JP5517128B2 - SF6 gas recovery apparatus and SF6 gas recovery method - Google Patents
SF6 gas recovery apparatus and SF6 gas recovery method Download PDFInfo
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- 238000011084 recovery Methods 0.000 title claims description 31
- 238000000034 method Methods 0.000 title claims description 16
- 239000007789 gas Substances 0.000 claims description 109
- 238000001179 sorption measurement Methods 0.000 claims description 64
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 18
- 238000001816 cooling Methods 0.000 claims description 16
- 239000003463 adsorbent Substances 0.000 claims description 11
- 239000007788 liquid Substances 0.000 claims description 9
- 229910052757 nitrogen Inorganic materials 0.000 claims description 9
- 239000012535 impurity Substances 0.000 claims description 5
- 238000004508 fractional distillation Methods 0.000 claims description 4
- 230000007704 transition Effects 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 3
- 238000005194 fractionation Methods 0.000 claims 1
- 238000010792 warming Methods 0.000 description 9
- 230000000694 effects Effects 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 238000009413 insulation Methods 0.000 description 3
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- KYKAJFCTULSVSH-UHFFFAOYSA-N chloro(fluoro)methane Chemical compound F[C]Cl KYKAJFCTULSVSH-UHFFFAOYSA-N 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 231100000419 toxicity Toxicity 0.000 description 2
- 230000001988 toxicity Effects 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000005431 greenhouse gas Substances 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 201000003144 pneumothorax Diseases 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
- 201000008827 tuberculosis Diseases 0.000 description 1
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P20/00—Technologies relating to chemical industry
- Y02P20/151—Reduction of greenhouse gas [GHG] emissions, e.g. CO2
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- Separation Of Gases By Adsorption (AREA)
Description
本発明は、ＳＦ６ガス回収装置、及びＳＦ６ガス回収方法の改良、詳しくは、発電所、変電所、加速器施設等において使用される高電圧機器の圧力容器または密封容器中に、放電を消弧する或いは放電を防止するために封入されるＳＦ６ガス(絶縁ガス)を、外界に放出することなく完全に回収して別容器に移送を行えるＳＦ６ガス回収装置、及びその方法に関するものである。 The present invention is an improvement of the SF6 gas recovery apparatus and SF6 gas recovery method, and more particularly, extinguishes a discharge in a pressure vessel or a sealed vessel of a high voltage device used in a power plant, a substation, an accelerator facility or the like. Alternatively, the present invention relates to an SF6 gas recovery apparatus that can completely recover SF6 gas (insulating gas) sealed to prevent discharge and transfer it to another container without releasing it to the outside, and a method thereof.
従来技術は、圧力差と油回転ポンプと圧縮機を用いて、装置容器と貯蔵容器の間を繰り返し、移送する方法が採られている。耐圧の高い油回転ポンプを用いて各容器の中にあるＳＦ６ガスを残留量ができるだけ少なくなるように、低い圧力まで排気する。この油回転ポンプの背圧を圧縮機を用いて移送終点へ高い圧力にして移送する。このようにして高価なＳＦ６ガスの消費量と排出量を低減する努力が行われている。 The prior art employs a method of repeatedly transferring between an apparatus container and a storage container by using a pressure difference, an oil rotary pump, and a compressor. Using an oil rotary pump with high pressure resistance, the SF6 gas in each container is exhausted to a low pressure so that the residual amount is as small as possible. The back pressure of the oil rotary pump is transferred to a high pressure to the transfer end point using a compressor. Thus, efforts are being made to reduce the consumption and emission of expensive SF6 gas.
しかしながら、大型の油回転ポンプでも排気速度が不十分で、遷移圧力領域以下では時間がかかるために実際的ではなく、通常は適当な圧力で排気を打ち切る。この最終圧力は１mBar程度がやっとで最初の加圧充填量の0.02％程度は少なくとも外部放出される。この量は大型容器を用いる発電所、変電所、加速器施設などにおいて無視できる量ではない。温暖化係数が24000倍のＳＦ６ガスは1台当たり年間数回の排気で無視できない影響が地球温暖化現象に出ていると考えられる。 However, even with a large oil rotary pump, the exhaust speed is insufficient, and it takes time below the transition pressure region, so it is not practical. Normally, exhaust is stopped at an appropriate pressure. This final pressure is finally about 1 mBar, and at least about 0.02% of the initial pressure filling amount is discharged to the outside. This amount is not negligible in power plants, substations, accelerator facilities, etc. that use large vessels. It is thought that SF6 gas with a global warming coefficient of 24,000 times has a non-negligible effect on the global warming phenomenon with several exhausts per year per unit.
また、従来においては、温暖化ガスの外部放出を止めるために温暖化係数が１ケタから２ケタ小さい代替フロンガスを使用する方法も提案されている。絶縁性能はおおよそ下記表１に示す温暖化係数の逆の順番でＳＦ６ガスが一番高い。このため、代替フロンでは、高い絶縁性能が確保されない。またＳＦ６ガス以外では可燃性や毒性など安全性確保が危惧される。その点はＳＦ６ガスは結核等の気胸治療目的で使用された実績があり、毒性も可燃性も腐食性などの問題はない。
また他にも、大排気量超高真空ポンプであるターボ分子ポンプやメカニカルブースターや拡散ポンプやエジェクターポンプの使用も提案されているが、これらは大型では桁違いに高価となり、排気ポンプの付帯設備などで設置場所にも困難が伴う。またＳＦ６など凝縮性気体などに対する選択性がないために残留ガスの分圧が高くなり、ＳＦ６ガスの最終到達真空度は従来技術より１ケタ程度下回るだけとなる。また選択性もないことからガスの純化もできない。 In addition, the use of turbo-molecular pumps, mechanical boosters, diffusion pumps, and ejector pumps, which are ultra-high vacuum pumps with large displacements, has also been proposed, but these are extremely expensive for large-sized pumps, and there are incidental facilities for exhaust pumps. The installation location is also difficult. Further, since there is no selectivity for condensable gas such as SF6, the partial pressure of the residual gas becomes high, and the final ultimate vacuum of SF6 gas is only about one digit lower than that of the prior art. Also, since there is no selectivity, gas purification cannot be performed.
一方、従来においては、吸着材を利用してＳＦ６ガスを選択分離して回収する技術も提案されているが(特許文献１〜３参照)、これらは、正圧下においてＳＦ６ガスの吸着回収を行う技術であるため、装置容器中に残るＳＦ６ガスの残留量を著しく低減できるものではない。 On the other hand, conventionally, techniques for selectively separating and recovering SF6 gas using an adsorbent have been proposed (see Patent Documents 1 to 3), but these perform adsorption recovery of SF6 gas under a positive pressure. Due to the technology, the residual amount of SF6 gas remaining in the apparatus container cannot be significantly reduced.
本発明は、上記の如き問題に鑑みて為されたものであり、その目的とするところは、既に安全性や絶縁性能が確定しており、また生産技術が確定して安価に大量に入手できるＳＦ６ガスを別容器に移送する際に、装置容器からＳＦ６ガスを残さず回収して地球環境への放出を防止できるＳＦ６ガス回収装置及びその方法を提供することにある。 The present invention has been made in view of the above-mentioned problems, and the object of the present invention is that safety and insulation performance have already been determined, and production technology has been determined and can be obtained in large quantities at low cost. An object of the present invention is to provide an SF6 gas recovery apparatus and method for recovering all SF6 gas from the apparatus container to prevent release to the global environment when transferring SF6 gas to another container.
本発明者が上記課題を解決するために採用した手段を添付図面を参照して説明すれば次のとおりである。 Means employed by the present inventor for solving the above-described problems will be described with reference to the accompanying drawings.
即ち、本発明は、ＳＦ６ガス回収装置を、ＳＦ６ガスが封入された被回収容器１と；この被回収容器１に接続され、槽内に吸着材が収容されて成る低温吸着ポンプ５と；この低温吸着ポンプ５の槽内を液体窒素温度まで冷却可能な冷却手段６と；前記低温吸着ポンプ５の槽内を所定温度まで昇温可能なヒーター装置７と；前記被回収容器１と低温吸着ポンプ５にそれぞれに接続された油回転ポンプ４と；この油回転ポンプ４に直列的に接続された移送用圧縮機３と；この移送用圧縮機３に接続され、前記被回収容器１から低温吸着ポンプ５を経由して移送されたＳＦ６ガスを収容可能な貯蔵容器２とを含んで構成し、
前記被回収容器１と油回転ポンプ４間のバルブＢ3を閉じた状態で、被回収容器１と低温吸着ポンプ５間のバルブＢ4を開いて冷却下の吸着槽内でＳＦ６ガスを凝縮可能とする一方、今度は低温吸着ポンプ５と被回収容器１間のバルブＢ4を閉じて、低温吸着ポンプ５と油回転ポンプ４間のバルブＢ6を開くことにより昇温下の吸着槽内で気化したＳＦ６ガスを貯蔵容器２に回収可能とした点に特徴がある。
That is, according to the present invention, an SF6 gas recovery device includes a recovery container 1 in which SF6 gas is sealed; a low temperature adsorption pump 5 connected to the recovery container 1 and containing an adsorbent in a tank; A cooling means 6 capable of cooling the inside of the tank of the low-temperature adsorption pump 5 to a liquid nitrogen temperature; a heater device 7 capable of raising the temperature of the inside of the tank of the low-temperature adsorption pump 5 to a predetermined temperature; the container 1 to be collected and the low-temperature adsorption pump each connected an oil rotary pump 4 to 5; the oil rotary pump 4 and the transport compressor 3 which are serially connected; connected to this transfer compressor 3, the low-temperature adsorption from the target collection vessel 1 Comprising a storage container 2 capable of containing SF6 gas transferred via the pump 5;
Wherein in the closed state of the valve B 3 between the collection container 1 and an oil rotary pump 4, possible condensation of the SF6 gas in the adsorption vessel below the cooling by opening the valve B 4 between the collection container 1 and the low temperature adsorption pump 5 On the other hand, this time, the valve B 4 between the low temperature adsorption pump 5 and the container 1 to be collected is closed and the valve B 6 between the low temperature adsorption pump 5 and the oil rotary pump 4 is opened to raise the temperature in the adsorption tank. It is characterized in that the vaporized SF6 gas can be recovered in the storage container 2.
なお、本願明細書中で使用する「ＳＦ６ガス」には、ＳＦ６ガスと物性が近い類似の絶縁ガスも含まれるものとする。また上記「被回収容器１」は、ＳＦ６ガスの移送出発点となる容器を指し、「貯蔵容器２」は、ＳＦ６ガスの移送終点となる容器を指す。したがって、使用状態により被回収容器(または貯蔵容器)が、装置容器となることもあればバッファタンクとなることもある。 Note that the “SF6 gas” used in the present specification includes a similar insulating gas having physical properties similar to those of the SF6 gas. Further, the “collected container 1” refers to a container serving as a starting point for transferring SF6 gas, and the “storage container 2” refers to a container serving as an end point for transferring SF6 gas. Therefore, the container to be collected (or the storage container) may be an apparatus container or a buffer tank depending on the state of use.
また、本発明では、被回収容器１と油回転ポンプ４の間に複数の低温吸着ポンプ５・５…を並列に接続し、これらの低温吸着ポンプ５・５…を各バルブＢ5・Ｂ5…の開閉によって選択的に使用して被回収容器１内の真空度を高めることもできる。 Further, in the present invention, by connecting a plurality of cryogenic adsorption pump 5.5 ... in parallel between the collection container 1 and an oil rotary pump 4, these cold adsorption pump 5.5 ... each valve B 5-B 5 The degree of vacuum in the container 1 can be increased by selectively using the opening and closing of.
また、本発明では、低温吸着ポンプ５の槽内に吸着分子が異なる複数種の吸着材を収容すると共に、ヒーター装置７に温度調節機能を設けてＳＦ６ガス以外の不純物ガスを分留除去可能とすることもできる。 Further, in the present invention, a plurality of types of adsorbents having different adsorbed molecules are accommodated in the tank of the low temperature adsorption pump 5, and the heater device 7 is provided with a temperature adjustment function so that impurity gases other than SF6 gas can be removed by fractional distillation. You can also
また、本発明では、低温吸着ポンプ５に接続された油回転ポンプ４を、別系統で被回収容器１に直接接続して、被回収容器１と低温吸着ポンプ５間のバルブＢ4を閉じた状態で被回収容器１内のＳＦ６ガスを低温吸着ポンプ５を経由せずに回収することもできる。 Further, in the present invention, the oil rotary pump 4 connected to the low temperature adsorption pump 5 is directly connected to the collection container 1 by another system, and the valve B 4 between the collection container 1 and the low temperature adsorption pump 5 is closed. In this state, the SF6 gas in the container 1 can be recovered without going through the low temperature adsorption pump 5.
また、本発明では、被回収容器１と貯蔵容器２とを移送用圧縮機３を介して別系統で接続し、被回収容器１内のＳＦ６ガスを移送用圧縮機３のみで回収することもできる。そしてまた、本発明においては、被回収容器１と貯蔵容器２とを別系統で直接接続し、被回収容器１内のＳＦ６ガスを被回収容器１と貯蔵容器２の差圧により回収することもできる。 In the present invention, the container 1 to be recovered and the storage container 2 may be connected by a separate system via the transfer compressor 3 and the SF6 gas in the container 1 to be recovered may be recovered only by the compressor 3 for transfer. it can. In the present invention, the container 1 to be collected and the storage container 2 are directly connected by another system, and the SF6 gas in the container 1 to be collected is recovered by the differential pressure between the container 1 to be collected and the storage container 2. it can.
他方また、本発明では、上記回収装置の被回収容器１に封入したＳＦ６ガスの貯蔵容器２への移送を、被回収容器１内のＳＦ６ガスを、油回転ポンプ４と移送用圧縮機３により貯蔵容器２に移送する第一の段階と；ＳＦ６ガスの移送速度が低下する粘性流と分子流の境界領域に近づいた、配管直径と圧力で決まる遷移圧力領域に入るところでは、一旦、油回転ポンプ４の排気を止めてバルブＢ3を閉じ、吸着材が収容された低温吸着ポンプ５へのバルブＢ4を開いて、冷却手段６により液体窒素温度に冷却した吸着槽内でＳＦ６ガスを凝縮させる第二の段階と；その後、被回収容器１と低温吸着ポンプ５間のバルブＢ4を閉じて、ヒーター装置７で低温吸着ポンプ５の槽内をＳＦ６ガスが蒸発する所定温度まで昇温する第三の段階と；低温吸着ポンプ５と油回転ポンプ４間のバルブＢ6を開いて貯蔵容器２へ再度、油回転ポンプ４と移送用圧縮機３を用いて吸着槽内で気化したＳＦ６ガスを移送する第四の段階とを踏んで行うことができる。 On the other hand, in the present invention, the SF6 gas sealed in the recovery container 1 of the recovery device is transferred to the storage container 2, and the SF6 gas in the recovery container 1 is transferred by the oil rotary pump 4 and the transfer compressor 3. The first stage of transfer to the storage container 2; and once entering the transition pressure region determined by the pipe diameter and pressure approaching the boundary region between the viscous flow and the molecular flow where the transfer speed of SF6 gas decreases, the oil rotation The exhaust of the pump 4 is stopped, the valve B 3 is closed, the valve B 4 to the low temperature adsorption pump 5 containing the adsorbent is opened, and the SF 6 gas is condensed in the adsorption tank cooled to the liquid nitrogen temperature by the cooling means 6. Then, the valve B 4 between the container 1 to be collected and the low temperature adsorption pump 5 is closed, and the heater device 7 raises the temperature of the low temperature adsorption pump 5 to a predetermined temperature at which the SF 6 gas evaporates. The third stage; low temperature adsorption Amplifier 5 and an oil rotary pump 4 between the valve B 6 to open again into the storage vessel 2, and a fourth step of transferring the SF6 gas is vaporized in the adsorption vessel using a transfer compressor 3 and an oil rotary pump 4 Can be done by stepping on.
また、本発明では、上記第一の段階の前に被回収容器１内のＳＦ６ガスを、被回収容器１と貯蔵容器２の差圧及び移送用圧縮機３によって貯蔵容器２に移送することもできる。そしてまた、本発明では、上記第三の段階および第四の段階において、吸着分子が異なる複数種の吸着材を収容した低温吸着ポンプ５を、温度調節機能を備えたヒーター装置７で昇温してＳＦ６ガスに含まれている不純物ガスを分留除去することもできる。 In the present invention, the SF6 gas in the container 1 to be recovered may be transferred to the storage container 2 by the differential pressure between the container 1 and the storage container 2 and the transfer compressor 3 before the first stage. it can. Further, in the present invention, in the third stage and the fourth stage, the temperature of the low-temperature adsorption pump 5 containing a plurality of types of adsorbents having different adsorbed molecules is raised by the heater device 7 having a temperature control function. Thus, the impurity gas contained in the SF6 gas can be removed by fractional distillation.
本発明では、装置容器から貯蔵容器にＳＦ６を移送するための排気ポンプに、液体窒素温度まで冷却可能な高性能の低温吸着ポンプを使用したことにより、装置容器内のＳＦ６圧力が１mbarからさらに７−８桁以上低い超高真空状態としてＳＦ６ガスの残留量を極めて僅かな量に抑えることができるため、従来の技術では不可能であったＳＦ６ガスの実質的な完全回収が可能となる。 In the present invention, a high-performance low-temperature adsorption pump capable of cooling to liquid nitrogen temperature is used as an exhaust pump for transferring SF6 from the apparatus container to the storage container, so that the SF6 pressure in the apparatus container is further increased from 1 mbar to 7 mbar. Since the residual amount of SF6 gas can be suppressed to an extremely small amount in an ultrahigh vacuum state of 8 digits or more, substantially complete recovery of SF6 gas, which was impossible with the conventional technology, becomes possible.
そしてこれにより、地球温暖化ガスであるＳＦ６ガスが外部に放出することなく装置容器の保守点検・修理改造等を行うことができるため、高性能で利便性に優れたＳＦ６ガスを地球環境に悪影響を及ぼすことなく利用できる。 As a result, the SF6 gas, which is a global warming gas, can be maintained, inspected, repaired, and remodeled without releasing it to the outside, so the high-performance and convenient SF6 gas has a negative effect on the global environment. Can be used without affecting.
したがって、本発明により、発見できるかどうかも分からない安全かつ高性能で、しかも、温暖化係数も小さい新たな絶縁ガスを待つことなく、絶縁ガスの環境面での問題を解消できるＳＦ６回収装置を提供できることから、本発明の実用的利用価値は頗る高い。 Therefore, according to the present invention, there is provided an SF6 recovery device that can solve the environmental problem of insulating gas without waiting for a new insulating gas that is safe and high-performance that does not know whether it can be discovered or that has a small global warming potential. Since it can be provided, the practical utility value of the present invention is very high.
『実施例１』
本発明の実施例１について、図１及び図２に基いて説明する。同図において、符号１で指示するものは被回収容器であり、符号２で指示するものは貯蔵容器である。また、符号３で指示するものは移送用圧縮機であり、符号４で指示するものは油回転ポンプである。また、符号５で指示するものは低温吸着ポンプであり、符号６で指示するものは冷却手段である。符号７で指示するものはヒーター装置である。
“Example 1”
A first embodiment of the present invention will be described with reference to FIGS. In the figure, what is indicated by reference numeral 1 is a container to be collected, and what is indicated by reference numeral 2 is a storage container. Also, what is indicated by reference numeral 3 is a transfer compressor, and what is indicated by reference numeral 4 is an oil rotary pump. Also, what is indicated by reference numeral 5 is a low temperature adsorption pump, and what is indicated by reference numeral 6 is a cooling means. What is indicated by reference numeral 7 is a heater device.
[回収装置の説明]
まずＳＦ６ガスの回収装置について説明する。この実施例１では、高電圧が印加される装置において、放電損傷を防止するために絶縁ガスであるＳＦ６ガスが封入された装置容器(密封容器)を被回収容器１として使用する(図１参照)。そして、この被回収容器１からＳＦ６ガスを移送して収容する貯蔵容器２にはバッファタンクを使用する。
[Description of collection device]
First, the SF6 gas recovery device will be described. In the first embodiment, in an apparatus to which a high voltage is applied, an apparatus container (sealed container) in which SF6 gas, which is an insulating gas, is sealed is used as the container 1 to be recovered (see FIG. 1). ). A buffer tank is used as the storage container 2 for transferring the SF6 gas from the container 1 to be collected.
また実施例１では、上記被回収容器１と貯蔵容器２を直接接続すると共に、この配管とは別系統で被回収容器１と貯蔵容器２を移送用圧縮機３を介して接続している。また更に前記配管とは別系統で、直列に繋いだ油回転ポンプ４と移送用圧縮機３を介して被回収容器１と貯蔵容器２を接続している。 In the first embodiment, the collection container 1 and the storage container 2 are directly connected, and the collection container 1 and the storage container 2 are connected via a transfer compressor 3 in a separate system from this pipe. Further, the recovered container 1 and the storage container 2 are connected via an oil rotary pump 4 and a transfer compressor 3 connected in series, which are separate from the pipe.
一方、上記被回収容器１には、槽内に吸着材を収容した低温吸着ポンプ５を接続し、この低温吸着ポンプ５・５…は、上記油回転ポンプ４に接続する。なお実施例１では、被回収容器１と油回転ポンプ４の間に複数の低温吸着ポンプ５・５…を並列に接続している。また、低温吸着ポンプ５の槽内には、吸着分子が異なる複数種の吸着材を収容している。 On the other hand, a low temperature adsorption pump 5 containing an adsorbent in a tank is connected to the container 1 to be collected, and the low temperature adsorption pumps 5, 5... Are connected to the oil rotary pump 4. In the first embodiment, a plurality of low temperature adsorption pumps 5, 5... Are connected in parallel between the collection container 1 and the oil rotary pump 4. In addition, a plurality of types of adsorbents having different adsorbed molecules are accommodated in the tank of the low temperature adsorption pump 5.
そして更に、上記低温吸着ポンプ５には、槽内を液体窒素温度まで冷却可能な冷却手段６を備える。ちなみに本実施例では、冷却手段６に液体窒素を投入する装置を使用しているが、冷却手段６に冷凍機を使用したり、液体窒素と冷凍機を併用することもできる。 Further, the low temperature adsorption pump 5 is provided with a cooling means 6 capable of cooling the inside of the tank to the liquid nitrogen temperature. Incidentally, in the present embodiment, an apparatus for introducing liquid nitrogen into the cooling means 6 is used. However, a refrigerator can be used for the cooling means 6 or liquid nitrogen and a refrigerator can be used in combination.
また、上記低温吸着ポンプ５には、槽内を所定温度まで昇温可能なヒーター装置７も設ける。なお本実施例では、段階的に昇温できる温度調節機能を備えたヒーター装置７を使用する。 The low temperature adsorption pump 5 is also provided with a heater device 7 capable of raising the temperature in the tank to a predetermined temperature. In the present embodiment, a heater device 7 having a temperature adjustment function capable of raising the temperature stepwise is used.
[回収方法の説明]
次に、上記構成からなる回収装置を用いたＳＦ６ガスの回収方法について説明する。まず最初に、被回収容器１と貯蔵容器２が直接接続された配管のバルブＢ1を開き、双方の容器の差圧によってＳＦ６ガスを貯蔵容器２に移送する。そして、差圧がなくなり始めたら前記バルブＢ1を閉じて、被回収容器１と移送用圧縮機３間のバルブＢ2を開き、移送用圧縮機３による移送を開始する。
[Description of collection method]
Next, the SF6 gas recovery method using the recovery apparatus having the above-described configuration will be described. First, the valve B 1 of the pipe in which the container 1 to be collected and the storage container 2 are directly connected is opened, and SF6 gas is transferred to the storage container 2 by the differential pressure of both containers. When the differential pressure begins to disappear, the valve B 1 is closed, the valve B 2 between the container 1 to be collected and the transfer compressor 3 is opened, and the transfer by the transfer compressor 3 is started.
その後、上記被回収容器１内が負圧に近い状態となったら前記バルブＢ2を閉じて、被回収容器１と油回転ポンプ４間のバルブＢ3を開き、直列に繋いだ油回転ポンプ４と移送用圧縮機３によってＳＦ６ガスの移送を行う。 After that, when the inside of the container to be collected 1 is close to a negative pressure, the valve B 2 is closed, the valve B 3 between the container to be collected 1 and the oil rotary pump 4 is opened, and the oil rotary pump 4 connected in series. The SF 6 gas is transferred by the transfer compressor 3.
そして、ＳＦ６ガスの移送速度が低下する粘性流と分子流の境界領域に近づいた、配管直径と圧力で決まる遷移圧力領域に入った後は、一旦、上記油回転ポンプ４の排気を止めてバルブＢ3を閉じ、被回収容器１と低温吸着ポンプ５間のバルブＢ4を開いて冷却手段６により液体窒素温度に冷却した吸着槽内にＳＦ６ガスを導入して凝縮させる(図２参照)。 Then, after entering the transition pressure region determined by the pipe diameter and pressure approaching the boundary region between the viscous flow and the molecular flow at which the SF6 gas transfer speed decreases, the valve of the oil rotary pump 4 is stopped once. B 3 is closed, the valve B 4 between the container 1 to be collected and the low temperature adsorption pump 5 is opened, and SF 6 gas is introduced into the adsorption tank cooled to the liquid nitrogen temperature by the cooling means 6 and condensed (see FIG. 2).
この際、複数設置した低温吸着ポンプ５・５…を、各バルブＢ5・Ｂ5…の開閉により選択的に使用して、被回収容器１内におけるＳＦ６ガスの分圧が極めて低くなる超高真空となるまで低温吸着を続ける。 At this time, a plurality of low-temperature adsorption pumps 5, 5... Are selectively used by opening and closing the valves B 5 , B 5 , and so on, so that the partial pressure of SF6 gas in the collection container 1 becomes extremely low. Continue low-temperature adsorption until vacuum is reached.
その後、低温吸着ポンプ５と被回収容器１間のバルブＢ4を閉じて、ヒーター装置７で低温吸着ポンプ５の槽内をＳＦ６が蒸発する所定温度まで昇温する。なおこの際、ヒーター装置７により低温吸着ポンプ５の槽内を温度制御して、槽内で凝縮されたＳＦ６ガス以外の不純物ガスを分留除去することでＳＦ６ガスの純度を上げることができる。 Thereafter, the valve B 4 between the low temperature adsorption pump 5 and the container 1 to be collected is closed, and the temperature of the inside of the tank of the low temperature adsorption pump 5 is raised by the heater device 7 to a predetermined temperature at which the SF 6 evaporates. At this time, the purity of the SF6 gas can be increased by controlling the temperature of the tank of the low temperature adsorption pump 5 by the heater device 7 and removing the impurity gas other than the SF6 gas condensed in the tank by fractional distillation.
そして、上記低温吸着ポンプ５の槽内をヒーター装置により昇圧した後、油回転ポンプ４へのバルブＢ6を開いて、油回転ポンプ４と移送用圧縮機３により吸着槽内のＳＦ６ガスを貯蔵容器２に再度移送する。 Then, after the inside of the tank of the low temperature adsorption pump 5 is boosted by the heater device, the valve B 6 to the oil rotary pump 4 is opened, and the SF 6 gas in the adsorption tank is stored by the oil rotary pump 4 and the transfer compressor 3. Transfer again to container 2.
これにより、被回収容器１内のＳＦ６圧力を１mbarからさらに７−８桁以上低い超高真空状態とすることが可能となり、被回収容器１内のＳＦ６ガスの残留量を環境への影響が無視できる程度の極めて僅かな量に抑えることができる。 This makes it possible to set the SF6 pressure in the container 1 to be recovered to an ultra-high vacuum state that is further 7-8 digits lower than 1 mbar, and ignores the residual amount of SF6 gas in the container 1 to be affected by the environment. It can be suppressed to an extremely small amount as much as possible.
本発明は、概ね上記のように構成されるが、本発明は図示の実施形態に限定されるものではなく、「特許請求の範囲」の記載内において種々の変更が可能であって、例えば、被回収容器１と貯蔵容器２の一方にバッファタンクを使用しなくとも、双方に装置容器を使用して移送したＳＦ６ガスを再使用することもできる。 The present invention is generally configured as described above. However, the present invention is not limited to the illustrated embodiment, and various modifications can be made within the description of “Claims”. Even if the buffer tank is not used for one of the collection container 1 and the storage container 2, SF6 gas transferred using the apparatus container for both can be reused.
また、低温吸着ポンプ５に設けるヒーター装置７に関しても、電熱器やヒートパイプ等の公知の加熱手段を選択して使用することができ、何れのものも本発明の技術的範囲に属する。 Also, with respect to the heater device 7 provided in the low temperature adsorption pump 5, known heating means such as an electric heater and a heat pipe can be selected and used, and any of them belongs to the technical scope of the present invention.
近年、「地球温暖化」が全世界の人類の未来を脅かす危機として叫ばれているが、この地球温暖化を防ぐためには、温室効果ガス(炭酸ガスやフロンガス、ＳＦ６ガス等)の生成と排出を抑止することが不可欠である。ところが、温室効果の最も高いＳＦ６ガスは、高電圧を発生する機器において並ぶもののない、価格も手ごろで、使い易い、総合的に最も高性能の絶縁ガスであるため、ＳＦ６ガスの使用を止めれば産業や学術研究に大きな支障が出る。例えば、現在の産業用機械の主要なエネルギー源の１つである電気の発電・送電・配電などが行えなくなったり、学術研究に用いる加速器施設の運転等が行えなくなる。また不燃性で支燃性もなく毒性もなく、安全性が確認されている絶縁ガスは現時点において他に類を見ない。そのため、温室効果の問題さえ解消されればＳＦ６ガスは、高性能の絶縁ガスとして十二分に利用できる。 In recent years, “global warming” has been screamed as a crisis that threatens the future of humanity all over the world. To prevent this global warming, the generation and emission of greenhouse gases (carbon dioxide, chlorofluorocarbon gas, SF6 gas, etc.) It is essential to deter However, SF6 gas, which has the highest greenhouse effect, is unparalleled in equipment that generates high voltage, is affordable, easy to use, and is the most comprehensive insulating gas overall, so if you stop using SF6 gas, A major obstacle to industrial and academic research. For example, it becomes impossible to generate, transmit, and distribute electricity, which is one of the main energy sources of current industrial machines, or to operate accelerator facilities used for academic research. In addition, there is no other insulating gas that is nonflammable, non-flammable, toxic, and has been confirmed to be safe. Therefore, the SF6 gas can be used as a high-performance insulating gas as long as the problem of the greenhouse effect is solved.
そのような中で、本発明のＳＦ６ガス回収装置、及びＳＦ６ガス回収方法は、ＳＦ６ガスを外部に放出することなく他の容器に移送することができ、それによって絶縁ガスを用いる装置容器の保守点検を環境に悪影響を与えずに実行できる有用な技術であるため、市場における需要は大きく、その産業上の利用価値は非常に高い。 Under such circumstances, the SF6 gas recovery apparatus and the SF6 gas recovery method of the present invention can transport SF6 gas to another container without releasing it to the outside, thereby maintaining the apparatus container using the insulating gas. Since it is a useful technology that can perform inspection without adversely affecting the environment, the demand in the market is great and its industrial utility value is very high.
１ 被回収容器
２ 貯蔵容器
３ 移送用圧縮機
４ 油回転ポンプ
５ 低温吸着ポンプ
６ 冷却手段
７ ヒーター装置
Ｂ バルブ
DESCRIPTION OF SYMBOLS 1 Container to be recovered 2 Storage container 3 Compressor for transfer 4 Oil rotary pump 5 Low temperature adsorption pump 6 Cooling means 7 Heater device B Valve
Claims (9)
前記被回収容器(１)と油回転ポンプ(４)間のバルブ(Ｂ3)を閉じた状態で、被回収容器(１)と低温吸着ポンプ(５)間のバルブ(Ｂ4)を開いて冷却下の吸着槽内でＳＦ６ガスを凝縮可能とする一方、今度は低温吸着ポンプ(５)と被回収容器(１)間のバルブ(Ｂ4)を閉じて、低温吸着ポンプ(５)と油回転ポンプ(４)間のバルブ(Ｂ6)を開くことにより昇温下の吸着槽内で気化したＳＦ６ガスを貯蔵容器(２)に回収可能としたことを特徴とするＳＦ６ガス回収装置。 A to-be-collected container (1) filled with SF6 gas; a low-temperature adsorption pump (5) connected to the to-be-collected container (1) and containing an adsorbent in the tank; and this low-temperature adsorption pump (5) A cooling means (6) capable of cooling the inside of the tank to liquid nitrogen temperature; a heater device (7) capable of raising the temperature of the inside of the tank of the low temperature adsorption pump (5) to a predetermined temperature; and the container (1) to be collected And an oil rotary pump (4) connected to the low-temperature adsorption pump (5), respectively ; a transfer compressor (3) connected in series to the oil rotary pump (4); And a storage container (2) capable of containing SF6 gas transferred from the container to be recovered (1) via a low temperature adsorption pump (5),
Wherein in the closed state of the valve (B 3) between the collection container (1) and an oil rotary pump (4), by opening the valve (B 4) between the collection container (1) and low temperature adsorption pump (5) While the SF6 gas can be condensed in the adsorption tank under cooling, the valve (B 4 ) between the low temperature adsorption pump (5) and the container to be collected (1) is closed, and the low temperature adsorption pump (5) and the oil are rotary pump (4) between the valve (B 6) that it has a recoverable in SF6 gas storage vessel is vaporized in the adsorption vessel below the heating (2) SF6 gas recovery apparatus according to claim by opening.
被回収容器(１)内のＳＦ６ガスを、油回転ポンプ(４)と移送用圧縮機(３)により貯蔵容器(２)に移送する第一の段階と；ＳＦ６ガスの移送速度が低下する粘性流と分子流の境界領域に近づいた、配管直径と圧力で決まる遷移圧力領域に入るところでは、一旦、油回転ポンプ(４)の排気を止めてバルブ(Ｂ3)を閉じ、吸着材が収容された低温吸着ポンプ(５)へのバルブ(Ｂ4)を開いて、冷却手段(６)により液体窒素温度に冷却した槽内でＳＦ６ガスを凝縮させる第二の段階と；その後、被回収容器(１)と低温吸着ポンプ(５)間のバルブ(Ｂ4)を閉じて、ヒーター装置(７)で低温吸着ポンプ(５)内を所定温度まで昇温する第三の段階と；低温吸着ポンプ(５)と油回転ポンプ(４)間のバルブ(Ｂ6)を開いて貯蔵容器(２)へ再度、油回転ポンプ(４)と移送用圧縮機(３)を用いて吸着槽内で気化したＳＦ６ガスを移送する第四の段階とを含むことを特徴とするＳＦ６ガス回収方法。 A method of transferring SF6 gas sealed in a container (1) to be collected to another storage container (2),
A first stage in which the SF6 gas in the container to be collected (1) is transferred to the storage container (2) by the oil rotary pump (4) and the compressor for transfer (3); When entering the transition pressure region, which is close to the boundary region between the flow and the molecular flow, and determined by the pipe diameter and pressure, the oil rotary pump (4) is temporarily turned off and the valve (B 3 ) is closed to accommodate the adsorbent. A second stage of opening the valve (B 4 ) to the cooled low temperature adsorption pump (5) and condensing the SF6 gas in the tank cooled to the liquid nitrogen temperature by the cooling means (6); A third stage in which the valve (B 4 ) between (1) and the low temperature adsorption pump (5) is closed, and the temperature inside the low temperature adsorption pump (5) is raised to a predetermined temperature by the heater device (7); (5) and an oil rotary pump (4) between the valve (B 6) to open the reservoir (2) to again, an oil rotary pump (4) and the transfer compressor ( Fourth stage and SF6 gas recovery method, which comprises the transferring the SF6 gas is vaporized in the adsorption vessel using).
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| CN107035660A (en) * | 2017-06-02 | 2017-08-11 | 四川瑞晟石油设备开发有限公司 | A kind of single cylinder compressor with oil-feed pump |
| CN109516441B (en) * | 2018-11-06 | 2024-05-10 | 国网浙江省电力有限公司检修分公司 | Sulfur hexafluoride recovery and low-temperature liquid injection filling system and working method thereof |
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