JP5700793B2 - Laser processing equipment - Google Patents

Description

  The present invention relates to a laser processing apparatus, and more particularly to an improvement of a laser processing apparatus that processes a processing object by irradiating a laser beam.

  The laser processing apparatus can form a processing pattern on the workpiece by two-dimensionally scanning the irradiation position of the laser beam based on the processing setting data. In order to perform such two-dimensional scanning, the laser processing apparatus includes an XY scanner (for example, Patent Document 1). The XY scanner is composed of two galvano motors having motor axes orthogonal to each other and two mirror modules attached to these motor shafts. An XY scanner having such a configuration is called a galvano scanner.

  FIG. 14 is a view showing a part of an XY scanner in a conventional laser processing apparatus, in which a mirror module 11 attached to a motor shaft 100 is shown. The mirror module 11 is a member in which a mirror 20 for reflecting laser light is attached to a mirror mounter 21, and is attached to the motor shaft 100 using a mirror fixing member 22 and an engagement screw 23. That is, the mirror module 11 is attached to the motor shaft 100 by fastening the mirror module 11 and the mirror fixing member 22 using the two engagement screws 23 with the motor shaft 100 interposed therebetween.

  FIG. 15 is a cross-sectional view of the mirror module 11 of FIG. 14 cut along the line CC. The mirror mounter 21 is formed with a curved surface portion 212 that is brought into contact with the motor shaft 100, and the mirror fixing member 22 is also formed with a curved surface portion 222 that is brought into contact with the motor shaft 100. Each of these curved surface portions 212 and 222 is an arc-shaped concave curved surface, and the curvature thereof matches the curvature of the motor shaft 100. By holding the motor shaft 100 between the mirror mounter 21 and the mirror fixing member 22 as described above, the motor shaft 100 can be firmly tightened while ensuring a wide contact area, and the mirror module 11 can be prevented from falling off due to vibration or the like. It is preventing.

JP 2002-316277 A

  The inventors have studied to reduce the angle error of the XY scanner in order to develop a high-precision laser processing apparatus. As a result, the angle accuracy of the XY scanner is generally considered to be determined according to the drive accuracy of the motor. However, apart from the drive error of the motor, a slight angle error occurs in the XY scanner as the temperature changes. I found out. This angular error is on the order of seconds (1/3600 °), and is a level that has not been considered a problem with conventional laser processing equipment. Even if it exists, there is a possibility of affecting the machining accuracy.

  Such an angle error is considered to be caused by expansion or contraction of the mirror mounter 21, the mirror fixing member 22, and the motor shaft 100. When the temperature environment changes, the motor shaft 100 slightly expands or contracts, or the mirror mounter 21 and the mirror fixing member 22 are slightly deformed. As a result, it is considered that the mirror mounter 21 is slightly rotated with respect to the motor shaft 100 and an error occurs in the angle of the reflection surface with respect to the motor shaft 100. In addition, it is considered that an angle error also occurs when a temperature gradient occurs in members such as the mirror mounter 21, the mirror fixing member 22, and the motor shaft 100, or when a temperature difference occurs between these members.

  This invention is made | formed in view of said situation, and it aims at providing the laser processing apparatus which can perform a highly accurate laser processing. In particular, an object is to provide a laser processing apparatus capable of performing two-dimensional scanning of an irradiation position with high accuracy. It is another object of the present invention to provide a laser processing apparatus capable of performing high-precision laser processing by suppressing an angle error of a scanner due to a temperature change.

A laser processing apparatus according to a first aspect of the present invention is a laser processing apparatus including a scanner that scans a laser beam on an object to be processed. The scanner reflects a drive motor that rotates a motor shaft, and reflects the laser light. And a mirror module having a first mounting member that supports the reflecting mirror and is attached to the motor shaft, and is arranged to face the first mounting member across the motor shaft, A first curved surface portion that comes into contact with the outer peripheral surface of the motor shaft in a state of sandwiching the second mounting member and the motor shaft. The first curved surface portion is configured such that the circumferential width thereof is less than ¼ of the outer peripheral length of the motor shaft .

With such a configuration, the contact surface of the first mounting member with respect to the motor shaft can be narrowed, and the area where the frictional force is generated can be reduced as compared with the prior art shown in FIG. As a result, as in the prior art shown in FIG. 15, a frictional force is not generated around the entire periphery of the motor shaft, but a frictional force is generated within a limited range shorter than the entire periphery. In other words, when the motor shaft is clamped by the first and second mounting members, the direction of the force applied to the motor shaft from the first and second mounting members is changed from almost the entire circumference of the motor shaft from the entire circumference. Can also be collected in a short limited range. For this reason, even when the temperature environment changes, it is difficult for the mirror module to rotate with respect to the motor shaft, and the occurrence of an angle error can be suppressed. In particular, by reducing the contact surface between the first mounting member and the motor shaft and reducing the contact surface between the second mounting member and the motor shaft, the area where the frictional force is generated is further reduced. Therefore, the occurrence of an angle error can be further suppressed. Moreover, the contact surface with respect to a motor shaft can be narrowed by making the width | variety of the circumferential direction of the 1st curved surface part of a 1st attachment member into less than 1/4 of the outer peripheral length of a motor shaft. For this reason, in the contact surface with respect to the motor shaft of the 1st and 2nd attachment member, it arrange | positions so that the point where a frictional force becomes the maximum in the circumferential direction may respectively become more symmetrical about the center of a motor shaft. Therefore, even when the temperature environment changes, it is possible to suppress the rotation of the mirror module with respect to the motor shaft and the occurrence of an angle error.
In addition to the above configuration, the laser processing apparatus according to the second aspect of the present invention is configured such that the second mounting member is in contact with the outer peripheral surface of the motor shaft while sandwiching the first mounting member and the motor shaft. A curved surface portion is provided, and the second curved surface portion is configured such that the circumferential width thereof is less than ¼ of the outer peripheral length of the motor shaft.
In the laser processing apparatus according to the third aspect of the present invention, in addition to the above configuration, the first curved surface portion and the second curved surface portion both have a circumferential width that is less than 1/6 of the outer peripheral length of the motor shaft. It is comprised so that it may be formed.

A laser processing apparatus according to a fourth aspect of the present invention is a laser processing apparatus including a scanner that scans a laser beam on an object to be processed, wherein the scanner reflects a drive motor that rotates a motor shaft, and reflects the laser light. And a mirror module having a first mounting member that supports the reflecting mirror and is attached to the motor shaft, and is arranged to face the first mounting member across the motor shaft, A second attachment member attached to the motor shaft, each of the first attachment member and the second attachment member holding the motor shaft, and a direction perpendicular to the motor shaft from the holding portion. and a pair first engagement portion and a second fastening portion extending holding portion of the first mounting member, the first attachment member side of the first engagement portion and the second mounting member side 1 of the fastening portion and is fastened, in a state where the second engagement portion of the first attachment member side and the second engagement portion of the second mounting member side is fastened, the outer peripheral surface of the motor shaft The first curved surface portion and a non-contact surface having a smaller curvature than the first curved surface portion and spaced apart from the motor shaft, wherein the first curved surface portion has a width in the circumferential direction described above. The motor shaft is configured to be less than ¼ of the outer peripheral length of the motor shaft.

With this configuration, with the holding portion of the first mounting member side, it is possible to narrow the contact surface with respect to the motor shaft, as compared with the prior art shown in FIG. 15, the frictional force to reduce the area to be generated be able to. As a result, as in the prior art shown in FIG. 15, the frictional force is generated not in almost the entire periphery of the motor shaft, but in a limited range shorter than the entire periphery. Even when the temperature environment changes, it is difficult for the mirror module to rotate with respect to the motor shaft, and the occurrence of an angle error can be suppressed.

In the laser processing apparatus according to the fifth aspect of the present invention, in addition to the above configuration, the first fastening portion on the first attachment member side and the first fastening portion on the second attachment member side are fastened by screws. , a second engagement portion of the first mounting member side, and a second engagement portion of the second mounting member side, are fastened by screw terminal.

A laser processing apparatus according to a sixth aspect of the present invention is a laser processing apparatus including a scanner that scans a laser beam on an object to be processed. The scanner reflects a drive motor that rotates a motor shaft, and reflects the laser light. And a mirror module having a first mounting member that supports the reflecting mirror and is attached to the motor shaft, and is arranged to face the first mounting member across the motor shaft, A second attachment member attached to the motor shaft, each of the first attachment member and the second attachment member holding the motor shaft, and a direction perpendicular to the motor shaft from the holding portion. A first fastening portion and a second fastening portion that extend to each other, and the first fastening portion on the first attachment member side and the first fastening portion on the second attachment member side are fastened, In the state where the second fastening portion on the side of the first mounting member and the second fastening portion on the side of the second mounting member are fastened, the surface on the motor shaft side of the holding portion of the first mounting member or At least one of the surfaces on the motor shaft side of the holding portion of the second mounting member has a curvature smaller than the curvature of the motor shaft, and is separated from the motor shaft to avoid contact with the motor shaft A non-contact surface is formed, and the first attachment member and the second attachment member are in contact with the first fastening portion on the first attachment member side and the first fastening portion on the second attachment member side. The motor shaft is clamped in a state where the second fastening portion on the first mounting member side and the second fastening portion on the second mounting member side are in contact with each other.

A laser processing apparatus according to a seventh aspect of the present invention is a laser processing apparatus including a scanner that scans a laser beam on an object to be processed, wherein the scanner reflects a drive motor that rotates a motor shaft, and reflects the laser light. A reflecting mirror, a mirror module that supports the reflecting mirror and includes a first mounting member that is mounted on the motor shaft, and is arranged to face the first mounting member across the motor shaft, A second attachment member attached to the motor shaft, and the friction coefficient of the contact surface of the second attachment member with the motor shaft is greater than the friction coefficient of the contact surface of the first attachment member with the motor shaft. Configured to be smaller.

  With such a configuration, the frictional force of the contact surface of the second mounting member with respect to the motor shaft is smaller than the frictional force of the contact surface of the first mounting member. For this reason, even when the temperature environment changes and the motor shaft or the like slightly expands or contracts, the displacement of the mirror module relative to the motor shaft is smaller than the displacement of the second mounting member relative to the motor shaft. Thus, the occurrence of an angle error can be suppressed.

In addition to the above configuration, the laser processing apparatus according to the eighth aspect of the present invention is configured such that the contact surface of the first mounting member with the motor shaft has a curvature smaller than the curvature of the motor shaft.

  With this configuration, the motor shaft can be brought into point contact with respect to the circumferential direction of the concave surface of the first mounting member. Therefore, even if the temperature environment changes, the position of the contact point of the first mounting member on the motor shaft does not change, so that the mirror module rotates with respect to the motor shaft and an angular error is prevented from occurring. be able to.

Laser machining apparatus according to the present invention of a 9, in addition to the above configuration, the contact surface between the motor shaft of the first mounting member, the contact surface between the motor shaft of the second mounting member, the same The contact surface of the second mounting member is made of a material and is subjected to surface processing so that the friction coefficient of the contact surface of the second mounting member is smaller than that of the first mounting member. The

  With such a configuration, even when the first and second mounting members are made of the same material, the friction coefficient of the contact surface of the second mounting member is greater than that of the contact surface of the first mounting member. It can be easily reduced.

  ADVANTAGE OF THE INVENTION According to this invention, the laser processing apparatus which can perform a highly accurate laser processing can be provided. In particular, it is possible to provide a laser processing apparatus that can perform two-dimensional scanning of an irradiation position with high accuracy. Further, it is possible to provide a laser processing apparatus capable of performing high-precision laser processing by suppressing the angle error of the scanner due to temperature change.

It is the perspective view which showed one structural example of the principal part of the laser processing apparatus by Embodiment 1 of this invention, and the external appearance of XY scanner is shown. It is the external view which showed the example of 1 structure of the mirror module 11 of FIG. It is the external view which showed the example of 1 structure of the mirror module 11 of FIG. It is sectional drawing at the time of cut | disconnecting by the B1-B1 cutting line and B2-B2 cutting line of FIG. It is the exploded view which showed the mode at the time of the assembly of the mirror module 11 of FIG. It is the exploded view which showed the mode at the time of the assembly of the mirror module 11 of FIG. FIG. 4 is an explanatory diagram showing a relationship among a mirror module 11, a mirror fixing member 22, and a motor shaft 100. It is the figure which showed the measurement result about the angle error accompanying the change of temperature environment. It is the figure which showed an example about the principal part of the laser processing apparatus by Embodiment 2 of this invention. It is the figure which showed an example about the principal part of the laser processing apparatus by Embodiment 3 of this invention. It is the figure which showed an example about the principal part of the laser processing apparatus by Embodiment 4 of this invention. It is the figure which showed an example about the principal part of the laser processing apparatus by Embodiment 5 of this invention. It is the figure which showed an example about the principal part of the laser processing apparatus by Embodiment 6 of this invention. It is the figure which showed a part of XY scanner in the conventional laser processing apparatus. It is sectional drawing at the time of cut | disconnecting the mirror module 11 of FIG. 14 by CC cutting line.

Embodiment 1 FIG.
FIG. 1 is a perspective view showing a configuration example of a main part of a laser processing apparatus according to Embodiment 1 of the present invention, and shows an external appearance of an XY scanner. This XY scanner is a scanner for two-dimensionally scanning the irradiation position of a laser beam on a workpiece. Two galvano motors 10A and 10B having motor shafts orthogonal to each other are attached to these motor shafts. The galvano scanner is composed of two mirror modules 11A and 11B. The laser light L incident on the XY scanner is reflected by the mirror module 11A, then reflected by the mirror module 11B, and irradiated to the object to be processed through a condenser lens (not shown).

  The galvano motors 10A and 10B are motors that control the angle of the motor shaft based on a control signal, for example, stepping motors. The mirror modules 11A and 11B are reflectors that perform a rotational motion reciprocating within a predetermined angle range around the motor shaft of the galvano motors 10A and 10B. By making the motor axes of the galvano motors 10A and 10B orthogonal to each other, if the orthogonal coordinate axes on the scanning plane orthogonal to the optical axis of the condensing lens are the X and Y axes, Can be associated with each.

  The galvano motors 10A and 10B are attached to the head housing of the laser processing apparatus using the motor mounter 12 and the motor fixing portions 13A and 13B. The motor mounter 12 is an integrally formed metal block, and is fixed with the motor mounting surface 120 in close contact with the inner surface of the head housing. The motor fixing portions 13A and 13B are engaged with the motor mounter 12 so as to face the motor mounting surfaces 121 and 122 of the motor mounter 12. That is, the galvano motor 10A is sandwiched between the motor mounting surface 121 and the motor fixing portion 13A, and the galvano motor 10B is sandwiched between the motor mounting surface 122 and the motor fixing portion 13B.

  Since the galvano motors 10A and 10B have the same configuration, they are collectively referred to as the galvano motor 10 as appropriate. Similarly, since the mirror modules 11A and 11B have the same configuration, they are collectively referred to as the mirror module 11 as appropriate.

  2 and 3 are external views showing a configuration example of the mirror module 11 of FIG. 2A is a front view of the reflecting surface viewed from the front, FIG. 2B is a side view, and FIG. 3A is a plan view viewed from the direction A1 of FIG. (B) is a plan view (A2 arrow view) seen from the A2 direction of FIG. 4A is a cross-sectional view taken along the line B1-B1 in FIG. 3, and FIG. 4B is a cross-sectional view taken along the line B2-B2 in FIG.

  The mirror module 11 includes a mirror 20 that reflects the laser light L and a mirror mounter 21 that holds the mirror 20. By fastening the mirror mounter 21 with the mirror fixing member 22, the motor shaft 100 of the galvano motor 10 is held and the mirror module 11 is attached to the motor shaft 100.

  The mirror 20 has a substantially rectangular shape with the extending direction of the motor shaft 100 as the longitudinal direction, and one end in the longitudinal direction is fixed to the mirror mounter 21. For example, one end of the mirror 20 is inserted into the notch 21C of the mirror mounter 21 and is fixed to the mirror mounter 21 with an adhesive.

  The mirror mounter 21 is a mirror mounting member for mounting the mirror 20 to the motor shaft 100 of the galvano motor 10, and is made of a metal material such as aluminum. The mirror mounter 21 includes a cylindrical mounter main body 21A and a U-shaped mounter engaging portion 21B. A cutout 21C for the mirror 20 is formed on one end surface of the mounter main body 21A, while the other A mounter engaging portion 21B is formed on the end face of the.

  The mounter engaging portion 21B has a U-shape in which both ends of an elongated rectangular parallelepiped are bent by 90 ° in the same direction. That is, the mounter engaging portion 21 </ b> B includes one holding portion 210 that contacts the motor shaft 100 and two fastening portions 211 that are fastened to the mirror fixing member 22, and two fastening portions 211 at both ends of the holding portion 210. It has a shape in which one side of a rectangular frame obtained by connecting one end of each is opened.

  The inner surface of the holding part 210 facing the motor shaft 100 is composed of one curved surface part 212 and two flat surface parts 213. The curved surface portion 212 is a concave curved surface in which a cross section perpendicular to the motor shaft 100 has an arc shape, and the curvature thereof matches the curvature of the motor shaft 100. Therefore, when the motor shaft 100 is brought into contact with the curved surface portion 212, the curved surface portion 212 becomes a contact surface that comes into contact with the motor shaft 100, and the holding portion 210 can be brought into surface contact with the outer peripheral surface of the motor shaft 100. The mirror mounter 21 can be attached to the motor shaft 100 so that the motor shaft 100 is brought into surface contact with the holding portion 210 in this way, so that the motor shaft 100 is accurately positioned and does not easily fall off.

  The two plane portions 213 are planes formed with the curved surface portion 212 interposed therebetween, and the curvature thereof is zero and is smaller than the curvature of the motor shaft 100. These flat portions 213 are spaced apart from the motor shaft 100 and form a non-contact surface for avoiding contact with the motor shaft 100. By forming such a plane portion 213 with the curved surface portion 212 interposed therebetween, non-contact surfaces for avoiding contact with the motor shaft 100 are formed on both sides with the motor shaft 100 interposed therebetween. For this reason, compared with the conventional XY scanner, a contact area with the motor shaft 100 can be reduced.

  The mirror fixing member 22 is a mirror fixing member that is engaged with the mounter engaging portion 21B across the motor shaft 100, holds the motor shaft 100 together with the mounter engaging portion 21B, and fixes the mirror module 11 to the motor shaft 100. Yes, and made of a metal material such as aluminum. The mirror fixing member 22 has a U-shape in which both ends in the longitudinal direction of the rectangular parallelepiped are bent by 90 ° in the same direction, and has substantially the same shape as the mounter engaging portion 21B described above. In other words, the mirror fixing member 22 includes one holding portion 220 that makes the motor shaft 100 contact, and two fastening portions 221 that are fastened to the mounter engaging portion 21 </ b> B, and two fastening portions 221 at both ends of the holding portion 220. It has a shape in which one side of a rectangular frame obtained by connecting one end of each is opened.

  In addition, the inner surface of the holding portion 220 facing the motor shaft 100 includes one curved surface portion 222 and two flat surface portions 223. The curved surface portion 222 is a concave curved surface having a circular cross section perpendicular to the motor shaft 100, and the curvature thereof matches the curvature of the motor shaft 100. Therefore, when the motor shaft 100 is brought into contact with the curved surface portion 222, the curved surface portion 222 becomes a contact surface in contact with the motor shaft 100, and the mirror fixing member 22 can be brought into surface contact with the outer peripheral surface of the motor shaft 100.

  The two plane portions 223 are planes formed with the curved surface portion 222 interposed therebetween, and the curvature thereof is zero and is smaller than the curvature of the motor shaft 100. These flat portions 223 are spaced apart from the motor shaft 100 and form a non-contact surface for avoiding contact with the motor shaft 100. By forming such a plane portion 223 with the curved surface portion 222 interposed therebetween, non-contact surfaces for avoiding contact with the motor shaft 100 are formed on both sides with the motor shaft 100 interposed therebetween. For this reason, compared with the conventional XY scanner, a contact area with the motor shaft 100 can be reduced.

  The engagement screw 23 is a fastening means for engaging the mirror mounter 21 and the mirror fixing member 22. The mounter engaging portion 21 </ b> B and the mirror fixing member 22 are disposed so as to surround the motor shaft 100 with the curved surface portions 212 and 222 facing each other and the end surfaces of the fastening portions 211 and 221 facing each other. The two engaging screws 23 are screwed so as to pass through both opposing end surfaces of the fastening portions 211 and 221, and connect the mounter engaging portion 21 </ b> B and the mirror fixing member 22. That is, the mounter engaging portion 21 </ b> B and the mirror fixing member 22 are engaged at two positions with the motor shaft 100 interposed therebetween. Further, the fastening portions 211 and 221 are formed so that a slight gap is formed between the opposing end surfaces. For this reason, the fastening portions 211 and 221 do not come into contact with each other even after the connection, and the curved surface portions 212 and 222 facing each other can be brought into contact with the motor shaft 100 reliably, so that the motor shaft 100 can be held.

  5 and 6 are exploded views showing a state when the mirror module 11 of FIG. 2 is assembled. FIG. 5 is a view (front view) seen from the same direction as FIG. 2B, and FIG. 6 is a plan view (A1 arrow view) seen from the same direction as FIG. .

  The two engaging screws 23 are screwed so as to be orthogonal to the motor shaft 100 and in opposite directions. That is, one engaging screw 23 is screwed from the outer surface of the mirror fixing member 22, passes through the mirror fixing member 22, and then screwed into the mounter engaging portion 21 </ b> B. The other engaging screw 23 is screwed from the outer surface of the mounter engaging portion 21B, passes through the mounter engaging portion 21B, and is then screwed into the mirror fixing member 22.

  By engaging the mounter engaging portion 21B and the mirror fixing member 22 using the two engaging screws 23 with the motor shaft 100 in contact with the curved surface portion 212 of the mounter engaging portion 21B, the curved surface is obtained. The motor shaft 100 is pressed against the curved surface portion 212 by the portion 222. Therefore, the motor shaft 100 can be held between the curved surfaces 212 and 222 facing each other, and the mirror module 11 can be fixed to the motor shaft 100.

  FIG. 7 is an explanatory view showing the relationship between the mirror module 11, the mirror fixing member 22, and the motor shaft 100. As shown in FIG. The width of the curved surface portions 212 and 222 in the circumferential direction of the motor shaft 100 is shorter than that of the conventional device. For example, the central angles θ1 and θ2 of the curved surface portions 212 and 222 are both about 50 °. For this reason, even if the temperature environment changes, it is possible to suppress the angle error from occurring due to the change of the angle of the reflecting surface of the mirror 20 with respect to the motor shaft 100 due to the change.

  The motor shaft 100 that is required to have high rigidity is made of stainless steel, whereas the mirror mounter 21 and the mirror fixing member 22 that are required to be lighter are made of aluminum, and they have different coefficients of thermal expansion. For this reason, if the room temperature changes or the temperature environment changes due to heat generation of the galvano motor 10, a positional deviation occurs in the rotational direction between the motor shaft 100 and the mirror mounter 21, and the angle error of the mirror 20. Become.

  However, such a positional shift includes, for example, a point P1 at which the frictional force between the curved surface portion 212 and the motor shaft 100 is maximized and a point P2 at which the frictional force between the curved surface portion 222 and the motor shaft 100 is maximized. Occurs as. The location of the points P1 and P2 is considered to change depending on how the fastening portions 211 and 221 are fastened or depending on how heat is applied to the motor shaft 100 or the like. For example, the right fastening portions 211 and 221 in FIG. 7 can be tightened from the left fastening portions 211 and 221 as shown in FIG. When the straight line connecting these points P1 and P2 passes through the center P0 of the motor shaft 100 or the vicinity thereof, the mirror 20 does not rotate relative to the motor shaft 100 even if the motor shaft 100 expands or contracts. It does not cause an angular error.

  However, when the contact area with the motor shaft 100 has a large width in the circumferential direction, it is possible to predict where the maximum points P1 and P2 of the frictional force are formed in the circumferential direction within the contact area. It is difficult and it is not easy to suppress the angle error.

  Therefore, in the laser processing apparatus according to the present embodiment, the circumferential widths of the curved surface portions 212 and 222, that is, the circumferential direction of the contact region where the mounter engaging portion 21 </ b> B and the mirror fixing member 22 are in contact with the motor shaft 100. Both widths are narrowed. In other words, a non-contact area exists on both sides of the motor shaft 100. By adopting such a configuration, the straight line connecting the maximum points P1 and P2 of the frictional force can be arranged so as to pass through the center of the motor shaft 100 or the vicinity thereof. That is, the maximum points P1 and P2 of the frictional force can be arranged so as to be substantially symmetric with respect to the motor shaft 100. For this reason, the angle of the mirror 20 with respect to the motor shaft 100 can be prevented from changing due to a change in the temperature environment, thereby preventing an angle error.

  In particular, since the circumferential widths of the curved surface portions 212 and 222 are less than ¼ of the outer peripheral length of the motor shaft 100, that is, the central angle with respect to the motor shaft 100 is less than 90 °, the temperature change It is possible to suppress the occurrence of angle error due to. Further, if the circumferential widths of the curved surface portions 212 and 222 are each set to be less than 1/6 of the outer peripheral length of the motor shaft 100, that is, the central angle with respect to the motor shaft 100 is less than 60 °, the temperature changes. It is possible to more effectively suppress the occurrence of an angle error.

  Moreover, since the curved surface portions 212 and 222 are concave curved surfaces that coincide with the outer diameter of the motor shaft 100 and the motor shaft 100 is in surface contact with these concave curved surfaces, the mirror mounter 21 and the mirror fixing member 22 are caused by vibration. Can be prevented from falling off the motor shaft 100. Further, the mirror mounter 21 can be accurately positioned with respect to the motor shaft 100, and the mounting operation of the mirror mounter 21 with respect to the motor shaft 100 is facilitated.

  As described above, according to FIG. 7, the contact surface that contacts the motor shaft 100 among the surfaces of the holding unit 210 of the mounter engaging portion 21 </ b> B on the motor shaft 100 side is limited to a narrow region as the curved surface portion 212. . In addition, of the surface on the motor shaft 100 side of the holding portion 220 of the mirror fixing member 22, the contact surface that contacts the motor shaft 100 is limited to a narrow region as the curved surface portion 222. In addition, the phase portion 212 and the curved surface portion 222 are formed at positions that are substantially symmetric with respect to the motor shaft 100. By adopting such a configuration, the direction of the force applied to the motor shaft 100 from the holding portion 210 of the mounter engaging portion 21B (downward in FIG. 7) and the holding portion 220 of the mirror fixing member 22 are applied to the motor shaft 100. The direction of the force (upward in FIG. 7) is substantially parallel and is opposite to the direction of approximately 180 °. That is, the region where the frictional force acts on the motor shaft (the curved surface portion 212 and the curved surface portion 222) and the center P0 of the motor shaft 100 are substantially in a straight line. Therefore, even if any or all of the mounter engaging portion 21B, the mirror fixing member 22, and the motor shaft 100 are expanded or contracted due to changes in the temperature environment, the motor shaft 100 and the mounter It is difficult to cause a shift in the rotation angle relative to the engaging portion 21B, and it is possible to suppress the occurrence of an angle error.

  FIG. 8 is a diagram showing a measurement result of an angle error accompanying a change in temperature environment. (A) in the figure shows the measurement results for the XY scanner according to the present embodiment, and (b) in the figure shows the measurement results for the conventional XY scanners of FIGS. 14 and 15 as comparative examples. Is shown as

  The angle error is measured by placing the XY scanner in a constant temperature bath of 30 ° C., after a sufficient time has elapsed, changing the temperature setting of the constant temperature bath from 30 ° C. to 40 ° C., and measuring the angular error at regular intervals thereafter. Was done. During this time, the motor is kept stopped. FIG. 8 is a diagram showing the measurement results thus measured, the horizontal axis is the elapsed time (minutes) after the temperature change, and the vertical axis is the angle error (seconds = 1/3600 degrees). It is. Moreover, the curve of FIG. 8 is an approximate curve obtained by plotting the angle error measured at fixed time intervals and drawing it so as to pass through the vicinity of each plot point. For this reason, some errors are inherent.

  As shown in (a) in the figure, in the case of the XY scanner according to the present embodiment, only an angular error of about 1 second (1/3600 °) occurred due to the temperature change from 30 ° C. to 40 ° C. On the other hand, as shown in (b) in the figure, in the case of the conventional XY scanner, an angular error of about 14 seconds (14/3600 °) occurs due to the same temperature change. Therefore, in the XY scanner according to the present embodiment in which the width of the contact area between the mounter engaging portion 21B and the mirror fixing member 22 is narrowed, the mounter engaging portion 21B and the mirror fixing member 22 are substantially extended over the entire circumference of the motor shaft 100. It can be seen that the angle error is suppressed to about 1/10 as compared with the conventional XY scanner in which the contact is made.

Embodiment 2. FIG.
In the first embodiment, the curvature of the curved surface portions 212 and 222 with which the motor shaft 100 abuts matches the curvature of the motor shaft 100, and the mirror mounter 21 and the mirror fixing member 22 are attached to the motor shaft 100 by surface contact. The example of was described. On the other hand, in the present embodiment, the curvatures of the curved surface portions 214 and 224 with which the motor shaft 100 abuts are smaller than the curvature of the motor shaft 100, and the mirror mounter 21 and the mirror fixing member 22 are in line contact with the motor shaft 100. An example in the case of attachment will be described.

  FIG. 9 is a diagram showing an example of a main part of the laser processing apparatus according to the second embodiment of the present invention, and shows the relationship among the mirror module 11, the mirror fixing member 22, and the motor shaft 100 in the same manner as FIG. FIG. Compared with the configuration in FIG. 7, the curved portions 214 and 224 are different in curvature from the motor shaft 100 and other configurations are the same.

  The curved surface portion 214 of the mounter engaging portion 21B has a curvature smaller than that of the motor shaft 100. For this reason, if the motor shaft 100 is brought into contact with the curved surface portion 214, the contact area between the two becomes a point in the circumferential direction of the motor shaft 100 and a straight line extending in the axial direction of the motor shaft 100. That is, two non-contact surfaces are formed in the curved surface portion 214 across the linear contact region, and the mounter engaging portion 21B can be brought into line contact with the outer peripheral surface of the motor shaft 100. In this case, spaces can be formed on both sides of the motor shaft 100 not only in the flat surface portion 213 but also in the curved surface portion 214, and the contact area with the motor shaft 100 can be further reduced.

  Similarly, the curved surface portion 224 of the mirror fixing member 22 has a curvature smaller than that of the motor shaft 100. For this reason, if the motor shaft 100 is brought into contact with the curved surface portion 224, the contact area between the two becomes a point in the circumferential direction of the motor shaft 100 and a straight line extending in the axial direction of the motor shaft 100. That is, two non-contact surfaces are formed in the curved surface portion 224 across the linear contact region, and the holding portion 220 can be brought into line contact with the outer peripheral surface of the motor shaft 100. In this case, a space can be formed on both sides of the motor shaft 100 not only in the flat surface portion 223 but also in the curved surface portion 224, and the contact area with the motor shaft 100 can be further reduced.

  According to the present embodiment, the curvature of the curved surface portions 214 and 224 where the mounter engaging portion 21B and the mirror fixing member 22 are in contact with the motor shaft 100 is made smaller than the curvature of the motor shaft 100, so Each point is contacted in the circumferential direction to narrow the circumferential width of the contact area. By adopting such a configuration, the points P1 and P2 at which the frictional forces become maximum in the curved surface portions 212 and 222 in the circumferential direction of the motor shaft 100 can be arranged symmetrically with respect to the motor shaft 100. it can. For this reason, the angle of the mirror 20 with respect to the motor shaft 100 can be prevented from changing due to a change in the temperature environment, thereby preventing an angle error.

  In the present embodiment, as a desirable embodiment, an example in which the curvatures of the curved surface portions 212 and 222 are both smaller than the curvature of the motor shaft 100 has been described, but the present invention is only in such a case. It is not limited to. For example, one of the curved portions 212 and 222 may be configured so that one of the curvatures is smaller than the curvature of the motor shaft 100 and the other curvature matches the curvature of the motor shaft 100. Also in this case, since the above-mentioned one is in line contact with the motor shaft 100, an angular error due to a temperature change can be effectively suppressed.

  Further, when the motor shaft 100 is rotating normally (when the galvano motor 10 is operating), the mirror module 11 and the mirror fixing portion are prevented from causing a relative rotational deviation between the mirror module 11 and the motor shaft 100. 22, it is necessary to give a certain holding force (a force for holding the motor shaft 100). Therefore, in this embodiment, it is necessary to perform an operation such as processing that increases the frictional force of the line contact portion. In this sense, it is preferable to form curved surfaces 212 and 222 having a certain width (length) in the circumferential direction and equal to the curvature of the motor shaft 100 as in the first embodiment. If it does so, while being able to prevent both the rotation shift | offset | difference at the time of operation | movement of the galvano motor 10 and the rotation shift | offset | difference at the time of a temperature environment change, simplification of a manufacturing process can be achieved.

Embodiment 3 FIG.
In the first and second embodiments, an example in which a slight gap is formed between the opposing end surfaces of the fastening portions 211 and 221 has been described. On the other hand, this Embodiment demonstrates the case where the end surfaces of the fastening parts 211 and 221 are mutually contacted.

  FIG. 10 is a diagram showing an example of a main part of the laser processing apparatus according to Embodiment 3 of the present invention, and shows the relationship among the mirror module 11, the mirror fixing member 22, and the motor shaft 100 in the same manner as FIG. FIG. Compared with the configuration of FIG. 9, the difference is that the end surfaces of the two sets of fastened portions 211 and 221 are in contact with each other, and the other configurations are the same.

  As described above, in order to securely bring the curved surface portions 214 and 224 into contact with the motor shaft 100 and pinch the motor shaft 100, the fastening portion 211 is in a state where the curved surfaces 214 and 224 are in contact with the motor shaft 100. , 221 is preferably formed with a slight gap between the opposed end faces. However, when the mounter engaging portion 21B and the mirror fixing portion 22 can be formed with sufficiently high accuracy, it is not essential to form a gap between the end surfaces of the fastening portions 211 and 221. That is, the mounter engaging portion 21B and the mirror fixing portion 22 may have a shape in which the opposing end surfaces of the fastening portions 211 and 221 are in contact with each other while the curved surface portions 214 and 224 are in contact with the motor shaft 100. .

Embodiment 4 FIG.
In the first to third embodiments, examples have been described in which the mounter engaging portion 21 </ b> B and the mirror mounting member 220 are both U-shaped. In contrast, in the present embodiment, a case will be described in which the mounter engaging portion 21B and the mirror mounting member 22 have a shape other than the U-shape.

  FIG. 11 is a diagram showing an example of a main part of the laser processing apparatus according to the fourth embodiment of the present invention, and shows the relationship among the mirror module 11, the mirror fixing member 22, and the motor shaft 100 in the same manner as FIG. FIG. Compared with the configuration of FIG. 7, the mounter engaging portion 21 </ b> B and the flat surface portions 213 and 223 of the mirror fixing portion 22 are formed of curved surface portions 215 and 225, and are different in that they are not U-shaped.

  The inner surface of the holding portion 210 facing the motor shaft 100 is composed of one curved surface portion 212 and two curved surface portions 215 having different curvatures. The curved surface portion 212 is the same as in the case of FIG. The two curved surface portions 215 are concave curved surfaces formed with the curved surface portion 212 interposed therebetween, and the curvature thereof is smaller than the curvature of the motor shaft 100, and these curved surface portions 215 are arranged away from the motor shaft 100. A non-contact surface for avoiding contact with the motor shaft 100 can be formed, and the contact area with the motor shaft 100 can be reduced.

  Similarly, the inner surface of the holding portion 220 facing the motor shaft 100 is composed of one curved surface portion 222 and two curved surface portions 225 having different curvatures. The curved surface portion 222 is the same as in the case of FIG. The two curved surface portions 225 are concave curved surfaces formed with the curved surface portion 222 interposed therebetween, and the curvature thereof is smaller than the curvature of the motor shaft 100, and these curved surface portions 225 are disposed away from the motor shaft 100. A non-contact surface for avoiding contact with the motor shaft 100 can be formed, and the contact area with the motor shaft 100 can be reduced.

  That is, the mounter engaging portion 21B and the holding portions 210 and 220 of the mirror fixing member 22 shown in FIG. 11 have the flat portions 213 and 223 out of the inner surfaces of the holding portions 210 and 220 shown in FIG. , 225. Even when such a configuration is adopted, the contact area with the motor shaft 100 can be reduced in the same manner as in the case of FIG.

Embodiment 5 FIG.
In the first to fourth embodiments, the example in which the mirror mounter 21 and the mirror fixing member 22 are attached to the motor shaft 100 by bringing the outer peripheral surface of the motor shaft 100 into contact with the curved surface portions 212 and 222 has been described. On the other hand, in the present embodiment, a case will be described in which the mirror mounter 21 and the mirror fixing member 22 are attached by line contact by bringing the outer peripheral surface of the motor shaft 100 into contact with the flat portions 213 and 223.

  FIG. 12 is a diagram showing an example of a main part of the laser processing apparatus according to the second embodiment of the present invention, and shows the relationship among the mirror module 11, the mirror fixing member 22, and the motor shaft 100 in the same manner as FIG. FIG. In this laser processing apparatus, the mounter engaging portion 21B and the mirror fixing member 22 are brought into contact with the motor shaft 100 so as to be in line contact.

  The inner surfaces of the holding portions 210 and 220 facing the motor shaft 100 are composed of flat portions 213 and 223 that are parallel to each other, and the motor shaft 100 is held between these flat portions 213 and 223. For this reason, the contact area between the holding portions 210 and 220 and the motor shaft 100 is a point in the circumferential direction of the motor shaft 100 and is a straight line extending in the axial direction of the motor shaft 100.

  That is, the width of the contact area in the first embodiment is minimized, and the contact points in the circumferential direction of the motor shaft 100 become the maximum points P1 and P2 of the frictional force in the first embodiment. The connecting straight line passes through the center of the motor shaft 100. Therefore, by adopting such a configuration, it is possible to more accurately suppress the occurrence of angle errors due to changes in the temperature environment.

Embodiment 6 FIG.
In the first to fifth embodiments, with respect to the contact area between the mirror mounter 21 and the mirror fixing member 22 and the motor shaft 100, the width of the motor shaft 100 in the circumferential direction is reduced, thereby generating an angular error due to a temperature change. The case where it suppresses was demonstrated. In contrast, in the present embodiment, a case will be described in which the occurrence of angular errors due to temperature changes is suppressed by making the surface states in the contact areas of the mirror mounter 21 and the mirror fixing member 22 different from each other.

  FIG. 13 is a view showing an example of a main part of the laser processing apparatus according to Embodiment 3 of the present invention, and shows the relationship among the mirror module 11, the mirror fixing member 22, and the motor shaft 100 in the same manner as FIG. FIG.

  In this laser processing apparatus, the mounter engaging portion 21B is brought into line contact with the motor shaft 100, and the mirror fixing member 22 is brought into surface contact. Further, the surface of the curved surface portion 222 of the mirror fixing member 22 is processed, and the friction coefficient of the curved surface portion 222 is made smaller than the friction coefficient of the curved surface portion 214 of the mounter engaging portion 21B.

  The curved surface portion 214 formed on the inner surface of the mounter engaging portion 21 </ b> B is a concave curved surface (R shape) whose cross section perpendicular to the motor shaft 100 has an arc shape, and the curvature of the arc shape is based on the curvature of the motor shaft 100. Is also small. For this reason, if the motor shaft 100 is brought into contact with the curved surface portion 214, the contact area between the two becomes a point in the circumferential direction of the motor shaft 100 and has a linear shape extending in the axial direction of the motor shaft 100.

  On the other hand, the curved surface portion 222 formed on the inner surface of the mirror fixing member 22 is a concave curved surface whose cross section perpendicular to the motor shaft 100 has an arc shape, and the curvature of the arc shape matches the curvature of the motor shaft 100. . For this reason, when the motor shaft 100 is brought into contact with the curved surface portion 222, the mirror fixing member 22 can be brought into surface contact with the outer peripheral surface of the motor shaft 100 with the curved surface portion 222 as a contact surface.

  Further, the curved surface portion 222 has a friction coefficient smaller than that of the curved surface portion 214 by performing surface processing for reducing the friction coefficient. For example, by forming a resin film on an aluminum concave curved surface, the friction coefficient of the curved surface portion 222 is reduced as compared with the curved surface portion 214. When the friction coefficient of the curved surface portion 222 is small, the friction force of the curved surface portion 222 against the motor shaft 100 is smaller than the friction force of the curved surface portion 214. As a result, the positional deviation of the motor shaft 100 due to the temperature change occurs with only the contact point P1 on the curved surface portion 214 as a fulcrum. That is, it is difficult for position shift to occur at the contact point P1. In addition, the contact point P1 of the motor shaft 100 is substantially the center of the curved surface portion 214 in the circumferential direction. Therefore, regardless of the position of the maximum point P2 of the frictional force in the curved surface portion 222, it is difficult to cause an angle error when the temperature changes.

  Further, since both the curved surface portions 214 and 222 are concave curved surfaces, it is possible to prevent the mirror mounter 21 and the mirror fixing member 22 from falling off the motor shaft 100 due to vibration. Further, since the curved surface portion 222 is in surface contact with the outer peripheral surface of the motor shaft 100, the mirror mounter 21 can be accurately positioned with respect to the motor shaft 100, and the mounting work of the mirror mounter 21 to the motor shaft 100 is easy. become.

  In the present embodiment, an example in which the motor shaft 100 is brought into line contact with the curved surface portion 214 as a desirable example has been described, but the present invention is not limited to such a case. That is, even in the case where the holding unit 210 is in surface contact with the motor shaft 100 as in the case of FIG. 7, the circumferential width of the contact region can be reduced as in the first embodiment. That's fine. Accordingly, a certain degree of holding force can be given when the galvano motor 10 is operated, and even if the temperature environment is changed, it is possible to prevent positional deviation in the rotational direction. For example, the width of the contact region may be less than ¼ of the outer peripheral length of the motor shaft, more desirably less than ６.

10, 10A, 10B Galvano motor 11, 11A, 11B Mirror module 20 Mirror 21 Mirror mounter 21A Mounter main body 21B Mounter engaging part 22 Mirror fixing member 23 Engaging screw 100 Motor shaft 210, 220 Holding part 211, 221 Fastening part 212 , 222 Curved surface (contact surface)
213, 223 Flat surface (non-contact surface)
214, 224 Curved surface area (line contact area and non-contact area)
215,225 Curved surface (non-contact surface)
P0 Motor shaft center P1, P2 Maximum point of friction force θ1, θ2 Center angle

Claims (9)

In a laser processing apparatus equipped with a scanner that scans a laser beam on a workpiece,
The above scanner
A drive motor for rotating the motor shaft;
A reflection module that reflects the laser light, and a mirror module that includes the first attachment member that supports the reflection mirror and is attached to the motor shaft;
A second mounting member that is disposed so as to face the first mounting member across the motor shaft and is mounted on the motor shaft;
The first mounting member includes a first curved surface portion that comes into contact with the outer peripheral surface of the motor shaft in a state of sandwiching the second mounting member and the motor shaft.
The laser processing apparatus, wherein the first curved surface portion is formed such that a circumferential width thereof is less than ¼ of an outer peripheral length of the motor shaft .   The second mounting member includes a second curved surface portion that contacts the outer peripheral surface of the motor shaft in a state of sandwiching the first mounting member and the motor shaft.
  The laser processing apparatus according to claim 1, wherein the second curved surface portion is formed so that a circumferential width thereof is less than ¼ of an outer peripheral length of the motor shaft.   The first curved surface portion and the second curved surface portion are both formed so that the circumferential width is less than 1/6 of the outer peripheral length of the motor shaft. Laser processing equipment. In a laser processing apparatus equipped with a scanner that scans a laser beam on a workpiece,
The above scanner
A drive motor for rotating the motor shaft;
A reflection module that reflects the laser light, and a mirror module that includes the first attachment member that supports the reflection mirror and is attached to the motor shaft;
A second mounting member that is disposed so as to face the first mounting member across the motor shaft and is mounted on the motor shaft;
Each of the first attachment member and the second attachment member includes a holding portion that holds the motor shaft, and a pair of first fastening portions and second fastening portions that extend from the holding portion in a direction orthogonal to the motor shaft. And
The holding portion of the first attachment member is formed by fastening the first fastening portion on the first attachment member side and the first fastening portion on the second attachment member side, and the second fastening portion on the first attachment member side. In a state in which the fastening portion and the second fastening portion on the second mounting member side are fastened , the first curved surface portion that contacts the outer peripheral surface of the motor shaft and the curvature is greater than that of the first curved surface portion. A small non-contact surface spaced from the motor shaft,
The laser processing apparatus, wherein the first curved surface portion is formed such that a circumferential width thereof is less than ¼ of an outer peripheral length of the motor shaft . The first fastening part on the first attachment member side and the first fastening part on the second attachment member side are fastened by screws,
A second engagement portion of the first mounting member side, and a second engagement portion of the second mounting member side, the laser machining apparatus according to claim 4, characterized in that it is fastened by screw terminal . In a laser processing apparatus equipped with a scanner that scans a laser beam on a workpiece,
The above scanner
A drive motor for rotating the motor shaft;
A reflection module that reflects the laser light, and a mirror module that includes the first attachment member that supports the reflection mirror and is attached to the motor shaft;
A second mounting member that is disposed so as to face the first mounting member across the motor shaft and is mounted on the motor shaft;
Each of the first attachment member and the second attachment member includes a holding portion that holds the motor shaft, and a pair of first fastening portions and second fastening portions that extend from the holding portion in a direction orthogonal to the motor shaft. And
The first fastening part on the first mounting member side and the first fastening part on the second mounting member side are fastened, and the second fastening part on the first mounting member side and the second fastening member side In a state in which the second fastening portion is fastened, at least one of the surface on the motor shaft side of the holding portion of the first mounting member or the surface on the motor shaft side of the holding portion of the second mounting member , Having a curvature smaller than the curvature of the motor shaft, a non-contact surface is formed to avoid contact with the motor shaft apart from the motor shaft,
The first attachment member and the second attachment member are in contact with the first fastening portion on the first attachment member side and the first fastening portion on the second attachment member side, and the first attachment member side the second and the fastening portion, in a state where the second engagement portion of the second mounting member side is in contact, wherein a, Relais Za processing apparatus to sandwich the motor shaft of. In a laser processing apparatus equipped with a scanner that scans a laser beam on a workpiece,
The above scanner
A drive motor for rotating the motor shaft;
A mirror module that includes a reflection mirror that reflects laser light, and a first attachment member that supports the reflection mirror and is attached to the motor shaft;
A second mounting member that is disposed so as to face the first mounting member across the motor shaft and is mounted on the motor shaft;
A laser processing apparatus, wherein a friction coefficient of a contact surface of the second mounting member with the motor shaft is smaller than a friction coefficient of a contact surface of the first mounting member with the motor shaft . The laser processing apparatus according to claim 7, wherein a contact surface of the first mounting member with the motor shaft has a curvature smaller than a curvature of the motor shaft. The contact surface of the first mounting member with the motor shaft and the contact surface of the second mounting member with the motor shaft are made of the same material.
8. The friction coefficient of the contact surface of the second mounting member is made smaller than that of the first mounting member by subjecting the contact surface of the second mounting member to surface processing. Or the laser processing apparatus of 8.

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