JP5840035B2 - Manufacturing method of ceramic substrate - Google Patents

Description

  The present invention relates to a technique for manufacturing a ceramic substrate.

  Conventionally, a method has been proposed in which a green sheet is placed between a pair of mold plates, and the mold plate is pressed to form irregularities on the surface of the green sheet corresponding to the irregularities on one surface of the mold plate and then fired. (See Patent Document 1).

JP-A-1-234209

  However, in the green sheet in which the concave cavity is formed by pressing the template, the density of the thin portion of the green sheet located below the cavity tends to be higher than the density of the peripheral portion of the thin portion.

  When such a green sheet is fired, a difference occurs between the shrinkage amount of the thin portion and the shrinkage amount of the peripheral portion of the thin portion, and the thin portion is distorted in the depth direction of the cavity. For this reason, there is a problem that a ceramic substrate in which the shape and dimensions of the cavity are largely separated from the design value is manufactured.

  An object of this invention is to provide the manufacturing method of the ceramic substrate which can form a cavity with a small gap with a design value.

  In order to solve such a problem, the present invention provides an arrangement step of arranging a green sheet portion between the surface of the first mold facing each other and the surface of the second mold, and the green sheet. A method for manufacturing a ceramic substrate, comprising: a pressing step for pressing one or both of the first mold and the second mold with respect to a portion; and a firing step for firing the green sheet portion that has undergone the pressing step. And the recessed part of the depth smaller than the difference of the said unevenness | corrugation is formed in the convex part surface facing the surface of the said 2nd metal mold | die in the said unevenness | corrugation.

  In this ceramic substrate manufacturing method, when the pressing process is performed, a concave cavity corresponding to the concave and convex portions of the first mold is transferred to the surface of the green sheet part, and the green sheet part located below the cavity is transferred. A convex raised portion corresponding to the concave portion formed on the surface of the convex portion is transferred to the surface of the thin portion. Such a swelled portion shrinks and falls after the firing process, and the surface of the thin-walled portion is smoothly formed to be approximately flat. Therefore, the distortion of the thin portion of the green sheet portion can be greatly reduced as compared with the case where the raised portion is not formed in the thin portion of the green sheet portion. Thus, a cavity having a small distance from the design value can be formed.

  Moreover, it is preferable that the surface of the said recessed part is made into the circular arc shape which becomes shallow, so that it goes to a radial direction outer side from the center of the said convex part surface.

  In this case, a density gradient is formed in the thin portion of the green sheet portion that has undergone the pressing process. Specifically, the density increases concentrically from the apex of the raised portion toward the outside in the radial direction. For this reason, the shrinkage amount of the swelled portion resulting from firing becomes smaller as it goes from the apex to the outside, and the amount of sag of the swelled portion is generally uniform. Therefore, the surface of the thin wall portion is gently formed so as to be more evenly approximated.

  Moreover, it is preferable that the said recessed part is dented from the peripheral part of the said convex part surface.

  In this case, since the bulge is formed from the peripheral portion of the thin portion of the green sheet portion that has undergone the pressing process, it is possible to reduce that the skirt portion of the bulge falls below the design value due to firing.

  Further, the present invention provides an arrangement step of arranging a green sheet part between the surface of the first mold facing each other and the surface of the second mold, and the green sheet part. A method of manufacturing a ceramic substrate, comprising: a pressing step of pressing one or both of the surface of the first mold and the surface of the second mold; and a firing step of firing the green sheet portion that has undergone the pressing step. In the surface of the second mold, irregularities are formed, and the surface of the convex portion on the second mold side has an arc shape that becomes lower from the convex portion vertex toward the radially outer side, In the pressing step, the convex part on the first mold side and the convex part on the second mold side are pressed in a state of facing each other with a predetermined distance therebetween.

  In this ceramic substrate manufacturing method, when a pressing process is performed, a concave cavity corresponding to the convex portion on the first mold side is transferred to one surface of the green sheet portion. A recess corresponding to the convex portion on the second mold side is transferred to the other surface of the thin portion of the green sheet portion located below the cavity in a state of facing the cavity with a predetermined distance. For this reason, in the thin portion, a density gradient is formed such that the density gradually increases as it approaches the center, and the shrinkage amount of the thin portion resulting from firing becomes smaller as it approaches the center. Therefore, the other surface of the thin portion is formed so as to be approximately flat and gently as it is closer to the center. Thus, a cavity having a small distance from the design value can be formed.

  In the pressing step, it is preferable that at least the second mold is vibrated.

  In this case, the density gradient in the thin part of the green sheet part is maintained by the mold press, and the density gradient between the press target part and the non-press target part is relieved by the vibration of the mold. can do.

  As described above, according to the present invention, there is provided a method for manufacturing a ceramic substrate capable of forming a cavity having a small distance from a design value.

It is sectional drawing which shows schematically the press apparatus which concerns on 1st Embodiment. It is the figure which expanded a part of 1st metal mold | die. It is a flowchart which shows the manufacturing method of the ceramic substrate which concerns on 1st Embodiment. It is a figure which shows the mode of an arrangement | positioning process. It is a figure which shows the mode of a press process. It is a figure which shows the mode of the cavity transferred to the green sheet. It is a figure which shows the mode (1) before and behind baking in the cavity transcribe | transferred to the green sheet. It is a figure which shows the shape of the 1st metal mold | die, and the mode before and behind baking in the cavity transcribe | transferred to the green sheet. It is a figure which shows the 1st metal mold | die and 2nd metal mold | die used for the press apparatus which concerns on 2nd Embodiment from the same viewpoint as FIG. It is a figure which shows the mode of a press process from the same viewpoint as FIG. It is a figure which shows the mode (2) before and behind baking in the cavity transcribe | transferred to the green sheet.

(1) 1st Embodiment It demonstrates in detail, referring drawings for 1st Embodiment of this invention.

  FIG. 1 is a cross-sectional view schematically showing a press apparatus according to the first embodiment. As shown in FIG. 1, the press apparatus 1 which concerns on this embodiment is provided with the conveyance part 10 and the press part 20 as main components.

  The transport unit 10 is a unit that transports the green sheet in a predetermined amount unit in the feed direction SD. The green sheet is a paste-like sheet containing ceramic powder as a raw material and a binder for the ceramic powder.

  The transport unit 10 in the present embodiment is, for example, a rail-type conveyor that transports a green sheet in a predetermined amount unit in the feed direction SD with both ends sandwiched in the longitudinal direction of the green sheet. The transport unit 10 is appropriately provided with a positioning mechanism for positioning the green sheet at a predetermined position.

  The press unit 20 includes an elevator 21, a first mold 22, a second mold 23, and an ultrasonic transducer 24.

  The elevator 21 is arranged on one side with the conveyance road surface RS in the conveyance unit 10 as a boundary, and is an apparatus that can move in both directions D1 and D2 away from the conveyance road surface RS.

  The first mold 22 is attached to the elevator 21 and has a surface PS (hereinafter referred to as a press surface) to be pressed on the green sheet. This press surface PS faces the transport road surface RS in the transport unit 10, and irregularities are formed on the press surface PS.

  In the case of the present embodiment, a first mold 22A having a press surface PS1 on which a first pattern is formed and a first gold having a press surface PS2 on which a second pattern different from the first pattern is formed. The mold 22B is attached to the elevator 21. The first pattern is a concavo-convex pattern for transferring a depression on one surface of the green sheet, and the second pattern is a concavo-convex pattern for obtaining a through hole or a through groove for cutting out an outer frame on the green sheet, for example. Is done. The press surface PS1 and the press surface PS2 having such a concavo-convex pattern are disposed along the feed direction SD of the transport unit 10, and the press surface PS1 is disposed on the front side of the press surface PS2.

  FIG. 2 is an enlarged view of a part of the first mold 22A. Specifically, FIG. 2A is an enlarged view showing a cross section of the first mold 22A, and FIG. 2B is an enlarged view seen from the press surface PS1 side of the first mold 22A.

  As shown in FIG. 2, in the unevenness formed on the press surface PS1 of the first mold 22A, the convex surface CX facing the one surface of the second mold 23 has a depth smaller than the unevenness difference UD. A recess 50 of D is formed.

  The recessed part 50 in this embodiment is made into a spherical crown shape, for example, and is recessed from the peripheral part of the convex part surface CX. Further, the surface of the concave portion 50 has an arc shape that becomes shallower toward the outside with reference to a position that passes through the center of the convex surface CX and coincides with the line PL that is perpendicular to the convex surface CX.

  The second mold 23 is a base of a green sheet pressed by the first mold 22, and, as shown in FIG. 1, the side on which the first mold 22 is arranged with the conveyance road surface RS in the conveyance unit 10 as a boundary. And placed on the opposite side. The second mold 23 has a surface IS (hereinafter referred to as a mounting surface) IS that is in contact with one surface of the green sheet. This placement surface IS is directly opposed to the press surface PS of the first mold 22 and is disposed on substantially the same plane as the conveyance path surface RS in the conveyance unit 10, for example. In addition, the mounting surface IS is flat because the uneven pattern formed on the press surface of the first mold 22 is not formed.

  In the case of the present embodiment, a second mold 23A having a green sheet placement surface IS1 pressed by the first mold 22A, and a second mold 23A having a green sheet placement surface IS2 pressed by the first mold 22B. The two molds 23B are arranged as separate bodies independent of each other.

  The ultrasonic transducer | vibrator 24 is a vibration source which gives an ultrasonic vibration with respect to the 2nd metal mold | die 23A, for example, is attached to the surface of the 2nd metal mold | die 23A. In the case of the present embodiment, the vibration applied from the ultrasonic transducer 24 is in a direction orthogonal to the placement surface IS1 of the second mold 23A. This direction is also the pressing direction.

  A green sheet is press-molded using such a press apparatus 1.

  FIG. 3 is a flowchart showing a method for manufacturing a ceramic substrate according to an embodiment of the present invention. As shown in FIG. 3, the method for manufacturing a ceramic substrate according to the present embodiment includes an arrangement process P1, a pressing process P2, and a firing process P3 as main processes.

<Arrangement process P1>
This arrangement | positioning process P1 is a process of arrange | positioning the green sheet site | part used as press object between press surface PS1 of 22 A of 1st metal mold | die, and mounting surface IS1 of 2nd metal mold | die 23B.

  Specifically, the green sheet is conveyed by a predetermined amount in the feed direction SD, and the green sheet portion PTY to be pressed is placed on the placement surface IS1 of the second mold 23A as shown in FIG.

  If there is a green sheet portion PTX that has already been placed on the placement surface IS1 immediately before placing the green sheet portion PTY on the placement surface IS1 of the second mold 23A, the green sheet portion PTX is It mounts on mounting surface IS2 in the 2nd metal mold | die 23B of a back | latter stage.

<Pressing process P2>
In the pressing step P2, the pressing surface PS1 of the first mold 22A is applied to the green sheet portion disposed between the pressing surface PS1 of the first mold 22A and the mounting surface IS1 of the second mold 23B. It is a step of pressing.

  Specifically, as the first stage, the ultrasonic transducer 24 is driven, and the second mold 23A is vibrated by the ultrasonic wave oscillated from the ultrasonic transducer 24 as shown in FIG.

  As a second stage, the elevator 21 is moved from the pre-press position to the press position, and the press surface PS1 of the first mold 22A with respect to the green sheet portion PTY mounted on the mounting surface IS1 of the second mold 23A. Is pressed with a predetermined pressing amount. At this time, the temperature of the first mold 22A or the second mold 23A is adjusted by the cooling mechanism so that the first mold 22A has a lower temperature than the second mold 23A.

  When the green sheet part PTX is placed on the placement surface IS2 of the second mold 23B, the press surface PS2 of the first mold 22B is simultaneously placed on the green sheet part PTX simultaneously with the pressing of the first mold 22A. Is pressed with a predetermined pressing amount. In this case, the green sheet portion PTX is cut from the green sheet body.

  As shown in FIG. 4, the pre-press position includes the press surface PS1 of the first mold 22A and the press surface PS2 of the first mold 22B, and the green sheet portion PTX facing the press surfaces PS1 and PS2. A position where one surface of the PTY is in a non-contact state.

  As a third stage, when a predetermined period has elapsed since the elevator 21 moved to the press position, the driving of the ultrasonic transducer 24 is stopped, and as shown in FIG. Return to position.

  In this way, the uneven pattern of the press surface PS1 is transferred to the green sheet portion PTY. Thereafter, the green sheet portion PTY is placed on the placement surface IS2 of the second mold 23B at the subsequent stage by the transport unit 10, and the press surface PS2 of the first mold 22B facing the second mold 23B. It is cut by a press and conveyed to a subsequent baking furnace.

<Baking process P3>
This firing step P3 is a step of firing the green sheet portion that has undergone the pressing step P2.

  Specifically, for example, the arrangement process P1 and the pressing process P2 described above are circulated, and the green sheet part sequentially cut in the pressing process P2 is conveyed to a firing furnace by a conveying mechanism, and the green sheet part is fired. Is done. As a result, a green sheet portion is obtained as a ceramic substrate.

  As described above, in the manufacturing method according to the present embodiment, as shown in FIG. 5, the press surface PS1 of the first mold 22A is pressed on the green sheet portion PTY disposed on the mounting surface IS1 of the second mold 23B. The

  As shown in FIG. 2, a concave portion 50 having a depth D smaller than the unevenness difference UD of the press surface PS1 is formed on the convex surface CX of the press surface PS1.

  For this reason, as shown in FIG. 6, a non-penetrating concave cavity CCP corresponding to the convex portion of the press surface PS1 is transferred to the surface of the green sheet portion PTY. Further, the surface of the thin portion of the green sheet portion PTY located in the depth direction of the cavity CCP (the surface on the side facing the first mold) has a protrusion corresponding to the recess 50 formed on the protrusion surface CX. The raised portion CVP is transferred.

  Such a raised portion CVP shrinks and falls after the firing process, and the lower portion of the cavity CCP is formed to be smooth and approximately flat. Therefore, the distortion of the lower part of the cavity CCP can be greatly reduced as compared with the case where the raised portion CVP is not formed. Thus, a cavity having a small distance from the design value can be formed.

  In the case of the present embodiment, as shown in FIG. 2, the surface of the concave portion 50 has an arc shape that becomes shallower from the center of the convex surface CX toward the outside.

  For this reason, a density gradient is formed in the thin portion located below the cavity CCP transferred to the green sheet portion PTY. Specifically, as shown in FIG. 7A, the density increases concentrically from the vertical line LN passing through the apex of the raised portion CVP.

  Therefore, as shown in FIG. 7B, the shrinkage amount of the raised portion CVP due to firing becomes smaller as it goes outward from the vertical line portion, and the drop amount of the raised portion CVP becomes substantially equal. As a result, the surface of the thin-walled portion, that is, the surface of the lower portion of the cavity CCP is gradually and more smoothly approximated. Thus, the recessed part 50 is for forming so that the surface of the downward site | part (thin part) of cavity CCP may become a substantially flat shape after baking.

  In the case of the present embodiment, the recess 50 is recessed from the peripheral portion of the convex surface CX as shown in FIG. For this reason, as shown in FIG. 8, when the recessed part 50 is dented from the peripheral part of the convex surface CX ((A) of FIG. 8), it is not dented from the peripheral part of the convex surface CX ( Compared with (B) of FIG. 8, it is possible to reduce the lower portion of the cavity CCP from dropping below the design value surface SD due to firing.

  In the case of this embodiment, as shown in FIG. 5, the press surface PS1 of the first mold 22A is pressed while the second mold 23A is vibrated. For this reason, it can relieve that the density gradient of the said press object site | part and a press non-object site | part becomes steep, maintaining the density gradient in the rising part CVP with the press of the 1st metal mold | die 22A.

  By the way, when the first mold 22A is pressed on the green sheet portion PTY, generally, the weight and hardness of the first mold 22A tend to be large in order to improve the wear resistance of the first mold 22A. For this reason, when the first mold 22A is vibrated, the vibration efficiency with respect to the green sheet portion PTY decreases, and as a result, the density gradient between the press target portion and the non-press target portion may remain steep. Can occur.

  In this regard, in the case of the present embodiment, as shown in FIG. 5, the second mold 23A having the mounting surface IS1 in which the unevenness is not formed is the object of vibration, and the first mold 22A in which the unevenness is formed. Is subject to press.

  For this reason, the selection range of the constituent material in the second mold 23 </ b> A is widened as much as it is not necessary to improve the wear resistance as compared with the case where the mold on which the unevenness is formed is set as the vibration target. Therefore, one or both of the weight and hardness of the second mold 23A is made smaller than the first mold 22A so that the second mold 23A is made of aluminum or the like, and the vibration efficiency with respect to the green sheet portion PTY is reduced. Can be increased.

  As a result, the unevenness can be transferred to the green sheet portion PTY while alleviating the steep density gradient between the press target portion and the press non-target portion.

  In the case of the present embodiment, in the pressing step P2, the first mold 22A is set to a temperature lower than the temperature of the second mold 23A.

  When the second mold 23A is vibrated at the time of pressing the first mold 22A, heat caused by the vibration is locally generated in the cavity CCP transferred to the green sheet portion PTY. In some cases, the temperature rises from the region and foaming or cracking occurs.

  In this regard, when the first mold 22A is at a lower temperature than the second mold 23A, the heat generated in the cavity CCP of the green sheet portion PTY due to the vibration of the second mold 23A is transferred to the green sheet portion PTY. It can cool with the 1st metal mold | die 22A which presses. Therefore, it is possible to suppress an increase in temperature in the cavity CCP caused by the vibration while mitigating the steep density gradient between the press target portion and the non-press target portion due to the vibration of the second mold 23A. .

  In the case of the present embodiment, in the pressing step P2, the second mold 23A is vibrated in the direction in which the second mold 23A is pressed.

  For this reason, vibration is transmitted in the thickness direction to the green sheet portion PTY placed on the placement surface IS1 of the second mold 23A. Therefore, as compared with the case where vibration is transmitted in a direction other than the thickness direction of the green sheet portion PTY, it is possible to suppress the unevenness transferred to the green sheet portion PTY from spreading in the surface direction of the green sheet. As a result, it is possible to further reduce the unevenness transferred to the green sheet portion PTY from being separated from the design value.

  In the case of the present embodiment, the vibration is stopped when the first mold 22A in the pressed state moves away from the green sheet portion PTY.

  Therefore, when the first mold 22A in the pressed state is separated from the green sheet part PTY, the unevenness transferred to the green sheet part PTY is more uneven than when the second mold 23A is continuously vibrated. Spreading in the surface direction of the PTY can be suppressed. Therefore, it is possible to further reduce the unevenness transferred to the green sheet portion PTY from being separated from the design value.

(2) Second Embodiment Next, a second embodiment of the present invention will be described in detail with reference to the drawings. However, the same reference numerals are given to the same or equivalent components as those in the first embodiment among the components of the press device 1 in the second embodiment. In the second embodiment, descriptions overlapping with those of the first embodiment are omitted as appropriate.

  The second embodiment is different from the first embodiment in that a ceramic substrate is manufactured using a press device 1 of a mold different from the first mold 22A and the second mold 23A of the first embodiment.

  FIG. 9 is a view showing the first mold 22A and the second mold 23A used in the press apparatus according to the second embodiment from the same viewpoint as FIG. As shown in FIG. 9, in the case of this embodiment, the first mold 22A has a press surface PS3 different from the press surface PS1 in the first embodiment, and the second mold 23A is a mounting surface in the first embodiment. It has a press surface PS4 different from IS1.

  The press surface PS3 corresponds to the press surface PS1 of the first mold 22A without the concave portion 50.

  The press surface PS4 is a concavo-convex pattern for transferring a depression to one surface of the green sheet. A convex portion (hereinafter referred to as a convex portion on the second mold side) 61 formed on the press surface PS4 and a convex portion (hereinafter referred to as the first mold side) formed on the press surface PS3 of the first mold 22A. It is directly opposed to 62). In addition, the height (unevenness difference) of the convex part 61 on the second mold side is formed smaller than the height (unevenness difference) of the convex part 62 on the first mold side.

  The convex part 61 on the second mold side is different from the convex part 62 on the first mold side in a substantially rectangular parallelepiped shape, for example, has a spherical crown shape, and has an arc shape that becomes lower from the convex part vertex toward the outside. .

  In the pressing step P2, the green sheet portion PTY is pressed by the first mold 22A and the second mold 23A.

  Specifically, as the first stage of the pressing step P2, the second mold 23A is vibrated by the ultrasonic wave oscillated from the ultrasonic vibrator 24.

  As a second stage, the elevator 21 is moved from the pre-press position to the press position, and as shown in FIG. 10, the first to the green sheet portion PTY placed on the press surface PS4 of the second mold 23A. The press surface PS3 of the mold 22A is pressed with a predetermined pressing amount.

  At this time, the convex part 61 on the second mold side and the convex part 62 on the first mold side are opposed to each other with a predetermined distance, and the first mold 22A is compared with the second mold 23A. The temperature of the first mold 22A or the second mold 23A is adjusted by the cooling mechanism so that the temperature becomes low. In the case of the present embodiment, the position of the tip of the convex part 61 on the second mold side and the tip of the convex part 62 on the first mold side at the time of pressing is the sheet surface SS that is an intermediate thickness in the green sheet part PTY. And the one surface GS of the green sheet portion PTY to which the second mold 23A is opposed.

  As a third stage, when a predetermined period has elapsed since the elevator 21 moved to the press position, the driving of the ultrasonic vibrator 24 is stopped and the elevator 21 is returned from the press position to the pre-press position.

  As described above, in the present embodiment, as shown in FIG. 10, the convex part 61 on the second mold side having a spherical crown shape and the convex part 62 on the first mold side having a rectangular parallelepiped shape are separated from each other by a predetermined distance. And pressed in the opposite state.

  When the green sheet portion PTY is pressed by the convex portions 61 and 62, as shown in FIG. 11A, one surface of the green sheet portion PTY (the surface on the side facing the press surface of the first mold). The cavity CCP1 corresponding to the convex portion 62 on the first mold side is transferred. A recess corresponding to the convex portion 61 on the second mold side is formed on the other surface (the surface on the side facing the second mold) of the thin portion of the green sheet portion PTY located below the cavity CCP1 in the depth direction. The part CCP2 is transferred in a state of facing each other with a predetermined distance. For this reason, in the thin portion, a density gradient is formed such that the density gradually increases as the center in the sheet surface direction is approached.

  Therefore, the shrinkage amount of the thin portion caused by firing becomes smaller as it is closer to the center, and as shown in FIG. 11B, the other surface of the lower portion (thin portion) of the cavity CCP1 after firing is closer to the center. It is gently formed to approximate a flat surface. Thus, a cavity having a small distance from the design value can be formed. Thus, the convex part 61 is for forming so that the other surface of the lower part (thin wall part) of the cavity CCP1 may have a substantially flat shape after firing.

  In the case of the present embodiment, the press surface PS3 of the first mold 22A is pressed while the second mold 23A is vibrated. For this reason, while maintaining the density gradient between the cavity CCP1 transferred by the convex part 62 on the first mold side and the cavity CCP2 transferred by the convex part 61 on the second mold side by the press of the mold, The steep density gradient between the press target part and the non-press target part can be alleviated.

  In addition, since the convex part 61 by the side of the 2nd metal mold | die used as a vibration object is circular arc shape, the abrasion resistance resulting from a vibration can be reduced compared with the case where it is a shape which has a corner | angular shape.

(3) Other Embodiments The first embodiment and the second embodiment have been described above as an example, but the present invention is not limited to the above embodiment.

  For example, in the first embodiment, one surface of the second mold 23A is a flat surface on which unevenness is not formed, but the same unevenness as the press surface PS1 of the first mold 22A is formed on the one surface. May be. In the drawing, the concave portions 50 are formed on the surfaces of all the convex portions of the concave and convex portions formed on the press surface PS1, but it means that the concave portions 50 are also formed on the convex portions for transferring patterns and the like. It is not what you do. The convex part for transferring the component housing part (cavity) may be a convex part where the concave part 50 is to be formed.

  Moreover, in the said 2nd Embodiment, although the convex part 62 by the side of a 1st metal mold | die was made into the substantially rectangular parallelepiped shape, you may be made into the same shape as the convex part 61 by the side of a 2nd metal mold | die. In the drawing, all the convex portions (convex portions 61 on the second mold side) formed on the pressing surface PS4 and all the convex portions (the first mold side) formed on the press surface PS3. However, this does not mean that the convex portion for transfer such as a pattern is also directly opposed. It suffices if the convex portions for transferring the component storage site are directly opposed.

  Moreover, in the said embodiment, in order to arrange | position the green sheet site | part PTY between the 1st metal mold | die 22A and the 2nd metal mold | die 23A, the green sheet GT was made into the movement object. However, the first mold 22A or the second mold 23A may be a movement target, and the first mold 22A or the second mold 23A and the green sheet GT may be a movement target. In short, the green sheet part PTY may be disposed between the first mold 22A and the second mold 23A.

  Moreover, in the said embodiment, although the 2nd metal mold | die 23 was fixed, you may move as a press object.

  In the above embodiment, the first mold 22A having the press surface PS1 on which the first pattern is formed and the first mold 22B having the press surface PS2 on which the second pattern is formed are independent from each other. It was attached to the elevator 21 as a separate body. However, the first mold having the press surface PS1 and the first mold having the press surface PS2 may be integrally attached to the elevator 21. Further, the first mold 22B having the press surface PS2 is omitted, and the first mold having the press surface on which both the second pattern and the first pattern are formed is attached to the elevator 21. Also good. Moreover, the first mold 22A and the first mold 22B may be attached to different elevators.

  In the above embodiment, the second mold 23A and the second mold 23B are separated from each other, but may be integrated. However, from the viewpoint of increasing the vibration efficiency for the green sheet placed on the second mold 23A, it is preferable that the second mold 23A and the second mold 23B are separate from each other. Note that the second mold 23A and the second mold 23B may be omitted.

  In the above embodiment, the first mold 22A and the second mold 23A, and the first mold 22B and the second mold 23B are arranged in order along the feed direction SD of the green sheet. A first mold and a second mold may be further arranged at the subsequent stage of the first mold 22B and the second mold 23B.

  Moreover, in the said embodiment, although the drive timing of the ultrasonic transducer | vibrator 24 was before the press surface PS1 (PS3) contacted one surface of the green sheet site | part PTY (PTX), press surface PS1 (PS3) on the said one surface It may be after the contact.

  In the above embodiment, the first mold 22A is a non-vibration target, and the second mold 23A is a vibration target. However, the first mold 22A may be a vibration target, the second mold 23A may be a non-vibration target, and the first mold 22A and the second mold 23A may be a vibration target.

  However, from the viewpoint of suppressing the unevenness transferred to the green sheet portion PTY from spreading in the surface direction of the green sheet, it is preferable that the mold having the surface on which the unevenness pattern for transferring the depression is formed be a non-vibration target. . Further, from the viewpoint of reducing the wear resistance due to vibration, it is preferable that a non-vibration target is a mold in which a concavo-convex pattern including convex portions having corners is formed.

  In the first embodiment, the first mold 22A having the press surface PS1 and the second mold 23A having the press surface on which the uneven pattern is not formed are used. In the second embodiment, the first mold 22A has the press surface PS3. A first mold 22A and a second mold 23A having a press surface PS4 were used. As another form different from the first embodiment or the second embodiment, for example, a form using a first mold 22A having a press surface PS1 and a second mold 23A having a press surface PS4 is applied. good.

  The method for manufacturing a ceramic substrate according to the present invention has applicability in various industries that handle ceramic substrates.

DESCRIPTION OF SYMBOLS 1 ... Press apparatus 10 ... Conveyance part 20 ... Press part 21 ... Elevator 22, 22A, 22B ... 1st metal mold PS, PS1, PS2, PS3, PS4 ... Press surface 23 , 23A, 23B ... 2nd mold IS, IS1, IS2 ... Placement surface 24 ... Ultrasonic vibrator 50 ... Concave part 61 ... Convex part on the second mold side 62 ...・ Projections on the first mold side PTX, PTY... Green sheet part CCP .. Cavity P1... Placement process P2.

Claims (5)

An arrangement step of arranging a green sheet portion between the surface of the first mold facing each other on which the irregularities are formed and the surface of the second mold;
A pressing step of pressing one or both of the first mold and the second mold against the green sheet portion;
A method of manufacturing a ceramic substrate including a firing step of firing the green sheet portion that has undergone the pressing step,
A method for manufacturing a ceramic substrate, wherein a concave portion having a depth smaller than the difference between the concave and convex portions is formed on a convex portion surface of the concave and convex portions facing the surface of the second mold. 2. The method of manufacturing a ceramic substrate according to claim 1, wherein a surface of the concave portion is formed in an arc shape that becomes shallower from a center of the surface of the convex portion toward a radially outer side. The method for manufacturing a ceramic substrate according to claim 2, wherein the concave portion is recessed from a peripheral portion of the surface of the convex portion. An arrangement step of arranging a green sheet portion between the surface of the first mold facing each other on which the irregularities are formed and the surface of the second mold;
A pressing step of pressing one or both of the surface of the first mold and the surface of the second mold with respect to the green sheet portion;
A method of manufacturing a ceramic substrate including a firing step of firing the green sheet portion that has undergone the pressing step,
Unevenness is formed on the surface of the second mold,
The surface of the convex portion on the second mold side has an arc shape that becomes lower from the convex portion vertex toward the radially outer side,
In the pressing step, the convex part on the first mold side and the convex part on the second mold side are pressed in a state of facing each other with a predetermined distance therebetween. 5. The method of manufacturing a ceramic substrate according to claim 1, wherein at least the second mold is vibrated in the pressing step. 6.

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