JP5521775B2 - 単結晶シリコンウェーハの評価方法 - Google Patents
単結晶シリコンウェーハの評価方法 Download PDFInfo
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- JP5521775B2 JP5521775B2 JP2010119737A JP2010119737A JP5521775B2 JP 5521775 B2 JP5521775 B2 JP 5521775B2 JP 2010119737 A JP2010119737 A JP 2010119737A JP 2010119737 A JP2010119737 A JP 2010119737A JP 5521775 B2 JP5521775 B2 JP 5521775B2
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- Prior art keywords
- single crystal
- processing
- crystal silicon
- silicon wafer
- defects
- Prior art date
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- 229910021421 monocrystalline silicon Inorganic materials 0.000 title claims description 46
- 238000011156 evaluation Methods 0.000 title claims description 9
- 230000007547 defect Effects 0.000 claims description 126
- 238000012545 processing Methods 0.000 claims description 77
- 238000000034 method Methods 0.000 claims description 65
- 238000001312 dry etching Methods 0.000 claims description 48
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 16
- 238000005530 etching Methods 0.000 claims description 16
- 238000000149 argon plasma sintering Methods 0.000 claims description 6
- 235000012431 wafers Nutrition 0.000 description 54
- 239000013078 crystal Substances 0.000 description 37
- 239000002245 particle Substances 0.000 description 14
- 238000004140 cleaning Methods 0.000 description 12
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 11
- 239000001301 oxygen Substances 0.000 description 11
- 229910052760 oxygen Inorganic materials 0.000 description 11
- 238000005498 polishing Methods 0.000 description 11
- 239000007795 chemical reaction product Substances 0.000 description 8
- 230000003287 optical effect Effects 0.000 description 8
- 238000007517 polishing process Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 5
- 239000002244 precipitate Substances 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 238000001816 cooling Methods 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 238000001556 precipitation Methods 0.000 description 3
- 239000010453 quartz Substances 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 2
- 239000003990 capacitor Substances 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000001020 plasma etching Methods 0.000 description 2
- 239000004793 Polystyrene Substances 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000004816 latex Substances 0.000 description 1
- 229920000126 latex Polymers 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 150000003376 silicon Chemical class 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Drying Of Semiconductors (AREA)
Description
10a 単結晶シリコンウェーハの表面
11 SiO2を含む結晶欠陥
12 加工起因欠陥
20 光源
21,22 検出器
Claims (4)
- 鏡面加工された単結晶シリコンウェーハの表面に、SiO2よりもSiのエッチング速度が大きい条件でドライエッチングを施すことにより加工起因欠陥をピットとして顕在化させる第1の工程と、
ドライエッチングされた前記表面に存在する前記ピットの個数を計測する第2の工程と、を備えることを特徴とする単結晶シリコンウェーハの評価方法。 - 前記第2の工程においては、前記表面に存在する突起の個数をさらに計測することを特徴とする請求項1に記載の単結晶シリコンウェーハの評価方法。
- 前記第2の工程は、前記表面に光を照射した場合の光散乱特性の違いに基づいて前記ピットと前記突起とを識別することを特徴とする請求項1又は2に記載の単結晶シリコンウェーハの評価方法。
- 前記第2の工程は、前記表面に対して所定の入射角で光を照射した場合に、第1の反射角から検出される各欠陥のサイズと、前記第1の反射角とは異なる第2の反射角から検出される各欠陥のサイズとの比に基づいて、前記ピットと前記突起とを識別することを特徴とする請求項3に記載の単結晶シリコンウェーハの評価方法。
Priority Applications (1)
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JP2010119737A JP5521775B2 (ja) | 2010-05-25 | 2010-05-25 | 単結晶シリコンウェーハの評価方法 |
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JP2010119737A JP5521775B2 (ja) | 2010-05-25 | 2010-05-25 | 単結晶シリコンウェーハの評価方法 |
Publications (2)
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JP2011249479A JP2011249479A (ja) | 2011-12-08 |
JP5521775B2 true JP5521775B2 (ja) | 2014-06-18 |
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JP2010119737A Active JP5521775B2 (ja) | 2010-05-25 | 2010-05-25 | 単結晶シリコンウェーハの評価方法 |
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JP (1) | JP5521775B2 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6256413B2 (ja) | 2015-05-27 | 2018-01-10 | 信越半導体株式会社 | 半導体ウェーハの評価方法 |
CN107301959B (zh) * | 2016-04-15 | 2019-09-17 | 中芯国际集成电路制造(上海)有限公司 | 光刻设备的微粒检测方法 |
CN110223929B (zh) * | 2019-05-07 | 2022-01-04 | 徐州鑫晶半导体科技有限公司 | 确定晶圆缺陷来源的方法 |
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- 2010-05-25 JP JP2010119737A patent/JP5521775B2/ja active Active
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