JP5606148B2 - Stocker for product storage in clean room - Google Patents

Description

  The present invention relates to a stocker for storing a product (particularly a pellicle) manufactured in a clean room or an intermediate product thereof.

  When storing products and intermediate products to be manufactured in a clean room, when storing products exposed to air, it is very important to prevent foreign substances from adhering to the products during the manufacturing process.

  For example, a pellicle for lithography is sometimes exposed to air in a clean room and temporarily stored. In that case, the pellicle is stored in a shelf stocker for efficient space storage.

  As shown in FIG. 1, this shelf-like stocker 1 desirably has not only the entrance portion 4 but also the back portion 5. Since both sides are opened in this way, when installed in the clean room, air flows in the stocker 1 by the down flow 6 of the clean room, and the air in the stocker shelf is always replaced by fresh air, so that the product 7 Can be kept clean. In addition, 9 is a caster.

  However, as shown in FIG. 1, when there is a dust generation cause 10 (for example, a worker or a device) around the stocker, the dirty air containing the foreign material 11 enters the stocker from the periphery, and the product is damaged. There were a lot of things to do. In this case, as shown in FIG. 2, if the back surface of the stocker 1 is closed by the partition plate 12, the air containing foreign substances from the back surface is not circulated, so that the product 7 stored in the stocker is not contaminated. However, in reality, when a product is put in and out of the stocker, foreign matter is caught in the stocker shelf and the back is closed, so there is no air flow and the generated foreign matter is not easily discharged to the outside. As a result, the product may be contaminated.

  Therefore, for example, a stocker 1 for a product equipped with a fan filter unit 13 as shown in FIG. 3 has been devised (see, for example, Patent Document 1).

JP 2000-214579 A

  However, in order to mount such a fan filter unit 13, it is necessary to supply power to the stocker 1, and it becomes difficult to move due to wiring, and the movement becomes difficult due to the increase in weight. There was a problem that noise, stocker storage, and the price became expensive.

  In view of the above circumstances, the present invention can contaminate a product manufactured in a clean room (especially a pellicle) or an intermediate product thereof even if there is a cause of dust generation around the stocker. The challenge is to provide no stockers.

  According to the present invention, it is possible to reduce the possibility that the product is contaminated with foreign substances to the limit because the downflow can always flow through the stocker.

It is explanatory drawing which shows the form of the conventional stocker, (a) is a side view, (b) is a rear view. It is explanatory drawing which shows the improvement form of the conventional stocker, (a) is a side view, (b) is a rear view. It is explanatory drawing which shows the further improved form of the conventional stocker, (a) is a side view, (b) is a rear view. It is explanatory drawing which shows embodiment of this invention, (a) is a side view, (b) is a rear view.

  In the present invention, clean air is circulated to the stocker shelf by installing a rear panel with a certain interval on a conventional shelf stocker, and foreign substances from the periphery are maintained while maintaining the cleanliness in the stocker. The inventors have found that intrusion can be prevented and completed the present invention.

Hereinafter, the present invention will be described in more detail with reference to the drawings.
The material of the stocker used in the present invention is not particularly limited, but a metal such as an aluminum alloy, stainless steel, or iron and a surface-treated metal material such as polyacetal, polypropylene, or polyethylene, or a material charged thereon. An antistatic treatment or a mixture formed with an antistatic agent can be used. As an example, a stocker having a metal shelf board can be applied.

  The shape is not particularly limited, but a cube or a rectangular parallelepiped shape is preferable so that the floor and space can be used effectively without taking up space. The stocker can be used with an appropriate mount or caster for movement, and the size of the stocker can be selected as appropriate. The range that can be reached by the operator is preferable.

  As shown in FIG. 4, the stocker 1 basically inherits the form used conventionally, has a shelf plate 2 with an appropriate number of steps, and has both wall surfaces 3 for supporting the shelf plate, and is welded or screwed. Fixed with shelves by stops. The front part of the stocker has an opening (entrance part 4) so that the product can be taken out, and the rear part also has an opening (rear part 5) in order to keep the air flow in the clean room.

Next, a column 8 on which the stocker is placed or a column 14 is provided on the side of the stocker. The support column 14 is the same size as or slightly larger than the height of the back of the stocker, and is installed with the arm 15 protruding so as to leave a certain distance from the width of the back. The distance from the back surface portion 5 may be far from the back surface, but preferably 5 to 20 cm away from the arm 15.
Between the installed columns 14, a rear panel 16 having a width that is the same as or slightly larger than that of the stocker 1 is provided in order to prevent the foreign material 11 from entering from the rear portion 5. The height of the back panel 16 is preferably the same size as the shelf 2 portion of the stocker 1 or slightly larger.

[Example 1]
Examples will be described below.
A stocker having five steps of shelf plates of 1000 mm in length, 1000 mm in width, and 500 mm in depth, in which an aluminum alloy was anodized, was prepared. Openings were provided on the front and back of the stocker so that the air flow in the clean room flowed easily. The stocker was placed on a gantry with a caster having a height of 1000 mm. An arm having a length of 100 mm was attached to the gantry, and a column having a thickness of 10 mm and a length of 1000 mm was attached thereto. A transparent PVC panel having a width of 1000 mm and a height of 100 mm was attached to the column.

  Next, place a pellicle on which the number of foreign substances on the membrane has been measured in advance on this stocker and place it on a tray for product transportation. Tap lightly for 3 minutes. Thereafter, the pellicle set in the stocker was taken out, and the number of foreign matters having a size of 0.3 μm or more was examined by a laser foreign matter inspection device. As a result, there was no increase in foreign matter on the pellicle film.

[Comparative Example 1]
A comparative example is described below.
A stocker was prepared in the same manner as in Example 1 except that the back and the panel were not provided. Next, a pellicle whose number of foreign substances on the membrane has been measured is placed on the stocker and placed on a tray for product transportation, and a dust-free garment stands near the back panel of the stocker. Tap for 3 minutes. Thereafter, the pellicle set in the stocker was taken out, and the number of foreign matters having a size of 0.3 μm or more was examined by a laser foreign matter inspection device. As a result, two foreign substances increased on the pellicle film.

  The number and the size of the back panel and the wind speed between the stocker shelves were changed, and the increase in the number of foreign matters on the pellicle film was examined. The results are summarized in Table 1.

From the results shown in Table 1, it can be seen that if the distance between the stocker and the panel is 5 cm or more and less than 30 cm (25 cm), entry of foreign matter into the stocker and adhesion to the product due to dust generation from the periphery of the stocker can be prevented. It was. Conversely, it has been found that if the panel is installed at a distance of 5 cm or less or 30 cm or more, entry of foreign substances and adhesion to the product cannot be prevented.
If the distance between the stocker / panel is less than 5 cm, the flow of airflow due to the downflow in the clean room does not occur sufficiently, and when the product is put in and out of the stocker, the foreign matter that has entered the stocker is not immediately discharged, It is thought to contaminate the product. In addition, if the distance between the stocker and the panel is 30 cm or more, the distance between the panels is too far from the stocker, and foreign matter generated around the stocker flows in along with the airflow caused by the downflow and contaminates the product. It is done.

  It is an excellent method applicable to various products manufactured in a clean room because it does not require complicated mechanisms and energy sources, uses the characteristics of clean rooms, is inexpensive, and can improve product performance and yield. It is.

1: Stocker 2 (shelf-shaped) 2: Shelf 3: Wall 4 (to support the shelf on both sides) Wall 4: Entrance part 5: Rear part 6: Down flow 7: Product 8: Base 9: Caster 10: Departure Dust cause 11: foreign matter 12: partition plate 13: fan filter unit 14: support 15: arm 16: back panel

Claims (2)

It is a stocker for products or intermediate products used in a clean room, and the stocker has a shelf-like structure, and the front and rear are open so that the air flow in the clean room can be circulated. By providing a back panel on the back side with a certain distance through the arm, it prevents intrusion of foreign substances from the outside of the stocker ,
The size of the back panel provided in the stocker is the same as or larger than the back side opening area of the stocker, and the distance from the back opening of the panel stocker is 5 to 20 cm . stocker. The stocker for storing products in a clean room according to claim 1, wherein the product to be stored is a pellicle for semiconductor lithography or an intermediate thereof.

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