JP5754245B2

JP5754245B2 - Linear drive

Info

Publication number: JP5754245B2
Application number: JP2011119241A
Authority: JP
Inventors: 正裕三田
Original assignee: Hitachi Metals Ltd
Current assignee: Hitachi Metals Ltd
Priority date: 2011-05-27
Filing date: 2011-05-27
Publication date: 2015-07-29
Anticipated expiration: 2031-05-27
Also published as: JP2012249421A

Description

本発明は、リニアモータの駆動による震動を抑えることができるリニア駆動装置に関する。 The present invention relates to a linear drive device that can suppress vibration caused by driving of a linear motor.

リニアモータは、非接触で直接駆動可能なモータであるため、精密ステージ、半導体製造装置等の工業機械に多く用いられている。ところが、リニアモータの可動部が加速又は減速する場合に反作用力が発生するため、装置全体が震動するという問題がある。この震動を抑制するために、装置を堅牢に作る、又は重く設計することが必要であり、機能的に必要以上の堅牢性が求められることになる。また、震動を抑制するためにわざわざ、リニアモータとは別のアクチュエータを設置して、リニアモータの可動部の直線移動に対して逆向きの運動を与える等の対策が開示されている（例えば、特許文献１）。
一方、非特許文献１には、モータから出力されるトルクを伝達する磁気歯車機構が開示されている。 A linear motor is a motor that can be directly driven in a non-contact manner, and is therefore widely used in industrial machines such as precision stages and semiconductor manufacturing apparatuses. However, since the reaction force is generated when the movable part of the linear motor is accelerated or decelerated, there is a problem that the entire apparatus vibrates. In order to suppress this vibration, it is necessary to make the device robustly or to design it heavy, and it is necessary to have a functionally more robust property than necessary. Moreover, in order to suppress the vibration, a countermeasure, such as giving an opposite movement to the linear movement of the movable part of the linear motor by intentionally installing an actuator different from the linear motor is disclosed (for example, Patent Document 1).
On the other hand, Non-Patent Document 1 discloses a magnetic gear mechanism that transmits torque output from a motor.

特開２００３−１９５９４５号公報JP 2003-195945 A

池田哲也・中村健二・一ノ倉理、「永久磁石式磁気ギアの効率向上に関する一考察」、磁気学会論文誌、２００９年、３３巻、２号、１３０−１３４頁Tetsuya Ikeda, Kenji Nakamura, Osamu Ichinokura, “A Study on Efficiency Improvement of Permanent Magnet Type Magnetic Gear”, Journal of the Magnetic Society, 2009, 33, 2, 130-134

しかしながら、特許文献１に開示された方法では、震動を抑制するために新たに精密駆動のアクチュエータユニットが必要になるという問題があった。 However, the method disclosed in Patent Document 1 has a problem that a new precision drive actuator unit is required to suppress vibration.

本発明は斯かる事情に鑑みてなされたものであり、必要以上に装置を重く、堅牢にしたり、また別個のアクチュエータを設けることなく、リニアモータの可動部の加速又は減速による反作用力を系内で吸収し、リニアモータの駆動による震動を抑えることができるリニア駆動装置を提供することを目的とする。 The present invention has been made in view of such circumstances, and the reaction force caused by the acceleration or deceleration of the moving part of the linear motor can be increased within the system without making the apparatus heavier and more robust than necessary, and without providing a separate actuator. An object of the present invention is to provide a linear drive device that can absorb the vibration and suppress the vibration caused by the drive of the linear motor.

第１発明に係るリニア駆動装置は、直線移動する可動部を有するリニアモータと、該リニアモータの可動部に接続されており、該可動部と一体的に直線移動する第１可動子、及び該第１可動子に対して逆向きに直線移動する第２可動子を有する移動方向変換機と、前記第１可動子、前記第２可動子又は前記リニアモータの可動部に設けられており、前記リニアモータが駆動した場合に前記移動方向変換機の前記第１可動子及び前記第２可動子に働く反作用力を均衡させる重りとを備え、前記移動方向変換機は、前記リニアモータの可動部の移動方向に沿って略等間隔に配された磁性体を有する中間ヨークを備え、前記第１可動子及び第２可動子は、前記中間ヨークを介して対向しており、前記リニアモータの可動部の移動方向に沿って略等間隔に配された複数の磁極対を有することを特徴とする。 A linear drive device according to a first aspect of the present invention is a linear motor having a movable part that moves linearly, a first mover that is connected to the movable part of the linear motor and moves linearly integrally with the movable part, and A moving direction changer having a second mover that linearly moves in the opposite direction with respect to the first mover; and the movable portion of the first mover, the second mover, or the linear motor, A weight for balancing reaction forces acting on the first mover and the second mover of the moving direction changer when the linear motor is driven, the moving direction changer of the moving part of the linear motor An intermediate yoke having a magnetic body disposed at substantially equal intervals along the moving direction, wherein the first movable element and the second movable element are opposed to each other via the intermediate yoke, and the movable part of the linear motor Approximately equal along the moving direction of And having a plurality of magnetic pole pairs disposed on.

第２発明に係るリニア駆動装置は、前記第１可動子、前記第２可動子又は前記リニアモータの可動部に接続された負荷を備え、前記重り、前記リニアモータ、前記移動方向変換機及び前記負荷の質量と、前記移動方向変換機による第１可動子及び第２可動子の移動量の比とは下記式を満たすことを特徴とする。
Ｍａ／Ｍｂ＝α
但し、
Ｍａ：前記移動方向変換機の前記第１可動子側の質量
Ｍｂ：前記移動方向変換機の前記第２可動子側の質量
α：前記第１可動子の移動量に対する第２可動子の移動量の比 A linear drive device according to a second aspect of the present invention comprises a load connected to the first movable element, the second movable element, or a movable part of the linear motor, the weight, the linear motor, the moving direction changer, and the The mass of the load and the ratio of the amount of movement of the first mover and the second mover by the moving direction changer satisfy the following expression.
Ma / Mb = α
However,
Ma: wherein the moving direction converter first movable section of the mass Mb: the mass of the second movable section of the moving direction converter alpha: the amount of movement of the second movable element with respect to the amount of movement of the first movable element Ratio of

第３発明に係るリニア駆動装置は、直線移動する可動部を有するリニアモータと、該リニアモータの可動部に接続されており、該可動部と一体的に直線移動する第１可動子、及び該第１可動子に対して逆向きに直線移動する第２可動子を有する移動方向変換機と、前記第１可動子、前記第２可動子又は前記リニアモータの可動部に設けられており、前記リニアモータが駆動した場合に前記移動方向変換機の前記第１可動子及び前記第２可動子に働く反作用力を均衡させる重りが取り付けられる重り取付部とを備え、前記移動方向変換機は、前記リニアモータの可動部の移動方向に沿って略等間隔に配された磁性体を有する中間ヨークを備え、前記第１可動子及び第２可動子は、前記中間ヨークを介して対向しており、前記リニアモータの可動部の移動方向に沿って略等間隔に配された複数の磁極対を有することを特徴とする。 A linear drive device according to a third aspect of the present invention is a linear motor having a movable portion that moves linearly, a first mover that is connected to the movable portion of the linear motor and moves linearly integrally with the movable portion, and A moving direction changer having a second mover that linearly moves in the opposite direction with respect to the first mover; and the movable portion of the first mover, the second mover, or the linear motor, A weight attaching portion to which a weight for balancing reaction forces acting on the first mover and the second mover of the moving direction changer when the linear motor is driven is attached ; An intermediate yoke having a magnetic body arranged at substantially equal intervals along the moving direction of the movable portion of the linear motor, the first mover and the second mover are opposed to each other via the intermediate yoke; Movable linear motor And having a plurality of pole pairs arranged at substantially regular intervals along the moving direction of the.

第４発明に係るリニア駆動装置は、前記重り取付部に取り付けられた重りを備えることを特徴とする。 According to a fourth aspect of the present invention, there is provided a linear drive device comprising a weight attached to the weight attachment portion.

第５発明に係るリニア駆動装置は、直線移動する可動部を有するリニアモータと、該リニアモータの可動部に接続されており、該可動部と一体的に直線移動する第１可動子、及び該第１可動子に対して逆向きに直線移動する第２可動子を有する移動方向変換機と、前記第１可動子、前記第２可動子又は前記リニアモータの可動部に接続された負荷とを備え、前記移動方向変換機は、前記リニアモータの可動部の移動方向に沿って略等間隔に配された磁性体を有する中間ヨークを備え、前記第１可動子及び第２可動子は、前記中間ヨークを介して対向しており、前記リニアモータの可動部の移動方向に沿って略等間隔に配された複数の磁極対を有し、前記リニアモータ、前記移動方向変換機及び前記負荷の質量と、前記移動方向変換機による第１可動子及び第２可動子の移動量の比とは下記式を満たすことを特徴とする。
Ｍａ／Ｍｂ＝α
但し、
Ｍａ：前記移動方向変換機の前記第１可動子側の質量
Ｍｂ：前記移動方向変換機の前記第２可動子側の質量
α：前記第１可動子の移動量に対する第２可動子の移動量の比 A linear drive device according to a fifth aspect of the present invention is a linear motor having a movable portion that moves linearly, a first mover that is connected to the movable portion of the linear motor and moves linearly integrally with the movable portion, and the moving direction converter having a second movable element that linearly moves in the opposite direction to the first movable element, wherein the first movable element, and a load connected to the movable portion of the second movable element or the linear motor The moving direction changer includes an intermediate yoke having a magnetic body arranged at substantially equal intervals along the moving direction of the movable portion of the linear motor, and the first mover and the second mover are It has a plurality of magnetic pole pairs facing each other through an intermediate yoke and arranged at substantially equal intervals along the moving direction of the movable part of the linear motor, and the linear motor, the moving direction changer, and the load The mass and the first by the moving direction changer The movable element and the movement amount of the ratio of the second movable element and satisfies the following equation.
Ma / Mb = α
However,
Ma: wherein the moving direction converter first movable section of the mass Mb: the mass of the second movable section of the moving direction converter alpha: the amount of movement of the second movable element with respect to the amount of movement of the first movable element Ratio of

第６発明に係るリニア駆動装置は、前記移動方向における単位長さ当たりの前記磁性体の個数は、前記第１可動子及び第２可動子夫々が有する前記複数の磁極対の各個数の合計となるようにしてあることを特徴とする。 Linear drive device according to the sixth invention, the number of the magnetic body per unit length in front Symbol moving direction, the sum of the number of the plurality of magnetic pole pairs of people the first mover and the second mover husband has It is characterized by becoming.

第７発明に係るリニア駆動装置は、直線移動する可動部を有するリニアモータと、該リニアモータの可動部に接続されており、該可動部と一体的に直線移動する第１可動子、及び該第１可動子に対して逆向きに直線移動する第２可動子を有する移動方向変換機と、前記第１可動子、前記第２可動子又は前記リニアモータの可動部に設けられており、前記リニアモータが駆動した場合に前記移動方向変換機の前記第１可動子及び前記第２可動子に働く反作用力を均衡させる重りとを備え、前記移動方向変換機は、前記リニアモータの可動部の移動方向に沿って略等間隔に配された磁極対を有する固定子を備え、前記第１可動子（又は前記第２可動子）は、前記固定子に対向しており、前記リニアモータの可動部の移動方向に沿って略等間隔に配された複数の磁性体を有し、前記第２可動子（又は前記第１可動子）は、前記第１可動子（又は前記第２可動子）を介して、前記固定子に対向しており、前記リニアモータの可動部の移動方向に沿って略等間隔に配された磁極対を有することを特徴とする。
第８発明に係るリニア駆動装置は、前記第１可動子、前記第２可動子又は前記リニアモータの可動部に接続された負荷を備え、前記重り、前記リニアモータ、前記移動方向変換機及び前記負荷の質量と、前記移動方向変換機による第１可動子及び第２可動子の移動量の比とは下記式を満たすことを特徴とする。
Ｍａ／Ｍｂ＝α
但し、
Ｍａ：前記移動方向変換機の前記第１可動子側の質量
Ｍｂ：前記移動方向変換機の前記第２可動子側の質量
α：前記第１可動子の移動量に対する第２可動子の移動量の比
第９発明に係るリニア駆動装置は、直線移動する可動部を有するリニアモータと、該リニアモータの可動部に接続されており、該可動部と一体的に直線移動する第１可動子、及び該第１可動子に対して逆向きに直線移動する第２可動子を有する移動方向変換機と、前記第１可動子、前記第２可動子又は前記リニアモータの可動部に設けられており、前記リニアモータが駆動した場合に前記移動方向変換機の前記第１可動子及び前記第２可動子に働く反作用力を均衡させる重りが取り付けられる重り取付部とを備え、前記移動方向変換機は、前記リニアモータの可動部の移動方向に沿って略等間隔に配された磁極対を有する固定子を備え、前記第１可動子（又は前記第２可動子）は、前記固定子に対向しており、前記リニアモータの可動部の移動方向に沿って略等間隔に配された複数の磁性体を有し、前記第２可動子（又は前記第１可動子）は、前記第１可動子（又は前記第２可動子）を介して、前記固定子に対向しており、前記リニアモータの可動部の移動方向に沿って略等間隔に配された磁極対を有することを特徴とする。
第１０発明に係るリニア駆動装置は、前記重り取付部に取り付けられた重りを備えることを特徴とする。
第１１発明に係るリニア駆動装置は、直線移動する可動部を有するリニアモータと、該リニアモータの可動部に接続されており、該可動部と一体的に直線移動する第１可動子、及び該第１可動子に対して逆向きに直線移動する第２可動子を有する移動方向変換機と、前記第１可動子、前記第２可動子又は前記リニアモータの可動部に接続された負荷とを備え、前記移動方向変換機は、前記リニアモータの可動部の移動方向に沿って略等間隔に配された磁極対を有する固定子を備え、前記第１可動子（又は前記第２可動子）は、前記固定子に対向しており、前記リニアモータの可動部の移動方向に沿って略等間隔に配された複数の磁性体を有し、前記第２可動子（又は前記第１可動子）は、前記第１可動子（又は前記第２可動子）を介して、前記固定子に対向しており、前記リニアモータの可動部の移動方向に沿って略等間隔に配された磁極対を有し、前記リニアモータ、前記移動方向変換機及び前記負荷の質量と、前記移動方向変換機による第１可動子及び第２可動子の移動量の比とは下記式を満たすことを特徴とする。
Ｍａ／Ｍｂ＝α
但し、
Ｍａ：前記移動方向変換機の前記第１可動子側の質量
Ｍｂ：前記移動方向変換機の前記第２可動子側の質量
α：前記第１可動子の移動量に対する第２可動子の移動量の比
第１２発明に係るリニア駆動装置は、前記移動方向における単位長さ当たりの前記磁性体の個数は、前記第２可動子（又は前記第１可動子）と、前記固定子とが夫々有する前記複数の磁極対の各個数の差分となるようにしてあることを特徴とする。 A linear drive device according to a seventh aspect of the present invention is a linear motor having a movable part that moves linearly, a first mover that is connected to the movable part of the linear motor and moves linearly integrally with the movable part, and A moving direction changer having a second mover that linearly moves in the opposite direction with respect to the first mover; and the movable portion of the first mover, the second mover, or the linear motor, A weight for balancing reaction forces acting on the first mover and the second mover of the moving direction changer when the linear motor is driven, the moving direction changer of the moving part of the linear motor A stator having a pair of magnetic poles arranged at substantially equal intervals along the moving direction, wherein the first mover (or the second mover) faces the stator, and the linear motor is movable; At regular intervals along the direction of movement The second movable element (or the first movable element) is opposed to the stator via the first movable element (or the second movable element). The magnetic motor has magnetic pole pairs arranged at substantially equal intervals along the moving direction of the movable part of the linear motor.
A linear drive device according to an eighth aspect of the present invention includes a load connected to a movable portion of the first movable element, the second movable element or the linear motor, the weight, the linear motor, the moving direction changer, and the The mass of the load and the ratio of the amount of movement of the first mover and the second mover by the moving direction changer satisfy the following expression.
Ma / Mb = α
However,
Ma: Mass on the first mover side of the moving direction changer
Mb: mass on the second mover side of the moving direction changer
α: Ratio of the moving amount of the second mover to the moving amount of the first mover
A linear drive device according to a ninth aspect of the present invention is a linear motor having a movable portion that moves linearly, a first mover that is connected to the movable portion of the linear motor and moves linearly integrally with the movable portion, and A moving direction changer having a second mover that linearly moves in the opposite direction with respect to the first mover; and the movable portion of the first mover, the second mover, or the linear motor, A weight attaching portion to which a weight for balancing reaction forces acting on the first mover and the second mover of the moving direction changer when the linear motor is driven is attached; A stator having magnetic pole pairs arranged at substantially equal intervals along the moving direction of the movable part of the linear motor is provided, and the first mover (or the second mover) faces the stator. , Moving the movable part of the linear motor A plurality of magnetic bodies arranged at substantially equal intervals along the direction, and the second movable element (or the first movable element) is interposed via the first movable element (or the second movable element). The magnetic pole pairs are opposed to the stator and are disposed at substantially equal intervals along the moving direction of the movable portion of the linear motor.
A linear drive device according to a tenth aspect of the present invention includes a weight attached to the weight attachment portion.
A linear drive device according to an eleventh aspect of the present invention is a linear motor having a movable portion that moves linearly, a first mover that is connected to the movable portion of the linear motor and moves linearly integrally with the movable portion, and A moving direction changer having a second mover that linearly moves in the opposite direction with respect to the first mover, and a load connected to the movable portion of the first mover, the second mover, or the linear motor. The moving direction changer includes a stator having a pair of magnetic poles arranged at substantially equal intervals along the moving direction of the movable portion of the linear motor, and the first mover (or the second mover). Has a plurality of magnetic bodies facing the stator and arranged at substantially equal intervals along the moving direction of the movable portion of the linear motor, and the second mover (or the first mover). ) Through the first mover (or the second mover) Opposing to the stator, and having magnetic pole pairs arranged at substantially equal intervals along the moving direction of the movable part of the linear motor, and the mass of the linear motor, the moving direction changer and the load, The ratio of the amount of movement of the first mover and the second mover by the moving direction changer satisfies the following expression.
Ma / Mb = α
However,
Ma: Mass on the first mover side of the moving direction changer
Mb: mass on the second mover side of the moving direction changer
alpha: the ratio the amount of movement of the first the second movable element with respect to the amount of movement of the movable element linear drive according to a twelfth invention, the number of the magnetic body per unit length in front Symbol moving direction, the second A difference between the number of the plurality of magnetic pole pairs of the mover (or the first mover) and the stator is provided.

第１、第２、第７及び第８発明にあっては、リニアモータの可動部には移動方向変換機が接続されている。移動方向変換機は、リニアモータの可動部と一体的に直線移動する第１可動子と、該第１可動子に対して逆向きに直線移動する第２可動子とを有するため、リニアモータの可動部が加速又は減速した場合、移動方向変換機の第２可動子は該可動部と逆方向に加速又は減速する。リニアモータが駆動した場合、移動方向変換機の第１可動子側と、第２可動子側とにはそれぞれ向きが異なる力が働く。第１可動子、第２可動子又は前記リニアモータの可動部には、リニアモータが駆動した場合に移動方向変換機の第１可動子及び第２可動子に働く反作用力を均衡させるための重りが設けられているため、リニア駆動装置全体に加わる力は相殺する。よって、リニアモータ始動時又は停止時にリニア駆動装置を震動させるような力は働かない。 In the first , second , seventh and eighth inventions, a moving direction changer is connected to the movable part of the linear motor. The moving direction changer has a first mover that linearly moves integrally with the movable part of the linear motor, and a second mover that moves linearly in the opposite direction with respect to the first mover. When the movable part is accelerated or decelerated, the second mover of the moving direction changer accelerates or decelerates in the direction opposite to the movable part. When the linear motor is driven, forces having different directions act on the first mover side and the second mover side of the moving direction changer. The first movable element, the second movable element or the movable part of the linear motor has a weight for balancing reaction forces acting on the first movable element and the second movable element of the moving direction changer when the linear motor is driven. Therefore, the force applied to the entire linear drive device cancels out. Therefore, there is no force that vibrates the linear drive device when starting or stopping the linear motor.

第３、第４、第９及び第１０発明にあっては、重り取付部を備えており、負荷に応じた重りを適宜取り付けることが可能である。 In the third , fourth , ninth, and tenth inventions, the weight attaching portion is provided, and the weight according to the load can be appropriately attached.

第５及び第１１発明にあっては、リニアモータの可動部には移動方向変換機が設けられている。移動方向変換機は、リニアモータの可動部と一体的に直線移動する第１可動子と、該第１可動子に対して逆向きに直線移動する第２可動子とを有するため、リニアモータの可動部が加速又は減速した場合、移動方向変換機の第２可動子は該可動部と逆方向に加速又は減速する。リニアモータが駆動した場合、移動方向変換機の第１可動子側と、第２可動子側とにはそれぞれ向きが異なる力が働く。第１可動子側と、第２可動子側の質量は、リニアモータが駆動した場合に移動方向変換機の第１可動子及び第２可動子に働く反作用力が拮抗するように設定されているため、リニア駆動装置全体に加わる力は相殺する。よって、リニアモータ始動時又は停止時にリニア駆動装置を震動させるような力は働かない。 In the fifth and eleventh inventions, the moving part of the linear motor is provided with a moving direction changer. The moving direction changer has a first mover that linearly moves integrally with the movable part of the linear motor, and a second mover that moves linearly in the opposite direction with respect to the first mover. When the movable part is accelerated or decelerated, the second mover of the moving direction changer accelerates or decelerates in the direction opposite to the movable part. When the linear motor is driven, forces having different directions act on the first mover side and the second mover side of the moving direction changer. The masses on the first mover side and the second mover side are set so that the reaction forces acting on the first mover and the second mover of the moving direction changer antagonize when the linear motor is driven. Therefore, the force applied to the entire linear drive unit cancels out. Therefore, there is no force that vibrates the linear drive device when starting or stopping the linear motor.

第１乃至第１２発明にあっては、第１可動子と、第２可動子と、中間ヨーク又は固定子とは直動磁気歯車を構成しているため、非接触で第１可動子及び第２可動子は直線移動する。従って、非接触機構で、リニアモータの震動を抑制することが可能である。 In the first to twelfth inventions, the first mover, the second mover, and the intermediate yoke or the stator constitute a direct-acting magnetic gear. 2 The mover moves linearly. Therefore, the non-contact mechanism can suppress the vibration of the linear motor.

本発明によれば、必要以上に装置を重く、堅牢にしたり、また別個のアクチュエータを設けることなく、リニアモータの可動部の加速又は減速による反作用力を系内で吸収し、リニアモータの駆動による震動を抑えることができる。 According to the present invention, the reaction force due to acceleration or deceleration of the movable part of the linear motor is absorbed in the system without making the apparatus heavier and more robust than necessary, or providing a separate actuator, and by driving the linear motor. The vibration can be suppressed.

本実施の形態に係るリニア駆動装置の一構成例を示した斜視図である。It is the perspective view which showed one structural example of the linear drive device which concerns on this Embodiment. 直線移動方向に直交する方向から見たリニア駆動装置の側断面図である。It is side sectional drawing of the linear drive device seen from the direction orthogonal to a linear moving direction. 直線移動方向から見たリニア駆動装置の側面図である。It is a side view of the linear drive device seen from the linear movement direction. 移動方向変換機の要部を示した分解斜視図である。It is the disassembled perspective view which showed the principal part of the moving direction change machine. リニア駆動装置の動作説明図である。It is operation | movement explanatory drawing of a linear drive device. リニア駆動装置の動作説明図である。It is operation | movement explanatory drawing of a linear drive device. 変形例に係るリニア駆動装置の一構成例を示した斜視図である。It is the perspective view which showed one structural example of the linear drive device which concerns on a modification.

以下、本発明をその実施の形態を示す図面に基づいて詳述する。
図１は、本実施の形態に係るリニア駆動装置の一構成例を示した斜視図、図２は、直線移動方向に直交する方向から見たリニア駆動装置の側断面図、図３は、直線移動方向から見たリニア駆動装置の側面図である。なお図３中、ハッチングが付された部分は、磁石又は磁性体で構成されている部分を示している。ベース１に設けられた本実施の形態に係るリニア駆動装置は、直線移動する可動部２２を有するリニアモータ２と、可動部２２に接続されており、該可動部２２と一体的に直線移動する第１可動子３１、及び該第１可動子３１に対して逆向きに直線移動する第２可動子３２を有する移動方向変換機３と、可動部２２及び第１可動子３１を連結する連結部４と、第２可動子３２に設けられており、リニアモータ２が駆動した場合に移動方向変換機３の第１可動子３１及び第２可動子３２に働く反作用力を均衡させる重り３７とを備える。本実施の形態に係るリニア駆動装置は、精密ステージ、半導体製造装置等の工業機械に適用することができるが、以下では負荷５を有する一般的な装置を想定して説明する。 Hereinafter, the present invention will be described in detail with reference to the drawings illustrating embodiments thereof.
FIG. 1 is a perspective view showing a configuration example of the linear drive device according to the present embodiment, FIG. 2 is a side sectional view of the linear drive device viewed from a direction orthogonal to the linear movement direction, and FIG. It is a side view of the linear drive device seen from the moving direction. In FIG. 3, the hatched portion indicates a portion made of a magnet or a magnetic material. The linear drive device according to the present embodiment provided on the base 1 is connected to the linear motor 2 having the movable portion 22 that moves linearly and the movable portion 22, and linearly moves integrally with the movable portion 22. A moving direction changer 3 having a first mover 31 and a second mover 32 that linearly moves in the opposite direction with respect to the first mover 31, and a connecting part that connects the movable part 22 and the first mover 31. 4 and a weight 37 that is provided on the second movable element 32 and balances the reaction force acting on the first movable element 31 and the second movable element 32 of the moving direction changer 3 when the linear motor 2 is driven. Prepare. The linear drive device according to the present embodiment can be applied to an industrial machine such as a precision stage and a semiconductor manufacturing device, but will be described below assuming a general device having a load 5.

リニアモータ２は、長手方向に沿って略等間隔に複数の磁極対が配された長尺平板状の固定子２１を備え、固定子２１はベース１に固定されている。固定子２１の両長辺側には、その長手方向に沿ってリニアモータスライドレール２３が敷設されている。また、リニアモータ２は、各リニアモータスライドレール２３に沿って移動可能な支持部２４によって支持された略矩形板状の可動ステージ２５と、間隙を有して固定子２１に対向するように可動ステージ２５の固定子２１側に設けられた可動部２２とを備える。可動部２２は、固定子２１の長手方向に沿って略等間隔に複数の磁極対が配されている。固定子２１及び可動部２２の一方は、永久磁石で構成され、他方は電磁石で構成されている。電磁石への通電は図示しない制御部によって制御されており、電磁石の励磁方向を順次変化させることによって、可動部２２は、固定子２１に沿って直線移動する。本実施の形態では、可動ステージ２５上に負荷５が配されている。 The linear motor 2 includes a long flat plate-like stator 21 in which a plurality of magnetic pole pairs are arranged at substantially equal intervals along the longitudinal direction, and the stator 21 is fixed to the base 1. On both long sides of the stator 21, linear motor slide rails 23 are laid along the longitudinal direction. The linear motor 2 is movable so as to face the stator 21 with a gap between the movable stage 25 and a substantially rectangular plate-like movable stage 25 supported by a support 24 that can move along each linear motor slide rail 23. And a movable portion 22 provided on the stator 21 side of the stage 25. The movable part 22 is provided with a plurality of magnetic pole pairs at substantially equal intervals along the longitudinal direction of the stator 21. One of the stator 21 and the movable part 22 is composed of a permanent magnet, and the other is composed of an electromagnet. Energization of the electromagnet is controlled by a control unit (not shown), and the movable unit 22 linearly moves along the stator 21 by sequentially changing the excitation direction of the electromagnet. In the present embodiment, a load 5 is arranged on the movable stage 25.

移動方向変換機３は、例えば空間高調波型の直動磁気歯車であり、可動部２２の移動方向に沿って略等間隔に配された磁性体を有する中間ヨーク３３と、前記中間ヨーク３３を介して対向している第１可動子３１及び第２可動子３２とを備える。また、移動方向変換機３は、可動部２２の移動方向に沿ってベース１に敷設された移動方向変換機用スライドレール３４を備える。 The moving direction changer 3 is, for example, a space harmonic type linear motion magnetic gear, and includes an intermediate yoke 33 having a magnetic body arranged at substantially equal intervals along the moving direction of the movable portion 22, and the intermediate yoke 33. A first movable element 31 and a second movable element 32 which are opposed to each other. The moving direction changer 3 includes a moving direction changer slide rail 34 laid on the base 1 along the moving direction of the movable portion 22.

図４は、移動方向変換機３の要部を示した分解斜視図である。第１可動子３１は、可動部２２の移動方向に長い矩形板状をなし、図１に示すように、連結部４によって可動部２２に接続されている。第１可動子３１は、磁性体からなる板３１１を有し、板３１１の下面には、厚さ方向に着磁された下側Ｎ極の磁石３１２ａ及び下側Ｓ極の磁石３１２ｂからなる磁極対３１２が、可動部２２の移動方向に沿って単位長さΔＬ当たり６個配されている。ここで厚さ方向に着磁された磁石とは、下側及び上側が異極となるよう着磁されていることを意味する。例えば、磁石３１２ａは、下側及び上側夫々がＮ極及びＳ極に着磁され、磁石３１２ｂは、下側及び上側夫々がＳ極及びＮ極に着磁されている。第２可動子３２の長手方向の長さは、例えば単位長のΔＬである。 FIG. 4 is an exploded perspective view showing a main part of the moving direction changer 3. The first mover 31 has a rectangular plate shape that is long in the moving direction of the movable part 22, and is connected to the movable part 22 by a connecting part 4 as shown in FIG. 1. The first mover 31 includes a plate 311 made of a magnetic material, and a magnetic pole made of a lower N-pole magnet 312a and a lower S-pole magnet 312b magnetized in the thickness direction on the lower surface of the plate 311. Six pairs 312 are arranged per unit length ΔL along the moving direction of the movable portion 22. Here, the magnet magnetized in the thickness direction means that the lower side and the upper side are magnetized so as to have different polarities. For example, the lower side and upper side of the magnet 312a are magnetized to N and S poles, and the lower side and upper side of the magnet 312b are magnetized to S and N poles, respectively. The length of the second mover 32 in the longitudinal direction is, for example, a unit length ΔL.

第２可動子３２は、図４に示すように、可動部２２の移動方向に沿って略等間隔に配された複数の磁極対３２２を有し、第１可動子３１と中間ヨーク３３を介して対向している。第２可動子３２は、磁性体からなる長尺の板３２１を有し、板３２１の上面には、厚さ方向に着磁された上側Ｎ極の磁石３２２ａ及び上側Ｓ極の磁石３２２ｂからなる磁極対３２２が、可動部２２の移動方向に沿って単位長さΔＬ当たり１４個配されている。第２可動子３２の長手方向の長さは、第１可動子３１の長さと略同一寸法である。第２可動子３２は、支持部３５によって、移動方向変換機用スライドレール３４に沿って移動可能に支持されている。 As shown in FIG. 4, the second mover 32 has a plurality of magnetic pole pairs 322 arranged at substantially equal intervals along the moving direction of the movable part 22, and the first mover 31 and the intermediate yoke 33 are interposed therebetween. Facing each other. The second mover 32 has a long plate 321 made of a magnetic material, and an upper N pole magnet 322a and an upper S pole magnet 322b magnetized in the thickness direction on the upper surface of the plate 321. Fourteen magnetic pole pairs 322 are arranged per unit length ΔL along the moving direction of the movable portion 22. The length of the second mover 32 in the longitudinal direction is substantially the same as the length of the first mover 31. The 2nd needle | mover 32 is supported by the support part 35 so that the movement along the slide rail 34 for moving direction converters is possible.

中間ヨーク３３は、長尺板状をなし、その長手方向は移動方向変換機用スライドレール３４の長手方向と同じ向きであり、第１可動子３１と第２可動子３２との間に間隙を有して配され、その短辺側端部が保持部３６によって保持され、ベース１に固定されている。中間ヨーク３３は、例えば、図４に示すように、第１可動子３１及び第２可動子３２夫々が有する磁極対３１２，３２２の単位長さΔＬ当たりの個数６及び１４の合計となる２０個の強磁性の磁性体３３１を等間隔に長手方向に沿って単位長さΔＬ毎に保持している。中間ヨーク３３の長手方向の長さは、第１可動子３１の長手方向の幅の略２倍である。ここで強磁性の磁性体とは軟磁性体のことをいい、又磁性体とは軟磁性体のことを指す。 The intermediate yoke 33 has a long plate shape, and the longitudinal direction thereof is the same as the longitudinal direction of the slide rail 34 for the moving direction changer, and a gap is formed between the first movable element 31 and the second movable element 32. The end of the short side is held by the holding portion 36 and fixed to the base 1. For example, as shown in FIG. 4, the intermediate yoke 33 has a total of 6 and 14 per unit length ΔL of the magnetic pole pairs 312 and 322 of the first movable element 31 and the second movable element 32. The ferromagnetic magnetic body 331 is held at equal intervals along the longitudinal direction for each unit length ΔL. The length of the intermediate yoke 33 in the longitudinal direction is approximately twice the width of the first mover 31 in the longitudinal direction. Here, the ferromagnetic material refers to a soft magnetic material, and the magnetic material refers to a soft magnetic material.

より一般的には、前記長手方向に沿って第１可動子３１に配された磁極対３１２の単位長さΔＬ当たり個数がｐｈ、前記長手方向に沿って第２可動子３２に配された磁極対３２２の単位長さΔＬ当たり個数がｐｌ、前記長手方向に沿って中間ヨーク３３に配された磁性体３３１の単位長さΔＬ当たり個数がｎｓである場合、下記式（１）を満たすように各磁極対３１２，３２２及び磁性体３３１の個数を合わせる。
ｎｓ＝ｐｌ＋ｐｈ…（１） More generally, the number of magnetic pole pairs 312 arranged on the first movable element 31 along the longitudinal direction is ph per unit length ΔL, and the magnetic poles arranged on the second movable element 32 along the longitudinal direction. When the number per unit length ΔL of the pair 322 is pl and the number per unit length ΔL of the magnetic body 331 disposed on the intermediate yoke 33 along the longitudinal direction is ns, the following formula (1) is satisfied. The numbers of the magnetic pole pairs 312 and 322 and the magnetic body 331 are matched.
ns = pl + ph (1)

このように構成された移動方向変換機３においては、可動部２２と共に第１可動子３１が長手方向に直線移動した場合、第１可動子３１及び第２可動子３２夫々が有する磁極対３１２、３２２間の磁気的相互作用により、第１可動子３１とは逆方向に第２可動子３２が移動する（池田哲也・中村健二・一ノ倉理、「永久磁石式磁気ギアの効率向上に関する一考察」、磁気学会論文誌、２００９年、３３巻、２号、１３０−１３４頁参照）。つまり、第１可動子３１が移動した場合、第１可動子３１からの磁束の空間高調波が中間ヨークにより変調され、第２可動子３２側の磁極対ピッチと同じ周期の空間高調波が生成される。上記式（１）が成立するときに、第１可動子３１を移動させると、第２可動子３２はその単位長さ当たりの磁極対ピッチと反比例した減速比で移動する。第２可動子３２に配置してある磁極対の単位長さΔＬ当たりの個数ｐｌと、第１可動子３１に配置してある磁極対の単位長さΔＬ当たりの個数ｐｈとの比ｐｈ／ｐｌが第２可動子３２に対する第１可動子３１のギア比となる。図４に示す磁気ギア装置の例では、ギア比３／７となる。このため、リニアモータ２の可動部２２と共に第１可動子３１が移動した場合、第２可動子３２は第１可動子３１よりもゆっくり逆方向へ移動する。
なお、ここでは、第１可動子３１における単位長さΔＬ当たりの磁極対３１２の個数が、第２可動子３２における単位長さΔＬ当たりの磁極対３２２の個数より小さい場合、つまり第１可動子３１の直線移動量に対して、第２可動子３２の移動量が小さくなる場合について説明したが、第１可動子３１の移動量に対して第２可動子３２の移動量が大きくなる場合にも本発明は適用できる。
また、第１可動子３１及び第２可動子３２の長手方向の寸法を単位長さΔＬ、中間ヨーク３３の長手方向の寸法がΔＬ×２の場合を説明したが、所定範囲を移動する第１可動子３１と、第２可動子３２とが同期ずれしない磁力で結合できていれば十分であり、第１可動子３１、第２可動子３２及び中間ヨーク３３の長さは特に限定されない。例えば、上述の実施の形態において、中間ヨーク３３の長手方向の寸法を、第１可動子３１と略同一寸法になるように構成しても良い。更に、第１可動子３１の可動範囲を拡大するために、第１可動子３１の長手方向の長さを２／３ΔＬ、第２可動子３２の長手方向の長さを３／２ΔＬ、中間ヨーク３３の長手方向の長さを２ΔＬとしても良い。第１及び第２可動子３１，３２及び中間ヨーク３３に配されている磁極対３１２，３２２及び磁性体３３１の数は、第１可動子３１は２／３ΔＬの長さに磁極対３１２を４個、第２可動子３２は３／２ΔＬの長さに磁極対３２２を２１個、中間ヨーク３３は２ΔＬの長さに磁性体３３１を４０個、長手方向に等配している。
本明細書では磁極対を二つの磁石で形成したが、一磁極を複数の磁石で形成し、磁極対を構成しても良い。また一つの磁石を等分にＮＳ着磁して磁極対を形成しても良い。 In the moving direction changer 3 configured as described above, when the first movable element 31 moves linearly in the longitudinal direction together with the movable part 22, the magnetic pole pair 312 included in each of the first movable element 31 and the second movable element 32, The second mover 32 moves in a direction opposite to that of the first mover 31 due to the magnetic interaction between the first mover 31 (Tetsuya Ikeda, Kenji Nakamura, Osamu Ichinokura, “Improvement of Efficiency of Permanent Magnet Type Magnetic Gear” (Refer to "Discussion", Journal of Magnetic Society, 2009, Vol. 33, No. 2, pp. 130-134) That is, when the first mover 31 moves, the spatial harmonic of the magnetic flux from the first mover 31 is modulated by the intermediate yoke, and a spatial harmonic having the same period as the magnetic pole pair pitch on the second mover 32 side is generated. Is done. When the first movable element 31 is moved when the above formula (1) is established, the second movable element 32 moves at a reduction ratio that is inversely proportional to the magnetic pole pair pitch per unit length. Ratio ph / pl of the number pl per unit length ΔL of the magnetic pole pairs arranged in the second mover 32 and the number ph per unit length ΔL of the magnetic pole pairs arranged in the first mover 31 Is the gear ratio of the first movable element 31 to the second movable element 32. In the example of the magnetic gear device shown in FIG. 4, the gear ratio is 3/7. For this reason, when the 1st needle | mover 31 moves with the movable part 22 of the linear motor 2, the 2nd needle | mover 32 moves to a reverse direction more slowly than the 1st needle | mover 31. FIG.
Here, when the number of magnetic pole pairs 312 per unit length ΔL in the first mover 31 is smaller than the number of magnetic pole pairs 322 per unit length ΔL in the second mover 32, that is, the first mover. Although the case where the movement amount of the second mover 32 becomes smaller than the movement amount of the first mover 31 has been described, the movement amount of the second mover 32 becomes larger than the movement amount of the first mover 31. The present invention is also applicable.
Further, the case where the longitudinal dimension of the first movable element 31 and the second movable element 32 is the unit length ΔL and the longitudinal dimension of the intermediate yoke 33 is ΔL × 2 has been described. However, the first movable element moves within a predetermined range. It is sufficient if the movable element 31 and the second movable element 32 can be coupled with each other with a magnetic force that does not deviate from the synchronization. The lengths of the first movable element 31, the second movable element 32, and the intermediate yoke 33 are not particularly limited. For example, in the above-described embodiment, the longitudinal dimension of the intermediate yoke 33 may be configured to be substantially the same as that of the first mover 31. Further, in order to expand the movable range of the first mover 31, the length of the first mover 31 in the longitudinal direction is 2 / 3ΔL, the length of the second mover 32 in the longitudinal direction is 3 / 2ΔL, an intermediate yoke The length of 33 in the longitudinal direction may be 2ΔL. The number of magnetic pole pairs 312 and 322 and magnetic bodies 331 disposed on the first and second movable elements 31 and 32 and the intermediate yoke 33 is such that the first movable element 31 has a length of 2 / 3ΔL and the magnetic pole pair 312 is 4 in length. The second mover 32 has 21 magnetic pole pairs 322 with a length of 3 / 2ΔL, and the intermediate yoke 33 has 40 magnetic bodies 331 with a length of 2ΔL, which are equally arranged in the longitudinal direction.
In this specification, the magnetic pole pair is formed by two magnets, but one magnetic pole may be formed by a plurality of magnets to constitute the magnetic pole pair. Alternatively, one magnet may be equally NS magnetized to form a magnetic pole pair.

重り３７は、例えば、第２可動子３２の下面に固定された板状の部材である。重り３７の固定位置は特に限定されないが、第２可動子３２の重心位置など、重量バランスが取れる位置に固定すると良い。また、重り３７の大きさ及び部材は特に限定されない。更に、小さな重り３７でリニア駆動装置に加わる反作用力を相殺するためには、重り３７の密度を大きくすると良い。重り３７は、第２可動子３２に着脱不能に固定しても良いし、適宜着脱できるように構成しても良い。例えば、重り３７を着脱自在に固定する重り取付部を第２可動子３２に設け、負荷５の質量に応じて、後述の式（２）を満たす質量を有する重り３７を前記重り取付部に取り付けるように構成しても良い。重り取付部は、例えば、重り３７を第２可動子３２に締結するためのネジ孔、重り３７が嵌合する凹部、重り３７を係止する爪部材などで構成される。 The weight 37 is a plate-like member fixed to the lower surface of the second movable element 32, for example. Although the fixing position of the weight 37 is not particularly limited, it is preferable to fix the weight 37 at a position where the weight balance can be achieved, such as the center of gravity of the second movable element 32. Moreover, the magnitude | size and member of the weight 37 are not specifically limited. Furthermore, in order to cancel the reaction force applied to the linear drive device by the small weight 37, the density of the weight 37 is preferably increased. The weight 37 may be fixed to the second movable element 32 so as not to be detachable, or may be configured to be detachable as appropriate. For example, a weight attaching portion for detachably fixing the weight 37 is provided in the second movable element 32, and the weight 37 having a mass satisfying the following formula (2) is attached to the weight attaching portion according to the mass of the load 5. You may comprise as follows. The weight attaching part is configured by, for example, a screw hole for fastening the weight 37 to the second movable element 32, a recess in which the weight 37 is fitted, a claw member for locking the weight 37, and the like.

リニア駆動装置の震動発生を抑えることができる重り３７は第２可動子３２に配置され、その質量は下記式を満たすように決定される。
Ｍａ×ａ＝Ｍｂ×ｂ…（２） The weight 37 that can suppress the occurrence of vibration of the linear drive device is disposed on the second movable element 32, and its mass is determined so as to satisfy the following equation.
Ma × a = Mb × b (2)

ここで、Ｍａは、支持部２４、可動ステージ２５、可動部２２、可動ステージ２５に載置された負荷５、連結部４、第１可動子３１からなる直線移動部分の質量の総和である。Ｍｂは、第２可動子３２、及び支持部３５からなる直線移動部分の質量の総和である。ａ、ｂは、移動方向変換機３の第１可動子３１及び第２可動子３２の移動量である。つまり、第１可動子３１の移動量：第２可動子３２の移動量＝ａ：ｂである。なお、特許請求項の範囲における変数αは、第１可動子３１の移動量に対する第２可動子３２の移動量の比、即ちｂ／ａである。 Here, Ma is the total sum of the masses of the linearly moving portion including the support portion 24, the movable stage 25, the movable portion 22, the load 5 placed on the movable stage 25, the connecting portion 4, and the first mover 31. Mb is the total sum of the masses of the linearly moving parts including the second mover 32 and the support portion 35. a and b are movement amounts of the first movable element 31 and the second movable element 32 of the moving direction changer 3. That is, the moving amount of the first mover 31: the moving amount of the second mover 32 = a: b. The variable α in the scope of the claims is the ratio of the movement amount of the second movable element 32 to the movement amount of the first movable element 31, that is, b / a.

次に、本実施の形態に係るリニア駆動装置の作用について説明する。
図５及び図６は、リニア駆動装置の動作説明図である。図５に示すように、可動部２２が右方向へ移動した場合、移動方向変換機３の第２可動子３２は左方向へ移動する。可動部２２に連結している第１可動子３１と、第２可動子３２との質量及び移動量の比は、上記式（２）を満たすため、第１可動子３１及び第２可動子３２に働く力は互いに相殺される。
同様に、図６に示すように、可動部２２が左方向へ移動した場合、移動方向変換機３の第２可動子３２は右方向へ移動する。可動部２２に連結している第１可動子３１と、第２可動子３２との質量及び移動量の比は、上記式（２）を満たすため、第１可動子３１及び第２可動子３２に働く力は互いに相殺する。
このように、リニアモータ２の可動部２２と共に第１可動子３１が加速又は減速した場合、第２可動子３２は第１可動子３１よりもゆっくり加速又は減速し、第１可動子３１に働く力を受け止めることができる。なお、本実施の形態では第１可動子３１は、長手方向の長さΔＬの範囲で移動することができる。 Next, the operation of the linear drive device according to the present embodiment will be described.
5 and 6 are explanatory diagrams of the operation of the linear drive device. As shown in FIG. 5, when the movable part 22 moves to the right, the second mover 32 of the moving direction changer 3 moves to the left. The ratio of the mass and the amount of movement between the first movable element 31 and the second movable element 32 connected to the movable part 22 satisfies the above formula (2), and therefore the first movable element 31 and the second movable element 32. The forces acting on each other cancel each other.
Similarly, as shown in FIG. 6, when the movable part 22 moves to the left, the second mover 32 of the moving direction changer 3 moves to the right. The ratio of the mass and the amount of movement between the first movable element 31 and the second movable element 32 connected to the movable part 22 satisfies the above formula (2), and therefore the first movable element 31 and the second movable element 32. The forces acting on each other cancel each other.
Thus, when the 1st needle | mover 31 accelerates or decelerates with the movable part 22 of the linear motor 2, the 2nd needle | mover 32 accelerates or decelerates more slowly than the 1st needle | mover 31, and works on the 1st needle | mover 31. Can take power. In the present embodiment, the first movable element 31 can move within the range of the length ΔL in the longitudinal direction.

このように構成されたリニア駆動装置にあっては、可動部２２が加速又は減速した場合であっても、リニア駆動装置内で発生する力が互いに相殺する。従って、必要以上にリニア駆動装置を重く、堅牢にしたり、また別個のアクチュエータを設けるといった大がかりなシステムを構築することなく、可動部２２の加速又は減速による反作用力を系内で吸収し、リニアモータ２の駆動による震動を抑えることができる。 In the linear drive device configured as described above, even if the movable portion 22 is accelerated or decelerated, the forces generated in the linear drive device cancel each other. Therefore, the reaction force caused by acceleration or deceleration of the movable portion 22 is absorbed in the system without constructing a large-scale system such that the linear drive device is heavier and more robust than necessary, or a separate actuator is provided. The vibration caused by the driving of 2 can be suppressed.

また、移動方向変換機３は、直動磁気歯車機構であるため、第２可動子３２を第１可動子３１に対して非接触で逆方向へ移動させることができる。従って、不要な摩擦力、付随的な震動、騒音が発生すること無く、リニアモータ２の駆動による震動を抑えることができる。 Moreover, since the moving direction changer 3 is a direct-acting magnetic gear mechanism, the second mover 32 can be moved in the reverse direction without contact with the first mover 31. Therefore, the vibration caused by driving the linear motor 2 can be suppressed without generating unnecessary frictional force, incidental vibration, and noise.

更に、可動部２２及び第１可動子３１が連結部４で略直接的に連結されているため、可動部２２及び第１可動子３１に働く力の作用点と、反作用点との距離が短く、リニア駆動装置の各部の剛性を高める必要が無い。 Furthermore, since the movable part 22 and the first movable element 31 are substantially directly connected by the connecting part 4, the distance between the action point of the force acting on the movable part 22 and the first movable element 31 and the reaction point is short. There is no need to increase the rigidity of each part of the linear drive device.

更にまた、第２可動子３２は、第１可動子３１の移動に対して逆向きに移動するが、この移動は、受動的な移動であるため、装置の動作信頼性に優れている。 Furthermore, the second mover 32 moves in the opposite direction to the movement of the first mover 31, but this movement is a passive movement, so that the operation reliability of the apparatus is excellent.

更にまた、本実施の形態に係るリニア駆動装置を利用した場合、搬送装置、露光装置、マウンタ、ロボットなどの精度向上、装置の小型軽量化などが実現できる。 Furthermore, when the linear drive device according to this embodiment is used, it is possible to improve the accuracy of the transfer device, the exposure device, the mounter, the robot, etc., and to reduce the size and weight of the device.

なお、実施の形態では、重り３７を第２可動子３２に固定する例を説明したが、第１可動子３１又は可動部２２に固定しても良い。 In the embodiment, the example in which the weight 37 is fixed to the second movable element 32 has been described. However, the weight 37 may be fixed to the first movable element 31 or the movable portion 22.

また、重り３７を設けることで上記式（２）を満たすように構成してあるが、重り３７が無くても、上記式（２）を満たすのであれば、重り３７を設けなくても良い。 Further, although the weight 37 is provided so as to satisfy the above formula (2), the weight 37 may be omitted even if the weight 37 is not provided as long as the above formula (2) is satisfied.

更に、本実施の形態では、可動ステージ２５を一方向へ移動させる例を説明したが、複数組のリニアモータ２及び移動方向変換機３をベース１に設けることによって、ＸＹステージを構成することもできる。 Furthermore, in the present embodiment, an example in which the movable stage 25 is moved in one direction has been described. However, an XY stage may be configured by providing a plurality of sets of linear motors 2 and moving direction changers 3 in the base 1. it can.

更に、本実施の形態では、リニアモータ２と、移動方向変換機３とがベース１に対して横並びになるように構成されているが、リニアモータ２及び移動方向変換機３を上下に配列させても良い。 Further, in the present embodiment, the linear motor 2 and the moving direction changer 3 are arranged side by side with respect to the base 1, but the linear motor 2 and the moving direction changer 3 are arranged vertically. May be.

（変形例）
実施の形態に係るリニア駆動装置の移動方向変換機３は、中間ヨーク３３を固定した構成であったが、実施の形態における第２可動子３２をベース１に固定し、中間ヨーク３３を移動可能に構成しても良い。変形例に係るリニア駆動装置は、実施の形態における第２可動子３２を固定子（以下、変換機用固定子１３２という。）とし、実施の形態における中間ヨーク３３を可動子（以下、第２可動子１３３という。）として構成している。 (Modification)
The moving direction changer 3 of the linear drive device according to the embodiment has a configuration in which the intermediate yoke 33 is fixed. However, the second mover 32 in the embodiment is fixed to the base 1 and the intermediate yoke 33 can be moved. You may comprise. In the linear drive device according to the modification, the second mover 32 in the embodiment is a stator (hereinafter referred to as a converter stator 132), and the intermediate yoke 33 in the embodiment is a mover (hereinafter referred to as a second mover). It is configured as a mover 133).

図７は、変形例に係るリニア駆動装置の一構成例を示した斜視図である。変形例に係るリニア駆動装置は、実施の形態と同様、リニアモータ２、移動方向変換機１０３、連結部４と、重り３７（図示していない）を備える。変形例に係る移動方向変換機１０３は、第１可動子３１と、第２可動子１３３と、変換機用固定子１３２と、移動方向変換機用スライドレール１３４とを有する。第１可動子３１は、実施の形態と同様の構成である。第２可動子１３３は、実施の形態における中間ヨーク３３と同様の構成であり、第２可動子１３３は、支持部１３５を介して移動方向変換機用スライドレール１３４に、移動可能に設けられている。変換機用固定子１３２は、実施の形態における第２可動子３２と同様の構造であり、長手方向が移動方向変換機用スライドレール１３４と略同一になるように、ベース１に固定されている。 FIG. 7 is a perspective view illustrating a configuration example of a linear drive device according to a modification. Similar to the embodiment, the linear drive device according to the modification includes the linear motor 2, the moving direction changer 103, the connecting portion 4, and a weight 37 (not shown). The moving direction converter 103 according to the modification includes a first mover 31, a second mover 133, a converter stator 132, and a moving direction converter slide rail 134. The 1st needle | mover 31 is the structure similar to embodiment. The second mover 133 has the same configuration as the intermediate yoke 33 in the embodiment, and the second mover 133 is movably provided on the moving direction changer slide rail 134 via the support portion 135. Yes. The converter stator 132 has the same structure as the second movable element 32 in the embodiment, and is fixed to the base 1 so that the longitudinal direction thereof is substantially the same as the moving direction converter slide rail 134. .

第２可動子１３３は、例えば、変換機用固定子１３２及び第１可動子３１夫々が有する磁極対の単位長さΔＬ当たりの個数１４及び６の差分となる８個の強磁性の磁性体を等間隔に長手方向に沿って保持している。
より一般的には、前記長手方向に沿って第１可動子３１に配された磁極対の単位長さΔＬ当たり個数がｐｈ、前記長手方向に沿って変換機用固定子１３２に配された磁極対の単位長さΔＬ当たり個数がｐｌ、前記長手方向に沿って第２可動子１３３に配された磁性体の単位長さΔＬ当たり個数がｎｓである場合、下記式（３）を満たすように各磁極対及び磁性体の個数を合わせる。
ｎｓ＝｜ｐｌ−ｐｈ｜…（３） For example, the second mover 133 is formed of eight ferromagnetic magnetic bodies having a difference of 14 and 6 per unit length ΔL of the magnetic pole pairs of the converter stator 132 and the first mover 31. It is held along the longitudinal direction at equal intervals.
More generally, the number of magnetic pole pairs arranged on the first mover 31 along the longitudinal direction per unit length ΔL is ph, and the magnetic poles arranged on the converter stator 132 along the longitudinal direction. When the number of pairs per unit length ΔL is pl and the number of magnetic bodies arranged on the second movable element 133 along the longitudinal direction is ns, the following formula (3) is satisfied. The number of each magnetic pole pair and magnetic material is matched.
ns = | pl−ph | (3)

変形例にあっては、実施の形態と同様、可動部２２が加速又は減速した場合であっても、リニア駆動装置内で発生する力が互いに相殺する。従って、必要以上に装置を重く、堅牢にしたり、また別個のアクチュエータを設けることなく、可動部２２の加速又は減速による反作用力を系内で吸収することができる。 In the modification, as in the embodiment, even when the movable portion 22 is accelerated or decelerated, the forces generated in the linear drive device cancel each other. Therefore, the reaction force due to acceleration or deceleration of the movable portion 22 can be absorbed in the system without making the device heavier and more robust than necessary, or without providing a separate actuator.

なお、上述の変形例では、実施の形態における第２可動子３２を固定子として構成した場合を説明したが、実施の形態における第１可動子３１を変換機用固定子として、可動部２２を第２可動子３２又は中間ヨーク３３に連結するように構成しても良い。この場合、例えば、第２可動子は、変換機用固定子及び第１可動子夫々が有する磁極対の単位長さΔＬ当たりの個数６及び１４の差分となる８個の強磁性の磁性体を等間隔に長手方向に沿って保持している。
また、本実施の形態では、リニアモータ２及び移動方向変換機３の長手方向を略水平にして使用する例を説明したが、リニアモータ２及び移動方向変換機３の長手方向を鉛直にして使用しても良い。この場合も、上述の実施の形態と同様、可動部２２の加速又は減速による反作用力を系内で吸収し、リニアモータ２の駆動による震動を抑えることができる等の効果を奏する。 In the above-described modification, the case where the second movable element 32 in the embodiment is configured as a stator has been described. However, the movable part 22 is configured by using the first movable element 31 in the embodiment as a stator for a converter. You may comprise so that it may connect with the 2nd needle | mover 32 or the intermediate yoke 33. FIG. In this case, for example, the second mover includes eight ferromagnetic magnetic bodies having a difference of 6 and 14 per unit length ΔL of the magnetic pole pairs of the converter stator and the first mover. It is held along the longitudinal direction at equal intervals.
In the present embodiment, the example in which the longitudinal direction of the linear motor 2 and the moving direction changer 3 is used in a substantially horizontal direction has been described. You may do it. Also in this case, as in the above-described embodiment, the reaction force due to the acceleration or deceleration of the movable portion 22 is absorbed in the system, and the vibration caused by driving the linear motor 2 can be suppressed.

今回開示された実施の形態はすべての点で例示であって、制限的なものでは無いと考えられるべきである。本発明の範囲は、上記した意味では無く、特許請求の範囲によって示され、特許請求の範囲と均等の意味及び範囲内でのすべての変更が含まれることが意図される。 The embodiments disclosed herein are illustrative in all respects and should not be considered as restrictive. The scope of the present invention is defined not by the above-mentioned meaning but by the scope of the claims, and is intended to include all modifications within the meaning and scope equivalent to the scope of the claims.

１ベース
２リニアモータ
３，１０３移動方向変換機
４連結部
５負荷
２１固定子
２２可動部
２３スライドレール
２４支持部
２５可動ステージ
３１第１可動子
３２第２可動子
３３中間ヨーク
３４移動方向変換機用スライドレール
３５支持部
３６保持部 DESCRIPTION OF SYMBOLS 1 Base 2 Linear motor 3,103 Movement direction changer 4 Connection part 5 Load 21 Stator 22 Movable part 23 Slide rail 24 Support part 25 Movable stage 31 1st mover 32 2nd mover 33 Intermediate yoke 34 Movement direction change machine Slide rail 35 Supporting part 36 Holding part

Claims

A linear motor having a moving part that moves linearly;
A moving direction having a first mover that is connected to the movable portion of the linear motor and linearly moves integrally with the movable portion, and a second mover that moves linearly in the opposite direction with respect to the first mover. A converter,
The first movable element, the second movable element or the movable part of the linear motor is provided in the movable part of the linear motor, and when the linear motor is driven, the first movable element and the second movable element of the moving direction changer With a weight to balance the working reaction force ,
The moving direction changer is
An intermediate yoke having a magnetic body disposed at substantially equal intervals along the moving direction of the movable portion of the linear motor;
The first movable element and the second movable element are
A linear drive device comprising a plurality of magnetic pole pairs facing each other via the intermediate yoke and arranged at substantially equal intervals along a moving direction of the movable portion of the linear motor .

A load connected to the movable part of the first movable element, the second movable element or the linear motor;
The mass of the weight, the linear motor, the moving direction changer, and the load, and the ratio of the movement amount of the first mover and the second mover by the move direction changer satisfy the following expression. The linear drive device according to claim 1.
Ma / Mb = α
However,
Ma: wherein the moving direction converter first movable section of the mass Mb: the mass of the second movable section of the moving direction converter alpha: the amount of movement of the second movable element with respect to the amount of movement of the first movable element Ratio of

A linear motor having a moving part that moves linearly;
A moving direction having a first mover that is connected to the movable portion of the linear motor and linearly moves integrally with the movable portion, and a second mover that moves linearly in the opposite direction with respect to the first mover. A converter,
The first movable element, the second movable element or the movable part of the linear motor is provided in the movable part of the linear motor, and when the linear motor is driven, the first movable element and the second movable element of the moving direction changer A weight attaching portion to which a weight for balancing the reaction force to be applied is attached ;
The moving direction changer is
An intermediate yoke having a magnetic body disposed at substantially equal intervals along the moving direction of the movable portion of the linear motor;
The first movable element and the second movable element are
A linear drive device comprising a plurality of magnetic pole pairs facing each other via the intermediate yoke and arranged at substantially equal intervals along a moving direction of the movable portion of the linear motor .

The linear drive device according to claim 3, further comprising a weight attached to the weight attaching portion.

A linear motor having a moving part that moves linearly;
A moving direction having a first mover that is connected to the movable portion of the linear motor and linearly moves integrally with the movable portion, and a second mover that moves linearly in the opposite direction with respect to the first mover. A converter,
A load connected to a movable part of the first movable element, the second movable element or the linear motor ;
With
The moving direction changer is
An intermediate yoke having a magnetic body disposed at substantially equal intervals along the moving direction of the movable portion of the linear motor;
The first movable element and the second movable element are
Opposing through the intermediate yoke, and having a plurality of magnetic pole pairs arranged at substantially equal intervals along the moving direction of the movable portion of the linear motor,
The linear motor, the mass of the moving direction changer and the load, and the movement amount ratio of the first mover and the second mover by the moving direction changer satisfy the following formula: .
Ma / Mb = α
However,
Ma: wherein the moving direction converter first movable section of the mass Mb: the mass of the second movable section of the moving direction converter alpha: the amount of movement of the second movable element with respect to the amount of movement of the first movable element Ratio of

The number of the magnetic body per unit length in front Symbol moving direction, and characterized in that are set to be the sum of the number of the plurality of magnetic pole pairs of people the first mover and the second mover husband has The linear drive device according to any one of claims 1 to 5.

  A linear motor having a moving part that moves linearly;
  A moving direction having a first mover that is connected to the movable portion of the linear motor and linearly moves integrally with the movable portion, and a second mover that moves linearly in the opposite direction with respect to the first mover. A converter,
  The first movable element, the second movable element or the movable part of the linear motor is provided in the movable part of the linear motor, and when the linear motor is driven, the first movable element and the second movable element of the moving direction changer A weight that balances the working reaction force
  With
  The moving direction changer is
  Comprising a stator having magnetic pole pairs arranged at substantially equal intervals along the moving direction of the movable part of the linear motor;
  The first mover (or the second mover) is
  Opposing the stator, and having a plurality of magnetic bodies arranged at substantially equal intervals along the moving direction of the movable portion of the linear motor,
  The second mover (or the first mover) is
  It has a pair of magnetic poles facing the stator via the first mover (or the second mover) and arranged at substantially equal intervals along the moving direction of the movable part of the linear motor. A linear drive device.

  A load connected to the movable part of the first movable element, the second movable element or the linear motor;
  The mass of the weight, the linear motor, the moving direction changer, and the load, and the ratio of the movement amounts of the first mover and the second mover by the move direction changer satisfy the following expression.
  The linear drive device according to claim 7.
  Ma / Mb = α
  However,
  Ma: Mass on the first mover side of the moving direction changer
  Mb: mass on the second mover side of the moving direction changer
  α: Ratio of the moving amount of the second mover to the moving amount of the first mover

  A linear motor having a moving part that moves linearly;
  A moving direction having a first mover that is connected to the movable portion of the linear motor and linearly moves integrally with the movable portion, and a second mover that moves linearly in the opposite direction with respect to the first mover. A converter,
  The first movable element, the second movable element or the movable part of the linear motor is provided in the movable part of the linear motor, and when the linear motor is driven, the first movable element and the second movable element of the moving direction changer A weight mounting portion to which a weight for balancing the reaction force to work is attached;
  With
  The moving direction changer is
  Comprising a stator having magnetic pole pairs arranged at substantially equal intervals along the moving direction of the movable part of the linear motor;
  The first mover (or the second mover) is
  Opposing the stator, and having a plurality of magnetic bodies arranged at substantially equal intervals along the moving direction of the movable portion of the linear motor,
  The second mover (or the first mover) is
  It has a pair of magnetic poles facing the stator via the first mover (or the second mover) and arranged at substantially equal intervals along the moving direction of the movable part of the linear motor. A linear drive device.

A weight attached to the weight attaching portion is provided.
The linear drive device according to claim 9.

  A linear motor having a moving part that moves linearly;
  A moving direction having a first mover that is connected to the movable portion of the linear motor and linearly moves integrally with the movable portion, and a second mover that moves linearly in the opposite direction with respect to the first mover. A converter,
  A load connected to a movable part of the first movable element, the second movable element or the linear motor;
  With
  The moving direction changer is
  Comprising a stator having magnetic pole pairs arranged at substantially equal intervals along the moving direction of the movable part of the linear motor;
  The first mover (or the second mover) is
  Opposing the stator, and having a plurality of magnetic bodies arranged at substantially equal intervals along the moving direction of the movable portion of the linear motor,
  The second mover (or the first mover) is
  It has a pair of magnetic poles facing the stator via the first mover (or the second mover) and arranged at substantially equal intervals along the moving direction of the movable part of the linear motor. ,
  The mass of the linear motor, the moving direction changer and the load, and the ratio of the moving amounts of the first mover and the second mover by the moving direction changer satisfy the following equation:
  A linear drive device characterized by that.
  Ma / Mb = α
  However,
  Ma: Mass on the first mover side of the moving direction changer
  Mb: mass on the second mover side of the moving direction changer
  α: Ratio of the moving amount of the second mover to the moving amount of the first mover

The number of the magnetic body per unit length in front Symbol moving direction, and the second movable element (or the first movable element), and the stator and the difference between the number of said plurality of magnetic pole pairs, each of which has linear drive device according to any one of claims 7 to 11, characterized in that are set to be.