JP5611748B2 - Method and apparatus for processing wire source waste liquid - Google Patents

Description

  The present invention relates to a method and apparatus for processing a wire source slurry in which coolant is effectively separated from slurry waste liquid obtained by slicing a workpiece by supplying coolant to a wire with fixed abrasive grains.

  In the manufacture of crystalline solar cells, there is a slicing process in which a single wafer or a polycrystalline silicon ingot is sliced to form a thin wafer. In such a slicing process, abrasive particles have been conventionally added to the coolant. A loose abrasive wire saw is used in which a workpiece is cut (cut) by pressing the wire row against the workpiece while supplying the dispersed cutting fluid to the traveling wire row. Therefore, the slurry waste liquid discharged from the loose abrasive wire saw contains a mixture of coolant, abrasive grains, and fine silicon particles generated by cutting.

  When the used slurry waste liquid is repeatedly used as it is in the above-mentioned free abrasive type wire saw, silicon particles cut together with the abrasive grains are supplied to the wire, so that the silicon particles are interposed between the wire and the abrasive grains. By obstructing the cutting of the workpiece, the cutting performance of the workpiece is lowered, and the cutting accuracy is also lowered.

  For this reason, conventionally, the waste slurry is disposed of as it is. However, when disposed in this way, there is a problem that the cost is increased and the environment is contaminated. Therefore, in recent years, it has been studied to recover the coolant from the slurry waste liquid by filtration by adding an alkaline solution to the slurry waste liquid and heating, and to reuse the recovered coolant in this way (for example, Patent Documents). 1).

  The coolant used in the above-mentioned free abrasive type wire saw has a role of uniformly mixing abrasive grains and supplying them to the wire, so that it is based on a mineral oil having a relatively high viscosity and excellent abrasive dispersibility compared to the conventional. The coolant is mainly used, and the slurry waste liquid discharged from the loose abrasive wire saw is mixed with the abrasive particles and solid particles such as fine silicon particles at a high concentration. It is a viscosity.

  Thus, since the slurry waste liquid from the conventional free abrasive type wire saw has a relatively high viscosity, even if it is attempted to separate the slurry waste liquid into coolant and solid particles (abrasive grains, silicon particles) by guiding the slurry waste liquid to a separation device. It was difficult to separate effectively. For this reason, in the said patent document 1, it is trying to improve filtration performance by heating the slurry waste liquid led to a filter and reducing a viscosity. As a separation apparatus for separating the coolant from the slurry waste liquid, a method using a membrane filter, a method using a vibration filter, a method using a centrifugal separator, a method of separating by heating evaporation, and the like have been proposed.

  As described above, when the coolant is separated from the slurry waste liquid and reused, and the abrasive grains are separated and reused, the amount of coolant and abrasive grains used is reduced and the economic efficiency is increased. There is an advantage that volume can be reduced.

  On the other hand, in recent years, a fixed-abrasive wire saw in which a workpiece is sliced or the like using a wire with fixed abrasive grains in which diamond abrasive grains are fixed to the outer peripheral surface of a steel wire is used (for example, Patent Documents). 2 and 3).

  As a coolant for the above-mentioned fixed abrasive wire saw, there are those using glycols such as propylene glycol (PG), diethylene glycol (DEG), and polyethylene glycol (PEG) as a base material.

  The above-mentioned fixed-abrasive wire saw can cut at about 3 to 4 times faster than the conventional free-abrasive wire saw, and the fixed-abrasive wire saw needs to disperse the abrasive grains in the coolant. Therefore, the coolant is set to have a lower cutting viscosity than that of a conventional coolant so that a predetermined cutting property can be obtained in an operating temperature range of about 30 ° C. On the other hand, the coolant of the fixed-abrasive wire saw has a problem that the machinability is lowered when the viscosity becomes too low. Therefore, the coolant of the fixed abrasive wire saw has the lowest viscosity when the operating temperature range is around 30 ° C., and the viscosity increases when the temperature is lower than the operating temperature range and higher than the operating temperature range. Thus, the viscosity is adjusted by adding an additive or the like so that the machinability is maintained.

  Even in the above-mentioned fixed abrasive type wire saw, if the waste slurry liquid that has been cut is repeatedly used as it is, the cut silicon particles are again supplied to the wire with fixed abrasive grains and interfere with the cutting of the workpiece. The cutting accuracy is also lowered.

  Accordingly, in the fixed abrasive wire saw, it is preferable to separate the slurry waste liquid into coolant and solid particles. However, in the case of the fixed abrasive wire saw, since the abrasive grains are not dispersed in the slurry waste liquid, The coolant can be recovered simply by separating the silicon particles.

JP 2005-349507 A JP 2002-144229 A JP 2010-029998 A

  However, the slurry waste liquid that has been sliced with the fixed abrasive wire saw is in an operating temperature range of around 30 ° C. when the coolant is recovered by guiding it to a separation device such as a centrifugal separator and a vibration filter. When the coolant is separated from the slurry waste liquid, the viscosity is the lowest and the viscosity is increased when the temperature is lower than the operating temperature range and higher than the operating temperature range. When the slurry waste liquid is heated as shown in Patent Document 1 in order to improve the separability, there is a problem in that the viscosity increases and the separation performance decreases conversely.

  The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a method and apparatus for treating a wire source slurry waste liquid that effectively separates coolant from the slurry waste liquid of a fixed abrasive wire saw.

The present invention relates to a slurry waste liquid treatment method for separating a coolant by supplying a slurry waste liquid of a fixed abrasive wire saw to a separator, and the slurry waste liquid when being supplied from a storage tank to the separator is operated at around 30 ° C. When the temperature is in the temperature range, the viscosity is the lowest, and when the temperature is lower than the operating temperature range and higher than the operating temperature range, the viscosity is increased. The temperature or viscosity of the slurry waste liquid supplied to the device is detected. Based on the detected temperature or viscosity of the slurry waste liquid, the temperature of the slurry waste liquid is adjusted so that the viscosity of the slurry waste liquid supplied to the separation device is maintained at the minimum viscosity. The present invention relates to a method for treating a wire source waste liquid, wherein the temperature is adjusted to a set temperature of about 30 ° C.

  In the processing method of the wire source slurry waste liquid, it is preferable to circulate the concentrate in which the coolant is separated from the slurry waste liquid by the separation device and the solid particles are concentrated to the storage tank.

    Moreover, in the processing method of the said wire source slurry waste liquid, it is preferable that the set temperature of the slurry waste liquid supplied to the said separation apparatus shall be 27-50 degreeC.

  Moreover, in the processing method of the said wire source slurry waste liquid, it is preferable to hold | maintain the temperature of the slurry waste liquid supplied to the said separation apparatus to the said setting temperature, and to give a vibration to slurry waste liquid.

The present invention is a slurry waste liquid treatment apparatus for separating a coolant by supplying a slurry waste liquid of a fixed-abrasive wire saw to a separator, and the slurry waste liquid when being supplied from a storage tank to the separator is operated at around 30 ° C. Based on the fact that the viscosity is the lowest in the temperature range, and when the temperature is lower than the operating temperature range and higher than the operating temperature range, the viscosity increases.
A thermometer for detecting the temperature of slurry waste liquid supplied from the storage tank to the separation device, or a viscometer for detecting viscosity;
Based on the detected value of the thermometer or viscometer, the temperature of the slurry waste liquid in the storage tank is adjusted to the set temperature around 30 ° C. so that the viscosity of the slurry waste liquid supplied to the separation device maintains the minimum viscosity. An adjustment device;
The present invention relates to a processing apparatus for a wire source waste liquid, comprising:

  In the wire source waste liquid treatment apparatus, the temperature control device is preferably a heater or a cooler.

  In the wire source slurry liquid processing apparatus, the separator is a filter that separates the coolant from the slurry waste liquid, and the concentrated liquid from which the coolant is separated and the solid particles are concentrated is returned to the storage tank. It is preferable to have a circulation channel.

  In the wire source waste liquid treatment apparatus, the filter is preferably a membrane filter.

  In the wire source waste liquid treatment apparatus, the filter is preferably a vibration filter.

  Moreover, it is preferable that the processing apparatus for the wire source slurry waste liquid includes a front-stage centrifuge for separating solid particles from the slurry waste liquid guided to the storage tank.

  Moreover, it is preferable that the processing apparatus for the wire source slurry waste liquid further includes a subsequent centrifuge for taking out a part of the slurry waste liquid in the storage tank and separating the solid particles.

  In addition to the temperature control device, the wire source slurry wastewater treatment apparatus preferably further includes a vibration applying device that vibrates the slurry wastewater introduced into the separation device.

  According to the processing method and apparatus for the wire source slurry waste liquid of the present invention, the temperature or viscosity of the slurry waste liquid supplied to the separator is detected, and the viscosity of the slurry waste liquid supplied to the separator based on the detected temperature or detected viscosity of the slurry waste liquid. Since the temperature of the slurry waste liquid is adjusted to the set temperature so that the viscosity of the slurry waste liquid is maintained at the minimum viscosity, the viscosity of the slurry waste liquid supplied to the separator is always kept at the minimum viscosity. The separability is improved, and an excellent effect that the coolant can be effectively separated can be obtained.

It is a block diagram which shows an example of the whole structure of the processing apparatus of the wire source waste liquid in this invention. It is a block diagram which shows an example at the time of providing the membrane filter as a separator. It is a block diagram which shows an example at the time of providing a vibration filter as a separator. It is a graph which shows the relationship between the temperature and viscosity of the slurry waste liquid from the conventional loose abrasive type wire saw. It is a graph which shows the relationship between the temperature and viscosity of the slurry waste liquid from the fixed abrasive type wire saw of this invention.

  Embodiments of the present invention will be described below with reference to the accompanying drawings.

  FIG. 1 is a block diagram showing an example of the overall configuration of a wire source library processing apparatus according to the present invention. In FIG. 1, reference numeral 1 denotes a fixed abrasive wire saw, and a coolant 2 is supplied to the fixed abrasive wire saw 1, and a workpiece is sliced by a wire with fixed abrasive (not shown). From the wire saw 1, slurry waste liquid 3 in a state where fine silicon particles are mixed with coolant by cutting a workpiece is discharged, and this slurry waste liquid 3 is stored in a receiving tank 4.

  Slurry waste liquid 3 in the receiving tank 4 is supplied to and stored in a storage tank 5 by a pump P, and the slurry waste liquid 3 in the storage tank 5 is supplied by a pump P to a preceding centrifuge 7 that is a separation device 6. Then, the coarse solid particles 8 a are separated, and the slurry waste liquid 3 a from which the coarse solid particles 8 a are separated is stored in the receiving tank 9.

  The slurry waste liquid 3a in the receiving tank 9 is supplied to the storage tank 10 by the pump P and stored. At this time, a part of the slurry waste liquid 3a from which the coarse solid particles 8a supplied to the storage tank 10 are separated is supplied to the adjustment tank 12 supplying the coolant 2 to the fixed abrasive wire saw 1 with a valve 11a. , 11b and may be reused. New coolant and adjusting agent are supplied to the adjusting tank 12.

  The slurry waste liquid 3a in the storage tank 10 is supplied to a filter 13 as a separation device 6 by a pump P to separate the coolant 2a, and the separated coolant 2a is supplied to the adjustment tank 12 for reuse. ing. The concentrated liquid 3b in which the coolant 2a is separated by the filter 13 and the concentration of solid particles is increased is returned to the storage tank 10 by the circulation flow path 14 again.

  A part of the concentrated liquid 3b in the storage tank 10 is taken out and stored in the storage tank 15 by the pump P, and then the concentrated liquid 3b in the storage tank 15 is transferred to the subsequent centrifugal separator 16 which is the separation device 6 by the pump P. The fine liquid particles 8b that have been supplied are separated, and the recovered liquid 3c from which the fine solid particles 8b have been separated is stored in the receiving tank 17, and the recovered liquid 3c in the receiving tank 17 is stored in the storage tank by the pump P. 10 again.

  FIG. 2 is a block diagram showing an example in which a membrane filter 13a is provided as the filter 13 as the separation device 6. As shown in FIG. The membrane filter 13a is provided with a membrane 19 suspended from the inner center of the container 18, and the slurry waste liquid 3a of the storage tank 10 is introduced from a lower inlet 21 provided at the lower part of the container 18 by a pump 20 (P). The solid particles (silicon particles) contained in the slurry waste liquid 3a are captured by the film 19, and the coolant 2a passes through the film 19 and is taken out from the center to the top and sent to the adjustment tank 12. . The pump 20 includes a pressure regulator 20a that discharges the slurry waste liquid 3a at a predetermined pressure. The concentrated liquid 3 b made of a coolant containing solid particles that cannot pass through the membrane 19 is recirculated from the upper outlet 22 to the storage tank 10 through the circulation channel 14. In the membrane filter 13a, after filtering for a predetermined period, the membrane 19 is backwashed, and the solid particles captured by the membrane 19 at this time are taken out to the outside.

  The present inventors investigated the viscosity of the slurry waste liquid 3 that affects the separation when the slurry waste liquid 3 discharged from the fixed abrasive wire saw 1 is separated into coolant and solid particles by the separation device 6. Carried out.

  First, a test for investigating the relationship between the temperature and the viscosity of the slurry waste liquid when the slurry waste liquid made of the coolant used in the conventional loose abrasive wire saw (for example, Patent Document 1) is heated is shown in FIG. It was shown to. As shown in FIG. 4, in the case of the slurry waste liquid from the free abrasive type wire saw, it was found that the viscosity decreases as the temperature increases, and the fluidity of the slurry waste liquid increases as the temperature increases. Therefore, in the case of the slurry waste liquid from the free abrasive type wire saw, it has been found that heating the slurry waste liquid is preferable in order to improve the separability by the separation device.

  On the other hand, for the slurry waste liquid 3 in the case of the coolant used in the fixed abrasive wire saw 1 of FIG. 1, a test was conducted to investigate the relationship between temperature and viscosity when the slurry waste liquid 3 was heated, and the results were This is shown in FIG. As shown in FIG. 5, when the temperature of the slurry waste liquid 3, the slurry waste liquid 3a, the concentrated liquid 3b, and the recovered liquid 3c is increased, the viscosity gradually decreases to show the minimum viscosity and then increases again. It became clear that it showed the peculiar property. That is, it was found from FIG. 5 that the viscosity of the slurry waste liquid 3 can be maintained at the minimum viscosity of about 40 mp · s by setting the temperature of the slurry waste liquid 3 in the range of the set temperature X of 27 to 50 ° C.

  Further, in the case of the slurry waste liquid 3 made of the coolant used in the fixed abrasive type wire saw 1, when the slurry waste liquid 3 is kept stationary, the viscosity immediately increases and solidifies. It was found that when the slurry waste liquid 3 was vibrated, it immediately became a liquefied state and exhibited a property of rapidly decreasing the viscosity.

  In FIG. 2, in order to improve the separation performance when separating the slurry waste liquid 3a from the storage tank 10 with the membrane filter 13a, the temperature adjusting device 23 for adjusting the temperature of the slurry waste liquid 3a in the storage tank 10 is used. It has. In the fixed abrasive wire saw 1, the temperature of the slurry waste liquid 3a tends to gradually increase in order to slice the workpiece. In addition, the slurry waste liquid 3a is supplied to the membrane filter 13a by the pump 20 to separate the coolant 2a, and the remaining concentrated liquid 3b is also heated when recirculated to the storage tank 10 by the circulation channel 14. The temperature of the slurry waste liquid 3a is raised. In this way, the temperature of the slurry waste liquid 3a is adjusted within the range of the set temperature X of 27 to 50 ° C. so that the viscosity does not become higher than the minimum viscosity shown in FIG. For this purpose, the temperature control device 23 uses a cooler 23a. Further, a heater may be provided so that the temperature of the slurry waste liquid 3a does not fall below the lower limit (27 ° C.) of the set temperature X shown in FIG.

  In addition, the storage tank 10 is provided with a stirring device 24 that constantly agitates the stored slurry waste liquid 3a and applies vibration to keep the viscosity of the slurry waste liquid 3a at a small value.

  Further, at the outlet of the pump 20, at least one of a thermometer 25 for detecting the temperature of the slurry waste liquid 3a supplied to the membrane filter 13a and a viscometer 26 for detecting the viscosity is provided. Or the control apparatus 27 which inputs the detected value of the viscometer 26 is provided, and the control apparatus 27 of the said storage tank 10 is maintained so that the viscosity of the slurry waste liquid 3a supplied to the membrane filter 13a may be hold | maintained to the minimum viscosity. The temperature adjusting device 23 is controlled so that the temperature of the slurry waste liquid 3a is maintained within the range of the set temperature X of 27 to 50 ° C. shown in FIG. Further, while supplying the slurry waste liquid 3a of the storage tank 10 to the membrane filter 13a, the control device 27 applies a vibration to the slurry waste liquid 3a by sending a drive command to the stirring device 24 and driving it. This prevents the problem that the viscosity of the slurry waste liquid 3a increases.

  The operation of the above embodiment will be described below.

  A coolant 2 is supplied to the fixed-abrasive wire saw 1 of FIG. 1 and a workpiece is sliced by a wire with a fixed abrasive (not shown), and fine silicon particles by cutting are generated from the fixed-abrasive wire saw 1. The slurry waste liquid 3 mixed in the coolant 2 is discharged, and this slurry waste liquid 3 is stored in the receiving tank 4.

  The slurry waste liquid 3 in the receiving tank 4 is supplied to and stored in a storage tank 5, and the slurry waste liquid 3 in the storage tank 5 is supplied to a centrifuge 7 in the previous stage to separate coarse solid particles 8a. At this time, the separation of the coarse solid particles 8a by the centrifuge 7 can be effectively performed.

  The slurry waste liquid 3a from which the coarse solid particles 8a are separated is stored in the receiving tank 9, and then stored in the storage tank 10. The slurry waste liquid 3a in the storage tank 10 is membrane-filtered by the pump 20 shown in FIG. The coolant 2a is supplied to 13a and separated, and the separated coolant 2a is supplied to the adjusting tank 12 and reused. The concentrated liquid 3b in which the coolant 2a is separated by the membrane filter 13a and the concentration of solid particles is increased is returned to the storage tank 10 by the circulation flow path 14 again.

  A part of the concentrated liquid 3b in the storage tank 10 is taken out and stored in the storage tank 15 by the pump P, and the concentrated liquid 3b in the storage tank 15 is supplied to the centrifuge 16 in the subsequent stage, and the fine solid particles 8b are supplied. The recovered liquid 3c from which the fine solid particles 8b are separated is stored in the receiving tank 17, and the recovered liquid 3c in the receiving tank 17 is supplied to the membrane filter 13a together with the slurry waste liquid 3a in the storage tank 10. And try to circulate again. At this time, since the concentration of the fine solid particles of the concentrated liquid 3b supplied to the centrifuge 16 is increased, the fine solid particles 8a can be effectively separated by the centrifuge 7. it can.

  The temperature of the slurry waste liquid 3a supplied to the storage tank 10 tends to increase. For this reason, the control device 27 is based on the detected value of the thermometer 25 or the viscometer 26 provided at the inlet of the membrane filter 13a. The temperature adjusting device 23 controls the temperature of the slurry waste liquid 3a within the range of the set temperature X so that the viscosity of the slurry waste liquid 3a is about 40 mpa · s, which is the lowest viscosity in FIG. At the same time, the control device 27 sends a drive command to the stirrer 24 to operate the stirrer 24 and to give vibration to the slurry waste liquid 3a, thereby preventing the viscosity of the slurry waste liquid 3a from increasing.

  Therefore, since the slurry waste liquid 3a held at about 40 mpa · s which is the minimum viscosity shown in FIG. 5 is supplied to the membrane filter 13a, high separation performance by the membrane filter 13a is maintained. The coolant 2a separated by the membrane filter 13a is supplied to the adjustment tank 12, and is supplied again to the fixed abrasive wire saw 1 for circulation.

  A part of the concentrated liquid 3b in the storage tank 10 of FIG. 1 is taken out and stored in the storage tank 15, and the concentrated liquid 3b in the storage tank 15 is supplied to the centrifuge 16 in the subsequent stage so that the fine solid particles 8b are formed. The recovered liquid 3c from which the fine solid particles 8b are separated is stored in the receiving tank 17, and the recovered liquid 3c in the receiving tank 17 is pumped together with the slurry waste liquid 3a in the storage tank 10 by the pump P. To be circulated again.

  FIG. 3 is a block diagram showing an example in which a vibration filter 13 b is provided as the filter 13 as the separation device 6. The vibration filter 13b supplies the slurry waste liquid 3a to a filter 29 that is vibrated by reversing forward and reverse by a motor 28, and forms a particle layer floating on the filter 29 by crossflow so that the coolant 2a and the solid particles that are filtrates are formed. The concentrated overflow liquid 30 (concentrated liquid) is separated, and the particle layer is stabilized by adjusting the pressure difference in the filter 29 by restricting the throttle valve 32 provided in the circulation channel 31 of the overflow liquid 30. When filtration is performed and the filtration performance of the filter 29 is lowered, the switching valve 33 is switched to open the overflow liquid 30 to the storage tank 10 through an open channel 34 (circulation channel), and the particle layer To wash away. In FIG. 3, solid particles from the open channel 34 may be taken out without introducing the open channel 34 (circulation channel) to the storage tank 10.

  Even in the case where the separation device 6 using the vibration filter 13b shown in FIG. 3 is provided, by adjusting the temperature of the slurry waste liquid 3a supplied from the storage tank 10 to the vibration filter 13b in the same manner as in the above embodiment, the vibration is reduced. The effect | action which isolate | separates the coolant 2a from the slurry waste liquid 3a in the filter 13b can be performed effectively.

  In each of the above embodiments, a case where a part of the concentrated liquid 3b of the storage tank 10 is supplied to the subsequent centrifugal separator 16 to continuously separate fine solid particles has been described. When the concentration of solid particles is increased by continuing the operation of circulating and supplying the concentrated solution 3b to the membrane filter 13a of FIG. 2 or the vibration filter 13b of FIG. 3, the concentrated solution 3b is transferred to the subsequent centrifugal separator 16. You may make it perform the batch-type process which supplies and isolate | separates a fine particle solid particle.

  The storage tank 5 for supplying the slurry waste liquid 3 to the front-stage centrifuge 7 and the storage tank 15 for supplying the concentrated liquid 3b to the rear-stage centrifuge 16 shown in FIG. The temperature control device 23 and the stirring device 24 shown in FIG. 5 can be installed, and a control device 27 can be provided. Thus, the viscosity of the slurry waste liquid 3 and the concentrated liquid 3b supplied to the centrifuges 7 and 16 is the lowest. By adjusting the temperature to the set temperature X so as to maintain the viscosity, the separation performance of the slurry waste liquid 3 and the concentrated liquid 3b by the centrifuges 7 and 16 can be enhanced.

  As described above, in the present invention, the temperature or viscosity of the slurry waste liquid 3 supplied to the separator 6 is detected, and the viscosity of the slurry waste liquid 3 guided to the separator 6 is determined based on the detected temperature or viscosity of the slurry waste liquid 3. Since the temperature of the slurry waste liquid 3 is adjusted to the set temperature X so that the minimum viscosity is maintained, the viscosity of the slurry waste liquid 3 from the fixed abrasive wire saw 1 decreases as the temperature increases, and the minimum viscosity Since the viscosity of the slurry waste liquid 3 guided to the separation device 6 can always be kept at the minimum viscosity even if it has a unique property of increasing again after showing the above, the membrane filter 13a used conventionally, vibration Also in the filter 13b, and also in the centrifuges 7 and 16, it is possible to improve the separability and effectively separate the coolant from the slurry waste liquid 3.

  In addition, this invention is not limited only to the said form, Of course, a various change can be added in the range which does not deviate from the summary of this invention.

DESCRIPTION OF SYMBOLS 1 Fixed abrasive type wire saw 2 Coolant 2a Coolant 3 Slurry waste liquid 3a Slurry waste liquid 3b Concentrated liquid 4 Receiving tank 5 Reserving tank 6 Separation device 7 Precentrifuge 10 Reservoir 13 Filter 13a Membrane filter 13b Vibration filter 14 Circulation Channel 15 Reservoir 16 Subsequent centrifuge 23 Temperature controller 23a Cooler 24 Stirrer 25 Thermometer 26 Viscometer 27 Controller 31 Circulating channel X Set temperature

Claims (12)

A slurry waste liquid treatment method for separating a coolant by supplying a slurry waste liquid of a fixed-abrasive wire saw to a separator, wherein the slurry waste liquid when being supplied from a storage tank to the separator is in an operating temperature range of about 30 ° C. When the temperature is lower than the above operating temperature range and higher than the above operating temperature range, the viscosity is increased. The temperature or viscosity of the slurry waste liquid is detected. Based on the detected temperature or viscosity of the slurry waste liquid, the temperature of the slurry waste liquid is set to 30 ° C. so that the viscosity of the slurry waste liquid supplied to the separation device is maintained at the minimum viscosity. A method for treating a wire source waste liquid, wherein the temperature is adjusted to a set temperature before and after .   The processing method of the wire source slurry waste liquid according to claim 1, wherein the concentrated solution in which the coolant is separated from the slurry waste fluid by the separator and the solid particles are concentrated is circulated to the storage tank.   The processing method of the wire source slurry waste liquid according to claim 1 or 2, wherein a set temperature of the slurry waste fluid supplied to the separation device is set to 27 to 50 ° C.   The method of processing a wire source slurry waste liquid according to any one of claims 1 to 3, wherein the temperature of the slurry waste fluid supplied to the separation device is maintained at the set temperature, and the slurry waste fluid is vibrated. A slurry waste liquid treatment apparatus for supplying a slurry waste liquid of a fixed-abrasive wire saw to a separation device to separate a coolant, and when the slurry waste liquid supplied from the storage tank to the separation device is in an operating temperature range of about 30 ° C. When the temperature is lower than the above operating temperature range and when the temperature is higher than the above operating temperature range, the viscosity is increased.
A thermometer for detecting the temperature of slurry waste liquid supplied from the storage tank to the separation device, or a viscometer for detecting viscosity;
Based on the detected value of the thermometer or viscometer, the temperature of the slurry waste liquid in the storage tank is adjusted to the set temperature around 30 ° C. so that the viscosity of the slurry waste liquid supplied to the separation device maintains the minimum viscosity. An adjustment device;
An apparatus for treating a wire source waste liquid, comprising:   6. The apparatus for treating a wire source waste liquid according to claim 5, wherein the temperature adjusting device is a heater or a cooler.   The separator is a filter that separates the coolant from the slurry waste liquid, and has a circulation channel that returns the concentrated liquid, in which the coolant is separated by the filter and the solid particles are concentrated, to the storage tank. Item 7. An apparatus for treating a wire source waste liquid according to Item 5 or 6.   The processing apparatus for wire source waste liquid according to claim 7, wherein the filter is a membrane filter.   The said filter is a vibration filter, The processing apparatus of the wire source slurry waste liquid of Claim 7 characterized by the above-mentioned.   The wire source slurry wastewater treatment apparatus according to any one of claims 7 to 9, further comprising a preceding centrifugal separator that separates solid particles from the slurry wastewater led to the storage tank.   The processing apparatus of the wire source slurry waste liquid as described in any one of Claims 7-9 provided with the centrifuge of the back | latter stage which takes out a part of slurry waste liquid of the said storage tank, and isolate | separates a solid particle.   The wire source slurry wastewater treatment apparatus according to any one of claims 5 to 11, further comprising a vibration applying device that vibrates the slurry wastewater introduced into the separator in addition to the temperature control device.

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