JP5489412B2 - High resolution X-ray microscope with X-ray fluorescence analysis function - Google Patents

Description

  The present invention relates to a high-resolution X-ray microscope with a fluorescent X-ray analysis function in which a detector for detecting fluorescent X-rays is incorporated in a magnetic circuit of an objective lens.

  Since the fluorescent X-ray generated by irradiating an arbitrary sample with X-rays contains a wavelength component specific to the element of the sample, the elements contained in the sample can be identified relatively easily by analyzing the fluorescent X-ray. be able to. Therefore, various types of X-ray fluorescence analyzers are commercially available.

  X with fluorescence X-ray analysis function, with the function of analyzing fluorescent X-rays using an X-ray microscope that observes the internal structure of the sample by irradiating the sample with X-rays and transmitting the X-ray image A line microscope is also commercially available.

  In Japanese Patent Application Laid-Open No. 2007-212468 (Patent Document 1), an electron beam from an electron source is applied to an X-ray generation target to generate X-rays, and the object to be inspected (sample) is irradiated with the generated X-rays. A high-resolution function X-ray microscopic inspection apparatus that detects an image of X-rays transmitted through an object to be inspected is disclosed. In this high-resolution function X-ray microscopic inspection apparatus, fluorescent X for detecting fluorescent X-rays generated from the object to be inspected above the object to be inspected and outside the region of X-rays generated from the target for X-ray generation. A line detector is arranged.

  FIG. 6 is a diagram showing a configuration example of an X-ray microscope 21 with a fluorescent X-ray analysis function having the same configuration as that disclosed in Patent Document 1. The X-ray microscope 21 with an X-ray fluorescence analysis function includes an electron gun 1 that emits an electron beam Re, a focusing lens 2 and an objective lens 3 for focusing the electron beam Re, and an X-ray by focusing the electron beam Re. Detects a target 6 that generates Rx, an X-ray transmission window base material 7 that supports or holds the target 6, a sample 8 as an object to be inspected that is irradiated with the X-ray Rx, and an X-ray Rx that has passed through the sample 8. X-ray I. (Image intensifier), and an X-ray image detector 9 composed of a CCD or CMOS type imaging device or the like, and further detects fluorescent X-rays Rxf generated by X-rays Rx irradiated on the sample 8. For this purpose, a detector 10 including a detection element 11 for measuring the energy of X-ray photons utilizing semiconductor characteristics such as silicon, and an analysis unit 12 for analyzing the detection result of the detector 10 are provided. Yes. In order to generate a strong lens magnetic field around the objective lens 3, a pole piece (magnetic pole piece) upper pole 4 and a pole piece lower pole 5 serving as a cut end portion of a yoke as a magnetic flux path are provided. The detector 10 is supported or held above the sample 8 and below the pole piece lower pole 5. The focusing lens 2, the objective lens 3, the pole piece upper pole 4 and the pole piece lower pole 5 have a shape that is rotationally symmetric with respect to the optical axis Y of the objective lens 3.

  In the X-ray microscope 21 with the X-ray fluorescence analysis function, the electron beam Re emitted from the electron gun 1 is focused as an electron beam probe on the target 6 by the focusing lens 2 and the objective lens 3 and focused from the target 6. When the electron beam Re hits, an X-ray Rx composed of a minute light source is generated. The sample 8 is irradiated with the X-ray Rx, the X-ray Rx transmitted through the sample 8 is detected by the X-ray image detector 9, and the inside of the sample 8 is enlarged and projected, so that the microstructure inside the sample 8 is not destructed. Perform a fluoroscopy with On the other hand, the fluorescent X-ray Rxf generated by irradiating the sample 8 with the X-ray Rx is detected by the detection element 11 in the detector 10, and the detection result is analyzed by the analysis unit 12. To be identified.

  In order to realize a high resolution of 0.1 μm or less in such an X-ray microscope, the X-ray Rx generation region is reduced and the magnification of the X-ray image detected by the X-ray image detector 9 is set to a high magnification. It is necessary to. As shown in FIG. 7, the magnification of the X-ray image is given by B / A where A is the distance from the target 6 to the sample 8 and B is the distance from the target 6 to the X-ray image detector 9. Therefore, in order to achieve high resolution, it is necessary to make the distance A as small as possible and the distance B as large as possible.

  On the other hand, in order to reduce the X-ray Rx generation region, it is necessary to reduce the diameter of the electron beam probe focused on the target 6, so that the amount of X-ray Rx generated from the target 6 decreases. The intensity of X-rays per unit area in the X-ray image detector 9 is inversely proportional to the square of the distance B. Therefore, since the detection sensitivity of a detection element such as a CCD is limited, the distance B from the target 6 to the X-ray image detector 9 cannot be made very large. It is necessary to make the distance A from the sample 8 to the sample 8 extremely small. Further, a fresnel fringe is generated like a border when the contrast of the X-ray image changes greatly. The width of the fresnel fringe is represented by √ (λA) (λ is the wavelength of X-rays), and the value of the distance A is large. There is also a problem that the resolution is limited by Fresnel fringes. Therefore, in order to realize high resolution, the distance A from the target 6 to the sample 8 needs to be several tens of μm or less. For this purpose, as shown in FIG. 8, it is necessary to make the thickness d of the X-ray transmissive window base material 7 made of beryllium extremely thin, such as several tens of μm or less. The X-ray transmissive window base material 7 also serves as a vacuum seal. If the X-ray transmission window base material 7 is made thinner, it is easily destroyed when irradiated with a strong electron beam Re. Therefore, with a high-resolution X-ray microscope, it is difficult to generate a high dose of X-rays Rx by irradiating the target 6 with a strong electron beam Re.

  On the other hand, the X-ray microscope 21 with an X-ray fluorescence analysis function requires a high dose of X-ray fluorescence Rxf in order to analyze X-ray fluorescence. In order to generate a high dose of fluorescent X-rays Rxf, the X-ray Rx irradiated to the sample 8 needs to have a high dose. For this purpose, the diameter of the probe of the electron beam Re applied to the target 6 is several μm. It needs to be as large as ˜several 10 μm. Furthermore, in order to endure intense electron beam irradiation, it is necessary to make the target 6 and the X-ray transmissive window substrate 7 thick. Therefore, the resolution as the X-ray microscope is several μm to several tens of μm, which is far from the target high-resolution X-ray microscope of 0.1 μm or less.

  In addition, in the X-ray microscope 21 with a fluorescent X-ray analysis function, when the X-ray microscope has a high resolution, elemental analysis of fluorescent X-rays targeting a very small area corresponding to the high resolution is strongly required. . By performing elemental analysis with the analysis region limited over the entire analysis target region, high-resolution elemental analysis can be performed. In order to limit the analysis region, as shown in FIG. 9, a diaphragm 13 for limiting the analysis region is inserted between the target 6 and the sample 8 so that the X-ray Rx is not irradiated outside the analysis region. The limited X-ray Rxa needs to irradiate only the analysis region of the sample 8. The limited X-ray Rxa is a very small part of the X-ray Rx generated from the target 6, and most of the X-rays are discarded by the diaphragm 13. Therefore, it is necessary to increase the dose of the X-ray Rx generated from the target 6 or improve the efficiency of the fluorescent X-ray detection method.

  Therefore, in a high-resolution X-ray microscope with a fluorescent X-ray analysis function, it is necessary to be able to detect fluorescent X-ray Rxf efficiently even if the dose of X-ray Rx generated from the target 6 is not so high. FIG. 10 is a diagram showing in detail the positional relationship between the target 6, the sample 8, and the detection element 11 of the detector 10. In order to efficiently detect fluorescent X-rays Rxf with a limited amount of X-rays Rx, the distance A between the target 6 and the sample 8 and the distance L between the sample 8 and the detection element 11 of the detector 10 are detected. And should be as small as possible. This is because when the intensity of the X-ray Rx is constant, the intensity of the X-ray Rx per unit area on the surface of the sample 8 is inversely proportional to the square of the distance A, and the intensity per unit area detected by the detection element 11 This is because the intensity of the fluorescent X-ray Rxf is also inversely proportional to the square of the distance L.

Furthermore, when the fluorescent X-ray Rxf analysis object is not inside the surface of the sample 8 but inside, the fluorescent X-ray Rxf is absorbed when passing through the inside of the sample. Can reduce the amount of fluorescent X-ray absorption. FIG. 11 is a diagram illustrating fluorescent X-rays Rxf having different extraction angles θ when the analysis target is inside the sample 8. As shown in FIG. 11, toward the X-ray fluorescence Rxf1 large take-off angle theta ₁ is more fluorescent X-ray Rxf2 small take-off angle theta _2, the distance of X-ray within the sample is absorbed is shortened, the sample The amount of X-rays absorbed inside 8 is reduced.

  From the above description, in order to efficiently detect the fluorescent X-ray Rxf with the limited X-ray dose Rx, the distance A between the target 6 and the sample 8 and the detection element 11 of the sample 8 and the detector 10 are detected. Of the fluorescent X-ray Rxf must be made as large as possible.

  X-ray microscopes are characterized by non-destructive observation and often observe relatively large samples, so the target should be placed at the bottom of the electron lens and no obstacles should be placed underneath it. Yes. FIG. 12 is a diagram showing in detail the positional relationship between the target 6, the sample 8, and the detection element 11 of the detector 10 of the conventional X-ray microscope 21 with the fluorescent X-ray analysis function shown in FIG. . In this case, since the detector 10 is arranged below the pole piece lower pole 5, both the distance A between the target 6 and the sample 8 and the distance L between the sample 8 and the detection element 11 are increased, and the fluorescence X The extraction angle θ of the line Rxf becomes small. For this reason, in the conventional X-ray microscope with a fluorescent X-ray analysis function, the detection efficiency of the fluorescent X-ray Rxf is poor, and it is difficult to achieve high resolution in the X-ray microscope.

  As a conventional technique, there is one in which a notch is provided in a pole piece in order to increase a fluorescent X-ray extraction angle θ. For example, in Japanese Patent Application Laid-Open No. 2003-21749 (Patent Document 2), in an analytical electron microscope that irradiates a sample with an electron beam and detects X-rays generated from the sample, a window type and a windless type X-ray detector are provided. The upper magnetic pole is notched so that the windless detector has a larger X-ray capture angle than the window detector.

In the analytical electron microscope disclosed in Japanese Patent Application Laid-Open No. 7-14538 (Patent Document 3), a second X-ray detector is provided at a position symmetrical to the first X-ray detector, and the upper side of the objective lens system is provided. The magnetic pole piece of the magnetic pole is provided with a notch portion into which the detection portion at the tip of the X-ray detector is fitted.
JP 2007-212468 A JP 2003-217497 A JP 7-14538 A

  The analytical electron microscopes disclosed in Patent Document 2 and Patent Document 3 described above relate to a method for efficiently irradiating a sample with an electron beam and efficiently detecting fluorescent X-rays generated there. An X-ray source is not provided, but a fluorescent X-ray analysis function is not added to a high-resolution X-ray microscope that detects an image of X-rays transmitted through a sample.

  The present invention has been made under the circumstances as described above. The purpose of the present invention is to increase the detection efficiency of fluorescent X-rays, the distance from the target that generates X-rays to the sample, An object of the present invention is to provide a high-resolution X-ray microscope apparatus having a fluorescent X-ray analysis function in which the distance to a detection element of a detector is made as small as possible and the extraction angle of fluorescent X-rays is made as large as possible.

The present invention focuses an electron beam on a target for X-ray generation by an objective lens, and detects a fluorescent X-ray generated from the sample by irradiating the sample with the X-ray generated from the target, and the detection relates the fluorescent X-ray analysis function high resolution X-ray microscope apparatus having the from the detection result and the analysis unit for analyzing the fluorescent X-ray of the vessel, the object of the present invention, high resolution X-ray with the fluorescent X-ray analysis function microscopy device is a perspective X-ray microscope apparatus for detecting X-rays transmitted through the sample, see write set all or a portion of the detector in the magnetic circuit of the objective lens, all of the detectors Alternatively, a part is inserted between the pole piece upper pole and the pole piece lower pole of the objective lens, and the sample is disposed below the pole piece lower pole of the objective lens, Poles and poles It is achieved by the provided notches to fit the detector either one or both of the lower pole Rupisu.

  The object of the present invention is to provide a diaphragm for limiting the elemental analysis region of the sample irradiated with the X-ray between the target and the sample, and the diaphragm for allowing the X-ray to pass through. A circular or rectangular hole and a fluorescent X-ray hole for allowing the fluorescent X-ray to pass therethrough or a stage for moving the position of the diaphragm is provided, and the position of the diaphragm is moved by the stage. The position of the elemental analysis region can be moved, or an X-ray image detector for detecting X-rays irradiated from the target and transmitted through the sample, and detection results of the X-ray image detector A fluoroscopic image display unit for displaying a fluoroscopic image from the above, and enabling the position of the element analysis region to be confirmed by the fluoroscopic image, or supporting the target. Some of the part and the side surface of the lower surface of the X-ray transmission window substrate that, by that to provide a shielding portion to shield scattered X-rays, is more effectively achieved.

  According to the present invention, the whole or a part of the X-ray fluorescence detector is incorporated in the magnetic circuit of the objective lens of the X-ray microscope, so that the distance from the target that generates X-rays to the sample, the sample to the fluorescence X The distance from the detector to the detector of the X-ray detector is made as small as possible and the X-ray emission angle is made as large as possible, so that the detection efficiency of X-ray fluorescence can be increased, and as a result, elemental analysis Can improve the accuracy. In addition, since it is not necessary to increase the amount of X-rays in order to detect an image of X-rays transmitted through the sample, high resolution can be realized in an X-ray microscope with a fluorescent X-ray analysis function.

  According to the high-resolution X-ray microscope with a fluorescent X-ray analysis function according to the present invention, all or part of the fluorescent X-ray detector is incorporated in the magnetic circuit of the objective lens of the X-ray microscope. As a result, the distance from the target that generates X-rays and the distance from the sample to the detection element of the fluorescent X-ray detector are made as small as possible, and the extraction angle of the fluorescent X-rays is made as large as possible. The detection efficiency of fluorescent X-rays can be increased, and the accuracy of elemental analysis can be increased.

  Embodiments of the present invention will be described below with reference to the drawings.

  FIG. 1 is a cross-sectional configuration diagram of a high-resolution X-ray microscope apparatus 20 with a fluorescent X-ray analysis function according to the present invention. In the embodiment shown in FIG. 1, the detector 10 for detecting fluorescent X-rays Rxf is inserted between the pole piece upper pole 4 and the pole piece lower pole 5 of the objective lens 3 to thereby make the detector 10 an objective. The lens 3 is incorporated in the magnetic circuit. Other configurations are the same as those of the X-ray microscope 21 with an X-ray fluorescence analysis function shown in FIG.

  In the present embodiment, the electron beam Re emitted from the electron gun 1 is focused on the target 6 by the focusing lens 2 and the objective lens 3. The X-ray Rx is applied to the sample 8 by the electron beam Re focused on the target 6, and the X-ray transmitted through the sample 8 is detected by the X-ray image detector 9. On the other hand, when the sample 8 is irradiated with the X-ray Rx, a fluorescent X-ray Rxf is generated from the sample 8, and the fluorescent X-ray Rxf is inserted between the pole piece upper pole 4 and the pole piece lower pole 5 of the objective lens 3. Detected by the detection element 11 of the detected detector 10. The detection result of the detector 10 is analyzed by the analysis unit 12, and the element of the sample 8 is identified.

  FIG. 2 shows the detection of detecting the target 6 for irradiating the X-ray Rx, the sample 8 for generating the fluorescent X-ray Rxf, and the fluorescent X-ray Rxf of the high-resolution X-ray microscope 20 with the fluorescent X-ray analysis function in this embodiment. The positional relationship of the detection element 11 with which the container 10 was equipped is shown. By inserting the detector 10 between the pole piece upper pole 4 and the pole piece lower pole 5 of the objective lens 3, the conventional X-ray microscope 21 with a fluorescent X-ray analysis function shown in FIGS. In comparison, the distance A between the target 6 and the sample 8 can be extremely reduced, and the extraction angle θ of the fluorescent X-ray Rxf can be increased. Further, the distance L between the sample 8 and the detection element 11 provided in the detector 10 can also be made relatively small. Therefore, the high-resolution X-ray microscope apparatus 20 with the fluorescent X-ray analysis function in the present embodiment can efficiently detect the fluorescent X-ray Rxf generated by the limited X-ray Rx, and improve the accuracy of elemental analysis. In addition, since the intensity of the electron beam Re can be reduced as compared with the conventional X-ray microscope 21 with a fluorescent X-ray analysis function, high resolution can be realized in the X-ray microscope.

  FIG. 3 shows an embodiment of the present invention in which a notch portion 14 is provided in the pole piece upper pole 4 so that the detector 10 is fitted into the notch portion 14. By doing so, the distance L between the sample 8 and the detection element 11 provided in the detector 10 can be further reduced, and the extraction angle θ of the fluorescent X-ray Rxf can be further increased.

  The notch portion 14 does not grind the pole piece upper pole 4 in a rotationally symmetric manner, and the notch portion 14 is disposed on the pole piece upper pole 4 with a rotational symmetry of three or more times so as to be scraped off. While reducing the amount of the body, the influence on the magnetic circuit due to the shaving can be reduced, and the influence on the performance of the objective lens 3 can be reduced. The n-fold rotational symmetry means that the original figure is maintained by (360 ÷ n) degree rotation. For example, the rotation symmetry of 3 times means that the same figure is repeated every 360 ÷ 3 = 120 degrees. In addition to scraping the pole piece upper pole 4 so that the notch portion 14 is arranged rotationally symmetrically three times or more, the notch portion 14 is not less than three times after being shaved rotationally symmetrically around the pole piece upper pole 4. You may make it flesh out parts other than the detector 10 so that it may arrange | position symmetrically.

  The detector 10 is installed at one or a plurality of notches 14 arranged at a plurality of locations. When the detectors 10 are installed at a plurality of locations, the plurality of detectors 10 may all be the same type of detectors, or the plurality of detectors 10 may be different types of detectors. When detectors of the same type are installed at a plurality of locations, the dependence on the detection direction can be reduced, and the overall sensitivity of detection can be increased. When different types of detectors are installed at a plurality of locations, it is possible to reduce the trouble of exchanging the detectors, and it is possible to simultaneously perform different types of inspections.

  In the embodiment of FIG. 3, the notch 14 is provided in the pole piece upper pole 4, but the notch 14 may be provided in the pole piece lower pole 5. Alternatively, the notch 14 may be provided on both the pole piece upper pole 4 and the pole piece lower pole 5.

  Since the X-ray Rx irradiated from the target 6 to the sample 8 is greatly spread, when restricting the analysis region of the fluorescent X-ray Rxf, the diaphragm 13 is provided between the X-ray transmission window base material 7 and the sample 8. To. 4A is a diagram showing the positional relationship of the detection element 11 provided in the target 6, the X-ray transmission window base material 7, the sample 8, and the detector 10 when the diaphragm 13 is provided. (B) is the figure which looked at the aperture 13 from the target 6 side.

  The diaphragm 13 limits the X-ray Rx, and the circular or rectangular hole 13A for irradiating the sample 8 only with the limited X-ray Rxa, and the fluorescent X for passing the fluorescent X-ray Rxf generated from the sample 8 And a line hole 13B. X-rays irradiated from the target 6 are limited by the holes 13A, and only the limited X-rays Rxa irradiate the sample 8. A fluorescent X-ray Rxf is generated from the region of the sample 8 irradiated with the restricted X-ray Rxa, and the fluorescent X-ray Rxf is detected by the detection element 11 of the detector 10 through the fluorescent X-ray hole 13B. By providing the diaphragm 13 in this manner, the region of the sample 8 where the restricted X-ray Rxa is irradiated and the fluorescent X-ray Rxf is generated is limited, thereby limiting the region for analyzing the element of the sample 8. Can do.

  A stage (not shown) for moving the position of the diaphragm 13 may be provided, and the position of the elemental analysis region of the sample 8 may be moved by moving the diaphragm 13 by the stage. The range in which the diaphragm 13 is moved by this stage is sufficient in the range of the sample 8 in which a fluoroscopic image can be projected by the X-ray image detector 9. Further, when the range of movement of the diaphragm 13 is widened, the range may be such that the fluorescent X-ray Rxf reaching the detection element 11 by the movement of the stage is not blocked by the fluorescent X-ray hole 13B. Further, in order to analyze the fluorescent X-ray Rxf over a wide range of the sample 8, a stage (not shown) for moving the sample 8 is further provided as conventionally performed. The limited X-ray Rxa passes through the sample 8 and is detected by the X-ray image detector 9. The X-ray Rxa detected by the X-ray image detector 9 is displayed on a fluoroscopic image display unit (not shown), or the fluoroscopic image without the diaphragm 13 and the fluoroscopic image with the diaphragm 13 are superimposed. By displaying, the position of the elemental analysis region on the fluoroscopic image may be confirmed pinpointed. By doing so, it becomes easy to inspect the fluoroscopic image of the sample 8 in association with the element position.

  When the diaphragm 13 is provided, as shown in FIG. 5A, the X-ray Rx spreading outside the restricted X-ray Rxa is scattered by the diaphragm 13 to become scattered X-ray Rxd, and the scattered X-ray Rxd May be detected by the detection element 11 of the detector 10. When the scattered X-ray Rxd scattered by the diaphragm 13 is detected by the detection element 11, the element component of the diaphragm 13 is detected in the elemental analysis performed by the analysis unit 12. In order to prevent the scattered X-rays Rxd from being detected by the detection element 11, as shown in FIG. 5B, the shielding portion 15 made of lead or the like is formed on the lower surface of the X-ray transmission window base material 7. The scattered X-rays Rxd may be shielded by the shielding part 15 by being provided on a part and part of the side surface.

  In the embodiment described above, a fluorescent X-ray detector is incorporated in the magnetic circuit of the objective lens of the fluoroscopic high-resolution X-ray microscope. All or part of the fluorescent X-ray detector may be incorporated in the magnetic circuit of the objective lens of the X-ray microscope.

  As mentioned above, although embodiment of this invention was described concretely, this invention is not limited to this, In the range which does not deviate from the meaning, it can change suitably.

1 is a cross-sectional configuration diagram of a high-resolution X-ray microscope with a fluorescent X-ray analysis function according to the present invention. It is a figure which shows the positional relationship of the target of a high-resolution X-ray microscope with a fluorescent X-ray-analysis function, a sample, and the detection element of a detector. It is a figure which shows the positional relationship of the detection element of a target, a sample, and a detector at the time of providing a notch part in the upper pole of a pole piece. It is a figure explaining the aperture stop equipped with the hole for restrict | limiting X-ray | X_line, and the hole for fluorescent X-ray | X_rays for letting a fluorescent X-ray pass. It is a figure explaining the shielding part for shielding the scattered X-rays and scattered X-rays which are scattered by a stop. It is a figure which shows the structural example of the conventional X-ray microscope apparatus with a fluorescent X-ray-analysis function. It is a figure which shows the distance A from a target to a sample, and the distance B from a target to an X-ray image detector. It is a figure which shows the relationship between the thickness d of a X-ray transmissive window base material, and the distance A from a target to a sample. It is a figure for demonstrating the function of an aperture stop. It is a figure which shows the positional relationship of the detection element of a target, a sample, and a detector. It is a figure for demonstrating the difference in the course of a fluorescent X ray by the difference in a taking-out angle in case an analysis target object exists in the inside of a sample. It is a figure which shows the positional relationship of the target of the conventional X-ray microscope with a fluorescent X-ray-analysis function, a sample, and the detection element of a detector.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Electron gun 2 Focusing lens 3 Objective lens 4 Pole piece upper pole 5 Pole piece lower pole 6 Target 7 X-ray transmissive window base material 8 Sample 9 X-ray image detector 10 Detector 11 Detection element 12 Analyzing part 13 Aperture 13A Hole 13B Fluorescent X-ray hole 14 Notch 15 Shield 20 High-resolution X-ray microscope with X-ray fluorescence analysis function 21 Conventional high-resolution X-ray microscope with X-ray fluorescence analysis function

Claims (5)

A detector that focuses an electron beam on a target for X-ray generation by an objective lens, and detects fluorescent X-rays generated from the sample by irradiating the sample with X-rays generated from the target, and a detection result of the detector A high-resolution X-ray microscope with a fluorescent X-ray analysis function, comprising an analysis unit for analyzing the fluorescent X-rays from
The high-resolution X-ray microscope with the fluorescent X-ray analysis function is a fluoroscopic X-ray microscope that detects X-rays transmitted through the sample,
Incorporating all or part of the detector in the magnetic circuit of the objective lens;
All or part of the detector is inserted between the pole piece upper pole and the pole piece lower pole of the objective lens,
The sample is disposed below the pole piece lower pole of the objective lens,
A high-resolution X-ray microscope with a fluorescent X-ray analysis function, wherein a notch for fitting the detector is provided in one or both of the pole piece upper pole and the pole piece lower pole of the objective lens. Between the target and the sample, a stop for limiting the elemental analysis region of the sample irradiated with the X-ray is provided, and the stop has a circular or rectangular hole for passing the X-ray; the fluorescent X-ray fluorescence X-ray analysis function high resolution X-ray microscope system as claimed in claim 1 which comprises a fluorescent X-ray holes for passing. The stage with the fluorescent X-ray analysis function according to claim 2 , further comprising a stage for moving the position of the diaphragm, wherein the position of the element analysis region can be moved by moving the position of the diaphragm by the stage. Resolution X-ray microscope. An X-ray image detector that detects X-rays irradiated from the target and transmitted through the sample; and a fluoroscopic image display unit that displays a fluoroscopic image from a detection result of the X-ray image detector. The high-resolution X-ray microscope apparatus with a fluorescent X-ray analysis function according to claim 2 or 3 , wherein the position of the elemental analysis region can be confirmed. The fluorescence according to any one of claims 2 to 4 , wherein a shielding portion is provided on a part of a lower surface and a part of a side surface of the X-ray transmission window base material supporting the target to shield scattered X-rays. High resolution X-ray microscope with X-ray analysis function.