JP5634698B2 - Mass flow sensor device manufacturing method and mass flow sensor device - Google Patents

Description

  The present invention relates to a method for manufacturing a mass flow sensor device and a mass flow sensor device.

  Mass flow sensor devices are used in various industrial areas to determine the flow rate of media. For example, the mass flow sensor device is an air mass sensor device that flows through the gas measuring device to determine the flow rate of air flowing in the intake pipe of the internal combustion engine, or in the direction of the ignition unit, or the gas consumption. Used to determine the flow rate of combustion gas. Mass flow sensor devices used in internal combustion engines with fuel injection are used to accurately measure intake air flow. Thereby, the fuel injection amount is obtained with high accuracy.

  In order to determine the flow rate of air or the flow rate of combustion gas, the mass flow sensor device has a sensor member. The measurement result of the sensor member is very sensitive to the arrangement of the sensor member in the bypass surrounding the sensor member.

  DE10311039A1 discloses a flow measuring device. This device is configured with a passage for introducing and conveying air for measurement and has a sensor portion. Here, this sensor portion is arranged in a passage for measuring the flow rate of air. The contracted flow portion is configured as follows on the inner surface of the passage. In other words, the contracted flow portion is configured to face the sensor portion. The contracted flow portion narrows the flow of air flowing in the vicinity of the sensor portion. The flat surface of the contracted portion is parallel to the surface of the sensor portion and is configured at least above the flow of the sensor portion.

  DE102005036189A1 discloses a hot film air mass meter. The high temperature film air mass meter has a high temperature film sensor chip. The carrier member has a holder for mounting the high temperature film sensor chip. At least one conductor track is mounted on the carrier member by the MID (molded interconnect device) method. At least one electronic component is deposited on the at least one conductor track in the next step. Next, a high temperature film sensor chip is deposited in the holder.

  DE4219454A1 discloses a mass flow sensor. This is used to detect the intensity of the medium flow rate. The mass flow sensor includes a measuring chip having a dielectric diaphragm and a frame made of single crystal silicon. At least one heater is disposed on the diaphragm. Such a measuring chip is configured in the flow channel of the housing.

  DE19724659A1 discloses a device for measuring the gas flow rate. This device for measuring the gas flow rate has a tube body. The internal space is used as a passage for the flowing gas to be measured. A part of the housing having a general U-shaped peripheral passage is constituted with a tube body. A plate-shaped flow rate detection member is disposed in the first passage of the peripheral passage. Here, the passage restricting portion is disposed behind the first passage in the flow direction in the second passage of the peripheral passage. The inflow portion of the peripheral passage is disposed in the vicinity of the center in the axial direction of the tube body. Here, the exit portion of the peripheral passage is disposed in the vicinity of the tube wall portion of the tube body.

DE10311039A1 DE102005036189A1 DE4219454A1 DE19724659A1

  An object of the present invention is to provide a method of manufacturing a mass flow sensor device that realizes an accurate and reliable mass flow sensor device, and to realize an accurate and reliable mass flow sensor device.

The above-described problem is a method of manufacturing a mass flow sensor device having a housing body, the housing body having a bypass,
The carrier member is at least partially disposed within the bypass;
A mass flow sensor with at least one sensor member is at least partially disposed in the bypass to determine the mass of air flowing therethrough and mechanically coupled to the carrier member as follows: At least one sensor member coupled to be disposed in a predetermined position within the bypass;
Then providing an in-fluid object with a notch, wherein the in-fluid object is configured to set a flow guide in the region of at least one sensor member, Wherein the mass flow sensor is mechanically coupled to the carrier member and / or the housing body such that the mass flow sensor is disposed within a notch of the in-fluid object. A method of manufacturing a mass flow sensor device and a mass flow sensor device, the mass flow sensor device comprising:
A housing body having a bypass;
A carrier member disposed at least partially within the bypass;
A mass flow sensor having at least one sensor member for determining the mass of air flowing through, the mass flow sensor being at least partially disposed in the bypass, the at least one sensor Mechanically coupled to the carrier member such that a member is placed in place within the bypass;
Having an in-fluid object with a notch, the in-fluid object being configured to set a flow guide in the region of at least one sensor member, and the in-fluid object in the bypass; Disposed on the carrier member and mechanically coupled to the carrier member and / or housing body such that the mass flow sensor is disposed within a notch of the in-fluid object. This is solved by the mass flow sensor device.

1 is a longitudinal sectional view of a mass flow sensor device having a housing body, the housing body being disposed in a main channel. It is a longitudinal cross-sectional view of a housing body. A part of the housing body and an object in the fluid. A portion of a housing body having an in-fluid object. It is a flowchart of the manufacturing method of the mass flow sensor apparatus which has step V1-V5.

  Advantageous developments are described in the dependent claims.

  The invention features a method of manufacturing a mass flow sensor device and the resulting mass flow sensor device. The mass flow sensor device includes a housing body having a bypass. The carrier member is at least partially disposed within the bypass. A mass flow sensor with at least one sensor member is at least partially disposed within the bypass and mechanically coupled to the carrier member to determine the mass of air flowing therethrough as follows. That is, at least one sensor member is coupled to be disposed at a predetermined position in the bypass. An in-fluid object (Stroemungskoerper) having a notch is configured for setting a flow guide in the region of at least one sensor member. The in-fluid object is disposed on the carrier member in the bypass and is mechanically coupled to the carrier member and / or the housing body as follows. That is, the mass flow sensor is coupled so as to be disposed in the notch of the in-fluid object. This allows a setting that allows the flow guide to be accurately and accurately reproduced within the area of the at least one sensor member. The mechanical coupling of the mass flow sensor with the carrier member allows for precise orientation of the mass flow sensor in the bypass. Subsequent placement of the in-fluid object additionally makes it possible to accurately set the flow guide around the correctly oriented mass flow sensor.

  In an advantageous configuration, the mass flow sensor is glued onto the carrier member. This allows the mass flow sensor to be accurately positioned on the carrier member within the bypass.

  In an advantageous configuration, the in-fluid object is bonded to the support carrier and / or the housing body. Thereby, the in-fluid object can be accurately positioned in the bypass and the flow guide can be accurately set in the region of at least one sensor member.

  In an advantageous configuration, the carrier member consists of ceramic or plastic. Thereby, the thermal conductivity and electrical conductivity of the carrier member can be set accurately. These two influence the measurement results of at least one sensor member.

  Next, embodiments of the present invention will be described in detail with reference to the drawings.

  Constituent members having the same structure or function are denoted by the same reference numerals in all the drawings.

  FIG. 1 shows a mass flow sensor device 2 arranged in the main channel 4. The main channel 4 is, for example, an intake pipe of an internal combustion engine, and air mass to be obtained flows from the mass flow sensor device 2 through the intake pipe.

  The mass flow sensor device 2 includes a housing body 6. A flow channel 8 is disposed in the housing body. The flow channel 8 is preferably arranged as follows, depending on the orientation of the housing body 6. That is, the inflow port of the flow channel 8 is disposed so as to face the main flow direction of the air mass that flows through.

  A bypass 10 is further arranged in the housing body 6. This has an inner wall 12. The bypass 10 branches off from the flow channel 8 and flows into the housing body 6 downstream in the flow direction and joins the flow channel 8 again. A mass flow sensor 14 is disposed in the bypass 10. Here, the mass flow sensor includes at least one sensor member 16 (see FIG. 2). The sensor member 16 is configured to detect the mass of air flowing through it.

  FIG. 2 shows a cross-sectional view of the housing body 6 of the mass flow sensor device 2. An in-fluid object 18 is disposed around the mass flow sensor 14 on which the sensor member 16 is disposed. The in-fluid object 18 includes a notch 20 (see FIG. 3). A mass flow sensor 14 is disposed in the opening. The in-fluid object 18 is used to accurately set the flow guide in the area of the sensor member 16. In an advantageous embodiment, the surface 19 of the in-fluid object 18 is arranged at approximately the same height as the surface 15 of the mass flow sensor 14 in the region of the notch 20. The advantage of the in-fluid object 18 is that the in-fluid object 18 can be incorporated into the bypass 10 very accurately after the mass flow sensor 14 having the sensor member 16 is attached in the manufacturing method of the mass flow sensor device 2. That's what it means. In this way, the flow guide in the area of the sensor member 16 can be set accurately and accurately in the bypass 10. As a result, a reliable mass flow sensor device 2 is obtained.

  A detailed view of the area of the bypass 10 with the in-fluid object 18 and the mass flow sensor 14 with the sensor member 16 is shown in FIGS. FIG. 3 shows an in-fluid object 18 having a surface 19 in the region of the notch 20 as well as a portion of the bypass 10. In the area of the mass flow sensor 14, the inner wall 12 of the bypass 10 is interrupted. A mass flow sensor 14 having a sensor member 16 is partially disposed within the bypass 10. Although not shown in FIGS. 3 and 4, for example, the mass flow sensor 14 can extend at least partially into the cavity. Here, for example, an evaluation electronic circuit is arranged on the mass flow sensor 14. The evaluation electronic circuit evaluates an input signal from the sensor member 16 and supplies it to the control device via, for example, an electrical contact.

  A mass flow sensor 14 having a sensor member 16 is disposed on the carrier member 22. The carrier member 22 extends, for example, in a region where the inner wall 12 of the bypass 10 is interrupted. In an advantageous configuration, the carrier member 22 is made of ceramic or plastic. Thereby, the electrical conductivity and / or thermal conductivity of the carrier member 22 can be set reliably. The conductivity and thermal conductivity of the carrier member 22 affect the measurement result of the sensor member 16.

  The in-fluid object 18 is mounted on the carrier member 22 and mechanically coupled to the carrier member 22 and / or the inner wall 12 of the bypass 10. The fluid inner object 18 is bonded to the carrier member 22 and / or the inner wall 12 of the bypass 10, for example.

  The mass flow sensor 14 is advantageously arranged in the notch 20 of the in-fluid object 18 as follows. That is, the mass flow sensor is not mechanically coupled to the in-fluid object 18 but the mass flow sensor 14 is spaced from the in-fluid object 18. The distance between the mass flow sensor 14 and the in-fluid object 18 is, for example, several micrometers. The combination of the mass flow sensor 14 and the sensor member 16 disposed on the carrier member 22 and surrounded by the in-fluid object 18 has three advantages: First, the mass flow sensor 14 That is, it can be positioned on the carrier member 22 accurately and accurately. Second, the conductivity and thermal conductivity through the carrier member 22 can be accurately set within the area of the sensor member 16. Third, the flow guide can be accurately set in the area of the sensor member 16 by the in-fluid object 18.

  FIG. 5 shows a flowchart having steps V1 to V5. The manufacturing method of the mass flow sensor device 2 will be described below using this flowchart.

  The method starts with a first step V1. In the first step V1, the housing body 6 is provided. Here, a bypass 10 having a flow channel 8 and an inner wall portion 12 is formed in the housing body.

  In the second step V2, the carrier member 22 is at least partially disposed in the bypass 10 and mechanically coupled to the housing body 6 and / or the inner wall 12 of the bypass. For example, the carrier member 22 is bonded to the housing body 6 and / or the inner wall portion 12.

  In the third step V 3, the mass flow sensor 14 having the sensor member 16 is at least partially disposed in the bypass 10 and mechanically coupled to the carrier member 22. For example, the mass flow sensor 14 is bonded to the carrier member 22. The advantage of the combination of the carrier member 22 and the mass flow sensor 14 is that the mass flow sensor 14 can be positioned on the carrier member 22 in a very accurate and accurate manner so that the sensor member 16 can be bypassed 10. It can be arranged at a predetermined position.

  In the fourth step V4, the in-fluid object 18 having the notch 20 is disposed in the bypass 10 as follows. That is, the in-fluid object 18 covers the carrier member 22 and the mass flow sensor 14 is arranged in the notch. Thus, the flow guide can be accurately set by the in-fluid object 18 in the region of the sensor member 16.

  The method of the invention ends in the fifth step V5.

  2 Mass Flow Sensor Device, 4 Main Channel, 6 Housing Body, 8 Flow Channel, 10 Bypass, 12 Inner Wall, 14 Mass Flow Sensor, 16 Sensor Member, 18 Fluid Object, 20 Notch, 22 Carrier Member

Claims (5)

A method of manufacturing a mass flow sensor device (2) having a housing body (6), the housing body (6) having a bypass (10),
Adhering the carrier member (22) to the housing body (6) and / or the inner wall (12) of the bypass (10);
A mass flow sensor (14) with at least one sensor member (16) is arranged at least partially in the bypass (10) to determine the mass of air flowing therethrough, said carrier member (22); Mechanically coupled as follows: at least one sensor member (16) is coupled in a predetermined position in the bypass (10);
-Next, an in-fluid object (18) with a notch (20) is provided, the in-fluid object being configured to set a flow guide in the region of at least one sensor member (16) The object in the fluid is adhered to the inner wall (12) of the carrier member (22) and / or the bypass (10) so as to cover the carrier member (22), and the carrier member (22) and / or Or mechanically coupled so that the housing body (6) and the mass flow sensor (14) are located in the notch (20) of the in-fluid object (18),
A method of manufacturing a mass flow sensor device.   The method of claim 1, wherein the mass flow sensor (14) is glued onto the carrier member (22). A mass flow sensor device (2) comprising:
The mass flow sensor device has the following:
A housing body (6) having a bypass (10);
A carrier member (22) bonded to the housing body (6) and / or the inner wall (12) of the bypass (10);
A mass flow sensor (14) having at least one sensor member (16) for determining the mass of air flowing through, said mass flow sensor being at least partially arranged in the bypass (10) And is mechanically coupled to the carrier member (22) such that the at least one sensor member (16) is positioned in place within the bypass (10);
Having an in-fluid object (18) having a notch (20), the in-fluid object being configured to set a flow guide in the region of at least one sensor member (16), and the inner wall portion of the fluid within the object said carrier member (22) and / or the bypass (10) to (12), wherein are adhered so as to cover the support member (22), said support member (22) and / or A housing body (6) and the mass flow sensor (14) are mechanically coupled so as to be disposed in a notch (20) of the in-fluid object (18);
A mass flow sensor device. The mass flow sensor device (2) according to claim 3 , wherein the carrier member (22) is made of ceramic or plastic. The bypass (10) branches off from the flow channel (8) in the housing body (6) and joins the flow channel (8) again downstream in the flow direction. Mass flow sensor device (2).

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