12 the protrusion 16 is inserted into, the magnitude of the pressing (pressing on the wrist surface) of the sensor unit 40 described later is adjusted.

  The case part 30 corresponds to a main body part of the biological information measuring device. Various components of the biological information measuring device such as the sensor unit 40 and the processing unit 200 (see FIG. 4) are provided inside the case unit 30. That is, the case part 30 is a housing for housing these components. The case portion 30 includes, for example, a top case 34 located on the opposite side of the wrist and a bottom case 36 located on the wrist side. The case portion 30 may not be separated from the top case 34 and the bottom case 36.

  The case part 30 is provided with a light emitting window part 32. The light emitting window 32 is formed of a light transmissive member. The case unit 30 is provided with a light emitting unit (LED, a light emitting unit for notification different from the light emitting unit 150 of the light detection unit) mounted on the flexible substrate, and light from the light emitting unit is transmitted to the light emitting window. It is injected to the outside of the case part 30 through the part 32.

  As shown in FIG. 2, the case portion 30 is provided with a terminal portion 35. When the biological information measuring device is mounted on a cradle (not shown), the terminal part of the cradle and the terminal part 35 of the case part 30 are electrically connected. Thereby, the secondary battery (battery) provided in the case part 30 can be charged.

  The sensor unit 40 as a biological information measurement module detects biological information such as a pulse wave of a subject. For example, the sensor unit 40 includes a light receiving unit 140 and a light emitting unit 150 as shown in FIGS. The sensor unit 40 includes a convex portion 52 that is formed of a translucent member and that makes contact with the skin surface of the subject to apply pressure. The light emitting unit 150 emits light in a state where the convex portion 52 presses the skin surface in this way, and the light receiving unit 140 receives the light reflected by the subject (blood vessel). Is output to the processing unit 200 as a detection signal. The processing unit 200 detects biological information such as a pulse wave based on the detection signal from the sensor unit 40. Note that the biological information to be detected by the biological information measuring device of the present embodiment is not limited to the pulse wave (pulse rate), and the biological information measuring device can detect biological information other than the pulse wave (for example, oxygen saturation in blood). , Body temperature, heart rate, etc.).

  FIG. 3 is an explanatory diagram showing an outline of the attachment of the biological information measuring device 400 and the communication with the terminal device 420. As shown in FIG. 3, the user who is the subject wears the biological information measuring device 400 on the wrist 410 like a watch. As shown in FIG. 2, a sensor unit 40 is provided on the subject side surface of the case unit 30. Therefore, when the biological information measuring device 400 is attached, the convex portion 52 of the sensor unit 40 contacts and presses the skin surface of the wrist 410, and in this state, the light emitting unit 150 of the sensor unit 40 emits light, When the light receiving unit 140 receives the reflected light, biological information such as a pulse wave is detected.

  The biological information measuring device 400 and the terminal device 420 are connected for communication so that data can be exchanged. The terminal device 420 is a portable communication terminal such as a smartphone, a mobile phone, or a future phone. Alternatively, the terminal device 420 may be an information processing terminal such as a tablet computer. As a communication connection between the biological information measuring device 400 and the terminal device 420, for example, proximity wireless communication such as Bluetooth (Bluetooth®) can be employed. In this way, the biological information measuring device 400 and the terminal device 420 are connected by communication, so that various information such as the pulse rate and calorie consumption can be displayed on the display unit 430 (LCD or the like) of the terminal device 420. That is, various information obtained based on the detection signal of the sensor unit 40 can be displayed. The calculation processing of information such as the pulse rate and calorie consumption may be executed by the biological information measuring device 400, or at least a part thereof may be executed by the terminal device 420.

  The biological information measuring device 400 is provided with a light emitting window 32, and notifies various kinds of information to the user by light emission (lighting and blinking) of a light emitting body for notification (not shown). For example, when entering the fat burning zone or exiting from the fat burning zone in information such as calories burned, this is notified by light emission of the light emitter through the light emitting window 32. When the terminal device 420 receives a mail or the like, the terminal device 420 notifies the biological information measuring device 400 of it. Then, when the light emitter of the biological information measuring device 400 emits light, the user is notified of reception of e-mail or the like.

  As described above, in the example illustrated in FIG. 3, the biological information measuring device 400 is not provided with a display unit such as an LCD, and information that needs to be notified by characters, numbers, or the like is displayed on the display unit 430 of the terminal device 420. Is displayed. As described above, in the example shown in FIG. 3, the biological information measuring device 400 can be downsized by notifying the user of the minimum necessary information by the light emission of the light emitter without providing a display unit such as an LCD. Yes. In addition, since the display unit is not provided in the biological information measuring device 400, the beauty of the biological information measuring device 400 can be improved.

  FIG. 4 shows a functional block diagram of the biological information measuring device of the present embodiment. 4 includes a sensor unit 40, a body motion sensor unit 170, a vibration generation unit 180, a processing unit 200, a storage unit 240, a communication unit 250, an antenna 252, and a notification unit 260 as a biological information measurement module. Including. Note that the biological information measuring device of the present embodiment is not limited to the configuration shown in FIG. 4, and various components such as omitting some of the components, replacing them with other components, and adding other components. Can be implemented.

  The sensor unit 40 as a biological information measurement module detects biological information such as a pulse wave, and includes a light receiving unit 140 and a light emitting unit 150. A pulse wave sensor (photoelectric sensor) is realized by the light receiving unit 140, the light emitting unit 150, and the like. The sensor unit 40 outputs a signal detected by the pulse wave sensor as a pulse wave detection signal.

  The body motion sensor unit 170 outputs a body motion detection signal that is a signal that changes according to body motion, based on sensor information of various sensors. The body motion sensor unit 170 includes, for example, an acceleration sensor 172 as a body motion sensor. The body motion sensor unit 170 may include a pressure sensor, a gyro sensor, or the like as the body motion sensor.

  The processing unit 200 performs various signal processing and control processing using the storage unit 240 as a work area, for example, and can be realized by a processor such as a CPU or a logic circuit such as an ASIC. The processing unit 200 includes a signal processing unit 210, a pulsation information calculation unit 220, and a notification control unit 230.

  The signal processing unit 210 performs various types of signal processing (filter processing and the like). For example, the signal processing unit 210 performs signal processing on a pulse wave detection signal from the sensor unit 40, a body motion detection signal from the body motion sensor unit 170, and the like. Do. For example, the signal processing unit 210 includes a body movement noise reduction unit 212. Based on the body motion detection signal from the body motion sensor unit 170, the body motion noise reduction unit 212 performs a process of reducing (removing) body motion noise that is noise caused by body motion from the pulse wave detection signal. Specifically, for example, noise reduction processing using an adaptive filter or the like is performed.

  The pulsation information calculation unit 220 performs pulsation information calculation processing based on the signal from the signal processing unit 210 and the like. The pulsation information is information such as the pulse rate. Specifically, the pulsation information calculation unit 220 obtains a spectrum by performing frequency analysis processing such as FFT on the pulse wave detection signal after the noise reduction processing in the body motion noise reduction unit 212, and obtains the spectrum. In FIG. 5, processing is performed in which a representative frequency is a heartbeat frequency. A value obtained by multiplying the obtained frequency by 60 is a commonly used pulse rate (heart rate). Note that the pulsation information is not limited to the pulse rate itself, and may be other various information (for example, the frequency or cycle of the heartbeat) representing the pulse rate, for example. Moreover, the information which represents the state of pulsation may be sufficient, for example, it is good also considering the value showing the blood volume itself as pulsation information.

  The notification control unit 230 controls the notification unit 260. The notification unit 260 (notification device) notifies the user of various types of information under the control of the notification control unit 230. As the notification unit 260, for example, a notification light emitter can be used. In this case, the notification control unit 230 controls lighting, blinking, and the like of the light emitter by controlling the current flowing through the LED. Note that the notification unit 260 may be a display unit such as an LCD, a buzzer, or the like.

  The notification control unit 230 controls the vibration generation unit 180. The vibration generator 180 notifies the user of various types of information by vibration. The vibration generator 180 can be realized by a vibration motor (vibrator), for example. For example, the vibration motor generates vibration by rotating an eccentric weight. Specifically, eccentric weights are attached to both ends of the drive shaft (rotor shaft) so that the motor itself swings. The vibration of the vibration generator 180 is controlled by the notification controller 230. The vibration generator 180 is not limited to such a vibration motor, and various modifications can be made. For example, the vibration generating unit 180 may be realized by a piezo element or the like.

  For example, a start-up notification when the power is turned on, a notification of the success of the first pulse wave detection, a warning when a pulse wave cannot be detected continues for a certain period of time, a notification when the fat burning zone moves, In addition, a warning at the time of battery voltage drop, a notification of a wake-up alarm, or a notification such as an email or a phone call from a terminal device such as a smartphone can be performed. These pieces of information may be notified by a notification light emitting unit, or may be notified by both the vibration generating unit 180 and the light emitting unit.

  The communication unit 250 performs communication processing with the external terminal device 420 as described with reference to FIG. For example, a wireless communication process is performed according to a standard such as Bluetooth (registered trademark). Specifically, the communication unit 250 performs a signal reception process from the antenna 252 and a signal transmission process to the antenna 252. The function of the communication unit 250 can be realized by a logic circuit such as a communication processor or ASIC.

2. Configuration Example of Sensor Unit as Biological Information Measurement Module A detailed configuration example of the sensor unit 40 as the biological information measurement module will be described with reference to FIGS. 5, 6, 7, 8, and 9. FIG. 5 is a diagram illustrating a configuration example 1 of the sensor unit 40, FIG. 5A is a plan view, and FIG. 5B is a front sectional view. 6 is a partially enlarged view (a front sectional view) of FIG. 5A showing an example of the light receiving unit in the configuration example 1 of the sensor unit, and FIG. 6A shows the example 1 and FIG. B) shows Example 2. FIG. 7 is a table showing suitability determination related to the thickness of the laminate constituting the optical filter. FIG. 8 is a plan view illustrating a configuration example 2 of the sensor unit as the biological information measurement module according to the first embodiment. FIG. 9 shows another configuration example of the sensor unit as the biological information measurement module according to the first embodiment, FIG. 9A is a plan view showing the configuration example 3, and FIG. 9B is the configuration example 4. FIG.

(Configuration example 1 of sensor unit)
First, a configuration example 1 of the sensor unit 40 will be described with reference to FIGS. 5 and 6. The sensor unit 40 of the configuration example 1 includes a light receiving unit 140, a light emitting unit 150, and a wall unit 70 as a frame between the light receiving unit 140 and the light emitting unit 150. The light receiving unit 140 and the light emitting unit 150 are arranged at a predetermined interval and are mounted on a support surface 160a of a substrate 160 (sensor substrate) as a support unit. The light emitting unit 150 emits light to an object (such as a subject). The light receiving unit 140 receives light (reflected light, transmitted light, etc.) that has passed through the object. For example, when the light emitting unit 150 emits light and the light is reflected by an object (for example, a blood vessel), the light receiving unit 140 receives and detects the reflected light. The light receiving unit 140 can be realized by a light receiving element such as a diode element. The light emitting unit 150 can be realized by a light emitting element such as an LED. For example, the light receiving unit 140 can be realized by a PN junction diode element or the like formed on the semiconductor substrate 141. In this case, an angle limiting filter 142 for narrowing the light receiving angle, which will be described later, and a wavelength limiting filter (optical filter film) 148 for limiting the wavelength of light incident on the light receiving element may be formed on the diode element. Good.

  A dome-shaped lens 151 (a condensing lens in a broad sense) provided as a condensing member provided in the light emitting unit 150 is an LED chip (in a broad sense, sealed with a resin (sealed with a light transmitting resin)). It is a lens for condensing light from the light emitting element chip). That is, in the surface-mounted light emitting unit 150, the LED chip is disposed below the dome-shaped lens 151, and the light from the LED chip is condensed by the dome-shaped lens 151 and emitted to the object. Thereby, since the intensity | strength of the light irradiated to a target object can be strengthened, the optical efficiency of a photon detection unit (sensor part 40) can be improved, and it becomes possible to perform a more exact measurement.

  6A and 6B, the light receiving unit 140 includes a PN junction photodiode element 135 formed on the semiconductor substrate 141, an angle limiting filter 142 for narrowing the light receiving angle, and a protective layer 136. , And a wavelength limiting filter 148 as an optical filter that limits the wavelength of light incident on the light receiving unit 140.

  In the photodiode element 135, the photodiode element 135 is formed on the semiconductor substrate 141. The photodiode element 135 is formed by forming an impurity region by ion implantation or the like. For example, the photodiode element 135 is realized by a PN junction between an N-type impurity region formed on the P substrate and the P substrate. Alternatively, it is realized by a PN junction between a P-type impurity region formed on a deep N well (N-type impurity region) and the deep N well.

The angle limiting filter 142 is formed of a light shielding material (light absorbing material or light reflecting material) having a light shielding property with respect to a wavelength detected by the photodiode element 135. Specifically, the angle limiting filter 142 is formed by a wiring formation process of a semiconductor process, and is formed by, for example, a conductive layer such as an aluminum (light reflecting material) wiring layer and a conductive plug such as a tungsten (light absorbing material) plug. The The length of the base of the angle limiting filter 142 (for example, the longest diagonal line of the bottom surface or the long diameter) and the aspect ratio of the height are set according to the transmission wavelength band of the wavelength limiting filter 148. The opening (hollow part) of the angle limiting filter 142 is formed of a material transparent to the wavelength detected by the photodiode element 135, and is formed (filled) with an insulating layer such as SiO ₂ (silicon oxide film), for example. Is done.

The angle limiting filter 142 can be formed by a wiring layer forming process of another circuit (not shown) formed on the semiconductor substrate 141. Specifically, the angle limiting filter 142 is formed simultaneously with the formation of the wiring layer of the circuit, and is formed by all or part of the wiring layer forming process. For example, the angle limiting filter 142 is formed by forming an aluminum (light reflecting material in a broad sense) wiring layer by sputtering aluminum, forming an insulating film by SiO ₂ deposition, or forming a contact by tungsten (light absorbing material in a broad sense). It is formed. The angle limiting filter 142 is not limited to an aluminum (light reflecting material) wiring layer and a tungsten (light absorbing material) contact, but is formed by a wiring layer made of a light absorbing material such as tungsten and a contact made of a light reflecting material such as aluminum. May be. However, the light shielding property increases as the light absorbing material is formed.

The protective layer 136 is formed on the angle limiting filter 142. The protective layer 136 may be flat as shown in FIG. 6A, or as shown in FIG. 6B, the protective layer 136 has inclined surfaces with different inclination angles depending on the transmission wavelength of the wavelength limiting filter 148. You may have. Specifically, a plurality of inclined surfaces having an inclination angle θ1 with respect to the plane (upper surface) of the semiconductor substrate 141 are formed on the photodiode element 135. The protective layer 136 is formed by processing an insulating film such as SiO ₂ by etching or CMP, a gray scale lithography technique, or the like.

  The wavelength limiting filter 148 is also called an optical bandpass filter, and is formed by a stacked body (multilayer thin film) stacked on the upper side of the semiconductor substrate 141 including the protective layer 136. The transmission wavelength band of the wavelength limiting filter 148 is determined by the thickness of the laminate, the inclination angle θ1 of the protective layer 136, the incident light limiting angle (aspect ratio) of the angle limiting filter 142, and the like. Since the wavelength limiting filter 148 has a configuration in which the transmission wavelength varies depending on the tilt angle, the wavelength limiting filter 148 is not laminated in a separate process for each transmission wavelength, but is laminated in the same multilayer film forming process.

The wavelength limiting filter 148 is formed by a laminate composed of a plurality of sets of multilayer thin films having different transmission wavelengths. For example, as shown in FIG. 6A, a protective layer 136 that does not have an inclination angle or has a very small inclination angle, that is, is flat, is provided on the angle limiting filter 142. A flat laminate (multilayer thin film) may be formed. Then, the plurality of sets of multilayer thin films are formed one by one by a thin film forming process.
For example, as shown in FIG. 6B, the wavelength limiting filter 148 is formed of a laminated body composed of a multilayer thin film inclined at an angle θ1 corresponding to the transmission wavelength with respect to the semiconductor substrate 141. It may be. More specifically, the wavelength limiting filter 148 is formed of a laminate composed of a plurality of sets of multilayer thin films having different transmission wavelengths. The plurality of sets of multi-layered thin films are formed in the same thin film forming process because the inclination angle θ1 with respect to the semiconductor substrate 141 differs depending on the transmission wavelength. For example, as shown in FIG. 6B, a plurality of multilayer thin films having an inclination angle θ1 are continuously arranged to form a set of multilayer thin films. When multilayer thin films having different inclination angles θn are arranged adjacent to each other and the multilayer thin films having this inclination angle θn are repeatedly arranged, a plurality of multilayer thin films having the same inclination angle (for example, θ1) A laminate) may be formed.

The laminated body of the wavelength limiting filter 148 composed of multilayer thin films is, for example, as a first layer from the protective layer 136 side, for example, a silicon oxide (SiO ₂ ) film 143 as a first oxide film, and a first layer as a _second layer. Silicon nitride (Si ₃ N ₄ ) film 144 as the nitride film 144, silicon oxide (SiO ₂ ) film 145 as the second oxide film as the third layer, silicon nitride (Si as the second nitride film as the fourth layer) ₃ N ₄ ) film 146, and thereafter, the layers are alternately stacked in this order. Thus, by alternately stacking oxide films (silicon oxide (SiO ₂ ) films) and nitride films (silicon nitride (Si ₃ N ₄ ) films), incident light is interfaced between the oxide film and the nitride film. Thus, part of the light is transmitted light and part of it is reflected light. Further, a part of the reflected light is reflected again at the boundary surface and combined with the transmitted light. At this time, the light of the wavelength that matches the optical path length of the reflected light is intensified by the phase of the reflected light and the transmitted light being intensified, and the light of the wavelength that does not match the optical path length of the reflected light is the phase of the reflected light and the transmitted light. Will not match and weaken. As a result, only light having a necessary wavelength can reach the photodiode element 135 that receives the light. Therefore, more accurate measurement is possible. Note that, in the drawing, a four-layer stack is shown as an example, but the number of layers (the number of stacks) is not limited to this.

  Note that the laminated body in the wavelength limiting filter 148 may or may not exhibit characteristics as the wavelength limiting filter 148 (for example, a light blocking rate of an unnecessary light component (noise component)) depending on the thickness, or may be produced. It is affected by the decline of sex. In order to cope with these, while checking the suitability for each thickness t of the laminate while changing the thickness t of the laminate, the verification results are shown in the table of FIG. The table shown in FIG. 7 shows the results of evaluation from the viewpoint of whether or not a sufficient function can be exhibited as the wavelength limiting filter 148 when the thickness t of the laminate is sequentially changed, and the suitability of productivity. ing.

  As shown in the table of FIG. 7, the laminate in the wavelength limiting filter 148 preferably has a thickness t of 0.40 μm or less and 0.20 μm or more. If the thickness t of the laminate is 0.20 μm or more, the function as a wavelength limiting filter can be improved sequentially. For example, an optical component (noise component) unnecessary for measurement of biological information such as a pulse wave can be removed. Can be cut. When the thickness t of the laminate is less than 0.20 μm, it hardly plays the role of the wavelength limiting filter 148 and it is difficult to accurately measure biological information. On the other hand, as the thickness t of the laminate increases, the time required for the formation increases, that is, the number of man-hours for forming the laminate increases, and the productivity decreases. Here, when the thickness t of the laminate exceeds 0.40 μm, the effect (characteristic) as the wavelength limiting filter 148 is hardly changed, and even if the thickness t of the laminate is increased, the measurement is performed. It cannot be expected to greatly improve the accuracy. That is, there is no difference in the effects (characteristics) as the wavelength limiting filter 148, only the number of forming steps is increased, and the thickness t of the laminate exceeding 0.40 μm is unnecessary. Therefore, by setting the thickness t of the laminate constituting the wavelength limiting filter 148 to 0.40 μm or less and 0.20 μm or more, an optical component that is unnecessary for measuring biological information without drastically reducing productivity. (Noise component) can be cut efficiently. Further, by providing such a wavelength limiting filter 148 on the light receiving unit 140 on the light incident side, the sensor unit as a smaller biological information measurement module without changing the size, that is, without increasing the size. 40 can be configured.

  Further, as shown in the table of FIG. 7, it is more preferable that the laminate in the wavelength limiting filter 148 has a thickness t of 0.36 μm or less and 0.24 μm or more. Since the effect (characteristic) as the wavelength limiting filter 148 can be further enhanced by setting the thickness of the laminated body t to 0.24 μm or more in this way, unnecessary light (noise) is used during light exercise. Even if a component enters, it can be shielded from light, and accurate measurement can be performed. Further, when the thickness t of the laminate is 0.36 μm or less, productivity can be further improved, and both improvement in productivity and improvement in measurement accuracy can be achieved.

  Further, as shown in the table of FIG. 7, it is particularly preferable that the thickness t of the laminated body in the wavelength limiting filter 148 be 0.31 μm or less and 0.27 μm or more. Thus, the effect (characteristic) as the wavelength limiting filter 148 can be further enhanced by setting the thickness t of the laminate to 0.27 μm or more. Therefore, if you exercise intensely to some extent, even if unnecessary light entering (noise component) increases, the light blocking ability has increased, so you can sufficiently shield unnecessary light (noise component), Accurate measurement can be performed. Further, by making the thickness t of the laminated body 0.31 μm or less, the productivity can be further improved, and both the improvement of the productivity and the improvement of the measurement accuracy described above can be particularly suitably achieved. it can.

  Returning to FIG. 5 and FIG. 6, the description of the structure of the laminated body of the wavelength limiting filter 148 will be continued. It is preferable that the average film thickness of the nitride film constituting the multilayer body and laminated in several layers is thinner than the average film thickness of the oxide film laminated in several layers. Here, in the case of the average film thickness of the nitride film, the average film thickness is Σ (film thickness t2, t4 of each nitride film) / the number of nitride film stacks, and in the case of the average film thickness of the oxide film , Σ (film thicknesses t1 and t3 of each oxide film) / the number of stacked oxide films. Since the material constituting the nitride film is relatively expensive, it is possible to form a laminate at a relatively low cost by making the average film thickness of the nitride film thinner than the average film thickness of the oxide film. It becomes.

  The average film thickness of the nitride film is preferably thicker than the average film thickness of the oxide film. Since the nitride film has a higher light shielding efficiency of light components (noise components) that are unnecessary for measurement of biological information such as pulse waves, for example, the nitride film has a larger average film thickness than the oxide film. This makes it possible to more efficiently shield light components (noise components) that are unnecessary for measurement of biological information. In other words, since unnecessary light components (noise components) can be sufficiently cut, more accurate measurement of biological information can be performed.

Note that as the material of the oxide film constituting the laminated body, titanium oxide (TiO ₂ ), niobium pentoxide (Nb ₂ O ₅ ), or the like can be applied in addition to silicon oxide (SiO ₂ ). In addition to silicon nitride (Si ₃ N ₄ ), titanium nitride (TiN) or the like can be used as the material of the nitride film.

Further, in the laminated body constituted by the multilayer thin films of the wavelength limiting filter 148 as described above, the first layer on the protective layer 136 side, that is, the lowermost layer of the laminated body is formed of an oxide film such as silicon oxide (SiO ₂ ). It can also be configured. In this way, by forming the first layer on the protective layer 136 side with an oxide film such as silicon oxide (SiO ₂ ), a substrate (for example, the semiconductor substrate 141) or protective layer that is normally used as a base of the light receiving unit 140. Adhesion to SiO ₂ constituting 136 is good, and it is possible to suppress the risk of peeling and the like.

Note that, in the laminated body constituted by the multilayer thin films of the wavelength limiting filter 148, the first layer on the protective layer 136 side, that is, the lowermost layer of the laminated body is constituted by a nitride film such as silicon nitride (Si ₃ N ₄ ). You can also Since the nitride film has a higher refractive index than that of the oxide film, the first layer, which is the lowermost layer that is close to the photodiode element 135, is used as the nitride film in this manner, thereby making unnecessary light more effective. Can be reflected.

  Taking a pulsometer as an example of the biological information measuring device, the light emitted from the light emitting unit 150 travels inside the subject, which is the object, and diffuses or scatters in the epidermis, dermis, subcutaneous tissue, and the like. Thereafter, this light reaches the blood vessel (detected site) and is reflected. At this time, part of the light is absorbed by the blood vessels. Then, the light absorption rate in the blood vessel changes due to the influence of the pulse, and the amount of reflected light also changes. Therefore, the light receiving unit 140 receives this reflected light and detects the change in the amount of light, thereby detecting biological information. It becomes possible to detect the pulse rate and the like.

  In such a biological information measuring device, blood flow on the skin surface is optically measured and converted into a signal to obtain biological information such as a pulse wave and a pulse. Therefore, in order to improve the accuracy and portability of the measurement, noise components such as disturbance light in the optical path from the light emitting unit 150 to the light receiving unit 140 are reduced, or the light is directly incident on the light receiving unit 140 from the light emitting unit 150. It is important to reduce light (direct light, etc.). From such a viewpoint, the inventors have found that it is effective to provide a frame (wall portion 70) as a light shielding portion described below.

  The wall portion 70 as a frame is mounted on the support surface 160 a of the substrate 160 between the light receiving portion 140 and the light emitting portion 150. The wall part 70 is provided in the shape of a plate wall extending in the Y-axis direction along each outer periphery where the light receiving part 140 and the light emitting part 150 face each other. The wall portion 70 abuts on the subject, for example, the skin of the subject, on the top surface (upper surface), and forms a desired space on the upper surface of the light receiving unit 140 and the light emitting unit 150. Further, the wall 70 blocks light such as direct light directly incident on the light receiving unit 140 from the light emitting unit 150 and light such as disturbance light that becomes a noise component incident on the light receiving unit 140, for example. Thus, by providing the wall part 70, the light inject | emitted from the light emission part 150 can prevent reaching the light-receiving part 140 directly (entering). Thereby, light with less noise component can be incident on the light receiving unit 140, and the measurement accuracy of the biological information measurement module can be further improved.

  The wall portion 70 can be formed by, for example, sheet metal processing of a metal plate. Thus, if the wall part 70 is formed by sheet metal processing of a metal plate, the wall part 70 can be easily made of an inexpensive material and excellent in strength, and the metal wall part 70 can reflect light. In addition, the light emitted from the light emitting unit 150 can be efficiently irradiated onto the subject that is the object, and the reflected light from the subject can be efficiently incident on the light receiving unit 140. In addition, as for the wall part 70, resin (including natural resin and synthetic resin), such as rubber | gum, is mention | raise | lifted as materials other than metal material. These materials can be easily obtained at low cost, and the wall portion 70 can be easily formed.

  In the first configuration example, the wall portion 70 as a frame is between the light receiving portion 140 and the light emitting portion 150 and has been described as a wall-like configuration extending in the Y-axis direction, but is not limited thereto. For example, a ring-shaped frame (wall portion) surrounding the outer periphery of the light receiving unit 140 or the light emitting unit 150 can be used as in the second embodiment described later. Even with such a configuration, the same effects as described above can be obtained.

  A connection terminal 274 that is electrically connected to a control unit (not shown) is provided on a support surface 160a of a substrate 160 (sensor substrate) as a support unit. The connection terminal 274 is a terminal for establishing an electrical connection, and can be formed by applying gold (Au) plating to a metal layer, for example, a copper (Cu) layer. The connection terminal 274 is electrically connected by a connection terminal (not shown) provided on the back surface 160b and a through-hole electrode (not shown). By providing such a connection terminal 274 and a connection terminal (not shown) on the back surface 160b side on the substrate 160, it becomes possible to connect the support portion (substrate 160) and, for example, a control portion (not shown) compactly.

  According to the configuration of the biological information measuring device of Embodiment 1 and the sensor unit 40 as the biological information measuring module described above, the optical filter (wavelength limiting filter 148) provided in the light receiving unit 140 has a predetermined number or more of stacked layers. Since it is composed of a number of laminated bodies, for example, light components (noise components) unnecessary for measurement of biological information such as pulse waves can be cut, and accurate biological information can be measured. Moreover, since it is comprised by the laminated body of the number of lamination | stacking below predetermined number, it can prevent reducing the productivity at the time of manufacture of an optical filter (wavelength limiting filter 148). As described above, as a biological information measuring device and a biological information measuring module capable of efficiently cutting an optical component (noise component) unnecessary for measuring biological information and capable of measuring accurate biological information. The sensor unit 40 can be provided.

  In the above-described configuration, the wavelength limiting filter 148 is described as an example formed by a stacked body (multilayer thin film) stacked on the upper side of the semiconductor substrate 141 with the protective layer 136 interposed therebetween, but the configuration is not limited thereto. For example, a configuration in which the protective layer 136 is not provided and the wavelength limiting filter 148 is formed by a stacked body (multilayer thin film) in which a thin film is stacked on the upper side of the semiconductor substrate 141 via the angle limiting filter 142 is applied. It is also possible to do.

(Other configuration examples of the sensor unit)
Next, another configuration example of the sensor unit 40 described above will be described with reference to FIGS. 8 and 9. FIG. 8 is a plan view showing a configuration example 2 of the sensor unit. FIG. 9 shows another configuration example of the sensor unit, FIG. 9A is a plan view showing the configuration example 3, and FIG. 9B is a plan view showing the configuration example 4. FIG. In FIGS. 8 and 9, the arrangement of the light receiving unit 140, the light emitting unit 150, and the wall unit 70 as a frame is mainly illustrated, and other components are not illustrated. In addition, the same components as those in the first embodiment are denoted by the same reference numerals, and the description thereof may be omitted. Also in the following configuration example, the structure of the light receiving unit 140 described above, such as an optical filter (wavelength limiting filter 148), can be similarly applied.

(Configuration example 2)
First, the sensor unit 60 according to Configuration Example 2 will be described with reference to FIG. In the configuration example 1 of the above-described first embodiment, one light emitting unit 150 and one light receiving unit 140 are mounted side by side on the substrate 160 (sensor substrate). The configuration of the sensor unit 60 according to this configuration example 2 is as a plurality of light emitting units provided with a plurality of light emitting units (first light emitting unit 350, second light emitting unit 380) and one light receiving unit 340. The first light emitting unit 350, the second light emitting unit 380, and the light receiving unit 340 are arranged in the order of the first light emitting unit 350, the light receiving unit 340, and the second light emitting unit 380 along a given direction. It is mounted in a line on 360. A wall portion 70 as a frame is provided between the first light emitting unit 350 and the light receiving unit 340 and between the second light emitting unit 380 and the light receiving unit 340.

  Specifically, the distance between the outer periphery 350b of the first light emitting unit 350 on the light receiving unit 340 side and the outer periphery 340a of the light receiving unit 340 on the first light emitting unit 350 side, and the second on the light receiving unit 340 side. The first light emitting unit 350, the light receiving unit 340, and the second light emission so that the distance between the outer periphery 380a of the light emitting unit 380 and the outer periphery 340b of the light receiving unit 340 on the second light emitting unit 380 side is the same. It is preferable that the part 380 is arranged.

According to the sensor unit 60 of the configuration example 2, since a plurality of light emitting units (in this example, the first light emitting unit 350 and the second light emitting unit 380) are provided, the light emitted from the plurality of light emitting units. As a result, sufficient light emission intensity can be ensured, and biological information is detected by detecting light from a plurality of light emitting units, so that measurement accuracy can be further improved.
Also, with such an arrangement, the first light emitting unit 350 and the light receiving unit 340, and the second light emitting unit 380 and the light receiving unit 340 have substantially the same optical path length, and the first light emitting unit 350 And since the light inject | emitted from the 2nd light emission part 380 injects into the light-receiving part 340 substantially simultaneously, S / N ratio can be improved. That is, the measurement accuracy of the biological information measuring device can be improved.

  In the second configuration example, the wall portion 70 as a frame has been described as a wall-shaped configuration extending in one direction, but is not limited thereto. For example, a ring-shaped frame (wall portion) surrounding the outer periphery of the light receiving unit 340 or the light emitting unit 350 can be used as in the second embodiment described later. Even with such a configuration, the same effects as described above can be obtained.

(Configuration example 3)
Next, a sensor unit 80 according to Configuration Example 3 will be described with reference to FIG. In the configuration of the sensor unit 80 according to the configuration example 3, the light emitting unit 850 is shared by the first light receiving unit 840 and the second light receiving unit 870 as the light receiving unit, and then the light emitting unit is aligned along a given direction. One first light receiving unit 840 and one second light receiving unit 870 are arranged on both sides of 850, and each is mounted on the substrate 860 in a line. A wall portion 70 as a frame is provided between the light emitting portion 850 and the first light receiving portion 840 and between the light emitting portion 850 and the second light receiving portion 870. Note that the interval between the light emitting unit 850 and the first light receiving unit 840 and the interval between the light emitting unit 850 and the second light receiving unit 870 are arranged at substantially the same distance. Specifically, the distance between the outer periphery 850b of the light emitting unit 850 on the first light receiving unit 840 side and the outer periphery 840a of the first light receiving unit 840 on the light emitting unit 850 side, and the distance on the second light receiving unit 870 side. The distance between the outer periphery 850a of the light emitting unit 850 and the outer periphery 870a of the second light receiving unit 870 on the light emitting unit 850 side is substantially the same.

According to the sensor unit 80 of the configuration example 3, since a plurality of light receiving units (in this example, the first light receiving unit 840 and the second light receiving unit 870) are provided, more light (strong light) ) Can be received, and the measurement accuracy can be improved.
Similarly to the above-described configuration example 2, the light path lengths of the light emitting unit 850 and the first light receiving unit 840, and the light emitting unit 850 and the second light receiving unit 870 are substantially the same, and are emitted from the light emitting unit 850. Since the incident light enters the first light receiving unit 840 and the second light receiving unit 870 almost simultaneously, the S / N ratio can be improved. That is, the measurement accuracy of the biological information measuring device can be improved.

(Configuration example 4)
Next, a sensor unit 90 according to Configuration Example 4 will be described with reference to FIG. In the configuration of the sensor unit 90 according to the configuration example 4, the light emitting unit 950 is shared by the first light receiving unit 940 and the second light receiving unit 970 as the light receiving unit, and then emits light along a given direction. The part 950, the second light receiving part 970, and the first light receiving part 940 are mounted in a line on the substrate 960 in this order. Therefore, the light emitting unit 950, the second light receiving unit 970, and the first light receiving unit 940 have the interval between the light emitting unit 950 and the first light receiving unit 940 and the interval between the light emitting unit 950 and the second light receiving unit 970. Are arranged at different distances. A wall 70 as a frame is provided between the light emitting unit 950 and the first light receiving unit 940.

  Specifically, the distance between the outer periphery 950b of the light emitting unit 950 on the first light receiving unit 940 side and the outer periphery 940a of the first light receiving unit 940 on the light emitting unit 950 side, and the second light receiving unit 970. The distance between the outer periphery 950b of the light emitting unit 950 on the side and the outer periphery 970a of the second light receiving unit 970 on the light emitting unit 950 side is different. That is, the distance between the first light receiving unit 940 and the light emitting unit 950 is longer than the distance between the second light receiving unit 970 and the light emitting unit 950.

  According to the sensor unit 90 according to the configuration example 4, the light path lengths of the light emitting unit 950 and the first light receiving unit 940, and the light path lengths of the light emitting unit 950 and the second light receiving unit 970 and the light emitted from the light emitting unit 950 are Since the timings of incidence on the first light receiving unit 940 and the second light receiving unit 970 are different, more biological information can be acquired.

  In the configuration example 3 and the configuration example 4 described above, the wall portion 70 as a frame has been described as a wall-shaped configuration extending in one direction, but is not limited thereto. For example, a ring-shaped frame (wall portion) surrounding the outer periphery of the first light-receiving portions 840 and 940, the second light-receiving portions 870 and 970, or the light-emitting portions 850 and 950 as in Embodiment 2 described later. Is also possible. Even with such a configuration, the same effects as described above can be obtained.

(Embodiment 2)
Next, Embodiment 2 of the present invention will be described with reference to the drawings.
The biological information measuring apparatus according to the second embodiment is mounted on a living body (for example, a human body) whose biological information is measured, and monitors the biological information such as a pulse (heart rate), as in the first embodiment. Device. In each figure shown below, the size and ratio of each component may be described differently from the actual component in order to make each component large enough to be recognized on the drawing. is there. Also in the following second to fifth embodiments, the structure of the light receiving unit 140 described in the first embodiment, such as the structure of an optical filter (wavelength limiting filter 148), can be similarly applied.

  First, before describing the heart rate monitoring device 1010 as the biological information measuring device according to the second embodiment, a conventional example of the heart rate monitoring device as the biological information measuring device according to the second embodiment will be described with reference to FIG. .

  FIG. 10 shows a conventional biological information measuring device for measuring physiological parameters (biological information) of a user (subject) 1000 (showing the user's arm in the figure) wearing a heart rate monitoring device. It is sectional drawing which shows the heart rate monitoring apparatus 1010. FIG. The heart rate monitoring apparatus 1010 includes a sensor 1012 that measures a heart rate as at least one physiological parameter of the user 1000 and a case 1014 that houses the sensor 1012. The heart rate monitoring device 1010 is worn on the arm 1001 of the user 1000 by a fixing unit 1016 (for example, a band).

  This sensor 1012 includes a light emitting element 1121 as a light emitting unit and a light receiving element 1122 as a light receiving unit, which are two sensor elements, and is a heart rate monitoring sensor for measuring or monitoring a heart rate. However, it may be a sensor that measures one or more physiological parameters (eg, heart rate, blood pressure, expiratory volume, skin conductivity, skin humidity, etc.). Further, when the case 1014 includes a band-type housing, the case 1014 can be used as a watch-type monitoring device used in sports, for example. It should be noted that the shape of the case 1014 only needs to be able to hold the sensor 1012 in a desired position mainly with respect to the user 1000, and optionally accommodate additional elements such as a battery, processing unit, display, user interface, etc. It may be possible.

  A conventional biological information measuring device is a heart rate monitoring device 1010 for monitoring a user's heart rate. The sensor 1012 is an optical sensor including a light emitting element 1121 and a light receiving element 1122. An optical heart rate monitor using an optical sensor relies on a light emitting element 1121 (usually an LED is used) as a light source that shines light on the skin. A part of the light emitted to the skin from the light emitting element 1121 is absorbed by the blood flowing through the blood vessel under the skin, but the remaining light is reflected and exits the skin. The reflected light passes through a wavelength limiting filter (optical filter) provided on the light receiving element 1122 (usually a photodiode is used) and is captured by the light receiving element 1122. The light reception signal from the light receiving element 1122 is a signal including information corresponding to the amount of blood flowing through the blood vessel. The amount of blood flowing through the blood vessels varies with the pulsation of the heart. Thus, the signal on the light receiving element 1122 changes in response to the heartbeat. That is, the change in the signal of the light receiving element 1122 corresponds to a pulse of the heart rate. Then, by counting the number of pulses per unit time (for example, per 10 seconds), the number of heart beats per minute (ie, heart rate) can be obtained.

  Hereinafter, the heart rate monitoring apparatus 1020 as the biological information measuring device according to the second embodiment will be described with reference to FIG. FIG. 11 is a perspective view showing a heart rate monitoring device as a biological information measuring device according to the second embodiment. Although not shown in FIG. 11, the heart rate monitoring device 1020 as the biological information measuring device according to the second embodiment is attached to the user's arm by a fixing unit such as a band as in the first embodiment. .

  The heart rate monitoring device 1020 as the biological information measuring device according to the second embodiment includes a plurality of (in this example, two) light emitting elements 1221 and 1223 as light emitting units and a light receiving element 1222 as one light receiving unit. They are arranged in a line. Specifically, a sensor 1022 including at least two sensor elements (in this example, as three sensor elements, two light emitting elements 1221 and 1223 serving as a first light emitting unit and a second light emitting unit, and a light receiving unit) And a light receiving element 1222 as the above. Although not illustrated, a wall portion 70 (see FIG. 9) having the same configuration as that of the configuration example 3 described above is provided between the light receiving element 1222 and the light emitting element 1221 and between the light receiving element 1222 and the light emitting element 1223. It is desirable that

  And the light receiving element 1222 as a light-receiving part is arrange | positioned between the two light emitting elements 1221 and 1223 as a 1st light-emitting part and a 2nd light-emitting part. Further, the two light emitting elements 1221 and 1223 as the first light emitting part and the second light emitting part are arranged at positions symmetrical with respect to an imaginary line passing through the center of the light receiving element 1222 as the light receiving part. By arranging the light emitting elements 1221 and 1223 and the light receiving element 1222 in such a manner, dead space is reduced and space saving can be achieved. Moreover, the light which combined the 1st light emission part and 2nd light emission part in a line symmetrical position gathers in a light-receiving part, and can perform more exact detection.

  The sensor element detects a sensor signal. The sensor 1022 includes an optical sensor composed of light emitting elements 1221 and 1223 using two LEDs for emitting light to the user's skin, and at least one light receiving element 1222 (wavelength limiter) for receiving light reflected from the skin. A photodiode provided with a filter (optical filter). Furthermore, the heart rate monitoring device 1020 has a case or a housing (not shown). The case or the housing may be similar to or the same as the case 1014 shown in FIG. 10, or may be similar to or the same as the case portion 30 in the first embodiment.

  The sensor 1022 is carried on one surface of a carrier (substrate) 1026. Here, a configuration including a carrier (substrate) 1026 and a sensor 1022 carried on the carrier (substrate) 1026 corresponds to the biological information measurement module. The same applies to the following third to fifth embodiments. Light emitted from the light emitting elements 1221 and 1223 is reflected without being absorbed by the skin or the like, and can reach the light receiving element 1222 directly. That is, light including the user's biological information directly reaches the wavelength limiting filter (optical filter), passes through the wavelength limiting filter, and enters the photodiode. In the heart rate monitoring device 1020, the distance between the carrier 1026 and the upper surfaces 1221a and 1223a of the light emitting elements 1221 and 1223 is smaller than the distance between the carrier 1026 and the upper surface 1222a of the light receiving element 1222. That is, the difference between the distance between the carrier 1026 and the upper surfaces 1221a and 1223a of the light emitting elements 1221 and 1223 and the distance between the carrier 1026 and the upper surface 1222a of the light receiving element 1222 is Δh. The light receiving element 1222 receives light from the upper surface 1222a which is the uppermost surface layer. According to these configurations, most of the light emitted from the light emitting elements 1221 and 1223 is directed to the skin, and the reflected light is directly incident on the light receiving element 1222 without intervention such as an air layer. In other words, since the light receiving element 1222 is in close contact with the skin, a structure in which a gap is not easily generated between the upper surface (light receiving surface) 1222a of the light receiving element 1222 and the skin can be obtained. Light that becomes a noise source can be prevented from entering the upper surface 1222a. Further, light from the light emitting elements 1221 and 1223 that does not pass through the skin, for example, light that is directly incident on the light receiving element 1222 from the light emitting elements 1221 and 1223 cannot reach the upper surface 1222a of the light receiving element 1222.

(Embodiment 3)
Next, a heart rate monitoring apparatus 1030 as a biological information measuring device according to the third embodiment will be described with reference to FIG. FIG. 12 is a front view showing a heart rate monitoring device as a biological information measuring device according to the third embodiment. The heart rate monitoring device 1030 as the biological information measuring device according to the third embodiment is not shown in FIG. 12, but is attached to the user's arm by a fixing unit such as a band as in the first embodiment. Is done.

  As shown in FIG. 12, the electrical connection terminals 1034 of the light emitting elements 1221 and 1223 as the light emitting parts and the light receiving element 1222 as the light receiving part are made of an insulating material (for example, epoxy resin) 1032 for protection of the electrical elements. Should preferably be covered. Further, the insulating material 1032 can be configured not to cover the light emitting elements 1221 and 1223 and the light receiving element 1222. Specifically, a region between the light-emitting element 1221 and the light-receiving element 1222 and a region between the light-emitting element 1223 and the light-receiving element 1222 can be filled with an insulating material 1032. In other words, at least the upper surface 1222a of the light receiving element 1222 and the upper surfaces 1221a and 1223a of the light emitting elements 1221 and 1223 can be configured not to be covered with the insulating material 1032. By comprising in this way, the interference by the air gap between skin and the light emitting elements 1221 and 1223 can be suppressed. Furthermore, the insulating material 1032 may be configured to cover the upper surfaces 1221a and 1223a of the light emitting elements 1221 and 1223 and the upper surface 1222a of the light receiving element 1222. With this configuration, the upper surface 1222a of the light receiving element 1222 that comes into contact with the skin and the upper surfaces 1221a and 1223a of the light emitting elements 1221 and 1223 can be protected. Damage to the top surfaces 1221a and 1223a of 1223 can be prevented. In this case, the insulating material 1032 can also be regarded as a protective film.

  In the heart rate monitoring apparatus 1030 as the biological information measuring device according to the third embodiment, an insulating material 1032 using an epoxy resin is provided as a generally possible example. In FIG. 12, the insulating material 1032 is arranged without covering the upper surfaces 1221a and 1223a of the light emitting elements 1221 and 1223, and protects the electrical connection terminal 1034. Light emitted from the light emitting elements 1221 and 1223 is represented by arrows.

  In this way, the insulating material 1032 is placed with the minimum amount that does not interfere with the correct function of the heart rate monitoring device 1030, thereby protecting the electrical connection terminals 1034 of the light emitting elements 1221 and 1223 and the light receiving element 1222. Thus, the heart rate monitoring device 1030 can be further improved. Although not shown, a wall portion 70 (see FIG. 9) similar to that of the configuration example 3 described above is provided between the light receiving element 1222 and the light emitting element 1221 and between the light receiving element 1222 and the light emitting element 1223. More preferably.

  It is more preferable to use a heart rate monitoring apparatus 1040 as a biological information measuring device according to the fourth embodiment as shown in FIG. 13 instead of the configuration in which the epoxy resin is injected in the third embodiment.

(Embodiment 4)
Next, a heart rate monitoring device 1040 as a biological information measuring device according to the fourth embodiment will be described with reference to FIG. FIG. 13 is a perspective view showing a heart rate monitoring device as a biological information measuring device according to the fourth embodiment. The heart rate monitoring apparatus 1040 as the biological information measuring device according to the fourth embodiment is not shown in FIG. 13, but is attached to the user's arm by a fixing unit such as a band as in the first embodiment. Is done.

  In the heart rate monitoring device 1040 as the biological information measuring device according to the fourth embodiment, the created frames 1041, 1042, and 1043 are arranged. Frames 1041, 1042, and 1043 are arranged around light emitting elements 1221 and 1223 serving as light emitting units and light receiving elements 1222 serving as light receiving units. A gap 1036 is formed between them. Then, an insulating material (not shown in FIG. 13) is injected using the frames 1041, 1042, and 1043 as guides to cover the electrical connection terminals 1034 of the light emitting elements 1221 and 1223 and the light receiving element 1222.

  In the example shown in Embodiment 4, the light emitting elements 1221 and 1223 and the light receiving element 1222 are surrounded by the individual frames 1041, 1042, and 1043. As another example, all the frames 1041, 1042, and 1043 may be coupled to each other, or all the sensor elements may be surrounded by an integral frame. Note that the frames 1041, 1042, and 1043 can be used as a light shielding wall (wall portion) as an example of a light shielding portion. By using the frames 1041, 1042, and 1043 as light shielding walls (wall portions), light emitted from the light emitting elements 1221 and 1223 can be prevented from entering the light receiving element 1222 directly.

As an improvement in order not to affect the function of the heart rate monitoring device 1040, the upper edges 1041a and 1043a of the frames 1041 and 1043 around the light emitting elements 1221 and 1223 are preferably upper surfaces 1221a and 1223a of the light emitting elements 1221 and 1223, respectively. Lower is preferred. In other words, the distance hFR-LED between the upper edges 1041a and 1043a of the individual frames 1041 and 1043 and the carrier 1026 is equal to the top surfaces 1221a and 1223a of the light emitting elements 1221 and 1223 surrounded by the individual frames 1041 and 1043. The distance hLED to 1026 is the same or smaller (hFR-LED ≦ hLED).
Preferably, the difference between the distance hLED between the upper surfaces 1221a and 1223a of the light emitting elements 1221 and 1223 and the carrier 1026 and the distance hFR-LED between the upper edges 1041a and 1043a of the frames 1041 and 1043 and the carrier 1026 is from 0.1 mm. Set in the range of 0.8 mm. More preferably, the difference between the distance hLED between the upper surfaces 1221a and 1223a of the light emitting elements 1221 and 1223 and the carrier 1026 and the distance hFR-LED between the upper edges 1041a and 1043a of the frames 1041 and 1043 and the carrier 1026 is 0. Set in the range of 2 mm to 0.5 mm.

The upper edge 1042a of the frame (receiver frame) 1042 around the light receiving element 1222 is preferably higher than the upper surface 1222a of the light receiving element 1222. In other words, the distance hFR-PD between the upper edge 1042a of the frame 1042 and the carrier 1026 is larger than the distance hPD between the upper surface 1222a of the light receiving element 1222 surrounded by the frame 1042 and the carrier 1026 (hFR-PD> hPD). .
Preferably, the difference between the distance hPD between the upper surface 1222a of the light receiving element 1222 and the carrier 1026 and the distance hFR-PD between the upper edge 1042a of the frame 1042 and the carrier 1026 is set in the range of 0 mm to 0.5 mm. More preferably, the difference between the distance hPD between the upper surface 1222a of the light receiving element 1222 and the carrier 1026 and the distance hFR-PD between the upper edge 1042a of the frame 1042 and the carrier 1026 is in the range of 0.1 mm to 0.2 mm. Set.
Further, the distance hFR-PD between the upper edge 1042a of the frame 1042 and the carrier 1026 is larger than the distance hLED between the upper surfaces 1221a and 1223a of the light emitting elements 1221 and 1223 and the carrier 1026 (hFR-PD> hLED).

For example, when the light receiving element 1222 and the light emitting elements 1221 and 1223 are close to each other, there may be a configuration in which only one frame wall exists between the light receiving element 1222 and the light emitting elements 1221 and 1223. This may occur for reasons of manufacturability. When the single frame wall is a case, the frame walls of both frames coincide with each other in the light receiving element 1222 and the light emitting elements 1221 and 1223. This means that the frame walls of the light emitting elements 1221 and 1223 become higher. Specifically, the frame walls on the side where the light receiving elements 1222 are located in the frames 1041 and 1043 surrounding the light emitting elements 1221 and 1223 are higher. Therefore, the other frame walls are lower than the upper surfaces 1221a and 1223a of the light emitting elements 1221 and 1223.
Further, instead of the frames 1041, 1042, and 1043, a first wall portion is provided between the light receiving element 1222 and the light emitting element 1221 or the light emitting element 1223, and the outside of the light emitting elements 1221 and 1223, that is, with respect to the light receiving element 1222. The second wall portion may be provided on the side opposite to the first wall portion.
When configured in this manner, the distance between the carrier 1026 and the upper surface of the first wall portion may be configured to be larger than the distance between the carrier 1026 and the upper surface of the second wall portion. With this configuration, the function of the frame can be realized with fewer members than in the case where the light emitting element and the light receiving element are surrounded as shown in FIG.

  Note that by using the frames 1041, 1043 and the frame 1042 as in the fourth embodiment, it is possible to prevent an insulating material such as an injected epoxy resin from flowing out. In addition, creating an additional structure and separating an insulating material such as an epoxy resin in this way is an option that enables high mass productivity. Note that the frames 1041 and 1043 and the frame 1042 may be made of the same material as the carrier 1026. For example, the frame may be formed by injection molding using an epoxy resin or a polycarbonate resin.

  As described above, the insulating material 1032 (see FIG. 12) protects the electrical connection terminals 1034 of the sensor elements (the light emitting elements 1221 and 1223 and the light receiving element 1222). However, these electrical connection terminals 1034 must make further contact with other components, such as additional electronics (eg, drivers, detection electronics, processors or power supplies). This means that the carrier 1026 (which may be a printed circuit board (PCB)) has some electrical connection with these additional electronic devices. Further, the structure of the heart rate monitoring device according to the present embodiment can be applied not only to the heart rate but also to a pulse wave and pulse measuring device.

(Embodiment 5)
With reference to FIG. 14, the heart rate monitoring apparatus 1050 as a biological information measuring device according to the fifth embodiment will be described. FIG. 14 is a cross-sectional view showing a heart rate monitoring device as a biological information measuring device according to the fifth embodiment. The heart rate monitoring device 1050 as the biological information measuring device according to the fifth embodiment is not shown in FIG. 14, but is attached to the user's arm by a fixing unit such as a band as in the first embodiment. Is done.

  A heart rate monitoring device 1050 as a biological information measuring device according to the fifth embodiment includes the above-described additional electronic devices (for example, a processor 1052 and a driver 1054). External electrical connection terminals (not shown) are not arranged on the same carrier 1026 as the sensor elements (the light emitting element 1221 as the light emitting part and the light receiving element 1222 as the light receiving part). In other words, the additional electronic device is arranged on a carrier or substrate different from the sensor element. With this configuration, necessary additional electronic devices can be mounted on the heart rate monitoring device 1050 while maintaining good contact between the skin and the sensor elements (the light emitting element 1221 and the light receiving element 1222). For example, the external electrical connection terminal can be disposed on the side surface of the carrier 1026.

  As described above, different types of sensors can be used in the biological information measuring device according to the present invention. For example, when the above-described light receiving element 1222 is an electric sensor, two skin conductance electrodes (for example, a sensor element (the light emission shown in FIG. 11) for contacting the user's skin and measuring the user's conductivity are used. The element 1221 and the light receiving element 1222)) are covered with skin. Further, two or more types of sensors can be used in this type of biological information measuring device, and the number of sensor elements is not limited.

In Embodiments 2-5, the flowchart of the method of manufacturing the biometric information measuring device which measures the physiological parameter proposed is shown in FIG.
In the first step S 1, a sensor 1022 including at least two sensor elements (a light emitting element 1221 and a light receiving element 1222) for detecting a sensor signal is disposed on a carrier 1026. In the second step S2, electrical contact of the sensor element is formed on the carrier 1026. In the third step S3, one or more frames 1041, 1042 are formed on the carrier 1026 around the sensor 1022 and / or individual sensor elements (light emitting element 1221 and light receiving element 1222). In the fourth step S4, the insulating material 1032 is injected into regions surrounded by the respective frames 1041 and 1042, which do not cover the upper surfaces 1221a and 1222a of the sensor elements (the light emitting element 1221 and the light receiving element 1222) provided in the carrier 1026. Is satisfied.

  According to the second to fifth embodiments, a method is proposed that achieves electrical contact protection without negatively affecting the performance of the biological information measuring device. And it forms by the method which maintains the performance of a sensor. For example, at least one of these frames 1041, 1043 prevents the position of the sensor relative to the skin from shifting. Further, at least one of the frames 1041 and 1043 can help prevent the emitted direct light from entering the light receiving element 1222. Preferably, the height of the frames 1041 and 1043 around the light emitting elements 1221 and 1223 on the side facing the light receiving element 1222 should be smaller than the height of the upper surfaces 1221a and 1223a of the light emitting elements 1221 and 1223. In addition, the frame 1042 around the light receiving element 1222 may be higher than the upper surface 1222a of the light receiving element 1222.

  The configuration of the interval between the light emitting unit and the light receiving unit described in the first embodiment can also be applied to the biological information measuring devices according to the second to fifth embodiments described above. By adopting such a configuration, the same effect as in the first embodiment can be obtained.

(Embodiment 6)
The biological information measuring devices of Embodiments 1 to 5 described above are strain gauges, thermometers, thermometers, acceleration sensors, gyro sensors, piezoelectric sensors, barometric pressure sensors, blood pressure meters, electrochemical sensors, GPS (Global Positioning System), vibrations. Various sensors such as a meter may be provided. With these sensors, heart rate, pulse, rhythm variation, EKG (ElektroKardiogram), ECG (Electrocardiogram), respiratory rate, skin temperature, body temperature, body heat flow, electric skin reaction, GSR ( Galvanic skin reflex: electromyogram, EMG (electromyogram), EEG (electroencephalogram), EOG (electrooculography), blood pressure, body fat, hydration level, activity level, body movement , Oxygen consumption, glucose, blood sugar level, muscle mass, muscle pressure, bone pressure, ultraviolet absorption, sleep state, physical condition, stress state, body position (eg, lying, standing, sitting, etc.) Alternatively, information about an individual's physiological state can be derived based on data indicative of one or more physiological parameters. Also, the values obtained by these various sensors are transmitted to portable communication terminals such as smartphones, mobile phones, feature phones, and information processing terminals such as computers and tablet computers, for example, You may perform the calculation process of a physiological parameter in a processing terminal.

  Before measuring the biological information, the user inputs his / her profile to the biological information measuring device, the portable communication terminal, or the information processing terminal. This allows the user to take into account the user's unique characteristic information and environment that needs to be addressed to maximize the likelihood of establishing and maintaining a recommended healthy lifestyle based on their profile and biometric measurements. Information can be provided. Information provided includes exercise information such as exercise type, exercise intensity, exercise time, etc., meal time, amount of meal, recommended intake ingredients and intake menu, intake intake ingredients and intake menu to be avoided, etc. Dietary information, sleep time, sleep depth, sleep quality, wake-up time, landing time, working time, stress information, calorie consumption, calorie intake, calorie balance, etc., basic metabolism, body One or more of physical information such as fat mass, body fat percentage, muscle mass, etc., medication information, supplement intake information, medical information, etc. may be mentioned.

  The user's own profile to be entered in advance includes, for example, age, date of birth, gender, hobby, occupation, blood type, past sports history, activity level, meal, regularity of sleep, regularity of defecation habits, status User characteristics such as adaptability, persistence, responsiveness, strength of response, nature, user self-independence level, self-reliance, self-management, sociality, memory and academic fulfillment ability, user arousal level, cognitive speed , Ability to avoid attention alienation factors, user attention, including wakefulness and self-supervision ability, attention continuation ability, weight, height, blood pressure, user health, doctor checkup results, doctor checkup date, doctor and health Presence or absence of contact with the administrator, drugs and supplements currently taken, presence or absence of allergies, history of allergies, current allergic symptoms, findings of health related behaviors, users History of illness, user's surgery history, family history, social events such as divorce or unemployment that require individual adjustments, user's health priorities, values, ability to change behavior, causes of life stress Possible events, stress management methods, user self-awareness, user empathy, user authority delegation, user self-esteem, user exercise, sleep state, relaxation state, daily routine of daily activities, user's User perceptions of the character of an important person in life (eg, spouse, friend, colleague or boss), whether there are conflicts that interfere with a healthy lifestyle or contribute to stress in the relationship of the important person One or more of the above and the like.

  Here, in order to maximize the possibility of establishing and maintaining a recommended healthy lifestyle, it is possible to receive specific characteristic information and environmental information of a user who needs to take action in Embodiment 6. Such a biological information measuring device will be described with reference to FIGS. FIG. 16 is a diagram illustrating an outline of a web page serving as a starting point of a health manager in the biological information measuring device according to the sixth embodiment. FIG. 17 is a diagram illustrating an example of a nutrition web page, and FIG. 18 is a diagram illustrating an example of an activity level web page. Moreover, FIG. 19 is a figure which shows an example of a mental concentration web page, and FIG. 20 is a figure which shows an example of a sleep web page. FIG. 21 is a diagram illustrating an example of a daily activity web page, and FIG. 22 is a diagram illustrating an example of a health level web page.

  Although not illustrated, the biological information measuring device according to the sixth embodiment includes a sensor device connected to, for example, a microprocessor. In the biological information measuring device according to the sixth embodiment, data on various life activities that are finally sent to the monitor unit and stored, personal data input by the user from a website maintained by the monitor unit, or Life information is processed by a microprocessor and provided as biological information. Hereinafter, a specific example will be described and described.

  A user accesses a health manager for the user via a web page, application software, or other communication medium. FIG. 16 shows, as an example, a web page 550 that is the starting point of a health manager. The health manager web page 550 shown in FIG. 16 provides various data to the user. The data provided in this way includes, for example, (1) data indicating various physiological parameters based on values measured by various sensor devices, and (2) data derived from data indicating various physiological parameters. (3) one or more of data indicating various context parameters generated by the sensor device and data entered by the user.

  The analysis state data indicates (1) data indicating various physiological parameters acquired by the sensor device, (2) data derived from various physiological parameters, and (3) various context parameters acquired by the sensor device. Characterized by the use of certain utilities or algorithms to convert one or more of the data and data entered by the user into calculated health, (4) health and lifestyle index, etc. There is. For example, things such as the amount of calories, protein, fat, carbohydrates and certain vitamins can be calculated based on data entered by the user in relation to the food consumed. As another example, skin temperature, heart rate, respiration rate, heat flow and / or GSR can be used to provide the user with an index of stress level over a desired time. As yet another example, skin temperature, heat flow, beat-to-beat variation, heart rate, pulse, respiratory rate, core body temperature, electrical skin reaction, EMG, EEG, EOG, blood pressure, oxygen consumption, ambient sound and accelerometer By using body movements detected by such devices, it is possible to provide the user with an index of sleep patterns over a desired time.

  A web page 550 shown in FIG. 16 displays a health index 555 as a health level. This health index 555 is a graphical utility for measuring user performance and the degree of achievement of recommended healthy daily routines and feeding them back to member users. As described above, the health index 555 indicates the progress of actions related to the health status and health maintenance of the member users. The health index 555 includes six categories related to the user's health and lifestyle: nutrition, activity level, mental concentration, sleep, daily activity, and spirit (total feeling). The category of “nutrition” relates to information on what, when and how much the person (user) eats and drinks. The “activity level” category relates to the amount of exercise that the person moves around. The category of “Mental Concentration” relates to the quality of the activity (ability) for the person (user) to become relaxed when the spirit of the person (user) is highly concentrated, and the time for which the person concentrates on the activity. The category of “sleep” relates to the sleep quality and quantity of the person (user). The “Daily Activity” category relates to what the person (user) has to do every day and the health risks the person encounters. The category of “Energetic (feelings)” relates to the general perception of whether or not you feel good about a particular day. Each category is preferably provided with a level display or bar graph showing what the user has achieved for that category on a scale that varies from “bad” to “good”.

  When each member user completes the initial survey described above, a profile is created that provides the user with a summary of their characteristics and living environment, and recommended healthy daily routines and / or goals are presented . Recommended healthy routines include any combination of appropriate nutrition, exercise, mental concentration, and specific advice on the user's daily activities (life). An exemplary schedule or the like may be presented as a guide on how to incorporate these recommended healthy daily activities into the user's life. The user regularly receives the survey and, based on the results, implements the items described above accordingly.

  The “nutrition” category is calculated from both data entered by the user and data sensed by the sensor device. Data entered by the user includes the time and eating time for breakfast, lunch, dinner, and any snack, as well as food and vitamin supplements and water and other liquids (drinks) that are consumed during a preselected time. Water and liquid food). Based on this data and the accumulated data on the known properties of various foods, the central monitoring unit is able to use well-known nutritional variables such as calories burned or content of proteins, fats, carbohydrates, vitamins, etc. Calculate the value.

  In the “Nutrition” category, decisions can be made regarding recommended healthy daily routines based on the bar graph showing nutrition of the health index 555. This recommended healthy daily routine can be adjusted based on information such as the user's gender, age, height / weight. In addition, you or your agent set specific nutritional goals for the amount of nutrients and water, such as calories, protein, fiber, fat, and carbohydrates you consume every day, and the percentage of your total intake. be able to. Parameters used to calculate the bar graph include the number of meals per day, water consumption, the type of food eaten daily, and the amount entered by the user.

  Nutritional information is presented to the user via a nutrition web page 560 as shown in FIG. Nutrition web page 560 includes nutrition value charts 565 and 570 showing the actual and target values of nutrition in a pie chart, and nutrition intake charts 575 and 580 showing the actual total amount of nutrient intake and the target total nutrient intake, respectively. It is preferable to include. Nutrition numerical charts 565, 570 preferably show percentages such as carbohydrates, proteins and fats, and nutrition intake charts 575, 580 show total calorie values and target values for fats, carbohydrates, proteins and vitamins. It is preferable to show the components separately. Nutrition web page 560 directly checks history 585 showing time spent on food and water, user news articles related to nutrition, advice on improving nutritional routines, and relevant advertisements somewhere on the network It also includes a hyperlink 590 that allows it to be performed, and a calendar 595 capable of selecting an application period and the like. The item indicated by the hyperlink 590 can be selected based on information obtained from the survey about the individual and the individual's performance measured by the health index.

  The “activity level” category of the health index 555 is designed to support the user's check on when and how (actually) the user acted on that day. And data sensed by the sensor device are used. The data entered by the user is related to the user's daily activities, for example, the user works from 8 am to 5 pm at the desk and then takes an aerobics course from 6 pm to 7 pm Details are included. Relevant data sensed by the sensor device includes heart rate, motion sensed by devices such as accelerometers, heat flow, respiratory rate, calories burned, GSR, and hydration levels, which are sensor devices. Or it can be taken out by the central monitor unit. Calorie consumption is calculated by multiplying the type of exercise entered by the user with the duration of the exercise entered by the user, multiplying the sensed exercise with the duration of exercise and the filter constant, or the detected heat flow, time and filter constant. It can be calculated by various methods such as multiplication of

  In the “activity level” category, a recommended healthy daily routine can be determined based on a bar graph showing the activity level of the health index 555. This recommended healthy daily routine is the minimum target calorie consumed in the activity. The minimum target calorie can be set based on information such as the user's sex, age, height, and weight. The parameters used to calculate the bar graph are the time spent on various exercise or energetic lifestyle activities, burning more than what the user entered and / or what the sensor device sensed or pre-calculated energy consumption parameters Contains the number of calories burned.

  Information related to the activity (movement) of an individual user is presented to the user by an activity level web page 600 shown in FIG. The activity level web page 600 includes an activity graph 605 in the form of a bar graph that monitors user activity in three categories: “high”, “medium”, and “low” for a given unit time. An activity percentage chart 610 in the form of a pie chart can be presented to show the percentage of a predetermined period, such as one day, that a user has spent in each category. The activity level web page 600 may also provide a calorie display (not shown) for displaying items such as total calorie burn, daily calorie target value, total calorie intake, and aerobics exercise time. . Activity level web page 600 includes at least one hyperlink 620 to allow the user to directly check for related news articles, advice on improving daily activity levels, and related advertisements on the network.

  Activity level web page 600 can be viewed in a variety of formats, but a graph or chart such as a bar graph, pie chart, and both can be selected by the user and can be selected by an activity level check box 625. is there. The activity level calendar 630 is provided so that an application period or the like can be selected. The item shown in the hyperlink 620 can be selected based on the information extracted from the individual through the survey and the results measured by the health index.

  The “Mental Concentration” category of health index 555 is designed to help users monitor parameters related to time spent performing activities that allow the body to reach deep relaxation while concentrating on the spirit. And based on both data input by the user and data sensed by the sensor device. Specifically, the user can enter the start and end times of relaxation activities such as yoga or meditation. The quality of these activities, as determined by the depth of mental concentration, can be measured by monitoring parameters including skin temperature, heart rate, respiratory rate and heat flow as sensed by the sensor device. It is also possible to take advantage of the percentage change in GSR obtained by either the sensor device or the central monitor unit.

  In the “Mental Concentration” category, a recommendation can be made regarding a recommended healthy routine based on a bar graph showing the level of mental concentration activity of the health index 555. This recommended healthy daily routine includes daily participation in activities that deeply relax the body while keeping the mind highly focused. The parameters used to calculate this bar graph include the length of time spent on mental concentration activity, and the skin temperature, heart rate perceived by the sensor device, from the baseline indicating the depth or quality of the mental concentration activity, This includes percentage change in respiratory rate, heat flow or GSR.

  Information regarding deep self-respecting behavior (introspection) and time spent for mental concentration activities such as deep relaxation of the body is presented to the user via a mental concentration web page 650 shown in FIG. In addition, mental concentration activity is sometimes called a session. The mental concentration web page 650 includes a time 655 spent in the session, a target time 660, a comparison portion 665 showing the target value and actual value of the depth of mental concentration, skin temperature, heart rate, respiratory rate, heat flow and / or GSR. Histogram 670 showing the overall stress level derived from

  In the comparison portion 665, the outline of the person indicating the target mental concentration state is indicated by a solid line, and the outline of the human being indicating the actual mental concentration state is blurred according to the level of mental concentration (in FIG. 19, it is indicated by a broken line). And the solid line. The preferred mental concentration web page 650 also includes hyperlinks 680 that allow users to directly check related news articles, advice on improving mental concentration, and related advertisements on the network, related to improving daily concentration on mental concentration. Includes advice and related advertisements, and a calendar 685 that allows the application period to be selected. The item indicated by the hyperlink 680 can be selected based on the information obtained from the individual through the survey and the results measured by the health index.

  The “sleep” category of health index 555 is designed to help users monitor sleep patterns and sleep quality. This category is intended to help users learn about the importance of sleep in a healthy lifestyle and the relationship of sleep to the circadian cycle, which is a normal daily change in body function. The “sleep” category is based on both data entered by the user and data sensed by the sensor device. Data entered by the user during each relevant time interval includes the user's sleep time and wake-up time (sleep time) and sleep quality rank. Relevant data obtained from sensor devices include skin temperature (body temperature), heat flow, beat-to-beat variation, heart rate, pulse rate, respiratory rate, core body temperature, electrical skin reaction, EMG, EEG, EOG, blood pressure And oxygen consumption. Also relevant are body sounds detected by ambient sounds and devices such as accelerometers. The data can then be used to calculate and derive sleep time and wake time, sleep interruption and sleep quality, sleep depth, and the like.

  A bar graph showing sleep for the health index 555 is displayed for a healthy daily routine that includes ensuring a preferred minimum sleep time every night, a predictable bedtime, and a wake-up time. Specific parameters that allow the calculation of this bar graph include daily sleep and wake-up times that are sensed by the sensor device or entered by the user, and sleep that is graded by the user or derived from other data. Quality is included.

  Information related to sleep is presented to the user by a sleep web page 690 shown in FIG. The sleep web page 690 includes a sleep time display 695 based on either data from the sensor device or data input by the user, a user bedtime display 700, and a wake-up time display 705. Note that the quality of sleep input by the user can be displayed using the sleep quality rank 710. When the display exceeding the time interval of the day is performed on the sleep web page 690, the sleep time display 695 is displayed as a cumulative value, the bedtime display 700, the wake-up time display 705, and the sleep quality rank 710 are average values. Can be calculated and displayed. Sleep web page 690 also includes a sleep graph 715 that can be selected by the user to calculate and display one sleep-related parameter over a predetermined time interval. FIG. 20 shows the change in heat flow (body temperature) over the day, but this heat flow tends to be low during sleep and high when waking up. From this information, the person's biorhythm can be obtained.

  The sleep graph 715 displays data from an accelerometer incorporated in a sensor device that monitors body movement in a graph. The sleep web page 690 also includes a hyperlink 720 that allows the user to directly check sleep related news articles, advice on improving sleep routines, and related advertisements on the network and associated time. And a sleep calendar 725 for selecting an interval. The item indicated by the hyperlink 720 can be specially selected based on the information obtained from the individual in the survey and the results measured by the health index.

  The “Daily Activity” category of Health Indicator 555 is designed to help users monitor certain activities and risks related to health and safety, all of which are entered by the user. Is based. There are four categories of sub-concepts in the category of “daily activities” relating to activities of daily living. Specifically, (1) items related to personal hygiene that allow users to monitor activities such as taking care of teeth or taking showers using a toothbrush or floss; (2) Keep track of whether you are taking supplements and allow health monitoring items to allow users to monitor tobacco or alcohol consumption, and (3) spend time, leisure and mental concentration activities with family or friends It can be divided into items related to personal time that allow the user to monitor, and (4) items related to responsibility that allow the user to monitor work and household activities such as household chores.

  In the “daily activity” category, the bar graph indicating “daily activity” of the health index 555 is preferably displayed for the recommended healthy daily routine described below. As an example of a daily routine for personal hygiene, it is desirable for users to take a shower or bath every day, keep their teeth clean with a brush and floss every day, and maintain regular bowel movements. In addition, as an example of a daily routine related to health maintenance, it is desirable for a user to take drugs, vitamins and / or supplements, quit smoking, save alcohol, and monitor health daily by a health manager. An example of a personal time routine is to create time for the user to spend at least a predetermined time each day with their family and / or spend good quality time with friends, reduce work time, and incorporate leisure or play time It is desirable to conduct activities that use the head. As an example of the daily routine regarding responsibility, it is desirable that the user does miscellaneous things at home and keeps his promises without being late for work. The bar graph is determined based on information entered by the user and / or based on the degree to which the user completes the activities listed daily.

  Information regarding these activities is presented to the user by the daily activity web page 730 shown in FIG. The activity chart 735 on the daily activity web page 730 indicates whether the user has performed what is required by the daily routine. The activity chart 735 can be selected for one or more of the sub-concepts. In activity chart 735, a box with a color or shadow indicates that the user has performed the required activity, and a box without a color or shadow indicates that the user has not performed the activity. . Activity chart 735 can be created and viewed at selectable time intervals. FIG. 21 shows an example of personal hygiene and personal time categories for a particular week. In addition, the daily activity web page 730 includes hyperlinks 740 that allow the user to directly check for relevant news articles, advice on improving daily activities on daily activities, and related advertisements on the network. , And a daily activity calendar 745 for selecting relevant time intervals. The item shown in the hyperlink 740 can be selected based on information obtained from the individual in the survey and results determined by the health index.

  The “Energy” category of the health index 555 is designed to allow the user to monitor the perception of whether or not he / she was active on a particular day, and is essentially a subjective grade that the user inputs directly It is based on information. Users are divided into the following nine areas: (1) Mental acuity, (2) Mental and psychological well-being, (3) Energy level, (4) Ability to cope with stress in life, (5) Rank with respect to the degree of respect for face-to-face, (6) physical well-being, (7) self-restraint, (8) motivation, and (9) comfort in relation to others, preferably using a scale from 1 to 5 Do. These degrees (grades) are averaged and used to calculate the health indicator 555 bar graph.

  FIG. 22 shows an energetic web page 750. The spirit web page 750 allows the user to check the spirit over a user selectable time interval, including any continuous or discontinuous date. In the example shown in FIG. 22, the energy level is displayed as a health index. In the Genkiness web page 750, the Genkiness selection box 760 allows the user to make a selection to check the Genki bar graph 755 for one category, or for two categories or more. The bar graph 755 of the spirit can be compared side by side. For example, the user may want to activate only the sleep bar graph to see if the overall sleep grade has improved compared to the previous month, or display sleep and activity levels simultaneously. Thus, the sleep grade and the corresponding activity level grade may be compared and evaluated to check whether there is any correlation between the dates. Display nutritional and spiritual grades for a given time interval to check whether there is any correlation between daily dietary habits and dietary habits and spirituality during that interval There is a case. FIG. 22 shows a bar graph comparison of sleep and activity levels during the week of June 8 to June 14 as an example for illustration. The Genkiness web page 750 also shows the total number of days the user has logged in and used the health manager, the percentage of days the user has used the health manager since joining, and the user uses the sensor device to collect data Also included is a tracking calculator 765 that displays access information, such as the percentage of time spent, and statistics.

  An example of the web page 550 serving as a starting point of the health manager illustrated in FIG. 16 includes a plurality of category summaries 556a to 556f that can be selected by the user, each corresponding to the category of the health index 555 as the health level. Each category summary 556a-556f presents a subset of pre-selected and filtered data for the corresponding category. The nutrition category summary 556a shows the daily target and actual values of caloric intake. The activity level category summary 556b shows the daily target value and the actual value of the calorie content. The mental concentration category summary 556c shows the target and actual values of the depth of mental concentration. The sleep category summary 556d shows the target sleep time, actual sleep time, and sleep quality grade. Daily activity category summary 556e displays target and actual scores based on the ratio of completed activities to recommended healthy daily routines (daily activities). The spirit category summary 556f shows the goal and actual grade of the day's health.

  Web page 550 also includes hyperlinks (not shown) to news articles, comments to users based on trends such as malnutrition checked by the initial survey (not shown), and cues (not shown). You can also. A daily routine portion 557 that provides information to the user daily may also be included. As a comment of the daily routine portion 557, for example, an intake amount of water that is necessary every day, advice on a specific means that enables it, and the like can be displayed. The web page 550 may also include a problem solving section 558 that actively evaluates the user's performance in each category of the health index 555 and provides advice for improvement. For example, if the system indicates that the user's sleep level is “low” and the user is insomnia, the problem resolution section 558 can advise on ways to improve sleep. The problem solving section 558 can also include user questions regarding performance improvements. Web page 550 can also include a daily data section 559 that launches an input dialog box. The input dialog box allows the user to easily input various data required by the health manager. As is known in the art, the input of data can be selected from a pre-presented list or normal free text input. Web page 550 can also include a body condition section 561 that provides information about the user's height, weight, body measurements, BMI, and vital signs such as heart rate, blood pressure, or any physiological parameter. .

(Modification of light receiving part)
Here, a modified example of the light receiving unit 140 according to the first embodiment will be described with reference to FIG. FIG. 23 is a partial cross-sectional view showing a modification of the light receiving unit. As shown in FIG. 23, the light receiving portion 140 mounted on the substrate 160 (sensor substrate) can be realized by a PN junction photodiode element 135 formed on the semiconductor substrate 141 or the like. In this case, an angle limiting filter for narrowing the light receiving angle and a wavelength limiting filter (optical filter film) 148 for limiting the wavelength of light incident on the light receiving element are formed above the photodiode element 135 or the angle limiting filter 142. May be. The wavelength limiting filter (optical filter film) 148 is formed, for example, in the order of the first oxide film 143, the first nitride film 144, the second oxide film 145, and the second nitride film 146 from the angle limiting filter 142 side. . A light-transmitting resin film 149 is provided on the wavelength limiting filter (optical filter film) 148.

With such a configuration, the resin film 149 having translucency provided on the wavelength limiting filter (optical filter film) 148 provides the waterproofness and antifouling property of the wavelength limiting filter (optical filter film) 148. Can be increased.
The modification of the light receiving unit can be applied to any of the above-described embodiments or configuration examples.

(Modification of light emitting part)
Next, a modification of the light emitting unit 150 according to Embodiment 1 described above will be described with reference to FIG. FIG. 24 is a partial cross-sectional view showing a modification of the light emitting unit. As shown in FIG. 24, around the light emitting unit 150 mounted on the substrate 160 (sensor substrate), there are a wall portion 70 as a frame, and a reflection function for reflecting light emitted from the light emitting unit 150 in the peripheral direction. Layer 152 is provided. Note that the reflective functional layer 152 may be provided so as to surround the entire periphery of the light emitting unit 150 in a plan view as viewed from the upper surface side of the substrate 160, or at least one of the periphery of the light emitting unit 150. It may be provided in the part.

With such a configuration, the light emitted in the peripheral direction of the light emitting unit 150 can be reflected by the reflective functional layer 152 to be directed toward the measurement object. Thereby, the intensity | strength (light emission intensity) of the light which goes to a measurement object can be raised, and it becomes possible to improve while stabilizing the measurement accuracy of biological information.
The modification of the light receiving unit can be applied to any of the above-described embodiments or configuration examples.

  Although the embodiment has been described in detail as described above, it will be easily understood by those skilled in the art that many modifications can be made without departing from the novel matters and effects of the present invention. Accordingly, all such modifications are intended to be included in the scope of the present invention. For example, a term described at least once together with a different term having a broader meaning or the same meaning in the specification or the drawings can be replaced with the different term in any part of the specification or the drawings. Further, the configuration and operation of the biological information measurement module, the light detection unit, the biological information measurement device, and the like are not limited to those described in the present embodiment, and various modifications can be made.

DESCRIPTION OF SYMBOLS 10 ... Band part, 12 ... Band hole, 14 ... Buckle part, 15 ... Band insertion part, 16 ... Projection part, 30 ... Case part, 32 ... Light emission window part, 34 ... Top case, 35 ... Terminal part, 36 ... Bottom Case, 40, 60, 80, 90 ... sensor part as biological information measuring module, 70 ... wall part as frame, 135 ... photodiode element, 136 ... protective layer, 140 ... light receiving part, 141 ... semiconductor substrate, 142 ... Angle limiting filter, 143... Silicon oxide (SiO ₂ ) film (first layer) as a first oxide film, 144... Silicon nitride (Si ₃ N ₄ ) film (second layer) as a first nitride film, 145. Silicon oxide (SiO ₂ ) film (third layer) as a second oxide film, 146... Silicon nitride (Si ₃ N ₄ ) film (fourth layer) as a second nitride film, 148... Wavelength limitation as an optical filter F Luther, 149 ... resin film, 150 ... light emitting part, 151 ... dome-shaped lens as a light collecting member, 152 ... reflective function layer, 160 ... substrate as support part, 160a ... support surface (front surface), 160b ... back surface, 170 DESCRIPTION OF SYMBOLS ... Body motion sensor part, 172 ... Acceleration sensor, 180 ... Vibration generation part, 200 ... Processing part, 210 ... Signal processing part, 212 ... Body motion noise reduction part, 220 ... Beat information calculation part, 230 ... Notification control part, 240 ... storage unit, 250 ... communication unit, 252 ... antenna, 260 ... notification unit, 274 ... first connection terminal, 400 ... biological information measuring device, 410 ... wrist, 411 ... skin as an object, 420 ... terminal device, 430: Display portion, t: Thickness of laminated body, t1, t3: Thickness of oxide film (SiO ₂ film), t2, t4: Thickness of nitride film (Si ₃ N ₄ film).

Claims (17)

A light emitting unit for emitting light;
A light receiving unit for receiving the light passing through the object;
An optical filter composed of a laminate of thin films and provided on the light receiving unit,
The biological information measuring module, wherein the optical filter has a thickness of the laminated body of 0.40 μm or less and 0.20 μm or more.   The biological information measuring module according to claim 1, wherein the optical filter has a thickness of the laminated body of 0.36 μm or less and 0.24 μm or more.   The biological information measuring module according to claim 1, wherein the optical filter has a thickness of the laminated body of 0.31 μm or less and 0.27 μm or more. The laminate is
The biological information measurement module according to any one of claims 1 to 3, wherein oxide films and nitride films are alternately stacked.   The biological information measurement module according to claim 4, wherein an average film thickness of the nitride film is smaller than an average film thickness of the oxide film.   The biological information measurement module according to claim 4, wherein an average film thickness of the nitride film is larger than an average film thickness of the oxide film.   The biological information measurement module according to claim 4, wherein the lowermost layer of the laminate is an oxide film.   The biological information measurement module according to claim 4, wherein a lowermost layer of the stacked body is a nitride film.   The biological information measuring module according to claim 1, wherein a resin film is provided on the optical filter.   The biological information measurement module according to any one of claims 1 to 9, wherein a reflective functional layer is provided on at least a part of the periphery of the light emitting unit.   The biological information measuring module according to any one of claims 1 to 10, wherein a frame is provided between the light emitting unit and the light receiving unit.   The biological information measuring module according to claim 11, wherein the frame is made of resin or metal. With a support,
The biological information measurement module according to any one of claims 1 to 12, wherein the light emitting unit and the light receiving unit are supported by a support surface of the support unit.   The biological information measurement module according to any one of claims 1 to 13, wherein a light collecting member is provided on the light emitting part on the side from which the light is emitted.   The biological information measurement module according to claim 1, wherein a plurality of the light emitting units are provided.   The biological information measuring module according to any one of claims 1 to 15, wherein a plurality of the light receiving units are provided.   A biological information measuring device on which the biological information measuring module according to any one of claims 1 to 16 is mounted.

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