JP5585959B2 - Mounting device - Google Patents

Description

  The present invention relates to a mounting apparatus, and more particularly, to a mounting apparatus that can suppress the displacement of a mounted object even when expansion or contraction occurs due to heating or cooling.

  In technical fields related to physics, astronomy, and the like, it is often necessary to reduce detector noise and increase sensitivity by cooling the detector. Moreover, in order to investigate the change of the physical properties of the measurement sample due to the temperature, the measurement may be performed while heating or cooling the sample. In such a case, the mounting device on which the detector or the sample is mounted is also heated or cooled together with the detector or the sample, and thermal expansion or thermal contraction occurs in the mounting device, and the mounting position of the detector or the sample is changed. It will shift | deviate and detection accuracy will fall.

  For example, in a soft X-ray spectrometer, a CCD image sensor having a position resolution of about 10 μm × 10 μm is used as a detector, and this is cooled to about −90 ° C. Temperature adjustment during cooling is strictly performed, but some temperature change is inevitable. In order to make use of the resolution of the CCD image sensor, it is necessary to suppress the displacement of the mounting position due to thermal expansion or contraction due to temperature change to 10 μm or less, and more preferably about 1 μm.

  If the mounting device is made of a material having a very low coefficient of thermal expansion, it is expected that the displacement of the mounting position due to a temperature change can be prevented. However, currently developed materials with a low coefficient of thermal expansion (for example, Invar, which is an iron-nickel alloy, Super Invar, which is an iron-nickel-cobalt alloy), the temperature range with a low coefficient of thermal expansion is around room temperature. The temperature is limited to (30 to 40 ° C.) and is not suitable for applications involving cooling below the freezing point or heating to a high temperature exceeding a hundred degrees. Further, since the material itself is expensive, there is a problem in terms of cost when used for a large mounting apparatus.

  On the other hand, a mechanism called a kinematic mount that structurally suppresses displacement is known (for example, Patent Document 1). In the kinematic mount, the mounting plate on which the object is to be mounted is supported at three points, and the translational degrees of freedom of the positions of the respective supporting points in the plane defined by the three supporting points are set to 0, 1, and 2. It is what. An example of a mounting apparatus employing a kinematic mount is shown in the plan view of FIG. 12 and the cross-sectional view of FIG. In FIG. 13, (a), (b), and (c) represent cross sections of the portions 95a, 95b, and 95c shown in FIG.

  The mounting device 9 shown in FIGS. 12 and 13 is disposed between a mounting plate 91 for mounting an object to be mounted, a base 92 for mounting the mounting plate 91, and the mounting plate 91 and the base 92. And three support members 93a, 93b, 93c for supporting the mounting plate 91. As shown in FIGS. 12 and 13, two directions parallel to the upper surface of the mounting plate 91 on which the object is mounted and perpendicular to each other are defined as an X direction and a Y direction, and a direction perpendicular to the X direction and the Y direction. Is defined as the Z direction.

  The mounting plate 91 and the base 92 are made of steel. The support members 93a, 93b, and 93c are spheres made of ruby or steel. As shown in FIG. 13, the mounting plate 91 is formed with three conical recesses 91a, 91b, 91c. The recess 91a supports the support member 93a, the recess 91b supports the support member 93b, and the recess 91c supports. The member 93c is received.

  The base 92 is formed with a conical recess 92a at a portion corresponding to the recess 91a of the mounting plate 91, and at a portion corresponding to the recess 91b of the mounting plate 91 in the Y direction having a V-shaped cross section. A groove 92b is formed extending in the direction. Recess 92a receives support member 93a, and groove 92b receives support member 93b. Of the base 92, a portion 92c corresponding to the concave portion 91c of the mounting plate 91 is a plane parallel to the upper surface of the mounting plate 91, and the support member 93c contacts the portion 92c of this plane.

  Three support portions 95a, 95b, and 95c in the mounting device 9 are defined by the three recesses 91a, 91b, and 91c of the mounting plate 91, and the recess 92a, the groove 92b, and the planar portion 92c of the base 92. Although the support members 93a, 93b, and 93c are spheres, the support member 93a is restricted in movement in the X direction and the Y direction by the recess 91a and the recess 92a, so that the support portion 95a has a degree of freedom in translation in the XY plane. Does not have

  The support portion 95b defined by the recess 91b and the groove 92b has a degree of freedom of translation in the Y direction because the support member 93b can roll in the groove 92b in the Y direction. Further, the support portion 95c defined by the concave portion 91c and the flat portion 92c has translational freedom in the X direction and the Y direction because the support member 93c can roll on the portion 92c in both the X direction and the Y direction.

  According to this configuration, even when thermal expansion or thermal contraction occurs on the mounting plate 91, the movement of the support portion 95a can be prevented. Therefore, by mounting the mounted object on the support portion 95a, the position of the mounted object in the XY plane can be prevented from shifting. In FIG. 12, reference numeral 96 represents a mounting area of the mounted object including the support portion 95a.

JP 2006-078187 A

  In the mounting device 9 shown in FIGS. 12 and 13, the support part 95a having no translational freedom is prevented from moving in the X direction and the Y direction, but the support part 95b is movable in the Y direction. Since the support portion 95c can move in the X direction in addition to the Y direction, when thermal expansion or contraction occurs, the mounting plate 91 rotates in the XY plane around the support portion 95a. Such a state is shown in FIG. In FIG. 14, the mounting plate 91 in a state where thermal expansion has occurred is represented by reference numeral 91e, and the mounting plate 91 in a state in which thermal contraction has occurred is represented by reference numeral 91s. In this case, the mounting area 96 on which the mounted object is mounted also rotates, and the orientation of the detector or sample that is the mounted object changes, so that precise detection or measurement cannot be performed.

  Moreover, in the mounting apparatus 9, it is necessary to arrange | position a to-be-mounted object on the support part 95a without a translation freedom degree, and restrictions apply to the arrangement | positioning position of a to-be-mounted object. Further, since the load is hardly dispersed in the other support parts 95b and 95c and concentrated on the support part 95a, depending on the material of the mounting plate 91 or the base 92, the contact surface with the support member 93a in the recesses 91a and 92a. May be depressed, and the position of the detector or sample that is the object to be loaded may be shifted in the Z direction. This misalignment in the Z direction also causes a decrease in detection or measurement accuracy.

  The present invention has been made in view of such problems, and even when thermal expansion or thermal contraction occurs, the mounting device is less likely to be displaced and can reliably prevent rotation. The purpose is to provide.

The present invention provides a mounting plate for mounting an object to be mounted on an upper surface, a base for mounting the mounting plate, a first support member disposed between the mounting plate and the base and supporting the mounting plate, Two support members and a third support member, wherein two directions parallel to the upper surface of the mounting plate and perpendicular to each other are defined as an X direction and a Y direction, and the movement of the mounting plate with respect to the base in the X direction is restricted; A first support member that allows movement in the direction, a second support member that allows movement in the X direction and Y direction of the mounting plate relative to the base, and movement in the X direction and Y direction of the mounting plate relative to the base. the third support member to permit the motion, as well, have a restriction member disposed between a mounting plate and the base to restrict the X movement and Y movement of the mounting plate relative to the base The mounting device is characterized in that the upper end surface of the regulating member does not contact the mounting plate .

  According to the present invention, in the mounting device, the first support member, the second support member, and the third support member are spheres, and the mounting plate includes three conical recesses, the first support member, the second support member, and the second support member. Three recesses for receiving the support member and the third support member, respectively, and the base is a V-shaped groove extending in the Y direction to receive the first support member, a flat surface in contact with the second support member, And it has the plane which contact | abuts to a 3rd support member, It is characterized by the above-mentioned.

  According to the present invention, in the mounting device, the first support member, the second support member, and the third support member are columnar bodies having an axis parallel to the Y direction, and the mounting plate has a V shape extending in the Y direction. Each of the three grooves for receiving the first support member, the second support member, and the third support member, and the base is a V-shaped groove extending in the Y direction. It has the groove | channel which receives a support member, the plane contact | abutted to a 2nd support member, and the plane contact | abutted to a 3rd support member.

  According to the present invention, in the mount device, the restriction member is a cylindrical body having an axis perpendicular to the X direction and the Y direction, and the mounting plate and the base each have a cylindrical recess that receives the restriction member. Features.

The present invention is also the mounting apparatus, wherein the restriction member is a cylindrical body having an axis perpendicular to the X direction and the Y direction, the mounting plate has a cylindrical recess for receiving the restriction member, and the base is A columnar recess that receives the restricting member, the recess having a side surface including two adjacent flat surfaces, and the mounting device further includes a restricting member with respect to the two adjacent flat surfaces of the recess portion of the base that receives the restricting member. A fixing means for pressing and fixing the regulating member to the base is provided.
According to the present invention, in the mounting device, the restriction member is a triangle whose apex is the arrangement position of the first support member, the second support member, and the third support member when viewed from the direction perpendicular to the X direction and the Y direction. It is arrange | positioned inside. The restricting member may be disposed on a straight line extending in the Y direction through the first support member.

The present invention further includes
A mounting plate for mounting the load on the top surface,
A base on which the mounting plate is placed,
A first support member, a second support member, and a third support member that are disposed between the mounting plate and the base and support the mounting plate, wherein two directions parallel to the upper surface of the mounting plate and perpendicular to each other are X When defining the direction and the Y direction, the first support member that restricts the movement of the mounting plate in the X direction relative to the base and allows the movement in the Y direction, the movement of the mounting plate in the X direction and the movement in the Y direction relative to the base A third support member that allows movement in the X direction and movement in the Y direction of the mounting plate relative to the base, and
A regulating member that is disposed between the mounting plate and the base and restricts the movement in the X direction and the movement in the Y direction of the mounting plate relative to the base;
The restriction member is a cylindrical body having an axis perpendicular to the X direction and the Y direction.
The mounting plate has a cylindrical recess that receives the regulating member,
The base is a columnar recess that receives the restricting member, and has a recess that includes two adjacent flat surfaces on the side surface.
A fixing means for fixing the regulating member to the base by pressing the regulating member against two adjacent flat surfaces of the side surface of the recess of the base that receives the regulating member is provided.

  According to the present invention, even when thermal expansion or contraction occurs in the mounting plate, the first support member allows translation in the Y direction, and the second support member and the third support member translate in the X direction and the Y direction. Therefore, the mounting plate is not distorted. In addition, since the translation in the X direction and the Y direction is regulated by the regulating member, the position of the mounting plate does not shift in the XY plane around the regulating member. Furthermore, while the second support member and the third support member both permit translation in the X direction and the Y direction, the first support member regulates translation in the X direction, so that the mounting plate in the XY plane can be controlled. There is no rotation. Therefore, by mounting the mounted object in the region of the mounting plate close to the restricting member, it is possible to prevent the displacement of the mounted object and the change in the orientation. Further, since the position of the restricting member can be set freely to some extent, the restriction on the placement position of the mounted object is reduced.

  In the configuration in which the first support member, the second support member, and the third support member are spheres, the mounting plate and the base and each support member are in point contact, and heat conduction from the mounting plate to the base is suppressed. Thus, displacement due to thermal expansion or contraction of the base is prevented.

  In the configuration in which the first support member, the second support member, and the third support member are cylindrical bodies having an axis parallel to the Y direction, the mounting plate, the base, and each support member are in line contact, and point contact. Compared with the structure which carries out, the force added to a mounting board and a base from each support member is disperse | distributed, and it becomes difficult to damage the contact surface with each support member in a mounting board and a base.

  The restricting member is a cylindrical body having an axis perpendicular to the X direction and the Y direction, the mounting plate has a columnar recess that receives the restricting member, and the base is a columnar recess that receives the restricting member. The mounting device further includes a recess including two adjacent planes on the side surface, and the mounting device further presses the regulation member against the two adjacent planes of the side surface of the recess of the base that receives the regulation member. In the configuration including the fixing means for fixing, the position of the regulating member with respect to the base can be made unchanged even if there is some processing error in the portion of the base that receives the regulating member. Therefore, it is not necessary to increase the processing accuracy excessively, and the mounting device can be easily manufactured.

  Further, when viewed from the direction perpendicular to the X direction and the Y direction, the restricting member is disposed inside a triangle whose apex is the disposition position of the first support member, the second support member, and the third support member. In the configuration, the load can be evenly distributed to each support member, and the mounting plate and the base are hardly damaged.

  Furthermore, in the configuration in which the restricting member is disposed on a straight line extending in the Y direction through the first support member, the mounting plate can be reliably prevented from rotating in the XY plane.

It is a top view of the mounting apparatus of 1st Embodiment. It is sectional drawing of the mounting apparatus of 1st Embodiment, (a), (b), (c), (d) represents the cross section of the site | parts 15a, 15b, 15c, 15d of FIG. 1, respectively. It is a top view of the mounting apparatus of 2nd Embodiment. It is sectional drawing of the mounting apparatus of 2nd Embodiment, (a), (b), (c), (d) represents the cross section of the site | parts 25a, 25b, 25c, 25d of FIG. 3, respectively. It is sectional drawing (a) parallel to an XY plane and sectional drawing (b) parallel to a YZ plane which show the site | part of the control member of the mounting apparatus of 3rd Embodiment, and the base of the vicinity. It is (a) top view and (b) side view which show the mounting apparatus of Example 1 according to 1st Embodiment. It is a figure which shows the result of having measured the fluctuation | variation of the position of the detector mounted in the mount apparatus of Example 1. FIG. It is a figure which shows the peak of the X-ray used in order to measure the fluctuation | variation of the position of the detector mounted in the mounting apparatus of Example 1,2. It is (a) top view and (b) side view which show the mounting apparatus of Example 2 according to 2nd Embodiment. It is a figure which shows the result of having measured the fluctuation | variation of the position of the detector mounted in the mount apparatus of Example 2. FIG. It is a figure which shows the result of having measured the fluctuation | variation of the position of the detector mounted in the mount apparatus of Example 3. FIG. It is a top view of the conventional mounting apparatus which employ | adopts a kinematic mount. It is sectional drawing of the conventional mounting apparatus, (a), (b), (c) represents the cross section of the site | parts 95a, 95b, 95c of FIG. 12, respectively. It is a top view showing the state which the thermal expansion and the thermal contraction produced in the mounting board of the conventional mounting apparatus.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. The mounting apparatus 1 of 1st Embodiment is typically shown in the top view of FIG. 1, and sectional drawing of FIG. In FIG. 2, (a), (b), (c), and (d) represent cross sections of the portions 15a, 15b, 15c, and 15d in FIG. 1, respectively.

  The mounting apparatus 1 includes a mounting plate 11, a base 12, three support members 13 a, 13 b, 13 c, and a regulating member 14. The mounting plate 11 mounts an object to be mounted on its upper surface, and the base 12 mounts the mounting plate 11. The support members 13 a, 13 b, and 13 c are disposed between the mounting plate 11 and the base 12 and support the mounting plate 11. The restricting member 14 is disposed between the mounting plate 11 and the base 12 and restricts the movement of the mounting plate 11 with respect to the base 12 in the XY plane. Two directions parallel to and perpendicular to the upper surface of the mounting plate 11 on which the object is mounted are defined as an X direction and a Y direction, and a direction perpendicular to the X direction and the Y direction is defined as a Z direction.

  The mounting plate 11 and the base 12 are made of stainless steel. The support members 13a, 13b and 13c are spheres made of ruby or stainless steel. As shown in FIG. 2, the mounting plate 11 has three conical recesses 11a, 11b, and 11c. The recess 11a supports the support member 13a, the recess 11b supports the support member 13b, and the recess 11c supports. The member 13c is received.

  In the base 12, a groove 12 a having a V-shaped cross section and extending in the Y direction is formed at a portion corresponding to the concave portion 11 a of the mounting plate 11. The groove 12a receives the support member 13a. Of the base 12, the portions 12 b and 12 c corresponding to the recess 11 b and the recess 11 c of the mounting plate 11 are flat surfaces parallel to the upper surface of the mounting plate 11, respectively, and the support members 13 b and 13 c are flat portions 12 b respectively. , 12c.

  Three support portions 15a, 15b, and 15c in the mounting apparatus 1 are defined by the three concave portions 11a, 11b, and 11c of the mounting plate 11, the groove 12a of the base 12, and the two planar portions 12b and 12c. The support portion 15a defined by the recess 11a and the groove 12a has a degree of freedom in translation in the Y direction because the support member 13a can roll in the groove 12a in the Y direction.

  Further, the support portion 15b defined by the concave portion 11b and the planar portion 12b has a degree of freedom in translation in the X and Y directions because the support member 13b can roll on the portion 12b in both the X direction and the Y direction. Similarly, the support portion 15c defined by the concave portion 11c and the planar portion 12c also has translational freedom in the X and Y directions because the support member 13c can roll on the portion 12c in both the X direction and the Y direction. .

  The regulating member 14 is a cylindrical body made of stainless steel, and is arranged with the cylinder axis directed in the Z direction. The mounting plate 11 is formed with a cylindrical through hole 11d reaching from the lower surface to the upper surface, and the upper portion of the regulating member 14 is inserted into the through hole 11d. The base 12 is formed with a columnar recess 12d extending downward from the upper surface, and the lower portion of the restricting member 14 is inserted into the recess 12d. The restriction portion 15d is defined by the through hole 11d and the recess 12d.

  The restricting member 14 is for restricting the movement of the mounting plate 11 with respect to the base 12 in the XY plane, and is directly related to the accuracy of the position of the mounted object. Therefore, the gap between the regulating member 14 and the through hole 11d of the mounting plate 11 and the gap between the regulating member 14 and the recess 12d of the base 12 are preferably as small as possible. Therefore, in the present embodiment, the difference between the inner diameter of the through hole 11d and the recess 12d and the outer diameter of the regulating member 14 is set to about several μm.

  The lower end surface of the restricting member 14 abuts on the bottom surface of the recess 12 d, but the upper end surface of the restricting member 14 does not abut on the mounting plate 11, so the restricting member 14 does not have a function of supporting the mounting plate 11. In addition, as long as the upper end surface of the regulating member 14 does not contact the mounting plate 11, the through hole 11d may be a cylindrical recess.

  The movement of the mounting plate 11 is regulated by the regulating member 14 in both the X direction and the Y direction. However, since the support portion 15a is allowed to move in the Y direction and the support portion 15b and the support portion 15c are allowed to move in the X direction and the Y direction, the mounting plate 11 is thermally expanded or contracted. Even when this occurs, the mounting plate 11 is not distorted. Furthermore, since the support portion 15a is restricted from moving in the X direction, the mounting plate 11 does not rotate around the restriction member 14 in the XY plane. Therefore, by mounting the mounted object on the upper surface of the mounting plate 11 in the region located above the regulating member 14, it is possible to prevent the displacement of the position of the mounted object and the fluctuation of the direction. In FIG. 1, the code | symbol 16 represents the mounting area | region of a to-be-mounted object including the control part 15d.

  In the mounting apparatus 1, the position and direction of the mounted object in the XY plane are defined by the regulating member 14 and one supporting member 13 a, and the other supporting member 13 b and the supporting member 13 c are mounted on the mounted object. It is not involved in the definition of the position and direction in the XY plane. The support members 13a, 13b, and 13c are involved in supporting the mounted object, that is, in defining the position in the Z direction.

  The restricting member 14 is disposed in the triangle where the three support members 13a, 13b, and 13c are arranged, that is, the three concave portions 11a, 11b, and 11c of the mounting plate 11 as apexes when viewed from the Z direction. Therefore, the mounting area 16 for the object to be mounted is also located inside the triangle, whereby the load can be distributed to the three support portions 15a, 15b, and 15c.

  Moreover, it is preferable to arrange | position the control member 14 on the straight line extended in the Y direction through the support member 13a. When the restriction member 14 does not exist on a straight line extending in the Y direction through the support member 13a, the movement of the support portion 15a in the Y direction brings a rotational force around the restriction member 14 to the mounting plate 11. . By disposing the regulating member 14 on a straight line extending in the Y direction through the support member 13a, such a rotational force is generated even when the support portion 15a moves in the Y direction due to thermal expansion or contraction. The rotation around the regulating member 14 is reliably prevented.

  A mounting device 2 according to the second embodiment is schematically shown in a plan view of FIG. 3 and a cross-sectional view of FIG. In FIG. 4, (a), (b), (c), and (d) respectively represent cross sections of the portions 25a, 25b, 25c, and 25d in FIG. Also in the present embodiment, the mounting device 2 has a mounting plate 21 for mounting an object to be mounted on the upper surface, and two directions parallel to the upper surface of the mounting plate 21 and perpendicular to each other are defined as an X direction and a Y direction. A direction perpendicular to the X direction and the Y direction is defined as a Z direction.

  The mounting device 2 is similar to the mounting device 1 of the first embodiment. In addition to the mounting plate 21, the mounting device 2 is placed between the mounting plate 21 and the mounting plate 21 and the base 22. The three support members 23 a, 23 b, and 23 c that are provided and support the mounting plate 21, and are arranged between the mounting plate 21 and the base 22, and the XY plane of the mounting plate 21 with respect to the base 22 It has a regulating member 24 that regulates the inner movement.

  In the present embodiment, the shapes of the three support members 23a, 23b, and 23c are different from the shapes of the support members 13a, 13b, and 13c of the first embodiment, and the support members 23a, 23b, The shapes of the portions of the mounting plate 21 and the base 22 that are in contact with 23c are also different. The other points are the same as those in the first embodiment, and thus the overlapping description is omitted.

  The support members 23a, 23b, and 23c are stainless steel cylinders, and are arranged with the cylinder axis directed in the Y direction. As shown in FIG. 4, the mounting plate 21 is formed with three grooves 21a, 21b, 21c having a V-shaped cross section extending in the Y direction. The groove 21a is a support member 23a, and the groove 21b is a support member 23b. The groove 21c receives the support member 23c.

  A groove 22 a extending in the Y direction having a V-shaped cross section is formed in the base 22 at a portion corresponding to the groove 21 a of the mounting plate 21. The groove 22a receives the support member 23a. The length of the groove 22a (dimension in the Y direction) is set longer than the length of the support member 23a. Of the base 22, the portions 22 b and 22 c corresponding to the grooves 21 b and the grooves 21 c of the mounting plate 21 are respectively flat surfaces parallel to the upper surface of the mounting plate 21, and the support members 23 b and 23 c are flat portions. Abuts on 22b and 22c.

  Three support portions 25a, 25b, and 25c in the mount device 2 are defined by the three grooves 21a, 21b, and 21c of the mounting plate 21, the groove 22a of the base 22, and the two planar portions 22b and 22c. The support portion 25a defined by the groove 21a and the groove 22a has translational freedom in the Y direction because the support member 23a can slide in the Y direction in the groove 22a.

  Further, the support portion 25b defined by the groove 21b and the planar portion 22b has a degree of freedom in translation in the X and Y directions because the support member 23b can roll on the portion 22b in the X direction and slide in the Y direction. Similarly, the support portion 25c defined by the groove 21c and the planar portion 22c also has translational freedom in the X and Y directions because the support member 23c can roll on the portion 22c in the X direction and slide in the Y direction.

  The restriction member 24 and the through hole 21d of the mounting plate 21 into which the restriction member 24 is inserted and the recess 22d of the base 22 are configured in the same manner as the restriction member 14, the through hole 11d and the recess 12d of the mounting device 1. . A regulation part 25d is defined by the through hole 21d and the recess 22d.

  The movement of the mounting plate 21 is regulated by the regulating member 24 in both the X direction and the Y direction. However, since the support portion 25a is allowed to move in the Y direction and the support portion 25b and the support portion 25c are allowed to move in the X direction and the Y direction, the mounting plate 21 is thermally expanded or contracted. Even when the mounting plate 21 is not distorted. Furthermore, since the support portion 25a is restricted from moving in the X direction, the mounting plate 21 does not rotate around the restriction member 24 in the XY plane. Therefore, by mounting the mounted object on the upper surface of the mounting plate 21 above the restriction member 24, it is possible to prevent the displacement of the mounted object and the change in the orientation. In FIG. 3, the code | symbol 26 represents the mounting area | region of a to-be-mounted object including the control part 25d.

  FIG. 5 schematically shows the regulating member of the mounting device 3 according to the third embodiment and the base portion in the vicinity thereof. 5A is a cross-sectional view parallel to the XY plane, and FIG. 5B is a cross-sectional view parallel to the YZ plane. The mounting device 3 is obtained by modifying the mounting device 2 of the second embodiment and changing the configuration for receiving the regulating member 24 in the base. The base 32 of the mounting device 3 has a columnar recess 32 d that receives the regulating member 24. The recess 32d is generally pentagonal in columnar shape and has a size that allows the regulating member 24 to move freely. Two adjacent surfaces 32d1, 32d2 of the side surfaces of the recess 32d are inclined by about 45 ° with respect to the Y direction, and form an angle of about 90 ° with each other.

  The base 32 is formed with a hole 32e that reaches the recess 32d from one end in the Y direction, and a columnar pressing member 34 and a columnar screw member 35 are disposed in the hole 32e. The pressing member 34 is made of, for example, resin, and the screw member 35 is made of the same metal (stainless steel) as the base 32. The outer diameter of the pressing member 34 is slightly smaller than the inner diameter of the hole 32e, and the pressing member 34 can move freely in the hole 32e. On the outer periphery of the screw member 35 and the inner periphery of the hole 32e, screw grooves that are screwed together are formed.

  By rotating the screw member 35 about its axis, the screw member 35 moves together with the pressing member 34 toward the recess 32d. Thereby, the pressing member 34 will be in the state which presses the control member 24 to the two side surfaces 32d1 and 32d2 of the recessed part 32d. By stopping the screw member 35 in this state, the restricting member 24 is fixed to the side surfaces 32d1 and 32d2 in a pressed state.

  The pressing member 34 and the screw member 35 constitute fixing means. In the present embodiment, the pressing member 34 and the screw member 35 constitute a fixing means. However, a single member may be used as the fixing means. Other configurations of the mounting device 3 are the same as the configuration of the mounting device 2 of the second embodiment, and redundant description is omitted.

  As in the first and second embodiments, the inner diameters of the recesses 12d and 22d of the bases 12 and 22 for receiving the regulating members 14 and 24 are made slightly larger than the outer shape of the regulating members 14 and 24. It is possible to prevent the position of the regulating members 14 and 24 from changing to some extent. However, the effect of suppressing the position variation in the configuration depends on the machining accuracy.

  According to general machining, the tolerance of the inner diameter of the recesses 12d and 22d is 0 to +10 μm, and the tolerance of the outer diameter of the regulating members 14 and 24 is −2 μm to −8 μm, based on the target value of the diameter. Presuming from these values, the difference between the inner diameter of the recesses 12d and 22d and the outer diameter of the regulating members 14 and 24 is 2 μm in the best case (minimum error), 18 μm in the worst case, and is 10 μm on average. Degree. Therefore, when expansion or contraction occurs due to heat, a fluctuation of about several μm occurs in the position of the regulating member with respect to the base.

  On the other hand, in the configuration in which the regulating member 24 is pressed against the side surface of the concave portion 32d as in the present embodiment, the regulating member 24 remains in contact with the side surface of the concave portion 32d even when expansion or contraction occurs due to heat. Therefore, the position of the restricting member with respect to the base does not vary. In addition, you may make the structure similar to the base 32 of this embodiment by modifying the structure which receives the control member 14 of the base 12 of 1st Embodiment.

[Example 1]
FIG. 6 shows the configuration of an example of the mount apparatus 1 manufactured according to the first embodiment in order to mount the detector (CCD image sensor) of the soft X-ray spectrometer. The mounting apparatus 1 is line symmetric in the X direction. The mounting plate 11 is substantially rectangular when viewed from the Z direction, and both end portions in the Y direction are higher than the central portion in the Y direction including the mounting region 16 when viewed from the X direction.

  The base 12 is substantially rectangular when viewed from the Z direction, and is provided with mounting portions 17 and 18 for mounting the mounting plate 11 at both ends in the Y direction. The mounting portions 17 and 18 are attached to the base 12 by screws 19 and can be adjusted in the Z direction.

  The support member 13 a is disposed at one end of the mounting plate 11 in the Y direction and corresponding to the mounting portion 17 of the base 12. The support member 13 b and the support member 13 c are disposed at the other end in the Y direction of the mounting plate 11 and corresponding to the mounting portion 18 of the base 12. The mounting plate 11 is formed with the above-mentioned three conical recesses 11a, 11b, and 11c that receive the three supporting members 13a, 13b, and 13c, and the mounting portion 17 of the base 12 has the supporting member 13a. The aforementioned V-shaped groove 12a is formed. In addition, the upper end surface of the mounting part 18 is made into a plane so that it may become the site | parts 12b and 12c which contact | abut to the supporting member 13b and the supporting member 13c.

  The regulating member 14 is disposed near one end in the Y direction in the mounting area 16 of the mounting plate 11. The mounting plate 11 and the base 12 are formed with the aforementioned through-hole 11d and recess 12d into which the regulating member 14 is inserted.

  The distance from the support member 13a to the support member 13b is equal to the distance from the support member 13a to the support member 13c, and the support portions 15a, 15b, and 15c (not shown) are located at the vertices of an isosceles triangle. The restricting member 14 is positioned on a straight line in the Y direction that passes through the support member 13a. In other words, the restricting member 14 is located on the vertical bisector of the base of the isosceles triangle. Therefore, the load applied to the support part 15b and the load applied to the support part 15c can be made equal, and the load applied to the support part 15a can be made equal by adjusting the position of the mounted object in the Y direction. Is possible.

  The dimension of the mounting plate 11 in the X direction is about 55 mm, the dimension in the Y direction is about 88 mm, and the dimension in the Z direction is about 10 mm (the thickness at each position in the Y direction is about 3 mm). The dimension of the base 12 in the X direction is about 55 mm, which is the same as that of the mounting plate 11. The dimension of the Y direction is smaller than the mounting plate 11, about 68 mm, and the dimension in the Z direction is about 12 mm (mounting). The thickness of the part excluding the placement parts 17 and 18 is about 3 mm).

  The diameters of the support members 13a, 13b, and 13c that are spheres are all equal and about 3.7 mm. The groove 12a is formed in the support portion 15a of the mounting portion 17 of the base 12, whereas the groove is not formed in the support portion 15b and the support portion 15c of the mounting portion 18, but the mounting portion By making 17 the dimension of Z direction larger than the mounting part 18, the space | interval of the mounting board 11 and the base 12 is made constant over the whole Y direction.

  The diameter of the columnar regulating member 14 is about 3.0 mm and the length is about 7 mm. The diameters of the through hole 11d of the mounting plate 11 into which the regulating member 14 is inserted and the recess 12d of the base 12 are also about 3.0 mm. However, the inner diameters of the through hole 11d and the recess 12d are very slightly larger than the outer diameter of the regulating member 14 as described above.

  A copper plate 4 for cooling the detector is attached to the mounting plate 11. The copper plate 4 is connected to a cooler that is cooled by passing the atomized liquid nitrogen, and the mounting plate 11 and the detector are cooled to about −90 ° C. However, it has been found that there is a temperature fluctuation of about ± 1 ° C. during cooling.

  FIG. 7 shows the result of the change in the position of the detector mounted on the mount device 1 of this example during cooling. As described above, the CCD as a detector has a position resolution of about 10 μm, but in the spectrum of FIG. 7, the position is determined with an accuracy of a fraction of the position resolution by super-resolution analysis of the two-dimensional image. doing. The measurement was performed by detecting a change in the position of the elastic X-ray elastic scattering peak P shown in FIG. 8 at intervals of 10 to 30 minutes using a detector. Since the position of the elastic scattering peak is theoretically not affected by the temperature change, the fluctuation of the peak position on the detector represents the fluctuation of the position of the detector. Note that the peak appearing in the vicinity of 6000 μm in FIG. 8 is X-ray emission of 1s orbital of oxygen atoms in water.

  The precise position of the elastic scattering peak P on the detector was obtained by applying an analysis for fitting the peak shape by expressing it in a Gaussian function to the detection data. The maximum value of the peak position fluctuation during the measurement for about 10 hours is about 8 μm, which is equal to or less than the position resolution of the CCD image sensor. Therefore, it can be said that the mount apparatus 1 is suitable as a mount for mounting a detector of a soft X-ray spectrometer.

[Example 2]
FIG. 9 shows a configuration of an example of the mount device 2 manufactured according to the second embodiment in order to mount the detector of the soft X-ray spectrometer. In the second embodiment, instead of the support members 13a, 13b, and 13c that are the spheres of the first embodiment, support members 23a, 23b, and 23c that are cylindrical bodies are used. Instead of 11a, 11b, and 11c, the mounting plate 21 is provided with V-shaped grooves 21a, 21b, and 21c.

  The support members 23a, 23b, and 23c, which are cylindrical bodies, have a diameter of about 3.7 mm and a length of about 5 mm. The length of the groove 22a provided in the mounting portion 27 of the base 22 is about 6 mm, and the support member 23a can move in the Y direction in the groove 22a. Other settings such as the regulating member 24 and the placement portion 28 are the same as those in the first embodiment, and thus the duplicated description is omitted.

  FIG. 10 shows the result of measuring the position change during cooling of the detector mounted on the mount apparatus 2 of this example. The measurement was performed in the same manner as the measurement for the mounting apparatus 1 of Example 1. However, the measurement time is about 5 hours. The variation of the position of the detector mounted on the mounting device 2 is about 1.2 μm, and the mounting device 2 has a significantly improved accuracy compared to the mounting device 1 of the first embodiment.

  The accuracy of the mounting device 1 of the first embodiment is inferior to that of the mounting device 2 of the second embodiment because of the V-shaped groove 12a of the base 12 that receives the support members 13a, 13b, and 13c and the planar surface. The parts 12b and 12c are caused by damage. The support members 13a, 13b, and 13c are spherical bodies, and are in point contact with the grooves 12a and the portions 12b and 12c. For this reason, a large force is applied to the contact portion of the groove 12a and the portions 12b and 12c with the support members 13a, 13b, and 13c, and the surface of the contact portion is recessed. When the mounting plate 11 contracts due to cooling, the support members 13a, 13b, and 13c, which are spheres, move in the X direction or the Y direction and move to the inclined portion of the depression, so that a shift occurs in the position in the Z direction. This misalignment in the Z direction is presumed to be the main cause of the decrease in accuracy.

  On the other hand, in the mounting device 2, the support members 23 a, 23 b, and 23 c are cylindrical bodies that are in line contact with the V-shaped groove 22 a and the planar portions 22 b and 22 c of the base 22. For this reason, a large force is not applied to the contact portions of the groove 22a and the portions 22b and 22c with the support members 23a, 23b, and 23c, and the surface of the contact portion is not damaged. Actually, when the surface of the groove 12a and the parts 12b and 12c of the mounting device 1 and the surface of the groove 22a and the parts 22b and 22c of the mounting device 2 were observed, only the surface of the groove 12a and the parts 12b and 12c of the mounting device 1 were observed. There was a dent in.

  This phenomenon does not necessarily reduce the usefulness of the mounting apparatus 1. Depending on the material used for the base 12, damage due to point contact can be prevented. Also, in point contact, heat transfer from the mounting plate to the base is negligible, so the base does not thermally expand or contract, and there is no displacement of the mounted object due to changes in the position of the base. Is prevented.

[Example 3]
A mounting device 3 according to a third embodiment that employs the base 32 of FIG. 5 instead of the base 22 of Example 2 was produced. As described above, the diameter of the regulating member 14 is about 3.0 mm. In this example, the pressing member 34 was made of polytetrafluoroethylene (PTFE) resin.

  FIG. 11 shows the result of measuring the position change during cooling of the detector mounted on the mount device 3 of this example. The measurement was performed in the same manner as the measurement for the mounting device 2 of Example 2. The measurement time is about 12 hours. The maximum variation in the position of the detector mounted on the mount device 3 is about 3.0 μm.

  This value is inferior to the value of 1.2 μm in Example 2, but this cause is presumed as follows. In this embodiment, since the pressing member 34 made of resin (PTFE) is used, it contracts by cooling, and the pressing force of the pressing member 34 on the side surfaces 34d1 and 34d2 of the recess 34d of the regulating member 24 is weakened. Will. It is expected that the variation in the position of the detector can be suppressed more satisfactorily by making the pressing member 34 with another material having a smaller thermal shrinkage.

  As described above, the present invention has been described with reference to the example of cooling the mounted object. However, the present invention is also applicable to the case of heating the mounted object. Of course, it is also suitable for use at room temperature. In addition to the exemplified detectors, the objects to be mounted that are preferably mounted on the mounting apparatus of the present invention include all objects that are inconvenient when a positional deviation occurs, such as a measurement sample and a light source of an optical apparatus.

1, 2, 3 Mount device 3 Spectrometer main body 4 Copper plates 11, 21 Mounting plates 11a, 11b, 11c Conical recesses 21a, 21b, 21c V-shaped grooves 11d, 21d Through holes 12, 22, 32 Bases 12a, 22a V-shaped grooves 12b, 12c, 22b, 22c Planar parts 12d, 22d, 32d Recesses 13a, 13b, 13c, 23a, 23b, 23c Support members 14, 24 Restricting members 15a, 15b, 15c, 25a, 25b, 25c Support parts 15d, 25d Restriction site 16, 26 Mounting area 17, 18, 27, 28 Mounting portion 19, 29 Screw 32d1, 32d2 Recessed side surface 32e Hole 34 Press member 35 Screw member

Claims (8)

A mounting plate for mounting the load on the top surface,
A base on which the mounting plate is placed,
A first support member, a second support member, and a third support member that are disposed between the mounting plate and the base and support the mounting plate, wherein two directions parallel to the upper surface of the mounting plate and perpendicular to each other are X When defining the direction and the Y direction, the first support member that restricts the movement of the mounting plate in the X direction relative to the base and allows the movement in the Y direction, the movement of the mounting plate in the X direction and the movement in the Y direction relative to the base A second support member that allows movement of the mounting plate relative to the base, a third support member that allows movement in the X direction and Y direction of the mounting plate, and a base plate disposed between the mounting plate and the base, have a regulating member for regulating the movement of the X-direction movement and Y-direction of the mounting plate to the base,
A mounting device characterized in that the upper end surface of the regulating member does not contact the mounting plate . The first support member, the second support member, and the third support member are spheres,
The mounting plate has three conical recesses, each having three recesses for receiving the first support member, the second support member, and the third support member,
The base has a V-shaped groove extending in the Y direction, the groove receiving the first support member, a flat surface contacting the second support member, and a flat surface contacting the third support member. Item 2. The mounting device according to Item 1. The first support member, the second support member, and the third support member are cylindrical bodies having an axis parallel to the Y direction,
The mounting plate has three V-shaped grooves extending in the Y direction, each having three grooves that receive the first support member, the second support member, and the third support member,
The base has a V-shaped groove extending in the Y direction, the groove receiving the first support member, a flat surface contacting the second support member, and a flat surface contacting the third support member. Item 2. The mounting device according to Item 1. The restriction member is a cylindrical body having an axis perpendicular to the X direction and the Y direction.
The mounting apparatus according to any one of claims 1 to 3, wherein the mounting plate and the base each have a cylindrical recess that receives the restricting member. The restriction member is a cylindrical body having an axis perpendicular to the X direction and the Y direction.
The mounting plate has a cylindrical recess that receives the regulating member,
The base is a columnar recess that receives the restricting member, and has a recess that includes two adjacent flat surfaces on the side surface.
The mounting device further comprises a fixing means for pressing the restriction member against two adjacent flat surfaces of the side surface of the recess of the base that receives the restriction member, and fixing the restriction member to the base. The mounting apparatus of any one of -3.   The restricting member is disposed inside a triangle whose apex is the disposition position of the first support member, the second support member, and the third support member when viewed from the direction perpendicular to the X direction and the Y direction. The mounting apparatus according to claim 1, wherein the mounting apparatus is characterized in that:   The mounting device according to claim 1, wherein the restricting member is disposed on a straight line extending in the Y direction through the first support member. A mounting plate for mounting the load on the top surface,
A base on which the mounting plate is placed,
A first support member, a second support member, and a third support member that are disposed between the mounting plate and the base and support the mounting plate, wherein two directions parallel to the upper surface of the mounting plate and perpendicular to each other are X When defining the direction and the Y direction, the first support member that restricts the movement of the mounting plate in the X direction relative to the base and allows the movement in the Y direction, the movement of the mounting plate in the X direction and the movement in the Y direction relative to the base A third support member that allows movement in the X direction and movement in the Y direction of the mounting plate relative to the base, and
A regulating member that is disposed between the mounting plate and the base and restricts the movement in the X direction and the movement in the Y direction of the mounting plate relative to the base;
The restriction member is a cylindrical body having an axis perpendicular to the X direction and the Y direction.
The mounting plate has a cylindrical recess that receives the regulating member,
The base is a columnar recess that receives the restricting member, and has a recess that includes two adjacent flat surfaces on the side surface.
A mounting device, further comprising: a fixing unit that presses the regulating member against two adjacent flat surfaces of the side surface of the recess of the base that receives the regulating member, and fixes the regulating member to the base.

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