JP5602676B2 - Movable body support device - Google Patents

Description

  The present invention relates to a movable body support device that supports a movable body.

  An example of this type of movable body support device is a parallel mechanism machine tool 80 disclosed in Patent Document 1. As shown in FIG. 8, one end of six links 82 to 87 is supported on the fixed base 81 of the parallel mechanism machine tool 80 via universal joints 82 a to 87 a, and the six links 82 to 87 are connected to each other. A movable body 88 is supported on the other end via universal joints 82b to 87b.

  The lower end of the movable body 88 is supported by a first link 91 composed of two links 82 and 83. In an initial state of the parallel mechanism machine tool 80 (a state where it is not driven and stopped), the link 82 extends in the X-axis direction and the link 83 extends in the Y-axis direction, and the links 82 and 83 have an angle of 90 to each other. It is a degree.

  The upper end of the movable body 88 is supported by a second link 92 composed of two links 84 and 85. In an initial state of the parallel mechanism machine tool 80 (a state in which it is not driven and stopped), the link 84 extends in the X-axis direction and the link 85 extends in the Y-axis direction, and the links 84 and 85 have an angle of 90 to each other. It is a degree.

  Further, a regulation link 86 is provided near the lower end of the movable body 88 on the opposite side of the first link 91, and this regulation link 86 mainly restrains the degree of freedom of rotation of the movable body 88 around the Z axis. Further, the upper end of the movable body 88 is supported by being suspended from the fixed base 81 by a link 87.

  In the parallel mechanism machine tool 80, the external force in the X-axis direction applied to the movable body 88 is directly received in the axial direction by the two links 82 and 84 and the external force in the Y-axis direction is directly received by the two links 83 and 85. I can accept it. Further, the external force in the Z-axis direction can be directly received in the axial direction of the link 87. For this reason, the external force applied to the links 82 to 85 and 87 is hardly amplified by the component force, and the links 82 to 85 and 87 can withstand the external force.

JP 2000-126956 A

  However, in the parallel mechanism machine tool 80 of Patent Document 1, since the external force in the Z-axis direction is received only by the link 87, the problem that the rigidity in the Z-axis direction is smaller than that in the X-axis direction and the Y-axis direction. was there.

  The present invention has been made in view of the above-described conventional problems, and an object thereof is a movable body capable of obtaining link rigidity in any of the X-axis direction, the Y-axis direction, and the Z-axis direction. It is to provide a support device.

In order to solve the above-mentioned problem, the invention according to claim 1 is characterized in that the first link mechanism portion capable of supporting the movable body in a direction coinciding with the Z-axis within the movement range of the movable body, the X-axis A second link mechanism that can support the movable body in a direction that coincides with the Y-axis, and a third link mechanism that can support the movable body in a direction that coincides with the Y-axis. a drive source, one end is swingably supported to said driving source, two and links the other end to the movable body is swingably supported, a movable member supporting device Ru Tona In addition, each of the two links of each link mechanism portion extends so as to coincide with each axis within the movable range of the movable body, and the movable body is rotated about each axis by the first to third link mechanism portions. Is supported in a regulated state, and further, the adjacent phosphorus is within the moving range of the movable body. Configured as an angle of the link mechanism portion can take a 90-degree, the two links is disposed in parallel to each other, the movable body supporting device, the Z-axis the two links of each link mechanism The gist is to control the position of the movable body by displacing the two links while keeping them parallel to each other in the direction, the X-axis direction, and the Y-axis direction .

The invention described in 請 Motomeko 2, the movable body supporting apparatus according to claim 1, both ends of the two links, the subject matter that are connected by respective ball joints.

The invention according to claim 3, the movable body supporting apparatus according to claim 2, wherein the ball joint comprises a ball rotatably supported at both ends of the two links, slidable with respect to the ball And the ball at both ends of the link is urged by a biasing member in a direction in which they are attracted to each other along the axial direction of the link or in opposite directions. To do.

  According to the present invention, the rigidity of the link can be obtained in any of the X-axis direction, the Y-axis direction, and the Z-axis direction.

The perspective view which shows the movable body support apparatus of embodiment. The side view which shows the movable body support apparatus of embodiment. The schematic diagram which shows the movable body support apparatus of embodiment. The perspective view which shows the operation state of a movable body support apparatus. The fragmentary sectional view which shows a link and a ball joint. The top view which shows typically the machine tool formed by integrating several movable body support apparatuses. (A)-(e) is a schematic diagram which shows the movable body support apparatus of another example. The schematic diagram which shows background art.

DESCRIPTION OF EMBODIMENTS Hereinafter, an embodiment in which the present invention is embodied in a movable body support device in a machine tool will be described with reference to FIGS.
As shown in FIG. 1, a frame 11 of a movable body support device (hereinafter referred to as a support device 10) in a machine tool is erected from a rectangular frame-like lower frame 12 and three corners of the lower frame 12. The first to third support frames 13a to 13c and the rectangular frame-shaped upper frame 14 supported by the first to third support frames 13a to 13c are formed.

  As shown in FIGS. 1 and 2, a rectangular first support plate 15 is fixed to the lower surface of the upper frame 14, and the first link mechanism portion 20 is attached to the first support plate 15. It is supported. In addition, a rectangular second support plate 16 is fixed to the first support frame 13a, and a second link mechanism portion 30 is supported on the second support plate 16. Further, a rectangular third support plate 17 is fixed to the lower frame 12, and a third link mechanism portion 40 is supported on the third support plate 17. Then, the first to third link mechanisms 20, 30, and 40 allow the movable body 18 having a substantially triangular pyramid shape to maintain the upper surface 18a horizontally, in the X-axis direction, the Y-axis direction, and the Z-axis. It is supported to be movable in the direction. That is, the movable body 18 is supported by the first to third link mechanism portions 20, 30, and 40 in a state where the rotation about the XYZ axes is restricted. A tool (not shown) is supported on the movable body 18 so that the tool moves as the movable body 18 moves.

  In the first link mechanism section 20, a first support bracket 15a is fixed to the first support plate 15, and the first support bracket 15a is connected to the first servo motor M1. The first reduction gear G1 is supported. Note that a controller (not shown) is signal-connected to the first servo motor M1. A first crankshaft 21 is connected to the first reduction gear G1 via a first coupling C1. A pair of crankshaft support members 22 is fixed to the first support plate 15, and the first crankshaft 21 is rotatably supported by each crankshaft support member 22.

  At both ends of the first crankshaft 21, base ends of arms 23 each having a thin plate shape are fixed integrally to the first crankshaft 21. When the first crankshaft 21 rotates, both arms 23 rotate synchronously with the first crankshaft 21 as the rotation center. A first rotation shaft 24 is rotatably supported at the tips of both arms 23. One end of a first link 26 is swingably supported by a projecting end of each first rotation shaft 24 from each arm 23 via a ball joint 25. The other ends of the two first links 26 are swingably supported by the first connecting shaft 28 via a ball joint 27. The first connecting shaft 28 is rotatably supported by a pair of connecting shaft support members 29 fixed to the upper surface of the movable body 18.

  As shown in FIG. 5, the ball joint 25 includes a ball 25a rotatably supported on the protruding end of the first rotation shaft 24, and a spherical bearing 25b surrounding the ball 25a. One end of the first link 26 is connected to the first link 26. The ball joint 27 includes a ball 27a rotatably supported on the protruding end of the first connecting shaft 28, and a spherical bearing 27b surrounding the ball 27a, and the first link 26 is connected to the spherical bearing 27b. Are connected at the other end. For this reason, the first link 26 is supported by the ball joints 25 and 27 so as to be swingable in the left-right direction.

  The first rotating shaft 24 and the first connecting shaft 28 are parallel to each other, and the two first links 26 form a link pair that is parallel to each other. One end of the first coil spring F1 is connected to the first rotating shaft 24, and the other end of the first coil spring F1 is connected to the first connecting shaft 28. The first rotating shaft 24 and the first connecting shaft 28 are attracted in a state where they are kept parallel to each other by the biasing force in the compression direction of the first coil spring F1 as the biasing member. Is being energized. For this reason, the ball 25a integrated with the first rotating shaft 24 and the ball 27a integrated with the first connecting shaft 28 are biased in the direction in which they are attracted to each other by the biasing force of the first coil spring F1. Yes. Accordingly, the balls 25a and 27a are pressed against the inner peripheral surfaces of the spherical bearings 25b and 27b.

  As shown in FIG. 2, a balancer 21a extending in the opposite direction to the arm 23 is fixed at the center of the first crankshaft 21 in the axial direction, and the arm 23 is pulled downward by the balancer 21a. It is regulated.

  As shown in FIGS. 1 and 2, in an initial state where the support device 10 is not driven and no external force is applied to the movable body 18, the movable body 18 is suspended from the upper frame 14 by the first link mechanism portion 20. It is supported by lowering. The first link 26 extends in the vertical direction (Z-axis direction) within the movement range of the movable body 18, and the movable body 18 is supported in the Z-axis direction by the first link mechanism unit 20. .

  When the first servo motor M1 is driven, the first crankshaft 21 is rotated at the rotational speed decelerated by the first speed reducer G1. When the arm 23 rotates in conjunction with the rotation of the first crankshaft 21, the first rotation shaft 24 rotates. Further, when the first link 26 is displaced in the Z-axis direction in conjunction with the rotation of the first rotation shaft 24, the first connection shaft 28 is rotated along with the displacement. As a result, the movable body 18 is displaced in the Z-axis direction while being restricted from rotating around the Z-axis.

Next, the second link mechanism unit 30 will be described.
In the second link mechanism 30, a second support bracket 16a is fixed to the second support plate 16, and the second support bracket 16a is connected to the second servo motor M2. The second reduction gear G2 is supported. Note that a controller (not shown) is signal-connected to the second servo motor M2. A second crankshaft 31 is connected to the second reduction gear G2 through a second coupling C2. A pair of crankshaft support members 32 is fixed to the second support plate 16, and the second crankshaft 31 is rotatably supported by each crankshaft support member 32.

  At both ends of the second crankshaft 31, base ends of arms 33 each having a thin plate shape are integrally fixed to the second crankshaft 31. When the second crankshaft 31 rotates, both arms 33 rotate synchronously with the second crankshaft 31 as the rotation center. A second rotating shaft 34 is rotatably supported at the tips of both arms 33. One end of a second link 36 is rotatably supported by a projecting end of each second rotation shaft 34 from each arm 33 via a ball joint 35. The other ends of the two second links 36 are rotatably supported by a second connecting shaft 38 via a ball joint 37. The second connecting shaft 38 is rotatably supported by a pair of connecting shaft support members 39 fixed to the left side surface of the movable body 18.

  The second rotating shaft 34 and the second connecting shaft 38 are parallel to each other, and the two second links 36 constitute a link pair that is parallel to each other. One end of a second coil spring F2 as an urging member is connected to the second rotating shaft 34, and the other end of the second coil spring F2 is connected to a second connecting shaft 38. Yes. Then, the second rotating shaft 34 and the second connecting shaft 38 are urged in a direction in which they are drawn in a state in which they are kept parallel to each other by the urging force of the second coil spring F2 in the compression direction. Yes. Note that the ball joints 35 and 37 have the same configuration as the ball joints 25 and 27 in the first link mechanism section 20, and thus the description thereof is omitted. In the ball joints 35 and 37, the ball integral with the second rotation shaft 34 and the ball integral with the second coupling shaft 38 are attracted to each other by the urging force of the second coil spring F2. It is energized. Therefore, each ball is pressed against the inner peripheral surface of each spherical bearing.

  In an initial state where the support device 10 is not driven and no external force is applied to the movable body 18, the movable body 18 is supported from the side by the second link mechanism portion 30. The second link 36 extends in the X-axis direction within the moving range of the movable body 18, and the movable body 18 is supported by the second link mechanism 30 in the X-axis direction.

  When the second servo motor M2 is driven, the second crankshaft 31 is rotated at the rotational speed decelerated by the second reduction gear G2. Further, when the arm 33 rotates in conjunction with the rotation of the second crankshaft 31, the second rotation shaft 34 rotates. Further, when the second link 36 is displaced in the X-axis direction in conjunction with the rotation of the second rotation shaft 34, the second connection shaft 38 is rotated along with the displacement. As a result, the movable body 18 is displaced in the X-axis direction while being restricted from rotating around the X-axis.

Next, the third link mechanism unit 40 will be described.
In the third link mechanism portion 40, a third support bracket 17a is fixed to the third support plate 17, and the third support bracket 17a is connected to a third servo motor M3. A third speed reducer G3 is supported. Note that a controller (not shown) is signal-connected to the third servo motor M3. In addition, a third crankshaft 41 is connected to the third reduction gear G3 via a third coupling C3. A pair of crankshaft support members 42 are fixed to the third support plate 17, and the third crankshaft 41 is rotatably supported by the crankshaft support member 42.

  At both ends of the third crankshaft 41, the base ends of arms 43 each having a thin plate shape are integrally fixed to the third crankshaft 41. When the third crankshaft 41 rotates, both arms 43 rotate in synchronism with the third crankshaft 41 as a rotation center. A third rotation shaft 44 is rotatably supported at the tips of both arms 43. One end of a third link 46 is rotatably supported by a projecting end of each third rotation shaft 44 from each arm 43 via a ball joint 45. The other ends of the two third links 46 are rotatably supported by a third connecting shaft 48 via a ball joint 47. Note that the third connecting shaft 48 is rotatably supported by a pair of connecting shaft support members 49 fixed to the right side surface of the movable body 18.

  The third rotating shaft 44 and the third connecting shaft 48 are parallel to each other, and the two third links 46 form a link pair that is parallel to each other. One end of a third coil spring F3 as an urging member is connected to the third rotating shaft 44, and the other end of the third coil spring F3 is connected to a third connecting shaft 48. Yes. And the 3rd rotating shaft 44 and the 3rd connection shaft 48 are urged | biased by the direction attracted in the state maintained mutually parallel with the urging | biasing force to the compression direction of the 3rd coil spring F3. Yes. Note that the ball joints 45 and 47 have the same configuration as the ball joints 25 and 27 in the first link mechanism section 20, and thus the description thereof is omitted. In the ball joints 45 and 47, the ball integrated with the third rotating shaft 44 and the ball integrated with the third connecting shaft 48 are attracted to each other by the urging force of the third coil spring F3. It is energized. Therefore, each ball is pressed against the inner peripheral surface of each spherical bearing.

  In an initial state where the support device 10 is not driven and no external force is applied to the movable body 18, the movable body 18 is supported by the lower frame 12 by the third link mechanism 40. The third link 46 extends in the Y-axis direction within the moving range of the movable body 18, and the movable body 18 is supported in the Y-axis direction by the third link mechanism unit 40.

  When the third servo motor M3 is driven, the third crankshaft 41 rotates at the rotation speed decelerated by the third reduction gear G3. Further, when the arm 43 rotates in conjunction with the rotation of the third crankshaft 41, the third rotation shaft 44 rotates. Further, when the third link 46 is displaced in the Y-axis direction in conjunction with the rotation of the third rotation shaft 44, the third connection shaft 48 is rotated along with the displacement. As a result, the movable body 18 is restricted from rotating around the Y axis and displaced in the Y axis direction.

  As shown in the schematic diagram of FIG. 3, in the initial state of the support device 10, the first link 26 of the first link mechanism unit 20 and the second link 36 of the second link mechanism unit 30 form. The angle is 90 degrees. In the initial state of the support device 10, the angle formed by the first link 26 of the first link mechanism unit 20 and the third link 46 of the third link mechanism unit 40 is also 90 degrees.

Next, the operation of the support device 10 will be described.
In the support device 10, when position information for moving the movable body 18 is input to the controller, command signals corresponding to the movement information are output from the controller to the first to third servo motors M1 to M3. . Then, based on the command signal, the driving amounts of the first to third servo motors M1 to M3 are controlled, and the rotation speed is decelerated by the first to third reduction gears G1 to G3. Thus, the movement amounts of the first to third links 26, 36, 46 are controlled. As a result, the movable body 18 moves to the position specified by the position information, and the tool supported by the movable body 18 also moves to the position specified by the position information.

  As shown in FIG. 4, in the movement range of the movable body 18, the first to third crankshafts 21, 31, 41, the first to third rotating shafts 24, 34, 44, and the first to first crankshafts. The first link 26 and the second link 36, and the first link 26 and the third link 46 are displaced within an angle range of 70 to 110 degrees by the rotation of the three connecting shafts 28, 38, and 48. . In the moving range of the movable body 18, the first link 26 may be supported in a direction coinciding with the Z axis or may be supported in a direction shifted from the Z axis. In addition, within the range of movement of the movable body 18, the second link 36 may be supported in a direction coinciding with the X axis or may be supported in a direction shifted from the X axis. Furthermore, within the moving range of the movable body 18, the third link 46 may be supported in a direction coinciding with the Y axis or may be supported in a direction shifted from the Y axis.

  For this reason, the external force in the Z-axis direction applied to the movable body 18 is directly received in the Z-axis direction by the two first links 26 in the first link mechanism section 20, and the external force in the X-axis direction is the second force. The two second links 36 in the link mechanism section 30 are directly received in the X-axis direction. Further, the external force in the Y-axis direction is also directly received in the Y-axis direction by the two third links 46 in the third link mechanism unit 40.

According to the above embodiment, the following effects can be obtained.
(1) The first link mechanism unit 20 can support the movable body 18 in a direction that coincides with the Z axis within the movement range, and the second link mechanism unit 30 moves the movable body 18. Within the range, the movable body 18 can be supported in the direction coinciding with the X axis, and the third link mechanism unit 40 can support the movable body 18 in the direction coinciding with the Y axis. Further, the support device 10 is configured so that the two first links 26 and the two second links 36 can take 90 degrees within the moving range of the movable body 18, and two The first link 26 and the two third links 46 are configured to take 90 degrees. For this reason, in the moving range of the movable body 18, the first to third links 26, 36, and 46 have an angle of 70 to 110 degrees, and the axial directions thereof are substantially along the respective XYZ axial directions. It extends like so. Therefore, the external force applied to the first to third links 26, 36, 46 is hardly amplified by the component force, and the first to third links 26, 36, 46 can withstand the external force.

  (2) In particular, in the Z-axis direction, external force is received by the two first links 26. Therefore, the rigidity in the Z-axis direction can be increased as compared with the case where the external force in the Z-axis direction is received by one link as in the background art. In addition, the rotational force around the Z axis can be received by two. Therefore, the rigidity of the links 26, 36, and 46 can be obtained in any of the X-axis direction, the Y-axis direction, and the Z-axis direction.

  (3) In the support device 10, the movable body 18 is supported by the two first to third links 26, 36, and 46, respectively, and the rotation of the movable body 18 is restricted. For this reason, for example, when a rotary tool is supported on the movable body 18, even if a rotational force acts on the movable body 18, the rotational force is received by the two first to third links 26, 36, 46. I can accept it. Therefore, it is possible to prevent the rotational force from acting on the first to third servomotors M1 to M3, and it is not necessary to receive the rotational force by the first to third servomotors M1 to M3. There is no need to increase the size of the first to third servomotors M1 to M3.

  Since it is not necessary to increase the size of the first to third servo motors M1 to M3, the first to third servo motors M1 to M3 can be driven with high accuracy and high speed, and the movable body 18 can be accurately moved to a designated position and can be moved at high speed.

  (4) Two each of the first to third links 26, 36, and 46 are parallel to each other. For this reason, the external force which acts on the 1st-3rd links 26, 36, and 46 can be equally distributed and received by two links.

  (5) One ends of the first to third links 26, 36, 46 are supported by the ball joints 25, 35, 45 so as to be swingable with respect to the first to third rotating shafts 24, 34, 44, respectively. The other ends are supported by the ball joints 27, 37, 47 so as to be swingable with respect to the first to third connecting shafts 28, 38, 48, respectively. The first to third rotating shafts 24, 34, 44 and the first to third connecting shafts 28, 38, 48 are attracted to each other by the first to third coil springs F1 to F3. . For this reason, the spherical bearings 25b and 27b can be pressed against the balls 25a and 27a of the ball joints 25, 27, 35, 37, 45, and 47 by the biasing forces of the first to third coil springs F1 to F3. As a result, rattling of the ball joints 25, 27, 35, 37, 45, 47 can be suppressed, and positioning of the movable body 18 via the first to third links 26, 36, 46 is highly accurate. Can be done.

  (6) The support device 10 includes two first to third links respectively along the Z-axis direction, the X-axis direction, and the Y-axis direction by the first to third link mechanism portions 20, 30, and 40. The position of the movable body 18 is controlled by displacing 26, 36 and 46. That is, the Z-axis direction, the X-axis direction, and the Y-axis direction all have the same configuration. Therefore, as in the background art, the position of the movable body is controlled by two links in the X-axis direction and the Y-axis direction, and the position of the movable body is controlled by one link in the Z-axis direction. Compared with the case where the rotation of the movable body is restricted by the restriction link, the support device 10 of the present embodiment can easily control the position of the movable body 18.

In addition, you may change the said embodiment as follows.
As shown in the schematic diagram of FIG. 6, a plurality of support devices 10 may be arranged side by side, and the plurality of support devices 10 may be operated in cooperation. In this case, in each support apparatus 10, the support apparatus 10 is arranged in parallel so that the site | parts in which the 1st-3rd support frames 13a-13c of the flame | frame 11 are not formed mutually face. If comprised in this way, the several movable body 18 can be adjoined, it can arrange | position and arrange in one place, and the operation | work by the tool supported by each movable body 18 can be concentrated and performed in one place. Become. As a result, the work efficiency of the tool is improved, and a cooperative work using a plurality of tools is also possible.

  ○ As shown in FIG. 7A, when the movable body 70 is assumed to be a square box shape, two sets of corner portions at positions where the X-axis direction and the Y-axis direction intersect on the upper surface 70 a of the movable body 70. Of these, the first link 26 is connected to each one of the corners to support the movable body 70 in the Z-axis direction. Further, the second link 36 is connected to one of the two corners located on the diagonal line of the left side surface 70b of the movable body 70 to support the movable body 70 in the X-axis direction. Furthermore, the third link 46 may be connected to one of the two corners located on the diagonal line of the rear surface 70c of the movable body 70 to support the movable body 70 in the Y-axis direction. .

As shown in FIG. 7B, the corner connecting the first to third links 26, 36, 46 may be changed to the other corner with respect to the mode shown in FIG. 7A. .
○ As shown in FIG. 7C, when the movable body 70 is assumed to be a square box shape, of the two sides extending in the X-axis direction on the upper surface 70a of the movable body 70, the side on the rear surface 70c side of the movable body 70 The first link 26 is connected to both ends to support the movable body 70 in the Z-axis direction. Further, on the upper surface 70a of the movable body 70, the second link 36 is connected to both ends of the side on the left side 70b side of the movable body 70 of the two sides extending in the Y-axis direction so that the movable body 70 is moved in the X-axis direction. To support. Further, on the rear surface 70c of the movable body 70, the third link 46 is connected to both ends of the side on the left side 70b side of the movable body 70 out of the two sides extending in the Z-axis direction so that the movable body 70 is moved in the Y-axis direction. You may support.

As shown in FIG. 7 (d), in the embodiment shown in FIG. 7 (c), the side connecting the first to third links 26, 36, 46 may be changed to the other side.
As shown in FIG. 7E, when the movable body 70 is assumed to be a square box shape, the first link 26 is provided at each of the centers of two opposing sides extending in the Y-axis direction on the upper surface 70a of the movable body 70. Connected to support the movable body 70 in the Z-axis direction. Further, on the left side surface 70b of the movable body 70, the second link 36 is connected to each of two opposing sides extending in the Z-axis direction to support the movable body 70 in the X-axis direction. Further, on the rear surface 70c of the movable body 70, the third link 46 may be connected to each of two opposing sides extending in the X-axis direction to support the movable body 70 in the Y-axis direction.

  In the embodiment, both ends of the first to third links 26, 36, 46 are supported by the ball joints 25, 27, 35, 37, 45, 47, but the ball joint has angular freedom in two directions. You may change to a connection mechanism, for example, a universal joint or a bifurcated universal joint.

  In the embodiment, the urging forces of the first to third coil springs F1 to F3 urge the balls at both ends of the first to third links 26, 36, and 46 in the direction in which they are attracted to each other. The member may be changed to an air spring or a coil spring to bias the balls in the opposite direction.

○ Although the first to third coil springs F1 to F3 are embodied as the biasing member, the biasing member may be changed to a leaf spring, rubber, or the like.
In the embodiment, the movable body support device 10 is applied to a machine tool. However, the movable body support device can move the movable body in the X axis direction, the Y axis direction, and the Z axis direction in addition to the machine tool. You may apply to what is supported.

Next, the technical idea that can be grasped from the above embodiment and other examples will be described below.
(A) A machine tool configured such that a plurality of movable body support devices according to any one of claims 1 to 4 are arranged side by side, and the movable bodies can be collectively arranged at one place.

  F1 to F3... First to third coil springs as urging members, G1 to G3... First to third reducers constituting a drive source, M1 to M3. Servo motor, 10 ... movable body support device, 18, 70 ... movable body, 20 ... first link mechanism, 25, 27, 35, 37, 45, 47 ... ball joint, 25a, 27a ... ball, 25b, 27b ... spherical bearings, 26, 36, 46 ... first to third links, 30 ... second link mechanism, 40 ... third link mechanism.

Claims (3)

A first link mechanism portion capable of supporting the movable body in a direction coinciding with the Z-axis within the movable range of the movable body;
A second link mechanism that can support the movable body in a direction that coincides with the X axis;
And a third link mechanism that can support the movable body in a direction that coincides with the Y-axis,
Each of the link mechanisms is
A driving source;
One end is swingably supported to said driving source, two link whose other end is swingably supported on the movable body, a movable body supporting device Ru Tona,
Each of the two links of each link mechanism portion extends so as to coincide with each axis within the movable range of the movable body, and the first to third link mechanism portions cause the movable body to rotate around each axis. It is supported in a restricted state, and is configured such that the angle formed by the links of the adjacent link mechanism portions in the moving range of the movable body can take 90 degrees ,
The two links are parallel to each other,
The movable body support device displaces the two links of the link mechanism portions in the Z-axis direction, the X-axis direction, and the Y-axis direction, and keeps the two links parallel to each other. Thereby, the movable body support device which controls the position of the movable body. The movable body support device according to claim 1 , wherein both ends of the two links are connected by ball joints. The ball joint includes a ball rotatably supported at both ends of the two links, and a spherical bearing supported slidably with respect to the balls, and the balls at both ends of the link are biased. The movable body supporting device according to claim 2 , wherein the movable body supporting device is biased in a direction in which the members are attracted to each other along the axial direction of the link or in a direction opposite to each other.

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