JP5743565B2 - Rolling bearing surface inspection equipment - Google Patents

Description

  The present invention relates to a surface inspection apparatus for inspecting the polished finish of a bearing ring in a rolling bearing.

  If the surface polishing finish of the race rings such as the outer ring and the inner ring in the rolling bearing is insufficient and there is a defect or the like, abnormal noise and vibration are generated when the bearing is assembled and rotated. When such a defective bearing is operated, there is a high possibility that it will be worn or broken in a short time. Usually, even after the rolling elements are assembled to the race, the inspection is finally performed, so there is no risk that such a bearing will be shipped, but it turned out to be a defective product after being assembled as a bearing. Then, all parts are wasted. For this reason, it is desirable to repel defective products in the state of single parts before assembly.

  The conventional method for inspecting single parts such as outer rings and inner rings in rolling bearings is to contact the sensor on the inner surface of the rotating outer ring or the outer surface of the inner ring to detect minute irregularities. It was something to do.

  According to such a contact-type inspection method, the surface of the component is easily scratched, and conversely, according to the sensor having a flexible contact surface that is not scratched, the wear of the contact portion on the sensor side is accelerated, and the sensor Since the contact part needs to be frequently exchanged, maintenance takes a lot of trouble. In addition, since it is difficult to inspect while scanning the entire surface, there is a possibility that a defect is overlooked.

  As a non-contact type surface state inspection method that can eliminate the above-described inconveniences, Patent Documents 1 and 2 describe a technique for inspecting the surface of a bearing ring using an ultrasonic flaw detector.

JP-A-11-337530 JP 2002-317821 A

  According to inspection techniques using ultrasonic echoes such as those described in Patent Documents 1 and 2, it is possible to detect defects on the entire surface of the raceway. There is a problem that not only the inspection process cannot be simplified, such as being complicated and large and inspecting in water, but also the manufacturing cost of the apparatus becomes very expensive.

  Moreover, according to the prior art including the inspection techniques described in Patent Documents 1 and 2, the quality of the raceway surface finish cannot be easily and automatically determined.

  Accordingly, an object of the present invention is to provide a surface inspection device for a rolling bearing that can easily and automatically determine the quality of the raceway surface finish.

  Another object of the present invention is to provide a rolling bearing surface inspection apparatus that is low in manufacturing cost, simple in inspection processing, and capable of high-precision inspection.

  According to the present invention, the laser beam is irradiated on the surface of the raceway to be inspected of the rolling bearing, and the laser beam transmitting / receiving unit that receives the laser beam reflected on the surface of the raceway ring, and the laser beam transmitter / receiver receives the laser beam. A photoelectric conversion means for outputting an electrical signal corresponding to the intensity of the reflected laser light, a circumferential scanning means for performing circumferential scanning for rotating at least a laser light irradiation portion of the laser light transmitting / receiving means coaxially with the axis of the raceway ring, and a laser Axial scanning means for performing axial scanning that moves the light transmitting / receiving means along the axis of the raceway ring, and signals of electrical signals output from the photoelectric conversion means at each circumferential position when the circumferential scanning is performed A maximum value acquisition means for acquiring the maximum value in the axial direction of the output, a halation number counting means for counting the number of maximum values corresponding to the halation (shiny portion) state among the acquired maximum values, and a halley ® emission quantity in accordance with the counted halation number by the counting means, the surface inspection apparatus of a rolling bearing and a determination means for determining the quality of the bearing ring is provided.

  The laser beam reflected by the surface of the bearing ring of the rolling bearing is received and photoelectrically converted into an electric signal. At that time, circumferential scanning is performed by rotating the laser beam irradiating unit coaxially with the axis of the track ring, and axial scanning is performed by moving the laser beam transmitting / receiving means along the axis of the track ring. At each position in the circumferential direction when the circumferential scanning is performed, the maximum value of the signal output in the axial direction is acquired, and among the maximum values, the number of maximum values corresponding to the halation state is counted. The quality of the race is determined according to the counted number of halation. As described above, since the laser light irradiation and the reflected light reception are performed while performing the circumferential scanning and the axial scanning, it is possible to easily and accurately determine the quality of the finished surface of the raceway. it can. In addition, according to the configuration for scanning with such laser light, the manufacturing cost of the inspection apparatus can be reduced. In particular, according to the present invention, whether or not there is a portion of the halation state over many regions in the circumferential direction is determined by the number of maximum values corresponding to the halation state, so that the quality is determined. It is possible to easily and automatically determine the quality of the ring surface finish with high accuracy.

  The determination means is preferably means for determining the quality of the raceway from the ratio of the number of halation to the number of circumferential positions. In this case, it is more preferable that the determination means is a means for determining that the race is non-defective when the ratio is equal to or greater than a predetermined threshold.

  It is also preferable that the laser beam irradiation unit of the laser beam transmitting / receiving unit is configured to irradiate the laser beam substantially perpendicularly to the surface of the raceway ring.

  The track ring is the outer ring, and the laser beam transmitting / receiving means irradiates the inner ring surface of the outer ring with the laser beam by rotating the inner side of the outer ring around the axis of the outer ring, and the inner ring surface reflects the laser beam. It is also preferable to include a laser beam receiving unit that receives the laser beam.

  The track ring is an inner ring, and the laser beam transmitting / receiving means irradiates the outer ring surface of the inner ring with laser light by rotating the outer side of the inner ring about the axis of the inner ring, and the laser reflected by the outer ring surface It is also preferable to include a laser beam receiving unit that receives light.

  According to the present invention, it is possible to easily and accurately determine the quality of the finish on the entire surface of the raceway. In addition, the manufacturing cost of the inspection apparatus can be reduced. Furthermore, it is possible to easily and automatically determine the quality of the surface finish of the raceway with high accuracy.

It is a block diagram which shows roughly the structure of one Embodiment of the surface inspection apparatus of the rolling bearing in this invention. It is sectional drawing which shows schematically the structure of the main body in the surface inspection apparatus of FIG. It is a block diagram which shows roughly the electrical structure of the process control apparatus in the surface inspection apparatus of FIG. It is a flowchart explaining the control processing content of the processing control apparatus of FIG. It is a figure explaining the test | inspection range of the outer ring | wheel test | inspected by the surface inspection apparatus of FIG. It is a figure showing the test | inspection image of the outer ring | wheel inspected by the surface inspection apparatus of FIG. 1, (A) has shown the test | inspection image of a non-defective product, and (B) has shown the test image of inferior goods, respectively. It is a figure explaining the reflective condition of the laser beam in the outer ring | wheel inspected by the surface inspection apparatus of FIG. 1, (A) shows the case of a non-defective product, and (B) shows the case of a defective product. In the surface inspection apparatus of FIG. 1, it is a figure showing the maximum value of the reflected light intensity data in each circumferential direction position, (A) shows the circumferential direction position on a horizontal axis about a good product, (B) is (A). When (C) shows the position in the circumferential direction on the horizontal axis for defective products, (D) shows the data of (C) in ascending order of maximum values. Each case is shown sorted. It is a block diagram which shows roughly the structure of other embodiment of the surface inspection apparatus of the rolling bearing in this invention.

  FIG. 1 schematically shows the configuration of an embodiment of a rolling bearing surface inspection apparatus according to the present invention, and FIG. 2 schematically shows the configuration of the main body of the surface inspection apparatus of FIG. In addition, this embodiment is related with the surface inspection apparatus which test | inspects the finishing state of the inner surface of the outer ring | wheel of the bearing rings of a rolling bearing. Further, in the following description, “vertical direction” means the axial direction of the outer ring when the outer ring to be inspected is mounted, and this is also the axial direction of the hollow rotating member. “Downward and downward” means the distal direction of the hollow rotating member in this axial direction (downward in FIGS. 1 and 2), and “Upward and upward” means the distal end of the hollow rotational member in this axial direction. Means the opposite direction (upward in FIGS. 1 and 2). The “horizontal direction” means a direction perpendicular to the axial direction.

  In these drawings, 10 is a main body of the surface inspection apparatus, 11 is a pedestal which is the base of the surface inspection apparatus, and 12 is fixed to one end of the pedestal 11 and vertically rises upward from the pedestal 11. 13 is a lifting device that can be linearly slidably driven along the column 12, 14 is an arm that extends horizontally from the lifting device 13, and 15 is a body 10 at the tip of the arm 14. An attachment member for fixing is shown.

  The main body 10 of the surface inspection apparatus includes a light source unit 16, a motor 17 connected to the light source unit 16 via an attachment member 15, and a hollow rotating member 18 that is a rotation shaft of the motor 17 in the present embodiment. ing. The hollow rotating member 18 is configured to rotate at a high speed (12000 rpm or more, for example, 15000 rpm) when the motor 17 is driven, and to irradiate the inner surface of the outer ring 19 that is an object to be inspected from the tip thereof. Has been.

  The surface inspection apparatus further includes a photoelectric converter 20 that photoelectrically converts the reflected laser light reflected on the inner surface of the outer ring 19 and outputs an electric signal, and an inner side of the outer ring 19 from the electric signal from the photoelectric converter 20. A processing control device 21 that determines the surface finish state of the surface and controls the operation of the motor 17, the lifting device 13 and the laser light source is provided.

  Hereinafter, the configuration of the main body 10 of the surface inspection apparatus will be described in detail.

  As enlarged in FIG. 2, the light source unit 16 is provided with a lens 22 that condenses laser light generated from a laser light source (not shown) coaxially with the hollow rotating member 18. Below this lens 22, a hollow tube material 23 is provided coaxially with the hollow rotary member 18. In the tube material 23, a first irradiation light guide path 23a, which is a hollow path for guiding laser light (laser beam) collected by the lens 22 downward, is formed. Further, a hollow rotating member 18 of the motor 17 is provided below the tube material 23 via a gap 24. The hollow rotating member 18 is guided into the hollow rotating member 18 via a first light guide 23a for irradiation light. A second light guide 18a for irradiation light, which is a hollow path that receives the laser beam through the gap 24 and guides it downward, is formed.

  A part of the peripheral surface of the distal end portion of the hollow rotating member 18 is cut off, and the laser light guided through the second irradiation light guide path 18a is reflected in the cut off portion in the horizontal direction. A plane mirror 25 is provided. The flat mirror 25 is attached such that the reflection surface forms an angle of 45 ° with respect to the axial direction, and is configured to rotate at a high speed together with the hollow rotating member 18. As a result, the laser beam reflected by the plane mirror 25 can be perpendicularly incident on the inner surface of the outer ring 19 mounted coaxially with the hollow rotary member 18. As the flat mirror 25 rotates at high speed about the axis of the outer ring 19, scanning in the circumferential direction is executed.

  In the hollow rotating member 18, a plurality of optical fibers are provided around the second irradiation light guide path 18 a, and these optical fibers are reflected by the inner surface of the outer ring 19 and reflected by the plane mirror 25. The first reflected light guide path 18b that guides the reflected laser light is configured. The plurality of optical fibers constituting the first reflected light guide path 18b are arranged concentrically and in a multilayer shape along the inner wall of the hollow rotating member 18, and are fixed by an adhesive.

  A plurality of optical fibers are provided around the tube material 23, and the plurality of optical fibers transmits the reflected laser beams from the plurality of optical fibers constituting the first reflected light guide path 18 b through the gap 24. The second reflected light guide path 23b is configured to be received. The plurality of optical fibers constituting the second light guide path for reflected light 23b are arranged concentrically around the tube material 23 in the lower part and fixed in a tubular shape as a whole, and are fixed with an adhesive material, and in the upper part, they are collected in a tubular shape. Thus, an optical fiber bundle 26 is formed. The optical fiber bundle 26 is pulled out from the main body 10 and its end is connected to the photoelectric converter 20 (FIG. 1). As a result, the laser light reflected by the inner surface of the outer ring 19 is reflected by the flat mirror 25 and guided by the first reflected light guide 18b, the second reflected light guide 23b, and the optical fiber bundle 26. Is incident on the photoelectric converter 20. The photoelectric converter 20 outputs an analog electric signal corresponding to the light intensity of the incident reflected laser light.

  A scanning in the axial direction is executed by controlling the elevating device 13 to linearly move the main body 10 upward or downward at a constant speed.

  FIG. 3 schematically shows an electrical configuration of the processing control device 21 in the surface inspection apparatus of the present embodiment, FIG. 4 explains the control processing contents of the processing control device 21, and FIG. 5 shows the present embodiment. The inspection range of the outer ring 19 inspected by the surface inspection apparatus of the embodiment will be described.

  As illustrated in FIG. 3, the processing control device 21 includes an A / D conversion unit 21 a that converts an analog electric signal output from the photoelectric converter 20 into a digital signal at a set sampling frequency (for example, ˜800 kHz); A processing unit 21b by a digital computer connected to the A / D conversion unit 21a, a storage unit 21c connected to the processing unit 21b, a display unit 21d connected to the processing unit 21b, and an output connected to the processing unit 21b The port 21e, the drive circuit 21f for the lifting device 13 connected to the output port 21e, the drive circuit 21g for the motor 17 connected to the output port 21e, and the light source unit 16 connected to the output port 21e Drive circuit 21h.

  Next, the surface inspection process will be described in detail.

  As shown in FIG. 4, first, parameters for inspection are set (step S1). The parameters include (1) setting of the axial inspection range on the inner surface of the outer ring 19 as shown in FIG. 5, (2) setting of the number of data in the circumferential scanning, and (3) data in the scanning in the axial direction. Setting the number, (4) setting a threshold value for recognizing halation (bright part), (5) setting a determination threshold value for the halation rate HR for non-defective products and defective products, and the like.

  Next, the light source unit 16 is turned on to start laser light irradiation, the motor 17 is driven to rotate the hollow rotating member 18 at a high speed, and the lifting device 13 is driven to move the main body 10 upward or downward. It moves continuously or intermittently in the direction (step S2).

  Thereby, the condensed laser light is reflected by the plane mirror 25 through the first irradiation light guide path 23 a and the second irradiation light guide path 18 a in the hollow rotating member 18, and inside the outer ring 19. Incident perpendicular to the surface. The laser beam specularly reflected by the inner surface of the outer ring 19 is reflected by the flat mirror 25 and guided by the first reflected light guide path 18b, the second reflected light guide path 23b, and the optical fiber bundle 26. The light enters the photoelectric converter 20. At that time, the motor 17 rotates the flat mirror 25 together with the hollow rotating member 18 around the axis of the outer ring 19 to scan in the circumferential direction, and the lifting / lowering device 13 causes the main body 10 to be continuously or intermittently at a constant speed. Thus, scanning in the axial direction is performed by linearly moving upward or downward.

  By acquiring an electric signal obtained from the photoelectric converter 20 via the A / D converter 21a, digital reflected light intensity data corresponding to the light intensity of the reflected laser light in the circumferential and axial scans is acquired ( Step S3). In this case, the sampling frequency is selected according to the number of circumferential data and the number of axial data set as parameters. For example, when the number of set data in the circumferential direction is 940, the frequency is set to a frequency at which sampling is performed 940 times per rotation, and 940 reflected light intensity data are acquired per rotation. Further, assuming that the number of data in the axial direction is 100, the frequency is set to a frequency at which sampling is performed 100 times while moving in the inspection region, and 100 reflected light intensity data are acquired by one axial scanning. . Therefore, when the number of data is set as described above, 100 × 940 pieces of reflected light intensity data are acquired by one scanning process.

  Next, the acquired reflected light intensity data is stored in the storage unit 21c in association with the circumferential position in the circumferential scanning and the axial position in the axial scanning (step S4). In the above-described example, 100 reflected light intensity data obtained by the axial scanning are stored in the storage unit 21c for every 940 circumferential positions. The circumferential position may be detected by using a rotation angle sensor such as an encoder by setting a rotation reference position of the motor 17 in advance and obtaining the current position from the rotation angle. The axial position may be detected by using a position sensor by setting a movement reference position of the lifting device 13 in advance and obtaining the current position from the movement distance.

  Next, for every 940 circumferential positions, all reflected light intensity data obtained by scanning in the axial direction is read from the storage unit 21c, and the maximum value of the read reflected light intensity data is calculated. The maximum value of the 940 reflected light intensity data obtained by calculating for every 940 circumferential positions is stored in the storage unit 21c for each circumferential position (step S5).

  Next, the stored maximum value of the reflected light intensity data for each circumferential position is read from the storage unit 21c, and the maximum value of the read reflected light intensity data and the threshold value (a halation state) for recognizing the set halation. And a value lower than “255” defined in the present embodiment (for example, “250”), and the number of maximum values of reflected light intensity data that is equal to or greater than the threshold is counted (step S6).

  Using the number of reflected light intensity data that is greater than or equal to the threshold value that is recognized as halation, the halation rate HR is calculated as HR = (maximum of reflected light intensity data that is greater than or equal to the threshold value in the circumferential direction). (Number of values) / (number of maximum values of reflected light intensity data in the circumferential direction) = (number of maximum values of reflected light intensity data equal to or greater than a threshold value in the circumferential direction) / 940 (step S7).

  Next, the calculated halation rate HR is compared with a set discrimination threshold, for example, 50%, and it is discriminated whether the halation rate HR exceeds the discrimination threshold (step S8). If it exceeds (in the case of YES), it is determined that the outer ring 19 is a non-defective product and a message to that effect is displayed (step S9). When it does not exceed (in the case of NO), it is determined that the outer ring 19 is a defective product and that effect is displayed on the display unit 21d (step S10).

  FIG. 6 shows an inspection image of the outer ring inspected by the surface inspection apparatus of the present embodiment. In the figure, the horizontal direction corresponds to the circumferential direction, and the vertical direction corresponds to the axial direction. The reflected light intensity signal at each circumferential position and axial position is expressed in light and dark (the brighter the reflected light intensity is). FIG. 9A shows a non-defective inspection image, and FIG. 10B shows a defective inspection image.

  As shown in FIG. 6A, in the case of a good outer ring 19, the center of the inspection range (center in the axial direction) is remarkably bright over the entire circumferential direction, and this brightness is hardly interrupted. That is, in the case of a non-defective product, the center of the inspection range is in a halation state over the entire circumferential direction. On the other hand, as shown in FIG. 5B, in the case of the defective outer ring 19 ′, the center of the inspection range (center in the axial direction) is darker in the circumferential direction than in the case of the non-defective product, and the circumferential direction The whole area is not bright. That is, in the case of a defective product, there is a halation portion only in a part in the circumferential direction.

  This difference is attributed to the following characteristics in outer ring polishing. FIG. 7 illustrates the reflection state of the laser beam on the outer ring inspected by the surface inspection apparatus of the present embodiment. In the case of a good outer ring 19 as shown in FIG. 6A, the inner surface is polished very finely, so the laser beam irradiated perpendicularly to the axis of the outer ring is accurately reflected regularly on the curved surface of the track surface. Therefore, the reflected laser light hardly returns to the light receiving unit at the same position as the irradiation unit. For this reason, the reflected laser beam does not return on most of the surface of the orbit, so that it becomes dark. However, since the irradiated laser light is regularly reflected at the center in the axial direction of the orbital surface, most of the irradiated light returns to the light receiving portion at the same position as the irradiated portion, causing a halation state. This halation state occurs continuously without interruption throughout the entire circumferential direction. On the other hand, in the case of the defective outer ring 19 ′ as shown in FIG. 5B, since the polishing finish is not sufficient, the surface of the raceway is rough, and any portion of the raceway surface is irradiated with a certain amount of reflection. Only the light returns to the light receiving section. For this reason, the halation state occurs only in a part of the circumferential direction.

  In the present embodiment, the quality of the polishing finish on the inner surface of the outer ring is determined using the above characteristics in the outer ring polishing.

  FIG. 8 is a diagram showing the maximum value of reflected light intensity data at each circumferential position in the surface inspection apparatus of the present embodiment. In the same figure, (A) shows the maximum value of the reflected light intensity data in the circumferential direction on the horizontal axis and the vertical axis on the vertical axis, and (B) shows the data in (A) in ascending order of the maximum value. When the horizontal axis represents the number of data in the circumferential direction, and the vertical axis represents the maximum value of reflected light intensity data in the axial direction, (C) indicates the circumferential position on the horizontal axis and the vertical axis on the vertical axis for defective products. In (D), the data of (C) is rearranged in order of increasing maximum value, the horizontal axis represents the number of data in the circumferential direction, and the vertical axis represents the reflected light intensity in the axial direction. Each case represents the maximum value of the data.

  As shown in FIG. 5A, in the case of a non-defective product, the maximum value of the reflected light intensity data in the axial direction is “255” that defines the halation state at almost all positions in the circumferential direction. As shown in FIG. 5B, the number is, for example, 780 or more. For this reason, the halation rate HR is HR ≧ 780 / 940≈82.9%. On the other hand, as shown in FIG. 6C, in the case of a defective product, the maximum value of reflected light intensity data in the axial direction is less than “255” which is a halation state at most positions in the circumferential direction. As shown in (D), the number is 90 or less, for example. For this reason, the halation rate HR is HR ≦ 90 / 940≈9.6%. As a result, if the threshold value of non-defective products and defective products having a halation rate HR is set to 50%, the non-defective products and defective products can be reliably identified. Incidentally, the correct answer rate when the non-defective product and the defective product are determined according to the present embodiment is merely an example, but the non-defective product is 95%, the defective product is 83%, and the total is 89%.

  As described above, in the present embodiment, among the maximum values of the reflected light intensity data in the axial direction, the number of those recognized as being in the halation state in the circumferential direction is counted, and the halation rate HR is obtained from the counted number. Since the halation rate HR is compared with a threshold value to determine whether it is good or bad, it is possible to accurately and easily determine the quality of the outer ring inner surface finish. In addition, since laser light irradiation and reflected light reception are performed while performing circumferential scanning and axial scanning, it is possible to easily and accurately determine the quality of the finish on the entire inner surface of the outer ring. In addition, according to the configuration for scanning with such laser light, the manufacturing cost of the inspection apparatus can be reduced.

  FIG. 9 schematically shows the configuration of another embodiment of the rolling bearing surface inspection apparatus according to the present invention. The present embodiment relates to a surface inspection apparatus that inspects the finished state of the outer surface of an inner ring of rolling bearing raceways. Further, in the following description, “vertical direction” means the axial direction of the inner ring when the inner ring to be inspected is mounted, and this is also the axial direction of the hollow rotating member. “Downward and downward” means the tip direction of the hollow rotating member in this axial direction (downward in FIG. 9), and “Upward and upward” is opposite to the tip of the hollow rotating member in this axial direction. This means the direction (upward in FIG. 9). The “horizontal direction” means a direction perpendicular to the axial direction.

  In the figure, 90 is a main body of the surface inspection apparatus, 91 is a pedestal which is a base of the surface inspection apparatus, 92 is fixed at one end of the lower side to the pedestal 91, and stands vertically upward from the pedestal 91. The supporting column 93 is a lifting device that can be linearly slidably driven along the supporting column 92, the arm 94 extends horizontally from the lifting device 93, and the main body 90 is fixed to the tip of the arm 94. The attachment member for doing is shown, respectively.

  The main body 90 of the surface inspection apparatus includes a light source unit 96 having a laser light source 96a and a condenser lens 96b, a motor 97 provided on the mounting member 95 and connected to the light source unit 96, and a motor in this embodiment. 97 and a hollow rotary member 98 which is a rotary shaft. The hollow rotating member 98 is configured to rotate at a high speed (12000 rpm or more, for example, 15000 rpm) when the motor 97 is driven, and to irradiate the outer surface of the inner ring 99 that is the object to be inspected from the tip portion thereof. Has been.

  The surface inspection apparatus further includes a photoelectric converter 100 that photoelectrically converts the reflected laser light reflected by the outer surface of the inner ring 99 and outputs an electric signal, and an outer side of the inner ring 99 from the electric signal from the photoelectric converter 100. A processing control device 101 is provided for determining the surface finish state of the surface and controlling the operation of the motor 97, the lifting device 93, and the laser light source 96a.

  Hereinafter, the configuration of the main body 90 of the surface inspection apparatus will be described in detail.

  In the light source unit 96, a lens 96b that condenses the laser light generated from the laser light source 96a is provided coaxially with the hollow rotary member 98. In the hollow rotating member 98, there is formed a light guide path 98a for irradiation light that is a hollow path that receives the laser light collected by the lens 96b and guides it downward.

  A part of the peripheral surface of the distal end portion of the hollow rotating member 98 is cut away, and the cut-off portion reflects the laser light guided through the irradiation light guide path 98a in the horizontal direction. A plane mirror 105 is provided. In addition, a disc member 107 is attached to the distal end portion of the hollow rotating member 98 coaxially with the hollow rotating member 98. A second plane mirror 108 that rotates in synchronization with the first plane mirror 105 is provided on the outer periphery of the disk member 107. A truncated cone mirror 109 is disposed coaxially with the hollow rotary member 98 at a fixed position below the second plane mirror 108.

  In the present embodiment, the motor 97 itself has a hollow rotating member 98 that can rotate at a high speed as a rotating shaft, and a light beam from the light source unit 96 can pass through the hollow rotating member 98. In addition, you may comprise so that an independent hollow rotation member may be rotationally driven by the motor arrange | positioned separately.

  The disc member 107 has a certain radius, and is fixed to the end of the hollow rotary member 98 coaxially with the hollow rotary member 98.

  The first plane mirror 105 has a flat mirror surface inclined at an angle of 45 ° with respect to the axial direction of the hollow rotating member 98 and facing away from this axis, and the central axis at the end of the hollow rotating member 98 It is installed on the top. Accordingly, the first plane mirror 105 generates reflected light that travels in the radial direction perpendicular to the axis of the incident light in the axial direction of the hollow rotating member 98.

  The second flat mirror 108 has a flat mirror surface that is inclined at 45 ° with respect to the axial direction of the hollow rotating member 98 and is directed toward the axis, and is horizontal to the axis of the hollow rotating member 98. It arrange | positions and is fixed to the outer peripheral part of the disk member 107 which consists of a plane. The second plane mirror 108 and the first plane mirror 105 have a fixed positional relationship such that their mirror surfaces face each other. Therefore, the second plane mirror 108 is the first plane mirror. Rotates in synchronization with 105. As a result, the horizontal light beam reflected from the first plane mirror 105 enters the second plane mirror 108 and is reflected in a direction parallel to the axial direction of the hollow rotating member 98 to be reflected to the first plane mirror 105. Is incident on a truncated cone mirror 109 provided at a position opposite to that in FIG.

  The truncated cone mirror 109 is disposed coaxially with the hollow rotary member 98 and reflects the light beam from the rotating second plane mirror 108 to the outer surface of the inner ring 99. The angle between the conical surface (slope), which is the light incident surface of the truncated cone mirror 109, and the horizontal surface (bottom surface) is set to an angle close to or larger than 45 °. By using the truncated cone mirror 109, light incident through the first plane mirror 105 and the second plane mirror 108 rotating in synchronization with each other is reflected, and the outer surface of the inner ring 99 is circumferentially surrounded. The outer surface is irradiated with an incident angle close to horizontal while moving.

  The first plane mirror 105, the disk member 107, and the second plane mirror 108 are configured to rotate at a high speed together with the hollow rotary member 98. As a result, scanning in the circumferential direction is executed.

  The light receiving end portions of the plurality of optical fibers 106a are arranged in a ring shape at a position opposite to the second flat mirror 108 with respect to the truncated cone mirror 109, that is, below. The plurality of optical fibers 106 a form a light receiving portion by aligning the respective tip ends in an annular shape at the opening of the head portion 110. Here, in order to make it easy to capture the reflected light, the end face of the light receiving end of the optical fiber 106a is installed so as to face the reflected light. In addition, a plurality of optical fibers 106 a are bundled together and led out from the optical fiber lead-out unit 106, and the other end is connected to the photoelectric converter 100. Thereby, the laser light reflected by the outer surface of the inner ring 99 is guided by the optical fiber 106 a and the optical fiber bundle 106 and is incident on the photoelectric converter 100.

  The light receiving means described above is movable in the axial direction (vertical direction) with respect to the truncated cone mirror 109 together with the head portion 110. Although this axial movement means of the head part 110 is not shown, it is conceivable to use a manual or automatic movement mechanism.

  A scanning in the axial direction is executed by driving and controlling the elevating device 93 to linearly move the main body 90 upward or downward at a constant speed. In addition, as a change aspect, you may comprise the raising / lowering apparatus which moves to the base 91 to an up-down direction, and the inner ring | wheel 99 is raised / lowered and an axial scan is performed.

  The configurations, operations, and effects of the photoelectric converter 100 and the processing control device 101 in the present embodiment are exactly the same as the configurations, operations, and effects of the photoelectric converter 20 and the processing control device 21 in the embodiments of FIGS. Therefore, explanation is omitted.

  1 and FIG. 9 described above, the maximum value in the reflected light intensity data in the axial direction is obtained at each circumferential position, and the number of maximum values equal to or greater than the threshold value that is recognized as halation is counted. A halation rate HR is calculated from the counted number, and a non-defective product or a defective product is determined depending on whether or not the calculated halation rate HR exceeds a discrimination threshold. However, according to the present invention, a good product or a defective product is determined by any method from the number of maximum values recognized as halation without calculating the halation rate HR or determining whether the halation rate HR exceeds the determination threshold. It is also possible to configure the processing control apparatus so as to make this determination.

  Although the embodiment described above relates to a surface inspection device for ball bearings among rolling bearings, the present invention can also be applied to other surface inspection devices for rolling bearings, for example, surface inspection devices for cylindrical roller bearings. Of course.

  All the embodiments described above are illustrative of the present invention and are not intended to be limiting, and the present invention can be implemented in other various modifications and changes. Therefore, the scope of the present invention is defined only by the claims and their equivalents.

DESCRIPTION OF SYMBOLS 10,90 Main body 11,91 Base 12,92 Support | pillar 13,93 Lifting device 14,94 Arm 15,95 Mounting member 16,96 Light source part 17,97 Motor 18,98 Hollow rotating member 18a 2nd light guide for irradiation light 18b First light guide for reflected light 19, 19 'Outer ring 20, 100 Photoelectric converter 21, 101 Processing control device 21a A / D conversion unit 21b Processing unit 21c Storage unit 21d Display unit 21e Output port 21f, 21g, 21h Drive Circuit 22, 96b Lens 23 Tube 23a First light guide for irradiated light 23b Second light guide for reflected light 24 Gap 25 Planar mirror 26 Optical fiber bundle 96a Laser light source 98a Light guide for irradiated light 99 Inner ring 105 First plane Mirror 106 Optical fiber bundle 106a Optical fiber 107 Disk member 108 Second plane mirror Over 109 frustoconical mirror 110 head portion

Claims (4)

Laser light transmitting / receiving means for irradiating the surface of the bearing ring to be inspected of the rolling bearing with laser light and receiving the laser light reflected on the surface of the ring, and reflected laser light received by the laser light transmitting / receiving means Photoelectric conversion means for outputting an electrical signal corresponding to intensity, circumferential scanning means for performing circumferential scanning for rotating at least a laser light irradiation part of the laser light transmitting / receiving means coaxially with an axis of the raceway ring, and the laser light An axial scanning unit that performs axial scanning that moves the transmission / reception unit along the axis of the raceway ring, and an electric power that is output from the photoelectric conversion unit at each position in the circumferential direction when the circumferential scanning is performed. A maximum value acquisition means for acquiring the maximum value in the axial direction of the signal output of the signal, and a halation number counting means for counting the number of maximum values corresponding to the halation state among the acquired maximum values; Depending on the counted halation number by halation number counting means, and a determining means for determining acceptability of said bearing ring,
The determining means is means for determining the quality of the raceway from the ratio of the number of halation to the number of circumferential positions, and when the ratio is equal to or greater than a predetermined threshold, the raceway is a non-defective product. A surface inspection device for a rolling bearing characterized by judging .   The surface inspection apparatus according to claim 1, wherein the laser beam irradiation unit of the laser beam transmitting / receiving unit is configured to irradiate the laser beam substantially perpendicularly to the surface of the raceway ring.   The track ring is an outer ring, and the laser beam transmitting / receiving means irradiates a laser beam on an inner peripheral surface of the outer ring by rotating the inner side of the outer ring about the axis of the outer ring; and The surface inspection apparatus according to claim 1, further comprising a laser beam receiving unit that receives the laser beam reflected by the inner peripheral surface.   The track ring is an inner ring, and the laser beam transmitting / receiving means irradiates a laser beam to the outer circumferential surface of the inner ring by rotating the outer side of the inner ring about the axis of the inner ring; The surface inspection apparatus according to claim 1, further comprising a laser beam receiving unit that receives the laser beam reflected by the surface.

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