JP5503504B2 - X-ray diffraction apparatus and X-ray diffraction measurement method - Google Patents

Description

  The present invention relates to an X-ray diffraction apparatus and an X-ray diffraction measurement method.

  The X-ray diffractometer is configured such that when X-rays are incident on and reflected from a lattice plane that is a regular arrangement of atoms inside a crystal material, the optical path difference between the X-rays reflected by different lattice planes is This utilizes a phenomenon in which reflected X-rays interfere and strengthen each other when the wavelength is a natural number multiple. Such an X-ray diffraction apparatus is used for various material evaluations such as crystal structure analysis, component analysis, and residual stress measurement as an inspection tool for nondestructively inspecting the state of crystals inside a material.

  Conventional X-ray diffractometers have a problem that, due to the limitations of the optical system in the apparatus, only a certain measurement point in a specific direction can be measured for a measurement object placed on a sample stage. That is, the size and measurement range of the measurement object may be limited by the optical system and drive mechanism of the apparatus. In order to provide an X-ray diffractometer having higher versatility, techniques described in Patent Documents 1 to 3, for example, are known.

  For example, Patent Document 1 describes a radiation analyzer provided with a sample stage that is driven by an adjustment mechanism that adjusts the movement of a sample in the x and y directions. Patent Document 2 discloses a first moving mechanism for moving the X-ray generator in the x-axis direction on the measurement reference plane that crosses the sample, and the X-ray generator in the y-axis direction on the measurement reference plane. An X-ray diffractometer including a second moving mechanism for moving the X-ray is described. Further, Patent Document 3 describes a positioning device used in X-ray measurement and inspection that requires angle accuracy control as well as relative distance and axis crossing accuracy.

Japanese Patent Laid-Open No. 5-126767 Japanese Patent Laid-Open No. 5-203591 JP 2006-201167 A

  As described above, all of the devices described in Patent Documents 1 to 3 move the X-ray irradiation source and the detector by the drive mechanism (positioning mechanism) to widen the range of measurement positions. However, the techniques described in Patent Documents 1 to 3 have the following problems.

  In the technique described in Patent Document 1, the measurement object must be installed on the sample holder (sample stage), and the measurement object that cannot be installed on the sample holder (for example, when the measurement object is large, the position is already fixed). In the case where it has been made, there is a problem that measurement cannot be performed for a building such as a factory or a power plant.

  Further, in the technique described in Patent Document 2, since the moving mechanism can move only in the horizontal orthogonal direction, it may be difficult to perform measurement in a non-flat place. Moreover, there exists a subject that the inside of pipe | tubes, such as piping, cannot be measured with the X-ray-diffraction apparatus of patent document 2, for example.

  Furthermore, the technique described in Patent Document 3 is used for measuring material characteristics of a small measurement object such as a silicon wafer, for example, and as in the case of Patent Document 1, measurement that cannot be installed on the sample holder. There is a problem that measurement cannot be performed on an object.

  That is, depending on the techniques described in Patent Documents 1 to 3, the size and weight of the measurement object, the installation location, and the like are limited by the optical system geometric conditions such as the sample holder, the X-ray irradiation source, and the detector. There is. In particular, it may be difficult to apply these apparatuses to a measurement object having a weight exceeding the load resistance range of a normal sample holder.

  The present invention has been made to solve the above-described problems, and an object of the present invention is to provide an X-ray diffraction apparatus and an X-ray diffraction measurement method capable of quickly and easily measuring a measurement object that has been difficult to measure in the past. Is to provide.

The present inventors have result of intensive studies to solve the above problems, by configuring the X-ray diffraction apparatus as follows to solve the above problems. That is, an X-ray irradiation source for irradiating X-rays having a first axis and a second axis as two orthogonal axes, and a third axis as an axis perpendicular to the two axes as three axes; A detector for detecting the X-ray diffracted by irradiating a measurement object with X-rays, and a support member for supporting the X-ray irradiation source and the detector movably in the three-axis directions. The X-ray diffractometer includes: a first positioning unit capable of moving the X-ray irradiation source and the detector in an axial direction of the first axis; the X-ray irradiation source; Second positioning means capable of moving the detector in the axial direction of the second axis, and third positioning means capable of moving the X-ray irradiation source and the detector in the axial direction of the third axis The X-ray irradiation source and the detector are integrated with each other so that the relative position between them is unchanged. The first positioning means, the second positioning means, and the third positioning means are connected to positioning means, and the X-ray irradiation source and the detector are moved to predetermined positions. The unitary object is moved in the respective axial directions of the three axes so that the X-ray irradiation position and the diffracted X-ray detection position are determined.

  According to the present invention, it is possible to provide an X-ray diffraction apparatus and an X-ray diffraction measurement method that can quickly and easily measure even an object that has been difficult to measure in the past.

It is the figure which represented typically a mode that X-ray diffraction of the outer surface of cylindrical piping was measured using the X-ray-diffraction apparatus which concerns on 1st embodiment of this invention. It is the figure which represented typically the vicinity of the integrated X-ray tube and the two-dimensional detector. It is the figure which represented typically a mode that X-ray diffraction of the inner surface of cylindrical piping was measured using the X-ray-diffraction apparatus which concerns on 1st embodiment of this invention. In the X-ray diffraction apparatus which concerns on 1st embodiment of this invention, it is a figure which shows typically the mode from the A direction in FIG. It is a figure which shows typically the incident angle control means in the X-ray-diffraction apparatus which concerns on 1st embodiment of this invention. (A) is a figure which represents typically the site | part which measures the X-ray diffraction of a disk shaped surface in the X-ray-diffraction apparatus which concerns on 2nd embodiment of this invention, (b) is in (a). It is a figure which represents an AA line part typically. It is a figure which represents typically the example of a change of the integrated X-ray irradiation source and a detector.

  DESCRIPTION OF EMBODIMENTS Hereinafter, embodiments for carrying out the present invention (the present embodiment) will be described with reference to the drawings. However, the present invention is not limited to the following contents, and does not depart from the gist of the present invention. Any change can be made.

[1. X-ray diffraction apparatus according to first embodiment]
[1-1. Constitution]
FIG. 1 is a diagram schematically illustrating a state in which X-ray diffraction of an outer surface of a cylindrical pipe is measured using the X-ray diffraction apparatus according to the first embodiment. As shown in FIG. 1, an X-ray diffraction apparatus 100 according to the first embodiment includes an X-ray tube 1 as an X-ray irradiation source, a two-dimensional detector 2 as a detector, and an x-axis as a support member. A direction positioning means (first positioning means) 3, a y-axis direction positioning means (second positioning means) 4, and a z-axis direction positioning means (third positioning means) 5 are provided. The “x-axis”, “y-axis”, and “z-axis” mentioned here represent the x-direction, y-direction, and z-direction axes shown in FIG.

  In addition, the X-ray diffraction apparatus 100 according to the first embodiment includes an incident angle for changing the angle in the yz plane of the X-ray tube 1 and the two-dimensional detector 2 that are integrally provided. A stand 7, a frame 8 and a shaft 10 for supporting the control means 6, the x-axis direction positioning means 3, the y-axis direction positioning means 4, the z-axis direction positioning means 5 and the like are also provided. And the X-ray-diffraction apparatus 100 which concerns on 1st embodiment shown in FIG. 1 is measuring the X-ray diffraction of the outer surface of the cylindrical piping 9 as a measuring object as mentioned above.

  First, the integrated X-ray tube 1 and the two-dimensional detector 2 will be described. FIG. 2 is a diagram schematically showing the vicinity of the integrated X-ray tube 1 and the two-dimensional detector 2. In FIG. 2, arrows indicate the flow of X-rays.

  As shown in FIG. 2, in the X-ray diffraction apparatus 100 according to the first embodiment, an X-ray tube 1 and a two-dimensional detector 2 are integrally provided. Then, X-rays are irradiated from the distal end portion 1 a of the X-ray tube 1 to the outer surface of the pipe 9. The X-ray irradiated to the pipe 9 is diffracted, and the diffracted X-ray is measured (detected) by the two-dimensional detector 2.

  The X-ray tube 1 irradiates the tube 9 with X-rays from its tip 1a. A specific example of the X-ray tube 1 is not particularly limited, and any known X-ray tube can be used. Specifically, an X-ray tube used in a known X-ray diffractometer is used. Can be used.

The two-dimensional detector 2 measures (detects) diffraction of the diffracted X-rays by irradiating the measurement object 9 with the X-rays from the X-ray tube 1. As in the case of the X-ray tube 1, the two-dimensional detector 2 can be the same as that used in a known X-ray diffractometer. However, in the first embodiment, the flat (planar) two-dimensional detector 2 is used. As the flat two-dimensional detector 2, it is preferable to use a two-dimensional position sensitive detector or a stimulable phosphor. A specific example of using the stimulable phosphor includes an imaging plate.
In the X-ray diffraction apparatus 100 according to the first embodiment shown in FIG. 2, an imaging plate is used as the two-dimensional detector 2.

  As the two-dimensional detector 2, for example, a two-dimensional position sensitive detector or one using a stimulable phosphor may be determined in consideration of the respective characteristics. For example, the two-dimensional position sensitive detector as the two-dimensional detector 2 does not need to be removed from the integrally formed X-ray tube 1 and can measure and image X-ray diffraction with particularly high accuracy. There is an advantage of becoming. On the other hand, those using photostimulable phosphors have the advantage of low manufacturing costs due to their simple structure. In particular, in the case of an imaging plate, since the imaging plate is flat, it can be easily formed with high accuracy, and there is an advantage that the size and shape of the imaging plate corresponding to the measurement object can be easily designed. . Therefore, the type of the two-dimensional detector 2 may be determined in consideration of these advantages.

  As described above, the specific configuration of the two-dimensional detector 2 is not particularly limited. However, for example, when the two-dimensional detector 2 is an imaging plate, the imaging plate usually has two base portions 2a and photosensitive portions 2b. Consists of layers. The base portion 2a supports the photosensitive portion 2b, and the material thereof is not particularly limited. For example, a lightweight resin, plastic, or the like can be used. The photosensitive portion 2b is a member that measures (detects) diffracted X-rays, and is usually formed by applying a stimulable phosphor.

  Further, a light shielding cover that covers the two-dimensional detector 2 may be provided around the two-dimensional detector 2. By providing the light shielding cover, it is possible to reduce the influence of background due to visible light.

  In conventional X-ray diffractometers (see, for example, Patent Documents 1 to 3 above), the X-ray tube 1 and the two-dimensional detector 2 are not integrated and independent, so each time X-ray diffraction is measured. It was necessary to determine the positions of the X-ray tube 1 and the two-dimensional detector 2. Further, in the case of the X-ray diffraction apparatus in which the positions of the X-ray tube 1 and the two-dimensional detector 2 are determined in advance, the type of the measurement object is limited because the installation position of the measurement object is set in advance. There was a thing.

  However, in the X-ray diffraction apparatus 100 according to the first embodiment as described above, the X-ray tube 1 and the two-dimensional detector 2 are integrated. By configuring the X-ray tube 1 and the two-dimensional detector 2 in this way, the two-dimensional detector 2 can reliably measure (detect) the X-rays irradiated from the X-ray tube 1 and diffracted. Therefore, in the X-ray diffraction measurement, only the integrated X-ray tube 1 and the two-dimensional detector 2 need to be moved, and the X-ray detector diffracted every time the X-ray diffraction measurement is performed appropriately. There is an advantage that there is no need to move to a different position (so-called positioning), that is, no complicated operation is required.

  In addition, since the X-ray tube 1 and the two-dimensional detector 2 are configured to be integrated, there is no need to provide the X-ray tube 1 and the two-dimensional detector 2 independently of each other. The structure can be simplified. In addition, since it is not necessary to provide the X-ray tube 1 and the two-dimensional detector 2 independently, they can be arranged in a measurement space that is narrower than before, and a measurement object having a complicated structure can also be provided. It is possible to measure. Therefore, according to the X-ray diffraction apparatus 100 according to the first embodiment, the X-ray diffraction apparatus 100 can be suitably applied to a fixed object such as a large structural member in a factory or power plant site. For example, as shown in FIG. 3, X-ray diffraction can be measured also in the inside of piping.

  Although there is no restriction | limiting in particular in the magnitude | size of the integrated X-ray tube 1 and the two-dimensional detector 2, Although the X-ray-diffraction apparatus 100 which concerns on 1st embodiment is a measurement object in a narrow space, and an obstruction around it In order to suitably apply to a measurement object having a large number of particles, it is preferable to make them as small as possible (that is, to have a short X-ray optical path and a small occupied volume) and to be integrated.

  The x-axis direction positioning unit 3 moves the integrated X-ray tube 1 and the two-dimensional detector 2 in the x-axis direction. The x-axis direction positioning means 3 is movable independently of the later-described y-axis direction positioning means 4 and z-axis direction positioning means 5. The x-axis direction positioning means 3 also functions as a support member.

  The specific configuration of the x-axis direction positioning means 3 is not particularly limited, and can be configured by, for example, a guide rail or a screw rod (ball screw). Further, as a driving method, for example, a manual method using a handle, an electric method using a motor, or the like may be applied. In particular, when the measurement environment of X-ray diffraction is such that it is difficult for an operator (operator) to access, remote control is possible by employing an electric positioning mechanism. Further, if necessary, the X-ray tube 1 and the two-dimensional detector 2 integrated using, for example, a scale and a magnetic head slide are moved in the x-axis direction to perform positioning with higher accuracy. Can do.

  The y-axis direction positioning means 4 moves the integrated X-ray tube 1 and the two-dimensional detector 2 in the y-axis direction. The y-axis direction positioning means 4 is movable independently of the x-axis direction positioning means 3 and the z-axis direction positioning means 5 described later. Further, the y-axis direction positioning means 4 also functions as a support member.

  The specific configuration of the y-axis direction positioning unit 4 is not particularly limited, and for example, the same configuration as that of the x-axis direction positioning unit 3 can be used. Further, for example, a scale scale and a magnetic head slide can be provided in the same manner as described above.

  The z-axis direction positioning means 5 moves the integrated X-ray tube 1 and the two-dimensional detector 2 in the z-axis direction. The z-axis direction positioning means 5 is movable independently of the x-axis direction positioning means 3 and the y-axis direction positioning means 4. Moreover, the z-axis direction positioning means 5 also functions as a support member.

  The specific configuration of the z-axis direction positioning unit 5 is not particularly limited, and for example, the same configuration as the x-axis direction positioning unit 3 can be used. Further, for example, a scale scale and a magnetic head slide can be provided in the same manner as described above.

  As described above, in the X-ray diffraction apparatus 100 according to the first embodiment, the x-axis direction positioning unit 3, the y-axis direction positioning unit 4, and the z-axis direction positioning unit 5 move independently. Yes. Therefore, the X-ray tube 1 and the two-dimensional detector 2 can be moved to arbitrary positions in the three-dimensional space, and the measurement object 9 has, for example, a complicated shape or a large size. The X-ray diffraction apparatus 100 according to the first embodiment can be applied even to a fixed object such as a building. Further, since the X-ray tube 1 and the two-dimensional detector 2 are integrally formed, a two-dimensional X-ray diffraction pattern can be recorded by one movement. Therefore, the measurement efficiency of X-ray diffraction can be improved.

  That is, if only the X-ray tube 1 and the two-dimensional detector 2 are moved to the measurement location (that is, the X-ray irradiation position and the X-ray detection position) without moving the X-ray diffraction apparatus 100 itself, Diffraction can be measured. Accordingly, when measuring a plurality of locations on the same measurement object, the positioning time can be greatly shortened, so that the measurement efficiency can be improved.

  The incident angle control means 6 changes the incident angle of the X-ray irradiated from the X-ray tube 1 to the measurement object in the integrated X-ray tube 1 and the two-dimensional detector 2. Here, the incident angle control means 6 will be described with reference to FIG. FIG. 4 is a diagram schematically showing a state from the A direction in FIG. 1 in the X-ray diffraction apparatus 100 according to the first embodiment.

As shown in FIG. 4, the incident angle control means 6 includes an integrated X-ray tube 1 and a two-dimensional detector 2 that are slidable on a curved guide rail 11. Then, the X-ray tube 1 and the two-dimensional detector 2 integrated by the incident angle control means 6 slide on the guide rail 11 in a curved surface, so that the object to be measured from the tip 1a of the X-ray tube 1 is measured. The incident angle Ψ ₀ of the X-ray irradiated to 9 can be changed. Although the curved guide rail 11 is used in the incident angle control means 6 shown in FIG. 4, for example, a coupling may be used.

  FIG. 5 is a diagram schematically showing the elevation angle control means 12 in the X-ray diffraction apparatus 100 according to the first embodiment. As shown in FIG. 5, the elevation angle control means 12 moves the integrated X-ray tube 1 and the two-dimensional detector 2 in the xz plane (see FIG. 1). What is necessary is just to set the elevation angle (alpha) at the time of moving according to the magnitude | size of the measuring object 9, a structure, a position, etc. FIG.

  As shown in FIGS. 1 and 5, the X-ray diffraction apparatus 100 according to the first embodiment includes the incident angle control means 6 and the elevation angle control means 12. Therefore, the X-ray diffraction apparatus 100 according to the first embodiment can be suitably applied to a measurement object having a complicated inclined surface or curved surface.

  The gantry 7 and the frame 8 support the x-axis direction positioning means 3, the y-axis direction positioning means 4 and the z-axis direction positioning means 5. In the X-ray diffractometer 100 according to the first embodiment, since the frame 8 is configured to be stretchable, the X-ray diffractometer 100 is installed while maintaining sufficient stability even in a non-flat installation environment. Can do.

  The material constituting the gantry 7 and the frame 8 is not particularly limited. For example, aluminum can be used in consideration of the ability to withstand the weight of the X-ray tube 1 and the two-dimensional detector 2 and the operability during transportation and installation. It is preferable to use a material having a certain level of strength and a certain level of lightness, such as an alloy.

  The shaft 10 constitutes the x-axis direction positioning means 3, the y-axis direction positioning means 4 and the z-axis direction positioning means 5. Therefore, it is preferable to use a material that can withstand at least the weight of the X-ray tube 1 and the two-dimensional detector 2, such as stainless steel.

[1-2. Operation]
Next, the operation of each part in the X-ray diffraction apparatus 100 according to the first embodiment will be described. As described above, the x-axis direction positioning unit 3, the y-axis direction positioning unit 4 and the z-axis direction positioning unit 5 are moved independently of each other. Since these are directly or indirectly connected to the X-ray tube 1 and the two-dimensional detector 2, the positions of the integrated X-ray tube 1 and the two-dimensional detector 2 are determined by the positioning means. Is controlled by moving.

  That is, for example, when only one X-ray diffraction pattern needs to be measured for the pipe 9, the x-axis direction positioning means 3, the y-axis direction positioning means 4 and the z-axis direction positioning means 5 are controlled and integrated. The X-ray tube 1 and the two-dimensional detector 2 may be moved to desired positions. Thereafter, X-rays may be irradiated to the pipe 9. Since the X-ray diffraction apparatus 100 according to the first embodiment is configured by integrating the X-ray tube 1 and the two-dimensional detector 2, the X-ray irradiation position and diffraction are performed by a series of these operations. The X-ray measurement position is determined simultaneously.

  Further, for example, a plurality of locations of the pipe 9 can be easily and continuously measured. Specifically, for example, in FIG. 1, the positions of the x-direction positioning means 3, the y-axis direction positioning means 4 and the z-axis direction positioning means 5 are set to arbitrary positions on the surface of the pipe 9, and then the y-axis direction positioning means. X-ray diffraction at a plurality of locations on the surface of the pipe 9 can be continuously and rapidly measured by gradually moving only 4 while irradiating only 4 with X-ray irradiation or at predetermined intervals.

  Since the diffraction angle 2θ (see FIG. 4) of characteristic X-rays having a specific wavelength (for example, CuKα ray) is unique to the material, the crystal material measures the diffraction angle 2θ as described above. By doing so, the material of the measuring object can be identified.

[2. X-ray diffraction apparatus according to second embodiment]
As another X-ray diffraction apparatus according to this embodiment, an X-ray diffraction apparatus 200 according to the second embodiment shown in FIG. 6 will be described as an example. FIG. 6A is a diagram schematically showing a part for measuring X-ray diffraction of a disk-shaped surface in the X-ray diffraction apparatus 200 according to the second embodiment, and FIG. 6B is a diagram in FIG. It is a figure which represents an AA line part typically. In addition, about the member showing the same thing as FIG. 1, the same code | symbol is used and the description is abbreviate | omitted.

  In the second embodiment shown in FIG. 6, an annular steel plate 21 is used as a measurement object. The steel plate 21 has an outer diameter D = 4000 mm and an inner diameter d = 3200 mm. The circumferential direction of the annular steel plate 21 is defined as h direction, the radial direction is defined as r direction, and the direction perpendicular to the steel plate is defined as z direction. . Further, in FIG. 6, a plurality of locations indicated by “x” marks are X-ray irradiation portions, and specific irradiation intervals are set to a = 200 mm in the h direction and b = 75 mm in the r direction.

  An X-ray diffraction apparatus 200 according to the second embodiment shown in FIGS. 6A and 6B includes an h-direction positioning unit 13 as a first positioning unit and an r-direction positioning unit 14 as a second positioning unit. And z-direction positioning means 15 as third positioning means. Further, as shown in FIGS. 6A and 6B, the handle 17a for controlling the h-direction positioning means 13, the handle 17b for controlling the r-direction positioning means 14, and the z-direction positioning means 15 are controlled. A handle 17c is also provided. Further, a scale scale 16 is provided to perform positioning in the h direction with higher accuracy.

The X-ray diffraction apparatus 200 has the above-described configuration, and X-ray diffraction is measured by performing the following operations (that is, the X-ray irradiation position and the diffracted X-ray detection position are determined). ) That is, by operating the handle 17a, the position in the h direction of the X-ray irradiation position (that is, the position of the distal end portion 1a included in the X-ray tube 1 formed integrally with the two-dimensional detector 2). The position is determined with reference to the scale scale 16. Specifically, by rotating the handle 17a, the h-direction positioning means 13 supported by the guide rail 19 moves, and the position in the h direction is determined. Similarly, the handle 17b is operated to determine the position in the r direction where the X-ray is irradiated, and finally the handle 17c is operated to determine the position in the z direction.
As the material of the guide rail 19, a high moment load may be applied depending on the movement position of the integrated X-ray tube 1 and the two-dimensional detector 2. Is preferably used.

  In this way, for example, when continuous measurement in the h direction is desired (see FIG. 6 (a)), the positions of the h direction, the r direction, and the z direction are first determined, and then only the handle 17a is operated. Then, by shifting the irradiation position in the h direction, X-ray diffraction can be measured quickly and easily continuously.

[3. Example of change]
The configuration and operation of the X-ray diffraction apparatus according to this embodiment have been described above with specific examples. Thus, according to the X-ray diffraction apparatus according to the present embodiment, the X-ray irradiation position can be quickly and easily positioned and X-ray diffraction can be measured. In particular, such an effect becomes remarkable when measuring a plurality of locations continuously. In addition, according to the X-ray diffraction apparatus according to the present embodiment, X-ray diffraction can be easily measured for a measurement object having a complicated shape or a fixed measurement object.

  Moreover, although the X-ray diffractometer 100 according to the first embodiment and the X-ray diffractometer 200 according to the second embodiment have been described above, the X-ray diffractometer according to the present embodiment is the gist of the present invention. Any change can be made without departing from the scope of the invention. For example, in the X-ray diffraction apparatus 100 according to the first embodiment and the X-ray diffraction apparatus 200 according to the second embodiment, a flat imaging plate is used as a two-dimensional detector, but as shown in FIG. A conical two-dimensional detector 22 may be used.

  In the above description, the present embodiment has been described on the assumption that the X-ray tube 1 and the two-dimensional detector 2 are integrated. However, the X-ray tube 1 and the two-dimensional detector 2 are not integrated. It may be independent. In other words, the X-ray tube 1 and the two-dimensional detector 2 are placed by the x-axis direction positioning means 3, the y-axis direction positioning means 4 and the z-axis direction positioning means 5 (specifically, the X-ray irradiation position). And (measurement (detection) position of diffracted X-rays) are controlled (determined), they are included in the scope of the present invention.

  Furthermore, the X-ray diffraction apparatus according to this embodiment has been described by taking an X-ray tube as an X-ray irradiation source and a two-dimensional detector as an example of the detector, but the X-ray diffraction apparatus according to this embodiment has been described. However, the X-ray irradiation source and the detector that can be used for the present invention are not limited to these. That is, an X-ray irradiation source and a detector may be arbitrarily selected within a range that does not significantly impair the effects of the present invention.

1 X-ray tube (X-ray irradiation source)
1a Tip 2 Two-dimensional detector (detector)
3 x-axis direction positioning means (first positioning means; support member)
4 y-axis direction positioning means (second positioning means; support member)
5 z-axis direction positioning means (third positioning means; support member)
6 Incident angle control means 7 Mounting base 8 Frame 9 Piping (measurement object)
DESCRIPTION OF SYMBOLS 10 Shaft 11 Guide rail 12 Elevation angle control means 13 H direction positioning means (1st positioning means; support member)
14 r direction positioning means (second positioning means; support member)
15 z-direction positioning means (third positioning means; support member)
16 Scale scale 17a Handle 17b Handle 17c Handle 19 Guide rail 21 Steel plate (object to be measured)
22 Two-dimensional detector 100 X-ray diffractometer 200 X-ray diffractometer

Claims (7)

A first axis and a second axis as two orthogonal axes, and a third axis as an axis perpendicular to the two axes as three axes;
An X-ray irradiation source for irradiating X-rays;
A detector for detecting the X-ray diffracted by the X-ray being irradiated on the measurement object;
A support member that supports the X-ray irradiation source and the detector so as to be movable in the directions of the three axes ;
An X-ray diffraction apparatus comprising:
The support member is
First positioning means capable of moving the X-ray irradiation source and the detector in the axial direction of the first axis ;
Second positioning means capable of moving the X-ray irradiation source and the detector in the axial direction of the second axis ;
A third positioning means capable of moving the X-ray irradiation source and the detector in the axial direction of the third axis;
The X-ray irradiation source and the detector are connected to the first positioning means as an integrated body so that the relative position between both remains unchanged,
Said first positioning means, said second positioning means, by said third positioning means is moved to a predetermined position, that the single piece is moved in the respective axial directions of the three axes Accordingly, the detection position of the irradiation position and diffracted the X-ray of the X-ray Ru is determined
It characterized the this, X-rays diffractometer. In the first positioning means,
An incident angle control means for moving the monolith in a plane including the second axis and the third axis;
An elevation control means for moving the monolith in a plane including the first axis and the third axis;
Characterized <br/> that is provided, X-rays diffraction apparatus according to claim 1. The X-ray diffraction apparatus according to claim 2, wherein the detector is a planar two-dimensional detector. The X-ray diffraction apparatus according to claim 3, wherein the two-dimensional detector is a two-dimensional position sensitive detector. The X-ray diffractometer according to claim 3, wherein the two-dimensional detector uses a stimulable phosphor. A first axis and a second axis as two orthogonal axes, and a third axis as an axis perpendicular to the two axes as three axes;
An X-ray irradiation source for irradiating X-rays;
A X-ray diffraction measurement method using a detector that detects X-rays diffracted by irradiating the measurement object with the X-rays,
The X-ray irradiation source and the detector are connected as an integrated unit so that the relative position between them is unchanged, and the integrated unit is movable in the axial direction of the first axis. First positioning means ;
Second positioning means capable of moving the one-piece in the axial direction of the second shaft ;
A third positioning means movable in the axial direction of the single piece the third axis, but moves respectively, by the single piece is moved in the respective axial directions of the three axes, the X-ray The X-ray diffraction measurement method is characterized in that an irradiation position and a detection position of the diffracted X-ray are determined. The X-ray diffraction measurement method according to claim 6, wherein the measurement object is a fixed object.

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