JP5645429B2 - Liquid supply device - Google Patents

Description

  The present invention relates to a liquid supply apparatus that supplies liquid in a flexible film-like bag portion to the outside.

  In order to store and transport liquids such as drinking water and industrial chemicals, various shaped containers such as cans, bottles, and hard resin bottles are used (for example, JP-A-2005-335713). And Japanese Patent Application Laid-Open No. 2007-204120).

  In recent years, in order to easily dispose of empty containers and to reduce the weight of the containers themselves, flexible film-like bag-like containers have begun to be used in a wide range of applications in place of regular containers. Such a flexible bag-like container can be folded and stored after use, or the weight of the container itself is very light, so that a great effect such as a significant reduction in transportation cost is expected. In addition, a liquid supply device has been developed that delivers liquid stored in an irregular liquid container such as a flexible bag-like container, such as drinking water or industrial chemicals, to the outside.

JP 2005-335713 A JP 2007-204120 A

  However, in the case of a liquid supply apparatus using an irregular liquid container, a device different from the regular container is required because of the characteristic that the shape of the container itself is irregular. For example, it is necessary to devise a method for fixing the container, a device to pour out all the liquid inside, and a device to accurately grasp the remaining amount of liquid inside.

  Since the container itself is indefinite, the container must be fixed in some frame or placed inside the box and then placed inside the device, but the contents are liquid. The weight is often heavy, and it is not easy to fit in the box from above.

  Furthermore, since the container is indeterminate, it is necessary to devise such as squeezing with pressure from the outside of the bag or providing a spout near the bottom of the container to pour out liquid without remaining amount, Problems remain, such as the need for pressure means, and the use of a lower outlet, making it difficult to use. In addition, if the container is of a fixed shape, the remaining amount can be grasped immediately by looking at the height of the liquid level, but if the shape of the container changes, the remaining amount based on the liquid level is not accurate. I can not say.

  The present invention has been made in view of the above points, and the object of the present invention is to easily place a container with a simple configuration, to send out all the liquid inside, and to leave the remaining amount. It is an object of the present invention to provide a liquid supply apparatus that delivers liquid in an irregular liquid container capable of grasping the above.

According to the present invention, a spout comprising a bag portion made of a flexible film-like member, a cylindrical neck portion attached to the mouth of the bag portion, and an annular flange projecting outward from the outer periphery of the upper end of the neck portion; A liquid supply apparatus for delivering liquid in an irregular liquid container having a bottom portion, a side portion standing upright from the bottom portion, and supported by the side portion and formed from the side portion toward the center A frame including a ceiling portion having a guide groove having a width smaller than the outer diameter of the annular flange and larger than the diameter of the neck portion; a delivery pipe inserted into the bag portion from the spout; and Liquid supply means including a suction pump interposed in the middle, and the bag portion is inserted into the guide groove while the annular flange of the spout is located above the ceiling portion and the neck portion is inserted into the guide groove. fixing the該首unit housed inside the frame in position in the guide groove then, the The annular flange engages with the guide groove by the weight of the liquid in the part, the bag part is suspended and fixed in the frame, and the delivery pipe reaches near the bottom of the bag part suspended in the frame. The bottom plate constituting the bottom portion of the frame body has a recess or an opening immediately below the predetermined position of the guide groove, and the bottom plate around the recess or the opening. At least a part of the bag is formed so as to be inclined downward toward the recess or the opening, and the liquid in the irregular liquid container is dropped into the recess or the opening due to the inclination. Provided is a liquid supply device characterized in that it is easily collected .

Preferably, the suction port of the delivery pipe is positioned in the recess or in the vicinity of the bag part that has fallen into the opening .

  Preferably, the frame is disposed on the weight measuring device, whereby the remaining amount in the irregular liquid container can be easily grasped.

  According to the liquid supply device of the present invention, since the irregular liquid container is inserted into the frame from the side, there is no need to lift an unnecessarily heavy container. Furthermore, since the spout is above, it is easy to insert a pipe into the spout. Since the pipe has a length that reaches the bottom of the irregular container, the liquid inside can be delivered without remaining.

  In the embodiment in which a recess or an opening is formed at the bottom, the liquid container is effective in fixing the irregular liquid container, and the liquid is collected near the suction port of the pipe. There is an effect that no remaining liquid is generated. In addition, since the frame is placed on the weight measuring device, it is possible to accurately grasp the remaining amount of liquid at all times, and to easily cope with changes in the size and material of the container. Can do.

1 is an overall configuration diagram of a mixed liquid supply apparatus to which a liquid supply apparatus of the present invention is applicable. It is a perspective view which shows an example of an amorphous liquid container. It is a disassembled perspective view of the liquid supply apparatus which concerns on 1st Embodiment of this invention. It is a perspective view of the state which mounted | wore with the amorphous liquid container in the liquid supply apparatus. It is a perspective view of the state which mounted | wore the liquid supply apparatus which concerns on 2nd Embodiment of this invention with the amorphous liquid container. FIG. 6 is a cross-sectional view taken along line VI-VI in FIG. 5.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. Referring to FIG. 1, there is shown an overall configuration diagram of a mixed liquid supply apparatus employing a liquid supply apparatus of the present invention. The liquid mixture supply apparatus indicated by reference numeral 2 supplies the polishing apparatus 4 with a liquid mixture (slurry) in which a liquid and an abrasive are mixed. A liquid supply device 6, which will be described in detail later, contains an irregular liquid container 8 in which a high concentration abrasive stock solution 9 in which a liquid such as pure water and an abrasive such as silica are mixed is contained. .

  Denoted at 10 is a dilution tank, and a high-concentration abrasive stock solution 9 in the irregular liquid container 8 is supplied into the dilution tank 10 via a pipe line (abrasive stock solution supply channel) 14, and the liquid supply channel 16 is passed through the dilution tank 10. Then, a liquid such as pure water is supplied into the dilution tank 10, the stock slurry 9 is diluted with the liquid, and the dilution tank 10 contains a slurry (mixed solution) 18 having a diluted concentration.

  A stirring device (not shown) is installed in the dilution tank 10, and the stirring agent source liquid 9 and the liquid sent through the liquid supply path 16 are stirred by this stirring device to uniformly dilute the concentration. A slurry 18 having a concentration is obtained. Reference numeral 20 denotes a suction pump, and an open / close valve 22 is inserted in the pipe 14. On the other hand, a flow rate adjusting valve 24 is inserted into the liquid supply path 16.

  From the dilution tank 10, a diluted liquid (slurry) 18 is supplied to the supply tank 12 via a pipe line (first mixed liquid supply path) 26, and the supply tank 12 stores the diluted mixed liquid 18. To do. A pump 28 and an on-off valve 30 are inserted in the pipe line 26.

  A liquid mixture (slurry) 18 having a diluted concentration is supplied from the supply tank 12 through a pipe line (second liquid mixture supply path) 32 to the polishing apparatus 4, and a plate-like object such as a semiconductor wafer is formed by the polishing apparatus 4. Polishing is performed. A pump 34 and an on-off valve 36 are inserted in the pipe line 32.

  The liquid supply device 6 is mounted on the weight measuring device 38. Similarly, the dilution tank 18 is also mounted on the weight measuring device 40. The weight measuring devices 38 and 40 are connected to a control means (controller) 42.

  The memory of the control means 42 stores in advance the sum of the weight of the liquid supply device 6 and the weight of the amorphous liquid container 8 main body. The control means 42 stores the liquid supply device 6 and the abrasive stock solution measured by the weight measuring device 38. By subtracting the weights of the liquid supply device 6 and the amorphous liquid container 8 main body from the total weight of the irregular liquid container 8 including 9, the exact remaining amount of the abrasive stock solution 9 can be calculated. The remaining amount of the stock solution is displayed on a remaining amount display means 44 such as a liquid crystal display.

  In the supply tank 12, a plurality of liquid level sensors 46a, 46b, 46c, 46d are installed. The liquid level sensors 46a to 46d are connected to the control means 42. When the liquid level of the mixed liquid (slurry) 18 in the supply tank 12 comes between the liquid level sensors 46c and 46d, the liquid level sensors 46a to 46d are opened and closed by the control means 42. The valve 30 is opened and the pump 28 is driven to supply the mixed liquid (slurry) 18 in the dilution tank 10 into the supply tank 12.

  The pumps 20, 28 and 34 are connected to the control means 42, and their driving is controlled by the control means 42. The flow rate adjusting valve 24 is also connected to the control means 42, and the supply amount of liquid such as pure water is adjusted by the flow rate adjusting valve 24 to adjust the abrasive stock solution 9 to a mixed solution (slurry) 18 having a desired concentration. .

  The remaining amount of the mixed liquid (slurry) 18 in the dilution tank 10 can be obtained by mounting the dilution tank 10 on the weight measuring device 40 in the same manner as the remaining amount of the abrasive stock solution in the amorphous liquid container 8. It can be easily calculated by the control means 42.

  The adjustment of the concentration of the liquid mixture (slurry) 18 in the dilution tank 10 controls the driving time of the pump 20 and the amount of liquid supplied via the flow rate adjustment valve 24, and further, the liquid mixture (slurry in the dilution tank 10). ) Based on the remaining amount of 18, the desired density can be adjusted.

  Although not particularly shown, a flowmeter is provided in the abrasive stock solution supply path 14 and the liquid supply path 16, and a liquid such as pure water supplied from the abrasive stock solution 9 and the liquid supply source 15 supplied into the dilution tank 10. By accurately measuring the amount of, the concentration of the mixed liquid (slurry) 18 in the dilution tank 10 can be adjusted more accurately.

  The above description is an example in which the liquid supply apparatus 6 of the present invention is applied to supply of the abrasive stock solution of the mixed liquid supply apparatus 2. The liquid supply apparatus 6 will be described below with reference to FIGS. The detailed structure of will be described.

  Referring to FIG. 2, a perspective view of an example of the irregular liquid container 8 is shown. The irregular liquid container 8 includes a bag portion 48 made of a flexible film-like member, a cylindrical neck portion 52 attached to the mouth of the bag portion 48, and an annular flange 54 projecting outward from the outer periphery of the upper end of the neck portion 52. And a spout 50 provided. In the bag part 48, the liquid 49, such as the above-mentioned abrasive stock solution, drinking water, and industrial chemical solution, is accommodated.

  Referring to FIG. 3, an exploded perspective view of the liquid supply device 6 according to the first embodiment of the present invention is shown. The liquid supply device 6 includes a frame 7 having a bottom plate 56, four columns 58 erected on the bottom plate 56, and a ceiling plate 60 supported by the columns 58.

  The ceiling plate 60 has a guide groove 62 that extends from the side of the ceiling plate 60 toward the center and has a width smaller than the outer diameter of the annular flange 54 of the amorphous liquid container 8 shown in FIG. Is formed. A bracket 64 having a notch 65 protrudes from the side of the ceiling plate 60.

  Reference numeral 66 denotes liquid supply means, which is a delivery pipe 68 inserted into the bag portion 48 from the spout 50 of the irregular liquid container 8 shown in FIG. 2 and a suction pump interposed in the middle of the delivery pipe 68. 20.

  A cock 70 is attached in the vicinity of the outlet of the delivery pipe 68. When the liquid supply means 66 is not in use, the delivery pipe 68 is accommodated in the notch 65 of the bracket 64 of the frame body 7 as indicated by the arrow A, and is supported by the bracket 64.

  To accommodate the irregular liquid container 8 shown in FIG. 2 in the liquid supply device 6, the annular flange 54 of the spout 50 is located above the ceiling plate 60 of the liquid supply device 6 so that the neck portion as shown in FIG. 52 is inserted into the guide groove 62.

  Thereby, the bag portion 48 of the irregular liquid container 8 is accommodated in the frame body 7, the annular flange 54 is engaged with the guide groove 62 by the weight of the liquid 49 in the bag portion 48, and the bag portion 48 is in the frame body 7. The indeterminate liquid container 8 is fixed by hanging inside.

  The liquid supply means 66 supported by the bracket 64 is removed from the bracket 64, the delivery pipe 68 is inserted into the irregular liquid container 8 from the spout 50, and the suction pump 20 is supported by the annular flange 54. This state is shown in FIG. 4, and the delivery pipe 68 has a length that reaches the vicinity of the bottom of the bag portion 48 that hangs down in the frame body 7.

  In order to supply the liquid 49 in the irregular liquid container 8 to the outside, the suction pump 20 is driven after the cock 70 is opened. As a result, for example, as shown in the embodiment shown in FIG.

  Referring to FIG. 5, a perspective view of a liquid supply apparatus 6A according to the second embodiment of the present invention is shown. 6 is a sectional view taken along line VI-VI in FIG. As shown in FIG. 5, when the irregular liquid container 8 is fixed in the frame 7 </ b> A, the neck portion 52 of the spout 50 is fixed at a predetermined position of the guide groove 62.

  The bottom plate 56 </ b> A of the frame body 7 </ b> A has an opening 57 immediately below a predetermined position of the guide groove 62. As shown in FIG. 6, the bottom plate 56 </ b> A is attached with an angle θ inclined. As a result, the liquid 49 in the irregular liquid container 8 is easily accumulated by the inclined mounting of the bottom plate 56A in the bag portion 48a that has fallen into the opening 57 of the bottom plate 56A.

  The lower end of the delivery pipe 68 is formed to have a length that reaches the inside of the bag portion 48 a that has fallen into the opening 57. Instead of forming the opening 57 in the bottom plate 56A, a thick bottom plate may be adopted to form a recess in the bottom plate.

  According to the present embodiment, since the opening 57 is formed in the bottom plate 56A, it is effective in fixing the irregular liquid container 8, and the liquid 49 is accumulated in the bag portion 48a near the suction port of the delivery pipe 68. Therefore, there is no liquid delivery residue due to the deformation of the container 8.

  Further, when the liquid supply device 6 is placed on the weight measuring device 38 as shown in FIG. 1, it is possible to always accurately grasp the remaining amount of liquid in the irregular liquid container 8, and the size of the container Even if there is a change in material, it can be easily handled.

2 Mixed liquid supply device 4 Polishing device 6 Liquid supply device 7 Frame 8 Indeterminate liquid container 9 Abrasive stock solution 10 Dilution tank 12 Supply tank 18 Mixed solution (slurry)
20 Suction pump 38, 40 Weight measuring device 48 Bag 49 Liquid 50 Outlet 52 Neck 54 Annular flange 56 Bottom plate 57 Opening 60 Ceiling plate 62 Guide groove 66 Liquid supply means 68 Delivery pipe

Claims (3)

An indeterminate liquid having a bag portion made of a flexible film-like member, a cylindrical neck portion attached to the mouth of the bag portion, and a spout provided with an annular flange projecting outward from the outer periphery of the upper end of the neck portion A liquid supply device for delivering a liquid in a container,
A bottom, a side standing from the bottom, and a guide groove having a width smaller than the outer diameter of the annular flange supported by the side and formed from the side toward the center and larger than the diameter of the neck. A frame including a ceiling portion having,
A liquid supply means including a delivery pipe inserted into the bag portion from the spout, and a suction pump interposed in the middle of the delivery pipe;
When the annular portion of the spout is located above the ceiling portion and the neck portion is inserted into the guide groove , the bag portion is accommodated in the frame body and the neck portion is fixed at a predetermined position of the guide groove. The annular flange is engaged with the guide groove by the weight of the liquid in the bag portion, and the bag portion is suspended and fixed in the frame body,
The delivery pipe has a length that reaches the vicinity of the bottom of the bag portion that hangs down in the frame ,
The bottom plate constituting the bottom of the frame has a recess or an opening immediately below the predetermined position of the guide groove, and at least a part of the bottom plate around the recess or the opening is the recess. Or inclined downward toward the opening or the opening,
The liquid supply apparatus according to claim 1, wherein the liquid in the irregular liquid container is easily collected in the recess or the bag part that has fallen into the opening due to the inclination . The liquid supply device according to claim 1 , wherein the suction port of the delivery pipe is positioned in the recess or in the vicinity of the bag part that has fallen into the opening .   The liquid supply apparatus according to claim 1, wherein the frame is disposed on a weight measuring device.

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