JP5672621B1 - 3-way selector valve - Google Patents

Abstract

An object of the present invention is to provide a three-way switching valve that has a long life and is low in cost, with less vibration and shock, while realizing high-precision calibration by speeding up the switching of flow paths. A three-way switching valve 1 is connected to a gas reference flow meter and has an inlet 2 for taking in gas from the gas reference flow meter, an outlet 3 for discharging gas taken in from the inlet 2, and a constant product. A fixed-volume tank connection port 4 that supplies gas taken from the inlet 2 to the fixed-volume tank, a first air cylinder 7 a that opens and closes the discharge port 2, and opens and closes the fixed-volume tank connection port 4 A second air cylinder 7b that performs the opening and closing operation of the first air cylinder 7a and the second air cylinder 7b independently, and the flow path from the inlet 2 to the outlet 3; The flow path from the inlet 2 to the fixed-volume tank connection port 4 is switched. [Selection] Figure 1

Description

  The present invention relates to a three-way selector valve, and more particularly to a three-way selector valve used when a gas reference flow meter (such as a sonic nozzle) is calibrated using a constant volume tank.

  2. Description of the Related Art Conventionally, a membrane gas meter used at home or the like undergoes various tests when shipping a factory, and a gas meter that passes the test is shipped. The main test items include a flow rate test, an inlet at the maximum flow rate, a differential pressure test between the outlets and a leak test. The flow rate test is a comparison test with the reference flow meter in the atmosphere, and the leak test is a change in pressure from the reference pressure when, for example, compressed air having a reference pressure of 10 kpa (kilopascal) is applied, for example, for 3 minutes. Is.

  As a standard device of the flow rate that becomes the reference flow rate, for example, a sonic nozzle (SV nozzle: Sonic Venturi Nozzle) or a wet flow meter is used as a reference flow meter for gas calibrated with a specific standard device such as a primary national flow standard fixed stack. It has been known. However, since the latter wet flow meter has a movable part and has a problem that it is large and difficult to handle, recently, a sonic nozzle is the standard for the flow rate (see, for example, Patent Documents 1 and 2).

  The sonic nozzle is characterized in that when a compressible fluid is flowed, if the pressure before and after the throat becomes less than the critical pressure, the velocity of the gas flowing in the throat section becomes the velocity of sound in that state, and a constant gas mass flow rate is obtained. Have. This mass flow rate is conditional on the temperature, pressure, and humidity upstream of the throat being constant. A fixed volume tank is used for calibration of the sonic nozzle. At this time, the gas flowing through the sonic nozzle is taken into the fixed volume tank and the sonic nozzle is calibrated, but a three-way switching valve is used to switch the start and end of the intake.

  FIG. 6 is a diagram showing a schematic configuration of a conventional system for calibrating a sonic nozzle using a three-way switching valve. In the figure, 100 is a three-way switching valve, 110 is a sonic nozzle, and 111 is a constant volume tank. The gas flowing through the sonic nozzle 110 is taken into the constant volume tank 111 and the sonic nozzle 110 is calibrated. In order to switch the start and end of the gas intake, a three-way switching valve 100 is disposed downstream of the sonic nozzle 110. Yes. As the conventional three-way switching valve 100, for example, a ball valve type is adopted, and this will be specifically described with reference to FIGS.

  7-9 is a figure which shows the structure of the three-way switching valve 100 which employ | adopted the conventional ball valve type | formula. 7 is a top view of the three-way switching valve 100, FIG. 8A is a front view of the three-way switching valve 100, FIG. 8B is a side view of the three-way switching valve 100, and FIG. 9 is an AA cross section of FIG. FIG. In the figure, 101 is an electromagnetic valve, 102 is an actuator (air cylinder), 103a and 103b are quick exhaust valves (rapid exhaust valves), 104a and 104b are air pipes, 105 is a ball valve, and 106a and 106b are reed switches.

  The solenoid valve 101 switches the valve (valve) between the supply side and the exhaust side by moving an iron piece called a plunger using the magnetic force of an electromagnet (solenoid) against air supplied from an external air source. The actuator 102 functions as an air cylinder, and a piston member (see FIG. 10 described later) is movably accommodated in the cylinder. The solenoid valve 101 and the actuator 102 are connected via quick exhaust valves 103a and 103b and air pipes 104a and 104b. When the solenoid valve 101 switches between supply and exhaust of the valve, the piston member of the actuator 102 moves left and right by the air pressure. The piston member of the actuator 102 is connected to the ball valve 105, and as shown in FIG. 9, the ball 105a of the ball valve 105 rotates according to the movement of the piston member.

  9A shows a state of the ball 105a when the solenoid valve 101 is energized, FIG. 9B shows a state when the ball 105a is at an intermediate position rotated 45 degrees, and FIG. 9C shows an electromagnetic state. The state of the ball 105a when the valve 101 is not energized is shown. As described above, the ball 105a has a T-shaped channel, and the ball 105a rotates and switches the channel in accordance with the movement of the piston member of the actuator 102. The open / closed state of the three-way valve by the ball 105a is determined by mechanical reed switches 106a and 106b.

  FIG. 10 is a schematic diagram for explaining an operation example of the actuator 102 by the electromagnetic valve 101. In this example, when energized, the port A of the solenoid valve 101 becomes the exhaust side and the port B becomes the air supply side, and the air supplied from the external air source to the port B is sent to the actuator 102 via the quick exhaust valve 103a. . The piston member 102a of the actuator 102 moves from the left to the right in the figure by the air pressure at this time. Since the piston member 102a is connected to the ball 105a via the support shaft 102b, the ball 105a rotates according to the movement of the piston member 102a (see FIG. 9). As the piston member 102a moves, the air in the actuator 102 is pushed out. The pushed air is sent to the port A of the electromagnetic valve 101 through the quick exhaust valve 103b and exhausted.

  When the power is not supplied, the port A of the solenoid valve 101 is on the air supply side and the port B is on the exhaust side, and the air supplied to the port A from an external air source is sent to the actuator 102 via the quick exhaust valve 103b. The piston member 102a of the actuator 102 moves from the right to the left in the figure by the air pressure at this time. Since the piston member 102a is connected to the ball 105a via the support shaft 102b, the ball 105a rotates according to the movement of the piston member 102a. As the piston member 102a moves, the air in the actuator 102 is pushed out, and the pushed air is sent to the port B of the electromagnetic valve 101 through the quick exhaust valve 103a and exhausted.

Japanese Patent No. 3184485 Japanese Patent No. 3366075

  However, in the case of the ball valve type three-way switching valve 100 described with reference to FIGS. 7 to 10 described above, it is necessary to instantaneously completely close the three directions when switching the flow path. It must be less than half the port diameter of the main body housing of the valve 105. For this reason, the flow rate is limited to be smaller than the port diameter of the body housing of the ball valve 105.

  In addition, due to the structure of the ball valve 105, it is necessary to rotate 90 degrees in order to switch the flow path. For this reason, it takes time (about 0.1 second) to switch the flow path, and the flow path is made faster. It was difficult to switch. This may adversely affect the calibration accuracy of the sonic nozzle.

  The ball valve 105 is operated by an air cylinder (actuator 102), but the piston member 102a is moved at a high speed in order to shorten the flow path switching time. For this reason, the piston member 102a collides with the cylinder end surface, thereby generating a large vibration and impact. Further, by moving the piston member 102a at a high speed, the ball 105a in the ball valve 105 also rotates at a high speed, so that the resin sheet covering the ball surface is severely worn. As described above, there is a problem that the structure is easily deteriorated, the product life is short, and the trunnion type (both-end support type) is a complicated and special valve structure, which is expensive.

  The present invention has been made in view of the above-described circumstances, and provides a three-way switching valve that has a long life and is low in cost with less vibration and impact, while achieving high-speed calibration and high-accuracy calibration. For the purpose.

  In order to solve the above-described problem, the first technical means of the present invention provides a flow path from the gas reference flow meter to the fixed volume tank when the gas reference flow meter is calibrated using a fixed volume tank. A three-way selector valve connected to the gas reference flowmeter and connected to the gas reference flowmeter for taking in the gas from the gas inlet, and an outlet for discharging the gas taken in from the inlet, A fixed-volume tank connection port that is connected to the fixed-volume tank and supplies the gas taken in from the inlet to the fixed-volume tank, a first actuator that opens and closes the discharge port, and an opening and closing of the fixed-volume tank connection port A second actuator that performs the opening and closing operation of the first actuator and the second actuator independently, and the flow path from the inlet to the outlet, and the inlet to the outlet Switch between the flow path to the fixed tank connection port It is obtained by the features and.

  According to a second technical means, in the first technical means, the first actuator and the second actuator each have one end of a piston member movably accommodated in a cylinder, and the first actuator A resin sheet is attached to the other end of the piston member so as to oppose the discharge port, and a resin sheet is provided to the other end of the piston member of the second actuator so as to oppose the fixed-volume tank connection port. It is characterized by being attached.

  According to a third technical means, in the second technical means, an operation position detection plate attached to the rod portion of the piston member and a detection means for detecting the position of the operation position detection plate are provided. It is what.

  According to a fourth technical means, in the second or third technical means, the maximum distance between the other end of the piston member of the first actuator and the discharge port is obtained by multiplying the maximum distance by the peripheral length of the discharge port. And the maximum distance between the other end of the piston member of the second actuator and the fixed-volume tank connection port is equal to the maximum distance. A value obtained by multiplying the peripheral length of the tank connection port is a value that is equal to or greater than the value of the cross-sectional area of the inlet.

  The fifth technical means is the first to fourth technical means in which both the discharge port and the fixed volume tank connection port are arranged in a direction parallel to the gas flow direction of the inflow port. The first actuator and the second actuator are arranged in directions parallel to each other.

  Sixth technical means is any one of the first to fourth technical means, wherein at least one of the discharge port and the fixed volume tank connection port is arranged in a direction orthogonal to the gas flow direction of the inflow port. It is characterized by being.

  A seventh technical means is the sixth technical means, wherein the discharge port is arranged in a direction orthogonal to the gas flow direction of the inflow port, and the constant volume tank connection port is parallel to the gas flow direction of the inflow port. When arranged in a direction, the first actuator and the second actuator are arranged in directions orthogonal to each other.

  According to an eighth technical means, in the sixth technical means, when both the discharge port and the fixed volume tank connection port are arranged in a direction orthogonal to the gas flow direction of the inflow port, the first actuator And the second actuator are arranged in directions opposite to each other.

  According to a ninth technical means, in the sixth technical means, the discharge port is disposed in a direction parallel to the gas flow direction of the inlet, and the fixed tank connection port is orthogonal to the gas flow direction of the inlet. When arranged in a direction, the first actuator and the second actuator are arranged in directions orthogonal to each other.

  According to the present invention, it is possible to provide a three-way switching valve with a long life and low cost with less vibration and impact, while achieving high-speed calibration by switching the flow path.

It is a figure which shows the structural example of the three-way selector valve by this invention. It is the figure which showed typically the other structural example of the three-way selector valve by this invention. It is the figure which showed typically the further another structural example of the three-way selector valve by this invention. It is the figure which showed typically the further another structural example of the three-way selector valve by this invention. It is the figure which showed typically the further another structural example of the three-way selector valve by this invention. It is a figure which shows schematic structure of the system which calibrates the sonic nozzle using the conventional three-way switching valve. It is a figure which shows the structure of the three-way switching valve which employ | adopted the conventional ball valve type, and is a top view of a three-way switching valve. It is a figure which shows the structure of the three-way switching valve which employ | adopted the conventional ball valve type | formula, and is the front view and side view of a three-way switching valve. It is a figure which shows the structure of the three-way switching valve which employ | adopted the conventional ball valve type, and is AA sectional drawing of FIG. 8 (B). It is a schematic diagram for demonstrating the operation example of the actuator by a solenoid valve.

  Hereinafter, preferred embodiments of the three-way switching valve of the present invention will be described with reference to the accompanying drawings.

  FIG. 1 is a diagram showing a configuration example of a three-way switching valve according to the present invention. In the figure, 1 is a three-way switching valve, 2 is an inlet, 3 is a discharge port, 4 is a fixed tank connection port, 5 is a control unit, 6a and 6b are solenoid valves, and 7a and 7b are examples of actuators. 8a and 8b are piston members, 9a and 9b are resin sheets, 10a and 10b are operating position detection plates, 11a and 11b are laser detectors, and 12 is a valve chamber. The valve chamber portion 12 has, for example, a T-shaped cross section, and an inflow port 2, a discharge port 3, and a fixed tank connection port 4 are formed as ports in three directions. In the system configuration of FIG. 6, the three-way switching valve 1 according to the present invention is disposed in the flow path from the sonic nozzle 110, which is an example of a gas reference flow meter, to the constant volume tank 111 instead of the ball valve type three-way switching valve 100. Is done.

  The piston member 8a includes two piston portions 81a at both ends and a rod portion 82a that connects the two piston portions 81a. Similarly, the piston member 8b includes two piston portions 81b at both ends and a rod portion 82b that connects the two piston portions 81b.

  The main object of the present invention is to provide a three-way switching valve that has a long service life and low cost with little vibration and shock, while realizing high-precision calibration by speeding up the switching of the flow path. As a configuration for this, the three-way switching valve 1 includes an inlet 2 that is connected to the sonic nozzle 110 and takes in gas from the sonic nozzle 110, an outlet 3 that discharges gas taken in from the inlet 2, and a constant volume tank 111. And a fixed tank connection port 4 for supplying the gas taken in from the inlet 2 to the fixed tank 111. That is, when the sonic nozzle 110 is applied as a gas reference flow meter, the inlet 2 is a port for taking in the gas from the sonic nozzle 110, and the outlet 3 is before taking in the gas into the constant volume tank 111. The sonic nozzle 110 is a port for exhausting in order to bring the sonic nozzle 110 into a sonic velocity state, and the constant stacking connection port 4 is a port for supplying gas to the constant volume tank 111 after the sonic velocity state.

  The three-way switching valve 1 includes a first air cylinder 7a that opens and closes the discharge port 3, and a second air cylinder 7b that opens and closes the fixed-volume tank connection port 4, and includes the first air cylinder 7a and The second air cylinder 7b is opened and closed independently to switch the flow path from the inlet 2 to the discharge port 3 and the flow path from the inlet 2 to the fixed-volume tank connection port 4. Is done. In addition, although the case where a pneumatic type air cylinder is applied as an actuator which opens and closes the discharge port 3 and the fixed-volume tank connection port 4 will be described as an example, the present invention is not limited to this. A hydraulic cylinder may be applied. The gas from the sonic nozzle 110 flows into the valve chamber 12 from the inlet 2, and the gas flow direction of the inlet 2 at this time is indicated by an arrow.

  In the three-way switching valve 1 shown in FIG. 1, the discharge port 3 and the constant volume tank connection port 4 are both arranged in the direction parallel to the gas flow direction of the inlet 2 and on the lower surface side of the valve chamber 12. In this case, the first air cylinder 7a and the second air cylinder 7b are arranged in parallel and in the same direction. The other end of the piston member 8a of the first air cylinder 7a and the other end of the piston member 8b (lower piston portions 81a, 81b) of the second air cylinder 7b are both accommodated in the valve chamber portion 12 and discharged. The opening / closing operation of each of the outlet 3 and the fixed volume tank connecting port 4 is performed. In addition, arrangement | positioning of the discharge port 3, the fixed volume tank connection port 4, the 1st air cylinder 7a, and the 2nd air cylinder 7b is not limited to this, It illustrates in below-mentioned FIGS. As described above, various forms can be adopted.

  An example of the operation of the three-way switching valve 1 will be specifically described. In this example, as the solenoid valves 6a and 6b, a general four-direction five-port single-acting solenoid valve is illustrated, but the present invention is not limited to this. First, when the discharge port 3 is “closed” and the constant-volume tank connection port 4 is “open”, the port Aa of the first solenoid valve 6a is supplied with air and the port Ba is exhausted by energization (or non-energization). Control is performed so that the port Ab of the second electromagnetic valve 6b is supplied with air and the port Bb is discharged. This control is performed by the control unit 5. When air is supplied from an external air source (about 0.4 MPa) to the first electromagnetic valve 6a and the second electromagnetic valve 6b, the air is supplied from the port Aa of the first electromagnetic valve 6a to the first air. It is sent to the cylinder upper chamber 71a of the cylinder 7a and further sent from the port Ab of the second electromagnetic valve 6b to the cylinder lower chamber 72b of the second air cylinder 7b.

  Here, the first air cylinder 7a has one end (upper piston portion 81a) of the piston member 8a movably accommodated in the cylinder, and the other end (lower piston portion 81a) of the piston member 8a. A resin sheet 9 a is attached to the discharge port 3 so as to face the discharge port 3. The second air cylinder 7b has one end (upper piston portion 81b) of the piston member 8b movably accommodated in the cylinder, and the other end (lower piston portion 81b) of the piston member 8b. The resin sheet 9b is attached to face the fixed tank connection port 4.

  As the resin sheets 9a and 9b, for example, a Teflon (registered trademark) sheet or a urethane sheet having a high sealing effect can be used. These two piston members 8a and 8b are moved in the vertical direction by the air pressure from the air cylinders 7a and 7b, whereby the discharge port 3 and the fixed tank connection port 4 are opened and closed. And at the time of closing, a resin-made sheet | seat closely_contact | adheres and this can prevent a gas leak.

  That is, one end of the piston member 8a is pushed downward by the air pressure sent to the cylinder upper chamber 71a of the first air cylinder 7a, and the other end of the piston member 8a passes through the discharge port 3 via the resin sheet 9a. “Close”. The air pushed out from the cylinder lower chamber 72a with the movement of the piston member 8a is sent to the port Ba of the first electromagnetic valve 6a and exhausted.

  On the other hand, one end of the piston member 8b is pushed upward by the air pressure sent to the cylinder lower chamber 72b of the second air cylinder 7b, and the other end of the piston member 8b is separated from the fixed-volume tank connection port 4, and the fixed-volume tank Open the connection port 4. The air pushed out from the cylinder upper chamber 71b as the piston member 8b moves is sent to the port Bb of the second electromagnetic valve 6b and exhausted.

  Next, when the discharge port 3 is “open” and the fixed-volume tank connection port 4 is “closed”, the supply and exhaust of the solenoid valves 6a and 6b are switched by de-energization (or energization), respectively. Control is performed such that the port Ba of the valve 6a is supplied with air, the port Aa is supplied with exhaust, the port Bb of the second solenoid valve 6b is supplied with air, and the port Ab is supplied with exhaust. Similarly to the above, when air is supplied from the external air source to the first solenoid valve 6a and the second solenoid valve 6b, the air is supplied from the port Ba of the first solenoid valve 6a to the first air cylinder 7a. To the cylinder lower chamber 72a, and further from the port Bb of the second electromagnetic valve 6b to the cylinder upper chamber 71b of the second air cylinder 7b.

  Due to the air pressure sent to the cylinder lower chamber 72a of the first air cylinder 7a, one end of the piston member 8a is pushed upward, the other end of the piston member 8a is separated from the discharge port 3, and the discharge port 3 is opened. To do. The air pushed out from the cylinder upper chamber 71a with the movement of the piston member 8a is sent to the port Aa of the first electromagnetic valve 6a and exhausted.

  On the other hand, one end of the piston member 8b is pushed downward by the air pressure sent to the cylinder upper chamber 71b of the second air cylinder 7b, and the other end of the piston member 8b is connected to the fixed tank connection port via the resin seed 9b. 4 is closed. Then, the air pushed out from the cylinder lower chamber 72b with the movement of the piston member 8b is sent to the port Ab of the second electromagnetic valve 6b and exhausted.

  Next, when the discharge port 3 is “open” and the constant-volume tank connection port 4 is “open”, that is, both are “open”, the supply and exhaust of the solenoid valves 6a and 6b are switched, respectively. The port Ba of the solenoid valve 6a is supplied, the port Aa is exhausted, the port Ab of the second solenoid valve 6b is supplied, and the port Bb is exhausted. In addition, when the discharge port 3 is “closed” and the constant-volume tank connection port 4 is “closed”, that is, both are closed, the supply and exhaust of the solenoid valves 6a and 6b are switched respectively. Control is performed so that the port Aa of the solenoid valve 6a is supplied with air, the port Ba is exhausted, the port Bb of the second solenoid valve 6b is supplied with air, and the port Ab is exhausted.

  As described above, the three-way switching valve according to the present invention includes three ports of the inlet, the outlet, and the fixed tank connection port, and the two ports of the discharge port and the fixed tank connection port are directly connected by the two air cylinders. Since the desired flow path can be formed by opening and closing, there is no need to limit the diameter of the port compared to the conventional ball valve type. Therefore, the manufacturing cost can be reduced.

  In addition, the opening / closing timing of the ports can be adjusted by operating the two air cylinders independently. Thereby, calibration with higher accuracy can be performed. In addition, by designing the port diameter to be large, the stroke length when the piston member of the air cylinder is moved up and down can be reduced, so the opening and closing time of each air cylinder can be shortened, and the flow path switching speed is increased. You can plan.

  Further, since the two air cylinders operate at so-called instrumentation air pressure (about 0.4 MPa), it is possible to prevent the occurrence of impact and vibration when the piston member moves. In addition, since it has a simple structure that uses two air cylinders to open and close the port, the resin sheet does not wear due to the rotation of the ball as in the conventional ball valve type, and high sealing performance over a long period of time. Can be maintained. Thereby, deterioration of a product can be suppressed and long life can be achieved.

  In addition, when the measurement is finished in a pressurized tank, the pressure in the fixed tank can be discharged by simultaneously opening the two air cylinders. There is no need to provide a quick exhaust valve.

  In FIG. 1, the three-way switching valve 1 is an example of the operating position detecting plates 10a, 10b attached to the rod portions 82a, 82b of the piston members 8a, 8b and detecting means for detecting the positions of the operating position detecting plates 10a, 10b. These are the laser detectors 11a and 11b. That is, the positions of the operation position detection plates 10a and 10b attached to the piston members 8a and 8b are read by the laser detectors 11a and 11b. The control unit 5 calculates the operation time required for opening and closing the discharge port 3 and the fixed volume tank connection port 4 based on the reading results of the laser detectors 11a and 11b.

  As the laser detectors 11a and 11b, a general CMOS (Complementary Metal Oxide Semiconductor) laser sensor can be used. Specifically, when the positions of the operation position detection plates 10a and 10b change, the light receiving position on the CMOS moves. By detecting this light reception position, the displacement amount (position) of the operation position detection plates 10a and 10b. Can be measured accurately.

  In the case of the conventional ball valve type three-way switching valve (see Fig. 7 and Fig. 8), it is determined whether each port is fully opened or closed by detecting the movement of the piston member in the cylinder using a mechanical limit switch. Was. However, the timing at which the movement of the piston member is detected by the limit switch and the timing at which each port is actually fully opened or fully closed do not completely match, and the operation time required to open and close each port is accurately measured. It was difficult. On the other hand, in the present invention, by using the operation position detection plates 10a and 10b and the laser detectors 11a and 11b, the operation time required to open and close each port can be accurately measured. More accurate calibration can be performed.

  Further, as described above, when the diameters of the three ports (the inlet 2, the outlet 3, and the constant-volume tank connecting port 4) are increased, the piston members 8a and 8b of the air cylinders 7a and 7b are moved up and down. Stroke length (corresponding to the maximum distances L1 and L2) can be reduced. A method for determining the maximum distances L1 and L2 will be specifically described. The maximum distance L1 between the other end of the piston member 8a of the first air cylinder 7a and the discharge port 3 is such that the value obtained by multiplying the maximum distance L1 by the peripheral length of the discharge port 3 is equal to or greater than the cross-sectional area value of the inflow port 2. The maximum distance L2 between the other end of the piston member 8b of the second air cylinder 7b and the fixed-volume tank connection port 4 is a value obtained by multiplying the maximum distance L2 by the peripheral length of the fixed-volume tank connection port 4, The value is equal to or larger than the cross-sectional area of the inlet 2.

  Here, if the port diameters of the inlet 2, the outlet 3, and the fixed-volume tank connection port 4 are the same, the cross-sectional area of each port of the inlet 2, the outlet 3, and the fixed-volume tank connection port 4, the surroundings The length is the same. For example, in the above description, when the maximum distances L1 and L2 are determined so as to be the value of the cross-sectional area of the inflow port 2, the maximum distance L1 is determined by the cross-sectional area of the inflow port 2 / the peripheral length of the discharge port 3. The maximum distance L2 is determined by the cross-sectional area of the inlet 2 / the perimeter of the constant-volume tank connection port 4. Here, the maximum distances L1 and L2 have the same value.

  FIG. 2 is a diagram schematically showing another configuration example of the three-way switching valve according to the present invention. In the figure, 20 indicates a three-way switching valve. The three-way switching valve 20 includes an inflow port 21, a discharge port 22, a fixed volume tank connection port 23, a first air cylinder 24 a that opens and closes the discharge port 22, and a first volume that opens and closes the fixed volume tank connection port 23. 2 air cylinders 24 b and a valve chamber 25. Although the basic configuration is the same as that of the example of FIG. 1, the description of the control unit, the solenoid valve, and the like is omitted for the sake of simplicity.

  In the case of this example, the discharge port 22 and the fixed-volume tank connection port 23 are both arranged in a direction parallel to the gas flow direction of the inflow port 21, but the discharge port 22 and the fixed-volume tank connection port 23 are on a diagonal line. The arrangement is different from the configuration of FIG. In this case, the first air cylinder 24a and the second air cylinder 24b are arranged in parallel directions and in opposite directions. Both the other end of the piston member of the first air cylinder 24a and the other end of the piston member of the second air cylinder 24b are accommodated in the valve chamber 25, and open / close of the discharge port 22 and the constant volume tank connection port 23, respectively. Perform the action. As described above, the arrangement of the discharge port 22, the fixed volume tank connection port 23, the first air cylinder 24a, and the second air cylinder 24b can be freely changed in accordance with the design of the calibration system.

  Here, the valve chamber portion 25 shown in FIG. 2 is also called a dead volume because gas tends to stay, and it is preferable that the retained volume V is small because the flow path can be switched at a higher speed. The retained volume V corresponds to the internal volume of the valve chamber 25 when the ports 21 of the inlet 21, the outlet 22 and the fixed tank connection port 23 are closed. In the configuration example of 2, the same holding volume is obtained. An example of the configuration of a three-way switching valve with a smaller holding volume will be described below.

  3-5 is the figure which showed typically the further another structural example of the three-way selector valve by this invention. In the figure, 30 indicates a three-way switching valve. The three-way switching valve 30 includes an inflow port 31, a discharge port 32, a fixed volume tank connection port 33, a first air cylinder 34 a that opens and closes the discharge port 32, and a first volume that opens and closes the constant volume tank connection port 33. 2 air cylinders 34 b and a valve chamber 35. Although the basic configuration is the same as that of the example of FIG. 1, like the case of FIG. 2, the description of the control unit, the electromagnetic valve, and the like is omitted to simplify the description.

  In any of the configuration examples of FIGS. 3 to 5, at least one of the discharge port 32 and the fixed volume tank connection port 33 is arranged in a direction orthogonal to the gas flow direction of the inflow port 31. In the example of FIG. 3, the discharge port 32 is disposed in a direction orthogonal to the gas flow direction of the inflow port 31, and the constant volume tank connection port 33 is disposed in a direction parallel to the gas flow direction of the inflow port 31. In this case, the first air cylinder 34a and the second air cylinder 34b are arranged in directions orthogonal to each other. The other end of the piston member of the first air cylinder 34a is accommodated in the flow path of the discharge port 32 outside the valve chamber portion 35, and the other end of the piston member of the second air cylinder 34b is the valve chamber. It accommodates in the part 35, and performs each opening / closing operation | movement of the discharge port 32 and the fixed volume tank connection port 33. FIG. With such an arrangement, it is possible to reduce the retained volume (V1 <V) compared to the configuration example of FIG. 1 or the configuration example of FIG.

  In the example of FIG. 4, the discharge port 32 and the fixed volume tank connection port 33 are both arranged in a direction orthogonal to the gas flow direction of the inflow port 31. In this case, the first air cylinder 34a and the second air cylinder 34b are arranged in directions facing each other. The other end of the piston member of the first air cylinder 34a is accommodated in the flow path of the discharge port 32 outside the valve chamber portion 35, and the other end of the piston member of the second air cylinder 34b is the valve chamber. It is accommodated in the flow path of the fixed volume tank connection port 33 outside the portion 35, and the discharge port 32 and the fixed volume tank connection port 33 are opened and closed. With such an arrangement, it is possible to reduce the retained volume (V2 <V1) compared to the configuration example of FIG.

  In the example of FIG. 5, the discharge port 32 is arranged in a direction parallel to the gas flow direction of the inflow port 31 and on the upper surface side of the valve chamber portion 35, and the constant volume tank connection port 33 is orthogonal to the gas flow direction of the inflow port 31. It is arranged in the direction to do. In this case, the first air cylinder 34a and the second air cylinder 34b are arranged in directions orthogonal to each other. The other end of the piston member of the first air cylinder 34a is accommodated in the valve chamber portion 35, and the other end of the piston member of the second air cylinder 34b is outside the valve chamber portion 35 and connected to the constant volume tank. It accommodates in the flow path of the opening | mouth 33, and performs the opening / closing operation | movement of the discharge port 32 and the fixed volume tank connection port 33, respectively. With this arrangement, the retained volume (V3 <V) can be reduced as compared with the configuration example of FIG. 1 or the configuration example of FIG.

  As described above, according to the configuration examples of FIGS. 3 to 5, since the retained volume that becomes a dead volume can be reduced, the flow path can be switched at a higher speed, and the three-way switching valve The size can be made more compact.

DESCRIPTION OF SYMBOLS 1,20,30 ... Three-way switching valve, 2,21,31 ... Inlet port, 3,22,32 ... Discharge port, 4,23,33 ... Fixed tank connection port, 5 ... Control unit, 6a ... First Solenoid valve, 6b ... second solenoid valve, 7a, 24a, 34a ... first air cylinder, 7b, 24b, 34b ... second air cylinder, 8a, 8b ... piston member, 9a, 9b ... resin sheet, 10a, 10b ... operating position detection plate, 11a, 11b ... laser detector, 12, 25, 35 ... valve chamber portion, 71a, 71b ... cylinder upper chamber, 72a, 72b ... cylinder lower chamber, 81a, 81b ... piston portion, 82a, 82b ... Rod portions.

Claims (9)

When calibrating the gas reference flow meter using a fixed volume tank, a three-way switching valve disposed in the flow path from the gas reference flow meter to the fixed volume tank,
An inlet connected to the gas reference flow meter and taking in gas from the gas reference flow meter, an outlet for discharging gas taken in from the inlet, connected to the constant volume tank and from the inlet A fixed-volume tank connection port that supplies the taken-in gas to the fixed-volume tank, a first actuator that opens and closes the discharge port, and a second actuator that opens and closes the fixed-volume tank connection port,
By opening and closing the first actuator and the second actuator independently, a flow path from the inflow port to the discharge port, and a flow path from the inflow port to the fixed volume tank connection port, A three-way switching valve characterized by switching.   Each of the first actuator and the second actuator has one end of a piston member movably accommodated in the cylinder, and the other end of the piston member of the first actuator faces the discharge port. The resin sheet is attached, and the resin sheet is attached to the other end of the piston member of the second actuator so as to oppose the fixed-volume tank connection port. The three-way selector valve described.   The three-way switching valve according to claim 2, further comprising an operation position detection plate attached to a rod portion of the piston member and detection means for detecting the position of the operation position detection plate.   The maximum distance between the other end of the piston member of the first actuator and the discharge port is a value such that a value obtained by multiplying the maximum distance by the peripheral length of the discharge port is equal to or greater than the cross-sectional area of the inlet. And the maximum distance between the other end of the piston member of the second actuator and the fixed-volume tank connection port is a value obtained by multiplying the maximum distance by the peripheral length of the fixed-volume tank connection port. The three-way switching valve according to claim 2 or 3, wherein the three-way switching valve has a value equal to or greater than an area value.   When both the discharge port and the fixed volume tank connection port are disposed in a direction parallel to the gas flow direction of the inflow port, the first actuator and the second actuator are disposed in a direction parallel to each other. The three-way switching valve according to claim 1, wherein the three-way switching valve is provided.   5. The three-way according to claim 1, wherein at least one of the discharge port and the fixed-volume tank connection port is arranged in a direction orthogonal to the gas flow direction of the inflow port. Switching valve.   When the discharge port is arranged in a direction orthogonal to the gas flow direction of the inlet, and the constant-volume tank connection port is arranged in a direction parallel to the gas flow direction of the inlet, the first actuator and The three-way switching valve according to claim 6, wherein the second actuator is disposed in a direction perpendicular to each other.   When both the discharge port and the fixed-volume tank connection port are disposed in a direction orthogonal to the gas flow direction of the inflow port, the first actuator and the second actuator are disposed in directions facing each other. The three-way switching valve according to claim 6, wherein   When the discharge port is arranged in a direction parallel to the gas flow direction of the inlet, and the constant-volume tank connection port is arranged in a direction orthogonal to the gas flow direction of the inlet, the first actuator and The three-way switching valve according to claim 6, wherein the second actuator is disposed in a direction perpendicular to each other.

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