JP5648562B2

JP5648562B2 - Combustion pressure sensor

Info

Publication number: JP5648562B2
Application number: JP2011082156A
Authority: JP
Inventors: 山田　暁; 暁山田; 伊藤　治; 治伊藤; 久幸竹内
Original assignee: Denso Corp
Current assignee: Denso Corp
Priority date: 2011-04-01
Filing date: 2011-04-01
Publication date: 2015-01-07
Anticipated expiration: 2031-04-01
Also published as: JP2012215524A

Description

本発明は、内燃機関の燃焼室内における圧力を検出するための燃焼圧センサ、特にハウジングの一端に設けたダイアフラムに印加される圧力を、ハウジングに収容された棒状の圧力伝達部材により、ハウジングの他端に設けた圧力検出部に伝達する構成の燃焼圧センサに関する。 The present invention relates to a combustion pressure sensor for detecting a pressure in a combustion chamber of an internal combustion engine, in particular, a pressure applied to a diaphragm provided at one end of the housing, and a rod-shaped pressure transmission member accommodated in the housing to provide other pressure to the housing. The present invention relates to a combustion pressure sensor configured to transmit to a pressure detector provided at an end.

従来、特許文献１に示されるように、ハウジングの一端に設けたダイアフラムに印加される圧力を、ハウジングに収容された棒状の圧力伝達部材により、ハウジングの他端に設けた圧力検出部に伝達する構成の燃焼圧センサが知られている。 Conventionally, as disclosed in Patent Document 1, pressure applied to a diaphragm provided at one end of a housing is transmitted to a pressure detection unit provided at the other end of the housing by a rod-shaped pressure transmission member accommodated in the housing. Combustion pressure sensors with a configuration are known.

この燃焼圧センサでは、受圧用ダイアフラムに圧力が印加されると、ダイアフラムが歪んで圧力伝達部材が軸方向にスライドし、そのスライド分、ハウジングの底部に歪が生じる。そして、圧力検出部は、底部の歪に応じたレベルの信号を生じ、この信号に基づいて圧力検出が行われるようになっている。 In this combustion pressure sensor, when a pressure is applied to the pressure receiving diaphragm, the diaphragm is distorted and the pressure transmission member slides in the axial direction, and the sliding portion causes distortion at the bottom of the housing. The pressure detection unit generates a signal having a level corresponding to the distortion at the bottom, and pressure detection is performed based on this signal.

特開２００６−２０８０４３号公報JP 2006-208043 A

ところで、上記構成の燃焼圧センサにおいて、ダイアフラムに印加される圧力（所謂燃焼圧）は、５０ｋＨｚ未満の低周波成分から５０ｋＨｚ以上の高周波成分までを含む。一方、圧力伝達部材は、耐熱性、圧力伝達性等を考慮し、金属やセラミックスなどの耐熱性を有しつつ硬い材料を用いて形成される。このため、低周波成分だけでなく高周波成分も圧力伝達部材を伝播し、この高周波成分により圧力検出部がダメージを受ける恐れがある。 By the way, in the combustion pressure sensor having the above-described configuration, the pressure applied to the diaphragm (so-called combustion pressure) includes a low frequency component of less than 50 kHz to a high frequency component of 50 kHz or more. On the other hand, the pressure transmission member is formed using a hard material having heat resistance such as metal or ceramics in consideration of heat resistance, pressure transmission, and the like. For this reason, not only the low frequency component but also the high frequency component propagates through the pressure transmitting member, and the high frequency component may damage the pressure detection unit.

圧力検出部のダメージを抑制するために、高周波成分による衝撃荷重に耐えるべく圧力検出部自体の耐圧を高めることが考えられる。しかしながら、圧力検出部の耐圧を高めると、その反面、圧力検出部の感度が低下してしまう。 In order to suppress damage to the pressure detection unit, it is conceivable to increase the pressure resistance of the pressure detection unit itself in order to withstand an impact load due to a high frequency component. However, increasing the pressure resistance of the pressure detection unit, on the other hand, decreases the sensitivity of the pressure detection unit.

本発明は上記問題点に鑑み、圧力検出部の感度を低下させることなく、高周波成分による圧力検出部のダメージを抑制することができる燃焼圧センサを提供することを目的とする。 In view of the above problems, an object of the present invention is to provide a combustion pressure sensor that can suppress damage to the pressure detection unit due to a high-frequency component without reducing the sensitivity of the pressure detection unit.

上記目的を達成する為に請求項１に記載の燃焼圧センサは、
一端が開口する中空筒状のハウジング（１１）と、
ハウジング（１１）の中空を閉塞するように開口端部（１１ａ）に設けられ、内燃機関の燃焼室内における圧力（所謂燃焼圧）の印加により歪む受圧用のダイアフラム（１２）と、
ハウジング（１１）における開口端部（１１ａ）と反対の底部（１１ｂ）外面に搭載され、圧力に応じた信号を生じる圧力検出部（１３）と、
ハウジング（１１）に収容されて、ダイアフラム（１２）に印加される圧力を、底部（１１ｂ）を介して圧力検出部（１３）に伝達する棒状の圧力伝達部材（１４）と、を備える。 In order to achieve the above object, the combustion pressure sensor according to claim 1,
A hollow cylindrical housing (11) open at one end;
A pressure-receiving diaphragm (12) provided at the open end (11a) so as to close the hollow of the housing (11) and distorted by application of pressure (so-called combustion pressure) in the combustion chamber of the internal combustion engine;
A pressure detector (13) that is mounted on the outer surface of the bottom (11b) opposite the open end (11a) of the housing (11) and generates a signal corresponding to the pressure;
A rod-shaped pressure transmission member (14) housed in the housing (11) and configured to transmit the pressure applied to the diaphragm (12) to the pressure detection unit (13) via the bottom (11b).

そして、圧力伝達部材（１４）の表面に、第１凸部（１５ａ）及び第１凹部（１５ｂ）の少なくとも一方を有する第１減衰部（１５）が設けられ、
空気よりも粘性係数の大きい材料からなる粘性部材（１６）が、ハウジング（１１）に収容されるとともに、圧力伝達部材（１４）における少なくとも第１減衰部（１５）の表面とハウジング（１１）の内面（１１ｃ）との両方に接触していることを特徴とする。 And the 1st attenuation | damping part (15) which has at least one of a 1st convex part (15a) and a 1st recessed part (15b) is provided in the surface of the pressure transmission member (14),
A viscous member (16) made of a material having a viscosity coefficient larger than that of air is accommodated in the housing (11), and at least the surface of the first damping portion (15) in the pressure transmission member (14) and the housing (11). It is characterized by being in contact with both the inner surface (11c).

粘性部材（１６）は、圧力伝達部材（１４）における第１減衰部（１５）の表面とハウジング（１１）の内面（１１ｃ）との両方に接触している。このため、燃焼圧を受けて圧力伝達部材（１４）がスライドする際に、圧力伝達部材（１４）は粘性部材（１６）による抵抗力、所謂粘性抵抗を被る。ここで、粘性抵抗は、粘性係数（粘性率とも言う）に比例する。このため、粘性係数が大きいほど粘性抵抗は大きくなり、運動中の物体は大きな抵抗力を受ける。したがって、本発明によれば、粘性部材（１６）を配置しない構成、すなわち従来のように圧力伝達部材とハウジングの内面との間に空気が介在する構成に較べて、圧力伝達部材（１４）が受ける粘性抵抗を大きくすることができる。 The viscous member (16) is in contact with both the surface of the first damping part (15) and the inner surface (11c) of the housing (11) in the pressure transmission member (14). For this reason, when the pressure transmission member (14) slides upon receiving the combustion pressure, the pressure transmission member (14) is subjected to a resistance force by the viscous member (16), so-called viscous resistance. Here, the viscous resistance is proportional to the viscosity coefficient (also referred to as viscosity). For this reason, the viscosity resistance increases as the viscosity coefficient increases, and the moving object receives a greater resistance force. Therefore, according to the present invention, the pressure transmission member (14) has a configuration in which the viscous member (16) is not disposed, that is, in comparison with a conventional configuration in which air is interposed between the pressure transmission member and the inner surface of the housing. The viscous resistance to be received can be increased.

また、粘性抵抗は、粘性部材（１６）と接触する物体の形状にも依存する。具体的には、平面に較べて、凸部や凹部を有する構成のほうが、粘性部材（１６）との接触面積が大きくなり、粘性抵抗が大きくなる。したがって、第１減衰部（１５）を有する本発明によれば、圧力伝達部材（１４）における粘性部材（１６）との接触面を平面とする構成に較べて、圧力伝達部材（１４）が粘性部材（１６）から受ける粘性抵抗を大きくすることができる。 The viscous resistance also depends on the shape of the object in contact with the viscous member (16). Specifically, compared to a flat surface, the configuration having a convex portion or a concave portion has a larger contact area with the viscous member (16), resulting in a larger viscous resistance. Therefore, according to the present invention having the first damping portion (15), the pressure transmission member (14) is more viscous than the configuration in which the contact surface of the pressure transmission member (14) with the viscous member (16) is a flat surface. The viscous resistance received from the member (16) can be increased.

さらには、粘性抵抗は、物体の動く速度に比例する。このため、周波数が高いほど、運動中の物体は大きな抵抗を受ける。 Furthermore, the viscous resistance is proportional to the moving speed of the object. For this reason, the higher the frequency, the greater the resistance of the moving object.

以上から、本発明によれば、ダイアフラム（１２）に印加される燃焼圧のうち、５０ｋＨｚ以上の高周波成分を５０ｋＨｚ程度の低周波成分に較べて、粘性抵抗により効率よく減衰させることができる。そして、これにより、圧力伝達部材（１４）を伝播する高周波成分を低減し、ひいては圧力検出部（１３）の受けるダメージを抑制することができる。また、圧力検出部（１３）のダメージを抑制するために、圧力検出部（１３）自体の耐圧を高めなくとも良いため、圧力検出部（１３）の感度低下を抑制することもできる。 From the above, according to the present invention, of the combustion pressure applied to the diaphragm (12), a high frequency component of 50 kHz or higher can be efficiently attenuated by viscous resistance as compared with a low frequency component of about 50 kHz. And thereby, the high frequency component which propagates a pressure transmission member (14) can be reduced, and the damage which a pressure detection part (13) receives can be suppressed by extension. Moreover, since it is not necessary to raise the pressure | voltage resistance of pressure detection part (13) itself in order to suppress the damage of a pressure detection part (13), the sensitivity fall of a pressure detection part (13) can also be suppressed.

請求項２に記載のように、
第１減衰部（１５）は、圧力伝達部材（１４）の軸方向において、圧力伝達部材（１４）の中心（１４ｃ）よりもダイアフラム（１２）に近い位置に設けられることが好ましい。 As claimed in claim 2,
The first damping part (15) is preferably provided at a position closer to the diaphragm (12) than the center (14c) of the pressure transmission member (14) in the axial direction of the pressure transmission member (14).

これによれば、ダイアフラム（１２）に近い位置、すなわち圧力伝達部材（１４）をスライド（変位）させるエネルギーの高い位置で、粘性抵抗により高周波成分をより効率よく減衰させることができる。 According to this, the high frequency component can be attenuated more efficiently by the viscous resistance at a position close to the diaphragm (12), that is, at a position with high energy for sliding (displacement) the pressure transmission member (14).

請求項３に記載のように、
粘性部材（１６）は、第１凸部（１５ａ）及び／又は第１凹部（１５ｂ）の複数と接触すると良い。 As claimed in claim 3,
The viscous member (16) may be in contact with a plurality of the first convex portion (15a) and / or the first concave portion (15b).

このように、粘性部材（１６）との接触対象として、第１凸部（１５ａ）を複数、第１凹部（１５ｂ）を複数、第１凸部（１５ａ）と第１凹部（１５ｂ）を合わせて複数、のいずれかとすると、第１凸部（１５ａ）及び第１凹部（１５ｂ）のいずれか１つのみと接触する構成に較べて、粘性部材（１６）との接触面積を大きくする効果が高まり、高周波成分をより効率よく減衰させることができる。 As described above, a plurality of first convex portions (15a), a plurality of first concave portions (15b), and a first convex portion (15a) and a first concave portion (15b) are combined as objects to be contacted with the viscous member (16). If it is any one of a plurality, the effect of increasing the contact area with the viscous member (16) as compared with the configuration in which only one of the first convex portion (15a) and the first concave portion (15b) is in contact. The high frequency component can be attenuated more efficiently.

請求項４に記載のように、
ハウジング（１１）の内面（１１ｃ）における粘性部材（１６）との接触部分に、第２凸部（１９ａ）及び第２凹部（１９ｂ）の少なくとも一方を有する第２減衰部（１９）が設けられた構成としても良い。 As claimed in claim 4,
A second attenuating portion (19) having at least one of a second convex portion (19a) and a second concave portion (19b) is provided at a contact portion of the inner surface (11c) of the housing (11) with the viscous member (16). It is good also as a composition.

これによれば、粘性部材（１６）とハウジング（１１）との接触面積が大きくなり、ハウジング（１１）が粘性部材（１６）から受ける粘性抵抗が大きくなる。このため、圧力伝達部材（１４）のスライドする際に粘性部材（１６）がより変位しにくくなる、すなわち圧力伝達部材（１４）が受ける粘性抵抗がより大きくなる。したがって、高周波成分をより効率よく減衰させることができる。 According to this, the contact area between the viscous member (16) and the housing (11) increases, and the viscous resistance that the housing (11) receives from the viscous member (16) increases. For this reason, when the pressure transmission member (14) slides, the viscous member (16) becomes more difficult to be displaced, that is, the viscous resistance received by the pressure transmission member (14) becomes larger. Therefore, the high frequency component can be attenuated more efficiently.

請求項５に記載のように、
第２減衰部（１９）は、圧力伝達部材（１４）の軸方向において、圧力伝達部材（１４）の中心（１４ｃ）よりもダイアフラム（１２）に近い位置に設けられることが好ましい。 As claimed in claim 5,
The second damping portion (19) is preferably provided at a position closer to the diaphragm (12) than the center (14c) of the pressure transmission member (14) in the axial direction of the pressure transmission member (14).

本発明の作用効果は、請求項２に記載の発明の作用効果と同じであるので、その記載を省略する。 Since the effect of this invention is the same as the effect of the invention of Claim 2, the description is abbreviate | omitted.

請求項６に記載のように、
粘性部材（１６）は、第２凸部（１９ａ）及び／又は第２凹部（１９ｂ）の複数と接触すると良い。 As claimed in claim 6,
The viscous member (16) may be in contact with a plurality of second convex portions (19a) and / or second concave portions (19b).

本発明の作用効果は、請求項３に記載の発明の作用効果と同じであるので、その記載を省略する。 Since the effect of this invention is the same as the effect of the invention of Claim 3, the description is abbreviate | omitted.

請求項７に記載のように、粘性部材（１６）は、圧力伝達部材（１４）に一体成形された構成としても良い。これによれば、圧力伝達部材（１４）と別体である構成に較べて、粘性部材（１６）の組み付けを容易にすることができる。 As described in claim 7, the viscous member (16) may be integrally formed with the pressure transmission member (14). According to this, assembling of the viscous member (16) can be facilitated as compared with a configuration that is separate from the pressure transmission member (14).

また、請求項８に記載のように、粘性部材（１６）として、周方向に沿って圧力伝達部材（１４）に取り付けられるＯリングを採用しても良いし、請求項９に記載のように、液体を採用しても良い。 Further, as described in claim 8, an O-ring attached to the pressure transmission member (14) along the circumferential direction may be adopted as the viscous member (16), or as described in claim 9. A liquid may be used.

第１実施形態に係る燃焼圧センサの概略構成を示す断面図である。It is sectional drawing which shows schematic structure of the combustion pressure sensor which concerns on 1st Embodiment. 図１に示す燃焼圧センサにおいて、圧力伝達部材周辺を拡大した断面図である。FIG. 2 is an enlarged cross-sectional view of the periphery of a pressure transmission member in the combustion pressure sensor shown in FIG. 1. 圧力伝達部材のスライドと粘性抵抗を示す拡大断面図である。It is an expanded sectional view which shows the slide and viscous resistance of a pressure transmission member. 変形例を示す断面図である。It is sectional drawing which shows a modification. 変形例を示す断面図である。It is sectional drawing which shows a modification. 変形例を示す断面図である。It is sectional drawing which shows a modification. 変形例を示す断面図である。It is sectional drawing which shows a modification. 第２実施形態に係る燃焼圧センサにおいて、圧力伝達部材周辺を拡大した断面図である。In the combustion pressure sensor which concerns on 2nd Embodiment, it is sectional drawing to which the pressure transmission member periphery was expanded.

以下、本発明の実施の形態を、図面を参照して説明する。なお、以下の各図相互において互いに同一もしくは均等である部分に、同一符号を付与する。 Hereinafter, embodiments of the present invention will be described with reference to the drawings. In addition, the same code | symbol is provided to the part which is mutually the same or equivalent in each figure below.

（第１実施形態）
図１に示す燃焼圧センサ１０は、内燃機関として例えば図示しない自動車のエンジンに取り付けられ、該エンジンの燃焼室内の圧力（所謂燃焼圧）を検出するものである。 (First embodiment)
A combustion pressure sensor 10 shown in FIG. 1 is attached to, for example, an automobile engine (not shown) as an internal combustion engine, and detects a pressure in a combustion chamber of the engine (so-called combustion pressure).

この燃焼圧センサ１０は、本実施形態に係る特徴部分として、ハウジング１１、該ハウジング１１の一端に設けられた受圧用のダイアフラム１２、ハウジング１１の他端に固定された圧力検出部としてのセンサチップ１３、ハウジング１１に収容され、表面に第１減衰部１５を有する圧力伝達部材１４、及び同じくハウジング１１に収容された粘性部材１６を備える。以下、上記特徴部分を含む燃焼圧センサ１０全体の構成について説明する。 The combustion pressure sensor 10 includes a housing 11, a pressure receiving diaphragm 12 provided at one end of the housing 11, and a sensor chip as a pressure detection unit fixed to the other end of the housing 11 as characteristic portions according to the present embodiment. 13, the pressure transmission member 14 which is accommodated in the housing 11 and has the 1st attenuation | damping part 15 on the surface, and the viscous member 16 similarly accommodated in the housing 11. Hereinafter, the overall configuration of the combustion pressure sensor 10 including the above-described features will be described.

図１に示すケース２０は、配線基板３０や、該配線基板３０とセンサチップ１３を接続する配線部材３２などを収容するとともに、上記ハウジング１１と後述するコネクタ４０とを連結する機能を果たすものである。 A case 20 shown in FIG. 1 accommodates a wiring board 30, a wiring member 32 for connecting the wiring board 30 and the sensor chip 13, and the like, and functions to connect the housing 11 and a connector 40 described later. is there.

このケース２０は、ステンレス材料（例えばＳＵＳ４３０、ＳＵＳ６３０、ＳＵＳ３０４）などの金属材料からなり、両端が開口する筒状をなしている。また、拡径部２１と、拡径部２１よりハウジング１１側の部分であって拡径部２１より内径及び外径が縮径された縮径部２２を有する。 The case 20 is made of a metal material such as a stainless material (for example, SUS430, SUS630, SUS304), and has a cylindrical shape with both ends opened. Further, it has an enlarged diameter portion 21 and a reduced diameter portion 22 which is a portion closer to the housing 11 than the enlarged diameter portion 21 and whose inner diameter and outer diameter are reduced from the enlarged diameter portion 21.

拡径部２１には、配線基板３０が収容されている。この配線基板３０は、セラミックスなどの耐熱性を有する基材に配線部を設けてなる。配線基板３０は、図１に示すように、その周縁部がケース２０（拡径部２１）の内面に例えば接着固定されることで、拡径部２１における縮径部２２側の開口端部を覆うように設けられている。配線基板３０の一面には、ＩＣチップなどの電子部品３１が実装されている。本実施形態では、この電子部品３１に、センサチップ１３からの出力を増幅したり調整したりするための回路が形成されている。 A wiring board 30 is accommodated in the enlarged diameter portion 21. The wiring board 30 is formed by providing a wiring portion on a heat-resistant base material such as ceramics. As shown in FIG. 1, the peripheral edge of the wiring board 30 is bonded and fixed to the inner surface of the case 20 (the enlarged diameter portion 21), for example, so that the opening end portion on the reduced diameter portion 22 side of the enlarged diameter portion 21 is formed. It is provided to cover. An electronic component 31 such as an IC chip is mounted on one surface of the wiring board 30. In the present embodiment, a circuit for amplifying and adjusting the output from the sensor chip 13 is formed in the electronic component 31.

縮径部２２には、配線部材３２が配置されている。この配線部材３２としては、リードやフレキシブルプリント基板（ＦＰＣ）などを採用することができる。配線部材３２は、図１に示すように、拡径部２１まで延設されて一方の端部３２ａが配線基板３０に接続されており、他方の端部３２ｂがセンサチップ１３に接続されている。すなわち、配線部材３２は、縮径部２２のほぼ全域に配置されている。また、縮径部２２の筒内であって、拡径部２１と反対の開口端部付近には、ハウジング１１の底部１１ｂ及びセンサチップ１３が収容されている。 A wiring member 32 is disposed in the reduced diameter portion 22. As this wiring member 32, a lead, a flexible printed circuit board (FPC), etc. are employable. As shown in FIG. 1, the wiring member 32 extends to the enlarged diameter portion 21, one end 32 a is connected to the wiring substrate 30, and the other end 32 b is connected to the sensor chip 13. . In other words, the wiring member 32 is disposed in almost the entire area of the reduced diameter portion 22. Further, the bottom 11b of the housing 11 and the sensor chip 13 are accommodated in the cylinder of the reduced diameter portion 22 and in the vicinity of the opening end opposite to the enlarged diameter portion 21.

また、縮径部２２の外周面には、エンジンの取付穴に対して燃焼圧センサ１０を固定するための取付部となる螺子部２４が形成されている。 Further, on the outer peripheral surface of the reduced diameter portion 22, a screw portion 24 is formed as an attachment portion for fixing the combustion pressure sensor 10 to the engine attachment hole.

一方、拡径部２１における縮径部２２と反対の開口端部には、コネクタ４０が接続されている。具体的には、拡径部２１の後端２３にコネクタ４０の一部が収容された状態で、拡径部２１の後端２３（ケース２０のセンサチップ１３と反対側の開口端部）がかしめられ、ケース２０にコネクタ４０が固定されている。 On the other hand, a connector 40 is connected to the open end of the enlarged diameter portion 21 opposite to the reduced diameter portion 22. Specifically, the rear end 23 (opening end portion of the case 20 opposite to the sensor chip 13) is in a state where a part of the connector 40 is accommodated in the rear end 23 of the enlarged diameter portion 21. The connector 40 is fixed to the case 20 by caulking.

このコネクタ４０は、ＰＰＳ（ポリフェニレンスルフィド）等の耐熱性を有する樹脂からなる絶縁ハウジング４１と、該絶縁ハウジング４１にインサート成形などにより一体的に保持されたターミナル４２（端子）を有する。ターミナル４２の一端は、外部との電気的な接続部として絶縁ハウジング４１の開口部４３内に突出しており、他端はバネ部材４４を介したバネ接触により、配線基板３０と電気的に接続されている。 The connector 40 has an insulating housing 41 made of a heat-resistant resin such as PPS (polyphenylene sulfide) and a terminal 42 (terminal) integrally held by the insulating housing 41 by insert molding or the like. One end of the terminal 42 protrudes into the opening 43 of the insulating housing 41 as an electrical connection with the outside, and the other end is electrically connected to the wiring board 30 by spring contact via the spring member 44. ing.

ケース２０（縮径部２２）の先端には、ハウジング１１が設けられている。このハウジング１１は、ケース２０と反対の端部１１ａが開口するとともに、ケース２０側の端部は底部１１ｂにより閉塞されている。すなわち、中空部を有し、一端のみが開口された有底筒状をなしている。また、ハウジング１１は、第１ハウジング部材１７及び第２ハウジング部材１８を接合してなる。 A housing 11 is provided at the tip of the case 20 (the reduced diameter portion 22). The housing 11 has an end 11a opposite to the case 20 opened, and an end on the case 20 side is closed by a bottom 11b. That is, it has a bottomed cylindrical shape having a hollow portion and having only one end opened. The housing 11 is formed by joining a first housing member 17 and a second housing member 18.

第１ハウジング部材１７は、ステンレス（例えばＳＵＳ６３０）などの金属材料からなり、両端が開口した円筒形状をなしている。そして、一方の開口端部が、ハウジング１１の端部１１ａ（開口端部１１ａ）をなしており、この開口端部１１ａには、ハウジング１１の中空部を閉塞するようにダイアフラム１２が接合されている。 The 1st housing member 17 consists of metal materials, such as stainless steel (for example, SUS630), and has comprised the cylindrical shape which the both ends opened. One opening end portion forms an end portion 11a (opening end portion 11a) of the housing 11, and a diaphragm 12 is joined to the opening end portion 11a so as to close the hollow portion of the housing 11. Yes.

第２ハウジング部材１８は、所謂金属ステムと呼ばれるもので、ステンレス（例えばＳＵＳ６３０）などの金属材料からなり、有底円筒状をなしている。この第２ハウジング部材１８は、第１ハウジング部材１７側の端部が開口しており、ケース２０側の端部が閉塞されて、ハウジング１１の底部１１ｂをなしている。この底部１１ｂの少なくとも一部は、圧力伝達部材１４のスライドに応じて歪可能なように、図示しない薄肉状の歪み部となっている。 The second housing member 18 is a so-called metal stem, is made of a metal material such as stainless steel (for example, SUS630), and has a bottomed cylindrical shape. The end of the second housing member 18 on the first housing member 17 side is open, and the end of the case 20 side is closed to form the bottom 11 b of the housing 11. At least a part of the bottom portion 11b is a thin-shaped strained portion (not shown) so that it can be distorted according to the slide of the pressure transmission member 14.

そして、２つのハウジング部材１７，１８は、開口端部が向き合い、互いに重なるように配置され、外周全周が例えば溶接により接合されている。ハウジング１１において、２つのハウジング部材１７，１８の中空部は連通している。また、円筒形状の第１ハウジング部材１７の内面と、有底円筒状の第２ハウジング部材１８の筒部内面とが面一に連結され、円筒状の内面１１ｃをなしている。 The two housing members 17 and 18 are arranged so that the opening end portions face each other and overlap each other, and the entire outer periphery is joined by welding, for example. In the housing 11, the hollow portions of the two housing members 17 and 18 communicate with each other. In addition, the inner surface of the cylindrical first housing member 17 and the inner surface of the cylindrical portion of the bottomed cylindrical second housing member 18 are coupled to form a cylindrical inner surface 11c.

また、第２ハウジング部材１８は、底部１１ｂから一部の範囲の部分が、図２に示すように、ケース２０の筒内に挿入配置されており、ケース２０の開口端部に係止する部分の外周全周が例えば溶接により接合されている。このように、底部１１ｂはケース２０の筒内に収容されている。 Further, the second housing member 18 has a portion in a range from the bottom portion 11b inserted and arranged in the cylinder of the case 20 as shown in FIG. The entire outer periphery of each is joined by welding, for example. As described above, the bottom portion 11 b is accommodated in the cylinder of the case 20.

なお、図１及び図２に示す符号１８ａは、第２ハウジング部材１８におけるフランジ部である。このフランジ部１８ａの外周面は、開口端部１１ａから底部１１ｂの方向に拡径するテーパ面となっている。このため、燃焼圧センサ１０をエンジンの取付穴に対して固定する際に、フランジ部１８ａの外周面と取付穴の内面が密着し、シールされるようになっている。 Reference numeral 18 a shown in FIGS. 1 and 2 is a flange portion in the second housing member 18. The outer peripheral surface of the flange portion 18a is a tapered surface that expands in the direction from the opening end portion 11a to the bottom portion 11b. For this reason, when the combustion pressure sensor 10 is fixed to the mounting hole of the engine, the outer peripheral surface of the flange portion 18a and the inner surface of the mounting hole are brought into close contact and sealed.

ダイアフラム１２は、燃焼圧が直接的に作用する部分である。このダイアフラム１２は、ステンレス材料（例えばＳＵＳ６３０）等の金属材料からなり、円板状に形成されている。そして、その周縁部が、ハウジング１１（第１ハウジング部材１７）の開口端部１１ａに対向配置され、外周全周が例えば溶接により接合されている。これにより、ハウジング１１の中空部が、ダイアフラム１２により密閉されている。また、ダイアフラム１２は、周縁部に囲まれた中央部における燃焼室側の面を受圧面とし、燃焼圧がこの受圧面に印加されることで中央部が歪むように構成されている。 The diaphragm 12 is a portion where the combustion pressure directly acts. The diaphragm 12 is made of a metal material such as a stainless material (for example, SUS630) and is formed in a disk shape. And the peripheral part is opposingly arranged by the opening end part 11a of the housing 11 (1st housing member 17), and the outer periphery perimeter is joined by welding, for example. Thereby, the hollow part of the housing 11 is sealed with the diaphragm 12. Further, the diaphragm 12 is configured such that the surface on the combustion chamber side in the central portion surrounded by the peripheral edge portion is a pressure receiving surface, and the central portion is distorted when the combustion pressure is applied to the pressure receiving surface.

センサチップ１３は、ハウジング１１の底部１１ｂにおいて、ハウジング１１中空部と反対の外面に、低融点ガラスなどの接着剤を介して貼り付けられている。このセンサチップ１３は、半導体基板に歪ゲージのような感歪素子が形成されてなるものである。また、上記したように、ハウジング１１の底部１１ｂとともに、ケース２０の筒内に収容されている。 The sensor chip 13 is attached to the outer surface opposite to the hollow portion of the housing 11 at the bottom 11b of the housing 11 with an adhesive such as low melting point glass. The sensor chip 13 is formed by forming a strain sensitive element such as a strain gauge on a semiconductor substrate. Further, as described above, the housing 11 is housed in the cylinder of the case 20 together with the bottom 11 b of the housing 11.

圧力伝達部材１４は、所謂ロッドと呼ばれるもので、ステンレスなどの金属やセラミックスなどの、耐熱性を有しつつ硬い材料を用いて形成されてなり、ダイアフラム１２と底部１１ｂの並び方向、換言すればハウジング１１の筒の延伸方向に沿って延びる棒状をなしている。そして、ダイアフラム１２とハウジング１１（第２ハウジング部材１８）の底部１１ｂとの間に挟まれて配置されている。また、圧力伝達部材１４は、ダイアフラム１２及び底部１１ｂとそれぞれ荷重を与えた状態で接触している。このため、燃焼圧の大きさに応じてダイアフラム１２が歪む（撓む）と、その歪による応力が圧力伝達部材１４に伝わり、それがさらにハウジング１１の底部１１ｂに伝えられる。これにより、底部１１ｂが歪んでその歪による応力がセンサチップ１３に伝えられ、センサチップ１３が有する感歪素子の抵抗値が変化するようになっている。 The pressure transmission member 14 is a so-called rod and is formed using a heat-resistant and hard material such as a metal such as stainless steel or ceramics. In other words, the direction in which the diaphragm 12 and the bottom portion 11b are arranged. It has a rod shape extending along the extending direction of the cylinder of the housing 11. And it is arranged between the diaphragm 12 and the bottom 11b of the housing 11 (second housing member 18). Further, the pressure transmission member 14 is in contact with the diaphragm 12 and the bottom portion 11b in a state where a load is applied thereto. For this reason, when the diaphragm 12 is distorted (bent) in accordance with the magnitude of the combustion pressure, the stress due to the distortion is transmitted to the pressure transmission member 14, which is further transmitted to the bottom 11 b of the housing 11. As a result, the bottom 11b is distorted, and the stress due to the distortion is transmitted to the sensor chip 13, so that the resistance value of the strain sensitive element of the sensor chip 13 changes.

本実施形態では、このような圧力伝達部材１４の表面に、第１凸部１５ａ及び第１凹部１５ｂの少なくとも一方からなる第１減衰部１５が設けられている。本実施形態では、図２及び図３に示すように、第１減衰部１５として、第１凸部１５ａ及び第１凹部１５ｂの両方をそれぞれ複数有している。また、圧力伝達部材１４の軸方向（延伸方向）において、第１凸部１５ａと第１凹部１５ｂが、交互且つ連続的に設けられている。また、第１減衰部１５は、圧力伝達部材１４の軸方向において、圧力伝達部材１４の中心（図２の破線参照）よりもダイアフラム１２に近い領域に設けられている。本実施形態では、ハウジング１１の開口端部１１ａよりも若干底部１１ｂに近い位置から、上記中心付近までの領域に設けられている。さらに、第１凸部１５ａ及び第１凹部１５ｂは、図２及び図３に示すように、いずれの表面もＶ字形状となっている。 In the present embodiment, the first damping portion 15 including at least one of the first convex portion 15 a and the first concave portion 15 b is provided on the surface of the pressure transmission member 14. In this embodiment, as shown in FIG.2 and FIG.3, as the 1st attenuation | damping part 15, both the 1st convex part 15a and the 1st recessed part 15b are provided with two or more, respectively. Further, in the axial direction (stretching direction) of the pressure transmission member 14, the first convex portions 15a and the first concave portions 15b are provided alternately and continuously. The first damping portion 15 is provided in a region closer to the diaphragm 12 than the center of the pressure transmission member 14 (see the broken line in FIG. 2) in the axial direction of the pressure transmission member 14. In the present embodiment, the housing 11 is provided in a region from a position slightly closer to the bottom portion 11b than the opening end portion 11a to the vicinity of the center. Further, as shown in FIGS. 2 and 3, the first convex portion 15a and the first concave portion 15b are V-shaped on both surfaces.

粘性部材１６は、空気よりも粘性係数の大きい材料からなる。このような粘性部材１６としては、ハウジング１１及び圧力伝達部材１４よりもヤング率の低い材料（軟らかい材料）、具体的にはゲル、樹脂、ゴム、液体を採用することができる。例えばゲルとしては、シリコーンゲルやフッ素ゲル、フルオロシリコーンゲルなどを採用することができる。また、樹脂としては、シリコーン樹脂、エポキシ樹脂などを採用することができる。また、ゴムとしては、シリコーンゴム、フッ素ゴムなどを採用できる。さらには、液体としては、シリコーンオイルやフッ素オイルなどのオイルを採用することができる。本実施形態では、樹脂からなる粘性部材１６を採用している。 The viscous member 16 is made of a material having a viscosity coefficient larger than that of air. As such a viscous member 16, a material (soft material) having a lower Young's modulus than the housing 11 and the pressure transmission member 14, specifically, gel, resin, rubber, or liquid can be employed. For example, as the gel, silicone gel, fluorine gel, fluorosilicone gel, or the like can be employed. As the resin, a silicone resin, an epoxy resin, or the like can be used. Moreover, silicone rubber, fluororubber, etc. are employable as rubber. Furthermore, oil such as silicone oil or fluorine oil can be used as the liquid. In the present embodiment, a viscous member 16 made of resin is employed.

また、粘性部材１６は、ハウジング１１に収容されるとともに、圧力伝達部材１４における少なくとも第１減衰部１５の表面と、ハウジング１１の内面１１ｃとの両方に接触するように配置されている。本実施形態では、粘性部材１６が第１凸部１５ａ及び第１凹部１５ｂの全てと接触するように、ハウジング１１の開口端部１１ａよりも若干底部１１ｂに近い位置から、上記した圧力伝達部材１４の中心よりも若干底部１１ｂに近い位置までの範囲において、圧力伝達部材１４の全周を被覆するように設けられている。 Further, the viscous member 16 is accommodated in the housing 11 and is disposed so as to contact at least the surface of the first attenuation portion 15 and the inner surface 11 c of the housing 11 in the pressure transmission member 14. In the present embodiment, the pressure transmission member 14 described above from a position slightly closer to the bottom portion 11b than the opening end portion 11a of the housing 11 so that the viscous member 16 contacts all of the first convex portion 15a and the first concave portion 15b. It is provided so as to cover the entire circumference of the pressure transmission member 14 in a range up to a position slightly closer to the bottom 11b than the center of.

また、本実施形態では、図２に示すように、粘性部材１６が圧力伝達部材１４に一体成形されている。このような粘性部材１６が一体化した圧力伝達部材１４は、樹脂やゴムとともに圧力伝達部材１４を図示しない金型にて成形することにより作製される。 In the present embodiment, the viscous member 16 is integrally formed with the pressure transmission member 14 as shown in FIG. The pressure transmission member 14 in which such a viscous member 16 is integrated is manufactured by molding the pressure transmission member 14 together with resin and rubber using a mold (not shown).

このように構成される燃焼圧センサ１０は、ターミナル４２を介して配線基板３０及びセンサチップ１３に電力が供給され、作動する。そして、ダイアフラム１２が受けた燃焼圧に応じてセンサチップ１３から信号が出力されると、その信号が配線部材３２を介して配線基板３０の電子部品３１（ＩＣチップ）に伝えられる。そして、電子部品３１に構成された処理回路によって信号処理が行われた後、その信号がターミナル４２を通じて外部に出力される。このように、外部に対して燃焼圧に応じた信号を伝えることができる。 The combustion pressure sensor 10 configured as described above operates when electric power is supplied to the wiring board 30 and the sensor chip 13 via the terminal 42. When a signal is output from the sensor chip 13 according to the combustion pressure received by the diaphragm 12, the signal is transmitted to the electronic component 31 (IC chip) of the wiring board 30 via the wiring member 32. Then, after signal processing is performed by the processing circuit configured in the electronic component 31, the signal is output to the outside through the terminal 42. In this way, a signal corresponding to the combustion pressure can be transmitted to the outside.

次に、上記した燃焼圧センサ１０の製造方法について簡単に説明する。 Next, a method for manufacturing the combustion pressure sensor 10 will be briefly described.

まず、圧力伝達部材１４及び粘性部材１６が収容され、開口端部１１ａがダイアフラム１２により閉塞されたハウジング１１を準備する。上記したように、第１減衰部１５を有する圧力伝達部材１４をインサート部品として、粘性部材１６を金型により成形することで、粘性部材１６が一体化した圧力伝達部材１４を形成する。 First, the housing 11 in which the pressure transmission member 14 and the viscous member 16 are accommodated and the opening end portion 11a is closed by the diaphragm 12 is prepared. As described above, the pressure transmission member 14 having the first damping portion 15 is used as an insert component, and the viscous member 16 is molded by a mold, thereby forming the pressure transmission member 14 in which the viscous member 16 is integrated.

また、第２ハウジング部材１８の底部１１ｂの外面にガラス接合などによりセンサチップ１３を接合し、第２ハウジング部材１８とセンサチップ１３を一体化する。また、第１ハウジング部材１７とダイアフラム１２とを、ロウ付けや溶接などによって接合固定し、一体化する。 Further, the sensor chip 13 is joined to the outer surface of the bottom 11b of the second housing member 18 by glass joining or the like, and the second housing member 18 and the sensor chip 13 are integrated. In addition, the first housing member 17 and the diaphragm 12 are joined and fixed by brazing, welding, or the like to be integrated.

そして、センサチップ１３とダイアフラム１２との間に、粘性部材１６が一体化した圧力伝達部材１４を介在させ、ダイアフラム１２から圧力伝達部材１４を介して底部１１ｂへ荷重を与えた状態で、第１ハウジング部材１７と第２ハウジング部材１８を溶接して接合する。以上により、圧力伝達部材１４及び粘性部材１６が収容され、開口端部１１ａがダイアフラム１２により閉塞されたハウジング１１が形成される。 Then, the pressure transmission member 14 in which the viscous member 16 is integrated is interposed between the sensor chip 13 and the diaphragm 12, and a load is applied from the diaphragm 12 to the bottom portion 11 b via the pressure transmission member 14. The housing member 17 and the second housing member 18 are joined by welding. As described above, the housing 11 in which the pressure transmission member 14 and the viscous member 16 are accommodated and the opening end portion 11a is closed by the diaphragm 12 is formed.

次いで、ハウジング１１に搭載されたセンサチップ１３に対して、配線部材３２の一方の端部３２ｂを、はんだなどを介して接続する。そして、配線部材３２を、他方の端部３２ａを先頭として、ケース２０の縮径部２２の開口端部から挿入し、配線部材３２の端部３２ａをケース２０の拡径部２１まで引き出す。また、ハウジング１１（第２ハウジング部材１８）とケース２０（縮径部２２）とを、溶接などにより接合する。 Next, one end 32b of the wiring member 32 is connected to the sensor chip 13 mounted on the housing 11 via solder or the like. Then, the wiring member 32 is inserted from the opening end portion of the reduced diameter portion 22 of the case 20 with the other end portion 32a as the head, and the end portion 32a of the wiring member 32 is pulled out to the enlarged diameter portion 21 of the case 20. Further, the housing 11 (second housing member 18) and the case 20 (reduced diameter portion 22) are joined by welding or the like.

次いで、配線部材３２の端部３２ａと電子部品３１が実装された配線基板３０とを、はんだなどを介して接続する。そして、配線基板３０をケース２０の拡径部２１に固定する。その後、コネクタ４０をケース２０の後端２３の開口内に挿入するとともに、ターミナル４２と配線基板３０とを、バネ部材４４を介して電気的に接続する。 Next, the end 32a of the wiring member 32 and the wiring board 30 on which the electronic component 31 is mounted are connected via solder or the like. Then, the wiring board 30 is fixed to the enlarged diameter portion 21 of the case 20. Thereafter, the connector 40 is inserted into the opening of the rear end 23 of the case 20, and the terminal 42 and the wiring board 30 are electrically connected via the spring member 44.

次に、ケース２０の後端２３を、コネクタ４０のケース２０側端部（フランジ部）に対して折り曲げるようにかしめ、コネクタ４０とケース２０とを固定する。以上により、図１に示す燃焼圧センサ１０を得ることができる。 Next, the rear end 23 of the case 20 is caulked so as to be bent with respect to the end portion (flange portion) of the connector 40, and the connector 40 and the case 20 are fixed. Thus, the combustion pressure sensor 10 shown in FIG. 1 can be obtained.

次に、上記した燃焼圧センサ１０の特徴部分の効果について説明する。 Next, the effect of the characteristic part of the above-described combustion pressure sensor 10 will be described.

本実施形態では、粘性部材１６を、ハウジング１１内に収容するとともに、圧力伝達部材１４における第１減衰部１５の表面とハウジング１１の内面１１ｃとの両方に接触させている。このため、燃焼圧を受けてダイアフラム１２が歪み、この歪により、図３に示すように圧力伝達部材１４が軸方向においてセンサチップ１３側にスライドする際、圧力伝達部材１４は、粘性部材１６による抵抗力、所謂粘性抵抗を被る。この粘性抵抗は、図３に示すように、圧力伝達部材１４のスライド方向と反対の方向に作用する。 In the present embodiment, the viscous member 16 is housed in the housing 11 and is in contact with both the surface of the first damping portion 15 and the inner surface 11 c of the housing 11 in the pressure transmission member 14. For this reason, the diaphragm 12 is distorted due to the combustion pressure, and when the pressure transmission member 14 slides toward the sensor chip 13 in the axial direction as shown in FIG. It suffers resistance, so-called viscous resistance. This viscous resistance acts in a direction opposite to the sliding direction of the pressure transmission member 14 as shown in FIG.

ここで、粘性抵抗は、粘性係数（粘性率とも言う）に比例する。このため、粘性係数が大きいほど粘性抵抗は大きくなり、運動中の物体は大きな抵抗力を受ける。これに対し、本実施形態では、空気よりも粘性係数の大きい材料からなる粘性部材１６を用いる。このため、粘性部材１６を配置しない構成、すなわち従来のように圧力伝達部材１４とハウジング１１の内面１１ｃとの間に空気が介在する構成に較べて、圧力伝達部材１４が受ける粘性抵抗を大きくすることができる。 Here, the viscous resistance is proportional to the viscosity coefficient (also referred to as viscosity). For this reason, the viscosity resistance increases as the viscosity coefficient increases, and the moving object receives a greater resistance force. On the other hand, in this embodiment, the viscous member 16 made of a material having a larger viscosity coefficient than air is used. For this reason, compared with the structure which does not arrange the viscous member 16, ie, the structure where air is interposed between the pressure transmission member 14 and the inner surface 11c of the housing 11 as in the prior art, the viscous resistance received by the pressure transmission member 14 is increased. be able to.

また、粘性抵抗は、粘性部材１６と接触する物体の形状にも依存する。具体的には、平面に較べて、凸部や凹部を有する構成のほうが、粘性部材１６との接触面積が大きくなり、粘性抵抗が大きくなる。これに対し、本実施形態では、圧力伝達部材１４の表面に第１減衰部１５を設け、この第１減衰部１５に粘性部材１６が接触するようにしている。このため、圧力伝達部材１４における粘性部材１６との接触面を平面とする構成に較べて、圧力伝達部材１４が粘性部材１６から受ける粘性抵抗を大きくすることができる。 The viscous resistance also depends on the shape of the object that contacts the viscous member 16. Specifically, compared to a flat surface, the configuration having convex portions and concave portions increases the contact area with the viscous member 16 and increases the viscous resistance. On the other hand, in this embodiment, the 1st damping part 15 is provided in the surface of the pressure transmission member 14, and the viscous member 16 contacts the 1st damping part 15. FIG. For this reason, compared with the structure which makes the contact surface with the viscous member 16 in the pressure transmission member 14 a plane, the viscous resistance which the pressure transmission member 14 receives from the viscous member 16 can be enlarged.

また、粘性抵抗は、物体の動く速度に比例する。このため、周波数が高いほど、運動中の物体は大きな抵抗を受ける。したがって、ダイアフラム１２に印加される燃焼圧は、５０ｋＨｚ未満の低周波成分から５０ｋＨｚ以上の高周波成分までを含むが、圧力伝達部材１４の軸方向の振動のうち、高周波成分のほうが粘性抵抗が大きくなる。 The viscous resistance is proportional to the moving speed of the object. For this reason, the higher the frequency, the greater the resistance of the moving object. Therefore, the combustion pressure applied to the diaphragm 12 includes a low-frequency component of less than 50 kHz to a high-frequency component of 50 kHz or more. Among the vibrations in the axial direction of the pressure transmission member 14, the high-frequency component has a higher viscous resistance. .

以上から、本実施形態によれば、ダイアフラム１２に印加される燃焼圧のうち、５０ｋＨｚ以上の高周波成分を、５０ｋＨｚ未満の低周波成分に較べて、粘性抵抗により効率よく減衰させることができる。そして、これにより、圧力伝達部材１４を伝播する高周波成分を低減し、ひいてはセンサチップ１３の受けるダメージを抑制することができる。また、センサチップ１３のダメージを抑制するために、センサチップ１３自体の耐圧を高めなくとも良いため、センサチップ１３の感度低下を抑制することもできる。なお、燃焼圧のうち、低周波成分については、高周波成分ほど減衰されないため、センサチップ１３は、燃焼圧のうち、主として低周波成分を検出することとなる。 As described above, according to the present embodiment, the high frequency component of 50 kHz or more in the combustion pressure applied to the diaphragm 12 can be efficiently attenuated by the viscous resistance as compared with the low frequency component of less than 50 kHz. And thereby, the high frequency component which propagates the pressure transmission member 14 can be reduced, and the damage which the sensor chip 13 receives can be suppressed by extension. Further, since it is not necessary to increase the pressure resistance of the sensor chip 13 in order to suppress damage to the sensor chip 13, it is possible to suppress a decrease in sensitivity of the sensor chip 13. Of the combustion pressure, the low frequency component is not attenuated as much as the high frequency component, so the sensor chip 13 mainly detects the low frequency component of the combustion pressure.

また、本実施形態では、第１減衰部１５が、圧力伝達部材１４の軸方向において、圧力伝達部材１４の中心（図２に示す破線位置）よりもダイアフラム１２に近い位置に設けられている。このため、圧力伝達部材１４をスライド（変位）させるエネルギーの高い位置で、粘性抵抗により高周波成分をより効率よく減衰させることができる。 Further, in the present embodiment, the first attenuation portion 15 is provided at a position closer to the diaphragm 12 than the center of the pressure transmission member 14 (a broken line position shown in FIG. 2) in the axial direction of the pressure transmission member 14. For this reason, the high frequency component can be attenuated more efficiently by the viscous resistance at a position where the energy to slide (displace) the pressure transmission member 14 is high.

また、本実施形態では、粘性部材１６が、第１凸部１５ａ及び／又は第１凹部１５ｂの複数と接触する。すなわち、粘性部材１６の接触対象が、第１凸部１５ａを複数、第１凹部１５ｂを複数、第１凸部１５ａと第１凹部１５ｂを合わせて複数、のいずれかとなっている。このため、第１凸部１５ａ及び第１凹部１５ｂのいずれか１つのみと接触する構成に較べて、粘性部材１６との接触面積を大きくする効果が高まり、高周波成分をより効率よく減衰させることができる。 In the present embodiment, the viscous member 16 comes into contact with a plurality of first convex portions 15a and / or first concave portions 15b. That is, the contact target of the viscous member 16 is one of a plurality of first convex portions 15a, a plurality of first concave portions 15b, and a plurality of first convex portions 15a and first concave portions 15b. For this reason, compared with the structure which contacts only any one of the 1st convex part 15a and the 1st recessed part 15b, the effect which enlarges the contact area with the viscous member 16 increases, and attenuates a high frequency component more efficiently. Can do.

また、本実施形態では、粘性部材１６が圧力伝達部材１４に一体成形されている。このため、圧力伝達部材１４と別体である構成に較べて、ハウジング１１への粘性部材１６の組み付けを容易にすることができる。 In the present embodiment, the viscous member 16 is integrally formed with the pressure transmission member 14. For this reason, it is possible to facilitate the assembly of the viscous member 16 to the housing 11 as compared with a configuration separate from the pressure transmission member 14.

（変形例）
上記例では、第１減衰部１５を、軸方向において圧力伝達部材１４の一部、より詳しくは、ハウジング１１の開口端部１１ａよりも若干底部１１ｂに近い位置から、上記中心付近までの領域に設けられる例を示した。しかしながら、第１減衰部１５の形成位置は、上記例に限定されるものではない。また、粘性部材１６と接触する第１凸部１５ａ及び第１凹部１５ｂの個数も、上記例に限定されるものではない。 (Modification)
In the above example, the first damping portion 15 is arranged in a region from a part of the pressure transmission member 14 in the axial direction, more specifically, a position slightly closer to the bottom portion 11b than the opening end portion 11a of the housing 11 to the vicinity of the center. The example provided is shown. However, the formation position of the first attenuation portion 15 is not limited to the above example. Further, the number of the first convex portions 15a and the first concave portions 15b that are in contact with the viscous member 16 is not limited to the above example.

例えば図４に示すように、圧力伝達部材１４の一端から他端にわたって第１減衰部１５を設け、この第１減衰部１５全体に粘性部材１６が接触する構成としても良い。図４では、図２に示す構成と同一のピッチで、第１凸部１５ａ及び第１凹部１５ｂを設けており、粘性部材１６と接触する第１凸部１５ａ及び第１凹部１５ｂが増えている。このため、粘性抵抗をより大きくすることができる。 For example, as shown in FIG. 4, a first damping portion 15 may be provided from one end to the other end of the pressure transmission member 14, and the viscous member 16 may be in contact with the entire first damping portion 15. In FIG. 4, the 1st convex part 15a and the 1st recessed part 15b are provided with the same pitch as the structure shown in FIG. 2, and the 1st convex part 15a and the 1st recessed part 15b which contact the viscous member 16 are increasing. . For this reason, viscous resistance can be made larger.

また、上記例では、第１減衰部１５が、第１凸部１５ａと第１凹部１５ｂを有し、これら交互に連続して設けられてなる例を示した。しかしながら、第１減衰部１５は、第１凸部１５ａ及び第１凹部１５ｂを少なくとも１つ備えれば良い。例えば図５に示すように、粘性部材１６が１つの第１凸部１５ａと接触する構成としても良い。なお、図５に示す第１凸部１５ａに代えて、第１凹部１５ｂを採用することもできる。また、図６に示すように、複数の第１凹部１５ｂを有し、これら第１凹部１５ｂが粘性部材１６と接触する構成としても良い。なお、図６に示す第１凹部１５ｂに代えて、第１凸部１５ａを採用することもできる。さらには、図示しないが、第１凸部１５ａと第１凹部１５ｂを有しつつ、複数の第１凸部１５ａ又は複数の第１凹部１５ｂは軸方向において隣り合う構成を採用することもできる。 In the above example, the first attenuating portion 15 has the first convex portion 15a and the first concave portion 15b, and these are alternately and continuously provided. However, the 1st attenuation | damping part 15 should just be provided with the 1st convex part 15a and the 1st recessed part 15b. For example, as shown in FIG. 5, it is good also as a structure where the viscous member 16 contacts the 1st 1st convex part 15a. In addition, it can replace with the 1st convex part 15a shown in FIG. 5, and can also employ | adopt the 1st recessed part 15b. Moreover, as shown in FIG. 6, it is good also as a structure which has several 1st recessed part 15b and these 1st recessed parts 15b contact with the viscous member 16. As shown in FIG. In addition, it can replace with the 1st recessed part 15b shown in FIG. 6, and can also employ | adopt the 1st convex part 15a. Furthermore, although not shown in figure, the structure which has the 1st convex part 15a and the 1st recessed part 15b, and the some 1st convex part 15a or the some 1st recessed part 15b is adjacent in an axial direction can also be employ | adopted.

また、上記例では、第１凸部１５ａ及び第１凹部１５ｂの表面が、図２及び図３に示すように、いずれもＶ字形状である例を示した。しかしながら、その形状は特に限定されるものではない。例えば図５及び図６に示すようにコの字状としても良い。この場合、軸方向の幅及び高さ（又は深さ）を同じとすると、粘性部材１６との接触面積がＶ字形状よりも大きくなる。また、コの字の３片のうち、両端片が圧力伝達部材１４の軸方向（スライド方向）に対して直交している。したがって、Ｖ字形状よりも粘性抵抗大きくすることができる。 Moreover, in the said example, the surface of the 1st convex part 15a and the 1st recessed part 15b showed the example which all are V-shaped as shown in FIG.2 and FIG.3. However, the shape is not particularly limited. For example, as shown in FIG. 5 and FIG. In this case, if the axial width and height (or depth) are the same, the contact area with the viscous member 16 is larger than the V-shape. Further, of the three U-shaped pieces, both end pieces are orthogonal to the axial direction (sliding direction) of the pressure transmission member 14. Therefore, the viscous resistance can be made larger than that of the V shape.

また、上記例では、樹脂からなる粘性部材１６が、圧力伝達部材１４に一体成形される例を示した。しかしながら、粘性部材１６の構成材料及び形態は、上記例に限定されるものではない。上記したように、粘性部材１６の構成材料としては、耐熱性を有し、空気よりも粘性係数の大きい材料、例えばゲル、樹脂、ゴム、液体を採用することができる。例えば、上記図４においては、ハウジング１１に図示しない貫通孔が設けられ、この貫通孔を通じてハウジング１１の中空部に液体（オイル）からなる粘性部材１６が充填されている。また、貫通孔は、粘性部材１６の充填後、封止されている。なお、液体の場合、単独では所定位置に保持することが困難なため、図４に示すように、中空部（圧力伝達部材１４とハウジング１１の内面１１ｃとの間の隙間）を満たすように充填することが好ましい。しかしながら、多孔質且つヤング率の低い（軟らかい）基材に液体を染み込ませ、これをハウジング１１に収容するようにしても良い。 In the above example, the viscous member 16 made of resin is integrally formed with the pressure transmission member 14. However, the constituent material and form of the viscous member 16 are not limited to the above example. As described above, as the constituent material of the viscous member 16, a material having heat resistance and a viscosity coefficient larger than that of air, for example, gel, resin, rubber, or liquid can be employed. For example, in FIG. 4, a through hole (not shown) is provided in the housing 11, and the hollow member of the housing 11 is filled with a viscous member 16 made of liquid (oil) through the through hole. The through hole is sealed after the viscous member 16 is filled. In the case of liquid, it is difficult to hold it in a predetermined position by itself, so as shown in FIG. 4, it is filled so as to fill a hollow portion (a gap between the pressure transmission member 14 and the inner surface 11c of the housing 11). It is preferable to do. However, a liquid may be impregnated into a porous and low Young's modulus (soft) base material and accommodated in the housing 11.

また、図７に示すように、周方向に沿って圧力伝達部材１４に取り付けられるＯリングを粘性部材１６として採用することもできる。このＯリングは、シリコーン樹脂、エポキシ樹脂、シリコーンゴム、フッ素ゴムなどを環状に成形してなるものである。そして、圧力伝達部材１４が挿通されて、圧力伝達部材１４に固定されている。また、この固定状態で、ハウジング１１の内面１１ｃにも接触している。このため、粘性部材１６としてのＯリングにより、高周波成分を減衰させることができる。また、別体の粘性部材１６ではあるものの、圧力伝達部材１４を挿通させるだけで圧力伝達部材１４への固定および位置決めがなされるので、組み付け性にも優れている。 In addition, as shown in FIG. 7, an O-ring attached to the pressure transmission member 14 along the circumferential direction can be employed as the viscous member 16. This O-ring is formed by annularly molding a silicone resin, an epoxy resin, silicone rubber, fluorine rubber, or the like. The pressure transmission member 14 is inserted and fixed to the pressure transmission member 14. Further, in this fixed state, it is also in contact with the inner surface 11 c of the housing 11. For this reason, the high frequency component can be attenuated by the O-ring as the viscous member 16. In addition, although it is a separate viscous member 16, it can be fixed and positioned on the pressure transmission member 14 simply by inserting the pressure transmission member 14, so that it is excellent in assemblability.

特に図７に示す例では、第１凹部１５ｂ内に粘性部材１６であるＯリングを嵌め込んでいる。したがって、組み付け時の位置決めが容易である。また、粘性部材１６を圧力伝達部材１４の所定位置に保持しやすい。なお、図７では、粘性部材１６として、２つのＯリングを示したが、Ｏリングの個数は特に限定されるものではない。 In particular, in the example shown in FIG. 7, an O-ring that is the viscous member 16 is fitted into the first recess 15b. Therefore, positioning during assembly is easy. Further, the viscous member 16 can be easily held at a predetermined position of the pressure transmission member 14. In FIG. 7, two O-rings are shown as the viscous member 16, but the number of O-rings is not particularly limited.

（第２実施形態）
本実施形態では、第１実施形態（及びその変形例）に示した構成に加え、例えば図８に示すように、ハウジング１１の内面１１ｃにおける粘性部材１６との接触部分に、第２凸部１９ａ及び第２凹部１９ｂの少なくとも一方を有する第２減衰部１９が設けられている点を特徴とする。 (Second Embodiment)
In the present embodiment, in addition to the configuration shown in the first embodiment (and its modifications), for example, as shown in FIG. 8, the second convex portion 19 a is formed at the contact portion of the inner surface 11 c of the housing 11 with the viscous member 16. And the 2nd attenuation | damping part 19 which has at least one of the 2nd recessed part 19b is provided, It is characterized by the above-mentioned.

図８に示す圧力伝達部材１４は、第１実施形態（図２参照）と同じ構成となっている。すなわち、第１減衰部１５が、複数の第１凸部１５ａと複数の第１凹部１５ｂを有するとともに、第１凸部１５ａと第１凹部１５ｂを交互に連続して設けてなる。また、ハウジング１１の開口端部１１ａよりも若干底部１１ｂに近い位置から、圧力伝達部材１４の中心付近までの領域に設けられている。 The pressure transmission member 14 shown in FIG. 8 has the same configuration as that of the first embodiment (see FIG. 2). That is, the first attenuating portion 15 includes a plurality of first convex portions 15a and a plurality of first concave portions 15b, and the first convex portions 15a and the first concave portions 15b are alternately and continuously provided. Further, it is provided in a region from a position slightly closer to the bottom portion 11 b than the opening end portion 11 a of the housing 11 to the vicinity of the center of the pressure transmission member 14.

第２減衰部１９は、図８に示すように、第１減衰部１５に対応して設けられている。詳しくは、軸方向において、第１凸部１５ａに第２凹部１９ｂが対向し、第１凹部１５ｂに第２凸部１９ａが対向するように設けられている。すなわち、第２減衰部１９も、第１減衰部１５同様、複数の第２凸部１９ａと複数の第２凹部１９ｂを有するとともに、第２凸部１９ａと第２凹部１９ｂを交互に連続して設けてなる。また、ハウジング１１の開口端部１１ａよりも若干底部１１ｂに近い位置から、圧力伝達部材１４の中心付近までの領域に設けられている。 As shown in FIG. 8, the second attenuation unit 19 is provided corresponding to the first attenuation unit 15. Specifically, in the axial direction, the second concave portion 19b is opposed to the first convex portion 15a, and the second convex portion 19a is opposed to the first concave portion 15b. That is, the second attenuating portion 19 has a plurality of second convex portions 19a and a plurality of second concave portions 19b, as well as the first attenuating portion 15, and the second convex portions 19a and the second concave portions 19b are alternately and continuously arranged. It is provided. Further, it is provided in a region from a position slightly closer to the bottom portion 11 b than the opening end portion 11 a of the housing 11 to the vicinity of the center of the pressure transmission member 14.

そして、粘性部材１６が、第１減衰部１５を構成する第１凸部１５ａ及び第１凹部１５ｂ、第２減衰部１９を構成する第２凸部１９ａ及び第２凹部１９ｂの全てと接触するように設けられている。詳しくは、ハウジング１１の開口端部１１ａよりも若干底部１１ｂに近い位置から、圧力伝達部材１４の中心よりも若干底部１１ｂに近い位置までの範囲において、圧力伝達部材１４の全周を被覆するように設けられている。 Then, the viscous member 16 comes into contact with all of the first convex portion 15a and the first concave portion 15b constituting the first attenuation portion 15, and the second convex portion 19a and the second concave portion 19b constituting the second attenuation portion 19. Is provided. Specifically, the entire circumference of the pressure transmission member 14 is covered in a range from a position slightly closer to the bottom 11b than the opening end portion 11a of the housing 11 to a position slightly closer to the bottom 11b than the center of the pressure transmission member 14. Is provided.

次に、本実施形態に係る燃焼圧センサ１０の特徴部分の効果について説明する。 Next, the effect of the characteristic part of the combustion pressure sensor 10 according to the present embodiment will be described.

本実施形態では、上記したように、ハウジング１１の内面１１ｃに第２減衰部１９が設けられ、この第２減衰部１９に粘性部材１６が接触している。このため、第１実施形態に示すように第２減衰部１９を有さない内面１１ｃを有する構成に較べて、粘性部材１６とハウジング１１との接触面積が大きくなり、ハウジング１１が粘性部材１６から受ける粘性抵抗が大きくなる。これにより、圧力伝達部材１４のスライドする際に粘性部材１６がより変位しにくくなる、すなわち圧力伝達部材１４が受ける粘性抵抗がより大きくなる。
したがって、高周波成分をより効率よく減衰させることができる。 In the present embodiment, as described above, the second attenuation portion 19 is provided on the inner surface 11 c of the housing 11, and the viscous member 16 is in contact with the second attenuation portion 19. For this reason, as shown in the first embodiment, the contact area between the viscous member 16 and the housing 11 is increased as compared with the configuration having the inner surface 11 c that does not have the second attenuation portion 19. Increased viscous resistance. Thereby, when the pressure transmission member 14 slides, the viscous member 16 becomes more difficult to be displaced, that is, the viscous resistance that the pressure transmission member 14 receives becomes larger.
Therefore, the high frequency component can be attenuated more efficiently.

また、本実施形態においても、第１減衰部１５同様、第２減衰部１９が、圧力伝達部材１４の軸方向において、圧力伝達部材１４の中心（図８に示す破線位置）よりもダイアフラム１２に近い位置に設けられている。このため、圧力伝達部材１４をスライド（変位）させるエネルギーの高い位置で、粘性抵抗により高周波成分をより効率よく減衰させることができる。 Also in the present embodiment, like the first attenuating portion 15, the second attenuating portion 19 is located closer to the diaphragm 12 in the axial direction of the pressure transmitting member 14 than at the center of the pressure transmitting member 14 (a broken line position shown in FIG. 8). It is provided at a close position. For this reason, the high frequency component can be attenuated more efficiently by the viscous resistance at a position where the energy to slide (displace) the pressure transmission member 14 is high.

また、本実施形態では、粘性部材１６が、第２凸部１９ａ及び／又は第２凹部１９ｂの複数と接触する。すなわち、粘性部材１６の接触対象が、第２凸部１９ａを複数、第２凹部１９ｂを複数、第２凸部１９ａと第２凹部１９ｂを合わせて複数、のいずれかとなっている。このため、第２凸部１９ａ及び第２凹部１９ｂのいずれか１つのみと接触する構成に較べて、粘性部材１６との接触面積を大きくする効果が高まり、高周波成分をより効率よく減衰させることができる。 In the present embodiment, the viscous member 16 comes into contact with a plurality of second convex portions 19a and / or second concave portions 19b. That is, the contact target of the viscous member 16 is one of a plurality of second convex portions 19a, a plurality of second concave portions 19b, and a plurality of second convex portions 19a and second concave portions 19b. For this reason, compared with the structure which contacts only any one of the 2nd convex part 19a and the 2nd recessed part 19b, the effect which enlarges the contact area with the viscous member 16 increases, and attenuates a high frequency component more efficiently. Can do.

（変形例）
上記例では、第２減衰部１９が、第２凸部１９ａと第２凹部１９ｂを有し、これら交互に連続して設けられてなる例を示した。しかしながら、第２減衰部１９は、第２凸部１９ａ及び第２凹部１９ｂを少なくとも１つ備えれば良い。例えば粘性部材１６が１つの第２凸部１９ａ（又は１つの第２凹部１９ｂ）と接触する構成としても良い。また、複数の第２凸部１９ａ（又は第２凹部１９ｂ）を有し、これら第２凸部１９ａ（又は第２凹部１９ｂ）が粘性部材１６と接触する構成としても良い。また、第２凸部１９ａと第２凹部１９ｂを有しつつ、複数の第２凸部１９ａ又は複数の第２凹部１９ｂは軸方向において隣り合う構成を採用することもできる。また、第１減衰部１５を構成する第１凸部１５ａ及び第１凹部１５ｂの個数と、第２減衰部１９を構成する第２凸部１９ａ及び第２凹部１９ｂの個数を異なるものとしても良い。 (Modification)
In the above example, the second attenuating portion 19 has the second convex portion 19a and the second concave portion 19b, and these are alternately and continuously provided. However, the 2nd attenuation part 19 should just be provided with the 2nd convex part 19a and the 2nd concave part 19b. For example, the viscous member 16 may be configured to contact one second convex portion 19a (or one second concave portion 19b). Moreover, it is good also as a structure which has several 2nd convex part 19a (or 2nd recessed part 19b), and these 2nd convex part 19a (or 2nd recessed part 19b) contacts the viscous member 16. FIG. Further, it is possible to adopt a configuration in which the plurality of second protrusions 19a or the plurality of second recesses 19b are adjacent in the axial direction while having the second protrusions 19a and the second recesses 19b. Further, the number of the first convex portions 15a and the first concave portions 15b constituting the first attenuation portion 15 and the number of the second convex portions 19a and the second concave portions 19b constituting the second attenuation portion 19 may be different. .

また、上記例では、第２減衰部１９を、第１減衰部１５の対向位置に設ける例を示した。しかしながら、第２減衰部１９の形成位置は、上記例に限定されるものではない。例えば、図６に示した構成において、軸方向で隣り合う第１凹部１５ｂの間に第２凸部１９ａ（又は第２凹部１９ｂ）を設けた構成としても良い。図４に示した第１減衰部１５のように、圧力伝達部材１４の全域に対向して第２減衰部１９を設けると、粘性抵抗をより大きくすることができる。 Further, in the above example, the example in which the second attenuation unit 19 is provided at the position facing the first attenuation unit 15 has been described. However, the formation position of the second attenuation portion 19 is not limited to the above example. For example, in the configuration shown in FIG. 6, the second convex portion 19a (or the second concave portion 19b) may be provided between the first concave portions 15b adjacent in the axial direction. If the second attenuation portion 19 is provided so as to face the entire area of the pressure transmission member 14 as in the first attenuation portion 15 shown in FIG. 4, the viscous resistance can be further increased.

また、上記例では、第２凸部１９ａ及び第２凹部１９ｂの表面が、いずれもＶ字形状である例を示した。しかしながら、その形状は特に限定されるものではない。例えば図５及び図６に示した第１凸部１５ａ、第１凹部１５ｂのように、コの字状としても良い。コの字状としたほうが、Ｖ字形状よりも粘性抵抗を大きくすることができる。 Moreover, in the said example, the surface of the 2nd convex part 19a and the 2nd recessed part 19b showed all the examples which are V-shaped. However, the shape is not particularly limited. For example, it is good also as a U-shape like the 1st convex part 15a and the 1st recessed part 15b which were shown in FIG.5 and FIG.6. The U-shaped can make the viscous resistance larger than the V-shaped.

以上、本発明の好ましい実施形態について説明したが、本発明は上記した実施形態になんら制限されることなく、本発明の主旨を逸脱しない範囲において、種々変形して実施することが可能である。 The preferred embodiments of the present invention have been described above. However, the present invention is not limited to the above-described embodiments, and various modifications can be made without departing from the spirit of the present invention.

本実施形態では、ハウジング１１が、２つのハウジング部材１７，１８からなる例を示した。しかしながら、ハウジング１１の構成部材は２つに限定されるものではない。例えば３つ以上の部材により構成されても良いし、単一のものにより構成されても良い。例えば、第１ハウジング部材１７を省略して、第２ハウジング部材１８（金属ステム）のみによりハウジング１１が構成されても良い。この場合、ダイアフラム１２は第２ハウジング部材１８の開口端部に接合されればよい。 In this embodiment, the housing 11 showed the example which consists of the two housing members 17 and 18. In FIG. However, the number of constituent members of the housing 11 is not limited to two. For example, it may be composed of three or more members, or may be composed of a single member. For example, the first housing member 17 may be omitted, and the housing 11 may be configured only by the second housing member 18 (metal stem). In this case, the diaphragm 12 may be joined to the opening end of the second housing member 18.

本実施形態では、圧力検出部としてのセンサチップ１３として、半導体基板に歪ゲージのような感歪素子が形成されてなる例を示した。しかしながら、感歪素子としては、歪ゲージに限定されるものではない。それ以外にも、静電容量式などを採用することができる。 In the present embodiment, an example is shown in which a strain sensitive element such as a strain gauge is formed on a semiconductor substrate as the sensor chip 13 as the pressure detection unit. However, the strain sensitive element is not limited to the strain gauge. In addition, a capacitance type can be employed.

１０・・・燃焼圧センサ
１１・・・ハウジング
１１ａ・・・開口端部
１１ｂ・・・底部
１１ｃ・・・内面
１２・・・ダイアフラム
１３・・・センサチップ（圧力検出部）
１４・・・圧力伝達部材
１５・・・第１減衰部
１５ａ・・・第１凸部
１５ｂ・・・第１凹部
１６・・・粘性部材
１９・・・第２減衰部
１９ａ・・・第２凸部
１９ｂ・・・第２凹部 DESCRIPTION OF SYMBOLS 10 ... Combustion pressure sensor 11 ... Housing 11a ... Opening end part 11b ... Bottom part 11c ... Inner surface 12 ... Diaphragm 13 ... Sensor chip (pressure detection part)
14 ... Pressure transmission member 15 ... 1st damping part 15a ... 1st convex part 15b ... 1st recessed part 16 ... Viscous member 19 ... 2nd damping part 19a ... 2nd Convex part 19b ... second concave part

Claims

A hollow cylindrical housing (11) open at one end;
A pressure-receiving diaphragm (12) provided at the open end (11a) so as to close the hollow of the housing (11) and distorted by application of pressure in the combustion chamber of the internal combustion engine;
A pressure detector (13) mounted on the outer surface of the bottom (11b) opposite to the open end (11a) of the housing (11) and generating a signal corresponding to the pressure;
A rod-shaped pressure transmission member (14) housed in the housing (11) and configured to transmit pressure applied to the diaphragm (12) to the pressure detection unit (13) via the bottom (11b); A combustion pressure sensor comprising:
A first damping portion (15) having at least one of a first convex portion (15a) and a first concave portion (15b) is provided on the surface of the pressure transmission member (14),
A viscous member (16) made of a material having a larger viscosity coefficient than air is accommodated in the housing (11), and at least the surface of the first damping portion (15) in the pressure transmission member (14) and the housing ( 11) A combustion pressure sensor which is in contact with both the inner surface (11c) of 11).

The first damping part (15) is provided in a position closer to the diaphragm (12) than the center (14c) of the pressure transmission member (14) in the axial direction of the pressure transmission member (14). The combustion pressure sensor according to claim 1, wherein:

The combustion pressure sensor according to claim 1 or 2, wherein the viscous member (16) is in contact with a plurality of first convex portions (15a) and / or first concave portions (15b).

A second attenuating portion (19) having at least one of a second convex portion (19a) and a second concave portion (19b) at a contact portion with the viscous member (16) on the inner surface (11c) of the housing (11). The combustion pressure sensor according to claim 1, wherein the combustion pressure sensor is provided.

The second damping portion (19) is provided in a position closer to the diaphragm (12) than the center (14c) of the pressure transmission member (14) in the axial direction of the pressure transmission member (14). The combustion pressure sensor according to claim 4.

The combustion pressure sensor according to claim 4 or 5 , wherein the viscous member (16) is in contact with a plurality of second convex portions (19a) and / or second concave portions (19b).

The combustion pressure sensor according to any one of claims 1 to 6, wherein the viscous member (16) is integrally formed with the pressure transmission member (14).

The combustion pressure sensor according to any one of claims 1 to 6, wherein the viscous member (16) is an O-ring attached to the pressure transmission member (14) along a circumferential direction.

The combustion pressure sensor according to any one of claims 1 to 6, wherein the viscous member (16) is a liquid.