JP5496370B2 - Optical fiber and laser processing apparatus including the same - Google Patents

Description

  The present invention relates to an optical fiber for propagating laser light and a laser processing apparatus including the same.

  2. Description of the Related Art Conventionally, YAG laser processing apparatuses that oscillate high-power laser light for processing metals (cutting, welding, etc.) have been widely used.

  A YAG laser processing apparatus is generally configured to perform processing by guiding laser light oscillated from a laser oscillator to an output unit with an optical fiber, and condensing it on a workpiece by an optical system provided in the output unit. ing.

As an optical fiber of this type, a core center portion made of pure quartz is covered with a core outer periphery portion formed by doping quartz with boron trifluoride (BF ₃ ), and the refractive index of the core outer periphery portion is adjusted. A technical idea has been proposed in which the refractive index is lower than the refractive index of the core center (see, for example, Japanese Utility Model Laid-Open No. 64-010707).

  By the way, it is not easy to process a workpiece (copper or the like) having a high reflectance with respect to light in the infrared region using a laser beam of a fundamental wave (wavelength near 1 [μm]) such as a YAG laser beam. Absent.

  In such processing, the surface condition of the workpiece, the performance variation of the laser oscillator itself (for example, variation in pulse interval), the shape of the optical fiber, etc. have a great influence on the processing stability.

  As a method of stably processing the workpiece, for example, an SHG (second harmonic) processing device or a hybrid laser processing device (hybrid of SHG laser light and fundamental wave) may be used. When the processing apparatus is used, it is difficult to increase the output of the laser beam. On the other hand, when the hybrid laser processing apparatus is used, there is a problem that the cost increases. Therefore, there is a demand for development of means for stably processing the workpiece using the fundamental laser beam.

  Here, taking an optical fiber as an example, the incident angle of the laser beam to the optical fiber, the incident numerical aperture (NA), and the bending degree of the optical fiber become large, or the optical fiber becomes long. As a result, the peak intensity of the laser beam decreases.

  Further, in the optical fiber described in Japanese Utility Model Laid-Open No. 64-010707, for example, even when a Gaussian laser beam is incident, the intensity of the laser beam is propagated in the optical fiber. Is averaged, so that the peak intensity decreases.

  If the peak intensity of the laser beam on the workpiece falls below the workpiece reaction threshold (the minimum intensity value at which machining can be performed), the workpiece may not be machined.

  In addition, it is possible to suppress a decrease in peak intensity by making only the center part (peak intensity and its vicinity) of the laser light incident on the optical fiber, but in this case, the outer peripheral part ( Since the portion other than the central portion is not incident on the optical fiber, the output of the laser light is reduced.

  The present invention has been made in view of such a problem, and can suppress the peak intensity from being lowered without lowering the output of the laser beam, thereby using the fundamental laser beam. An object of the present invention is to provide an optical fiber capable of stably processing a workpiece with high reflectivity and a laser processing apparatus including the optical fiber.

[1] An optical fiber according to the present invention is an optical fiber for propagating laser light, and includes a first core, a first cladding that covers the first core, and the first cladding. A second core that covers the second core; and a second cladding that covers the second core, wherein the first core and the second core are made of non-doped quartz glass, cladding and the second cladding is to have a lower refractive index than the refractive index of the undoped quartz glass, NA of the second core, the greater than the NA of the first core, the second The difference between the NA of the core and the NA of the first core is 0.03 to 0.15 . The NA here corresponds to the NA of the fiber in a normal SI fiber, and represents the maximum numerical aperture that can be confined in the core. In the present specification, the NA may be referred to as “confined NA”.

According to the optical fiber of the present invention, for example, when a Gaussian-distributed laser beam is incident on one end surface of the optical fiber, the center portion of the laser beam propagates through the first core, and the laser beam The outer peripheral portion can be propagated by the second core. Thereby, it can suppress that peak intensity falls, without reducing the output of a laser beam. Therefore, when processing a workpiece with high reflectivity using the fundamental laser beam, the peak intensity of the laser beam on the workpiece can be made higher than the reaction threshold without reducing the output of the laser beam. because that can be stably processed the workpiece. Further, since the first core and the second core are made of non-doped quartz glass, the energy loss of the laser light propagating through the first core and the second core can be suitably suppressed.

By the way, the laser light incident on the end face of the optical fiber includes a part incident on the first core (first laser light), a part incident on the first cladding (second laser light), It is divided into a portion (third laser beam) incident on the second core. Then, the third laser light may enter the second core from the first clad and further pass through the second clad and leak to the outside. According to the above optical fiber, since the NA of the second core is made larger than the NA of the first core, the second laser light can enter the second core even if it enters the second core. It is possible to suppress leakage to the outside by suitably reflecting with the cladding. Therefore, it is possible to suitably suppress the output from decreasing during the propagation of the laser beam. Further, since the difference between the NA of the second core and the NA of the first core is 0.03 to 0.15, leakage of the third laser light to the outside can be further suppressed.

[2] In the above optical fiber, the first clad and the second clad may be formed by doping quartz glass with fluorine.

  According to such a configuration, since the first clad and the second clad are formed by doping the quartz glass with fluorine, the refractive indexes of the first clad and the second clad are made non-doped. The refractive index of the quartz glass (the first core and the second core) can be suitably lowered. In addition, the durability (laser light resistance) of the first cladding and the second cladding with respect to laser light can be made substantially equal to that of non-doped quartz glass.

[ 3 ] In the above optical fiber, the refractive index of the second cladding may be lower than the refractive index of the first cladding. According to such a configuration, since the refractive index of the second cladding is lower than the refractive index of the first cladding, the NA of the second core is preferably made larger than the NA of the first core. be able to.

[ 4 ] In the above optical fiber, the thickness of the second cladding may be larger than the thickness of the first cladding.

  According to such a configuration, since the thickness of the second cladding is larger than the thickness of the first cladding, the NA of the second core is preferably made larger than the NA of the first core. be able to. Further, by reducing the thickness of the first cladding, it is possible to reduce the substantial confinement NA even if the refractive index is the same as that of the second cladding due to the tunnel effect.

[ 5 ] In the above optical fiber, the first core is formed in a circular cross section, the second core is formed in a circular cross section, and the outer diameter of the second core is the first core. It may be 1.5 to 10 times longer than the diameter.

  According to such a configuration, since the outer diameter of the second core is 1.5 to 10 times longer than the diameter of the first core, the beam diameter of the laser beam is set to the second core. It is possible to make the average intensity of the first laser beam (the peak intensity of the laser beam emitted from the optical fiber) larger than the reaction threshold of the workpiece while keeping it within the outer diameter of the workpiece.

[ 6 ] The optical fiber further includes a third core that covers the second cladding, and a third cladding that covers the third core, wherein the third core is non-doped. The third clad may be made of quartz glass, and the third cladding may have a lower refractive index than the non-doped quartz glass.

  According to such a configuration, for example, when a Gaussian-distributed laser beam is incident on one end surface of the optical fiber, the central portion of the laser beam propagates through the first core, and the outer circumferential portion of the laser beam is transmitted. Among them, a relatively high intensity portion can be propagated by the second core, and a relatively low intensity portion of the outer peripheral portion of the laser beam can be propagated by the third core. Thereby, the intensity distribution of the laser light emitted from the optical fiber can be brought close to the intensity distribution of the laser light before entering the optical fiber. Therefore, it is possible to suitably suppress the intensity reduction (quality deterioration) of the laser light propagating in the optical fiber.

[ 7 ] In the above optical fiber, a refractive index of the third cladding may be lower than a refractive index of the first cladding and a refractive index of the second cladding. According to such a structure, it can suppress suitably that the laser beam which propagates the inside of an optical fiber leaks outside.

[ 8 ] In the above optical fiber, the first core may have a single mode characteristic. According to such a configuration, the peak intensity of the laser light emitted from the optical fiber can be increased as compared with an optical fiber configured such that the first core has multimode characteristics. Thereby, the peak intensity of the laser beam can be surely made higher than the reaction threshold value of the workpiece.

[ 9 ] A laser processing apparatus according to the present invention includes a laser output unit that outputs a laser beam, an optical fiber that propagates the laser beam, and a laser emitting unit that irradiates a workpiece with the laser beam propagated by the optical fiber. The optical fiber is the optical fiber described above. According to the laser processing apparatus of the present invention, the same effect as the above-described optical fiber can be obtained.

[ 10 ] In the above laser processing apparatus, the laser processing device further includes a laser incident portion that makes the laser light output from the laser output portion incident on an end face of the optical fiber, and the laser incident portion is equal to or larger than the diameter of the first core. The laser beam may be incident on the end face of the optical fiber so as to be equal to or smaller than the outer diameter of the outermost core.

  According to such a configuration, the central portion of the laser light is incident on the first core, and the outer peripheral portion of the laser light (the portion other than the central portion and within the range of the beam diameter) is positioned on the outermost side. It can inject into a core (2nd core, 3rd core). As a result, it is possible to reliably suppress a decrease in output of the laser beam and to suppress a decrease in peak intensity.

[ 11 ] In the laser processing apparatus, the laser incident portion can change a relative position between the condensing lens that condenses the laser light on the end face of the optical fiber, and the end face of the condensing lens and the optical fiber. and Do position adjusting means may have a.

  According to such a configuration, since the relative position between the condensing lens and the end face of the optical fiber can be changed by the position adjusting means, the intensity ratio between the central portion and the outer peripheral portion of the laser light emitted from the optical fiber. (Energy balance, power balance) can be freely adjusted. Therefore, it is possible to easily obtain a laser beam having a suitable intensity distribution according to the workpiece (processing object).

  As described above, according to the present invention, for example, when a Gaussian-distributed laser beam is incident on an optical fiber, the center portion of the laser beam propagates through the first core and the outer periphery of the laser beam Since the portion can be propagated by the second core, it is possible to prevent the peak intensity from decreasing without decreasing the output of the laser beam. Therefore, when processing a highly reflective workpiece using the fundamental laser beam, the peak intensity of the laser beam on the workpiece can be made higher than the reaction threshold without reducing the laser beam output. Therefore, the workpiece can be processed stably.

  The above and other objects, features and advantages will become more apparent from the following description of the preferred embodiment in conjunction with the accompanying drawings.

FIG. 1 is a block diagram showing a main part of the laser processing apparatus according to the first embodiment. 2 is a partially omitted longitudinal sectional view of one end side of the optical fiber shown in FIG. 3 is a cross-sectional view taken along line III-III in FIG. 2 and an explanatory diagram showing the refractive index distribution of the optical fiber shown in FIG. 4A is an explanatory view showing the intensity distribution of the laser light before entering the optical fiber shown in FIG. 2, and FIG. 4B is an explanatory view showing the intensity distribution of the laser light emitted from the optical fiber. FIG. 5 is a partially omitted enlarged cross-sectional view of the optical fiber shown in FIG. FIG. 6 is an explanatory view showing a cross-sectional view of an optical fiber according to a first modification and a refractive index distribution of the optical fiber. FIG. 7 is a partially omitted longitudinal sectional view of an optical fiber according to a second modification. 8 is a cross-sectional view taken along line VIII-VIII in FIG. 7 and an explanatory diagram showing a refractive index distribution of the optical fiber shown in FIG. FIG. 9 is a partially omitted longitudinal sectional view of an optical fiber according to a third modification. 10 is a cross-sectional view taken along line XX in FIG. 9 and an explanatory diagram showing the refractive index distribution of the optical fiber shown in FIG. FIG. 11A is an explanatory diagram showing the intensity distribution of the laser beam before entering the optical fiber shown in FIG. 9, and FIG. 11B is an explanatory diagram showing the intensity distribution of the laser beam emitted from the optical fiber. FIG. 12 is an explanatory view showing a cross-sectional view of an optical fiber according to a fourth modification and a refractive index distribution of the optical fiber. FIG. 13 is an explanatory view showing a cross-sectional view of an optical fiber according to a fifth modification and a refractive index distribution of the optical fiber. FIG. 14 is a partially omitted longitudinal sectional view of an optical fiber according to a sixth modification. 15 is a cross-sectional view taken along line XV-XV in FIG. 14 and an explanatory diagram showing the refractive index distribution of the optical fiber shown in FIG. FIG. 16 is a block diagram showing a main part of the laser processing apparatus according to the second embodiment. FIG. 17 is a block diagram showing a main part of a laser processing apparatus according to the third embodiment. 18 is an enlarged partial side view of the position adjusting mechanism shown in FIG. FIG. 19 is an enlarged front view of the optical fiber holder shown in FIG. FIG. 20 is a partial cross-sectional enlarged side view showing a state in which the holder main body constituting the lens holder is moved to the one end face side of the optical fiber. FIG. 21A is an explanatory view showing the intensity distribution of the laser light before entering the optical fiber before and after the movement of the holder body constituting the lens holder, and FIG. 21B is before and after the movement of the holder body constituting the lens holder. It is explanatory drawing which showed intensity distribution of the laser beam radiate | emitted from the optical fiber. FIG. 22 is a cross-sectional explanatory diagram for explaining the shape of the melted portion when lap welding is performed with the laser beam having the intensity distribution indicated by the broken line A2 in FIG. 21B. FIG. 23 is a cross-sectional explanatory diagram for explaining the shape of the melted portion when lap welding is performed with laser light having the intensity distribution indicated by the solid line B2 (C2) in FIG. 21B. FIG. 24 is an explanatory diagram showing the intensity distribution of the laser light before entering the optical fiber before and after the movement of the holder main body constituting the optical fiber holder.

  Hereinafter, preferred embodiments of an optical fiber according to the present invention and a laser processing apparatus including the optical fiber will be exemplified and described in detail with reference to the accompanying drawings.

(First embodiment)
First, the laser processing apparatus 10A according to the first embodiment is configured as a so-called YAG laser processing apparatus, and propagates a laser beam L1 having a wavelength of 1.064 [μm] through an optical fiber 12a to work W. It is an apparatus for performing processing (cutting or welding) by irradiating with. The workpiece W can be arbitrarily selected. For example, a metal material (copper, copper alloy, gold, etc.) having a high reflectance (low absorptance) of light in the infrared region is used. .

  As shown in FIG. 1, the laser processing apparatus 10A is output from a laser output unit 14 that outputs a laser beam L1 for processing, an optical fiber 12a for propagating the laser beam L1, and the laser output unit 14. The laser beam L1 reflected in a predetermined direction, the laser beam L1 reflected by the mirror 15 is incident on one end surface of the optical fiber 12a, and is emitted from the other end surface of the optical fiber 12a. A laser emitting unit 20 that irradiates the processing target portion of the workpiece W with the laser beam L3 that has been processed, a processing table 22 that positions and holds the workpiece W, and a control unit 24 are provided.

  The laser output unit 14 includes a YAG rod 26 made of an Nd: YAG crystal, an excitation lamp 28 such as an Xe flash lamp for optically exciting the atoms of the YAG rod 26, and a power source 30 for starting the excitation lamp 28. A cooler 32 for cooling the YAG rod 26 and the excitation lamp 28, a total reflection mirror 34 disposed on one end side of the YAG rod 26, and a half disposed on the other end side of the YAG rod 26. A transmissive output mirror 36 and a pair of shutters 38, 38 disposed between the total reflection mirror 34 and the output mirror 36 with the YAG rod 26 interposed therebetween. The configuration of the optical fiber 12a will be described later.

  The laser incident part 18 has a condensing lens 42 for condensing and incident the laser light L1 on one end face of the optical fiber 12a.

  The laser emitting unit 20 collimates the laser light L3 emitted from the other end surface of the optical fiber 12a into parallel light, and the condensing lens 48 condenses the collimated laser light L3 on the processing target portion of the workpiece W. And have.

  The laser processing apparatus 10A in the present embodiment further includes a guide laser output unit 16 that outputs guide laser light L2 that is visible light so as to be coaxial with the laser light L1. As the guide laser output unit 16, for example, a He—Ne laser device, a GaAlPAs semiconductor laser device, or the like is used. Thereby, the optical path of the laser beam L1 that cannot be visually recognized by the naked eye can be easily known from the guide laser beam L2.

  As shown in FIGS. 2 and 3, the optical fiber 12a includes a first cladding 52 and a second core concentrically with respect to a first core 50 that extends on an axis Ax and is formed in a columnar shape. 54, a second cladding 56, and a thick support layer 58 are sequentially disposed.

  That is, the first cladding 52 is the outer peripheral surface of the first core 50, the second core 54 is the outer peripheral surface of the first cladding 52, the second cladding 56 is the outer peripheral surface of the second core 54, The support layer 58 covers the outer peripheral surface of the second cladding 56.

As shown in FIG. 4A, the laser light L1 before being incident on one end face of the optical fiber 12a has a substantially Gaussian distribution, and its beam diameter (beam intensity P0 at 1 / e ² level of the peak beam intensity P3). Of the first core 50 and the outer diameter d2 of the second core 54 are condensed by the condenser lens 42 of the laser incident portion 18 described above.

  In the present embodiment, the beam diameter d0 is the same as the outer diameter d2 of the second core 54. As a result, a portion of the laser beam L1 having a beam intensity equal to or higher than P2 (a central portion of the laser beam L1) enters the first core 50, and a portion having a beam intensity of less than P2 and equal to or higher than P1 is the first. A portion that enters the clad 52 and has a beam intensity less than P1 and greater than or equal to P0 enters the second core 54.

  In the following description, the portion of the laser light L1 incident on one end surface of the optical fiber 12a is incident on the first core 50 as the first laser light L1a, and the portion incident on the first cladding 52 is the second. The laser beam L1b and the portion incident on the second core 54 may be referred to as a third laser beam L1c (see FIGS. 2 and 5). For convenience of explanation, the third laser beam L1c is not shown in FIG.

  The first core 50 and the second core 54 are made of non-doped quartz glass. Thereby, the energy loss of the 1st laser beam L1a and the 3rd laser beam L1c can be suppressed suitably.

  As shown in FIGS. 2 and 3, the second core 54 is formed in an annular cross section, and the outer diameter d2 thereof is 1.5 to 10 times as large as the diameter d1 of the first core. The range is set, preferably three times as large. By setting in this way, when the beam diameter d0 of the laser beam L1 is substantially matched with the outer diameter of the second core 54, the average intensity of the first laser beam L1a is determined from the reaction threshold value PL of the workpiece W. It is because it can also be enlarged.

  The first clad 52 and the second clad 56 are formed in an annular cross section, and the thickness thereof is the same and is sufficiently smaller than the thickness of the second core 54. Thereby, the amount of the second laser beam L1b can be reduced. Therefore, the energy loss of the laser beam L1 incident on the optical fiber 12a can be suppressed.

  The first clad 52 and the second clad 56 are configured by doping quartz glass with fluorine (F). The fluorine doping amount per unit mass in the second cladding 56 is larger than the fluorine doping amount per unit mass in the first cladding 52. Therefore, the refractive index n2 of the first cladding 52 is lower than the refractive index n3 of the first core 50 and the second core 54 (non-doped quartz glass), and the refractive index n1 of the second cladding 56 is the first. As a result, the confinement NA of the second core 54 becomes larger than the confinement NA of the first core 50.

  As a result, as shown in FIG. 5, when the second laser light L1b incident on the first clad 52 enters the second core 54, it is reliably reflected by the second clad 56. it can. Therefore, it is possible to prevent the second laser light L1b from passing through the second cladding 56 (see the broken line arrow L0 in FIG. 5) and leaking outside.

  The amount of fluorine doped in the first cladding 52 and the amount of fluorine doped in the second cladding 56 can be arbitrarily set. For example, the confinement NA of the second core 54 and the first core 50 It is preferable to set the difference from the confined NA of 0.03 to 0.15. In this case, leakage of the second laser light L1b to the outside can be further suppressed.

The first clad 52 and the second clad 56 may be formed by doping quartz glass with boron trifluoride (BF ₃ ) or boron oxide (B ₂ O ₃ ). Even with such a configuration, the refractive index n2 of the first cladding 52 and the refractive index n3 of the second cladding 56 can be made lower than the refractive index n1 of non-doped quartz glass.

  The support layer 58 is made of non-doped quartz glass and has an annular cross section. The thickness of the support layer 58 can be changed as appropriate according to the size of the connector connected to the laser incident portion 18 and the laser emitting portion 20. The refractive index n3 of the support layer 58 is the same as the refractive index n3 of the first core 50 and the second core 54.

  The control unit 24 includes a first control unit 60 that controls the drive of the power source 30 of the laser output unit 14 and a second control unit 62 that controls the drive of the guide laser output unit 16. The control unit 24 opens and closes the shutters 38 and 38 and controls the cooler 32.

  In the laser processing apparatus 10A configured as described above, first, the control unit 24 opens the shutters 38 and 38, and then the second control unit 62 drives the guide laser output unit 16 to generate the guide laser light L2. The position of the mirror 15, the laser incident part 18, the optical fiber 12a, the laser emitting part 20, and the processing table 22 is adjusted. When the position adjustment is completed, the second control unit 62 stops driving the guide laser output unit 16.

  Subsequently, the first controller 60 drives the power supply 30 to flash the excitation lamp 28. As a result, the laser active medium in the YAG rod 26 is excited, and light having an inverted distribution is emitted. The light with the inverted distribution is resonantly amplified between the total reflection mirror 34 and the output mirror 36, and the amplified light is transmitted through the output mirror 36 and output as the laser light L1. At this time, the first controller 60 cools the YAG rod 26 and the excitation lamp 28 by driving the cooler 32.

  The laser beam L1 output from the laser output unit 14 is reflected by the mirror 15 and guided to the laser incident unit 18, and is collected on one end surface of the optical fiber 12a by the condensing lens 42. Specifically, the laser light L1 is incident on one end surface of the optical fiber 12a so that the optical axis thereof substantially coincides with the axis Ax of the optical fiber 12a (first core 50).

  Then, the laser beam L1 includes the first laser beam L1a incident on the first core 50, the second laser beam L1b incident on the first cladding 52, and the third laser beam incident on the second core 54. It will be divided into L1c. That is, the first laser light L1a propagates in the first core 50, and the second laser light L1b and the third laser light L1c propagate in the second core 54. And the 1st-3rd laser beams L1a-L1c radiate | emitted from the optical fiber 12a are synthesize | combined and become the laser beam L3. As shown in FIG. 4B, in this laser beam L3, the average intensity of the first laser beam L1a appears as the peak beam intensity P5, and the average intensity of the second laser beam L1b and the third laser beam L1c appears as the beam intensity P4. As a result, the peak intensity P5 of the laser beam L3 is sufficiently higher than the workpiece reaction threshold PL.

  Thereafter, the laser beam L3 is collimated by the collimator lens 46 and then condensed by the condenser lens 48 on the processing target portion of the workpiece W. Thereby, the laser central portion having the beam intensity P5 becomes an opportunity for the processing of the processing target portion of the workpiece W, and the processing can be advanced (expanded) at the laser outer peripheral portion having the beam intensity P4. Therefore, the workpiece W having high reflectivity can be stably processed using the laser beam L1 having a wavelength of 1.064 [μm].

(First modification)
Next, an optical fiber 12b according to a first modification of the above-described optical fiber 12a will be described with reference to FIG. In this modification, the same components as those of the above embodiment are denoted by the same reference numerals, and detailed description thereof is omitted. The same applies to second and third modified examples described later.

  As shown in FIG. 6, in the optical fiber 12b according to this modification, a second cladding 64 is used in place of the second cladding 56 and the support layer 58 constituting the optical fiber 12a. That is, in the present modification, the support layer 58 of the optical fiber 12 a is omitted, and the thickness of the second cladding 64 is made larger than the thickness of the second cladding 56.

  The fluorine doping amount per unit mass in the second cladding 64 is the same as the fluorine doping amount per unit mass in the second cladding 56, and the fluorine doping amount per unit mass in the first cladding 52. Is set more than. In this case, the refractive index of the second cladding 64 is n1. According to the optical fiber 12b of this modification, the same effect as the above-described optical fiber 12a can be obtained.

(Second modification)
Next, an optical fiber 12c according to a second modification will be described with reference to FIGS.

  As shown in FIGS. 7 and 8, in the optical fiber 12c according to this modification, a second cladding 66 is used instead of the second cladding 56 constituting the optical fiber 12a. Specifically, the thickness of the second clad 66 is larger than the thickness of the first clad 52. The fluorine doping amount per unit mass in the second cladding 66 is set to be the same as the fluorine doping amount per unit mass in the first cladding 52. In this case, the refractive index n2 of the second cladding 66 is the same as the refractive index n2 of the first cladding 52.

  As in the case of the optical fiber 12a described above, the fluorine doping amount per unit mass in the second cladding 66 may be larger than the fluorine doping amount per unit mass in the first cladding 52. Of course.

  According to the optical fiber 12c according to the present modification, the thickness of the second clad 66 is larger than the thickness of the first clad 52, so that the confinement NA of the second core 54 is the same as that of the first core 50. It can be larger than the confinement NA. Thereby, the same effect as the optical fiber 12a mentioned above can be produced.

  The difference between the thickness of the first clad 52 and the thickness of the second clad 66 can be arbitrarily set. For example, the confinement NA of the second core 54 and the confinement NA of the first core 50 can be set. It is good to set so that the difference with 0.03 to 0.15. In this case, leakage of the second laser light L1b to the outside can be further suppressed.

  In the present modification, the support layer 58 may be omitted and the thickness of the second cladding 66 may be increased by the thickness of the support layer 58, as in the optical fiber 12b according to the first modification described above. Even in this case, the same effect is obtained.

(Third Modification)
Next, an optical fiber 12d according to a third modification will be described with reference to FIGS. As shown in FIGS. 9 and 10, in the optical fiber 12 d according to this modification, the third core 68 that covers the outer peripheral surface of the second cladding 56 and the first core that covers the outer peripheral surface of the third core 68. 3 claddings 70 are provided.

  That is, the optical fiber 12d includes a first clad 52, a second core 54, a second clad 56, a third core 68, a third clad 70, and a support concentrically with respect to the first core 50. Layers 58 are formed in sequence. The support layer 58 covers the outer peripheral surface of the third clad 70.

As shown in FIG. 11A, the laser light L1 before entering the one end face of the optical fiber 12d has a substantially Gaussian distribution, and its beam diameter (the beam intensity P0 at 1 / e ² level of the peak beam intensity P3). The width d0 of the laser beam is condensed by the condensing lens 42 of the laser incident portion 18 to a diameter d1 or more of the first core 50 and a diameter d3 or less of the third core 68. In this modification, the beam diameter d0 is the same as the outer diameter d3 of the third core 68.

  As a result, a portion of the laser beam L1 having a beam intensity equal to or higher than P2 (a central portion of the laser beam L1) enters the first core 50, and a portion having a beam intensity of less than P2 and equal to or higher than P1 is the first. A portion having a beam intensity less than P1 and greater than or equal to Pb is incident on the second core 54, and a portion having a beam intensity less than Pb and greater than or equal to Pa is incident on the second cladding 56. A portion having a beam intensity less than Pa and greater than or equal to P0 is incident on the third core 68.

  In the following description, the portion of the laser light L1 incident on one end face of the optical fiber 12d is incident on the second cladding 56 as the fourth laser light L1d, and the portion incident on the third core 68 is the fifth. Sometimes referred to as laser light L1e.

  The third core 68 has an annular cross section, and its outer diameter d3 is in the range of 1.5 to 10 times, preferably 3 times, the diameter d1 of the first core. Is set. By setting in this way, when the beam diameter d0 of the laser light L1 is substantially matched with the outer diameter of the third core 68, the average intensity of the first laser light L1a is determined from the reaction threshold PL of the workpiece W. It is because it can also be enlarged.

  Similar to the first core 50 and the second core 54, the third core 68 is made of non-doped quartz glass. Thereby, the energy loss of the 5th laser beam L1e can be suppressed suitably.

  The third clad 70 is formed in an annular cross section, and the thickness thereof is the same as the thickness of the first clad 52 and the second clad 56. The third cladding 70 is configured by doping quartz glass with fluorine. The fluorine doping amount per unit mass in the third cladding 70 is larger than the fluorine doping amount per unit mass in the second cladding 56. Therefore, the refractive index n0 of the third cladding 70 is lower than the refractive index n1 of the second cladding 56, and as a result, the confinement NA of the third core 68 is larger than the confinement NA of the second core 54. .

  As a result, the fourth laser light L 1 d incident on the second cladding 56 can be reliably reflected by the third cladding 70 when entering the third core 68. Therefore, it is possible to suppress the fourth laser light L1d from passing through the third cladding 70 and leaking outside.

  The amount of fluorine doped in the second cladding 56 and the amount of fluorine doped in the third cladding 70 can be arbitrarily set. For example, the confinement NA of the third core 68 and the second core 54 It is preferable to set the difference from the confined NA of 0.03 to 0.15. In this case, the leakage of the fourth laser beam L1d to the outside can be further suppressed.

The third clad 70 may be formed by doping quartz glass with boron trifluoride (BF ₃ ) or boron oxide (B ₂ O ₃ ). Even with such a configuration, the refractive index n0 of the third cladding 70 can be made lower than the refractive index n1 of the non-doped quartz glass.

  According to this modification, the laser beam L1 is incident on the first laser beam L1a incident on the first core 50, the second laser beam L1b incident on the first cladding 52, and the second core 54. The laser beam is divided into a third laser beam L1c, a fourth laser beam L1d incident on the second cladding 56, and a fifth laser beam L1e incident on the third core 68.

  That is, the first laser light L1a propagates in the first core 50, the second laser light L1b and the third laser light L1c propagate in the second core 54, and the fourth laser light L1d and the fifth laser light. L1e propagates through the third core 68. Then, the first to fifth laser beams L1a to L1e emitted from the optical fiber 12d are combined into a laser beam L3.

  As shown in FIG. 11B, in the laser beam L3, the average intensity of the first laser beam L1a appears as the peak beam intensity P5, the average intensity of the second laser beam L1b and the third laser beam L1c appears as the beam intensity P4, The average intensity of the fourth laser beam L1d and the fifth laser beam L1e appears as the beam intensity Pc.

  Therefore, the intensity distribution (see FIG. 11B) of the laser beam L3 obtained by propagating through the optical fiber 12d of this modification is the intensity distribution (see FIG. 11B) of the laser beam L3 obtained by propagating through the optical fiber 12a. Compared with the intensity distribution of the laser beam L1 as compared with FIG. In other words, by using the optical fiber 12d of this modification, it is possible to suitably suppress a decrease in intensity (quality deterioration) of the laser light L1 propagating through the optical fiber 12d.

(Fourth modification)
Next, an optical fiber 12e according to a fourth modification will be described with reference to FIG. In this modification, the same components as those in the third modification are denoted by the same reference numerals, and detailed description thereof is omitted. The same applies to fifth and sixth modifications described later.

  As shown in FIG. 12, in the optical fiber 12e according to this modification, a second cladding 72 is used instead of the second cladding 56 constituting the optical fiber 12d according to the third modification. The second cladding 72 has the same fluorine doping amount per unit mass as the fluorine doping amount per unit mass in the first cladding 52, and the other configuration is the same as that of the second cladding 56. It is the same. As a result, the refractive index of the second cladding 72 is n2 which is the same as the refractive index of the first cladding 52.

  In this modification, since the refractive index n0 of the third cladding 70 is lower than the refractive indexes n2 of the first cladding 52 and the second cladding 72, the first to fifth laser beams L1a to L1e are the third ones. It is possible to suitably suppress leakage through the clad 70. According to the optical fiber 12e according to this modification, the same effect as the above-described optical fiber 12d can be obtained.

(5th modification)
Next, an optical fiber 12f according to a fifth modification will be described with reference to FIG. As shown in FIG. 13, in the optical fiber 12f according to this modification, a third cladding 74 is used in place of the third cladding 70 and the support layer 58, as compared with the optical fiber 12d according to the third modification. . That is, in the present modification, the support layer 58 of the optical fiber 12 d is omitted, and the thickness of the third cladding 74 is made larger than the thickness of the third cladding 70.

  The amount of fluorine doped per unit mass in the third cladding 74 is the same as the amount of fluorine doped per unit mass in the third cladding 70, and the amount of fluorine doped per unit mass in the second cladding 56. Is set more than. According to this modification, the optical fiber 12f can achieve the same effects as the optical fiber 12d described above.

(Sixth Modification)
Next, an optical fiber 12g according to a sixth modification will be described with reference to FIGS. As shown in FIGS. 14 and 15, the optical fiber 12g according to this modification example uses a second cladding 66 instead of the second cladding 56, as compared with the optical fiber 12d according to the third modification example. Instead of the third clad 70, a third clad 78 is used.

  The thickness of the second cladding 66 is formed larger than the thickness of the first cladding 52, and the thickness of the third cladding 78 is formed larger than the thickness of the second cladding 66. The amount of fluorine doped per unit mass in each of the clads 52, 66, and 78 is set to be the same. In this case, the refractive indexes of the clads 52, 66, 78 are the same at n2.

  According to the optical fiber 12g according to this modification, the thickness of the second cladding 66 is made larger than the thickness of the first cladding 52, and the thickness of the third cladding 78 is made larger than the thickness of the second cladding 66. Therefore, the confinement NA of the second core 54 is made larger than the confinement NA of the first core 50, and the confinement NA of the third core 68 is made larger than the confinement NA of the second core 54. be able to. According to the optical fiber 12g according to this modification, the same effects as those of the above-described optical fiber 12d can be obtained.

  Needless to say, the fluorine doping amount per unit mass in the third cladding 78 may be larger than the fluorine doping amount per unit mass in the second cladding 66.

  The present embodiment is not limited to the configuration described above. For example, the YAG rod 26 may be excited using a laser diode (LD) instead of the excitation lamp 28. The laser processing apparatus 10A according to the present embodiment may be configured as a pulse YAG laser welder.

  Furthermore, the optical fibers 12a to 12g described above may be configured such that the first core 50 has a single mode characteristic. Such optical fibers 12a to 12g can be obtained, for example, by forming the diameter of the first core 50 to a size of 8 to 10 [μm].

  Thereby, the peak intensity P5 of the laser light L3 can be increased as compared with the optical fiber configured such that the first core 50 has multimode characteristics. Thereby, the peak intensity P5 of the laser beam L3 can be surely made higher than the reaction threshold value PL of the workpiece.

  The cross-sectional shape of the first core 50 may be a cross-sectional polygonal shape, a cross-sectional elliptical shape, or the like. The cross sections of the first clad 52, the second core 54, the second clad 56, 64, 66, 72, the third core 68, the third clad 70, 74, 78, and the support layer 58, respectively. The shape may be a polygonal cross section, an elliptical cross section, or the like.

(Second Embodiment)
Next, a laser processing apparatus 10B according to a second embodiment of the present invention will be described with reference to FIG. In this embodiment, the same components as those of the first embodiment are denoted by the same reference numerals, and detailed description thereof is omitted. The same applies to a third embodiment to be described later.

  As shown in FIG. 16, the laser processing apparatus 10 </ b> B is configured as a so-called fiber laser processing apparatus. The laser output unit 100 is used instead of the laser output unit 14, and the control unit 102 is replaced with the control unit 24. Used, the guide laser output unit 16 is omitted.

  The laser output unit 100 outputs a fiber laser beam FB1 having a wavelength of 1.064 [μm]. The laser output unit 100 is driven to emit light by the power source 104 and the excitation current from the power source 104 and outputs the excitation light MB. A laser diode (LD) 106, an oscillation optical fiber (active fiber) 108 that oscillates the fiber laser light FB1 by the propagation of the pumping light MB, and a pair of optically opposed via the active fiber 108 Optical resonator mirrors 110 and 112, an optical lens 114 disposed between one end face of the active fiber 108 and the optical resonator mirror 110, and the other end face of the active fiber 108 and the optical resonator mirror 112. And an optical lens 116 disposed therein.

  Although not shown in detail, the active fiber 108 has a core doped with a predetermined light-emitting element and a clad surrounding the core coaxially. The core is used as an active medium, and the clad is used as the excitation light MB. The propagation optical path.

  The pair of optical resonator mirrors 110 and 112 resonate and amplify the energy of the fiber laser beam FB1 oscillated from the active fiber 108. The optical resonator mirror 110 transmits the excitation light MB from the LD 106 from the back side of the reflection surface, and totally reflects the fiber laser light FB1 guided from one end surface of the active fiber 108 along the optical axis. The optical resonator mirror 112 partially reflects the fiber laser FB1 guided from the other end face of the active fiber 108 along its optical axis, and transmits part of the fiber laser light FB1.

  The optical lens 114 condenses the excitation light MB from the fiber laser light FB1 and LD 106 reflected by the optical resonator mirror 110 on one end surface of the active fiber 108, and is guided from one end surface of the active fiber 108. The parallel fiber laser beam FB1 is collimated. The optical lens 116 condenses the fiber laser beam FB1 reflected by the optical resonator mirror 112 on the other end surface of the active fiber 108, while paralleling the fiber laser beam FB guided from the other end surface of the active fiber 108. Turn into. The control unit 102 controls driving of the power source 104.

  In the present embodiment, when the control unit 102 drives and controls the power supply 104 and the excitation current is supplied from the power supply 104 to the LD 106, the excitation light MB is oscillated from the LD 106, and the oscillated excitation light MB is converted into an optical resonator. The light passes through the mirror 110 and is focused and incident on one end face of the active fiber 108 by the optical lens 114. The excitation light MB incident on one end face of the active fiber 108 propagates in the clad while traversing the core of the active fiber 108 a plurality of times, and excites the light emitting element in the core. Thus, the fiber laser beam FB1 is emitted from the active fiber 108, and after being resonantly amplified by the pair of optical resonator mirrors 110 and 112, is transmitted through the optical resonator mirror 112 and guided to the mirror 15.

  As in the first embodiment, the fiber laser beam FB1 emitted from the laser output unit 100 is reflected by the mirror 15 and then is transmitted through the condensing lens 42 of the laser incident unit 18 to the propagation optical fiber 12a. It is focused and incident on the end face. The generally Gaussian distribution fiber laser beam FB1 that is focused and incident on the optical fiber 12a is propagated separately to the first core 50 and the second core 54 of the optical fiber 12a. Thereby, the fiber laser beam FB2 having a peak intensity sufficiently higher than the reaction threshold PL of the workpiece W is emitted from the other end face of the optical fiber 12a without reducing the output of the fiber laser beam FB1, and the laser emitting unit 20 Then, the light is condensed on the processing target portion of the workpiece W. Thereby, the workpiece | work W with a high reflectance with respect to the light of an infrared region can be processed stably using the fiber laser beam FB2 which has a wavelength of 1.064 [micrometer].

  Thus, the laser processing apparatus 10B according to the present embodiment also has the same effects as the laser processing apparatus 10A according to the first embodiment described above.

  The present embodiment is not limited to the configuration described above. For example, the laser processing apparatus 10B according to the present embodiment may be configured as a laser processing apparatus (laser welding machine) including the active fiber 108 having multimode characteristics.

In the present embodiment, optical fibers 12b to 12g may be used instead of the optical fiber 12a. And each optical fiber 12a-12g may be comprised so that the 1st core 50 may have a single mode characteristic. Such optical fibers 12a to 12g can be obtained, for example, by forming the diameter of the first core 50 to a size of 8 to 10 μm. In this case, the laser output unit 100 may be configured such that the quality of the fiber laser beam FB1 is M ² = 2.

  Thereby, the peak intensity P5 of the laser light L3 can be increased as compared with the optical fiber configured such that the first core 50 has multimode characteristics. Thereby, the peak intensity P5 of the laser beam L3 can be surely made higher than the reaction threshold value PL of the workpiece W.

  Further, in the present embodiment, the pumping light MB emitted from the LD 106 is incident on the active fiber 108, and the fiber laser light FB1 amplified by the optical resonator mirrors 110 and 112 is incident on the optical fiber 12a. On the other hand, the configuration in which the excitation light MB emitted from the LD 106 is directly incident on the optical fiber 12a (12b to 12g) without using the active fiber 108, the optical resonator mirrors 110 and 112, etc. (so-called LD direct). Processing device).

(Third embodiment)
Next, a laser processing apparatus 10C according to a third embodiment of the present invention will be described with reference to FIGS. As shown in FIG. 17, the laser processing apparatus 10 </ b> C according to the present embodiment is configured as a YAG laser welder, and a laser incident unit 200 is provided instead of the laser incident unit 18.

  The laser incident part 200 includes a position adjusting mechanism 201 that adjusts the relative position between the condenser lens 42 and one end face of the optical fiber 12a. The position adjustment mechanism 201 includes a lens holder 202 for supporting the condensing lens 42 and an optical fiber holder 204 for supporting one end side (side closer to the condensing lens 42) of the optical fiber 12a.

  As shown in FIG. 18, the lens holder 202 includes a holder main body 206 that holds the condenser lens 42, a support portion 208 that supports the holder main body 206 movably along the optical axis direction of the laser light L <b> 1, A position adjusting screw 210 provided on the support portion 208 for moving the holder main body 206 along the optical axis direction of the laser beam L1 and a rod 212 fixed to the support portion 208 are provided.

  As shown in FIG. 19, the optical fiber holder 204 includes a holder main body 214 that holds one end of the optical fiber 12a, and a direction in which the holder main body 214 is orthogonal to the optical axis of the laser light L1 (the center axis Ax of the optical fiber 12a). A support portion 216 that is movably supported along a direction orthogonal to the position), and a position adjusting screw that is provided on the support portion 216 and moves the holder body 214 along a direction orthogonal to the optical axis of the laser beam L1. 218 and 220, and a rod 222 fixed to the support portion 216.

  According to the optical fiber holder 204 configured as described above, the holder main body 214 can be moved relative to the support portion 216 along the extending direction of the rod 222 by turning the position adjusting screw 218, thereby adjusting the position. By rotating the screw 220, the holder main body 214 can be moved relative to the support portion 216 along a direction orthogonal to the extending direction of the rod 222.

  In the present embodiment, the holder main body 206 can be moved along the optical axis of the laser light L1 by turning the position adjusting screw 210 of the lens holder 202, so that one end surface (incident side end surface) of the optical fiber 12a and The distance to the condenser lens 42 (the focal position of the laser beam L1) can be changed.

  Specifically, for example, the intensity distribution of the laser light L1 before entering the optical fiber 12a in a state where the holder main body 206 is disposed at the position shown in FIG. 18 is as indicated by a two-dot chain line A1 shown in FIG. 21A. . The intensity distribution of the laser light L3 emitted from the optical fiber 12a is as indicated by a two-dot chain line A2 shown in FIG. 21B.

  That is, the laser beam L3 has a relatively high peak intensity at the center and a relatively low intensity at the outer periphery. Such laser light L3 has a relatively deep penetration into the workpiece W and the width (diameter) of the melted portion 300 is narrowed. For example, lap welding of the thick plates 302 and 304 can be suitably performed ( (See FIG. 22).

  On the other hand, for example, when the position adjusting screw 210 of the lens holder 202 is turned to move the holder main body 206 to one end face side of the optical fiber 12a (see FIG. 20), the intensity distribution of the laser light L1 before entering the optical fiber 12a is As shown by a solid line B1 in FIG. 21A. As a result, the amount of energy of the laser beam L1 incident on the first core 50 decreases and the amount of energy of the laser beam L1 incident on the second core 54 increases. Therefore, the intensity distribution of the laser light L3 emitted from the optical fiber 12a is as shown by a solid line B2 in FIG. 21B.

  That is, the laser beam L3 has a relatively low peak intensity at the center and a relatively high intensity at the outer periphery. Such laser light L3 has a relatively shallow penetration into the workpiece W and the width (diameter) of the melted portion 306 is widened. For example, lap welding of the thin plates 308 and 310 can be suitably performed (FIG. 23).

  Thus, in the present embodiment, the focal position of the condenser lens 42 can be changed by turning the position adjusting screw 210 of the lens holder 202 and moving the holder body 206 along the optical axis direction of the laser light L1. Therefore, the intensity ratio (energy balance, power balance) between the central portion and the outer peripheral portion of the laser light L3 emitted from the optical fiber 12a can be freely adjusted. Thereby, the laser beam L3 having a suitable intensity distribution can be easily obtained according to the welding conditions (processing conditions) such as the plate thickness of the workpiece W.

  Further, for example, when the position adjusting screw 220 of the optical fiber holder 204 is turned to move the holder main body 214 in a direction perpendicular to the optical axis of the laser light L1 (direction perpendicular to the extending direction of the rod 222), the optical fiber 12a The intensity distribution of the laser beam L1 before entering is as shown by a solid line C1 in FIG. As a result, the amount of energy of the laser beam L1 incident on the first core 50 decreases and the amount of energy of the laser beam L1 incident on the second core 54 increases. Therefore, the intensity distribution of the laser light L3 emitted from the optical fiber 12a is as shown by a solid line C2 in FIG. 21B.

  Thus, even when the holder main body 214 of the optical fiber holder 204 is moved without moving the holder main body 206 of the lens holder 202, the intensity ratio (energy balance, power of the center portion and the outer peripheral portion of the laser light L3). (Balance) can be adjusted freely. Thereby, the laser beam L3 having a suitable intensity distribution can be easily obtained according to the welding conditions (processing conditions) such as the plate thickness of the workpiece W.

  The present embodiment is not limited to the configuration described above. For example, the position adjustment mechanism 201 may be configured such that the holder main body 206 of the lens holder 202 is immovable or the holder main body 214 of the optical fiber holder 204 is immovable.

  The lens holder 202 may be configured such that the holder main body 206 can be moved in a direction orthogonal to the optical axis of the laser light L1, and the optical fiber holder 204 has the holder main body 214 as the optical axis of the laser light L1. You may comprise so that it can move along. Further, the mechanism for moving the holder main bodies 206 and 214 may use a motor or the like. In short, the position adjustment mechanism 201 may be configured in any way as long as the relative position between the condenser lens 42 and the one end face of the optical fiber 12a can be changed.

  Further, for example, the laser processing apparatus 10C according to the present embodiment can use the optical fibers 12b to 12g described above instead of the optical fiber 12a.

  Furthermore, the laser processing apparatus 10C according to the present embodiment may be used for welding a foil material (aluminum foil, copper foil, etc.) that constitutes an electrode of a lithium ion battery. In this case, by adjusting the relative position between the condenser lens 42 and one end face of the optical fiber 12a (12b to 12g), the peak intensity of the laser light L3 emitted from the optical fiber 12a (12b to 12g) is lowered. The foil material can be suitably prevented from being damaged by the laser beam L3. Further, it is possible to suppress the displacement of the foil material when the foil material is irradiated with the laser light L3.

  The present invention is not limited to the embodiment described above, and it is naturally possible to adopt various configurations without departing from the gist of the present invention. For example, the optical fiber according to the present invention may be configured by arranging a plurality of cores and clads alternately in a concentric manner (for example, four or more layers). In this case, the intensity distribution of the laser light emitted from the optical fiber can be made closer to the intensity distribution of the laser light before entering the optical fiber. Thereby, deterioration of the quality of the laser beam by an optical fiber can be suppressed suitably.

  In this case, it is preferable to set the refractive index of the outermost clad to be smaller than the refractive indexes of the other clads. Thereby, the confinement NA of the outermost core can be made equal to or greater than the confinement NA of other cores, and as a result, leakage of laser light incident on the optical fiber to the outside can be suitably suppressed. It is.

  The laser processing device according to the present invention may be applied to a welding device (copper ribbon wire bonding device) for welding copper ribbon wires. In this case, a high reflectance copper ribbon wire can be stably welded using the laser beam L1 having a wavelength of 1.064 [μm].

Claims (11)

An optical fiber for propagating laser light,
A first core (50);
A first cladding (52) covering the first core (50);
A second core (54) covering the first cladding (52);
A second cladding (56, 64, 66, 72) covering the second core (54),
The first core (50) and the second core (54) are made of non-doped quartz glass,
It said first cladding (52) and said second cladding (56,64,66,72) is to have a lower refractive index than the refractive index of the undoped quartz glass,
The NA of the second core (54) is larger than the NA of the first core (50), and the difference between the NA of the second core (54) and the NA of the first core (50) Is 0.03 to 0.15 . The optical fiber of claim 1.
An optical fiber, wherein the first cladding (52) and the second cladding (56, 64, 66, 72) are formed by doping fluorine into quartz glass. The optical fiber of claim 1 .
An optical fiber, wherein a refractive index of the second cladding (56, 64) is lower than a refractive index of the first cladding (52). The optical fiber of claim 1 .
An optical fiber, wherein the thickness of the second cladding (64, 66) is larger than the thickness of the first cladding (52). The optical fiber of claim 1.
The first core (50) is formed in a circular cross-section;
The second core (54) is formed in an annular cross section;
An optical fiber, wherein an outer diameter of the second core (54) is 1.5 to 10 times as long as a diameter of the first core (50). The optical fiber of claim 1.
A third core (68) covering the second cladding (56, 64, 66, 72);
A third cladding (70, 74, 78) covering the third core (68),
The third core (68) is made of non-doped quartz glass,
The optical fiber, wherein the third cladding (70, 74, 78) has a lower refractive index than the non-doped quartz glass. The optical fiber according to claim 6 , wherein
The refractive index of the third cladding (70, 74) is lower than the refractive index of the first cladding (52) and the refractive index of the second cladding (56, 64, 66, 72). And optical fiber. The optical fiber according to any one of claims 1 to 7 ,
The optical fiber, wherein the first core ( 50 ) has single mode characteristics. A laser output section (14, 100) for outputting laser light;
An optical fiber that propagates the laser light;
A laser emitting section (20) for irradiating the workpiece (W) with the laser light propagated by the optical fiber,
The optical fiber laser processing apparatus, characterized in that an optical fiber according (12a to 12g) to any one of claims 1-8. The laser processing apparatus according to claim 9 , wherein
A laser incident part (18, 200) for making the laser light output from the laser output part (14, 100) incident on the end face of the optical fiber (12a-12g);
The laser incident part (18, 200) emits the laser light so that the beam diameter of the laser light is not less than the diameter of the first core (50) and not more than the outer diameter of the outermost core. A laser processing apparatus characterized by being incident on an end face of the optical fiber (12a to 12g). The laser processing apparatus according to claim 9 , wherein
The laser incident part (200) includes a condensing lens (42) for condensing laser light on an end face of the optical fiber (12a to 12g),
Laser processing apparatus characterized by having a relative position changeable position adjustment means (201) between the end surface of the condenser lens (42) and said optical fiber (12a to 12g).

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