JP5662905B2 - Fine motion actuator and magnetic head or magnetic disk inspection device - Google Patents

Description

  The present invention relates to a magnetic head positioning fine movement actuator and a read / write tester (a magnetic head inspection apparatus and a magnetic disk inspection apparatus). For example, the present invention relates to an inspection apparatus that positions a magnetic head on a target track on a magnetic disk, and is particularly suitable for an inspection apparatus when the range for precisely positioning the magnetic head is large.

  The characteristics of a magnetic disk and a magnetic head used for recording and reproducing data on the magnetic disk are tested by an inspection device before being incorporated into the magnetic disk device (for example, Patent Document 1). The magnetic head test is performed in a state of a head gimbal assembly (HGA) in which a head suspension and a magnetic head are assembled. During the test, data is recorded and reproduced on the magnetic disk while the magnetic head is levitated on the magnetic disk rotated by the spindle.

  A piezoelectric actuator is often used as an actuator for precisely positioning a magnetic head. Since the generated displacement of the piezoelectric actuator is generally about several μm to 20 μm, it is conceivable to use a displacement enlarging mechanism that mechanically expands when the displacement of the fine actuator is larger than that. As a basic principle of the displacement magnifying mechanism, insulators are well known, and this can be applied to magnify the displacement of the piezoelectric element (for example, Patent Document 2).

  In an actuator that expands the displacement of a piezoelectric element with a displacement magnifying mechanism, vibration can be reduced by providing a damping material in the middle of the displacement magnifying mechanism (for example, Patent Document 3).

  As an actuator using another displacement enlarging mechanism, the base of the arm can be moved differentially, the arm can be rotated, and a large displacement can be generated at the tip of the arm (for example, Patent Document 4).

  In addition, an actuator using a displacement magnifying mechanism that moves the base of the arm in a differential manner, rotates the arm, and generates a large displacement at the tip of the arm, and applies a damping material to the movable part and the fixed part. Vibration can be reduced (for example, Patent Document 5).

JP 2006-268955 A JP 2004-48955 A Japanese Patent No. 3612670 Japanese Patent No. 3539332 JP 2010-225247 A

In an inspection apparatus for testing a magnetic head, an HGA is fixed on a fine movement actuator, and the magnetic head follows a target track on the magnetic disk by operating the fine movement actuator. The target track is not necessarily concentric with the rotation center of the magnetic disk, but has a first-order rotation distortion, that is, eccentricity or distortion of a higher frequency component. The eccentricity of the target track is generated when the center of the target track once written on the magnetic disk deviates from the center of rotation due to an assembly error when the magnetic disk is attached to or detached from the spindle, or the written target track. This is because it is not a circle but is distorted. In a magnetic disk in which a target track is written in advance on a magnetic disk, such as a discrete track medium (DTM) or a bit patterned medium (BPM), the center of the target track generated when the magnetic disk is mounted on the spindle and the spindle It is conceivable that the eccentricity increases due to the positional deviation from the center of rotation. In this case, it is necessary to increase the stroke of the fine movement actuator that drives the HGA equipped with the magnetic head. In order to ensure a larger stroke, there is a method using a displacement enlargement mechanism. However, in order to increase the stroke, it is necessary to weaken the rigidity of the displacement magnifying mechanism, and the resonance frequency of the fine actuator is lowered. A decrease in the resonance frequency of the fine actuator causes a problem of deteriorating head positioning accuracy.
In addition, the fine actuator has a problem that it is small and inexpensive.

A first object of the present invention is to provide a fine movement actuator having a high resonance frequency.
A second object of the present invention is to provide a magnetic head or magnetic disk inspection apparatus having a high head positioning accuracy using a fine movement actuator that achieves the first object.

  A third object of the present invention is to provide a small and inexpensive magnetic head or magnetic disk inspection apparatus that generates a large amount of displacement.

In order to achieve the above object, the present invention has at least the following features.
The present invention provides a fixed portion, at least one linear drive element attached to the fixed portion, and provided on the fixed portion at the distal end side of the linear drive element and right and left with respect to a center line in the expansion / contraction direction of the linear drive element. Hinges, two beams provided with the respective hinges, the head is detachable, a head fixing portion provided on a tip side of the two beams, and at least one of the two beams A first feature is that a predetermined position is provided between the head fixing portion and the head fixing portion, and an additional hinge is provided between the predetermined position and the fixing portion.

Further, in the invention, the head fixing portion is an arm, and is connected to the base of the arm at the tip of the two beams on the left and right with respect to the center line of the arm in the direction connecting the head and the two beams. The second feature is that it has two hinge connecting portions.
Furthermore, the present invention is characterized in that the arm is provided at a right angle to the center line of the expansion / contraction direction, the connecting direction is a longitudinal direction of the arm, and the predetermined position is the arm. And

The fourth feature of the present invention is that the predetermined position is a range from a central position in the longitudinal direction of the arm to the hinge connecting portion.
Further, according to the present invention, the head fixing portion is directly or indirectly connected to the two beams, and the two beams have a portion parallel to a center line in the expansion / contraction direction, and the predetermined position The fifth feature is that these are parallel portions.

In addition, the present invention has a sixth feature that the head fixing portion is in contact with an attenuation member attached to the fixing portion.
Furthermore, the present invention is characterized in that the linear drive element is a piezo actuator, and the present invention is characterized in that the head is a magnetic head, and supports the fine actuator and the fine actuator. The eighth feature is that it has a coarse actuator that moves, a spindle that rotates a disk, and a pedestal that supports the coarse actuator and the spindle.

ADVANTAGE OF THE INVENTION According to this invention, the fine movement actuator which made the resonance frequency high can be provided.
Further, according to the present invention, it is possible to provide a magnetic head or magnetic disk inspection apparatus that uses the fine actuator and has high head positioning accuracy.
Furthermore, according to the present invention, there is provided a small and inexpensive magnetic head or magnetic disk inspection apparatus which generates a large amount of displacement.

It is a general-view figure of the magnetic head positioning fine movement actuator which shows a 1st Example. FIG. 2 is an operation explanatory diagram of the magnetic head positioning fine movement actuator shown in FIG. 1. It is a figure which shows a magnetic head positioning fine movement actuator when there is no additional hinge. It is a figure which shows the frequency response analysis result of a mechanism part with an additional hinge, and a mechanism part without an additional hinge. It is a figure which shows the relationship between a stroke and the resonance frequency, and the position of an additional hinge. It is explanatory drawing of the effect of this invention and an operation principle. It is a general-view figure of the magnetic head positioning fine movement actuator which shows a 2nd Example. It is a figure which shows the vibration frequency characteristic of the magnetic head positioning fine movement actuator of the 1st and 2nd Example. It is a general-view figure of the magnetic head positioning fine movement actuator which shows a 3rd Example. FIG. 9 is a schematic view of a mechanism portion of a magnetic disk inspection apparatus showing a fourth embodiment of the present invention.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

FIG. 1 is a schematic view of a magnetic head positioning fine actuator 100 showing a first embodiment of the present invention. FIG. 2 is an explanatory view showing the operation of the magnetic head positioning fine movement actuator 100 shown in FIG.

  As shown in FIGS. 1 and 2, the magnetic head positioning fine movement actuator 100 includes one piezo actuator 2 attached to the fixed portion 1, a beam coupling portion 43 pressed against the tip of the piezo actuator 2, and a piezo actuator. Hinges 4a and 4b arranged on the left and right with respect to the center line 3 in the expansion / contraction direction 2 and the push beam 42a and the pull beam 42b provided with the hinges 4a and 4b and coupled to the beam coupling part 43, There are hinge connecting portions 8a and 8b connected to the push beam 42a or the pull beam 42b, and an arm 5 connected to the tip of the hinge connecting portions 8a and 8b, and in the vicinity of the hinge connecting portions 8a and 8b. The additional hinge 41 is provided between the arm 5 and the fixed portion 1. The hinge connection portions 8a and 8b are connected to the left and right of the center line 7 in the longitudinal direction of the arm 5 at the base 6 of the arm 5. Further, the arm length L1 is larger than the distance L9 between the hinge connecting portions 8a and 8b, and the HGA 12 can be attached to and detached from the tip 11 of the arm 5.

  As shown in FIG. 2, when the piezo actuator 2 extends, the push beam 42a and the pull beam 42b open to the left and right as indicated by arrows 13a and 13b, respectively. One of the hinge connecting portions 8a and 8b connected to the push beam 42a or the pull beam 42b opened to the left and right is pushed, the other is pulled, the arm 5 is rotated, and the HGA 12 attached thereto is as indicated by an arrow 15 It is displaced to.

  In this embodiment, when the piezo actuator 2 is in the neutral state, the push beam 42a and the pull beam 42b are parallel to the fixed portion 1 and perpendicular to the center line 3 in the expansion / contraction direction of the piezo actuator 2. . Therefore, when used for magnetic head positioning, the magnetic head positioning fine actuator 100 is installed with a predetermined bias angle. Of course, when the piezo actuator 2 is in the neutral state, the push beam 42a and the pull beam 42b are parallel to each other and maintained perpendicular to the center line 3 in the expansion / contraction direction of the piezo actuator 2 with respect to the fixed portion 1. May be installed with a predetermined bias angle.

  In the magnetic head positioning fine actuator 100, the reason why the piezo actuator 2 composed of a piezo element is used as an actuator for pushing the hinges 4a and 4b is that the characteristics of the piezo element are suitable as an actuator for positioning. The characteristics of the piezo element are that it has a large generated force and is small, has a high displacement resolution, consumes less power than the electromagnetic type, and does not require a magnetic field, so there is no problem of leakage magnetic flux. .

  In this embodiment, the resonance frequency of the magnetic head positioning fine actuator 100 is increased by having the additional hinge 41. FIG. 3 shows the magnetic head positioning fine movement actuator 101 when there is no additional hinge. FIG. 4 shows the frequency response analysis results of the mechanism unit 100 with additional hinge and the mechanism unit 101 without additional hinge. The mechanism unit 100 with an additional hinge realizes a high resonance frequency of 30% or more compared to the mechanism unit 101 without an additional hinge. In general, the moving distance (hereinafter referred to as a stroke) of the tip 121 of the HGA 12 is greatly reduced, but in this embodiment, the reduction can be prevented. The reason why the resonance frequency can be increased without reducing the stroke is largely related to the position of the additional hinge 41.

  The relationship between the stroke and resonance frequency and the position of the additional hinge 41 is shown in FIG. The ratio between the additional hinge 41 position L2 and the arm length L1 shown in FIG. 2 is shown on the horizontal axis, and the resonance frequency and stroke are shown on the vertical axis. As for the resonance frequency and the stroke in FIG. 5, the maximum value shown in the drawing is indicated as 100%. That is, with respect to the resonance frequency, the resonance frequency when the additional hinge 41 is provided at the tip 11 of the arm 5 where L2 = 0 is provided, and as the stroke, the additional hinge 41 is provided at the root 6 of the arm 5 where L2 = L1. Each stroke is 100%.

  FIG. 5 shows the result of changing the additional hinge position L2 while keeping the arm length L1 constant. The result when the additional hinge position L2 is the position shown in FIGS. 1 and 2 is the result when the horizontal axis in FIG. 5 is 100%. The state where the numerical value on the horizontal axis is small is a state where the position of the additional hinge 41 is shifted closer to the front end 121 of the HGA than the position shown in FIGS.

  As compared with the result in which the horizontal axis in FIG. 5 is 100%, the stroke is lowered as the position of the additional hinge is shifted toward the tip 121 of the HGA. On the other hand, the resonance frequency rises up to 50% on the horizontal axis, but is saturated thereafter. As a result, it is desirable that the horizontal axis is 50 to 100% in order to increase the resonance frequency. Within this range, the stroke can be increased when the horizontal axis is 100%.

  Further, if the arm length L1 is increased with respect to the distance L9 between the hinge connecting portions 8a and 8b, the moving distance of the tip 121 of the HGA 12 can be increased with respect to the generated displacement of the piezo actuator 2. Since the distance L9 between the hinge connecting portions 8a and 8b and the length L1 of the arm can be determined regardless of the size of the piezo actuator 2, the size of the piezo actuator 2 is within the allowable range of the vibration characteristics. Without limitation, the stroke can be increased.

  In this embodiment, the center line 3 in the expansion / contraction direction of the piezo actuator 2 and the center line 7 in the longitudinal direction of the arm 5 are configured to be orthogonal to each other. Thereby, the transmission efficiency of the expansion / contraction force of the piezo actuator 2 is improved.

  In addition, in the magnetic head positioning fine movement actuator that applies a force to the root 6 of the arm 5 and rotates the arm 5, a configuration in which the arm 5 is rotated by a fulcrum and one force application point is also conceivable. In this embodiment, since the arm 5 is rotated differentially without providing a fulcrum, the problem of stress concentration at the fulcrum and the instability of the operation due to the position error between the rotation center of the arm 5 and the fulcrum are eliminated. It is possible not to generate it.

  In order to apply a differential force to the root of the arm 5, two actuators may be used. However, in this embodiment, by using one piezo actuator 2, a differential force is applied to the base of the arm 5. Therefore, the magnetic head positioning fine actuator can be realized at a lower cost and in a smaller size than the case of using two actuators.

Furthermore, the operation principle of applying a force in two directions by using one piezoelectric actuator 2 of this embodiment will be described with reference to FIG. The left side (a) of FIG. 6 shows a structural schematic diagram of a comparative example, and the right side of FIG. 6 (b) shows a schematic structural diagram of the present invention. In the structure of the comparative example, a force (indicated by a small arrow in FIG. 6) generated from one PZT element acts on the fixed portion and the hinge, and on the hinge side, a single force transmission direction (a large arrow in FIG. 6). ). On the other hand, in the structure of the present invention, a force (indicated by a small arrow in FIG. 6) generated from one PZT element acts on the fixed portion and the hinge, and on the hinge side, two force transmission directions (in FIG. 6). Indicated by a large arrow). As a result, the following remarkable effects can be obtained. (1) The enlargement ratio can be increased by driving the arm 5 differentially. (2) Divide the force into multiples = Divide the hinges into 2 groups ⇒ Characteristic variation due to manufacturing error of hinge dimensions can be reduced (total characteristic variation due to manufacturing error is an average value of manufacturing errors of multiple hinges).
In the present embodiment described above, force is applied in two directions by one piezo actuator 2, but adjustment of a plurality of piezo actuators 2 is necessary, but force is applied in two directions separately by the two piezo actuators 2. You may let them.

  FIG. 7 is a schematic view of a magnetic head positioning fine movement actuator 200 showing a second embodiment of the present invention.

  The magnetic head positioning fine actuator 200 includes one piezo actuator 2 attached to the fixed portion 1, a beam coupling portion 43 pressed against the tip of the piezo actuator 2, and a center line 3 in the expansion / contraction direction of the piezo actuator 2. The hinges 4a and 4b arranged on the left and right, the hinges 4a and 4b are provided and connected to the push beam 42a and the pull beam 42b, which are coupled to the beam coupling portion 43, and the push beam 42a or the pull beam 42b. Hinge connection portions 8a and 8b and an arm 5 connected to the tip of the hinge connection portions 8a and 8b, and between the arm 5 and the fixing portion 1 in the vicinity of the hinge connection portions 8a and 8b. Has an additional hinge 41. Further, the arm length L1 is large with respect to the distance 9 between the hinge connecting portions 8a and 8b, and the HGA 12 can be attached to and detached from the tip 11 of the arm 5, and the bridge between the tip 11 of the arm 5 and the fixed portion 1 is provided. It is comprised by the damping rubber 21 made. In this embodiment, a damping rubber 21 is bridged between the tip 11 of the arm 5 and the fixed portion 1 of the magnetic head positioning fine movement actuator 100 in the first embodiment.

  The operation of the magnetic head positioning fine actuator 200 is the same as that of the magnetic head positioning fine actuator 100 in the first embodiment.

  FIG. 8 is a diagram showing the vibration frequency characteristics of the magnetic head positioning fine actuator 100 shown in the first embodiment of the present invention and the magnetic head positioning fine actuator 200 shown in the second embodiment. Both are vibration characteristics of the tip 121 of the HGA 12 with respect to the input voltage of the piezo actuator 2. Since the damping rubber 21 is bridged between the tip 11 of the arm 5 and the fixed portion 1, the gain of the large vibration mode is attenuated, and the HGA 12 can be positioned more precisely.

  FIG. 9 is a plan view of a magnetic head positioning fine movement actuator 300 showing a third embodiment of the present invention. The first embodiment is a rotary displacement enlarging mechanism that rotates the HGA 12 at the tip of the arm 5 as shown by an arrow 15 in FIG. 2, whereas the third embodiment is shown by an arrow 115 in FIG. In this way, the HGA 12 is a linear motion type displacement enlarging mechanism that linearly operates the HGA 12.

  As shown in FIG. 9, the magnetic head positioning fine actuator 300 includes one piezo actuator 2 attached to a U-shaped fixed portion 101, a beam coupling portion 143 pressed against the tip of the piezo actuator 2, Hinge 104a and hinge 104b arranged on the left and right with respect to the center line 103 in the expansion / contraction direction of the piezo actuator 2, and an L-shaped push beam 142a provided with the respective hinges 104a and 104b and coupled to the beam coupling portion 143. And a push beam 142b, a leaf spring 145a, 145b connected to the tip of the L-shaped push beam 142a or the push beam 142b, and an HGA fixing portion 150 fixed to the leaf springs 145a, 145b, , L-shaped push beam 142a and push beam It has an additional hinge 141 between 42b and the fixed part 1. The HGA 12 is detachably provided on the HGA fixing part 150.

  In this embodiment, as shown by an arrow 120 in FIG. 9, when the piezo actuator 2 is extended, the push beams 142a and 142b are opened to the left and right as indicated by arrows 113a and 113b, respectively, and at the tip side of the push beams 142a and 142b It moves to the inner side as indicated by 116a and 116b. The movement of the arrows 113a and 113b is the same as the operation shown in FIG. As a result, the HGA 12 moves directly to the distal end side as indicated by an arrow 115 via the leaf springs 145a and 145b having an inverted eight-character shape.

  Also in the present embodiment, like the first embodiment, by having the additional hinge 141, the resonance frequency of the magnetic head positioning fine movement actuator 300 can be increased by restricting the movement of the push beams 142a and 142b.

  The position of the additional hinge 141 can be provided between the push beams 142a and 142b and the leaf springs 145a and 145b. This is because if the hinge connections 8a and 8b shown in FIG. 1 are provided at the ellipses 108a and 108b shown by broken lines in FIG. 9, and the push beams 142a and 142b ahead of them are considered as the arm 5 shown in FIG. The concept of the first embodiment can be followed. On the contrary, also in the first embodiment, the push beam 42a and the pull beam 42b can be extended, that is, the hinge connecting portions 8a and 8b can be provided on the root side (arm tip side) 11 of the HGA 12. In that case, the additional hinge 41 is provided between the push beam 42 a and the pull beam 42 b and the fixed portion 1.

  Accordingly, also in the third embodiment, as in the first embodiment, the closer to the HGA 12, the higher the vibration damping capability, so that the resonance frequency can be increased, but the movable stroke of the HGA 12 is lowered. With this balance, the installation position of the additional hinge 141 is determined.

  In the third embodiment of the present invention, the same effect as that of the first embodiment can be obtained.

  Also in the third embodiment, the damping rubber 21 may be bridged between the front end of the HGA fixing portion 150 and the fixing portion 101 as in the second embodiment. As a result, as in the second embodiment, the gain of the large vibration mode is attenuated, and the HGA 12 can be positioned more precisely.

  FIG. 10 is a schematic view of the mechanism part of a magnetic disk inspection apparatus 400 using the magnetic head positioning fine actuator 200 of the second embodiment as an example of a magnetic head positioning fine actuator showing the fourth embodiment of the present invention. is there.

  The magnetic disk inspection apparatus reproduces the magnetic information written in advance on the magnetic disk 31 and the magnetic information written on the magnetic disk 31 with the magnetic head disposed at the tip 121 of the HGA 12 with the magnetic head. A device for inspecting characteristics.

  The magnetic disk inspection apparatus 400 includes the magnetic disk 31, the pedestal 32, the spindle 33, the coarse motion actuator 34, the magnetic head positioning fine motion actuator 200 shown in the second embodiment, and a control unit (not shown) that controls these. A coarse actuator 34 and a spindle 33 are fixed on the pedestal 32. On the spindle 33, a magnetic disk 31 is fixed rotatably and detachably. A magnetic head positioning fine movement actuator 200 is fixed on a coarse movement table 35 of the coarse movement actuator 34.

  Although the magnetic head positioning fine actuator 200 can increase the moving distance of the tip 121 of the HGA 12, it does not cover the entire information writing area of the magnetic disk 31 with a radius of several tens of millimeters. Have difficulty. For this reason, the magnetic head positioning fine movement actuator 200 is roughly positioned at a predetermined position on the magnetic disk 31 by the coarse movement actuator 34, and then the HGA 12 is positioned by the magnetic head positioning fine movement actuator 200. As a result, the magnetic head disposed at the tip 121 of the HGA 12 can be accurately positioned over the entire area of the magnetic disk 31, and the inspection of the magnetic disk 31 can be performed with high precision.

  In the present embodiment, the HGA 12 is positioned on the magnetic disk 31 by the coarse actuator 34 and the magnetic head positioning fine actuator 200. However, the HGA 12 is positioned between the coarse actuator 34 and the magnetic head positioning fine actuator 200. Even if three actuators are provided and the HGA 12 is positioned on the magnetic disk 31 by three positioning devices, the same effects as in the present embodiment are obtained, but there is an effect that the degree of freedom of positioning control and positioning functions is further increased.

  The fifth embodiment of the present invention is a magnetic head inspection apparatus using the magnetic head positioning fine movement actuator mechanism 200 described in the fourth embodiment. That is, the magnetic head positioning fine actuator has the configuration shown in FIG. 7, and the magnetic head inspection device mechanism has the configuration shown in FIG. The magnetic head inspection apparatus uses the magnetic head arranged at the tip 121 of the HGA 12 to store the magnetic information written in advance on the magnetic disk 31 and the magnetic information written on the magnetic disk 18 with the magnetic head arranged at the tip 121 of the HGA 12. It is a device that reproduces and inspects the characteristics of the HGA 12.

  As a result, also in the fifth embodiment, the magnetic head disposed at the tip 121 of the HGA 12 can be accurately positioned over the entire area of the magnetic disk 31, and the inspection of the HGA 12 can be performed with high accuracy.

In this embodiment as well, the HGA 12 is positioned on the magnetic disk 31 by the coarse actuator 34 and the magnetic head positioning device mechanism 200, but between the coarse actuator 34 and the magnetic head positioning fine actuator 200. Even if the third actuator is provided to position the HGA 12 on the magnetic disk 31 with three positioning devices, the same effect as in the present embodiment is obtained, but the degree of freedom of positioning control and positioning function is further increased. .

  In addition, according to the fourth or fifth embodiment, a magnetic head inspection apparatus capable of inspecting a magnetic disk having a large target track eccentricity or a precise inspection of a magnetic head using a magnetic disk having a large target track eccentricity, and A magnetic disk inspection apparatus can be provided.

  Although the embodiment of the present invention has been described above, the present invention is not limited to the above, and various modifications can be made within the scope of the technical idea.

  In this embodiment, the magnetic disk inspection apparatus is described. However, the present invention can also be applied to a magnetic head positioning control apparatus for a magnetic head inspection apparatus and a magnetic head inspection. Further, it can be applied to an apparatus for evaluating both a magnetic disk and a magnetic head. Furthermore, the magnetic head or the magnetic disk-related device has been described as an example of the use of the fine movement actuator, but it can also be used as a fine movement actuator mechanism of a head having other sensors.

DESCRIPTION OF SYMBOLS 1, 101: Fixed part 2, 102: Piezo actuator 3, 103: Center line of expansion / contraction direction of piezoelectric actuator 4a, 4b, 104a, 104b: Hinge 5: Arm 6: Arm base 7: Center line of arm longitudinal direction 8a, 8b: Hinge connection part 11: Tip of arm 12: HGA 13a, 13b, 15: Arrow 113a, 113b, 115, 116a, 116b, 120: Arrow 21: Damping rubber 31: Magnetic disk 32: Base 33: Spindle 34: Coarse motion actuator 35: Coarse motion table 41, 141: Additional hinges 42a, 142a, 142b: Push beam 42b: Pull beam 43, 143: Beam coupling part 100, 200, 300: Magnetic head positioning fine motion actuator 121: HGA Tip 145a, 145b: Plate 0.99: HGA fixing portion 300: a magnetic disk tester mechanism L1: length of the arm L2: Add hinge position L9: distance between the hinge connection portion

Claims (11)

A fixed portion, and at least one linear drive element attached to said fixed portion, a hinge provided on the fixed portion to the left and right a linear drive element distally relative expansion and contraction direction of the center line of the linear drive element When the two beams, each of said hinge is provided, f head is detachable, the head fixing portion provided on the distal end side of the two beams, and at least one of the two beams the head A fine movement actuator characterized in that a predetermined position is provided between the fixed portion and the fixed portion, and an additional hinge is provided between the predetermined position and the fixed portion. 2. The fine movement actuator according to claim 1, wherein the head fixing portion is an arm, and has two hinge connection portions connected to tips of the two beams and a base of the arm. The arm is provided at a right angle to the center line in the telescopic direction, the two hinge connection portions are connected to the left and right with respect to the center line of the arm having a longitudinal direction in the right angle direction, and the predetermined position is The fine movement actuator according to claim 2, wherein the fine movement actuator is an arm. 4. The fine movement actuator according to claim 3, wherein the length of the arm is long with respect to the distance between the two hinge connecting portions. 4. The fine movement actuator according to claim 3, wherein the predetermined position is a range from a central position in a longitudinal direction of the arm to the hinge connecting portion. The head fixing portion is directly or indirectly connected to the two beams, the two beams have a portion parallel to the center line in the expansion / contraction direction, and the predetermined position is the parallel portion. The fine movement actuator according to claim 1, wherein the fine movement actuator is provided. The fine actuator according to claim 6, further comprising a leaf spring at a symmetrical position between the head fixing portion and the two beams. 2. A fine actuator according to claim 1, wherein a tip of the head fixing portion is in contact with a damping material attached to the fixing portion. The fine actuator according to claim 1, wherein the linear drive element is a piezo actuator. The fine movement actuator according to claim 1, wherein the head is a magnetic head. The fine movement actuator according to claim 10, a coarse movement actuator that supports and moves the fine movement actuator, a spindle that rotates a disk, and a pedestal that supports the coarse movement actuator and the spindle. Inspection device for magnetic head or magnetic disk.

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