JP5572438B2 - X-ray fluorescence analyzer - Google Patents

Description

  The present invention relates to a fluorescent X-ray analyzer that performs qualitative and quantitative analysis of a sample by analyzing fluorescent X-rays generated from the sample irradiated with X-rays.

  In order to calculate the intensity of fluorescent X-rays emitted from a specific element from a spectrum acquired by an energy dispersive fluorescent X-ray apparatus, it is necessary to separate the fluorescent X-ray peak waveform from the background waveform.

  Conventionally, a background waveform is generated by repeating removal of a peaked portion, and a fluorescent X-ray peak waveform and a background waveform are separated (see Patent Document 1).

Japanese Patent Laid-Open No. 7-146258

  However, in the conventional method of repeatedly removing the peak portion, when the fluorescent X-ray peak waveform is present near the inflection point where the background waveform changes rapidly, the shape of the inflection point is hidden by the fluorescent X-ray peak waveform. Therefore, it is difficult to accurately generate the background waveform, and there is a problem that the background is generated in a large amount.

  The present invention has been made in consideration of such circumstances, and the object of the present invention is to determine the fluorescent X-ray peak waveform and the background even if the spectrum exists near the inflection point where the background waveform changes rapidly. It is an object to provide an apparatus capable of appropriately separating waveforms.

In order to achieve the above object, the present invention provides the following means. A typical background waveform and fluorescent X-ray peak waveform whose intensity is to be obtained and a plurality of fluorescent X-ray peak waveforms detected around the peak, and a background waveform to reproduce the measured waveform well. The intensity of the fluorescent X-ray peak waveform is changed.
Then, the fluorescent X-ray peak waveform and the background waveform are separated from the completed spectrum.

  According to the fluorescent X-ray analyzer according to the present invention, appropriate separation of the fluorescent X-ray peak waveform and the background waveform can be achieved even for a spectrum that exists in the vicinity of the inflection point where the background waveform changes rapidly. Can do.

It is an apparatus schematic diagram showing an example of the present invention. It is a block diagram of the apparatus which shows the Example of this invention. It is a flowchart which shows the Example of this invention. It is an X-ray spectrum which shows the Example of this invention.

Hereinafter, embodiments of the X-ray fluorescence analyzer according to the present invention will be described.
FIG. 1 is a schematic diagram of an X-ray fluorescence analyzer according to the present invention. An X-ray tube 11 irradiates a sample 13 with an X-ray 12, and the generated fluorescent X-ray 14 is detected by a detector 15 and then amplified by an amplifier 16. Amplified and sent to the data processing device 1. Here, the detector 15 identifies the wavelength of the fluorescent X-ray 14 and outputs its intensity as an electrical signal.

  FIG. 2 is a block diagram of the data processing apparatus 1. Reference numeral 1a denotes a CPU which instructs various arithmetic processes and operations to the memory 1b, the display 1c, and the element specifying means 1d. A memory 1b stores a background function and an integration range obtained in advance for each specific element. Reference numeral 1c denotes a display that displays profile data and the like from fluorescent X-rays measured for a target sample. 1d is an element specifying means that specifies an element to be quantitatively analyzed based on profile data displayed on the display 1c and gives an instruction to that effect to the CPU 1a.

  FIG. 3 is a flowchart showing a procedure for obtaining the fluorescent X-ray intensity of each element according to the present invention. First, a reference sample having no fluorescent X-ray peak at the background inflection point is measured, and a background profile near the inflection point is obtained (S101). Next, a sample to be quantified is measured (S102), and an element for quantitative analysis is specified (S103). The fluorescent X-ray peak waveform and the background waveform are separated using the function waveform of the quantitative element and the background waveform obtained in the qualitative analysis S102 of the target sample (S104). The fluorescent X-ray intensity of each element is obtained from the result of the waveform separation process S104.

  FIG. 4A shows an estimation of the background according to the conventional method. In the case of the waveform S1 in which the fluorescent X-ray peak waveform is overlapped with the inflection point P1 of the original background waveform B1, the conventional method of repeatedly removing the peak removal and generating the background waveform, As described above, the background waveform is generated larger than the original background waveform B1. Therefore, as shown in FIG. 4B, the waveform S2 is acquired with a reference sample in which no fluorescent X-ray peak waveform exists near the inflection point of the background waveform. As the reference sample, for example, polyethylene can be used.

  The function waveform of the fluorescent X-ray peak contained in the sample to be quantified and the intensity of the waveform S2 are changed so as to reproduce the waveform S1 well. Then, the fluorescent X-ray peak waveform F1 and the background waveform F2 are separated from the completed waveform. Thereby, the fluorescent X-ray peak waveform and the background waveform can be appropriately separated.

DESCRIPTION OF SYMBOLS 1 ... Data processor 11 ... X-ray tube 12 ... X-ray 13 ... Sample 14 ... Fluorescent X-ray 15 ... Detector 16 ... Amplifier

Claims (1)

An X-ray tube for irradiating the sample with X-rays;
A detector for detecting fluorescent X-rays generated from the sample;
In a fluorescent X-ray analyzer having a data processing device for processing a detection signal detected by the detector,
The data processing device includes:
And background waveform and an integral range of data obtained from the profile of the fluorescent X-rays measured by the reference sample with no peaks of the fluorescent X-ray to the inflection point of the background of a given region, the peak of the element quantitative analysis target Storage means for storing a waveform function;
Element identification means for identifying the element;
Reading the background waveform peak waveform based on the peak waveform function of the data and the element of the integration range corresponding to the specified the elements from the storage unit, the sample using the peak waveform and the background waveform said back the ground wave and the corresponding to the background waveform to reproduce the profile of the region to change the peak waveform, separating the background waveform and the peak waveform of the sample, the integration range of the separated peak waveform of And a calculation means for calculating an integral value at x.

Images