JP5806818B2 - Powder supply method and apparatus, and powder dispersion system - Google Patents

Description

  The present invention relates to a powder supply method and apparatus for supplying powder to a supply destination such as a powder distribution apparatus, and a powder distribution system.

  There is a powder spraying system for spraying powder onto an object such as a substrate. This powder spraying system is used, for example, in a cell process of a substrate for manufacturing a liquid crystal panel, and sprays spacers on the substrate in order to spray the powder onto the substrate and keep the cell gap constant.

  Some of such powder dispersion systems employ various methods, and a system according to the purpose and circumstances is used. The methods are roughly classified into a wet spraying method in which powder is mixed with a liquid and then sprayed (for example, see Patent Document 1) and a dry spraying method in which powder is sprayed as it is (for example, see Patent Document 2). Is done. Further, when the dry spraying method is subdivided, an electrostatic method for forcibly applying a voltage to the powder and spraying, and a pressure feeding method for spraying the powder on a high-speed air stream (see, for example, Patent Document 3) And,

  The powder feeding system of the pressure feeding system includes a powder spreading device that spreads powder on a contained object, and a powder supply device that supplies the powder to the powder spreading device. The powder supply device is a pressure-resistant container (pressure-tight airtight container) that stores powder, a powder supply pipe connected to the powder spraying device from above the pressure-resistant container, and a powder supply device that protrudes into the pressure-resistant container A suction pipe which is inserted into the pipe so as to be movable up and down and sucks the powder in the pressure vessel into the supply pipe, an air supply means for pressurizing the pressure vessel to generate a high-speed air flow in the supply pipe, and a powder by vibrating the pressure vessel And a vibration exciter that puts the vehicle in a high-speed airflow. According to this powder supply apparatus, the lower end portion of the suction pipe is arranged near the powder surface, and then the pressure vessel is pressurized and vibrated, so that the powder contained in the pressure vessel is turned into a high-speed air flow. It can be put on and supplied to the powder spreader.

Japanese Patent Application Laid-Open No. 07-294943 Japanese Patent Laid-Open No. 07-068197 JP 2009-063786 A

  However, the above-described powder supply apparatus includes movable parts such as a suction pipe that moves up and down and a pressure vessel that vibrates, and the structure is complicated. For this reason, there existed various problems, such as obstructing size reduction of an apparatus and taking time and labor for maintenance management.

  The present invention has been made in view of the above problems, and an object of the present invention is to provide a powder supply method and apparatus, and a powder dispersion system that can realize powder supply with a simple structure.

  (1) The present invention contains a powder container and a pressure container (pressure container) having a supply port for supplying the powder to a supply destination, and intermittently applies a first pressure in the container. Controlling the first pressurizing means, the second pressurizing means for applying a continuous second pressure in the pressure-resistant container, and the first and second pressurizing means in the pressure-resistant container. A powder supply apparatus comprising: a control unit that applies first and second pressures and causes the powder to float in the pressure vessel.

  According to the present invention, it is possible to supply powder with a simple structure without including moving parts such as the suction pipe that moves up and down as described above and a pressure vessel that vibrates. For this reason, an apparatus can be reduced in size. In addition, maintenance management is simplified. Furthermore, since the powder is suspended in the pressure vessel and then supplied to the supply destination, the powder can be supplied without being mixed in.

  (2) The present invention also includes, as the first pressurizing means, one or a plurality of first air feeding means for feeding compressed gas into the pressure resistant container, and the pressure resistant container includes the first pressure feeding means. The powder supply apparatus according to (1), wherein the powder supply apparatus includes one or a plurality of first inflow ports into which gas from the gas means is introduced.

  (3) Further, in the present invention, the pressure vessel has a cylindrical shape having an upper surface and a lower surface, and the first inflow port has a spiral downdraft along the inner surface of the pressure vessel, and the downdraft (2), wherein the supply port is arranged at a position where the updraft on the upper surface collides. This is a powder supply apparatus.

  (4) The present invention also includes, as the second pressurizing unit, a second air feeding unit that feeds the compressed gas into the pressure vessel, and the pressure vessel is supplied from the second gas feeding unit. The powder supply apparatus according to any one of (1) to (3), wherein the powder supply apparatus includes a second inflow port through which a gas flows.

  (5) The present invention is the powder supply apparatus according to (4) above, further comprising an impact absorbing means for absorbing an impact caused by the gas sent from the second air feeding means.

  (6) The present invention is also the powder supply apparatus according to (5), characterized in that the impact absorbing means includes a porous member that closes the second inflow port.

  (7) The present invention also includes a facing member facing the second inflow opening at a predetermined interval as the shock absorbing means, as described in (5) or (6) above. This is a powder supply apparatus.

  (8) The present invention also includes a sensor that detects a charge amount of a supply path from the supply port to the supply destination, and the control unit is configured to control the first and second based on a detection result of the sensor. The powder supply apparatus according to any one of (1) to (7), wherein the pressurizing unit is feedback-controlled to adjust the supply amount of the powder.

  According to the said invention, the supply amount of powder can be adjusted per 0.1 mg.

  (9) The present invention also provides a powder supply device according to any one of (1) to (8) above, and a powder distribution device that distributes the powder supplied from the powder supply device to an object. And a powder dispersion system.

  (10) The present invention also applies intermittent first pressure and continuous second pressure into a pressure-resistant container having a supply port for supplying powder to a supply destination while containing powder. The powder supply method is characterized in that the powder is suspended in the pressure vessel.

  According to the powder supply device according to any one of (1) to (8), the powder dispersion system according to (9), and the powder supply method according to (10), The powder supply can be realized with a simple structure without the moving parts such as the suction pipe ascending and descending and the pressure vessel vibrating.

It is the schematic which shows the powder distribution system of this invention. It is a disassembled perspective view of the pressure vessel shown in FIG.

  Hereinafter, the powder dispersion system 10 according to the present invention will be described in detail with reference to the drawings.

  First, the configuration of the powder dispersion system 10 will be described in detail with reference to FIGS. 1 and 2. FIG. 1 is a schematic view showing a powder dispersion system 10. FIG. 2 is an exploded perspective view of the pressure vessel (pressure-tight sealed vessel) 20.

  The powder spraying system 10 shown in FIG. 1 employs a dry spraying method in which the powder YA1 is sprayed as it is without being mixed with a liquid or the like. More specifically, the powder YA1 is sprayed on a high-speed air stream. It adopts a pressure feeding method. This powder spraying system 10 is used, for example, in a cell process of a substrate for manufacturing a liquid crystal panel, and sprays spacers on the substrate in order to spray the powder YA1 on the substrate and keep the cell gap constant. As the powder YA1, a micro-order or nano-order powder is used.

  The powder dispersion system 10 accommodates an object XA1 such as a substrate, and distributes the powder YA1 to the object XA1, and the powder for supplying the powder YA1 to the powder dispersion apparatus 11. A supply device 12 and a supply pipe 13 functioning as a supply path of the powder YA1 from the powder supply device 12 to the powder spreading device 11 are provided.

  In the powder spraying system 10 employing such a pressure feeding method, the powder YA1 is dispersed from so-called secondary particles in an aggregated state into so-called primary particles by charging due to friction with the supply pipe 13. Thereafter, in the powder spraying device 11, the powder YA1 dispersed in the primary particles is sprayed.

  The spray amount of the powder YA1 has a correlation with the charge amount of the powder YA1, that is, with the charge amount of the supply tube 13 charged with the charge of the powder YA1. Therefore, the powder spraying system 10 measures the spraying amount of the powder YA1 by feedback controlling the charge amount of the supply pipe 13, that is, indirectly controlling the spraying amount of the powder YA1.

  The correlation data between the amount of powder YA1 and the charge amount of the supply pipe 13 are collected by conducting an experiment before actually using the powder distribution system 10, and will be described later. 24 is stored in advance in a memory (not shown). This data storage may be performed by the manufacturer of the powder distribution system 10 at the time of manufacture, or may be performed by the user of the powder distribution system 10 before use.

  Hereinafter, each component will be described.

  (Powder spreader) The powder spreader 11 includes a chamber 14 that constitutes a space in which the powder YA1 is spread, a spray nozzle 15 disposed on the ceiling in the chamber 14, and a spray nozzle 15 in the chamber 14. A table 16 disposed below is provided.

  The chamber 14 is provided with a door 17 on the side thereof for inserting and removing the object XA, and an exhaust port 18 below the door 17.

  The spray nozzle 15 ejects the powder YA1 toward the table 16. A multiplex nozzle or the like can be adopted as the spray nozzle 15. The multiplex nozzle is provided with a plurality of inlets and a plurality of outlets, and scatters the powder YA1 supplied from one path into a plurality of branches. For details of the multiplex nozzle, refer to Japanese Unexamined Patent Application Publication No. 2002-148635.

  The object XA1 is placed on the table 16 when the powder dispersion system 10 is used.

  (Powder supply device) The powder supply device 12 is a pressure vessel 20 for containing the powder YA1, a stand 21 for fixing the pressure vessel 20, and a pressure such as compressed air sent into the pressure vessel 20. The first and second air feeding means 22 and 23 functioning as pressurizing means for applying the pressure, the control unit 24 functioning as the control means for the first and second air feeding means 22 and 23, and the supply pipe 13 And a sensor 25 that detects the amount of charge and sequentially inputs the detection result to the control unit 24.

  The pressure vessel 20 shown in FIG. 2 is mainly formed of a metal such as stainless steel. The pressure vessel 20 has a shock absorber that absorbs a shock caused by a gas sent from the second air feeding means 23, a lid 28 that constitutes the upper surface of the pressure vessel 20, an O-ring 29 that functions as a packing. A porous member 30 and an L-shaped piece 31 functioning as means. The container body 27 has a cylindrical shape having a lower surface, and has a flange portion 27a at the upper end. In the flange portion 27a, an annular groove (reference numeral omitted) is formed on the upper end surface facing the lid 28. An O-ring 29 is fitted in the groove.

  The lid 28 has a thick disk shape. On the upper surface that is the outside of the lid 28, there are a supply pipe 13 and first and second resin pipes 22a, 23a that function as a supply path of gas from the first and second air feeding means 22, 23. It is connected.

  On the lower surface, which is the inner side of the lid 28, the supply port 28a for supplying the powder YA1 to the powder spraying apparatus 11 as the supply destination and the gas from the first air supply means 22 are allowed to flow into the pressure vessel 20. One first inflow port 28b and a second inflow port 28c through which the gas from the second air supply means 23 flows into the pressure-resistant vessel 20 are formed. The supply port 28a is formed at the center of the lower surface of the lid 28, that is, at a position where a rising airflow UD1 described later collides. The four first inflow ports 28b are formed on the lower surface of the lid 28 at intervals from each other so as to surround the supply port 28a.

  The first inflow port 28b has a structure for generating a spiral downdraft DD1 along the inner surface of the pressure vessel 20 and an updraft UD1 associated with the downdraft DD1 inside the downdraft DD1. Yes. That is, each first inflow port 28b is bored upward (not shown) so as to be inclined in the circumferential direction on the lower surface of the lid 28 having a disk shape. The first inflow port 28b on the back side of the center of the drawing is bored upward so as to incline to the left side of the drawing. The first inflow port 28b on the right side of the drawing is bored upward so as to incline to the back side of the drawing. The first inflow port 28b on the front side in the drawing is bored upward so as to incline to the right side of the drawing. The first inflow port 28b on the left side of the drawing is bored upward so as to incline toward the front side of the drawing.

  The porous member 30 is fitted into the second inflow port 28c so as to protrude. The porous member 30 closes the second inflow port 28c. The porous member 30 also has a function of preventing the powder YA1 from flowing back into the second resin tube 23a. On the lower surface of the lid 28, an L-shaped piece 31 is fixed in the vicinity of the second inflow port 28c. The horizontal surface 31a of the L-shaped piece 31 is a facing member facing the second inflow port 28c at a predetermined interval, that is, an impact absorbing means for absorbing an impact caused by a gas fed from the second air feeding means 23. Function as. The vertical surface 31b of the L-shaped piece 31 partitions the second inlet 28c and the supply port 28a from each other, and the gas flowing in from the second inlet 28c is supplied to the powder YA1 that is supplied from the supply port 28a. Prevent influence.

  Inside the lid 28, the first pressurization connecting the powder passage 28 d connecting the connection port 28 a and the connection location of the supply pipe 13, the connection location of the first resin pipe 22 a and the four first inlets 28 b. A path 28e and a second pressurizing path 28f that connects the connection portion of the second resin pipe 23a and the second inflow port 28c are formed. The first pressurizing path 28e is provided with a valve (not shown) that prevents the powder YA1 from flowing back into the first resin tube 22a.

  The first air supply means 22 intermittently sends gas into the pressure vessel 20 and applies intermittent pressure to the pressure vessel 20. The first air supply means 22 mainly has a function of generating a downward air flow DD1 and an upward air flow UD1 in the pressure resistant container 20, and a function of applying an impact to the powder YA1 in the pressure resistant container 20 to float.

  The second air supply means 23 sends continuous gas into the pressure vessel 20 and applies continuous pressure into the pressure vessel 20. The second air supply means 23 mainly has a function of adjusting the pressure in the pressure vessel 20 and a function of generating an air flow from the pressure vessel 20 to the chamber 14 in the supply pipe 13. The supply amount of the powder YA1 to the powder spraying device 11, that is, the spraying amount of the powder YA1 in the powder spraying device 11 is determined according to the operating conditions of the first and second air feeding means 22 and 23.

  Returning to FIG. 1, the control unit 24 supplies the first and second air feeding means 22, 23, that is, the powder spraying device 11, based on the current charge amount of the supply pipe 13 detected by the sensor 25. The feed amount of the powder YA1 can be feedback-controlled to measure the feed amount of the powder YA1.

  Specifically, the control unit 24 supplies the charge amount of the supply pipe 13 at the present time (hereinafter abbreviated as “current charge amount”) and the supply pipe 13 having a target value stored in advance in a memory (not shown). And the charge amount (hereinafter referred to as “target charge amount”). When the current charge amount reaches the target charge amount, the control unit 24 stops the operation of the first and second air supply means 22 and 23, and the current charge amount becomes the target value. When the amount has not been reached, the operations of the first and second air feeding means 22 and 23 are continued.

  The sensor 25 is composed of an amplifier (not shown) that virtually grounds the supply tube 13 and integrates the discharge amount from the supply tube 13, and detects the integrated discharge amount as the charge amount of the supply tube 13. For details of the sensor 25, refer to Japanese Unexamined Patent Application Publication No. 2009-063786.

  (Supply pipe) The supply pipe 13 includes a metal pipe such as stainless steel, and an electromagnetic shield and an insulating rubber tube covering the pipe (both not shown).

  Next, the operation sequence of the powder dispersion system 10 will be described.

  In the preparation stage, first, the object XA1 is placed on the table 16, and the powder YA1 is accommodated in the pressure resistant container 20. Then, a set value such as a spraying amount of the powder YA1 and an operation start signal are input to the control unit 24 by a man-machine interface (not shown) such as an operation panel.

  When the operation start signal is input, the control unit 24 controls the first and second air feeding means 22 and 23 to apply intermittent pressure and continuous pressure in the pressure resistant container 20. As a result, a downdraft DD1 and an updraft UD1 are generated in the pressure vessel 20, and an airflow from the pressure vessel 20 to the chamber 14 is generated in the supply pipe 13. The powder YA1 floats in the pressure-resistant container 20, rides on the airflow in the supply pipe 13, is supplied to the powder spraying device 11, and is sprayed on the object XA1.

  The sensor 25 detects the charge amount of the supply pipe 13 having a correlation with the spray amount of the powder YA1 during the spraying of the powder YA1, and sequentially inputs the detection result to the control unit 24.

  When the current charge amount reaches the target charge amount, the control unit 24 stops the operation of the first and second air supply means 22 and 23, and the current charge amount becomes the target value. When the amount has not been reached, the operations of the first and second air feeding means 22 and 23 are continued.

  Thus, according to the powder spraying system 10, without a moving part such as a suction pipe that moves up and down like the powder spraying system described in Patent Document 3 and a pressure vessel that vibrates, with a simple structure, Supply of powder can be realized. For this reason, the powder supply apparatus 12 which comprises the powder distribution system 10 can be reduced in size. In addition, maintenance management is simplified. Furthermore, since the powder YA1 is suspended in the pressure vessel 20 and then supplied to the powder spraying apparatus 11 that is the supply destination, the powder YA1 can be supplied without being mixed in.

  Further, since the first and second air feeding means 22 and 23 are feedback-controlled based on the detection result of the sensor 25, the amount of powder supplied to the powder spraying device 11 can be adjusted in units of 0.1 mg.

  The present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the spirit and technical idea of the present invention.

  That is, in the above embodiment, the correlation data between the spray amount of the powder YA1 and the charge amount of the supply pipe 13 is not stored in the memory (not shown) in the control unit 24, and the user The correlation data may be managed so that the charge amount of the supply pipe 13 is handled as a substitute for the spray amount of the powder YA1.

  Or in the said embodiment, the quantity of each structural requirement, a shape, and a magnitude | size can be changed suitably. For example, the quantity of the 1st air supply means 22 and the 1st inflow port 28b is mentioned. As a specific example, a plurality of first air feeding means 22 corresponding one-to-one to the plurality of first inflow ports 28b may be provided. In this case, each first air supply means 22 is controlled independently, and gas is introduced while sequentially switching from one first inflow port 28b to the adjacent first inflow port 28b. A downward air flow DD1 is generated. Or you may make it provide the 1st air supply means 22 and the 1st inflow port 28b one each.

DESCRIPTION OF SYMBOLS 10 Powder distribution system 11 Powder distribution apparatus 12 Powder supply apparatus 13 Supply pipe (supply path)
14 Chamber 15 Spray nozzle 16 Table 17 Door 18 Exhaust port 20 Pressure-resistant container (pressure-tight sealed container)
21 Stand 22 First air supply means (first pressurizing means)
22a 1st resin pipe 23 2nd air supply means (2nd pressurizing means)
23a Second resin pipe 24 Control unit (control means)
25 sensor 27 container body 27a flange portion 28 lid 28a supply port 28b first inflow port 28c second inflow port 28d powder path 28e first pressurization path 28f second pressurization path 29 O-ring 30 porous member 31 L-shaped piece 31a Horizontal surface (facing member)
32b Vertical surface DD1 Downdraft UD1 Updraft XA1 Object YA1 Powder

Claims (8)

A pressure-resistant container having a cylindrical shape having a top surface and a bottom surface, containing powder and having a supply port for supplying the powder to a supply destination;
First air supply means for applying intermittent first pressure into the pressure vessel and sending compressed gas into the pressure vessel;
Second air feeding means for applying a continuous second pressure into the pressure vessel and feeding compressed gas into the pressure vessel;
Control means for controlling the first and second air supply means to apply the first and second pressures in the pressure-resistant container and to float the powder in the pressure-resistant container;
A powder feeder comprising:
The upper surface of the pressure vessel includes one or more first inlets that allow the gas from the first air feeding means to flow in, and a second inlet that allows the gas from the second air feeding means to flow in. Have
The first inflow port has a structure for generating a spiral downdraft along the inner surface of the pressure vessel, and an updraft accompanying the downdraft inside the downdraft,
The supply port is arranged at a position where the rising airflow collides with the upper surface of the pressure vessel,
Powder supply device. The supply port is formed at the center position of the upper surface of the pressure vessel,
The powder supply apparatus according to claim 1. A porous member is arranged so as to close the second inflow port,
The powder supply apparatus according to claim 1 or 2. The second inlet and the supply port are separated from each other by a vertical surface,
The powder supply apparatus in any one of Claims 1-3. A facing member is provided that faces the second inlet at a predetermined interval and absorbs an impact caused by a gas sent from the second air feeding means.
The powder supply apparatus of Claims 1-4. A sensor for detecting a charge amount of a supply path from the supply port to the supply destination;
The control means feedback-controls the first and second air supply means based on the detection result of the sensor, and adjusts the supply amount of the powder,
The powder supply apparatus in any one of Claims 1-5. The powder supply apparatus according to any one of claims 1 to 6,
A powder spraying device for spraying the powder supplied from the powder supply device to an object,
Powder dispersion system. It has a supply port for supplying powder to the supply destination, and the powder is contained in a pressure-resistant container having a cylindrical shape having an upper surface and a lower surface,
Floating the powder in the pressure vessel by flowing intermittent gas and continuous gas into the pressure vessel,
A powder supply method comprising:
One or a plurality of first inflow ports for allowing the intermittent gas to flow in are provided on the upper surface of the pressure vessel,
A spiral downdraft along the inner surface of the pressure vessel and an updraft accompanying the downdraft are generated inside the downflow by the first inlet, and the updraft is caused to collide with the supply port. and supplying to the supply destination powder Te,
Powder supply method.

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