JP5721396B2 - Ceramic joined body and support using the same - Google Patents

Description

  The present invention relates to a ceramic joined body including a flow path through which a fluid such as highly corrosive gas or liquid flows, and a support using the ceramic joined body.

  Conventionally, ceramics having excellent corrosion resistance have been used for members having flow paths through which fluids such as highly corrosive gases and liquids flow. However, ceramics have excellent corrosion resistance and excellent mechanical properties, and it has not been easy to form a flow path through which a fluid flows in a single substrate made of ceramics. In addition, since ceramic is a difficult-to-sinter material that requires high-temperature sintering, even if a flow path through which fluid flows can be formed in a single substrate made of ceramics, defects such as cracks can occur. It is not easy to obtain a sintered body that becomes the above-described member without generating the above. Therefore, such a member is a ceramic joined body in which a space formed by joining a base body and a groove through a joining layer using a base body and a lid made of ceramics and having a fluid flow path is used. Yes.

  4A and 4B show a conventional ceramic joined body, in which FIG. 4A is a plan view and FIG. 4B is a cross-sectional view taken along line X-X ′ in FIG.

  As shown in FIG. 4, a conventional ceramic joined body 20 includes a first ceramic base material 22 having a groove to be a flow path 25, and a second ceramic base material 23 having a fluid inlet / outlet 24 in the center. However, it joins with the joining layer 26 by apply | coating bonding agents, such as resin type | system | group and a glass type | system | group, to each mutual joining surface, and heat-processing (for example, refer patent document 1).

Japanese Patent Laid-Open No. 2002-47071

  However, in the ceramic joined body having the structure described in Patent Document 1, when a highly corrosive fluid is caused to flow through the flow path 25, a part of the bonding layer 26 is exposed to the flow path. There is a problem that the bonding layer 26 deteriorates due to contact and friction with the fluid, and as it progresses, the fluid leaks from the deteriorated portion of the bonding layer 26. Therefore, there is a demand for a ceramic joined body that is less likely to leak corrosive fluid and can be used for a long period of time.

  The present invention has been devised to solve the above problems, and a ceramic joined body that can be used over a long period of time in a member having a flow path through which a highly corrosive fluid flows, and a support using the same. The purpose is to provide.

The ceramic joined body of the present invention is a ceramic joined body including a base and a lid joined to the base via a joining layer, wherein a space formed by the base and the lid is a fluid flow path. is a, flow path, in vertical cross section against the direction of flow of the fluid, on either side of the deep region of the depth, characterized in that it has a shallow region of a depth via a step Is.

Further, the ceramic joined body of the present invention has a groove through which the fluid flows in the base in the above configuration, and has recesses on both sides of the groove, and the recesses of the base are fitted on both ends of the lid. It is characterized by having a convex portion to be joined.

  Moreover, the ceramic joined body of the present invention is characterized in that, in the above configuration, the wall surface of the groove and the side surfaces of the convex portions provided at both ends of the lid are joining surfaces.

  Moreover, the ceramic joined body of the present invention is characterized in that, in any one of the above-described configurations, the base and the lid are made of the same ceramic material.

  Moreover, the support body of the present invention is characterized in that the ceramic joined body having any one of the above-described structures is used for supporting the mounted object.

According to the ceramic joined body of the present invention, a ceramic joined body including a base and a lid joined to the base via a joining layer, wherein a space formed by the base and the lid is a fluid. is a flow path, the flow path, in vertical cross section against the direction of flow of the fluid, on either side of the deep region of the depth, by having a shallow region of a depth via a step, Since the flow velocity of the fluid flowing in the shallow region on both sides of the deep region can be reduced, the friction when the fluid and the bonding layer come into contact with each other can be reduced due to the decrease in the flow velocity. Deterioration can be suppressed.

  Further, according to the ceramic joined body of the present invention, the base is provided with a groove through which the fluid flows, and concave portions are provided on both sides of the groove, and the both ends of the lid are fitted with the concave portion of the base. When the convex portion is provided, the flow velocity of the fluid flowing in the shallow region can be reduced, and the intrusion of the fluid is suppressed by fitting the convex portion and the concave portion. The risk of fluid leakage due to is reduced.

  According to the ceramic joined body of the present invention, when the wall surface of the groove and the side surface of the convex portion provided at both ends of the lid are joint surfaces, the convex surface provided at both ends of the groove wall surface and the lid. Since the bonding agent is filled between the side surfaces of the portions, the bonding layer corresponding to the depth of the recesses serves as a barrier against fluid leakage, so that the ceramic member with further less fluid leakage can be obtained.

  Further, according to the ceramic joined body of the present invention, when the base and the lid are made of ceramics of the same material, the difference in thermal expansion coefficient is less likely to cause a dimensional difference due to the temperature of the fluid flowing through the flow path. Compared with a joined body made of ceramics of different materials, the joining layer is less likely to deteriorate, so that the possibility that the joining force between the base and the lid is reduced or the fluid leaks can be reduced.

  Further, according to the support of the present invention, since the ceramic joined body of the present invention is used for supporting the object to be mounted, even if a highly corrosive fluid flows in the flow path, the fluid is less likely to leak and Since it has sufficient strength to withstand the weight of the object, it can be suitably used as a support that stably supports the object for a long period of time.

An example of the ceramic joined body of this embodiment is shown, (a) is a plan view, and (b) is a sectional view taken along line A-A ′ of (a). The other example of the ceramic joined body of this embodiment is shown, (a) is a top view, (b) is sectional drawing in the B-B 'line of (a). Still another example of the ceramic joined body of the present embodiment is shown, (a) is a plan view, and (b) is a cross-sectional view taken along line C-C ′ of (a). FIG. 5A is a plan view showing a conventional ceramic joined body, and FIG. 5B is a cross-sectional view taken along line X-X ′ in FIG.

  Hereinafter, the ceramic joined body of the present embodiment will be described with reference to the drawings.

  1A and 1B show an example of a ceramic joined body of the present embodiment, in which FIG. 1A is a plan view and FIG. 1B is a cross-sectional view taken along line A-A ′.

  As shown in FIG. 1, the ceramic joined body 1 of the present embodiment includes a base 2 and a lid 3 joined to the base 2 via a joining layer 6, and a space formed by the base 2 and the lid 3. Becomes a fluid flow path 5, and the base 2 and the lid 3 are provided with a fluid inlet / outlet 4 that communicates with the flow path 5. As shown in FIG. 1B, the ceramic joined body 1 of the present embodiment has shallow regions 5b on both sides of the deep region 5a when the flow path 5 is viewed in cross section in the fluid flowing direction. It is characterized by that.

  In FIG. 1, a groove formed in both the base 2 and the lid 3 and a space formed by bonding these via the bonding layer 6 is used as the flow path 5, but in this embodiment, The space formed by the base body 2 and the lid 3 serves as a fluid flow path 5, and has a shallow area 5b on both sides of a deep area 5a when the flow path 5 is viewed in cross-section in the direction of fluid flow. Therefore, the substrate 2 or the groove 3 may be provided with a groove.

  The ceramic joined body 1 having such a structure has regions having different depths, and has shallow regions 5b on both sides of the deep region 5a. When a fluid such as a high gas or liquid is flowed, the flow velocity of the fluid flowing in the shallow region 5b on both sides of the deep region 5a can be reduced. Since friction at the time of contact can be reduced, deterioration of the bonding layer 6 can be suppressed. Therefore, the ceramic joined body 1 with less fluid leakage over a long period can be obtained.

  Here, as the depth of the deep region 5a and the shallow region 5b, the ratio of the depth of the shallow region 5b / the depth of the deep region 5a is preferably 1/10 or more and 1/2 or less. Thus, if the depth ratio is 1/10 or more and 1/2 or less, the flow velocity of the fluid flowing in the shallow region 5b may be reduced, and friction caused by contact between the fluid and the bonding layer 6 may be reduced. Therefore, the deterioration of the bonding layer 6 can be suppressed. In addition, the width of the shallow region 5b when the flow path 5 is viewed in cross-section in the fluid flowing direction is preferably set to a width equal to or greater than ½ of the width of the deep region 5a.

  Further, the fluid that can be flowed through the flow path 5 of the ceramic joined body 1 of the present embodiment is not limited to a fluid such as highly corrosive gas or liquid. For example, liquids such as water, oil, silicon oil, and water vapor as fluids heated to high temperatures, and liquids such as water, acetone, liquid nitrogen, brine (antifreeze), and Galden (registered trademark) as cooled fluids. Gases such as ammonia, chlorofluorocarbon, and carbon dioxide can be used. Furthermore, it is also possible to use waste heat by flowing heated or cooled gas or fluid discharged from various devices in the manufacturing process through the flow path 5.

  2A and 2B show another example of the ceramic joined body of the present embodiment, in which FIG. 2A is a plan view and FIG. 2B is a sectional view taken along line B-B ′ in FIG.

As shown in FIG. 2, the ceramic joined body 1 of the present embodiment includes a groove through which a fluid flows in the base body 2, and has concave portions 9 on both sides of the groove, and the concave portion 9 of the base body 2 at both ends of the lid 3. It is preferable to have the convex part 8 fitted. In the ceramic joined body 1 having the structure shown in FIG. 2, the flow rate of the fluid is not suppressed if there is no shallow region 5 b and only one region of the flow path. The fluid easily enters the gap where the two are fitted, and the bonding layer 6 is deteriorated, so that the fluid leaks.

  On the other hand, when the base 2 is provided with a groove through which fluid flows, and the concave 9 is provided on both sides of the groove, and the convex 3 is fitted to the concave 9 of the base 2 at both ends of the lid 3, When the flow path 5 is viewed in a cross-section in the direction in which the flow flows, by having the shallow regions 5b on both sides of the deep region 5a, the flow velocity of the fluid flowing in the shallow region 5b can be reduced and the convexity Since the entry of the fluid can be suppressed by fitting the portion 8 and the recess 9, the risk of fluid leakage due to deterioration of the bonding layer 6 can be further reduced. Therefore, the ceramic joined body 1 can be used for a longer period than the ceramic joined body 1 shown in FIG.

  In addition, by adopting a structure in which the convex portion 8 and the concave portion 9 are fitted in this way, positioning is facilitated, and the joining area can be reduced as compared with the ceramic joined body 1 of the example shown in FIG. , Can reduce the amount of bonding agent used.

  3A and 3B show still another example of the ceramic joined body 1 of the present embodiment, in which FIG. 3A is a plan view and FIG. 3B is a cross-sectional view taken along line C-C ′ of FIG.

  As shown in FIG. 3, the ceramic joined body 1 of the present embodiment has a structure in which the wall surface 10 of the groove and the side surfaces of the convex portions 8 provided at both ends of the lid 3 are joined surfaces. Similar to the ceramic joined body 1 of the example shown, the flow velocity of the fluid flowing in the shallow region 5b can be reduced, and the intrusion of the fluid is suppressed by fitting the convex portion 8 and the concave portion 9 together. Therefore, the risk of fluid leakage due to deterioration of the bonding layer 6 can be reduced.

  Further, with the above structure, a bonding agent is filled between the wall surface 10 of the groove and the side surfaces of the convex portion 8 provided at both ends of the lid 3, and the bonding layer 6 corresponding to the depth of the concave portion 9. Therefore, the ceramic joined body 1 having less fluid leakage than the ceramic joined body 1 having the structure shown in FIG. 2 can be obtained. Further, as shown in FIG. 3, the base body in which the lid 3 is joined rather than the ceramic joined body 1 in the example shown in FIG. 2 by fitting the depth of the concave portion 9 and the height of the convex portion 8 together. The surface of 2 (the surface shown in FIG. 3A) can be easily flattened.

  The ceramic joined body 1 of the present embodiment can be applied with oxide ceramics such as alumina and zirconia, and non-oxide ceramics such as silicon nitride and silicon carbide. It is preferable to be made of ceramics of the same material. As a result, the difference in the coefficient of thermal expansion causes less dimensional difference depending on the temperature of the fluid flowing through the flow path 5, and the bonding layer 6 is less likely to deteriorate compared to a bonded body made of ceramics of different materials. The possibility that the bonding force between the base body 2 and the lid 3 is reduced or the fluid leaks can be reduced.

  In particular, in the ceramic joined body 1 of the present embodiment, the base 2 and the lid 3 are preferably made of a high-purity alumina sintered body. Specifically, by using a high-purity alumina sintered body having a purity of 95% or more, it becomes possible to improve the corrosion resistance against a highly corrosive fluid.

  Next, the manufacturing method of the ceramic joined body 1 of this embodiment is demonstrated.

  First, the process of obtaining the molded body of the base body 2 and the lid 3 will be described. Prepare a ceramic raw material with a purity of 90% or more and an average particle size of about 1 μm, add a predetermined amount of sintering aid, binder, solvent, dispersant, etc. It is granulated by spray drying method) and used as a secondary raw material.

  As the ceramic raw material used at this time, oxide ceramics such as alumina and zirconia, and non-oxide ceramics such as silicon nitride and silicon carbide can be applied. When flowing, it is preferable to use a high-purity alumina ceramic raw material having a purity of 95% or more and an average particle diameter of 1 μm or less, whereby the ceramic joined body 1 having excellent corrosion resistance can be obtained. .

  Next, the spray-dried and granulated secondary raw material is put into a rubber mold having a predetermined shape and molded by a hydrostatic press molding method (rubber press method). The molded body is cut so as to be the base 2 and the lid 3.

  Here, for example, in the case where the substrate 2 has a structure having a groove, a groove to be the flow path 5 is formed on one main surface (upper surface) of the molded body to be the substrate 2. In the case of the structure shown in FIG. 1, a groove to be a deep region 5a is formed in the molded body to be the base 2, and in the case of the structure to be shown in FIGS. Then, the recess 9 is formed together with the groove to be the deep region 5a and the shallow region 5b.

  Moreover, about the molded object used as the lid | cover 3, if it is a structure shown in FIG. 1, the groove | channel which becomes a part of deep area | region 5a and the shallow area | region 5b is formed in the joint surface side with the base | substrate 2. FIG. In the structure shown in FIGS. 2 and 3, convex portions are formed on both sides of the lid 3 along the direction in which the fluid flows.

  In addition, fluid inlets / outlets 4 communicating with the flow path 5 are formed in at least two places of the molded body to be the base body 2 and the molded body to be the lid 3. Here, the fluid inlet / outlet port 4 may be provided on the base body 2 and the lid 3, respectively, or may be provided only on the base body 2 or only on the lid 3, depending on the application and purpose.

  For example, if the fluid inlet and outlet are on the base 2 side, at least two inlets and outlets 4 may be provided only on the molded body to be the base 2, and the fluid inlet and outlet are on the lid 3 side. For example, it is only necessary to provide at least two entrances / exits 4 only on the molded body to be the lid 3. Further, if the fluid inlet side and the outlet side are on different sides of the base 2 and the lid 3, the inlet / outlet 4 may be provided in each of the molded body serving as the base 2 and the molded body serving as the lid 3. Then, the molded body to be the base body 2 and the lid 3 is fired at a temperature of 1500 ° C. or higher and 1700 ° C. or lower in the air atmosphere, so that the overall porosity is 1% or lower and the sufficiently dense base body 2 and The lid 3 can be obtained.

  Next, the process of joining the base 2 and the lid 3 will be described. As a bonding agent used for bonding, a resin adhesive such as epoxy, glass, and an inorganic adhesive can be used. An example using an epoxy resin adhesive will be described below. When the base 2 and the lid 3 having the structure shown in FIG. 1 are joined, an adhesive is applied to the joint surface of either the base 2 or the lid 3 and then the joint surface of the base 2 and the lid 3 is overlapped. The ceramic joined body 1 having the structure shown in FIG. 1 can be obtained by heating to 50 ° C. or higher and drying.

  When the base 2 and the lid 3 having the structure shown in FIG. 2 are joined, an appropriate amount of adhesive is poured into the concave portion 9 provided in the base 2 and the convex portion 8 of the lid 3 is fitted into the concave portion 9 of the base 2. The ceramic joined body 1 having the structure shown in FIG. 2 can be obtained by heating to 50 ° C. or higher and drying.

  When the base 2 and the lid 3 having the structure shown in FIG. 3 are joined, the convex portion 8 of the lid 3 is fitted into the concave portion 9 of the base 2, and then the adhesive is applied to the wall surface 10 of the groove and the convex portion 8. The ceramic joined body 1 having the structure shown in FIG. 3 can be obtained by pouring between the side surfaces of the steel sheet and then drying by heating at a temperature of 50 ° C. or higher.

  And it can be made suitable for the support body used for support of a mounted article by making the ceramic joined body 1 of this embodiment comprised with the base | substrate 2 and the lid | cover 3 into plate shape. According to this support body, the placed object is supported with the main surface of the base body 2 or the lid 3 as the upper surface, and the heated or cooled fluid flows through the internal flow path 5, whereby the ceramic joined body 1 of the present embodiment. The mounted object can be stably heated or cooled via a certain support.

  Examples of the ceramic joined body 1 of the present embodiment will be described below.

The ceramic joined body 1 having the structure shown in FIG.
A test was conducted to check whether there was any fluid leakage by flowing a heated fluid into the tube.

  First, as a ceramic raw material, alumina having a purity of 99% and an average particle diameter of 1 μm is prepared, and a slurry obtained by adding a predetermined amount of a sintering aid, a binder, a solvent, and a dispersant to the slurry is spray-dried. Granulation was performed by a granulation method (spray drying method) to obtain a secondary raw material. Next, the secondary raw material was put into a rubber mold having a predetermined shape and molded by an isostatic press molding method (rubber press method), and then the molded body was removed from the rubber mold.

  Then, the molded body removed from the rubber mold is subjected to cutting so as to have the outer shape of the base body 2 shown in FIG. 1, and in the flow path 5 formed by bonding, a groove that becomes a deep region 5a is formed on one main surface. It formed in the surface (upper surface). In addition, cutting was performed so that the outer shape of the lid 3 shown in FIG. 1 was obtained, and a groove serving as a part of the deep region 5a and a shallow region 5b was formed on the joint surface side with the base 2.

  In addition, a fluid penetrating from a position serving as one end of the flow path 5 formed by bonding to the other main surface in a groove formed on one main surface of the molded body serving as the base 2 using a milling machine or a universal grinding machine. One entrance / exit 4 was formed. Moreover, in the groove | channel formed in the molded object used as the lid | cover 3, the fluid entrance / exit 4 was formed in one place in the position used as the other end of the flow path 5 formed by joining. Thereafter, the molded body to be the base body 2 and the lid 3 is put into a firing furnace and fired at a temperature of 1600 ° C. in an air atmosphere, and the sintered body of the base body 2 and the lid 3 having a total porosity of 1% or less. Obtained.

  Next, the base 2 and the lid 3 were joined. A commercially available epoxy resin-based adhesive was prepared as a bonding agent, applied to the bonding surface of the substrate 2 with a thickness of 1 mm or less, and then the substrate 2 and the lid 3 were overlapped and 50 ° C. in a hot air dryer. By heating and drying at the above temperature for 5 hours or more, the base 2 and the lid 3 were joined to obtain the ceramic joined body 1 having the structure shown in FIG.

  In addition, the base 2 and the lid 3 are joined by the above-described materials and manufacturing method except that a groove that is only a part of the deep region 5a is formed on the joint surface side of the lid 3 with the base 2. Thus, a ceramic joined body of a comparative example in which the flow path 5 is composed only of the deep region 5a in the present embodiment was obtained.

  Then, a pipe for flowing fluid is connected to the fluid inlet / outlet port 4 of the ceramic joined body 1 having the structure shown in FIG. 1 and the ceramic joined body of the comparative example, and the temperature of 80 to 120 ° C. used in other apparatuses is 10. A test was conducted in which a vapor containing no more than% acid was pressurized and flowed into the flow path 5.

As a result, in the ceramic joined body of the comparative example, fluid leakage was confirmed before the ceramic joined body 1 having the structure shown in FIG. When the test was completed and the ceramic joined body 1 having the structure shown in FIG. 1 and the ceramic joined body of the comparative example were cut and confirmed, the ceramic joined body of the comparative example was partly deteriorated and peeled off. It was found that fluid was leaking from that part. On the other hand, in the ceramic joined body 1 having the structure shown in FIG. 1, a slight deterioration was observed in the joining layer exposed in the flow path.

  A ceramic joined body 1 having the structure shown in FIGS. 2 and 3 was produced.

  First, molding was performed in the same manner as in Example 1, and the molded body removed from the rubber mold was cut so as to have the outer shape of the base 2 shown in FIGS. Further, in the flow path 5 formed by bonding, the concave portion 9 was formed together with the grooves that become the deep region 5a and the shallow region 5b. In addition, cutting was performed so that the outer shape of the lid 3 shown in FIGS. 2 and 3 was obtained, and convex portions 8 were formed on both sides of the lid 3 along the fluid flow direction.

  Further, the entrance / exit 4 was formed on the base 2 and the lid 3 so as to be in the same position as in the first embodiment. Thereafter, the molded body to be the base body 2 and the lid 3 is put into a firing furnace and fired at a temperature of 1600 ° C. in an air atmosphere, and the sintered body of the base body 2 and the lid 3 having a total porosity of 1% or less. Obtained.

  And the base | substrate 2 and the lid | cover 3 of the structure shown in FIG. 2 were joined. An appropriate amount of adhesive is poured into the recess 9 provided in the base 2, the convex 8 of the lid 3 is fitted into the recess 9 of the base 2, heated to 50 ° C. or more and dried, and the ceramic having the structure shown in FIG. A joined body 1 was obtained.

  Further, the base 2 and the lid 3 having the structure shown in FIG. 3 were joined. After fitting the convex portion 8 of the lid 3 into the concave portion 9 of the base 2, the adhesive is poured between the wall surface 10 of the groove and the side surface of the convex portion 8, and then heated and dried at a temperature of 50 ° C. or higher. A ceramic joined body 1 having the structure shown in FIG. 3 was obtained.

  Then, using the ceramic joined body 1 having the structure shown in FIGS. 2 and 3, a pipe for flowing a fluid is connected to the fluid inlet / outlet 4 of each ceramic joined body 1. A test was conducted in which a vapor containing 10% or less of acid at 80 to 120 ° C. was pressurized and flowed into the flow path 5.

  As a result, the ceramic joined body 1 having the structure shown in FIGS. 2 and 3 can be obtained even in a period exceeding three times the test period of the ceramic joined body of the comparative example in which leakage of fluid was confirmed in Example 1. Regarding the ceramic joined body 1 having the structure shown in FIG. 3, no leakage of fluid was confirmed. Thereby, when the flow path 5 is viewed in a cross-section in the direction in which the fluid flows, by having the shallow regions 5b on both sides of the deep region 5a, the flow velocity of the fluid flowing in the shallow region 5b can be reduced. In addition, since the intrusion of fluid can be suppressed by fitting the convex portion 8 and the concave portion 9, it has been confirmed that the risk of fluid leakage due to deterioration of the bonding layer 6 can be reduced. Moreover, from this result, the ceramic joined body 1 having the structure shown in FIGS. 2 and 3 includes the flow path 5 through which a highly corrosive fluid can flow, and is suitable as a support body that can support the mounted object. It turns out that it can be used.

  Next, with respect to the ceramic joined body 1 having the structure shown in FIG. 1, the base 2 is formed of alumina, and the lid 3 is manufactured using three kinds of materials of alumina, silicon carbide and zirconia. A durability test was performed in which a fluid cycle was applied to the flow path 5 for a certain period of time and a heat cycle was applied to cool to room temperature.

  First, the base 2 and the alumina lid 3 were produced in the same manner as in Example 1.

For the lid 3 made of zirconia, the amount of Y ₂ O ₃ added was 3 mol%, and a commercially available zirconia primary material having an average particle size of 0.1 μm prepared by a coprecipitation method was purchased. A slurry obtained by adding a predetermined amount of the dispersant and the mixture was granulated by a spray drying granulation method (spray drying method) to obtain a secondary raw material. Next, this secondary material was put into a rubber mold having a predetermined shape and molded by an isostatic press molding method (rubber press method), and then the molded body was removed from the rubber mold. Then, after the forming, the cutting process is performed in the same manner as in Example 1, and then put into a firing furnace and fired at a temperature of 1400 ° C. in an air atmosphere to obtain a zirconia sintered body having a purity of 95% or more. A lid 3 consisting of

In addition, for the silicon carbide lid 3, a predetermined amount of a sintering aid, a binder, a solvent and a dispersing agent are added to a silicon carbide primary material having an average particle size of 0.5 to 10 μm and a purity of 99 to 99.8% or more. The mixed slurry was granulated by a spray drying granulation method (spray drying method) to obtain a secondary raw material. Next, this secondary material was put into a rubber mold having a predetermined shape and molded by an isostatic press molding method (rubber press method), and then the molded body was removed from the rubber mold. Then, the cutting after forming is performed in the same manner as in Example 1, and then placed in a firing furnace and fired at a temperature of 2100 ° C. in a non-oxidizing atmosphere, and a silicon carbide-based fire having a purity of 99% or more. A lid 3 made of a ligature was obtained.

  Thereafter, the lid 3 made of alumina, zirconia and silicon carbide and the substrate 2 made of alumina are joined using the same manufacturing method as in Example 1, and the three types of structures shown in FIG. A ceramic joined body 1 was obtained.

  And about each obtained ceramic joined body 1, when the endurance test which flows the fluid similar to Example 1 to the flow path 5 for 10 minutes, and applied the thermal cycle which air-cools to room temperature after that was carried out, the lid | cover 3 which consists of zirconia was attached. Fluid leakage was confirmed in the order of the used one and the one using the lid 3 made of silicon carbide.

  Then, after the leakage of fluid was confirmed in the ceramic joined body 1 using the lid 3 made of silicon carbide, all the ceramic joined bodies 1 used in Example 3 were cut and confirmed, and the lid made of zirconia In both cases using 3 and those using the lid 3 made of silicon carbide, cracks were observed in the bonding layer 6 exposed in the flow path 5. In particular, in the case of using the lid 3 made of zirconia, a large crack was observed in the bonding layer 6. On the other hand, the ceramic joined body 1 made of alumina, in which the base 2 and the lid 3 are made of the same material, has no cracks and there is a difference in the size of the cracks. The difference in thermal expansion due to the difference is considered to be caused by the occurrence of cracks, and it was confirmed that the base 2 and the lid 3 constituting the ceramic structure 1 are preferably made of the same material.

1: Ceramic joined body 2: Base body 3: Lid 4: Entrance / exit 5: Channel 5a: Deep region 5b: Shallow region 6: Bonding layer 8: Convex portion 9: Concave portion
10: Wall surface of the groove

Claims (5)

A ceramic joined body including a base and a lid bonded to the base via a bonding layer, wherein a space formed by the base and the lid is a fluid flow path, in vertical cross section against the direction of flow of the fluid, on either side of the deep region of the depth, ceramic joined article, characterized in that it has a shallow region of a depth via a step.   The base is provided with a groove through which the fluid flows, and concave portions are provided on both sides of the groove, and convex portions that are fitted to the concave portion of the base body are provided at both ends of the lid. The ceramic joined body according to claim 1.   The ceramic joined body according to claim 2, wherein a wall surface of the groove and a side surface of the convex portion provided at both ends of the lid are joint surfaces.   The ceramic joined body according to any one of claims 1 to 3, wherein the base body and the lid are made of ceramics of the same material.   A support body, wherein the ceramic joined body according to any one of claims 1 to 4 is used to support a mounted object.

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