JP5664186B2 - Method and apparatus for analyzing contact area between solids - Google Patents

Description

  In the present invention, an X-ray can be detected by contacting a contact area where two solid objects are in direct contact with each other or a contact area where the X-ray transmittance is higher than that of a solid or indirectly through a liquid or solid. Regarding the analysis method and apparatus using the method, more specifically, the measurement of the size of a very small gap existing at the contact site that is a point, line, or surface, and the microscopic shape observation of both objects sandwiching the contact site, etc. The present invention relates to an analysis method and an analysis apparatus capable of performing the above.

  In general, even when two solid objects are in direct contact with each other at a point, line, or surface, the surface of the object is a collection of very fine irregularities. There is a very fine gap at the contact site. If pressure is applied to two objects in the direction in which the two objects approach each other, the fine gap at the contact area will be reduced, and if the pressure is increased further, for example, a part of one object will adhere to the surface of the other object without a gap. However, microscopic deformation occurs in one or both of the objects around the contact point.

  With recent advances in precision processing technology and high-density mounting technology in various fields, the measurement of the size of the micro gap at the contact part between the two objects as described above and the observation of the fine shape of both objects sandwiching the contact part, Or the request | requirement, such as a composition analysis of the object of a contact site vicinity, is high. Further, not only when two objects are in direct contact, but also when the two objects are in indirect contact with each other through a thin liquid layer such as oil or a solid thin film layer, a minute at the contact portion There are also great demands for measuring the size of the gap and observing the fine shapes of both objects across the contact area.

  Conventionally, an industrial X-ray fluoroscopy device, an X-ray CT device, or the like is generally used for gap measurement in micron units or shape observation. However, even with such an apparatus, it is difficult to measure and observe the gaps at finer submicron level and nano level. Further, in the conventional apparatus as described above, the apparatus itself is considerably large, and it takes a relatively long time for the measurement, so it is difficult to increase the measurement throughput.

  Patent Documents 1 and 2 disclose a method of measuring a relatively narrow gap, such as a gap between a head flying on a rotating magnetic disk and the disk surface, using X-rays. However, since the opposing flat surfaces of the magnetic disk and the head are processed to have very high flatness, when the head is lifted by the rotation of the magnetic disk, there is a substantially uniform gap between them. It is formed. In the measurement method described in the above-mentioned patent document, a gap having such a size that X-rays can pass directly and with sufficient intensity is assumed as a measurement target, and X-rays that directly pass through are extremely difficult. It is practically difficult to measure very small gaps and observe shapes under few circumstances.

JP-A-9-189541 Japanese Patent Laid-Open No. 11-132754

  The present invention has been made in order to solve the above-mentioned problems, and the object of the present invention is to provide a minute gap or the like present at the contact portion of two objects (solid) that can be regarded as being in macroscopic contact. Contact such as measurement of a minute gap between two objects that are indirectly in contact with each other with a liquid or solid layer having a high X-ray transmittance and observation of the shapes of both objects facing each other with the contact part in between It is an object to provide a solid-to-solid contact site analysis method and an analysis apparatus that can perform site structure analysis non-destructively using X-rays.

The first invention made in order to solve the above-mentioned problem is that the first object that is a solid and the second object that is the same as the solid are in direct contact with each other by a point, a line, or a surface, or the first object Analyzing the microscopic structure of a contact area where a second object is in direct contact with a point, line, or surface via a liquid or solid having a higher X-ray transmittance than those objects using X-rays It is a method for analyzing the contact area between solids,
a) an X-ray irradiation step in which X-rays are incident on the contact portion with an incident angle equal to or less than a critical angle for total reflection with respect to the planes of both objects facing each other across the contact portion or the tangential plane of the closest portion of both objects;
b) A plurality of X-rays that are emitted from the opposite side of the contact site with respect to the incident X-rays and reflected and scattered on the object surface sandwiching the contact site, and X-rays including X-rays generated by diffraction An X-ray detection step of detecting by a position sensitive type two-dimensional X-ray detector in which the minute X-ray detection elements are two-dimensionally arranged;
c) an analysis step of acquiring information about the structure of the contact portion based on a two-dimensional X-ray intensity distribution obtained from a detection signal from the two-dimensional X-ray detector;
It is characterized by having.

A second invention made to solve the above problems is an apparatus for carrying out the analysis method according to the first invention, wherein the first object that is a solid and the second object that is the same as the solid are dots, lines. Or the contact part which touches by a surface, or the contact which the 1st object and the 2nd object contact indirectly with a point, a line, or a surface through the liquid or solid which has X-ray transmittance higher than those objects An inter-solid contact site analysis apparatus for analyzing a microscopic structure of a site using X-rays,
a) X-ray irradiating means for causing X-rays to enter the contact part with an incident angle equal to or less than the total reflection critical angle with respect to the planes of both objects facing each other across the contact part or the tangential plane of the closest part of both objects;
b) Includes X-rays that are emitted from the opposite side of the contact site with respect to incident X-rays by the X-ray irradiation means and reflected and scattered by the object surface sandwiching the contact site, and X-rays generated by diffraction A position sensitive X-ray detection means for detecting X-rays, in which a plurality of micro X-ray detection elements are two-dimensionally arranged;
c) data processing means for obtaining information about the structure of the contact portion based on a two-dimensional X-ray intensity distribution obtained from a detection signal from the X-ray detection means;
It is characterized by having.

  Here, “the planes of both objects facing each other across the contact part or the tangent plane of the closest part of both objects” refers to the plane itself when both the objects touch each other in a macroscopically parallel plane It is. Further, when one of the two objects is a plane, it is the plane itself. Furthermore, when both of the opposing surfaces of both objects are convex curved surfaces or spire-shaped surfaces and both objects are in contact with a point or a line, both objects are present on the surfaces of both objects at the closest point. It is a virtual approximate plane formed by the approximate plane height of minute irregularities.

  The object to be measured in the method and apparatus for analyzing a contact part between solids according to the present invention is a contact part of two objects that are points, lines, or surfaces, and a thin film such as a lubricating oil is applied to the contact part. It may be formed and present. Further, the two objects forming the contact portion may not be stationary, and one or both of the objects may be in motion as long as the measurement position does not change. That is, the contact part may be a sliding surface.

  When X-rays are irradiated to the contact area of two objects with an incident angle that is less than the critical angle of total reflection with respect to the planes of both objects facing each other across the contact area or the tangential plane of the closest area of both objects, On the opposite side of the object, there is an X-ray that passes through a minute gap existing at the contact site (this X-ray passes through the object without hitting the object at least once, and at least once the object X-rays reflected and scattered on the surface of the object), X-rays that are diffracted by hitting the object surface near the contact site, or characteristic X-rays that are generated by the object itself when excited by incident X-rays, and further Depending on the thickness and material of the X-rays, X-rays mixed with X-rays entering the inside of the object and transmitted through the object are emitted. These X-rays as a whole are emitted with a divergence angle that is considerably wider than the divergence angle of incident X-rays.

  Conventional gap measurement methods such as those described in Patent Documents 1 and 2 detect only X-rays that pass through the gap as it is with respect to incident X-rays. When a liquid or solid having a lower X-ray transmittance than air is present, the intensity of the X-ray passing through as it is is very weak. Therefore, X-rays cannot be detected with sufficient intensity, or even if detected, the correlation between the intensity information and the gap size is poor, and it is difficult to accurately convert the intensity information into the gap size. . On the other hand, in the inter-solid contact site analysis method and analysis apparatus according to the present invention, a position sensitive type in which a plurality of micro X-ray detection elements are two-dimensionally arranged for X-rays that are emitted while spreading as described above. X-ray detection means detects as little as possible. Although the type of X-rays that reach the detection surface of the X-ray detection means at this time cannot be determined, for example, if the contact part is a straight line or a plane, a substantially strip-like shape corresponding to the minute gap of the contact part on the detection surface Is obtained.

  Therefore, in the analysis step performed by the data processing means, based on the two-dimensional X-ray intensity distribution obtained based on the detection signal of the X-ray detection means, for example, out of all the minute X-ray detection elements in the X-ray detection means The X-ray intensities obtained by a plurality of minute X-ray detection elements (pixels) included in the specific range are integrated, and the size of the minute gap existing at the contact site is obtained based on the integrated intensity information. As described above, depending on the type of contact part, that is, whether it is point contact, line contact, or surface contact, and further, depending on the shape of the object, the pixel having a relatively strong X-ray intensity on the detection surface can be obtained. Since the position is determined to some extent, the measurer can set the specific range in advance. In addition, for example, a range in which the X-ray intensity obtained in the two-dimensional X-ray intensity distribution is greater than or equal to a predetermined value may be extracted as the specific range.

  In addition, the extent of the scattered X-rays and diffraction X-rays coming out from the contact parts of the two objects depends on the surface shapes of both objects near the contact parts. Therefore, for example, when pressure is applied to one or both objects and the object is deformed, the shape of the image in the two-dimensional X-ray intensity distribution accompanying the deformation, that is, the position of the pixel where the X-ray reaches and the X-ray intensity Changes. Therefore, in the analysis step performed by the data processing means, it is possible to estimate the surface shapes of both objects facing each other across the contact site by analyzing the intensity pattern obtained from the two-dimensional X-ray intensity distribution.

  As described above, since characteristic X-rays peculiar to the elements constituting the objects are also emitted from the contact part of the two objects, for example, the position-sensitive X-ray detection means can be switched to the detection means. Energy dispersive X-ray analysis means, or position sensitive X-ray detection means and energy dispersive X-ray analysis means, and qualitative analysis is performed by the energy dispersive X-ray analysis means. The composition may be determined together.

  According to the method and apparatus for analyzing a contact area between solids according to the present invention, the intensity is not reflected by the X-ray intensity directly passing through the gap between two objects, but is reflected / scattered on the object surface or generated by diffraction. Various X-rays, such as X-rays, X-rays that have passed through the object, and characteristic X-rays that are secondarily generated from the object itself, are detected comprehensively at every two-dimensional minute position, and obtained from the detection results. Since the structure information such as the size of the micro gap and the micro surface shape of the contact area is obtained by using the two-dimensional X-ray intensity distribution obtained, it is possible to obtain a very small gap that is in a contact state when viewed macroscopically. Structural analysis can be performed.

  Further, according to the method and apparatus for analyzing a contact part between solids according to the present invention, the apparatus itself does not need to be so large, and measurement in a short time is possible. It is also suitable for structural analysis of a contact site such that changes with time.

BRIEF DESCRIPTION OF THE DRAWINGS The schematic block diagram of the contact site | part measuring apparatus which is one Example of this invention. The figure which shows an example of the shape of the contact site | part between two objects used as a measuring object in the contact site | part measuring apparatus of a present Example. The figure which shows an example of the two-dimensional intensity distribution image in the state which pressed one object on the other. The figure which shows the procedure of the measuring method using the contact site | part measuring apparatus of a present Example. The figure which shows an example of the two-dimensional intensity distribution image by measurement . It shows an example of a two-dimensional intensity distribution image according to the actual measurement. The figure which shows the relationship between the gap | interval d by measurement, and the emitted X-ray intensity when changing the gap | interval d. The figure which shows the theoretical simulation calculation result of the diffraction pattern on a detection surface when the contact site | part shape of a measuring object is Fig.2 (a), and gap | interval size is 1 micrometer. The figure which shows the theoretical simulation calculation result of the diffraction pattern on a detection surface in case the contact site | part shape of a measuring object is Fig.2 (a), and gap | interval size is 30 nm. The figure which shows the theoretical simulation calculation result of the diffraction pattern on a detection surface in case the contact part shape of a measuring object is FIG.2 (b), and gap | interval size is 1 micrometer. The figure which shows the theoretical simulation calculation result of the diffraction pattern on a detection surface in case the contact part shape of a measuring object is FIG.2 (b), and gap | interval size is 30 nm.

  First, the measurement principle using X-rays in the method for analyzing a contact part between solids according to the present invention will be described.

  The present inventor quantitatively transmits X-rays scattered or diffracted when X-rays are irradiated to a very small gap (slit aperture width) of submicron to nano level formed between two objects. In order to figure out, theoretical calculations were performed. FIG. 2 shows an example of the shape of the contact part of two objects assumed at this time, and FIGS. 8 to 11 show the theoretical calculation results. In general, a quantitative understanding of the X-ray transmission / scattering of the slit aperture requires a calculation based on the electromagnetic wave equation, but here the slit aperture width is complex or the slit aperture shape is complicated. However, the X-ray incident plane wave is divided into parallel beam bundles with a finite amplitude of several microns, and the final solution is obtained by superimposing the solutions obtained for each so that the amount of calculation is practical. The calculation method of obtaining was adopted.

FIG. 2A shows a configuration in which two objects having a triangular cross section and extending in the Y direction in the drawing are in contact with each other when their tops are viewed macroscopically. 8 and 9 is obtained by assuming a contact portion having a shape shown in FIG. 2 (a), FIG. 8 is the case the gap of both objects of 1 [mu] m, 9 when the gap between both objects of 30n m it is a diffraction intensity pattern.

  (A) of each figure is a diffraction intensity pattern of X-rays that have passed only through the gap between objects simply (that is, X-rays that pass through the object itself described later) are not considered. As standardized. On the other hand, (b) in each figure is a diffraction intensity pattern of X-rays that have passed through the entire vicinity of the gap in consideration of X-rays transmitted through the object itself. The three curves indicated by arrows in each figure (b) are the diffraction patterns of the X-rays passing through each of the two objects and the three gaps between the two objects, and the other one curve is the sum of them. It is an X-ray diffraction pattern. Here, it is assumed that the material of both objects is stainless steel, the angle of the top of each object is 30 °, and the wavelength of X-rays is CuKα (0.154 nm).

  As can be seen from FIGS. 8A and 9A, the half width of the curve is considerably wider than the actual gap size due to the effect of diffraction, and the spread becomes larger as the gap is narrower. What is characteristic of the shape of FIG. 2A is that the intensity of X-rays transmitted through the object itself is relatively large.

FIG. 2 (b) shows a configuration in which two objects having a semicircular top and extending in the Y direction in the drawing are in contact with each other when the tops are viewed macroscopically. It is. 10 and 11 is obtained by assuming a contact portion having a shape shown in FIG. 2 (b), FIG. 10 when the gap between both objects of 1 [mu] m, 11 when the gap between both objects of 30n m it is a diffraction intensity pattern. The most different point from the calculation for the shape shown in FIG. 2A is that total reflection needs to be considered.

  (A) of each figure is the diffraction intensity pattern of the X-ray which has passed directly without reflecting on the surface of the object, and the intensity of the incident X-ray is normalized as 1. Here, the vertical axis (intensity axis) is shown in logarithm. On the other hand, (b) in each figure is an X-ray diffraction intensity pattern of the total reflection component on the object surface. Here, it is assumed that the material of both objects is stainless steel, the top of each object is a semicircular shape with a diameter of 2 mm, and the wavelength of X-ray is CuKα (0.154 nm).

  In particular, what is understood from FIGS. 10 and 11B is that the angle spread of the total reflection X-ray is about 2 to 3 °, and the peak value is 4 to 5 orders of magnitude smaller than the direct transmission component. is there.

It is clear from the above calculation results, although the degree varies depending on the shape of both objects sandwiching the contact site, even gap size of about 30n m, X-ray of a sufficient intensity to detect its gap width Appearing with a moderate spread width in the same direction. Therefore, if the X-rays that progress while spreading are accurately extracted, it is possible to estimate the gap size based on the X-ray intensity integrated value obtained therefrom. The shape of the diffraction intensity pattern is quite specific depending on the shapes of both objects sandwiching the contact site. Therefore, for example, if a two-dimensional X-ray detector is arranged in the X-ray reachable range and the spatial distribution of X-ray intensity is measured, the surface shape of the object can be estimated from the intensity distribution.

  The method for analyzing the contact area between solids and the analysis apparatus for performing the same according to the present invention utilize the above measurement principle, and detect only one X-ray passing directly through the gap as described above. The principle is completely different from the conventional measurement method in which the gap size is calculated based on the X-ray intensity detected by the detector.

  DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, an embodiment of an analysis apparatus that performs a method for analyzing a contact part between solids according to the present invention will be described with reference to the accompanying drawings. FIG. 1 is a schematic configuration diagram of a contact site measuring apparatus according to the present embodiment. The measurement object by the apparatus is not only a direct contact portion of two objects having an acute cross section or a curved cross section as shown in FIGS. 2 (a) and 2 (b), for example, as shown in FIG. 2 (c). As shown, there are various parts such as a part where two substantially parallel planes of two objects are in direct contact.

  2 (a) and 2 (b), the contact part of the two objects is a straight line extending in the Y direction, but in FIG. 2 (c), the contact part of the two objects is a plane including the Y direction and the Z direction. Is. In either case, even if both objects are in contact with each other macroscopically, there are very fine irregularities on the surfaces of these objects. There is a very small gap (however, the size of the gap along the Y direction is not constant). The contact site measurement apparatus of the present embodiment enables measurement of the size of the gap existing at such a microscopic level and the shapes of both objects in the vicinity thereof.

  Of course, the gap to be measured by the contact site measurement apparatus of the present embodiment is not only in the case where two objects are in direct contact with each other, but also has a much lower X-ray transmittance than air and more than both objects. May be a gap between contact portions in a state where both objects are in indirect contact with each other with a liquid or solid thin film layer having a high X-ray transmittance interposed therebetween.

As shown in FIG. 1, in the contact part measuring apparatus of the present embodiment, X-rays 2 and X-rays emitted from the X-ray source 2 are efficiently collected in the X-ray shielding chamber 1 to be substantially parallel light. Multi-capillary X-ray lens 3 to be measured, measurement object 4 including first object 4A and second object 4B, and X-rays emitted from the vicinity of the contact portion of measurement object 4 upon receiving X-ray irradiation are two-dimensionally displayed. A two-dimensional X-ray detector 5 is provided for detection. On the other hand, a data processing unit 6 embodied by a personal computer or the like is provided outside the X-ray shielding chamber 1 in order to process detection data obtained by the two-dimensional X-ray detector 5. The two-dimensional X-ray detector 5 is a position-sensitive detector that can determine the position of X-rays incident in a predetermined two-dimensional range. Therefore, from the two-dimensional X-ray detector 5 to the data processing unit 6, position information data of X-rays incident on the two-dimensional detection surface of the detector 5 (for example, data indicating a position address on the detection surface) and X-ray intensity data at each position on the detection surface is output.

  The data processing unit 6 includes a two-dimensional X-ray intensity distribution creating unit 61 that creates a two-dimensional X-ray intensity distribution based on the detection data as described above, and analyzes the distribution data according to a predetermined algorithm, for example, for a contact site. An analysis processing unit 62 that calculates the size of the minute gap is included as a functional block, and the processing result and the like are output by the output unit 7.

  Note that the multi-capillary X-ray lens 3 that collimates the X-rays is not an essential element. What is important is that the planes of both objects facing each other across the contact part or the contact of the closest part (contact part) of both objects. X-rays are incident on the contact site at an incident angle that is less than the critical angle for total reflection with respect to the plane. The tangent plane here is a virtual approximate plane based on the above-described definition. Since the total reflection critical angle differs depending on the material of the object and the atmosphere (for example, air, liquid, etc.) around the object, the spread angle allowed for actual irradiation X-rays differs depending on such conditions.

As shown in FIG. 1, even when the first object 4A and the second object 4B are in contact with each other, there are fine irregularities on the surfaces of the objects 4A and 4B, the influence of foreign matter attached to the surface, etc. Due to this, there is a very small gap. For this reason, when the X-rays as described above are irradiated to this contact site, X-rays that pass through while being mainly reflected by the gap (hereinafter referred to as “passing X-rays”) are emitted from the opposite side. In addition, X-rays diffracted by fine uneven edges and crystals on the surfaces of the objects 4A and 4B (hereinafter referred to as “diffracted X-rays”) are also emitted from the opposite side and scattered by the surfaces of the objects 4A and 4B. A ray (hereinafter referred to as “scattered X-ray”) is also emitted. Furthermore, even if the X-ray incident angle is less than or equal to the total reflection critical angle at the contact site, the X-ray incident angle exceeds the total reflection critical angle at a position slightly away from the contact site, and the contact site is also microscopic. In some cases, the incident angle of some X-rays may exceed the total reflection critical angle. Therefore, the characteristic X-rays peculiar to the substance are also emitted from the objects by the excitation action of the X-rays entering the objects 4A and 4B. Such various types of X-rays travel while spreading from the contact area and reach the detection surface of the two-dimensional X-ray detector 5 .

In general, the intensity of transmitted X-rays is the highest, but the intensity of diffracted X-rays and scattered X-rays is considerably high. However, at the detection surface position of the two-dimensional X-ray detector 5 , the passing X-rays are within a relatively narrow range reflecting the size of the minute gap at the contact site, whereas the spread of diffracted X-rays and scattered X-rays is in contact. It is greatly influenced by the surface shapes of the objects 4A and 4B near the part. In the apparatus of the present embodiment, even when diffracted X-rays and scattered X-rays are emitted while greatly spreading, most of the X-rays are received by the two-dimensional X-ray detector 5 to obtain position information data and X-ray intensity data. be able to.

  FIG. 3 is created based on detection data from the two-dimensional X detector 5 in the state shown in FIG. 2B in which X-rays on the lower side are shielded while both objects are strongly pressed. It is an example of a dimensional X-ray intensity distribution image. In this case, since the two objects are pressed against each other with a large load, the gap between the contact portions is extremely narrow (nearly zero). On the other hand, images of scattered X-rays and diffracted X-rays from the surface of the object appear above the gap, and the shape of these images reflects minute deformation of the object due to the load. By using the two-dimensional X-ray intensity distribution image in this way, it is possible to examine the surface shape of the object near the contact site.

  FIG. 4 is a flowchart showing an operation procedure of the apparatus when the size of the minute gap existing at the contact site of the measurement object 4 is obtained using the contact site measuring apparatus of the present embodiment.

  First, the X-ray source 2 is driven to irradiate the contact part of the measurement object 4 with X-rays, and various X-rays including the passing X-rays from the contact part are detected by the two-dimensional X-ray detector 5 as described above. To do. The two-dimensional X-ray intensity distribution creating unit 61 that has received the detection data from the two-dimensional X-ray detector 5 creates a two-dimensional X-ray intensity distribution image (step S1). Next, the analysis processing unit 62 sets a detection window for selecting a pixel from which the X-ray intensity is extracted for the image (step S2). This detection window is used to effectively improve the S / N by removing pixels from which X-rays are hardly or not incident from the integration target described later, or when the contact site is, for example, a dot shape. This is for eliminating the influence of passing X-rays from a portion that is not necessary, that is, a portion that is not a contact portion, when the gap to be obtained is present only at a specific portion in the two-dimensional image.

  For the former purpose, for example, the detection window can be automatically set so as to select only pixels whose X-ray intensity is equal to or greater than a predetermined threshold. On the other hand, for the latter purpose or the former purpose, the measurer manually detects the two-dimensional X-ray intensity distribution image on the screen of a monitor (not shown) and manually detects it within an appropriate range. It is recommended to set the window. For example, as illustrated later, when the contact site is linear (or planar), pixels that exhibit high X-ray intensity in a strip shape in the horizontal direction are arranged on the two-dimensional X-ray intensity distribution image. What is necessary is just to set a detection window so that it may include. Next, the analysis processing unit 62 integrates the X-ray intensities of the pixels in the detection window (step S3), and calculates the size of the minute gap at the contact site from the integrated intensity (step S4). Then, the calculated minute gap size is output from the output unit 7 together with the two-dimensional X-ray intensity distribution image (step S5).

The actual example of a two-dimensional X-ray intensity distribution image slit opening width d is obtained a slit is 6μm and 1μm as measured by the contact portion measuring device 5, shown in FIG. It can be seen that even with a slit opening width of 1 μm, a horizontal strip (line) image corresponding to the slit opening is clearly obtained. As described above, in such a case, a band-shaped detection window extending in the horizontal direction may be set. Further, even when the slit opening width becomes narrower, a signal having a sufficient strength for calculating the opening width can be extracted by setting an appropriate detection window by increasing the integration time.

  FIG. 7 shows the result of calculating the relationship between the slit opening width d and the integrated X-ray intensity relative value by actually measuring the slit opening width d in a stepwise manner using the contact part measuring apparatus of the above embodiment. From this figure, it can be seen that there is a correlation between the slit opening width d and the integrated X-ray intensity in the range of 0.1 to 2.5 μm. Therefore, for example, by obtaining the relationship as described above in advance and storing it as reference information in the analysis processing unit 62, the X-ray intensity obtained by executing the measurement on the measurement object 4 is used as the reference information. In light of this, the micro gap size can be obtained.

  As described above, characteristic X-rays are also emitted from an object that has been irradiated with X-rays. Therefore, an energy dispersive X-ray spectroscopic detector is arranged instead of the two-dimensional X-ray detector, or An object that forms a contact site by providing a two-dimensional X-ray detector and an energy dispersive X-ray spectroscopic detector together with the signal obtained by the energy dispersive X-ray spectroscopic detector for identification processing It is also possible to grasp the composition of.

  In addition, since each of the above-described embodiments is an example of the present invention, it is a matter of course that modifications, corrections, or additions as appropriate within the scope of the present invention are included in the scope of the claims of the present application. For example, in the above embodiment, it is assumed that two objects in a stationary state are in direct or indirect contact. However, if even an X-ray irradiation position does not move, one object moves to the other. It is clear that the same measurement is possible even when the object is moving relative to each other and when both objects are moving relative to each other.

1 ... X-ray shielding room
2 ... X-ray source 3 ... Multicapillary X-ray lens 4 ... Measurement object 4A ... First object 4B ... Second object 5 ... Two-dimensional X-ray detector 6 ... Data processing unit 61 ... Two-dimensional X-ray intensity distribution creation unit 62 ... Analysis processing section

Claims (4)

The contact portion where the first object that is solid and the second object that is solid as well are in direct contact with each other by a point, line, or surface, or the X-ray transmittance that is higher than the first object and the second object. A method for analyzing the contact area between solids for analyzing the microscopic structure of a contact part that is indirectly in contact with a point, line, or surface via a liquid or solid having X-rays,
a) an X-ray irradiation step in which X-rays are incident on the contact portion with an incident angle equal to or less than a critical angle for total reflection with respect to the planes of both objects facing each other across the contact portion or the tangential plane of the closest portion of both objects;
b) has been emitted from the opposite side of the contact portion with respect to the incident X-rays, reflected and scattered X-rays in the object surface to sandwich the contact portions, as well as X-rays including X-rays generated by the diffraction, several An X-ray detection step of detecting by a position sensitive type two-dimensional X-ray detector in which the minute X-ray detection elements are two-dimensionally arranged;
c) an analysis step of acquiring information about the structure of the contact portion based on a two-dimensional X-ray intensity distribution obtained from a detection signal from the two-dimensional X-ray detector;
A method for analyzing a contact area between solids, comprising:
A contact portion where a first object that is solid and a second object that is solid as well as a point, a line, or a surface contact each other, or a liquid that has a higher X-ray transmittance than the first object and the second object. Or an inter-solid contact site analysis device for analyzing the microscopic structure of a contact site that is in direct contact with a point, line, or surface via a solid using X-rays,
a) X-ray irradiating means for causing X-rays to enter the contact part with an incident angle equal to or less than the total reflection critical angle with respect to the planes of both objects facing each other across the contact part or the tangential plane of the closest part of both objects;
b) Includes X-rays that are emitted from the opposite side of the contact site with respect to incident X-rays by the X-ray irradiation means and reflected and scattered by the object surface sandwiching the contact site, and X-rays generated by diffraction A position sensitive X-ray detection means for detecting X-rays, in which a plurality of micro X-ray detection elements are two-dimensionally arranged;
c) data processing means for obtaining information about the structure of the contact portion based on a two-dimensional X-ray intensity distribution obtained from a detection signal from the X-ray detection means;
An apparatus for analyzing a contact area between solids, comprising:
The inter-solid contact site analyzing apparatus according to claim 2,
The data processing means accumulates X-ray intensities obtained by a plurality of minute X-ray detection elements included in a specific range among all the minute X-ray detection elements in the X-ray detection means, and based on the accumulated intensity information. And determining the size of a minute gap present in the contact portion. The inter-solid contact site analyzing apparatus according to claim 2,
The inter-solid contact site analysis apparatus characterized in that the data processing means estimates a surface shape of both objects facing each other across the contact site by analyzing an intensity pattern obtained from the two-dimensional X-ray intensity distribution.