JP5544319B2 - Surface grinding method - Google Patents

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JP5544319B2
JP5544319B2 JP2011049977A JP2011049977A JP5544319B2 JP 5544319 B2 JP5544319 B2 JP 5544319B2 JP 2011049977 A JP2011049977 A JP 2011049977A JP 2011049977 A JP2011049977 A JP 2011049977A JP 5544319 B2 JP5544319 B2 JP 5544319B2
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由晃 坂上
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Koyo Machine Industries Co Ltd
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Description

本発明は、立形両頭平面研削盤によって、被研削物の上下面を平面研削する方法に関する。   The present invention relates to a method for surface grinding of the upper and lower surfaces of an object to be ground by a vertical double-head surface grinding machine.

従来の一般的な立形両頭平面研削盤(以下、単に「研削盤」という)の概略構成を図4に示す。同図4に示すように、この研削盤1は、鉛直方向に同軸に配設された下側及び上側主軸10,20と、この主軸10,20の相互に対向する端部にそれぞれ固設されたカップ形の砥石11,21と、前記主軸10,20をそれぞれ軸回りに回転させる駆動モータ13,23と、前記主軸10,20をそれぞれ昇降させる下側及び上側昇降機構14,24と、ワークWが載置される定盤30と、ワークWを保持して移載する移載アーム40と、当該移載アーム40を垂直軸を中心に水平回転させるアーム回転駆動機構43と、前記移載アーム40に保持されたワークWをその軸心回りに回転させるワーク回転駆動機構44と、前記駆動モータ13,23、昇降機構14,24、アーム回転駆動機構43及びワーク回転駆動機構44を制御する制御装置50とを備えている。   FIG. 4 shows a schematic configuration of a conventional general vertical double-sided surface grinder (hereinafter simply referred to as “grinding machine”). As shown in FIG. 4, the grinding machine 1 is fixed to the lower and upper main shafts 10 and 20 that are coaxially arranged in the vertical direction, and the ends of the main shafts 10 and 20 facing each other. Cup-shaped grindstones 11, 21, drive motors 13, 23 for rotating the main shafts 10, 20 around the axes, lower and upper elevating mechanisms 14, 24 for moving the main shafts 10, 20 up and down, A surface plate 30 on which W is placed, a transfer arm 40 that holds and transfers a workpiece W, an arm rotation drive mechanism 43 that horizontally rotates the transfer arm 40 around a vertical axis, and the transfer The work rotation drive mechanism 44 that rotates the work W held by the arm 40 about its axis, the drive motors 13 and 23, the elevating mechanisms 14 and 24, the arm rotation drive mechanism 43, and the work rotation drive mechanism 44 are controlled. System And a device 50.

前記各砥石11,21は、それぞれの開口側端面が平坦な研削面12,22となっており、これら研削面12,22が対向し、且つ前記主軸10,20と同軸となるように当該主軸10,20に固設されている。また、前記主軸10,20は、前記駆動モータ13,23によって同方向、或いは相互に逆方向に回転されるとともに、前記下側及び上側昇降機構14,24によってそれぞれ個別に軸方向に昇降される。   Each of the grindstones 11 and 21 has grinding surfaces 12 and 22 having flat end faces on the opening side, and the main spindles so that the grinding faces 12 and 22 face each other and are coaxial with the spindles 10 and 20. 10 and 20 are fixed. The main shafts 10 and 20 are rotated in the same direction or opposite to each other by the drive motors 13 and 23, and are individually lifted and lowered in the axial direction by the lower and upper lifting mechanisms 14 and 24, respectively. .

斯くして、前記下側及び上側昇降機構14,24は、前記制御装置50により、前記主軸10,20を昇降させて、前記各砥石11,21の研削面12,22を予め設定した位置に位置決めする。尚、前記各砥石11,21の研削面12,22はそれぞれ水平になっている。   Thus, the lower and upper elevating mechanisms 14 and 24 raise and lower the main shafts 10 and 20 by the control device 50 to bring the grinding surfaces 12 and 22 of the grindstones 11 and 21 to preset positions. Position. The grinding surfaces 12 and 22 of the grindstones 11 and 21 are horizontal.

前記定盤30は、前記下側主軸10の砥石11の側方にこれに近接して配置されている。この定盤30の上面31は、前記研削面12,22と平行になっており、当該上面31に載置されたワークWが、前記移載アーム40によって前記砥石11の研削面12上に移載される。   The surface plate 30 is disposed on the side of the grindstone 11 of the lower main spindle 10 in close proximity thereto. The upper surface 31 of the surface plate 30 is parallel to the grinding surfaces 12 and 22, and the workpiece W placed on the upper surface 31 is transferred onto the grinding surface 12 of the grindstone 11 by the transfer arm 40. It will be posted.

前記移載アーム40の平面図を図5に示す。同図に示すように、この移載アーム40は、その両端部にそれぞれ、鉛直方向に貫通したワーク保持穴42,42を備えており、このワーク保持穴42,42内にそれぞれワークWを保持することができるようになっている。   A plan view of the transfer arm 40 is shown in FIG. As shown in the figure, the transfer arm 40 has workpiece holding holes 42 and 42 penetrating in the vertical direction at both ends thereof, and holds the workpiece W in the workpiece holding holes 42 and 42, respectively. Can be done.

また、移載アーム40は、その中央部に、前記定盤上面31に対して垂直な回転軸41を備えており、前記アーム回転駆動機構43によって当該回転軸41が回転されることにより、この回転軸41を中心として例えば、図5(a)の矢示A方向に回転し、前記定盤上面31に載置されたワークWを前記砥石11の研削面12上に搬入するとともに、前記砥石11の研削面12上にあるワークWを定盤上面31に搬出する。尚、移載アーム40は左右対称形であるので、図5においては、その一端側の図示を省略した。   Further, the transfer arm 40 is provided with a rotation shaft 41 perpendicular to the upper surface 31 of the surface plate at the center thereof, and the rotation shaft 41 is rotated by the arm rotation drive mechanism 43. For example, the workpiece W is rotated about the rotation shaft 41 in the direction indicated by the arrow A in FIG. 5A, and the workpiece W placed on the upper surface 31 of the surface plate is carried onto the grinding surface 12 of the grinding stone 11. The workpiece W on the 11 grinding surface 12 is carried out to the upper surface 31 of the surface plate. Since the transfer arm 40 is symmetrical, the illustration of one end side thereof is omitted in FIG.

また、前記ワーク回転駆動機構44の具体的な構造は図示しないが、移載アーム40のワーク保持穴42,42に保持されたワークWは、かかるワーク回転駆動機構44によって、図5(b)に図示した如く、例えば、矢示B方向に回転されており、このように回転された状態で、下側砥石11の研削面12上に搬入され、定盤上面31上に搬出される。尚、ワーク保持穴42,42に保持されたワークWは、移載アーム40によって研削面12上に移載されたとき、ワーク回転駆動機構44によって回転され、定盤30上に搬出されたとき、その回転が停止されるようになっていても良い。   Further, although a specific structure of the workpiece rotation driving mechanism 44 is not shown, the workpiece W held in the workpiece holding holes 42, 42 of the transfer arm 40 is transferred to the workpiece rotation driving mechanism 44 as shown in FIG. As shown in FIG. 5, for example, it is rotated in the direction of arrow B, and in this rotated state, it is loaded onto the grinding surface 12 of the lower grindstone 11 and unloaded onto the upper surface 31 of the surface plate. When the workpiece W held in the workpiece holding holes 42 and 42 is transferred onto the grinding surface 12 by the transfer arm 40, the workpiece W is rotated by the workpiece rotation driving mechanism 44 and is carried out onto the surface plate 30. The rotation may be stopped.

尚、ワークWを定盤30と砥石11の研削面12との間で搬送する機構としては、図4及び図5に示した所謂ダブルアーム形式の前記移載アーム40に限られるものではなく、一端にのみワーク保持穴を備えた所謂シングルアーム形式のものでもよい。或いは、周縁部に複数の保持穴を所定間隔で環状に備えた円板状部材を用い、これを水平回転させて搬送する所謂ロータリキャリア方式による機構のものでも良い。   The mechanism for transporting the workpiece W between the surface plate 30 and the grinding surface 12 of the grindstone 11 is not limited to the so-called double arm type transfer arm 40 shown in FIGS. A so-called single arm type having a workpiece holding hole only at one end may be used. Alternatively, a mechanism of a so-called rotary carrier system may be used in which a disk-shaped member having a plurality of holding holes formed annularly at a predetermined interval on the peripheral portion is conveyed horizontally.

そして、以上の構成を備えた研削盤1を用いてワークWの上下面を平面研削する従来の研削方法としては、まず、前記下側昇降機構14により前記下側主軸10を移動させ、前記砥石11の研削面12が定盤上面31よりも僅かに上方(通常5μm以上15μm以下)に位置するように位置決めするとともに、前記上側昇降機構24により前記上側主軸20を移動させ、前記砥石11の研削面12との間にワークWを搬入可能な間隔を有するように、砥石21の研削面22を位置決めする。   As a conventional grinding method for surface grinding of the upper and lower surfaces of the workpiece W using the grinding machine 1 having the above configuration, first, the lower spindle 10 is moved by the lower lifting mechanism 14, and the grinding wheel 11 is positioned so that the grinding surface 12 is slightly above the upper surface 31 (usually 5 μm or more and 15 μm or less), and the upper spindle 20 is moved by the upper elevating mechanism 24 to grind the grindstone 11. The grinding surface 22 of the grindstone 21 is positioned so as to have an interval at which the workpiece W can be carried between the surface 12 and the surface 12.

尚、このとき、移載アーム40の一方は定盤30の上方にあり、そのワーク保持穴42にはワークWが保持され、他方は砥石11,21間に位置し、そのワーク保持穴42にはワークWが保持されていないものとする。   At this time, one of the transfer arms 40 is above the surface plate 30, the workpiece W is held in the workpiece holding hole 42, and the other is located between the grindstones 11 and 21, and the workpiece holding hole 42 Suppose that the workpiece W is not held.

ついで、前記アーム回転駆動機構43により移載アーム40を回転させて、そのワーク保持穴42に保持されたワークWを定盤上面31から砥石11の研削面12上に移載した後、上側昇降機構24により上側主軸20を下降させて、砥石21の研削面22をワークWの上面に当接させ、当該研削面12,22によってワークWの上下面を所定量研削する。尚、上述したように、前記ワークWは、ワーク回転駆動機構44によってその軸中心に回転されている。   Next, the transfer arm 40 is rotated by the arm rotation drive mechanism 43, and the workpiece W held in the workpiece holding hole 42 is transferred from the upper surface 31 of the surface plate onto the grinding surface 12 of the grindstone 11. The upper spindle 20 is lowered by the mechanism 24 to bring the grinding surface 22 of the grindstone 21 into contact with the upper surface of the workpiece W, and the upper and lower surfaces of the workpiece W are ground by a predetermined amount by the grinding surfaces 12 and 22. As described above, the workpiece W is rotated about its axis by the workpiece rotation drive mechanism 44.

次に、このようにして研削加工を完了した後、上側主軸20を上昇させて砥石21をワークWから離反させ、しかる後、前記アーム回転駆動機構43により再度移載アーム40を回転させることにより、研削済みのワークWを前記研削面12から定盤上面31へと移載する。   Next, after the grinding process is completed in this way, the upper spindle 20 is raised to separate the grindstone 21 from the workpiece W, and then the transfer arm 40 is rotated again by the arm rotation drive mechanism 43. Then, the ground workpiece W is transferred from the ground surface 12 to the upper surface 31 of the surface plate.

このとき、移載アーム40の、定盤30の上方に位置する他方のワーク保持穴42には、新たなワークWが供給されて保持されており、前記移載アーム40の回転により、この新たなワークWが前記研削面12上に移載される。   At this time, a new workpiece W is supplied and held in the other workpiece holding hole 42 located above the surface plate 30 of the transfer arm 40, and this new arm is rotated by the rotation of the transfer arm 40. A workpiece W is transferred onto the grinding surface 12.

斯くして、以後、上記と同様の動作を繰り返すことによって、連続的にワークWが研削加工される。   Thus, the workpiece W is continuously ground by repeating the same operation as described above.

ところで、このような一般的な研削盤1及びこれを用いた研削方法において、これを改良した両頭平面研削装置及びその研削方法として、従来、特開平10−543号公報に開示されたものが提案されている。   By the way, in such a general grinding machine 1 and a grinding method using the same, a double-sided surface grinding apparatus and a grinding method thereof improved in the conventional grinding machine 1 are proposed as disclosed in JP-A-10-543. Has been.

この両頭平面研削装置は、上述した従来の研削盤1の構成に加えて、下側砥石の研削面上に載置されたワークの下面と定盤上面との間の上下方向の間隔を検知する非接触センサを備えており、複数のワークを連続加工することによって生じる下側砥石研削面の摩耗量を、前記非接触センサによって検出できるようになっている。   In addition to the configuration of the conventional grinding machine 1 described above, this double-head surface grinding apparatus detects the vertical distance between the lower surface of the workpiece placed on the grinding surface of the lower grindstone and the upper surface of the surface plate. A non-contact sensor is provided, and the non-contact sensor can detect the amount of wear on the lower grinding wheel grinding surface caused by continuously machining a plurality of workpieces.

そして、検出した摩耗量に相当する寸法だけ下側砥石を上昇させることで、下側砥石の研削面が常に定位置に位置するように、これを制御している。   Then, the lower grindstone is raised by a dimension corresponding to the detected wear amount so that the grinding surface of the lower grindstone is always positioned at a fixed position.

下側砥石の研削面が摩耗により下方に後退して、その上下方向の位置が定盤上面に近づくと、加工中にワーク下面と定盤上面とが接触して、当該ワーク下面が損傷することになるが、特開平10−543号公報に開示された研削装置及びその研削方法では、下側砥石の研削面を常に定位置に位置するように制御することで、このような問題が生じるのを防止しようとしている。   If the grinding surface of the lower grindstone moves downward due to wear and its vertical position approaches the upper surface of the surface plate, the lower surface of the workpiece contacts the upper surface of the surface plate during processing, and the lower surface of the workpiece is damaged. However, in the grinding apparatus and the grinding method disclosed in Japanese Patent Application Laid-Open No. 10-543, such a problem arises by controlling the grinding surface of the lower grindstone to always be in a fixed position. Trying to prevent.

特開平10−543号公報JP-A-10-543

ところが、上記従来の一般的な研削盤1においては、ワークWを移載する際の、前記下側砥石11の研削面12の位置(搬入位置)、並びにワークWを研削する際の前記研削面12の位置(研削位置)が同じ位置であり、しかも、これら搬入位置及び研削位置は、上述したように、定盤上面31よりも僅かに上方に設定されているため、以下に説明するような問題があった。   However, in the conventional general grinding machine 1, the position (carrying position) of the grinding surface 12 of the lower grindstone 11 when the workpiece W is transferred and the grinding surface when the workpiece W is ground. Since the position 12 (grinding position) is the same position, and the carry-in position and the grinding position are set slightly above the upper surface 31 of the platen as described above, as described below. There was a problem.

即ち、前記下側砥石11の研削面12上にあるワークWに上側砥石21の研削面22を押し当てて当該ワークWを研削する際、当然のことながら、当該砥石11,21に研削負荷が作用し、また、下側砥石11には、研削負荷に加えてワークWの重量による荷重も作用するが、このような荷重は、図6(a)のように、上側主軸20及び下側主軸10に対して、その中心軸から外れた偏荷重となっており、砥石11,21に作用する負荷が軽負荷である場合にはあまり問題とならないものの、重負荷が作用する場合には、図6(b)に示すように、下側主軸10及び上側主軸20の各フランジが傾く或いは砥石11,21が撓むことで、ワークWの下面が定盤上面31に接触し、当該ワークWの下面及び定盤上面31が損傷するという問題を生じるのである。尚、図6(b)では、傾いた状態を分かり易くするために、実際よりも大きい傾斜角度で図示している。   That is, when the workpiece W is ground by pressing the grinding surface 22 of the upper grinding wheel 21 against the workpiece W on the grinding surface 12 of the lower grinding stone 11, the grinding stones 11 and 21 have a grinding load as a matter of course. In addition to the grinding load, a load due to the weight of the workpiece W also acts on the lower grindstone 11, and such a load is applied to the upper spindle 20 and the lower spindle as shown in FIG. 10 is an offset load that deviates from the central axis, and it is not a problem when the load acting on the grindstones 11 and 21 is a light load, but when a heavy load acts, 6 (b), the flanges of the lower main shaft 10 and the upper main shaft 20 are inclined or the grindstones 11 and 21 are bent, so that the lower surface of the work W comes into contact with the upper surface 31 of the surface plate. The problem that the lower surface and the upper surface 31 of the surface plate are damaged Is Jill. In FIG. 6B, in order to make it easy to understand the tilted state, the tilt angle is larger than the actual tilt angle.

また、ワークW下面と定盤上面31とが接触することで、ワークWが定盤30に支えられた状態となるため、上側砥石21の研削量よりも下側砥石11の研削量の方が小さくなり、下側砥石11の目詰まりが発生する或いはワークWの上下面の研削代を適切に配分することが困難になるという問題も生じる。加えて、ワークWが傾いた状態で研削されることにもなるため、研削精度(特に平面度)の低下や砥石11,21の型崩れが発生するという問題も生じ、砥石11,21の型崩れが頻繁に発生することで、ドレッシング作業の必要回数が増加し、加工コストが増加するという問題も発生する。   Further, since the work W lower surface and the surface plate upper surface 31 are in contact with each other, the work W is supported by the surface plate 30, and therefore the grinding amount of the lower grindstone 11 is greater than the grinding amount of the upper grindstone 21. There is also a problem that clogging of the lower grindstone 11 occurs or it becomes difficult to properly distribute the grinding allowance between the upper and lower surfaces of the workpiece W. In addition, since the workpiece W is ground in an inclined state, problems such as a decrease in grinding accuracy (particularly flatness) and loss of shape of the grindstones 11 and 21 occur. When collapse occurs frequently, the required number of dressing operations increases, and the processing cost increases.

これらの問題は、前記搬入位置を上方に上げることで解消されるが、かかる搬入位置を上方に設定すると、下側砥石11の研削面12と定盤上面31との段差が大きくなりすぎ、下側砥石11の研削面12から定盤上面31へとワークWを移載する際に、下側砥石11のエッジ部分で研削後のワークW下面が傷つきやすくなるという問題や、この段差が障害となって、ワークWを研削面12上に移載することができないという根本的な問題を生じる。   These problems can be solved by raising the carry-in position upward. However, when the carry-in position is set upward, the step between the grinding surface 12 of the lower grindstone 11 and the upper surface 31 of the surface plate becomes too large. When the workpiece W is transferred from the grinding surface 12 of the side grindstone 11 to the upper surface 31 of the surface plate, there is a problem that the lower surface of the workpiece W after grinding is easily damaged at the edge portion of the lower grindstone 11, and this step is an obstacle. Thus, the fundamental problem that the workpiece W cannot be transferred onto the grinding surface 12 occurs.

尚、前記搬入位置及び研削位置が同じ位置に設定され、これらの位置が定盤上面から僅か上方に設定されているという点については、特開平10−543号公報に開示された研削装置も同様であり、当該研削装置においても上記と同様の問題が生じていた。   In addition, the grinding apparatus disclosed in Japanese Patent Laid-Open No. 10-543 is the same in that the carry-in position and the grinding position are set to the same position, and these positions are set slightly above the upper surface of the surface plate. In the grinding apparatus, the same problem as described above has occurred.

本発明は、以上の実情に鑑みなされたもので、研削時に、ワークと定盤とが接触することを確実に防止して研削精度や砥石寿命を向上させることができる平面研削方法の提供を、その目的とする。   The present invention has been made in view of the above circumstances, and provides a surface grinding method that can reliably prevent the workpiece and the surface plate from contacting each other during grinding and improve the grinding accuracy and the life of the grinding wheel. For that purpose.

上記課題を解決するための本発明は、
それぞれ平坦な研削面を有する一対の砥石を、その前記研削面同士が対向するように上下に配設するとともに、該一対の砥石をそれぞれその研削面と直交する軸を中心に回転させ、ついで、載置台上に配置した被研削物を水平方向にスライドさせて前記一対の砥石間に搬入し、ついで、前記一対の砥石研削面によって前記被研削物の上下面を研削加工するようにした平面研削方法であって、
前記下側砥石を、前記載置台上の被研削物をその研削面上にスライド搬入可能な位置に位置決めするとともに、前記上側砥石を、非接触で前記被研削物を搬入可能な間隔をもって前記下側砥石の上方に位置決めし、
ついで、前記載置台上の被研削物をスライド搬入せしめて前記下側砥石の研削面上に載置し、
この後、前記下側砥石を上昇させることにより、又は、前記下側砥石を上昇させるとともに前記上側砥石を下降させることにより、前記被研削物の上面を前記上側砥石の研削面に当接せしめて、前記被研削物の上下面を研削加工し、
ついで、前記下側砥石を下降させて、前記被研削物を前記載置台上にスライド搬出可能な位置に位置決めし、
この後、前記下側砥石上の被研削物を前記載置台上に搬出するようにした平面研削方法に係る。
The present invention for solving the above problems is as follows.
A pair of grindstones each having a flat grinding surface are arranged up and down so that the grinding surfaces face each other, and the pair of grindstones are rotated around an axis orthogonal to the grinding surface, respectively. Surface grinding in which the workpiece placed on the mounting table is slid horizontally and carried between the pair of grinding wheels, and then the upper and lower surfaces of the workpiece are ground by the pair of grinding wheels. A method,
The lower grindstone is positioned at a position where the object to be ground on the mounting table can be slid into the ground surface, and the upper grindstone is positioned at the lower position with a space at which the object to be ground can be carried in a non-contact manner. Position above the side whetstone,
Next, the object to be ground on the mounting table is slid into and placed on the grinding surface of the lower grindstone,
Thereafter, the upper grindstone is brought into contact with the grinding surface of the upper grindstone by raising the lower grindstone or raising the lower grindstone and lowering the upper grindstone. , Grinding the upper and lower surfaces of the workpiece,
Next, the lower grindstone is lowered, and the object to be ground is positioned at a position where it can be slid out on the mounting table,
Thereafter, according to the flat surface grinding method so as to unload the object to be ground on the lower grinding wheel on the mounting table.

この平面研削方法によれば、まず、下側砥石を、上側砥石との間に被研削物が搬入可能な間隔を空け、且つ載置台上の被研削物をスライド搬入可能な位置、即ち、搬入位置に位置決めした後、前記載置台上の被研削物を下側砥石の研削面上に載置する。   According to this surface grinding method, first, there is an interval between the lower grindstone and the upper grindstone so that the workpiece can be carried in, and the position on the mounting table where the workpiece can be carried in slide, i.e., the carry-in. After positioning at the position, the object to be ground on the mounting table is placed on the grinding surface of the lower grindstone.

ついで、前記下側砥石を、前記搬入位置の上方に設定された研削位置まで上昇させ、下側砥石を研削位置に上昇させた状態で、当該下側砥石及び上側砥石によって前記被研削物の上下面を研削加工する。   Next, the lower grindstone is raised to a grinding position set above the carry-in position, and the lower grindstone and the upper grindstone are used to move the lower grindstone to the grinding position. Grind the bottom surface.

そして、研削加工完了後、下側砥石を、被研削物を載置台上にスライド搬出可能な位置、即ち、搬出位置に下降させ、下降後、被研削物を載置台上に搬出する。   Then, after the grinding process is completed, the lower grindstone is lowered to a position where the object to be ground can be slid out onto the mounting table, that is, an unloading position, and after the descending, the object to be ground is carried out onto the mounting table.

このように、この平面研削方法によれば、被研削物の研削位置を当該被研削物の搬入位置よりも上方に設定しているので、この研削位置を適正な位置に設定することで、例え、研削時に重負荷が作用したとしても、かかる重負荷に起因した砥石の撓みや弾性変形或いは主軸の傾きにより被研削物下面と定盤上面とが接触するのを確実に防止して研削精度や砥石寿命を向上させることができる。また、この接触によって生じるワークや定盤の損傷を未然に防止することもできる。 Thus, according to this surface grinding method , since the grinding position of the workpiece is set above the carry-in position of the workpiece, the grinding position is set to an appropriate position. Even if a heavy load is applied during grinding, it is possible to reliably prevent the lower surface of the workpiece and the upper surface of the surface from coming into contact with each other due to the bending or elastic deformation of the grinding wheel or the inclination of the spindle due to the heavy load. The wheel life can be improved. In addition, it is possible to prevent damage to the work and the surface plate caused by this contact.

一方、被研削物を搬入,搬出する際には、下側砥石を、載置台上との間で被研削物をスライド搬送可能な位置に位置決めするようにしており、従来と同様に、下側砥石と載置台上との間で、被研削物をスムーズに搬送することができる。   On the other hand, when loading and unloading the object to be ground, the lower grindstone is positioned at a position where the object to be ground can be slid and transferred to and from the mounting table. An object to be ground can be smoothly conveyed between the grindstone and the mounting table.

尚、前記搬入位置と搬出位置は、下側砥石の研削面が前記載置台上面よりも上方となるような位置に設定するThe carry-in position and the carry-out position are set so that the grinding surface of the lower grindstone is above the upper surface of the mounting table.

また、他の態様としては、前記搬入位置における下側砥石の研削面が前記載置台上面よりも下方に位置し、前記搬出位置における同研削面が前記載置台上面よりも上方に位置するように設定するAs another aspect, the grinding surface of the lower grindstone at the carry-in position is positioned below the upper surface of the mounting table, and the ground surface at the unloading position is positioned above the upper surface of the mounting table. set to.

このようにすることで、搬入,搬出のいずれの場合にも、搬送方向において、突出した出っ張りが生じず、よりスムーズに被研削物を搬送することができる。   By doing in this way, in any case of carrying in and carrying out, the protrusion which protruded in the conveyance direction does not arise, but a to-be-ground object can be conveyed more smoothly.

また、前記研削位置における前記下側砥石の研削面は、前記載置台上面から20μm以上300μm以下(より好ましくは30μm以上120μm以下)となる位置であるのが好ましい。同研削面の位置を載置台上面より20μm以上上方に設定することで、研削時に被研削物下面と載置台上面とが接触するのを効果的に防止でき、一方、300μm以下にすることで、下側砥石の上昇時間が長くなるのを適正な範囲に抑えることができ、研削加工のサイクルタイムが長くなるのを許容範囲内に抑えることができる。   Moreover, it is preferable that the grinding surface of the said lower grindstone in the said grinding position is a position which becomes 20 to 300 micrometers (more preferably 30 to 120 micrometers) from the mounting table upper surface. By setting the position of the grinding surface 20 μm or more higher than the upper surface of the mounting table, it is possible to effectively prevent the lower surface of the object to be ground and the upper surface of the mounting table from contacting each other during grinding. It is possible to suppress the lowering time of the lower grindstone from being increased to an appropriate range, and it is possible to suppress the grinding cycle time from being increased within an allowable range.

以上説明したように、本発明に係る平面研削方法によれば、研削位置を被研削物の搬入位置よりも上方に設定したので、研削時に重負荷が作用したとしても、被研削物下面と載置台上面とが接触するのを確実に防止して研削精度の低下及び偏摩耗に伴う砥石コストの増加を防止することができる。また、上述したような、下側砥石の目詰まり、ワークの研削代の片寄り、ワークや載置台の損傷といった問題の発生も未然に防止することができる。   As described above, according to the surface grinding method according to the present invention, since the grinding position is set higher than the loading position of the object to be ground, even if a heavy load is applied during grinding, it is mounted on the lower surface of the object to be ground. It is possible to reliably prevent contact with the upper surface of the pedestal, and to prevent a decrease in grinding accuracy and an increase in grindstone cost due to uneven wear. Moreover, it is possible to prevent problems such as clogging of the lower grindstone, deviation of the workpiece grinding allowance, damage to the workpiece and the mounting table as described above.

本発明に係る平面研削方法の手順を示す説明図である。尚、移載アームは一端のみ図示した。It is explanatory drawing which shows the procedure of the surface grinding method which concerns on this invention. Only one end of the transfer arm is shown. 本発明に係る平面研削方法の手順を示す説明図である。尚、移載アームは一端のみ図示した。It is explanatory drawing which shows the procedure of the surface grinding method which concerns on this invention. Only one end of the transfer arm is shown. 本発明に係る平面研削方法の手順を示す説明図である。尚、移載アームは一端のみ図示した。It is explanatory drawing which shows the procedure of the surface grinding method which concerns on this invention. Only one end of the transfer arm is shown. 従来の立形両頭平面研削盤の概略構成を示す正面図である。It is a front view which shows schematic structure of the conventional vertical double-sided surface grinder. 従来の立形両頭平面研削盤における移載アームを示す平面図である。尚、移載アームは一端のみ図示した。It is a top view which shows the transfer arm in the conventional vertical double-sided surface grinder. Only one end of the transfer arm is shown. 従来の立形両頭平面研削盤で砥石研削面の傾きが生じる過程を示す説明図である。It is explanatory drawing which shows the process in which the inclination of a grindstone grinding surface arises with the conventional vertical double-sided surface grinder.

以下、本発明の具体的な実施形態に係る平面研削方法について、図面を参照しつつ説明する。尚、本実施形態において用いる立形両頭平面研削盤については、図4に示した従来の研削盤1と同様のものである。したがって、その具体的な構成についての説明は、これを省略する。   Hereinafter, a surface grinding method according to a specific embodiment of the present invention will be described with reference to the drawings. The vertical double-sided surface grinder used in this embodiment is the same as the conventional grinder 1 shown in FIG. Therefore, the description about the specific structure is abbreviate | omitted.

本実施形態に係る平面研削方法によれば、まず、下側昇降機構14により下側主軸10及び下側砥石11を移動させて、図1(a)に示すように、下側砥石11の研削面12が、定盤上面31よりも僅かに上方に位置するように位置決めするとともに、上側砥石21の研削面22が、前記下側砥石11の研削面12との間にワークWを搬入可能な間隔を有するように、前記上側昇降機構24により前記上側主軸20及び上側砥石21を移動させて位置決めする。以下、この下側砥石11及び上側砥石21の位置を「ワーク搬入位置」という。   According to the surface grinding method according to the present embodiment, first, the lower spindle 10 and the lower grindstone 11 are moved by the lower lifting mechanism 14 to grind the lower grindstone 11 as shown in FIG. Positioning is performed so that the surface 12 is positioned slightly above the upper surface 31 of the surface plate, and the workpiece W can be carried between the grinding surface 22 of the upper grindstone 21 and the grinding surface 12 of the lower grindstone 11. The upper spindle 20 and the upper grindstone 21 are moved and positioned by the upper elevating mechanism 24 so as to have an interval. Hereinafter, the positions of the lower grindstone 11 and the upper grindstone 21 are referred to as “work carry-in positions”.

このように、本例では、ワーク搬入位置における前記研削面12の位置を、定盤上面31より僅か上方に設定して、研削面12と定盤上面31との間に段差を設けているが、これは、後にこの研削面12上にワークWが搬入,載置されたときに、当該ワークWの下面と定盤上面31とが接触するのを防止するためである。また、ワーク搬入位置は、後述するようにワーク搬出位置でもあり、ワークWを搬出する際に、砥石11のエッジ部分によって研削後のワークW下面が傷つきやすくなるのを防止するためである。   Thus, in this example, the position of the grinding surface 12 at the workpiece loading position is set slightly above the surface plate upper surface 31, and a step is provided between the grinding surface 12 and the surface plate upper surface 31. This is to prevent the lower surface of the workpiece W from contacting the upper surface 31 of the surface plate when the workpiece W is subsequently loaded and placed on the grinding surface 12. The workpiece loading position is also a workpiece unloading position, as will be described later. This is to prevent the lower surface of the workpiece W after grinding from being easily damaged by the edge portion of the grindstone 11 when the workpiece W is unloaded.

一方、研削面12と定盤上面31との間に段差を設けると、この段差が、ワークWを研削面12上にスライド搬送する際の障害となるため、当該段差は極力小さい方が好ましい。   On the other hand, when a step is provided between the grinding surface 12 and the upper surface 31 of the surface plate, this step becomes an obstacle when the workpiece W is slid and conveyed onto the grinding surface 12, so that the step is preferably as small as possible.

以上を考慮すると、上記段差は、総じて5μm〜15μmの範囲内に設定するのが好ましい。例えば、ワークWの重量が重い場合には15μm程度、重量が軽い場合には5μm程度に前記段差を設定するようにしても良いし、ワークWの重量に関係なく、当該段差を設定するようにしても良い。   Considering the above, it is preferable to set the step in the range of 5 μm to 15 μm as a whole. For example, the step may be set to about 15 μm when the weight of the workpiece W is heavy, and about 5 μm when the weight is light, or the step may be set regardless of the weight of the workpiece W. May be.

尚、このようにして、下側砥石11及び上側砥石21がワーク搬入位置に位置決めされたとき、移載アーム40の一方端は定盤30の上方にあって、そのワーク保持穴42にはワークWが保持されており、他方端は砥石11,21間に位置して、そのワーク保持穴42にはワークWが保持されていないものとする。図1〜図3においては、移載アーム40の他方端側の図示を省略している。   In this way, when the lower grindstone 11 and the upper grindstone 21 are positioned at the workpiece loading position, one end of the transfer arm 40 is above the surface plate 30 and the workpiece holding hole 42 has a workpiece. It is assumed that W is held, the other end is located between the grindstones 11 and 21, and the workpiece W is not held in the workpiece holding hole 42. 1-3, illustration of the other end side of the transfer arm 40 is omitted.

また、定盤30の上方に位置する前記ワーク保持穴42へのワークWの供給及び後述する取出しは、ローダーやロボット等の適宜自動装置を用いてこれを行うことができる。   Further, the supply of the workpiece W to the workpiece holding hole 42 positioned above the surface plate 30 and the take-out described later can be performed using a suitable automatic device such as a loader or a robot.

ついで、図1(b)に示すように、アーム回転駆動機構43によって回転軸41を回転させることで、移載アーム40を180°回転させ、前記一方端側のワーク保持穴42に保持された状態で定盤上面31に載置されたワークWを、ワーク回転駆動機構44によってその軸中心に回転させつつ、下側砥石11の研削面12と上側砥石21の研削面22との間に搬入して下側砥石11の研削面12上に載置する。尚、下側砥石11の研削面12と上側砥石21の研削面22との間に搬入した後、ワークWをワーク回転駆動機構44によってその軸中心に回転させるようにしても良い。   Next, as shown in FIG. 1B, the arm 40 is rotated by the arm rotation drive mechanism 43 to rotate the transfer arm 40 by 180 ° and is held in the work holding hole 42 on the one end side. The workpiece W placed on the upper surface 31 of the surface plate in a state is carried around between the grinding surface 12 of the lower grindstone 11 and the grinding surface 22 of the upper grindstone 21 while being rotated about its axis by the workpiece rotation drive mechanism 44. Then, it is placed on the grinding surface 12 of the lower grindstone 11. In addition, after carrying in between the grinding surface 12 of the lower grindstone 11 and the grinding surface 22 of the upper grindstone 21, the workpiece W may be rotated about its axis by the workpiece rotation drive mechanism 44.

ついで、図2(a)に示すように、下側昇降機構14によって下側主軸10及び下側砥石11を距離dだけ上昇させるとともに、上側昇降機構24によって上側主軸20及び上側砥石21をワークWに向けて距離d(切込み量)だけ下降させる。その際、下側主軸10及び下側砥石11の上昇速度は特に制限はないが、上側主軸20及び上側砥石21の下降速度は、研削加工速度とする。 Then, as shown in FIG. 2 (a), along with raising the lower spindle 10 and the lower grindstone 11 by a distance d 1 by the lower lift mechanism 14, by the upper lifting mechanism 24 the upper spindle 20 and the upper grinding wheel 21 work The distance is lowered toward W by a distance d 2 (cut amount). At that time, the ascending speeds of the lower main spindle 10 and the lower grindstone 11 are not particularly limited, but the descending speeds of the upper main spindle 20 and the upper grindstone 21 are set to a grinding speed.

これにより、上側砥石21の研削面22がワークWの上面に当接し、下側砥石11の研削面12及び上側砥石21の研削面22によって、ワークWの上下面が研削される。   Thereby, the grinding surface 22 of the upper grindstone 21 contacts the upper surface of the workpiece W, and the upper and lower surfaces of the workpiece W are ground by the grinding surface 12 of the lower grindstone 11 and the grinding surface 22 of the upper grindstone 21.

尚、下側砥石11の上昇量dは、定盤上面31とワークWの下面(即ち、下側砥石11の研削面12)との間の距離が、研削負荷等に起因した下側及び上側主軸10,20や下側砥石11の変形によっても、ワークWの下面と定盤上面31とが接触しないような距離となるように適宜設定される量であり、定盤上面31と前記研削面12との間の距離が20μm以上300μm以下(より好ましくは30μm以上120μm以下)の範囲内となるような量(例えば、d=50μm)に設定するのが好ましい。20μm未満の場合には、研削負荷等に起因したワークW下面と定盤上面31との接触を有効に防止することができず、一方、300μmを越えると、下側砥石11の上昇時間が長くなり、研削加工のサイクルタイムが許容範囲を超えて長くなるからである。 Incidentally, the rising amount d 1 of the lower grindstone 11 is such that the distance between the upper surface 31 of the surface plate and the lower surface of the workpiece W (that is, the grinding surface 12 of the lower grindstone 11) The amount is appropriately set so that the lower surface of the workpiece W and the surface plate upper surface 31 do not come into contact with each other even when the upper spindles 10 and 20 and the lower grindstone 11 are deformed. It is preferable to set the distance between the surface 12 and the surface 12 within a range of 20 μm to 300 μm (more preferably 30 μm to 120 μm) (for example, d 1 = 50 μm). If it is less than 20 μm, the contact between the lower surface of the workpiece W and the upper surface 31 of the surface plate due to grinding load or the like cannot be effectively prevented, while if it exceeds 300 μm, the rising time of the lower grindstone 11 is long. This is because the cycle time of the grinding process becomes longer than the allowable range.

また、切込み量dは、ワークWの上下面に設定された研削代の合計に相当する量であり、この切込み量dについても適宜設定される。 Also, depth of cut d 2 is an amount equivalent to the sum of the set grinding allowance on the upper and lower surfaces of the workpiece W, is set appropriately also for this depth of cut d 2.

斯くして、研削完了後のワークWの厚みをtとすると、前記ワーク搬入位置における上側砥石21の研削面22の位置、即ち、下側砥石11の研削面12からの距離Lは下式によって算出され、上側砥石21の研削面22の位置は、下側砥石11の研削面12から距離Lだけ上方に設定される。   Thus, assuming that the thickness of the workpiece W after completion of grinding is t, the position of the grinding surface 22 of the upper grinding wheel 21 at the workpiece loading position, that is, the distance L from the grinding surface 12 of the lower grinding stone 11 is given by the following equation. The calculated position of the grinding surface 22 of the upper grindstone 21 is set upward by a distance L from the grinding surface 12 of the lower grindstone 11.

L=d+d+t L = d 1 + d 2 + t

上記のようにして、ワークWの研削を完了すると、次に、図2(b)に示すように、下側昇降機構14及び上側昇降機構24によって、それぞれ下側主軸10及び上側主軸20を元の前記搬入位置に復帰させる。   When grinding of the workpiece W is completed as described above, next, as shown in FIG. 2B, the lower spindle 10 and the upper spindle 20 are respectively restored by the lower elevator mechanism 14 and the upper elevator mechanism 24. To the loading position.

その後、図3に示すように、アーム回転駆動機構43により移載アーム40を180°回転させて、研削完了後のワークWを下側砥石11の研削面12上から定盤上面31へと搬出する。   Thereafter, as shown in FIG. 3, the transfer arm 40 is rotated 180 ° by the arm rotation drive mechanism 43, and the workpiece W after grinding is carried out from the grinding surface 12 of the lower grindstone 11 to the upper surface 31 of the surface plate. To do.

尚、移載アーム40の、定盤30の上方に位置する他方のワーク保持穴42には、上記と同様にして新たなワークWが供給されて保持されており、前記移載アーム40の回転により、この新たなワークWが前記研削面12上に移載される。   In addition, a new workpiece W is supplied and held in the other workpiece holding hole 42 located above the surface plate 30 of the transfer arm 40 in the same manner as described above, and the rotation of the transfer arm 40 is performed. Thus, the new workpiece W is transferred onto the grinding surface 12.

そして、定盤30上に搬出されたワークWをワーク保持穴42から取出し、空になったワーク保持穴42に新たなワークWを供給する。   And the workpiece | work W carried out on the surface plate 30 is taken out from the workpiece | work holding hole 42, and the new workpiece | work W is supplied to the workpiece | work holding hole 42 which became empty.

斯くして、以後、上記と同様の動作を繰り返すことによって、連続的にワークWが研削加工される。   Thus, the workpiece W is continuously ground by repeating the same operation as described above.

以上のように、本発明の平面研削方法によれば、ワーク搬入位置よりも上方に設定した位置まで、下側砥石11の研削面12の位置を移動させてワークWに研削加工を施すため、例え、研削時に砥石11,21の研削面12,22に重負荷が作用したとしても、下側主軸10及び上側主軸20の各フランジの傾きによるワークW下面と定盤上面31との接触を確実に防止することができる。これにより、ワークW下面と定盤上面31との接触によって生じるワークWや定盤30の損傷を未然に防止できる。   As described above, according to the surface grinding method of the present invention, the workpiece W is ground by moving the position of the grinding surface 12 of the lower grindstone 11 to a position set higher than the workpiece loading position. Even if a heavy load is applied to the grinding surfaces 12 and 22 of the grindstones 11 and 21 during grinding, the contact between the lower surface of the workpiece W and the upper surface 31 of the surface plate is ensured due to the inclination of each flange of the lower main shaft 10 and the upper main shaft 20. Can be prevented. Thereby, the damage of the workpiece | work W and the surface plate 30 which arises by the contact of the workpiece | work lower surface and the surface plate upper surface 31 can be prevented beforehand.

また、ワークWが定盤30に支えられ、下側及び上側砥石11,21の研削量に差が生じることに起因する、下側砥石11の目詰まりやワークWの研削代配分の困難化という問題の発生も防止できる。さらに、傾いた状態のワークWを研削することもなくなるため、高い研削精度(特に平面度)を維持することができる。加えて、砥石11,21の型崩れ(偏摩耗)の発生も抑えることができるため、ドレッシング作業の回数を減らすことができ、砥石を長持ちさせることができる。   Further, the work W is supported by the surface plate 30 and the grinding amount of the lower and upper grindstones 11 and 21 is different, which means clogging of the lower grindstone 11 and the difficulty of distributing the grinding allowance of the work W. Problems can also be prevented. Furthermore, since the workpiece W in an inclined state is not ground, high grinding accuracy (particularly flatness) can be maintained. In addition, since the occurrence of shape loss (uneven wear) of the grindstones 11 and 21 can be suppressed, the number of dressing operations can be reduced, and the grindstone can be made long lasting.

上述した点に加え、ワークWを搬入,搬出する際は、従来と同様に、下側砥石11の研削面12と定盤上面31との間の段差が、ワークWをスライド搬送できる段差としているため、ワークWをスムーズに移載することができる。   In addition to the above-described points, when the workpiece W is loaded and unloaded, the step between the grinding surface 12 of the lower grindstone 11 and the upper surface 31 of the lower grindstone 11 is a step that allows the workpiece W to be slid and conveyed. Therefore, the workpiece W can be transferred smoothly.

以上、本発明の具体的な実施形態について説明したが、本発明が採り得る具体的な態様は、何らこれらに限定されるものではない。   As mentioned above, although specific embodiment of this invention was described, the specific aspect which this invention can take is not limited to these at all.

例えば、前記ワーク搬入位置における下側砥石11の位置を、下側砥石11の研削面12が、定盤上面31よりも僅かに下方に位置するように設定してもよい。   For example, the position of the lower grindstone 11 at the workpiece loading position may be set so that the grinding surface 12 of the lower grindstone 11 is positioned slightly below the upper surface 31 of the surface plate.

この場合、ワークWを搬入する際に、下側砥石11の研削面12の位置が、定盤上面31よりも僅かに下方に位置するように(例えば、定盤上面31よりも0〜15μm下がった位置となるように)、下側昇降機構14により下側主軸10及び下側砥石11を移動させ、アーム回転駆動機構43により移載アーム40を回転させてワークWを研削面12に移載した後、下側砥石11の研削面12が定盤上面31よりも所定量上方に位置するように、下側主軸10及び下側砥石11を予め決めた上昇量dだけ上昇させるとともに、上側昇降機構24により上側主軸20及び上側砥石21を下降させて、ワークWの上下面を研削し、その後、下側砥石11の研削面12が定盤上面31よりも僅かに上方となるように、下側昇降機構14により下側主軸10及び下側砥石11を移動させるとともに、上側昇降機構24により上側主軸20及び上側砥石21を上昇させ、下側砥石11の研削面12から定盤上面31へとワークWを搬出する。 In this case, when the work W is carried in, the position of the grinding surface 12 of the lower grindstone 11 is slightly lower than the upper surface 31 of the surface plate (for example, 0 to 15 μm lower than the upper surface 31 of the surface plate). The lower spindle 10 and the lower grindstone 11 are moved by the lower lifting mechanism 14 and the transfer arm 40 is rotated by the arm rotation driving mechanism 43 so that the workpiece W is transferred to the grinding surface 12. after, as the grinding surface 12 of the lower grinding wheel 11 is positioned a predetermined amount above the platen surface 31, with increases by increasing the amount d 1 that predetermined lower spindle 10 and the lower grindstone 11, the upper The upper spindle 20 and the upper grindstone 21 are lowered by the lifting mechanism 24 to grind the upper and lower surfaces of the workpiece W, and then the grinding surface 12 of the lower grindstone 11 is slightly above the upper surface 31 of the surface plate. Lower by the lower lifting mechanism 14 Moves the main shaft 10 and a lower grindstone 11, raising the upper shaft 20 and the upper grinding wheel 21 by the upper lifting mechanism 24, and carries out the workpiece W from the grinding surface 12 of the lower grinding wheel 11 to the platen surface 31.

このようにすれば、ワークWを定盤上面31から下側砥石11の研削面12へと搬送する際にも、搬送方向において突出した出っ張りが生じず、ワークWをよりスムーズに搬送することができる。   In this way, even when the workpiece W is transported from the upper surface 31 of the surface plate to the grinding surface 12 of the lower grindstone 11, no protruding protrusion is generated in the transport direction, and the workpiece W can be transported more smoothly. it can.

また、ワークWを下側砥石11の研削面12に移載した後、上側主軸20を固定した状態で、下側主軸10及び下側砥石11を前記上昇量dだけ上昇させ、更に、前記切込み量dだけ上昇させて、ワークWの上下面を研削するようにしてもよい。 Further, after transferring the workpiece W to the grinding surface 12 of the lower grinding wheel 11, while fixing the upper spindle 20, raise the lower main shaft 10 and the lower grindstone 11 by the increase amount d 1, further wherein is raised by the depth of cut d 2, it may be to grind the upper and lower surfaces of the workpiece W.

1 研削盤
10 下側主軸
11 下側砥石
12 研削面
13 下側駆動モータ
14 下側昇降機構
20 上側主軸
21 上側砥石
22 研削面
23 上側駆動モータ
24 上側昇降機構
30 定盤
31 定盤上面
40 移載アーム
41 回転軸
42 ワーク保持穴
43 アーム回転駆動機構
44 ワーク回転駆動機構
50 制御装置
W ワーク
DESCRIPTION OF SYMBOLS 1 Grinding machine 10 Lower spindle 11 Lower grinding wheel 12 Grinding surface 13 Lower drive motor 14 Lower lifting mechanism 20 Upper spindle 21 Upper grinding wheel 22 Grinding surface 23 Upper drive motor 24 Upper lifting mechanism 30 Surface plate 31 Surface plate upper surface 40 Transfer Mounting arm 41 Rotating shaft 42 Workpiece holding hole 43 Arm rotation drive mechanism 44 Workpiece rotation drive mechanism 50 Controller W Workpiece

Claims (3)

それぞれ平坦な研削面を有する一対の砥石を、その前記研削面同士が対向するように上下に配設するとともに、該一対の砥石をそれぞれその研削面と直交する軸を中心に回転させ、ついで、載置台上に配置した被研削物を水平方向にスライドさせて前記一対の砥石間に搬入し、ついで、前記一対の砥石研削面によって前記被研削物の上下面を研削加工するようにした平面研削方法であって、
前記下側砥石を、前記載置台上の被研削物をその研削面上にスライド搬入可能な位置に位置決めするとともに、前記上側砥石を、非接触で前記被研削物を搬入可能な間隔をもって前記下側砥石の上方に位置決めし、
ついで、前記載置台上の被研削物をスライド搬入せしめて前記下側砥石の研削面上に載置し、
この後、前記下側砥石を上昇させることにより、又は、前記下側砥石を上昇させるとともに前記上側砥石を下降させることにより、前記被研削物の上面を前記上側砥石の研削面に当接せしめて、前記被研削物の上下面を研削加工し、
ついで、前記下側砥石を下降させて、前記被研削物を前記載置台上にスライド搬出可能な位置に位置決めし、
この後、前記下側砥石上の被研削物を前記載置台上に搬出するようにし
前記被研削物を搬入及び搬出する際の前記下側砥石の位置を、その研削面が前記載置台上面よりも上方に位置するように設定したことを特徴とする平面研削方法。
A pair of grindstones each having a flat grinding surface are arranged up and down so that the grinding surfaces face each other, and the pair of grindstones are rotated around an axis orthogonal to the grinding surface, respectively. Surface grinding in which the workpiece placed on the mounting table is slid horizontally and carried between the pair of grinding wheels, and then the upper and lower surfaces of the workpiece are ground by the pair of grinding wheels. A method,
The lower grindstone is positioned at a position where the object to be ground on the mounting table can be slid into the ground surface, and the upper grindstone is positioned at the lower position with a space at which the object to be ground can be carried in a non-contact manner. Position above the side whetstone,
Next, the object to be ground on the mounting table is slid into and placed on the grinding surface of the lower grindstone,
Thereafter, the upper grindstone is brought into contact with the grinding surface of the upper grindstone by raising the lower grindstone or raising the lower grindstone and lowering the upper grindstone. , Grinding the upper and lower surfaces of the workpiece,
Next, the lower grindstone is lowered, and the object to be ground is positioned at a position where it can be slid out on the mounting table,
After this, the workpiece on the lower grinding wheel is carried out on the mounting table ,
A surface grinding method, wherein the position of the lower grindstone when loading and unloading the object to be ground is set so that the ground surface is located above the upper surface of the mounting table .
それぞれ平坦な研削面を有する一対の砥石を、その前記研削面同士が対向するように上下に配設するとともに、該一対の砥石をそれぞれその研削面と直交する軸を中心に回転させ、ついで、載置台上に配置した被研削物を水平方向にスライドさせて前記一対の砥石間に搬入し、ついで、前記一対の砥石研削面によって前記被研削物の上下面を研削加工するようにした平面研削方法であって、
前記下側砥石を、前記載置台上の被研削物をその研削面上にスライド搬入可能な位置に位置決めするとともに、前記上側砥石を、非接触で前記被研削物を搬入可能な間隔をもって前記下側砥石の上方に位置決めし、
ついで、前記載置台上の被研削物をスライド搬入せしめて前記下側砥石の研削面上に載置し、
この後、前記下側砥石を上昇させることにより、又は、前記下側砥石を上昇させるとともに前記上側砥石を下降させることにより、前記被研削物の上面を前記上側砥石の研削面に当接せしめて、前記被研削物の上下面を研削加工し、
ついで、前記下側砥石を下降させて、前記被研削物を前記載置台上にスライド搬出可能な位置に位置決めし、
この後、前記下側砥石上の被研削物を前記載置台上に搬出するようにし、
前記被研削物を搬入する際の前記下側砥石の位置を、その研削面が前記載置台上面よりも下方に位置し、前記被研削物を搬出する際の前記下側砥石の位置を、その研削面が前記載置台上面よりも上方に位置するように設定したことを特徴とする平面研削方法。
A pair of grindstones each having a flat grinding surface are arranged up and down so that the grinding surfaces face each other, and the pair of grindstones are rotated around an axis orthogonal to the grinding surface, respectively. Surface grinding in which the workpiece placed on the mounting table is slid horizontally and carried between the pair of grinding wheels, and then the upper and lower surfaces of the workpiece are ground by the pair of grinding wheels. A method,
The lower grindstone is positioned at a position where the object to be ground on the mounting table can be slid into the ground surface, and the upper grindstone is positioned at the lower position with a space at which the object to be ground can be carried in a non-contact manner. Position above the side whetstone,
Next, the object to be ground on the mounting table is slid into and placed on the grinding surface of the lower grindstone,
Thereafter, the upper grindstone is brought into contact with the grinding surface of the upper grindstone by raising the lower grindstone or raising the lower grindstone and lowering the upper grindstone. , Grinding the upper and lower surfaces of the workpiece,
Next, the lower grindstone is lowered, and the object to be ground is positioned at a position where it can be slid out on the mounting table,
After this, the workpiece on the lower grinding wheel is carried out on the mounting table,
The position of the lower grindstone when the workpiece is carried in is positioned below the upper surface of the mounting table, and the position of the lower grindstone when the workpiece is carried out is flat surface grinding method you characterized in that the grinding surface is set so as to be positioned above the mounting table top.
前記被研削物の上下面を研削加工する際に、前記下側砥石を、その研削面が前記載置台上面から20μm以上300μm以下に位置するように上昇させることを特徴とする請求項1又は2記載の平面研削方法。 Wherein when grinding the top and bottom surfaces of the object to be ground, the lower grinding stone, or claim 1, characterized in that raising to its grinding surface is positioned from the mounting table top to 20μm or 300μm or less 2 flat surface grinding method as claimed.
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