JP5535864B2 - Board fixing mechanism - Google Patents

Description

  The present invention relates to a substrate fixing mechanism for fixing a position of a substrate to a substrate inspection device, a substrate transfer device, or the like.

  In a board inspection apparatus that inspects a printed wiring board or a board on which components are mounted, it is necessary to fix the position of the board in advance. Such a substrate fixing mechanism is described in Patent Document 1, for example. In the substrate fixing mechanism described in Patent Document 1, the distance between the pair of chucks that support the sides of the substrate is adjusted in advance according to the size of the substrate. Then, the substrate is moved so that the substrate suction device that vacuum-sucks the substrate is positioned between both chucks. This substrate is pressed by the clamp side and fixed between the chucks.

  The claw widths of both chucks of the portion on which the substrate is placed and which supports the side of the substrate are narrow so as not to interfere with the component mounting area of the substrate. In order to mount the substrate on the narrow jaws of the chuck, it is necessary to control the position and orientation with high accuracy and move the substrate. In addition, even if the position of the substrate is controlled with high accuracy in this way, if the substrate fixing mechanism itself has dimensional variations, the substrate may not be fixed with both chucks or clamp sides. It is necessary to manufacture with dimensional accuracy.

JP 2010-32405 A

  The present invention has been made to solve the above-described problems, and does not need to be manufactured with high accuracy in dimensional accuracy. Further, when mounting a substrate, it is necessary to control the position and orientation of the substrate with high accuracy. It is an object of the present invention to provide a substrate fixing mechanism capable of accurately fixing the position of a substrate even though it can be easily mounted.

  The substrate fixing mechanism according to claim 1, which has been made to achieve the above object, is a substrate fixing mechanism that clamps and fixes opposite sides of a substrate to be fixed with opposing substrate clamps. A pressure fluid cylinder in which a pair of pistons are disposed in opposite directions with a common cylinder chamber interposed therebetween, and is disposed so as to be movable back and forth in the direction of the substrate, and is pulled by one of the pistons via a driver. A placement claw that is movable in the direction opposite to the substrate, and is placed on the upper side of the placement claw so as to be movable back and forth in the direction of the substrate, and is pushed by the other piston. A substrate pressing claw that is movable in the substrate direction and that presses the side of the substrate; a mounting claw biasing member that constantly biases the mounting claw in the direction of the substrate; and the substrate pressing claw A pressing claw urging body that constantly urges the substrate in the opposite direction, and a latch attached to the mounting claw And a member attached to the substrate pressing nail that comes into contact with the engaging portion when the mounting claw protrudes beyond the substrate pressing claw by a predetermined width in which the substrate is to be mounted in a clamped state. A force for pulling the total mounting claw in the direction opposite to the substrate by the one piston and the mounting claw urging member. At least one pair of the substrate clamps that are set to have a larger force to push the total substrate pressing claw by the urging body in the substrate direction are arranged to face each other.

  The substrate fixing mechanism described in claim 2 is the substrate fixing mechanism described in claim 1, wherein the pair of pistons are formed with the same piston cross-sectional area, respectively, It is characterized by being formed with a larger urging force than the pushing claw urging body.

  According to a third aspect of the present invention, there is provided the board fixing mechanism according to the first aspect, wherein the one piston has a smaller piston cross-sectional area than the other piston. The urging body and the pressing claw urging body are formed with the same urging force.

  The substrate fixing mechanism according to claim 4 is the substrate fixing mechanism according to any one of claims 1 to 3, wherein the substrate to be fixed is a square plate, and the four substrate clamps are on the four sides of the substrate. It is characterized by being arranged in.

  According to the substrate fixing mechanism of the present invention, when the pressure fluid is not supplied to the pressure fluid cylinder of the substrate clamp, the mounting claw urged by the mounting claw urging body moves in the direction of the substrate and presses. The substrate pressing claw urged by the claw urging body moves in the direction opposite to the substrate. Therefore, since the width of the mounting claw on which the substrate is mounted is widened, the substrate can be simply mounted on the wide mounting claw without controlling the position and posture of the substrate with high accuracy. On the other hand, when the mounted substrate is fixed, the pressure fluid is supplied to the cylinder chamber of the pressure fluid cylinder. As a result, the pair of pistons arranged in the opposite directions with the cylinder chamber interposed therebetween moves in directions away from each other. For this reason, the mounting claw is pulled by one piston and moves in the direction opposite to the substrate, and the substrate pressing claw is pushed by the other piston and moves in the direction of the substrate, and both claws move in the opposite directions relatively. To do. With this movement, when the placement claw engaging portion formed on the placement claw and the engagement contact portion formed on the substrate pressing claw contact, the placement claw should place the substrate. It will be in the state which protrudes rather than the substrate pressing nail with a predetermined width. Furthermore, since the force for pushing the substrate pressing claw in the direction of the substrate is larger than the force for pulling the mounting claw in the direction opposite to the substrate, the engagement portion and the engagement contact portion remain in contact, that is, a predetermined amount. Both the claws move in the direction of the substrate while the placement claws are protruding beyond the substrate pressing claws. The force that moves both claws in the direction of the board, that is, the difference between the force that pulls the mounting claw and the force that pushes the board pressing claw, presses the board claw in the direction of the board and firmly holds and fixes the sides of the board. can do. Since the substrate is placed on a placement claw having a predetermined width defined in advance, the position of the substrate can be accurately fixed.

  Further, since the width of the mounting claw is widened when setting the substrate and the degree of freedom is increased in the position where the substrate is mounted, it is manufactured with higher dimensional accuracy than the conventional substrate fixing mechanism of Patent Document 1. There is no need to do this, and an inexpensive device can be obtained.

  When a pair of pistons of the pressure fluid cylinder are formed with the same piston cross-sectional area, and the urging body for the loading claw is formed with a larger urging force than the urging body for the pushing claw, the inside of the pressure fluid cylinder This is preferable because the pressure fluid cylinder can be easily manufactured without complicating the shape.

  When one piston of the pressure fluid cylinder is formed with a smaller piston cross-sectional area than the other piston, and the loading claw urging body and the pushing claw urging body are formed with the same urging force, It is preferable because an equivalent part can be used for the biasing body.

  When this substrate clamp is provided on the four sides of the rectangular substrate, the width of each of the four mounting claws is widened when mounting the substrate, so that the substrate can be mounted more easily. In addition, the position of the substrate can be accurately fixed.

It is a top view which shows the use condition of the board | substrate fixing mechanism to which this invention is applied. It is the top view which showed the usage condition of the board | substrate clamp of the board | substrate fixing mechanism to which this invention is applied, and showed a part in cross section. It is AA sectional drawing of the state shown in FIG. It is the top view which showed the usage condition of the board | substrate clamp of the board | substrate fixing mechanism to which this invention is applied, and showed a part in cross section. It is the top view which showed the usage condition of the board | substrate clamp of the other board | substrate fixing mechanism to which this invention is applied, and showed a part in cross section.

  Hereinafter, although embodiment of this invention is described in detail, the scope of the present invention is not limited to these embodiment.

  As shown in FIG. 1, as an example, the substrate fixing mechanism to which the present invention is applied includes each of the four sides of the substrate 90 so that the substrate clamps 1a, 1b, 1c, and 1d surround the square plate-like substrate 90 to be fixed. It is arrange | positioned in the position used as a center part. The substrate fixing mechanism fixes the position of the substrate 90 by sandwiching and fixing the four sides with the substrate clamps 1a to 1d.

  The substrate clamps 1a to 1d are operated by supplying and exhausting compressed air Air, which is an example of a pressure fluid, and each is connected to a compressed air supply / discharge pipe (not shown). The substrate clamps 1a to 1d have basically the same configuration, but as an example, as shown in the figure, the substrate clamp 1a and the substrate clamp 1c facing each other are formed in a symmetrical shape. Further, the substrate clamp 1b and the substrate clamp 1d facing each other are formed in a symmetrical shape. The substrate clamps 1a and 1b have the same shape, and the substrate clamps 1c and 1d have the same shape. Forming the opposing substrate clamps in a symmetrical shape in this way is preferable because the piping for supplying and discharging compressed air can be drawn out in the same direction, and the piping process becomes easy. The substrate clamps 1a to 1d may all have the same shape. The substrate clamps 1a to 1d are basically the same configuration and operate in the same manner, although there is a difference whether or not they have a symmetrical shape. Therefore, the substrate clamp 1a will be described, and details about the substrate clamps 1b to 1d will be described. The detailed explanation is omitted. Note that the substrate clamps 1a to 1d are also simply referred to as substrate clamps 1 when they are not particularly distinguished.

  FIG. 2 is an enlarged plan view showing a part of the substrate clamp 1a in cross section, and FIG. As shown in FIG. 2, the substrate clamp 1 a includes a pneumatic cylinder 2, a mounting claw 3, a substrate pressing claw 4, a driving body 5, a mounting claw urging body 6, and a pressing claw urging body 7. Yes.

  The pneumatic cylinder 2 is an example of a pressure fluid cylinder according to the present invention. As shown in a cross section in FIG. 2, a pair of pistons 21 and 22 can be moved forward and backward in a cylinder of the pneumatic cylinder 2, and a common cylinder chamber 23. It is inserted and arranged in the opposite direction across the. One piston 21 and the other piston 22 are formed in the same shape as an example. Each flange formed on the cylinder chamber 23 side of the pistons 21 and 22 is a portion that receives the pressure of compressed air. The area where both flange portions of the pistons 21 and 22 receive air pressure, that is, the piston cross-sectional area is formed with the same cross-sectional area. A piston ring is attached to the flange to prevent air leakage. A stopper 25 against which the flange of the pistons 21 and 22 hits is formed at the center of the cylinder of the pneumatic cylinder 2 so as to go around the inner wall of the cylinder. The stopper 25 forms a cylinder chamber 23 in the middle portion of the cylinder of the pneumatic cylinder 2. The cylinder chamber 23 is connected to a supply / discharge nozzle 24 for supplying and exhausting compressed air. The supply / discharge nozzle 24 is connected to a compressed air supply / discharge pipe (not shown). The cylinder of the pneumatic cylinder 2 is placed on a base (not shown) so that the axes of the pistons 21 and 22 are perpendicular to the side of the fixed substrate 90 (see FIG. 4B). It is fixed.

  As shown in FIGS. 2 and 3, the placement claw 3 is for placing the side portion of the substrate 90 on the upper side (the upper side in FIG. 3), and is disposed so as to be movable forward and backward in the direction of the substrate 90. It is pulled by one piston 21 through the body 5 and can move in the direction opposite to the substrate 90. As shown in FIG. 2, the mounting claw 3 is formed in a flat trapezoidal plate shape made of resin as an example.

  Wall-shaped engaging portions 31a and 31b are attached to the upper side of the mounting claw 3 (upper side in FIG. 3) so as to be parallel to the side of the substrate 90 in a fixed state. The engaging portions 31a and 31b, together with an engaging contact portion 41 to be described later, define the claw width of the mounting claw 3 on which the fixed substrate 90 is placed, and details will be described later. The engaging portions 31a and 31b are arranged in a straight line at intervals, and are formed of resin integrally with the mounting claw 3. The interval between the engagement portion 31a and the engagement portion 31b is formed such that the substrate pressing claw 4 fits between them and the substrate 90 can move forward and backward. Further, the thickness of the walls of the engaging portions 31a and 31b is formed so as to be able to guide the advancement and retraction of the substrate pressing claws 4 in the direction of the substrate 90.

  The drive body 5 includes a drive shaft 51, a shaft guide 52, and a piston receiving portion 53. The drive shaft 51 is formed in a rod shape, and one end thereof is connected to the lower side of the placement claw 3 (lower side in FIG. 3). The shaft guide 52 is fixed to a base (not shown), has a groove in which the drive shaft 51 is fitted and slidable, and guides the movement of the drive shaft 51 in the direction of the substrate 90. The other end of the drive shaft 51 is connected to the prism-shaped piston receiving portion 53 at a right angle. The piston receiving portion 53 is in contact with the piston 21. As an example, a mounting claw biasing body 6 that is a tension coil spring is bridged between the piston receiving portion 53 and a base (not shown). The placement claw urging body 6 constantly urges the piston receiving portion 53 in the direction of the substrate 90, so that the placement claw 3 to which the drive shaft 51 is connected is constantly urged in the direction of the substrate 90.

  The substrate pressing claw 4 is for pressing a side portion of the substrate 90, and is disposed on the upper side of the mounting claw 3 so as to be movable back and forth in the direction of the substrate 90, and is pressed by the other piston 22 to be pressed by the substrate 90. It can move in the direction. The substrate pressing claw 4 is formed in a flat square plate shape having a size smaller than that of the substrate mounting claw by resin as an example. The substrate pressing claw 4 is formed with a plate thickness that is at least equal to the thickness of the substrate 90. As described above, the substrate pressing claw 4 is guided between the engaging portions 31a and 31b, and slides on the upper side of the mounting claw 3 to advance and retreat.

  As shown in FIGS. 2 and 3, the substrate pressing claw 4 has a prismatic engagement contact portion 41 on the side opposite to the substrate 90 (left side in the figure), which is wider than the plate width of the substrate pressing claw 4. It is attached so as to have a flange shape. As shown in FIG. 3, the engagement contact portion 41 is formed of resin integrally with the substrate pressing claws 4 so that the bottom surface thereof is flush with the bottom surface of the substrate pressing claws 4.

  The engagement contact portion 41 attached to the substrate pressing claw 4 protrudes from the substrate pressing claw 4 by a predetermined width D (see FIG. 4) on which the substrate 90 in a clamped and fixed state is to be mounted. Sometimes it is attached to a position where it abuts on the engaging portions 31a, 31b attached to the upper portion of the mounting claw 3. That is, when the engaging portions 31a and 31b attached to the upper portion of the placement claw 3 and the engagement contact portion 41 attached to the substrate pressing claw 4 come into contact with each other, the placement claw 3 is in contact with the substrate. The positional relationship protrudes by a predetermined width D from the pressing claw 4. In order to achieve such a positional relationship, the claw length of the mounting claw 3, the claw length of the substrate pressing claw 4, the positions of the engaging portions 31 a and 31 b attached to the mounting claw 3, and the substrate pressing claw 4 The position of the engagement contact portion 41 to be attached is appropriately defined.

  The engagement contact portion 41 is in contact with the piston 22 on the opposite side of the substrate 90. As an example, a pressing claw biasing body 7, which is a tension coil spring, is bridged between the engagement contact portion 41 and a base (not shown). The pressing claw urging body 7 constantly urges the engaging contact portion 41 in the direction opposite to the substrate 90, so that the substrate pressing claw 4 is constantly urged in the direction opposite to the substrate 90.

  The placing nail urging body 6 is formed with a larger urging force than the urging force of the pushing claw urging body 7.

  As shown in FIG. 1 and FIG. 4B to be described later, the substrate clamps 1a to 1d are preliminarily mounted on a base (not shown) at a position where the sides of the substrate 90 can be fixed according to the size of the substrate 90 in a fixed state. ) And is fixed.

  Next, the operation of the substrate fixing device of the present invention will be described.

  When the substrate 90 is mounted on the substrate fixing device, the compressed air is not supplied to the pneumatic cylinder 2 of the substrate clamps 1a to 1d, and the cylinder chamber 23 is opened to atmospheric pressure. The substrate clamp 1a in this state is in the state shown in FIGS. In this state, since the pistons 21 and 22 are not driven by compressed air, the mounting claw 3 is moved in the direction of the substrate 90 to be mounted by the urging force of the mounting claw urging body 6, and the substrate pushing The claw 4 is moved in the direction opposite to the substrate 90 by the urging force of the pressing claw urging body 7. Therefore, the claw width of the mounting claw 3 on which the substrate 90 can be mounted, that is, the width (length) from the right end of the mounting claw 3 to the right end of the substrate pressing claw 4 shown in FIGS. 4). In addition, since the tip (right end in the figure) of the mounting claw 3 moves in the direction of the substrate 90 than when the substrate is fixed, the substrate 90 is prevented from dropping off from the mounting claw 3. Further, the tip (right end in the figure) of the substrate pressing claw 4 is moved in the opposite direction to the substrate 90 than when the substrate is fixed. Therefore, a substrate moving device (not shown) that moves the substrate 90 by vacuum suction can easily place the substrate 90 on the placement claw 3 without controlling the position and orientation of the substrate 90 with high accuracy. Can be installed.

  After mounting the substrate 90 on the substrate fixing device, the substrate moving device releases the vacuum to release the substrate 90 and moves upward.

  Subsequently, compressed air is supplied to each of the substrate clamps 1a to 1d. By supplying this compressed air, the compressed air Air flows from the supply / discharge nozzle 24 into the cylinder chamber 23 as shown in FIG. Accordingly, the pistons 21 and 22 are driven against the urging force of the placing claw urging body 6 and the pushing claw urging body 7, and the pistons 21 and 22 move in directions away from each other. At this time, since the pistons 21 and 22 have the same cross-sectional area, they tend to move in the direction away from each other with the same force by the compressed air, but the urging force of the mounting claw urging body 6 is more suitable for pushing claw. Since it is larger than the urging force of the urging body 7, the piston 22 moves more greatly.

  Due to the movement of the piston 21, the mounting claw 3 is pulled through the driving body 5 and moves in the direction opposite to the substrate 90, and the movement of the piston 22 causes the substrate pressing claw 4 to move through the engagement contact portion 41. It is pushed and moves in the direction of the substrate 90. As the claws 3 and 4 move in the opposite directions, the engagement contact portions 41 attached to the substrate pressing claws 4 are brought into contact with the engagement portions 31a and 31b attached to the placement claws 3. Touch. Thereby, the mounting claw 3 protrudes from the substrate pressing claw 4 by a predetermined width D.

  From this state, as shown in FIG. 4 (b), with the engaging contact portion 41 still in contact with the engaging portions 31a and 31b, the mounting claw urging body 6 and the pushing claw attachment The claws 3 and 4 are generally biased in the direction of the substrate 90 and moved by the difference in biasing force from the biasing body 7. In other words, the total substrate pressing claw 4 by the piston 22 and the pressing claw biasing body 7 is larger than the force pulling the total mounting claw 3 by the piston 21 and the mounting claw biasing body 6 in the direction opposite to the substrate 90. Since the force for pushing in the direction of the substrate is set to be larger, both the claws 3 and 4 move integrally in the direction of the substrate 90.

  Thereby, the substrate pressing claw 4 presses the side of the substrate 90, and the position of the side portion of the substrate 90 is fixed in a state where the substrate 90 is mounted on the mounting claw 3 by a predetermined width D. Therefore, the substrate clamps 1a to 1d can pinch the sides of the substrate 90 and accurately fix the position. Even if the posture of the substrate 90 is bent and placed on the placement claw 3, the sides are pressed by the substrate push claws 4 of the respective clamps 1a to 1d, so that the posture is corrected. The time for shifting from FIG. 4A to FIG. 4B is a short time.

  When releasing the fixation of the substrate 90 from the substrate fixing device, the supply of compressed air to the pneumatic cylinder 2 is stopped and the atmospheric pressure is released. As a result, the cylinder chamber 23 is at atmospheric pressure, so that the loading claw 3 is moved in the opposite direction to the substrate 90 by the urging force of the loading claw urging body 6 and the pushing claw urging body 7. The push claw 4 moves toward the substrate 90 and returns to the state shown in FIG. Thereby, the fixation of the substrate 90 is released. Above, description of operation | movement of a board | substrate fixing mechanism is complete | finished.

  A substrate clamp 70 shown in FIG. 5 may be used for the substrate fixing mechanism of the present invention.

  The substrate clamp 70 shown in the figure includes the pneumatic cylinder 2, the mounting claw urging body 6, and the pushing claw urging body 7 of the substrate clamp 1 a already described, and the pneumatic cylinder 2 a and the mounting claw urging body 7. 6a and a pressing claw urging body 7a. In addition, about the structure similar to the structure already demonstrated in the figure, detailed description is abbreviate | omitted by attaching | subjecting the same code | symbol.

  The pneumatic cylinder 2a of the substrate clamp 70 is formed such that the piston sectional area of one piston 21a is smaller than the piston sectional area of the other piston 22a. The pneumatic cylinder 2a will be described below in detail. A pair of pistons 21a and 22a are respectively fitted in the cylinder of the pneumatic cylinder 2a so that the pistons 21a and 22a can be advanced and retracted in opposite directions with a common cylinder chamber 23 interposed therebetween. It is. The pistons 21a and 22a are formed in different shapes. Specifically, the piston cross-sectional area of the flange formed on the cylinder chamber 23 side of the piston 21a is smaller than the piston cross-sectional area of the flange formed on the cylinder chamber 23 side of the piston 22a. Has been. As shown in the figure, the inner wall of the cylinder of the pneumatic cylinder 2a is formed with different inner diameters on the left and right so that the pistons 21a and 22a can be fitted and moved forward and backward. A stopper 25 against which the flanges of the pistons 21a and 22a hit is formed at the center of the pneumatic cylinder 2a, and a cylinder chamber 23 is formed in the middle portion of the pneumatic cylinder 2a by the stopper 25. The cylinder chamber 23 is connected to a supply / discharge nozzle 24 for supplying and exhausting compressed air.

  The mounting claw urging body 6a and the pushing claw urging body 7a of the substrate clamp 70 have the same urging force, and are, for example, tension coil springs formed in the same shape. The mounting claw urging body 6a of the substrate clamp 70 urges the piston receiving portion 53 with which the piston 21a abuts in the substrate direction, similarly to the mounting claw urging body 6 of the substrate clamp 1a. Further, the pressing claw urging body 7a of the substrate clamp 70 urges the engagement contact portion 41 with which the piston 22a abuts in the opposite direction to the substrate, similarly to the pressing claw urging body 7 of the substrate clamp 1a. ing.

  When compressed air is supplied to the substrate clamp 70 from the supply / discharge nozzle 24, the pistons 21a and 22a are separated from each other against the urging force of the loading claw urging body 6a and the pushing claw urging body 7a. Move in the direction. At this time, since the piston cross-sectional areas of the piston 21a and the piston 22a are different, the force that the piston 21a tries to move in the direction opposite to the substrate 90 due to Pascal's principle causes the piston 22a to move in the direction of the substrate 90. Smaller than force. Since the urging force of the placing claw urging body 6a and the pushing claw urging body 7a is the same, the piston 22a moves more greatly than the piston 21a.

  The movement of the pistons 21a and 22a causes the claws 3 and 4 to move in directions opposite to each other as in the state shown in FIG. Stick out more than four. From such a state, as in the state shown in FIG. 4B, the two claws 3 and 4 are moved by the difference in force between the piston 21a and the piston 22a to move with compressed air. The entire substrate 90 moves toward the substrate 90 while maintaining the predetermined width D. Therefore, the substrate fixing mechanism using the substrate clamp 70 can sandwich and fix the substrate 90 similarly to the substrate fixing mechanism using the substrate clamp 1a.

  In this substrate clamp 70, the urging forces of the urging bodies 6a and 7a are the same, but the pistons 21a and 22a have different cross-sectional areas so that the piston 21a and the loading claw urging body 6a can be integrated. This is an example in which the force of pushing the total substrate pressing claw 4 by the piston 22a and the pressing claw biasing body 7a in the direction of the substrate 90 is set larger than the force of pulling the mounting claw 3 in the direction opposite to the substrate 90. If the relationship between the forces of the mounting claw 3 and the substrate pressing claw 4 is established, the piston cross-sectional areas of the pistons 21a and 22a may be different from each other and the urging forces of the urging bodies 6a and 7a may be different from each other.

  In the above description, the example of fixing the square substrate 90 has been described. However, if the opposing sides can be fixed by the substrate clamp 1 or the substrate clamp 70, the shape of the substrate to be fixed is a pentagonal plate, It may be a polygonal plate such as a hexagonal plate. Further, it is preferable to arrange the substrate clamp 1 (70) on all four sides of the square substrate 90. For example, the substrate clamp 1 (70) is arranged on one of the two opposing sides of the substrate 90. A known substrate clamp different from the substrate clamp 1 may be arranged on the other two sides facing each other. Thus, any substrate fixing mechanism having at least a pair of substrate clamps 1 (70) is within the scope of the present invention.

  Further, although the pneumatic cylinder 2 (2a) is used as an example of the pressure fluid cylinder, a hydraulic cylinder or a hydraulic cylinder may be used. Moreover, although the tension coil spring was used as an example of the placing nail biasing body 6 and the pushing nail biasing body 7, a compression coil spring, a leaf spring, or the like may be used in accordance with the biasing direction.

  In addition, the shapes of the engaging portions 31a and 31b and the engaging contact portion 41 can be appropriately changed as long as they can contact each other. For example, as the engagement contact portion, protrusions that contact the engagement portions 31a and 31b may be attached to both side surfaces (surfaces in the vertical direction in FIG. 2) of the substrate pressing claw 4. Further, the rear end portion (the left end portion in FIG. 3) of the mounting claw 3 is used as the engaging portion, and the rear end portion (in FIG. 3) of the substrate pressing claw 4 is brought into contact with the rear end portion of the mounting claw 3. You may attach | subject a downward protrusion as an engagement contact part on the (left end part) side.

  1a, 1b, 1c and 1d are substrate clamps, 2 and 2a are pneumatic cylinders, 3 is a loading claw, 4 is a substrate claw, 5 is a driving body, 6 is a loading claw urging body, and 7 is a claw Energizing body, 21 and 21a are one piston, 22 and 22a are other pistons, 23 is a cylinder chamber, 24 is a supply / discharge nozzle, 25 is a stopper, 31a and 31b are engaging portions, and 41 is an engaging contact portion , 51 is a drive shaft, 52 is a shaft guide, 53 is a piston receiving portion, 70 is a substrate clamp, 90 is a substrate, Air is compressed air, and D is a predetermined width.

Claims (4)

A substrate fixing mechanism for holding and fixing opposite sides of a substrate to be fixed by an opposing substrate clamp,
A pressure fluid cylinder in which a pair of pistons are arranged opposite to each other across a common cylinder chamber;
A placement claw for placing the side portion of the substrate, which is disposed so as to be movable back and forth in the direction of the substrate and is movable in the direction opposite to the substrate by being pulled by one of the pistons via a driver;
A substrate pressing claw for pressing a side portion of the substrate, which is disposed on the upper side of the mounting claw so as to be movable back and forth in the direction of the substrate and which is pushed by the other piston and movable in the direction of the substrate;
A mounting claw biasing body that constantly biases the mounting claw toward the substrate;
A pressing claw biasing body that constantly biases the substrate pressing claw in the opposite direction of the substrate;
An engaging portion attached to the mounting claw;
Engagement contact applied to the substrate pressing claw that contacts the engaging portion when the mounting claw protrudes from the substrate pressing claw by a predetermined width in which the substrate is to be mounted in the clamped state. And having a part
Compared to the force pulling the overall mounting claw by the one piston and the mounting claw biasing member in the direction opposite to the substrate, the total substrate pressing claw by the other piston and the pressing claw biasing body. The substrate clamp in which the force to push the substrate toward the substrate is set larger,
A substrate fixing mechanism, wherein at least one pair is disposed to face each other.   The pair of pistons are each formed with the same piston cross-sectional area, and the urging body for placement claw described above is formed with a larger urging force than the urging body for pushing claws. The substrate fixing mechanism according to claim 1.   The one piston has a smaller piston cross-sectional area than the other piston, and the placing claw urging body and the pushing claw urging body are formed with the same urging force. The substrate fixing mechanism according to claim 1.   The substrate fixing mechanism according to claim 1, wherein the substrate to be fixed is a square plate, and the four substrate clamps are arranged on the four sides of the substrate.

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