JP5810260B2 - Active species generator - Google Patents

Description

  The present invention relates to an active species generator that performs sterilization and deodorization of an indoor space.

  In recent years, active species generators have been developed that supply active species such as radicals into the air and purify the air by the cleaning action of the active species.

  This kind of active species generating device has a main body case, a discharge electrode, a counter electrode opposite to the discharge electrode, a power source for applying a voltage to the discharge electrode and the counter electrode, and a surface of the counter electrode. It was the structure provided with the provided adsorption | suction means (for example, refer patent document 1).

JP 2006-320613 A

  The conventional active species generator is configured to generate corona discharge by applying a voltage between the discharge electrode and the counter electrode, thereby decomposing moisture adsorbed on the adsorption means and generating active species. It was.

  In such a configuration, the current flowing between the discharge electrode and the counter electrode due to corona discharge tends to flow in the thickness direction of the adsorption means that is the shortest path from the discharge electrode to the counter electrode as a conductor. There was a tendency for electrons to flow easily in a narrow area. When the current is concentrated in a narrow range, there is a possibility that the concentrated active species having a high concentration may cause the adsorption means to deteriorate. In addition, active species generated in a concentrated manner may cause the adsorbing means to peel off and generate a spark discharge between the discharge electrode and the counter electrode, which is required to improve safety.

  Therefore, the present invention improves the insulation between the discharge electrode and the counter electrode, enhances safety, and generates active species in a wider range, thereby increasing the generation amount of active species and purifying action by active species. The purpose is to improve.

  And in order to achieve this object, the present invention includes a main body case, an insulating substrate provided in the main body case, a discharge electrode disposed at a predetermined interval from the surface of the insulating substrate, A counter electrode that is in contact with the insulating substrate; a power source that applies a voltage to the discharge electrode and the counter electrode; and an adsorbing means that adsorbs moisture in the vicinity applied so as to cover the insulating substrate. The insulating substrate has an opening, and an opening edge of the opening on the discharge electrode side is an expanded inclined surface that expands outward and is covered by the adsorption means, The tip is configured so as to be opposed to the opening having the expanding inclined surface in the vertical direction, thereby achieving the intended purpose.

  As described above, the present invention provides a main body case, an insulating substrate provided in the main body case, a discharge electrode disposed at a predetermined interval from the surface of the insulating substrate, and the insulating substrate. A counter electrode in contact therewith, a power source for applying a voltage to the discharge electrode and the counter electrode, and an adsorbing means for adsorbing moisture in the vicinity applied so as to cover the insulating substrate. Has an opening, and an opening edge of the opening on the discharge electrode side is an expanding inclined surface expanding outward and is covered by the suction means, and a tip of the discharge electrode is covered with the expanding electrode. Since it is configured so as to be opposed to the opening having an open inclined surface in the vertical direction, the insulation between the discharge electrode and the counter electrode is improved, safety is increased, and active species are generated in a wider range. Increase the amount of active species generated Te, it is possible to improve the cleaning action of the active species.

  That is, in the present invention, a main body case, an insulating substrate provided in the main body case, a discharge electrode disposed at a predetermined interval from the surface of the insulating substrate, and the insulating substrate are in contact with each other. A discharge electrode comprising: a counter electrode; a power source for applying a voltage to the discharge electrode and the counter electrode; and an adsorption means for adsorbing moisture in the vicinity applied to cover the insulating substrate. Even when a high voltage is applied between the discharge electrode and the counter electrode, the current flowing between the discharge electrode and the counter electrode flows from the discharge electrode to the counter electrode after flowing in the surface direction through the suction means located on the outer periphery of the insulating substrate. Will reach.

  That is, even when a high voltage is applied between the discharge electrode and the counter electrode, the creepage distance between the discharge electrode and the counter electrode is increased, and electrons flow over a longer distance through the adsorption means. Spark discharge due to a short circuit is unlikely to occur, and as a result, safety can be improved. In addition, since the creeping distance between the discharge electrode and the counter electrode is increased, the discharge range is widened, and active species are generated from a wider range, so that safety can be improved.

  Furthermore, in the present invention, the insulating substrate has an opening, and an opening edge of the opening on the discharge electrode side is an expanding inclined surface expanding outward and the suction means. The tip of the discharge electrode is disposed perpendicularly to the opening having the widened inclined surface, so that the opening edge of the opening is less than the case where the opening edge of the opening is not inclined. The inclination of the edge expansion slope increases the surface area of the adsorption means facing the discharge electrode and the abundance of the adsorption means, so that more electrons emitted from the discharge electrode reach the surface of the adsorption means. .

  As a result, more of the water adsorbed on the adsorbing means is decomposed by corona discharge and the amount of active species generated is increased, so that the purification action by the active species can be improved.

1 is a perspective view of an indoor area where an active species generator according to Embodiment 1 of the present invention is installed. Cross section of the active species generator Cross section of the active species generator Side view of insulating substrate and adsorption means in the same active species generator Side sectional view showing insulating substrate, adsorption means, discharge electrode, counter electrode, and support member in the same active species generator A perspective view showing an insulating substrate, a counter electrode, and a support member in the active species generator Development view showing configurations of insulating substrate, counter electrode, and support member Top view when the insulating substrate is viewed from the counter electrode side Diagram showing the concept of positive corona discharge in the same active species generator The figure which shows the concept of the minus corona discharge in the same activated species generator

(Embodiment 1)
Hereinafter, embodiments of the present invention will be described with reference to the drawings.

  As shown in FIG. 1, an active species generator 3 is arranged on the floor 2 of the room 1.

  The active species generator 3 purifies air by supplying active species such as radicals to the air in the room 1, by the cleaning action of the active species.

  FIG. 2 shows a cross-sectional view of the active species generator 3 in FIG. FIG. 3 shows a cross-sectional view of the active species generator 3 having a different component arrangement from that of FIG. When the active species generator 3 is activated, air in the room 1 flows into the main body case 4 from the suction port 5 provided on the side surface of the plastic main body case 4. The air that has flowed into the main body case 4 moves to the upper part of the main body case 4 by the blower 6.

  A plate-like insulating substrate 7 made of ceramic or resin such as fluorine is provided above the body case 4. The insulating substrate 7 is fixed to the main body case 4 by a support member 18 in parallel to the air flow in FIG. 2 and in a vertical direction in FIG.

  The insulating substrate 7 may be a ceramic substrate or a resin substrate such as fluorine. The ceramic substrate may be a substrate containing any one of silica, aluminum, and magnesium, or an alumina substrate. This is because an inorganic material or a fluororesin that is not easily corroded by ozone or radicals may be used.

The surface resistance of the insulating substrate 7 is desirably 10 ¹⁰ Ω / □ or more.

  Further, a discharge electrode 12 using SUS, tungsten, or the like that causes corona discharge is disposed at a position facing the insulating substrate 7 at a predetermined distance of several millimeters to several tens of millimeters. Is provided with a counter electrode 13.

  The discharge electrode 12 is rod-shaped or wire-shaped, and the shape of the tip thereof may be a needle shape with a diameter decreasing toward the tip, or a cross section substantially perpendicular to the longitudinal direction of the discharge electrode 12. .

  The end opposite to the tip of the discharge electrode is connected to the power source 14.

  The counter electrode 13 is made of stainless steel such as SUS, aluminum, gold, silver, copper, or the like. The material of the counter electrode 13 is not limited to these, and any conductive material may be used.

The surface resistance of the counter electrode 13 is desirably 10 ⁻¹ Ω / □ or less.

  The discharge electrode 12 is discharged from the tip of the discharge electrode 12 when applied by the power source 14. The current flows from the discharge electrode 12 to the counter electrode 13 via the surface of the adsorption means 8 that covers the surface 22 of the insulating substrate 7.

  This will be described with reference to FIGS. 4, 5, 6, 7 and 8.

  FIG. 4 is a side view of the insulating substrate 7 and the suction means 8 portion.

  FIG. 5 is a side sectional view showing the insulating substrate 7, the suction means 8, the discharge electrode 12, the counter electrode 13, and the support member 18 in the component arrangement of FIG.

  6 is a perspective view showing the insulating substrate 7, the counter electrode 13, and the support member 18 in the component arrangement of FIG.

  FIG. 7 is a developed view showing the configuration of the insulating substrate 7, the counter electrode 13, and the support member 18 in the component arrangement of FIG.

  FIG. 8 is a plan view of the insulating substrate 7 when viewed from the counter electrode 13 side.

  As shown in FIGS. 5 to 8, the insulating substrate 7 includes a surface 22 facing the discharge electrode 12, a back surface 23, and side surfaces connected to the front surface 22 and the back surface 23 on the outer periphery of the front surface 22 and the back surface 23. 24. The insulating substrate 7 has a quadrangular shape and has an opening 20 that penetrates from the front surface 22 to the back surface 23. 6 and 7, the suction unit 8 is not shown for easy understanding of other configurations.

  In this embodiment, the shape of the insulating substrate 7 is a quadrangle, but other shapes such as a circle, a rectangle, and a hexagon may be used as long as they have an area for providing the suction means 8 described later. Good.

  As shown in FIG. 8, the opening 20 of the insulating substrate 7 may be circular. Thereby, the ion wind generated from the tip of the discharge electrode 12 by applying a high voltage to the discharge electrode 12 efficiently passes through the circular opening 20 and is released into the air blown by the blower 6. Therefore, the active species generated on the surface of the adsorption unit 8 covering the insulating substrate 7 moves from the surface of the adsorption unit 8 and is easily diffused.

  As shown in FIG. 5, the opening edge of the opening 20 on the discharge electrode 12 side is a spread inclined surface 21 that spreads outward.

  That is, the expanding inclined surface 21 is inclined so that the diameter of the opening 20 on the front surface 22 is larger than the diameter of the opening 20 on the back surface 23.

  The periphery of the opening 20 of the insulating substrate 7 and the expanding inclined surface 21 of the opening 20 are covered with the suction means 8. As shown in FIG. 4, the adsorption means 8 has an adsorbent 9 such as zeolite composed of particles having an average particle diameter of 0.5 to several tens of micrometers that adsorbs water. Furthermore, the adsorption means 8 has an adsorbent 9 and an adhesive 10 such as colloidal silica that adheres the insulating substrate 7.

  Since the adsorbent 9 constituting the adsorbing means 8 has pores 11 on the surface, the adhesive 10 is smaller than the average particle diameter of the adsorbent 9 such as zeolite and is open on the surface of the zeolite. An average particle diameter larger than that of the holes 11 may be used. If the pores 11 are not blocked, glass powder or a silicate compound may be used as the adhesive 10.

  The adsorbent 9 in the present embodiment adsorbs water vapor in the air to the pores 11. However, if the pores 11 have an average particle diameter that is difficult to fill with the particles of the adhesive 10, the water vapor in the air is absorbed. Can be adsorbed. The adsorbent 9 may have an average particle size larger than that of the adhesive 10.

  In the present embodiment, zeolite is used as an example of the adsorbent 9, but the adsorbent 9 has nano-level pores 11, and water vapor is condensed in the pores by the so-called Kelvin capillary condensation phenomenon. As long as it is a porous structure having a structure having such pores, silica, zeolite, desiccite, allophine, imogolite, and the like may be included. Further, porous alumina, porous silica, or porous titania that adsorbs water by using gaps between particles may be used.

  The counter electrode 13 is disposed in contact with the insulating substrate 7 and the suction means 8.

  Thereby, for example, the current flowing between the discharge electrode 12 and the counter electrode 13 reaches the counter electrode 13 after flowing from the discharge electrode 12 through the adsorption means 8 covering the surface 22 of the insulating substrate 7, for example. Since the creepage distance is long, spark discharge does not occur as a result, and safety can be improved.

The suction means 8 covering the surface 22 of the insulating substrate 7 is semiconductive, and the surface resistance of the suction means 8 is desirably 10 ⁶ to 10 ¹⁰ Ω / □. When a high voltage is applied between the discharge electrode 12 and the counter electrode 13, the current is discharged from one electrode and flows to the other electrode through the adsorption means 8 covering the surface 22 of the insulating substrate 7. . At this time, the insulating substrate 7 provided in the main body case 4, the discharge electrode 12 disposed at a predetermined distance from the insulating substrate 7, and the suction means 8 that covers the surface 22 of the insulating substrate 7 are contacted. By providing the counter electrode 13 and the adsorption means 8 that covers the surface 22 of the insulating substrate 7 and adsorbs moisture in the vicinity of the insulating substrate 7, the so-called creepage distance, which is the distance that electrons move, is extended. . Thereby, generation | occurrence | production of a spark discharge can be reduced and safety | security improves.

  The film thickness of the suction means 8 that covers the surface 22 of the insulating substrate 7 is desirably uniform.

  This is to make the surface 22 resistance uniform.

  The suction means 8 is obtained by applying semiconductive ink to the surface 22 of the insulating substrate 7 by screen printing with a squeegee. The semiconductive ink includes an adsorbent such as zeolite and an adhesive 10 such as colloidal silica, and the above components are mixed or dissolved in a solvent. When the squeegee passes through the opening 20 of the insulating substrate 7 through the screen, the semiconductive ink is pushed onto the widened inclined surface 21 of the opening 20, and the extruded semiconductive ink is A curved surface is formed such that the film thickness increases toward the middle 25 of the slope of the 20 spread inclined surfaces 21 to cover the spread inclined surface 21. Therefore, the suction means 8 forms a curved surface whose film thickness becomes thicker toward the middle of the expansion inclined surface 21 of the opening 20 of the insulating substrate 7.

  Thus, the expansion inclined surface 21 of the opening 20 is covered with the suction means 8.

  Thereby, compared with the case where the opening edge of the opening part 20 does not incline, the area of the opening edge which opposes the front-end | tip of the discharge electrode 12, ie, the area of the expansion inclination surface 21, increases. As a result, the surface area of the suction means 8 that covers the spread inclined surface 21 facing the tip of the discharge electrode 12 also increases. Moreover, the abundance of the suction means adhered on the spread inclined surface 21 increases.

  Thereby, more electrons emitted from the tip of the discharge electrode 12 reach the surface of the adsorption means 8. As a result, more water adsorbed on the adsorbing means 8 is decomposed by corona discharge, and the amount of active species generated is increased, so that the purification action by the active species can be improved.

  The discharge electrode 12 is disposed so as to face the tip of the discharge electrode 12 toward the opening 20 of the surface 22 of the insulating substrate 7, and a few millimeters to several millimeters between the tip of the discharge electrode 12 and the surface 22 of the insulating substrate 7. It protrudes so as to be located inside the opening 20 with a predetermined distance of about 10 millimeters.

The discharge electrode 12 may be configured that located on the heart vertical axis within the opening 20 of the insulating substrate 7. That is, the discharge electrode 12 may be arranged such that the central axis in the longitudinal direction is positioned on the substantially central vertical axis of the projection surface of the opening 20. Thereby, since the ion wind generated from the tip of the discharge electrode 12 by applying a high voltage to the discharge electrode 12 flows toward the substantially central direction of the opening 20 of the insulating substrate 7, the ion wind is 7, the active species generated on the surface of the adsorption means 8 that covers the insulating substrate 7 passes through the opening 20 and is released into the air blown by the blower 6. It moves from the surface and has the effect of facilitating diffusion.

  The counter electrode 13 may be provided in contact with the back surface 23 or the side surface 24 of the insulating substrate 7 (not shown) as long as it is in contact with the adsorption means 8. As a result, when electrons flowing from the discharge electrode 12 flow along the surface of the adsorption means 8 covering the surface 22 of the insulating substrate 7, a so-called creepage distance, which is a distance traveled by the electrons, is increased. Is less likely to occur.

  However, the present invention is not limited to this, and when the counter electrode 13 is provided on the surface 22 of the insulating substrate 7, it is necessary to arrange the counter electrode 13 in a state in which a sufficient creeping distance is secured.

  Further, as shown in FIG. 5, an insulating coating 26 may be provided on the surface of the counter electrode 13. The insulating coating 26 can prevent a spark discharge from reaching the counter electrode 13 directly from the discharge electrode 12, and can further improve safety. Thereby, even when a sufficient creepage distance cannot be ensured, safety can be ensured. As the insulating coating, a method of adhering an insulating tape such as a fluororesin or a vinyl chloride resin, a method of applying a glass paste / ceramic adhesive, and drying and firing can be used.

  By applying a high voltage to the discharge electrode 12, active species such as radicals, ozone, and hydrogen peroxide are generated on the surface of the adsorption means 8 that covers the surface 22 of the insulating substrate 7. An ion wind is generated from the tip of the discharge electrode 12 toward the insulating substrate 7, and the ion wind passes through the opening 20 of the insulating substrate 7 and is released into the air blown by the blower. The active species generated on the surface of the adsorption means 8 covering the conductive substrate 7 moves from the surface of the adsorption means 8 and is easily diffused.

  That is, when a discharge voltage is applied to the discharge electrode 12 by the power source 14 at about 3 to 10 KV plus, a strong electric field is formed on the surface of the discharge electrode 12. Since a positive high voltage is applied to the discharge electrode 12, free electrons present in the air flow into the discharge electrode 12. At this time, since the counter electrode 13 is in a minus state, as a result, electrons move from the counter electrode 13 to the discharge electrode 12 due to movement of the electrons. This state is corona discharge, and OH radicals (an example of active species) are generated by the corona discharge force as described later.

  Next, a case where a positive voltage is applied to the discharge electrode 12 as shown in FIG. 9 will be described.

  The ceramic insulating substrate 7 and the adsorbent 9 are bonded by an adhesive 10. It is known that the surface 22 of the adsorbent 9 has nano-level pores, and moisture in the air adsorbs moisture by condensing water vapor in the pores (Kelvin's capillary condensation phenomenon). ). As a result, moisture in the air is adsorbed on the adsorption means 8 such as zeolite, and electrons easily flow. When a positive high voltage is applied to the discharge electrode 12 to perform a positive corona discharge, the electrons in the adsorbent 9 are attracted to the discharge electrode 12 with a strong force, so that the electrons move at a high speed. When an electron collides with an oxygen molecule near the adsorbent 9, an anion of the oxygen molecule in a state where one electron is added to the oxygen molecule is generated. Thereafter, oxygen molecule anions react with water molecules adsorbed on the surface 22 of the insulating substrate 7 to generate active species such as OH radicals. Since corona discharge occurs around the adsorbed moisture, the moisture easily reacts with the electrons, so that OH radicals can be more easily generated.

  In this embodiment, the discharge electrode 12 is applied positively, but the voltage applied to the discharge electrode 12 may be positive or negative.

  A case where a negative voltage is applied to the discharge electrode 12 as shown in FIG. 10 will be described. When a discharge voltage is applied to the discharge electrode 12 by the power supply 14 at about minus 3 to 10 KV, a strong electric field is formed on the surface of the discharge electrode 12. Since a negative high voltage is applied to the discharge electrode 12, free electrons are emitted into the air. The insulating substrate 7 in contact with the counter electrode 13 is on the plus side. As a result, a current flows from the counter electrode 13 to the discharge electrode 12 due to the movement of the electrons.

  The electrons emitted from the discharge electrode 12 to the air are attracted to the strong electric field of the counter electrode 13 with a strong force, so that the electrons move at a high speed and collide with molecules in the air. At this time, when electrons moving at high speed collide with oxygen molecules in the air, an oxygen molecule anion in which one electron is added to the oxygen molecule is generated. Thereafter, oxygen molecule anions react with water molecules adsorbed on the surface 22 of the insulating substrate 7 to generate OH radicals.

  By performing so-called negative corona discharge, which is discharge from the discharge electrode 12 applied negatively as described above, water around the adsorption means 8 reacts with electrons, thereby making it easier to generate OH radicals. It is.

  Further, as described above, electrons flow in the surface direction between the discharge electrode 12 and the counter electrode 13 via the adsorption means 8, so that the creeping distance becomes long and current flows through the surface 22 of the insulating substrate 7. is there.

  As described above, the OH radicals (active species) generated as shown in FIGS. 9 and 10 are discharged into the room from the exhaust port 15 of the active species generator 3 by the air blown from the blower 6 of FIG. 2 or FIG. By supplying the air containing the OH radicals into the room 1, the bacteria in the air can be inactivated. Moreover, the deodorizing effect can be exhibited by decomposing and removing the odor in the air.

  As described above, the present invention provides a main body case, an insulating substrate provided in the main body case, a discharge electrode disposed at a predetermined interval from the surface of the insulating substrate, and the insulating substrate. A counter electrode in contact therewith, a power source for applying a voltage to the discharge electrode and the counter electrode, and an adsorbing means for adsorbing moisture in the vicinity applied so as to cover the insulating substrate. Has an opening, and an opening edge of the opening on the discharge electrode side is an expanding inclined surface expanding outward and is covered by the suction means, and a tip of the discharge electrode is covered with the expanding electrode. Since it is configured so as to be opposed to the opening having an open inclined surface in the vertical direction, the insulation between the discharge electrode and the counter electrode is improved, safety is increased, and active species are generated in a wider range. Increase the amount of active species generated Te, it is possible to improve the cleaning action of the active species.

  A main body case, an insulating substrate provided in the main body case, a discharge electrode disposed at a predetermined interval from a surface of the insulating substrate, a counter electrode in contact with the insulating substrate, and the discharge electrode And a power source for applying a voltage to the counter electrode, and an adsorbing means for adsorbing moisture in the vicinity applied so as to cover the insulating substrate, so that a high voltage is applied between the discharge electrode and the counter electrode. Even when is applied, the current flowing between the discharge electrode and the counter electrode reaches the counter electrode after flowing in the surface direction from the discharge electrode through the suction means located on the outer periphery of the insulating substrate.

  That is, even when a high voltage is applied between the discharge electrode and the counter electrode, the creepage distance between the discharge electrode and the counter electrode is increased, and electrons flow over a longer distance through the adsorption means. Spark discharge due to a short circuit is unlikely to occur, and as a result, safety can be improved. In addition, since the creeping distance between the discharge electrode and the counter electrode is increased, the discharge range is widened, and active species are generated from a wider range, so that safety can be improved.

  Furthermore, in the present invention, the insulating substrate has an opening, and an opening edge of the opening on the discharge electrode side is an expanding inclined surface expanding outward and the suction means. The tip of the discharge electrode is disposed perpendicularly to the opening having the widened inclined surface, so that the opening edge of the opening is less than the case where the opening edge of the opening is not inclined. The inclination of the edge expansion slope increases the surface area of the adsorption means facing the discharge electrode and the abundance of the adsorption means, so that more electrons emitted from the discharge electrode reach the surface of the adsorption means. .

  As a result, more of the water adsorbed on the adsorbing means is decomposed by corona discharge and the amount of active species generated is increased, so that the purification action by the active species can be improved.

  Therefore, utilization as an air cleaner is expected.

1 Room 2 Floor 3 Active Species Generator 4 Body Case 5 Suction Port 6 Blower 7 Insulating Substrate 8 Adsorbing Means 9 Adsorbent 10 Adhesive 11 Pore 12 Discharge Electrode 13 Counter Electrode 14 Power Supply 15 Exhaust Port 18 Support Member 20 Opening 21 Expanded inclined surface 22 Front surface 23 Back surface 24 Side surface 25 Middle of the slope 26 Insulating coating

Claims (13)

A body case,
An insulating substrate provided in the main body case;
A discharge electrode disposed at a predetermined interval from the surface of the insulating substrate;
A counter electrode in contact with the insulating substrate;
A power source for applying a voltage to the discharge electrode and the counter electrode;
Adsorbing means for adsorbing moisture in the vicinity applied to cover the insulating substrate;
The insulating substrate has an opening;
The opening edge of the opening on the discharge electrode side is covered with the adsorbing means, with an expanding inclined surface expanding outward,
The active species generator is characterized in that the tip of the discharge electrode is disposed to face the opening having the expanding inclined surface in the vertical direction. The discharge electrode, the active species generating apparatus according to claim 1, characterized in that located on the heart vertical axis within the opening of the insulating substrate.
The active species generator according to claim 1 or 2, wherein the opening of the insulating substrate has a circular shape. The said adsorption | suction means forms the curved surface that a film thickness becomes so thick that it goes to the middle of the expansion slope of the opening part of the said insulating substrate, The Claim 1 characterized by the above-mentioned. Active species generator. The adsorbing means has an adsorbent and an adhesive, and the adsorbent applied to the insulating substrate is bonded to the insulating substrate by the adhesive. The active species generator according to any one of the above. The active species generator according to claim 1, wherein the insulating substrate is formed of a ceramic substrate. The active species generator according to claim 6, wherein the ceramic substrate includes any one of silica, aluminum, and magnesium. The active species generator according to claim 6 or 7, wherein the ceramic substrate is an alumina substrate. The active species generator according to claim 1, wherein the insulating substrate is formed of a resin substrate. The active species generator according to claim 9, wherein the resin substrate is a fluororesin substrate. The active species generating apparatus according to claim 5, wherein the adsorbent has an average particle size larger than that of the adhesive. The active species generator according to claim 11, wherein the adsorbent has pores on a surface, and the pores are smaller than an average particle diameter of the adhesive. The active species generator according to any one of claims 1 to 12, wherein the power source applies a positive or negative voltage of 3 to 10 KV between the discharge electrode and the counter electrode.

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