JP5682422B2

JP5682422B2 - Organic EL device and manufacturing method thereof

Info

Publication number: JP5682422B2
Application number: JP2011081921A
Authority: JP
Inventors: 佐藤　功二; 功二佐藤; 酒井　賢一; 賢一酒井; 田中　信介; 信介田中; 雄司齋藤; 友哉鏡; 高橋　正樹; 正樹高橋
Original assignee: Denso Corp; Tohoku Pioneer Corp
Current assignee: Denso Corp; Tohoku Pioneer Corp
Priority date: 2011-04-01
Filing date: 2011-04-01
Publication date: 2015-03-11
Anticipated expiration: 2031-04-01
Also published as: JP2012216466A

Description

本発明は、有機ＥＬ（エレクトロルミネッセンス）素子が形成された基板に当該有機ＥＬ素子を封止する封止缶を接着してなる有機ＥＬ装置およびその製造方法に関し、特に、接着剤の厚さを測定するものにする。 The present invention relates to an organic EL device formed by adhering a sealing can for sealing an organic EL element to a substrate on which an organic EL (electroluminescence) element is formed, and a method for manufacturing the same. Make something to measure.

従来より、この種の有機ＥＬディスプレイ等の有機ＥＬ装置としては、光透過性のガラスなどよりなる基板と、基板の一面上に設けられた有機ＥＬ発光材料を含むＥＬ素子と、基板の一面にてＥＬ素子の外側を取り巻くように配置された光透過性の接着剤と、基板の一面上に接着剤を介して基板に接着された封止缶とを備えたものが提案されている（例えば、特許文献１参照）。 Conventionally, as an organic EL device such as this type of organic EL display, a substrate made of light-transmitting glass, an EL element including an organic EL light emitting material provided on one surface of the substrate, and one surface of the substrate A light-transmitting adhesive disposed so as to surround the outside of the EL element and a sealing can adhered to the substrate via an adhesive on one surface of the substrate have been proposed (for example, , See Patent Document 1).

ここで、封止缶は、一般にステンレスなどの光を通さない不透明なドーム状のものよりなり、その周辺部を接着剤にて基板に接着し、接着剤以外の部位すなわち中央部側の部位では基板の一面と離間しつつ、ＥＬ素子を封止するものである。 Here, the sealing can is generally made of an opaque dome that does not transmit light, such as stainless steel, and its peripheral part is adhered to the substrate with an adhesive. The EL element is sealed while being separated from one surface of the substrate.

このような有機ＥＬ装置においては、従来では、基板と封止缶との間に介在する接着剤の厚さを管理することが求められている。これは、接着剤の厚さが、厚すぎると、接着剤から水分が封止缶内部に侵入し、有機ＥＬ素子の輝度低下を招くためである。そこで、従来では、有機ＥＬ装置を切断して、顕微鏡などにより接着剤の厚さを測定するという破壊検査を行い、接着剤の厚さを管理するようにしている。 In such an organic EL device, conventionally, it is required to manage the thickness of the adhesive interposed between the substrate and the sealing can. This is because if the thickness of the adhesive is too thick, moisture enters from the adhesive into the inside of the sealing can, resulting in a decrease in luminance of the organic EL element. Therefore, conventionally, the thickness of the adhesive is controlled by performing a destructive inspection by cutting the organic EL device and measuring the thickness of the adhesive with a microscope or the like.

特開２００２−１９８１８６号公報JP 2002-198186 A

本発明者は、接着剤の厚さ測定を破壊検査ではなく、より効率の良い光学的に行うことを考え、試作検討を行った。図２１、２２は、従来技術に基づいて試作した試作品としての有機ＥＬ装置を示す図である。 The present inventor conducted a trial production considering that the thickness measurement of the adhesive is not a destructive inspection but optically more efficient. 21 and 22 are diagrams showing an organic EL device as a prototype manufactured based on the prior art.

ここで、図２１において、（ａ）は当該有機ＥＬ装置の概略断面図、（ｂ）は同ディスプレイの概略平面図である。また、図２２において、（ａ）は図２１（ｂ）中のＸ−Ｘ概略断面図、（ｂ）は図２１（ｂ）中のＹ−Ｙ概略断面図である。 Here, in FIG. 21, (a) is a schematic sectional view of the organic EL device, and (b) is a schematic plan view of the display. Moreover, in FIG. 22, (a) is a XX schematic sectional drawing in FIG.21 (b), (b) is a YY schematic sectional drawing in FIG.21 (b).

図２１、２２に示されるように、この有機ＥＬ装置は、基板１０の一面１１上にて、有機ＥＬ発光材料を含むＥＬ素子２０を設けるとともに、ＥＬ素子２０の外側にアクリル樹脂などよりなる接着剤４０（図２１（ｂ）における点ハッチング部分）を配置し、この接着剤４０を介して封止缶５０を接着してＥＬ素子２０を封止している。 As shown in FIGS. 21 and 22, this organic EL device is provided with an EL element 20 including an organic EL light-emitting material on one surface 11 of a substrate 10, and an adhesion made of an acrylic resin or the like outside the EL element 20. The agent 40 (the point hatched portion in FIG. 21B) is arranged, and the sealing element 50 is bonded via the adhesive 40 to seal the EL element 20.

ここで、図２１（ｂ）では、ＥＬ素子２０は矩形破線にて示されており、その外側には、一般のものと同様、ＩＴＯ（インジウムチンオキサイド）などの透明材料よりなる引き出し電極３０が設けられている。この引き出し電極３０は、基板１０の一面１１上にてＥＬ素子２０から基板１０の端部まで形成され、ＥＬ素子２０と外部との電気的接続を行うものである。 Here, in FIG. 21B, the EL element 20 is indicated by a rectangular broken line, and an extraction electrode 30 made of a transparent material such as ITO (Indium Tin Oxide) is provided on the outer side of the EL element 20 as in the general case. Is provided. The lead electrode 30 is formed on the one surface 11 of the substrate 10 from the EL element 20 to the end portion of the substrate 10 to make electrical connection between the EL element 20 and the outside.

そのため、一般には、図２１（ｂ）に示されるように、基板１０の一面１１における接着剤４０の配置領域は、引き出し電極３０が存在する領域と、存在しない領域とに分かれる。 Therefore, in general, as shown in FIG. 21B, the arrangement region of the adhesive 40 on the one surface 11 of the substrate 10 is divided into a region where the extraction electrode 30 exists and a region where the extraction electrode 30 does not exist.

ここで、接着剤４０厚さの光学的な測定は、一般的な光学測定方法により行うことを試みた。これは、図２２に示されるように、基板１０の他面１２側からレーザなどの光ａ１を照射することにより、その反射光ａ２、ａ３を検出することにより行うものである。 Here, the optical measurement of the adhesive 40 thickness was tried to be performed by a general optical measurement method. As shown in FIG. 22, this is performed by irradiating light a1 such as a laser from the other surface 12 side of the substrate 10 to detect the reflected lights a2 and a3.

ここで、引き出し電極３０が存在しない領域では、図２２（ａ）に示されるように、基板１０の他面１２側から光ａ１を照射した場合、その反射光としては、封止缶５０による反射光ａ２と、基板１０の一面１１による反射光ａ３とがある。この場合、基板１０の屈折率と接着剤４０の屈折率とに差があれば、これら両反射光ａ２、ａ３の光量差や位相差を検出することで接着剤４０の厚さが測定できる。 Here, in the region where the extraction electrode 30 does not exist, as shown in FIG. 22A, when the light a <b> 1 is irradiated from the other surface 12 side of the substrate 10, the reflected light is reflected by the sealing can 50. There are light a2 and reflected light a3 from one surface 11 of the substrate 10. In this case, if there is a difference between the refractive index of the substrate 10 and the refractive index of the adhesive 40, the thickness of the adhesive 40 can be measured by detecting the light quantity difference and the phase difference between these reflected lights a2 and a3.

しかし、一般には、基板１０の屈折率（たとえば１．５）と接着剤４０の屈折率（たとえば１．５〜１．６）とが実質同等であるため、基板１０の一面１１による反射光ａ３が非常に小さいものとなり、両反射光ａ２、ａ３の差が検出されず、接着剤４０の厚さ測定が困難になってしまう。 However, in general, since the refractive index (for example, 1.5) of the substrate 10 and the refractive index (for example, 1.5 to 1.6) of the adhesive 40 are substantially equal, the reflected light a <b> 3 from the one surface 11 of the substrate 10. Becomes very small, the difference between the reflected lights a2 and a3 is not detected, and the thickness measurement of the adhesive 40 becomes difficult.

また、図２２（ｂ）に示される引き出し電極３０が存在する領域では、封止缶５０による反射光ａ２と引き出し電極３０（たとえば屈折率：１．７〜２．０）による反射光ａ４とが発生する。 In the region where the extraction electrode 30 shown in FIG. 22B exists, the reflected light a2 from the sealing can 50 and the reflected light a4 from the extraction electrode 30 (for example, refractive index: 1.7 to 2.0) are present. Occur.

そこで、これら両反射光ａ２、ａ４の差を検出すれば接着剤４０の厚さが測定できると考えられるが、一般には、引き出し電極３０は、幅が非常に細い（例えば幅が１００μｍ以下）ものであり、しかも、引き出し電極３０間には引き出し電極３０が存在しない部分が存在する。 Therefore, it is considered that the thickness of the adhesive 40 can be measured by detecting the difference between the reflected lights a2 and a4. In general, however, the extraction electrode 30 has a very narrow width (for example, a width of 100 μm or less). In addition, there is a portion between the extraction electrodes 30 where the extraction electrode 30 does not exist.

この種の有機ＥＬ装置においては、接着剤４０の厚さを測定するには、微小領域で測定しても、厚さばらつき等を考慮すれば意味がないものであり、ある程度の領域（たとえば１ｍｍ幅以上）で測定することが必要である。 In this type of organic EL device, in order to measure the thickness of the adhesive 40, even if it is measured in a minute region, it is meaningless if the thickness variation is taken into consideration, and a certain region (for example, 1 mm) It is necessary to measure at more than width.

そうすると、引き出し電極３０が存在する領域では、部分的にみれば、引き出し電極３０間の領域すなわち引き出し電極３０が存在しない領域と、存在する領域とが混在するため、全体として反射光にばらつきが生じ、接着剤４０の厚さ測定が安定しない。 Then, in the region where the extraction electrode 30 exists, the region between the extraction electrodes 30, that is, the region where the extraction electrode 30 does not exist and the region where the extraction electrode 30 exists coexist in a region. The thickness measurement of the adhesive 40 is not stable.

いずれにせよ、従来では、この種の有機ＥＬ装置においては、光学的に接着剤厚さを測定することは困難であった。それゆえ、従来では、上記したように破壊検査により、接着剤厚さを測定することとなっていた。 In any case, conventionally, in this type of organic EL device, it has been difficult to optically measure the adhesive thickness. Therefore, conventionally, the adhesive thickness has been measured by destructive inspection as described above.

本発明は、上記問題に鑑みてなされたものであり、有機ＥＬ素子が形成された基板に当該有機ＥＬ素子を封止する封止缶を接着してなる有機ＥＬ装置において、破壊検査をすることなく、光学的に接着剤厚さを測定し、接着剤厚さを保証することを目的とする。 The present invention has been made in view of the above problems, and performs a destructive inspection in an organic EL device in which a sealing can for sealing the organic EL element is bonded to a substrate on which the organic EL element is formed. The objective is to optically measure the adhesive thickness and guarantee the adhesive thickness.

基板および封止缶については、基板および封止缶のいずれか一方が透明の場合、両方が透明の場合があるので、それらを考慮して、以下の発明を創出するに至った。 About a board | substrate and a sealing can, when either one of a board | substrate and a sealing can is transparent, since both may be transparent, it came to create the following invention in consideration of them.

請求項１に記載の発明では、光を透過する光透過性の基板（１０）と、光を透過しない不透明な封止缶（５０）と、を備える有機ＥＬ装置において、
接着剤（４０）と基板（１０）との界面には、光を透過する膜よりなる光透過膜（６０）が、設けられており、
光透過膜（６０）と接着剤（４０）との屈折率差および光透過膜（６０）と基板（１０）との屈折率差を、接着剤（４０）と基板（１０）との屈折率差よりも大きいものとすることにより、光透過膜（６０）の位置において、基板（１０）の他面（１２）側から光の照射による接着剤（４０）の厚さ測定がなされるようにしたことを特徴としている。 In the invention according to claim 1, in the organic EL device comprising a light-transmissive substrate (10) that transmits light, and an opaque sealing can (50) that does not transmit light,
At the interface between the adhesive (40) and the substrate (10), a light transmission film (60) made of a film that transmits light is provided,
The refractive index difference between the light-transmitting film (60) and the adhesive (40) and the refractive index difference between the light-transmitting film (60) and the substrate (10) are expressed as the refractive index between the adhesive (40) and the substrate (10). By making the difference larger than the difference, the thickness of the adhesive (40) can be measured by light irradiation from the other surface (12) side of the substrate (10) at the position of the light transmission film (60). It is characterized by that.

それによれば、基板（１０）の他面（１２）側から照射された光が、光透過膜（６０）と封止缶（５０）とで反射するので、この光透過膜（６０）を接着剤（４０）の配置部位のうち所望の測定領域に設けてやれば、光透過膜（６０）と封止缶（５０）での両反射光に基づいて接着剤（４０）の厚さ測定が可能となる。よって、本発明によれば、破壊検査をすることなく、光学的に接着剤厚さを測定し、接着剤厚さを保証することが可能となる。 According to this, since the light irradiated from the other surface (12) side of the substrate (10) is reflected by the light transmission film (60) and the sealing can (50), the light transmission film (60) is bonded. If it is provided in a desired measurement region in the arrangement site of the agent (40), the thickness of the adhesive (40) can be measured based on both reflected light from the light transmission film (60) and the sealing can (50). It becomes possible. Therefore, according to the present invention, it is possible to optically measure the adhesive thickness without destructive inspection and to guarantee the adhesive thickness.

また、請求項１に記載の発明では、上記特定事項に加えて、封止缶（５０）は光を反射するものであり、封止缶（５０）のうち光透過膜（６０）と正対する領域の端部には、光を吸収する光吸収膜（６２）が設けられていることを特徴としている。 Moreover, in invention of Claim 1 , in addition to the said specific matter, a sealing can (50) reflects light, and it faces a light permeable film (60) among sealing cans (50). A light absorption film (62) that absorbs light is provided at the end of the region.

それによれば、光吸収膜（６２）が設けられている位置では、基板１０の他面１２側から照射した光が光吸収膜（６２）に遮断され、封止缶（５０）による反射光が検出されなくなるので、このような場合には、照射した光が接着剤厚さの測定範囲から外れたことを認識できる。
請求項２に記載の発明では、光を透過する光透過性の基板（１０）と、光を透過しない不透明な封止缶（５０）と、を備える有機ＥＬ装置において、
接着剤（４０）と基板（１０）との界面には、光を透過する膜よりなる光透過膜（６０）が設けられており、
さらに、光透過膜（６０）の端部には、光を通さない不透明材料よりなる不透明膜（６１）が配置されており、
光透過膜（６０）と接着剤（４０）との屈折率差および光透過膜（６０）と基板（１０）との屈折率差を、接着剤（４０）と基板（１０）との屈折率差よりも大きいものとすることにより、光透過膜（６０）の位置において、基板（１０）の他面（１２）側から光の照射による接着剤（４０）の厚さ測定がなされるようにしたことを特徴としている。
それによれば、請求項１に記載の発明と同様に、基板（１０）の他面（１２）側から照射された光が、光透過膜（６０）と封止缶（５０）とで反射するので、この光透過膜（６０）を接着剤（４０）の配置部位のうち所望の測定領域に設けてやれば、光透過膜（６０）と封止缶（５０）での両反射光に基づいて接着剤（４０）の厚さ測定が可能となる。よって、本発明によれば、破壊検査をすることなく、光学的に接着剤厚さを測定し、接着剤厚さを保証することが可能となる。
さらに、光透過膜（６０）の端部に不透明膜（６１）が配置されていることにより、光による接着剤厚さの測定時に、光透過膜（６０）を外れた光は遮光されるので、測定範囲が明確になり、好ましい。 According to this, at the position where the light absorption film (62) is provided, the light irradiated from the other surface 12 side of the substrate 10 is blocked by the light absorption film (62), and the reflected light from the sealing can (50) is reflected. In such a case, it can be recognized that the irradiated light is out of the measurement range of the adhesive thickness.
In the invention according to claim 2, in the organic EL device comprising a light-transmitting substrate (10) that transmits light and an opaque sealing can (50) that does not transmit light,
At the interface between the adhesive (40) and the substrate (10), a light transmission film (60) made of a film that transmits light is provided.
Further, an opaque film (61) made of an opaque material that does not transmit light is disposed at the end of the light transmission film (60),
The refractive index difference between the light-transmitting film (60) and the adhesive (40) and the refractive index difference between the light-transmitting film (60) and the substrate (10) are expressed as the refractive index between the adhesive (40) and the substrate (10). By making the difference larger than the difference, the thickness of the adhesive (40) can be measured by light irradiation from the other surface (12) side of the substrate (10) at the position of the light transmission film (60). It is characterized by that.
According to this, the light irradiated from the other surface (12) side of the substrate (10) is reflected by the light-transmitting film (60) and the sealing can (50) as in the first aspect of the invention. Therefore, if this light transmission film (60) is provided in a desired measurement region in the arrangement site of the adhesive (40), it is based on both reflected light from the light transmission film (60) and the sealing can (50). Thus, the thickness of the adhesive (40) can be measured. Therefore, according to the present invention, it is possible to optically measure the adhesive thickness without destructive inspection and to guarantee the adhesive thickness.
Further, since the opaque film (61) is disposed at the end of the light transmission film (60), the light that has been removed from the light transmission film (60) is shielded when measuring the adhesive thickness by light. The measurement range is clear and preferable.

請求項３に記載の発明では、光を透過する光透過性の基板（１０）と、光を透過する光透過性の封止缶（５０）と、を備える有機ＥＬ装置において、
接着剤（４０）と基板（１０）との界面、および、接着剤（４０）と封止缶（５０）との界面の両界面には、光を透過する膜よりなる光透過膜（６０）が互いに対向して設けられており、
光透過膜（６０）と接着剤（４０）との屈折率差および光透過膜（６０）と基板（１０）との屈折率差を、接着剤（４０）と基板（１０）との屈折率差よりも大きいものとすることにより、光透過膜（６０）の位置において、基板（１０）の他面（１２）側もしくは封止缶（５０）の外側から光の照射による接着剤（４０）の厚さ測定がなされるようにしたことを特徴としている。 According to a third aspect of the present invention, in the organic EL device comprising: a light transmissive substrate (10) that transmits light; and a light transmissive sealing can (50) that transmits light.
A light-transmitting film (60) made of a light-transmitting film is provided on both the interface between the adhesive (40) and the substrate (10) and the interface between the adhesive (40) and the sealing can (50). Are provided opposite to each other,
The refractive index difference between the light-transmitting film (60) and the adhesive (40) and the refractive index difference between the light-transmitting film (60) and the substrate (10) are expressed as the refractive index between the adhesive (40) and the substrate (10). By making the difference larger than the difference, the adhesive (40) by light irradiation from the other surface (12) side of the substrate (10) or the outside of the sealing can (50) at the position of the light transmission film (60). It is characterized by the fact that the thickness is measured.

それによれば、基板（１０）の他面（１２）側もしくは封止缶（５０）の外側から照射された光が、接着剤（４０）と基板（１０）との界面、および、接着剤（４０）と封止缶（５０）との界面の両界面に設けられた光透過膜（６０）で反射するので、この２つの光透過膜（６０）を接着剤（４０）の配置部位のうち所望の測定領域に設けてやれば、この２つの光透過膜（６０）での両反射光に基づいて接着剤（４０）の厚さ測定が可能となる。よって、本発明によれば、破壊検査をすることなく、光学的に接着剤厚さを測定し、接着剤厚さを保証することが可能となる。 According to this, the light irradiated from the other surface (12) side of the substrate (10) or the outside of the sealing can (50) causes the interface between the adhesive (40) and the substrate (10) and the adhesive ( 40) and the sealing can (50) are reflected by both light-transmitting films (60) provided on both interfaces, so that these two light-transmitting films (60) are placed on the adhesive (40). If it is provided in a desired measurement region, the thickness of the adhesive (40) can be measured based on both reflected light from the two light transmission films (60). Therefore, according to the present invention, it is possible to optically measure the adhesive thickness without destructive inspection and to guarantee the adhesive thickness.

また、請求項３に記載の発明では、上記特定事項に加えて、接着剤（４０）と封止缶（５０）との界面に位置する光透過膜（６０）の端部に、光を吸収する光吸収膜または光を反射する光反射膜（６３）が設けられていることを特徴としている。 In addition, in the invention according to claim 3 , in addition to the specific matter described above , light is absorbed at the end of the light transmission film (60) located at the interface between the adhesive (40) and the sealing can (50). A light absorbing film for reflecting light or a light reflecting film for reflecting light (63) is provided.

それによれば、封止缶（５０）の外側から光を照射したとき、光吸収膜または光反射膜（６３）が設けられている位置では、照射した光が光吸収膜または光反射膜（６３）に遮断され、接着剤（４０）と基板（１０）との界面に設けられた光透過膜（６０）による反射光が検出されなくなるので、このような場合には、照射した光が接着剤厚さの測定範囲から外れたことを認識できる。
請求項４に記載の発明では、光を透過する光透過性の基板（１０）と、光を透過する光透過性の封止缶（５０）と、を備える有機ＥＬ装置において、
接着剤（４０）と基板（１０）との界面、および、接着剤（４０）と封止缶（５０）との界面の両界面には、光を透過する膜よりなる光透過膜（６０）が互いに対向して設けられており、
さらに、光透過膜（６０）の端部には、光を通さない不透明材料よりなる不透明膜（６１）が配置されており、
光透過膜（６０）と接着剤（４０）との屈折率差および光透過膜（６０）と基板（１０）との屈折率差を、接着剤（４０）と基板（１０）との屈折率差よりも大きいものとすることにより、光透過膜（６０）の位置において、基板（１０）の他面（１２）側もしくは封止缶（５０）の外側から光の照射による接着剤（４０）の厚さ測定がなされるようにしたことを特徴としている。
それによれば、請求項３に記載の発明と同様に、基板（１０）の他面（１２）側もしくは封止缶（５０）の外側から照射された光が、接着剤（４０）と基板（１０）との界面、および、接着剤（４０）と封止缶（５０）との界面の両界面に設けられた光透過膜（６０）で反射するので、この２つの光透過膜（６０）を接着剤（４０）の配置部位のうち所望の測定領域に設けてやれば、この２つの光透過膜（６０）での両反射光に基づいて接着剤（４０）の厚さ測定が可能となる。よって、本発明によれば、破壊検査をすることなく、光学的に接着剤厚さを測定し、接着剤厚さを保証することが可能となる。
さらに、光透過膜（６０）の端部に不透明膜（６１）が配置されていることにより、光による接着剤厚さの測定時に、光透過膜（６０）を外れた光は遮光されるので、測定範囲が明確になり、好ましい。 According to this, when light is irradiated from the outside of the sealing can (50), the irradiated light is light-absorbing film or light-reflecting film (63) at the position where the light-absorbing film or light-reflecting film (63) is provided. ) And the light reflected by the light transmission film (60) provided at the interface between the adhesive (40) and the substrate (10) is not detected. It can be recognized that the thickness is out of the measurement range.
According to a fourth aspect of the present invention, in the organic EL device comprising: a light transmissive substrate (10) that transmits light; and a light transmissive sealing can (50) that transmits light.
A light-transmitting film (60) made of a light-transmitting film is provided on both the interface between the adhesive (40) and the substrate (10) and the interface between the adhesive (40) and the sealing can (50). Are provided opposite to each other,
Further, an opaque film (61) made of an opaque material that does not transmit light is disposed at the end of the light transmission film (60),
The refractive index difference between the light-transmitting film (60) and the adhesive (40) and the refractive index difference between the light-transmitting film (60) and the substrate (10) are expressed as the refractive index between the adhesive (40) and the substrate (10). By making the difference larger than the difference, the adhesive (40) by light irradiation from the other surface (12) side of the substrate (10) or the outside of the sealing can (50) at the position of the light transmission film (60). It is characterized by the fact that the thickness is measured.
According to this, similarly to the invention described in claim 3, the light irradiated from the other surface (12) side of the substrate (10) or the outside of the sealing can (50) is applied to the adhesive (40) and the substrate ( 10) and the light transmitting film (60) provided on both the interface between the adhesive (40) and the sealing can (50), the two light transmitting films (60) are reflected. Can be measured in the desired measurement region of the arrangement site of the adhesive (40), the thickness of the adhesive (40) can be measured based on both reflected light from the two light transmission films (60). Become. Therefore, according to the present invention, it is possible to optically measure the adhesive thickness without destructive inspection and to guarantee the adhesive thickness.
Further, since the opaque film (61) is disposed at the end of the light transmission film (60), the light that has been removed from the light transmission film (60) is shielded when measuring the adhesive thickness by light. The measurement range is clear and preferable.

請求項５に記載の発明では、光を透過する光透過性の基板（１０）と、光を透過する光透過性の封止缶（５０）と、を備える有機ＥＬ装置において、
接着剤（４０）と基板（１０）との界面には、光を透過する膜よりなる光透過膜（６０）が設けられており、
接着剤（４０）と封止缶（５０）との界面には、光を反射する膜よりなる光反射膜（７０）が光透過膜（６０）と対向して設けられており、
光透過膜（６０）と接着剤（４０）との屈折率差および光透過膜（６０）と基板（１０）との屈折率差を、接着剤（４０）と基板（１０）との屈折率差よりも大きいものとすることにより、光透過膜（６０）の位置において、基板（１０）の他面（１２）側から光の照射による接着剤（４０）の厚さ測定がなされるようにしたことを特徴としている。 In the invention according to claim 5 , in the organic EL device comprising: a light transmissive substrate (10) that transmits light; and a light transmissive sealing can (50) that transmits light.
At the interface between the adhesive (40) and the substrate (10), a light transmission film (60) made of a film that transmits light is provided.
At the interface between the adhesive (40) and the sealing can (50), a light reflecting film (70) made of a film that reflects light is provided facing the light transmitting film (60),
The refractive index difference between the light-transmitting film (60) and the adhesive (40) and the refractive index difference between the light-transmitting film (60) and the substrate (10) are expressed as the refractive index between the adhesive (40) and the substrate (10). By making the difference larger than the difference, the thickness of the adhesive (40) can be measured by light irradiation from the other surface (12) side of the substrate (10) at the position of the light transmission film (60). It is characterized by that.

それによれば、基板（１０）の他面（１２）側から照射された光が、光透過膜（６０）と光反射膜（７０）とで反射するので、この光透過膜（６０）および光反射膜（７０）を接着剤（４０）の配置部位のうち所望の測定領域に設けてやれば、光透過膜（６０）と光反射膜（７０）での両反射光に基づいて接着剤（４０）の厚さ測定が可能となる。よって、本発明によれば、破壊検査をすることなく、光学的に接着剤厚さを測定し、接着剤厚さを保証することが可能となる。 According to this, since the light irradiated from the other surface (12) side of the substrate (10) is reflected by the light transmission film (60) and the light reflection film (70), the light transmission film (60) and the light are reflected. If the reflection film (70) is provided in a desired measurement region in the arrangement site of the adhesive (40), the adhesive (60) is based on the reflected light from the light transmission film (60) and the light reflection film (70). 40) thickness measurement becomes possible. Therefore, according to the present invention, it is possible to optically measure the adhesive thickness without destructive inspection and to guarantee the adhesive thickness.

また、請求項５に記載の発明では、上記特定事項に加えて、接着剤（４０）と封止缶（５０）との界面に位置する光反射膜（７０）の端部に、光を吸収する光吸収膜（６２）が設けられていることを特徴としている。 In addition, in the invention according to claim 5 , in addition to the above specific matter , light is absorbed by the end of the light reflecting film (70) located at the interface between the adhesive (40) and the sealing can (50). A light absorption film (62) is provided.

それによれば、光吸収膜（６２）が設けられている位置では、照射した光が光吸収膜（６２）に遮断され、接着剤（４０）と封止缶（５０）との界面に設けられた光反射膜（７０）による反射光が検出されなくなるので、このような場合には、照射した光が接着剤厚さの測定範囲から外れたことを認識できる。
請求項６に記載の発明では、光を透過する光透過性の基板（１０）と、光を透過する光透過性の封止缶（５０）と、を備える有機ＥＬ装置において、
接着剤（４０）と基板（１０）との界面には、光を透過する膜よりなる光透過膜（６０）が設けられており、
接着剤（４０）と封止缶（５０）との界面には、光を反射する膜よりなる光反射膜（７０）が光透過膜（６０）と対向して設けられており、
さらに、光透過膜（６０）の端部には、光を通さない不透明材料よりなる不透明膜（６１）が配置されており、
光透過膜（６０）と接着剤（４０）との屈折率差および光透過膜（６０）と基板（１０）との屈折率差を、接着剤（４０）と基板（１０）との屈折率差よりも大きいものとすることにより、光透過膜（６０）の位置において、基板（１０）の他面（１２）側から光の照射による接着剤（４０）の厚さ測定がなされるようにしたことを特徴としている。
それによれば、請求項５に記載の発明と同様に、基板（１０）の他面（１２）側から照射された光が、光透過膜（６０）と光反射膜（７０）とで反射するので、この光透過膜（６０）および光反射膜（７０）を接着剤（４０）の配置部位のうち所望の測定領域に設けてやれば、光透過膜（６０）と光反射膜（７０）での両反射光に基づいて接着剤（４０）の厚さ測定が可能となる。よって、本発明によれば、破壊検査をすることなく、光学的に接着剤厚さを測定し、接着剤厚さを保証することが可能となる。
さらに、光透過膜（６０）の端部に不透明膜（６１）が配置されていることにより、光による接着剤厚さの測定時に、光透過膜（６０）を外れた光は遮光されるので、測定範囲が明確になり、好ましい。 According to this, at the position where the light absorption film (62) is provided, the irradiated light is blocked by the light absorption film (62) and provided at the interface between the adhesive (40) and the sealing can (50). In such a case, it can be recognized that the irradiated light is out of the measurement range of the adhesive thickness.
In an invention according to claim 6, in an organic EL device comprising: a light transmissive substrate (10) that transmits light; and a light transmissive sealing can (50) that transmits light.
At the interface between the adhesive (40) and the substrate (10), a light transmission film (60) made of a film that transmits light is provided.
At the interface between the adhesive (40) and the sealing can (50), a light reflecting film (70) made of a film that reflects light is provided facing the light transmitting film (60),
Further, an opaque film (61) made of an opaque material that does not transmit light is disposed at the end of the light transmission film (60),
The refractive index difference between the light-transmitting film (60) and the adhesive (40) and the refractive index difference between the light-transmitting film (60) and the substrate (10) are expressed as the refractive index between the adhesive (40) and the substrate (10). By making the difference larger than the difference, the thickness of the adhesive (40) can be measured by light irradiation from the other surface (12) side of the substrate (10) at the position of the light transmission film (60). It is characterized by that.
According to this, the light irradiated from the other surface (12) side of the substrate (10) is reflected by the light transmission film (60) and the light reflection film (70) as in the invention described in claim 5. Therefore, if the light transmission film (60) and the light reflection film (70) are provided in a desired measurement region in the arrangement portion of the adhesive (40), the light transmission film (60) and the light reflection film (70). The thickness of the adhesive (40) can be measured based on the both reflected lights. Therefore, according to the present invention, it is possible to optically measure the adhesive thickness without destructive inspection and to guarantee the adhesive thickness.
Further, since the opaque film (61) is disposed at the end of the light transmission film (60), the light that has been removed from the light transmission film (60) is shielded when measuring the adhesive thickness by light. The measurement range is clear and preferable.

請求項７に記載の発明では、光を透過しない不透明な基板（１０）と、光を透過する光透過性の封止缶（５０）と、を備える有機ＥＬ装置において、
接着剤（４０）と基板（１０）との界面には、光を反射する膜よりなる光反射膜（７０）が設けられており、
接着剤（４０）と封止缶（５０）との界面には、光を透過する膜よりなる光透過膜（６０）が光反射膜（７０）と対向して設けられており、
さらに、光透過膜（６０）の端部には、光を通さない不透明材料よりなる不透明膜（６１）が配置されており、
光透過膜（６０）と接着剤（４０）との屈折率差および光透過膜（６０）と封止缶（５０）との屈折率差を、接着剤（４０）と封止缶（５０）との屈折率差よりも大きいものとすることにより、光透過膜（６０）の位置において、封止缶（５０）の外側から光の照射による接着剤（４０）の厚さ測定がなされるようにしたことを特徴としている。 In an invention according to claim 7 , in an organic EL device comprising an opaque substrate (10) that does not transmit light, and a light-transmitting sealing can (50) that transmits light,
At the interface between the adhesive (40) and the substrate (10), a light reflecting film (70) made of a film that reflects light is provided.
At the interface between the adhesive (40) and the sealing can (50), a light transmission film (60) made of a film that transmits light is provided to face the light reflection film (70).
Further, an opaque film (61) made of an opaque material that does not transmit light is disposed at the end of the light transmission film (60),
The refractive index difference between the light transmissive film (60) and the adhesive (40) and the refractive index difference between the light transmissive film (60) and the sealing can (50) are represented by the adhesive (40) and the sealing can (50). So that the thickness of the adhesive (40) is measured by light irradiation from the outside of the sealing can (50) at the position of the light transmission film (60). It is characterized by that.

それによれば、封止缶（５０）の外側から照射された光が、光透過膜（６０）と光反射膜（７０）とで反射するので、この光透過膜（６０）を接着剤（４０）の配置部位のうち所望の測定領域に設けてやれば、光透過膜（６０）と光反射膜（７０）での両反射光に基づいて接着剤（４０）の厚さ測定が可能となる。よって、本発明によれば、破壊検査をすることなく、光学的に接着剤厚さを測定し、接着剤厚さを保証することが可能となる。
さらに、光透過膜（６０）の端部に不透明膜（６１）が配置されていることにより、光による接着剤厚さの測定時に、光透過膜（６０）を外れた光は遮光されるので、測定範囲が明確になり、好ましい。 According to this, since the light irradiated from the outside of the sealing can (50) is reflected by the light transmission film (60) and the light reflection film (70), the light transmission film (60) is bonded to the adhesive (40 ) Is provided in a desired measurement region, the thickness of the adhesive (40) can be measured based on both reflected light from the light transmission film (60) and the light reflection film (70). . Therefore, according to the present invention, it is possible to optically measure the adhesive thickness without destructive inspection and to guarantee the adhesive thickness.
Further, since the opaque film (61) is disposed at the end of the light transmission film (60), the light that has been removed from the light transmission film (60) is shielded when measuring the adhesive thickness by light. The measurement range is clear and preferable.

上記した請求項５、６、７に記載の発明においては、請求項８に記載の発明のように、光反射膜（７０）は、当該光反射膜（７０）と対向する光透過膜（６０）よりも平面サイズが小さいものであり、光反射膜（７０）の外郭が、厚さ測定の範囲を規定していることが好ましい。 In the above-described inventions according to claims 5 , 6, and 7 , as in the invention according to claim 8 , the light-reflecting film (70) is a light-transmitting film (60) facing the light-reflecting film (70). ), And the outer surface of the light reflecting film (70) preferably defines the thickness measurement range.

また、請求項９に記載の発明では、請求項１ないし６のいずれが１つに記載の発明において、ＥＬ素子（２０）は、基板（１０）の一面（１１）側から光透過性材料よりなる第１の電極（２１）、有機ＥＬ材料よりなる発光層（２２）、第２の電極（２３）が積層されてなるものであり、基板（１０）と接着剤（４０）との界面に位置する光透過膜（６０）は、第１の電極（２１）と同様の光透過性材料よりなることを特徴としている。 According to a ninth aspect of the present invention, in any one of the first to sixth aspects, the EL element (20) is made of a light transmissive material from the one surface (11) side of the substrate (10). The first electrode (21), the light emitting layer (22) made of an organic EL material, and the second electrode (23) are laminated, and are formed at the interface between the substrate (10) and the adhesive (40). The light-transmitting film (60) positioned is made of a light-transmitting material similar to that of the first electrode (21).

それによれば、ＥＬ素子（２０）を構成する第１の電極（２１）と光透過膜（６０）とを一括して製造することが可能となり、製造工程の簡略化および材料コストの低減が期待できる。 According to this, it becomes possible to manufacture the first electrode (21) and the light transmission film (60) constituting the EL element (20) in a lump, and simplification of the manufacturing process and reduction of material costs are expected. it can.

また、請求項１０に記載の発明では、請求項１ないし９のいずれか１つに記載の有機ＥＬ装置において、光透過膜（６０）は、接着剤（４０）の最大厚さの部位に配置されていることを特徴としている。 According to a tenth aspect of the present invention, in the organic EL device according to any one of the first to ninth aspects, the light transmission film (60) is disposed at a portion having the maximum thickness of the adhesive (40). It is characterized by being.

上述のように、接着剤（４０）の厚さが、厚すぎると、接着剤から水分が封止缶内部に侵入することから、光透過膜（６０）を接着剤（４０）の最大厚さの部位に配置し、当該最大厚さを測定することが好ましい。 As described above, if the thickness of the adhesive (40) is too thick, moisture penetrates from the adhesive into the inside of the sealing can, and thus the light transmissive film (60) is removed from the maximum thickness of the adhesive (40). It is preferable that the maximum thickness is measured by placing the film at the site.

また、請求項１１に記載の発明では、請求項１０に記載の発明において、封止缶（５０）は、接着剤（４０）との接触部位が多角形であり、この多角形の角部が接着剤（４０）の最大厚さの部位となっており、当該角部に、光透過膜（６０）が配置されていることを特徴としている。 Moreover, in invention of Claim 11 , in the invention of Claim 10 , as for the sealing can (50), a contact site | part with an adhesive agent (40) is a polygon, and the corner | angular part of this polygon is It is a part with the maximum thickness of the adhesive (40), and the light transmission film (60) is disposed at the corner.

封止缶（５０）が、接着剤（４０）との接触部位が多角形であって、この多角形の角部が接着剤（４０）の最大厚さの部位となっているものである場合、当該角部に、光透過膜（６０）を配置するものにできる。 When the sealing can (50) has a polygonal shape in contact with the adhesive (40) and the corners of the polygon are the maximum thickness of the adhesive (40) The light transmission film (60) can be disposed at the corner.

また、請求項１２に記載の発明では、請求項１ないし１１のいずれか１つに記載の発明において、光透過膜（６０）は、接着剤（４０）の端部よりも内側に収まって配置されていることを特徴としている。 Further, in the invention according to claim 12 , in the invention according to any one of claims 1 to 11 , the light transmission film (60) is disposed inside the end of the adhesive (40). It is characterized by being.

一般に基板（１０）と接着剤（４０）との接着力に比べて、光透過膜（６０）と接着剤（４０）との接着力は弱く、さらには市場における温度ストレスの影響を受け、接着剤と各基板の線膨張係数差により接着剤と各基板の界面の接着剤端部には大きなせん断応力が発生する。よって、光透過膜（６０）を接着剤（４０）からはみ出さないように接着剤（４０）の内部に収めて、接着剤（４０）の端部を基板（１０）に接着するようにすれば、基板（１０）と封止缶（５０）との剥離を抑制するという点で好ましく、さらに、請求項１３に記載の発明のように、接着剤（４０）の内周側の端部（４０ａ）と光透過膜（６０）との距離（Ｌ１）と、接着剤（４０）の外周側の端部（４０ｂ）と光透過膜（６０）との距離（Ｌ２）とを等距離とすることがより好ましい。 In general, the adhesive force between the light-transmitting film (60) and the adhesive (40) is weaker than the adhesive force between the substrate (10) and the adhesive (40). Due to the difference in linear expansion coefficient between the adhesive and each substrate, a large shear stress is generated at the adhesive end portion at the interface between the adhesive and each substrate. Therefore, the light transmission film (60) is placed inside the adhesive (40) so as not to protrude from the adhesive (40), and the end of the adhesive (40) is bonded to the substrate (10). If it is preferable, it is preferable at the point which suppresses peeling with a board | substrate (10) and a sealing can (50), Furthermore, like the invention of Claim 13 , the edge part on the inner peripheral side of an adhesive agent (40) ( The distance (L1) between 40a) and the light transmission film (60) and the distance (L2) between the outer peripheral end (40b) of the adhesive (40) and the light transmission film (60) are equal. It is more preferable.

また、請求項１ないし１３のいずれか１つに記載の発明においては、請求項１４に記載の発明のように、厚さ測定の領域の周囲に、厚さ測定の領域を位置決めするアライメントマーク（８０）が設けられていることが好ましい。このアライメントマークを確認することにより、厚さ測定の領域で、接着剤の厚さ測定を確実に行うことができるからである。 Further, in the invention according to any one of claims 1 to 13 , as in the invention according to claim 14 , an alignment mark for positioning the thickness measurement region around the thickness measurement region ( 80) is preferably provided. This is because the thickness of the adhesive can be reliably measured in the thickness measurement region by checking this alignment mark.

請求項１５に記載の発明では、光を透過する光透過性の基板（１０）と、光を透過しない不透明な封止缶（５０）と、を備える有機ＥＬ装置の製造方法において、
接着剤（４０）と基板（１０）との界面に、光を透過する膜よりなる光透過膜（６０）
を設けるとともに、
封止缶（５０）は光を反射するものとし、封止缶（５０）のうち光透過膜（６０）と正対する領域の端部に、光を吸収する光吸収膜（６２）を設け、
光透過膜（６０）と接着剤（４０）との屈折率差および光透過膜（６０）と基板（１０）との屈折率差を、接着剤（４０）と基板（１０）との屈折率差よりも大きいものとする屈折率の大小関係を有するものとし、
光透過膜（６０）の位置にて、基板（１０）の他面（１２）側から光の照射を行って、光透過膜（６０）と封止缶（５０）での両反射光に基づいて接着剤（４０）の厚さ測定を行うようにしたことを特徴としている。 In the invention according to claim 15 , in a method of manufacturing an organic EL device comprising: a light transmissive substrate (10) that transmits light; and an opaque sealing can (50) that does not transmit light.
A light transmitting film (60) made of a film that transmits light at the interface between the adhesive (40) and the substrate (10).
And providing
The sealing can (50) reflects light, and a light-absorbing film (62) that absorbs light is provided at the end of the sealing can (50) facing the light-transmitting film (60).
The refractive index difference between the light-transmitting film (60) and the adhesive (40) and the refractive index difference between the light-transmitting film (60) and the substrate (10) are expressed as the refractive index between the adhesive (40) and the substrate (10). Have a refractive index magnitude relationship that is greater than the difference,
At the position of the light transmission film (60), light is irradiated from the other surface (12) side of the substrate (10), and based on both reflected light from the light transmission film (60) and the sealing can (50). The thickness of the adhesive (40) is measured.

請求項１５に記載の発明は、請求項１に記載の発明に対応するものであり、請求項１に記載の発明と同様の効果を奏する。
請求項１６に記載の発明では、光を透過する光透過性の基板（１０）と、光を透過しない不透明な封止缶（５０）と、を備える有機ＥＬ装置の製造方法において、
接着剤（４０）と基板（１０）との界面に、光を透過する膜よりなる光透過膜（６０）を設けるとともに、光透過膜（６０）の端部に、光を通さない不透明材料よりなる不透明膜（６１）を配置し、
光透過膜（６０）と接着剤（４０）との屈折率差および光透過膜（６０）と基板（１０）との屈折率差を、接着剤（４０）と基板（１０）との屈折率差よりも大きいものとする屈折率の大小関係を有するものとし、
光透過膜（６０）の位置にて、基板（１０）の他面（１２）側から光の照射を行って、光透過膜（６０）と封止缶（５０）での両反射光に基づいて接着剤（４０）の厚さ測定を行うようにしたことを特徴としている。
請求項１６に記載の発明は、請求項２に記載の発明に対応するものであり、請求項２に記載の発明と同様の効果を奏する。 The invention described in claim 15 corresponds to the invention described in claim 1, and has the same effect as the invention described in claim 1.
In the invention described in claim 16, in a method of manufacturing an organic EL device comprising: a light-transmitting substrate (10) that transmits light; and an opaque sealing can (50) that does not transmit light.
A light-transmitting film (60) made of a light-transmitting film is provided at the interface between the adhesive (40) and the substrate (10), and an opaque material that does not transmit light is formed at the end of the light-transmitting film (60). An opaque film (61)
The refractive index difference between the light-transmitting film (60) and the adhesive (40) and the refractive index difference between the light-transmitting film (60) and the substrate (10) are expressed as the refractive index between the adhesive (40) and the substrate (10). Have a refractive index magnitude relationship that is greater than the difference,
At the position of the light transmission film (60), light is irradiated from the other surface (12) side of the substrate (10), and based on both reflected light from the light transmission film (60) and the sealing can (50). The thickness of the adhesive (40) is measured.
The invention described in claim 16 corresponds to the invention described in claim 2, and has the same effect as the invention described in claim 2.

請求項１７に記載の発明では、光を透過する光透過性の基板（１０）と、光を透過する光透過性の封止缶（５０）と、を備える有機ＥＬ装置の製造方法において、
接着剤（４０）と基板（１０）との界面、および、接着剤（４０）と封止缶（５０）との界面の両界面に、光を透過する膜よりなる光透過膜（６０）を互いに対向して設けるとともに、
接着剤（４０）と封止缶（５０）との界面に位置する光透過膜（６０）の端部に、光を吸収する光吸収膜または光を反射する光反射膜（６３）を設け、
光透過膜（６０）と接着剤（４０）との屈折率差および光透過膜（６０）と基板（１０）との屈折率差を、接着剤（４０）と基板（１０）との屈折率差よりも大きいものとし、
光透過膜（６０）の位置にて、基板（１０）の他面（１２）側もしくは封止缶（５０）の外側から光の照射を行って、２つの光透過膜（６０）での両反射光に基づいて接着剤（４０）の厚さ測定を行うようにしたことを特徴としている。 In the invention of claim 17 , in a method of manufacturing an organic EL device comprising: a light transmissive substrate (10) that transmits light; and a light transmissive sealing can (50) that transmits light.
A light-transmitting film (60) made of a light-transmitting film is formed on both the interface between the adhesive (40) and the substrate (10) and the interface between the adhesive (40) and the sealing can (50). While providing them facing each other,
A light-absorbing film that absorbs light or a light-reflecting film that reflects light (63) is provided at the end of the light-transmitting film (60) located at the interface between the adhesive (40) and the sealing can (50),
The refractive index difference between the light-transmitting film (60) and the adhesive (40) and the refractive index difference between the light-transmitting film (60) and the substrate (10) are expressed as the refractive index between the adhesive (40) and the substrate (10). Be greater than the difference,
At the position of the light transmission film (60), light irradiation is performed from the other surface (12) side of the substrate (10) or from the outside of the sealing can (50). It is characterized in that the thickness of the adhesive (40) is measured based on the reflected light.

請求項１７に記載の発明は、請求項３に記載の発明に対応するものであり、請求項３に記載の発明と同様の効果を奏する。
請求項１８に記載の発明では、光を透過する光透過性の基板（１０）と、光を透過する光透過性の封止缶（５０）と、を備える有機ＥＬ装置の製造方法において、
接着剤（４０）と基板（１０）との界面、および、接着剤（４０）と封止缶（５０）との界面の両界面に、光を透過する膜よりなる光透過膜（６０）を互いに対向して設けるとともに、
光透過膜（６０）の端部に、光を通さない不透明材料よりなる不透明膜（６１）を配置し、
光透過膜（６０）と接着剤（４０）との屈折率差および光透過膜（６０）と基板（１０）との屈折率差を、接着剤（４０）と基板（１０）との屈折率差よりも大きいものとし、
光透過膜（６０）の位置にて、基板（１０）の他面（１２）側もしくは封止缶（５０）の外側から光の照射を行って、２つの光透過膜（６０）での両反射光に基づいて接着剤（４０）の厚さ測定を行うようにしたことを特徴としている。
請求項１８に記載の発明は、請求項４に記載の発明に対応するものであり、請求項４に記載の発明と同様の効果を奏する。 The invention according to claim 17, which corresponds to the invention of claim 3, the same effect as the invention described in claim 3.
In the invention according to claim 18, in a method of manufacturing an organic EL device comprising: a light transmissive substrate (10) that transmits light; and a light transmissive sealing can (50) that transmits light.
A light-transmitting film (60) made of a light-transmitting film is formed on both the interface between the adhesive (40) and the substrate (10) and the interface between the adhesive (40) and the sealing can (50). While providing them facing each other,
An opaque film (61) made of an opaque material that does not transmit light is disposed at the end of the light transmission film (60),
The refractive index difference between the light-transmitting film (60) and the adhesive (40) and the refractive index difference between the light-transmitting film (60) and the substrate (10) are expressed as the refractive index between the adhesive (40) and the substrate (10). Be greater than the difference,
At the position of the light transmission film (60), light irradiation is performed from the other surface (12) side of the substrate (10) or from the outside of the sealing can (50). It is characterized in that the thickness of the adhesive (40) is measured based on the reflected light.
The invention described in claim 18 corresponds to the invention described in claim 4, and has the same effect as the invention described in claim 4.

請求項１９に記載の発明では、光を透過する光透過性の基板（１０）と、光を透過する光透過性の封止缶（５０）と、を備える有機ＥＬ装置の製造方法において、
接着剤（４０）と基板（１０）との界面に、光を透過する膜よりなる光透過膜（６０）を設け、接着剤（４０）と封止缶（５０）との界面に、光を反射する膜よりなる光反射膜（７０）を光透過膜（６０）と対向して設けるとともに、
接着剤（４０）と封止缶（５０）との界面に位置する光反射膜（７０）の端部に、光を吸収する光吸収膜（６２）を設け、
光透過膜（６０）と接着剤（４０）との屈折率差および光透過膜（６０）と基板（１０）との屈折率差を、接着剤（４０）と基板（１０）との屈折率差よりも大きいものとし、
光透過膜（６０）の位置にて、基板（１０）の他面（１２）側から光の照射を行って、光透過膜（６０）と光反射膜（７０）での両反射光に基づいて接着剤（４０）の厚さ測定を行うようにしたことを特徴としている。 In the invention of claim 19 , in a method of manufacturing an organic EL device comprising: a light transmissive substrate (10) that transmits light; and a light transmissive sealing can (50) that transmits light.
A light transmitting film (60) made of a light transmitting film is provided at the interface between the adhesive (40) and the substrate (10), and light is transmitted to the interface between the adhesive (40) and the sealing can (50). A light reflecting film (70) made of a reflecting film is provided opposite to the light transmitting film (60), and
A light absorbing film (62) that absorbs light is provided at the end of the light reflecting film (70) located at the interface between the adhesive (40) and the sealing can (50),
The refractive index difference between the light-transmitting film (60) and the adhesive (40) and the refractive index difference between the light-transmitting film (60) and the substrate (10) are expressed as the refractive index between the adhesive (40) and the substrate (10). Be greater than the difference,
Light is irradiated from the other surface (12) side of the substrate (10) at the position of the light transmission film (60), and based on both reflected light from the light transmission film (60) and the light reflection film (70). The thickness of the adhesive (40) is measured.

請求項１９に記載の発明は、請求項５に記載の発明に対応するものであり、請求項５に記載の発明と同様の効果を奏する。
請求項２０に記載の発明では、光を透過する光透過性の基板（１０）と、光を透過する光透過性の封止缶（５０）と、を備える有機ＥＬ装置の製造方法において、
接着剤（４０）と基板（１０）との界面に、光を透過する膜よりなる光透過膜（６０）を設け、接着剤（４０）と封止缶（５０）との界面に、光を反射する膜よりなる光反射膜（７０）を光透過膜（６０）と対向して設けるとともに、
光透過膜（６０）の端部に、光を通さない不透明材料よりなる不透明膜（６１）を配置し、
光透過膜（６０）と接着剤（４０）との屈折率差および光透過膜（６０）と基板（１０）との屈折率差を、接着剤（４０）と基板（１０）との屈折率差よりも大きいものとし、
光透過膜（６０）の位置にて、基板（１０）の他面（１２）側から光の照射を行って、光透過膜（６０）と光反射膜（７０）での両反射光に基づいて接着剤（４０）の厚さ測定を行うようにしたことを特徴としている。
請求項２０に記載の発明は、請求項６に記載の発明に対応するものであり、請求項６に記載の発明と同様の効果を奏する。 The invention according to claim 19, which corresponds to the invention of claim 5, the same effect as the invention described in claim 5.
In the invention of claim 20, in a method of manufacturing an organic EL device comprising: a light transmissive substrate (10) that transmits light; and a light transmissive sealing can (50) that transmits light.
A light transmitting film (60) made of a light transmitting film is provided at the interface between the adhesive (40) and the substrate (10), and light is transmitted to the interface between the adhesive (40) and the sealing can (50). A light reflecting film (70) made of a reflecting film is provided opposite to the light transmitting film (60), and
An opaque film (61) made of an opaque material that does not transmit light is disposed at the end of the light transmission film (60),
The refractive index difference between the light-transmitting film (60) and the adhesive (40) and the refractive index difference between the light-transmitting film (60) and the substrate (10) are expressed as the refractive index between the adhesive (40) and the substrate (10). Be greater than the difference,
Light is irradiated from the other surface (12) side of the substrate (10) at the position of the light transmission film (60), and based on both reflected light from the light transmission film (60) and the light reflection film (70). The thickness of the adhesive (40) is measured.
The invention described in claim 20 corresponds to the invention described in claim 6, and has the same effect as that of the invention described in claim 6.

請求項２１に記載の発明では、光を透過しない不透明な基板（１０）と、光を透過する光透過性の封止缶（５０）と、を備える有機ＥＬ装置の製造方法において、
接着剤（４０）と基板（１０）との界面に、光を反射する膜よりなる光反射膜（７０）を設け、接着剤（４０）と封止缶（５０）との界面に、光を透過する膜よりなる光透過膜（６０）を光反射膜（７０）と対向して設けるとともに、
光透過膜（６０）の端部に、光を通さない不透明材料よりなる不透明膜（６１）を配置し、
光透過膜（６０）と接着剤（４０）との屈折率差および光透過膜（６０）と封止缶（５０）との屈折率差を、接着剤（４０）と封止缶（５０）との屈折率差よりも大きいものとし、
光透過膜（６０）の位置にて、封止缶（５０）の外側から光の照射を行って、光透過膜（６０）と光反射膜（７０）での両反射光に基づいて接着剤（４０）の厚さ測定を行うようにしたことを特徴としている。 In the invention according to claim 21, in the method of manufacturing an organic EL device comprising an opaque substrate (10) that does not transmit light, and a light-transmitting sealing can (50) that transmits light,
A light reflecting film (70) made of a light reflecting film is provided at the interface between the adhesive (40) and the substrate (10), and light is applied to the interface between the adhesive (40) and the sealing can (50). A light transmission film (60) made of a transparent film is provided opposite to the light reflection film (70), and
An opaque film (61) made of an opaque material that does not transmit light is disposed at the end of the light transmission film (60),
The refractive index difference between the light transmissive film (60) and the adhesive (40) and the refractive index difference between the light transmissive film (60) and the sealing can (50) are represented by the adhesive (40) and the sealing can (50). Greater than the refractive index difference between
Light is irradiated from the outside of the sealing can (50) at the position of the light transmission film (60), and the adhesive is based on both reflected light from the light transmission film (60) and the light reflection film (70). (40) Thickness measurement is performed.

請求項２１に記載の発明は、請求項７に記載の発明に対応するものであり、請求項７に記載の発明と同様の効果を奏する。 The invention according to claim 21, which corresponds to the invention of claim 7, the same effect as the invention described in claim 7.

なお、特許請求の範囲およびこの欄で記載した各手段の括弧内の符号は、後述する実施形態に記載の具体的手段との対応関係を示す一例である。 In addition, the code | symbol in the bracket | parenthesis of each means described in the claim and this column is an example which shows a corresponding relationship with the specific means as described in embodiment mentioned later.

（ａ）は、本発明の第１実施形態に係る有機ＥＬディスプレイの概略断面図、（ｂ）は同ディスプレイの概略平面図である。(A) is a schematic sectional drawing of the organic electroluminescent display which concerns on 1st Embodiment of this invention, (b) is a schematic plan view of the display. 図１（ｂ）中のＡ−Ａ概略断面図である。It is AA schematic sectional drawing in FIG.1 (b). （ａ）、（ｂ）、（ｃ）は、それぞれ図１（ｂ）中のＡ−Ａ断面、Ｂ−Ｂ断面、Ｃ−Ｃ断面における封止缶の形状を示す概略断面図である。(A), (b), (c) is a schematic sectional drawing which shows the shape of the sealing can in the AA cross section in FIG.1 (b), a BB cross section, and CC cross section, respectively. 有機ＥＬ素子の詳細構成を示す概略断面図である。It is a schematic sectional drawing which shows the detailed structure of an organic EL element. 不透明膜を含む光透過膜の概略平面図である。It is a schematic plan view of the light transmission film containing an opaque film. 平面矩形の封止缶の両角部と両角部間に位置する辺部における接着剤厚さの傾向を表す図である。It is a figure showing the tendency of the adhesive agent thickness in the edge part located between the both corners of a planar rectangular sealing can. 第1実施形態の他の例を示す図である。FIG. 6 is a diagram showing another example of the first embodiment. （ａ）は第２実施形態に係る有機ＥＬディスプレイの要部の概略断面図であり、（ｂ）は（ａ）中の光吸収膜６２の平面図である。(A) is a schematic sectional drawing of the principal part of the organic electroluminescent display which concerns on 2nd Embodiment, (b) is a top view of the light absorption film 62 in (a). 第３実施形態に係る有機ＥＬディスプレイの要部の概略断面図である。It is a schematic sectional drawing of the principal part of the organic electroluminescent display which concerns on 3rd Embodiment. 第３実施形態の他の例を示す図である。It is a figure which shows the other example of 3rd Embodiment. 第４実施形態に係る有機ＥＬディスプレイの要部の概略断面図である。It is a schematic sectional drawing of the principal part of the organic electroluminescent display which concerns on 4th Embodiment. （ａ）は第５実施形態に係る有機ＥＬディスプレイの要部の概略断面図であり、（ｂ）は（ａ）中の光反射膜６３の平面図である。(A) is a schematic sectional drawing of the principal part of the organic electroluminescent display which concerns on 5th Embodiment, (b) is a top view of the light reflection film 63 in (a). 第６実施形態に係る有機ＥＬディスプレイの要部の概略断面図である。It is a schematic sectional drawing of the principal part of the organic electroluminescent display which concerns on 6th Embodiment. 第６実施形態の他の例を示す図である。It is a figure which shows the other example of 6th Embodiment. 第７実施形態に係る有機ＥＬディスプレイの要部の概略断面図である。It is a schematic sectional drawing of the principal part of the organic electroluminescent display which concerns on 7th Embodiment. 第７実施形態の他の例を示す図である。It is a figure which shows the other example of 7th Embodiment. 他の実施形態に係る光透過膜６０、光反射膜７０、不透明膜６１、光反射膜６３、光吸収膜６２の平面図である。FIG. 6 is a plan view of a light transmission film 60, a light reflection film 70, an opaque film 61, a light reflection film 63, and a light absorption film 62 according to another embodiment. 他の実施形態に係る光透過膜６０、光反射膜７０、不透明膜６１、光反射膜６３、光吸収膜６２の平面図である。FIG. 6 is a plan view of a light transmission film 60, a light reflection film 70, an opaque film 61, a light reflection film 63, and a light absorption film 62 according to another embodiment. 他の実施形態に係る光透過膜６０、光反射膜７０、不透明膜６１、光反射膜６３、光吸収膜６２の平面図である。FIG. 6 is a plan view of a light transmission film 60, a light reflection film 70, an opaque film 61, a light reflection film 63, and a light absorption film 62 according to another embodiment. 他の実施形態に係る光透過膜６０、光反射膜７０の平面図である。FIG. 6 is a plan view of a light transmission film 60 and a light reflection film 70 according to another embodiment. （ａ）、（ｂ）は従来技術に基づいて試作した試作品としての有機ＥＬディスプレイの概略断面図、概略平面図である。(A), (b) is the schematic sectional drawing of the organic electroluminescent display as a prototype made based on the prior art, and a schematic plan view. （ａ）は図２１（ｂ）中のＸ−Ｘ概略断面図、（ｂ）は図２１（ｂ）中のＹ−Ｙ概略断面図である。(A) is XX schematic sectional drawing in FIG.21 (b), (b) is YY schematic sectional drawing in FIG.21 (b).

以下、本発明の実施形態について図に基づいて説明する。なお、以下の各図および上記図２１、図２２において、互いに同一もしくは均等である部分には、説明の簡略化を図るべく、図中、同一符号を付してある。 Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the following drawings and FIGS. 21 and 22, the same or equivalent parts are denoted by the same reference numerals in the drawings for the sake of simplicity.

（第１実施形態）
図１（ａ）は、本発明の第１実施形態に係る有機ＥＬディスプレイの概略断面図、（ｂ）は同ディスプレイの概略平面図である。また、図２は、図１（ｂ）中のＡ−Ａ概略断面図であり、図３（ａ）、（ｂ）、（ｃ）は、それぞれ図１（ｂ）中のＡ−Ａ断面、Ｂ−Ｂ断面、Ｃ−Ｃ断面における封止缶５０の形状を示す概略断面図である。なお、図１（ｂ）では、封止缶５０の下部に位置する接着剤４０に点ハッチングを施してある。 (First embodiment)
FIG. 1A is a schematic sectional view of an organic EL display according to the first embodiment of the present invention, and FIG. 1B is a schematic plan view of the display. 2 is a schematic cross-sectional view taken along line AA in FIG. 1B, and FIGS. 3A, 3B, and 3C are cross-sectional views taken along line AA in FIG. It is a schematic sectional drawing which shows the shape of the sealing can 50 in a BB cross section and CC cross section. In FIG. 1 (b), the hatching is applied to the adhesive 40 located at the lower part of the sealing can 50.

図１（ａ）、（ｂ）に示されるように、本ディスプレイは、光を透過する光透過性のガラスなどよりなる基板１０を有する。基板１０は、一方の板面を一面１１、他方の板面を他面１２とする板状をなす。ここで、ガラスとしては、この種のディスプレイにおける一般的なものが採用され、例えばソーダガラスなどが用いられる。 As shown in FIGS. 1A and 1B, the display includes a substrate 10 made of light-transmitting glass or the like that transmits light. The substrate 10 has a plate shape in which one plate surface is one surface 11 and the other plate surface is the other surface 12. Here, as the glass, a common one in this type of display is adopted, and for example, soda glass is used.

この基板１０の一面１１上には、有機ＥＬ発光材料を含むＥＬ素子としての有機ＥＬ素子２０が設けられている。図１（ｂ）では、有機ＥＬ素子２０は矩形破線にて示されており、その外側には、上記図従１（ｂ）と同様のＩＴＯなどの透明材料よりなる引き出し電極３０が設けられている。 On one surface 11 of the substrate 10, an organic EL element 20 as an EL element containing an organic EL light emitting material is provided. In FIG. 1B, the organic EL element 20 is indicated by a rectangular broken line, and an extraction electrode 30 made of a transparent material such as ITO similar to the above-described FIG. Yes.

ここで、図４は、この有機ＥＬ素子２０の詳細構成を示す概略断面図である。有機ＥＬ素子２０は、基板１０の一面１１側から光透過性材料よりなる第１の電極２１、有機ＥＬ材料よりなる発光層２２、アルミニウムなどの金属よりなる第２の電極２３が積層されてなる一般的なものである。 Here, FIG. 4 is a schematic cross-sectional view showing a detailed configuration of the organic EL element 20. The organic EL element 20 is formed by laminating a first electrode 21 made of a light transmissive material, a light emitting layer 22 made of an organic EL material, and a second electrode 23 made of a metal such as aluminum from the one surface 11 side of the substrate 10. It is general.

ここで、引き出し電極３０は、一般的な構成と同様、第１の電極２１については、第１の電極２１から連続的に引き出されているものであり、第２の電極２３とは図示しない適所にて接続されている。 Here, in the same way as the general configuration, the extraction electrode 30 is such that the first electrode 21 is continuously extracted from the first electrode 21, and is not shown in the drawing with the second electrode 23. Connected at.

そして、この有機ＥＬ素子２０においては、実駆動時には、第１の電極２１を陽極、第２の電極２３を陰極として両極２１、２３間に順電圧を印加することにより、発光層２２にて発光がなされ、基板１０の他面１２側に当該発光が取り出されるようになっている。 In the organic EL element 20, during actual driving, light is emitted from the light emitting layer 22 by applying a forward voltage between the two electrodes 21, 23 using the first electrode 21 as an anode and the second electrode 23 as a cathode. The light emission is extracted to the other surface 12 side of the substrate 10.

また、図１に示されるように、基板１０の一面１１にて光透過性の接着剤４０が、有機ＥＬ素子２０の外側を取り巻くように配置されている。この接着剤４０はアクリル樹脂やエポキシ樹脂などよりなる透明なものであり、印刷などによる塗布・硬化により形成されるものである。 In addition, as shown in FIG. 1, a light-transmitting adhesive 40 is disposed on one surface 11 of the substrate 10 so as to surround the outside of the organic EL element 20. The adhesive 40 is made of a transparent material such as an acrylic resin or an epoxy resin, and is formed by application / curing by printing or the like.

そして、封止缶５０は、基板１０の一面１１上にて、接着剤４０を介して基板１０に接着されるとともに、接着剤４０以外の部位では基板１０の一面１１と離間しつつ、有機ＥＬ素子２０を封止している。ここでは、封止缶５０は矩形のドーム状をなし、ドーム部分の端部に接着剤４０と接触する接着面５１を有するものである。 Then, the sealing can 50 is adhered to the substrate 10 via the adhesive 40 on the one surface 11 of the substrate 10, and is separated from the one surface 11 of the substrate 10 at a portion other than the adhesive 40, and the organic EL. The element 20 is sealed. Here, the sealing can 50 has a rectangular dome shape, and has an adhesive surface 51 in contact with the adhesive 40 at the end of the dome portion.

ここでは、封止缶５０は、光を透過しない不透明なものであって、光を反射する金属等よりなる。このような封止缶５０は、ステンレスなどの金属よりなる板材に対して、その周辺部を凹ませるようにプレス加工することにより形成される。 Here, the sealing can 50 is opaque and does not transmit light, and is made of a metal or the like that reflects light. Such a sealing can 50 is formed by pressing a plate material made of a metal such as stainless steel so that the peripheral portion is recessed.

そして、本実施形態では、図１（ｂ）、図２に示されるように、基板１０の一面１１のうち接着剤４０が配置されている部位には、光を透過する膜よりなる光透過膜６０が、接着剤４０と基板１０との間に介在して設けられている。つまり、光透過膜６０は、接着剤４０と基板１０との界面に設けられている。 In this embodiment, as shown in FIG. 1B and FIG. 2, a light transmission film made of a film that transmits light is provided on a portion of the surface 11 of the substrate 10 where the adhesive 40 is disposed. 60 is provided between the adhesive 40 and the substrate 10. That is, the light transmission film 60 is provided at the interface between the adhesive 40 and the substrate 10.

光透過膜６０は、有機ＥＬ素子２０の第１の電極２１と同様の光透過性材料で構成され、例えばスパッタによるＩＴＯ膜よりなる。これは、有機ＥＬ素子２０を構成する第１の電極２１と光透過膜６０とを、スパッタなどによって一括して製造することが可能となり、製造工程の簡略化および材料コストの低減が期待できるためである。もちろん、光透過膜６０と第１の電極２１とを異種の光透過性材料として、別工程で成膜してもよい。 The light transmissive film 60 is made of a light transmissive material similar to that of the first electrode 21 of the organic EL element 20, and is made of, for example, an ITO film formed by sputtering. This is because the first electrode 21 and the light transmission film 60 constituting the organic EL element 20 can be manufactured in a lump by sputtering or the like, and the manufacturing process can be simplified and the material cost can be reduced. It is. Of course, the light transmissive film 60 and the first electrode 21 may be formed in different steps using different kinds of light transmissive materials.

また、光透過膜６０を他の光透過性材料で構成することもできる。光透過膜６０を、例えば、フォト成膜による絶縁膜よりなるものとすることもできる。フォト成膜とは、スピンコーディング法などによる感光性樹脂材料の塗布およびフォトリソグラフィによるパターン形成を意味し、フォト成膜による絶縁膜としては感光性レジストやポリイミドなどの一般的な感光性樹脂よりなるものが挙げられる。 Moreover, the light transmission film 60 can also be comprised with another light transmissive material. For example, the light transmission film 60 may be made of an insulating film formed by photolithography. Photo film formation means application of a photosensitive resin material by spin coding or the like and pattern formation by photolithography, and the insulating film by photo film formation is made of a general photosensitive resin such as a photosensitive resist or polyimide. Things.

この光透過膜６０については、光透過膜６０と接着剤４０との屈折率差および光透過膜６０と基板１０との屈折率差を、接着剤４０と基板１０との屈折率差よりも大きいものとしている。例えば、基板１０、接着剤４０、光透過膜６０の屈折率はそれぞれ、１．５、１．５〜１．６、１．７〜２．０である。 For the light transmission film 60, the refractive index difference between the light transmission film 60 and the adhesive 40 and the refractive index difference between the light transmission film 60 and the substrate 10 are larger than the refractive index difference between the adhesive 40 and the substrate 10. It is supposed to be. For example, the refractive indexes of the substrate 10, the adhesive 40, and the light transmission film 60 are 1.5, 1.5 to 1.6, and 1.7 to 2.0, respectively.

このような屈折率の大小関係により、本実施形態では、光透過膜６０の位置で、基板１０の他面１２側からの光の照射による接着剤４０の厚さ測定がなされるようにしている。具体的には、図２に示されるように、基板１０の他面１２側からレーザなどの光ａ１を照射した場合、基板１０と接着剤４０とでは屈折率が実質均等であるため、主たる反射光としては、封止缶５０による反射光ａ２と、光透過膜６０による反射光ａ５とが検出される。光透過膜６０による反射光ａ５は、光透過膜６０と接着剤４０との界面、光透過膜６０と基板１０との界面の少なくとも一方での反射光である。そして、これら両反射光ａ２、ａ５の光量差と位相差の少なくとも一方を検出することで接着剤４０の厚さが測定できる。 In this embodiment, the thickness of the adhesive 40 is measured by light irradiation from the other surface 12 side of the substrate 10 at the position of the light transmission film 60 due to such a refractive index magnitude relationship. . Specifically, as shown in FIG. 2, when light a1 such as a laser is irradiated from the other surface 12 side of the substrate 10, the refractive index is substantially equal between the substrate 10 and the adhesive 40, so that the main reflection As light, reflected light a2 from the sealing can 50 and reflected light a5 from the light transmission film 60 are detected. The reflected light a <b> 5 by the light transmission film 60 is reflected light at least one of the interface between the light transmission film 60 and the adhesive 40 and the interface between the light transmission film 60 and the substrate 10. And the thickness of the adhesive agent 40 can be measured by detecting at least one of the light quantity difference and phase difference of these both reflected light a2 and a5.

なお、光透過膜６０は、反射光ａ５が検出できるように、光透過膜６０と接着剤４０との屈折率差および光透過膜６０と基板１０との屈折率差が、接着剤４０と基板１０との屈折率差よりも大きいものであればよく、上記した材料例に限定されるものではない。 The light transmission film 60 has a difference in refractive index between the light transmission film 60 and the adhesive 40 and a difference in refractive index between the light transmission film 60 and the substrate 10 so that the reflected light a5 can be detected. What is necessary is just to be larger than the refractive index difference with 10, and is not limited to the above-described material examples.

ここで、図２に示されるように、光透過膜６０の端部には、光を通さない不透明材料よりなる不透明膜６１が配置されている。図５は、この不透明膜６１を含む光透過膜６０の概略平面図である。 Here, as shown in FIG. 2, an opaque film 61 made of an opaque material that does not transmit light is disposed at the end of the light transmission film 60. FIG. 5 is a schematic plan view of the light transmission film 60 including the opaque film 61.

光透過膜６０は、接着剤厚さ測定に十分な平面サイズを有するものであり、ここでは、図５に示されるように、例えば一辺が１ｍｍ以上のサイズを有する矩形の膜である。そして、この不透明膜６１は、この光透過膜６０の端部上に、例えばアルミニウムなどの金属膜を蒸着やスパッタなどにより成膜したものであり、光透過膜６０の外周全域に沿った形状、すなわち、四角形の環状となっている。 The light transmission film 60 has a plane size sufficient for measuring the adhesive thickness. Here, as shown in FIG. 5, for example, the light transmission film 60 is a rectangular film having a size of 1 mm or more on one side. The opaque film 61 is formed by depositing a metal film such as aluminum on the end of the light transmission film 60 by vapor deposition or sputtering, and has a shape along the entire outer periphery of the light transmission film 60. That is, it has a quadrangular annular shape.

これによれば、光による接着剤厚さの測定時に、光透過膜６０を外れた光と光透過膜６０に当たる光とは、不透明膜６１による遮光部分の存在により、光学的に明確に区別される。そのため、光透過膜６０による接着剤厚さの測定範囲が明確になる。なお、このような効果を奏するため、不透明膜６１を設けることが望ましいが、場合によっては省略してもよい。 According to this, at the time of measuring the adhesive thickness by light, the light that has deviated from the light transmission film 60 and the light that hits the light transmission film 60 are optically clearly distinguished by the presence of the light shielding portion by the opaque film 61. The Therefore, the measurement range of the adhesive thickness by the light transmission film 60 becomes clear. In order to achieve such an effect, it is desirable to provide the opaque film 61, but it may be omitted depending on circumstances.

また、図１（ｂ）に示されるように、接着剤４０は基板１０の一面１１上において環状に配置されているが、光透過膜６０は、接着剤４０の最大厚さの部位に配置されていることが望ましい。 In addition, as shown in FIG. 1B, the adhesive 40 is arranged in a ring shape on the one surface 11 of the substrate 10, but the light transmission film 60 is arranged at a portion having the maximum thickness of the adhesive 40. It is desirable that

上述したが、接着剤４０の厚さが、厚すぎると、接着剤４０から水分が封止缶５０内部に侵入して有機ＥＬ素子２０にダメージを与える可能性がある。このことから、光透過膜６０を接着剤４０の最大厚さの部位に配置し、当該最大厚さを測定することが好ましい。 As described above, if the thickness of the adhesive 40 is too thick, moisture may enter the sealing can 50 from the adhesive 40 and damage the organic EL element 20. For this reason, it is preferable to place the light transmission film 60 in a portion of the adhesive 40 having the maximum thickness and measure the maximum thickness.

ここでは、図１（ｂ）に示されるように、封止缶５０は、接着剤４０との接触部位が矩形であり、この矩形の角部（四隅部）が接着剤４０の最大厚さの部位となっており、当該角部に、光透過膜６０が配置されている。 Here, as shown in FIG. 1B, the sealing can 50 has a rectangular contact portion with the adhesive 40, and the corners (four corners) of the rectangle have the maximum thickness of the adhesive 40. The light transmission film 60 is disposed at the corner.

これは、図３（ａ）〜（ｃ）に示されるように、矩形などの平面多角形の封止缶５０について、プレス加工によって周辺部を凹ませてドーム形状とする場合、角部の凹み５０ａは辺部の凹み５０ａに比べて小さくなるものが一般的であり、その結果として角部では辺部に比べて接着剤４０の厚さが大きくなるためである。 As shown in FIGS. 3 (a) to 3 (c), in the case of a planar polygonal sealing can 50 such as a rectangle, when the peripheral part is recessed by pressing to form a dome shape, the corner is recessed. This is because 50a is generally smaller than the side recess 50a, and as a result, the thickness of the adhesive 40 is larger at the corner than at the side.

なお、封止缶が平板の場合や、封止缶における凹みがプレス加工ではなくエッチング等の加工により形成されている場合であっても、接着剤をディスペンス塗布した場合などに角部の接着材量が相対的に多いことにより、角部の接着剤厚さが大きくなる場合がある。 In addition, even when the sealing can is a flat plate or when the dent in the sealing can is formed by processing such as etching instead of press processing, the adhesive at the corner is applied when dispensing adhesive. The relatively large amount may increase the adhesive thickness at the corners.

図６は、本発明者の測定に基づいて、平面矩形の封止缶５０の両角部と両角部間に位置する辺部における接着剤厚さの傾向を表す図である。このように、封止缶５０における接着剤４０との接触部位が矩形の場合、その角部にて接着剤厚さが最大となりやすい。 FIG. 6 is a diagram illustrating the tendency of the adhesive thickness at both corners of the planar rectangular sealing can 50 and the sides located between the corners based on the measurement by the present inventor. Thus, when the contact site | part with the adhesive agent 40 in the sealing can 50 is a rectangle, the adhesive thickness tends to become the maximum in the corner | angular part.

ここで、図７は本実施形態の他の例を示す図である。例えば封止缶５０における接着剤４０との接触部位が矩形ではなく、六角形の場合には、その六角形に対応した六角形状に接着剤４０が配置される。この場合も、やはり封止缶５０のプレス加工に起因して角部における接着剤厚さが最大となるため、その角部に光透過膜６０を配置することが望ましい。もちろん、当該封止缶５０の多角形としては、上記図以外の三角形、五角形等の場合も同様である。 Here, FIG. 7 is a diagram illustrating another example of the present embodiment. For example, when the contact part with the adhesive 40 in the sealing can 50 is not rectangular but hexagonal, the adhesive 40 is arranged in a hexagonal shape corresponding to the hexagon. Also in this case, since the adhesive thickness at the corner is maximized due to the press working of the sealing can 50, it is desirable to dispose the light transmission film 60 at the corner. Of course, the polygon of the sealing can 50 is the same in the case of triangles, pentagons and the like other than the above figures.

また、図２に示されるように、光透過膜６０は、接着剤４０の端部よりも内側に収まって配置されていることが望ましい。ここでは、環状に配置された接着剤４０の内周側の端部と外周側の端部との間に光透過膜６０が収まっている。これは、一般に基板１０と接着剤４０との接着力に比べて、光透過膜６０と接着剤４０との接着力は弱いことによる。 In addition, as shown in FIG. 2, it is desirable that the light transmission film 60 be disposed inside the end portion of the adhesive 40. Here, the light-transmitting film 60 is accommodated between the inner peripheral end and the outer peripheral end of the annularly arranged adhesive 40. This is because the adhesive force between the light transmission film 60 and the adhesive 40 is generally weaker than the adhesive force between the substrate 10 and the adhesive 40.

そこで、光透過膜６０を接着剤４０からはみ出さないように接着剤４０の内部に収めて、接着剤４０の端部を基板１０に接着するようにすれば、基板１０と封止缶５０との剥離を抑制するという効果が期待できる。もちろん、光透過膜６０と接着剤４０との接着力が確保されるならば、光透過膜６０は、接着剤４０の端部から一部はみ出して配置されたものであってもよい。 Therefore, if the light transmission film 60 is accommodated in the adhesive 40 so as not to protrude from the adhesive 40 and the end portion of the adhesive 40 is adhered to the substrate 10, the substrate 10 and the sealing can 50 The effect of suppressing peeling of the film can be expected. Of course, as long as the adhesive force between the light transmission film 60 and the adhesive 40 is ensured, the light transmission film 60 may be disposed so as to partially protrude from the end of the adhesive 40.

さらに、光透過膜６０を接着剤４０からはみ出さないように接着剤４０の内部に収める場合では、図２に示すように、接着剤４０の内周側の端部４０ａと光透過膜６０との距離Ｌ１と、接着剤４０の外周側の端部４０ｂと光透過膜６０との距離Ｌ２とが等距離であることが望ましい。 Further, when the light transmission film 60 is accommodated in the adhesive 40 so as not to protrude from the adhesive 40, as shown in FIG. It is desirable that the distance L1 between the outer peripheral side of the adhesive 40 and the distance L2 between the light transmission film 60 and the light transmission film 60 be equal.

このような有機ＥＬディスプレイは、基板１０の一面１１上に、有機ＥＬ素子２０、引き出し電極３０および光透過膜６０等を、一般的な成膜法により形成した後、接着剤４０の塗布、封止缶５０の取り付け、接着剤４０の硬化を行い、続いて、接着剤４０の厚さ測定を行うことで製造される。 In such an organic EL display, the organic EL element 20, the extraction electrode 30, the light transmission film 60, and the like are formed on the one surface 11 of the substrate 10 by a general film forming method, and then the adhesive 40 is applied and sealed. It is manufactured by attaching the stopper 50 and curing the adhesive 40, and then measuring the thickness of the adhesive 40.

この接着剤４０の厚さ測定については、上記図２を参照して述べたように、光透過膜６０と接着剤４０との屈折率差および光透過膜６０と基板１０との屈折率差を、接着剤４０と基板１０との屈折率差よりも大きいものとする屈折率の大小関係を有するものとし、光透過膜６０の位置にて、基板１０の他面１２側から光の照射を行って、封止缶５０と光透過膜６０での両反射光ａ２、ａ５に基づいて厚さ測定を行うものである。 Regarding the measurement of the thickness of the adhesive 40, as described with reference to FIG. 2 above, the refractive index difference between the light transmitting film 60 and the adhesive 40 and the refractive index difference between the light transmitting film 60 and the substrate 10 are calculated. The refractive index is greater than the difference in refractive index between the adhesive 40 and the substrate 10, and light is irradiated from the other surface 12 side of the substrate 10 at the position of the light transmission film 60. Thus, the thickness is measured based on both reflected light a2 and a5 from the sealing can 50 and the light transmission film 60.

以上のように、本実施形態によれば、光透過膜６０を接着剤４０の配置部位のうち所望の測定領域に設けてやれば、接着剤４０の厚さ測定が可能となるから、破壊検査をすることなく、光学的に接着剤厚さを測定し、接着剤厚さを保証することが可能となる。 As described above, according to the present embodiment, if the light transmission film 60 is provided in a desired measurement region in the arrangement portion of the adhesive 40, the thickness of the adhesive 40 can be measured. It is possible to optically measure the adhesive thickness without guaranteeing the adhesive thickness.

（第２実施形態）
図８（ａ）は、第２実施形態に係る有機ＥＬディスプレイの要部の概略断面構成を示す図であり、図８（ｂ）は図８（ａ）中の光吸収膜６２の平面図である。 (Second Embodiment)
FIG. 8A is a diagram showing a schematic cross-sectional configuration of the main part of the organic EL display according to the second embodiment, and FIG. 8B is a plan view of the light absorption film 62 in FIG. is there.

本実施形態は、第１実施形態に対して、不透明膜６１の代わりに光吸収膜６２を設けたものであり、その他の構成は第１実施形態と同じである。 The present embodiment is different from the first embodiment in that a light absorbing film 62 is provided instead of the opaque film 61, and the other configuration is the same as that of the first embodiment.

図８（ａ）に示すように、光吸収膜６２は、封止缶５０の接着面５１のうち光透過膜６０と正対する領域の端部に設けられている。本実施形態では、光透過膜６０が矩形であるため、図８（ｂ）に示すように、光吸収膜６２は光透過膜６０の外周全域に沿った形状、すなわち、四角形の環状となっている。この光吸収膜６２は、光を吸収する膜であり、例えば、フォト成膜によって成膜した黒色の絶縁膜よりなるものである。 As shown in FIG. 8A, the light absorption film 62 is provided at the end of the region facing the light transmission film 60 on the adhesive surface 51 of the sealing can 50. In the present embodiment, since the light transmission film 60 is rectangular, as shown in FIG. 8B, the light absorption film 62 has a shape along the entire outer periphery of the light transmission film 60, that is, a rectangular ring shape. Yes. The light absorption film 62 is a film that absorbs light, and is made of, for example, a black insulating film formed by photolithography.

これによれば、接着剤厚さの測定範囲（検査範囲）である光吸収膜６２の内側の領域では、光による接着剤厚さの測定時に、封止缶５０による反射光ａ２と、光透過膜６０による反射光ａ５の２つの反射光が検出されるのに対して、光吸収膜６２が設けられている位置では、基板１０の他面１２側から照射した光ａ１が光吸収膜６２に遮断されるため、封止缶５０による反射光ａ２が検出されなくなる。 According to this, in the region inside the light absorption film 62 which is the measurement range (inspection range) of the adhesive thickness, the reflected light a2 from the sealing can 50 and the light transmission are measured when measuring the adhesive thickness by light. While the two reflected lights of the reflected light a5 from the film 60 are detected, the light a1 irradiated from the other surface 12 side of the substrate 10 is applied to the light absorbing film 62 at the position where the light absorbing film 62 is provided. Since it is blocked, the reflected light a2 from the sealing can 50 is not detected.

したがって、光による接着剤厚さの測定時に、上述の２つの反射光が検出できなくなった場合に、基板１０の他面１２側から照射した光ａ１が接着剤厚さの測定範囲から外れたことがわかる。 Therefore, when the above-mentioned two reflected lights cannot be detected during measurement of the adhesive thickness by light, the light a1 irradiated from the other surface 12 side of the substrate 10 is out of the measurement range of the adhesive thickness. I understand.

（第３実施形態）
図９は、第３実施形態に係る有機ＥＬディスプレイの要部の概略断面構成を示す図である。本実施形態は、第１実施形態に対して、封止缶５０を不透明で光を反射しない金属等からなるものに変更し、さらに、光反射膜７０を追加したものである。なお、図９では、図２中の不透明膜６１が省略されている。 (Third embodiment)
FIG. 9 is a diagram showing a schematic cross-sectional configuration of a main part of the organic EL display according to the third embodiment. This embodiment is different from the first embodiment in that the sealing can 50 is changed to one made of an opaque metal that does not reflect light and a light reflecting film 70 is further added. In FIG. 9, the opaque film 61 in FIG. 2 is omitted.

本実施形態では、具体的には、図９に示すように、接着剤４０と封止缶５０との界面に、光を反射する膜よりなる光反射膜７０が光透過膜６０と対向して設けられている。この光反射膜７０は、例えばアルミニウムなどの金属膜を蒸着やスパッタなどにより成膜したものである。なお、図９に示す例では、光透過膜６０と光反射膜７０の両方は、基板表面方向でのサイズ（平面サイズ）がどちらも接着剤厚さの測定範囲（検査範囲）と同じであり、測定範囲のみに配置されている。 In the present embodiment, specifically, as shown in FIG. 9, a light reflecting film 70 made of a light reflecting film is opposed to the light transmitting film 60 at the interface between the adhesive 40 and the sealing can 50. Is provided. The light reflecting film 70 is formed by depositing a metal film such as aluminum by vapor deposition or sputtering. In the example shown in FIG. 9, both the light transmission film 60 and the light reflection film 70 have the same size (planar size) in the substrate surface direction as the measurement range (inspection range) of the adhesive thickness. It is arranged only in the measurement range.

これによれば、接着剤４０と封止缶５０との界面に光反射膜７０を設けているので、不透明な封止缶５０が光反射性を有さない場合でも、基板１０の他面１２側から光ａ１を照射すると、光透過膜６０による反射光ａ５と、光反射膜７０による反射光ａ６とを検出できるので、適切に接着剤厚さの測定ができる。 According to this, since the light reflecting film 70 is provided at the interface between the adhesive 40 and the sealing can 50, even when the opaque sealing can 50 does not have light reflectivity, the other surface 12 of the substrate 10. When the light a1 is irradiated from the side, the reflected light a5 from the light transmission film 60 and the reflected light a6 from the light reflection film 70 can be detected, so that the adhesive thickness can be measured appropriately.

ここで、図１０に図９の変形例を示す。上述した図９に示す例では、光透過膜６０と光反射膜７０の両方を接着剤厚さの測定範囲（検査範囲）と同じ大きさとしたが、図１０に示す例では、光透過膜６０と光反射膜７０のうち光反射膜７０のみを、接着剤厚さの測定範囲（検査範囲）と同じ大きさとし、光透過膜６０を光反射膜７０よりも大きくしている。 Here, FIG. 10 shows a modification of FIG. In the example shown in FIG. 9 described above, both the light transmission film 60 and the light reflection film 70 have the same size as the measurement range (inspection range) of the adhesive thickness. However, in the example shown in FIG. Of the light reflection films 70, only the light reflection film 70 has the same size as the adhesive thickness measurement range (inspection range), and the light transmission film 60 is larger than the light reflection film 70.

すなわち、図１０に示す例では、光反射膜７０は、光反射膜７０と対向する光透過膜６０よりも平面サイズが小さいものであり、この光反射膜７０の外郭が、接着剤厚さの測定範囲を規定している。 That is, in the example shown in FIG. 10, the light reflecting film 70 has a smaller plane size than the light transmitting film 60 facing the light reflecting film 70, and the outline of the light reflecting film 70 has an adhesive thickness. Specifies the measurement range.

このように、光反射膜７０の外郭が接着剤厚さの測定範囲を規定していれば、光反射膜７０が配置された領域では、光による接着剤厚さの測定時に、光反射膜７０による反射光ａ６と、光透過膜６０による反射光ａ５の２つの反射光が検出されるのに対して、光反射膜７０よりも外側の位置では、光反射膜７０が無いので、光反射膜７０による反射光ａ６が検出されない。 Thus, if the outline of the light reflecting film 70 defines the measurement range of the adhesive thickness, the light reflecting film 70 is measured when measuring the adhesive thickness by light in the region where the light reflecting film 70 is disposed. The reflected light a6 due to the light and the reflected light a5 reflected by the light transmitting film 60 are detected, whereas the light reflecting film 70 does not exist at a position outside the light reflecting film 70, so the light reflecting film The reflected light a6 by 70 is not detected.

なお、本実施形態においては、光反射膜７０の外郭が接着剤厚さの測定範囲を規定する代わりに、基板１０の他面１２側から照射した光ａ１が接着剤厚さの測定範囲から外れたことがわかるように、図９に示す構造に対して、第１実施形態のように、光透過膜６０の端部に不透明膜６１を設けたり、第２実施形態のように、光反射膜７０の端部に光吸収膜６２を設けたりしても良い。 In this embodiment, instead of the outline of the light reflecting film 70 defining the measurement range of the adhesive thickness, the light a1 irradiated from the other surface 12 side of the substrate 10 deviates from the measurement range of the adhesive thickness. As shown in FIG. 9, an opaque film 61 is provided at the end of the light transmission film 60 as in the first embodiment, or a light reflection film as in the second embodiment. A light absorption film 62 may be provided at the end of 70.

（第４実施形態）
図１１は、第４実施形態に係る有機ＥＬディスプレイの要部の概略断面構成を示す図である。本実施形態は、第１実施形態に対して、封止缶５０を、光を通す光透過性のものに変更し、それに伴って光透過膜６０を追加したものである。 (Fourth embodiment)
FIG. 11 is a diagram illustrating a schematic cross-sectional configuration of a main part of the organic EL display according to the fourth embodiment. In the present embodiment, the sealing can 50 is changed to a light-transmitting material that allows light to pass through, and a light-transmitting film 60 is added accordingly.

本実施形態では、光透過性の封止缶５０としては、ソーダガラスなどよりなるものが挙げられる。そして、光透過膜６０は、上記第１実施形態と同様に基板１０の一面１１に設けられるが、さらに、本実施形態では、封止缶５０における接着剤４０との接触面にも光透過膜６０が設けられている。つまり、本実施形態では、接着剤４０と基板１０との第１界面、および、接着剤４０と封止缶５０との第２界面の両界面に、光透過膜６０が互いに対向して設けられている。 In the present embodiment, examples of the light-transmitting sealing can 50 include those made of soda glass. The light transmissive film 60 is provided on the one surface 11 of the substrate 10 as in the first embodiment. In the present embodiment, the light transmissive film is also formed on the contact surface of the sealing can 50 with the adhesive 40. 60 is provided. That is, in this embodiment, the light transmission films 60 are provided to face each other on both the first interface between the adhesive 40 and the substrate 10 and the second interface between the adhesive 40 and the sealing can 50. ing.

この場合、第１、第２界面の両方の光透過膜６０を、同じ光透過性材料で構成でき、例えばスパッタによるＩＴＯ膜で構成したり、フォト成膜による絶縁膜で構成したりすることができる。なお、第１、第２界面の両方の光透過膜６０を異なる光透過性材料で構成しても良い。例えば、一方をスパッタによるＩＴＯ膜で構成し、他方をフォト成膜による絶縁膜で構成しても良い。 In this case, the light transmissive films 60 on both the first and second interfaces can be made of the same light transmissive material. For example, the light transmissive films 60 can be made of an ITO film formed by sputtering or an insulating film formed by photo film formation. it can. In addition, you may comprise the light transmissive film | membrane 60 of the 1st, 2nd interface with a different light transmissive material. For example, one may be formed of an ITO film formed by sputtering and the other may be formed of an insulating film formed by photolithography.

この場合の接着剤厚さ測定は、次のとおりである。図１１に示されるように、基板１０の他面１２側からレーザなどの光ａ１を照射すると、主たる反射光としては、封止缶５０側の光透過膜６０による反射光ａ７と、基板１０の一面１１側の光透過膜６０による反射光ａ５とが検出される。そして、これら両反射光ａ７、ａ５の光量差と位相差の少なくとも一方を検出することで接着剤４０の厚さが測定できる。 The adhesive thickness measurement in this case is as follows. As shown in FIG. 11, when light a1 such as a laser is irradiated from the other surface 12 side of the substrate 10, the main reflected light is reflected light a7 by the light transmission film 60 on the sealing can 50 side, The reflected light a5 from the light transmission film 60 on the surface 11 side is detected. And the thickness of the adhesive agent 40 can be measured by detecting at least one of the light quantity difference and phase difference of these both reflected light a7 and a5.

一方、本実施形態では、封止缶５０の外側からも、光学的に接着剤厚さを測定可能である。図１１に示されるように、封止缶５０の外側からレーザなどの光ｂ１を照射すると、主たる反射光としては、基板１０の一面１１側の光透過膜６０による反射光ｂ２と、封止缶５０側の光透過膜６０による反射光ｂ３とが検出される。そして、これら両反射光ｂ２、ｂ３の光量差と位相差の少なくとも一方を検出することで接着剤４０の厚さが測定できる。 On the other hand, in the present embodiment, the adhesive thickness can be optically measured also from the outside of the sealing can 50. As shown in FIG. 11, when light b1 such as a laser is irradiated from the outside of the sealing can 50, the main reflected light is reflected light b2 by the light transmission film 60 on the one surface 11 side of the substrate 10, and the sealing can The reflected light b3 from the light transmission film 60 on the 50 side is detected. And the thickness of the adhesive agent 40 can be measured by detecting at least one of the light quantity difference and phase difference of these both reflected light b2 and b3.

このように、本実施形態によれば、封止缶５０が透明なものであっても、破壊検査をすることなく、光学的に接着剤厚さを測定し、接着剤厚さを保証することが可能となる。 Thus, according to the present embodiment, even if the sealing can 50 is transparent, the adhesive thickness is optically measured and the adhesive thickness is guaranteed without performing a destructive inspection. Is possible.

（第５実施形態）
図１２（ａ）は、第５実施形態に係る有機ＥＬディスプレイの要部の概略断面構成を示す図であり、図１２（ｂ）は図１２（ａ）中の光反射膜６３の平面図である。 (Fifth embodiment)
FIG. 12A is a diagram showing a schematic cross-sectional configuration of the main part of the organic EL display according to the fifth embodiment, and FIG. 12B is a plan view of the light reflecting film 63 in FIG. is there.

本実施形態は、第４実施形態に対して、光を反射する光反射膜６３を追加したものであり、その他の構成は、第４実施形態と同じである。 In the present embodiment, a light reflecting film 63 that reflects light is added to the fourth embodiment, and other configurations are the same as those of the fourth embodiment.

図１２（ａ）に示すように、光反射膜６３は、封止缶５０の界面に位置する光透過膜６０の端部に設けられている。本実施形態では、光透過膜６０が矩形であるため、図１２（ｂ）に示すように、光反射膜６３は、光透過膜６０の外周全域に沿って、四角形の環状となっている。この光反射膜６３は、例えばアルミニウムなどの金属膜を蒸着やスパッタなどにより成膜したものである。 As shown in FIG. 12A, the light reflection film 63 is provided at the end of the light transmission film 60 located at the interface of the sealing can 50. In the present embodiment, since the light transmission film 60 is rectangular, the light reflection film 63 has a quadrangular annular shape along the entire outer periphery of the light transmission film 60 as shown in FIG. The light reflecting film 63 is formed by depositing a metal film such as aluminum by vapor deposition or sputtering.

これによれば、封止缶５０の外側からレーザなどの光ｂ１を照射して接着剤厚さを測定する場合、接着剤厚さの測定範囲（検査範囲）である光反射膜６３の内側の領域では、基板１０の一面１１側の光透過膜６０による反射光ｂ２と、封止缶５０側の光透過膜６０による反射光ｂ３との２つの反射光が検出されるのに対して、光反射膜６３が設けられている位置では、封止缶５０の外側から照射した光ｂ１が光反射膜６３によって遮断されるため、基板１０の一面１１側の光透過膜６０による反射光ｂ２が検出されなくなる。 According to this, when the adhesive thickness is measured by irradiating light b1 such as a laser from the outside of the sealing can 50, the inner side of the light reflecting film 63 that is the measurement range (inspection range) of the adhesive thickness. In the region, two reflected lights, that is, the reflected light b2 by the light transmitting film 60 on the one surface 11 side of the substrate 10 and the reflected light b3 by the light transmitting film 60 on the sealing can 50 side are detected. At the position where the reflective film 63 is provided, the light b1 irradiated from the outside of the sealing can 50 is blocked by the light reflective film 63, so that the reflected light b2 by the light transmissive film 60 on the one surface 11 side of the substrate 10 is detected. It will not be done.

したがって、光による接着剤厚さの測定時に、上述の２つの反射光が検出できなくなった場合に、封止缶５０の外側から照射した光ｂ１が接着剤厚さの測定範囲から外れたことがわかる。 Therefore, when the above-mentioned two reflected lights cannot be detected during measurement of the adhesive thickness by light, the light b1 irradiated from the outside of the sealing can 50 is out of the adhesive thickness measurement range. Recognize.

なお、本実施形態においては、光反射膜６３の代わりに、第２実施形態のように光吸収膜を設けても良い。このようにしても、光吸収膜が設けられている位置では、封止缶５０の外側から照射した光ｂ１が光吸収膜によって遮断され、基板１０の一面１１側の光透過膜６０による反射光ｂ２が検出されなくなるので、基板１０の他面１２側から照射した光ａ１が接着剤厚さの測定範囲から外れたことがわかる。 In this embodiment, a light absorption film may be provided instead of the light reflection film 63 as in the second embodiment. Even in this case, at the position where the light absorption film is provided, the light b1 irradiated from the outside of the sealing can 50 is blocked by the light absorption film, and is reflected by the light transmission film 60 on the one surface 11 side of the substrate 10. Since b2 is not detected, it can be seen that the light a1 irradiated from the other surface 12 side of the substrate 10 deviates from the measurement range of the adhesive thickness.

（第６実施形態）
図１３は、第６実施形態に係る有機ＥＬディスプレイの要部の概略断面構成を示す図である。本実施形態は、第４実施形態に対して、接着剤４０と封止缶５０との第２界面の光透過膜６０を、光を反射する膜よりなる光反射膜７０に変更したものであり、他の構成は、第４実施形態と同じである。 (Sixth embodiment)
FIG. 13 is a diagram showing a schematic cross-sectional configuration of the main part of the organic EL display according to the sixth embodiment. In the present embodiment, the light transmission film 60 at the second interface between the adhesive 40 and the sealing can 50 is changed to a light reflection film 70 made of a film that reflects light as compared to the fourth embodiment. Other configurations are the same as those in the fourth embodiment.

この光反射膜７０は、例えばアルミニウムなどの金属膜を蒸着やスパッタなどにより成膜したものである。図１３に示す例では、光反射膜７０は、接着剤４０と基板１０との第１界面に設けられた光透過膜６０と対向して設けられており、光透過膜６０と光反射膜７０の両方は、基板表面方向でのサイズ（平面サイズ）がどちらも接着剤厚さの測定範囲（検査範囲）と同じであり、測定範囲のみに配置されている。 The light reflecting film 70 is formed by depositing a metal film such as aluminum by vapor deposition or sputtering. In the example shown in FIG. 13, the light reflecting film 70 is provided to face the light transmitting film 60 provided at the first interface between the adhesive 40 and the substrate 10, and the light transmitting film 60 and the light reflecting film 70 are provided. In both cases, the size (planar size) in the substrate surface direction is the same as the measurement range (inspection range) of the adhesive thickness, and is arranged only in the measurement range.

この場合の接着剤厚さ測定は、次のとおりである。図１３に示されるように、基板１０の他面１２側からレーザなどの光ａ１を照射すると、主たる反射光としては、封止缶５０側の光反射膜７０による反射光ａ８と、基板１０の一面１１側の光透過膜６０による反射光ａ５とが検出される。そして、これら両反射光ａ８、ａ５の光量差と位相差の少なくとも一方を検出することで接着剤４０の厚さが測定できる。 The adhesive thickness measurement in this case is as follows. As shown in FIG. 13, when light a1 such as a laser is irradiated from the other surface 12 side of the substrate 10, the main reflected light is reflected light a8 by the light reflecting film 70 on the sealing can 50 side, The reflected light a5 from the light transmission film 60 on the surface 11 side is detected. And the thickness of the adhesive agent 40 can be measured by detecting at least one of the light quantity difference and phase difference of these reflected light a8 and a5.

このように、本実施形態によれば、封止缶５０が透明で、封止缶５０と接着剤４０との間に屈折率の差が実質的に無い場合であっても、破壊検査をすることなく、光学的に接着剤厚さを測定し、接着剤厚さを保証することが可能となる。 Thus, according to this embodiment, even if the sealing can 50 is transparent and there is substantially no difference in refractive index between the sealing can 50 and the adhesive 40, a destructive inspection is performed. Therefore, it is possible to optically measure the adhesive thickness and guarantee the adhesive thickness.

ここで、図１４に図１３の変形例を示す。上述した図１３に示す例では、光透過膜６０と光反射膜７０の両方を接着剤厚さの測定範囲（検査範囲）と同じ大きさとしたが、図１４に示す例では、光透過膜６０と光反射膜７０のうち光反射膜７０のみを、接着剤厚さの測定範囲（検査範囲）と同じ大きさとし、光透過膜６０を光反射膜７０よりも大きくしている。 Here, FIG. 14 shows a modification of FIG. In the example shown in FIG. 13 described above, both the light transmission film 60 and the light reflection film 70 have the same size as the adhesive thickness measurement range (inspection range). However, in the example shown in FIG. Of the light reflection films 70, only the light reflection film 70 has the same size as the adhesive thickness measurement range (inspection range), and the light transmission film 60 is larger than the light reflection film 70.

すなわち、図１４に示す例では、光反射膜７０は、光反射膜７０と対向する光透過膜６０よりも平面サイズが小さいものであり、この光反射膜７０の外郭が、接着剤厚さの測定範囲を規定している。 That is, in the example shown in FIG. 14, the light reflecting film 70 has a smaller planar size than the light transmitting film 60 facing the light reflecting film 70, and the outline of the light reflecting film 70 has an adhesive thickness. Specifies the measurement range.

このように、少なくとも光反射膜７０の外郭が接着剤厚さの測定範囲を規定していれば、光反射膜７０が配置された領域では、光による接着剤厚さの測定時に、光反射膜７０による反射光ａ８と、光透過膜６０による反射光ａ５の２つの反射光が検出されるのに対して、光反射膜７０よりも外側の位置では、光反射膜７０が無いので、光反射膜７０による反射光ａ８が検出されない。 As described above, if at least the outline of the light reflecting film 70 defines the measuring range of the adhesive thickness, the light reflecting film 70 is measured at the time of measuring the adhesive thickness by light in the region where the light reflecting film 70 is disposed. Two reflected lights of the reflected light a8 by 70 and the reflected light a5 by the light transmission film 60 are detected, but there is no light reflecting film 70 at a position outside the light reflecting film 70. The reflected light a8 from the film 70 is not detected.

なお、本実施形態においても、光反射膜７０の外郭が接着剤厚さの測定範囲を規定する代わりに、基板１０の他面１２側から照射した光ａ１が接着剤厚さの測定範囲から外れたことがわかるように、図１３に示す構造に対して、第１実施形態のように、光透過膜６０の端部に不透明膜６１を設けたり、第２実施形態のように、光反射膜７０の端部に光吸収膜６２を設けたりしても良い。 Also in this embodiment, instead of the outline of the light reflecting film 70 defining the measurement range of the adhesive thickness, the light a1 irradiated from the other surface 12 side of the substrate 10 deviates from the measurement range of the adhesive thickness. As shown in FIG. 13, an opaque film 61 is provided at the end of the light transmission film 60 as in the first embodiment, or a light reflection film as in the second embodiment. A light absorption film 62 may be provided at the end of 70.

（第７実施形態）
図１５は、第７実施形態に係る有機ＥＬディスプレイの要部の概略断面構成を示す図である。本実施形態は、第１実施形態に対して、封止缶５０を、光を通す光透過性のものに変更し、基板１０を、光を透過しない不透明なものであって、光を反射しないものに変更したものである。 (Seventh embodiment)
FIG. 15 is a diagram showing a schematic cross-sectional configuration of the main part of the organic EL display according to the seventh embodiment. The present embodiment is different from the first embodiment in that the sealing can 50 is changed to a light transmitting material that transmits light, and the substrate 10 is an opaque material that does not transmit light and does not reflect light. It has been changed to a thing.

光透過性の封止缶５０としては、ソーダガラスなどよりなるものが挙げられる。また、不透明な基板１０としては、一般的な不透明な樹脂よりなるものが挙げられる。 Examples of the light-transmitting sealing can 50 include those made of soda glass. Further, as the opaque substrate 10, a substrate made of a general opaque resin can be used.

そして、本実施形態では、接着剤４０と基板１０との第１界面には、光を反射する膜よりなる光反射膜７０が設けられており、接着剤４０と封止缶５０との第２界面には、光を透過する膜よりなる光透過膜６０が、光反射膜７０と対向して設けられている。 In the present embodiment, a light reflecting film 70 made of a light reflecting film is provided at the first interface between the adhesive 40 and the substrate 10, and the second between the adhesive 40 and the sealing can 50 is provided. A light transmission film 60 made of a light transmission film is provided on the interface so as to face the light reflection film 70.

光透過膜６０は、第１実施形態で説明したものと同じであり、光反射膜７０は、第３実施液体で説明したものと同じものである。なお、図１５に示す例では、光透過膜６０と光反射膜７０の両方は、基板表面方向でのサイズ（平面サイズ）がどちらも接着剤厚さの測定範囲（検査範囲）と同じであり、測定範囲のみに配置されている。 The light transmission film 60 is the same as that described in the first embodiment, and the light reflection film 70 is the same as that described in the third embodiment liquid. In the example shown in FIG. 15, both the light transmission film 60 and the light reflection film 70 have the same size (planar size) in the substrate surface direction as the measurement range (inspection range) of the adhesive thickness. It is arranged only in the measurement range.

この場合の接着剤厚さ測定は、次のとおりである。図１５に示されるように、封止缶５０の外側からレーザなどの光ｂ１を照射すると、主たる反射光としては、基板１０の一面１１側の光反射膜７０による反射光ｂ４と、封止缶５０側の光透過膜６０による反射光ｂ５とが検出される。そして、これら両反射光ｂ４、ｂ５の光量差と位相差の少なくとも一方を検出することで接着剤４０の厚さが測定できる。 The adhesive thickness measurement in this case is as follows. As shown in FIG. 15, when light b1 such as a laser is irradiated from the outside of the sealing can 50, the main reflected light is reflected light b4 by the light reflecting film 70 on the one surface 11 side of the substrate 10, and the sealing can The reflected light b5 from the light transmitting film 60 on the 50 side is detected. And the thickness of the adhesive agent 40 can be measured by detecting at least one of the light quantity difference and phase difference of these both reflected light b4 and b5.

ここで、図１６に図１５の変形例を示す。上述した図１５に示す例では、光透過膜６０と光反射膜７０の両方を接着剤厚さの測定範囲（検査範囲）と同じ大きさとしたが、図１６に示す例では、第６実施形態の図１４に示す例と同様に、光反射膜７０は、光反射膜７０と対向する光透過膜６０よりも平面サイズが小さいものであり、この光反射膜７０の外郭が、接着剤厚さの測定範囲を規定している。 Here, FIG. 16 shows a modification of FIG. In the example shown in FIG. 15 described above, both the light transmitting film 60 and the light reflecting film 70 have the same size as the measurement range (inspection range) of the adhesive thickness. However, in the example shown in FIG. Similarly to the example shown in FIG. 14, the light reflecting film 70 has a smaller planar size than the light transmitting film 60 facing the light reflecting film 70, and the outer surface of the light reflecting film 70 has an adhesive thickness. Defines the measurement range.

このように、少なくとも光反射膜７０の外郭が接着剤厚さの測定範囲を規定していれば、光反射膜７０が配置された領域では、光による接着剤厚さの測定時に、光反射膜７０による反射光ｂ４と、光透過膜６０による反射光ｂ５の２つの反射光が検出されるのに対して、光反射膜７０よりも外側の位置では、光反射膜７０が無いので、光反射膜７０による反射光ｂ４が検出されない。 As described above, if at least the outline of the light reflecting film 70 defines the measuring range of the adhesive thickness, the light reflecting film 70 is measured at the time of measuring the adhesive thickness by light in the region where the light reflecting film 70 is disposed. Two reflected lights of the reflected light b4 by 70 and the reflected light b5 by the light transmission film 60 are detected, but there is no light reflecting film 70 at a position outside the light reflecting film 70, so that light reflection The reflected light b4 from the film 70 is not detected.

なお、本実施形態においても、光反射膜７０の外郭が接着剤厚さの測定範囲を規定する代わりに、封止缶５０の外側から照射した光ｂ１が接着剤厚さの測定範囲から外れたことがわかるように、図１５に示す構造に対して、第１実施形態のように、光透過膜６０の端部に不透明膜６１を設けたり、第２実施形態のように、光反射膜７０の端部に光吸収膜６２を設けたりしても良い。 In this embodiment as well, the light b1 irradiated from the outside of the sealing can 50 deviates from the measurement range of the adhesive thickness, instead of the outline of the light reflecting film 70 defining the measurement range of the adhesive thickness. As can be seen from the structure shown in FIG. 15, an opaque film 61 is provided at the end of the light transmission film 60 as in the first embodiment, or a light reflection film 70 as in the second embodiment. Alternatively, a light absorption film 62 may be provided at the end portion of the substrate.

（他の実施形態）
（１）上述の各実施形態では、光透過膜６０や光反射膜７０の形状を矩形としていたが、他の形状としても良い。また、光透過膜６０の端部に不透明膜６１（図５参照）や光反射膜６３（図１２（ｂ）参照）を設けたり、封止缶５０のうち光透過膜６０と正対する領域の端部に光吸収膜６２（図８（ｂ）参照）を設けたりする場合では、不透明膜６１、光反射膜６３、光吸収膜６２は、光透過膜６０や光反射膜７０の端部に沿った形状となる。 (Other embodiments)
(1) In each of the above-described embodiments, the light transmission film 60 and the light reflection film 70 have a rectangular shape, but may have other shapes. Further, an opaque film 61 (see FIG. 5) or a light reflecting film 63 (see FIG. 12B) is provided at the end of the light transmission film 60, or a region of the sealing can 50 facing the light transmission film 60. In the case where the light absorbing film 62 (see FIG. 8B) is provided at the end, the opaque film 61, the light reflecting film 63, and the light absorbing film 62 are provided at the ends of the light transmitting film 60 and the light reflecting film 70. It becomes the shape along.

ここで、図１７（ａ）〜（ｃ）、図１８（ａ）〜（ｃ）、図１９（ａ）〜（ｃ）に、光透過膜６０、光反射膜７０、不透明膜６１、光反射膜６３、光吸収膜６２の形状例を示す。 Here, in FIGS. 17A to 17C, FIGS. 18A to 18C, and FIGS. 19A to 19C, the light transmission film 60, the light reflection film 70, the opaque film 61, and the light reflection are shown. Examples of the shapes of the film 63 and the light absorption film 62 are shown.

例えば、図１７（ａ）、（ｂ）に示すように、光透過膜６０や光反射膜７０を円形状とすることもできる。この場合、図１７（ａ）、（ｃ）に示すように、不透明膜６１、光反射膜６３、光吸収膜６２の形状を円の環状とすることができる。 For example, as shown in FIGS. 17A and 17B, the light transmission film 60 and the light reflection film 70 may be circular. In this case, as shown in FIGS. 17A and 17C, the shapes of the opaque film 61, the light reflecting film 63, and the light absorbing film 62 can be circular.

また、図１８（ａ）、（ｂ）に示すように、光透過膜６０や光反射膜７０を十字形状とすることもできる。この場合、図１８（ａ）、（ｃ）に示すように、不透明膜６１、光反射膜６３、光吸収膜６２の形状を十字型の環状とすることができる。 Further, as shown in FIGS. 18A and 18B, the light transmission film 60 and the light reflection film 70 may be formed in a cross shape. In this case, as shown in FIGS. 18A and 18C, the shape of the opaque film 61, the light reflecting film 63, and the light absorbing film 62 can be a cross-shaped ring.

また、図１９（ａ）、（ｂ）に示すように、光透過膜６０や光反射膜７０をＬ字形状とすることもできる。この場合、図１９（ａ）、（ｃ）に示すように、不透明膜６１、光反射膜６３、光吸収膜６２の形状をＬ字型の環状とすることができる。 Further, as shown in FIGS. 19A and 19B, the light transmission film 60 and the light reflection film 70 may be L-shaped. In this case, as shown in FIGS. 19A and 19C, the shapes of the opaque film 61, the light reflecting film 63, and the light absorbing film 62 can be L-shaped.

（２）上述の各実施形態において、厚さ測定の領域の周囲に、厚さ測定の領域を位置決めするアライメントマークを設けても良い。図２０に光透過膜６０や光反射膜７０の平面図を示す。具体的には、図２０に示すように、光透過膜６０や光反射膜７０の近傍にアライメントマーク８０を設けても良い。 (2) In each of the above-described embodiments, an alignment mark for positioning the thickness measurement region may be provided around the thickness measurement region. FIG. 20 shows a plan view of the light transmission film 60 and the light reflection film 70. Specifically, as shown in FIG. 20, an alignment mark 80 may be provided in the vicinity of the light transmission film 60 or the light reflection film 70.

これにより、厚さ測定の開始前に、ＣＣＤイメージセンサ等によりアライメントマーク８０を確認することで、光の照射位置がずれていれば、光の照射位置を補正でき、光透過膜６０や光反射膜７０が配置された領域で、接着剤４０の厚さ測定を確実に行うことができる。 Accordingly, by confirming the alignment mark 80 with a CCD image sensor or the like before the start of the thickness measurement, if the light irradiation position is deviated, the light irradiation position can be corrected, and the light transmission film 60 or the light reflection can be corrected. In the region where the film 70 is disposed, the thickness of the adhesive 40 can be reliably measured.

（３）上述の各実施形態では、本発明の有機ＥＬ装置を有機ＥＬディスプレイに適用したが、本発明の有機ＥＬ装置は、照明や光源等の他の有機ＥＬ装置にも適用可能である。 (3) In each of the above-described embodiments, the organic EL device of the present invention is applied to an organic EL display. However, the organic EL device of the present invention can also be applied to other organic EL devices such as illumination and light sources.

１０基板
１１基板の一面
１２基板の他面
２０ＥＬ素子
２１第1の電極
２２発光層
２３第２の電極
４０接着剤
５０封止缶
６０光透過膜
６１不透明膜
６２光吸収膜
６３光反射膜
７０光反射膜 DESCRIPTION OF SYMBOLS 10 Substrate 11 One side of substrate 12 Other side of substrate 20 EL element 21 First electrode 22 Light emitting layer 23 Second electrode 40 Adhesive 50 Sealing can 60 Light transmission film 61 Opaque film 62 Light absorption film 63 Light reflection film 70 Light reflecting film

Claims

A light transmissive substrate (10) that transmits light;
An EL element (20) including an organic EL light-emitting material provided on one surface (11) of the substrate (10);
A light transmissive adhesive (40) arranged to surround the outer side of the EL element (20) on one surface (11) of the substrate (10);
It is bonded to the substrate (10) on the one surface of the substrate (10) via the adhesive (40) and is separated from the one surface (11) of the substrate (10) at a portion other than the adhesive (40). However, in an organic EL device comprising: an opaque sealing can (50) that does not transmit the light that seals the EL element (20);
At the interface between the adhesive (40) and the substrate (10), a light transmission film (60) made of a film that transmits the light is provided,
Further, the sealing can (50) reflects the light, and the light is absorbed at an end portion of the sealing can (50) facing the light transmission film (60). A light absorbing film (62) is provided;
The refractive index difference between the light transmissive film (60) and the adhesive (40) and the refractive index difference between the light transmissive film (60) and the substrate (10) are expressed by the adhesive (40) and the substrate ( 10), the adhesive (40) by irradiation of the light from the other surface (12) side of the substrate (10) at the position of the light transmission film (60). The organic EL device is characterized in that the thickness measurement is performed.

A light transmissive substrate (10) that transmits light;
An EL element (20) including an organic EL light-emitting material provided on one surface (11) of the substrate (10);
A light transmissive adhesive (40) arranged to surround the outer side of the EL element (20) on one surface (11) of the substrate (10);
It is bonded to the substrate (10) on the one surface of the substrate (10) via the adhesive (40) and is separated from the one surface (11) of the substrate (10) at a portion other than the adhesive (40). However, in an organic EL device comprising: an opaque sealing can (50) that does not transmit the light that seals the EL element (20);
At the interface between the adhesive (40) and the substrate (10), a light transmission film (60) made of a film that transmits the light is provided,
Further, an opaque film (61) made of an opaque material that does not transmit light is disposed at an end of the light transmission film (60),
The refractive index difference between the light transmissive film (60) and the adhesive (40) and the refractive index difference between the light transmissive film (60) and the substrate (10) are expressed by the adhesive (40) and the substrate ( 10), the adhesive (40) by irradiation of the light from the other surface (12) side of the substrate (10) at the position of the light transmission film (60). The organic EL device is characterized in that the thickness measurement is performed.

A light transmissive substrate (10) that transmits light;
An EL element (20) including an organic EL light-emitting material provided on one surface (11) of the substrate (10);
A light transmissive adhesive (40) arranged to surround the outer side of the EL element (20) on one surface (11) of the substrate (10);
It is bonded to the substrate (10) on the one surface of the substrate (10) via the adhesive (40) and is separated from the one surface (11) of the substrate (10) at a portion other than the adhesive (40). However, in an organic EL device comprising: a light-transmitting sealing can (50) that transmits the light that seals the EL element (20);
Light formed of a film that transmits the light is present on both the interface between the adhesive (40) and the substrate (10) and the interface between the adhesive (40) and the sealing can (50). Permeable membranes (60) are provided facing each other,
Furthermore, the light absorption film that absorbs the light or the light reflection that reflects the light is formed at the end of the light transmission film (60) located at the interface between the adhesive (40) and the sealing can (50). A membrane (63) is provided,
The refractive index difference between the light transmissive film (60) and the adhesive (40) and the refractive index difference between the light transmissive film (60) and the substrate (10) are expressed by the adhesive (40) and the substrate ( 10) from the other surface (12) side of the substrate (10) or the outside of the sealing can (50) at the position of the light transmission film (60). An organic EL device characterized in that the thickness of the adhesive (40) is measured by the light irradiation.

A light transmissive substrate (10) that transmits light;
An EL element (20) including an organic EL light-emitting material provided on one surface (11) of the substrate (10);
A light transmissive adhesive (40) arranged to surround the outer side of the EL element (20) on one surface (11) of the substrate (10);
It is bonded to the substrate (10) on the one surface of the substrate (10) via the adhesive (40) and is separated from the one surface (11) of the substrate (10) at a portion other than the adhesive (40). However, in an organic EL device comprising: a light-transmitting sealing can (50) that transmits the light that seals the EL element (20);
Light formed of a film that transmits the light is present on both the interface between the adhesive (40) and the substrate (10) and the interface between the adhesive (40) and the sealing can (50). Permeable membranes (60) are provided facing each other,
Further, an opaque film (61) made of an opaque material that does not transmit light is disposed at an end of the light transmission film (60),
The refractive index difference between the light transmissive film (60) and the adhesive (40) and the refractive index difference between the light transmissive film (60) and the substrate (10) are expressed by the adhesive (40) and the substrate ( 10) from the other surface (12) side of the substrate (10) or the outside of the sealing can (50) at the position of the light transmission film (60). An organic EL device characterized in that the thickness of the adhesive (40) is measured by the light irradiation.

A light transmissive substrate (10) that transmits light;
An EL element (20) including an organic EL light-emitting material provided on one surface (11) of the substrate (10);
A light transmissive adhesive (40) arranged to surround the outer side of the EL element (20) on one surface (11) of the substrate (10);
It is bonded to the substrate (10) on the one surface of the substrate (10) via the adhesive (40) and is separated from the one surface (11) of the substrate (10) at a portion other than the adhesive (40). However, in an organic EL device comprising: a light-transmitting sealing can (50) that transmits the light that seals the EL element (20);
At the interface between the adhesive (40) and the substrate (10), a light transmission film (60) made of a film that transmits the light is provided,
At the interface between the adhesive (40) and the sealing can (50), a light reflecting film (70) made of a film that reflects the light is provided facing the light transmitting film (60). ,
Furthermore, a light absorbing film (62) for absorbing the light is provided at an end of the light reflecting film (70) located at the interface between the adhesive (40) and the sealing can (50). ,
The refractive index difference between the light transmissive film (60) and the adhesive (40) and the refractive index difference between the light transmissive film (60) and the substrate (10) are expressed by the adhesive (40) and the substrate ( 10), the adhesive (40) by irradiation of the light from the other surface (12) side of the substrate (10) at the position of the light transmission film (60). The organic EL device is characterized in that the thickness measurement is performed.

A light transmissive substrate (10) that transmits light;
An EL element (20) including an organic EL light-emitting material provided on one surface (11) of the substrate (10);
A light transmissive adhesive (40) arranged to surround the outer side of the EL element (20) on one surface (11) of the substrate (10);
It is bonded to the substrate (10) on the one surface of the substrate (10) via the adhesive (40) and is separated from the one surface (11) of the substrate (10) at a portion other than the adhesive (40). However, in an organic EL device comprising: a light-transmitting sealing can (50) that transmits the light that seals the EL element (20);
At the interface between the adhesive (40) and the substrate (10), a light transmission film (60) made of a film that transmits the light is provided,
At the interface between the adhesive (40) and the sealing can (50), a light reflecting film (70) made of a film that reflects the light is provided facing the light transmitting film (60). ,
Further, an opaque film (61) made of an opaque material that does not transmit light is disposed at an end of the light transmission film (60),
The refractive index difference between the light transmissive film (60) and the adhesive (40) and the refractive index difference between the light transmissive film (60) and the substrate (10) are expressed by the adhesive (40) and the substrate ( 10), the adhesive (40) by irradiation of the light from the other surface (12) side of the substrate (10) at the position of the light transmission film (60). The organic EL device is characterized in that the thickness measurement is performed.

An opaque substrate (10) that does not transmit light;
An EL element (20) including an organic EL light-emitting material provided on one surface (11) of the substrate (10);
A light transmissive adhesive (40) arranged to surround the outer side of the EL element (20) on one surface (11) of the substrate (10);
It is bonded to the substrate (10) on the one surface of the substrate (10) via the adhesive (40) and is separated from the one surface (11) of the substrate (10) at a portion other than the adhesive (40). However, in an organic EL device comprising: a light-transmitting sealing can (50) that transmits the light that seals the EL element (20);
At the interface between the adhesive (40) and the substrate (10), a light reflecting film (70) made of a film that reflects the light is provided,
At the interface between the adhesive (40) and the sealing can (50), a light transmission film (60) made of a film that transmits the light is provided to face the light reflection film (70). ,
Further, an opaque film (61) made of an opaque material that does not transmit light is disposed at an end of the light transmission film (60),
The refractive index difference between the light transmissive film (60) and the adhesive (40) and the refractive index difference between the light transmissive film (60) and the sealing can (50) are expressed as follows. By making it larger than the refractive index difference with the sealing can (50), the adhesive (by irradiation of the light from the outside of the sealing can (50) at the position of the light transmission film (60) ( 40) The organic EL device characterized in that the thickness measurement is performed.

The light reflecting film (70) has a smaller planar size than the light transmitting film (60) facing the light reflecting film (70).
The organic EL device according to any one of claims 5 , 6 , and 7 , wherein an outline of the light reflecting film (70) defines a range of the thickness measurement.

The EL element (20) includes a first electrode (21) made of a light transmissive material, a light emitting layer (22) made of an organic EL material, and a second electrode (from the one surface (11) side of the substrate (10). 23) are laminated,
The light transmissive film (60) located at the interface between the substrate (10) and the adhesive (40) is made of a light transmissive material similar to that of the first electrode (21). Item 7. The organic EL device according to any one of Items 1 to 6 .

The organic EL device according to any one of claims 1 to 9 , wherein the light transmission film (60) is disposed at a portion of the adhesive (40) having a maximum thickness.

The sealing can (50) has a polygonal contact site with the adhesive (40), and the corners of the polygon are the maximum thickness of the adhesive (40),
The organic EL device according to claim 10 , wherein the light transmission film (60) is disposed at the corner.

The organic EL device according to any one of claims 1 to 11 , wherein the light transmission film (60) is disposed inside an end portion of the adhesive (40).

The distance (L1) between the inner peripheral end (40a) of the adhesive (40) and the light transmission film (60), the outer peripheral end (40b) of the adhesive (40) and the light The organic EL device according to claim 12 , wherein the distance (L2) to the permeable membrane (60) is equal.

The organic EL device according to any one of claims 1 to 13 , wherein an alignment mark (80) for positioning the thickness measurement region is provided around the thickness measurement region. .

A light transmissive substrate (10) that transmits light;
An EL element (20) including an organic EL light-emitting material provided on one surface (11) of the substrate (10);
A light transmissive adhesive (40) arranged to surround the outer side of the EL element (20) on one surface (11) of the substrate (10);
It is bonded to the substrate (10) on the one surface of the substrate (10) via the adhesive (40) and is separated from the one surface (11) of the substrate (10) at a portion other than the adhesive (40). However, in the manufacturing method of the organic EL device comprising the opaque sealing can (50) that does not transmit the light that seals the EL element (20),
At the interface between the adhesive (40) and the substrate (10), a light transmission film (60) made of a film that transmits the light is provided,
The sealing can (50) reflects the light, and a light absorbing film that absorbs the light at an end portion of the sealing can (50) facing the light transmission film (60). 62)
The refractive index difference between the light transmissive film (60) and the adhesive (40) and the refractive index difference between the light transmissive film (60) and the substrate (10) are expressed by the adhesive (40) and the substrate ( 10) having a refractive index magnitude relationship that is greater than the refractive index difference with
At the position of the light transmission film (60), the light is irradiated from the other surface (12) side of the substrate (10), and the light transmission film (60) and the sealing can (50) A method of manufacturing an organic EL device, wherein the thickness of the adhesive (40) is measured based on both reflected lights.

A light transmissive substrate (10) that transmits light;
An EL element (20) including an organic EL light-emitting material provided on one surface (11) of the substrate (10);
A light transmissive adhesive (40) arranged to surround the outer side of the EL element (20) on one surface (11) of the substrate (10);
It is bonded to the substrate (10) on the one surface of the substrate (10) via the adhesive (40) and is separated from the one surface (11) of the substrate (10) at a portion other than the adhesive (40). However, in the manufacturing method of the organic EL device comprising the opaque sealing can (50) that does not transmit the light that seals the EL element (20),
At the interface between the adhesive (40) and the substrate (10), a light transmission film (60) made of a film that transmits the light is provided,
An opaque film (61) made of an opaque material that does not transmit light is disposed at an end of the light transmission film (60),
The refractive index difference between the light transmissive film (60) and the adhesive (40) and the refractive index difference between the light transmissive film (60) and the substrate (10) are expressed by the adhesive (40) and the substrate ( 10) having a refractive index magnitude relationship that is greater than the refractive index difference with
At the position of the light transmission film (60), the light is irradiated from the other surface (12) side of the substrate (10), and the light transmission film (60) and the sealing can (50) A method of manufacturing an organic EL device, wherein the thickness of the adhesive (40) is measured based on both reflected lights.

A light transmissive substrate (10) that transmits light;
An EL element (20) including an organic EL light-emitting material provided on one surface (11) of the substrate (10);
A light transmissive adhesive (40) arranged to surround the outer side of the EL element (20) on one surface (11) of the substrate (10);
It is bonded to the substrate (10) on the one surface of the substrate (10) via the adhesive (40) and is separated from the one surface (11) of the substrate (10) at a portion other than the adhesive (40). However, in a method for manufacturing an organic EL device comprising: a light-transmitting sealing can (50) that transmits the light that seals the EL element (20);
Light transmission comprising a film that transmits the light on both the interface between the adhesive (40) and the substrate (10) and the interface between the adhesive (40) and the sealing can (50). Providing membranes (60) opposite each other;
A light absorbing film for absorbing the light or a light reflecting film for reflecting the light (at the end of the light transmitting film (60) located at the interface between the adhesive (40) and the sealing can (50)). 63)
The refractive index difference between the light transmissive film (60) and the adhesive (40) and the refractive index difference between the light transmissive film (60) and the substrate (10) are expressed by the adhesive (40) and the substrate ( Greater than the difference in refractive index from 10),
At the position of the light transmission film (60), the light irradiation is performed from the other surface (12) side of the substrate (10) or from the outside of the sealing can (50), and the two light transmission films ( 60) A method for manufacturing an organic EL device, wherein the thickness of the adhesive (40) is measured based on both reflected lights in (60).

A light transmissive substrate (10) that transmits light;
An EL element (20) including an organic EL light-emitting material provided on one surface (11) of the substrate (10);
A light transmissive adhesive (40) arranged to surround the outer side of the EL element (20) on one surface (11) of the substrate (10);
It is bonded to the substrate (10) on the one surface of the substrate (10) via the adhesive (40) and is separated from the one surface (11) of the substrate (10) at a portion other than the adhesive (40). However, in a method for manufacturing an organic EL device comprising: a light-transmitting sealing can (50) that transmits the light that seals the EL element (20);
Light transmission comprising a film that transmits the light on both the interface between the adhesive (40) and the substrate (10) and the interface between the adhesive (40) and the sealing can (50). Providing membranes (60) opposite each other;
An opaque film (61) made of an opaque material that does not transmit light is disposed at an end of the light transmission film (60),
The refractive index difference between the light transmissive film (60) and the adhesive (40) and the refractive index difference between the light transmissive film (60) and the substrate (10) are expressed by the adhesive (40) and the substrate ( Greater than the difference in refractive index from 10),
At the position of the light transmission film (60), the light irradiation is performed from the other surface (12) side of the substrate (10) or from the outside of the sealing can (50), and the two light transmission films ( 60) A method for manufacturing an organic EL device, wherein the thickness of the adhesive (40) is measured based on both reflected lights in (60).

A light transmissive substrate (10) that transmits light;
An EL element (20) including an organic EL light-emitting material provided on one surface (11) of the substrate (10);
A light transmissive adhesive (40) arranged to surround the outer side of the EL element (20) on one surface (11) of the substrate (10);
It is bonded to the substrate (10) on the one surface of the substrate (10) via the adhesive (40) and is separated from the one surface (11) of the substrate (10) at a portion other than the adhesive (40). However, in a method for manufacturing an organic EL device comprising: a light-transmitting sealing can (50) that transmits the light that seals the EL element (20);
A light transmission film (60) made of a film that transmits the light is provided at the interface between the adhesive (40) and the substrate (10), and the adhesive (40) and the sealing can (50) A light reflection film (70) made of a film that reflects the light is provided on the interface so as to face the light transmission film (60), and
A light absorbing film (62) that absorbs the light is provided at the end of the light reflecting film (70) located at the interface between the adhesive (40) and the sealing can (50),
The refractive index difference between the light transmissive film (60) and the adhesive (40) and the refractive index difference between the light transmissive film (60) and the substrate (10) are expressed by the adhesive (40) and the substrate ( Greater than the difference in refractive index from 10),
At the position of the light transmission film (60), the light is irradiated from the other surface (12) side of the substrate (10), and the light transmission film (60) and the light reflection film (70) A method of manufacturing an organic EL device, wherein the thickness of the adhesive (40) is measured based on both reflected lights.

A light transmissive substrate (10) that transmits light;
An EL element (20) including an organic EL light-emitting material provided on one surface (11) of the substrate (10);
A light transmissive adhesive (40) arranged to surround the outer side of the EL element (20) on one surface (11) of the substrate (10);
It is bonded to the substrate (10) on the one surface of the substrate (10) via the adhesive (40) and is separated from the one surface (11) of the substrate (10) at a portion other than the adhesive (40). However, in a method for manufacturing an organic EL device comprising: a light-transmitting sealing can (50) that transmits the light that seals the EL element (20);
A light transmission film (60) made of a film that transmits the light is provided at the interface between the adhesive (40) and the substrate (10), and the adhesive (40) and the sealing can (50) A light reflection film (70) made of a film that reflects the light is provided on the interface so as to face the light transmission film (60), and
An opaque film (61) made of an opaque material that does not transmit light is disposed at an end of the light transmission film (60),
The refractive index difference between the light transmissive film (60) and the adhesive (40) and the refractive index difference between the light transmissive film (60) and the substrate (10) are expressed by the adhesive (40) and the substrate ( Greater than the difference in refractive index from 10),
At the position of the light transmission film (60), the light is irradiated from the other surface (12) side of the substrate (10), and the light transmission film (60) and the light reflection film (70) A method of manufacturing an organic EL device, wherein the thickness of the adhesive (40) is measured based on both reflected lights.

An opaque substrate (10) that does not transmit light;
An EL element (20) including an organic EL light-emitting material provided on one surface (11) of the substrate (10);
A light transmissive adhesive (40) arranged to surround the outer side of the EL element (20) on one surface (11) of the substrate (10);
It is bonded to the substrate (10) on the one surface of the substrate (10) via the adhesive (40) and is separated from the one surface (11) of the substrate (10) at a portion other than the adhesive (40). However, in a method for manufacturing an organic EL device comprising: a light-transmitting sealing can (50) that transmits the light that seals the EL element (20);
A light reflecting film (70) made of a film that reflects the light is provided at the interface between the adhesive (40) and the substrate (10), and the adhesive (40) and the sealing can (50) A light transmission film (60) made of a film that transmits the light is provided on the interface so as to face the light reflection film (70), and
An opaque film (61) made of an opaque material that does not transmit light is disposed at an end of the light transmission film (60),
The refractive index difference between the light transmissive film (60) and the adhesive (40) and the refractive index difference between the light transmissive film (60) and the sealing can (50) are expressed as follows. It is assumed that the difference in refractive index from the sealing can (50) is larger,
At the position of the light transmission film (60), the light is irradiated from the outside of the sealing can (50), and both reflected light at the light transmission film (60) and the light reflection film (70). The thickness of the adhesive (40) is measured based on the above, and the method for manufacturing an organic EL device,