JP5495731B2 - Support bar and substrate storage cassette - Google Patents

Description

  The present invention relates to a support bar for supporting a substrate and a substrate storage cassette for storing a substrate.

  For example, in a liquid crystal display (LCD) manufacturing process, a glass substrate may be temporarily stored in a plurality of storage units in a substrate storage cassette between processes. As such a substrate storage cassette, one in which one glass substrate is supported for each storage unit by a plurality of support bars extending in a horizontal direction with a base end as a fixed end and a front end as a free end is known. (For example, see Patent Documents 1 and 2).

JP 2005-340480 A JP 2007-196615 A

  By the way, in the substrate storage cassette as described above, the height of each storage portion tends to be suppressed as much as possible from the viewpoint of increasing the number of glass substrates stored. Under such a tendency, in order to improve the production efficiency by quickly carrying in and out the glass substrate with respect to each storage unit, securing the rigidity of the support bar and improving the vibration damping characteristics are strongly desired.

  Therefore, an object of the present invention is to provide a support bar capable of ensuring rigidity and improving vibration damping characteristics, and a substrate storage cassette including such a support bar.

In order to solve the above problems, a support bar according to the present invention is a support bar for supporting a substrate in a state where a base end extends in a horizontal direction with a fixed end and a distal end as a free end, and is a fiber-reinforced plastic. A cylindrical inner layer extending from the proximal end to the distal end, a damping elastic layer disposed on the upper side and the lower side of at least the proximal side portion of the inner layer, and a fiber reinforced plastic, An outer layer disposed outside the inner layer so as to cover the damping elastic layer, and the number of laminations of the damping elastic layer is greater on the proximal side than on the distal side, and the lamination of the inner layers The number is the same on the distal end side and the proximal end side, and the number of outer layers stacked is the same on the distal end side and the proximal end side .

In this support bar, a damping elastic layer is disposed between an inner layer and an outer layer made of fiber reinforced plastic at least at a base end side portion serving as a fixed end. Furthermore, the number of laminated damping elastic layers is greater on the proximal side than on the distal side, the number of laminated inner layers is the same on the distal side and the proximal side, and the number of laminated outer layers is , to be the same as in the front end side and the proximal side. Thereby, it is possible to improve the vibration damping characteristics such as shortening the vibration damping time. In addition, the inner layer made of fiber reinforced plastic is tubular, and the outer layer made of fiber reinforced plastic is arranged outside the inner layer so as to cover the vibration damping elastic layer. Thereby, the fall of the rigidity resulting from application of a damping elastic layer can be prevented. Therefore, according to this support bar, it is possible to secure rigidity and improve vibration damping characteristics. The vibration-damping elastic layer is preferably a flexible material as compared with fiber reinforced plastic, and is a layer made of an elastic material such as rubber or elastomer. Further, the number of laminated damping elastic layers includes the case of 0 (zero) layer on the tip side.

In the support bar according to the present invention, the damping elastic layer is preferably continuous in the circumferential direction of the inner layer. Further, the damping elastic layer is not preferable that extends over the proximal end to the distal end. According to these configurations, that Do is possible to achieve a further improvement of the vibration damping characteristics.

  In the support bar according to the present invention, when a plurality of damping elastic layers are laminated, the damping elastic layer is preferably laminated via an intermediate layer made of fiber-reinforced plastic. According to this configuration, even when a plurality of vibration damping elastic layers are stacked in order to further improve the vibration damping characteristics, it is possible to ensure rigidity.

  In addition, a substrate storage cassette according to the present invention includes a housing for storing a substrate and a plurality of the support bars installed in the housing. In this substrate storage cassette, as described above, it is possible to ensure the rigidity of the support bar and improve the vibration damping characteristics.

  According to the present invention, it is possible to provide a support bar capable of ensuring rigidity and improving vibration damping characteristics, and a substrate storage cassette including such a support bar.

1 is a perspective view of a first embodiment of a substrate storage cassette according to the present invention. It is a side view of a 1st embodiment of a support bar concerning the present invention. It is sectional drawing along the III-III line of FIG. It is a side view of 2nd Embodiment of the support bar which concerns on this invention. It is sectional drawing along the VV line of FIG. It is sectional drawing along the VI-VI line of FIG. It is a side view of 3rd Embodiment of the support bar which concerns on this invention. It is sectional drawing along the VIII-VIII line of FIG. It is sectional drawing along the IX-IX line of FIG. It is a graph which shows the relationship between the elapsed time of a comparative example, and a deflection. 3 is a graph showing the relationship between elapsed time and deflection in Example 1. It is a graph which shows the relationship between the elapsed time of Example 2, and a deflection | deviation. It is a graph which shows the relationship between the elapsed time of Example 3, and a deflection | deviation.

DESCRIPTION OF EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings. In addition, in each figure, the same code | symbol is attached | subjected to the same or equivalent part, and the overlapping description is abbreviate | omitted.
[First Embodiment]

  As shown in FIG. 1, the substrate storage cassette 1 includes a rectangular parallelepiped box-shaped housing 2 for storing substrates S. On one side wall of the housing 2, an opening 2 a for carrying the substrate S into and out of the housing 2 is formed. A plurality of stages (for example, 20 to 30 stages) of storage units 3 are provided in the housing 2. The substrate storage cassette 1 is used, for example, in a manufacturing process of a liquid crystal display (LCD), and a glass substrate as a substrate S is temporarily stored in each storage unit 3 by a robot hand.

  In each storage unit 3, a plurality of (for example, three) support bars 10, a plurality of (for example, three) side bars 4 and a plurality of (for example, three) side bars 5 are installed. As a result, in each storage unit 3, one substrate S is horizontally supported by the plurality of support bars 10, the plurality of side bars 4, and the plurality of side bars 5.

  The support bar 10 is fixed to the back surface of the housing 2 facing the opening 2a in a cantilevered manner and extends in the horizontal direction. That is, the support bar 10 supports the substrate S in a state where the base end 10a is a fixed end and the front end 10b is a free end and extends in the horizontal direction. The tip 10b of the support bar 10 reaches the vicinity of the opening 2a.

  The side bar 4 is fixed in a cantilever manner to one side surface of the casing 2 perpendicular to the back surface facing the opening 2a, and extends in the horizontal direction. That is, the side bar 4 supports one edge of the substrate S in a state where the base end 4a is a fixed end and the front end 4b is a free end and extends in the horizontal direction. The front end 4 b of the side bar 4 reaches the vicinity of one support bar 10.

  The side bar 5 is fixed in a cantilevered manner to the other side surface of the casing 2 perpendicular to the back surface facing the opening 2a, and extends in the horizontal direction. That is, the side bar 5 supports the other edge of the substrate S in a state of extending in the horizontal direction with the base end 5a as a fixed end and the tip 5b as a free end. The front end 5 b of the side bar 5 reaches the vicinity of the other support bar 10.

  The configuration of the support bar 10 described above will be described in more detail. The side bars 4 and 5 can also have the same configuration as the support bar 10.

  As shown in FIG. 2, the support bar 10 is a tapered hollow pipe that tapers toward the tip 10b. Thereby, even if the board | substrate S is mounted and the front-end | tip 10b of the support bar 10 bends a little below, the space | interval of the front-end | tip 10b of the support bar 10 is fully maintained between the accommodating parts 3 adjacent in an up-down direction. . Although not shown in FIG. 1, a columnar protruding member is erected on the back surface of the housing 2 facing the opening 2 a, and the protruding member is on the base end 10 a side of the support bar 10. Inserted into the end and fixed to each other by bonding or the like.

  As shown in FIGS. 2 and 3, the support bar 10 includes a cylindrical (in other words, cylindrical) inner layer 11 extending from the base end 10a to the tip end 10b. The inner layer 11 is covered with a circular damping elastic layer 12 extending from the base end 10a to the tip 10b. Furthermore, the damping elastic layer 12 is covered with a circular tubular outer layer 13 extending from the proximal end 10a to the distal end 10b, and the upper and lower sides of the outer layer 13 are from the proximal end 10a to the distal end 10b. It is covered with an outer layer 14 having an arcuate cross section extending across. That is, the damping elastic layer 12 is continuous in the circumferential direction of the inner layer 11 and extends from the proximal end 10a to the distal end 10b. The outer layer 13 is disposed outside the inner layer 11 so as to cover the vibration damping elastic layer 12. The length of the arc-shaped outer layer 14 in the circumferential direction of the cross section is a length corresponding to about 1/4 of the circumference, that is, a length corresponding to about 90 ° in terms of angle.

  The inner layer 11 and the outer layers 13 and 14 are made of fiber reinforced plastic such as GFRP (glass fiber reinforced plastics) or CFRP (carbon fiber reinforced plastics), and one or a plurality of sheets (for example, eight for the inner layer 11, The outer layer 13 is configured by laminating one prepreg and the outer layer 14 by three. The vibration-damping elastic layer 12 is preferably a flexible material as compared with fiber reinforced plastic, and is a layer made of an elastic material such as rubber or elastomer. The storage elastic modulus of the damping elastic layer is 0.1 to 500 MPa, preferably 0.1 to 100 MPa, and more preferably 0.1 to 50 MPa. In addition, since the vibration-suppressing elastic layer is converted from carbon fiber prepreg to CFRP by thermosetting, it is preferable to use a material that is stable against heat at that time. Furthermore, the vibration-damping elastic layer is preferably a material having excellent adhesiveness with an epoxy resin material that is a matrix resin of CFRP. From this point of view, the flexible resin material is preferably styrene-butadiene rubber (SBR), chloroprene rubber (CR), butyl rubber (IIR), nitrile rubber (NBR), ethylene propylene rubber (EPM, EPDM) or the like. By adding rubber, rubber that is a polymer having a flexible chain, elastomer, or the like, it is made of a material that is more flexible than fiber reinforced plastics, such as epoxy resin, polyester resin, vinyl ester resin, polyurethane resin, etc., having a reduced elastic modulus.

As described above, in the support bar 10, the inner layer 11 made of fiber reinforced plastic and the outer layer 13 are continuous in the circumferential direction of the inner layer 11 and extend from the base end 10a to the tip end 10b. The damping elastic layer 12 is arranged so as to do this. Thereby, it is possible to improve the vibration damping characteristics such as shortening the vibration damping time. In addition, the inner layer 11 made of fiber reinforced plastic has a circular tube shape, and the damping elastic layer 12 is sandwiched between the inner layer 11 made of fiber reinforced plastic and the outer layer 13. Thereby, the fall of the rigidity resulting from application of the damping elastic layer 12 can be prevented. Therefore, according to the support bar 10, it is possible to secure rigidity and improve vibration damping characteristics.
[Second Embodiment]

  The substrate storage cassette of the second embodiment has the same configuration as that of the substrate storage cassette 1 of the first embodiment, and the support bar 20 of the second embodiment has the damping elastic layer 12 extending from the base end 10a to the tip end 10b. This is different from the support bar 10 of the first embodiment in that it does not extend. That is, as shown in FIG. 4, the support bar 20 is a tapered hollow pipe that tapers toward the distal end 20 b, and includes a proximal end portion 21 extending from the proximal end 20 a to 1/3 of the entire length. The distal end side portion 22 from the distal end 20b to 2/3 of the entire length has a different laminated structure.

  As shown in FIGS. 4 and 5, in the proximal end portion 21 of the support bar 20, the inner tubular layer 11 is covered with a circular damping elastic layer 12, and the damping elastic layer 12 is tubular. Of the outer layer 13. The upper side and the lower side of the outer layer 13 are covered with an outer layer 14 having an arc cross section. On the other hand, in the distal end side portion 22 of the support bar 20, as shown in FIGS. 4 and 6, the tubular inner layer 11 extending from the proximal end 20a to the distal end 20b extends from the proximal end 20a to the distal end 20b. And is directly covered by a tubular outer layer 13 extending in the direction of the tube. The upper side and the lower side of the outer layer 13 are covered with an outer layer 14 having an arcuate cross section extending from the base end 20a to the tip end 20b.

  That is, the damping elastic layer 12 is disposed only on the base layer 20 a side of the inner layer 11, and the outer layer 13 is disposed outside the inner layer 11 so as to cover the damping elastic layer 12. . Further, the number of laminated damping elastic layers 12 is larger on the proximal end 20a side than on the distal end 20b side, such as one layer on the proximal end portion 21 and 0 (zero) layer on the distal end portion 22. .

In the support bar 20 configured as described above, the damping elastic layer 12 is disposed so as to cover a portion of the inner layer 11 on the base end 20a side (that is, continuous in the circumferential direction of the inner layer 11). ing. Thereby, it is possible to improve the vibration damping characteristics such as shortening the vibration damping time. In addition, the inner layer 11 made of fiber reinforced plastic has a circular tube shape, and the damping elastic layer 12 is sandwiched between the inner layer 11 made of fiber reinforced plastic and the outer layer 13. Thereby, the fall of the rigidity resulting from application of the damping elastic layer 12 can be prevented. Therefore, according to the support bar 20, it is possible to ensure rigidity and improve vibration damping characteristics.
[Third Embodiment]

  The substrate storage cassette of the third embodiment has the same configuration as the substrate storage cassette 1 of the first embodiment, and the support bar 30 of the third embodiment has a vibration damping elastic layer 12 with a plurality of layers on the base end 30a side. This is different from the support bar 10 of the first embodiment. That is, as shown in FIG. 7, the support bar 30 is a tapered hollow pipe that tapers toward the distal end 30 b, and includes a proximal end portion 31 from the proximal end 30 a to 1/3 of the entire length. The tip side portion 32 extending from the tip 30b to 2/3 of the entire length has a different laminated structure.

  As shown in FIGS. 7 and 8, in the proximal end portion 31 of the support bar 30, the inner tubular layer 11 is covered with a circular damping elastic layer 12, and the damping elastic layer 12 is tubular. The intermediate layer 15 is covered. Further, the intermediate layer 15 is covered with a tubular damping elastic layer 12, and the damping elastic layer 12 is covered with a tubular outer layer 13. The upper side and the lower side of the outer layer 13 are covered with an outer layer 14 having an arc cross section. On the other hand, in the distal end side portion 32 of the support bar 30, as shown in FIGS. 7 and 9, the tubular inner layer 11 extending from the proximal end 30a to the distal end 30b extends from the proximal end 30a to the distal end 30b. The damping elastic layer 12 is covered with a tubular intermediate layer 15 extending from the base end 30a to the tip 30b (ie, The inner layer 11, the damping elastic layer 12, and the intermediate layer 15 extend from the base end 30a to the tip 30b). Further, in the distal end side portion 32, the intermediate layer 15 is directly covered by a circular tubular outer layer 13 extending from the proximal end 30a to the distal end 30b. The upper side and the lower side of the outer layer 13 are covered with an outer layer 14 having a circular arc cross section extending from the base end 30a to the tip end 30b. Here, like the inner layer 11 and the outer layer 13, the intermediate layer 15 is made of fiber reinforced plastic and is configured by laminating one or a plurality of (for example, four) prepregs.

  In other words, the plurality of damping elastic layers 12 are laminated via the intermediate layer 15 made of fiber reinforced plastic, and the outer layer 13 is disposed outside the inner layer 11 so as to cover the damping elastic layer 12. ing. The number of laminated damping elastic layers 12 is larger on the proximal end 30a side than on the distal end 30b side, such as two layers at the proximal end portion 31 and one layer at the distal end portion 32.

  In the support bar 30 configured as described above, it is continuous between the inner layer 11 made of fiber reinforced plastic and the intermediate layer 15 in the circumferential direction of the inner layer 11 and extends from the proximal end 30a to the distal end 30b. The damping elastic layer 12 is arranged so as to exist. Furthermore, in the base end side portion 31 of the support bar 30, the damping elastic layer 12 is disposed between the intermediate layer 15 made of fiber reinforced plastic and the outer layer 13 so as to be continuous in the circumferential direction of the inner layer 11. . As described above, since the number of laminated damping elastic layers 12 is larger on the base end 30a side than on the front end 30b side, vibration damping characteristics such as shortening of the vibration damping time can be improved. Moreover, in the base end side portion 31 of the support bar 30, the inner layer 11 made of fiber reinforced plastic has a circular tube shape, and the damping elastic layer 12 is formed by the inner layer 11, the intermediate layer 15 and the outer layer 13 made of fiber reinforced plastic. It is sandwiched. Furthermore, in the front end side portion 32 of the support bar 30, the inner layer 11 made of fiber reinforced plastic has a circular tube shape, and the damping elastic layer 12 is sandwiched between the inner layer 11 made of fiber reinforced plastic and the intermediate layer 15. . Thereby, the fall of the rigidity resulting from application of the damping elastic layer 12 can be prevented. Therefore, according to the support bar 30, it is possible to secure rigidity and improve vibration damping characteristics.

The present invention is not limited to the above-described embodiments. For example, the support bar is not limited to a tapered shape, and may have an equivalent outer diameter from the proximal end to the distal end. The vibration-damping elastic layer is not limited to a layer that is continuous in the circumferential direction of the inner layer, and may be any layer that is disposed at least on the upper side and the lower side of the base end side portion of the inner layer.
[Example]

  As a comparative example, a support bar having the same configuration as that of the support bar 10 of the first embodiment except that the damping elastic layer 12 does not exist was prepared. Specific specifications are as shown in Table 1. A support bar of a comparative example was manufactured as follows.

  When manufacturing a hollow circular pipe having a taper, first, a steel mandrel having a tip side diameter of 21 mm, a hand side diameter of 34 mm, and a length of 2380 mm was prepared. And using glass fiber prepreg (manufactured by Daito Co., Ltd., trade name: H150-EP) in which a glass fiber cloth was impregnated with an epoxy resin, 8 layers were wound around a mandrel to form an inner layer having a thickness of 1 mm. The orientation direction of the glass fibers was generally matched with the longitudinal direction and the circumferential direction of the support bar.

  Subsequently, a carbon fiber prepreg (made by Shin Nippon Oil Co., Ltd., trade name: E6026E-31K3) in which an epoxy resin is impregnated while aligning carbon fibers in one direction on the outer side of the inner layer, and glass scrim cloth is further bonded ) Was wound to form an outer peripheral layer having a wall thickness of 0.25 mm. The orientation direction of the carbon fibers was generally matched with the longitudinal direction of the support bar.

  Further, carbon fiber prepregs (newly formed as upper and lower outer layers disposed on the upper and lower portions of the outer layer on the entire circumference, the length corresponding to 1/4 of the circumference, that is, the portion corresponding to the length corresponding to 90 ° in angle). By arranging a prepreg in which three layers of Nippon Oil Co., Ltd., trade name: E6026E-31K3) were disposed, upper and lower outer layers, both layers having a thickness of 0.75 mm, were formed. The orientation direction of the carbon fibers was generally matched with the longitudinal direction of the support bar.

Finally, the prepreg is fixed by winding a heat-shrinkable tape (made of polypropylene) having a width of 10 mm, the inner layer, the outer circumferential layer and the upper and lower outer layers are simultaneously heat-cured, and the core material is removed after curing. An elliptical pipe-shaped support bar having a long side diameter (vertical direction) of 38 mm, a long side diameter (vertical direction) of 25 mm, a short side diameter (horizontal direction) of 36.5 mm, and a short side diameter (horizontal direction) of 23.5 mm. Obtained.

  As Example 1, a support bar having the same configuration as the support bar 10 of the first embodiment was prepared. Specific specifications are as shown in Table 2. The support bar of Example 1 was manufactured as follows.

  Using a glass fiber prepreg (manufactured by Daito Co., Ltd., trade name: H150-EP), eight layers were wound around a mandrel to form an inner layer having a thickness of 1 mm. The orientation direction of the glass fibers was generally matched with the longitudinal direction and the circumferential direction of the support bar. Thereafter, one layer of a vibration-damping elastic layer (manufactured by Ask Industry Co., Ltd., trade name: asner sheet, styrene-butadiene rubber, thickness 0.12 mm) was wound around the outside.

  Subsequently, a carbon fiber prepreg (manufactured by Shin Nippon Oil Co., Ltd., trade name: E6026E-31K3) was wound around the outer side of the vibration-damping elastic layer to form an outer layer having a wall thickness of 0.25 mm. The orientation direction of the carbon fibers was generally matched with the longitudinal direction of the support bar.

  Further, carbon fiber prepregs (newly formed as upper and lower outer layers disposed on the upper and lower portions of the outer layer on the entire circumference, the length corresponding to 1/4 of the circumference, that is, the portion corresponding to the length corresponding to 90 ° in angle). The upper and lower outer layers (both having a thickness of 0.75 mm) were formed by arranging prepregs in which three layers of Nippon Oil Co., Ltd., trade name: E6026E-31K3) were laminated. The orientation direction of the carbon fibers was generally matched with the longitudinal direction of the support bar.

Finally, the prepreg is fixed by wrapping a heat shrinkable tape (made of polypropylene) having a width of 10 mm, and the inner layer, the vibration-damping elastic layer, the outer layer of the entire circumference, and the upper and lower outer layers are simultaneously heated and cured. By pulling out the material, the proximal long diameter (vertical direction) 38.24 mm, the distal long diameter (vertical direction) 25.24 mm, the proximal short diameter (horizontal direction) 36.74 mm, the distal short diameter (horizontal direction) 23. A 74 mm elliptical pipe-shaped support bar was obtained.

As Example 2, a support bar having the same configuration as the support bar 20 of the second embodiment was prepared. Specific specifications are shown in Tables 3 and 4. In Example 2, a damping elastic layer is arranged on the base end side portion 21 (Table 3) from the base end 20a to 1/3 of the entire length in the same manner as in Example 1, but the entire length from the tip 20b is The tip side portion 22 (Table 4) up to 2/3 has the same laminated structure as that of the comparative example (that is, does not have a vibration damping elastic layer).

As Example 3, a support bar having the same configuration as the support bar 30 of the third embodiment was prepared. Specific specifications are shown in Tables 5 and 6. The third embodiment is a combination of the first embodiment and the second embodiment. That is, first, in addition to arranging one damping elastic layer from the proximal end 30a to the distal end 30b, the damping elastic layer is applied to the proximal end portion 31 from the proximal end 30a to 1/3 of the entire length. Adding layers. That is, two damping vibration layers are provided in the proximal end portion 31 from the proximal end 30a to 1/3 of the entire length, and a damping elastic layer is provided in the distal end portion 32 from the distal end 30b to 2/3 of the entire length. One layer is arranged.

  In Tables 1 to 4, the orientation angle is an angle formed by the fibers in the prepreg with respect to the longitudinal direction of the support bar. 0/90 means that prepregs having an orientation angle of 0 ° and prepregs having an orientation angle of 90 ° are alternately laminated.

  Note that only a carbon fiber prepreg (for example, product name: E6026E-31K3 manufactured by Nippon Oil Corporation) may be used as the support bar laminated structure. In some cases, the upper and lower outer layers are not used, that is, they have a perfect circular cross section. Further, the vibration damping elastic layer may be disposed between the upper and lower outer layers, that is, only the upper and lower portions of the support bar may be disposed only in the portion corresponding to about 1/4 in the circumferential length. .

  An initial load of 1.8 kg was applied to the tip of the support bar of the comparative example and Examples 1 to 3 configured as described above, and a damped free vibration waveform after the initial load was removed was measured. As a result, in the comparative example, as shown in FIG. 10, there was a vibration of ± 5 mm even after 15 seconds had elapsed from the initial load unloading. On the other hand, in Example 1, as shown in FIG. 11, when 10 seconds passed after the unloading of the initial load, the vibration converged to ± 1 mm or less. Further, in Example 2, as shown in FIG. 12, the vibration converged to ± 2 mm or less when 15 seconds had elapsed after the unloading of the initial load. Furthermore, in Example 3, as shown in FIG. 13, when 5 seconds had elapsed after the unloading of the initial load, the vibration converged to ± 5 mm or less. From these results, the presence of the damping elastic layer 12 disposed at least on the base layer 10a, 20a, 30a side in the inner layer 11 greatly contributes to the improvement of the vibration damping characteristics such as shortening of the vibration damping time. I found out.

  The thickness of the damping elastic layer relative to the thickness of the support bar is 6 mm, such that the thickness of the damping elastic layer is 0.1 mm to 0.2 mm for the thickness of the support bar of 0.5 mm to 1.5 mm. .7 to 40% is preferable.

  DESCRIPTION OF SYMBOLS 1 ... Substrate storage cassette, 2 ... Housing | casing 10, 20, 30 ... Support bar, 10a, 20a, 30a ... Base end, 10b, 20b, 30b ... Tip, 11 ... Inner layer, 12 ... Damping elastic layer, 13 ... outer layer, 15 ... intermediate layer, S ... substrate.

Claims (5)

A support bar for supporting a substrate in a state of extending in a horizontal direction with a base end as a fixed end and a tip as a free end,
A cylindrical inner layer made of fiber reinforced plastic and extending from the proximal end to the distal end;
A damping elastic layer disposed at least on the upper side and the lower side of the base end side portion of the inner layer;
An outer layer made of fiber-reinforced plastic and disposed outside the inner layer so as to cover the vibration-damping elastic layer,
The number of laminated elastic damping layers is greater on the proximal side than on the distal side ,
The support bar is characterized in that the inner layer has the same number of layers on the distal end side and the proximal end side, and the outer layer has the same number of layers on the distal end side and the proximal end side. . The damping elastic layer of claim 1, wherein the support bar, characterized in that continuous in the circumferential direction of the inner layer. The support bar according to claim 1 or 2 , wherein the vibration-damping elastic layer extends from the base end to the tip end. If the damping elastic layer of the multiple layers are laminated, the damping elastic layer, any one of claim 1 to 3, characterized in that it is laminated via an intermediate layer of fiber reinforced plastic The listed support bar. A housing for housing the substrate;
A substrate storage cassette comprising: the support bar according to any one of claims 1 to 4 , wherein a plurality of the support bars are installed in the housing.

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