JP5483047B2 - Diaphragm driven valve - Google Patents

Description

  The present invention relates to a diaphragm-driven valve that opens and closes a valve port by moving a valve portion with a fluid pressure received by a diaphragm.

  When the pilot pressure is supplied, a valve for a fuel cell system is provided in which the diaphragm is pressed and the valve part is lowered, the seat part of the valve part is seated on the valve seat, and gas discharge is stopped. (Patent Document 1). According to this, when the supply of the pilot pressure is stopped, the valve portion is raised by the urging force of the coil spring, the valve portion is opened, and thereby the gas flows.

Further, there is provided a valve provided with a valve unit that controls the flow rate of gas, a motor that drives the valve unit, and a control unit that drives the motor (Patent Document 2).
JP 2004-183713 A JP 2000-97359 A

  According to the valve according to Patent Document 1, a single diaphragm is mounted on the valve, and the force received by the diaphragm is limited. For this reason, there is a limit to the driving force that the valve unit drives. Further, according to the valve according to Patent Document 2, the valve portion is driven by a driving source called a motor, and the valve portion is not driven by the pressure received by the diaphragm.

  The present invention has been made in view of the above circumstances, and is a diaphragm drive type that is advantageous for increasing the driving force for opening and closing the valve portion when the valve portion is opened and closed by fluid pressure such as gas pressure received by the diaphragm. It is an object to provide a valve.

A diaphragm drive type valve according to the present invention includes a valve seat that forms a valve port that communicates a primary passage and a secondary passage, a working chamber that communicates with the valve port, and a working chamber that is divided into a plurality of hollow chambers. A body having a partition wall having a valve shaft insertion hole, and a valve shaft having an axial shape having a valve portion that is movably inserted into the valve shaft insertion hole of the partition wall of the body and opens and closes the valve port according to the movement; And a diaphragm group formed of a plurality of diaphragms arranged in series in the axial direction of the valve shaft, the outer end portion being held by the body and the inner end portion being held by the valve shaft. The diaphragm includes a valve-closing pressure receiving chamber for moving the valve shaft in the valve closing direction as the fluid pressure is received, and a valve-opening pressure receiving chamber for moving the valve shaft in the valve opening direction as the fluid pressure is received. In addition to partitioning each hollow chamber in the axial direction of the valve shaft One or both of the pressure chamber and the valve-opening pressure chamber is a plurality arranged in axial direction of the valve shaft, characterized the following (1) and / or (2).
(1) When the valve portion is closed, the maximum effective pressure receiving area of each diaphragm is Smax, and the minimum effective pressure receiving area of each diaphragm is Smin. Smax / Smin = 1. It must be set within the range of 00 to 1.30.
(2) In the cross section passing through the shaft core along the shaft core of the valve shaft, when the valve portion is closed, the sum of effective pressure receiving areas of the diaphragm group on one side of the shaft core is SR, SR and SL are set to different values when the total effective pressure receiving area of the diaphragm group on the other side of the shaft core is SL.

  When the valve portion is opened, fluid is supplied to the valve-opening pressure receiving chamber. As a result, the plurality of diaphragms constituting the diaphragm group are deformed in the valve opening direction. As a result, the valve shaft moves in the valve opening direction, the valve portion is separated from the valve port, and the valve port is opened. Examples of the fluid include gas and liquid.

  On the other hand, when the valve portion is closed, fluid is supplied to the valve-closing pressure receiving chamber. As a result, the plurality of diaphragms constituting the diaphragm group are deformed in the valve closing direction. As a result, the valve shaft moves in the valve closing direction to close the valve port at the valve portion.

  According to the present invention, one or both of the valve-closing pressure receiving chamber and the valve-opening pressure receiving chamber are arranged in the axial direction of the valve shaft. Therefore, the pressure receiving pressure received by the diaphragm group from the plurality of pressure receiving chambers increases.

  According to the present invention, one or both of the valve-closing pressure receiving chamber and the valve-opening pressure receiving chamber are arranged in the axial direction of the valve shaft. In this case, if a plurality of valve-closing pressure receiving chambers are arranged in the axial direction of the valve shaft, the valve-closing driving force based on the pressure received by the diaphragm group can be increased. Alternatively, if a plurality of valve-opening pressure receiving chambers are arranged in the axial direction of the valve shaft, the valve opening driving force based on the pressure received by the diaphragm group can be increased.

  According to the present invention, one or both of the valve-closing pressure receiving chamber and the valve-opening pressure receiving chamber are arranged in the axial direction of the valve shaft. In this case, if a plurality of valve-closing pressure receiving chambers are arranged in the axial direction of the valve shaft, the valve-closing driving force based on the pressure received by the diaphragm group can be increased. Alternatively, if a plurality of valve-opening pressure receiving chambers are arranged in the axial direction of the valve shaft, the valve opening driving force based on the pressure received by the diaphragm group can be increased. Thus, the driving force based on the pressure received by the diaphragm group that drives the valve shaft can be increased.

  For this reason, if the diameter of the diaphragm is the same as that of a conventional valve on which a single diaphragm is mounted, the diameter of each diaphragm can be reduced and the size of the valve can be reduced in obtaining the same driving force. .

  The diaphragm drive type valve has a body. The body includes a valve seat that forms a valve port that communicates the primary passage and the secondary passage, a working chamber that communicates with the valve port, and a partition wall that partitions the working chamber into a plurality of hollow chambers in the axial direction of the valve shaft And have. The partition wall has a valve shaft insertion hole for inserting the valve shaft. The valve shaft is movably inserted into the valve shaft insertion hole of the partition wall of the body, and has a valve portion for opening and closing the valve port with the movement.

  The diaphragm group is formed of a plurality of diaphragms. The outer end of the diaphragm is held by the body. The inner end portion of the diaphragm is held by the valve shaft. The holding structure is not limited to the disk. The plurality of diaphragms are arranged in series in the axial direction of the valve shaft. The number of diaphragms may be two, three, four, or more. In this case, each diaphragm can have the same composition, size, and thickness, but is not limited thereto, and the composition, size, thickness, shape, and the like of each diaphragm can be changed as necessary. .

  The diaphragm includes a valve closing pressure receiving chamber for moving the valve shaft in the valve closing direction as the fluid pressure is received, and a valve opening pressure receiving chamber for moving the valve shaft in the valve opening direction as the fluid pressure is received. Each hollow chamber is partitioned in the axial direction of the shaft. Such a diaphragm group forms a valve-closing pressure receiving chamber and a valve-opening pressure-receiving chamber in the axial direction of the valve shaft.

  According to the present invention, it is possible to adopt a form in which a plurality of valve closing pressure receiving chambers are arranged in the axial direction of the valve shaft, and a plurality of valve opening pressure receiving chambers are arranged in the axial length direction of the valve shaft. In this case, both the valve closing driving force based on the pressure received by the diaphragm group and the valve opening driving force based on the pressure received by the diaphragm group can be increased.

  In some cases, a plurality of valve-closing pressure receiving chambers are arranged in the axial direction of the valve shaft, but a single valve-opening pressure-receiving chamber may be employed. In this case, the valve closing driving force based on the pressure received by the diaphragm group can be increased.

  In some cases, a single valve-closing pressure receiving chamber may be provided, and a plurality of valve-opening pressure receiving chambers may be disposed in the axial direction of the valve shaft. In this case, the valve opening driving force based on the pressure received by the diaphragm group can be increased. Here, a plurality means two or more, and the plurality of upper limit values can be appropriately selected according to the use and type of the valve, for example, ten.

  According to one aspect of the present invention, it is preferable that at least one of the valve shaft and the housing has a valve closing communication path that allows the plurality of valve closing pressure receiving chambers to communicate with each other. When the valve closing communication path is provided in a hollow shape inside the valve shaft, it is possible to contribute to size reduction. According to one aspect of the present invention, it is preferable that at least one of the valve shaft and the housing has a valve-opening communication passage that allows a plurality of valve-opening pressure receiving chambers to communicate with each other. When the valve opening communication path is provided inside the valve shaft, it is possible to contribute to size reduction.

  According to one aspect of the present invention, when the valve is closed, the pressure-receiving chamber for valve closing can be communicated directly or indirectly with the primary passage. The primary pressure in the primary passage can be supplied to the valve-closing pressure receiving chamber. In this case, the counterpart valve opening pressure receiving chamber can be opened directly or indirectly to the atmospheric pressure.

  According to one aspect of the present invention, the valve-opening pressure receiving chamber can be communicated directly or indirectly with the primary passage when the valve is opened. The primary pressure in the primary passage can be supplied to the valve-opening pressure receiving chamber. In this case, the pressure-receiving chamber for valve closing on the other side can be opened directly or indirectly to atmospheric pressure.

  Embodiment 1 of the present invention will be described below with reference to FIG. The diaphragm drive type valve 1 has a body 2 made of metal, hard resin or ceramics. The body 2 includes a first body 2a, a second body 2b, and a third body 2c that are connected. The body 2 includes a valve port 29 that allows the high-pressure side primary passage 31 and the low-pressure side secondary passage 32 to communicate with each other, the working chamber 20 that communicates with the valve port 29, and the working chamber 20 that includes a plurality of first hollow chambers 21. And a single partition wall 4 for partitioning into the second hollow chamber 22. The periphery of the valve port 29 is a valve seat 28. The first hollow chamber 21 and the second hollow chamber 22 are arranged in series in the axial direction of the valve shaft 5 (in the directions of arrows Y1, Y2).

  As shown in FIG. 1, a valve shaft insertion hole 40 is formed in a substantially central region of the partition wall 4. The valve shaft insertion hole 40 penetrates the partition wall 4 for inserting the valve shaft 5 in the thickness direction. The valve shaft 5 has a long shaft shape and is movably inserted into the valve shaft insertion hole 40 of the partition wall 4 of the body 2. Although the valve shaft 5 extends in the vertical direction, the valve shaft 5 is not limited to this and may be inclined together with the body 2.

  A ring-shaped sealing member 42 is interposed between the inner wall surface of the valve shaft insertion hole 40 and the outer wall surface of the valve shaft 5. A valve portion 50 for opening and closing the valve port 29 with movement is formed at the tip of the valve shaft 5 in a bowl shape. The valve unit 50 can be seated on the valve seat 28.

  As shown in FIG. 1, the diaphragm group 6 includes a first diaphragm 61 disposed on the side close to the valve port 29 and a second diaphragm 62 disposed on the side far from the valve port 29. The first diaphragm 61 and the second diaphragm 62 are in the form of a deformable film formed of a polymer material such as rubber or resin. The first diaphragm 61 and the second diaphragm 62 may be embedded with a barrier layer for enhancing gas barrier properties and a reinforcing layer for reinforcement as needed.

  As shown in FIG. 1, the first outer end 61 p of the first diaphragm 61 is held by the body 2. That is, the thick first outer end 61p of the first diaphragm 61 is held between the first body 2a and the second body 2b of the body 2. The first inner end portion 61i of the first diaphragm 61 is held on the valve shaft 5 by the first mounting portion 69f.

  A second outer end 62 p of the second diaphragm 62 is held by the body 2. That is, the thick second outer end 62p of the second diaphragm 62 is held between the second body 2b and the third body 2c of the body 2. The second inner end 62i of the second diaphragm 62 is held on the valve shaft 5 by the second mounting portion 69s. In addition, although both the 1st diaphragm 61 and the 2nd diaphragm 62 can be made into the same composition, the same size, and the same thickness, it is not limited to this.

  As shown in FIG. 1, the first diaphragm 61 includes a first valve-closing pressure receiving chamber 71 for moving the valve shaft 5 in the valve-closing direction (in the direction of arrow Y1) in response to the pressure of the gas pressure (fluid pressure). The first hollow chamber 21 is partitioned into a first valve-opening pressure-receiving chamber 81 that moves the valve shaft 5 in the valve-opening direction (the direction of the arrow Y2) in response to receiving the fluid pressure. Accordingly, the first diaphragm 61 has a first valve-closing pressure receiving surface 61 s (s: shut) that faces the first valve-closing pressure receiving chamber 71 and a first valve-opening pressure-receiving chamber 81 that faces the first valve-closing pressure receiving chamber 81. And a pressure receiving surface 61o (o: open). Note that the first valve-opening pressure receiving chamber 81 faces the valve port 29.

  The second diaphragm 62 includes a second valve-closing pressure receiving chamber 72 for moving the valve shaft 5 in the valve-closing direction (arrow Y1 direction) in response to the pressure of the gas pressure (fluid pressure), and the pressure of the fluid pressure. The second hollow chamber 22 is partitioned into a second valve-opening pressure receiving chamber 82 that moves the valve shaft 5 in the valve-opening direction (arrow Y2 direction). Accordingly, the second diaphragm 62 has a second valve-closing pressure receiving surface 62 s (s: shut) that faces the second valve-closing pressure receiving chamber 72 and a second valve-opening pressure-receiving chamber 82 that faces the second valve-closing pressure receiving chamber 82. And a valve-receiving pressure surface 62o (o: open).

  As can be understood from FIG. 1, the diaphragm group 6 is disposed in the working chamber 20 of the body 2. The diaphragm group 6 includes a first valve-opening pressure receiving chamber 81, a first valve-closing pressure receiving chamber 71, as the valve group 5 is separated from the valve port 29 in the axial direction of the valve shaft 5 (the opening / closing direction of the valve unit 50). The second valve-opening pressure receiving chamber 82 and the second valve-closing pressure receiving chamber 72 are formed in this order in series (except for the arrangement order of the partition walls 4).

  Thus, in the axial direction of the valve shaft 5 (the opening and closing direction of the valve portion 50), the valve-opening pressure-receiving chambers and the valve-closing pressure-receiving chambers are alternately arranged. This is to provide the diaphragm group 6 with a valve opening driving force and a valve closing driving force, respectively. As shown in FIG. 1, the number of valve-opening pressure receiving chambers 81 and 82 is the same as the number of valve-closing pressure receiving chambers 71 and 72. There are two each. As shown in FIG. 1, the seal member 42 seals the boundary region between the first valve-closing pressure receiving chamber 71 and the second valve-opening pressure-receiving chamber 82.

  The first diaphragm 61 has a first bulging portion 61m which is also called convolution. The first bulging portion 61m is arranged in a ring shape around the axis P1 of the valve shaft 5 while forming the first dent 61r, and can be turned upside down according to the pressure. The second diaphragm 62 has a second bulging portion 62m also called convolution, and can be turned upside down according to pressure. The second bulging portion 62m is arranged in a ring shape around the axis P1 of the valve shaft 5 while forming the second dent 62r.

  Here, according to the valve on which the diaphragm having the convolution is mounted, basically, with respect to the first diaphragm 61, the pressure receiving area inside the diameter from the apex 61x of the first bulging portion 61m is that of the first diaphragm 61. Effective pressure receiving area. Similarly, basically, for the second diaphragm 62, the pressure receiving area inside the diameter from the apex 62x of the second bulging portion 62m is the effective pressure receiving area of the second diaphragm 62.

  As shown in FIG. 1, a valve opening urging spring 58 for assisting the valve opening operation of the second diaphragm 62 is provided between the second diaphragm 62 and the partition wall 4. The biasing spring 58 has a coil shape, and is arranged coaxially with the valve shaft 5 on the outer peripheral side of the valve shaft 5 in the second valve-opening pressure receiving chamber 82.

  The body 2 has a valve closing communication path 90F. The valve closing communication passage 90 </ b> F allows the first valve closing pressure receiving chamber 71 and the second valve closing pressure receiving chamber 72 to communicate with each other. That is, one end portion 90e of the valve closing communication passage 90F communicates with the first valve closing pressure receiving chamber 71. The other end portion 90f of the valve closing communication passage 90F communicates with the second valve closing pressure receiving chamber 72. Note that more than half of the valve-closing communication passage 90F is exposed on the outer wall surface of the body 1, and the assemblability is good. If necessary, the valve closing communication passage 90F may be embedded in the wall thickness of the body 1.

  According to the present embodiment, the port 81t of the first valve-opening pressure receiving chamber 81 is communicated directly with the primary passage 31 or indirectly through another valve. The port 82t of the second valve-opening pressure receiving chamber 82 can communicate with the primary passage 31 via the intermediate passage 200 and the valve 205, and can also communicate with the atmosphere. The port 72t of the second valve-closing pressure receiving chamber 72 is communicated with the primary passage 31 via the intermediate passage 210 and the intermediate valve 220, and can also communicate with the atmosphere. The intermediate valves 220 and 205 are three-way valves. However, the present invention is not limited to this, and it is only necessary to have an opening / closing function.

  Now, the valve closing operation for closing the valve port 29 by the valve unit 50 will be described. First, a high-pressure gas (higher than atmospheric pressure) on the primary passage 31 side is supplied as a valve-closing pressure from the port 72t to the second valve-closing pressure receiving chamber 72 via the intermediate valve 220 and the intermediate passage 210. The gas supplied to the second valve closing pressure receiving chamber 72 is also supplied from the valve closing communication passage 90F to the first valve closing pressure receiving chamber 71 as a high valve closing pressure. Therefore, the second valve-closing pressure receiving surface 62s of the second diaphragm 62 receives the valve-closing pressure in the valve-closing direction (arrow Y1 direction). Similarly, the first valve closing pressure receiving surface 61s of the first diaphragm 61 receives the valve closing pressure in the valve closing direction (arrow Y1 direction).

  As a result, the second diaphragm 62 moves in the valve closing direction (arrow Y1 direction), and the first diaphragm 61 also moves in the valve closing direction (arrow Y1 direction). As a result, the valve shaft 5 moves in the valve closing direction (arrow Y1 direction), the valve unit 50 is seated on the valve seat 28, and the valve unit 50 is closed. For this reason, since both the first diaphragm 61 and the second diaphragm 62 exert a valve closing driving force as compared with a conventional valve on which a single diaphragm is mounted, the valve 1 exhibits a large valve closing driving force. be able to.

  When the valve unit 50 is moved in the valve closing direction, the port 82t of the second valve opening pressure receiving chamber 82 and the port 81t of the first valve opening pressure receiving chamber 81 are preferably opened to the atmosphere. In this case, the second valve-opening pressure receiving chamber 82 and the first valve-opening pressure-receiving chamber 81 are at a low pressure (atmospheric pressure). For this reason, the 1st diaphragm 61 and the 2nd diaphragm 62 can deform | transform favorably in the valve closing direction.

  According to the present embodiment, unlike a valve equipped with a single diaphragm, the valve closing drive force based on the first diaphragm 61 and the second diaphragm 62 can be increased, so that the valve port 29 is opened. Even when the gas is flowing through the valve port 29, the valve portion 50 can be closed.

  According to the present embodiment, when the system in which the valve 1 is mounted is stopped, the intermediate valve 220 is kept closed by the control device while the valve unit 50 is closed. Therefore, both the first valve-closing pressure receiving chamber 71 and the second valve-closing pressure receiving chamber 72 are maintained in a state where high-pressure gas is sealed. Therefore, the valve part 50 is satisfactorily maintained in a state where it is seated on the valve seat 28.

  Next, a valve opening operation for opening the valve unit 50 that closes the valve port 29 will be described. First, the high-pressure gas on the primary passage 31 side is supplied from the port 81t to the first valve-opening pressure receiving chamber 81 as a high valve-opening pressure. Similarly, a high-pressure gas is supplied from the port 82t to the second valve-opening pressure receiving chamber 82 as a high valve-opening pressure. Therefore, the second valve opening pressure receiving surface 62o of the second diaphragm 62 receives the valve opening pressure in the valve opening direction. Similarly, the first valve opening pressure receiving surface 61o of the first diaphragm 61 receives the valve opening pressure in the valve opening direction. As a result, the second diaphragm 62 moves in the valve opening direction (arrow Y2 direction). Similarly, the 1st diaphragm 61 moves to the valve opening direction (arrow Y2 direction).

  As a result, the valve shaft 5 moves in the valve opening direction (arrow Y2 direction). Therefore, the valve part 50 seated on the valve seat 28 is separated from the valve seat 28, the valve part 50 is opened, and the valve port 29 is opened. For this reason, compared with the conventional valve in which only a single diaphragm is mounted, both the first diaphragm 61 and the second diaphragm 62 exhibit the valve opening driving force, so that the valve 1 has a large valve opening driving force. It can be demonstrated.

  As described above, when the valve unit 50 is moved in the valve opening direction, the port 72t of the second valve-closing pressure receiving chamber 72 is preferably opened to the atmosphere. In this case, since the second valve-closing pressure receiving chamber 72 and the first valve-closing pressure receiving chamber 71 are in communication via the valve-closing communication passage 90F, the second valve-closing pressure-receiving chamber 72 and the first valve-closing pressure-receiving chamber 72 Both of the one valve-closing pressure receiving chamber 71 are opened to the atmosphere. Therefore, the diaphragms 61 and 62 can be deformed satisfactorily.

  According to the present embodiment, when the driving force is the same for the conventional valve on which a single diaphragm is mounted and the valve 1 of the present embodiment, the first diaphragm 61 and the second diaphragm 62 Since both are provided, the diameter of the diaphragm can be reduced, and the diameter D1 of the valve 1 (see FIG. 1) can be reduced.

  Here, since the biasing spring 58 constantly biases the second diaphragm 62 in the valve opening direction (arrow Y2 direction), the magnitude of the valve opening driving force can be increased, and the valve opening operation of the valve 1 can be increased. Can assist. In this case, when the valve seat 28 and the valve portion 50 are bound together by freezing water or the like, it is effective for valve opening. As described above, the valve portion 50 of the valve 1 is opened and closed based on the gas pressure (fluid pressure). An actuator for opening and closing the valve unit 50 is not provided in the valve 1.

  The valve 1 according to the present embodiment can be applied to a fluid system that carries gas. For example, it can be applied to a fuel cell system. In this case, the gas supplied to the valve 1 may be a cathode gas, but may be an anode gas. Further, nitrogen gas used as a purge gas for the fuel cell system may be used.

  According to the present embodiment, when the valve unit 50 is closed, the effective pressure receiving areas of the first diaphragm 61 and the second diaphragm 62 constituting the diaphragm group 6 are the same or approximate. For this reason, the deformation of the first diaphragm 61 and the second diaphragm 62 is approximately the same. That is, for the first diaphragm 61 and the second diaphragm 62, the diaphragm having the maximum value Smax and the diaphragm having the minimum value Smin are selected. According to the present embodiment, Smax / Smin = within a range of 1.00 to 1.30, within a range of 1.00 to 1.20, within a range of 1.01 to 1.10, 1.02 to 1. It is preferably set within the range of 05. In this case, the effective pressure receiving area of the first diaphragm 61 and the effective pressure receiving area of the second diaphragm 62 are the same or approximate values, and a uniform load acts on the diaphragms 61 and 62 during the valve opening operation and the valve closing operation. As a result, the durability of the diaphragm group 6 can be improved.

  According to the present embodiment, as shown in FIG. 1, the second diaphragm 62 is biased by the biasing spring 58 for assisting the valve opening, so that the valve is closed against the biasing spring 58. The valve opening drive force is assisted by the biasing spring 58 when the valve needs to be operated. On the other hand, the first diaphragm 61 is not biased by the biasing spring 58. Therefore, strictly speaking, the first diaphragm 61 and the second diaphragm 62 do not perform the same operation. However, since the first inner end 61i of the first diaphragm 61 and the second inner end 62i of the second diaphragm 62 are held by the valve shaft 5, as long as the valve shaft 5 moves in the directions of arrows Y1 and Y2, The deformation amount of the first diaphragm 61 and the deformation amount of the second diaphragm 62 are basically the same.

  In the present embodiment, the fluid flows from the primary passage 31 toward the secondary passage 32. However, the present invention is not limited to this. From the passage 32M corresponding to the secondary passage 32 to the passage 31M corresponding to the primary passage 31. The fluid may flow. In this case, when opening the valve portion 50 in the closed state, the intermediate valve 220 is communicated with the atmosphere to open the port 72t and the valve-closing pressure receiving chamber 72 to the atmosphere, and the fluid is passed through the valve 205 and the port 82t. A fluid may be introduced into the valve-opening pressure receiving chamber 82.

  FIG. 2 shows a second embodiment. The present embodiment basically has the same configuration and the same function and effect as the first embodiment. Hereinafter, a description will be given centering on portions different from the first embodiment. As shown in FIG. 2, a valve closing communication passage 90 </ b> S is formed in the valve shaft 5 in a hollow shape. The valve closing communication passage 90S has a long hole 90a extending along the axial direction of the valve shaft 5 and a plurality of short holes 90c extending along the radial direction of the valve shaft 5 so as to communicate with the long hole 90a. Have. The short hole 90 c communicates with the first valve-closing pressure receiving chamber 71. The tip opening 90e of the long hole 90a communicates with the second valve-closing pressure receiving chamber 72.

  As a result, the valve closing communication passage 90 </ b> S can always connect the first valve closing pressure receiving chamber 71 and the second valve closing pressure receiving chamber 72 to the same pressure. That is, one end of the valve closing communication passage 90S communicates with the first valve closing pressure receiving chamber 71, and the other end of the second valve closing communication passage 90S communicates with the second valve closing pressure receiving chamber 72. Communicate.

  As in the first embodiment, as shown in FIG. 2, the body 2 has a valve closing communication passage 90 </ b> F that allows the first valve closing pressure receiving chamber 71 and the second valve closing pressure receiving chamber 72 to communicate with each other. One end portion 90e of the valve closing communication passage 90F communicates with the first valve closing pressure receiving chamber 71, and the other end portion 90f of the valve closing communication passage 90F communicates with the second valve closing pressure receiving chamber 72. Also in this embodiment, as shown in FIG. 2, the number of valve-opening pressure receiving chambers 81, 82 is the same as the number of valve-closing pressure receiving chambers 71, 72, and two each.

  Since both the valve closing communication passage 90F and the valve closing communication passage 90S are provided side by side as described above, the communication between the first valve closing pressure receiving chamber 71 and the second valve closing pressure receiving chamber 72 is provided. Is maintained well. Therefore, even if any one of the communication passages 90F and 90S is clogged, the communication between the first valve-closing pressure receiving chamber 71 and the second valve-closing pressure receiving chamber 72 is communicated. Good maintainability. Therefore, the operability of the diaphragm group 6 is ensured satisfactorily.

  FIG. 3 shows a third embodiment. The present embodiment basically has the same configuration and the same function and effect as the first embodiment. Hereinafter, the description will focus on the different parts. As shown in FIG. 3, a valve closing communication passage 90 </ b> S is formed in the valve shaft 5 in a hollow shape. The valve closing communication passage 90S has a long hole 90a extending along the axial direction of the valve shaft 5 and a plurality of short holes 90c extending along the radial direction of the valve shaft 5 so as to communicate with the long hole 90a. Have. The short hole 90 c communicates with the first valve-closing pressure receiving chamber 71. The tip opening 90e of the long hole 90a communicates with the second valve-closing pressure receiving chamber 72. As a result, the valve closing communication passage 90S allows the first valve closing pressure receiving chamber 71 and the second valve closing pressure receiving chamber 72 to communicate with each other and maintain the same pressure. Also in this embodiment, as shown in FIG. 3, the number of valve-opening pressure receiving chambers 81, 82 is the same as the number of valve-closing pressure receiving chambers 71, 72, and two each.

  FIG. 4 shows a fourth embodiment. The present embodiment basically has the same configuration and the same function and effect as the first embodiment. Hereinafter, the description will focus on the different parts. FIG. 4 shows a cross section passing through the axis P1 along the axis P1 of the valve shaft 5. As shown in FIG. Between the inner wall surface of the valve shaft insertion hole 40 formed in the partition wall 4 and the outer wall surface of the valve shaft 5, a sleeve-shaped seal member 42B is coaxially disposed. The peripheral wall forming the seal member 42B is set so as to be elastically deformable in the thickness direction thereof. Therefore, the shaft core P1 of the valve shaft 5 can swing somewhat in the valve shaft insertion hole 40.

  In FIG. 4, when the valve unit 50 is closed, the effective pressure receiving area of the first diaphragm 61 is defined as SR on the half side of one A from the axis P1 passing through the center of the valve shaft 5. When the effective pressure receiving area of the first diaphragm 61 is SL on the other half B side of the axis P1 passing through the center of the valve shaft 5, SR and SL are set to different values.

  That is, SR is set slightly larger than SL. For example, it can be set within the range of SR / SL = 1.01 to 1.3 and within the range of 1.05 to 1.2. When the valve unit 50 is opened, the valve opening driving force acting on the effective pressure receiving area SR of the first diaphragm 61 is set larger than the valve opening driving force acting on the effective pressure receiving area SL of the first diaphragm 61. . As a result, the valve opening driving force acting on the first diaphragm 61 on the half side of one A can be made larger than the valve opening driving force acting on the first diaphragm 61 on the other half side of B. The same applies to the second diaphragm 62.

  According to this embodiment, when the first diaphragm 61 and the second diaphragm 62 are deformed in the valve opening direction, and the closed valve portion 50 moves in the arrow Y2 direction to open, the valve shaft is inserted. It can be expected that the valve shaft 5 is operated in the swinging direction so that the axis P1 of the valve shaft 5 is slightly inclined with respect to the center line of the hole 40. As a result, the valve part 50 can be operated so that the valve part 50 provided on the valve shaft 5 is slightly inclined. As a result, it is expected that the valve opening driving force acts locally and intensively on the valve portion 50 in the circumferential direction of the valve portion 50, rather than a mode in which the valve opening driving force acts uniformly in the circumferential direction of the valve portion 50. it can. For this reason, even when the valve portion 50 is firmly attached to the valve seat 28 due to freezing or the like in winter or in a cold region, the valve portion 50 is effectively peeled off from the valve seat 28 and opened. The advantage that can be made is obtained. In some cases, SL may be set slightly larger than SR. Of course, the above SR and SL may be set to the same value.

  FIG. 5 shows a fifth embodiment. The present embodiment basically has the same configuration and the same function and effect as the first embodiment. Hereinafter, the description will focus on the different parts. As shown in FIG. 5, the 1st diaphragm 61 and the 2nd diaphragm 62 do not have a protrusion part. Further, an urging spring 58 for assisting the valve opening is not arranged. In the present embodiment, since the chamber 82R corresponding to the second valve-opening pressure receiving chamber 82 according to the first embodiment is always open to the atmosphere, the second diaphragm 62 is opened in the valve opening direction (the direction of the arrow Y2). ) The valve opening driving force to be moved is not exhibited. Therefore, in this example, only one valve-opening pressure receiving chamber 81 is provided, but the number of valve-closing pressure receiving chambers 71 and 72 is two. Therefore, the valve closing driving force is increased as compared with a conventional valve on which a single diaphragm is mounted.

  FIG. 6 shows a sixth embodiment. The present embodiment basically has the same configuration and the same function and effect as the first embodiment. Hereinafter, the description will focus on the different parts. As shown in FIG. 6, between the partition wall 4 and the first diaphragm 61, a valve closing biasing spring 58E is provided coaxially with the valve shaft 5 to assist the valve closing operation. . The valve shaft insertion hole 40 is provided with a cylindrical or ring-shaped sliding member 45 with good slidability. The sliding member 45 can be formed of a material having high slidability, and may be formed of a porous body containing a lubricating component. The valve shaft 5 is slidably disposed in the guide hole 45 c of the sliding member 45. The valve shaft insertion hole 40 is surrounded by a conical cylindrical bellows tube portion 47. Such a bellows tube portion 47 seals the boundary between the partition wall 4 and the second diaphragm 62.

  The bellows tube portion 47 is rich in elasticity in the axial direction of the valve shaft 5. For this reason, even when the valve shaft 5 moves in the directions of the arrows Y1 and Y2, the bellows tube portion 47 is formed between the partition wall 4 and the second diaphragm 62 while ensuring the mobility of the valve shaft 5 in the opening and closing direction. The gap is sealed. As shown in FIG. 6, a valve closing biasing spring 58 </ b> E is interposed between the partition wall 4 and the first diaphragm 61. For this reason, the valve closing force is assisted. In the present embodiment, since the chamber 72R corresponding to the second valve-closing pressure receiving chamber 72 according to the first embodiment described above is always open to the atmosphere, the second diaphragm 62 is closed in the valve closing direction (the direction of the arrow Y1). ) The valve closing drive force to move to) is not exerted. Therefore, the number of valve-opening pressure receiving chambers is different from the number of valve-closing pressure receiving chambers. According to this embodiment, as can be understood from FIG. 6, one valve-closing pressure receiving chamber 71 is provided, but the number of valve-opening pressure receiving chambers 81 and 82 is two. Therefore, the valve opening driving force is increased as compared with a conventional valve on which a single diaphragm is mounted.

  FIG. 7 shows a seventh embodiment. The present embodiment basically has the same configuration and the same function and effect as the first embodiment. Hereinafter, the description will focus on the different parts. As shown in FIG. 7, a valve opening communication path 100 is formed in a hollow shape inside the valve shaft 5. The valve-opening communication passage 100 includes a long hole 100a extending along the axial length direction of the valve shaft 5 and a plurality of short holes 100c extending along the radial direction of the valve shaft 5 so as to communicate with the long hole 100a. Have. The short hole 100c communicates with the first valve-opening pressure receiving chamber 81 and the second valve-opening pressure-receiving chamber 82. The front end opening of the long hole 100a is closed by a closing portion 100f. As a result, the valve-opening communication path 100 causes the first valve-opening pressure receiving chamber 81 and the second valve-opening pressure-receiving chamber 82 to communicate with each other and have the same pressure.

  As shown in FIG. 7, the valve closing communication passage 90 </ b> T for communicating the first valve closing pressure receiving chamber 71 and the second valve closing pressure receiving chamber 72 effectively uses the wall thickness of the body 2. , Is formed inside the wall thickness. One end portion 90e of the valve closing communication passage 90T communicates with the first valve closing pressure receiving chamber 71 inside the wall thickness of the body 2. The other end portion 90f of the valve closing communication passage 90T communicates with the second valve closing pressure receiving chamber 72. Therefore, the valve-closing pressure receiving chambers 71 and 72 are basically at the same pressure. Reference numeral 2k denotes a ring-shaped sealing member that seals the joint surfaces of the bodies 2b and 2c.

  FIG. 8 shows an eighth embodiment. The present embodiment basically has the same configuration and the same function and effect as the first embodiment. Hereinafter, the description will focus on the different parts. FIG. 8 shows a cross section passing through the axis P1 along the axis P1 of the valve shaft 5. FIG. As shown in FIG. 8, the body 2 has a first partition wall 4 f, a second partition wall 4 s, and a third partition wall 4 t arranged in series in the axial direction of the valve shaft 5. The diaphragm group 6 includes a first diaphragm 61, a second diaphragm 62, a third diaphragm 63, and a fourth diaphragm 64 in order from the side closer to the valve port 29. As shown in FIG. 8, the first diaphragm 61 includes a first valve-closing pressure receiving chamber 71 for moving the valve shaft 5 in the valve-closing direction (in the direction of the arrow Y <b> 1) as the fluid pressure is received, The first hollow chamber 21 is partitioned into a first valve-opening pressure-receiving chamber 81 that moves the valve shaft 5 in the valve-opening direction (arrow Y2 direction) in response to pressure reception.

  The second diaphragm 62 includes a second valve-closing pressure receiving chamber 72 for moving the valve shaft 5 in the valve closing direction (in the direction of the arrow Y1) as the fluid pressure is received, and the valve shaft 5 as the fluid pressure is received. The second hollow chamber 22 is partitioned into a second valve-opening pressure receiving chamber 82 that is moved in the valve-opening direction (arrow Y2 direction).

  As shown in FIG. 8, the third diaphragm 63 includes a third valve-closing pressure receiving chamber 73 for moving the valve shaft 5 in the valve-closing direction (in the direction of the arrow Y <b> 1) as the fluid pressure is received, The third hollow chamber 23 is partitioned into a third valve-opening pressure-receiving chamber 83 that moves the valve shaft 5 in the valve-opening direction (arrow Y2 direction) in response to pressure reception.

  Further, as shown in FIG. 8, the fourth diaphragm 64 includes a fourth valve-closing pressure receiving chamber 74 for moving the valve shaft 5 in the valve-closing direction (arrow Y1 direction) in response to the fluid pressure reception, The fourth hollow chamber 24 is partitioned into a fourth valve-opening pressure-receiving chamber 84 that moves the valve shaft 5 in the valve-opening direction (arrow Y2 direction).

  As described above, the diaphragm group 6 includes the first valve-opening pressure-receiving chamber 81 as the distance from the valve port 29 increases in the working chamber 20 of the body 2 and in the axial length direction of the valve shaft 5 (the opening / closing direction of the valve unit 50). The first valve-closing pressure receiving chamber 71, the second valve-opening pressure-receiving chamber 82, the second valve-closing pressure-receiving chamber 72, the third valve-opening pressure-receiving chamber 83, and the third valve-closing pressure-receiving chamber 73, a fourth valve-opening pressure receiving chamber 84, and a fourth valve-closing pressure receiving chamber 74 are formed in series. Thus, in the axial direction of the valve shaft 5 (the opening and closing direction of the valve portion 50), the valve-opening pressure-receiving chambers and the valve-closing pressure-receiving chambers are alternately arranged. The seal member 42 seals the first partition wall 4f, the second partition wall 4s, and the third partition wall 4t, respectively.

  As shown in FIG. 8, a first urging spring 58f for valve opening for assisting the valve opening operation of the second diaphragm 62 is provided between the second diaphragm and the first partition wall 4f. Is provided. Similarly, a second urging spring 58s for valve opening for assisting the valve opening operation of the fourth diaphragm 64 is provided between the fourth diaphragm 64 and the third partition wall 4t. Yes. The urging springs 58f and 58s are arranged coaxially with the valve shaft 5. The urging springs 58f and 58s are used for assisting valve opening, but may be used for assisting valve closing. In some cases, the urging springs 58f and 58s may be eliminated.

  As shown in FIG. 8, the first valve closing communication passage 90A provided in the body 2 allows the first valve closing pressure receiving chamber 71 and the second valve closing pressure receiving chamber 72 to communicate with each other. Let the same pressure. Further, the second valve-closing communication passage 90B formed in the body 2 causes the third valve-closing pressure receiving chamber 73 and the fourth valve-closing pressure receiving chamber 74 to communicate with each other to have the same pressure. A second valve closing communication passage 90 </ b> W is also formed in a hollow shape inside the valve shaft 5. The first valve-closing pressure receiving chamber 71, the second valve-closing pressure-receiving chamber 72, the third valve-closing pressure-receiving chamber 73, and the fourth valve-closing purpose are provided by the short port 90r of the second valve-closing communication passage 90W. The pressure receiving chamber 74 is in communication with each other.

  Now, the valve closing operation for closing the valve port 29 by the valve unit 50 will be described. First, gas is supplied as a valve closing pressure from the port 72t to the second valve closing pressure receiving chamber 72 and from the port 74t to the fourth valve closing pressure receiving chamber 74. The gas supplied to the second valve-closing pressure receiving chamber 72 is also supplied as the valve-closing pressure from the first valve-closing communication passage 90A to the first valve-closing pressure receiving chamber 71. The gas supplied to the fourth valve closing pressure receiving chamber 74 is also supplied as a valve closing pressure from the second valve closing communication passage 90B to the third valve closing pressure receiving chamber 73.

  As a result, the first diaphragm 61, the second diaphragm 62, the third diaphragm 63, and the fourth diaphragm 64 each receive pressure and move in the valve closing direction (arrow Y1 direction). As a result, the valve shaft 5 moves in the valve closing direction (arrow Y1 direction), and the valve unit 50 is closed. In this case, since the diaphragms 61 to 64 are provided, a valve closing driving force much larger than that of a conventional valve in which only a single diaphragm is mounted can be exhibited.

  As described above, when the valve unit 50 is moved in the valve closing direction (arrow Y1 direction), the port 84t of the fourth valve-opening pressure receiving chamber 84, the port 83t of the third valve-opening pressure-receiving chamber 83, the second The port 82t of the valve-opening pressure receiving chamber 82 and the port 81t of the first valve-opening pressure-receiving chamber 81 are preferably opened to the atmosphere. Thereby, the deformation | transformation of the diaphragm group 6 in a valve closing direction becomes favorable.

  Next, a valve opening operation for opening the valve unit 50 that closes the valve port 29 will be described. First, gas is supplied from the port 81t to the first valve opening pressure receiving chamber 81 as valve opening pressure, and gas is supplied from the port 82t to the second valve opening pressure receiving chamber 82 as valve opening pressure. Similarly, gas is supplied from the port 83t to the third valve closing pressure receiving chamber 83 as the valve opening pressure, and gas is supplied from the port 74t to the fourth valve closing pressure receiving chamber 74 as the valve opening pressure.

  As a result, the first diaphragm 61, the second diaphragm 62, the third diaphragm 63, and the fourth diaphragm 64 move by receiving pressure in the valve opening direction (arrow Y2 direction). As a result, the valve shaft 5 moves in the valve opening direction (arrow Y2 direction), the valve unit 50 is opened, and the valve port 29 is opened. For this reason, compared with the conventional valve | bulb in which only the single diaphragm was mounted, much larger valve opening drive force can be exhibited.

  As described above, when the valve unit 50 is moved in the valve opening direction, the port 72t of the second valve closing pressure receiving chamber 72 and the fourth valve closing valve are used in order to facilitate the deformation of the diaphragm group 6 in the valve opening direction. The port 74t of the pressure receiving chamber 74 is preferably opened to the atmosphere. In this case, since the second valve-closing pressure receiving chamber 72 and the first valve-closing pressure receiving chamber 71 are communicated with each other via the first valve-closing communication passage 90A, the second valve-closing pressure-receiving chamber 72 and the first valve-closing pressure receiving chamber 71 are both opened to the atmosphere. Similarly, the fourth valve-closing pressure receiving chamber 74 and the third valve-closing pressure-receiving chamber 73 are in communication with each other via the second valve-closing communication passage 90B. Both 74 and the third valve-closing pressure receiving chamber 73 are opened to the atmosphere. Therefore, the diaphragm group 6 can be favorably deformed in the valve opening direction.

  As shown in FIG. 8, the first urging spring 58f urges the second diaphragm 62 in the valve opening direction (arrow Y2 direction). The second urging spring 58s urges the fourth diaphragm 64 in the valve opening direction (arrow Y2 direction). For this reason, the magnitude of the valve opening driving force can be increased, and the valve opening operation can be assisted. In this case, it is effective for valve opening when the valve seat 28 and the valve portion 50 are bound together by freezing water or the like.

  This embodiment can be applied to a fluid system. For example, it can be applied to a fuel cell system. In this case, the gas may be a cathode gas, but may be an anode gas. Further, nitrogen gas used as a purge gas for the fuel cell system may be used. The number of valve-opening pressure receiving chambers is the same as the number of valve-closing pressure receiving chambers. However, the present invention is not limited to this, and the number of valve-opening pressure receiving chambers may be larger or smaller than the number of valve-closing pressure receiving chambers.

  According to the present embodiment, when the valve portion 50 is closed, the maximum value of the diaphragms having the maximum effective pressure receiving area among the four diaphragms of the first diaphragm 61 to the fourth diaphragm 64 is set to Smax. When the minimum value of the diaphragm having the minimum effective pressure receiving area is Smin, Smax / Smin = within a range of 1.00 to 1.30, within a range of 1.05 to 1.20, 1.05 It is preferable to be set within the range of ˜1.10. In this case, since the effective pressure receiving areas of the diaphragms 61 to 64 are the same or approximate, the deformation of the diaphragms 61 to 64 constituting the diaphragm group 6 is substantially the same during the valve opening operation and the valve closing operation, and the diaphragm group 6 can contribute to the improvement of durability.

(Other)
The valve shaft 5 extends in the vertical direction, but is not limited thereto, and may be inclined. It may extend in the horizontal direction. The body 2 is a divided body, but may not be divided. The biasing spring 58 is for valve opening assistance, but may be for valve closing assistance. In some cases, the biasing spring 58 may be eliminated. At least one of the first diaphragm 61 and the second diaphragm 62 may have a bellows structure. Both the valve closing communication path and the valve opening communication path may be formed in a hollow shape inside the valve shaft 5. In addition, the present invention is not limited to the above-described embodiments and examples, and can be implemented with appropriate modifications within a range not departing from the gist. Structures and functions specific to certain embodiments and examples can be applied to other embodiments. The following technical idea can also be grasped from this specification.
(Additional Item 1) (i) A valve seat that forms a valve port that allows the primary passage and the secondary passage to communicate with each other, a working chamber that communicates with the valve port, the working chamber is divided into a plurality of hollow chambers, and the valve shaft is inserted. A body having a partition wall having a hole; and (ii) a valve shaft having an axial shape having a valve portion that is movably inserted into the valve shaft insertion hole of the partition wall of the body and opens and closes the valve port according to the movement. (Iii) A diaphragm drive type valve comprising: a diaphragm having an outer end held by a body and an inner end held by a valve shaft, and arranged in series in the axial direction of the valve shaft. In the cross section passing through the shaft core along the axis of the valve shaft, when the valve portion is closed, the total effective pressure receiving area of the diaphragm on one side of the shaft core is SR, and the diaphragm on the other side of the shaft core is When the total effective pressure receiving area is SL, SR and SL can be set to different values.

  The present invention can be used for fluid systems such as a fuel cell system and a cogeneration system.

1 is a cross-sectional view illustrating a concept of a valve according to Embodiment 1. FIG. It is sectional drawing which concerns on Example 2 and shows the concept of a valve | bulb. It is sectional drawing which concerns on Example 3 and shows the concept of a valve | bulb. It is sectional drawing which concerns on Example 4 and shows the concept of a valve | bulb. It is sectional drawing which concerns on Example 5 and shows the concept of a valve | bulb. It is sectional drawing which concerns on Example 6 and shows the concept of a valve | bulb. FIG. 10 is a cross-sectional view illustrating a concept of a valve according to Example 7. FIG. 10 is a cross-sectional view illustrating a concept of a valve according to Example 8.

Explanation of symbols

  1 is a valve, 2 is a body, 31 is a primary passage, 32 is a secondary passage, 4 is a partition wall, 40 is a valve shaft insertion hole, 42 is a seal member, 5 is a valve shaft, 50 is a valve portion, and 58 is attached Force spring, 6 is a diaphragm group, 61 is a first diaphragm, 62 is a second diaphragm, 71 is a first pressure-receiving chamber for valve closing, 72 is a pressure-receiving chamber for second valve closing, and 81 is for first valve opening The pressure receiving chamber, 82 is a second valve opening pressure receiving chamber, 90 is a valve closing communication path, and 100 is a valve opening communication path.

Claims (6)

A valve seat that forms a valve port that allows the primary passage and the secondary passage to communicate; a working chamber that communicates with the valve port; a partition wall that partitions the working chamber into a plurality of hollow chambers and has a valve shaft insertion hole; A body having
A valve shaft having an axial shape having a valve portion that is movably inserted into the valve shaft insertion hole of the partition wall of the body and opens and closes the valve port with the movement;
A diaphragm group formed of a plurality of diaphragms, the outer end portion of which is held by the body and the inner end portion is held by the valve shaft and arranged in series in the axial direction of the valve shaft;
The diaphragms of the diaphragm group include a valve-closing pressure receiving chamber for moving the valve shaft in the valve closing direction as the fluid pressure is received, and an opening for moving the valve shaft in the valve opening direction as the fluid pressure is received. Partitioning each hollow chamber in the axial direction of the valve shaft with the pressure receiving chamber for the valve,
One or both of the valve-closing pressure receiving chamber and the valve-opening pressure receiving chamber are arranged in a plurality in the axial direction of the valve shaft ,
When the valve portion is closed, when Smax is the maximum effective pressure receiving area of each diaphragm and Smin is the minimum effective pressure receiving area of each diaphragm, Smax / Smin = 1.00-1 A diaphragm driven valve characterized by being set within a range of .30 . A valve seat that forms a valve port that allows the primary passage and the secondary passage to communicate; a working chamber that communicates with the valve port; a partition wall that partitions the working chamber into a plurality of hollow chambers and has a valve shaft insertion hole; A body having
A valve shaft having an axial shape having a valve portion that is movably inserted into the valve shaft insertion hole of the partition wall of the body and opens and closes the valve port with the movement;
A diaphragm group formed of a plurality of diaphragms, the outer end portion of which is held by the body and the inner end portion is held by the valve shaft and arranged in series in the axial direction of the valve shaft;
The diaphragms of the diaphragm group include a valve-closing pressure receiving chamber for moving the valve shaft in the valve closing direction as the fluid pressure is received, and an opening for moving the valve shaft in the valve opening direction as the fluid pressure is received. Partitioning each hollow chamber in the axial direction of the valve shaft with the pressure receiving chamber for the valve,
One or both of the valve-closing pressure receiving chamber and the valve-opening pressure receiving chamber are arranged in a plurality in the axial direction of the valve shaft ,
In a cross-section passing through the shaft core along the axis of the valve shaft, when the valve portion is closed, the total effective pressure receiving area of the diaphragm group on one side of the shaft core is SR, and from the shaft core Further, when the total effective pressure receiving area of the diaphragm group is SL on the other side, SR and SL are set to different values . In claim 2, when the valve portion is closed, when Smax is the maximum effective pressure receiving area of each diaphragm and Smin is the minimum effective pressure receiving area of each diaphragm, Smax / Smin = A diaphragm drive type valve characterized by being set within a range of 1.00 to 1.30 . In any one of claims 1 to 3, wherein the valve-closing pressure chamber and the valve-opening pressure chamber are respectively plural arranged, the valve closing pressure receiving chamber and the receiving chamber for opening valve same number Diaphragm-driven valve, characterized in that 5. The diaphragm according to claim 1 , wherein at least one of the valve shaft and the body has a valve-closing communication path that allows the plurality of valve-closing pressure receiving chambers to communicate with each other. Driven valve. 6. The diaphragm according to claim 1 , wherein at least one of the valve shaft and the body has a valve-opening communication path that allows the plurality of valve-opening pressure receiving chambers to communicate with each other. Driven valve.

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