JP5849415B2 - Linear drive device and manufacturing method thereof - Google Patents

Description

  The present invention relates to a linear drive device that performs linear drive by electromagnetic action and a method for manufacturing the same.

  For example, as shown in FIGS. 12 and 15, the linear motor described in Patent Document 1 includes an iron core formed by laminating comb-shaped iron plates as a primary side core that is a fixed side. Coils are attached to the teeth of the iron core. A coupling hole is formed in the iron core, and a bolt is attached to the coupling hole. Further, a primary core is formed by fitting a key into a groove provided in the iron core via a presser plate (see, for example, paragraph [0003] of the specification of Patent Document 1).

  Moreover, the iron core shown by FIG. 6 and 7 of patent document 1 is comprised so that the laminated comb-shaped iron plate may be clamped with the clamper of a special shape instead of said bolt.

  In the linear motor described in Patent Document 2, a primary stator is housed in a regular octagonal bottomed stator housing case. A stator coil is disposed between the outer peripheral yoke and the inner peripheral yoke of the stator, and a movable holder that holds the permanent magnet and the movable shaft is disposed between the stator coil and the inner peripheral yoke ( For example, refer to paragraph [0014] of FIG.

Japanese National Patent Publication No. 10-14221 JP 2000-236653 A

  According to the structure of the iron core shown in FIG. 12 of Patent Document 1, the bolt mounted so as to cross the magnetic flux by the magnetic flux generated between adjacent teeth in the iron core when the linear motor is driven has a vortex. Inductive current such as current is generated. Generation of such extra current causes energy loss such as heat loss.

  Moreover, when the stator which is a primary side member as shown in FIGS. 7 and 12 of Patent Document 1 and Patent Document 2 is housed in a housing (not shown), the structure described above may be used depending on the structure of the stator and the housing. An induced current may be easily generated. Further, when the stator is housed in the housing as described above, if the stator is not properly positioned in the housing, the accuracy of the relative positions of the stator and the mover is lowered, and the desired thrust characteristics cannot be obtained.

  In view of the circumstances as described above, an object of the present invention is to suppress the generation of an induced current generated from the structure of the stator and the housing, and to position the stator on the housing with a simple configuration. It is to provide a linear drive device and a manufacturing method thereof.

In order to achieve the above object, a linear drive device according to the present invention includes:
A housing having an opening end surface for forming an opening, and a positioning protrusion protruding from the opening end surface;
A plurality of stator teeth including contact protrusions and teeth, a plurality of coils respectively mounted on the teeth, and a yoke connecting the plurality of stator teeth, and supported by the housing A fixed stator,
A mover core disposed in the housing opposite to the teeth of the stator, and a mover movable along the arrangement direction of the teeth;
The abutment protrusions of the stator teeth are in contact with the opening end surface of the housing and the positioning protrusions, and the teeth are inserted into the housing through the openings, thereby The stator is supported on the housing such that coils are arranged within the housing.

  In the present invention, the stator is supported by the housing such that the contact protrusion of the stator tooth portion on which the coil is mounted contacts the opening end surface of the housing and the positioning protrusion. That is, even if the abutting protrusion contacts the opening end surface and the positioning protrusion so that the housing supports the stator, the adjacent stator is in the path formed by the opening end surface, the positioning protrusion and the adjacent stator tooth portion. Since the magnetic flux formed in the tooth portion and the yoke does not interlink, the formation of the electric circuit in the path is suppressed. Therefore, it is possible to suppress the generation of an induced current in the path formed by the opening end face, the positioning protrusion, and the adjacent stator tooth portion.

  In the present invention, since the positioning projection is formed in advance in the housing for positioning the stator tooth portion, the stator can be positioned in the housing with a simple configuration.

  The linear drive device is provided so that a longitudinal direction thereof is along a moving direction of the mover, and the contact teeth are in contact with the opening end surface and the positioning protrusions, and the stator teeth and the positioning A bolt for fastening the protrusion may be further provided.

  Since the bolts for fastening the stator teeth and the positioning projections are provided so that the longitudinal direction thereof is along the moving direction of the mover, the rigidity of the housing and the stator in the moving direction of the mover can be improved. it can. Therefore, the desired movement of the mover can be ensured and the thrust characteristics can be improved.

  The mover has a shaft attached to the mover core, the housing has a pair of walls opposed in the moving direction of the mover, and at least one of the pair of walls is: You may have the hole which lets the said shaft of the said needle | mover pass.

  Generally, such a linear motor housing or frame is provided with a large opening in the moving direction of the mover. When the apparatus is assembled, the mover is accommodated through the opening, and the opening is covered. Is installed. On the other hand, in the linear drive device according to the present invention, no cover is attached to the housing, and instead, at least one of the pair of walls of the housing has a hole through which the shaft passes for output of the power of the mover. Provided. That is, since the housing according to the present invention does not require a cover like a general housing, the number of components can be reduced, the assembly accuracy of the apparatus is improved, and the positioning accuracy of each component is improved. Therefore, the desired movement of the mover can be ensured and the thrust characteristics can be improved.

  Further, since the cover is unnecessary, the housing according to the present invention is used as a monocoque type in which the conventional housing and the cover are integrated, and the strength of the housing can be increased.

A method for manufacturing a linear drive device according to the present invention includes:
A method of manufacturing a linear drive device comprising a housing, a stator supported by the housing, and a mover having a mover core,
Supporting the mover on the housing so that the mover core is disposed in the housing having an opening end face for forming an opening and a positioning protrusion protruding from the opening end face;
The contact protrusions provided on the stator teeth are arranged on the stator teeth so that the coils respectively mounted on the teeth of the stator teeth provided on the stator are arranged in the housing. Abutting the opening end face and the positioning protrusion and inserting the teeth into the housing through the opening;
Attaching the yoke to the stator teeth so as to connect the plurality of stator teeth.

  In the present invention, the contact protrusion of the stator tooth portion on which the coil is mounted contacts the opening end surface and the positioning protrusion of the housing, and the tooth portion is inserted into the housing through the opening. That is, even if the contact protrusion of the stator tooth portion contacts the opening end surface and the positioning protrusion so that the housing supports the stator, the path formed by the opening end surface, the positioning protrusion and the adjacent stator tooth portion is Since the magnetic fluxes formed in the adjacent stator teeth and yoke are not interlinked, the formation of the electric circuit in the path is suppressed. Therefore, it is possible to suppress the generation of an induced current in the path formed by the opening end face, the positioning protrusion, and the adjacent stator tooth portion.

  In the present invention, since the positioning projection is formed in advance in the housing for positioning the stator tooth portion, the stator can be positioned in the housing with a simple configuration.

  Needless to say, the order of the three steps of supporting the mover on the housing, inserting the tooth portion into the housing, and attaching the yoke to the tooth portion is not limited.

  As described above, according to the present invention, it is possible to suppress the generation of an induced current generated from the structure of the stator and the housing, and it is possible to position the stator on the housing with a simple configuration.

FIG. 1 is a front view showing a linear drive device according to an embodiment of the present invention. FIG. 2 is a cross-sectional view taken along the line AA in FIG. FIG. 3 is a plan view of this linear drive device (viewed in the Y-axis direction in FIG. 2). FIG. 4 is an exploded perspective view of a part of the linear drive device. 5A and 5B are diagrams sequentially illustrating the operation of the linear drive device. 6A shows the stator core shown in FIG. 5A, and FIG. 6B is a view of the stator core as viewed from above. FIG. 7 is a diagram for explaining the induced current due to the magnetic flux.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

[Configuration of linear drive unit]
FIG. 1 is a front view showing a linear drive device according to an embodiment of the present invention. FIG. 2 is a cross-sectional view taken along the line AA in FIG. FIG. 3 is a plan view of this linear drive device (viewed in the Y-axis direction in FIG. 2).

  The linear drive device 100 includes a stator 1 and a generally cylindrical movable element 3. The stator 1 and the mover 3 are positioned relative to each other and supported by the housing 2. FIG. 1 is a diagram viewed in the moving direction (Z-axis direction) of the mover 3. The stator 1 has stator cores 11 and 12.

  FIG. 4 is an exploded perspective view of a part of the linear drive device 100. Here, of the stator cores 11 and 12, the stator core 11 is shown, and the illustration of the stator core 12 having substantially the same configuration as this is omitted. The stator core 11 includes a plurality of stator tooth portions 114 and a yoke 113 that connects the stator tooth portions 114.

  As shown in FIGS. 1 and 2, for example, two stator teeth 114 are arranged along the Z-axis direction, and two are arranged along the Y-axis direction, for a total of four. .

  As shown in FIG. 4, the stator tooth portion 114 includes a tooth portion 111 having a partially curved shape, and a plate portion 112 connected to the tooth portion 111. Coils 13 (14 to 16) are attached to the tooth portions 111 of the plate portion 112 via an electric insulator (not shown). The tooth portion 111, the plate portion 112, and the yoke 113 are each made of a ferromagnetic material and are magnetically connected. The tooth portion 111, the plate portion 112, and the yoke 113 are composed of laminated steel plates in which steel plates are laminated in the Z direction, for example. The yoke 113 is fixed to the plate portion 112 with an adhesive or the like.

  The housing 2 is made of a nonmagnetic material such as stainless steel or aluminum. As shown in FIG. 4, the housing 2 has an opening 23 facing in the Y-axis direction, and has a cylindrical and rectangular parallelepiped monocoque shape. The housing 2 has an opening end face 25 provided around the opening 23 to form the opening 23, and a positioning protrusion 26 protruding from the opening end face 25 in the Y-axis direction. The positioning protrusion 26 is a protrusion for positioning the stator cores 11 and 12, and includes a wall portion 262 and a protruding portion 261 provided at a substantially central position of the wall portion 262. Two positioning protrusions 26 are provided so as to face each other in the X-axis direction. As described above, since the two openings 23 are provided to face each other in the Y-axis direction, the positioning projection 26 is provided for each of these openings 23.

  As shown in FIGS. 3 and 4, the contact protrusion 112 a that is formed as an end portion of the plate portion 112 of the stator tooth portion 114 and protrudes in the X-axis direction is in contact with the opening end surface 25 of the housing 2. Yes. With the contact protrusions 112a in contact with the opening end face 25, as shown in FIGS. 1 and 2, the tooth portion 111 is inserted into the housing 2 through the opening 23, whereby the tooth portion 111 and the coil are inserted. 13 (14 to 16) are arranged in the housing 2. Further, as shown in FIGS. 3 and 4, the contact protrusion 112 a is positioned on the positioning protrusion 26 of the housing 2 in a state where the contact protrusion 112 a is in contact with the opening end surface 25. More specifically, the right-angled portion of the contact protrusion 112a is positioned by being brought into contact with the right-angled portion formed by the wall portion 262 and the protruding portion 261 of the positioning protrusion 26.

  As shown in FIGS. 1 and 4, a screw hole 115 formed in the Z-axis direction is formed in the contact protrusion 112 a of the plate portion 112, and a screw hole 261 a is also formed in the protrusion 261 of the positioning protrusion 26. Is formed. With the stator tooth portion 114 positioned as described above, the bolt B (see FIG. 3) is screwed into the screw holes 115 and 261a to fasten the stator tooth portion 114 and the positioning protrusion 26. The stator core 11 is supported and fixed to the housing 2. As the stator cores 11 and 12 are supported by the housing 2 in this way, adjacent stator tooth portions 114 are arranged at a predetermined interval in the Z-axis direction, and in the Y-axis direction, the stator core 11 is arranged. And 12 are arranged so as to face each other with the mover 3 interposed therebetween.

  A circular hole 21a in which a shaft 33 of the mover 3 to be described later appears and is formed in the pair of side walls 21 facing each other in the movement direction of the mover 3 in the Z-axis direction. The hole 21 a is a hole into which the mover core 31 of the mover 3 is inserted when the linear drive device 100 is assembled.

  As shown in FIGS. 1 to 3, the mover 3 includes a mover core 31 and permanent magnets 321, 322, 323, 341, 342 and 343 embedded in the mover core 31 as shown in FIG. 2. . As described above, the mover core 31 is disposed to face the tooth portion 111 of the stator tooth portion 114. The mover core 31 may be composed of a plurality of magnetic material plates (for example, laminated steel plates) stacked in the moving direction (Z-axis direction) of the mover 3 in order to suppress eddy currents.

  As shown in FIG. 1, the tooth portion 111 of the stator tooth portion 114 has a curved surface 111 a along the outer periphery of the mover core of the mover 3. As shown in FIG. 2, an insertion hole 31 c of the shaft 33 penetrating along the Z-axis direction is formed at the center of the mover 3. The shaft 33 is supported by a support member such as a bearing or a spring (not shown) so that the shaft 33 can move along the Z-axis direction.

When the linear drive device 100 is used as a linear actuator, a spring member is used as a support member that supports the shaft 33. Typically, a spiral leaf spring is used as the spring member. Such a leaf spring elastically connects the shaft 33 and the housing 2. Other examples of the support member include an 8-shaped leaf spring, a linear bush, a ball spline, an air bearing, and a linear guide.
After the mover 3 is positioned with respect to the housing 2 by a jig (not shown), the shaft 33 is supported by the support member. After the mover 3 is positioned and supported with respect to the housing 2, the jig is removed from the housing 2. Thereafter, the stator cores 11 and 12 are positioned as described above and fixed to the housing 2.
Alternatively, after the stator cores 11 and 12 are fixed to the housing 2, the mover 3 may be inserted and positioned and supported through the hole 21 a of the housing 2.

  As shown in FIG. 1, the mover core 31 is provided with a plurality of embedded holes 31 a that are long in the Z-axis direction for embedding the permanent magnet 321 and the like around the shaft 33. Four embedded holes 31 a are provided on the side close to the stator core 11, and four are similarly provided on the side close to the stator core 12. As shown in FIG. 2, the three permanent magnets 321, 322, and 323 (hereinafter referred to as the permanent magnet set 32) are disposed in one embedded hole 31a.

  As shown in FIG. 2, the permanent magnet set 32 is magnetized so that magnetic poles appearing on the surface side (stator core 11 or 12 side) of those permanent magnets are alternately different in the Z-axis direction. That is, each permanent magnet 321 and the like are magnetized in the radial direction of the mover core 31 with the Z-axis direction as the center as viewed in FIG.

  In FIG. 2, the magnetic poles (N, S, N) of the permanent magnet set 32 on the stator core 11 side indicate the magnetic poles appearing on the stator core 11 side. Similarly, the magnetic poles (S, N, S) of the permanent magnet set 32 on the stator core 12 side indicate magnetic poles appearing on the stator core 12 side. The length in the Z-axis direction (and the number of permanent magnets arranged along the Z-axis direction) and the arrangement of the permanent magnets 321 and the like are the length in the Z-axis direction of the tooth portions 111 of the stator cores 11 and 12. , The number, the arrangement, the stroke length of the movable element 3 and the like.

  A flat portion 319 is provided on a part of the outer peripheral surface of the mover core 31. The flat surface portion 34 is disposed at a position not facing the tooth portion 111. By forming such a flat portion 34 on the mover core 31, the circular shape is notched in the flat portion 34 as compared with a case where the outer shape of the mover core 31 is circular when viewed in the Z-axis direction. Therefore, weight reduction of the needle | mover 3 is realizable. Further, by providing the flat portion 34, the movable element 3 can be positioned with high accuracy when the linear drive device 100 is assembled, as will be described later.

[Operation of linear drive unit]
Next, the operation of the linear drive device 100 configured as described above will be described. 5A and 5B are diagrams for explaining the operation. The polarities of the permanent magnet set 32 of the mover 3 shown in FIGS. 5A and 5B indicate the magnetic poles facing the stator cores 11 and 12 side.

  As shown in FIG. 5A, currents in opposite directions are applied to the two coils 13 and 14 on the stator core 11 side at the same timing, and the two coils 15 and 16 on the stator core 12 side are in opposite directions. Are applied at the same timing. Currents in opposite directions are also applied to the coils 13 (14) and 15 (16) disposed at the same position in the Y-axis direction. Then, a magnetic flux is generated in the tooth portion 111 and a magnetic pole is generated as illustrated in the tooth portion 111. The mover 3 moves to the right in FIG. 5A due to the interaction between the magnetic flux generated in each tooth portion 111 and the magnetic flux generated by the permanent magnet 321 or the like provided in the mover 3.

  As shown in FIG. 5B, currents in directions opposite to the directions of the currents shown in FIG. 5A are applied to the coils 13 to 16 at the same timing. Then, the magnetic poles opposite to the magnetic poles shown in FIG. Thereby, the needle | mover 3 moves to the left in FIG. 5B.

  6A shows the stator core 11 shown in FIG. 5A, and FIG. 6B is a view of the stator core 11 as viewed from above. Here, it will be described that the magnetic flux generated in the stator core 11 when the linear drive device 100 is driven and that no induced current is generated depending on the magnetic flux.

  As shown in FIG. 6A, a magnetic flux Φ that flows from the left tooth portion 111 to the right tooth portion 111 via the yoke 113 is formed. Since no bolts or members constituting the housing are present inside the magnetic flux Φ, no induced current is generated. That is, as shown in FIG. 6B, a path formed by the housing 2 and the stator core 11 even if the contact protrusion 112 a is in contact with the housing 2 because the housing 2 supports the stator core 11. Since the magnetic flux Φ is not linked to the portion (shown by a broken line), the formation of the electric circuit of the route is suppressed. That is, as shown in FIG. 7, an electric path E is formed when interlinking with the path like a magnetic flux Φ ′ indicated by a broken line, but in the present embodiment, the electric path E is hardly formed in the case of the magnetic flux Φ. . The bolt B is also arranged so that the magnetic flux Φ does not interlink with the bolt B.

  In the conventional linear motor, the magnetic flux generated in the stator core is often linked to a member (for example, a frame or a beam) or a bolt constituting the housing, and an induced current including an eddy current is generated. However, according to the present embodiment, it is possible to suppress the generation of an induced current particularly in a path formed by the opening end face 25 of the housing 2, the positioning protrusion 26, and the stator core 11.

  In this embodiment, since the positioning projection 26 is formed in advance in the housing 2 for positioning the stator tooth portion 114, the stator core 11 (and 12) can be positioned in the housing 2 with a simple configuration. .

  In the present embodiment, the bolt B that fastens the stator tooth portion 114 and the protruding portion 261 of the positioning projection 26 is provided so that the longitudinal direction thereof is along the moving direction of the mover 3. The rigidity of the housing 2 and the stator 1 in the three moving directions can be increased. Therefore, the desired movement of the mover 3 can be ensured and the thrust characteristics can be improved.

  The linear drive device 100 according to this embodiment includes a monocoque housing 2. A conventional linear motor housing or frame is provided with a large opening in the moving direction of the mover. When the apparatus is assembled, the mover is accommodated through the opening, and a cover is attached to the opening. On the other hand, in the present embodiment, the housing 2 is not provided with a cover, but instead, a pair of side walls 21 of the housing 2 is provided, and a hole 21a through which the shaft 33 is passed for power output of the mover 3 is provided. It is done. That is, since the housing 2 does not require a cover like a general housing, the number of components can be reduced, the assembly accuracy of the apparatus is improved, and the positioning accuracy of each component is improved. In particular, according to such a configuration of the housing 2, the assembly accuracy of the apparatus is improved in the moving direction of the mover 3, and the positioning accuracy of each component is improved, so that the expected movement of the mover 3 can be secured. , Thrust characteristics can be improved.

  Thus, according to the monocoque type structure which does not require a cover, the strength of the housing 2 can be increased.

[Other embodiments]
The embodiment according to the present invention is not limited to the embodiment described above, and other various embodiments are realized.

  In the above-described embodiment, the bolts B are provided so as to be tightened in directions approaching each other in the Z-axis direction, for example, but may be provided so as to be tightened in directions away from each other. In this case, for example, protrusions such as the protrusions 261 of the positioning protrusions 26 are provided at a plurality of locations (for example, two locations) apart in the Z-axis direction, and the stator tooth portions 114 are disposed between the protrusions. Then, the bolts may be tightened in a state where they are in contact with the protruding portions.

  In the above-described embodiment, the bolt B is used as a means for fixing the stator tooth portion 114 to the housing 2. However, the present invention is not limited to this, and means such as adhesive, welding, or mold resin may be used.

  The step of attaching the yoke 113 to the stator tooth portion 114 is typically after the step of fixing the stator tooth portion 114 to the housing 2. However, the yoke 113 may be fixed to the stator tooth portion 114 before the step of fixing the stator tooth portion 114 to the housing 2.

  In the above embodiment, the yoke 113 is attached to the plate portion 112 of the stator tooth portion 114. The yoke and the stator tooth portion are originally integrated, that is, the stator tooth portion may be formed by integral processing or integral molding.

  In the above embodiment, the housing 2 has a rectangular parallelepiped cylinder shape. However, the housing may have a cylindrical shape, an elliptical cylindrical shape, or a square cylindrical shape other than a square as long as it has an opening, an opening end face, and a positioning projection for positioning and supporting the stator core. .

  The number of the permanent magnet sets 32 such as the stator tooth portions 114 and the permanent magnets 321 can be appropriately changed. Each shape of a permanent magnet, a stator core, and a mover core can be changed as appropriate. Although the number of magnetic poles or the number of permanent magnets in the moving direction of the mover 3 is three in the above embodiment, it may be one, or may be four or more.

  Although the linear drive device 100 according to the above embodiment converts electrical energy into mechanical energy, the linear drive device 100 may be used as a device that converts mechanical energy into electrical energy.

  When the stator core (yoke 113 and stator tooth portion 114) is formed of laminated steel plates, a conduction path is formed through the laminated steel plates of the yoke and stator tooth portions. Since the yoke 113 and the stator tooth portion 114 have contact resistance, the induced current is relatively small, but the formation of an electric circuit can be prevented by insulating the contact portion. As an insulating means, there is a means of sandwiching an insulating paper or an insulating film at the contact portion. Alternatively, there is a means of applying an insulating coating to the contact portion of the yoke 113 or the stator tooth portion 11. Alternatively, an insulating coating may be applied to all of the yoke 113 or all of the stator teeth 11. As a method for forming this insulating coating layer, there are, for example, coating such as powder, electrodeposition, liquid, baking and the like.

When the stator tooth portion 114 is formed of a laminated steel plate and the housing 2 is formed of a conductor, the laminated steel plate of the stator tooth portion 114 and the protruding portion 261 of the housing 2 A conduction path is formed at the contact portion. Since the stator tooth portion 114 and the protruding portion 261 have contact resistance, the induced current is relatively small, but the electric path can be eliminated by insulating the contact portion.
As the insulating means, when the housing 2 is made of aluminum, anodizing is performed, an insulator (film or paper) is provided at the contact portion, or the stator tooth portion 114 is coated with insulation.

  Any of the insulating means described above has a small influence on the thickness thereof, and therefore does not significantly affect the assembly accuracy.

B ... Bolt 1 ... Stator 2 ... Housing 3 ... Mover
DESCRIPTION OF SYMBOLS 11 ... Stator core 12 ... Stator core 13-16 ... Coil 21 ... Side wall 21a ... Hole 23 ... Opening 25 ... Opening end surface 26 ... Positioning protrusion 31 ... Movable core 33 ... Shaft 100 ... Linear drive 111 ... Tooth part 112 ... Plate part 112a ... Abutting projection part 113 ... Yoke 114 ... Stator tooth part 261 ... Projection part 262 ... Wall part

Claims (4)

A housing having an opening end surface for forming an opening, and a positioning protrusion protruding from the opening end surface;
A plurality of stator teeth including contact protrusions and teeth, a plurality of coils respectively mounted on the teeth, and a yoke connecting the plurality of stator teeth, and supported by the housing A fixed stator,
A mover core disposed in the housing opposite to the teeth of the stator, and a mover movable along the arrangement direction of the teeth;
The plurality of stator tooth portions each have a plate portion with which the yoke abuts, and both end portions of the plate portion are provided as the abutting projection portions,
The abutment protrusions of the stator teeth are in contact with the opening end surface of the housing and the positioning protrusions, and the teeth are inserted into the housing through the openings, thereby A linear drive device in which the stator is supported by the housing such that coils are arranged in the housing. The linear drive device according to claim 1,
A bolt that fastens the stator tooth portion and the positioning protrusion in a state where the longitudinal direction is provided along the moving direction of the mover and the contact protrusion portion is in contact with the opening end surface and the positioning protrusion. A linear drive device further provided. The linear drive device according to claim 1 or 2,
The mover has a shaft attached to the mover core;
The housing has a pair of walls facing each other in the moving direction of the mover,
At least one wall of the pair of walls has a hole through which the shaft of the mover passes. A method of manufacturing a linear drive device comprising a housing, a stator supported by the housing, and a mover having a mover core,
The housing possess an open end face for forming an opening, and a positioning protrusion protruding from the opening end surface,
The stator includes a plurality of stator tooth portions including a contact protrusion and a tooth portion, a plurality of coils respectively mounted on the tooth portions, and a yoke for connecting the plurality of stator tooth portions. The plurality of stator tooth portions are supported by the housing and each have a plate portion with which the yoke abuts, and both end portions of the plate portion are provided as the abutting projection portions,
Before Symbol housing, so as to place the movable element core, a step of supporting the mover in said housing,
The abutment protrusions of the stator teeth are brought into contact with the opening end surface of the housing and the positioning protrusions so that the plurality of coils are arranged in the housing, and the teeth are inserted through the openings. Inserting into the housing;
And a step of attaching the yoke to the stator teeth so as to connect the plurality of stator teeth.

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