JP5808268B2 - Graphite heater furnace - Google Patents

Description

  The present invention relates to a graphite heater furnace, and more specifically, a graphite heating element in which heater rods are horizontally arranged in the heating space of the furnace body is provided in multiple stages so that a high-temperature temperature distribution is uniformly formed in the fired product, The present invention relates to a graphite heater furnace that improves the firing quality of a fired product.

  In general, a graphite heater furnace is used for sintering LEDs, electric elements for electric vehicles, cathode materials, crystals of crystalline silicon semiconductors for solar cells, ceramics for structural materials, mold products for metal injection, and the like.

  The graphite heater furnace is one of the firing furnaces, and these graphite heater furnaces are roughly classified into two types, that is, a configuration type (Batch Type) and a tunnel type (Tunnel Type).

  The tunnel type graphite heater furnace is classified into a push type and a roller type according to a method of allowing the fired material to enter the inside.

  Arrangement type graphite heater furnace can realize various firing conditions and is advantageous for firing ceramic parts in chip form with various sizes and characteristics, but because rapid heating is limited, ceramic material However, it is difficult to stabilize the internal electrodes of the chip components.

  On the other hand, the tunnel-type graphite heater furnace is fired while the fired product is moved by a pusher or roller between the heat generating elements with constant heat generation, so the temperature and atmosphere inside the furnace are stable. Although it is excellent, it is difficult to implement various firing conditions.

  Therefore, the arrangement-type graphite heater furnace can implement various firing conditions of the fired product and is advantageous for firing the chip-shaped ceramic parts. However, the rapid heating and the latent heat of the insulator forming the interior of the furnace make rapid changes. Improvement is required because it is difficult to cool.

  Further, the graphite heating element installed inside the furnace has a problem that one side is fixed inside the furnace and the other side is fixedly installed outside, so that it is damaged by thermal expansion.

  Moreover, when placing the fired product in the furnace, an insulating setter (Setter) made of alumina that does not cause a short circuit is used. This insulating setter melts alumina at a high temperature of 1800 ° C. or higher. Therefore, there is a problem that it cannot be used at high temperatures.

  Since the conventional graphite heater furnace is heated by providing heating elements on the left and right sides of the furnace, or on the upper and lower sides and the four sides of the left and right sides, different temperatures are formed at the center and edge of the fired product. There is a problem (Patent Document 1).

That is, the calcined product is located in the middle of the furnace and is far away from the arranged graphite heating elements arranged along the inner wall of the furnace, so that the heat source moving through convection and radiation cannot be directly transmitted, Depending on the distance, the amount of heat is reduced, and the high temperature distribution is uneven.
Moreover, since the calcined product has a temperature distribution difference due to the temperature nonuniformly transmitted to the center and the edge inside the furnace, and the characteristic change of the calcined product cannot be prevented, there is a problem in that a problem occurs in the calcining.

JP 2002-193670 A (FIGS. 1 and 5)

  An object of the present invention is to horizontally arrange a heater rod or the like of a graphite heating element in order to apply a uniform temperature to the entire fired product.

  Another object of the present invention is to provide a multi-stage graphite heating element.

  Another object of the present invention is to increase the firing quality of the fired product by rapidly raising the graphite heating element at a high temperature.

  Another object of the present invention is to uniformly form a high-temperature temperature distribution in the fired product by placing the fired product on a horizontally arranged graphite heating element.

  Another object of the present invention is to uniformly change the temperature deviation inside the firing furnace so as to prevent changes in the properties of the fired product due to the temperature deviation during firing.

The invention of claim 1 includes a case, a furnace main body disposed inside the case, a cooling water chamber provided outside the furnace main body, and a heating space formed inside the furnace main body. In addition, the heating space has a multi-stage and horizontally arranged graphite heating element, and a heater rod that constitutes the graphite heating element and that is horizontally arranged and on which a fired product can be placed. A graphite heater furnace ,
A first heater rod support constituting the graphite heating element and disposed on one side of the heating space, and a second heater rod constituting the graphite heating element and disposed on the other side of the heating space. It has a heater rod support, and a plurality of heater rods arranged in a horizontal manner across the first heater rod support and the second heater rod support.

  According to the second aspect of the present invention, a support bolt is attached to the first heater rod support and the second heater rod support of the graphite heating element disposed at the lowermost part of the heating space, A top bolt is attached to the first heater rod support and the second heater rod support of the graphite heating element disposed at the top, and the graphite heating element and heating disposed at the bottom of the heating space portion. Step forming bolts are attached to the first heater rod support and the second heater rod support of the graphite heating element arranged between the graphite heating elements arranged at the uppermost part of the space. It is said.

  According to a third aspect of the present invention, the first heater rod support of the graphite heating element is separated from the inner side wall of the furnace body, and the second heater rod support of the graphite heating element is fixed to the side wall of the furnace body. It is a feature.

  According to a fourth aspect of the present invention, there is provided a first heater rod support and a second heater rod support between a first heater rod support and a second heater rod support of a graphite heating element in which the heater rod is installed in multiple stages. The heater rods are arranged so as to be connected, and the heater rods are arranged at intervals.

  According to a fifth aspect of the present invention, there is provided a cooling rod projecting between the graphite heating elements so as to cool the heating space by communicating with the cooling water chamber in the heating space where the graphite heating elements are arranged in multiple stages. It is characterized by having installed.

  According to the present invention, the heater rod of the graphite heating element is arranged horizontally so that a uniform temperature distribution is formed at all the centers and edges of the fired product.

  In addition, since the graphite heating element is provided in multiple stages, there is an effect that the firing can be precisely performed without bending even if a heavy fired product is placed.

  In addition, since the heater rod made of graphite and directly generating heat can be rapidly raised at a high temperature, there is an effect that it is possible to prevent changes in the properties of the fired product.

  Further, by firing the product on the graphite setter, the fired product has an effect of not being affected by the impurities of the graphite setter.

  Moreover, since the heater rod and setter manufactured with graphite can raise to 2900 degreeC under argon (Ar) atmosphere, there exists an effect which can maximize the baking quality of baking products.

  In addition, the temperature distribution is uniformly formed inside the furnace main body, and there is an effect that the change in characteristics of the fired product is prevented and the firing quality is improved.

  In addition, since the temperature distribution on the fired product is uniformly formed, the firing quality of LEDs, electric elements for electric vehicles, cathode materials, crystalline silicon semiconductor crystals for solar cells, ceramics, metal injection mold products, etc. is improved. There is an effect to.

It is a schematic front sectional drawing of the graphite heater furnace of an Example. It is a disassembled perspective view of the graphite heating element installed in the graphite heater furnace of an Example. It is a schematic side sectional view of a graphite heater furnace of an example. It is a schematic front view of the control part used for the graphite heater furnace of an Example.

  The following examples are shown as examples of the mode for carrying out the invention.

  Hereinafter, a preferred embodiment of a graphite heater furnace according to the present invention will be described in detail with reference to the accompanying drawings.

As shown in FIG. 1, a graphite heater furnace 2 according to an embodiment of the present invention includes a case 4 and a furnace body 6 disposed inside the case 4. Between the case 4 and the furnace body 6 is provided a cooling water chamber 8 formed so that the outer enclosure of the furnace body 6 is filled with cooling water.
In the heating space 10, graphite heating elements 12 are horizontally arranged in multiple stages (six stages in this embodiment).

  The furnace body 6 is provided with a door (not shown) for hermetically sealing the heating space 10 while facilitating the introduction and withdrawal of the product to be fired.

  An insulator 14 is disposed on the outer side of the furnace body 6. Further, a heat insulating material 16 is provided at a constant thickness inside the furnace body 6. The heat insulating material 16 is a known heat insulating material, and is configured to block transmission of hot air in the heating space 10 and cold air in the cooling water chamber 8.

FIG. 2 is a perspective view of the graphite heating element 12 disposed at the lowermost position of the heating space 10 and the graphite heating element 12 disposed at the uppermost position of the heating space 10.
A first heater rod support 20A is disposed on one side of the graphite heating element 12, and a second heater rod support 20B is disposed on the other side of the graphite heating element 12.

Supporting bolts 22 project from the lower surfaces of the first heater rod support 20A and the second heater rod support 20B of the graphite heating element 12 installed at the lowest position of the heating space 10.
As shown in FIGS. 1 and 3, the support bolt 22 is placed and fixed on an insulating bolt 23 protruding from the lower surface of the furnace body 6. Accordingly, the first heater rod support 20A and the second heater rod support 20B of the graphite heating element 12 installed at the lowest position of the heating space 10 are slightly lifted from the heat insulating material 16 at the bottom of the furnace body 6. Are arranged.

  As shown in FIGS. 2 and 3, the graphite heating element 12 installed at the bottom of the heating space 10, the graphite heating element 12 and the heating space installed at the bottom of the heating space 10. Step forming bolts 24 are provided on the first heater rod support 20A and the second heater rod support 20B of the four graphite heating elements 12 disposed between the graphite heating elements 12 installed at the top of the section 10. Are arranged two by two in the inserted state.

  As shown in FIG. 2, a bolt holding portion 26 is formed on the upper portion of the step forming bolt 24. Therefore, the lower portion of the step forming bolt 24 positioned above can be firmly held by the bolt holding portion 26.

  As a result, a plurality of graphite heating elements 12 can be stacked at intervals.

  Accordingly, as shown in FIGS. 1 and 3, the heating space 10 is provided with the graphite heating elements 12 horizontally in multiple stages (six stages in this embodiment).

  As shown in FIG. 2, the first heater rod support 20 </ b> A and the second heater rod support 20 </ b> B of the graphite heating element 12 disposed at the uppermost position of the heating space 10 are replaced with the step forming bolts 24. Two top bolts 28 are inserted, and connected to the first heater bar support 20A and the step forming bolt 24 attached to the second heater bar support 20B of the graphite heating element 12 located below. Yes.

A plurality (seven in the embodiment) of heater rods 50 are fixed between the first heater rod support 20A and the second heater rod support 20B of the graphite heating element 12 in a state of being horizontally stretched. Yes.
The first heater rod support 20A and the second heater rod support 20B are formed in a prismatic shape so that the heater rod 50 can be easily attached.

  These heater rods 50 are made of graphite and generate heat at a high temperature when the power supply is approved. In addition, since the heater rod 50 generates heat, the heater rod 50 heats the fired product up and down regardless of the stage of the graphite heating element 12 provided with the fired product.

  As shown in FIG. 1, the first heater rod support 20A of the graphite heating element 12 is disposed separately from the furnace body 6, but the second heater rod support 20B of the graphite heating element 12 is graphite. It is fixed to the furnace body 6 via the heating element connector 52. This ensures that the graphite heating element 12 is attached to the furnace body 6.

  Further, since the first heater rod support 20A of the graphite heating element 12 is disposed separately from the furnace body 6, the graphite heating element 12 and the heater rod 50 even if the heater rod 50 is thermally expanded due to heat generation. Can be prevented from being damaged.

  Since the heater rod 50 is supported at both ends by the first heater rod support 20A and the second heater rod support 20B, it is difficult to bend, and the fired product 44 is supported by the plurality of heater rods 50 as shown in FIG. Even the heavy baked product 44 can be stably and reliably supported.

  Further, since the heater rod 50 is firmly disposed in a horizontal state by the first heater rod support 20A and the second heater rod support 20B of the graphite heating element 12, the fired product 44 is uniformly heated. Since it can be received, the quality can be made uniform.

  Since the heater rod 50 can be raised to a maximum temperature of 3000 ° C., it can also be used in a stainless chamber (not shown) under a C12, HC1, H2, or N2 atmosphere.

  These heater rods 50 have no possibility of short-circuiting even when a graphite fired product is placed thereon, and even when a heavy fired product is placed on the heater rod 50, the heater rod 50 can be accurately fired.

  The graphite heater furnace 2 that can be raised to a high temperature can be used at 2900 ° C. in an argon (Ar) atmosphere and up to 2000 ° C. and 2400 ° C. in a vacuum and nitrogen atmosphere, respectively.

  The first heater rod support 20A of the graphite heating element 12 is provided with a power terminal portion (not shown) to which power is supplied.

  As shown in FIG. 1, in the heating space 10 in which the graphite heating elements 12 are arranged in multiple stages, the graphite heating elements 12 are communicated with the cooling water chamber 8 to cool the heating space 10. A cooling rod 32 is installed in a protruding state between them.

  As shown in FIGS. 3 and 4, the graphite heater furnace 2 is provided with a gas 34 for controlling the gas and the power source, and an operation control panel 36 so that the firing operation of the fired product 44 can be precisely performed. Further, a control unit 38, a dry pump 40 for discharging hot air, a cooling water supply device (not shown), and the like are further installed.

  Hereinafter, the operation of the graphite heater furnace 2 of the embodiment will be described.

  First, the cooling water is supplied to the cooling water chamber 8 and an operation switch (not shown) of the control unit 38 is operated to turn on the power supply so that C12, HC1, H2, and N2 can be used. The dry pump 40 is also moved while opening.

  If the operation of the graphite heater furnace 2 is thereby prepared, the graphite setter 42 in which the fired product 44 is placed in the superheated space 10 of the furnace body 6 is placed on the heater rod 50 of the graphite heating element 12 formed in multiple stages. The door (not shown) is closed and sealed.

  The graphite heater furnace 2 can perform all of the manual mode or the automatic mode. Here, the case of the automatic mode will be described.

  When the start button is pressed in the automatic mode, the power source overheats the heater rod 50 through the power terminal portion installed on one side inside the case 4.

  Due to the heating of the heater rod 50, the graphite heating elements 12 installed in multiple stages in the heating space 10 rapidly rise to a high temperature.

  The high temperature generated when the graphite heating element 12 generates heat heats the fired product 44 placed on the graphite setter 42 from above and below to a high temperature.

  At this time, the fired product 44 is subjected to a high temperature with a uniform temperature distribution, so that the firing quality is improved.

  The graphite heating elements 12 are arranged in multiple stages in a horizontal state, and the heater rods 50 are also arranged in a horizontal position. Therefore, the crystal of an LED, an electric element for an electric vehicle, a cathode material, and a crystalline silicon semiconductor for a solar cell. In addition, the structural material ceramic, the metal injection mold product, and the like are placed at any stage of the graphite heating element 12 and are heated and sintered at a high temperature with a uniform temperature distribution.

  When the fired products 44 and the like are heated for a certain time and the firing is finished, the control unit 38 of the graphite heater furnace 2 displays the finish of the firing work.

  The operator and the manager look at the end display of the control unit 38 and remove only the lock member of the door of the furnace body 6 from the state in which the button is turned off until the digital pressure gauge 46 indicates atmospheric pressure. 10 is filled with nitrogen gas.

  If the heating space 10 of the graphite heater furnace 2 becomes atmospheric pressure by filling with nitrogen gas, the supply of nitrogen is interrupted, then the door is opened, the fired fired product 44 is taken out, and if it is air-cooled, the fired product is fired. Ends.

  In the present invention, the graphite heating element 12 on which the fired product 44 is placed inside the graphite heater furnace 2 is formed horizontally, and the fired product is fired at a high temperature at which the temperature distribution is uniformly transmitted from the upper and lower heater rods 50 by providing in multiple stages. 44 is improved in firing quality.

  The graphite heater furnace 2 of the present invention can also be used for the production of fired products other than the examples.

2 Graphite heater furnace 4 Case 6 Furnace body 8 Cooling water chamber 10 Heating space 12 Graphite heating element 14 Insulator 16 Heat insulating material 20A First heater rod support 20B Second heater rod support 24 Step forming bolt 26 Bolt holding portion 28 Top bolt 32 Cooling rod 34 Panel 36 Operation control panel 38 Control unit 40 Dry pump 42 Graphite setter 44 Burned product 50 Heater rod 52 Graphite heating element connected body

Claims (5)

A case, a furnace body disposed inside the case, a cooling water chamber provided outside the furnace body, a heating space formed inside the furnace body, and a multistage in the heating space A graphite heater furnace characterized by comprising a graphite heating element horizontally disposed at a heater rod that constitutes the graphite heating element and can be horizontally disposed to place a fired product ,
A first heater rod support constituting the graphite heating element and disposed on one side of the heating space, and a second heater rod constituting the graphite heating element and disposed on the other side of the heating space. A graphite heater furnace comprising: a heater rod support; and a plurality of heater rods disposed horizontally on the first heater rod support and the second heater rod support.   A support bolt is attached to the first heater rod support and the second heater rod support of the graphite heating element disposed at the lowermost position of the heating space, and is disposed at the uppermost position of the heating space. A top bolt is attached to the first heater rod support and the second heater rod support of the graphite heating element, and the graphite heating element disposed at the lowermost position of the heating space and the uppermost position of the heating space. The step forming bolt is attached to the 1st heater rod support body of the graphite heating element arrange | positioned between the graphite heating elements arrange | positioned, and the 2nd heater rod support body of Claim 1 characterized by the above-mentioned. Graphite heater furnace.   The first heater rod support of the graphite heating element is spaced apart from the inner side wall of the furnace body, and the second heater rod support of the graphite heating element is fixed to the side wall of the furnace body. Graphite heater furnace.   The heater rod is disposed between a first heater rod support and a second heater rod support of a graphite heating element installed in multiple stages so as to be connected to the first heater rod support and the second heater rod support. The graphite heater furnace according to claim 1, wherein the heater rods are arranged at intervals.   In the heating space where the graphite heating elements are arranged in multiple stages, a cooling rod is installed in a protruding state between the graphite heating elements so as to be connected to the cooling water chamber and cool the heating space. The graphite heater furnace according to claim 1.

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