JP5485799B2 - Actuator device, test device, and actuator control method - Google Patents

Description

  The present invention relates to an actuator device, a test device, and an actuator control method.

Conventionally, a temperature-driven actuator does not directly control the heater temperature, but controls the heater driving power (see, for example, Patent Document 1).
Patent Document 1 Japanese Patent Application Laid-Open No. 2003-281988

  However, since the actuator temperature depends on the ambient temperature, the history of power application to the actuator, and the like, the correspondence between the heater driving power and the actuator temperature may not be constant. Therefore, when the position of the actuator is controlled by power control, there is a problem that the position of the actuator cannot be accurately controlled. In addition, this problem occurs not only in the temperature-driven actuator but when the position of the actuator is sensitive to temperature.

  In order to solve the above-described problem, in the first aspect of the present invention, an actuator that operates in response to a control signal and a control unit that supplies a control signal that uses the temperature of the actuator as a reference temperature when the actuator is operated. An actuator device, a test device, and an actuator control method.

  It should be noted that the above summary of the invention does not enumerate all the necessary features of the present invention. In addition, a sub-combination of these feature groups can also be an invention.

The structural example of the actuator apparatus 100 which concerns on this embodiment is shown. The operation | movement flow of the actuator apparatus 100 which concerns on this embodiment is shown. A modification of actuator device 100 concerning this embodiment is shown. A configuration example of a test apparatus 410 according to this embodiment is shown together with a device under test 400.

  Hereinafter, the present invention will be described through embodiments of the invention, but the following embodiments do not limit the invention according to the claims. In addition, not all the combinations of features described in the embodiments are essential for the solving means of the invention.

  FIG. 1 shows a configuration example of an actuator device 100 according to the present embodiment. The actuator device 100 detects the temperature of the actuator 110 and controls the actuator 110 with a control signal corresponding to the detected temperature. The actuator device 100 includes an actuator 110, a control unit 120, and a power supply unit 130.

  The actuator 110 operates according to the control signal. The actuator 110 may be an actuator that converts input energy into physical momentum. The actuator 110 may be an electrostatic actuator that moves by electrostatic attraction, a piezoelectric actuator that moves by applying a voltage to a piezoelectric material, an electromagnetic actuator that moves by using magnetic force, or a thermal actuator that moves by thermal expansion. The actuator 110 in the present embodiment is a thermal actuator that functions as a switch that electrically connects or disconnects between the first contact 10 and the second contact 20. The actuator 110 includes a temperature detection unit 112, a first electrical wiring 114, a second electrical wiring 115, a heater unit 117, and a cantilever unit 119.

  The temperature detector 112 detects the temperature of the actuator 110. The temperature detection unit 112 may detect the temperature with a contact-type temperature detector that is in contact with the cantilever unit 119, such as a resistance temperature detector, a thermocouple, or a thermistor. Instead, the temperature detection unit 112 may be provided in the vicinity of the cantilever unit 119 and detect the temperature in the closed space in which the cantilever unit 119 is provided.

  Instead of this, the temperature detection unit 112 may detect a current flowing through the heater wiring and convert the detected current value into a temperature. Instead of this, the temperature detector 112 may detect the temperature with a non-contact temperature detector that receives the infrared energy radiated by the actuator 110 with an infrared sensor and converts it into a temperature.

  The first electrical wiring 114 and the second electrical wiring 115 transmit electrical signals. The first electrical wiring 114 and the second electrical wiring 115 include second contacts 20 respectively connected to the electrical wiring. For example, the first electrical wiring 114 and the second electrical wiring 115 are configured such that the first contact 10 and the second contact 20 are electrically connected when the actuator 110 is driven and turned on. The first electrical wiring 114 and the second electrical wiring 115 are in a conductive state and transmit electrical signals.

  Instead, the first electrical wiring 114 and the second electrical wiring 115 are electrically connected to the first contact 10 and the second contact 20 when the driving of the actuator 110 is stopped and turned off. The first electric wiring 114 and the second electric wiring 115 may be connected to each other to transmit an electric signal. The first electrical wiring 114 and the second electrical wiring 115 may each have a protective film formed on the surface of the second contact 20.

  The heater unit 117 generates heat according to a control signal from the control unit 120. The material of the heater part 117 part contains platinum. Instead of this, the heater portion 117 may be a heating wire having a large electrical resistance including Ni—Cr alloy or the like. The actuator 110 is operated by the heat generated by the heater unit 117.

  The cantilever part 119 includes the first contact 10. The cantilever part 119 operates by the heat generated by the heater part 117 to electrically connect the first contact 10 and the second contact 20, and connects the first electrical wiring 114 and the second electrical wiring 115. Conduct. Instead of this, the cantilever part 119 operates with the heat generated by the heater part 117 to separate the first contact 10 and the second contact 20, and the first electric wiring 114 that is conductive in the initial state The electrical connection with the second electrical wiring 115 may be interrupted.

  When the actuator 110 is operated, the control unit 120 supplies a control signal using the temperature of the actuator 110 as a reference temperature. The control unit 120 supplies a control signal using a voltage value or a current value to the power supply unit 130. For example, when the ON / OFF drive voltage of the actuator 110 is 5V / 0V in the initial state, the control unit 120 changes the ON voltage and the OFF voltage according to the temperature of the actuator 110 while maintaining the voltage amplitude 5V. The control signal is supplied to the power supply unit 130.

  Further, the control unit 120 controls the magnitude of the control signal supplied to the actuator 110 according to the temperature detected by the temperature detection unit 112. For example, when the ON / OFF drive voltage of the actuator 110 is set to 5V / 0V in the initial state, the control unit 120 supplies a control signal in which the ON voltage and / or the OFF voltage is changed according to the temperature of the actuator 110 to the power supply unit. 130.

  Instead, the temperature detection unit 112 detects the temperature of the actuator 110 when not being driven, and the control unit 120 determines the value of the control signal according to the detected temperature. For example, when the ON / OFF drive voltage of the actuator 110 is set to 5V / 0V in the initial state, the control unit 120 controls the ON voltage to be changed according to the temperature of the actuator 110 while maintaining the OFF voltage of 0V. The signal is supplied to the power supply unit 130. Further, the control unit 120 may supply a control signal corresponding to the detected temperature to the power supply unit 130 to switch ON / OFF of the actuator according to an instruction signal from the outside.

  The power supply unit 130 supplies driving power to the heater unit 117. The power supply unit 130 supplies a driving voltage or a driving current to the heater unit 117 in accordance with a control signal from the control unit 120.

  FIG. 2 shows an operation flow of the actuator device 100 according to the present embodiment. The actuator device 100 detects the temperature of the actuator 110 by the temperature detector 112 (S200). In this embodiment, when the temperature is detected, the actuator 110 is in an ON state when the first contact 10 and the second contact 20 are in contact with each other, and when the drive is stopped, An example in which the contact 10 and the second contact 20 are separated from each other to be in an OFF state will be described.

  The actuator device 100 determines a control signal based on the temperature detection result of the temperature detection unit 112 (S210). The temperature of the actuator 110 changes depending on the operating condition, ambient temperature, and the like. For example, when the actuator 110 at the reference temperature corresponding to room temperature is kept in the ON state and the heater unit 117 continues to generate heat, or when the actuator 110 is operated at an ambient temperature higher than the reference temperature, the temperature of the actuator 110 is It rises above the reference temperature. Here, when the actuator 110 is turned off, the distance between the first contact 10 and the second contact 20 becomes narrower than the reference temperature because the temperature is higher than the reference temperature.

  In this case, when the control unit 120 turns on the actuator 110 with the same control signal as the reference temperature, the first contact 10 and the second contact 20 come into contact with each other with a larger contact pressure than the reference temperature. The contact wears when it is repeatedly turned off. Accordingly, the control unit 120 supplies the heater unit 117 with a current lower than the current that flows at the reference temperature in order to suppress the contact pressure due to the temperature increase, so that the temperature of the actuator 110 increases. Also, the first contact 10 and the second contact 20 can be brought into contact with substantially the same contact pressure.

  Further, for example, when the actuator 110 is operated at an ambient temperature lower than a reference temperature corresponding to room temperature, the temperature of the actuator 110 falls below the reference temperature. Here, when the actuator 110 is turned OFF, the distance between the first contact 10 and the second contact 20 becomes wider than the reference temperature interval by the amount lower than the reference temperature.

  In this case, when the control unit 120 turns on the actuator 110 with the same control signal as the reference temperature, the first contact 10 and the second contact 20 come into contact with each other with a contact pressure smaller than the reference temperature. Connection becomes unstable. Therefore, the control unit 120 supplies the heater unit 117 with a current higher than the current flowing at the reference temperature in order to compensate for the decrease in contact pressure due to the temperature decrease, so that the temperature of the actuator 110 decreases. However, the first contact 10 and the second contact 20 can be brought into contact with each other with substantially the same contact pressure, so that a stable electrical connection can be maintained.

  For example, the control unit 120 reduces the offset voltage while maintaining the voltage amplitude in response to detecting the increase in the temperature of the actuator 110. Further, the control unit 120 may increase the offset voltage while maintaining the voltage amplitude in response to detecting the decrease in the temperature of the actuator 110.

  Instead, the control unit 120 may reduce the ON voltage in response to detecting the temperature increase of the actuator 110. Here, the control unit 120 may reduce the OFF voltage in response to detecting the increase in the temperature of the actuator 110. Thereby, when the temperature rise of the actuator 110 is remarkable, the first contact 10 and the second contact 20 can be separated so as not to contact each other.

  In addition, the control unit 120 may increase the ON voltage in response to detecting a decrease in the temperature of the actuator 110. Here, the control unit 120 may increase the OFF voltage in response to detecting a decrease in the temperature of the actuator 110. Thereby, when the temperature drop of the actuator 110 is remarkable, the cantilever part 119 can be moved within a predetermined range, and the burden caused by the deformation of the cantilever part 119 can be reduced.

  The control unit 120 controls the actuator 110 based on the determined control signal (S220). The control unit 120 may control ON / OFF of the actuator 110 according to an instruction signal from the outside. When the actuator device 100 is in the ON state, the actuator device 100 supplies an output of an ON voltage corresponding to the temperature of the actuator 110 to the power source unit 130 via the control unit 120 (S230). The power supply unit 130 supplies a voltage or current corresponding to the received control signal to the heater unit 117.

  Similarly, the actuator device 100 supplies an output of an OFF voltage corresponding to the temperature of the actuator 110 to the power supply unit 130 via the control unit 120 when the actuator 110 is turned off (S240). The power supply unit 130 supplies a voltage or current corresponding to the received control signal to the heater unit 117.

  The actuator device 100 repeats the operations from step S200 to step S230 or step S240 until the control of the actuator 110 is completed (S250). The actuator device 100 according to the present embodiment described above can accurately control the position of the cantilever portion 119 by driving the actuator 110 using a control signal corresponding to the temperature of the actuator 110, even if there is a change in temperature. The contact can be brought into contact with a constant contact pressure.

  In the above embodiments, the actuator device 100 has been described with respect to an example in which the temperature of the actuator 110 is detected regardless of whether the actuator 110 is driven. Instead of this, the actuator device 100 may detect the temperature of the actuator 110 in a non-driven state and determine the value of the control signal according to the detected temperature. In addition, the actuator device 100 may detect the temperature of the actuator 110 in the driving state and determine the value of the control signal according to the detected temperature. The actuator device 100 can more accurately compare the temperature change from the previous state by detecting the temperature when the actuator 110 is in the same state.

  In the above embodiment, the actuator device 100 has been described as having the temperature detection unit 112 in the actuator 110. Instead, the temperature detection unit 112 measures the value of the current flowing through the heater unit 117, and You may detect the temperature of the actuator 110 from the temperature coefficient of the electric current which flows according to the temperature of the heater part 117. FIG. The temperature detection unit 112 may be a current monitor built in the power supply unit 130. When the heater unit 117 is a metal having a constant temperature coefficient, the actuator device 100 can detect the temperatures of the heater unit 117 and the cantilever unit 119 by measuring the value of the current flowing through the heater unit 117.

  In the above-described embodiments, the example in which the control unit 120 determines the control signal that controls the actuator 110 to be in the ON or OFF state has been described. Here, the control unit 120 increases the temperature of the actuator by comparing the control signal of the reference value with the rising edge of the control signal for starting the driving of the actuator 110 higher than the reference value, and then driving the actuator. The value of the control signal may be determined according to the detected temperature. As a result, the actuator device 100 can increase the rise time for switching the actuator 110 to the ON state in accordance with the control signal.

  Further, the control unit 120 lowers the trailing edge of the control signal for stopping the driving of the actuator 110 to be lower than the reference value in the state of not driving, and lowers the temperature of the actuator compared with the control signal of the reference value. Alternatively, the temperature of the actuator that is not being driven may be detected, and the value of the control signal may be determined according to the detected temperature. As a result, the actuator device 100 can increase the fall time for switching the actuator 110 to the OFF state in accordance with the control signal.

  FIG. 3 shows a modification of the actuator device 100 according to the present embodiment. In the actuator device 100 of this modification, the same reference numerals are given to the substantially same operations as those of the actuator device 100 according to the present embodiment shown in FIG. 1, and the description thereof is omitted. The actuator device 100 includes an external temperature detection unit 310 and a temperature adjustment unit 320.

  External temperature detector 310 detects the external temperature of actuator 110. The control unit 120 determines a value of a control signal for stopping the driving of the actuator 110 according to the temperature detected by the external temperature detection unit 310. The temperature of the actuator 110 varies greatly depending on the temperature of the place where the actuator device 100 is installed. As a result, the actuator device 100 can control the position of the actuator 110 in accordance with the environment in which the actuator device 100 is installed.

  The temperature adjustment unit 320 controls the temperature of the actuator 110. The temperature adjustment unit 320 may be a cooler device that cools the actuator 110. Alternatively, the temperature adjustment unit 320 may be a combination of a cooler device and a heater device that cools and heats the actuator 110. Instead of this, the temperature adjusting unit 320 may include an element that can change heating and cooling, such as a Peltier element.

  The actuator device 100 determines the temperature of the actuator 110 by the temperature adjustment unit 320 according to the rising time at the start of the next drive of the actuator 110. The actuator device 100 can detect the temperature of the actuator 110 and the external temperature of the actuator 110 by the temperature detection unit 112 and the external temperature detection unit 310. Therefore, the actuator device 100 can detect the distance between the first contact 10 and the second contact 20 in the state where the actuator 110 is OFF from the temperature of the actuator 110 and the external temperature of the actuator 110. Here, the actuator device 100 may detect and store in advance the distance between the first contact 10 and the second contact 20, the temperature of the actuator 110, and the external temperature of the actuator 110.

  For example, when it is desired to make the rise time of the next drive start of the actuator 110 faster than the current rise time, the actuator device 100 makes the separated distance between the first contact 10 and the second contact 20 closer. Further, the temperature of the actuator 110 is heated by the temperature adjustment unit 320. As a result, the actuator device 100 can shorten the moving distance of the cantilever portion 119 when the actuator 110 is turned on, and can increase the rise time at the start of driving.

  Instead of this, the actuator device 100 may determine the temperature of the actuator 110 by the heater unit 117 according to the rising time of the next drive start of the actuator 110. Since the distance between the first contact 10 and the second contact 20 can be changed by the temperature of the actuator 110 by the heater unit 117, the rise time at the start of driving can also be adjusted by the heater unit 117.

  The actuator device 100 includes a plurality of actuators 110, the temperature adjustment unit 320 maintains the plurality of actuators 110 at a constant temperature, and the control unit 120 performs a plurality of operations according to the temperatures detected by the plurality of temperature detection units 112. The control signal supplied to the actuator 110 is controlled in magnitude. Thus, the actuator device 100 can accurately control the positions of the plurality of actuators 110, respectively.

  In addition, since the actuator device 100 keeps the plurality of actuators 110 at a constant temperature by the temperature adjusting unit 320, it can be determined without greatly changing the magnitude of the control signal. When the temperature adjusting unit 320 can maintain the distance between the first contact 10 and the second contact 20 within a predetermined range by keeping the temperature of the actuator 110 at a constant temperature. The controller 120 may supply a control signal having a certain magnitude to switch the actuator 110 on and off.

  In the above embodiments, the actuator device 100 has been described by taking the thermal actuator functioning as a switch as an example. Alternatively, the actuator device 100 may be an actuator that converts input energy into physical momentum. Even if the actuator device 100 is not a thermal actuator, the position of the actuator changes depending on the ambient temperature.

  In addition, for example, in the actuator device 100 having a function other than the switch, such as a sensor, a probe, and a positioning device, if the position of the actuator changes depending on the ambient temperature, it has an adverse effect as an error. Therefore, even in such an actuator device 100, the position of the actuator 110 can be accurately controlled by detecting the temperature of the actuator 110 and controlling the actuator 110 with a control signal corresponding to the detected temperature. The influence of temperature can be reduced.

  FIG. 4 shows a configuration example of the test apparatus 410 according to this embodiment together with the device under test 400. The test apparatus 410 tests at least one device under test 400 such as an analog circuit, a digital circuit, an analog / digital mixed circuit, a memory, and a system on chip (SOC). The test apparatus 410 inputs a test signal based on a test pattern for testing the device under test 400 to the device under test 400, and the device under test based on an output signal output from the device under test 400 according to the test signal. The quality of 400 is judged.

  The test apparatus 410 includes a test unit 420 and a signal input / output unit 430. The test unit 420 tests the device under test 400 by exchanging electrical signals with the device under test 400. The test unit 420 includes a test signal generation unit 423 and an expected value comparison unit 426.

  The test signal generator 423 generates a plurality of test signals to be supplied to the device under test 400. The test signal generator 423 may generate an expected value of the response signal output from the device under test 400 according to the test signal. The test signal generator 423 may be connected to the plurality of devices under test 400 via the signal input / output unit 430 to test the plurality of devices under test 400.

  The expected value comparison unit 426 compares the received data value received by the signal input / output unit 430 with the expected value. The expected value comparison unit 426 may receive the expected value from the test signal generation unit 423. The test apparatus 410 may determine pass / fail of the device under test 400 based on the comparison result of the expected value comparison unit 426.

  The signal input / output unit 430 is connected to one or more devices under test 400 and exchanges test signals between the test apparatus 410 and the device under test 400. The signal input / output unit 430 may be a performance board on which a plurality of devices under test 400 are mounted. The signal input / output unit 430 includes the actuator device 100.

  The actuator device 100 is provided between the test unit 420 and the device under test 400 and electrically connects or disconnects between the test unit 420 and the device under test 400. The test apparatus 410 may perform electrical connection or disconnection by the actuator apparatus 100 according to the present embodiment. As a result, the test apparatus 410 can accurately control the position of the actuator and perform the test using the actuator apparatus 100 that can be turned ON / OFF with substantially the same contact pressure even if the temperature changes. That is, the test apparatus 410 can perform transmission and switching of electrical signals with low loss and long life.

  In this embodiment, the signal input / output unit 430 is connected to one device under test 400, and one actuator device 100 is provided for each of the input signal line and the output signal line of one device under test 400. . Instead, the signal input / output unit 430 may be connected to a plurality of devices under test 400, and one actuator device 100 may be provided for each of the input signal lines and the output signal lines of the plurality of devices under test 400. When one signal input / output line is connected from the signal input / output unit 430 to one device under test 400, one actuator device 100 may be provided in one input / output line.

  As mentioned above, although this invention was demonstrated using embodiment, the technical scope of this invention is not limited to the range as described in the said embodiment. It will be apparent to those skilled in the art that various modifications or improvements can be added to the above-described embodiment. It is apparent from the scope of the claims that the embodiments added with such changes or improvements can be included in the technical scope of the present invention.

  The order of execution of each process such as operations, procedures, steps, and stages in the apparatus, system, program, and method shown in the claims, the description, and the drawings is particularly “before” or “prior to”. It should be noted that the output can be realized in any order unless the output of the previous process is used in the subsequent process. Regarding the operation flow in the claims, the description, and the drawings, even if it is described using “first”, “next”, etc. for convenience, it means that it is essential to carry out in this order. It is not a thing.

10 first contact, 20 second contact, 100 actuator device, 110 actuator, 112 temperature detection unit, 114 first electrical wiring, 115 second electrical wiring, 117 heater unit, 119 cantilever unit, 120 control unit, 130 power supply unit, 310 external temperature detection unit, 320 temperature adjustment unit, 400 device under test, 410 test apparatus, 420 test unit, 423 test signal generation unit, 426 expected value comparison unit, 430 signal input / output unit

Claims (15)

An actuator that operates in response to a control signal;
A temperature detector for detecting a temperature in a state in which the actuator is not driven and a temperature in a state in which the actuator is driven;
When operating the actuator, a control unit that supplies a control signal of a current value or a voltage value according to the detected temperature ;
An actuator device comprising: 2. The actuator device according to claim 1 , wherein the actuator further includes a heater unit that generates heat in response to a control signal of the control unit, and is a thermal actuator that operates by heat generated by the heater unit. The actuator is
A cantilever portion including a first contact; first and second electrical wirings for transmitting electrical signals;
Second contacts respectively connected to the first and second electrical wirings;
Further comprising
The cantilever part operates by heat generated by the heater part to electrically connect the first contact and the second contact, and connects the first electrical wiring and the second electrical wiring. The actuator device according to claim 2 , wherein the actuator device is made conductive. The actuator device according to claim 2, wherein a material of the heater portion includes platinum. The temperature detection unit measures the current flowing through the heater unit, in any one of claims 2 to 4 for detecting the temperature of the actuator from the temperature coefficient of the current flowing in accordance with the temperature of the heater portion The actuator device described. The temperature detection unit, an actuator device according to any one of claims 1 to 5 is RTD. The temperature detection unit, an actuator device according to claim 1 is a thermocouple in any one of 5. The actuator device further includes an external temperature detection unit that detects an external temperature of the actuator, and the control unit is a current value of a control signal that stops driving the actuator according to the temperature detected by the external temperature detection unit or actuator device according to any one of claims 1 to 7 for determining the voltage value. Wherein the control unit, the current value or voltage value of the rise of the control signal for starting the driving of said actuator, by supplying high have control signal than the current value or voltage value of the rising corresponding to the temperature of the actuator, the the temperature of the actuator is increased, by detecting the subsequent temperature of the actuator is driving, determining the current value or voltage value of the control signal according to the detected temperature according to any one of claims 1 8 Actuator device. Wherein the control unit, the current value or voltage value of the falling of the control signal for stopping the driving of said actuator, and supplies the low had control signal than the current value or voltage value of the falling in accordance with the temperature of the actuator lowers the temperature of the actuator, followed by detecting the temperature of the actuator is not driven, any one of claims 1 to determine the current value or voltage value of the control signal according to the detected temperature 9 The actuator device described in 1. It said actuator device, the actuator device according to any one of claims 1 to 10, further comprising: a temperature control unit for controlling the temperature of the actuator. The actuator device according to claim 11 , wherein the actuator device determines a temperature of the actuator by the temperature adjustment unit in accordance with a rising time at the start of the next drive of the actuator. The actuator device includes a plurality of the actuators, the temperature adjusting unit maintains a plurality of the actuators at a constant temperature, and the control unit includes a plurality of the actuators according to the temperatures detected by the plurality of temperature detecting units. The actuator device according to claim 11 or 12, which controls the magnitude of a current value or a voltage value of a control signal supplied to the control signal. A test apparatus for testing a device under test,
A test unit for exchanging electrical signals with the device under test to test the device under test;
Provided between the test section and the device under test, an actuator device according to any one of claims 1 to 13 for electrically connecting or disconnecting between the test section and the device under test,
A test apparatus comprising: An operation stage for operating the actuator in response to the control signal;
A temperature detection step of detecting a temperature in a non-driven state of the actuator and a temperature in the driven state ;
A control step of supplying a control signal having a current value or a voltage value corresponding to the detected temperature .

Images