JP5737333B2 - Nozzle rotating member - Google Patents

Description

  The present invention relates to, for example, a nozzle rotating member provided in a fluid ejecting apparatus that ejects compressed air and sprays the ejected compressed air onto a workpiece.

  Conventionally, as a kind of fluid ejecting apparatus, various cleaning apparatuses using a compressed fluid have been proposed. For example, Patent Document 1 describes a configuration in which foreign matter attached to a work is removed by a brush roll, while foreign matter attached to the brush roll is removed by spraying a compressed fluid onto the brush roll. Specifically, the compressed fluid is jetted from a hollow portion formed in the shaft portion of the brush roll toward the brush roll around the shaft portion.

  On the other hand, such a configuration for removing foreign matter from a workpiece by contact with a brush roll may be inappropriate depending on the type of workpiece, such as a precise workpiece. On the other hand, as described in Patent Documents 2 and 3, a configuration in which a compressed fluid is directly sprayed on a workpiece to remove foreign matters on the workpiece surface is known. In such a configuration, the nozzle is further rotated in order to efficiently spray the compressed fluid onto the workpiece.

  The configuration described in Patent Document 2 includes a flat rotation target member at the front end position, four air nozzles are arranged at 90 ° pitch intervals at the edge of the rotation target member, and the rotation target member is interposed via a rotary joint. The rotation target member is rotationally driven by the motor.

  The configuration described in Patent Document 3 includes a rotatable ejection unit having a plurality of ejection nozzles that eject fluid. Specifically, the injection is performed such that at least one injection nozzle is oriented in substantially the same direction as the fluid supply path to the injection unit, and at least two injection nozzles rotate the injection unit around the fluid supply path. It arrange | positions along the rotation direction of a part.

JP 2010-99579 A (published on May 6, 2010) JP 2007-330908 A (released on December 27, 2007) JP 2004-334801 A (released on December 9, 2004)

  In the configuration described in Patent Document 2, the rotation target member is rotated by a motor. On the other hand, in the configuration described in Patent Document 3, the ejection unit is rotated around the fluid supply path by ejecting fluid from at least two ejection nozzles. Therefore, the configuration described in Patent Document 3 does not require a rotary drive source such as a motor, and is preferable in terms of cost reduction.

  However, in the configuration described in Patent Document 3, fluid is supplied to two injection nozzles that rotate the injection unit by a fluid supply path that is simply branched from the fluid supply path to the injection unit. For this reason, an injection part cannot be rotated efficiently.

  Accordingly, an object of the present invention is to provide a nozzle rotating member that can be efficiently rotated by the fluid supplied to the nozzle.

  In order to solve the above problem, the nozzle rotating member of the present invention branches from a fluid supply flow path, branches from the fluid supply flow path, a main flow path for supplying the fluid to a fluid main injection port of the nozzle, The fluid supply channel has a fluid intake opening that is open so as to face the fluid flow direction at one end portion, a fluid sub-injection port at the other end portion, and a shaft of rotation from the fluid intake port. A sub-flow path that extends in a direction orthogonal to the fluid, reaches the fluid sub-injection port, and injects the fluid taken in from the fluid intake port from the fluid sub-injection port to give a rotational force. It is characterized by that.

  According to the above configuration, the fluid is supplied to the main fluid ejection port of the nozzle by the main channel branched from the fluid supply channel, and the fluid is ejected from the fluid main ejection port. Therefore, for example, foreign matter on the surface of the workpiece can be removed by the fluid ejected from the fluid main ejection port.

  The nozzle rotating member rotates when the fluid is ejected from the fluid sub-injection port of the sub-channel branched from the fluid supply channel. In this case, the fluid intake port of the sub-flow channel is opened so as to oppose the fluid flow direction in the fluid supply flow channel, so that the fluid can be efficiently taken into the sub-flow channel from the fluid supply flow channel. it can. Thereby, even if the flow rate of the fluid supplied to the fluid supply channel is small, the fluid can be efficiently rotated.

  In the nozzle rotating member, the sub-flow path may include a sub-flow path first flow path that extends from the fluid intake port in a fluid flow direction in the fluid supply flow path.

  According to the above configuration, the sub-flow path has the first sub-flow path extending from the fluid intake port in the direction of fluid flow in the fluid supply flow path, so that the fluid flows in from the fluid intake port. In this case, the resistance can be reduced, the fluid can be taken in efficiently, and the rotation can be performed more efficiently.

  In the nozzle rotating member, the sub flow path may be provided with a rotation speed adjusting means for adjusting the amount of the fluid ejected from the fluid sub ejecting port.

  According to the above configuration, the rotational speed can be adjusted by adjusting the amount of fluid ejected from the fluid sub-injection port by the rotational speed adjusting means. Accordingly, it is possible to adjust the rotation speed of the nozzle rotation member, that is, the nozzle, while maintaining a predetermined amount of the fluid ejected from the nozzle connected to the nozzle rotation member.

  Said nozzle rotation member is good also as a structure arrange | positioned as a nozzle rotation coupling between the said nozzle and the rotation part which can rotate a rotary joint.

  According to the above configuration, the rotary member having the main flow path, the sub flow path, the fluid intake port, and the fluid sub injection port can be manufactured as an independent nozzle rotary joint. It becomes easy to combine with other general-purpose products.

  The nozzle rotating member includes a nozzle main body portion in which the fluid main injection port is formed on one end surface, and a rear pipe portion provided on the other end surface of the nozzle main body portion facing the fluid main injection port. The fluid intake port is opened on an end surface of the rear pipe portion far from the fluid main injection port, and the fluid sub-injection port is formed on a side surface different from the one end surface and the other end surface of the nozzle body portion. It is good also as a structure opened.

  According to said structure, since the subflow path which has the said fluid intake port and the said fluid subinjection port is formed in the nozzle, a nozzle rotation member can be set as a simple and compact structure.

  The nozzle rotating member includes a fixed portion to which a fluid pipe that supplies the fluid is connected, a rotary joint that is rotatable with respect to the fixed portion, and has a rotating portion to which the nozzle is connected; A rotation imparting member formed with a path, and the rotation imparting member is a straight tube, has the fluid intake port at one end, and has the fluid sub-injection port at the other end, It is good also as a structure provided in the said rotary joint in the state in which the edge part by the side of a fluid intake is inserted in the said rotation part, and the state orthogonal to the axial direction of the said rotary joint.

  According to the above configuration, since the straight tubular rotation imparting member is directly provided on the rotary joint, a simple and compact configuration can be achieved.

  The fluid ejecting apparatus of the present invention includes a nozzle including the fluid main ejection port, a rotary joint having a rotatable rotating part, and a rotating member disposed between the nozzle and the rotating part. It is.

  According to said structure, the foreign material on the surface of a workpiece | work can be removed with the fluid injected from the fluid main injection port of a nozzle, for example. Further, the nozzle can be efficiently rotated even when the flow rate of the fluid supplied to the fluid supply channel is small.

  According to the configuration of the present invention, the nozzle rotating member can be efficiently rotated by the fluid supplied to the nozzle.

It is a schematic diagram which shows the structure of the workpiece | work washing apparatus provided with the fluid injection apparatus of embodiment of this invention. FIG. 2 is a side view of the fluid ejecting apparatus illustrated in FIG. 1. 3A is a front view of the fluid ejecting apparatus shown in FIG. 2, and FIG. 3B is a rear view of the rotation imparting member shown in FIG. It is a longitudinal cross-sectional view of the vicinity of the end of the sub-flow channel forming unit shown in FIG. 2 provided with a rotation speed adjusting unit. FIG. 5A is a perspective view showing a compressed air blowing region when the nozzle shown in FIG. 2 does not rotate, and FIG. 5B is a case where the nozzle shown in FIG. 2 rotates. It is a perspective view which shows the blowing area | region of the compressed air by a nozzle. FIG. 4 is a front view of the fluid ejecting apparatus when a speed controller is provided instead of the rotation speed adjusting unit shown in FIG. FIG. 7A is a side view of the rotation imparting member of the fluid ejecting apparatus shown in FIG. 2 provided with a rotation number detection unit, and FIG. 7B is a rear view thereof. FIG. 8A is a side view of the rotation imparting member of the fluid ejecting apparatus shown in FIG. 2 provided with the rotation stop mechanism, and FIG. 8B is a rear view thereof. It is a side view of the rotation provision member of the fluid ejecting apparatus provided with the rotation stop mechanism part different from the rotation stop mechanism part shown in FIG. It is a side view of the rotation provision member of the fluid ejecting apparatus provided with the rotation stop mechanism part further different from the rotation stop mechanism part shown in FIG. It is a perspective view which shows the other example of the subchannel formation part shown to (a) of FIG. 2 and FIG. It is a front view of the fluid injection apparatus of other embodiments of the present invention. It is a longitudinal cross-sectional view near the edge part of the subchannel formation part shown in FIG. (A) of FIG. 14 shows the state of the speed stabilization unit of the sub-flow channel forming unit when the flow rate of the compressed air in the sub-channel third channel shown in FIG. 13 is zero. FIG. 14B is a longitudinal cross-sectional view of the placement portion showing a state of the speed stabilization portion when the flow rate of the compressed air in the sub-passage third flow path is small, and FIG. (C) is a longitudinal cross-sectional view of the said arrangement | positioning part which shows the state of the speed stabilization part in case there are many flow rates of the compressed air of the said 3rd subchannel. It is a longitudinal cross-sectional view of the arrangement | positioning part of the speed stabilization part different from the speed stabilization part shown in FIG. 14 of the subflow-path formation part in a fluid injection apparatus. It is a longitudinal cross-sectional view of the arrangement | positioning part of another speed stabilization part other than the speed stabilization part shown in FIG. 14 of the subflow-path formation part in a fluid injection apparatus. It is a perspective view which shows the nozzle with which the fluid injection apparatus of further another embodiment of this invention is provided. It is a longitudinal cross-sectional view which shows the fluid injection apparatus of further another embodiment of this invention. It is a fragmentary sectional view which shows the structure of the rotation provision member shown in FIG. FIG. 19 is a front view of the fluid ejecting apparatus illustrated in FIG. 18 for explaining a rotation operation by the rotation applying member.

[Embodiment 1]
(Outline of workpiece cleaning equipment)
Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a schematic diagram illustrating a configuration of a workpiece cleaning apparatus including a fluid ejecting apparatus according to an embodiment of the present invention.

  The workpiece cleaning device 1 is a device that removes foreign matters such as dust attached to the workpiece 2 by blowing air onto the workpiece 2. For this purpose, the workpiece cleaning device 1 includes a workpiece support member 11, a dust suction duct 12, a control device 13, a power supply device 14, an air pipe 15, an electromagnetic valve 16, a regulator 17, a mist filter 18, and a fluid ejection device 19. .

  The workpiece support member 11 supports the workpiece 2 in the cleaning operation. The dust suction duct 12 guides foreign matter removed from the surface of the work 2 to a dust suction machine (not shown).

  The electromagnetic valve 16 is provided in the air pipe 15 between the mist filter 18 and the fluid ejection device 19, and opens and closes the flow path of the compressed air (fluid) in the air pipe 15. The control device 13 controls the operation of the electromagnetic valve 16, and the power supply device 14 supplies power to the control device 13 and the electromagnetic valve 16. The regulator 17 adjusts the pressure of compressed air supplied from a compressed air supply source (not shown) to a predetermined pressure. The mist filter 18 removes mist from the air sent from the regulator 17. The fluid ejection device 19 receives supply of compressed air from the air pipe 15, blows the compressed air on the workpiece 2 while rotating, and removes foreign matter on the surface of the workpiece 2.

  The fluid ejection device 19 includes a rotary joint 31, a rotation imparting member (nozzle rotating member) 32, and a nozzle 33 from the upstream side (rear side) to the downstream side (front side) in the flow of compressed air. FIG. 2 is a side view showing the fluid ejecting apparatus 19. FIG. 3A is a front view showing the fluid ejection device 19, and FIG. 3B is a rear view showing the rotation imparting member 32.

(Rotary joint)
As shown in FIG. 2, the rotary joint 31 has a fixed portion 41 and a rotating portion 42 that rotate relatively without leaking fluid, that is, compressed air. Here, the rear part is a fixed part 41, and the front part is a rotating part 42. The air pipe 15 is connected to the rear end portion of the fixed portion 41, and the rear tube portion 51 of the rotation imparting member 32 is connected to the front end portion of the rotating portion 42.

(Rotation imparting member and nozzle)
The rotation imparting member 32 includes a rear tube portion 51, a central tube portion 52, a sub flow channel forming portion 53, a cover portion 54, and a front tube portion 55 from the rear side toward the front side. The rear tube portion 51 is connected to the rotating portion 42 of the rotary joint 31, and the front tube portion 55 is connected to the nozzle 33. The connection between the rear pipe part 51 and the rotary part 42 of the rotary joint 31 is performed, for example, by screwing the rear pipe part 51 into the rotary part 42, and the connection between the front pipe part 55 and the nozzle 33 connects the nozzle 33 to the front pipe. This is done by screwing into the part 55. In addition, the upstream part of the part to which the rear pipe part 51 of the rotation imparting member 32 is connected in the rotary part 42 of the rotary joint 31 is a compressed air supply flow path (fluid supply flow path).

  The rear tube portion 51, the central tube portion 52, and the front tube portion 55 are formed in a coaxial cylindrical shape, and have a main flow channel 56 connected from the rear tube portion 51 to the front tube portion 55 inside. Accordingly, the compressed air sent from the air pipe 15 to the rotation applying member 32 via the rotary joint 31 is supplied to the nozzle 33 by the main flow path 56.

  As shown in FIGS. 3A and 3B, the auxiliary flow path forming portion 53 has, for example, an elongated prismatic shape, and is formed on both sides of the central tube portion 52 in a direction orthogonal to the axis of the central tube portion 52. It is formed to extend. A sub flow channel 57 is formed inside the rear pipe unit 51 and inside the tube portion of the central tube unit 52 and the sub flow channel forming unit 53. In the present embodiment, two sub flow paths 57 are formed corresponding to the number of sub flow path forming portions 53 on both sides of the central tube portion 52.

  Two air intake ports (fluid intake ports) 57a, which are the rear end portions of the two sub flow channels 57, are 180 degrees centered on the main flow channel 56 on the annular rear end surface of the rear pipe portion 51. It is open at the position. Also, the two rotary air injection ports (fluid sub injection ports) 57b, which are the front end portions of the two sub flow channels 57, are opposite to each other at positions near the outer end portions of the sub flow channel forming portions 53. It opens on the side surface (a surface parallel to the axial direction of the central tube portion 52).

  Therefore, each sub flow path 57 branches off from the compressed air supply flow path in the rotating part 42 of the rotary joint 31, and straightly passes through the pipe walls of the rear pipe part 51 and the central pipe part 52 from each air intake port 57a. (Sub-channel first channel 57d). Further, the sub-channel forming portion 53 is extended vertically at the position corresponding to the inner end portion of the sub-channel forming portion 53 by bending outward in the radial direction (sub-channel second channel 57e). Furthermore, it bends at right angles and extends at a position near the outer end of the sub-flow channel forming portion 53 (sub-flow channel third flow channel 57f), and reaches each rotary air injection port 57b.

  The cover portion 54 has a disk shape having a slightly larger diameter than the positions of the outer end portions of both the sub flow channel forming portions 53, and is located on the front surface of the sub flow channel forming portion 53. Therefore, the cover part 54 is a shape with little air resistance.

  The nozzle 33 is long in the front-rear direction and has a flat rectangular parallelepiped shape. As shown in FIG. 3A, a straight slit-shaped cleaning air injection port (fluid main injection port) 33a is formed on the front end surface. Yes.

(Rotation speed adjustment part)
FIG. 4 is a vertical cross-sectional view of the vicinity of the end of the sub-flow channel forming unit 53 in which the rotation speed adjustment unit (rotation speed adjustment means) 34 is provided. As shown in FIG. 4, a rotation speed adjusting unit 34 is provided in the sub flow path forming unit 53 of the rotation applying member 32. The rotational speed adjusting unit 34 includes a female screw part 57c and a columnar speed adjusting screw 58 screwed into the female screw part 57c.

  Specifically, in the secondary flow path forming portion 53, an internal thread portion 57c is provided as an extension from the portion connected to the secondary flow path third flow path 57f in the secondary flow path second flow path 57e of the secondary flow path 57. Is formed. The female screw portion 57 c extends straight from the sub-channel second channel 57 e and opens at the outer end surface of the sub-channel forming portion 53. The rotation speed adjustment unit 34 is configured by attaching a speed adjustment screw 58 to the female screw part 57c.

  That is, in the rotation speed adjustment unit 34, the opening area of the sub flow channel third flow channel 57f on the sub flow channel second flow channel 57e side is adjusted by adjusting the screwing depth of the speed adjustment screw 58 with respect to the female screw portion 57c. Is done. Thereby, the injection amount of the compressed air from the rotary air injection port 57b is adjusted, and the rotation speed of the rotation applying member 32, that is, the nozzle 33 is adjusted.

(Operation of fluid ejection device)
In the above configuration, when the foreign matter on the surface of the workpiece 2 is removed by the workpiece cleaning device 1, the fluid ejection device 19 is arranged as shown in FIG. In this case, the fixed portion 41 of the rotary joint 31 is fixed, and the rotating portion 42, the rotation imparting member 32, and the nozzle 33 of the rotary joint 31 are integrally rotatable.

  In the state of FIG. 1, when compressed air is supplied from the air pipe 15 to the rotary joint 31, a part of this compressed air is taken into the auxiliary flow path 57 from the air intake port 57 a and passes through the auxiliary flow path 57. Then, the air is injected from the rotary air injection port 57b of the rotation applying member 32. Thereby, a rotational force acts on the rotation imparting member 32, and the rotating portion 42, the rotation imparting member 32, and the nozzle 33 of the rotary joint 31 rotate integrally.

  The remaining compressed air supplied from the air pipe 15 to the rotary joint 31 is supplied to the nozzle 33 through the main flow path 56. Thereby, compressed air is injected from the cleaning air injection port 33a of the rotating nozzle 33.

  Therefore, when the nozzle 33 does not rotate, the area where the compressed air is blown by the nozzle 33 is a range corresponding to the cleaning air injection port 33a as shown in FIG. In the apparatus 19, since the nozzle 33 rotates, it becomes a region corresponding to the rotation region of the cleaning air injection port 33a as shown in FIG. Thereby, compressed air can be sprayed on a wide area | region.

  Further, the air intake port 57a of the sub flow channel 57 is opened so as to face the direction in which the compressed air flows in the rotary joint 31, and the sub flow channel first flow channel 57d having the air intake port 57a at the end portion is formed. Since it extends in the direction in which the compressed air flows in the rotary joint 31 (compressed air supply flow path), the compressed air can be easily taken into the sub flow path 57. Thereby, even if it is a case where the flow volume of the compressed air supplied to the fluid injection apparatus 19 from the air piping 15 is small, the rotation provision member 32, ie, the nozzle 33, can be rotated efficiently.

  In addition, the rotation speed of the nozzle 33 can be adjusted by operating the speed adjustment screw 58 of the rotation speed adjustment unit 34 to adjust the flow rate of the compressed air in the sub-flow channel 57. Thereby, the rotation speed of the nozzle 33 can be adjusted while maintaining the injection amount of the compressed air from the nozzle 33 at a predetermined amount.

  In addition, since the fluid ejecting device 19 takes in compressed air from the air pipe 15 via the rotary joint 31, a general-purpose rotary joint 31 can be used, and a structure that is inexpensive and hardly generates foreign matter inside the fluid ejecting device 19. It has become.

  In addition, the fluid ejecting device 19 does not include a rotation-only nozzle and is configured to rotate the nozzle 33 by ejecting compressed air from the rotation applying member 32, and thus has a simple and compact configuration.

  The fluid ejecting device 19 includes a nozzle 33 (cleaning air ejection port 33a) that ejects cleaning (spraying) compressed air, and a sub-flow channel forming unit 53 (rotating air ejection port) that ejects rotating compressed air. 57b), a cover 54 is provided. The cover portion 54 has a disk shape with a radius larger than the distance from the axial center of the central tube portion 52 to the outermost edge portion of the rotary air injection port 57b. Therefore, the foreign matter removed from the workpiece 2 and the foreign matter around the workpiece 2 can be prevented from being scattered around the fluid ejection device 19 by the compressed air ejected from the rotary air ejection port 57b.

  In the present embodiment, the fluid used for the fluid ejection device 19 is described as air. However, the fluid may be a gas other than air or a liquid, and in that case, the fluid can be similarly handled by the configuration of the present embodiment.

(Number of rotating air injection ports)
Moreover, although the fluid ejecting apparatus 19 is configured to include two rotating air ejection ports 57b, the number of the rotating air ejection ports 57b is not particularly limited. For example, when the number of rotations of the nozzle 33 is further increased, the number of the rotary air injection ports 57b may be three or more.

(Another example of the rotation speed adjustment unit)
The rotational speed adjusting unit 34 includes a female screw part 57c formed in the sub-flow channel forming part 53 and a speed adjusting screw 58 screwed into the female screw part 57c. However, instead of this, a configuration may be adopted in which a speed controller (flow rate adjusting joint) is provided in the sub-flow path third flow path 57f having the rotary air injection port 57b. FIG. 6 is a front view showing the fluid ejection device 19 in the case where a speed controller 35 is provided instead of the rotation speed adjustment unit 34 shown in FIG. The speed controller 35 can adjust the flow rate by manually adjusting the diameter of the passage of the compressed air, and is generally commercially available.

(Rotation speed detector)
The fluid ejection device 19 may be configured to detect the rotation speed of the nozzle 33, obtain the rotation speed of the nozzle 33 from the detection result, and adjust the rotation speed and rotation speed of the nozzle 33.

  FIG. 7A is a side view of the rotation imparting member 32 of the fluid ejecting apparatus 19 including the rotation speed detection unit 36, and FIG. 7B is a rear view thereof.

  The rotation speed detector 36 shown in FIGS. 7A and 7B is a well-known one that detects the rotation speed of the nozzle 33 by a rotary encoder method. Specifically, a slit 36a is formed in the cover portion 54, a light emitting element 36b is disposed on one side of the cover portion 54 at a position facing the slit 36a, and a light receiving element 36c is disposed on the opposite side. Instead of these, the light emitting element 36b and the light receiving element 36c may be any transmitter and receiver. When detecting up to the rotation angle of the nozzle 33, a plurality of slits 36a are formed around the central tube portion 52 according to the fineness of the detected angle. The rotation number detection unit 36 detects the rotation speed of the nozzle 33 from the rotation number of the nozzle 33 (cover unit 54) per hour.

(Rotation stop mechanism)
Further, the fluid ejecting apparatus 19 may include a rotation stopping mechanism unit that stops the nozzle 33 at a predetermined stop position and maintains the nozzle 33 in the stopped state. FIG. 8A is a side view of the rotation imparting member 32 of the fluid ejection device 19 including the rotation stop mechanism 37, and FIG. 7B is a rear view thereof.

  The rotation stop mechanism 37 shown in FIGS. 8A and 8B includes a magnetic body 37a provided on the cover 54, and an electromagnet 37b disposed at a position that can face the magnetic body 37a. It is. In the rotation stop mechanism 37, the cover 54 can be stopped and held at the stop position by the magnetic force generated by the electromagnet 37b at the position where the magnetic body 37a and the electromagnet 37b face each other.

(Example of workpiece cleaning device equipped with a rotation speed detection unit and a rotation stop mechanism unit)
In the workpiece cleaning device 1, the fluid ejection device 19 includes a rotation speed detection unit 36 and a rotation stop mechanism unit 37, and a compressed air supply source from a compressed air supply source (fluid supply source) to an air pipe (fluid pipe) 15 It is good also as a structure which controls supply. In this case, the workpiece cleaning apparatus 1 includes a control device and a display device, and the control device calculates the rotation speed based on the detection result of the rotation speed detection unit 36 and displays the rotation speed on the display device. The operator adjusts the rotation speed of the nozzle 33 to an appropriate value by the rotation speed adjustment unit 34 based on the display on the display device.

  Further, the control device may cause the compressed air from the nozzle 33 to be ejected to the workpiece 2 by the number of rotations set for the nozzle 33. In this case, the control device supplies the compressed air from the compressed air supply source, and rotates the nozzle 33 while injecting the compressed air to the workpiece 2 from the stop position of the nozzle 33 by the rotation stop mechanism unit 37. When the detection result of the rotation speed detection unit 36 is acquired and the nozzle 33 rotates a predetermined number of times, the rotation stop mechanism unit 37 stops the nozzle 33 and stops the supply of compressed air from the compressed air supply source. Thereby, the workpiece 2 receives the compressed air ejected from the nozzle 33 by the predetermined number of rotations of the nozzle 33.

(Another example of rotation stop mechanism)
Further, the rotation stop mechanism 37 may be, for example, the rotation stop mechanism 38 shown in FIG. 9 or the rotation stop mechanism 39 shown in FIG. FIGS. 9 and 10 are side views of the rotation imparting member 32 of the fluid ejecting apparatus 19 including rotation stop mechanism portions 38 and 39 different from the rotation stop mechanism portion 37 shown in FIG.

  The rotation stop mechanism 38 shown in FIG. 9 moves the rotation imparting member 32, that is, the fluid ejecting apparatus 19 in the axial direction of the rotation imparting member 32, and fits the lock pin 38 b into the fitting hole 38 a formed in the cover portion 54. In this configuration, the nozzle 33 is stopped at a predetermined position. In this case, the fluid ejection device 19 includes a drive device that moves the fluid ejection device 19 or the lock pin 38 b in the axial direction of the rotation applying member 32.

  10 can move the rotation applying member 32, that is, the fluid ejecting apparatus 19 in the axial direction of the rotation applying member 32, so that the magnet 39a provided in the cover 54 can be opposed to the magnet 39a. In this configuration, the magnets 39b arranged at various positions are attracted and the nozzle 33 is stopped at a predetermined position. In this case, the fluid ejection device 19 includes a drive device that moves the fluid ejection device 19 or the magnet 39 a in the axial direction of the rotation applying member 32. One of the magnet 39a and the magnet 39b may be a magnetic body.

(Another example of the sub flow path forming part)
FIG. 11 is a perspective view showing another example of the auxiliary flow path forming portion 53 shown in FIG. 2 and FIG. The sub-channel forming section 53 may be a disk-shaped sub-channel forming section 59 as shown in FIG. 11 instead of the elongated prismatic shape shown in FIG. 2 and FIG. . In such a sub-channel forming part 59, the weight balance during rotation is stable and smooth rotation is possible.

[Embodiment 2]
Another embodiment of the present invention will be described below with reference to the drawings.
FIG. 12 is a front view showing the fluid ejecting apparatus 71 in the embodiment of the present invention. FIG. 13 is a longitudinal sectional view of the vicinity of the end portion of the sub-flow channel forming portion 53.

(Configuration of speed stabilization unit)
As shown in FIGS. 12 and 13, the fluid ejecting apparatus 71 includes a speed stabilizing unit 81. Other configurations are the same as those of the fluid ejecting apparatus 19 described above. The speed stabilizing unit 81 is provided in the sub-channel third channel 57 f in the sub-channel 57 of the sub-channel forming unit 53 of the rotation imparting member 32.

  Specifically, as shown in FIG. 13, the speed stabilizing unit 81 includes a closing member 71a, a spring 71b, and an adjusting screw 71c. The blocking member 71a has a spherical shape, and can contact the blocking member abutting portion 57f1, which is the upstream side portion of the blocking member 71a in the sub-flow channel third flow channel 57f, thereby closing the sub-flow channel third flow channel 57f. It is like that. For this reason, the passage diameter of the closing member abutting portion 57f1 is smaller than the diameter of the closing member 71a. The shape of the closing member 71a is not limited to a spherical shape, and may be any shape that can close the closing member contact portion 57f1.

  The adjustment screw 71c is a cylindrical male screw, and is screwed into a female screw portion formed in a region on the rotary air injection port 57b side of the sub-flow channel third flow channel 57f. The spring 71b is a compression spring and is disposed between the closing member 71a and the adjusting screw 71c, and applies a pressing force in a direction to press the closing member 71a against the closing member abutting portion 57f1. The adjustment screw 71c is adjusted by the operator in the screwing depth with respect to the sub flow path third flow path 57f. Thereby, the pressing force of the spring 71b acting on the adjustment screw 71c changes, and the responsiveness of the speed stabilizing portion 81 with respect to the flow rate of the compressed air flowing through the auxiliary flow path third flow path 57f can be adjusted.

(Operation of speed stabilization unit)
In the above configuration, the operation of the speed stabilizing unit 81 will be described with reference to FIG. FIG. 14A shows the arrangement of the speed stabilizing unit 81 of the sub-channel forming unit 53, showing the state of the speed stabilizing unit 81 when the flow rate of the compressed air in the sub-channel third channel 57f is zero. FIG. 14B is a vertical cross-sectional view of the arrangement portion showing the state of the speed stabilizing portion 81 when the flow rate of the compressed air in the sub-flow path third flow path 57f is small. (C) is a longitudinal cross-sectional view of the said arrangement | positioning part which shows the state of the speed stabilization part 81 when the flow volume of the compressed air of the subchannel 3rd flow path 57f is large.

  As shown in FIG. 14A, when the flow rate of the compressed air in the sub-flow path third flow path 57f is zero, the speed stabilizing unit 81 is pushed by the spring 71b so that the closing member 71a contacts the closing member. The contact with the portion 57f1 closes the closing member contact portion 57f1. Therefore, when the cleaning of the workpiece 2 by the fluid ejection device 19 is stopped, it is possible to prevent a situation in which external air including foreign matter enters the sub-channel 57 and the main channel 56.

  On the other hand, as shown in FIG. 14B, when the flow rate of the compressed air in the sub flow channel third flow channel 57f is small, the speed stabilizing unit 81 blocks the blocking member 71a according to the flow rate of the compressed air. A small distance from the member contact portion 57f1. Therefore, a small amount of compressed air is injected from the rotary air injection port 57b through the passage inside the sub flow path third flow path 57f and the adjusting screw 71c, and the nozzle 33 rotates at a low speed.

  As shown in FIG. 14 (c), when the flow rate of the compressed air in the sub flow channel third flow channel 57f is large, the speed stabilizing unit 81 blocks the blocking member 71a according to the flow rate of the compressed air. It is far from the member contact portion 57f1. Therefore, a large flow rate of compressed air is injected from the rotary air injection port 57b through the passage inside the sub-flow path third flow path 57f and the adjusting screw 71c, and the nozzle 33 rotates at high speed.

  Here, from the state of FIG. 14B, when the flow rate of the compressed air flowing through the sub-flow channel 57 suddenly increases, the closing member 71a suddenly moves away from the closing member contact portion 57f1. Since the pressing force of the spring 71b acts on the closing member 71a, the closing member 71a changes from a state where it is small to a state where it is far away from the change in the flow rate of the compressed air. Accordingly, the nozzle 33 shifts from the low speed rotation state to the high speed rotation state with a delay from the change in the flow rate of the compressed air. Thereby, the rotational speed of the nozzle 33 can be stabilized.

(Other examples of speed stabilization unit)
The speed stabilization unit 81 may be, for example, the speed stabilization unit 82 shown in FIG. 15 or the speed stabilization unit 83 shown in FIG. 16 in addition to the one shown in FIG. FIGS. 15 and 16 are longitudinal sectional views of arrangement portions of speed stabilizing portions 82 and 83 different from the speed stabilizing portion 81 shown in FIG. 14 of the sub-flow passage forming portion 53 in the fluid ejecting apparatus 71, respectively. It is.

  The speed stabilizing unit 82 shown in FIG. 15 includes a first spring 71b1 adjacent to the closing member 71a and downstream of the closing member 71a, and a second spring 71b2 upstream of the closing member 71a. That is, the second spring 71b2 is added to the speed stabilizing unit 81 shown in FIG. In this case, the pressing force of the first spring 71b1 is set larger than the pressing force of the second spring 71b2.

  In the speed stabilizing unit 82, even when the flow rate of the compressed air in the sub-flow path third flow path 57f is zero, the closing member 71a does not come into contact with the closing member contact part 57f1, and the sub-flow path third flow path 57f. Can not be occluded. However, even if the flow rate of the compressed air is very small, the nozzle 33 can be rotated by injecting the compressed air from the rotary air injection port 57b. In addition, when the flow rate of the compressed air flowing through the sub-channel 57 is suddenly reduced, the gap between the closing member 71a and the closing member contact portion 57f1 is rapidly narrowed and the rotation speed of the nozzle 33 is rapidly reduced. Can be prevented by the action of the second spring 71b2.

  A speed stabilizing unit 83 shown in FIG. 16 includes a closing member 71d instead of the closing member 71a shown in FIG. The closing member 71d is formed, for example, in a cylindrical shape, and has a conical closing portion 71d1 at the downstream end. A spring 71b is disposed between the closing member 71d and the adjusting screw 71c, and the closing portion 71d1 of the closing member 71d is inserted into the cylindrical adjusting screw 71c through the inside of the coiled spring 71b. It is like that.

  In the speed stabilizing unit 83, when the flow rate of the compressed air in the sub-flow path third flow path 57f is zero, the closing member 71d abuts on the closing member abutment section 57f1, and the sub-flow path third flow path 57f is closed. The

  On the other hand, when compressed air flows through the sub-channel 57, the closing member 71a is separated from the closing member abutting portion 57f1, and the compressed air can be injected from the rotary air injection port 57b to rotate the nozzle 33. Further, when the flow rate of the compressed air flowing through the sub-channel 57 increases, the closing member 71d moves in the direction of the adjusting screw 71c, and the closing portion 71d1 of the closing member 71d is inserted into the adjusting screw 71c. Therefore, when the flow rate of the compressed air flowing through the sub flow path 57 increases, the flow path between the closing portion 71d1 of the closing member 71d and the adjusting screw 71c becomes narrower, and the compressed air flowing through the sub flow path third flow path 57f becomes narrower. Increase is suppressed.

  As a result, when the amount of compressed air supplied from the air pipe 15 to the fluid ejecting apparatus 71 is increased, the amount of compressed air flowing through the main flow path 56 increases and the amount of injection from the nozzle 33 increases, but the nozzle 33 An increase in the rotation speed of the can be suppressed. Therefore, the speed stabilizing unit 83 is particularly suitable for a usage pattern in which the amount of compressed air injected from the nozzle 33 is changed without changing the rotational speed of the nozzle 33.

  In the case where the nozzle 33 is rotated at a high speed, the speed stabilizing unit 81 may not be provided.

[Embodiment 3]
Still another embodiment of the present invention will be described below with reference to the drawings.
FIG. 17 is a perspective view showing a nozzle (nozzle rotating member) 91 provided in the fluid ejecting apparatus 72 according to the embodiment of the present invention. Here, for convenience of explanation, only the nozzle 91 is shown as the fluid ejection device 72.

  As shown in FIG. 17, the nozzle 91 has a cleaning air injection port 91b on the front end surface of the nozzle main body 91a, and a rear tube portion 91c on the rear end surface facing the front end surface of the nozzle main body 91a. The rear pipe portion 91c has a screw formed on the outer peripheral surface thereof, and is directly screwed into the rotating portion 42 of the rotary joint 31 shown in FIG. 3, for example.

  In the nozzle 91, two air intake ports 57a are opened on the end surface of the rear pipe portion 91c far from the cleaning air injection port 91b, and two side surfaces (cleaning air injection ports) of the nozzle body 91a are parallel to each other. Rotating air injection ports 57b are opened on the surfaces 91b and the rear pipe portion 91c, respectively. Therefore, the nozzle 91 constitutes a nozzle rotating member. A sub-channel 57 having a sub-channel first channel 57d, a sub-channel second channel 57e, and a sub-channel third channel 57f is provided between each air intake port 57a and the rotary air injection port 57b. Is formed. The rotation speed adjustment unit 34 is provided on each of two side surfaces adjacent to the two side surfaces where the rotary air injection port 57b is opened.

  Compared with the fluid ejecting apparatus 71 shown in FIG. 2, the fluid ejecting apparatus 72 has a compact configuration because the rotation imparting member 32 is unnecessary. For example, a disk-shaped cover 54 shown in FIGS. 2 and 3 is provided on the side surface of the nozzle body 91a at an appropriate position between the cleaning air injection port 91b and the rotary air injection port 57b. Also good.

[Embodiment 4]
Still another embodiment of the present invention will be described below with reference to the drawings.
FIG. 18 is a longitudinal sectional view showing the fluid ejecting apparatus 73 according to the embodiment of the present invention. As shown in FIG. 18, the fluid ejecting apparatus 73 includes a rotary joint 31. An air pipe 15 is connected to the fixed portion 41 of the rotary joint 31 via an L-shaped joint 101.

  Two rotation imparting members 102 are inserted into the rotating portion 42 of the rotary joint 31 at an angle of 180 degrees in a direction orthogonal to the axial direction of the rotating portion 42. Therefore, in the present embodiment, the two rotation imparting members 102 and the rotating portion 42 constitute a nozzle rotating member.

  The rotation imparting member 102 is a straight circular tube with both ends closed, and has a male screw portion 102a at the end on the rotating portion 42 side as shown in FIG. It is screwed and fixed in the formed internal thread part (not shown). FIG. 19 is a partial cross-sectional view showing the structure of the rotation imparting member 102.

  In the rotation imparting member 102, an air intake port 57a is opened at the end on the rotating unit 42 side, a rotary air injection port 57b is opened at the opposite end, and the air intake port 57a and the rotary air injection port 57b are opened. A sub-flow channel 57 is provided between the two. The air intake port 57a is opened to face the direction in which the compressed air flows in the rotary joint 31. On the other hand, the rotary air injection port 57b is opened at a position of an angle of 90 degrees with respect to the air intake port 57a so that the rotation part 42 (nozzle 33) can be rotated by the injection air from the rotation air injection port 57b. Yes.

  Therefore, when supplying compressed air to the nozzle 33, as shown in FIG. 20, the rotating part 42 is taken in by the air taken in from the air intake port 57a of the rotation applying member 102 and injected from the rotary air injection port 57b. (Nozzle 33) can be rotated. FIG. 20 is a front view of the fluid ejection device 73 shown in FIG. 18 for explaining the rotation operation by the rotation applying member 102.

  According to the above configuration, the fluid ejection device 73 does not use the rotation imparting member 32 shown in FIG. 2 but rotates the nozzle 33 by the circular rotation imparting member 102 attached to the rotary joint 31. Yes. Therefore, the configuration is simple and compact.

  Further, since the rotation imparting member 102 is opened so that the air intake port 57 a faces the direction in which the compressed air flows in the rotary joint 31, the flow rate of the compressed air supplied from the air pipe 15 to the fluid ejecting device 73. Even if there is little, the nozzle 33 can be rotated efficiently.

  The present invention is not limited to the above-described embodiments, and various modifications are possible within the scope shown in the claims, and embodiments obtained by appropriately combining technical means disclosed in different embodiments. Is also included in the technical scope of the present invention.

  INDUSTRIAL APPLICABILITY The present invention can be used in an apparatus for removing foreign matter from a work surface by spraying a fluid such as compressed air from a nozzle that rotates with respect to a work such as an electronic component in a manufacturing process of the electronic component or the like.

1 Workpiece cleaning device 2 Workpiece
19,71,72,73 Fluid injection device 31 Rotary joint (nozzle rotating member)
32 Rotating member (nozzle rotating member)
33 Nozzle 33a Cleaning air injection port (fluid main injection port)
34 Rotational speed adjustment unit (Rotational speed adjustment means)
35 Speed controller 36 Speed detector
37, 38, 39 Rotation stop mechanism part 41 Fixing part 42 Rotating part 51 Rear pipe part 52 Central pipe part 53 Sub flow path forming part 54 Cover part 55 Front pipe part 56 Main flow path 57 Sub flow path 57a Air intake port (fluid Intake)
57b Rotating air jet (fluid sub-jet)
57c Female thread portion 57d Sub-channel first channel 57e Sub-channel second channel 57f Sub-channel third channel 57f1 Closing member contact portion 58 Speed adjustment screw 59 Sub-channel forming portion 71a Closing member 71b Spring 71c Adjustment Screw 71d Closure member 71d1 Closure part
81,82,83 Speed stabilizing part 91 Nozzle (nozzle rotating member)
91a Nozzle body 91b Cleaning air injection port (fluid main injection port)
91c Rear pipe part 102 Rotation imparting member (nozzle rotating member)

Claims (6)

A main flow path branched from the fluid supply flow path and supplying the fluid to the fluid main injection port of the nozzle;
Branching from the fluid supply channel, having a fluid intake opening at one end and facing a fluid flow direction in the fluid supply channel, and having a fluid sub-injection port at the other end; The fluid extending from the fluid intake port in a direction perpendicular to the axis of rotation reaches the fluid sub-injection port, and the fluid taken in from the fluid intake port is ejected from the fluid sub-injection port to give a rotational force. A secondary flow path
The sub-flow path is formed around the main flow path independently of the main flow path, and includes a sub-flow path first flow path that extends from the fluid intake port in the fluid flow direction in the fluid supply flow path. nozzle rotating member, characterized in that it has. The nozzle rotating member according to claim 1 , wherein a rotation speed adjusting means for adjusting an amount of the fluid ejected from the fluid sub-injection port is provided in the sub-channel. 3. The nozzle rotating member according to claim 1, wherein the nozzle rotating member is disposed as a nozzle rotating joint between the nozzle and a rotatable rotating portion of the rotary joint. Nozzle body part in which the fluid main injection port is formed on one end surface;
A rear tube portion provided on the other end surface of the nozzle body portion facing the fluid main injection port,
The fluid intake port is opened on an end surface of the rear pipe portion far from the fluid main injection port,
It said fluid sub injection port, nozzle rotating member according to claim 1 or 2, characterized in that it is open to different sides from the one end surface and the other end face of the nozzle body. A fixed portion to which a fluid pipe for supplying the fluid is connected, and a rotary joint that is rotatable with respect to the fixed portion and has a rotating portion to which the nozzle is connected;
A rotation imparting member in which the sub-flow path is formed,
The rotation imparting member has a straight tube shape, has the fluid intake port at one end, has the fluid sub-injection port at the other end, and has an end on the fluid intake side at the rotating portion. The nozzle rotating member according to claim 1, wherein the nozzle rotating member is provided in the rotary joint in an inserted state and in a state orthogonal to the axial direction of the rotary joint.   The nozzle provided with the said fluid main injection outlet, The rotary joint which has a rotatable rotation part, The rotation member of Claim 1 arrange | positioned between the said nozzle and the said rotation part is provided. A fluid ejecting apparatus.

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