JP5849344B2 - Position detection device - Google Patents

Description

  The present invention relates to a position detection device that detects a position where heat is generated.

  An element capable of detecting two-dimensional position information is used in various devices such as a user interface such as a touch panel and an image / information acquisition device such as a sensor / camera. Therefore, an element capable of detecting such two-dimensional position information will continue to become increasingly important as a point of contact between cyber space and real space in the cloud society.

  For example, regarding the touch panel method, many methods such as a resistive film method, a capacitance method, and an infrared method have been proposed and verified.

  In the resistance film method, an upper conductive film and a lower conductive film are arranged close to each other, and a standby state is applied with a bias voltage applied to either one of them. Here, when pressure is applied by touch from the outside, the upper conductive film and the lower conductive film come into contact / energization at the touched point, and coordinates can be determined by measuring the potential at that point. .

  In the electrostatic capacity method, the electrode or the conductive film disposed on the panel is kept on standby in a state where a driving voltage is appropriately applied. Here, when the panel is touched with a finger or the like, this causes a change in capacitance, so that a touched point can be detected by reading a voltage change accompanying this at multiple points.

  In the infrared system, an infrared light emitting element (LED) is arranged at one end on the panel, and an infrared light receiving element (phototransistor) is arranged at the other end in an array, and the apparatus is kept in a standby state while continuously scanning infrared light. Here, when a finger or the like approaches from the outside, the infrared rays are blocked by this, and the phototransistor at the corresponding position is turned off, so that the touched point can be detected.

  Patent Documents 1 and 2 disclose a heat / spin current conversion element and a spintronics device using the spin Seebeck effect that are also used in the present invention, as will be described later.

  Patent Document 3 discloses an example of a resistive film type touch panel. Non-Patent Document 1 discloses spin Seebeck theory.

JP 2009-130070 A JP 2009-295824 A JP 2010-055453 A

Physical Review B 81, 214418

  However, in the touch panel of the resistive film type, the capacitance type, the infrared type, etc., the standby power is large because the probe driving means such as bias voltage application and optical scanning is required to detect the position. Become. For this reason, use of such a touch panel is restricted in a scene where it is difficult to supply power. Even when batteries are used, maintenance and management burdens such as replacement are unavoidable. In situations where use is expected in various situations, such as future sensor networks and ubiquitous terminals, whether indoors or outdoors, there is a need for position detection means that do not require a power source or that incorporate an effective power generation function.

  Therefore, an object of the present invention is to provide a position detection device that does not require an external power supply.

  According to the present invention, there is provided a conductive pattern film including a magnetic layer having magnetization and a material formed on the magnetic layer and having spin-orbit interaction, in a direction crossing the magnetization direction of the magnetic layer. There is obtained a position detection device including the conductor pattern film that is formed of a plurality of conductor lines that extend and intersect each other on a plane.

  Specifically, a part of the magnetic layer is heated or cooled by using the position information input means, thereby generating a local temperature gradient in the magnetic layer, and the spin current (spin Seebeck) driven thereby. (Effect) is read from the thermoelectromotive force induced in the conductor pattern film, and the position (two-dimensional position) of the two-dimensional coordinate of the place where heat generation has occurred is specified. This makes it possible to input position information.

  In the position detection apparatus according to the present invention, position input is performed by heat from the outside. Therefore, position detection means that does not require an external power source can be provided by using body temperature, environmental heat, or the like. Thereby, the application to the touch panel of low standby electric power, an image sensor, etc. with a simple structure is attained. In addition, it is possible to use a coating process, a printing process, etc., and it is suitable for mounting on a large area on a low-cost substrate.

(A)-(c) is a figure explaining the principle of a spin Seebeck effect. (A)-(c) is a figure which shows the position detection apparatus which concerns on the 1st Embodiment of this invention. (A), (b) is a figure which shows the position detection method using the voltmeter in the position detection apparatus which concerns on the 1st Embodiment of this invention. (A)-(c) is a figure explaining the position detection operation | movement in the position detection apparatus which concerns on the 1st Embodiment of this invention. (A)-(c) is a figure explaining the high-resolution position determination method in the position detection apparatus which concerns on the 1st Embodiment of this invention. (A)-(f) is a figure which shows the position detection apparatus by the 1st Example of this invention. It is a perspective view which shows the position detection apparatus by the modification of the 1st Example of this invention. It is a figure which shows the other operation example of the position detection apparatus which concerns on the 1st Embodiment of this invention. It is the perspective view and top view which show the position detection apparatus which concerns on the 2nd Embodiment of this invention. It is a perspective view which shows the position detection apparatus by the 2nd Example of this invention. It is the perspective view and top view which show the position detection apparatus which concerns on the 3rd Embodiment of this invention. It is a perspective view which shows the position detection apparatus by the 3rd Example of this invention. It is the perspective view and top view which show the position detection apparatus which concerns on the 4th Embodiment of this invention. It is a perspective view which shows the position detection apparatus by the 4th Example of this invention. It is a perspective view which shows the position detection apparatus which concerns on the 5th Embodiment of this invention. The perspective view which shows the position detection apparatus which concerns on the 6th Embodiment of this invention. It is a perspective view which shows the position detection apparatus by the 6th Example of this invention. It is the perspective view and top view which show the position detection apparatus which concerns on the 7th Embodiment of this invention. It is a perspective view which shows the position detection apparatus by the 7th Example of this invention. It is the perspective view and top view which show the position detection apparatus which concerns on the 8th Embodiment of this invention. It is a perspective view which shows the position detection apparatus by the 8th Example of this invention.

  The position detection device of the present invention is a device that identifies a heated spot on a plane or a spot that generates heat on a plane, and uses a spin Seebeck effect that generates a thermoelectromotive force from a temperature gradient. The position detection device of the present invention has a position detection element (thermoelectric conversion unit) based on the spin Seebeck effect in any of the embodiments described later.

  Further, the present invention provides a position detection system (thermoelectric conversion unit) and a position detection system that is provided separately from the position detection element and includes a heating unit that heats an arbitrary place on the plane of the thermoelectric conversion unit. Proposed is a position detection device having an energy mode interface unit that is formed integrally with a unit and receives various forms of energy to generate heat at an arbitrary place on a plane.

[principle]
The position detection device of the present invention is an element that identifies the position of the two-dimensional coordinate of the heat generation portion, and uses the spin Seebeck effect that generates a thermoelectromotive force from a temperature gradient.

  FIG. 1 is a diagram showing a basic configuration / principle of the spin Seebeck effect disclosed in Patent Document 1 and the like. The basic element structure is composed of a magnetic layer having a magnetization M formed on a substrate and a metal wire film disposed on the magnetic layer. When a temperature gradient in the perpendicular direction is applied to such a structure in the z direction in the drawing, a spin current is induced at the interface between the metal wire film and the magnetic layer. By converting this spin current into an electric electromotive force signal by the inverse spin Hall effect in the metal wire film, “thermoelectric conversion that generates a thermoelectromotive force from a temperature gradient” becomes possible.

According to the microscopic spin Seebeck theory shown in Non-Patent Document 1 (Physical Review B 81, 214418) and the like, the spin current Js induced at the metal wire film / magnetic interface is “metal” It has been found that it is driven by the temperature difference ΔTme = | Tm−Te | between the “electron temperature Te of the film” and the “magnon temperature Tm of the magnetic material”. Here, the magnon temperature Tm corresponds to a parameter representing the intensity of the thermal motion of the spin. As a result, the spin current Js is proportional to ΔTme (e _z is a unit vector in the direction perpendicular to the plane) as in the following formula (1).
Js∝ΔTme e _z = (Tm−Te) e _z (1)

  As shown in FIG. 1A, in a thermal equilibrium state where the entire device is at a uniform temperature, the electron temperature Te and the magnon temperature Tm are always equal (ΔTme = 0), and the spin current is not driven. Therefore, no electromotive force is generated in the metal wire film.

  On the other hand, as shown in FIG. 1B, a case is considered where the upper surface (metal wire film side) of the element is uniformly heated and a temperature difference ΔT is applied between the upper surface and the bottom surface of the element. At this time, the electron temperature Te and the magnon temperature Tm are subjected to temperature modulation by different mechanisms through non-local interaction with the temperature gradient distribution generated in the surroundings, resulting in a finite electron-magnon temperature difference at the interface near the heating part. ΔTme = | Tm−Te | ≠ 0 is generated. Accordingly, the interface spin current Js is pumped from the magnetic layer to the metal pattern film using the temperature difference ΔTme as a drive source. The above is the microscopic driving mechanism of the spin Seebeck effect described above.

The thermally driven spin current Js is converted into an electric field signal E _ISHE by the inverse spin Hall effect in the metal pattern film, so that an electromotive force signal V is generated between the ends of the metal pattern film. Here, the relationship between the electric field E _ISHE , the spin current Js, and the magnetization M is given by the following formula (2).
E _ISHE = (θ _SH ρ) Js × M / | M | (2)

Here, θ _SH represents the spin Hall angle (corresponding to the conversion efficiency between current and spin current), and ρ represents the sheet resistance of the metal pattern film. As shown in this equation (2), the thermally induced electric field E _ISHE is generated in a direction perpendicular to both the spin current Js and the magnetization M. Therefore, the thermoelectromotive force V generated on the metal pattern film surface also has a large value in the direction (y direction) perpendicular to the direction of the spin current and temperature gradient (z direction) and the magnetization direction (x direction).

In FIG. 1B, it is assumed that the upper surface (the metal pattern film side) is uniformly heated. However, even when only a part of this surface is locally heated, the same thermoelectromotive force is obtained. It can be observed. This situation is shown in FIG. In this case, the interface spin current Js is driven locally only in the heated portion, and a local electric field E _ISHE is induced.

  In the present invention, position detection is performed using the locally generated spin Seebeck effect.

[First Embodiment]
[Constitution]
FIG. 2 is a diagram showing a basic element structure of the position detection apparatus according to the first embodiment of the present invention. 2A is a perspective view of the position detection device, FIG. 2B is a cross-sectional view including a heating point of the position detection device, and FIG. 2C is a plan view of the position detection device.

  The minimum structural unit of the basic element of the illustrated position detecting device includes a magnetic layer 2 and a metal pattern film 5 provided on the magnetic layer 2. If necessary, the basic element of the position detection device uses a substrate 4 that supports the magnetic layer 2 and a cover layer 3 that protects the element.

  In the position detection device according to the first embodiment, as a shape of the metal pattern film 5 for electrically detecting a two-dimensional position, a mesh shape in which the x direction and the y direction in the drawing are the longitudinal (line) directions, respectively. Is adopted. In FIG. 2A, as an example of the metal pattern film 5, a mesh structure composed of 8 × 8 metal lines is adopted. Here, as shown in FIG. Are defined as metal wires 1 to 8 from above, and metal wires extending in the y direction are defined as metal wires A to H from the left.

By using a patterning structure having a plurality of holes (non-conducting regions) in the metal film as in the mesh shape of the metal pattern film 5, the reverse spin Hall electric field signal E _ISHE generated by the spin Seebeck effect is It is possible to effectively detect this as a voltage change. In addition, since the structure of the metal pattern film 5 integrated in this way can be easily patterned by a simple process such as a metal mask method, a photolithography method, and a printing method, a highly productive device can be manufactured. . The shape of the metal pattern film 5 is not limited to the mesh shape shown here.

  In the following, a desirable material, structure, manufacturing method, and the like for each of these components will be described.

  The magnetic layer 2 is assumed to have magnetization in one direction parallel to the film surface (xy plane in FIG. 2). In order to satisfy the symmetry necessary for the manifestation of the spin Seebeck effect, the magnetic layer 2 has the lengths of the metal lines A to H in the length direction (x direction) of the metal lines 1 to 8 in the metal pattern film 5. It is assumed that magnetization is also provided in a direction having a finite angle with respect to the direction (y direction). Specifically, it is desirable to have a magnetization direction within the range of 30 to 60 °, 120 to 150 °, −30 to −60 °, and −120 to −150 ° in the XY plane. In particular, it is most desirable to have the magnetization direction between the x direction and the y direction (any of 45 °, 135 °, −45 °, and −135 ° in the xy plane).

  In order to realize a position detection function having high resolution by the thermoelectromotive force signal generated in the metal pattern film 5, it is desirable to employ a material having low electrical conductivity as the material of the magnetic layer 2 in contact therewith. In addition, as the material of the magnetic layer 2, (1) heat is prevented from escaping (holding the temperature difference) and a highly sensitive thermoelectromotive force is generated. (2) heat diffusion is suppressed and high. For the two purposes of realizing position detection resolution, it is desirable to use a material with low thermal conductivity. For the above reasons, in the first embodiment, a magnetic insulator that is not conductive by conduction electrons and has small heat conduction is used.

  As a specific material of the magnetic layer 2, for example, an oxide magnetic material such as garnet ferrite or spinel ferrite can be applied. Such a garnet magnetic material can be produced by a crystal growth method from a melt such as a pulling method or a Bridgman method, and a crystal thin film can also be produced by a liquid phase epitaxial growth method. Further, for example, the magnetic layer 2 can be formed on the substrate 4 by a coating / printing-based film forming method such as an organic metal deposition method (MOD method), a sol-gel method, or an aerosol deposition method (AD method). it can. If such a highly productive film forming method is used, it is possible to form a film on a large area substrate at a time, and it is possible to mount a low-cost position detecting device.

  In addition, since a garnet film such as YIG has high transparency in a wide wavelength range, it is particularly suitable for application as a transparent position input device used in combination with a display or the like, such as a touch panel element.

  Further, when a magnetic material having a coercive force is used as the magnetic layer 2, an element that can operate even under a zero magnetic field can be obtained by initializing the magnetization direction once with an external magnetic field or the like.

  The metal pattern film 5 includes a material having a spin orbit interaction in order to extract a thermoelectromotive force using the inverse spin Hall effect. For example, as the material of the metal pattern film 5, a metal material such as Au, Pt, Pd, or Ir having a relatively large spin orbit interaction or an alloy material containing them is used. Further, as the material of the metal pattern film 5, even when a material obtained by doping a low-cost / low-resistance metal such as Cu with a small amount (about 1 to 10%) of impurities having the spin orbit interaction as described above is used. The thermoelectromotive force can be taken out.

  Such a metal pattern film 5 is formed by a method such as sputtering or vapor deposition in combination with a patterning process such as a metal mask method or an optical lithography method. Moreover, the metal pattern film 5 can also be produced by a method such as an ink jet method or a screen printing method.

  Here, in order to convert the spin current into electricity with high efficiency and without waste, it is preferable that the thickness of the metal pattern film 5 is set to at least the spin diffusion length of the metal material. For example, if the material of the metal pattern film 5 is Au, it is desirable to set it to 50 nm or more, and if it is Pt, it is desirable to set it to 10 nm or more. However, in an application in which the thermoelectromotive force is read as a voltage signal by an electrometer as in the first embodiment, it is desirable that the sheet resistance ρ is large. For this reason, the thinner the metal pattern film 5, the larger the voltage output can be obtained. Considering both of these, the thickness of the metal pattern film 5 is most preferably about the spin diffusion length of the metal material. For example, if the material of the metal pattern film 5 is Au, it is set to about 50 to 100 nm, and if it is Pt, it is set to about 10 to 30 nm.

  In addition, when using as a transparent position input device like a touch panel element, the occupation rate of the metal pattern film 5 (ratio of the metal material in the pattern film constituted by the metal material and air) is 50% or less. Desirably, 20% or less is more desirable. Specifically, in the case of the mesh-shaped metal pattern film 5 as in the first embodiment, it is desirable that the width of the metal line is less than or equal to half of the interval between adjacent metal lines. The following is more desirable.

  As described above, the metal pattern film 5 is a conductive pattern film formed on the magnetic layer 2 and containing a material having a spin orbit interaction, and extends in a direction crossing the magnetization direction of the magnetic layer 2. And a conductor pattern film comprising a plurality of conductor wires intersecting each other on a plane. As described above, since the metal pattern film (conductor pattern film) 5 is very thin and has high resistance, a voltage output can be obtained even when a plurality of conductor wires intersect on a plane. it can.

  The cover layer 3 is used as necessary to protect the element. Regarding the specific configuration, the cover layer 3 is not particularly limited as long as the cover layer 3 is a material / structure capable of protecting the element (thermoelectromotive force generating unit). For example, if an organic resin material such as acrylic resin or polyimide is used as the material of the cover layer 3, the cover layer 3 can be formed by a printing / coating process. However, in applications where sensitivity is important, in order to effectively transmit the input heat to the magnetic layer 2, the cover layer 3 may be made of a material having a large thermal conductivity in the perpendicular direction or a film thickness. It is desirable to use a material that can protect the element even if it is small, and the film thickness is desirably 200 μm or less.

  The substrate 4 may be of any material or structure as long as it can support the magnetic layer 2 and the metal pattern film 5. As a material of the substrate 4, for example, an amorphous insulator such as quartz glass, an organic resin material such as polyimide, or the like can be used. Further, the substrate 4 does not necessarily have a plate shape.

  When the heat and temperature fluctuations flowing in from the surrounding environment are large and the influence of background noise and malfunction due to this is large, a material having a low thermal conductivity or a structure having a sufficiently large thickness is used as the material of the substrate 4. It is preferable to secure a sufficient heat capacity.

  Note that the substrate 4 may be omitted in a usage environment in which the magnetic layer 2 can be directly fixed and used stably or when the magnetic layer 2 itself has a sufficiently large heat capacity.

[Description of basic operation and detection method]
Next, a position information detection method in the position detection apparatus according to the first embodiment of the present invention will be described.

First, as described above, in a thermal equilibrium state where a temperature gradient is not applied, the electron temperature Te of the metal pattern film 5 and the magnon temperature Tm of the magnetic layer 2 take an equal constant value. For this reason, the spin current due to the spin Seebeck effect (electron-magnon temperature difference ΔTme) is not driven and no thermoelectromotive force is generated (V _{1 to} V ₈ , V _{A to} V _H = 0V).

Here, as shown in FIG. 2A, when a part of the magnetic layer 2 is heated (cooled) by some heating (or cooling) means 10 from the outside, a local temperature gradient is generated in the vicinity thereof. As a result of the local spin Seebeck effect, a spin current is induced at the interface between the metal pattern film 5 and the magnetic layer 2 in the vicinity of the heating point as shown in the cross-sectional view of FIG. This spin current generates a local electric field signal E _ISHE through an inverse spin Hall effect in the metal pattern film 5 and is converted into an electromotive force signal that can be measured electrically. By measuring the change in potential (voltage) distribution at the periphery of the element from the thermoelectromotive force signal, the position of the two-dimensional coordinate where heat generation has occurred can be specified. In the present invention, “heating” includes “cooling” as negative overheating.

In order to detect position information, it is necessary to evaluate the thermoelectromotive force generated in the metal pattern film 5. Although there are various evaluation methods, in the first embodiment, as shown in FIG. 3, in each of the metal wires 1 to 8 and the metal wires A to H constituting the metal pattern film 5, each voltage difference between these both ends. (V _{1 to} V ₈ , V _{A to} V _H ) are measured as thermoelectromotive forces, and can be recorded as reference signals for two-dimensional position estimation.

The determination of which two-dimensional position in the element plane is heated (that is, input of position information) is realized by relatively comparing the magnitudes of the 16 voltage signals. Here, the voltage signals V _{A to} V _H are mainly used for determining the x coordinate (FIG. 3B), and the voltage signals V _{1 to} V ₈ are used for determining the y coordinate (FIG. 3A). . Specifically, since a large voltage signal is observed on a metal wire (A to H or any one of 1 to 8) close to the point where heating occurs, determination of the x coordinate and y coordinate of the heating point is thereby performed. Is possible.

FIG. 3A shows an embodiment in which V _{1 to} V ₈ and V _{A to} V _H are collectively detected in FIG. 3B, but the voltage signal detection method is shown here. Without limitation, 16 voltage signals may be measured one by one. Conversely, when the impedance of the voltmeter is sufficiently large and the mutual influence between the voltage measurements is small, 16 voltage signals may be measured at once.

Note that information that can be detected by this method is not limited to two-dimensional position information. Since the magnitude of the thermoelectromotive force generated based on the spin Seebeck phenomenon is approximately proportional to the temperature rise of the heated portion, the magnitude of the voltage signal (V _{1 to} V ₈ , V _{A to} V _H ) The amount of temperature increase can be estimated. In addition, the spatial extent of the place where the temperature rise has occurred can be estimated from a plurality of voltage signals.

[Specific position detection operation]
In FIG. 4, the specific example of the thermoelectromotive force production | generation according to a heating position is shown. FIG. 4 mainly describes a method for detecting the position of the x coordinate from the thermoelectromotive force generated in the metal lines A to H in the metal pattern film 5.

  As shown in FIG. 4A, a case is considered where a certain point (here, the intersection of the metal wire 3 and the metal wire C) is heated by the heating means 10 from the outside. At this time, a finite electron-magnon temperature difference ΔTme centered on the heating point is generated as shown in FIG. 4B, reflecting the spatial distribution of the temperature rise in the vicinity.

Due to the spin Seebeck effect, a spin current is driven at the interface of the metal line / magnetic layer, and a thermoelectromotive force is generated in each of the metal lines A to H. The output voltage signals V _{A to} V _H at both ends of these metal lines appear as signals _obtained by integrating (integrating) the spin Seebeck effect (local electric field E _ISHE ) over the entire metal line (upper right of FIG. 4). (See figure). As a result, as shown in FIG. 4C, the signal V is substantially proportional to the spatial distribution of temperature rise (x coordinate dependency), and the metal wire closer to the heating point shows a larger voltage signal. However, in an actual experiment, there is a case where the proportional relationship is deviated due to electrical mutual interference at the intersection of the metal wires.

  As an example, FIG. 4 shows the case where heating occurs on the metal wire C, but the distribution of voltage signals generated on the metal wires A to H varies greatly depending on the position where the heating occurs. Therefore, by measuring and recording this electromotive force distribution and then analyzing and estimating the spatial distribution of temperature rise (x coordinate dependency) in reverse, the X position where heating has occurred can be determined.

  FIG. 4 shows only a representative position detection example, but in actuality, finer (high resolution) position detection is also possible.

For example, consider a case where a certain point between the metal wire C and the metal wire D is heated as shown in FIG. At this time, attention is paid to the voltage signals V _C and V _D. As shown in FIG. 5A, when a point close to the metal line C is heated, V _C > V _D. As shown in FIG. 5B, when a point close to the metal line D is heated, V _C <V _D. As shown in FIG. 5C, when the intermediate point between the metal line C and the metal line D is heated, V _C = V _D. As described above, by checking the magnitudes of the voltage signals V _C and V _D , it is possible to specify a finer position between the metal line C and the metal line D.

  The procedure for detecting the position in the x direction by measuring the metal wires A to H has been described above with reference to FIGS. If the same method is applied to the metal wires 1 to 8, position detection with respect to the position in the y direction can be performed. In this way, the two-dimensional position where heating has occurred can be specified from the thermoelectromotive forces of the metal wires A to H and the metal wires 1 to 8.

  As the heating means 10, anything having heat can be used, so that it is possible to input position information with a finger having a body temperature, a pen whose tip is heated, or the like. Since it is not necessary to apply a bias such as a voltage during standby, it can be used for a user interface with extremely low standby power.

  In addition, since the operation principle of the position input in the first embodiment is to locally change the temperature distribution of the magnetic layer, a cooling unit may be used instead of the heating unit 10. For example, it is possible to locally change the temperature distribution by attaching the position detection device to a high-temperature heat source such as an IT device and heating it in advance, and bringing a cooling means at room temperature from the outside.

  2 shows the element structure in which the metal pattern film 5 / the magnetic layer 2 / the substrate 4 are stacked in this order. However, the stacking order of the metal pattern film 5 and the magnetic layer 2 is reversed so that the magnetic layer A stacked structure of 2 / metal pattern film 5 / substrate 4 may be employed. In such an element structure, since a magnetic insulator material having a small thermal conductivity can be used as the magnetic layer 2, the heat spreads in the horizontal (xy) direction when heated by the heating means 10 from above. Is suppressed to a small size, and the effect of improving the spatial resolution is shown.

[Example 1]
Next, with reference to FIG. 6, a position detection apparatus according to a specific first embodiment of the present invention will be described.

In the element structure of the position detecting apparatus according to the first embodiment, as shown in the perspective view of FIG. 6A, the magnetic layer 2 is a slab-shaped yttrium iron garnet (hereinafter referred to as “YIG”. A Y ₃ Fe ₅ O ₁₂ ) layer and a mesh-shaped metal film made of Pt are used as the metal pattern film 5, respectively. In the position detection apparatus according to the first embodiment, the substrate 4 and the cover layer 3 are not used.

The YIG layer 2 is a polycrystalline slab having a thickness of 1 mm manufactured by a sintering method and having a size of 8 × 8 mm ² . The surface of the slab is previously polished with an alumina paste in order to obtain a good interface with Pt.

  A Pt mesh film 5 is formed on the YIG slab by sputtering through a metal mask for patterning. The thickness of the Pt mesh film 5 is 15 nm, and is composed of eight (total of 16) Pt wires extending in the x and y directions. The length of this Pt wire is 5 mm, the width is 0.1 mm, and the interval between adjacent Pt wires is 0.7 mm.

  In the position detection apparatus of the first embodiment, an experimental setup is used so that the magnetization direction of the YIG layer 2 can be reversed by applying an external magnetic field H in order to experimentally verify the thermoelectric conversion symmetry by the spin Seebeck effect. ing. Here, the direction of the external magnetic field H (that is, the magnetization direction of the YIG layer 2) is an intermediate direction (45 degree direction of the xy plane or -135 degree direction) with respect to the two axes (x axis and y axis) of the Pt mesh shape. ).

  Position information is input to such a position detection device by performing local heating from the outside. Here, as the heating means 10, a laser beam having a wavelength of 670 nm and an output of 300 mW is applied to the Pt wire / YIG slab.

  FIG. 6 shows, as an example, a situation where a laser beam is irradiated to a place where the metal wires (Pt wires) 2 and G intersect and this point is locally heated. In this experiment, the position of the two-dimensional coordinate of this heating point is detected by the thermoelectromotive force generated by the Pt wire.

First, in order to obtain a reference signal for y coordinate estimation, as shown in FIG. 6A, voltage signals (V _{1 to} V ₈ ) generated at both ends of the metal wires 1 to 8 were measured. FIG. 6B shows a graph in which the measured value of the voltage signal is plotted with the horizontal axis as the external magnetic field H. A large thermoelectromotive force signal is clearly observed in the metal wires 1, 2, and 3 near the heating position. Further, it is also shown that the sign of the thermoelectromotive force is reversed when the magnetization direction is reversed by an external magnetic field. FIG. 6C shows a graph in which the absolute value of the voltage output at both ends of the eight metal lines is plotted with the horizontal axis as the y coordinate of the metal line. In this way, it is possible to estimate the y coordinate where heating has occurred from the measured values of the voltage signals V _{1 to} V ₈ .

Similarly, in order to obtain a reference signal for x-coordinate estimation, as shown in FIG. 6D, voltage signals (V _{A to} V _H ) generated at both ends of the metal lines A to _H are measured, The voltage signals shown in FIGS. 6 (e) and 6 (f) were obtained. From these, it is possible to estimate the x-coordinate at which heating occurred.

  With the above procedure, the position of the two-dimensional coordinates of the heating point can be determined. Although FIG. 6 shows the generation distribution of the output voltage when a specific point is heated, when a different point is heated, a different output voltage generation distribution is obtained correspondingly.

  Since different voltage generation distributions are obtained corresponding to different heating places, a position information input function using this is realized.

[Modification]
In the first embodiment, the slab material is used as the magnetic layer 2, but the magnetic layer 2 may be a thin film.

  FIG. 7 is a perspective view showing a position detecting device according to a modification of the first embodiment of the present invention, in which a thin film magnetic material is used as the magnetic material layer 2.

In the position detection device of this modification, an yttrium iron garnet (hereinafter referred to as “Bi: YIG”. The composition is BiY ₂ Fe ₅ O ₁₂ ) in which a part of the Y site is substituted with Bi is used as the magnetic layer 2. A Pt film is used for the metal pattern film 5. Here, the thickness of the Bi: YIG film 2 is 65 nm, and the thickness of the Pt film 5 is 10 nm.

  A quartz glass substrate having a film thickness of 500 μm is used as the substrate 4, and a synthetic sapphire plate having a film thickness of 100 μm is used as the cover layer 3. As the heating means 10, a pen whose tip is heated to 40 ° C. is used.

The magnetic layer 2 made of Bi: YIG is formed by an organometallic decomposition method (MOD method). As the solution, a MOD solution manufactured by Kojundo Chemical Laboratory Co., Ltd. is used. In this solution, a metal raw material having an appropriate molar ratio (Bi: Y: Fe = 1: 2: 5) is dissolved in acetate at a concentration of 3%. This solution is applied onto a quartz glass substrate by spin coating (rotation speed: 100 rpm, rotation for 30 seconds), dried on a hot plate at 150 ° C. for 5 minutes, and then sintered in an electric furnace at a high temperature of 720 ° C. for 14 hours. As a result, a Bi: YIG (BiY ₂ Fe ₅ O ₁₂ ) film having a film thickness of about 65 nm is formed on the quartz glass substrate.

  Thereafter, a metal pattern film 5 having a mesh structure of Pt is formed by sputtering through a metal mask. Finally, a synthetic sapphire plate with a thickness of 100 μm is placed on these as a cover layer 3 to protect the metal pattern film / magnetic layer.

(Another electromotive force measurement method of the first embodiment)
In the first embodiment, the position detection method for measuring voltage signals (V _{1 to} V ₈ , V _{A to} V _H ) between both ends of the metal wire has been described as shown in FIG. The measurement method is not limited to this. For example, as shown in FIG. 8, a certain point of the metal pattern film 5 (the lower right end point in FIG. 8) is grounded to the ground, and the potential of other peripheral portions is measured using this as a reference. It becomes possible.

[Second to fifth embodiments]
In the first embodiment, the heating means 10 is used to input the position information. However, if a mechanism for generating heat by an external trigger is incorporated in the position detection element, the position information can be input by other means. It becomes possible. In fact, heat is the most common form of energy, and various energies such as electromagnetic waves and vibration often end up as heat. Furthermore, heat is also generated by chemical reactions or phase changes between substances. Therefore, various types of sensors can be configured by applying the thermal sensor shown in the first embodiment. Hereinafter, application to an electromagnetic wave sensor, a contact (friction heat) detection sensor, a gas sensor, a pressure sensor, and the like will be described.

[Second Embodiment: Position Detection Device by Electromagnetic Wave Detection]
FIG. 9 shows a perspective view and a plan view of an electromagnetic wave sensor according to the second embodiment of the present invention. The difference from the position detecting device of the first embodiment is that the illustrated electromagnetic wave sensor newly absorbs electromagnetic waves by sandwiching an insulating layer (spacer layer) 32 made of an insulating material on a metal pattern film / magnetic layer. The point is that the film 31 is disposed.

  When the electromagnetic wave 30 having such a structure is irradiated with an electromagnetic wave 30 from the outside as shown in FIG. 9, the electromagnetic wave 30 is absorbed by the electromagnetic wave absorbing film 31, and heat is generated at that position. By measuring and recording the thermoelectromotive force due to this heat generation with the metal pattern film, the two-dimensional position irradiated with the electromagnetic wave can be specified.

Here, as the electromagnetic wave absorbing film 31, a material that absorbs the electromagnetic wave 30 well and generates heat is used. Although the selection of a specific material depends on the wavelength, the electromagnetic wave absorbing film 31 is, for example, a gold black film (gold ultrafine particle film) or a nickel-chromium alloy film in the case of infrared rays, and CIGS (Cu An (In, Ga) Se ₂ ) film or fullerene film can be used. A carbon film made of carbon black or carbon nanotube is also suitable for film formation by coating and printing, and can be used in a wide range from the infrared to the visible range.

  The insulating layer (spacer layer) 32 serves as an insulating layer for preventing the thermoelectromotive force generation operation in the metal pattern film 5. When the electromagnetic wave absorbing film 31 itself is an insulator, the spacer layer 32 may be omitted.

  For the cover layer 3 (not shown in FIG. 9) covering the electromagnetic wave absorbing film 31, a material that transmits the electromagnetic wave 30 as much as possible is used. If necessary, only a specific wavelength can be detected by providing a wavelength filter above the cover layer 3. In addition, by providing a partial reflecting mirror on the upper part of the cover layer 3 and optimizing the thickness of the cover layer 3, a resonator that functions for a specific wavelength can be configured, and the electromagnetic wave detection sensitivity can be improved. .

  In applications where sensitivity is important, the electromagnetic wave absorbing film 31, the insulating layer 32, and the cover layer 3 have a thermal conductivity in a direction perpendicular to the surface in order to effectively transmit the input heat to the magnetic layer 2. It is desirable to use a material having a large thickness, or a material that can protect the element even if the film thickness is small, and the film thickness is desirably 100 μm or less. As a more desirable form that achieves both sensitivity and resolution, materials and structures having high thermal conductivity in the perpendicular direction and low thermal conductivity in the in-plane direction are adopted in these layers. Specifically, it is anisotropic by using a material in which fillers such as carbon fiber oriented in the direction perpendicular to the surface are embedded, or by using a structure in which the material is divided (incised) for each pixel in the surface. A realistic heat transfer structure.

  Based on the above principle, application to an image sensor or the like that does not require an external power supply is possible with a very simple element configuration.

[Example 2]
FIG. 10 is a perspective view showing an electromagnetic wave sensor (position detecting device) according to a second specific example of the present invention.

  In the second embodiment, as in the first embodiment, a YIG layer having a thickness of 1 mm is used as the magnetic layer 2 and a Pt mesh film having a thickness of 10 nm is used as the metal pattern film 5.

  Here, an infrared ray having a wavelength of about 10 μm is used as the electromagnetic wave 30. As the electromagnetic wave absorbing film 31, a carbon black film that can efficiently absorb electromagnetic waves of this wavelength is used. The film thickness of the electromagnetic wave absorbing film 31 is 200 nm. The substrate 4 (not shown in FIG. 10) is a quartz glass substrate with a thickness of 500 μm, the spacer layer 32 is a polyimide layer with a thickness of 200 nm, and the cover layer 3 (not shown in FIG. 10) is a thickness of 50 μm. An acrylic resin is used.

  As a manufacturing method, first, a Pt mesh film 5 is formed on the YIG layer 2 by sputtering, and a polyimide layer 32 is formed on the Pt mesh film 5 by applying and drying a raw material solution. Further, a carbon black film 31 having a film thickness of 200 nm, which is an electromagnetic wave absorbing film, is applied and formed on the polyimide layer 32 by spin coating of raw materials. Finally, an organic solution in which polymethyl methacrylate is dissolved as an acrylic material is applied on these, and dried at a high temperature of about 100 ° C., thereby forming a cover layer 3 (not shown in FIG. 10) having a thickness of 100 μm. To do.

  By utilizing the infrared sensor having such a configuration, a monitoring infrared camera, a thermography, or the like can be configured with a very simple configuration.

[Third Embodiment: Position Detection Device by Frictional Heat Detection]
FIG. 11 is a perspective view and a plan view of a contact detection sensor (or frictional heat sensor) according to a third embodiment of the present invention. This element uses a frictional heat generator 41 instead of the cover layer 3 in the position detection device shown in the first embodiment. As in the second embodiment, the spacer layer 32 is inserted as necessary.

  When the frictional heat generating means 40 is brought into contact with the contact detection sensor having such a structure by rubbing a part of the frictional heat generating body 41 as shown in FIG. An exotherm occurs. By detecting this heat with the position detection device described in the first embodiment, it is possible to measure and record the two-dimensional position where contact has occurred.

  The surface of the frictional heat generating body 41 is appropriately processed so that heat is generated by contact with the frictional heat generating means 40. Further, in order to efficiently transmit the heat generated on the surface to the magnetic layer 2, it is desirable that the frictional heat generator 41 be made as thin as possible within a range that functions as a protective film, or be made of a material having high thermal conductivity.

  With such an element, an external power source is unnecessary and a user interface with zero standby power is realized. For example, it is possible to input characters by rubbing the frictional heat generator 31 with a pen.

  The method for generating frictional heat is not limited to the method shown here. As another form, for example, the frictional heat generating body 41 is configured by a mechanical part that generates frictional heat by pressure or vibration from the outside, thereby configuring a position detection device using a load or impact as the frictional heat generating means 40. You can also

[Example 3]
FIG. 12 is a perspective view showing a contact detection sensor (position detection device) according to a specific third embodiment of the present invention.

  In the third embodiment, similarly to the first embodiment, a YIG layer having a thickness of 1 mm is used as the magnetic layer 2 and a Pt mesh film having a thickness of 10 nm is used as the metal pattern film 5.

  Here, as the frictional heat generator 41, synthetic sapphire having a rough surface with small irregularities is used. The film thickness of the frictional heat generator 41 is 200 nm. As the frictional heat generating means 40, a pen whose tip is coated with alumina is used. A quartz glass substrate having a film thickness of 500 μm is used as the substrate 4, and a polyimide resin is used for the insulating layer (spacer layer) 32.

[Fourth Embodiment: Position Detection Device by Gas Detection]
FIG. 13: is the perspective view and top view which show the floating body sensor which concerns on the 4th Embodiment of this invention. The difference from the first embodiment is that the illustrated floating body sensor is newly designed for floating body adsorption on the metal pattern film / magnetic layer via an insulating layer (spacer layer) 32 that is an insulating material. The floating body detection film (catalyst film) 51 is disposed.

  As the floating body detection film (catalyst film) 51, for example, a known chemical material such as a catalyst that generates a chemical reaction accompanied by heat generation when a specific floating body (gas) 50 is adsorbed can be used. In addition, as the floating body detection film (catalyst film) 51, a film including a porous body containing a catalyst can be used. The insulating layer (spacer layer) 32 plays a role of an insulating layer so as not to disturb the thermoelectromotive force generation operation in the metal pattern film 5, but is not necessarily required depending on the floating body detection film (catalyst film) 51 to be used. Further, depending on the gas, the magnetic layer 2 or the metal pattern film 5 can be directly used as a floating body detection film.

  When a floating body 50 such as gas comes from the outside with respect to the floating body sensor having such a structure, heat is generated due to a chemical reaction at a point adsorbed on the floating body detection film (catalyst film) 51, and the magnetic layer 2 A part of is heated. By detecting this heat with the position detection device described in the first embodiment, the two-dimensional position where the floating body is adsorbed can be measured and recorded.

  Thereby, a large area floating body sensor or the like that does not require an external power source can be realized with a simple configuration. Actually, the floating body 50 is not limited to gas, but may be liquid or solid (dust). Also, the principle of floating body detection is not particularly limited as long as heat is generated by floating body adsorption.

[Example 4]
FIG. 14 is a perspective view showing a floating body sensor according to a fourth embodiment of the present invention.

  In the fourth embodiment, similarly to the first embodiment, a YIG layer having a thickness of 1 mm is used as the magnetic layer 2 and a Pt mesh film having a thickness of 10 nm is used as the metal pattern film 5. These are formed on a quartz glass substrate 4 (not shown in FIG. 14) having a thickness of 500 μm by the same method as in the first embodiment.

  Here, hydrogen gas is assumed as the floating body 50, and the Pt film used as the metal pattern film 5 also serves as the floating body detection film 51 as a catalyst for detecting hydrogen gas.

[Fifth Embodiment: Position Detection Device by Pressure Detection]
FIG. 15 is a diagram showing a position detection apparatus according to the fifth embodiment of the present invention. The difference from the previous embodiments is that the illustrated position detection apparatus has an upper heat generation layer 61 and a lower heat generation layer 62 disposed via a dot spacer 53 between the substrate 4 and the magnetic layer 2. It is in.

  Here, the upper heat generating layer 61 and the lower heat generating layer 62 are made of a combination of materials that generate heat when in contact with each other.

  Further, the dot spacer 53 serves to spatially isolate them during standby. As a material of the dot spacer 53, a material having a low thermal conductivity such as an organic resin is used.

  On the other hand, when the pressure applying means 60 is applied from the outside, the upper heat generating layer 61 is distorted downward and partially contacts the upper heat generating layer 61 and the lower heat generating layer 52. As a result, local heat generation occurs only in the contacted portion, so that this heat is detected by the position detection device described in the first embodiment, so that the two-dimensional position where pressure is applied can be measured and recorded. it can.

  As the principle of heat generation due to the contact between the upper heat generating layer 61 and the lower heat generating layer 62, various things can be used as follows.

  For example, two materials that chemically react can be used for the upper heating layer 61 and the lower heating layer 62. As a result, a chemical reaction occurs at the place where they come into contact, and local reaction heat is generated.

  Further, the apparatus is kept in a state where a bias voltage is externally applied between the upper heat generating layer 61 and the lower heat generating layer 62 so that a current flows only at a place where the upper heat generating layer 61 and the lower heat generating layer 62 are in contact with each other. Also good. In this case, ohmic heat generated by the electrical resistance of this portion can be used for position input.

  Furthermore, heat can be generated by using a pressure (or strain) when the upper heat generating layer 61 is pressed against the lower heat generating layer 62 as a trigger. For example, it is possible to detect a position by measuring a reaction caused by a chemical reaction caused by pressure application or a reaction heat / latent heat caused by a phase change by a similar method.

  In addition, as shown in the following examples, frictional heat generated when the upper heat generating layer 61 and the lower heat generating layer 62 are in contact with each other can also be used.

[Sixth to eighth embodiments]
In the embodiments so far, the position to which heat is applied from the outside is detected through the thermoelectromotive force generated in the metal pattern film while waiting in an equilibrium state where there is no external heat or thermal gradient. If such an element is used, an interface that can be used with zero standby power can be used even in the absence of an external power source.

  However, in these methods, since it is necessary to use a means for heating the element from the outside, the use is limited in a situation where this is difficult.

  On the other hand, there are various steady heat sources and steady temperature gradients around us, such as body temperature, displays, and IT equipment. By effectively utilizing such a temperature gradient, a useful interface can be configured without using external heating.

  In the remaining three embodiments, the position detection device in a situation where a steady heat source or a steady temperature gradient can be used in advance will be described.

[Sixth Embodiment: Position Detection Device Based on Pressure Detection]
FIG. 16 is a perspective view showing a position detection apparatus according to the sixth embodiment of the present invention. Similar to the fifth embodiment, in this embodiment, position detection is performed by applying pressure.

  As a significant difference from the fifth embodiment, in the sixth embodiment, a heat source 58 having a temperature higher (or lower) than room temperature is used instead of the substrate 4. As such a heat source, various things, such as a display, the side surface of IT apparatus, the wall and window of a building where sunlight hits, can be used.

  Next, the operation principle of the position detection apparatus according to the sixth embodiment will be described.

  In the position detection apparatus according to the sixth embodiment, a metal pattern film / magnetic layer is disposed above the heat source 58 via a dot spacer 53. During standby, the metal pattern film / magnetic layer and the heat source are spatially separated by the dot spacers 53. As a material of the dot spacer 53, a material having a low thermal conductivity such as an organic resin is used. Thus, heat transfer between the metal pattern film / magnetic layer and the heat source 58 is small during standby, and different temperature distributions can be obtained.

  In this situation, as shown in FIG. 16, when the pressure applying means 70 is applied to a certain point from the outside, the heat source 58 and the metal pattern film / magnetic material layer come into contact with each other at this point, and a large heat transfer occurs between them. Occurs. As a result, the metal pattern film / magnetic layer is locally heated, and a change in temperature distribution associated therewith is detected from the thermoelectromotive force change in the metal pattern film 5 in the same manner as in the first embodiment. Can do.

[Example 6]
FIG. 17 is a diagram showing a position detection apparatus according to a specific sixth embodiment of the present invention.

  As the heat source 58, a display surface whose temperature is set to 40 ° C. or higher is used.

  In the sixth embodiment, a YIG layer having a thickness of 0.1 mm is used as the magnetic layer 2, and a Pt mesh film having a thickness of 10 nm is used as the metal pattern film 5. These are formed on the synthetic sapphire plate by the same method as in the first embodiment. Then, this is arranged on the upper part of the heat source 58 via a dot spacer 53 made of acrylic urethane resin and having a diameter of 10 μm.

  During standby, the Pt / YIG and the heat source 58 are spatially separated by an acrylic urethane resin dot spacer 53. At this time, the heat transfer between them is small. These are brought into contact with each other by being pressed by a pressure applying pen 70 from the outside, and a large heat transfer occurs.

[Seventh Embodiment: Position Detection Device by Contact Detection]
FIG. 18 is a perspective view and a plan view showing a position detection device according to the seventh embodiment of the present invention.

  The element configuration of the illustrated position detection apparatus is almost the same as that of the first embodiment, but here, a heat source 58 having a temperature higher (or lower) than room temperature is used instead of the substrate 4. As a result, at the time of standby, a steady surface temperature gradient is generated in the element due to the influence of the heat source 58.

  In this state, if the local cooling means 80 at room temperature is pressed, heat dissipation (cooling) is promoted locally in this portion, so that the temperature gradient applied to the metal pattern film / magnetic layer is locally increased. The electric field associated with the spin current increases. Position information can be estimated by detecting a change in potential distribution associated therewith by the same method as in the first embodiment.

[Example 7]
FIG. 19 is a perspective view showing a position detecting device according to a seventh embodiment of the present invention.

  In the seventh embodiment, a YIG layer having a thickness of 0.1 mm is used as the magnetic layer 2, and a Pt mesh film having a thickness of 10 nm is used as the metal pattern film 5.

  As the heat source 58, a display surface whose temperature is set to 40 ° C. or higher is used. A synthetic sapphire plate having a thickness of 100 μm is used for the cover layer 3 (not shown in FIG. 19).

  Further, a room temperature pen is used as the cooling means 80.

[Eighth Embodiment: Position Detection Device by Detection of Magnetic Field]
In the above embodiments, the position detection method using the external heating of the magnetic layer, that is, the modulation of the lattice temperature has been described. However, in the situation where the steady temperature gradient can be used, the lattice temperature Tp is obtained by the external heating. It is possible to apply position detection by modulating the magnon temperature Tm (effective temperature parameter indicating the intensity of thermal motion of magnon) with various other degrees of freedom instead of changing the (normal temperature). It becomes.

  FIG. 20 is a perspective view and a plan view showing such a position detection device according to the eighth embodiment. The basic element configuration of the illustrated position detection apparatus is substantially the same as that of the seventh embodiment, and uses a steady spin current in a situation where a temperature gradient exists. The only difference in configuration from the seventh embodiment is that the position detection apparatus shown in the figure uses magnetic characteristic modulation means 90 instead of local cooling means 80.

  As the magnetic characteristic modulating means 90, a local electric field / magnetic field, a local pressure, and an electromagnetic wave can be used. As a result, the effective potential felt by magnon is effectively modulated, and as a result, the magnon temperature Tm described above is modulated. As a result, the difference between the lattice temperature Tp and the magnon temperature Tm changes locally, so that the positional information can be acquired by observing the change in the thermoelectromotive force in the metal pattern film 5.

[Example 8]
FIG. 21 is a perspective view showing a position detection apparatus according to a specific eighth embodiment of the present invention using magnon modulation by a local magnetic field.

  In the position detection apparatus according to the eighth embodiment, a YIG layer having a thickness of 0.1 mm is used as the magnetic layer 2 and a Pt mesh film having a thickness of 10 nm is used as the metal pattern film 5.

  As the heat source 58, a display surface whose temperature is set to 40 ° C. or higher is used.

  As the magnetic characteristic modulating means 90, a pen having a ferrite magnet at the tip is used. Thus, the position input is performed by modulating the magnon temperature Tm.

  The effects of the embodiment (example) of the present invention will be described above.

  With the structure shown in the embodiment (example) of the present invention, a position detection device that does not require an external power supply is possible, and a low standby power touch panel, an image sensor, and the like can be realized with a simple configuration. In addition, it is possible to use a coating process, a printing process, etc., and it is suitable for mounting on a large area on a low-cost substrate.

  As mentioned above, although this invention was demonstrated with reference to embodiment (Example), this invention is not limited to the said embodiment (Example). Various changes that can be understood by those skilled in the art can be made to the configuration and details of the present invention within the scope of the present invention.

2 Magnetic layer 3 Cover layer 4 Substrate 5 Metal pattern film (conductor pattern film)
DESCRIPTION OF SYMBOLS 10 Heating means 30 Electromagnetic wave 31 Electromagnetic wave absorption film 32 Spacer layer 40 Friction heat generating means 41 Friction heat generating body 50 Floating body (gas)
51 Floating body detection membrane (catalyst membrane)
53 dot spacer 60 pressure applying means 61 upper heat generating layer 62 lower heat generating layer 70 pressure applying means 80 local cooling means 90 magnetic characteristic modulating means

Claims (10)

A magnetic layer having magnetization;
A conductive pattern film formed on the magnetic layer and including a material having a spin orbit interaction, and extending in a direction intersecting the magnetization direction of the magnetic layer and intersecting each other on a plane The conductor pattern film comprising the conductor wires of
A position detecting device including:
By heating or cooling any part of the magnetic layer, the effective temperature in the conductive pattern film and the magnetic layer is modulated, and a spin Seebeck effect is induced, whereby an electric field is generated in the conductive pattern film. It is generated, and estimates the information of the two-dimensional position and size of the temperature modulation from the potential changes associated with it, the position detecting device.
  The position detection device according to claim 1, wherein the conductive pattern film includes a plurality of non-conductive regions in a film surface.   The position detecting device according to claim 1, wherein the conductive pattern film has a mesh shape.   The position detection device according to claim 3, wherein the magnetization direction of the magnetic layer is not parallel to any of two axes of the mesh shape of the conductive pattern film.   5. The position detection device according to claim 1, further comprising a plurality of terminals for reading a voltage at a peripheral portion of the conductive pattern film.   The position detection device according to claim 1, further comprising position information input means for inputting position information by locally heating or cooling the magnetic layer. Further comprising an electromagnetic wave absorbing film disposed on the magnetic layer through the conductor pattern film,
The position detection apparatus according to claim 6, wherein the position information input unit includes an electromagnetic wave irradiation unit that irradiates the electromagnetic wave absorption film with an electromagnetic wave. A frictional heat generator disposed on the magnetic layer via the conductor pattern film;
The position detection device according to claim 6, wherein the position information input means includes frictional heat generation means for generating frictional heat in the frictional heat generator. A floating body detection layer disposed on the magnetic layer via the conductor pattern film;
The position detection device according to claim 6, wherein the position information input unit includes a floating body flying on the floating body detection layer. Means for applying a temperature gradient to the magnetic layer;
The position detection apparatus according to claim 6, wherein the position information input unit modulates an effective temperature distribution.

Images