JP5506833B2 - Chemical supply device - Google Patents

Chemical supply device Download PDF

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JP5506833B2
JP5506833B2 JP2012006944A JP2012006944A JP5506833B2 JP 5506833 B2 JP5506833 B2 JP 5506833B2 JP 2012006944 A JP2012006944 A JP 2012006944A JP 2012006944 A JP2012006944 A JP 2012006944A JP 5506833 B2 JP5506833 B2 JP 5506833B2
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transfer pipe
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chemical solution
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supply
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勉 武田
亮介 野中
辰彦 去来川
靖貴 大浦
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KOBELCO ECO-MAINTENANCE CO., LTD.
Shinko Pantec Co Ltd
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Kobelco Eco Solutions Co Ltd
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Description

本発明は、薬液供給装置に関し、詳しくは、薬液を貯留する薬液貯留槽を備え、該薬液貯留槽の薬品を被供給箇所に供給するように構成されている薬液供給装置に関する。   The present invention relates to a chemical solution supply device, and more particularly, to a chemical solution supply device that includes a chemical solution storage tank that stores a chemical solution and is configured to supply chemicals in the chemical solution storage tank to a supply location.

従来、この種の薬液供給装置は、例えば、上水が流通する上水用配管に、前記薬液としての次亜塩素酸ナトリウム水溶液を供給するのに用いられている。   Conventionally, this kind of chemical solution supply device is used, for example, to supply a sodium hypochlorite aqueous solution as the chemical solution to a pipe for water supply through which clean water flows.

この薬品供給装置は、前記薬液貯留槽と、該薬液貯留槽内の薬液を被供給箇所に供給する移送配管と、前記薬液を前記移送配管内にて移送させうるように前記移送配管に配されたポンプとを備えてなる。   The chemical supply apparatus is disposed in the chemical solution storage tank, a transfer pipe for supplying the chemical liquid in the chemical solution storage tank to a supply location, and the transfer pipe so that the chemical liquid can be transferred in the transfer pipe. And a pump.

しかるに、この薬液供給装置を用いて、次亜塩素酸ナトリウム水溶液を前記上水用配管に移送する場合には、該次亜塩素酸ナトリウム水溶液が前記移送配管内を移送されている移送過程で該次亜塩素酸ナトリウム水溶液から塩素ガス等のガスが気泡として発生するため、該気泡が前記移送配管の内周面に付着し、該気泡が次第に凝集する。そして、該凝集した気泡(以下、「凝集気泡」ともいう。)が前記ポンプ内に移送されると、前記ポンプにガスロックが生じ、所定の質量流量で次亜塩素酸ナトリウム水溶液を前記上水用配管に安定的に供給できなくなる。所定の質量流量で次亜塩素酸ナトリウム水溶液を前記上水用配管に安定的に供給できないと、該上水用配管中の水における次亜塩素酸ナトリウム濃度が一定せず、上水の品質が基準を満たさない場合が生じ得る。   However, when the sodium hypochlorite aqueous solution is transferred to the water supply pipe using the chemical solution supply apparatus, the sodium hypochlorite aqueous solution is transferred in the transfer process in which the sodium hypochlorite aqueous solution is transferred through the transfer pipe. Since gas such as chlorine gas is generated as bubbles from the sodium hypochlorite aqueous solution, the bubbles adhere to the inner peripheral surface of the transfer pipe, and the bubbles gradually aggregate. When the aggregated bubbles (hereinafter, also referred to as “aggregated bubbles”) are transferred into the pump, a gas lock is generated in the pump, and the aqueous sodium hypochlorite solution is added to the clean water at a predetermined mass flow rate. It will not be possible to supply the pipes stably. If the sodium hypochlorite aqueous solution cannot be stably supplied to the water supply pipe at a predetermined mass flow rate, the sodium hypochlorite concentration in the water in the water supply pipe is not constant, and the quality of the water There may be cases where the criteria are not met.

斯かる観点から、前記移送過程で発生した凝集気泡が前記ポンプに供給されるのを抑制する機構を設けた薬液供給装置が知られている(例えば、特許文献1)。   From this point of view, there is known a chemical liquid supply device provided with a mechanism for suppressing the supply of aggregated bubbles generated in the transfer process to the pump (for example, Patent Document 1).

特開2003−80004号公報JP 2003-80004 A

ところで、斯かる薬液供給装置を用いて、次亜塩素酸ナトリウム水溶液を前記上水用配管に移送した後に、該上水用配管のメンテナンス等の目的でポンプを停止して次亜塩素酸ナトリウム水溶液の供給を停止し、そして、再度ポンプを稼働させて次亜塩素酸ナトリウム水溶液を前記上水用配管に移送することが行われている。   By the way, using such a chemical supply device, after transferring the sodium hypochlorite aqueous solution to the water supply pipe, the pump is stopped for the purpose of maintenance of the water supply pipe and the sodium hypochlorite aqueous solution. Is stopped, and the pump is operated again to transfer the aqueous sodium hypochlorite solution to the water supply pipe.

しかしながら、ポンプ停止時には、前記移送配管に次亜塩素酸ナトリウム水溶液が滞留するため、前記移送配管の内周面に付着した気泡が水流によって前記移送配管外に流されることがなくなる。さらに、前記移送配管に滞留した次亜塩素酸ナトリウム水溶液から新たな気泡が発生する。よって、ポンプの停止時間が長くなる程、前記移送配管内の気泡が増加する。また、ポンプ停止時には、前記移送配管内の次亜塩素酸ナトリウム水溶液にかかる圧力がポンプの稼動時よりも小さくなり、気泡が発生しやすくなって、前記移送配管内の気泡が増加する。前記移送配管内の気泡が増加すると、前記移送配管内で生成される凝集気泡も増加する。
そして、このポンプの停止後に、ポンプを稼動させて次亜塩素酸ナトリウム水溶液を前記上水用配管に移送させると、ポンプ停止時に発生した凝集気泡が前記ポンプ内に移送され、該ポンプにガスロックが生じやすくなる。これにより、所定の質量流量で次亜塩素酸ナトリウム水溶液を前記上水用配管に安定的に供給できなくなるという問題がある。
また、前記移送配管内に次亜塩素酸ナトリウム水溶液を満たしながら次亜塩素酸ナトリウム水溶液を前記被供給箇所に移送しようとしても、ポンプ停止時に前記移送配管内に生じた凝集気泡の分だけ次亜塩素酸ナトリウム水溶液が存在しない箇所が前記移送配管内に生じる。よって、このポンプ停止後に、ポンプを稼動させて再度次亜塩素酸ナトリウム水溶液を前記上水用配管に移送させようとすると、前記凝集気泡の分だけ次亜塩素酸ナトリウム水溶液が移送されない場合が生じる。従って、所定の質量流量で次亜塩素酸ナトリウム水溶液を前記上水用配管に安定的に供給できなくなるという問題もある。
However, since the sodium hypochlorite aqueous solution stays in the transfer pipe when the pump is stopped, bubbles attached to the inner peripheral surface of the transfer pipe are not caused to flow outside the transfer pipe due to water flow. Furthermore, new bubbles are generated from the sodium hypochlorite aqueous solution staying in the transfer pipe. Therefore, the longer the pump stop time, the more bubbles in the transfer pipe. In addition, when the pump is stopped, the pressure applied to the sodium hypochlorite aqueous solution in the transfer pipe becomes smaller than that during the operation of the pump, bubbles are likely to be generated, and the bubbles in the transfer pipe increase. When the bubbles in the transfer pipe increase, the aggregated bubbles generated in the transfer pipe also increase.
After the pump is stopped, when the pump is operated to transfer the sodium hypochlorite aqueous solution to the water supply pipe, the coagulated bubbles generated when the pump is stopped are transferred into the pump, and the gas lock is applied to the pump. Is likely to occur. As a result, there is a problem that the aqueous sodium hypochlorite solution cannot be stably supplied to the water supply pipe at a predetermined mass flow rate.
In addition, even if an attempt is made to transfer the sodium hypochlorite aqueous solution to the supply location while the transfer pipe is filled with the sodium hypochlorite aqueous solution, the amount of the coagulated bubbles generated in the transfer pipe when the pump is stopped is reduced. A location where no sodium chlorate aqueous solution exists is formed in the transfer pipe. Therefore, when the pump is operated after the pump is stopped and the aqueous sodium hypochlorite solution is transferred again to the water supply pipe, the aqueous sodium hypochlorite solution may not be transferred by the amount of the aggregated bubbles. . Therefore, there is also a problem that the sodium hypochlorite aqueous solution cannot be stably supplied to the water supply pipe at a predetermined mass flow rate.

また、このような問題は、次亜塩素酸ナトリウム水溶液を前記上水用配管に供給する場合に限らず、気泡が発生しうる薬液を被供給箇所に供給する場合にも生じ得る。   Such a problem may occur not only when the sodium hypochlorite aqueous solution is supplied to the water supply pipe, but also when a chemical solution that may generate bubbles is supplied to a supply location.

本発明は、上記問題点に鑑み、被供給箇所への薬液の供給を一端停止した後に、被供給箇所へ薬液を再度供給する際に、安定して被供給箇所に薬液を供給し得る薬液供給装置を提供することを課題とする。   In view of the above problems, the present invention provides a chemical solution supply that can stably supply a chemical solution to a supply location when the supply of the chemical solution to the supply location is stopped once and then supplied again to the supply location. It is an object to provide an apparatus.

本発明は、薬液を貯留する薬液貯留槽と、該薬液貯留槽内の薬液を被供給箇所に供給する移送配管と、前記薬液を前記移送配管内にて移送させうるように前記移送配管に配されたポンプとを備えてなる薬液供給装置であって、
前記移送配管の前記ポンプより下流側の位置から分岐した分岐配管が備えられ、
前記移送配管が、前記分岐配管が設けられた分岐部と、該分岐部よりも上流側となる第1移送配管と、該分岐部よりも下流側となる第2移送配管とを備え、
前記分岐配管が、前記分岐部から前記薬液貯留槽に前記薬液を返送するように構成され、
前記第1移送配管内を流通した薬液が移送先として前記第2移送配管及び前記分岐配管の何れか一方に移送されるように構成されており、
前記第2移送配管及び前記分岐配管の間で前記移送先を相互に切替可能とする切替装置が備えられてなることを特徴とする薬液供給装置にある。
The present invention provides a chemical solution storage tank for storing a chemical solution, a transfer pipe for supplying the chemical solution in the chemical solution storage tank to a supply location, and the transfer pipe so that the chemical solution can be transferred in the transfer pipe. A chemical solution supply device comprising a pump
A branch pipe branched from a position downstream of the pump of the transfer pipe is provided,
The transfer pipe includes a branch part provided with the branch pipe, a first transfer pipe upstream of the branch part, and a second transfer pipe downstream of the branch part,
The branch pipe is configured to return the chemical liquid from the branch portion to the chemical liquid storage tank,
The chemical liquid circulated in the first transfer pipe is configured to be transferred to either the second transfer pipe or the branch pipe as a transfer destination.
The chemical solution supply apparatus includes a switching device that can switch the transfer destination between the second transfer pipe and the branch pipe.

斯かる薬液供給装置は、前記分岐配管及び前記切替装置を備えてなることにより、前記ポンプを停止せずに、被供給箇所への薬液の供給を停止することができる。よって、被供給箇所への薬液の供給の停止時に、前記ポンプが配された第1移送配管に凝集気泡が生じ難くなる。
従って、斯かる薬液供給装置は、被供給箇所への薬液の供給を一端停止した後に、被供給箇所へ薬液を再度供給する際に、安定して被供給箇所に薬液を供給することができる。
Such a chemical solution supply apparatus includes the branch pipe and the switching device, and thus can stop the supply of the chemical solution to the supply location without stopping the pump. Therefore, when the supply of the chemical liquid to the supply location is stopped, the aggregated bubbles are less likely to be generated in the first transfer pipe provided with the pump.
Therefore, such a chemical solution supply apparatus can stably supply the chemical solution to the supply location when the chemical solution is supplied again to the supply location after the supply of the chemical solution to the supply location is stopped once.

また、本発明に係る薬液供給装置においては、前記切替装置は、前記分岐配管に配された背圧弁と、前記第2移送配管の流路を開閉する開閉弁とを備えてなる。 Also, the chemical liquid supply apparatus according to the present invention, prior Symbol switching device comprises provided with a back pressure valve disposed in the branch pipe, and a closing valve for opening and closing a flow path of the second transfer pipe.

斯かる薬液供給装置は、前記切替装置が、前記背圧弁及び前記開閉弁を備えてなることから、前記開閉弁を閉状態にすることで、前記第1移送配管内を流通した薬液が前記分岐配管のみに供給される。また、前記開閉弁を開状態にすることで、前記背圧弁により、前記第1移送配管内を流通した薬液が前記分岐配管を流通するのが抑制され、前記第1移送配管内を流通した薬液が前記第2移送配管に供給されやすくなる。よって、斯かる薬液供給装置は、前記開閉弁の開閉により、前記第1移送配管内を流通した薬液が、前記第2移送配管又は前記分岐配管に移送されるように制御することができる。
また、斯かる薬液供給装置は、前記開閉弁が閉状態となって前記薬液が前記分岐配管に供給されている状態では、前記開閉弁よりも上流側の薬液に、前記背圧弁の設定圧力と同等の圧力がかかり得る。よって、斯かる薬液供給装置は、前記開閉弁が閉状態となっている時に前記開閉弁の上流側の薬液にかかる圧力により、前記開閉弁が閉状態から開状態となった際に、前記開閉弁の上流側の薬液が前記開閉弁の下流側に圧送されて、薬液が第2移送配管をスムーズに流通しやすくなる。
従って、斯かる薬液供給装置は、被供給箇所への薬液の供給を一端停止した後に、被供給箇所へ薬液を再度供給する際に、より一層安定して被供給箇所に前記薬液を供給することができるという利点がある。
なお、前記背圧弁は、該背圧弁の上流側の配管内の圧力が設定圧力以下である場合には、液体の流通を阻止し、一方で、該背圧弁の上流側の配管内の圧力が設定圧力を超えようとした場合に、該配管内の圧力を設定圧力に保つように液体を流通させる弁である。
In such a chemical liquid supply apparatus, since the switching device includes the back pressure valve and the on-off valve, the chemical liquid that has flowed through the first transfer pipe is branched by closing the on-off valve. Supplied only to piping. Further, by opening the on-off valve, the back pressure valve prevents the chemical liquid flowing through the first transfer pipe from flowing through the branch pipe, and the chemical liquid flowing through the first transfer pipe Is easily supplied to the second transfer pipe. Therefore, such a chemical supply device can be controlled so that the chemical flowing through the first transfer pipe is transferred to the second transfer pipe or the branch pipe by opening and closing the on-off valve.
Further, in the chemical solution supply device, in a state where the on-off valve is closed and the chemical solution is supplied to the branch pipe, the set pressure of the back pressure valve is added to the chemical solution upstream of the on-off valve. Equivalent pressure can be applied. Therefore, when the on-off valve is changed from the closed state to the open state by the pressure applied to the chemical on the upstream side of the on-off valve when the on-off valve is in the closed state, The chemical solution upstream of the valve is pumped to the downstream side of the on-off valve, so that the chemical solution can easily flow through the second transfer pipe.
Therefore, such a chemical solution supply device supplies the chemical solution to the supply location more stably when supplying the chemical solution to the supply location again after stopping the supply of the chemical solution to the supply location. There is an advantage that can be.
The back pressure valve prevents the flow of liquid when the pressure in the pipe upstream of the back pressure valve is equal to or lower than the set pressure, while the pressure in the pipe upstream of the back pressure valve When the pressure exceeds the set pressure, the valve circulates the liquid so as to keep the pressure in the pipe at the set pressure.

以上のように、本発明の薬液供給装置は、被供給箇所への薬液の供給を一端停止した後に、被供給箇所へ薬液を再度供給する際に、安定して被供給箇所に薬液を供給し得る。   As described above, the chemical solution supply apparatus of the present invention stably supplies the chemical solution to the supply location when supplying the chemical solution to the supply location again after stopping the supply of the chemical solution to the supply location. obtain.

一実施形態に係る薬液供給装置の概略図。1 is a schematic view of a chemical liquid supply apparatus according to an embodiment. 一実施形態に係る薬液供給装置の概略図。1 is a schematic view of a chemical liquid supply apparatus according to an embodiment.

以下、添付図面を参照しつつ、本発明の一実施形態について説明する。   Hereinafter, an embodiment of the present invention will be described with reference to the accompanying drawings.

図1に示すように、本実施形態の薬液供給装置1は、薬液を貯留する薬液貯留槽2と、該薬液貯留槽2内の薬液を被供給箇所Aに供給する移送配管3と、前記薬液を前記移送配管3内にて移送させうるように前記移送配管3に配されたポンプ4と、前記移送配管3の途中における前記ポンプ4の下流側から分岐した分岐配管5とを備えてなる。   As shown in FIG. 1, the chemical solution supply apparatus 1 of the present embodiment includes a chemical solution storage tank 2 that stores a chemical solution, a transfer pipe 3 that supplies the chemical solution in the chemical solution storage tank 2 to a supply location A, and the chemical solution. A pump 4 arranged in the transfer pipe 3 and a branch pipe 5 branched from the downstream side of the pump 4 in the middle of the transfer pipe 3.

前記薬液は、気泡が発生しうる薬液であれば特に限定されないが、該薬液としては、例えば、次亜塩素酸ナトリウム水溶液等が挙げられる。
前記薬液として次亜塩素酸ナトリウム水溶液を用いる場合には、該次亜塩素酸ナトリウム水溶液における次亜塩素酸ナトリウムの濃度としては、0.1mg/L〜1.5mg/Lが好ましく、0.1mg/L〜0.5mg/Lがより好ましい。
Although the said chemical | medical solution will not be specifically limited if it is a chemical | medical solution which can generate | occur | produce a bubble, As this chemical | medical solution, sodium hypochlorite aqueous solution etc. are mentioned, for example.
When a sodium hypochlorite aqueous solution is used as the chemical solution, the concentration of sodium hypochlorite in the sodium hypochlorite aqueous solution is preferably 0.1 mg / L to 1.5 mg / L, preferably 0.1 mg / L to 0.5 mg / L is more preferable.

前記被供給箇所Aとしては、前記薬液を供給したい箇所であれば特に限定されないが、該被供給箇所としては、例えば、上水が流通する上水用配管等の配管、槽等が挙げられる。   The supply location A is not particularly limited as long as it is a location where the chemical solution is desired to be supplied. Examples of the supply location include piping, tanks, and the like such as piping for drinking water through which clean water flows.

前記移送配管3は、前記分岐配管5が設けられた分岐部3cと、該分岐部3cよりも上流側となる第1移送配管3aと、該分岐部3cよりも下流側となる第2移送配管3bとを備えてなる。前記第1移送配管3aは、前記薬液貯留槽2と該薬液貯留槽2の下部で連通している。また、前記第1移送配管3aは、前記分岐部3cから水平方向に延在する部分を有している。また、前記第2移送配管3bは、前記分岐部3cから水平方向に延在する部分を有している。   The transfer pipe 3 includes a branch part 3c provided with the branch pipe 5, a first transfer pipe 3a upstream of the branch part 3c, and a second transfer pipe downstream of the branch part 3c. 3b. The first transfer pipe 3 a communicates with the chemical liquid storage tank 2 at the lower part of the chemical liquid storage tank 2. Further, the first transfer pipe 3a has a portion extending in the horizontal direction from the branch portion 3c. Further, the second transfer pipe 3b has a portion extending in the horizontal direction from the branch portion 3c.

前記分岐配管5は、前記分岐部3cから前記薬液貯留槽2に前記薬液を返送するように構成されている。また、前記分岐配管5は、前記分岐部3cから上向きに延在する上向き延在部5aを備えてなる。本実施形態の薬液供給装置1は、前記分岐配管5が前記上向き延在部5aを備えてなることにより、前記第1移送配管3aから前記第2移送配管3bに前記薬液が移送される際に、薬液と共に移送される気泡が浮力により前記上向き延在部5aへ移動されやすくなり、前記移送配管3内の気泡を減少させることができるという利点がある。   The said branch piping 5 is comprised so that the said chemical | medical solution may be returned to the said chemical | medical solution storage tank 2 from the said branch part 3c. The branch pipe 5 includes an upward extending portion 5a extending upward from the branch portion 3c. In the chemical liquid supply apparatus 1 according to the present embodiment, when the branch pipe 5 includes the upward extending portion 5a, the chemical liquid is transferred from the first transfer pipe 3a to the second transfer pipe 3b. The bubbles transferred together with the chemical solution are easily moved to the upward extending portion 5a by buoyancy, and there is an advantage that the bubbles in the transfer pipe 3 can be reduced.

また、本実施形態の薬液供給装置1は、前記第1移送配管3a内を流通した薬液が移送先として前記第2移送配管3b及び前記分岐配管5の何れか一方に移送されるように構成されている。   Further, the chemical liquid supply apparatus 1 of the present embodiment is configured such that the chemical liquid flowing through the first transfer pipe 3a is transferred to one of the second transfer pipe 3b and the branch pipe 5 as a transfer destination. ing.

さらに、本実施形態の薬液供給装置1は、前記第2移送配管3b及び前記分岐配管5の間で前記移送先を相互に切替可能とする切替装置6を備えてなる。   Further, the chemical solution supply apparatus 1 of the present embodiment includes a switching device 6 that can switch the transfer destination between the second transfer pipe 3b and the branch pipe 5.

前記切替装置6は、前記分岐配管5に配された第1背圧弁6aと、前記第2移送配管3bに配された第2背圧弁6bと、前記第2移送配管3bの流路を開閉する開閉弁6cとを備えてなる。前記第2背圧弁6bは、前記開閉弁6cよりも下流側に配されている。前記第1背圧弁6aの設定圧力は、前記第2背圧弁6bの設定圧力よりも高く設定されている。第1背圧弁6aの設定圧力は、前記第2背圧弁6bの設定圧力よりも高く設定されていることにより、本実施形態の薬液供給装置1は、前記第2背圧弁6bにかかる薬液の圧力を一定に保つことができ、被供給箇所Aに薬液を安定的に供給することができるという利点がある。前記開閉弁6cは、開閉自在に構成されている。   The switching device 6 opens and closes the flow path of the first back pressure valve 6a arranged in the branch pipe 5, the second back pressure valve 6b arranged in the second transfer pipe 3b, and the second transfer pipe 3b. And an on-off valve 6c. The second back pressure valve 6b is disposed on the downstream side of the on-off valve 6c. The set pressure of the first back pressure valve 6a is set higher than the set pressure of the second back pressure valve 6b. Since the set pressure of the first back pressure valve 6a is set to be higher than the set pressure of the second back pressure valve 6b, the chemical solution supply apparatus 1 of the present embodiment allows the pressure of the chemical solution applied to the second back pressure valve 6b. Can be kept constant, and there is an advantage that the chemical solution can be stably supplied to the supply location A. The on-off valve 6c is configured to be openable and closable.

前記第1背圧弁6aの設定圧力から前記第2背圧弁6bの設定圧力を引いた設定圧力の差は、0.05〜0.20MPaが好ましく0.10〜0.15MPaがより好ましい。本実施形態の薬液供給装置1は、前記設定圧力の差が0.05MPa以上であることにより、被供給箇所Aに薬液をより一層安定的に供給することができるという利点を有する。
前記第1背圧弁6aの設定圧力は、0.30〜0.40MPaが好ましく、0.30〜0.35MPaがより好ましい。本実施形態の薬液供給装置1は、前記第1背圧弁6aの設定圧力が0.30MPa以上であることにより、前記開閉弁6cが閉状態である時に(被供給箇所Aへの薬液の供給の停止時に)、ポンプ4と開閉弁6cとの間の管内の圧力を一定に保つことができるという利点を有する。
前記第2背圧弁6bの設定圧力は、0.15〜0.25MPaが好ましく、0.15〜0.20MPaがより好ましい。本実施形態の薬液供給装置1は、前記第2背圧弁6bの設定圧力が0.15MPa以上であることにより、前記開閉弁6cが開状態である時に(被供給箇所Aへの薬液の供給の実施時に)、第2背圧弁6bと開閉弁6cとの間の管内の圧力を一定に保つことができ、その結果、被供給箇所Aに薬液を安定して供給できるという利点を有する。
The difference in the set pressure obtained by subtracting the set pressure of the second back pressure valve 6b from the set pressure of the first back pressure valve 6a is preferably 0.05 to 0.20 MPa, and more preferably 0.10 to 0.15 MPa. The chemical solution supply apparatus 1 of the present embodiment has an advantage that the chemical solution can be supplied to the supply location A more stably because the difference in the set pressure is 0.05 MPa or more.
The set pressure of the first back pressure valve 6a is preferably 0.30 to 0.40 MPa, and more preferably 0.30 to 0.35 MPa. When the set pressure of the first back pressure valve 6a is 0.30 MPa or more, the chemical solution supply apparatus 1 of the present embodiment is in a closed state (the supply of the chemical solution to the supply location A is performed). This has the advantage that the pressure in the pipe between the pump 4 and the on-off valve 6c can be kept constant when stopped).
The set pressure of the second back pressure valve 6b is preferably 0.15 to 0.25 MPa, and more preferably 0.15 to 0.20 MPa. When the set pressure of the second back pressure valve 6b is 0.15 MPa or more, the chemical liquid supply apparatus 1 according to the present embodiment is configured to supply the chemical liquid to the supply location A when the on-off valve 6c is in the open state (see FIG. At the time of implementation), the pressure in the pipe between the second back pressure valve 6b and the on-off valve 6c can be kept constant, and as a result, there is an advantage that the chemical solution can be stably supplied to the supply location A.

尚、本実施形態の薬液供給装置1は、上記構成により、上記利点を有するものであったが、本発明の薬液供給装置は、上記構成に限定されず、適宜設計変更可能である。   In addition, although the chemical solution supply apparatus 1 of this embodiment has the said advantage by the said structure, the chemical solution supply apparatus of this invention is not limited to the said structure, A design change is possible suitably.

即ち、本実施形態の薬液供給装置1は、前記第2移送配管3bが、前記分岐部3cから水平方向に延在する部分を有しているが、図2に示すように、本発明の薬液供給装置1は、前記第2移送配管3bが、前記分岐部3cから下向きに延在する下向き延在部3b1を有してもよい。
斯かる薬液供給装置1は、斯かる構成を有することにより、前記開閉弁が閉状態となっている時に、前記下向き延在部3b1で発生した気泡が、浮力により前記上向き延在部5aに移動されやすくなる。よって、斯かる薬液供給装置1は、前記開閉弁6cが閉状態の際に、前記下向き延在部3b1で発生した気泡が減少され、前記開閉弁6cが閉状態から開状態となった際に、薬液が第2移送配管3bをスムーズに移送されやすくなる。
従って、斯かる薬液供給装置1は、被供給箇所への薬液の供給を一端停止した後に、被供給箇所へ薬液を再度供給する際に、より一層安定して被供給箇所に前記薬液を供給することができるという利点がある。
That is, in the chemical solution supply apparatus 1 of the present embodiment, the second transfer pipe 3b has a portion extending in the horizontal direction from the branch portion 3c. However, as shown in FIG. In the supply device 1, the second transfer pipe 3b may have a downward extending portion 3b1 extending downward from the branch portion 3c.
Such a chemical solution supply apparatus 1 has such a configuration, so that when the on-off valve is in a closed state, bubbles generated in the downward extending portion 3b1 move to the upward extending portion 5a by buoyancy. It becomes easy to be done. Therefore, when the on-off valve 6c is in the closed state, the chemical solution supply apparatus 1 reduces the bubbles generated in the downward extending portion 3b1, and the on-off valve 6c is in the open state from the closed state. The chemical solution is easily transferred smoothly through the second transfer pipe 3b.
Accordingly, the chemical solution supply apparatus 1 supplies the chemical solution to the supply location more stably when supplying the chemical solution to the supply location again after stopping the supply of the chemical solution to the supply location. There is an advantage that you can.

また、本実施形態の薬液供給装置1は、前記切替装置6が、前記第1背圧弁6a、前記第2背圧弁6b及び前記開閉弁6cを備えてなるが、本発明の薬液供給装置は、前記切替装置6が、前記第1移送配管3a内を流通した薬液が前記第2移送配管3b又は前記分岐配管5に移送されるように該薬液の流路を切り替える切替弁を前記第分岐部3cに備えてもよい。   Further, in the chemical liquid supply apparatus 1 of the present embodiment, the switching device 6 includes the first back pressure valve 6a, the second back pressure valve 6b, and the on-off valve 6c. The switching device 6 has a switching valve for switching the flow path of the chemical solution so that the chemical solution flowing through the first transfer piping 3a is transferred to the second transfer piping 3b or the branch piping 5. You may prepare for.

1:薬液供給装置、2:薬液貯留槽、3:移送配管、3a:第1移送配管、3b:第2移送配管、3b1:下向き延在部、3c:分岐部、4:ポンプ、5:分岐配管、5a:上向き延在部、6:切替装置、6a:第1背圧弁、6b:第2背圧弁、6c:開閉弁、A:被供給箇所   1: Chemical solution supply device, 2: Chemical solution storage tank, 3: Transfer pipe, 3a: First transfer pipe, 3b: Second transfer pipe, 3b1: Downward extending part, 3c: Branch part, 4: Pump, 5: Branch Piping, 5a: upwardly extending portion, 6: switching device, 6a: first back pressure valve, 6b: second back pressure valve, 6c: on-off valve, A: location to be supplied

Claims (1)

薬液を貯留する薬液貯留槽と、該薬液貯留槽内の薬液を被供給箇所に供給する移送配管と、前記薬液を前記移送配管内にて移送させうるように前記移送配管に配されたポンプとを備えてなる薬液供給装置であって、
前記移送配管の前記ポンプより下流側の位置から分岐した分岐配管が備えられ、
前記移送配管が、前記分岐配管が設けられた分岐部と、該分岐部よりも上流側となる第1移送配管と、該分岐部よりも下流側となる第2移送配管とを備え、
前記分岐配管が、前記分岐部から前記薬液貯留槽に前記薬液を返送するように構成され、
前記第1移送配管内を流通した薬液が移送先として前記第2移送配管及び前記分岐配管の何れか一方に移送されるように構成されており、
前記第2移送配管及び前記分岐配管の間で前記移送先を相互に切替可能とする切替装置が備えられてなり、
前記切替装置は、前記分岐配管に配された背圧弁と、前記第2移送配管の流路を開閉する開閉弁とを備えてなることを特徴とする薬液供給装置。
A chemical solution storage tank for storing a chemical solution, a transfer pipe for supplying the chemical solution in the chemical solution storage tank to a supply location, and a pump disposed in the transfer pipe so that the chemical solution can be transferred in the transfer pipe; A chemical supply apparatus comprising:
A branch pipe branched from a position downstream of the pump of the transfer pipe is provided,
The transfer pipe includes a branch part provided with the branch pipe, a first transfer pipe upstream of the branch part, and a second transfer pipe downstream of the branch part,
The branch pipe is configured to return the chemical liquid from the branch portion to the chemical liquid storage tank,
The chemical liquid circulated in the first transfer pipe is configured to be transferred to either the second transfer pipe or the branch pipe as a transfer destination.
Ri Na and switching device is provided to enable switching the transfer destination forth between the second transfer pipe and the branch pipe,
Wherein the switching device, the branch and back-pressure valve arranged on the piping, chemical supply device according to claim Rukoto a and a closing valve for opening and closing a flow path of the second transfer pipe.
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