JP5486196B2 - Pressure medium gas purification device and pressure medium gas supply and recovery device for hot isostatic pressurization device - Google Patents

Description

  The present invention is provided in a pressure medium gas supply / recovery device for supplying and recovering a pressure medium gas to a hot isotropic pressure pressurization device, and is subjected to hot isotropic pressure application for removing at least oxygen as an impurity in the pressure medium gas. The present invention relates to a pressure medium gas purification device for a pressure device, and a pressure medium gas supply and recovery device for a hot isostatic pressurization device including the pressure medium gas purification device.

  A hot isostatic pressurization apparatus (hereinafter also referred to as a HIP apparatus) is filled with a pressure medium gas made of an inert gas in a high-pressure vessel forming a processing chamber, and the object to be processed accommodated in the high-pressure vessel This is an apparatus for processing a product in a high-temperature and high-pressure gas atmosphere. It is a hot isostatic pressing process (hereinafter also referred to as HIP process) that crushes and eliminates cast nests, gas pores, or residual pores in the sintered body. ). In recent years, the size of the HIP apparatus has been increased, and the amount of consumption (consumption) of inert gas such as argon gas used for HIP processing is increasing.

  That is, normally, in the HIP process, argon gas, which is a pressure medium gas, is transferred from a gas cylinder (pressure medium gas source) having a gas pressure of 15 MPa or 20 MPa to a high pressure container (hereinafter also referred to as a main body high pressure container) of the HIP apparatus. When the pressure in the main body high-pressure vessel is low, the pressure is supplied using the pressure difference between the two. Next, when the pressure in the main body high-pressure container reaches a pressure equivalent to that of the gas cylinder, the argon gas from the gas cylinder is pressurized by driving the compressor, and is filled in the main body high-pressure container at a predetermined, for example, 100 MPa. And after maintaining the inside of the main body high-pressure vessel in a high-temperature high-pressure gas atmosphere and performing the HIP treatment, when the temperature inside the main body high-pressure vessel drops to about 600 ° C. or less, the argon in the main body high-pressure vessel is first put into the gas cylinder. It is recovered using the pressure difference between the two. Next, when the pressure in the main body high-pressure vessel reaches a pressure equivalent to that of the gas cylinder (usually 15 to 20 MPa), the argon from the main body high-pressure vessel is pressurized by driving the compressor and collected in the gas cylinder. The

  However, when the pressure in the main body high-pressure vessel is reduced to about 3 MPa, the efficiency of the compressor is reduced and the recovery rate of argon gas is slowed even if the compressor is driven. It takes a long time to open and take out the processed product, resulting in a decrease in productivity.

For this reason, normally, when the pressure in the main body high-pressure vessel is reduced to about 3 MPa, the argon gas remaining in the main body high-pressure vessel is released into the atmosphere and discarded. This argon gas waste amount depends on the size (processing chamber volume) of the HIP apparatus, but it is 8 to 12% of the initially filled argon gas. It becomes very large as the frequency of operation of the apparatus increases. The argon gas used must have a purity of 99.99% or more, and its price is as high as 500 to 1000 yen / Nm ³ .

Therefore, for example, in the case of a recent large HIP apparatus, the dimensions of a processing chamber forming a cylindrical space are 1.6 m in diameter × 4 m in height and operated at a temperature of 1200 ° C. × pressure of 100 MPa, The amount of argon gas filled in the container becomes 6000 Nm ^3, and if 10% of the argon gas is released by one HIP process, the gas in the amount of 300,000 to 600,000 yen is thrown away. It will be. Therefore, it is preferable to collect and use as much argon gas as possible in the main body high-pressure vessel after the HIP treatment so that the amount of argon gas released into the atmosphere is as small as possible. Moreover, from the viewpoint of environmental conservation in addition to the economic viewpoint, the amount of argon gas released to the atmosphere should be as small as possible.

Note that in order to increase the recovery of argon gas, a piping system for gas recovery connected to the body pressure vessel was larger diameter, at the time when lowered to a pressure of, for example, 3MPa about the body high pressure vessel, large This can be realized by collecting in a gas collecting device of 10 to 15 MPa, which is a pressure medium gas source, or in a gas cylinder. However, in a conventional HIP apparatus having a diameter of 600 mm and a height of 2 m, which is not increased in size, installing such a gas recovery apparatus is more expensive than discharging argon gas. The fact is that I have come.

  Now, when the lid is opened and the product to be processed is inserted into the main body high-pressure vessel, air with humidity is mixed, and moisture and gas components adsorbed on the product to be processed are HIP processed. In the process, it is released into argon gas, which is a pressure medium gas. For this reason, the argon gas recovered after the HIP treatment usually contains oxygen, hydrogen, carbon dioxide, or hydrocarbon components due to moisture as impurities. Therefore, when the argon gas recovered in the HIP process is repeatedly used, these components are concentrated and the surface of the processed product is contaminated.

  For this reason, even if it is recovered without being released and the shortage is replenished with new argon gas, the amount of the impurity component is managed so as not to exceed the allowable value (for example, 500 ppm) by repeated use. The actual situation is that the entire amount of argon gas from the argon gas source must be discarded at a rate of once after 20 to 30 HIP treatments.

  By the way, with regard to a technique for removing impurities in the argon gas in order to recover and reuse the argon gas after the HIP process (pressure gas purification technique), for example, conventional techniques 1 and 2 described below. It has been known. In these conventional techniques, removal of oxygen, which is an impurity which is a problem particularly in HIP processing of a cast product of Ti alloy or Ni alloy, is an object, and in order to remove oxygen in the argon gas, oxygen is contained in the container. A reaction vessel filled with a metal (getter material) having a strong affinity and heated by a heating device provided outside the vessel is provided. Examples of the metal having a strong oxygen affinity include Al, Ti, and Zr.

  In prior art 1 (Japanese Utility Model Publication No. 58-40975), as shown in FIG. 6, there is proposed a reactor in which a reaction vessel is provided in a gas recovery line for recovering argon gas after HIP processing.

That is, as shown in FIG. 6, argon gas in an argon gas holder (pressure medium gas source) 202 is press-fitted through compressors 203 and 204 into a main body high-pressure vessel 201 charged with a product to be processed, and the main body A hot isotropic pressure pressurizing apparatus that performs HIP processing on the product to be processed in a high-pressure and high-pressure gas atmosphere in a high-pressure vessel 201 and then recovers the argon gas in the main body high-pressure vessel 201 to the argon gas holder 202. In the (hot isostatic pressing apparatus), a gas supply line 207 for supplying argon gas from the argon gas holder 202 to the main body high-pressure vessel 201 and an argon gas from the main body high-pressure vessel 201 to the argon gas holder 202 are recovered. A gas recovery line 208 is provided, and the gas recovery line 208 has a strong oxygen affinity in the container. Genus (getter material) is filled, and is provided 'reaction vessel 205 and 205 equipped with a' heating device 206 and 206 to the outside of the container. V ₁ ~V ₁₀ is a valve.

  The reaction vessels 205 and 205 ′ are provided in parallel in the gas recovery line 208 so that when the getter material in one reaction vessel is replaced, the reaction vessels 205 and 205 ′ can be operated by switching to the other reaction vessel.

When the HIP process is completed in the HIP apparatus configured as described above, the argon gas is recovered through the gas recovery line 208. First, the valves V ₄ , V ₅ , and V ₆ of the gas recovery line 208 are opened, and the argon gas in the main body high-pressure vessel 201 is initially generated by the pressure difference between the inside of the main body high-pressure vessel 201 and the outside of the vessel that is initially held at a high pressure of 100 MPa. The argon gas of 100 MPa is reduced to about 15 MPa by the pressure reducing valve V ₅ and recovered through the gas recovery line 208. At this time, the oxygen contained in the argon gas is removed by reacting with the getter material in the reaction vessel 205 (or 205 ′) provided in the gas recovery line 208.

Next, when the internal pressure of the main body high pressure vessel 201 and the argon gas holder 202 is balanced and natural recovery becomes impossible, the valve V ₆ is closed, the valves V ₇ and V ₈ are opened, and the main body high pressure vessel 201 is passed through the bypass line 209. The argon gas from is increased in pressure by the low-pressure compressor 203 and is forcibly recovered through the reaction vessel 205 of the gas recovery line 208. When the pressure in the main body high-pressure vessel 201 drops to about several to 10 atm (1 MPa), the valves V ₄ , V ₅ , V ₇ , and V ₈ are closed to complete the recovery of the argon gas.

Further, in the prior art 2 (Japanese Utility Model Publication No. 58-40976), as shown in FIG. 7, the compressors 303 and 304 in the gas supply line 307 for supplying argon gas from the argon gas holder 302 to the main body high-pressure vessel 301 and the main body. A hot isostatic pressing device (hot isostatic pressing device) is proposed in which reaction vessels 305 and 305 ′ having heating devices 306 and 306 ′ are provided outside the vessel between the high pressure vessel 301. Yes. In FIG. 7, V _{1 to} V ₉ are valves, 308 is a gas recovery line, and 309 and 309 ′ are bypass lines.

Japanese Utility Model Publication No. 58-40975 Japanese Utility Model Publication No. 58-40976

  However, in the above-described prior art 2, since the reaction vessel 305 is provided between the discharge side of the high-pressure compressor 304 in the gas supply line 307 and the main body high-pressure vessel 301, the reaction vessel 305 is the main body high-pressure vessel. The high pressure state at the same level as 301 is required, and the reaction vessel 305 needs to have the same pressure resistance as the main body high pressure vessel 301, resulting in a very thick high pressure vessel.

  In the prior arts 1 and 2 described above, the reaction vessels (reactors) 205 and 305 are filled with a metal having a strong oxygen affinity in the vessel, and this is heated by the heating devices 206 and 206 provided outside the vessel. This is an externally heated high-pressure vessel heated at 306. In the case of reacting with oxygen using a metal having a strong oxygen affinity, such as Ti or Zr, the temperature inside the reaction vessel is preferably about 450 to 600 ° C. 305 was difficult to cool the container due to the external heating type, and there was nothing to be put into practical use from the viewpoint of the heat resistance of the container material (container durability). For this reason, at the production site using the HIP apparatus, the getter material such as Ti foil is inserted into the processing chamber of the main body high-pressure vessel together with the processing object to prevent oxidation of the surface of the processing object. Was the actual situation.

  Therefore, an object of the present invention is to remove impurities such as oxygen in the pressure medium gas when supplying and recovering the pressure medium gas made of an inert gas to the hot isostatic pressure pressurizer, and in practical use. The pressure medium gas purification device for a new hot isostatic pressurization device that can be used for the same, and the pressure medium gas purification device are provided, and the waste amount of the pressure medium gas is greatly reduced compared to the conventional case. An object of the present invention is to provide a pressure medium gas supply / recovery device for a hot isostatic pressurizing device.

  In order to solve the above problems, the present invention takes the following technical means.

The invention of claim 1 is a pressure medium gas that supplies and recovers a pressure medium gas to a hot isostatic pressurizing apparatus that treats an object to be processed in a high temperature and high pressure gas atmosphere using a pressure medium gas that is an inert gas. A pressure medium gas purification device for a hot isotropic pressure pressurization device, which is provided in a supply and recovery device and removes at least oxygen as an impurity in the pressure medium gas by introducing the pressure medium gas. A high-pressure vessel having an opening and a pressure-medium gas discharge port, water-cooling cooling means for cooling the high-pressure vessel attached to the outside of the high-pressure vessel, and the introduction of the pressure-medium gas provided in the high-pressure vessel A pressure medium gas flow path forming member that forms a flow path of a pressure medium gas introduced from the opening and discharged from the pressure medium gas discharge port; and an impurity removing ability that is disposed along the pressure medium gas flow path. Material, provided in the high-pressure vessel and having the ability to remove impurities And a heating means for heating the charge, a material is a metal material having the impurity removal ability, by disposing the electrical resistance heater wire made of the metal material along the medium gas flow path, wherein A pressure medium gas purifying device for a hot isostatic pressurizing device , wherein the material having an impurity removing ability and the heating means are combined .

The invention of claim 2 is the pressure medium gas purifying apparatus for hot isostatic pressing device of claim 1, wherein the material of the medium gas flow path forming member is made of ceramics, piezoelectric medium gas channel The electric resistance heater wire made of a metal material having the impurity removing ability is wound around the outer peripheral surface of the forming member.

A third aspect of the present invention is the pressure medium gas purification apparatus for a hot isostatic pressurization apparatus according to the first or second aspect , wherein the high-pressure vessel is mounted in a detachable manner to the lower lid and the lower lid. It is composed of a cup-shaped body, and a pressure medium gas introduction pipe and a pressure medium gas discharge pipe communicating with the inside of the high pressure vessel are housed in the lower lid, and power is supplied to the electric resistance heater wire. The heater power supply wiring for this purpose is housed so that it can be connected to and disconnected from the electric resistance heater wire.

According to a fourth aspect of the present invention, in the pressure medium gas purifying device for a hot isostatic pressurizing apparatus according to the third aspect, the pressure medium gas flow path forming member and the electric resistance heater wire are integrally assembled. A gas purification unit body is mounted on the lower lid, and a plug-in connector of the heater power supply wiring connected to the connector of the electric resistance heater wire in a plug-in structure is attached to the lower lid It is characterized by being.

A fifth aspect of the present invention is the pressure sensor gas purification apparatus for a hot isostatic pressurization apparatus according to any one of the first to fourth aspects, wherein the temperature measuring sensor measures the temperature of the heating means. It is characterized by having at least one.

The invention of claim 6 comprises the pressure medium gas purification device for a hot isostatic pressurization device according to any one of claims 1 to 5 , and is covered with a pressure medium gas made of an inert gas. A pressure medium gas supply / recovery device for supplying and recovering a pressure medium gas to a hot isostatic pressure device for processing a processed product in a high temperature / high pressure gas atmosphere, and storing the high pressure medium gas A medium pressure source, a medium pressure medium gas source containing medium pressure medium gas, a low pressure medium gas source containing low pressure medium gas, and a compressor, the medium pressure medium A pressure medium gas supply line that communicates a gas source with the hot isostatic pressurization device; and the pressure medium gas purification device, the hot isostatic pressurization device and the intermediate pressure medium gas source; A high pressure pressure gas recovery line, a high pressure pressure gas supply line for connecting the high pressure pressure gas source and the high pressure gas supply line, and the low pressure gas recovery line. A low pressure pressure medium gas supply line connecting the pressure medium gas source and the pressure medium gas supply line, a pressure medium gas outlet side of the pressure medium gas purification device of the pressure medium gas recovery line, and the low pressure pressure medium gas source A pressure medium gas supply and recovery device for a hot isostatic pressurization device, comprising: a low pressure pressure gas recovery line that communicates with

The invention of claim 7 is the pressure medium gas supply and recovery device for the hot isostatic pressurization device according to claim 6 , wherein the pressure medium gas recovery line has at least two pressure medium gas purification devices, These pressure medium gas purification devices are provided so that they can be switched alternately.

A pressure medium gas purifying apparatus for a hot isostatic pressurizing apparatus according to the present invention comprises a heating means for heating a material having an impurity removing ability arranged in a high-pressure vessel, unlike the conventional apparatus. Therefore, the high-pressure vessel can be cooled by a water- cooled cooling means attached to the outside of the high-pressure vessel. Therefore, according to the present invention, at least oxygen in the pressure medium gas can be removed, and the pressure medium for a new hot isostatic pressure apparatus that can cool the high pressure vessel and can be put to practical use. A gas purification device can be provided.

  A pressure medium gas supply / recovery device for a hot isostatic pressurizing apparatus according to the present invention includes the pressure medium gas purification device that can be put to practical use. Therefore, unlike the prior art, it is possible to eliminate discarding the entire amount of the hydraulic fluid gas from the hydraulic fluid gas source at a rate of once after 20 to 30 HIP treatments. In addition to the high-pressure pressure medium gas source and the medium-pressure pressure medium gas source, the pressure medium gas source includes a low-pressure pressure medium gas source that contains a low-pressure pressure medium gas. It is comprised so that the pressure medium gas after a process may be collect | recovered. Therefore, when recovering the pressure medium gas after the HIP treatment, the pressure of the pressure medium gas in the HIP apparatus main body high-pressure vessel that starts to be released into the atmosphere can be reduced from about 3 MPa to about 0.3 MPa. Compared with the case of releasing to the atmosphere from about 3 MPa, it is possible to greatly reduce the amount of discarded pressure medium gas without significantly extending the operation time.

1 is a front longitudinal sectional view schematically showing a configuration of a pressure medium gas purification device for a hot isotropic pressure pressurizing device according to an embodiment of the present invention. It is a figure for demonstrating the mode of replacement | exchange of a gas purification unit body in the pressure medium gas purification apparatus shown in FIG. It is a front longitudinal cross-sectional view which shows schematically the structure of the hydraulic fluid gas purification apparatus for hot isostatic pressurization apparatuses by another embodiment of this invention. It is a front longitudinal cross-sectional view which shows roughly the structure of the hydraulic fluid gas purification apparatus for hot isostatic pressurization apparatuses by a reference example . It is a figure which shows roughly the structure of the hydraulic-medium gas supply and recovery apparatus for hot isostatic pressurization apparatuses by one Embodiment of this invention. It is a figure which shows the structure of the conventional HIP apparatus. It is a figure which shows the structure of the conventional HIP apparatus.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. First, a pressure medium gas purification device (hereinafter, also simply referred to as a pressure medium gas purification device) for a hot isostatic pressurization device of the present invention will be described.

  FIG. 1 is a front longitudinal sectional view schematically showing a configuration of a pressure medium gas purification device for a hot isostatic pressurizing device according to an embodiment of the present invention.

  In FIG. 1, 10 is a high-pressure vessel made of steel. The high-pressure vessel 10 is composed of an inverted cup-shaped body portion 20 having a circular cross section and a disc-like lower lid 30, and a gas purification unit body 80 described later is housed in a cylindrical space formed inside the vessel. . And as a cooling means that is mounted outside the high-pressure vessel 10 and cools the high-pressure vessel 10, a water cooling jacket 40 having a cooling water passage 41 through which cooling water flows is provided around the outer periphery of the inverted cup-shaped body 20. It is mounted via seal rings 42 and 43.

  In this embodiment, the high-pressure vessel 10 is applied to a pressure level (medium pressure level) at which the pressure in the vessel is about 30 MPa. While the screw 20a is formed, a male screw 30a that can be screwed into the female screw 20a is formed on the outer periphery of the small diameter portion of the lower lid 30 (see FIG. 3). The inverted cup-shaped body 20 is detachably attached by the screws 20a and 30a by rotating 45 degrees in the circumferential direction with respect to the lower lid 30 fixed to the gantry or the like.

  Note that the attachment / detachment structure between the lower lid and the inverted cup-shaped body (attachment / detachment structure) is not the screw structure as described above when applied to a higher pressure level in the container. And the inverted cup-shaped body is a simple fitting structure through the seal ring, and the axial load generated by the gas pressure of the pressure medium gas is placed so as to surround the lower lid and the inverted cup-shaped body It is preferable to have a structure that is held by a pressed window frame-shaped press frame. In addition, when the pressure level is lower, the inverted cup-shaped body may be thinner, and a clutch-type structure that can be easily opened and closed can be used as the attachment / detachment structure between the lower lid and the inverted cup-shaped body. It is.

  In the lower lid 30, a pressure medium gas introduction pipe 31 for introducing a pressure medium gas from the main body high pressure vessel of the HIP apparatus into the high pressure vessel 10 after the HIP treatment, and a pressure medium gas from which oxygen has been removed. Is stored in the high-pressure vessel 10. The tip of the pressure medium gas introduction pipe 31 is drawn out to the central portion in the radial direction of the lower lid 30, and the pressure medium gas introduction port 10 a is opened in the high pressure vessel 10 by the pressure medium gas introduction pipe 31. The tip of the pressure medium gas discharge pipe 32 is drawn out to the peripheral portion in the radial direction of the lower lid 30, and the pressure medium gas discharge port 32 opens the pressure medium gas discharge port 10 b in the high pressure vessel 10. Yes.

  Further, a heater power supply wiring 33 and conductors (not shown) for thermocouples 62 and 63, which will be described later, are housed in the lower lid 30, and the heater power supply wiring is provided on the upper surface of the lower lid 30. A plug-in connector 34 connected to the wiring 33 and a plug-in connector (not shown) connected to the conducting wire are attached.

  In addition, the high-pressure vessel 10 has a cylindrical shape, an inner cylinder 51 extending in the vertical direction, and an inverted cup shape with a circular cross section, and is concentrically spaced from the inner cylinder 51 outside the inner cylinder 51. A pressure medium gas flow path forming member that forms a flow path of a pressure medium gas introduced from the pressure medium gas inlet 10a and discharged from the pressure medium gas outlet 10b. 50 is provided. In the present embodiment, the inner cylinder 51 and the outer cylinder 52 are made of alumina, which is an electrically insulating ceramic. The inner cylinder 51 is attached to the upper surface of a steel base plate 70 having a through hole at the center and forming a circle, and the tip of the pressure gas introducing pipe 31 protrudes from the through hole. The outer cylinder 52 is supported by an outer cylinder support member (not shown) so that its ceiling surface is located above the upper end of the inner cylinder 51 and its lower end is located above the lower end of the inner cylinder 51. It is supported.

  A cylindrical heat insulator 72 is positioned outside the outer cylinder 52 concentrically with a space from the outer cylinder 52. The heat insulator 72 is attached to the base plate 70 with its lower end protruding below the base plate 70. A seal ring 71 is attached to the leg portion of the base plate 70.

  And in this embodiment, it is comprised so that the heating means which heats the material which has the impurity removal capability which removes at least oxygen as an impurity in pressure medium gas, and this material which has this impurity removal capability may be used.

  That is, the electric resistance heater wire 60 is wound around the outer peripheral surface of the inner cylinder 51 along the longitudinal direction, and in the present embodiment, it is connected in series to the outer peripheral surface of the outer cylinder 52 in the longitudinal direction. It is wound along. The electric resistance heater wire 60 is made of a metal having a strong oxygen affinity as a material having an impurity removing ability. Examples of the metal having strong oxygen affinity include Ti and Zr which are stable at room temperature and become active by heating.

  A heater wire connector 61 to which the start and end leads of the electric resistance heater wire 60 are connected is attached to the base plate 70. The connector 61 of the electric resistance heater wire 60 and the plug-in connector 34 of the heater power supply wiring 33 are connected in a plug-in structure.

  Further, in order to measure the temperature of the electric resistance heater wire 60 for the purpose of controlling the temperature of the electric resistance heater wire 60, the position near the electric resistance heater wire 60 wound around the outer peripheral surface of the inner cylinder 51 is measured. A thermocouple 62 is disposed on the outer peripheral surface of the outer cylinder 52, and a thermocouple 63 is disposed in the vicinity of the electric resistance heater wire 60 wound around the outer peripheral surface of the outer cylinder 52. A connector (not shown) connected to the conductor terminals of these thermocouples 62 and 63 is attached to the base plate 70, and this connector and the above-described thermocouple plug-in connector have a plug-in structure. It is to be connected with.

  In this way, the gas purification unit body 80 (FIG. 2) in which the pressure medium gas flow path forming member 50, the electric resistance heater wire 60, the thermocouples 62 and 63, the heat insulator 72, and the base plate 70 are assembled together. Is formed on the lower lid 30.

  Hereinafter, the operation of the pressure medium gas purification apparatus 1 of the present embodiment configured as described above will be described.

  When the high-pressure argon gas is recovered from the main body high-pressure vessel of the HIP processing apparatus, the argon gas introduced from the main body high-pressure vessel is introduced into the high-pressure vessel 10 from the pressure medium gas inlet 10a. The argon gas that has flowed into the high-pressure vessel 10 rises inside the inner cylinder 51 and then reverses its direction, and a gas flow path formed between the inner cylinder 51 and the outer cylinder 52 is formed on the outer peripheral surface of the inner cylinder 51. The gas flow path formed between the outer cylinder 52 and the heat insulating body 72 is lowered by contacting the electric resistance heater wire 60 that is wound and generating resistance and descending, and reverses the direction again. The gas flow path is formed between the heat insulator 72 and the inverted cup-shaped body 20 and finally rises while being in contact with the electric resistance heater wire 60 generating resistance heat. And is led from the pressure medium gas discharge port 10b to the pressure medium gas discharge pipe 32.

  The argon gas flowing into the high-pressure vessel 10 comes into contact with the high-temperature electric resistance heater wire 60 made of a metal having a strong oxygen affinity, so that oxygen in the argon gas and the electric resistance heater wire 60 are Reacts to remove oxygen from the argon gas.

  Thus, in the pressure medium gas purification apparatus 1 of the present embodiment, since the electric resistance heater wire 60 made of a metal having a strong oxygen affinity is a heat generation source, the member that reaches the maximum temperature in the high-pressure vessel 10 is an electric member. A resistance heater wire 60, which is very convenient in many materials in combination with the fact that the reaction with oxygen is more active at higher temperatures.

  When the electric resistance heater wire 60 made of Ti or Zr is used, the temperature of the electric resistance heater wire 60 due to resistance heat generation preferably satisfies the range of 450 to 600 ° C. Therefore, the temperature of the electric resistance heater wire 60 is measured by the thermocouples 62 and 63, and based on the measurement result, the electric resistance heater wire 60 is adjusted so that the temperature of the electric resistance heater wire 60 satisfies the above range. What is necessary is just to control the heater electric power given to.

  Here, since the internal temperature of the high-pressure vessel 10 becomes a high temperature of 450 to 600 ° C., the high-pressure vessel 10 made of steel is preferably made to have a vessel temperature of 150 ° C. or less from the viewpoint of durability. The container 10 needs to be cooled. The pressure medium gas purification apparatus 1 of the present embodiment is different from the prior art in which a metal having a strong oxygen affinity is filled in a high-pressure vessel and heating means for heating the metal is provided outside the high-pressure vessel. Thus, the electric resistance heater wire 60 is used as a metal having high affinity for oxygen (a material having an impurity removing ability) and a means for heating the same, and the electric resistance heater wire 60 is provided in the high-pressure vessel 10. Therefore, the high pressure vessel 10 can be cooled by the water cooling jacket 40 mounted around the outer periphery of the inverted cup-shaped body 20.

  In the pressure medium gas purification device 1 of the present embodiment, the electric resistance heater wire 60 made of Ti or Zr reacts with oxygen in the argon gas, so that an oxide is formed from the surface as time passes. The electrical resistance gradually increases and the oxygen removal efficiency decreases. Therefore, the electric resistance value of the electric resistance heater wire 60 may be measured at an appropriate period pitch, and replaced with a new one when the electric resistance value becomes equal to or higher than a predetermined electric resistance value. As described above, the pressure medium gas purification apparatus 1 of the present embodiment also has an advantage that the replacement timing of the electric resistance heater wire 60 can be easily known from the change in the electric resistance value of the electric resistance heater wire 60.

  And in the pressure medium gas purification apparatus 1 of this embodiment, while being provided with the said gas purification unit body 80, the electrical resistance heating heater wire 60 incorporated in the gas purification unit body 80 mounted in the lower cover 30 is the bottom. Since the plug-in connector 34 attached to the lid 30 is configured to be connected / disconnected with a plug-in structure, the electric resistance heater wire 60 can be easily replaced in a short time.

  That is, as shown in FIG. 2, the inverted cup-shaped body 20 to which the water-cooling jacket 40 is attached is rotated 45 degrees to loosen the screw portions 20a and 30a, and the lower lid 30 fixed to the gantry is removed. The inverted cup-shaped body 20 is removed and carried to a predetermined place. Next, when the gas purification unit body 80 is slightly lifted, the connector 61 (the connector 61 is attached to the base plate 70) of the electric resistance heater wire 60 of the gas purification unit body 80 is attached to the lower lid. Since the plug-in connector 34 attached to the connector 30 is disconnected, the gas purification unit body 80 can be transported to a predetermined place as it is. Then, the gas purification unit body 80 equipped with the new electric resistance heater wire 60 is lowered from above the lower lid 30 and placed at a predetermined position of the lower lid 30, so that the connector 61 is directly connected to the plug-in connector 34. Will be connected with a plug-in structure. The thermocouples 62 and 63 are similarly attached and detached.

  FIG. 3 is a front longitudinal sectional view schematically showing a configuration of a pressure medium gas purification device for a hot isostatic pressurizing device according to another embodiment of the present invention. Here, the same parts as those in the pressure medium gas purification apparatus 1 shown in FIG. 1 are denoted by the same reference numerals as those in FIG.

  As shown in FIG. 3, the high pressure vessel 10 ′ of the pressure medium gas purification device 2 includes an inverted cup-shaped body portion including a cylindrical body portion 21 and a disc-shaped upper lid 22, and a lower lid 30 ′. Has been. A water cooling jacket 40 is attached around the outer periphery of the cylindrical body 21. A pressure medium gas discharge pipe 32 ′ is accommodated in the upper lid 22.

  In the pressure medium gas purification device 2 of this embodiment, as shown in FIG. 3, the argon gas flowing into the high pressure vessel 10 ′ through the pressure medium gas introduction pipe 31 accommodated in the lower lid 30 ′ Gas passage inside 51 → Gas passage between inner cylinder 51 and outer cylinder 52 → Gas medium accommodated in upper lid 22 via a gas passage between outer cylinder 52 and heat insulator 72 ′ It is led to the gas discharge pipe 32 '.

  Also in the pressure medium gas purification device 2 configured in this way, as in the pressure medium gas purification device 1 shown in FIG. 1, oxygen in the argon gas recovered from the main body high-pressure vessel of the HIP processing apparatus can be removed. In addition, the high-pressure vessel 10 ′ can be cooled by the water cooling jacket 40 mounted around the outer periphery of the cylindrical body 21. In the pressure medium gas purification device 2, when the electric resistance heater wire 60 is replaced, the pressure stored in the upper lid 22 is moved each time in order to move the cylindrical body 21 with the upper lid 22 attached. It is necessary to disconnect the connecting portion of the medium gas discharge pipe 32 '.

FIG. 4 is a front longitudinal sectional view schematically showing a configuration of a pressure medium gas purification device for a hot isostatic pressurizing device according to a reference example .

A different point from the said pressure medium gas purification apparatus 1 is demonstrated. As shown in FIG. 4, in the pressure medium gas purification apparatus 3 of the reference example, a pressure medium gas flow path forming member 50 ′ is constituted by an inner cylinder 51 ′ and an outer cylinder 52 ′ made of metal or ceramics. Between the outer peripheral surface of the inner cylinder 51 ′ and the inner peripheral surface of the outer cylinder 52 ′, a packed layer 90 of a metal having a strong oxygen affinity, for example, a metal having a high oxygen affinity filled with small pieces of Ti or Zr. Is formed. An electric resistance heater wire 91 made of nichrome wire is wound around the outer peripheral surface of the outer cylinder 52 ′. 92 is a thermocouple. In the lower lid 30 ″ , a pressure medium gas introduction pipe 31, a pressure medium gas discharge pipe 32 ′, and a heater power supply wiring 33 ′ are housed. The lower lid 30 ″ and the inverted cup-shaped body portion 20 provide a high pressure. A container 10 "is constructed.

In the pressure medium gas purification device 3 configured as described above, when the high pressure argon gas is recovered from the main body high pressure vessel of the HIP processing apparatus, the argon gas flowing into the high pressure vessel 10 ″ through the pressure medium gas introduction pipe 31 is Then, the inside of the inner cylinder 51 is raised, the direction is reversed, and the inside of the packed layer 90 of the metal having high affinity for oxygen heated by the electric resistance heater wire 91 is lowered while being in contact with the metal. The medium gas discharge port 10b leads to the pressure medium gas discharge pipe 32 '. Thereby, the argon gas flowing into the high-pressure vessel 10 " removes oxygen in the gas.

  Next, a pressure medium gas supply / recovery device (hereinafter, also simply referred to as a pressure medium gas supply / recovery device) for the hot isostatic pressurization device of the present invention will be described.

  FIG. 5 is a diagram schematically showing a configuration of a pressure medium gas supply / recovery device for a hot isostatic pressurizing device according to an embodiment of the present invention.

  In FIG. 5, 100 is a main body high-pressure vessel of the HIP apparatus. 111 is a high pressure Ar gas collecting device as a high pressure medium gas source, 112 is a medium pressure Ar gas collecting device as a medium pressure medium gas source, and 113 is a low pressure Ar gas collecting device as a low pressure medium gas source. In this embodiment, the gas pressure of the high-pressure Ar gas collecting device 111 is in the range of more than 30 MPa and 50 MPa or less, the gas pressure of the medium-pressure Ar gas collecting device 112 is in the range of 3 MPa to 30 MPa, and the low-pressure Ar gas collecting device 113. The gas pressure is 1 MPa or less.

  A pressure medium gas supply line 130 communicates from the intermediate pressure Ar gas collecting device 112 to the main body high-pressure vessel 100 of the HIP device. The pressure medium gas supply line 130 includes a manual closing valve MV3, a blocking valve V6, a blocking valve V1, a filter 161, a compressor 141, a blocking valve V2, a compressor 142, and a manual blocking in order from the upstream side. A stop valve MV1 is provided.

  Further, a pressure medium gas recovery line 131 communicates from the main body high-pressure vessel 100 of the HIP device to the medium pressure Ar gas collecting device 112. The pressure medium gas recovery line 131 includes, in order from the upstream side (the main body high-pressure vessel 100 side), a closing valve V3, a pressure reduction regulator 151, and pressure medium gas purification devices 120 and 120 ′ connected in parallel. Yes. A manual closing valve MV5 is provided on the gas introduction side of the pressure medium gas purification device 120, and a manual closing valve MV6 is provided on the gas discharge side. Similarly, a manual closing valve MV5 'is provided on the gas introduction side of the pressure medium gas purification device 120', and a manual closing valve MV6 'is provided on the gas discharge side.

  In this embodiment, the pressure medium gas purification devices 120 and 120 'are the pressure medium gas purification devices having the above-described configuration for the intermediate pressure level shown in FIG.

  Of these two pressure medium gas purification devices 120 and 120 ', only one of them is normally used, even if the electric resistance heater wire made of a metal having a strong oxygen affinity is replaced. It is provided so that it can be operated by alternately switching so that the gas purification is not interrupted. During operation of the pressure medium gas purification device 120, the manual closing valves MV5 'and MV6' located before and after the other pressure medium gas purification device 120 'are closed.

  Further, a high pressure medium having a manual closing valve MV2 and a blocking valve V4 between the compressor 141 and the blocking valve V2 in the pressure medium gas supply line 130 from the high pressure Ar gas collecting device 111. A gas supply line 132 is in communication.

  Further, the low pressure Ar gas collecting device 113 includes a manual block valve MV4 and a compressor 143 between the manual block valve MV3 and the block valve V6 in the pressure medium gas supply line 130. A pressure medium gas supply line 133 communicates.

Furthermore, the low pressure from between 'the manual stop valve MV6, MV6 located on the gas discharge side of' the said stop valve V6 the medium gas purifying apparatus 120 and 120 in the medium gas recovery line 13 1 The Ar gas collecting device 113 communicates with a low-pressure medium gas recovery line 134 having a blocking valve V7 and a decompression regulator 162.

  Reference numeral 135 denotes a new gas supply line that communicates with the most upstream part of the pressure medium gas supply line 130, and 136 includes a closing valve V <b> 5 and a vacuum pump P <b> 1. It is the evacuation line for gas replacement in communication. 137 has a closing valve V11 and a vacuum pump P2, and communicates with the outlet side of the manual closing valves MV6, MV6 ′ in the pressure medium gas recovery line 131 (the most upstream portion of the low pressure pressure medium gas recovery line 134). This is a vacuum line for a pressure medium gas purification device. Reference numeral 138 is a line that has a blocking valve V9 and communicates from the outlet side of the blocking valve V4 in the high pressure medium gas supply line 132 to the inlet side of the blocking valve V3 in the pressure medium gas recovery line 131. G1 to G6 are pressure gauges.

  The role of the vacuum line 137 for the pressure medium gas purification device will be described. When the electric resistance heater wire made of a metal having a strong oxygen affinity is replaced with the pressure medium gas purification device 120, a high pressure container is used. In order to remove the remaining air that has entered the interior, after the replacement is completed, the manual block valves MV5 and MV6 ′ are closed, the manual block valves MV6 and V11 are opened, and the vacuum pump P2 is operated. Thus, the air is removed. The same applies to the other pressure medium gas purification device 120 '.

  Hereinafter, the operation of the pressure medium gas supply and recovery apparatus of the present embodiment configured as described above will be described.

  First, in order to remove the atmosphere mixed with the opening and closing of the main body high-pressure container 100 after the article to be processed is usually stored in the main body high-pressure container 100 of the HIP apparatus, the main body high-pressure container 100 is removed by the gas substitution vacuum drawing line 136. The inside is evacuated. Further, in order to remove residual air in the main body high-pressure vessel 100, 0.3 to 1 MPa argon gas from the low-pressure Ar gas collecting device 113 is supplied to the low-pressure pressure medium gas supply line 133 (however, the compressor 143 is stopped). And the pressure medium gas supply line 130 (however, the manual closing valve MV3 is closed and the compressors 141 and 142 are stopped), the main body high-pressure vessel 100 is filled, and then the closing valve V10 is opened to open the main body high pressure. The gas in the container 100 is released to the atmosphere. Such a so-called gas replacement operation is performed once or twice. By this gas replacement operation, the concentration of air in the main body high-pressure vessel 100 becomes several tens ppm level.

  Next, the low pressure Ar gas collecting device 111, the medium pressure Ar gas collecting device 112, and the high pressure Ar gas collecting are made using the differential pressure between the gas pressure of each of the Ar gas collecting devices 111 to 113 and the gas pressure in the main body high pressure vessel 100. The main body high-pressure vessel 100 is filled with argon gas in this order from the apparatus 113.

  First, argon gas from the low pressure Ar gas collecting device 111 is supplied to the low pressure pressure medium gas supply line 133 (where the compressor 143 is stopped) and the pressure medium gas supply line 130 (however, the manual shut-off valve MV3 is closed). The compressors 141 and 142 are filled in the main body high-pressure vessel 100 in a stopped state. Subsequently, the main body high-pressure vessel 100 is filled with the argon gas from the medium pressure Ar gas collecting device 112 through the pressure medium gas supply line 130 (where the compressors 141 and 142 are stopped). Thereafter, argon gas from the high-pressure Ar gas collecting device 113 is supplied from the high-pressure medium gas supply line 132 and the shutoff valve V2 in the pressure medium gas supply line 130 and the compressor 142 (however, the compressor 142 is stopped). And it fills in the main body high-pressure container 100 via the manual closing valve MV1.

  Next, the compressors 141 and 142 are operated to forcibly fill the main body high-pressure vessel 100 with argon gas. That is, the front-stage compressor 141 or the front-stage compressor 141 and the rear-stage compressor 142 are operated, and the argon gas from the medium-pressure Ar gas collecting device 112 is moved into the main body high-pressure vessel 100 by the pressure medium gas supply line 130. Fill. In this manner, the main body high-pressure vessel 100 is filled with argon gas so that the gas pressure in the main body high-pressure vessel 100 becomes 100 MPa.

  After the article to be processed stored in the main body high-pressure vessel 100 is held at a predetermined temperature and pressure for a predetermined time, the temperature of the piping system is maintained even if the gas temperature in the main body high-pressure vessel 100 is exhausted. When the temperature reaches a safe temperature, the argon gas in the main body high-pressure vessel 100 is recovered to the Ar gas collecting devices 112 and 113.

  First, the main body high-pressure vessel 100 → pressure medium gas recovery line 131 (block valve V3 → depressurization regulator 151 → manual block valve MV5 → pressure medium gas purification device 120 → manual block valve MV6) → block valve V6. → The argon gas from the main body high-pressure vessel 100 is collected in the medium pressure Ar gas collecting device 112 through the route of the manual closing valve MV3. At this time, oxygen (impurities) in the argon gas from the main body high-pressure vessel 100 is removed by the pressure medium gas purification device 120.

  When the pressure in the main body high-pressure vessel 100 and the pressure in the medium pressure Ar gas collecting device 112 are balanced and the gas flow rate is reduced, the closing valve V6 and the manual closing valve MV3 are closed, and the closing valve V7 and the manual closing valve V Open the type block valve MV4, the main body high-pressure vessel 100 → pressure medium gas recovery line 131 → low pressure pressure medium gas recovery line 134 (block valve V7 → decompression regulator 152) → manual type block valve MV4, Argon gas from the main body high-pressure vessel 100 is collected in the low-pressure Ar gas collecting device 113. If necessary, the compressor 143 is operated at the balanced time, and the main body high-pressure vessel 100 → the pressure medium gas recovery line 131 → the closing valve V7 → the pressure reducing regulator 152 → the compressor 143 → the manual type. It is also possible to recover the argon gas from the main body high-pressure vessel 100 to the medium-pressure Ar gas collecting device 112 through the path of the closing valve MV3.

  In this way, the intermediate pressure Ar gas collecting device 112 can store argon gas having sufficient cleanness for HIP processing, and is different from the main body high-pressure vessel 100 to about 3 MPa in the past. Argon gas from which oxygen in the argon gas has been removed by the pressure medium gas purification device 120 at a low pressure up to about 0.3 MPa can be recovered in the low-pressure Ar gas collecting device 113.

  Further, in actual operation, a larger amount of gas in the high-pressure Ar gas collecting device 111 is advantageous for shortening the gas pressurization time of the HIP process. Therefore, when each compressor is not used for pressurization of the HIP device, the compressor 143 is operated to fill the intermediate pressure Ar gas collecting device 112 with the argon gas in the low pressure Ar gas collecting device 113, The compressor 141 is operated, and the medium pressure Ar in the path of the manual closing valve MV3 → the blocking valve V6 → the blocking valve V1 → the filter 161 → the compressor 141 → the blocking valve V4 → the manual blocking valve MV2. It is preferable to fill the high-pressure Ar gas collecting device 111 with the argon gas in the gas collecting device 112.

  When the amount of gas in the medium pressure Ar gas collecting device 112 is insufficient, a cylinder of new gas having substantially the same pressure is connected to the new gas supply line 135 so that the medium pressure Ar gas collecting device 112 is connected. It is also possible to keep the state almost full. At this time, the compressor 143 may be operated to supply argon gas from the new gas supply line 135 to the high-pressure Ar gas collecting device 113. If it is necessary to purify (remove oxygen) the argon gas in the high-pressure Ar gas collecting device 111, the manual closing valve MV2 → the blocking valve V4 → the blocking valve V9 on the line 138 → the blocking valve V3. → Depressurization regulator 151 → Manual block valve MV5 → Pressure medium gas purification device 120 → Manual block valve MV6 → Block valve V1 → Filter 161 → Compressor 141 → Block valve V4 → Manual block valve MV2 With this path, the argon gas in the high-pressure Ar gas collecting device 111 can be purified (oxygen removal).

  As described above, the pressure medium gas purification devices 120 and 120 ′ are basically optimally incorporated into the gas pressure level of the medium pressure Ar gas collecting device 112, that is, the gas pressure line in the range of 3 to 30 MPa.

  The reason is that, in the pressure level line of the high pressure Ar gas collecting device 111, impurities such as oxygen in the argon gas are concentrated, so that the high pressure vessel of the pressure medium gas purification device has a relatively small internal volume. This is because although it can be used, a high pressure resistance is required, so that the structure must be rigid as a whole. Further, in the pressure level line of the collecting device of the low pressure Ar gas collecting device 113, the high pressure vessel of the pressure medium gas purification device can be simplified in terms of pressure resistance, but it becomes a large volume high pressure vessel, This is because it is greatly disadvantageous in terms of installation space. From such a point, it is preferable to install the pressure medium gas purification device in the line of the medium pressure level.

  As described above, the pressure medium gas supply and recovery device of the present embodiment includes the pressure medium gas purification devices 120 and 120 ′ that can be put to practical use. Therefore, unlike the prior art, it is possible to eliminate the discarding of the entire amount of argon gas from the argon gas source at a rate of once after 20 to 30 HIP treatments. In addition to the high-pressure Ar gas collecting device 111 and the medium-pressure Ar gas collecting device 112, the low-pressure Ar gas collecting device 113 containing low-pressure argon gas is provided as a pressure medium gas source. 113 is also configured to collect argon gas from the main body high-pressure vessel 100 of the HIP device. Therefore, when recovering the pressure medium gas after the HIP treatment, the pressure of the argon gas in the main body high-pressure vessel 100 of the HIP device that starts to be released into the atmosphere can be reduced from about 3 MPa to about 0.3 MPa. The amount of argon gas discarded can be greatly reduced without significantly extending the operation time compared with the case of releasing from the atmosphere of about 3 MPa.

1, 2, 3 ... pressure medium gas purification device,
DESCRIPTION OF SYMBOLS 10,10 ', 10 "... High pressure vessel 10a ... Pressure medium gas inlet 10b ... Pressure medium gas outlet 20 ... Inverted cup-shaped trunk | drum 20a ... Screw part 21 ... Cylindrical trunk | drum 22 ... Top cover 30,30', 30 "... Lower lid 30a ... Screw part 31 ... Pressure medium gas introduction pipe 32, 32 ', 32" ... Pressure medium gas discharge pipe 33, 33' ... Heater power supply wiring 34 ... Plug-in connector 40 ... Water cooling jacket 41 ... Cooling Water passage 50, 50 '... Pressure medium gas flow path forming member 51, 51' ... Inner cylinder 52, 52 '... Outer cylinder 60 ... Electric resistance heater wire 61 ... Connector 62, 63 ... Thermocouple 70 ... Base plate 72, 72 '... heat insulator 80 ... gas purification unit body 90 ... packed layer of metal having strong oxygen affinity 91 ... electric resistance heater wire (nichrome wire) 92 ... thermocouple 100 ... main body high pressure vessel 111 of HIP device 111 ... high pressure Ar gas set 112 ... Medium pressure Ar gas collecting device 113 ... Low pressure Ar gas collecting device 120, 120 '... Pressure medium gas purifying device 130 ... Pressure medium gas supply line 131 ... Pressure medium gas recovery line 132 ... High pressure pressure medium gas supply line 133 ... Low-pressure pressure gas supply line 134 ... Low-pressure pressure gas recovery line 135 ... New gas supply line 141, 142, 143 ... Compressor 151, 152 ... Depressurization regulator 161 ... Filter V1-11 ... Shut-off valve MV1 -MV4 ... Manual block valve MV5, MV5 ', MV6, MV6' ... Manual block valve P1, P2 ... Vacuum pump G1-G6 ... Pressure gauge

Claims (7)

Provided in a pressure medium gas supply and recovery device for supplying and recovering a pressure medium gas to a hot isotropic pressure pressurizing apparatus that treats an object to be processed in a high temperature and high pressure gas atmosphere using a pressure medium gas composed of an inert gas, A pressure medium gas purification device for a hot isotropic pressure pressurizing apparatus that introduces a pressure medium gas and removes at least oxygen as an impurity in the pressure medium gas,
A high-pressure vessel in which a pressure medium gas inlet and a pressure medium gas outlet are respectively opened;
Water-cooled cooling means mounted on the outside of the high-pressure vessel to cool the high-pressure vessel;
A pressure medium gas flow path forming member provided in the high pressure vessel and forming a flow path of a pressure medium gas introduced from the pressure medium gas inlet and discharged from the pressure medium gas outlet;
A material having the ability to remove impurities disposed along the pressure medium gas flow path;
A heating means provided in the high-pressure vessel for heating the material having the ability to remove impurities;
Equipped with a,
The material having the impurity removing ability is a metal material, and an electric resistance heater wire made of the metal material is disposed along the pressure medium gas flow path, whereby the material having the impurity removing ability and the heating means A pressure medium gas purifying device for a hot isostatic pressurizing device, wherein the pressure medium gas purifying device is also used. The material of the pressure medium gas flow path forming member is made of ceramics, and the electric resistance heater wire made of the metal material having the impurity removing ability is wound around the outer peripheral surface of the pressure medium gas flow path forming member. The pressure medium gas purification device for a hot isostatic pressurization device according to claim 1 . The high-pressure vessel is composed of a lower lid and an inverted cup-shaped body portion detachably attached to the lower lid, and a pressure medium gas introduction pipe and a pressure medium communicating with the inside of the high-pressure vessel in the lower lid A gas discharge pipe is accommodated, and a heater power supply wiring for supplying electric power to the electric resistance heater wire is accommodated so as to be connectable to and disconnected from the electric resistance heater wire. A pressure medium gas purification device for a hot isostatic pressurization device according to claim 1 or 2 . A gas purification unit body in which the pressure medium gas flow path forming member and the electric resistance heater wire are integrally assembled is placed on the lower lid, and is plugged into a connector of the electric resistance heater wire. The pressure medium gas purification device for a hot isostatic pressurization device according to claim 3, wherein a plug-in connector of the heater power supply wiring connected in a structure is attached to the lower lid. The pressure for the hot isostatic pressing device according to any one of claims 1 to 4 , further comprising at least one temperature measuring sensor for measuring the temperature of the heating means. Medium gas purification device. A pressure medium gas purification device for a hot isotropic pressure pressurization device according to any one of claims 1 to 5, comprising a pressure medium gas made of an inert gas, and a product to be processed in a high-temperature high-pressure gas atmosphere A pressure medium gas supply and recovery device for supplying and recovering a pressure medium gas to a hot isostatic pressurizing device to be processed below;
A high-pressure pressure medium gas source containing a high-pressure pressure medium gas;
A medium-pressure medium gas source containing medium-pressure medium,
A low-pressure pressure medium gas source containing a low-pressure pressure medium gas;
A pressure medium gas supply line having a compressor and communicating the medium pressure medium gas source and the hot isostatic pressure device;
A pressure medium gas recovery line that has the pressure medium gas purification device and communicates the hot isostatic pressure pressurization device and the intermediate pressure medium gas source;
A high-pressure medium gas supply line connecting the high-pressure medium gas source and the pressure medium gas supply line;
A supply line for low-pressure pressure medium gas connecting the low-pressure pressure medium gas source and the pressure medium gas supply line;
A low-pressure pressure medium gas recovery line connecting the pressure medium gas outlet side of the pressure medium gas purification device of the pressure medium gas recovery line and the low pressure pressure medium gas source;
A pressure medium gas supply and recovery device for a hot isostatic pressurizing device. The hot medium according to claim 6, wherein the pressure medium gas recovery line has at least two pressure medium gas purification devices, and these pressure medium gas purification devices are provided so as to be capable of switching operation alternately. Pressure medium gas supply and recovery device for isotropic pressure pressurization device.