JP5476979B2 - Filament lamp - Google Patents

Description

  The present invention relates to a filament lamp, and more particularly, to a filament lamp in which a plurality of filaments are provided inside an arc tube, and each filament is supplied with power independently.

Filament lamps are used for heating semiconductor wafers, heating in the manufacturing process of solar cells, or heat treatment of liquid crystals. In order to make the temperature distribution of the object to be processed uniform, Japanese Patent Application Laid-Open No. 2006-279008 (patent) Document 1) proposes a filament lamp having a plurality of filaments that can be fed independently into one arc tube.
Since this filament lamp can change the electric power input for every filament, there exists an advantage that it can adjust so that it may become a highly uniform temperature distribution as a whole.

FIG. 5 shows a filament lamp 80 of this Patent Document 1.
Inside the arc tube 81 made of quartz glass, for example, two filaments 82a and 82b are disposed, and these filaments are arranged so that their longitudinal axes are aligned with the tube axis of the arc tube. .
The lead wire 83a connected to the filament 82a is folded in a U-shape at a substantially central portion of the arc tube 81, passes through the side of the filament 82a, and is pinched and fixed at the seal portion 84a. The lead wire 83a is covered with an insulating tube 86a made of a glass tube so as to be electrically insulated from the filament 82a.
Similarly, the lead wire 83b connected to the other filament 82b is pinch-sealed and fixed at the other seal portion 84b, and is covered with an insulating tube 86a.
The filaments 82a and 82b are connected to the external leads 85a and 85b through metal foils embedded in the lead wires 83a and 83b and the pinch seal portions 84a and 84b, respectively, and power is supplied independently from the individual power supply devices 87a and 87b. Is supplied. These power supply devices 87a and 87b are both variable power sources, so that in the filament lamp 80, the power supplied to each filament 82a and 82b can be changed, and the temperature in the length direction of the arc tube 81 can be changed. Can be controlled.

5 shows a structure in which the lead wires 83a and 83b of the filaments 82a and 82b are folded back and sealed by the same seal portions 84a and 84b of the filaments. As described, the lead wires 83a and 83b may extend in the direction of the other filaments 82b and 82a as they are, and may be sealed by the other seal portions 84b and 84.
Further, although two filaments are illustrated, three or more filaments may be used.

By the way, in the prior art, since the insulating tube that accommodates the lead wire is arranged in parallel with the filament inside the arc tube, the problem of shielding the emitted light of the filament is inevitable, and this problem is reduced. In order to do so, the pipe diameter must be made small. Therefore, quartz glass is used as the material of the insulating tube from the viewpoints of heat resistance, insulation, thermal shock resistance and the like.
The arrangement of the insulating glass tube is not particularly taken into consideration in the same document, and it is possible to arrange it in a free state without being constrained in the length direction in relation to the lead wire. When an impact is applied, it may be displaced in the axial direction and collide with another member to be damaged, so that it is also required to be fixed to the lead wire by some means.
However, when the insulating glass tube is fixed to the lead wire, when the filament emits light and the temperature rises, there arises a problem that the insulating glass tube is broken due to a difference in linear expansion coefficient. For this reason, it is required to fix while relaxing the difference in thermal expansion. However, as described above, the insulating tube has a small diameter with respect to the arc tube, and the configuration for fixing becomes very complicated and difficult.
In addition, as a feature of this filament lamp, when it is desired to further control the region in the axial direction, the number of filaments is further increased. In this case, however, a plurality of lead wires exist on the same cross section. Thus, there are problems that the number of insulating pipes to be attached is increased, and that the structure is further complicated and the number of work steps is increased in order to fix the insulation pipe so as to reduce the difference in thermal expansion.

On the other hand, in order to prevent undesired discharge between the filament and the lead wires and between the lead wires, a plurality of filaments 92 are disclosed as in Japanese Patent Laid-Open No. 2008-300077 (Patent Document 2) shown in FIG. , 92 has been proposed in which an insulating tube 94 that accommodates all of these filaments 92, 92 is disposed. In the prior art, a plurality of grooves 95 extending in the axial direction are formed on the outer peripheral surface of the insulating tube 94, and the lead wires 93 are inserted and fixed in the grooves 95 to fix the filament 92 and the lead wires. A structure for achieving electrical insulation of 93 has been proposed.
However, since the conventional technology has a structure in which the groove 95 is processed on the outer peripheral surface of the insulating tube 94, the insulating tube 94 covering the filament 92 needs to be thicker by the groove 95. If the insulating tube 94 is made thick in this way, the degree to which the emitted light from the filament 92 attenuates while passing through it increases, and another problem has arisen in that the transmission efficiency deteriorates.
In this prior art, when the number of filaments is increased, a number of grooves must be formed in the insulating tube, so that the processing work becomes complicated and productivity is poor.

JP 2006-279008 A JP 2008-300077 A

  In view of the above-mentioned problems of the prior art, the present invention comprises a plurality of filaments arranged in the arc tube and a bent portion, and is connected to both ends of the filament, and each filament is connected to the tube axis. In a filament lamp in which the filaments are arranged so as to support the filaments, and the filaments are supplied with power independently, even if an insulating glass tube that insulates the filaments from the filaments is disposed, radiation from the filaments An object of the present invention is to provide a structure in which the attenuation of light is small, the transmission efficiency is good, the fixing arrangement of the insulating glass tube is simple, it does not move to the illusion, and no breakage occurs.

In order to solve the above-mentioned problems, in the present invention, an insulating glass tube that accommodates the filament is disposed in the arc tube adjacent to the filament in which the lead wire is disposed so as to be electrically connected to the adjacent lead wire. Insulating, one end of the insulating glass tube is brought into contact with the bent portion of the lead wire, and a spring is brought into contact with the other end portion and pressed and fixed in the direction of the bent portion.
Further, the opposite end of the spring to the glass tube is in contact with a fixed bead fixed to the lead wire.
Alternatively, an end opposite to the end of contact of the spring with the glass tube is fixed to the lead wire.

According to the present invention, since the insulating glass tube is covered with the filament in which the lead wire is disposed adjacently, it is not necessary to arrange the insulating tube for each lead wire, and the installation of the insulating tube is simple. Since the lead wire passes between the outer periphery of the insulating tube and the arc tube, the insulating tube can be configured using a thin tube, and the attenuation of the emitted light can be suppressed as much as possible.
In addition, since the insulating tube is brought into contact with the bent portion of the lead wire at one end thereof, and a spring is brought into contact with the other end portion, and is pressed and fixed in the direction of the bent portion by the urging force. Even if vibration is applied during transportation of the insulating tube, the insulating tube does not move within the arc tube, and there is no damage due to collision or the like.
In addition, even when the filament is heated to a high temperature, expansion of the insulating glass tube is buffered by the spring, so that damage caused by a difference in thermal expansion between the lead wire and the glass tube is not caused.

Sectional drawing of the filament lamp which concerns on this invention. The partial expanded sectional view of FIG. The partial expanded sectional view of another Example. Sectional drawing of other embodiment. FIG. Explanatory drawing of another prior art.

FIG. 1A is a cross-sectional view of a filament lamp of the present invention, and FIG.
In the figure, in the arc tube 1 made of quartz glass, three first to third filaments 2, 3, 4 are arranged in the axial direction. Lead wires 21a and 21b, lead wires 31a and 31b, and lead wires 41a and 41b are connected to both ends of the first to third filaments 2, 3, and 4, respectively.
In this embodiment, the lead wires 21a and 21b of the first filament 2 are folded back and connected to the metal foils 22a and 22b in the same seal portion 5a to be pinch-sealed, and the lead wires of the second filament 3 31a and 31b are respectively connected to the metal foils 32a and 32b at the seal portions 5a and 5b at both ends, and further, the lead wires 41a and 41b of the third filament 4 are folded back and the metal foil 42a at the same seal portion 6 , 42b.
These first to third filaments 2, 3, 4 are individually connected to the power feeding devices 23, 33, 43 through the metal foils 22a, 22b, 32a, 32b, 42a, 42b and external leads, respectively. Individually controlled power is turned on.

Insulating tubes 25 and 45 are provided around the first filament 2 and the third filament 4 so as to accommodate them. The insulating tubes 25 and 45 are made of a light transmissive insulating material such as quartz glass.
The insulating glass tube 25 isolates the first filament 2 from the lead wire 21a of the first filament 2 and the lead wire 31a of the second filament 3 arranged adjacent to the first filament 2. Insulate electrically.
Similarly, the insulating glass tube 45 isolates the third filament 4 from the lead wire 41a of the third filament 4 and the lead wire 31b of the second filament 3 which are arranged adjacent to the third filament 4. Insulate electrically.

Then, as shown in FIG. 2 in an enlarged manner, the fixed beads 6a are attached to the lead wires 21a and 21b of the first filament 2 and the lead wire 31a of the second filament 3 so as to straddle them. .
Further, a spring 7a is inserted into the lead wire 21a, and a spring 7b is also inserted into the lead wire 31a. One end of each of the springs 7a, 7b is on the circumference of the insulating tube 25. It abuts on the end, and the other end abuts on the fixed bead 6a. The insulating tube 25 is pressed against the bent portion 21c of the lead wire 21 by the urging force of the springs 7a and 7b.
Referring to FIG. 1 again, similarly, the lead wire 41a of the third filament 4 is provided with a spring 9a, and the lead wire 31a of the second filament 3 is provided with a spring 9b. These springs 9a and 9b are One end of the fixed bead 6 b attached to the lead wires 41 a, 41 b, and 31 b is in contact with the other end, and the other end is in contact with the insulating tube 45 fitted on the third filament 4. Thereby, the insulating tube 45 is also pressed against the bent portion 41 c of the lead wire 41.

In the embodiment described above, the second filament 3 located in the central portion is not adjacently provided with a lead wire, so that it is not necessary to provide an insulating tube.
In addition, although the two springs 7 and 9 that press the insulating tubes 25 and 45 are illustrated as two, respectively, the number of springs 7 and 9 is not particularly limited to two, and may be one.

In the above-described embodiment, the springs 7 and 9 that press the insulating tubes 25 and 45 have a structure in which one end is brought into contact with the fixed beads 6a and 6b, but one end is directly fixed to the lead wire as shown in FIG. It may be a structure.
That is, in FIG. 3, one end of the spring 7a is directly attached to the lead wire 21a of the first filament 2 by means of welding or the like. Similarly, one end of the spring 7b is also connected to the lead of the second filament 3. It is attached to the line 31a.
The other ends of the springs 7a and 7b are in contact with one end of the insulating tube 25 fitted to the first filament 21a so as to press the insulating tube 25 against the bent portion 21c of the lead wire 21a. Is energized.
Moreover, the same structure can be employ | adopted also about the springs 9a and 9b which press the insulating tube 45 which fits the 3rd filament 4 in FIG.

In the above embodiment, the lead wires of the first filament 2 and the third filament 4 located at both ends are folded back at the filament tip, and the lead wires at both ends of each filament are sealed with the same seal portion. The lead wires at both ends of all the filaments may be sealed by the seal portions at both ends of the arc tube 1, and the insulating tube is also applied in that case.
The structure is shown in FIG. In the drawing, the lead wire 21a of the first filament 3 is led out to one seal portion 5a, and the other lead wire 21b is led out to the other seal portion 5b.
The same applies to the third filament 4, and the lead wire 41a is led out to one seal portion 5a, and the other lead portion 41b is led out to the other seal portion 5b. In addition, about the lead wires 31a and 31b of the 2nd filament 3, it is derived | led-out to the seal parts 5a and 5b of both ends similarly to the case of FIG.

In the case of this embodiment, the lead wire is arranged adjacent to all the filaments 2, 3, 4 including the second filament 4.
That is, lead wires 21a and 41a of the second and third filaments 3 and 4 extend adjacent to the first filament 2, and the first and third filaments 2 extend to the second filament 3. 4 lead wires 21 b and 41 a extend adjacent to each other, and the lead wire 21 b and 31 b of the first and second filaments 2 and 3 extend adjacent to the third filament 4.
Therefore, insulating tubes 25, 35, 45 are fitted on all the filaments 2, 3, 4.
The first insulating tube 25 fitted to the first filament 2 is pressed against the bent portion 31c of the lead wire by a spring 7a attached to the lead wire 31a. The second insulating tube 35 is pressed against the bent portion 41c of the lead wire 41a by the spring 8a attached to the lead wire 21a. Similarly, the third insulating tube 45 is pressed against the bent portion 31c of the lead wire 31b by a spring 9a fitted on the lead wire 31b.

In FIG. 4, one spring 7 a, 8 a, 9 a that presses the insulating tubes 25, 35, 45 is illustrated, but two springs 7 a, 8 a, 9 a may be mounted as in FIG. 1. .
Further, although the spring is shown fixed to the lead wire, as shown in FIG. 2, a structure in which the insulating tube is urged by a fixed bead attached to the lead wire can be adopted.

As described above, according to the present invention, when a lead wire is arranged adjacent to a plurality of filaments arranged in the arc tube, an insulating glass tube is fitted into the filament to provide electrical insulation from the lead wire. In addition, since the insulating tube is pressed and fixed to the bent portion of the lead wire by the biasing force of the spring, it does not move loosely due to vibration when the lamp is transferred, and there is no risk of breakage.
Even if the filament emits light and becomes high temperature, the thermal expansion difference from the insulating glass tube can be buffered by the spring, so that the insulating glass tube is not damaged.
Furthermore, since the insulating glass tube can be made relatively thick and the wall thickness can be made thinner than that of the conventional example, the attenuation of the emitted light from the filament can be reduced.

DESCRIPTION OF SYMBOLS 1 Light emitting tube 2 1st filament 21a Lead wire 21b Lead wire 21c Bending part 25 Insulating tube 3 2nd filament 31a Lead wire 31b Lead wire 31c Bending part 35 Insulating tube 4 3rd filament 41a Lead wire 41b Lead wire 41c Bending Part 45 Insulating tube 5a, 5b Seal part 7a, 7b Spring 8a Spring 9a, 9b Spring

Claims (3)

An arc tube, a plurality of filaments arranged in the arc tube, and a bent portion are partially provided, connected to both ends of the filament, and supporting the filament so that each filament is aligned along the tube axis In a filament lamp comprising a lead wire, wherein the filament is independently powered,
An insulating glass tube that accommodates the filament is disposed on a filament in which the lead wire is disposed adjacent to the arc tube, and is electrically insulated from the adjacent lead wire, and one end of the insulating glass tube is connected to the lead. A filament lamp, wherein the filament lamp is brought into contact with a bent portion of the wire, and a spring is brought into contact with the other end portion and pressed and fixed in the direction of the bent portion.   2. The filament lamp according to claim 1, wherein an end opposite to an end of contact of the spring with the insulating glass tube is in contact with a fixed bead fixed to the lead wire. The filament lamp according to claim 1, wherein an end opposite to a contact end of the spring with the insulating glass tube is fixed to the lead wire.

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