JP5799508B2 - Defect inspection apparatus and defect inspection method - Google Patents

Description

  The present invention relates to a defect inspection apparatus and a defect inspection method.

  In the manufacturing process of a semiconductor device, the yield of a good semiconductor device that can be manufactured from one semiconductor wafer may be calculated to grasp the production status or predict the manufacturing cost. In addition, when the yield of a good semiconductor device becomes low, the manufacturing apparatus may be maintained or the manufacturing conditions may be reviewed.

  Here, as a method for calculating the yield of a conventional semiconductor device, there is an inspection method of an atomic level slip line on the surface of an epitaxial layer formed on a semiconductor wafer. In this yield calculation method, the surface data of a semiconductor wafer is irradiated with laser light to acquire coordinate data of a slip line. The coordinate data and the lattice data indicating the boundary of the chip area are overlapped to create slip line map data, and the number N of chip areas where the slip line exists is counted. Further, the slip ratio N / N0 is calculated using the number N0 of semiconductor chips that can be formed on the semiconductor wafer. The yield of a semiconductor device that is a non-defective product is predicted based on data obtained by examining the relationship between the slip rate and the non-defective product rate for each product type.

Japanese Patent Laid-Open No. 8-201305

However, the conventional method for calculating the yield of semiconductor devices evaluates the effect of scratches on the surface of a semiconductor wafer or thin film on the yield of the semiconductor device. In such a case, the influence on the yield of the semiconductor device could not be determined.
Further, in the conventional method for calculating the yield of a semiconductor device, when there is no process for forming an epitaxial layer during the manufacturing process, or before patterning a semiconductor wafer at the initial stage of the manufacturing process, for example, before forming an element isolation region. It was difficult to calculate the yield.
The present invention has been made in view of such circumstances, and an object of the present invention is to efficiently and accurately calculate the yield of a semiconductor device before patterning.

According to one aspect of the embodiment, after forming the thin film, the image data of the surface of the substrate before patterning the thin film is obtained, and the semiconductor device formed on the substrate is formed for each type. A step of selecting a mask pattern for masking a region in which the circuit pattern of the semiconductor device is formed sparsely, and the circuit pattern of the semiconductor device is densely patterned after patterning the thin film from the image data using the mask pattern. A step of extracting defects generated in a region to be formed before patterning the thin film; a total number of chips of the semiconductor device formed on the substrate; and a number of chips of the semiconductor device including the extracted defects. And a step of calculating the expected yield rate of the semiconductor device.

Further, according to another aspect of the embodiment, after forming a thin film, an inspection control unit that acquires image data of the surface of the substrate before patterning the thin film, and a type of semiconductor device formed on the substrate A mask pattern that masks a region in which circuit patterns of the semiconductor device are formed sparsely after patterning of the thin film, and is formed into a region in which circuit patterns of the semiconductor device are formed densely from the image data. From the defect extraction unit that extracts the generated defects before patterning the thin film, the total number of chips of the semiconductor device formed on the substrate, and the number of chips of the semiconductor device including the extracted defects, There is provided a defect inspection apparatus for a semiconductor device, comprising: a counting unit that calculates an expected yield of the semiconductor device as an expected yield rate.

  Since the defect on the substrate is extracted using the mask pattern and the expected yield rate of the semiconductor device is calculated, it is possible to determine the quality of the substrate before forming the pattern on the substrate. By determining whether a substrate is good or bad at an early stage, it becomes possible to detect a process abnormality at an early stage.

FIG. 1 is a block diagram of a defect inspection apparatus according to the first embodiment of the present invention. FIG. 2 is a flowchart of the defect inspection method according to the first embodiment of the present invention. FIG. 3A is a diagram illustrating a process of extracting a defect for determination according to the first embodiment of the present invention, and is a diagram illustrating an example of an image of map data. FIG. 3B is a diagram illustrating a process of extracting a defect for determination according to the first embodiment of the present invention, and is a diagram illustrating an example of an intermediate process image. FIG. 3C is a diagram illustrating a process of extracting a defect for determination according to the first embodiment of the present invention, and is a diagram illustrating an example of an image from which a defect for determination is extracted. FIG. 4 is a diagram showing an example of a product pattern according to the first embodiment of the present invention. FIG. 5 is a flowchart in the case of performing pass / fail judgment in a process until an element isolation region is formed on a semiconductor wafer as an application example of the defect inspection method according to the first embodiment of the present invention. FIG. 6 is a block diagram of a defect inspection apparatus according to the second embodiment of the present invention. FIG. 7 is a flowchart of the defect inspection method according to the second embodiment of the present invention. FIG. 8 is a diagram showing an example of a product pattern according to the second embodiment of the present invention.

The objects and advantages of the invention will be realized and attained by means of the elements and combinations particularly pointed out in the appended claims.
The foregoing general description and the following detailed description are exemplary and explanatory only and are not intended to limit the invention.

(First embodiment)
The first embodiment will be described in detail with reference to the drawings.
A semiconductor device defect inspection apparatus (hereinafter referred to as a defect inspection apparatus) 1 includes an appearance inspection unit 3 that acquires an image of a semiconductor wafer 2 (substrate) and a data processing unit 4 that performs data processing.

The appearance inspection unit 3 includes a stage 10 on which the semiconductor wafer 2 is placed. The stage 10 includes an X stage 11 and a Y stage 12 that can move the semiconductor wafer 2 horizontally in two orthogonal directions. A holder 13 that holds the semiconductor wafer 2 has positioning pins 14 that position the semiconductor wafer 2. Is provided.
The appearance inspection unit 3 is provided with an imaging camera 15 having a CCD (Charge Coupled Device) sensor disposed on the semiconductor wafer 2 and an illumination device 16 that illuminates the semiconductor wafer 2. The output of the imaging camera 15 is connected to the data processing unit 4. The configuration of the appearance inspection unit 3 is not limited to the illustrated configuration. For example, the appearance inspection unit 3 may be configured to fix the position of the semiconductor wafer 2 and move the imaging camera 15.

  The data processing unit 4 includes a control unit 21 including a CPU (Central Processing Unit), a ROM (Read Only Memory), and a RAM (Random Access Memory). Further, the data processing unit 4 is provided with a display unit 22 such as a display for displaying data, an input / output control unit 23 for controlling input / output of data, and a storage unit 24 for storing data.

  Here, the control unit 21 realizes various functions by executing a defect inspection program stored in the storage unit 24. The control unit 21 of this embodiment can be functionally divided into an inspection control unit 31, an identification data creation unit 32, a defect extraction unit 33, a count unit 34, and a determination unit 35. The defect extraction unit 33 includes a size extraction unit 36A and a pattern extraction unit 36B.

  The inspection control unit 31 controls the appearance inspection unit 3 and generates image data of the semiconductor wafer 2 in response to an output signal from the appearance inspection unit 3. The identification data creation unit 32 creates data for identifying a defect to be extracted as a defect. The defect extraction unit 33 performs processing for extracting defects from the image data. Furthermore, the size extraction unit 36A performs a process of extracting defects having a predetermined size or more from the defects extracted by the inspection control unit 31. The pattern extraction unit 36 </ b> B of the defect extraction unit 33 performs a process of extracting defects in a predetermined region from the defects extracted by the inspection control unit 31. The count unit 34 calculates the number of defects on the semiconductor wafer 2 or calculates the yield rate of a semiconductor device manufactured from one semiconductor wafer 2. Based on the yield rate, the determination unit 35 determines whether or not the semiconductor wafer 2 is good, that is, whether or not a required number or more of semiconductor devices can be manufactured from the semiconductor wafer 2.

Examples of the input / output control unit 23 include a keyboard operated by an operator, a mouse, a communication control device that performs communication with a server, a drive device that controls input / output of data to / from an external recording device, and a printer. .
The storage unit 24 stores various data for operating the defect inspection apparatus 1. Furthermore, in this embodiment, map data 37, defect identification data 38, product pattern 39, and yield data 40 are stored in the storage unit 24. The defect identification data 38 is data created such as defect size data 38A and electrical characteristic data 38B. The data 37, 38, 38A, 38B, 40 and the product pattern 39 are stored in the storage unit 24 for each type of semiconductor device.

  Next, a defect inspection method for inspecting defects on a thin film formed on the semiconductor wafer 2 using the defect inspection apparatus 1 will be described mainly with reference to the flowchart of FIG. This defect inspection method is included in the method for manufacturing a semiconductor device, and is characterized in that the quality of the semiconductor wafer 2 is determined based on the size and position of the defect and the type of the semiconductor device. . The inspection target is the semiconductor wafer 2 on which a thin film is uniformly formed before scribe lines, wiring patterns, and the like are formed.

  First, in step S <b> 101, the defect inspection apparatus 1 receives a wafer cassette containing a semiconductor wafer 2 to be inspected, acquires ID information given to the wafer cassette, and manufactures using the semiconductor wafer 2. Identify the varieties.

In subsequent step S102, the appearance inspection unit 3 acquires an image of the surface of the semiconductor wafer 2 and creates map data 37. Specifically, when the semiconductor wafer 2 is loaded onto the holder 13, the appearance inspection unit 3 presses the positioning pins 14 against the semiconductor wafer 2 based on a command from the inspection control unit 31 of the data processing unit 4. Position 2 is performed. Thereafter, the semiconductor wafer 2 is sucked and held on the holder 13 by vacuum suction. Further, the stage 10 is driven, and the region to be inspected of the semiconductor wafer 2 is arranged below the imaging camera 15. Then, while illuminating the semiconductor wafer 2 with the illumination device 16, an image of the surface of the semiconductor wafer 2 is acquired with the imaging camera 15.

  Since the imaging area of the imaging camera 15 is smaller than the inspection target area of the semiconductor wafer 2, the inspection control unit 31 drives the X stage 11 and the Y stage 12 of the stage 10 to move the imaging position, and the imaging camera 15. Perform imaging with. An image of the semiconductor wafer 2 captured by the imaging camera 15 is output to the data processing unit 4 as an image signal. The inspection control unit 31 of the data processing unit 4 creates map data 37 in which the coordinate data of the imaging position on the semiconductor wafer 2 calculated from the driving amount of the stage 10 and the image signal of the coordinates are associated with each other, and the storage unit 24.

  As shown in FIG. 3A as an example, a surface image 41 of the semiconductor wafer 2 is obtained from the map data 37. In this surface image 41, an image of the thin film 42 formed on the semiconductor wafer 2 is displayed. And the defect 43 on the surface of the thin film 42 is also displayed simultaneously. There are various sizes of the defect 43, and FIG. 3 shows, as an example, a case where a large size defect 43A and a small size defect 43B are generated. Examples of the defect include adhesion of foreign matters and voids formed in the thin film 42.

  Next, in step S103, the defect inspection apparatus 1 creates defect number data. In creating the defect count data, the defect extraction unit 33 first extracts defects on the thin film 42 from the map data 37. As a method for extracting the defect 43, for example, in the surface image 41, pixels whose luminance exceeds a predetermined threshold value are extracted, and adjacent pixel groups are determined as one defect 43. Further, the count unit 34 counts the number of defects 43 on the semiconductor wafer 2 extracted from the map data 37 and creates defect number data. The defect number data is stored in the storage unit 24.

  In subsequent step S104, the size extraction unit 36A examines the size of the defect and creates defect size data 38A. The defect size data 38A is created by associating defect coordinates and sizes. The size of the defect is calculated from the number of pixels in the pixel group extracted as a defect. Since the size of the pixel is known in advance, the size of the defect can be obtained by multiplying the size of the pixel by the number of pixels.

  Further, in step S105, the identification data creation unit 32 creates the defect identification data 38. The defect identification data 38 is created from defect size data 38A obtained by examining the size of the defect and electrical characteristic data 38B that is a result of an electrical test of the semiconductor wafer 2.

  The electrical characteristic data 38B is created using an electrical test apparatus (not shown) after a semiconductor device is formed on the semiconductor wafer 2. For example, a probe is applied to an electrode pad of a semiconductor circuit of each semiconductor device on the semiconductor wafer 2 and a test pattern created at the time of designing the semiconductor circuit is input. And the characteristic of a semiconductor circuit is investigated from the output signal obtained at this time. When a malfunction of the semiconductor circuit is confirmed, coordinate data of the semiconductor circuit is acquired. Then, the same inspection is performed on all the semiconductor circuits to be inspected of the semiconductor wafer 2 and the coordinate data of all the semiconductor circuits causing the operation failure is acquired, and the electrical characteristic data 38B is created.

  When the electrical characteristic data 38B and the defect size data 38A are combined, defect identification data 38 serving as a database for the size resulting from the deterioration of the electrical characteristics of the semiconductor device is formed. Here, the defect identification data 38 is formed from information on the position and size of a defect that affects the electrical characteristics of the semiconductor device, that is, a defect formed in a semiconductor circuit that has caused a malfunction. From such defect identification data 38, it can be seen that the size of the defect that causes the semiconductor device to malfunction is, for example, 0.5 μm or more.

In subsequent step S106, the defect extraction unit 33 selects the product pattern 39.
As shown in the product pattern 39A in FIG. 4, the product pattern 39A is a mask pattern that determines a region from which a defect is extracted, and is created based on the layout of the chip of the semiconductor device manufactured on the semiconductor wafer 2. Yes. That is, in the product pattern 39 </ b> A, the chip patterns 53 are arranged in a lattice pattern in a region partitioned by the line 52 corresponding to the outer edge of the semiconductor wafer 2. Each chip pattern 53 is divided into a dense pattern region 54 and a sparse pattern region 55 according to the density of the circuit pattern of the semiconductor device, and the sparse pattern region 55 is used as a mask. The area masked in the chip pattern 53 is an area where circuit patterns are formed sparsely. The sparse pattern area 55 is used as a mask because an area where the circuit pattern is sparse does not affect the yield and can be excluded from the yield determination target. On the other hand, the dense pattern region 54 is not masked in the chip pattern 53 because defects in this region tend to affect the electrical characteristics of the semiconductor device, so that the defect inspection must be performed in detail. It is. Note that a dense pattern is a region where a logic circuit, a memory, or the like is formed, and a wiring or an element pattern is formed more densely than other regions. Further, the sparse pattern is a region where the arrangement interval of wirings and element patterns is relatively wide, a region where a dummy pattern is formed, or the like.

  Next, in step S107, the defect extraction unit 33 extracts defects used for quality determination of the semiconductor wafer 2 and creates determination defect data. The defect data for determination is created by extracting defects that affect the yield of the semiconductor device. In this embodiment, the defect data for determination is created using map data 37, defect identification data 38, and product pattern 39.

  First, the size extraction unit 36A extracts, from the map data 37 and the defect identification data 38, defects having a size larger than the size that affects the electrical characteristics of the semiconductor device among the defects on the semiconductor wafer 2. As a result, as shown in an example of the intermediate process image 44 in FIG. 3B, only the large-size defect 43A is extracted. Here, it is assumed that the small defect 43B in the map data 37 shown in FIG. 3A is smaller than the size that affects the electrical characteristics of the semiconductor device defined in the defect identification data 38. Further, the defect 43A having a large size is larger than the size that affects the electrical characteristics of the semiconductor device defined in the defect identification data 38, that is, the size that may affect the electrical characteristics of the semiconductor device. To do.

Further, from the intermediate result shown in FIG. 3B, the pattern extraction unit 36B extracts defects formed in the dense pattern region 54 using the product pattern 39. An example of the extraction result at this time is shown in FIG. 3C. In this image 45, the defect 46 displayed on the semiconductor wafer 2 is a defect in the dense pattern region 54 of the product pattern 39 and is a defect having a size larger than the size specified by the defect identification data 38. That is, the defect 46 displayed in the image 45 is defect data extracted when the defect data included in the map data 37 is filtered by the defect identification data 38 and the product pattern 39. A semiconductor device formed in an existing region is considered to be a defective product. The defect position data extracted in this way becomes the defect data for determination. In the above, as described with reference to FIG. 3B, the defect data for determination is created in two steps. However, the map data 37 and the defect identification data 38 are used in one step. Defect defect data for determination may be created.

  Next, in step S108 of FIG. 2, the counting unit 34 of the defect inspection apparatus 1 calculates an expected yield rate. Here, the number of chip areas including the defect position specified by the defect determination data is counted as the number of defective chips. Since the total number of chip areas on one semiconductor wafer 2 is determined for each type of semiconductor device, the expected yield rate is calculated by dividing the number of chips without defects by the total number of chip areas.

  Further, in step S109, the determination unit 35 determines pass / fail. In the pass / fail judgment, the yield data 40 in the storage unit 24 is searched with the ID information of the semiconductor wafer 2 to obtain the yield rate (specified yield rate) required for the semiconductor device of that type. Further, the specified yield rate is compared with the expected yield rate, and if the expected yield rate is equal to or higher than the specified yield rate, the semiconductor wafer 2 is determined to be non-defective (OK in step S109), and the process proceeds to step S110. The manufacture of the semiconductor device using the semiconductor wafer 2 is permitted. On the other hand, if the expected yield rate is less than the prescribed yield rate (NG in step S109), the process proceeds to step S111. In this case, it is determined that the semiconductor device cannot be manufactured on the semiconductor wafer 2 because a semiconductor device having the required number or required performance cannot be obtained even if the subsequent process is executed.

Next, as an application example of the defect inspection method of the present embodiment, a case will be described in which pass / fail judgment is performed in a process until an element isolation region is formed on the semiconductor wafer 2.
First, an initial oxide film is formed on the surface of the semiconductor wafer 2 in step S201 of FIG. For example, a plurality of semiconductor wafers 2 are carried into an initial oxide film forming apparatus (not shown) while being housed in a wafer cassette. In the initial oxide film forming apparatus, the semiconductor wafers 2 are taken out from the wafer cassette one by one to form an initial oxide film. After the initial oxide film is formed, the semiconductor wafer 2 is returned to the wafer cassette.

Subsequently, in step S202, a first thin film is uniformly formed on the entire surface of the initial oxide film of the semiconductor wafer 2. The first thin film is formed in a first film forming apparatus (not shown). At this stage, no pattern is formed on the semiconductor wafer 2.
In the next step S203, the defect inspection apparatus 1 inspects the defect of the first thin film formed on the semiconductor wafer 2 by performing the processes shown in steps S101 to S111 in FIG. If a non-defective product is determined as a result of the defect inspection, the process proceeds to step S204. On the other hand, when a defect is determined, the process here is terminated.

Next, in step S204, the second thin film is uniformly formed on the entire surface of the semiconductor wafer 2 on the first thin film. The second thin film is formed in a second film forming apparatus (not shown). At this stage, no pattern is formed on the semiconductor wafer 2.
In subsequent step S205, the defect inspection apparatus 1 inspects the defect of the second thin film formed on the semiconductor wafer 2 by performing the processes shown in steps S101 to S111 in FIG. If a non-defective product is determined as a result of the defect inspection, the process proceeds to step S206. On the other hand, when a defect is determined, the process here is terminated.

Next, in step S206, a third thin film is uniformly formed on the entire surface of the semiconductor wafer 2 on the second thin film. The third thin film is formed in a third film forming apparatus (not shown). At this stage, no pattern is formed on the semiconductor wafer 2.
In the next step S207, the defect inspection apparatus 1 inspects the defect of the third thin film formed on the semiconductor wafer 2 by performing the processes shown in steps S101 to S111 in FIG. If a non-defective product is determined as a result of the defect inspection, the process proceeds to step S208. On the other hand, when a defect is determined, the process here is terminated.

Subsequently, in step S208, a resist film is formed on the third thin film, and the resist pattern formed by exposing and developing the resist film is used as a mask to etch each film and the semiconductor wafer 2 to form element isolation grooves. Form. At this stage, a pattern is formed on the semiconductor wafer 2.
In step S209, a silicon oxide film is formed in the element isolation trench by, for example, thermal oxidation. Thereafter, when the resist film and each film are removed by ashing or the like, an element isolation region is formed.

Here, when it is determined in steps S203, S205, and S207 that the manufacture is impossible, the semiconductor wafer 2 or the lot including the semiconductor wafer 2 is discarded. Further, the thin film formed on the semiconductor wafer 2 or the lot including the semiconductor wafer 2 may be removed, and then the processing from step S101 may be performed again.
In the flowchart shown in FIG. 5, the number of film forming steps is not limited to three. The film forming process may be performed once or four times or more.

  As described above, in this embodiment, since the quality of the semiconductor wafer 2 is determined before patterning on the semiconductor wafer 2, the quality of the semiconductor wafer 2 is determined as compared with the case where the quality is determined after patterning. Judgment can be made early. For this reason, the waste of a manufacturing process decreases.

In this embodiment, since the yield rate is calculated by paying attention to defects that affect the electrical characteristics of the semiconductor device, the yield rate prediction accuracy is improved. Furthermore, since the yield rate is calculated by paying attention to the density of the circuit pattern of the semiconductor device, the prediction accuracy of the yield rate is improved. For these reasons, in the manufacturing process of the semiconductor device, it becomes possible to accurately grasp the production status and predict the manufacturing cost. Further, when the yield rate is deteriorated, it is assumed that some trouble has occurred. From this, by evaluating the yield rate, knowledge for early detection of process abnormality, improvement of the manufacturing process, and maintenance of the manufacturing apparatus can be obtained.
Furthermore, since the target defects are narrowed down by applying conditions to the size and position of the defects for which the yield rate is calculated, the efficiency of the inspection process can be improved.

(Second Embodiment)
The second embodiment will be described in detail with reference to the drawings. In addition, the same code | symbol is attached | subjected to the component same as 1st Embodiment. Moreover, the description which overlaps with 1st Embodiment is abbreviate | omitted.

This embodiment is characterized in that the type of semiconductor device is determined in accordance with the number and position of defects.
As shown in FIG. 6, in the semiconductor device manufacturing apparatus 1, the control unit 21 of the data processing unit 4 also functions as a product type setting unit 60. The product type setting unit 60 selects the ID information of a specific product type from the ID information of a plurality of product types registered in advance in the storage unit 24, and selects the semiconductor wafer 2 or the semiconductor wafer 2 according to the expected yield rate. A process of assigning a variety to a lot including it is performed. The product type setting unit 60 also performs processing for changing the product type for which the expected yield rate is calculated.

  Next, the defect inspection method of this embodiment will be described with reference to the flowchart of FIG. This defect inspection method is included in the method for manufacturing a semiconductor device.

First, in step S102, an image of the surface of the semiconductor wafer 2 is acquired using the appearance inspection unit 3, and the inspection control unit 31 creates map data 37 of the semiconductor wafer 2. In step S103, the count unit 34 of the defect inspection apparatus 1 counts the number of defects 43 on the semiconductor wafer 2 to create defect number data. In subsequent step S105, the size extraction unit 36A creates defect size data 38.

Further, in step S104A, the product type setting unit 60 selects ID information of the first product type.
In a succeeding step S105, the electrical characteristic data 38B of the selected product type is searched with the ID information. Further, defect identification data 38 of the first product type is created from the electrical characteristic data 38B and the defect size data 38A. Thereafter, in step S106, the product pattern 39 of the first product type is selected using the ID information.

  Next, in step S107, using the map data 37, the defect identification data 38 calculated for the first product, and the selected product pattern 39, the pattern extraction unit 36B extracts defects used for the determination, and the determination is made. Create defect data. The defect extraction method here is the same as in the first embodiment.

  Further, in step S108, the counting unit 34 calculates an expected yield rate indicating the proportion of chips having no defect using the extracted defect, and in step S109, the determination unit 35 determines the quality of the semiconductor wafer 2.

  Here, in the pass / fail determination in step S109, the specified yield rate of the semiconductor device of the type selected in step S104A is searched from the yield data 40 using the ID information, and compared with the expected yield rate calculated in step S108. If the expected yield rate is equal to or higher than the specified yield rate, the semiconductor wafer 2 is determined as a non-defective product (Yes in step S109), and the process proceeds to step S120, where the manufacture of the semiconductor device using the semiconductor wafer 2 is permitted. Further, the product type setting unit 60 assigns the ID information of the product type selected in step S104A to the semiconductor wafer 2 or the lot including the semiconductor wafer 2. Then, the lot including the semiconductor wafer 2 is sent to the manufacturing process of the kind of the assigned ID information, and the semiconductor device of that kind is manufactured.

  On the other hand, if the expected yield rate is less than the prescribed yield rate (No in step S109), the process proceeds to step S121. In step S121, the product type setting unit 60 checks whether there are other product types registered in the storage unit 24. If there are other types that are registered in the storage unit 24 and that have not been subjected to the determination process (Yes in step S121), there is a possibility that the semiconductor wafer 2 can be used for manufacturing semiconductor devices of other types. Therefore, the process returns to step S104A. On the other hand, when the determination process for all the types has been completed (No in step S121), it is determined that the semiconductor device is not suitable for manufacturing in all the planned types. Proceeding to step S122, the semiconductor device cannot be manufactured in the semiconductor wafer 2 or lot.

  Here, if it is determined in step S121 that there are other varieties registered in the storage unit 24 and not subjected to the determination process, steps S104A to S121 are repeated. In step S104A, the product type setting unit 60 selects the second product type, and the subsequent processing performs defect extraction and pass / fail judgment for the second product type. That is, defect data for determination of the second product type is created in step S107, and an expected yield rate when the second product type is manufactured in step S108 is calculated. Further, in step S109, the prescribed yield rate of the second product type is compared with the expected yield rate, and it is determined whether the semiconductor device of the second product type can be manufactured. This is because the size, number, and arrangement of dense patterns differ depending on the product type, and the specified yield rate also differs, so even if it is not suitable for manufacturing the first product type, This is because a sufficient yield may be obtained.

When the non-defective product is determined for the second product type (Yes in step S109), the product type setting unit 60 assigns ID information of the second product type to the semiconductor wafer 2 or the lot including the semiconductor wafer 2. As a result, the manufacturing process of the second product type is subsequently performed on the semiconductor wafer 2 or the lot including the semiconductor wafer 2.
Then, the above process is repeated until a non-defective product is determined for any product type or the determination process for all product types registered in the storage unit 24 is completed.

  Here, the order in which the types are selected in step S104A may be random or may be set in advance. As the order of selecting the product type, it is possible to preferentially determine the product type whose yield rate tends to decrease when a defect occurs. In this case, as a kind preferentially selected as a determination target, for example, a kind having a small number of chips formed on one semiconductor wafer 2, or a kind having a large total area of a dense pattern area in a chip, or There are varieties that satisfy both conditions.

  This will be described by comparing the product pattern 39A shown in FIG. 4 with the product pattern 39B shown in FIG. In the product pattern 39B of FIG. 6, chip patterns 63 are arranged in a lattice pattern, and each chip pattern 63 is divided into a dense pattern region 64 and a sparse pattern region 65, and the sparse pattern region 5 serves as a mask. ing.

  The product pattern 39B has a smaller number of chip patterns 63 and a larger total area of the dense pattern regions 64 in one chip pattern 63 than the product pattern 39A of FIG. In the product pattern 39B, since the dense pattern region 64 is large, defects are likely to occur in the dense pattern region 64. Furthermore, since the number of chips manufactured from one semiconductor wafer 2 is small, the expected yield rate tends to decrease when a defect occurs. For this reason, the possibility of the semiconductor wafer 2 being discarded can be reduced and the production efficiency can be improved by preferentially examining the semiconductor wafer 2 that matches the product pattern 39B.

Here, this defect inspection method can be applied to the case where the quality is determined in the process until the element isolation region is formed on the semiconductor wafer 2 shown in FIG. In this case, the defect inspection method of this embodiment is performed in each of step S203, step S205, and step S207. In this case, if a product whose yield rate is likely to decrease when a defect occurs is preferentially determined, the quality of the semiconductor wafer 2 can be determined and the product can be determined efficiently.
Further, this defect inspection method may be performed only at the final determination timing in step S207 without performing steps S203 and S205.

  As described above, in this embodiment, the semiconductor device manufacturing process is started before the pattern of the semiconductor device 2 is formed before the type of the semiconductor device is determined. Thus, the type of semiconductor device to be manufactured is determined. This makes it possible to determine the type according to the state of occurrence of defects, and therefore, compared to the case where the type is determined in advance, the possibility of disposing of the semiconductor wafer 2 can be reduced, and the manufacturing process becomes more efficient. Can be planned. Other effects are the same as those of the first embodiment.

The defect inspection apparatus 1 may be a part of a semiconductor device manufacturing apparatus. For example, the control unit 21 and each data may be stored in a plurality of manufacturing apparatuses or a host computer that controls the inspection apparatus, and the above-described processes may be executed.
Further, at least one of the defect size data 38A and the electrical characteristic data 38B may be acquired and used by another computer, a manufacturing apparatus, or an inspection apparatus.

Further, in each of the first and second embodiments, the defect data for determination may be extracted using only the product pattern 39 without using the defect identification data. A region where circuit patterns are densely formed tends to be a cause of deteriorating the electrical characteristics of the semiconductor device. Therefore, even if the expected yield rate is calculated by paying attention only to the occurrence of defects in this region, the semiconductor wafer 2 Efficient evaluation can be achieved.

  All examples and conditional expressions given here are intended to help the reader understand the inventions and concepts that have contributed to the promotion of technology, such examples and It is to be construed without being limited to the conditions, and the organization of such examples in the specification is not related to showing the superiority or inferiority of the invention. While embodiments of the present invention have been described in detail, various changes, substitutions and variations can be made thereto without departing from the spirit and scope of the present invention.

The features of the above embodiment will be added below.
(Supplementary Note 1) A step of acquiring image data of a surface of a substrate on which a thin film is formed, and a region where a circuit pattern of the semiconductor device is formed sparsely for each type of semiconductor device formed on the substrate. A step of selecting a mask pattern to be masked, a step of extracting defects in a region where circuit patterns of the semiconductor device are densely formed from the image data using the mask pattern, and the step of forming on the substrate. A method of inspecting a defect of a semiconductor device, comprising: calculating an expected yield rate of the semiconductor device from the total number of chips of the semiconductor device and the number of chips of the semiconductor device including the extracted defect.
(Additional remark 2) The process of extracting the said defect includes the process of acquiring the defect identification data which specifies the size of the defect which caused the said semiconductor device to cause an electrical failure, The said semiconductor device is an electrical The defect according to appendix 1, wherein the defect is a step of removing a defect smaller than the size of the defect causing the defect and extracting a defect in a region where the circuit pattern of the semiconductor device is densely formed. Inspection method.
(Supplementary Note 3) The expected yield rate is compared with a predetermined yield rate determined in advance for each type of semiconductor device formed on the substrate, and if the expected yield rate is equal to or higher than the specified yield rate. The defect inspection method according to appendix 1 or appendix 2, further comprising a determination step of permitting manufacture of the semiconductor device using the substrate.
(Additional remark 4) The process which provides the information of the kind of the said semiconductor device specified with the said mask pattern with respect to the said board | substrate which permitted manufacture of the said semiconductor device, and the said board | substrate with which manufacture of the said semiconductor device was not permitted On the other hand, the defect inspection method according to any one of appendix 1 to appendix 3, including a step of selecting a different mask pattern and extracting a defect.
(Supplementary Note 5) The mask pattern is at least one of a type having a small number of chips of the semiconductor device formed from a single substrate and a type having a large total area of a dense circuit pattern in one chip. Item 5. The defect inspection method according to appendix 4, wherein products are selected in order from a variety satisfying one.
(Supplementary note 6) The defect inspection method according to any one of supplementary notes 1 to 5, wherein the expected yield rate is calculated before a pattern is formed on the substrate.
(Additional remark 7) The area | region in which the inspection control part which acquires the image data of the surface of the board | substrate in which the thin film was formed, and the semiconductor device formed on the said board | substrate is formed, and the circuit pattern of the said semiconductor apparatus is formed sparsely A defect extraction unit for extracting defects in a region where circuit patterns of the semiconductor device are densely formed from the image data using a mask pattern for masking, and a total number of chips of the semiconductor device formed on the substrate And a counting unit that calculates the expected yield of the semiconductor device from the number of chips of the semiconductor device that includes the extracted defect as an expected yield rate. .
(Additional remark 8) The said defect extraction part contains the size extraction part which excludes the defect below the size of the defect which caused the said semiconductor device to cause an electrical defect, The defect inspection of Additional remark 7 characterized by the above-mentioned apparatus.
(Supplementary Note 9) The predicted yield rate is compared with a predetermined yield rate determined in advance for each type of semiconductor device formed on the substrate, and if the expected yield rate is equal to or higher than the specified yield rate. The defect inspection apparatus according to appendix 7 or appendix 8, further comprising a determination unit that permits manufacture of the semiconductor device using the substrate.
(Supplementary Note 10) The defect inspection according to any one of Supplementary Notes 7 to 9, which includes a type setting unit that determines a type of the semiconductor device for selecting the mask pattern and applies the type information to the substrate. apparatus.

1 Defect Inspection Equipment 2 Semiconductor Wafer (Substrate)
4 Data Processing Unit 21 Control Unit 31 Inspection Control Unit 32 Identification Data Creation Unit 33 Defect Extraction Unit 34 Count Unit 35 Determination Unit 36A Size Extraction Unit 36B Pattern Extraction Unit 37 Map Data 38 Defect Identification Data 39 Product Pattern (Mask Pattern)
40 Yield data 43 Defect 54, 64 Dense pattern area 55, 65 Sparse pattern area 60 Type setting section

Claims (5)

After forming the thin film, obtaining image data of the surface of the substrate before patterning the thin film; and
Selecting a mask pattern that is formed for each type of semiconductor device formed on the substrate and masks a region where the circuit pattern of the semiconductor device is formed sparsely;
Using the mask pattern , extracting defects generated in a region where circuit patterns of the semiconductor device are densely formed after patterning the thin film from the image data before patterning the thin film ;
Calculating an expected yield rate of the semiconductor device from the total number of chips of the semiconductor device formed on the substrate and the number of chips of the semiconductor device including the extracted defects;
Inspection method for semiconductor devices including Including the step of obtaining defect identification data for specifying the size of the defect that caused the semiconductor device to cause an electrical failure,
The step of extracting the defects removes defects smaller than the size of the defect that caused the semiconductor device to cause an electrical failure, and extracts defects in a region where the circuit pattern of the semiconductor device is densely formed. The defect inspecting method according to claim 1, wherein the defect inspecting method is a step of   The expected yield rate is compared with a prescribed yield rate determined in advance for each type of semiconductor device formed on the substrate, and if the expected yield rate is equal to or higher than the prescribed yield rate, the substrate The defect inspection method according to claim 1, further comprising a determination step for permitting manufacture of the semiconductor device. To said substrate that permits the fabrication of the semiconductor device, the step of applying the information varieties before Symbol semiconductor device specified by the mask pattern,
A step of extracting defects by selecting another type of the mask pattern for the substrate that is not permitted to manufacture the semiconductor device;
The defect inspection method according to claim 1, further comprising: After forming the thin film, an inspection control unit for acquiring image data of the surface of the substrate before patterning the thin film;
A mask pattern is formed for each type of semiconductor device formed on the substrate and masks a region where a circuit pattern of the semiconductor device is formed sparsely after patterning the thin film . A defect extraction unit for extracting defects generated in an area where circuit patterns are densely formed before patterning the thin film ;
A count unit for calculating an expected yield of the semiconductor device as an expected yield rate from the total number of chips of the semiconductor device formed on the substrate and the number of chips of the semiconductor device including the extracted defect; ,
A defect inspection apparatus for a semiconductor device, comprising:

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