JP5841231B2 - 光起電力素子及びその製造方法 - Google Patents
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- 238000004519 manufacturing process Methods 0.000 title claims description 20
- 239000004065 semiconductor Substances 0.000 claims description 97
- 239000000463 material Substances 0.000 claims description 93
- 238000000034 method Methods 0.000 claims description 38
- 229910001218 Gallium arsenide Inorganic materials 0.000 claims description 32
- 239000000654 additive Substances 0.000 claims description 26
- 230000000996 additive effect Effects 0.000 claims description 26
- 230000008569 process Effects 0.000 claims description 12
- 125000004433 nitrogen atom Chemical group N* 0.000 claims description 11
- 239000000758 substrate Substances 0.000 claims description 11
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 38
- 239000000523 sample Substances 0.000 description 33
- 230000031700 light absorption Effects 0.000 description 31
- 230000007704 transition Effects 0.000 description 25
- 238000005259 measurement Methods 0.000 description 22
- 229910052757 nitrogen Inorganic materials 0.000 description 22
- 230000000052 comparative effect Effects 0.000 description 12
- 238000004611 spectroscopical analysis Methods 0.000 description 10
- 125000004429 atom Chemical group 0.000 description 9
- 238000001055 reflectance spectroscopy Methods 0.000 description 8
- 238000002441 X-ray diffraction Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 7
- 229910007709 ZnTe Inorganic materials 0.000 description 6
- 238000004458 analytical method Methods 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 6
- 238000001228 spectrum Methods 0.000 description 6
- 238000007796 conventional method Methods 0.000 description 5
- 230000005684 electric field Effects 0.000 description 5
- 238000001004 secondary ion mass spectrometry Methods 0.000 description 5
- 230000006866 deterioration Effects 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 238000000927 vapour-phase epitaxy Methods 0.000 description 4
- 230000008859 change Effects 0.000 description 3
- 230000000737 periodic effect Effects 0.000 description 3
- 239000002994 raw material Substances 0.000 description 3
- 230000005428 wave function Effects 0.000 description 3
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 2
- 238000005094 computer simulation Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000010248 power generation Methods 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 238000005215 recombination Methods 0.000 description 2
- 230000006798 recombination Effects 0.000 description 2
- DIIIISSCIXVANO-UHFFFAOYSA-N 1,2-Dimethylhydrazine Chemical compound CNNC DIIIISSCIXVANO-UHFFFAOYSA-N 0.000 description 1
- FOXXZZGDIAQPQI-XKNYDFJKSA-N Asp-Pro-Ser-Ser Chemical compound OC(=O)C[C@H](N)C(=O)N1CCC[C@H]1C(=O)N[C@@H](CO)C(=O)N[C@@H](CO)C(O)=O FOXXZZGDIAQPQI-XKNYDFJKSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000001451 molecular beam epitaxy Methods 0.000 description 1
- 239000002052 molecular layer Substances 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 238000005424 photoluminescence Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- QTQRGDBFHFYIBH-UHFFFAOYSA-N tert-butylarsenic Chemical compound CC(C)(C)[As] QTQRGDBFHFYIBH-UHFFFAOYSA-N 0.000 description 1
- XCZXGTMEAKBVPV-UHFFFAOYSA-N trimethylgallium Chemical compound C[Ga](C)C XCZXGTMEAKBVPV-UHFFFAOYSA-N 0.000 description 1
- 238000010792 warming Methods 0.000 description 1
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Description
本発明の第1の態様は、第1半導体材料により形成された第1層、及び、第1半導体材料とは異なる第2半導体材料により形成された第2層を備え、第2半導体材料は、その禁制帯中に局在準位又は中間バンドを有し、第1層及び第2層が繰り返し積層され、一対の第1層の間に配置された第2層を、少なくとも2以上有し、第1半導体材料がGaAsであり、第2半導体材料がGaN x As 1−x であり、且つ、0.003≦x≦0.4であり、第2層の厚さが1.1306nm未満である、光起電力素子である。
1.1.試料の作製
GaAs(001)基板上に、有機金属気相エピタキシー(MOVPE)法を用いて、本発明の光起電力素子に備えられる第1層(GaAs)及び第2層(GaNxAs1−x)に相当する層を交互に作製することにより、交互に積層された第1層及び第2層を備える光吸収層を作製した。Ga源としてはトリメチルガリウム(以下において、「TMGa」という。)を、As源としてはターシャリーブチルアルシン(以下において、「TBAs」という。)を、N源としてはジメチルヒドラジン(以下において、「DMHy」という。)を、用いた。第1層作製時には、TMGa及びTBAsを同時に、所定の時間に亘って供給した。その後、第2層の作製を開始する前にTMGaの供給を中断し、TMGaの供給を中断してからDMHyをTBAsと共に所定の時間に亘って供給することにより(As源及びN源を同時にパルス的に供給することにより)、第2層を作製した。その後、第1層の作製を開始する前にDMHyの供給を中断し、第1層を作製する際にはTMGa及びTBAsを供給した。このようにして、GaAs(001)基板上に、第1層及び第2層を交互に30層ずつ形成して光吸収層を作製し、作製した光吸収層の上にGaAs層を形成した。作製した光吸収層の特徴を、表1に示す。
上記の方法で作製した試料(以下において、「実施例の試料」という。)について、二次イオン質量分析(SIMS)を行った。結果を図5に示す。図5の縦軸はN濃度[cm−3]であり、横軸は深さ[nm]である。図5より、第1層及び第2層が交互に30回に亘って繰り返し積層された周期構造が確認され、GaAs層の窒素濃度は検出限界以下であった。
実施例の試料について、X線回折測定(θ/2θ法測定)を行った。結果を図6に示す。図6には、二次イオン質量分析(SIMS)で見積もった構造パラメータを基に、動力学シミュレーションにより求めた解析パターンも示している。図6の上側にX線解析測定の結果を、下側に動力学シミュレーションの結果を、それぞれ示した。図6の縦軸は強度[arb.unit]であり、横軸は角度[arcsec]である。
実施例の試料について、光変調反射分光法測定(以下において、「PR分光法測定」という。)を行った。光変調反射分光法は、変調分光法の一種で、反射分光測定を行う際に別の変調用の励起光を用いて、この照射時及び非照射時における反射率変化(ΔR/R)のスペクトルを測定する方法である。
今回のPR分光法測定で用いた測定系及び各機器の説明を図7に示す。図7に示したように、ハロゲンランプを分光器(日本分光株式会社製CT−50C、600l/mm、ブレーズ波長500nm)により分光した光をプローブ光として用いた。分光器のスリット幅は1.6mmとし、波長分解能は2nmである。反射光の検出にはフォトダイオード(株式会社日本レーザー製UV/IRラージエリア・フォトレシーバ2031M、2034M)を用いた。フォトダイオードへの変調用レーザーの散乱光の入射を防ぐため、フォトダイオードと試料との間にカットオフ波長550nmのローパスフィルタを配置した。変調光には波長532nmのDPSSレーザーを用いた。試料はクライオスタット内に設置されており、15Kまで冷却可能である。
2.1.試料の作製
GaAs(001)基板上に、有機金属気相エピタキシー(MOVPE)法を用いて、GaNxAs1−xを成長させた。Ga源としてはTMGaを、As源としてはTBAsを、N源としてはDMHyを用い、これらを同時に反応管へ供給して、GaNxAs1−xを作製した。N源であるDMHyの供給量を調整することにより、窒素濃度を0.11%、0.43%、0.74%、1.25%、1.91%、及び、2.33%に調整したGaNxAs1−x(以下において、「比較例の試料」という。)を作製した。なお、GaNxAs1−x中のN濃度は、X線回折(XRD)測定によって確認した。
窒素濃度を6通りに調整した上記比較例の試料、及び、GaAsについて、実施例の試料と同様の測定系を用いて、PR分光法測定を行った。窒素濃度が1.91%及び2.33%の試料を1.3eV以下の領域において30Kで測定したほかは、120Kで測定を行った。結果を図10に示す。図10の縦軸は反射率変化ΔR/Rであり、横軸はエネルギー[eV]である。なお、ピークを確認しやすくするため、窒素濃度が1.25%、1.91%、及び、2.33%の試料については、1.75eV以上の領域の結果を図10の紙面上下方向へ20倍に拡大して示している。
図10に示したPRスペクトルについてフィッティングを行い、そのフィッティングパラメータから各遷移エネルギーを求めた。フィッティングカーブには、「D. E. Aspnes、「Third-derivative modulation spectroscopy with low-field electroreflectance」、Surface Science、1978年、Vol.37、p.418-442」に開示されているアスプネスの3次微分形式(下記式(1))を用いた。
2…p型基板
3…光吸収層
3x…第1層
3y…第2層
4…n層
5…櫛型電極
10…光起電力素子
Claims (11)
- 第1半導体材料により形成された第1層、及び、前記第1半導体材料とは異なる第2半導体材料により形成された第2層を備え、
前記第2半導体材料は、その禁制帯中に局在準位又は中間バンドを有し、
前記第1層及び前記第2層が繰り返し積層され、
一対の前記第1層の間に配置された前記第2層を、少なくとも2以上有し、
前記第1半導体材料がGaAsであり、
前記第2半導体材料がGaN x As 1−x であり、且つ、0.003≦x≦0.4であり、
前記第2層の厚さが1.1306nm未満である、光起電力素子。 - 前記第1層にはN原子が含有されず、且つ、前記第2層の厚さ方向に配置されるN原子は1つである、請求項1に記載の光起電力素子。
- 前記第1層の厚さをw1、前記第2層の厚さをw2とするとき、3.3nm≦w1+w2≦20nmである、請求項1又は2に記載の光起電力素子。
- 前記第1層の厚さをw1、前記第2層の厚さをw2とするとき、0.05≦w2/(w1+w2)≦0.30である、請求項1〜3のいずれか1項に記載の光起電力素子。
- 前記第1層及び前記第2層の全体に占めるNの濃度が、0.10%以上2.0%以下である、請求項1〜4のいずれか1項に記載の光起電力素子。
- 前記第1層にSiがドープされている、請求項1〜5のいずれか1項に記載の光起電力素子。
- 基材上に第1半導体材料により構成される第1層を形成する工程と、
形成された前記第1層の表面に、前記第1半導体材料を構成する元素の一部と、禁制帯中に局在準位又は中間バンドを生じさせる、第1半導体材料を構成する元素とは異なる電気陰性度を有する添加元素とを供給する過程を経て、厚さが1.1306nm未満である、前記第1半導体材料とは異なる第2半導体材料により構成される第2層を形成する工程と、
形成された前記第2層の表面に、前記第1半導体材料により構成される第1層を形成する工程と、
前記第2層の表面に形成された前記第1層の表面に、前記第1半導体材料を構成する元素の一部と、前記添加元素とを供給する過程を経て、厚さが1.1306nm未満である、前記第2半導体材料により構成される2番目の第2層を形成する工程と、
形成された前記2番目の第2層の表面に、前記第1半導体材料により構成される第1層を形成する工程と、
を有し、
前記第1半導体材料がGaAsであり、
前記第2半導体材料がGaN x As 1−x であり、且つ、前記添加元素はNであり、且つ、0.003≦x≦0.4である、光起電力素子の製造方法。 - 前記第1層の厚さをw1、前記第2層の厚さをw2とするとき、3.3nm≦w1+w2≦20nmとなるように、前記第1層を形成する工程、及び、第2層を形成する工程を制御する、請求項7に記載の光起電力素子の製造方法。
- 前記第1層の厚さをw1、前記第2層の厚さをw2とするとき、0.05≦w2/(w1+w2)≦0.30となるように、前記第1層を形成する工程、及び、第2層を形成する工程を制御する、請求項7又は8に記載の光起電力素子の製造方法。
- 前記第1層及び前記第2層の全体に占めるNの濃度が、0.10%以上2.0%以下となるように、前記第1層を形成する工程、及び、第2層を形成する工程を制御する、請求項7〜9のいずれか1項に記載の光起電力素子の製造方法。
- 前記第1層を形成する工程で、Siがドープされた前記第1半導体材料により構成される第1層を形成する、請求項7〜10のいずれか1項に記載の光起電力素子の製造方法。
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