JP5599823B2 - 導電性酸化チタンコーティングの堆積方法 - Google Patents
導電性酸化チタンコーティングの堆積方法 Download PDFInfo
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- JP5599823B2 JP5599823B2 JP2011547979A JP2011547979A JP5599823B2 JP 5599823 B2 JP5599823 B2 JP 5599823B2 JP 2011547979 A JP2011547979 A JP 2011547979A JP 2011547979 A JP2011547979 A JP 2011547979A JP 5599823 B2 JP5599823 B2 JP 5599823B2
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- Prior art keywords
- titanium oxide
- glass
- glass ribbon
- gaseous mixture
- conductive
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Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/40—Oxides
- C23C16/405—Oxides of refractory metals or yttrium
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
- C03C17/23—Oxides
- C03C17/245—Oxides by deposition from the vapour phase
- C03C17/2456—Coating containing TiO2
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
- C03C17/3429—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating
- C03C17/3482—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating comprising silicon, hydrogenated silicon or a silicide
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/20—Materials for coating a single layer on glass
- C03C2217/21—Oxides
- C03C2217/212—TiO2
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/90—Other aspects of coatings
- C03C2217/94—Transparent conductive oxide layers [TCO] being part of a multilayer coating
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2218/00—Methods for coating glass
- C03C2218/10—Deposition methods
- C03C2218/15—Deposition methods from the vapour phase
- C03C2218/152—Deposition methods from the vapour phase by cvd
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Life Sciences & Earth Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Metallurgy (AREA)
- Mechanical Engineering (AREA)
- Inorganic Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
- Surface Treatment Of Glass (AREA)
Description
Claims (12)
- ガラス製造工程中に大気化学気相堆積法によって導電性酸化チタンコーティングをガラス基板上に堆積させる方法であって、
前記ガラス製造工程では、フロート槽において加熱されたガラスリボンが移動し、
前記方法は、
前記加熱されたガラスリボンを前記フロート槽において提供するステップと、
ハロゲン化された無機チタン化合物、有機酸素含有化合物、当該前駆体ガス状混合物の10モル%以下を構成する還元ガス及び1以上の不活性キャリアガスを含む均一な前駆体ガス状混合物を準備するステップと、
前記前駆体ガス状混合物を、前記前駆体ガス状混合物の熱分解温度よりも低い温度で、移動している前記加熱されたガラスリボンの近傍位置まで搬送するステップとを含み、
前記加熱されたガラスリボンを取り囲む前記フロート槽の雰囲気が実質的に大気圧であり、
前記加熱されたガラスリボンの温度が、前記ガラスリボン上に酸化チタンコーティングを10Å/秒よりも高い堆積速度で堆積させるように前記前駆体ガス状混合物の反応を引き起こすのに十分な温度であり、
前記被覆されたガラス物品が少なくとも0.80S/cmの導電率を示すことを特徴とする方法。 - 請求項1に記載の方法であって、
前記前駆体ガス状混合物が前記ガラスリボンに搬送されたとき、前記ガラスリボンの温度が566℃〜732℃(1050°F〜1350°F)であることを特徴とする方法。 - 請求項1に記載の方法であって、
前記チタン化合物がTiCl4を含むことを特徴とする方法。 - 請求項1に記載の方法であって、
前記還元ガスが水素を含むことを特徴とする方法。 - 請求項4に記載の方法であって、
前記有機酸素含有化合物が有機エステルを含むことを特徴とする方法。 - 請求項5に記載の方法であって、
前記有機エステルが酢酸エチルを含むことを特徴とする方法。 - 請求項1に記載の方法であって、
前記不活性キャリアガスが、ヘリウム及び窒素の1以上を含むことを特徴とする方法。 - 請求項1に記載の方法であって、
前記導電性酸化チタンコーティングを堆積させる前に、前記加熱されたガラス基板上に色抑制積層膜を堆積させるようにしたことを特徴とする方法。 - 請求項1に記載の方法であって、
前記導電性酸化チタンコーティングが前記加熱されたガラス基板上に少なくとも20Å/秒の堆積速度で堆積されることを特徴とする方法。 - 請求項1に記載の方法であって、
前記加熱されたガラス基板上に堆積された前記導電性酸化チタンコーティングの厚さが110Å以上であることを特徴とする方法。 - 請求項1に記載の方法であって、
前記還元ガスが前記前駆体ガス状混合物の5.2モル%以下を構成することを特徴とする方法。 - 太陽電池の部品として使用するのに適した被覆されたガラス物品であって、
透明な絶縁性基板と、
前記絶縁性基板上に堆積された、2.0未満の屈折率を有する透明な導電性金属酸化物層と、
前記導電性金属酸化物層上に直接的に堆積された、1×10−2S/cmを超える導電率を示す酸化チタン層と、
前記導電性酸化チタン層上に堆積された、少なくとも4.5の屈折率を有するシリコン層とを含むことを特徴とする物品。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US14907109P | 2009-02-02 | 2009-02-02 | |
US61/149,071 | 2009-02-02 | ||
PCT/US2010/000246 WO2010087973A2 (en) | 2009-02-02 | 2010-01-29 | Method of depositing an electrically conductive titanium oxide coating |
Publications (2)
Publication Number | Publication Date |
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JP2012516940A JP2012516940A (ja) | 2012-07-26 |
JP5599823B2 true JP5599823B2 (ja) | 2014-10-01 |
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JP2011547979A Active JP5599823B2 (ja) | 2009-02-02 | 2010-01-29 | 導電性酸化チタンコーティングの堆積方法 |
Country Status (4)
Country | Link |
---|---|
US (1) | US9187825B2 (ja) |
EP (1) | EP2391743B1 (ja) |
JP (1) | JP5599823B2 (ja) |
WO (1) | WO2010087973A2 (ja) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
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US20150122319A1 (en) * | 2011-07-28 | 2015-05-07 | David A. Strickler | Apcvd of doped titanium oxide and the coated article made thereby |
GB201114242D0 (en) * | 2011-08-18 | 2011-10-05 | Pilkington Group Ltd | Tantalum oxide coatings |
WO2015169331A1 (de) * | 2014-05-05 | 2015-11-12 | Masdar Pv Gmbh | Verfahren zum aufbringen von halbleitermaterial, halbleitermodul und substratherstellungsanlage |
CN113277712A (zh) * | 2021-04-19 | 2021-08-20 | 信义节能玻璃(芜湖)有限公司 | 一种基于浮法联线系统 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4377613A (en) | 1981-09-14 | 1983-03-22 | Gordon Roy G | Non-iridescent glass structures |
US4419386A (en) | 1981-09-14 | 1983-12-06 | Gordon Roy G | Non-iridescent glass structures |
US4504526A (en) | 1983-09-26 | 1985-03-12 | Libbey-Owens-Ford Company | Apparatus and method for producing a laminar flow of constant velocity fluid along a substrate |
JPH0610923B2 (ja) | 1986-08-19 | 1994-02-09 | 株式会社豊田中央研究所 | 酸化チタン結晶の導電性材料及びその製法 |
US5958543A (en) | 1995-07-07 | 1999-09-28 | Stor Media,Inc. | Micro-texturing for sputtered, thin film magnetic media disks utilizing titanium sputtered in the presence of hydrogen to form micro-texturing |
GB9616983D0 (en) * | 1996-08-13 | 1996-09-25 | Pilkington Plc | Method for depositing tin oxide and titanium oxide coatings on flat glass and the resulting coated glass |
JP3510443B2 (ja) * | 1997-02-13 | 2004-03-29 | 三洋電機株式会社 | 光起電力装置の製造方法 |
US7037830B1 (en) | 2000-02-16 | 2006-05-02 | Novellus Systems, Inc. | PVD deposition process for enhanced properties of metal films |
-
2010
- 2010-01-29 US US13/138,241 patent/US9187825B2/en active Active
- 2010-01-29 EP EP10723363.7A patent/EP2391743B1/en active Active
- 2010-01-29 WO PCT/US2010/000246 patent/WO2010087973A2/en active Application Filing
- 2010-01-29 JP JP2011547979A patent/JP5599823B2/ja active Active
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Publication number | Publication date |
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WO2010087973A3 (en) | 2010-12-29 |
JP2012516940A (ja) | 2012-07-26 |
US9187825B2 (en) | 2015-11-17 |
EP2391743A2 (en) | 2011-12-07 |
EP2391743B1 (en) | 2014-04-09 |
WO2010087973A2 (en) | 2010-08-05 |
US20110281091A1 (en) | 2011-11-17 |
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