JP5496072B2 - Semiconductor light emitting device and manufacturing method thereof - Google Patents

Semiconductor light emitting device and manufacturing method thereof Download PDF

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JP5496072B2
JP5496072B2 JP2010274437A JP2010274437A JP5496072B2 JP 5496072 B2 JP5496072 B2 JP 5496072B2 JP 2010274437 A JP2010274437 A JP 2010274437A JP 2010274437 A JP2010274437 A JP 2010274437A JP 5496072 B2 JP5496072 B2 JP 5496072B2
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semiconductor light
white
light emitting
layer
plating
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JP2012124358A (en
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健二 今津
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Citizen Holdings Co Ltd
Citizen Electronics Co Ltd
Citizen Watch Co Ltd
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/93Batch processes
    • H01L24/95Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
    • H01L24/97Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips the devices being connected to a common substrate, e.g. interposer, said common substrate being separable into individual assemblies after connecting
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10Bump connectors; Manufacturing methods related thereto
    • H01L2224/15Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • H01L2224/161Disposition
    • H01L2224/16151Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/16221Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/16225Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/181Encapsulation

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  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Led Device Packages (AREA)

Description

回路基板と反射部材と半導体発光素子を備え、その回路基板上に反射部材を配置し半導体発光素子をフリップチップ実装した半導体発光装置及びその製造方法に関する。   The present invention relates to a semiconductor light emitting device that includes a circuit board, a reflecting member, and a semiconductor light emitting element, arranges the reflecting member on the circuit board, and flip-chip mounts the semiconductor light emitting element, and a manufacturing method thereof.

半導体発光素子(以後とくに断らない限りLED素子と呼ぶ)を回路基板に実装しパッケージ化した半導体発光装置(以後とくに断らない限りLED装置と呼ぶ)のなかで、発光効率を改善するため回路基板表面に白色の反射部材を備えたLED装置が知られている。   In a semiconductor light emitting device (hereinafter referred to as an LED device unless otherwise specified) in which a semiconductor light emitting element (hereinafter referred to as an LED device) is packaged and packaged on a circuit board, the surface of the circuit board is improved in order to improve luminous efficiency. An LED device having a white reflecting member is known.

例えば特許文献1の図22には基板1(回路基板)上に白色レジスト層6(反射部材)を備え、発光ダイオードのチップ4(LED素子)がフリップチップ実装された光源装置29(LED装置)が示されている。なおフリップチップ実装は実装面積が小さく放熱特性が良好であるという特徴がある。   For example, in FIG. 22 of Patent Document 1, a light source device 29 (LED device) including a white resist layer 6 (reflecting member) on a substrate 1 (circuit board) and flip-chip mounting a light-emitting diode chip 4 (LED element). It is shown. Note that flip-chip mounting is characterized by a small mounting area and good heat dissipation characteristics.

この図22を図5に再掲示し、さらに詳しく説明する。図5はこの従来のLED装置の断面図(A)と平面図(B)である。基板1上には一対の電極2,3が形成されている。発光ダイオードのチップ4はバンプ9を介して電極2,3にフリップチップ実装され、ドーム状の透明樹脂7に封止されている。電極2,3の大部分は白色レジスト層6で覆われ、白色レジスト層6の開口部の内壁6Aがチップ4の下に入り込んでいる。白色レジスト層6の上面のうち透明樹脂7で覆われていない領域は白色マーク材8で覆われている。   This FIG. 22 is shown again in FIG. 5 and will be described in more detail. FIG. 5 is a cross-sectional view (A) and a plan view (B) of this conventional LED device. A pair of electrodes 2 and 3 are formed on the substrate 1. The LED chip 4 is flip-chip mounted on the electrodes 2 and 3 via bumps 9 and sealed with a dome-shaped transparent resin 7. Most of the electrodes 2 and 3 are covered with the white resist layer 6, and the inner wall 6 A of the opening of the white resist layer 6 enters under the chip 4. A region of the upper surface of the white resist layer 6 that is not covered with the transparent resin 7 is covered with the white mark material 8.

一般的にLED装置はLED素子からの発光を効率良く取り出すよう様々な手段が盛り込まれている。図5のLED装置におけるひとつの手段は、白色レジスト層6を厚くして反射率を向上させることである。しかしながら単純に白色レジスト層6を厚くすると様々な問題が生じる。例えば、白色レジスト層6の下部まで露光光が届きにくくなり白色レジスト層6が硬化しにくくなる。そこで特許文献1の図3には2層の白色レジスト層61,62を備えた光源装置12が示されている。特許文献1の図3の説明には、2層のレジスト層61,62により厚い白色レジスト層6が得られたとともに、各レジスト層61,62を早く硬化させることができた、と記載されている。   Generally, various means are incorporated in an LED device so as to efficiently extract light emitted from the LED element. One means in the LED device of FIG. 5 is to increase the reflectance by increasing the thickness of the white resist layer 6. However, simply increasing the thickness of the white resist layer 6 causes various problems. For example, the exposure light does not easily reach the lower part of the white resist layer 6 and the white resist layer 6 is hard to be cured. Therefore, FIG. 3 of Patent Document 1 shows a light source device 12 including two white resist layers 61 and 62. In the description of FIG. 3 of Patent Document 1, it is described that the thick white resist layer 6 was obtained by the two resist layers 61 and 62 and that the resist layers 61 and 62 could be cured quickly. Yes.

特開2007−243226号公報 (図22、図3)JP 2007-243226 A (FIGS. 22 and 3)

図5に示した特許文献1のLED装置(光源装置29)は、白色レジスト層6がチップ4と平面的に重り電極2,3を隠蔽しているため、電極2,3による反射ロスや色度シフトがないという特徴がある。しかしながら特許文献1において光源装置29の製造に係わる説明のなかには、チップ4の実装方法の説明があるだけで電極2,3の表面処理に関する記載がない。一般的にフリップチップ実装を行うとき実装部にメッキ処理するが、特許文献1の説明では、電極2,3にメッキ処理しているのかいないのか、メッキ処理しているとして白色レジスト層6を形成する前にメッキ処理するのか、後にメッキ処理するのかまったく分からない。   In the LED device (light source device 29) of Patent Document 1 shown in FIG. 5, the white resist layer 6 is planarly overlapped with the chip 4 so as to conceal the electrodes 2 and 3, so that the reflection loss and color due to the electrodes 2 and 3 are reduced. There is a feature that there is no degree shift. However, in the description relating to the manufacture of the light source device 29 in Patent Document 1, there is only a description of the mounting method of the chip 4, but there is no description regarding the surface treatment of the electrodes 2 and 3. Generally, when the flip chip mounting is performed, the mounting portion is plated. However, in the description of Patent Document 1, the white resist layer 6 is formed on the assumption that the electrodes 2 and 3 are plated or not. I don't know if it will be plated before or after.

そこで本発明は、この課題に鑑みてなされたものであり、白色反射部材を備えた回路基
板に半導体発光素子をフリップチップ実装しても、回路基板の高い反射率を維持しながら電極表面を効率よく処理できる半導体発光装置及びその製造方法を提供することを目的とする。
Accordingly, the present invention has been made in view of this problem, and even if a semiconductor light emitting element is flip-chip mounted on a circuit board provided with a white reflecting member, the electrode surface is efficiently maintained while maintaining high reflectivity of the circuit board. It is an object of the present invention to provide a semiconductor light emitting device that can be processed well and a method for manufacturing the same.

上記課題を解決するため本発明の半導体発光装置は、回路基板と反射部材と半導体発光素子とを備え、前記回路基板上に前記反射部材を配置し前記半導体発光素子をフリップチップ実装した半導体発光装置において、
前記射部材は少なくとも第1の白色反射層と第2の白色反射層を備え、
該第1の白色反射層に該第2の白色反射層が積層し、
該第1の白色反射層は白色メッキレジストからなり、開口部を有し、少なくとも前記半導体発光素子の下部では前記開口部を除き前記回路基板を覆い、
前記開口部の全面にメッキ層が形成され、
該メッキ層に前記半導体発光素子の電極が接続する
ことを特徴とする。
In order to solve the above-described problems, a semiconductor light emitting device of the present invention includes a circuit board, a reflective member, and a semiconductor light emitting element, and the semiconductor light emitting device is disposed on the circuit board and the semiconductor light emitting element is flip-chip mounted. In
The reflection member includes at least a first white reflecting layer and the second white reflecting layer,
The second white reflective layer is laminated on the first white reflective layer,
The first white reflective layer is made of a white plating resist, has an opening, and covers the circuit board except for the opening at least under the semiconductor light emitting element,
A plating layer is formed on the entire surface of the opening,
The electrode of the semiconductor light emitting element is connected to the plating layer.

本発明の半導体発光装置に含まれる回路基板は白色反射部材を備え、この白色反射部材は第1と第2の反射層からなる二層構造になっている。下層の第1の白色反射層は、白色メッキレジストからなり、その開口部にはメッキ層が形成される。半導体発光素子のフリップチップ実装に際しこのメッキ層に半導体発光素子の電極が接続される。この構造では、第1の白色反射層がメッキレジストと反射層を兼ねているため、メッキ処理のあとにメッキレジストを剥離し新たに反射層を形成するという工程が不要となり、メッキ処理後すぐに上層の第2の白色反射層を形成できる。また反射部材は、第1と第2の白色反射層が積層しているため厚くなり高い反射率を維持する。   The circuit board included in the semiconductor light emitting device of the present invention includes a white reflective member, and the white reflective member has a two-layer structure including a first and a second reflective layer. The lower first white reflective layer is made of a white plating resist, and a plating layer is formed in the opening. When the semiconductor light emitting element is flip-chip mounted, the electrode of the semiconductor light emitting element is connected to the plating layer. In this structure, since the first white reflective layer serves as both a plating resist and a reflective layer, a step of peeling the plating resist and forming a new reflective layer after the plating process becomes unnecessary. An upper second white reflective layer can be formed. The reflecting member is thick because the first and second white reflecting layers are stacked, and maintains a high reflectance.

前記第2の白色反射層は、硬化するとガラス質となる無機バインダと反射性微粒子を含むことが好ましい。   The second white reflective layer preferably contains an inorganic binder that becomes vitreous when cured and reflective fine particles.

前記回路基板の板材は樹脂であっても良い。   The board material of the circuit board may be a resin.

上記課題を解決するため本発明の半導体発光装置の製造方法は、回路基板と反射部材と半導体発光素子とを備え、前記回路基板上に前記反射部材を配置し前記半導体発光素子をフリップチップ実装する半導体発光装置の製造方法において、
前記回路基板となる複数の領域が連結した集合基板であって、該領域には電極が形成されている該集合基板を準備する準備工程と、
該集合基板に白色メッキレジストからなり開口部を有する第1の白色反射層を形成するレジスト工程と、
該開口部の全面にメッキ層を形成するメッキ工程と、
前記第1の白色反射層を残したまま、前記第1の白色反射層上に第2の白色反射層を印刷する印刷工程と、
前記半導体発光素子の電極と前記メッキ層が接続するようにして該半導体発光素子をフリップチップ実装する実装工程と、
前記集合基板を前記半導体発光装置に個片化する工程と
を備えることを特徴とする。
In order to solve the above problems, a method for manufacturing a semiconductor light emitting device of the present invention includes a circuit board, a reflective member, and a semiconductor light emitting element, and the reflective member is disposed on the circuit board and the semiconductor light emitting element is flip-chip mounted. In a method for manufacturing a semiconductor light emitting device,
A preparatory step of preparing the collective substrate in which a plurality of regions to be the circuit board are connected, and in which the electrodes are formed in the region;
A resist process for forming a first white reflective layer made of a white plating resist and having an opening on the aggregate substrate;
A plating step of forming a plating layer on the entire surface of the opening;
A printing step of printing a second white reflective layer on the first white reflective layer while leaving the first white reflective layer;
A mounting step of flip-chip mounting the semiconductor light emitting element so that the electrode of the semiconductor light emitting element and the plating layer are connected;
Dividing the aggregate substrate into the semiconductor light emitting devices.

本発明の半導体発光装置の製造方法は、まず回路基板となる複数の領域が連結した集合基板を準備する。この集合基板の各回路基板となる領域には電極が形成されている。次に集合基板上に開口部を有する第1の白色反射層を形成する。この第1の白色反射層は白色メッキレジストであり、その開口部にメッキ層を形成する。さらに第1の白色反射層上に第2の白色反射層を印刷し、半導体発光素子の電極とメッキ層が接続するようにして半導体発光素子をフリップチップ実装する。最後に集合基板を半導体発光装置に個片化する。この製造方法では、第1の白色反射層がメッキレジストと反射層を兼ねているため、メッ
キによる電極の表面処理をしたら直ぐに上層の第2の白色反射層を形成できる。
In the method for manufacturing a semiconductor light emitting device according to the present invention, first, a collective substrate in which a plurality of regions to be circuit boards are connected is prepared. Electrodes are formed in regions of the collective substrate that are to be circuit boards. Next, a first white reflective layer having an opening is formed on the aggregate substrate. The first white reflective layer is a white plating resist, and a plating layer is formed in the opening. Further, a second white reflective layer is printed on the first white reflective layer, and the semiconductor light emitting element is flip-chip mounted so that the electrode of the semiconductor light emitting element and the plating layer are connected. Finally, the collective substrate is separated into semiconductor light emitting devices. In this manufacturing method, since the first white reflective layer serves as both a plating resist and a reflective layer, an upper second white reflective layer can be formed immediately after the surface treatment of the electrode by plating.

前記メッキ工程において電解メッキ法を採用することが好ましい。   It is preferable to employ an electrolytic plating method in the plating step.

前記印刷工程において硬化するとガラス質となる無機バインダと反射性微粒子を含むペーストを印刷しても良い。   You may print the paste containing the inorganic binder and reflective fine particle which will become glassy when it hardens | cures in the said printing process.

以上のように本発明の半導体発光装置及びその製造方法は、第1の白色反射層がメッキレジストと反射層を兼ねており、メッキによる電極の表面処理をしたら直ぐに上層の第2の白色反射層を形成できるため、回路基板上に反射率の良好な白色反射部材を備えながら半導体発光素子をフリップチップ実装しても、回路基板の電極表面を効率よく処理できる構造及び製造方法となる。   As described above, in the semiconductor light emitting device and the manufacturing method thereof according to the present invention, the first white reflective layer serves as both the plating resist and the reflective layer. Therefore, even if the semiconductor light emitting element is flip-chip mounted while providing a white reflective member with good reflectivity on the circuit board, the structure and manufacturing method can efficiently process the electrode surface of the circuit board.

本発明の第1実施形態におけるLED装置の断面図。The sectional view of the LED device in a 1st embodiment of the present invention. 図1に示すLED装置の製造方法の説明図。Explanatory drawing of the manufacturing method of the LED apparatus shown in FIG. 図1に示すLED装置の製造方法の説明図。Explanatory drawing of the manufacturing method of the LED apparatus shown in FIG. 本発明の第2実施形態におけるLED装置の断面図。Sectional drawing of the LED apparatus in 2nd Embodiment of this invention. 従来のLED装置の断面図と平面図。Sectional drawing and top view of the conventional LED device.

以下、添付図1〜4を参照しながら本発明の好適な実施形態について詳細に説明する。なお図面の説明において、同一または相当要素には同一の符号を付し、重複する説明は省略する。また説明のため部材の縮尺は適宜変更している。さらに特許請求の範囲に記載した発明特定事項との関係をカッコ内に記載している。
(第1実施形態)
Hereinafter, preferred embodiments of the present invention will be described in detail with reference to FIGS. In the description of the drawings, the same or equivalent elements will be denoted by the same reference numerals, and redundant description will be omitted. For the sake of explanation, the scale of the members is changed as appropriate. Furthermore, the relationship with the invention specific matter described in the claims is described in parentheses.
(First embodiment)

図1により本発明の第1実施形態におけるLED装置10の構造を説明する。図1は本実施形態におけるLED装置10の断面図である。回路基板22は、板材20の上下面にそれぞれ電極17,19が形成され、電極17,19はスルーホール18で接続している。電極17上には白色メッキレジスト16(第1の白色反射層)が積層しており、その開口部にはメッキ層23がある。白色メッキレジスト16とメッキ層23の一部を白色セラミックインク15(第2の白色反射層)が覆っている。白色メッキレジスト16と白色セラミックインク15の積層物が白色反射部材25となる。また電極19の下面にもメッキ層24を備えている。なお白色メッキレジスト16とメッキ層23の上面の高さは概ね等しい。   The structure of the LED device 10 according to the first embodiment of the present invention will be described with reference to FIG. FIG. 1 is a cross-sectional view of an LED device 10 according to this embodiment. In the circuit board 22, electrodes 17 and 19 are respectively formed on the upper and lower surfaces of the plate member 20, and the electrodes 17 and 19 are connected through a through hole 18. A white plating resist 16 (first white reflective layer) is laminated on the electrode 17, and a plating layer 23 is provided in the opening. A white ceramic ink 15 (second white reflective layer) covers a portion of the white plating resist 16 and the plating layer 23. A laminate of the white plating resist 16 and the white ceramic ink 15 becomes the white reflecting member 25. A plating layer 24 is also provided on the lower surface of the electrode 19. The heights of the upper surfaces of the white plating resist 16 and the plating layer 23 are substantially equal.

LED素子21(半導体発光素子)はサファイア基板12の下面に半導体層13を備え、半導体層13にはアノードとカソードに対応するバンプ14(半導体発光素子の電極)が付着している。LED素子21は回路基板22にフリップチップ実装され、バンプ14とメッキ層23が接続する。LED素子21を含む回路基板22の上部は樹脂層11で封止されている。   The LED element 21 (semiconductor light emitting element) includes a semiconductor layer 13 on the lower surface of the sapphire substrate 12, and bumps 14 (electrodes of the semiconductor light emitting element) corresponding to the anode and the cathode are attached to the semiconductor layer 13. The LED element 21 is flip-chip mounted on the circuit board 22, and the bump 14 and the plating layer 23 are connected. The upper part of the circuit board 22 including the LED elements 21 is sealed with the resin layer 11.

回路基板22の板材20はBTレジン(三菱瓦斯化学の商品名であり、ビスマレイミドトリアジン樹脂等からなる熱硬化性樹脂)等の樹脂であるが、セラミック、金属であっても良い。なお板材20の表面は、白色メッキレジスト16とメッキ層23により完全に覆われているので、板材20が樹脂であってもLED素子21から照射される光による劣化が軽減され寿命を延ばすことが可能となる。   The plate material 20 of the circuit board 22 is a resin such as BT resin (a product name of Mitsubishi Gas Chemical, a thermosetting resin made of bismaleimide triazine resin or the like), but may be ceramic or metal. Since the surface of the plate 20 is completely covered with the white plating resist 16 and the plating layer 23, even if the plate 20 is a resin, deterioration due to light emitted from the LED element 21 is reduced and the life can be extended. It becomes possible.

スルーホール18は、内壁に厚さが12μmの銅層が形成され(スルーホールメッキ)、さらに金属ペーストを充填した状態で厚さが15μmの銅で蓋をする(蓋メッキ)。電極17,19は、下地となる厚さが5μmの銅箔上にスルーホールメッキと蓋メッキによる銅層が積層するので、総厚が約30μmの銅層になっている。LED素子21のサファイア基板12は厚さが80〜150μm、半導体層13は発光層を含み厚さが約7μm、バンプ14は金バンプからなり厚さが20〜30μmである。樹脂層11はシリコーン樹脂にYAG等の蛍光体を混錬した蛍光樹脂である。   The through hole 18 has a copper layer with a thickness of 12 μm formed on the inner wall (through hole plating), and is further covered with copper with a thickness of 15 μm in a state filled with a metal paste (lid plating). The electrodes 17 and 19 are copper layers having a total thickness of about 30 μm because a copper layer formed by through-hole plating and lid plating is laminated on a copper foil having a thickness of 5 μm as a base. The sapphire substrate 12 of the LED element 21 has a thickness of 80 to 150 μm, the semiconductor layer 13 includes a light emitting layer and has a thickness of about 7 μm, and the bumps 14 are gold bumps and have a thickness of 20 to 30 μm. The resin layer 11 is a fluorescent resin obtained by kneading a phosphor such as YAG in a silicone resin.

白色メッキレジスト16は二酸化チタン等の反射性微粒子を混錬した感光性樹脂を硬化させたものであり、厚さは10μm程度である。白色セラミックインク15は、オルガノポリシロキサン等のバインダ中に触媒や溶媒とともに二酸化チタン等の反射性微粒子を混練した混合物を焼結したものであり、厚さは15〜20μmである。焼結後の白色セラミックインク15はガラス質(無機質)となる。   The white plating resist 16 is obtained by curing a photosensitive resin kneaded with reflective fine particles such as titanium dioxide, and has a thickness of about 10 μm. The white ceramic ink 15 is obtained by sintering a mixture obtained by kneading reflective fine particles such as titanium dioxide together with a catalyst and a solvent in a binder such as organopolysiloxane, and has a thickness of 15 to 20 μm. The white ceramic ink 15 after sintering becomes vitreous (inorganic).

図2及び図3によりLED装置10の製造方法を説明する。図2及び図3はLED装置10の製造方法の説明図である。(a)は、回路基板22(図1参照)となる領域が連結した集合基板30を準備する工程である。なお集合基板30には回路基板22となる領域が数百から数千個配列しているが、図2及び図3では簡単のため3個にしている。すでに各領域には板材20の上下の面に電極17,19及びスルーホール18が形成され、電極17,19はスルーホール18で接続している。   A method for manufacturing the LED device 10 will be described with reference to FIGS. 2 and 3 are explanatory diagrams of the method for manufacturing the LED device 10. (A) is a step of preparing a collective substrate 30 in which regions to be the circuit boards 22 (see FIG. 1) are connected. The collective substrate 30 has hundreds to thousands of regions to be the circuit boards 22 arranged in FIG. 2 and FIG. 3 for simplicity. The electrodes 17 and 19 and the through holes 18 are already formed on the upper and lower surfaces of the plate member 20 in each region, and the electrodes 17 and 19 are connected by the through holes 18.

(b)と(c)は集合基板30に開口部31を有する白色メッキレジスト16を形成するレジスト工程を示している。まず硬化前の白色メッキレジスト16をコーター又はスクリーン印刷を使って集合基板30の上面に塗布する(b)。次に白色メッキレジスト16を80℃(約30分間)で仮硬化する。さらにフォトマスクを使って開口させる領域(開口部31)以外を露光し、現像して開口部31を形成する。最後に150℃(約1時間)で白色メッキレジスト16を硬化させる。   (B) and (c) show a resist process for forming the white plating resist 16 having the opening 31 on the collective substrate 30. First, an uncured white plating resist 16 is applied to the upper surface of the collective substrate 30 using a coater or screen printing (b). Next, the white plating resist 16 is temporarily cured at 80 ° C. (about 30 minutes). Further, an area other than the area (opening 31) to be opened is exposed using a photomask and developed to form the opening 31. Finally, the white plating resist 16 is cured at 150 ° C. (about 1 hour).

(d)は開口部31にメッキ層23を形成するメッキ工程を示している。電解メッキ法で厚さが10μm程度のNi層を形成し、その上面に厚さが0.5μm程度のAu層を形成する。Au層は反射率が問題になる場合はAgとすることもある。なおメッキ層23の形成と同時に電極19の下面にもメッキ層24が形成される。集合基板30上の全ての電極17,19は図示していない共通メッキ電極で電気的に接続しており、その共通メッキ電極は集合基板30を個片化するときに切断される。   (D) shows a plating process for forming the plating layer 23 in the opening 31. An Ni layer having a thickness of about 10 μm is formed by electrolytic plating, and an Au layer having a thickness of about 0.5 μm is formed on the upper surface thereof. The Au layer may be made of Ag when reflectivity becomes a problem. The plating layer 24 is also formed on the lower surface of the electrode 19 simultaneously with the formation of the plating layer 23. All the electrodes 17 and 19 on the collective substrate 30 are electrically connected by a common plating electrode (not shown), and the common plated electrode is cut when the collective substrate 30 is separated.

(e)は白色メッキレジスト16上に白色セラミックインク15を印刷法で積層する印刷工程を示している。スクリーン印刷法により硬化前の白色セラミックインク15を白色メッキレジスト16上に塗布する。このとき白色セラミックインク15はメッキ層23の一部も覆っている。印刷後、150℃で白色セラミックインク15を硬化させる。   (E) shows a printing process in which the white ceramic ink 15 is laminated on the white plating resist 16 by a printing method. A white ceramic ink 15 before curing is applied onto the white plating resist 16 by a screen printing method. At this time, the white ceramic ink 15 also covers a part of the plating layer 23. After printing, the white ceramic ink 15 is cured at 150 ° C.

(f)はLED素子21をフリップチップ実装する実装工程を示している。このときLED素子21の電極(バンプ14、図1参照)とメッキ層23を接続させる。LED素子21を集合基板30に一個づつ実装しても良いが、集合基板30の電極17のピッチで粘着シート(図示せず)上にLED素子21を配列し、この多数のLED素子21を同時に加圧加熱して集合基板30の電極17に接合する製造方式(一括接続方式)の方が生産効率が良い。LED素子21のバンプ14の下面には予め金錫共晶層を形成しておき、バンプ14と電極17を金錫共晶で接合させると良い。金錫共晶接合は融点が約300℃に設定できるため回路基板22をマザー基板(図示せず)に半田リフロー(約260℃)するとき接合部が固体のままであるという特徴がある。   (F) shows a mounting process in which the LED element 21 is flip-chip mounted. At this time, the electrode (bump 14, see FIG. 1) of the LED element 21 and the plating layer 23 are connected. The LED elements 21 may be mounted on the collective substrate 30 one by one. However, the LED elements 21 are arranged on an adhesive sheet (not shown) at the pitch of the electrodes 17 of the collective substrate 30, and the multiple LED elements 21 are simultaneously arranged. The production method (collective connection method) in which pressure heating is performed to join the electrodes 17 of the collective substrate 30 has higher production efficiency. A gold-tin eutectic layer may be formed in advance on the lower surface of the bump 14 of the LED element 21, and the bump 14 and the electrode 17 may be bonded with the gold-tin eutectic. Gold-tin eutectic bonding has a feature that the melting point can be set to about 300 ° C., so that when the circuit board 22 is solder-reflowed (about 260 ° C.) to a mother board (not shown), the bonding portion remains solid.

(g)はLED素子21を封止する工程を示している。集合基板30を金型に装填してから、YAG等の蛍光体を混練したシリコーン樹脂を金型に充填し、シリコーン樹脂を約150℃で加熱硬化させ樹脂層11を形成する。   (G) has shown the process of sealing the LED element 21. FIG. After the assembly substrate 30 is loaded into a mold, a silicone resin kneaded with a phosphor such as YAG is filled in the mold, and the silicone resin is heated and cured at about 150 ° C. to form the resin layer 11.

(h)は集合基板30をLED装置10に個片化する個片化工程を示している。ダイサー(図示せず)で樹脂層11を備えた集合基板30を切断し、個片化したLED装置10を得る。   (H) shows the singulation process for dividing the collective substrate 30 into the LED device 10. The collective substrate 30 provided with the resin layer 11 is cut with a dicer (not shown), and the LED device 10 separated into pieces is obtained.

本実施形態のLED装置10は、白色セラミックインク15がメッキ層23の一部を覆っていた。このためLED素子21直下を除き白色メッキレジスト16が白色セラミックインク15に被覆されているため、この部分の白色メッキレジスト16はLED素子21からの出射光による光劣化が著しく軽減されている。なお白色セラミックインク15はバインダーが無機質であるため耐光性が高い。また板材20が樹脂である回路基板22と白色セラミックインク15は熱膨張率が大きく異なるのに対し、樹脂がバインダーとなっている白色メッキレジスト16がバッファ層となって白色セラミックインク15の剥がれを防止している。   In the LED device 10 of the present embodiment, the white ceramic ink 15 covers a part of the plating layer 23. For this reason, since the white plating resist 16 is covered with the white ceramic ink 15 except immediately below the LED element 21, the white plating resist 16 in this portion is significantly reduced in light deterioration due to light emitted from the LED element 21. The white ceramic ink 15 has high light resistance because the binder is inorganic. Further, the circuit board 22 and the white ceramic ink 15 in which the plate material 20 is made of resin have greatly different coefficients of thermal expansion, while the white plating resist 16 in which the resin is a binder serves as a buffer layer to remove the white ceramic ink 15. It is preventing.

また本実施形態のLED装置10は、樹脂層11の側面からも光が出射するのでLED装置10の外周に反射枠を設け配光を調整しても良い。
(第2実施形態)
Moreover, since the LED device 10 of this embodiment also emits light from the side surface of the resin layer 11, a reflection frame may be provided on the outer periphery of the LED device 10 to adjust the light distribution.
(Second Embodiment)

図4により本発明の第2実施形態について説明する。図4は本発明の第2実施形態におけるLED装置40の断面図である。図1と共通する部材には同じ番号を付している。図1に示した第1実施形態のLED装置10と、図2に示した本実施形態のLED装置40との差違は、図4における白色メッキレジスト46及びメッキ層43の断面形状だけである。白色メッキレジスト46と白色セラミックインク15の積層物が白色反射部材45となる。   A second embodiment of the present invention will be described with reference to FIG. FIG. 4 is a cross-sectional view of the LED device 40 according to the second embodiment of the present invention. The same members as those in FIG. The only difference between the LED device 10 of the first embodiment shown in FIG. 1 and the LED device 40 of the present embodiment shown in FIG. 2 is the cross-sectional shape of the white plating resist 46 and the plating layer 43 in FIG. A laminate of the white plating resist 46 and the white ceramic ink 15 becomes the white reflecting member 45.

図1のメッキ層23に対し図4のメッキ層43は幅が小さい。この結果、図4において白色セラミックインク15の端部から白色メッキレジスト46がはみ出している。さらに白色メッキレジスト46がLED素子21に下に割り込んでいる。このようにするとメッキ層43による反射率低下を軽減でき、LED装置40の発光効率を向上させることができる。前述したように図1のメッキ層23の低い反射率を改善するのに表面に銀メッキすることも考えられるが、銀メッキは硫化による黒色化を防止するための表面処理が必要となることと比べると、本実施形態は簡単に反射率を改善できるという特徴を備えている。   The plating layer 43 in FIG. 4 has a smaller width than the plating layer 23 in FIG. As a result, the white plating resist 46 protrudes from the end of the white ceramic ink 15 in FIG. Further, the white plating resist 46 has entered the LED element 21 below. If it does in this way, the reflectance fall by the plating layer 43 can be reduced, and the luminous efficiency of the LED device 40 can be improved. As described above, in order to improve the low reflectivity of the plated layer 23 of FIG. 1, it is conceivable that the surface is silver-plated, but silver plating requires a surface treatment to prevent blackening due to sulfuration. In comparison, the present embodiment has a feature that the reflectance can be easily improved.

10,40…LED装置(半導体発光装置)、
11…樹脂層、
12…サファイア基板、
13…半導体層、
14…バンプ(半導体発光素子の電極)、
15…白色セラミックインク(第2の白色反射層)、
16,46…白色メッキレジスト(第1の白色反射層)、
17、19…電極、
18…スルーホール、
20…板材、
21…LED素子(半導体発光素子)、
22…回路基板、
23,24,43…メッキ層、
25,45…白色反射部材、
30…集合基板、
31…開口部。
10, 40 ... LED device (semiconductor light emitting device),
11 ... resin layer,
12 ... sapphire substrate,
13 ... semiconductor layer,
14: Bump (electrode of semiconductor light emitting device),
15 ... White ceramic ink (second white reflective layer),
16, 46 ... White plating resist (first white reflective layer),
17, 19 ... electrodes,
18 ... Through hole,
20 ... plate material,
21 ... LED element (semiconductor light emitting element),
22 ... circuit board,
23, 24, 43 ... plating layer,
25, 45 ... white reflective member,
30 ... Collective board,
31 ... Opening.

Claims (6)

回路基板と反射部材と半導体発光素子とを備え、前記回路基板上に前記反射部材を配置し前記半導体発光素子をフリップチップ実装した半導体発光装置において、
前記射部材は少なくとも第1の白色反射層と第2の白色反射層を備え、
該第1の白色反射層に該第2の白色反射層が積層し、
該第1の白色反射層は白色メッキレジストからなり、開口部を有し、少なくとも前記半導体発光素子の下部では前記開口部を除き前記回路基板を覆い、
前記開口部の全面にメッキ層が形成され、
該メッキ層に前記半導体発光素子の電極が接続する
ことを特徴とする半導体発光装置。
In a semiconductor light emitting device comprising a circuit board, a reflective member, and a semiconductor light emitting element, the reflective member is disposed on the circuit board, and the semiconductor light emitting element is flip-chip mounted.
The reflection member includes at least a first white reflecting layer and the second white reflecting layer,
The second white reflective layer is laminated on the first white reflective layer,
The first white reflective layer is made of a white plating resist, has an opening, and covers the circuit board except for the opening at least under the semiconductor light emitting element,
A plating layer is formed on the entire surface of the opening,
An electrode of the semiconductor light emitting element is connected to the plating layer.
前記第2の白色反射層は、硬化するとガラス質となる無機バインダと反射性微粒子を含むことを特徴とする請求項1に記載の半導体発光装置。   2. The semiconductor light emitting device according to claim 1, wherein the second white reflective layer includes an inorganic binder that becomes vitreous when cured and reflective fine particles. 3. 前記回路基板の板材は樹脂であることを特徴とする請求項1又は2に記載の半導体発光装置。   The semiconductor light-emitting device according to claim 1, wherein a plate material of the circuit board is a resin. 回路基板と反射部材と半導体発光素子とを備え、前記回路基板上に前記反射部材を配置し前記半導体発光素子をフリップチップ実装する半導体発光装置の製造方法において、
前記回路基板となる複数の領域が連結した集合基板であって、該領域には電極が形成されている該集合基板を準備する準備工程と、
該集合基板に白色メッキレジストからなり開口部を有する第1の白色反射層を形成するレジスト工程と、
該開口部の全面にメッキ層を形成するメッキ工程と、
前記第1の白色反射層を残したまま、前記第1の白色反射層上に第2の白色反射層を印刷する印刷工程と、
前記半導体発光素子の電極と前記メッキ層が接続するようにして該半導体発光素子をフリップチップ実装する実装工程と、
前記集合基板を前記半導体発光装置に個片化する工程と
を備えることを特徴とする半導体発光装置の製造方法。
In a method for manufacturing a semiconductor light emitting device, comprising a circuit board, a reflective member, and a semiconductor light emitting element, disposing the reflective member on the circuit board, and flip chip mounting the semiconductor light emitting element.
A preparatory step of preparing the collective substrate in which a plurality of regions to be the circuit board are connected, and in which the electrodes are formed in the region;
A resist process for forming a first white reflective layer made of a white plating resist and having an opening on the aggregate substrate;
A plating step of forming a plating layer on the entire surface of the opening;
A printing step of printing a second white reflective layer on the first white reflective layer while leaving the first white reflective layer;
A mounting step of flip-chip mounting the semiconductor light emitting element so that the electrode of the semiconductor light emitting element and the plating layer are connected;
And a step of separating the aggregate substrate into the semiconductor light emitting device.
前記メッキ工程において電解メッキ法を採用することを特徴とする請求項4に記載の半
導体発光装置の製造方法。
5. The method of manufacturing a semiconductor light emitting device according to claim 4, wherein an electrolytic plating method is employed in the plating step.
前記印刷工程において硬化するとガラス質となる無機バインダと反射性微粒子を含むペーストを印刷することを特徴とする請求項4又は5に記載の半導体発光装置の製造方法。   6. The method of manufacturing a semiconductor light-emitting device according to claim 4, wherein a paste containing an inorganic binder that becomes glassy when cured in the printing step and reflective fine particles is printed.
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