JP5712919B2 - Low friction sliding member - Google Patents

Low friction sliding member Download PDF

Info

Publication number
JP5712919B2
JP5712919B2 JP2011287954A JP2011287954A JP5712919B2 JP 5712919 B2 JP5712919 B2 JP 5712919B2 JP 2011287954 A JP2011287954 A JP 2011287954A JP 2011287954 A JP2011287954 A JP 2011287954A JP 5712919 B2 JP5712919 B2 JP 5712919B2
Authority
JP
Japan
Prior art keywords
sliding member
sliding
dlc film
lubricant
diamond
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2011287954A
Other languages
Japanese (ja)
Other versions
JP2013136664A (en
Inventor
不破 良雄
良雄 不破
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyota Motor Corp
Original Assignee
Toyota Motor Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyota Motor Corp filed Critical Toyota Motor Corp
Priority to JP2011287954A priority Critical patent/JP5712919B2/en
Publication of JP2013136664A publication Critical patent/JP2013136664A/en
Application granted granted Critical
Publication of JP5712919B2 publication Critical patent/JP5712919B2/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Description

有機モリブデン含有潤滑剤の存在下における摺動特性、特に摩擦特性および耐摩耗性に優れた摺動部材に関する。   The present invention relates to a sliding member having excellent sliding characteristics, particularly friction characteristics and wear resistance in the presence of an organic molybdenum-containing lubricant.

自動車において、エンジン、トランスミッションなど様々な機器に摺動部材が用いられており、そのような摺動部材の摺動特性を向上させるために様々な開発がされている。摺動部材の摩擦係数を低減させることは自動車の燃費の向上にも繋がるので、特に重要視されている。近年、摩擦係数の低減化、耐摩耗性の向上を図るべく、摺動部材の表面のコーティング技術として、ダイヤモンドライクカーボン膜(DLC膜、非晶質炭素膜とも称される)を被覆する技術が注目されている。そして、優れた摺動特性を得るべく、ダイヤモンドライクカーボン膜の形成方法に様々な改良が試みられている。   In automobiles, sliding members are used in various devices such as engines and transmissions, and various developments have been made in order to improve the sliding characteristics of such sliding members. Reducing the coefficient of friction of the sliding member is particularly important because it leads to an improvement in the fuel consumption of the automobile. In recent years, a technique for coating a diamond-like carbon film (also referred to as a DLC film or an amorphous carbon film) has been used as a coating technique for the surface of a sliding member in order to reduce the friction coefficient and improve the wear resistance. Attention has been paid. Various attempts have been made to form diamond-like carbon films in order to obtain excellent sliding properties.

例えば特許文献1〜3には、モリブデン(Mo)、タングステン(W)、またはクロム(Cr)を含有するDLC膜が開示されている。特許文献4には、斜板式コンプレッサーの斜板の摺動面に水素を含有するDLC膜を形成すること、およびDLC膜にケイ素や窒素を含有させたり、そのような斜板に二硫化モリブデン皮膜などを形成したりすることにより良好な摺動特性が得られることが開示されている。特許文献5には、銀(Ag)、マグネシウム(Mg)、インジウム(In)、スズ(Sn)、ケイ素(Si)、ジルコニウム(Zr)、銅(Cu)の少なくとも1種とモリブデン(Mo)および/またはタングステン(W)と硫黄(S)とを含むDLC膜を備えた摺動部材が開示されている。   For example, Patent Documents 1 to 3 disclose DLC films containing molybdenum (Mo), tungsten (W), or chromium (Cr). In Patent Document 4, a DLC film containing hydrogen is formed on the sliding surface of a swash plate of a swash plate compressor, and silicon or nitrogen is added to the DLC film, or a molybdenum disulfide film is formed on such a swash plate. It is disclosed that good sliding characteristics can be obtained by forming the like. Patent Document 5 includes at least one of silver (Ag), magnesium (Mg), indium (In), tin (Sn), silicon (Si), zirconium (Zr), copper (Cu), molybdenum (Mo), and A sliding member having a DLC film containing tungsten (W) and sulfur (S) is disclosed.

特開昭62−116749号公報JP-A-62-116749 特開昭62−116750号公報JP 62-116750 A 特開昭62−116751号公報JP-A-62-116751 特開2001−280236号公報JP 2001-280236 A 特開2007−177313号公報JP 2007-177313 A

摺動部材は潤滑剤の存在下で摺動されることが多く、潤滑剤としてはモリブデンジチオカーバメートなどの有機モリブデン化合物を添加剤として含有するものが知られている。そのような潤滑剤を使用すると、モリブデン化合物層が摺動部材の表面に形成されて摩擦が低減される。しかし、DLC膜を備えた摺動部材に有機モリブデン化合物が添加された潤滑剤を用いた場合、摺動部材の表面を酸化させてしまい、耐摩耗性および耐焼き付き性を低下させてしまうという問題がある。   The sliding member is often slid in the presence of a lubricant, and a lubricant containing an organic molybdenum compound such as molybdenum dithiocarbamate as an additive is known. When such a lubricant is used, a molybdenum compound layer is formed on the surface of the sliding member and friction is reduced. However, when a lubricant containing an organomolybdenum compound is used for a sliding member provided with a DLC film, the surface of the sliding member is oxidized, resulting in a decrease in wear resistance and seizure resistance. There is.

近年、自動車エンジン部品の高出力および高回転に伴う高性能化が著しい。エンジンで使用される摺動部品においては、摺動部材単独の性能向上では限界があり、摺動部材と潤滑剤の最適な組み合わせにより優れた摺動特性を提供することが求められている。   In recent years, the high performance of automobile engine parts due to high output and high rotation is remarkable. In sliding parts used in engines, there is a limit in improving the performance of the sliding member alone, and it is required to provide excellent sliding characteristics by an optimal combination of the sliding member and the lubricant.

本発明者は、白金(Pt)およびロジウム(Rh)の少なくとも一種を含むDLC膜を摺動面に形成することにより、有機モリブデン含有潤滑剤を用いた摺動において摩擦特性および耐摩耗性に優れた摺動部材が得られることを見出した。本発明の要旨は以下のとおりである。
(1)PtおよびRhの少なくとも一種である金属を含むダイヤモンドライクカーボン膜を摺動面に備えた、有機モリブデン含有潤滑剤を用いた摺動のための摺動部材。
(2)ダイヤモンドライクカーボン膜が前記金属を0.25〜10at%含む、(1)に記載の摺動部材。
(3)ダイヤモンドライクカーボン膜が水素を0〜35at%含む、(1)または(2)に記載の摺動部材。
(4)潤滑剤が有機モリブデン化合物を50〜1500ppm含む、(1)〜(3)のいずれかに記載の摺動部材。
(5)前記金属が200nm以下の大きさを有するクラスターの状態でダイヤモンドライクカーボン膜中に分散している、(1)〜(4)のいずれかに記載の摺動部材。
(6)PtおよびRhの少なくとも一種である金属を含むダイヤモンドライクカーボン膜を摺動面に備えた摺動部材と、該摺動面に供給される有機モリブデン含有潤滑剤とからなる、摺動部材と潤滑剤との組み合わせ。
The present inventor has excellent friction characteristics and wear resistance in sliding using an organic molybdenum-containing lubricant by forming a DLC film containing at least one of platinum (Pt) and rhodium (Rh) on the sliding surface. It was found that a sliding member was obtained. The gist of the present invention is as follows.
(1) A sliding member for sliding using an organomolybdenum-containing lubricant, comprising a diamond-like carbon film containing a metal that is at least one of Pt and Rh on a sliding surface.
(2) The sliding member according to (1), wherein the diamond-like carbon film contains 0.25 to 10 at% of the metal.
(3) The sliding member according to (1) or (2), wherein the diamond-like carbon film contains 0 to 35 at% hydrogen.
(4) The sliding member according to any one of (1) to (3), wherein the lubricant contains 50 to 1500 ppm of an organic molybdenum compound.
(5) The sliding member according to any one of (1) to (4), wherein the metal is dispersed in the diamond-like carbon film in a cluster state having a size of 200 nm or less.
(6) A sliding member comprising a sliding member provided with a diamond-like carbon film containing a metal that is at least one of Pt and Rh on the sliding surface, and an organic molybdenum-containing lubricant supplied to the sliding surface. And a combination of lubricants.

本発明の摺動部材は、DLC膜がPtおよびRhの少なくとも一種を含むことにより、有機モリブデン化合物由来成分に起因するDLC膜の酸化を抑制することができる。従って、本発明の摺動部材は、有機モリブデン含有潤滑剤を用いた摺動において摺動特性、特に摩擦特性および耐摩耗性に優れている。   The sliding member of this invention can suppress the oxidation of the DLC film resulting from the organic molybdenum compound-derived component, when the DLC film contains at least one of Pt and Rh. Therefore, the sliding member of the present invention is excellent in sliding characteristics, particularly friction characteristics and wear resistance in sliding using the organic molybdenum-containing lubricant.

本発明において、摺動部材とは摺動部分を有する機械部品を意味し、具体的には、湿式クラッチ、エンジンのピストン、ギヤ、スプライン、すべり軸受、動弁系部品などが挙げられる。本発明の摺動部材は、有機モリブデン含有潤滑剤中を用いた湿式条件で摺動させることを意図したものである。本発明の摺動部材は、内燃機関用シリンダボアとピストンリング、あるいは燃料噴射部品のシリンダとピストン形式の摺動部に用いるのに特に適している。   In the present invention, the sliding member means a mechanical part having a sliding part, and specifically includes a wet clutch, an engine piston, a gear, a spline, a plain bearing, a valve operating system part, and the like. The sliding member of the present invention is intended to slide under wet conditions using an organic molybdenum-containing lubricant. The sliding member of the present invention is particularly suitable for use in a cylinder bore and piston ring for an internal combustion engine or a cylinder and piston type sliding part of a fuel injection part.

本発明の摺動部材の基材は、各種装置の摺動部品であれば形状等に特に限定はなく、金属系基材、セラミックス系基材、樹脂系基材などいずれであってもよいが、金属製であることが好ましい。基材を構成する金属としては、鋳鉄、鋼、アルミニウムに加えてCu、Mg、Znなどを含むアルミニウム合金、銅に加えてZn、Al、Snなどを含む銅合金などが好ましい。   The base material of the sliding member of the present invention is not particularly limited as long as it is a sliding part of various devices, and may be any of a metal base material, a ceramic base material, a resin base material, etc. It is preferably made of metal. As the metal constituting the base material, an aluminum alloy containing Cu, Mg, Zn and the like in addition to cast iron, steel and aluminum, a copper alloy containing Zn, Al, Sn and the like in addition to copper are preferable.

本発明の摺動部材は、摺動面にPtおよびRhの少なくとも一種を含むDLC膜を備えていることを特徴とする。DLC膜はPtとRhの一方のみ、あるいはPtとRhの両方を含有していてもよい。PtおよびRhの少なくとも一種を含むDLC膜を摺動面に有する摺動部材は、有機モリブデン含有潤滑剤の存在下で用いられた場合であっても、DLC膜の最表面に非常に薄いPtまたはRhの膜が形成され、それが有機モリブデン化合物に由来して生じる三酸化モリブデンのDLC膜との反応を抑制することにより、DLC膜の酸化などによる劣化が発生しにくいものと考えられる。そのため、本発明の摺動部材においては、有機モリブデン含有潤滑剤を用いた場合でも優れた摺動特性、特に摩擦特性および耐摩耗性が得られる。従って、本発明はPtおよびRhの少なくとも一種である金属を含むDLC膜を摺動面に備えた摺動部材と、該摺動面に供給される有機モリブデン含有潤滑剤とからなる、摺動部材と潤滑剤との組み合わせにも関する。   The sliding member of the present invention is characterized in that a DLC film containing at least one of Pt and Rh is provided on the sliding surface. The DLC film may contain only one of Pt and Rh or both Pt and Rh. A sliding member having a DLC film containing at least one of Pt and Rh on the sliding surface is very thin Pt or Dt on the outermost surface of the DLC film even when used in the presence of an organic molybdenum-containing lubricant. It is considered that an Rh film is formed, which suppresses the reaction of molybdenum trioxide resulting from the organomolybdenum compound with the DLC film, so that deterioration due to oxidation of the DLC film is unlikely to occur. Therefore, in the sliding member of the present invention, excellent sliding characteristics, particularly friction characteristics and wear resistance can be obtained even when an organic molybdenum-containing lubricant is used. Accordingly, the present invention provides a sliding member comprising a sliding member having a DLC film containing a metal that is at least one of Pt and Rh on the sliding surface, and an organic molybdenum-containing lubricant supplied to the sliding surface. Also related to the combination of lubricants.

PtおよびRhの少なくとも一種である金属のDLC膜における含有量は、原子百分率(at%)で0.25〜10at%、特に0.3〜9at%の範囲であることが好ましい。ここで、原子百分率は、材料中における(この場合、DLC膜における)組成元素の原子数基準での百分率を意味する。金属の含有量が多すぎるとDLC膜の硬度と強度が低下し、かつ摺動特性も低下する。一方、金属の含有量が少なすぎると金属の添加による摺動特性の向上効果がみられないが、上記の範囲であればそのようなことがない。   The content of the metal, which is at least one of Pt and Rh, in the DLC film is preferably in the range of 0.25 to 10 at%, particularly 0.3 to 9 at% in terms of atomic percentage (at%). Here, the atomic percentage means the percentage of the composition element in the material (in this case, the DLC film) on the basis of the number of atoms. If the metal content is too large, the hardness and strength of the DLC film are lowered, and the sliding characteristics are also lowered. On the other hand, if the metal content is too small, the effect of improving the sliding properties due to the addition of the metal is not observed, but this is not the case within the above range.

本発明の摺動部材におけるDLC膜において、PtおよびRhの少なくとも一種である金属は、クラスターの状態で膜中に分散している。クラスターの大きさは200nm以下、特に150nm以下、とりわけ100nm以下であることが好ましい。クラスターの大きさがそのような範囲であれば、DLC膜の硬度および強度が低下することがない。   In the DLC film in the sliding member of the present invention, the metal that is at least one of Pt and Rh is dispersed in the film in a cluster state. The size of the cluster is preferably 200 nm or less, particularly 150 nm or less, and particularly preferably 100 nm or less. If the size of the cluster is within such a range, the hardness and strength of the DLC film will not be reduced.

DLC膜は、さらに水素(H)を含有していてもよい。水素を含むDLC膜を摺動面に有する摺動部材は、特に低摩擦性である。DLC膜における水素量は、原子百分率(at%)で0〜35at%、特に5〜25at%の範囲であることが好ましい。   The DLC film may further contain hydrogen (H). A sliding member having a DLC film containing hydrogen on the sliding surface has particularly low friction. The amount of hydrogen in the DLC film is preferably in the range of 0 to 35 at%, particularly 5 to 25 at% in terms of atomic percentage (at%).

DLC膜は公知のCVD法(化学気相成長法)またはPVD法(物理気相成長法)、例えばプラズマCVD法、イオンプレーティング法、スパッタリング法などにより形成することができる。本発明の摺動部材におけるDLC膜は、例えば、物理的作用により固体の原料を蒸気化することで基材の表面に皮膜を形成するPVD法、特にPtまたはRhからなる金属ターゲットと炭素ターゲットにアルゴンなどの不活性ガスを電界で加速して照射することによりターゲット表面の原子や分子を放出させるスパッタリング法で形成することができる。その際に、不活性ガスと共に、原料ガスとしてメタン、アセチレンなどの炭化水素ガスを導入し、放電により炭化水素ガスを分解することにより、水素を含有するDLC膜を形成することもできる。   The DLC film can be formed by a known CVD method (chemical vapor deposition method) or PVD method (physical vapor deposition method), for example, a plasma CVD method, an ion plating method, a sputtering method, or the like. The DLC film in the sliding member of the present invention is, for example, a PVD method in which a solid material is vaporized by a physical action to form a film on the surface of a substrate, particularly a metal target and a carbon target made of Pt or Rh It can be formed by a sputtering method in which atoms and molecules on the target surface are released by irradiating an inert gas such as argon accelerated by an electric field. At that time, a DLC film containing hydrogen can be formed by introducing a hydrocarbon gas such as methane or acetylene as a raw material gas together with an inert gas and decomposing the hydrocarbon gas by discharge.

本発明の摺動部材に用いる有機モリブデン含有潤滑剤は、有機モリブデン化合物を質量基準で50〜1500ppm、特に200〜1200ppm含むものであることが好ましい。有機モリブデン化合物の含有量が少なすぎると摩擦係数の低下効果があまりみられず、一方、多すぎても摩擦係数の低下が飽和する(一定の値以下には下がらない)上に有機モリブデン化合物の分散に問題が生じるが、上記の範囲であればそのような問題が生じない。   The organomolybdenum-containing lubricant used for the sliding member of the present invention preferably contains an organomolybdenum compound in an amount of 50 to 1500 ppm, particularly 200 to 1200 ppm, based on mass. If the content of the organomolybdenum compound is too small, the effect of reducing the friction coefficient is not so much seen. On the other hand, if the content is too large, the decrease in the friction coefficient is saturated (it does not fall below a certain value), and the Although a problem occurs in dispersion, such a problem does not occur within the above range.

有機モリブデン含有潤滑剤に含まれる有機モリブデン化合物としては、モリブデンジチオカーバメート(MoDTC)や、モリブデンジチオホスフェート(MoDTP)、モリブデンアミンコンプレックスなどが挙げられるが、なかでもMoDTCやMoDTPが好ましい。   Examples of the organomolybdenum compound contained in the organomolybdenum-containing lubricant include molybdenum dithiocarbamate (MoDTC), molybdenum dithiophosphate (MoDTP), and molybdenum amine complex, among which MoDTC and MoDTP are preferable.

MoDTCとしては、硫化モリブデンジアルキルジチオカーバメートや硫化オキシモリブデンジアルキルジチオカーバメートが好ましい。これらの有機モリブデン化合物において、アルキル基は炭素数4〜18の分岐又は直鎖のアルキル基が好ましく、具体的にはブチル基、2−エチルヘキシル基、イソトリデシル基、ステアリル基などが好ましい。1分子中に存在するアルキル基は、同一であって異なっていてもよい。   MoDTC is preferably molybdenum dialkyldithiocarbamate sulfide or sulfurized oxymolybdenum dialkyldithiocarbamate. In these organic molybdenum compounds, the alkyl group is preferably a branched or straight chain alkyl group having 4 to 18 carbon atoms, and specifically, a butyl group, a 2-ethylhexyl group, an isotridecyl group, a stearyl group, or the like is preferable. The alkyl groups present in one molecule may be the same and different.

MoDTPとしては、硫化モリブデンジアルキルジチオホスフェート、硫化オキシモリブデンジアルキルジチオホスフェートが好ましい。これらの有機モリブデン化合物において、アルキル基は炭素数4〜18の分岐又は直鎖のアルキル基が好ましく、具体的にはブチル基、2−エチルヘキシル基、イソトリデシル基、ステアリル基などが好ましい。1分子中に存在するアルキル基は、同一であってもよく、異なっていてもよい。   MoDTP is preferably molybdenum sulfide dialkyldithiophosphate or sulfurized oxymolybdenum dialkyldithiophosphate. In these organic molybdenum compounds, the alkyl group is preferably a branched or straight chain alkyl group having 4 to 18 carbon atoms, and specifically, a butyl group, a 2-ethylhexyl group, an isotridecyl group, a stearyl group, or the like is preferable. The alkyl groups present in one molecule may be the same or different.

有機モリブデン含有潤滑剤は、摩擦調節剤としての有機モリブデン化合物に加えて、通常のエンジンオイルに用いられる添加剤、例えば酸化防止剤、清浄分散剤、粘度指数向上剤、防錆剤、消泡剤、油性向上剤、極圧添加剤などを含んでいてもよい。   In addition to organic molybdenum compounds as friction modifiers, organic molybdenum-containing lubricants are additives that are used in ordinary engine oils, such as antioxidants, detergent dispersants, viscosity index improvers, rust inhibitors, and antifoaming agents. , Oiliness improvers, extreme pressure additives and the like may be included.

以下、実施例を用いて本発明をより詳細に説明するが、本発明はこれら実施例に限定されるものではない。   EXAMPLES Hereinafter, although this invention is demonstrated in detail using an Example, this invention is not limited to these Examples.

(実施例1)
ステンレス鋼(JIS規格SUS440C、焼入れ品、表面硬さHv500)の棒材より16mm×6mm×10mmのサイコロ試験片(表面粗さ0.1μmRa)を作製した。このサイコロ試験片の16mm×6mm面に、アンバランスドマグネトロンスパッタリング法(一個のグラファイトターゲットと一個のPtターゲット、フローガス:メタン5%含有アルゴン、バイアス電圧:グラファイト側100V、Pt側80V、温度100℃)を用いて厚さ1.5μmのDLC膜を形成した。形成されたPt含有DLC膜は、表面粗さが0.12μmRa、硬さがHv2000、Pt量が4at%、Ptのクラスターの大きさが50nm、水素量が10at%であった。
Example 1
A 16 mm × 6 mm × 10 mm dice test piece (surface roughness 0.1 μmRa) was prepared from a rod of stainless steel (JIS standard SUS440C, quenched product, surface hardness Hv500). An unbalanced magnetron sputtering method (one graphite target and one Pt target, flow gas: argon containing 5% methane, bias voltage: 100V on the graphite side, 80V on the Pt side, temperature 100) C.) was used to form a DLC film having a thickness of 1.5 μm. The formed Pt-containing DLC film had a surface roughness of 0.12 μmRa, a hardness of Hv2000, a Pt amount of 4 at%, a Pt cluster size of 50 nm, and a hydrogen amount of 10 at%.

一方、相手摺動部材として、ステンレス鋼(JIS規格SUS440C)を用いて外径35mm、内径30mm、幅10mmの円筒試験片を製作した(表面粗さ0.2μmRa、表面硬さHv380)。   On the other hand, a cylindrical test piece having an outer diameter of 35 mm, an inner diameter of 30 mm, and a width of 10 mm was manufactured using stainless steel (JIS standard SUS440C) as the mating sliding member (surface roughness 0.2 μmRa, surface hardness Hv380).

サイコロ試験片のDLC膜形成面と円筒試験片の外周面とを接触させ、オイル(SAE5W−30、MoDTC700ppm含有、油温80℃)を供給しながら、荷重60kgf、回転数160rpmにて、円筒試験片を30分間回転させる摩耗試験を行った。サイコロ試験片の摩耗量を摩耗痕深さとして、円筒試験片の摩耗量を摩耗重量として、それぞれ測定した。また、30分後の摩擦係数を測定した。   The DLC film formation surface of the dice test piece and the outer peripheral surface of the cylindrical test piece were brought into contact with each other, and while supplying oil (SAE5W-30, containing MoDTC 700 ppm, oil temperature 80 ° C.), the cylinder test was performed at a load of 60 kgf and a rotation speed of 160 rpm. A wear test was performed in which the piece was rotated for 30 minutes. The wear amount of the dice specimen was measured as the wear scar depth, and the wear amount of the cylindrical specimen was measured as the wear weight. Further, the coefficient of friction after 30 minutes was measured.

(実施例2)
サイコロ試験片のDLC膜におけるPt量を0.2at%、0.3at%、9at%、12at%とした以外は、実施例1と同様にした。
(Example 2)
The same procedure as in Example 1 was performed except that the Pt amount in the DLC film of the dice test piece was 0.2 at%, 0.3 at%, 9 at%, and 12 at%.

(比較例1)
サイコロ試験片のDLC膜形成時にPtターゲットを用いない以外は実施例1と同様にした。形成された添加金属非含有DLC膜は、表面粗さが0.12μmRa、硬さがHv2100、水素量が10at%であった。
(Comparative Example 1)
The same procedure as in Example 1 was performed except that the Pt target was not used when the DLC film was formed on the dice test piece. The formed additive-metal-free DLC film had a surface roughness of 0.12 μmRa, a hardness of Hv2100, and a hydrogen content of 10 at%.

実施例1および2、ならびに比較例1で得られたデータを表1にまとめた。DLC膜におけるPtの添加量が0.3at%、4at%、9at%である場合に、特に摩耗が少なく、かつ摩擦係数も低いという結果が得られた。   The data obtained in Examples 1 and 2 and Comparative Example 1 are summarized in Table 1. When the addition amount of Pt in the DLC film was 0.3 at%, 4 at%, and 9 at%, the results were that the wear was particularly small and the friction coefficient was low.

Figure 0005712919
Figure 0005712919

(実施例3)
サイコロ試験片のDLC膜形成時に、Ptターゲットに替えてRhターゲットを用いた以外は実施例1と同様にした。形成されたRh含有DLC膜は、表面粗さが0.12μmRa、硬さがHv1800、Rh量が4at%、Rhのクラスターの大きさが80nm、水素量が12at%であった。
(Example 3)
The same procedure as in Example 1 was performed except that the Rh target was used instead of the Pt target when the DLC film was formed on the dice test piece. The formed Rh-containing DLC film had a surface roughness of 0.12 μmRa, a hardness of Hv1800, an Rh amount of 4 at%, an Rh cluster size of 80 nm, and a hydrogen amount of 12 at%.

(実施例4)
サイコロ試験片のDLC膜におけるRh量を0.2at%、0.3at%、9at%、12at%とした以外は、実施例3と同様にした。
Example 4
The same procedure as in Example 3 was performed except that the Rh amount in the DLC film of the dice test piece was 0.2 at%, 0.3 at%, 9 at%, and 12 at%.

実施例3および4、ならびに比較例1で得られたデータを表2にまとめた。Ptに替えてRhを用いた場合も、Ptを用いた場合と同等の結果が得られた。   The data obtained in Examples 3 and 4 and Comparative Example 1 are summarized in Table 2. When Rh was used instead of Pt, the same result as that obtained when Pt was used was obtained.

Figure 0005712919
Figure 0005712919

(比較例2)
サイコロ試験片のDLC膜形成時に、Ptターゲットに替えてMoターゲットを用いた以外は実施例1と同様にした。形成されたMo含有DLC膜は、表面粗さが0.12μmRa、硬さがHv1850、Mo量が4at%、Moのクラスターの大きさが70nm、水素量が11at%であった。
(Comparative Example 2)
The same procedure as in Example 1 was performed except that a Mo target was used instead of the Pt target when the DLC film was formed on the dice test piece. The formed Mo-containing DLC film had a surface roughness of 0.12 μmRa, a hardness of Hv1850, a Mo amount of 4 at%, a Mo cluster size of 70 nm, and a hydrogen amount of 11 at%.

(比較例3)
サイコロ試験片のDLC膜形成時に、Ptターゲットに替えてWターゲットを用いた以外は実施例1と同様にした。形成されたW含有DLC膜は、表面粗さが0.12μmRa、硬さがHv1900、W量が4.5at%、Wのクラスターの大きさが70nm、水素量が10at%であった。
(Comparative Example 3)
The same procedure as in Example 1 was performed except that a W target was used in place of the Pt target when the DLC film was formed on the dice test piece. The formed W-containing DLC film had a surface roughness of 0.12 μmRa, a hardness of Hv1900, a W amount of 4.5 at%, a W cluster size of 70 nm, and a hydrogen amount of 10 at%.

(比較例4)
サイコロ試験片のDLC膜形成時に、Ptターゲットに替えてVターゲットを用いた以外は実施例1と同様にした。形成されたV含有DLC膜は、表面粗さが0.11μmRa、硬さがHv1800、V量が4at%、Vのクラスターの大きさが80nm、水素量が11at%であった。
(Comparative Example 4)
The same procedure as in Example 1 was performed except that a V target was used instead of the Pt target when the DLC film was formed on the dice test piece. The formed V-containing DLC film had a surface roughness of 0.11 μmRa, a hardness of Hv1800, a V amount of 4 at%, a V cluster size of 80 nm, and a hydrogen amount of 11 at%.

(比較例5)
サイコロ試験片のDLC膜形成時に、Ptターゲットに替えてTiターゲットを用いた以外は実施例1と同様にした。形成されたTi含有DLC膜は、表面粗さが0.13μmRa、硬さがHv1900、Ti量が4at%、Tiのクラスターの大きさが100nm、水素量が12at%であった。
(Comparative Example 5)
The same procedure as in Example 1 was performed except that a Ti target was used instead of the Pt target when the DLC film was formed on the dice test piece. The formed Ti-containing DLC film had a surface roughness of 0.13 μmRa, a hardness of Hv1900, a Ti amount of 4 at%, a Ti cluster size of 100 nm, and a hydrogen amount of 12 at%.

比較例1〜5で得られたデータを実施例1および3のデータと共に表3にまとめた。Ptに替えてMo、W、VまたはTiを用いた場合、摩擦係数は若干低下したものの、サイコロ試験片摩耗量に関しては、むしろ添加金属非含有のものよりも増加した。   The data obtained in Comparative Examples 1 to 5 are summarized in Table 3 together with the data of Examples 1 and 3. When Mo, W, V, or Ti was used in place of Pt, the friction coefficient slightly decreased, but the die specimen wear amount increased rather than that containing no added metal.

Figure 0005712919
Figure 0005712919

Claims (5)

含むダイヤモンドライクカーボン膜を摺動面に備え、前記Rhは200nm以下の大きさを有するクラスターの状態でダイヤモンドライクカーボン膜中に分散している、有機モリブデン含有潤滑剤を用いた摺動のための摺動部材。 It comprises a diamond-like carbon film containing R h on the sliding surface, sliding the Rh is dispersed in the diamond-like carbon film in the state of the cluster having a size of less than 200 nm, using an organic molybdenum-containing lubricant Sliding member for. ダイヤモンドライクカーボン膜がRhを0.25〜10at%含む、請求項1に記載の摺動部材。 The sliding member according to claim 1, wherein the diamond-like carbon film contains 0.25 to 10 at% of Rh . ダイヤモンドライクカーボン膜が水素を0〜35at%含む、請求項1または2に記載の摺動部材。   The sliding member according to claim 1 or 2, wherein the diamond-like carbon film contains 0 to 35 at% of hydrogen. 潤滑剤が有機モリブデン化合物を50〜1500ppm含む、請求項1〜3のいずれか1項に記載の摺動部材。   The sliding member according to any one of claims 1 to 3, wherein the lubricant contains 50 to 1500 ppm of an organic molybdenum compound. 含むダイヤモンドライクカーボン膜を摺動面に備え、前記Rhは200nm以下の大きさを有するクラスターの状態でダイヤモンドライクカーボン膜中に分散している摺動部材と、該摺動面に供給される有機モリブデン含有潤滑剤とからなる、摺動部材と潤滑剤との組み合わせ。 It comprises a diamond-like carbon film containing R h on the sliding surface, wherein Rh is a sliding member which is dispersed in the diamond-like carbon film in the state of the cluster having a size of less than 200 nm, supplied to sliding surfaces A combination of a sliding member and a lubricant comprising an organic molybdenum-containing lubricant.
JP2011287954A 2011-12-28 2011-12-28 Low friction sliding member Expired - Fee Related JP5712919B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2011287954A JP5712919B2 (en) 2011-12-28 2011-12-28 Low friction sliding member

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011287954A JP5712919B2 (en) 2011-12-28 2011-12-28 Low friction sliding member

Publications (2)

Publication Number Publication Date
JP2013136664A JP2013136664A (en) 2013-07-11
JP5712919B2 true JP5712919B2 (en) 2015-05-07

Family

ID=48912669

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011287954A Expired - Fee Related JP5712919B2 (en) 2011-12-28 2011-12-28 Low friction sliding member

Country Status (1)

Country Link
JP (1) JP5712919B2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017174305A1 (en) * 2016-04-08 2017-10-12 Croda International Plc A lubricated system comprising a dlc surface
CN114262868A (en) * 2021-12-03 2022-04-01 中船重工重庆液压机电有限公司 Surface DLC coating bonding method for copper alloy outer shim

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4007440B2 (en) * 2000-04-28 2007-11-14 三宅 正二郎 Hard carbon film sliding member
JP4793531B2 (en) * 2001-07-17 2011-10-12 住友電気工業株式会社 Amorphous carbon coating, method for producing amorphous carbon coating, and coating member for amorphous carbon coating

Also Published As

Publication number Publication date
JP2013136664A (en) 2013-07-11

Similar Documents

Publication Publication Date Title
EP2290119B1 (en) Slide part
JP4007440B2 (en) Hard carbon film sliding member
JP4784248B2 (en) Sliding structure and sliding method
Neville et al. Compatibility between tribological surfaces and lubricant additives—how friction and wear reduction can be controlled by surface/lube synergies
JP5141654B2 (en) Sliding parts
JP2009114311A (en) Slide structure
JP2008195903A (en) Sliding structure
JP2006152428A (en) Hard carbon coated sliding member
JP6114730B2 (en) Sliding system
JP6295285B2 (en) Sliding system
JP5298451B2 (en) Sliding structure
JP5712919B2 (en) Low friction sliding member
JP2015108181A (en) Slide member of vehicle and valve train of vehicle
JP2011246792A (en) Slide part
JP7040532B2 (en) Low friction sliding mechanism
JP4816940B2 (en) Hard carbon coating
JP4135087B2 (en) Hard carbon film for sliding member and manufacturing method thereof
JP2022071283A (en) Slide mechanism
US11781195B2 (en) High-strength steels for the formation of wear-protective lubricious tribofilms directly from hydrocarbon fluids
JP4968619B2 (en) Hard carbon coating
US11566203B2 (en) Sub-stoichiometric metal nitrides
JP7061006B2 (en) Sliding members and sliding machines
JP5640942B2 (en) Sliding member and manufacturing method thereof
JP2022125543A (en) sliding system
JP2007162470A (en) Hard carbon coating slide member

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20140117

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20140626

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20140708

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20140901

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20150210

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20150223

R151 Written notification of patent or utility model registration

Ref document number: 5712919

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R151

LAPS Cancellation because of no payment of annual fees