JP5790804B2 - Fluid ejection device - Google Patents

Description

  The present invention relates to a fluid ejecting apparatus.

  As a fluid ejecting apparatus that ejects fluid, for example, an ink jet printer apparatus (hereinafter referred to as “printer apparatus”) is known. The printer device is a device that records characters, images, and the like on a recording medium. The printer device is configured such that ink is ejected onto a recording medium from nozzles provided in the recording head. The recording head is mounted on a moving mechanism such as a carriage, and is configured to eject ink while moving on the recording medium.

  An ink cartridge is mounted on the printer device, and ink is supplied from the ink cartridge to the recording head. For example, a printer device of a type called an off-carriage type is configured such that an ink cartridge is disposed on the case side of the device, and ink is supplied from the ink cartridge to the recording head via a supply tube.

JP 20062244531

  However, in the above configuration, if the supply tube moves with the movement of the head, an inertial force acts on the ink in the supply tube. Due to the inertial force, for example, ink may rapidly flow between the supply tube and the head, which may affect the meniscus in the head.

  In view of the circumstances as described above, an object of the present invention is to provide a fluid ejecting apparatus capable of maintaining a meniscus of a nozzle.

Fluid ejection device according to the present invention, provided movably, and a fluid ejection head having a plurality of nozzles for ejecting a fluid body, an upstream portion connected to the fluid of the fluid ejection head to the fluid supply source capable of supplying A supply path, and a downstream section supply path that is connected to the fluid ejecting head and the upstream section supply path, and that partially includes a connecting section supply path that can be deformed as the fluid ejecting head reciprocates. Including a supply path, a first adjustment section provided in the upstream supply path, and a second adjustment section provided in the downstream supply path, wherein the fluid supply source is connected to the upstream supply path. in state, a fluid injection device check valve is positioned upstream of the first adjustment portion for restricting the movement of the fluid toward the flow supply source side from the fluid ejecting head side, the first adjustment Department and Serial second adjustable part has a deformable portion that communicates with the supply path, the displacement shape portion, said fluid moving one from within the supply path by the movement to the other in the reciprocating movement of the fluid ejecting head influx Or it changes by flowing out, It is characterized by the above-mentioned.

According to the present invention, it provided upstream portion supply path, a first adjusting portion which deforms accommodate the fluid moves with the reciprocating movement of the fluid ejecting head, the first regulator provided on a downstream portion supply path And a second adjusting portion that deforms so as to be able to accommodate the fluid that has moved along with the reciprocating movement of the fluid ejecting head, so that a fluid flow is generated between the upstream supply path and the downstream supply path . When a fluid flow occurs in the supply path, flow path loss occurs, and a sudden change in the flow state of the fluid in the supply path is absorbed. Thereby, since it is possible to prevent the fluid from rapidly flowing between the fluid ejecting head and the supply path, it is possible to maintain the meniscus of the nozzle provided in the fluid ejecting head.

The fluid ejecting apparatus is characterized in that the deforming portion expands when the fluid flows in and contracts when the fluid flows out .
According to the present invention, since the deforming portion expands when the fluid flows in and contracts when the fluid flows out, it can prevent a sudden change in the flow state in the supply path .

The fluid ejecting apparatus is characterized in that the first adjustment unit is provided above the connection part supply path .
According to the present invention, since the first adjustment unit is provided above the connecting portion supply path, a fluid flow is generated in the direction from the upstream supply path to the downstream supply path. The flow of fluid in the supply path causes a flow path loss, which can prevent a sudden change in the flow state in the supply path .

In the fluid ejecting apparatus, the first adjustment unit is provided above a connection portion between the upstream portion supply path and the connection portion supply path .
According to the present invention, since the first adjustment unit is provided above the connection between the upstream supply path and the connection supply path, the direction from the upstream supply path to the downstream supply path A fluid flow is generated. The flow of fluid in the supply path causes a flow path loss, which can prevent a sudden change in the flow state in the supply path .

In the fluid ejecting apparatus, the second adjusting portion is provided below the fluid ejecting head, and a connection portion between the fluid ejecting head and the connecting portion supply path is provided further below the second adjusting portion. It is characterized by being.
According to the present invention, the second adjustment portion is provided below the fluid ejection head, and the connection portion between the fluid ejection head and the connecting portion supply path is further provided below the second adjustment portion. Therefore, it is possible to prevent a sudden change in pressure between the fluid ejecting head and the supply path, and it is possible to maintain the meniscus of the nozzle provided in the fluid ejecting head .

In the fluid ejecting apparatus, the movement of the fluid is performed between the first adjustment unit and the second adjustment unit .
According to the present invention, since the fluid is moved between the first adjustment unit and the second adjustment unit, it is possible to more reliably prevent a sudden pressure change in the supply path.

In the fluid ejecting apparatus, the deformation portion is formed by closing openings provided in the first adjustment portion and the second adjustment portion with a film-like member that can be elastically deformed .
According to the present invention, since the deforming portion is formed by closing the openings provided in the first adjusting portion and the second adjusting portion with the elastically deformable film member, the first adjustment The part and the second adjustment part can be deformed.

In the fluid ejecting apparatus, the fluid ejecting head side of the connecting portion supply path is disposed along the moving direction of the fluid ejecting head, and the upstream portion supplying path side of the connecting portion supply path is The connecting portion supply path is disposed in the same direction as the fluid ejection head side .
According to the present invention, the fluid ejecting head side of the connecting portion supply path is disposed along the moving direction of the fluid ejecting head, and the upstream supply path side of the connecting portion supply path is the fluid of the connecting portion supply path. Since it is arranged in the same direction as the ejection head side, the fluid ejection head easily moves and the fluid is easily supplied to the fluid ejection head.

1 is a schematic diagram showing a configuration of a printing apparatus according to an embodiment of the present invention. The figure which shows the structure of the supply path which concerns on this embodiment. FIG. 3 is a block diagram illustrating a configuration of a control device of the printing apparatus. The graph which shows the relationship between the movement of a head, and the change of the pressure of a supply path. The graph which shows the relationship between the movement of a head, and the change of the pressure of a supply path.

Embodiments of the present invention will be described below with reference to the drawings.
FIG. 1 is a diagram illustrating a schematic configuration of a printing apparatus PRT (liquid ejecting apparatus) according to the present embodiment. In the present embodiment, for example, an ink jet type printing apparatus will be described as an example of the printing apparatus PRT.

  The printing apparatus PRT shown in FIG. 1 is an apparatus that performs a printing process while conveying a sheet-like medium M such as paper or a plastic sheet. The printing apparatus PRT includes a housing PB, an inkjet mechanism IJ that ejects ink onto the medium M, an ink supply mechanism SP that supplies ink to the inkjet mechanism IJ, a transport mechanism CV that transports the medium M, and an inkjet mechanism IJ. A maintenance mechanism MN that performs maintenance operations and a control device CONT that controls these mechanisms are provided.

  Hereinafter, an XYZ rectangular coordinate system is set, and the positional relationship of each component will be described with reference to the XYZ rectangular coordinate system as appropriate. In the present embodiment, a predetermined direction on the horizontal plane is referred to as an X direction, a direction orthogonal to the X direction on the horizontal plane is referred to as a Y direction, and a direction perpendicular to the horizontal plane is referred to as a Z direction. The rotation direction around the X axis is the θX direction, the rotation direction around the Y axis is the θY direction, and the rotation direction around the Z axis is the θZ direction.

  The housing PB is formed, for example, with the Y direction as a longitudinal direction. Each part of the inkjet mechanism IJ, ink supply mechanism SP, transport mechanism CV, maintenance mechanism MN, and control device CONT is attached to the housing PB. For example, a platen 13 is provided in the housing PB. The platen 13 is a support member that supports the medium M. The platen 13 has a flat surface 13a oriented in the + X direction, for example. The flat surface 13a is used as a support surface that supports the medium M.

  The transport mechanism CV includes, for example, a transport roller and a motor that drives the transport roller. For example, the transport mechanism CV transports the medium M into the housing PB from the + Z side of the housing PB, and discharges the medium M from the + X side, the −X side, or the + Z side of the housing PB to the outside of the housing PB. . The transport mechanism CV transports the medium M so that the medium M passes over the platen 13 inside the housing PB. In the transport mechanism CV, for example, the transport timing and transport amount are controlled by the control device CONT.

  The inkjet mechanism IJ has a head H that ejects ink and a head moving mechanism AC that holds and moves the head H. The head H ejects ink toward the medium M sent onto the platen 13. The head H has an ejection surface Ha that ejects ink. A plurality of nozzles NZ (see FIG. 2 and the like) for ejecting ink are formed on the ejection surface Ha. In each nozzle NZ, in order to perform stable ink ejection, for example, a meniscus is adjusted.

  The head H is disposed such that the ejection surface Ha is inclined with respect to the horizontal plane (XY plane). Here, the inclined state includes, for example, a first state arranged perpendicular to the horizontal plane. In addition, the tilted state includes a second state tilted with respect to the first position state in a range of, for example, greater than 0 ° and less than 20 °. In the present embodiment, a case where the ejection surface Ha is in the first state (perpendicular to the horizontal direction) will be described as an example.

  The ejection surface Ha is directed, for example, in the −X direction. The ejection surface Ha is disposed so as to face the support surface 13a of the platen 13, for example. In the present embodiment, the ejection surface Ha of the head H is oriented in the −X direction, that is, the ejection surface Ha is arranged perpendicular to the horizontal plane. Note that the ejection surface Ha may be tilted in a range of about 0 ° to 20 ° with respect to a direction perpendicular to the horizontal plane.

  The head moving mechanism AC has a carriage 4. The head H is fixed to the carriage 4. The carriage 4 is in contact with a guide shaft 8 that extends in the longitudinal direction (Y direction) of the housing PB. In addition to the carriage 4, the head moving mechanism AC includes, for example, a pulse motor (not shown), a drive pulley, an idle pulley, a timing belt, and the like. The carriage 4 is connected to the timing belt. The carriage 4 is provided so as to be movable in the Y direction as the timing belt rotates. When moving in the Y direction, the carriage 4 is guided by a guide shaft 8.

  The ink supply mechanism SP supplies ink to the head H. The ink supply mechanism SP is provided with a cartridge holder CTH that houses a plurality of ink cartridges CTR, for example. The printing apparatus PRT of the present embodiment has a configuration (off-carriage type) in which the ink cartridge CTR is accommodated in a position different from the head H (for example, the cartridge holder CTH). The ink supply mechanism SP is connected to the head H via the supply tube TB.

  The maintenance mechanism MN is disposed at the home position of the head H. This home position is set, for example, in an area outside the area where printing is performed on the medium M. In the present embodiment, for example, the home position is set on the + Y side of the platen 13. The home position is a place where the head H stands by, for example, when the printing apparatus PRT is powered off or when recording is not performed for a long time.

  The maintenance mechanism MN includes, for example, a capping mechanism CP that covers the ejection surface Ha of the head H, a wiping mechanism WP that wipes the ejection surface Ha, and the like. A suction mechanism SC such as a suction pump is connected to the capping mechanism CP. By the suction mechanism SC, the capping mechanism CP can suck the space on the ejection surface Ha while covering the ejection surface Ha, for example. The capping mechanism CP is directed, for example, in the direction of the ejection surface Ha of the head H (+ X direction). The waste ink discharged from the head H to the maintenance mechanism MN side is collected by, for example, a waste liquid collection mechanism (not shown).

  FIG. 2 is a diagram illustrating an ink supply path RR (upstream portion R1 and downstream portion R2) from the ink cartridge CTR to the nozzle NZ of the head H. In FIG. 2, one of the plural ink cartridges CTR is shown as a representative. Therefore, in practice, the printing apparatus PRT has the configuration shown in FIG. 2 as many as the number of ink cartridges CTR.

  As shown in FIG. 2, the ink cartridge CTR has an ink storage chamber 20A, an ink supply chamber 20B, and a check valve 20C. The ink storage chamber 20A is a part for storing ink (fluid supply source). The ink supply chamber 20B is a portion that supplies the ink in the ink storage chamber 20A to the outside. The check valve 20C regulates the flow of ink from the ink supply chamber 20B side to the ink storage chamber 20A side. Therefore, the ink flows only from one side of the ink storage chamber 20A to the ink supply chamber 20B.

  The ink cartridge CTR is connected to the cartridge holder CTH via the ink supply needle 31, for example. The cartridge holder CTH has an in-holder flow path RC formed therein. The upstream flow path RC in the holder is connected to the ink supply chamber 20 </ b> B via the inside of the ink supply needle 31. An upstream portion R1 of the supply path is formed by the in-holder flow path RC and the ink supply chamber 20B. For example, a choke valve CB is provided in the in-holder flow path RC. The choke valve CB is a valve that opens and closes in order to adjust the pressure of the in-holder flow path RC when, for example, the ink of the ink cartridge CTR is intended to be filled.

  The cartridge holder CTH has an opening OP1. The opening OP1 is formed so as to communicate with a part of the in-holder flow path RC, for example. The cartridge holder CTH is provided with a deformable member 21 so as to cover the opening OP1. The deformable member 21 is a film-like member made of, for example, an elastically deformable material. The deformable member 21 is, for example, attached to the surface of the cartridge holder CTH so as to close the opening OP1.

  As shown by a broken line in the figure, the deformable member 21 is deformed toward the outside of the cartridge holder CTH, for example, by pressure from the in-holder flow path RC. By deforming the deformable member 21 in this way, a part of the in-holder flow path RC is deformed (expanded). For this reason, the ink flowing through the in-holder flow path RC also flows through the deformed portion. By expanding the ink distribution range, the ink flow path loss in the in-holder flow path RC is increased accordingly. Thus, the deformation member 21 can increase the ink flow path loss in the in-holder flow path RC by being deformed toward the outside of the cartridge holder CTH. On the other hand, by deforming toward the inside of the cartridge holder CTH, the ink flow path loss in the in-holder flow path RC can be reduced. As described above, the deformable member 21 can adjust the flow path loss of the in-holder flow path RC, and hence the supply path RR, and functions as a so-called damper.

  The downstream side of the in-holder flow path RC is connected to, for example, an in-tube flow path RT formed in the supply tube TB. The supply tube TB is formed to be deformable and movable with the movement of the head H, for example. Therefore, the in-tube flow path RT provided inside the supply tube TB is also configured to be deformable and movable as the head H moves. In the vicinity of the connection portion with the head H in the supply tube TB, the supply tube TB is arranged in parallel with the moving direction (Y direction) of the head H. For this reason, the head H is easy to move and the ink is easily supplied from the supply tube TB to the head H.

  Inside the head H, an in-head flow path RH is formed. The downstream side of the in-tube flow path RT is connected to the in-head flow path RH. The in-head flow path RH is formed toward the ejection surface Ha of the head H and is connected to each nozzle NZ. Thus, the downstream portion R2 of the supply path RR is formed by the in-tube channel RT and the in-head channel RH.

  The head H has an opening OP2. The opening OP2 is formed, for example, from the + Y side surface of the head H toward the in-head flow path RH. The opening OP2 is formed to communicate a part of the in-head flow path RH with the outside of the head H. A deforming member 22 is provided on the + Y side surface of the head H so as to cover the opening OP2. The deformation member 22 is a film-like member formed of, for example, an elastically deformable material. As the deformation member 22, for example, the same material as that of the deformation member 21 described above may be used, or a different material may be used. The deformable member 22 is affixed to the head H so as to close the opening OP2.

  As shown by a broken line in the figure, the deformable member 22 is deformed toward the outside of the head H, for example, by pressure from the in-head flow path RH. By deforming the deformable member 22 in this way, a part of the in-head flow path RH is deformed (expanded). For this reason, the ink flowing through the in-head flow path RH also flows through the deformed portion. By widening the ink distribution range, the ink flow path loss in the in-head flow path RH increases accordingly. As described above, the deformation member 22 is configured to be deformed toward the outside of the head H, thereby increasing the ink flow path loss in the in-head flow path RH. Conversely, by deforming toward the inside of the head H, ink flow path loss in the in-head flow path RH can be reduced. As described above, the deformable member 22 can adjust the flow path loss of the in-head flow path RH, and thus can adjust the flow path loss of the supply path RR together with the deformable member 21, and functions as a so-called damper. .

  The deformable member 21 is disposed upstream of the in-tube flow path RT, and the deformable member 22 is disposed downstream of the in-tube flow path RT. For this reason, the deformable member 21 and the deformable member 22 are disposed so as to sandwich the in-tube flow path RT in the ink flow direction.

FIG. 3 is a block diagram showing an electrical configuration of the printing apparatus PRT.
The printing apparatus PRT in the present embodiment includes a control device CONT that controls the overall operation. Connected to the control device CONT are an input device 59 for inputting various information relating to the operation of the printing device PRT, and a storage device 60 storing various information relating to the operation of the printing device PRT.

  Each part of the printing apparatus PRT, such as an ink jet mechanism IJ, a transport mechanism CR, and a maintenance mechanism MN, is connected to the control device CONT. The printing apparatus PRT includes a drive signal generator 62 that generates a drive signal to be input to the head H. The drive signal generator 62 is connected to the control device CONT.

  The drive signal generator 62 receives data indicating the amount of change in the voltage value of the ejection pulse input to the head H, and a timing signal that defines the timing for changing the voltage of the ejection pulse. The drive signal generator 62 generates a drive signal such as an ejection pulse based on the input data and timing signal.

Next, the operation of the printing apparatus PRT configured as described above will be described.
When performing a printing operation using the head H, the control device CONT places the recording medium M on the support surface 13a by the transport mechanism CR. After placing the recording medium M, the control device CONT inputs a drive signal to the head H based on the image data of the image to be printed. By this operation, ink is ejected in the −X direction from the nozzle NZ formed on the ejection surface Ha of the head H, and a desired image is formed on the recording medium M by the ejected ink.

  As a maintenance operation of the head H, the control device CONT performs, for example, a capping operation, an ink discharge (cleaning) operation in the nozzle NZ, and the like. When performing the capping operation, the control device CONT performs the operation with the head H moved to the home position.

  In each of the printing operation and the maintenance operation, the control device CONT may move the head H in the Y direction. When the head H is moved in the Y direction, the supply tube TB is also moved as the head H is moved. For example, when the head H is accelerated in the + Y direction (for example, the graph (1) in FIG. 4), an inertial force acts on the ink in the supply tube TB. Due to the inertial force, the ink tends to move in the −Y direction relative to the head H moving in the + Y direction. For this reason, ink abruptly flows from the in-tube flow path RT to the in-head flow path RH (for example, the graph (2) in FIG. 4). For this reason, the pressure of the in-head flow path RH may change abruptly, for example, adversely affecting the meniscus of the nozzle NZ.

  In contrast, in the present embodiment, the deformable member 22 is disposed on the downstream side of the supply tube TB. For this reason, for example, when the head H is moved in the + Y direction as described above (for example, the graph (4) in FIG. 5), the ink in the in-tube channel RT suddenly flows into the in-head channel RH. For example, the deformation member 22 of the in-head flow path RH is deformed to the outside of the head H by the flow pressure. Due to the deformation of the deformation member 22, the in-head flow path RH is deformed, and the flow path loss of the in-head flow path RH increases. For this reason, the momentum of the ink flowing into the in-head flow path RH is absorbed and reduced with the passage of time due to the flow path loss (for example, the graph (5) in FIG. 5).

  On the other hand, when the head H is moved to the -Y side, an inertial force acts on the ink in the supply tube TB. Due to the inertia force, the ink tends to move in the + Y direction relative to the head H moving in the -Y direction. Due to this behavior, the ink in the in-head channel RH suddenly flows out to the in-tube channel RT. Due to the outflow of the ink, the pressure in the in-head flow path RH changes abruptly (for example, the graph (3) in FIG. 4).

  On the other hand, in this embodiment, the deformation member 21 is arrange | positioned in the upstream of supply tube TB. For this reason, for example, when the head H is moved in the −Y direction as described above, the ink in the in-head channel RH suddenly flows into the in-tube channel RT, and then flows from the in-tube channel RT into the in-holder channel RC. For example, the deformation member 21 of the in-holder flow path RC is deformed to the outside of the cartridge holder CTH by the pressure of the ink flow. Due to the deformation of the deformation member 21, the in-holder flow path RC is deformed, and the flow path loss of the in-holder flow path RC is increased. For this reason, the momentum of the ink flowing into the in-holder flow path RC, that is, the momentum of the ink flowing out of the in-head flow path RH is absorbed and reduced with time due to the flow path loss (for example, the graph (6 in FIG. 5). )).

  In graphs (2), (3), (5), and (6) shown in FIGS. 4 and 5 above, the vertical axis indicates pressure (reference value: −1000 Pa), and the horizontal axis indicates time. Show. In the graphs (1) and (4) indicating the movement of the head H, the vertical axis indicates the speed and the horizontal axis indicates the time. The graphs (1) and (4) are inserted into one graph in order to make the movement time of the head H correspond to the time of pressure fluctuation. Therefore, the values on the vertical axis of graphs (1) and (4) are relative values.

  Further, when the head H is reciprocated in the Y direction, for example, when the head H is moved in the + Y direction and then moved in the −Y direction, for example, when the head H is moved in the + Y direction, the deformable member 22 deformed to the outside of the head H. Then, when the ink flows in, and then the head H is moved in the −Y direction, the ink that has flowed into the deformable member 22 flows out, and the ink flows into the deformable member 21.

  Thus, the deformable member 21 and the deformable member 22 reciprocate ink between them. The ink reciprocates in the tube flow path RT sandwiched between the deformation member 21 and the deformation member 22. When the ink reciprocates in the tube flow path RT of the supply tube TB, flow path loss occurs in the supply path RR (upstream part R1 and downstream part R2). Due to the flow path loss, the momentum in which the ink flows is reduced, and abrupt fluctuations in the flow state of the ink in the supply path RR are suppressed.

  As described above, according to the present embodiment, the flow path loss of the supply path RR can be adjusted by the deformable member 21 and the deformable member 22, so that a sudden change in the ink flow state is absorbed by the flow path loss. Will be. Thereby, since it is possible to prevent the ink from rapidly flowing between the head H and the supply path RR, the meniscus of the nozzle NZ provided in the head H can be maintained.

The technical scope of the present invention is not limited to the above-described embodiment, and appropriate modifications can be made without departing from the spirit of the present invention.
For example, in the above-described embodiment, the description has been given by taking as an example the configuration in the first state in which the ejection surface Ha of the head H is arranged so as to be perpendicular to the horizontal direction. There is no. For example, the above description can be made even in a configuration in which the ejection surface Ha is in a second state inclined with respect to the first state in a range of, for example, greater than 0 ° and less than 20 °. Moreover, the structure arrange | positioned so that the ejection surface Ha of the head H may become parallel to a horizontal direction may be sufficient.

  In the above embodiment, the flow path loss in the supply path RR is adjusted using the deformable members 21 and 22 which are deformed by the pressure fluctuation (or ink momentum) in the supply path RR. There is no limit. Since the flow path loss becomes larger as the length of the flow path becomes longer, this can also be used. As such a configuration, for example, two paths having different path lengths are provided in the supply path RR, and a path having a longer path length and a path having a shorter path length according to pressure fluctuations are provided. For example, a configuration in which ink is distributed by switching.

  In the above-described embodiment, the fluid ejecting apparatus of the present invention is applied to an ink jet printer. However, the fluid ejecting apparatus may be applied to a fluid ejecting apparatus that ejects or discharges fluid other than ink. That is, the present invention can be applied to various fluid ejecting apparatuses including a fluid ejecting head that ejects a minute amount of liquid droplets. In addition, a droplet means the state of the fluid discharged from the above-mentioned fluid ejecting apparatus, and includes one that has a tail in a granular shape, a tear shape, or a thread shape. The fluid here may be a material that can be ejected by the fluid ejecting apparatus.

  For example, it may be in the state when the substance is in a liquid phase, such as a liquid state with high or low viscosity, sol, gel water, other inorganic solvents, organic solvents, solutions, liquid resins, liquid metals (metal melts ) And a fluid as one state of the substance, as well as particles in which functional material particles made of solid substances such as pigments and metal particles are dissolved, dispersed or mixed in a solvent. A typical example of the fluid is ink as described in the above embodiment. Here, the ink includes general water-based inks and oil-based inks, and various fluid compositions such as gel inks and hot-melt inks.

  As a specific example of the fluid ejecting apparatus, for example, a fluid containing a material such as an electrode material or a color material used for manufacturing a liquid crystal display, an EL (electroluminescence) display, a surface emitting display, or a color filter in a dispersed or dissolved form. It may be a fluid ejecting apparatus for ejecting, a fluid ejecting apparatus for ejecting a bio-organic matter used for biochip manufacturing, a fluid ejecting apparatus for ejecting a fluid used as a precision pipette, a printing apparatus, a microdispenser, or the like.

  In addition, transparent resin liquids such as UV curable resins to form fluid injection devices that inject lubricating oil onto precision machines such as watches and cameras, micro hemispherical lenses (optical lenses) used in optical communication elements, etc. A fluid ejecting apparatus that ejects a liquid onto the substrate, or a fluid ejecting apparatus that ejects an etching solution such as acid or alkali to etch the substrate or the like may be employed.

  PRT ... Printing device H ... Head NZ ... Nozzle CTR ... Ink cartridge CTH ... Cartridge holder TB ... Supply tube RR ... Supply channel R1 ... Upstream part R2 ... Downstream part RC ... Inner tube channel RT ... Inner tube channel RH ... Inside head Flow path 20A ... Ink storage chamber 20B ... Ink supply chamber 20C ... Check valve 21 ... Deformation member 22 ... Deformation member.

Claims (8)

Movably provided, a fluid ejection head having a plurality of nozzles for ejecting a fluid body,
An upstream supply path connected to a fluid supply source capable of supplying the fluid of the fluid ejecting head, connected to the fluid ejecting head and the upstream supply path, and as the fluid ejecting head reciprocates. A supply path including a downstream part supply path partially including a deformable connecting part supply path;
A first adjustment unit provided in the upstream supply path, and a second adjustment unit provided in the downstream supply path,
In a state in which the fluid source is connected to said upstream portion supply path, the upstream check valve than the first adjustment portion for restricting the movement of the fluid from the fluid ejecting head side toward the flow supply source side A fluid ejection device located
Wherein the first adjusting section and the second adjustment portion has a deformable portion that communicates with the supply path, the displacement shape portion, said supply path from one of the reciprocating movement of the fluid ejecting head by the movement to the other A fluid ejecting apparatus that deforms when the fluid that moves moves in or out. The fluid ejecting apparatus according to claim 1, wherein the deforming portion expands when the fluid flows in and contracts when the fluid flows out. The fluid ejecting apparatus according to claim 1, wherein the first adjustment unit is provided above the connection unit supply path. The fluid ejecting apparatus according to any one of claims 1 to 3, wherein the first adjustment unit is provided above a connection portion between the upstream supply path and the connection supply path. The second adjusting unit is provided below the fluid ejecting head, and a connection part between the fluid ejecting head and the connecting portion supply path is provided further below the second adjusting unit. The fluid ejecting apparatus according to claim 4. Movement of the fluid, the flow body ejecting apparatus as claimed in any one of claims 1 to 5 carried out between the first adjustment unit and second adjustment unit. The deformation portion is formed by closing openings provided in the first adjustment portion and the second adjustment portion, respectively, with an elastically deformable film-like member. The fluid ejecting apparatus according to 1. The fluid ejecting head side of the connecting portion supply path is disposed along the moving direction of the fluid ejecting head,
The fluid according to any one of claims 1 to 7, wherein the upstream supply path side of the connection part supply path is disposed in the same direction as the fluid ejection head side of the connection part supply path. Injection device.

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