JP5642104B2 - Lens driving system and laser processing apparatus - Google Patents

Description

  The present invention relates to a control device, a lens driving system, and a laser processing apparatus that decenter an optical axis of a laser beam with respect to a nozzle axis of a processing nozzle.

  The laser processing apparatus processes a workpiece (material) by discharging a material dissolved and evaporated by a laser beam with an assist gas. In such a laser processing apparatus, the action of the assist gas affects the cutting speed and the cut surface quality. For example, the thicker the workpiece, the more difficult it is to remove the melt from the cut surface. Also, if there is not enough airflow on the cut surface of the workpiece, the cutting speed will be slow, and burrs and dross will occur. For this reason, a method of improving the surface roughness and processing speed by decentering the optical axis (laser beam center) of the laser beam in the same direction as the laser processing progress direction with respect to the nozzle axis (nozzle center) of the processing nozzle is used. It has been.

  The laser beam nozzle device of a laser beam machine described in Patent Document 1 has a mechanism that can decenter a normally fixed laser beam nozzle in an arbitrary machining progress direction with respect to the laser beam center. .

  It is also known that in a mechanism having a plurality of drive shafts, the dynamic behavior of each drive shaft interferes with each other, thereby deteriorating the positioning accuracy of each drive shaft. The control device described in Patent Document 2 uses a transfer function that indicates the influence of the dynamic behavior of each of the three axes (X, Y, and Z axis mechanisms) that move the tool in three directions orthogonal to each other. The correction value for compensating for the interference is calculated as the displacement amount. Then, the target displacement amount is corrected using the calculated displacement amount.

Japanese Patent No. 3287112 (FIG. 1) Japanese Patent Laying-Open No. 2009-271685 (FIG. 1)

  In the former and the latter techniques, there is a possibility that the processing quality may be impaired when processing a thin plate. Therefore, when processing a thin plate, the processing lens is positioned so that the optical axis of the laser beam coincides with the nozzle axis of the processing nozzle. There was a need. However, since the processing head moves at a higher speed and higher acceleration in the thin plate processing than in the thick plate processing, the dynamic behavior of the processing head affects the lens driving device. For this reason, in the thin plate processing, there is a problem that the positioning accuracy of the lens driving device is deteriorated and the positioning accuracy of the laser beam is deteriorated as compared with the laser processing device to which the processing lens is fixed.

  The present invention has been made in view of the above, and it is possible to obtain a control device, a lens driving system, and a laser processing apparatus that suppress deterioration of positioning accuracy of a laser beam even when the processing head moves at high acceleration. Objective.

In order to solve the above-described problems and achieve the object, the present invention generates a position command for driving a machining head that irradiates a workpiece with a laser beam oscillated from a laser oscillator, using a machining program. A machining head command generating unit that outputs to a machining head driving device that drives the machining head, a lens driving device that drives a machining lens that is arranged in the machining head and focuses the laser beam, and Due to the dynamic behavior of the machining head, and the eccentric command generator for generating and outputting the eccentric command for decentering the laser beam center with respect to the nozzle center of the machining nozzle of the machining head. raw said disturbance compensation command for compensating for the disturbance to the lens driving device, based on the acceleration of the machining head in accordance with the machining program to be And and a compensation unit for outputting, the lens driving device, based on said eccentric command and said disturbance compensation command, compensate for the disturbance caused by the dynamic behavior of the machining head driven in accordance with the machining program However, the processing lens is driven so that the position of the processing lens matches the eccentricity command .

  According to the present invention, even when the machining head moves with high acceleration, it is possible to suppress the deterioration of the positioning accuracy of the laser beam.

FIG. 1 is a diagram illustrating a configuration of a laser processing apparatus according to the first embodiment. FIG. 2 is a diagram illustrating a configuration of the lens driving system according to the first embodiment. FIG. 3 is a diagram showing a procedure for generating a position command generated from the acceleration command. FIG. 4 is a diagram showing a cross-sectional configuration of the machining head. FIG. 5 is a diagram for explaining a processing procedure for disturbance compensation. FIG. 6 is a diagram illustrating a configuration of a lens driving system according to the second embodiment. FIG. 7 is a diagram illustrating a configuration of a lens driving system according to the third embodiment. FIG. 8 is a diagram for explaining a communication cycle between the numerical controller and the lens driving device and a control cycle of the thrust control system. FIG. 9 is a diagram illustrating a configuration of a lens driving system according to the fourth embodiment.

  Hereinafter, embodiments of a control device, a lens driving system, and a laser processing device according to the present invention will be described in detail with reference to the drawings. Note that the present invention is not limited to these embodiments.

Embodiment 1 FIG.
FIG. 1 is a diagram illustrating a configuration of a laser processing apparatus according to the first embodiment. The laser processing device 101 includes a laser oscillator 30, a numerical control device 1X, and a processing head 6X.

  The laser oscillator 30 oscillates the laser beam 13. The laser beam 13 output from the laser oscillator 30 is guided to the machining head 6X using a reflection mirror (not shown). The processing head 6 </ b> X includes a processing lens 12 and the like. The processing lens 12 condenses the laser beam 13 and irradiates the workpiece 40. The assist gas is supplied to the processing head 6X, and the assist gas is sent from the processing head 6X. The assist gas delivered from the machining head 6X is blown to the irradiation position of the laser beam 13 on the workpiece 40.

  The numerical control device 1X has a function as a lens drive control device, and controls the operations of the processing head 6X and the laser oscillator 30 based on a processing program. In the laser processing apparatus 101, a system including the numerical control device 1X and the processing head 6X operates as a lens driving system (laser irradiation position control mechanism).

  FIG. 2 is a diagram illustrating a configuration of the lens driving system according to the first embodiment. The lens driving system 100 </ b> A controls the position of the laser beam 13 that irradiates the workpiece 40 by controlling the positions of the processing head 6 </ b> X and the processing lens 12. The lens driving system 100A includes a numerical control device 1A that is an example of a numerical control device 1X, and a processing head 6A that is an example of a processing head 6X.

  The numerical controller 1A is a computer or the like that controls the processing head 6A, and controls the position of the processing head 6A and the position of the processing lens 12. The numerical controller 1A includes a machining program storage unit 2, a machining head command generation unit 3A, a disturbance estimation / compensation unit 4A, and an eccentric command generation unit 5. The processing head 6A has a processing head driving device 7 and a lens driving device 8A.

  In the lens driving system 100A, a device (such as a numerical control device 1A) having a disturbance estimation / compensation unit 4A and an eccentricity command generation unit 5 operates as a lens control device that controls the lens driving device 8A (processing lens 12). The machining head command generator 3A operates as a machining head control device that controls the machining head drive device 7 (machining head 6X). In other words, the numerical control device 1A operates as a control device that controls the lens driving device 8A and the processing head driving device 7.

  The machining program storage unit 2 of the numerical controller 1A is a memory that stores a machining program. The machining program includes the machining position and machining conditions of the workpiece. The machining head command generation unit 3A reads a machining program from the machining program storage unit 2 and calculates an acceleration command to the machining head according to the machining program. Further, the machining head command generation unit 3A generates a position command to the machining head from the acceleration command. The machining head command generation unit 3A sends the generated position command to the machining head drive device 7, and sends the calculated acceleration command to the disturbance estimation / compensation unit 4A.

  The disturbance estimation / compensation unit 4A of the present embodiment estimates the disturbance to the lens driving device 8A due to the dynamic behavior of the machining head 6A and compensates for the disturbance. Specifically, the disturbance estimation / compensation unit 4A generates a disturbance compensation command based on the acceleration command, and sends the generated disturbance compensation command to the lens driving device 8A. The disturbance compensation command is a command for eliminating the delay of the operation of the processing lens 12 with respect to the processing lens 12 whose operation is delayed according to the processing speed of the processing head 6A. In other words, the disturbance compensation command is a command that cancels the influence of the machining speed.

  The eccentric command generation unit 5 reads the machining program from the machining program storage unit 2 and generates an eccentric command to the machining head 6A according to the machining program. The eccentricity command is a command for decentering the optical axis of the laser beam 13 with respect to the nozzle axis of the processing nozzle (laser beam nozzle 10 described later) provided in the processing head 6X. The eccentricity command generation unit 5 sends the generated eccentricity command to the lens driving device 8A.

  The machining head drive device 7 of the machining head 6A is a device that drives the machining head 6A. The machining head drive device 7 moves the machining head 6A in the XYZ directions (three-dimensional directions) in accordance with the position command from the machining head command generation unit 3A.

  The lens driving device 8 </ b> A is a device that drives the processing lens 12. The lens driving device 8A moves the position of the processing lens 12 in the XY direction (two-dimensional direction) based on the disturbance compensation command from the disturbance estimation / compensation unit 4A and the eccentric command from the eccentric command generation unit 5. .

  Next, a laser processing procedure performed by the laser processing apparatus 101 will be described. In the numerical control apparatus 1A, the machining head command generation unit 3A reads a machining program from the machining program storage unit 2, and calculates an acceleration command to the machining head according to the machining program. The machining head command generation unit 3A sends the calculated acceleration command to the disturbance estimation / compensation unit 4A.

  Further, the machining head command generation unit 3A generates a position command to the machining head 6A according to the machining program. At this time, the machining head command generation unit 3A generates a position command by integrating the calculated acceleration command twice. The machining head command generation unit 3 </ b> A sends the generated position command to the machining head drive device 7.

  FIG. 3 is a diagram showing a procedure for generating a position command generated from the acceleration command. The machining head command generation unit 3A derives a speed command from the acceleration command by integrating the acceleration command calculated from the machining program with the integrator 17. Further, the machining head command generating unit 3A generates a position command from the speed command by integrating the derived speed command with the integrator 18.

  The position command generated by the processing head command generation unit 3 </ b> A is input to the processing head driving device 7. The machining head drive device 7 moves the machining head 6A in the XYZ directions in accordance with the position command from the machining head command generation unit 3A.

  The eccentric command generation unit 5 reads the machining program from the machining program storage unit 2 and generates an eccentric command corresponding to the machining program. The eccentricity command generation unit 5 sends the generated eccentricity command to the lens driving device 8A. The lens driving device 8A decenters the optical axis of the laser beam 13 with respect to the nozzle axis of the laser beam nozzle 10 by a predetermined amount in the same direction as the laser processing progress direction based on the eccentricity command and the disturbance compensation command.

  FIG. 4 is a diagram showing a cross-sectional configuration of the machining head. In FIG. 4, the machining head driving device 7 is not shown. In FIG. 4, the lens driving device 8A other than the lens actuator 11 is not shown.

  The processing head 6A includes a laser beam nozzle 10, a lens actuator 11, and a processing lens 12. The laser beam nozzle 10 is attached to one end (the emission side of the laser beam 13) of the processing head 6A. The laser beam nozzle 10 has an opening directed toward the workpiece 40, and sends the laser beam 13 collected by the processing lens 12 to the workpiece 40 side. The lens actuator 11 controls the position (XYZ direction) of the processing lens 12.

  When the laser beam 13 enters the machining head 6A, the laser beam 13 is converged by the machining lens 12, emitted from the laser beam nozzle 10, and irradiated onto the workpiece 40. When the thick plate is cut (when the workpiece 40 is a thick plate), the processing lens 12 is moved by the lens actuator 11 so that the processing progress direction 16 and the processing lens movement direction 15 coincide. Thereby, the laser beam center 14 (laser beam optical axis) is decentered with respect to the laser beam nozzle center 9 (nozzle axis).

  The disturbance estimation / compensation unit 4A generates a disturbance compensation command to the lens driving device 8A based on the acceleration command sent from the machining head command generation unit 3A. The disturbance estimation / compensation unit 4A sends the generated disturbance compensation command to the lens driving device 8A.

  FIG. 5 is a diagram for explaining a processing procedure for disturbance compensation. FIG. 5 shows the configuration of the disturbance estimation / compensation unit 4A and the lens driving device 8A, and the flow of commands and the like. The disturbance estimation / compensation unit 4A includes a disturbance estimation calculator 19 and a thrust delay compensator 20. The lens driving device 8 </ b> A includes a position / speed controller 21, a thrust control system 22, a lens actuator 11, a subtractor 31, and an adder 32.

  In the disturbance estimation / compensation unit 4A, when an acceleration command is input, the disturbance estimation calculator 19 calculates the influence on the lens driving device 8A as a thrust based on the acceleration command. This thrust is sent from the disturbance estimation calculator 19 to the thrust delay compensator 20. The thrust delay compensator 20 generates a disturbance compensation command for eliminating the delay of the thrust control system 22 based on the thrust from the disturbance estimation calculator 19, and sends it to the thrust control system 22.

  In the lens driving device 8A, when an eccentricity command is input, the subtractor 31 subtracts the lens position from the eccentricity command. The lens position is sent from the lens actuator 11 to the subtracter 31. The position / speed controller 21 generates a thrust command based on the subtraction result (difference between the eccentricity command and the lens position) and sends the thrust command to the adder 32. The thrust command is a command for causing the thrust control system 22 to output a thrust, and a command for moving the machining lens 12 to a position corresponding to the machining program.

  The adder 32 adds the disturbance compensation command sent from the thrust delay compensator 20 and the thrust command sent from the position / speed controller 21. The disturbance compensation command is a command value added to the thrust command, and is a corrected thrust command value for correcting the thrust command for normal operation according to the acceleration of the processing head 6A (processing lens 12). In other words, the disturbance compensation command is a command for compensating for the delay of the thrust control system 22. In other words, the disturbance compensation command is a command for correcting the positional deviation of the processing lens 12 generated according to the acceleration of the processing head 6A.

  The adder 32 sends the sum of the disturbance compensation command and the thrust command to the thrust control system 22 as a total thrust command. As a result, the total thrust command is input to the thrust control system 22. The thrust control system 22 gives a thrust corresponding to the total thrust command to the lens actuator 11.

  The lens actuator 11 moves the position of the processing lens 12 by thrust. As a result, the position of the processing lens 12 changes, and the laser beam center 14 changes. The lens actuator 11 sends the position of the processing lens 12 to the subtractor 31 as the lens position.

  In the present embodiment, since the position of the processing lens 12 is moved so as to compensate for disturbance to the lens driving device 8A caused by the dynamic behavior of the processing head 6A, it is desirable even when the processing head 6A is moving. It is possible to move the laser beam center 14 to the position. As a result, the positioning accuracy of the laser beam 13 is less likely to deteriorate as compared with the conventional apparatus in which the processing lens 12 is fixed.

  In the present embodiment, the case where the machining head command generation unit 3A calculates the acceleration command from the machining program and generates the position command from the acceleration command has been described. However, the machining head command generation unit 3B is configured from the machining program. A position command may be calculated, and an acceleration command may be generated from the position command.

  In the present embodiment, the case where the thrust delay compensator 20 inputs a disturbance compensation command to the adder 32 has been described. However, the thrust delay compensator 20 uses the disturbance compensation command as a position command (position correction command). You may input into the subtractor 31, after converting. In this case, two integrators are arranged in the disturbance estimation / compensation unit 4A. The disturbance compensation command output from the thrust delay compensator 20 is integrated by the first integrator to obtain a speed command. Further, this speed command is integrated by a second integrator to be a position command, and this position command is input to the subtractor 31. The subtractor 31 subtracts the lens position from the eccentricity command plus the position command and inputs the result to the position / speed controller 21.

  Thus, according to the first embodiment, the lens driving system 100A compensates for the influence on the lens driving device 8A caused by the dynamic behavior of the machining head 6A by the disturbance compensation command. Thereby, even when the machining head 6A moves at a high acceleration such as corner processing or thin plate processing during thick plate processing, it is possible to suppress deterioration in positioning accuracy of the laser beam 13. Therefore, the processing quality of the workpiece 40 can be improved.

Embodiment 2. FIG.
Next, a second embodiment of the present invention will be described with reference to FIG. In the second embodiment, laser processing using a processing program is performed in advance, and the acceleration of the processing head 6A at this time is measured and learned with an accelerometer or the like. Then, the measurement result (acceleration learning data D1 described later) is stored, and a disturbance compensation command is generated using the measurement result.

  FIG. 6 is a diagram illustrating a configuration of a lens driving system according to the second embodiment. Among the constituent elements in FIG. 6, constituent elements that achieve the same functions as those of the lens driving system 100 </ b> A of Embodiment 1 shown in FIG. 2 are given the same numbers, and redundant descriptions are omitted.

  The lens driving system 100B includes a numerical control device 1B that is an example of the numerical control device 1X, and a processing head 6A that is an example of the processing head 6X. The numerical control device 1B is a computer or the like that controls the machining head 6A, and controls the position of the machining head 6A and the position of the machining lens 12.

  The numerical control device 1B includes a machining program storage unit 2, a machining head command generation unit 3B, an acceleration learning data storage unit 23, a disturbance compensation unit 4B, and an eccentric command generation unit 5. In the lens driving system 100B, the device having the disturbance compensation unit 4B and the eccentricity command generation unit 5 operates as a lens control device that controls the lens driving device 8A.

  The machining head command generation unit 3B reads a machining program from the machining program storage unit 2 and generates a position command to the machining head according to the machining program. The acceleration learning data storage unit 23 is a memory or the like that stores acceleration data of the machining head 6A measured (learned) in advance by an accelerometer (not shown) or the like as acceleration learning data D1 (not shown). .

  In the present embodiment, the laser processing apparatus 101 performs laser processing using a processing program in the processing program storage unit 2 in advance. The acceleration of the machining head 6A at this time is measured with an accelerometer or the like, and the measurement result is stored in the acceleration learning data storage unit 23 as acceleration learning data D1.

  Then, when performing laser machining using the machining program in the machining program storage unit 2 thereafter, the disturbance compensation unit 4B uses the acceleration learning data D1 in the acceleration learning data storage unit 23 to issue a disturbance compensation command. Generate. Then, the disturbance compensation unit 4B sends the generated disturbance compensation command to the lens driving device 8A. Further, the eccentricity command generating unit 5 sends an eccentricity command to the lens driving device 8A. Thereby, the processing head 6A performs the same operation as the processing head 6A of the first embodiment.

  In this embodiment, the case where the laser processing is performed in advance to acquire the acceleration learning data D1 has been described. However, a computer or the like previously calculates acceleration data D2 (not shown) using a processing program. May be. In this case, the disturbance compensator 4B generates a disturbance compensation command using the calculated acceleration data D2. The calculation of the acceleration data D2 may be performed in advance by a computer other than the numerical control device 1B, or may be performed in advance by the disturbance compensation unit 4B.

  Also, a disturbance compensation command may be generated in advance and stored in the numerical controller 1B. In this case, the disturbance compensator 4B sends the stored disturbance compensation command to the lens driving device 8A. The disturbance compensation command generated in advance may be one previously output from the disturbance estimating / compensating unit 4A or the disturbance compensating unit 4B to the lens driving device 8A, or using the acceleration learning data D1 or the acceleration data D2. May be calculated in advance.

  As described above, according to the second embodiment, the lens driving system 100B compensates the influence on the lens driving device 8A caused by the dynamic behavior of the machining head 6A by the disturbance compensation command. As a result, as in the first embodiment, even when the machining head 6A moves at a high acceleration such as corner processing or thin plate processing during thick plate processing, deterioration in positioning accuracy of the laser beam 13 is suppressed. Is possible.

  In addition, since the disturbance compensation command is generated using the acceleration learning data D1 stored in advance, it is possible to compensate for the error between the calculated acceleration command and the actual acceleration of the machining head 6A. It becomes.

  In addition, since the disturbance compensation command is generated using the acceleration learning data D1 stored in advance, it is possible to easily suppress the deterioration of the positioning accuracy of the laser beam 13 with the numerical controller 1B having a simple configuration. .

Embodiment 3 FIG.
Next, a third embodiment of the present invention will be described with reference to FIGS. In the third embodiment, the acceleration command of the machining head 6X is prefetched from the machining program, and the timing for performing disturbance compensation is instructed to the machining head 6X based on the prefetching result.

  FIG. 7 is a diagram illustrating a configuration of a lens driving system according to the third embodiment. Among the constituent elements in FIG. 7, constituent elements that achieve the same functions as those of the lens driving system 100 </ b> A of Embodiment 1 shown in FIG. 2 are given the same numbers, and redundant descriptions are omitted.

  The lens driving system 100C includes a numerical control device 1C that is an example of a numerical control device 1X, and a processing head 6C that is an example of a processing head 6X. The numerical controller 1C is a computer or the like that controls the machining head 6C, and controls the position of the machining head 6C and the position of the machining lens 12.

  The numerical control device 1C includes a machining program storage unit 2, a machining head command generation unit 3A, a disturbance estimation / compensation unit 4A, an eccentricity command generation unit 5, and a compensation timing calculation unit 24. In the lens driving system 100C, a device (such as a numerical control device 1C) having a disturbance estimation / compensation unit 4A, an eccentricity command generation unit 5, and a compensation timing calculation unit 24 operates as a lens control device that controls the lens driving device 8C. To do.

  The compensation timing calculation unit 24 prefetches the acceleration command of the machining head 6C from the machining program in the machining program storage unit 2, and instructs the lens driving device 8C when to perform disturbance compensation based on the prefetching result.

  If the communication cycle between the numerical control device 1C and the lens driving device 8C is longer than the control cycle of the thrust control system 22, the disturbance compensation command may not be in time for the actual acceleration of the processing lens 12. In the present embodiment, the compensation timing calculation unit 24 prefetches the acceleration command of the machining head 6C from the machining program. Thereby, the compensation timing calculation part 24 can grasp | ascertain the change of the acceleration of the processing head 6C in advance.

  The compensation timing calculation unit 24 inputs the timing for starting or ending the disturbance compensation command and the period for inputting the disturbance compensation command to the lens driving device 8C (thrust control system 22 side) as the compensation timing. The compensation timing is a timing at which the lens driving device 8C takes in a disturbance compensation command, and is set according to the timing at which the machining head 6C starts or ends acceleration.

  The cycle for switching the input start / stop of the disturbance compensation command is shorter than the communication cycle between the numerical control device 1C and the machining head 6C, and is, for example, the same cycle as the control cycle of the thrust control system 22. The cycle for switching the input start / stop of the disturbance compensation command is, for example, 1/10 of the communication cycle between the numerical controller 1C and the machining head 6C.

  Thereby, the compensation timing calculation unit 24 causes the adder 32 to switch the input start and the input stop of the disturbance compensation command at a cycle shorter than the communication cycle between the numerical controller 1C and the machining head 6C. In other words, the compensation timing calculation unit 24 starts or ends the disturbance compensation command at an appropriate timing according to the timing at which the machining head 6C actually changes the acceleration.

FIG. 8 is a diagram for explaining a communication cycle between the numerical controller and the lens driving device and a control cycle of the thrust control system. The horizontal axis in FIG. 8 is time, and the vertical axis is a disturbance compensation command corresponding to the acceleration command. In FIG. 8, a communication cycle (communication cycle of position command and eccentricity command) between the numerical control device 1C and the machining head 6C (lens driving device 8C) is indicated by a communication cycle _Tcom . The timing (period) at which the disturbance compensation command is input to the thrust control system 22 is indicated by compensation timings T _comp1 and T _comp2 .

The compensation timing calculation unit 24 of the present embodiment _inputs compensation timings T _comp1 and T _comp2 corresponding to the timing at which the machining head 6C changes acceleration to the lens driving device 8C (adder 32). Thereby, a disturbance compensation command is input to the thrust control system 22 at the compensation timings T _comp1 and T _comp2 from the disturbance estimation / compensation unit 4A.

By providing the compensation timings T _comp1 and T _comp2 in the control cycle of the thrust control system 22, the time resolution of disturbance compensation can be improved. As a result, even when the communication cycle T _com between the numerical control device 1C and the lens driving device 8C is longer than the control cycle of the thrust control system 22, substantially the same effect as in the first embodiment can be obtained. .

  As described above, according to the third embodiment, the lens driving system 100C prefetches the acceleration command of the machining head 6C from the machining program, and instructs the machining head 6C to perform the disturbance compensation timing based on the prefetching result. Therefore, even when the machining head 6C moves with high acceleration such as corner processing or thin plate processing during thick plate processing, it is possible to suppress deterioration in positioning accuracy of the laser beam 13.

  Further, since the start / end of disturbance compensation is instructed at a cycle shorter than the communication cycle between the numerical controller 1C and the machining head 6C, the time resolution of the disturbance compensation can be improved, and as a result, the disturbance compensation can be performed at an appropriate timing. Can be performed.

Embodiment 4 FIG.
Next, a fourth embodiment of the present invention will be described with reference to FIG. In the fourth embodiment, a disturbance compensation command is generated using the acceleration learning data, the acceleration command of the machining head 6X is prefetched from the machining program, and the timing for performing disturbance compensation is instructed to the machining head 6X based on the prefetching result. To do. That is, the numerical control device of the fourth embodiment has a configuration in which the numerical control device 1B of the second embodiment includes the compensation timing calculation unit 24.

  FIG. 9 is a diagram illustrating a configuration of a lens driving system according to the fourth embodiment. 9, the same reference numerals are given to components that achieve the same functions as the lens driving system 100A of the first embodiment shown in FIG. 2 and the lens driving system 100C of the third embodiment shown in FIG. Redundant description is omitted.

  The lens driving system 100D includes a numerical control device 1D that is an example of a numerical control device 1X, and a processing head 6C that is an example of a processing head 6X. The numerical controller 1D is a computer or the like that controls the machining head 6C, and controls the position of the machining head 6C and the position of the machining lens 12. The numerical control apparatus 1D includes a machining program storage unit 2, a machining head command generation unit 3B, an acceleration learning data storage unit 23, a disturbance compensation unit 4B, an eccentricity command generation unit 5, and a compensation timing calculation unit 24. In the lens driving system 100D, a device (such as the numerical control device 1D) having the disturbance compensation unit 4B, the eccentricity command generation unit 5, and the compensation timing calculation unit 24 operates as a lens control device that controls the lens driving device 8C.

  In the present embodiment, as in the second embodiment, a disturbance compensation command is generated using the acceleration learning data D1. Similarly to the third embodiment, the compensation timing calculation unit 24 prefetches the acceleration command of the machining head 6C from the machining program and sends the compensation timing to the lens driving device 8C.

  Accordingly, the lens driving device 8C inputs a disturbance compensation command to the thrust control system 22 side in accordance with the timing at which the machining head 6C is accelerated. The compensation timing calculation unit 24 may generate the compensation timing using the acceleration learning data D1 in the acceleration learning data storage unit 23.

  As described above, according to the fourth embodiment, the lens driving system 100D prefetches the acceleration command of the machining head 6C from the machining program, and instructs the machining head 6C to perform the disturbance compensation based on the prefetching result. Therefore, even when the machining head 6C moves with high acceleration such as corner processing or thin plate processing during thick plate processing, it is possible to suppress deterioration in positioning accuracy of the laser beam 13.

  As described above, the control device, the lens driving system, and the laser processing apparatus according to the present invention are suitable for laser processing in which the optical axis of the laser beam is decentered with respect to the nozzle axis of the processing nozzle.

1A to 1D, 1X Numerical control device 3A, 3B Machining head command generation unit 4A Disturbance estimation / compensation unit 4B Disturbance compensation unit 5 Eccentric command generation unit 6A, 6C, 6X Machining head 7 Machining head drive device 8A, 8C Lens drive device 9 Laser beam nozzle center 10 Laser beam nozzle 11 Lens actuator 12 Processing lens 13 Laser beam 14 Laser beam center 22 Thrust control system 23 Acceleration learning data storage unit 24 Compensation timing calculation unit 30 Laser oscillator 40 Workpiece 100A to 100D Lens drive system 101 Laser processing equipment

Claims (7)

Processing that generates, using a processing program, a position command for driving a processing head that irradiates a workpiece with a laser beam oscillated from a laser oscillator, and outputs the command to a processing head driving device that drives the processing head A head command generation unit;
A lens driving device for driving a processing lens disposed in the processing head and condensing the laser beam;
An eccentricity command generating unit that generates and outputs an eccentricity command for decentering a laser beam center with respect to a nozzle center of a processing nozzle included in the processing head; and
A compensator for generating and outputting a disturbance compensation command for compensating for disturbance to the lens driving device due to the dynamic behavior of the machining head based on the acceleration of the machining head according to the machining program;
Equipped with a,
The lens driving device, based on the eccentricity command and the disturbance compensation command, compensates for the disturbance caused by the dynamic behavior of the machining head driven according to the machining program, and outputs the machining lens to the eccentricity command. A lens driving system, wherein the processing lens is driven so that the positions coincide with each other . The machining head command generation unit calculates an acceleration of the machining head based on the machining program, generates a position command of the machining head using the calculated acceleration,
The lens driving system according to claim 1, wherein the compensation unit generates the disturbance compensation command using the calculated acceleration. The compensation unit generates the disturbance compensation command based on acceleration of the machining head measured and learned in advance when the machining head is driven using the machining program. 2. The lens driving system according to 1 . A compensation timing calculation unit that generates a compensation timing that is a timing at which the lens driving device takes in the disturbance compensation command based on the acceleration of the processing head and outputs the compensation timing to the lens driving device is further provided. The lens drive system according to any one of claims 1 to 3. A machining head drive device for driving a machining head that irradiates a workpiece with a laser beam oscillated from a laser oscillator; and
A lens driving device for driving a processing lens disposed in the processing head and condensing the laser beam;
Outputs a position command for driving the pre-Symbol processing head, and a control unit for outputting the eccentricity command for decentering the laser beam center with respect to the nozzle center of the processing nozzle having the pre-Symbol machining head,
With
The controller is
A machining head command generator for generating the position command using a machining program;
An eccentricity command generator that generates the eccentricity command using the machining program;
A compensator for generating and outputting a disturbance compensation command for compensating a disturbance to the lens driving device due to the dynamic behavior of the machining head based on the acceleration of the machining head;
I have a,
The lens driving device, based on the eccentricity command and the disturbance compensation command, compensates for the disturbance caused by the dynamic behavior of the machining head driven according to the machining program, and outputs the machining lens to the eccentricity command. A lens driving system, wherein the processing lens is driven so that the positions coincide with each other . Based on the acceleration of the processing head, further includes a compensation timing calculation unit that generates a compensation timing that is a timing for causing the lens driving device to take in the disturbance compensation command, and outputs the compensation timing to the lens driving device,
6. The lens driving system according to claim 5, wherein a thrust control cycle when the lens driving device drives the processing lens is shorter than a communication cycle between the device and the lens driving device. A laser oscillator for oscillating a laser beam;
A processing head for irradiating a workpiece with a laser beam oscillated from the laser oscillator;
A machining head drive device for driving the machining head;
A lens driving device for driving a processing lens disposed in the processing head and condensing the laser beam;
Outputs a position command for driving the pre-Symbol processing head, and a control unit for outputting the eccentricity command for decentering the laser beam center with respect to the nozzle center of the processing nozzle having the pre-Symbol machining head,
With
The controller is
A machining head command generator for generating the position command using a machining program;
An eccentricity command generator that generates the eccentricity command using the machining program;
A compensator for generating and outputting a disturbance compensation command for compensating a disturbance to the lens driving device due to the dynamic behavior of the machining head based on the acceleration of the machining head;
I have a,
The lens driving device, based on the eccentricity command and the disturbance compensation command, compensates for the disturbance caused by the dynamic behavior of the machining head driven according to the machining program, and outputs the machining lens to the eccentricity command. A laser processing apparatus, wherein the processing lens is driven so that the positions coincide with each other .

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