JP5470994B2 - Surface acoustic wave measuring device - Google Patents

Description

  The present invention relates to a surface acoustic wave measuring apparatus that measures changes in the state of surrounding materials using surface acoustic waves.

  A plate-like surface acoustic wave element in which surface acoustic wave excitation means and surface acoustic wave detection means are arranged opposite to each other at two positions on the upper surface of a flat piezoelectric body arranged on a flat substrate. Is well known in the art.

  In such a conventional plate-shaped surface acoustic wave element, interdigital electrodes (also called comb-shaped electrodes) are used as the surface acoustic wave excitation means and the surface acoustic wave detection means, respectively. When a high-frequency current is supplied to the surface acoustic wave excitation means, the surface acoustic wave excitation means excites the surface acoustic wave on the upper surface of the piezoelectric body, and the excited surface acoustic wave is detected along the upper surface of the flat piezoelectric body. And is detected by the surface acoustic wave detection means.

  Such conventional plate-like surface acoustic wave devices are used in delay lines, oscillation and resonance devices for oscillators, frequency selective filters, chemical sensors, biosensors, remote tags, and the like. When the surface acoustic wave element is used as various sensors, the distance between the surface acoustic wave excitation means and the surface acoustic wave detection means on the upper surface of the piezoelectric body is increased, and the surface is excited by the surface acoustic wave excitation means. The longer the time required for the surface acoustic wave excited by the surface acoustic wave detecting means to be detected, the more the physical properties of the surface acoustic wave from the excitation to the detection of the surface acoustic wave. Therefore, the accuracy of various sensors using surface acoustic wave elements is increased.

  However, in such a conventional plate-shaped surface acoustic wave element, since the piezoelectric body disposed on the flat substrate is flat, the surface acoustic wave excited by the surface acoustic wave excitation means on the upper surface of the piezoelectric body is provided. Diffuses in a direction perpendicular to the propagation direction while propagating toward the surface acoustic wave detecting means along the upper surface of the flat piezoelectric body, and loses its energy. Accordingly, the distance between the surface acoustic wave excitation means and the surface acoustic wave detection means that can be set on the upper surface of the flat piezoelectric body is naturally limited.

  If the surface area of the flat substrate is increased by increasing the energy of the high-frequency current supplied to the surface acoustic wave excitation means, the distance can be increased, but the power required for driving the surface acoustic wave element increases and the elasticity is increased. The external dimensions of the surface acoustic wave device are increased.

  International Publication WO 01/45255 (Patent Document 1) places interdigital electrodes as surface acoustic wave / excitation / detection means on the surface of a spherical substrate capable of exciting and propagating surface acoustic waves. The frequency and width of the surface acoustic wave excited on the surface of the substrate by the interdigital electrode and the radius of the substrate (the surface acoustic wave in a direction orthogonal to the direction of propagation of the surface acoustic wave on the surface of the substrate along the surface of the substrate) By setting the beam width dimension) to a predetermined condition, a surface acoustic wave having a predetermined frequency and a predetermined width excited on the surface of the substrate with a predetermined radius by the interdigital electrode is applied to the surface of the substrate. It has been clarified that it can propagate without infinitely diffusing in the direction perpendicular to the surface of the substrate along the direction of propagation along the surface of the substrate. .

  The trajectory of the surface acoustic wave that circulates around the surface of the spherical substrate is within a region where a part of the sphere including the maximum outer circumference of the spherical substrate is continuous in an annular shape on the surface of the spherical substrate. This area is called a surface acoustic wave circuit. Such a conventional surface acoustic wave device using a spherical base body generates a large number of surface acoustic waves along the surface acoustic wave circuit without diffusing in the direction intersecting the extending direction of the surface acoustic wave circuit. The surface acoustic wave can be rotated (that is, after the interdigital electrode excites the surface acoustic wave until the interdigital electrode cannot accurately detect the surface acoustic wave that circulates the surface acoustic wave circuit). As the number of turns increases, changes in the propagation speed of surface acoustic waves, changes in the phase of surface acoustic waves, and changes in the intensity of surface acoustic waves are likely to become obvious. Can be measured more precisely.

  Changes in propagation speed, changes in surface acoustic wave phase, and changes in surface acoustic wave intensity are caused by changes in the environment in which the surface acoustic wave circuit of the spherical surface acoustic wave element is in contact (for example, an increase in gas concentration). ). Therefore, measuring the various changes described above means measuring changes in the environment in which the surface acoustic wave circuit of the spherical surface acoustic wave element is in contact.

  Here, the environmental change described above is nothing but a change in the amount of various substances contained in the environment. Therefore, the surface acoustic wave circuit is sensitive to the predetermined substance to be informed of the change in the quantity, and By providing a sensitive element that has a predetermined effect on the surface acoustic wave that circulates the corresponding surface acoustic circuit according to the degree of sensitivity, the change in the amount of a given substance, that is, the change in the environment, can be made more precise. It can be measured.

  A spherical surface acoustic wave element in which such a sensitive element is provided as a film in a surface acoustic wave circuit is known, for example, from Japanese Patent Application No. 2004-108236 (Patent Document 2). Japanese Patent Application No. 2004-108236 discloses palladium as a sensitive film for hydrogen, platinum as a sensitive film for ammonia, tungsten oxide as a sensitive film for hydrogen compounds, and carbon monoxide, carbon dioxide, sulfur dioxide, and nitrogen dioxide. Phthalocyanine is illustrated as a sensitive film for the above.

  For example, Japanese Patent Application No. 2004-104139 (Patent Document 3) discloses a surface acoustic wave element having a plurality of surface acoustic wave peripheral circuits in which a part of a sphere continues in an annular shape. In this publication, when the temperature of the substrate of the surface acoustic wave element changes due to a change in the ambient temperature of the surface acoustic wave element, the physical properties (for example, density and elastic constant) of the material of the substrate change. Changes in the propagation speed and intensity of the surface acoustic wave propagating through the circumferential circuit, and finally measurement results of changes in the environment in which the surface acoustic wave circuit is in contact, obtained by measuring the propagation speed and intensity of the surface acoustic wave It is described that it affects. In order to eliminate such influences, one of a plurality of surface acoustic wave peripheral circuits should be used to calibrate changes in the propagation speed and intensity of surface acoustic waves due to the influence of ambient temperature changes. It is described.

  Note that the phase in the high-frequency signal generally means the temporal position of the signal at the time when a predetermined time is defined. The phase measurement in the output measurement of the spherical surface acoustic wave element is performed by calculating the time position (phase) of the high-frequency signal output from the spherical surface acoustic wave element at the time when a predetermined time has elapsed from the time when the surface acoustic wave is excited. It is usually used to measure using analysis, quadrature detection, wavelet transform, etc., and the propagation (circulation) velocity of the surface acoustic wave can be directly measured from the measurement. Alternatively, for example, the time at which the spherical surface acoustic wave element has finished outputting a predetermined number of times (the time at which the predetermined number of laps have been completed) is obtained, and the time distance from the lap start time can also be obtained. In this invention, it is not excluded to obtain information on the propagation speed of surface acoustic waves.

International Publication WO 01/45255 Japanese Patent Application No. 2004-108236 Japanese Patent Application No. 2004-104139

  Using surface acoustic wave elements arranged close to each other to measure changes in the state of at least one surrounding material, to measure environmental changes, or to surface acoustic waves due to the influence of ambient temperature changes When calibrating the propagation velocity and intensity errors, the surface acoustic wave / excitation / detection means provided on the surface acoustic wave circuit formed on the surface of a plurality of elements arranged close to each other When high-frequency signals are input for surface acoustic wave excitation at different timings or when high-frequency signals are input at different phases, the high-frequency signals input to the surface acoustic wave circuit of one surface acoustic wave element are adjacent to each other. It has become a problem to excite the surface acoustic wave on the surface acoustic wave circuit of the surface acoustic wave device and make it noise.

  Therefore, surface acoustic wave excitation is performed at the same timing on the surface acoustic wave / excitation / detection means provided in the surface acoustic wave circuit formed on the surface of a plurality of elements arranged close to each other. A plurality of surface acoustic waves that circulate around a plurality of surface acoustic wave circuit circuits corresponding to a plurality of surface acoustic waves / excitation / detection means are input by inputting a high frequency signal to each other or by inputting a high frequency signal in the same phase to each other. When detecting at the same timing, it is necessary to simultaneously analyze the received signals from different circuit paths, and in order to measure them independently in parallel, a plurality of amplifiers and a plurality of analog-digital conversion means are required. There is a problem that the apparatus becomes complicated and expensive as a device.

  Alternatively, the measurement of the next surface acoustic wave excitation / detection means after completing the measurement of each of the plurality of surface acoustic wave / excitation / detection means in turn means that the measurement of all the surface acoustic wave peripheral circuits is performed. It takes a long time to complete.

  The present invention has been made under the circumstances described above, and an object of the present invention is to provide a surface acoustic wave capable of measuring a change in the state of at least one surrounding material more precisely and more accurately than a conventional structure with a simple structure. It is to provide a measuring device.

In order to achieve the above-mentioned object of the present invention, a surface acoustic wave measuring device according to one concept of the present invention is: a circular shape is continuously extended by a part of a spherical shape, and a surface acoustic wave is excited. A plurality of substrates including a surface having a single or a plurality of surface acoustic wave peripheral circuits capable of circulating the excited surface acoustic waves in the extending direction; and a single or a plurality of surfaces of each of the plurality of substrates The surface acoustic wave circuit is provided for each of the surface acoustic wave circuits of the present invention, which excites the surface acoustic wave based on the high frequency signal, circulates the excited surface wave along the corresponding surface acoustic wave circuit and detects the surface acoustic wave that has circulated. A plurality of surface acoustic wave / excitation / detection means for generating reception signals; and a plurality of surface acoustic waves / excitation / detection means for simultaneously inputting a high-frequency signal in the same phase, Multiple elastic tables A high-frequency signal input / reception signal extraction means for extracting a plurality of reception signals emitted by a plurality of surface acoustic wave / excitation / detection means from the wave; and corresponding to each reception signal from each of the plurality of reception signals Measuring means for measuring predetermined characteristics of the surface acoustic wave at different times, and simultaneously inputting the high-frequency signal with the same phase to the plurality of surface acoustic wave / excitation / detection means simultaneously with the same phase. The duration of the input high-frequency signal is characterized in that it is shorter than any of the times in which all of the plurality of surface acoustic waves excited by the high-frequency signal go around the corresponding surface acoustic wave circuit .

  In the surface acoustic wave measuring device according to one concept of the present invention, which is configured as described above, the surface acoustic wave / excitation / detection means has a high frequency for a plurality of surface acoustic wave circuits of a plurality of substrates. The signals are simultaneously input in the same phase, and the measuring means generates surface acoustic waves corresponding to the respective reception signals from the plurality of reception signals emitted from the plurality of surface acoustic waves that circulate the plurality of surface acoustic wave circuit. Predetermined characteristics are measured at different times.

  Therefore, in the surface acoustic wave measuring apparatus according to one concept of the present invention, in order to excite the surface acoustic wave to the surface acoustic wave circuit on the surface of the plurality of substrates, generally a large amplitude for surface acoustic wave excitation is used. Even if the accompanying high-frequency signal is applied to the surface acoustic wave circuit on the surface of a plurality of substrates, the high-frequency signal is simultaneously input in the same phase. It is possible to prevent the surface acoustic wave as noise from being excited in the surface acoustic wave circuit of another adjacent substrate without being transmitted.

  Even when high-frequency signals for exciting surface acoustic waves are simultaneously input to the surface acoustic wave circuits of a plurality of substrates, the predetermined characteristics of the surface acoustic waves that circulate the surface acoustic wave circuits on the surfaces of the substrates are different from each other. Measure with This means that a single analog-to-digital conversion means (A / D conversion means) can continuously measure the received signals from the surface acoustic wave circuit of a plurality of substrates at different times. Yes. Furthermore, it is possible to easily change the status of at least one substance measured by the measuring unit from a plurality of received signals emitted from a plurality of surface acoustic waves detected by a plurality of surface acoustic waves / excitation / detection units of a plurality of substrates. This means that it is possible to measure more precisely and more accurately than in the past while being configured.

  An example of obtaining predetermined characteristics of surface acoustic waves at different times even when high-frequency signals for surface acoustic wave excitation are simultaneously input to the surface acoustic wave circuit of a plurality of substrates is the surface of each substrate. Since the surface acoustic wave that circulates in the wave circuit repeatedly outputs the received signal from the surface wave / excitation / detection means in a certain time, the surface of the surface wave circuit of a plurality of substrates has different numbers of laps. The predetermined characteristic of the surface acoustic wave is measured from the received signal output from the wave.

  Another example for obtaining predetermined characteristics of surface acoustic waves at different times even when high-frequency signals for surface acoustic wave excitation are simultaneously input to the surface acoustic wave circuit of a plurality of substrates is By giving different phase delays to each of the received signals, the predetermined characteristics of the surface acoustic wave corresponding to each received signal are measured at different times.

  In this specification, giving a phase delay means increasing the delay time until measurement without changing the waveform of a burst signal that excites a surface acoustic wave. It does not mean that the burst signal envelope remains constant and only the phase of the internal signal changes.

  Therefore, the measurement means can more accurately compare the predetermined characteristics of the surface acoustic wave corresponding to each received signal measured from each of the plurality of received signals, and thus the change in the status of at least one surrounding substance, more accurately than in the past. This means that it is possible to measure with high accuracy. In addition, a structure capable of obtaining such measurement results can be simplified.

  In the present invention, it is apparent that the measurement is not affected as long as the input signals are input in the same phase even if the intensities are different for the plurality of surface acoustic wave / excitation / detection means. is there.

FIG. 1 is a perspective view schematically showing a surface acoustic wave element used in a surface acoustic wave measuring apparatus according to a first embodiment of the present invention. FIG. 2 is a diagram schematically showing a configuration of the surface acoustic wave measurement device according to the first embodiment of the present invention. FIG. 3 shows the switching operation of the first to third switch means for the first to third surface acoustic wave / excitation / detection means of the surface acoustic wave element by the switch control means shown in FIG. It is a timing chart which shows a timing roughly. FIG. 4 is a diagram for explaining the locations of signals that are cut out by the switch means and analyzed with respect to the output signals that circulate around the respective circulation paths of the surface acoustic wave measurement device according to the first embodiment of the present invention. It is. FIG. 5 is a diagram schematically showing a configuration of a surface acoustic wave measuring apparatus according to the second embodiment of the present invention. FIG. 6 shows the switching operation of the first to third switch means for the first to third surface acoustic wave / excitation / detection means of the surface acoustic wave element by the switch control means shown in FIG. It is a timing chart which shows a timing roughly.

[First Embodiment]
First, a surface acoustic wave measuring apparatus according to a first embodiment of the present invention will be described with reference to FIGS. 1 to 4 in the accompanying drawings.

  FIG. 1 is a perspective view schematically showing a surface acoustic wave element used in a surface acoustic wave measuring apparatus according to a first embodiment of the present invention; FIG. 2 shows a first embodiment of the present invention. FIG. 3 is a diagram schematically showing a configuration of a surface acoustic wave measuring apparatus according to the first embodiment; FIG. 3 is a diagram illustrating first to third surface acoustic wave excitations of surface acoustic wave elements by the switch control means shown in FIG. FIG. 4 is a timing chart schematically showing the timing of the switching operation of the first to third changeover switches for the detecting means; and FIG. 4 is a surface acoustic wave measuring device according to the first embodiment of the invention. It is a figure explaining the location of the signal cut | circulated and analyzed by the switch means about the signal output by circling each of these circulation paths.

  As shown in FIG. 1, the surface acoustic wave element 10 used in the surface acoustic wave measuring device according to the first embodiment of the present invention includes: a spherical part that continuously extends in an annular shape. A substrate 11 including a surface having a surface acoustic wave circuit 12 that can be circulated in a direction in which the surface acoustic wave that has been excited is excited and the excited surface acoustic wave extends; and an elastic surface of the surface of the substrate 11 Provided in the wave circuit 12, the surface acoustic wave is excited based on the high frequency signal, the excited surface wave is circulated along the corresponding surface wave circuit 12, and the received surface wave is detected by detecting the circulated surface wave A surface acoustic wave / excitation / detection means 14 that emits; a surface acoustic wave circuit 12 that is provided in the surface acoustic wave circuit 12 and is sensitive to a predetermined substance and corresponding to the degree of sensitivity to the predetermined substance. Circulating surface acoustic waves A sensitive element (sensitive film) 16 to provide a predetermined impact, and a. Such a surface acoustic wave element 10 is known.

  The substrate 11 capable of exciting and propagating the surface acoustic wave is prepared by placing a material (for example, a piezoelectric material) capable of exciting and propagating the surface acoustic wave on the surface of the support having a desired shape. Alternatively, it can be formed by forming a piezoelectric material (for example, a piezoelectric crystal material) into a desired shape.

For example, quartz, langasite, lithium niobate (LiNbO ₃ ), and lithium tantalate (LiTaO ₃ ) are well known as such piezoelectric crystal materials. When the substrate 11 is formed from a spherical piezoelectric single crystal, the surface acoustic wave is excited along the maximum outer peripheral line corresponding to the equator of the spherical surface with the predetermined crystal axis of the piezoelectric single crystal as the ground axis. It is well known that a surface acoustic wave can be circulated around the vicinity of the maximum outer peripheral line.

  The substrate 11 of this embodiment is formed by forming a single crystal of a crystal into a spherical shape, and the equator (maximum outer circumference line) when the crystal Z axis is the ground axis becomes a surface acoustic wave circuit 12. In FIG. 1, it is drawn with a thick solid line.

  The interdigital electrode generates a surface acoustic wave having a predetermined width in a direction intersecting with the corresponding thick solid line of the annular shape by inputting a high-frequency signal. In addition to excitation, the traveling direction of the excited surface acoustic wave is directed to the extending direction of the corresponding thick solid line in the annular shape.

  The above-mentioned predetermined width of the surface acoustic wave excited as described above is the radius of the base 11 (thickness of the above-mentioned annular shape), as known from the above-mentioned International Publication WO 01/45255 (Patent Document 1). (The solid line radius) and the frequency of the surface acoustic wave excited on the surface of the substrate 11 by the interdigital electrode, the ring is excited as described above on the thick solid line of the ring shape on the surface of the substrate 11. The surface acoustic wave propagated along the thick solid line can theoretically propagate infinitely without diffusing in the direction orthogonal to the surface of the base 11 with respect to the above-mentioned thick solid line of the ring shape. 11 is a value that can be repeatedly circulated along the thick solid line of the ring shape on the surface of 11.

  The sensitive element 16 is sensitive to a predetermined substance and has a predetermined influence on the surface acoustic wave that circulates the surface acoustic wave circuit 12 corresponding to the degree of sensitivity to the predetermined substance (for example, a change in propagation velocity or elasticity). Change in intensity of surface wave).

  In this specification, the term “substance” refers to not only a solid or liquid substance but also a gas (molecule). In addition, the sensitive element 16 does not necessarily need to be sensitive or adsorb only to a specific single substance. Any reaction or adsorption method corresponding to each of the various substances may be used. If the reaction or adsorption affects the propagation of the surface acoustic wave, the influence corresponding to the presence or absence of the above-mentioned substance is sufficient. It is clear that it is possible to obtain information on other substances.

  Note that the change in propagation speed can be known by the time until detection is performed with reference to the time of input when a high frequency signal is input to the interdigital electrode and detected by the interdigital electrode again after a predetermined number of laps. It is well known to those skilled in the art that this is possible. In particular, a minute change is often measured with high accuracy by determining the phase of the waveform of the output signal at a time when a predetermined time has elapsed with reference to the input time.

  Next, a surface acoustic wave measuring apparatus according to a first embodiment of the present invention will be described with reference to FIGS. 2 and 3 in the accompanying drawings.

  As shown in FIG. 2, the surface acoustic wave measuring apparatus according to the first embodiment of the present invention uses three surface acoustic wave elements 10 described with reference to FIG. The first surface acoustic wave element is indicated by reference numeral 10A, the second surface acoustic wave element is indicated by reference numeral 10B, and the third surface acoustic wave element is indicated by reference numeral 10C. Further, in the first surface acoustic wave element 10A, the second surface acoustic wave element 10B, and the third surface acoustic wave element 10C, the surface acoustic wave peripheral circuits are indicated by reference numerals 12a, 12b, and 12c, Surface acoustic wave excitation / detection means are indicated by reference numerals 14a, 14b and 14c. Then, the first surface acoustic wave element 12A of the first surface acoustic wave element 10A and the second surface acoustic wave circuit 12b of the second surface acoustic wave element 10B are sensitive to different predetermined substances, A predetermined influence (for example, a change in propagation velocity or a surface acoustic wave) is generated on the surface acoustic waves that circulate in the first and second surface acoustic wave peripheral circuits 12a and 12b corresponding to the degree of sensitivity to a predetermined substance. There are provided first and second sensitive elements 16a and 16b that provide a change in intensity).

  In this embodiment, one terminal of the interdigital electrode of the first surface acoustic wave / excitation / detection means 14a is connected to the switching element C of the first changeover switch K1, and the second surface acoustic wave / excitation / detection unit 14a. One terminal of the interdigital electrode of the detection means 14b is connected to the switching element C of the second changeover switch K2, and one terminal of the interdigital electrode of the third surface acoustic wave / excitation / detection means 14c is It is connected to the switching element C of the third selector switch K3. The other terminal of each interdigital electrode of the first surface acoustic wave / excitation / detection means 14a, the second surface acoustic wave / excitation / detection means 14b, and the third surface acoustic wave / excitation / detection means 14c is Grounded.

  The first changeover switch K1, the second changeover switch K2, and the third changeover switch K3 each have an input terminal I and an output terminal O that are selectively connected to the respective changeover elements C by the respective changeover elements C. Is included.

  The input terminals I of the first to third change-over switches K1, K2, and K3 are connected to the high-frequency burst signal generator 42. The high-frequency burst signal generator 42 includes a high-frequency signal generating unit that generates a high-frequency signal having a predetermined frequency, and a burst-shaped high-frequency signal extracting unit that extracts a high-frequency signal having a predetermined length from the generated high-frequency signal as a burst-shaped high-frequency signal. ,including.

  The output terminals O of the first changeover switch K1, the second changeover switch K2, and the third changeover switch K3 are connected to each other via an amplification means 44 and an A / D conversion means (analog-digital conversion means) 45. Connected to the signal analysis means 46, the signal analysis means 46 is further connected to an addition / averaging / storage device 48, and a display device 50 is connected to the addition / averaging / storage device 48.

  Each of the first changeover switch K1, the second changeover switch K2, and the third changeover switch K3 is connected to a switch control means 52 that controls the operation of each changeover element C.

  Further, the switch control means 52, the display device 50, and the high frequency burst signal generator 42 are connected to a central controller 54 for controlling these operations.

  Next, the operation of the surface acoustic wave measuring apparatus according to the first embodiment of the present invention configured as described above will be described.

  The central controller 54 connects the switching elements C of the first changeover switch K1, the second changeover switch K2, and the third changeover switch K3 to the respective input terminals I by the switch control means 52, and at the same time the high frequency The burst signal generator 42 generates a burst-like high-frequency signal having a predetermined frequency. This burst-like high-frequency signal is sent to the first surface acoustic wave / excitation / detection means 14a of the first surface acoustic wave element 10A via the input terminal I and the switching element C of the first changeover switch K1. To the terminal, and to the above-mentioned one terminal of the second surface acoustic wave / excitation / detection means 14b of the second surface acoustic wave element 10B via the input terminal I and the switching element C of the second changeover switch K2. Furthermore, simultaneously to the above-mentioned one terminal of the third surface acoustic wave / excitation / detection means 14c of the third surface acoustic wave element 10C via the input terminal I and the switching element C of the third selector switch K3. Are input in the same phase.

  In this way, the first to third surface acoustic wave elements 10A, 10B, and 10C to which the burst-like high-frequency signal having a predetermined frequency generated by the high-frequency burst signal generator 42 is simultaneously input in the same phase. The third to third surface acoustic wave / excitation / detection means 14a, 14b, and 14c include first to third surface acoustic wave peripheral circuits 12a, 12b, and 12C of the first to third surface acoustic wave elements 10A, 10B, and 10C, respectively. At the same time, a surface acoustic wave is excited in the same phase in 12c and propagated along the first to third surface acoustic wave peripheral circuits 12a, 12b, and 12c.

  The switch control means 52 excites the first to third surface acoustic wave circuits 12a, 12b, 12c corresponding to the first to third surface acoustic wave / excitation / detection means 14a, 14b, 14c, respectively. Each of the switching elements C of the first to third change-over switches K1, K2, and K3 before the generated surface acoustic wave makes one round of each of the first to third surface acoustic wave peripheral circuits 12a, 12b, and 12c. Are arranged at a neutral position N between each input terminal I and output terminal O.

  The first to third surface acoustic wave / excitation / detection means 14a, 14b, 14c detect the surface acoustic waves that circulate around the corresponding first to third surface acoustic wave peripheral circuits 12a, 12b, 12c. A reception signal is emitted every time.

  The first to third surface acoustic wave / excitation / detection means 14a, 14b, and 14c are simultaneously input with a burst-like high-frequency signal having a predetermined frequency generated by the high-frequency burst signal generator 42 in the same phase, Whenever time elapses, the switch control means 52 switches the switching elements C of the first to third change-over switches K1, K2, and K3 with a predetermined delay time from each other as shown in FIG. Connect to output terminal O.

  As a result, as shown in FIG. 4, a surface acoustic wave that circulates the first surface acoustic wave circuit 12a a predetermined number of times is generated in the first surface acoustic wave / excitation / detection means 14a. The surface acoustic wave obtained by circulating the received signal and the second surface acoustic wave circuit 12b by the first predetermined number of additional times corresponding to the predetermined number of rotations + the predetermined delay time is the second surface acoustic wave / excitation. / The received signal generated by the detecting means 14b and the third surface acoustic wave circuit 12c are equivalent to the predetermined number of rotations + the predetermined delay time and from the first predetermined additional number of rotations. A reception signal generated by the third surface acoustic wave / excitation / detection means 14c by the surface acoustic wave that has circulated around the second predetermined additional number of times is sequentially amplified by the amplification means 44 and then A / D. Input to the signal analysis means 46 via the conversion means 45.

  The signal analysis means 46 is provided for each predetermined number of different rounds of the surface acoustic waves that circulate the first to third surface acoustic wave circuits 12a, 12b, and 12c based on the reception signals sequentially input in this way. At least one or more of a change in the intensity of the light source, a change in the phase at each different lap, and a change in the lap speed at each predetermined different lap (for example, the change in the phase and the change in the intensity). .

  Here, the change in the circumferential speed is based on the time required for the surface acoustic wave that is excited and propagated through the third surface acoustic wave circuit 12c without the sensitive element 16 to circulate a predetermined number of times. The elastic surfaces excited and propagated through the first and second surface acoustic wave circuits 12a and 12b with the first and second sensitive elements 16a and 16b are the third elastic surface. It is measured by increasing or decreasing the time required to circulate the same predetermined number of times as the surface acoustic wave propagated through the wave circuit 12c. That is, the change in the propagation speed of the surface acoustic wave due to the influence of the ambient temperature change is calibrated.

  Furthermore, the measurement result is obtained by measuring the first surface acoustic wave / excitation / detection means 14a from the first surface acoustic wave that has been rotated around the first surface acoustic wave circuit 12a a predetermined number of times. The second surface acoustic wave / excitation / detection means 14b from the surface acoustic wave obtained by circulating the second surface acoustic wave circuit 12b by the predetermined number of times + the first predetermined number of additional times. Received signal and the third surface acoustic wave excitation / detection means 14c from the surface acoustic wave obtained by circulating the third surface acoustic wave circuit 12c by a predetermined number of times + the second predetermined number of additional times. In accordance with the order of the received signals), the adder / averaging / storage unit 48 distributes the first to third adder / averaging / storage units (not shown). The first to third addition / averaging / storage units not shown in the drawing are respectively assigned to the first of the corresponding first to third surface acoustic wave circuit 12a, 12b, 12c. Thru the third surface acoustic wave / excitation / detection means 14a, 14b, and 14c based on the received signal from the reception signal, the predetermined number of additions of the measurement results as described above, and the predetermined number of measurement results after the addition Are averaged, and the measurement result after the averaging process is stored, and the measurement result after the averaging process is displayed on the display device 50.

  That is, in this embodiment, the combination of the first to third change-over switches K1, K2, and K3 whose operation is further controlled by the switch control means 52 whose operation is controlled by the central controller 54 is the first as described above. The first to third surface acoustic wave / excitation / detection means 14a, 14b, and 14c simultaneously input the same signal with the same phase and the same burst phase high frequency signal generated from the high frequency burst signal generator 42, First to third surface acoustic wave / excitation / detection means 14a, 14b, and 14c having different numbers of turns from three surface acoustic waves that have circulated through the first to third surface acoustic wave circuit 12a, 12b, and 12c. The high-frequency signal input / reception signal extraction means 56 is configured to extract the three reception signals emitted by.

  In this embodiment, the signal analysis means 46 has the first to the third to the third to the third surface acoustic wave circuits 12a, 12b, 12c with different numbers of turns from the three surface acoustic waves that have circulated. From the three received signals emitted by the surface acoustic wave / excitation / detection means 14a, 14b, 14c, a predetermined characteristic of the surface acoustic wave corresponding to each received signal (because the surface acoustic wave makes a predetermined circulation) Measuring means for measuring the time required for the rotation (that is, at least one of the intensity and phase of the surface acoustic wave for each predetermined rotation).

  In the surface acoustic wave measuring device according to the first embodiment of the present invention described above with reference to FIGS. 1 to 4, three elastic members that circulate around the first to third surface acoustic wave peripheral circuits 12a, 12b, and 12c. From each of the three received signals emitted by the first to third surface acoustic wave / excitation / detection means 14a, 14b, and 14c from the surface wave at mutually different numbers of times, the signal analysis means 46 converts each received signal into a received signal. Predetermined characteristics of the corresponding surface acoustic wave (the time required for making a predetermined circulation of the first to third surface acoustic wave circuits 12a, 12b, 12c to which the surface acoustic wave corresponds (that is, the circulation speed), Or at least one of the intensity and phase of the surface acoustic wave for each predetermined revolution). As a result, the three surface acoustic waves detected by the first to third surface acoustic wave / excitation / detection means 14a, 14b, and 14c at different numbers of times are measured by the signal analysis means 46 in different time zones. Therefore, it can be converted by a single amplification means 44 or A / D conversion means 45. In particular, since the high-frequency signals input to the first to third surface acoustic wave / excitation / detection means 14a, 14b, and 14c all have the same phase and duration, they do not become noise. This is measured by the signal analysis means 46 as the measurement means from the three received signals emitted from the three surface acoustic waves detected by the first to third surface acoustic wave / excitation / detection means 14a, 14b and 14c. Predetermined characteristics of the above three surface acoustic waves (the time required for making a predetermined circulation of the first to third surface acoustic wave peripheral circuits 12a, 12b, 12c to which the surface acoustic waves correspond) Or, it means that a change in at least one of the intensity and phase of the surface acoustic wave for each predetermined round can be measured more precisely and more accurately than in the past.

  In this embodiment, since the first sensitive element 16a provided in the first surface acoustic wave circuit 12a is sensitive to hydrogen, the first elastic element corresponding to the first surface acoustic wave circuit 12a is used. A predetermined characteristic of the surface acoustic wave measured by the signal analysis means 46 as the measuring means (first elasticity corresponding to the surface acoustic wave) is measured from the received signal emitted from the surface acoustic wave detected by the surface wave / excitation / detection means 14a. The change in the time required to make the surface wave circuit 12a circulate a predetermined number of times (that is, at least one of the intensity and phase of the surface acoustic wave for each predetermined number of laps) This means that a change in the state of hydrogen (change in the hydrogen gas concentration), which is one of the substances surrounding the surface acoustic wave element 10A, can be measured more precisely and more accurately than in the past.

  Further, since the second sensitive element 16b provided in the second surface acoustic wave circuit 12b is sensitive to ammonia, the second surface acoustic wave corresponding to the second surface acoustic wave circuit 12b A predetermined characteristic of the surface acoustic wave measured by the signal analysis means 46 as a measuring means (second elastic surface corresponding to the surface acoustic wave) is measured from the received signal emitted from the surface acoustic wave detected by the excitation / detection means 14b. The change in the time necessary for making the wave circuit 12b circulate in a predetermined manner (that is, at least one of the intensity and phase of the surface acoustic wave for each predetermined lap) This means that a change in the state of ammonia (a change in ammonia gas concentration), which is one of the substances around the surface acoustic wave element 10B, can be measured more precisely and more accurately than in the past.

  Further, since the third surface acoustic wave circuit 12c is not provided with a sensitive element sensitive to a specific substance around the third surface acoustic wave element 10C, it corresponds to the third surface acoustic wave circuit 12c. A predetermined characteristic of the surface acoustic wave (surface acoustic wave is measured by the signal analysis means 46 as a measuring means) from the received signal emitted from the surface acoustic wave detected by the third surface acoustic wave / excitation / detection means 14c. Time required to make a predetermined round of the corresponding third surface acoustic wave circuit 12c (that is, at least one of the intensity and phase of the surface acoustic wave for every predetermined round) This change indicates a change in the temperature around the surface acoustic wave element.

  Predetermined characteristics of the surface acoustic wave due to a change in the temperature around the third surface acoustic wave element 10c thus obtained (the third surface acoustic wave circuit 12c corresponding to the surface acoustic wave is predetermined) The first surface acoustic wave circumference based on a change in the time required to circulate (that is, the circumferential speed) and / or the change in at least one of the intensity and phase of the surface acoustic wave for each predetermined round Predetermined characteristics of the surface acoustic wave measured by the signal analysis means 46 as the measuring means from the received signal emitted from the surface acoustic wave detected by the first surface acoustic wave / excitation / detection means 14a corresponding to the circuit 12a ( At least one of the time required for making a predetermined round of the first surface acoustic wave circuit 12a to which the surface acoustic wave corresponds (that is, the circumferential speed), and the intensity and phase of the surface acoustic wave for each predetermined round Or change) By calibrating the influence of the change in the temperature around the first surface acoustic wave element 10A, the change in the situation of hydrogen, which is one of the substances around the first surface acoustic wave element 10A (the concentration of the hydrogen gas) Change) can be measured more precisely and more accurately than in the past.

  Further, a predetermined characteristic of the surface acoustic wave (a third surface acoustic wave circuit 12c to which the surface acoustic wave corresponds) due to a change in the temperature around the third surface acoustic wave element 10c thus obtained. The second elastic surface based on a change in the time required to make a predetermined revolution (that is, at least one of the intensity and phase of the surface acoustic wave for each predetermined revolution) A signal analysis means 46 as a measurement means from a received signal emitted from the surface acoustic wave detected by the second surface acoustic wave / excitation / detection means 14b corresponding to the second surface acoustic wave circuit 12b of the wave element 12B. Predetermined characteristics of the surface acoustic wave to be measured (the time necessary for making a predetermined turn of the second surface acoustic wave circuit 12b to which the surface acoustic wave corresponds (ie, the turn speed), or every predetermined turn Surface acoustic wave intensity and phase By calibrating the influence of the change in the temperature around the second surface acoustic wave element 10B in the change in at least one of them, the amount of ammonia that is one of the substances surrounding the second surface acoustic wave element 10B Changes in the situation (changes in ammonia gas concentration) can be measured more precisely and more accurately than in the past.

  Further, in this embodiment, three surface acoustic waves that circulate around the first to third surface acoustic wave circuits 12a, 12b, and 12c of the first to third surface acoustic wave elements 10A, 10B, and 10C are mutually connected. The surface acoustic waves measured by the signal analyzing means 46 as the measuring means from the three received signals emitted by the first to third surface acoustic wave / excitation / detecting means 14a, 14b, 14c at different predetermined numbers of times. Predetermined characteristics (the time required for making a predetermined turn around the first to third surface acoustic wave peripheral circuits 12a, 12b, 12c corresponding to the surface acoustic wave (ie, the speed of the turn), or every predetermined turn The change in at least one of the intensity and phase of the surface acoustic wave of the surface acoustic wave in a first to third addition / averaging / storage unit (not shown) of the addition / averaging / storage device 48 is a predetermined number. Addition process , Averaging processing of the sum of a predetermined number of measurement results after the addition, and since storage processing of averaging process measurement after results are the measurement results displayed on the display device 50 more accurately is improved.

[Second Embodiment]
Next, a surface acoustic wave measuring apparatus according to a second embodiment of the present invention will be described with reference to FIGS. 5 and 6 in the accompanying drawings.

  FIG. 5 is a diagram schematically showing a configuration of a surface acoustic wave measurement device according to the second embodiment of the present invention; and FIG. 6 is a diagram illustrating a first control by the switch control means 72 shown in FIG. Of the first to third change-over switches J1, J2, J3 for the first to third surface acoustic wave / excitation / detection means 14a, 14b, 14c of the third to third surface acoustic wave elements 10A, 10B, 10C. It is a timing chart which shows the timing of switching operation roughly.

  As shown in FIG. 5, the surface acoustic wave measuring apparatus according to the second embodiment of the present invention uses three surface acoustic wave elements 10 described in FIG. The surface acoustic wave element is indicated by reference numeral 10A, the second surface acoustic wave element is indicated by reference numeral 10B, and the third surface acoustic wave element is indicated by reference numeral 10C. Further, in the first surface acoustic wave element 10A, the second surface acoustic wave element 10B, and the third surface acoustic wave element 10C, the surface acoustic wave peripheral circuits are indicated by reference numerals 12a, 12b, and 12c, Surface acoustic wave excitation / detection means are indicated by reference numerals 14a, 14b and 14c. Then, the first surface acoustic wave element 12A of the first surface acoustic wave element 10A and the second surface acoustic wave circuit 12b of the second surface acoustic wave element 10B are sensitive to different predetermined substances, The surface acoustic waves that circulate around the first and second surface acoustic wave circuit 12a and 12b corresponding to the degree of sensitivity to a predetermined substance have a predetermined influence (for example, changes in the propagation speed of surface acoustic waves, There are provided first and second sensitive elements 16a and 16b that give a change in the intensity of the surface acoustic wave).

  In this embodiment, one terminal of the interdigital electrode of the first surface acoustic wave / excitation / detection means 14a of the first surface acoustic wave element 10A is connected to the switching element C of the first changeover switch J1, One terminal of the interdigital electrode of the second surface acoustic wave / excitation / detection means 14b of the second surface acoustic wave element 10B is connected to the switching element C of the second changeover switch J2, and the third One terminal of the interdigital electrode of the third surface acoustic wave / excitation / detection means 14c of the surface acoustic wave element 10C is connected to the switching element C of the third selector switch J3. The other terminal of each interdigital electrode of the first surface acoustic wave / excitation / detection means 14a, the second surface acoustic wave / excitation / detection means 14b, and the third surface acoustic wave / excitation / detection means 14c is Grounded.

  Each of the first changeover switch J1, the second changeover switch J2, and the third changeover switch J3 has an input terminal I and an output terminal O that are selectively connected to the respective changeover elements C by the respective changeover elements C. Is included.

  The input terminals I of the first to third changeover switches J1, J2, J3 are connected to the high frequency burst signal generator 60. The high-frequency burst signal generator 60 includes a high-frequency signal generating unit that generates a high-frequency signal having a predetermined frequency, and a burst-shaped high-frequency signal extracting unit that extracts a high-frequency signal having a predetermined length from the generated high-frequency signal as a burst-shaped high-frequency signal. ,including.

  The output terminal O of the first changeover switch J1 is connected to the amplification means 62, the output terminal O of the second changeover switch J2 is connected to the amplification means 62 via the first delay device 64a, and further The output terminal O of the third changeover switch J3 is connected to the amplification means 62 via the second delay device 64b.

  The amplification means 62 is connected to the signal analysis means 66 via the A / D conversion means 63, and the signal analysis means 66 is further connected to the addition / averaging / storage device 68 and the addition / averaging / storage device 68. A display device 70 is connected to the.

  Each of the first changeover switch J1, the second changeover switch J2, and the third changeover switch J3 is connected to a switch control means 72 that controls the operation of the respective changeover element C.

  Further, the switch control means 72, the display device 70, and the high frequency burst signal generator 60 are connected to a central controller 74 for controlling these operations.

  Next, the operation of the surface acoustic wave measuring apparatus according to the second embodiment of the present invention configured as described above will be described.

  The central controller 74 connects the switching elements C of the first changeover switch J1, the second changeover switch J2, and the third changeover switch J3 to the respective input terminals I by the switch control means 72, and at the same time, the high frequency The burst signal generator 60 generates a burst high frequency signal having a predetermined frequency. This burst-like high-frequency signal is transmitted through the input terminal I of the first changeover switch J1 and the changeover element C through one of the aforementioned first surface acoustic wave / excitation / detection means 14a of the first surface acoustic wave element 10A. To the terminal, and to the aforementioned one terminal of the second surface acoustic wave / excitation / detection means 14b of the second surface acoustic wave element 10B via the input terminal I and the switching element C of the second changeover switch J2. Further, simultaneously through the input terminal I and the switching element C of the third changeover switch J3, to the above-mentioned one terminal of the third surface acoustic wave / excitation / detection means 14c of the third surface acoustic wave element 10C. Are input in the same phase.

  In this way, the first to third surface acoustic wave elements 10A to 10C of the first to third surface acoustic wave elements 10A to 10C to which the burst-like high-frequency signal having a predetermined frequency generated by the high-frequency burst signal generator 60 is simultaneously input in the same phase. 3 surface acoustic wave / excitation / detection means 14a to 14c are simultaneously in phase with the first to third surface acoustic wave peripheral circuits 12a, 12b and 12c of the first to third surface acoustic wave elements 10A to 10C. Then, the surface acoustic wave is excited and propagated along the first to third surface acoustic wave peripheral circuits 12a, 12b, and 12c provided on the first to third surface acoustic wave elements 10A to 10C.

  The switch control means 72 excites the first to third surface acoustic wave circuits 12a, 12b, and 12c corresponding to the first to third surface acoustic wave / excitation / detection means 14a, 14b, and 14c, respectively. Each of the switching elements C of the first to third changeover switches J1, J2, and J3 before the generated surface acoustic wave makes one round of each of the first to third surface acoustic wave peripheral circuits 12a, 12b, and 12c. Are connected to the respective output terminals O.

  The first to third surface acoustic wave / excitation / detection means 14a, 14b, 14c detect the surface acoustic waves that circulate around the corresponding first to third surface acoustic wave peripheral circuits 12a, 12b, 12c. A reception signal is emitted every time.

  In this case, the surface acoustic wave obtained by circulating the first surface acoustic wave circuit 12a of the first surface acoustic wave element 10A by a predetermined number of times is generated in the first surface acoustic wave / excitation / detection means 14a. Subsequent to the signal, a surface acoustic wave that circulates the second surface acoustic wave circuit 12b of the second surface acoustic wave element 10B for the predetermined number of times is generated in the second surface acoustic wave / excitation / detection means 14b. The received signal has a first predetermined delay time set by the first delay device 64a, and passes through the third surface acoustic wave circuit 12c of the third surface acoustic wave element 10C. The received signal generated by the surface acoustic wave generated by the third surface acoustic wave / excitation / detection means 14c is set by the second delay device 64b longer than the first predetermined delay time set by the first delay device 64a. Second predetermined delay time With it, is input through the sequentially amplifying means 64 and A / D converter 63 into a signal analyzer 66.

  The signal analyzing means 66 is based on the received signals sequentially input in this way, and the first to third surface acoustic wave circuits 12a, 12b, 12c of the first to third surface acoustic wave elements 10A, 10B, 10C. At least one of the same change in the intensity of the surface acoustic waves that circulate around each other, the change in the phase of each of the same laps, and the change in the lap speed of each of the same laps One or more (eg, phase change and intensity change) are measured.

  Here, the change in the circumferential speed is caused by the predetermined number of revolutions of the surface acoustic wave that is excited and propagated through the third surface acoustic wave circuit 12c of the third surface acoustic wave element 10C without the sensitive element 16. The first and second surface acoustic wave circuit 12a and 12b with the first and second sensitive elements 16a and 16b are excited and propagated there, respectively, based on the time required to circulate. The elastic surface is measured by increasing or decreasing the time required to circulate the same predetermined number of times as the surface acoustic wave propagated through the third surface acoustic wave circuit 12c.

  Further, the measurement result is obtained in the order of measurement (that is, the first to third surface acoustic waves from the first to third surface acoustic wave circuits 12a, 12b, and 12c that circulate the same predetermined number of times with each other). According to the first to third surface acoustic wave / excitation / detection means 14a, 14b, 14c of the surface acoustic wave elements 10A, 10B, 10C and the order of received signals via the first and second delay devices 64a, 64b). Thus, the addition / averaging / storage unit 68 distributes to first to third addition / averaging / storage units (not shown). The first to third addition / averaging / storage units not shown in the drawing are respectively assigned to the first of the corresponding first to third surface acoustic wave circuit 12a, 12b, 12c. The measurement results as described above based on the received signals from any of the first to third surface acoustic wave / excitation / detection means 14a, 14b, 14c of the third to third surface acoustic wave elements 10A, 10B, 10C. A predetermined number of addition processes, an averaging process of the total of the predetermined number of measurement results after addition, and a storage process of the measurement results after the averaging process are performed, and the measurement results after the averaging process are displayed on the display device 70 To do.

  In other words, in this embodiment, the first to third change-over switches J1, J2, J3 whose operation is further controlled by the switch control means 72 whose operation is controlled by the central control device 74 are in this way the first to third switches. Burst high frequency signals of a predetermined frequency generated by the high frequency burst signal generator 60 for the first to third surface acoustic wave / excitation / detection means 14a, 14b, 14c of the three surface acoustic wave elements 10A, 10B, 10C. The high-frequency signal input means 76 is configured to input the same signal with the same phase at the same time.

  Further, in this embodiment, the signal analyzing means 66 combined with the first and second delay devices 64a and 64b is used for the first to third elasticity of the first to third surface acoustic wave elements 10A, 10B, and 10C. The first to third surface acoustic waves of the first to third surface acoustic wave elements 10A, 10B, and 10C with the same number of turns from the three surface acoustic waves that circulate the surface wave circuit 12a, 12b, 12c. Predetermined characteristics of the surface acoustic wave corresponding to each received signal from among the three received signals emitted by the excitation / detection means 14a, 14b, 14c (changes in signal intensity for each predetermined round of the surface acoustic wave and predetermined The measuring means 78 is configured to measure at least one of a change in phase for each lap and a change in lap speed for each predetermined lap at different timings.

  In the surface acoustic wave measurement device according to the second embodiment of the present invention described above with reference to FIGS. 5 and 6, the first to third surface acoustic wave elements 10A, 10B, 10C provided on the first to third surface acoustic wave elements 10A, 10B, 10C. The first to third of the first to third surface acoustic wave elements 10A, 10B, and 10C from the three surface acoustic waves that have circulated the third to third surface acoustic wave circuits 12a, 12b, and 12c with the same number of turns. The three received signals emitted by the surface acoustic wave / excitation / detection means 14a, 14b, and 14c are analyzed by the signal analysis means 66 combined with the first and second delay elements 64a and 64b at the timings different from each other. Predetermined characteristics of two surface acoustic waves (the time required to make a predetermined circulation of the first to third surface acoustic wave peripheral circuits 12a, 12b, and 12c corresponding to the surface acoustic waves (that is, the circulation speed), Or every predetermined lap It means for measuring at least a change in any one) of the sexual surface wave intensity and phase, can be dealt with a single amplification means 62 and A / D converter 63.

  This is measured by the signal analyzing means 66 as the measuring means from the three received signals emitted from the three surface acoustic waves detected by the first to third surface acoustic wave / excitation / detecting means 14a, 14b, 14c. Predetermined characteristics of the above three surface acoustic waves (the time required for making a predetermined turn around the first to third surface acoustic wave peripheral circuits 12a, 12b, 12c to which the surface acoustic waves correspond (that is, the turn speed) It also means that the change in the intensity and / or phase of the surface acoustic wave for each predetermined round can be measured with a simpler configuration and more accurately and more accurately than before. ing.

  In this embodiment, since the first sensitive element 16a provided in the first surface acoustic wave circuit 12a of the first surface acoustic wave element 10A is sensitive to hydrogen, the first surface acoustic wave element 10A includes the first surface acoustic wave element 10A. The signal analysis means 66 as a measuring means measures from the received signal emitted from the surface acoustic wave detected by the first surface acoustic wave / excitation / detection means 14a corresponding to the first surface acoustic wave circuit 12a. Predetermined characteristics of the surface acoustic wave (the time required to make a predetermined revolution of the first surface acoustic wave circuit 12a to which the surface acoustic wave corresponds (ie, the revolution speed), or the elastic surface for each predetermined revolution The change in the intensity of the wave and / or the phase) is a change in the situation of hydrogen, which is one of the substances surrounding the first surface acoustic wave element 10A (change in the hydrogen gas concentration), compared to the conventional case. Measure more accurately with precision Which means that it allows door is.

  Further, since the second sensitive element 16b provided in the second surface acoustic wave circuit 12b of the second surface acoustic wave element 10B is sensitive to ammonia, the second surface acoustic wave element 10B has a second sensitivity. The surface acoustic wave measured by the signal analysis means 66 as the measuring means from the received signal emitted from the surface acoustic wave detected by the second surface acoustic wave / excitation / detection means 14b corresponding to the surface acoustic wave circuit 12b. The predetermined characteristics (the time required to make a predetermined turn of the second surface acoustic wave circuit 12b to which the surface acoustic wave corresponds (that is, the speed), or the intensity of the surface acoustic wave for each predetermined turn Or at least one of the phases) is more accurate than a conventional change in the state of ammonia (change in ammonia gas concentration), which is one of the substances surrounding the second surface acoustic wave element 10B. Well measured Which means that it becomes possible to be.

  Further, the third surface acoustic wave circuit 12c of the third surface acoustic wave element 10C is not provided with the sensitive element 16 sensitive to a specific substance around the third surface acoustic wave element 10C. The surface acoustic wave measured by the signal analysis means 66 as the measuring means from the received signal emitted from the surface acoustic wave detected by the third surface acoustic wave / excitation / detection means 14c corresponding to the surface acoustic wave circuit 12c A predetermined characteristic of the wave (a time necessary for making a predetermined round of the third surface acoustic wave circuit 12c to which the surface acoustic wave corresponds (that is, a rounding speed), or a surface acoustic wave of every predetermined round The change in at least one of the intensity and the phase indicates a change in the temperature around the third surface acoustic wave element 10C.

  Predetermined characteristics of the surface acoustic wave due to a change in the temperature around the third surface acoustic wave element 10C thus obtained (the third surface acoustic wave circuit 12c corresponding to the surface acoustic wave is predetermined) The first surface acoustic wave circumference based on a change in the time required to circulate (that is, the circumferential speed) and / or the change in at least one of the intensity and phase of the surface acoustic wave for each predetermined round Predetermined characteristics of the surface acoustic wave measured by the signal analyzing means 66 as the measuring means from the received signal emitted from the surface acoustic wave detected by the first surface acoustic wave / excitation / detection means 14a corresponding to the circuit 12a ( At least one of the time required for making a predetermined round of the first surface acoustic wave circuit 12a to which the surface acoustic wave corresponds (that is, the circumferential speed), and the intensity and phase of the surface acoustic wave for each predetermined round Or change) By calibrating the influence of the change in the temperature around the first surface acoustic wave element 10A, the change in the situation of hydrogen, which is one of the substances around the first surface acoustic wave element 10A (the concentration of the hydrogen gas) Change) can be measured more precisely and more accurately than in the past.

  Further, a predetermined characteristic of the surface acoustic wave (the third surface acoustic wave circuit 12c to which the surface acoustic wave corresponds corresponds to a change in the temperature around the third surface acoustic wave element 10C thus obtained. The second elastic surface based on a change in the time required to make a predetermined revolution (that is, at least one of the intensity and phase of the surface acoustic wave for each predetermined revolution) The predetermined surface acoustic wave measured by the signal analyzing means 66 as the measuring means from the received signal emitted from the surface acoustic wave detected by the second surface acoustic wave / excitation / detection means 14b corresponding to the wave circuit 12b. Characteristics (the time required to make a predetermined round of the second surface acoustic wave circuit 12b to which the surface acoustic wave corresponds (ie, the speed), or the intensity and phase of the surface acoustic wave for each predetermined round At least one) By calibrating the influence of the change in the temperature around the second surface acoustic wave element 10B in the conversion, the change in the situation of ammonia, which is one of the substances around the second surface acoustic wave element 10B (ammonia gas concentration Change) can be measured more precisely and more accurately than in the past.

  Furthermore, in this embodiment, the first to third surface acoustic waves / waves are generated from the three surface acoustic waves that have circulated the first to third surface acoustic wave circuit 12a, 12b, 12c with the same predetermined number of turns. From the three received signals emitted by the excitation / detection means 14a, 14b, and 14c, a predetermined characteristic of the surface acoustic wave (measured by the surface acoustic wave corresponding to the surface acoustic wave) measured by the signal analysis means 66 as the measurement means at different timings. At least one of the time required for the first to third surface acoustic wave circuit 12a, 12b, and 12c to make a predetermined turn (that is, the turn speed) and the intensity and phase of the surface wave at every predetermined turn (1) in the first to third addition / averaging / storage units (not shown) of the addition / averaging / storage device 68, a predetermined number of addition processes, Measurement result Averaging a total, and since storage processing of averaging process measurement after results are the measurement results displayed on the display device 70 more accurately it is improved.

  The surface acoustic wave measurement device of the present invention can be used as, for example, an odor sensor, a gas sensor for analyzing various kinds of gases, or a biosensor.

DESCRIPTION OF SYMBOLS 10 ... Surface acoustic wave element, 10A ... 1st surface acoustic wave element, 10B ... 2nd surface acoustic wave element, 10C ... 3rd surface acoustic wave element, 11 ... Base | substrate, 12 ... Surface acoustic wave circuit, 12a 1st surface acoustic wave circuit, 12b 2nd surface acoustic wave circuit, 12c 3rd surface acoustic wave circuit, 14 Surface acoustic wave excitation / detection means, 14a 1st surface acoustic wave Wave / excitation / detection means, 14b ... second surface acoustic wave / excitation / detection means, 14c ... third surface acoustic wave / excitation / detection means, 16, 16a, 16b ... sensitive elements,
42 ... High-frequency burst signal generator, K1 ... first changeover switch, K2 ... second changeover switch, K3 ... third changeover switch, C ... switching element, I ... input terminal, O ... output terminal, N ... neutral Position, 44 ... Amplifying means, 45 ... A / D conversion means, 46 ... Signal analysis means (measurement means), 48 ... Addition / averaging / storage device, 50 ... Display device, 52 ... Switch control means, 54 ... Central control Device, 56... High-frequency signal input / reception signal extraction means,
60 ... High-frequency burst signal generator, J1 ... first changeover switch, J2 ... second changeover switch, J3 ... third changeover switch, C ... switching element, I ... input terminal, O ... output terminal, 62 ... amplification Means 63 ... A / D conversion means 64a ... first delay unit 64b ... second delay unit 66 ... signal analysis means 68 ... addition / averaging / storage device 70 ... display device 72 ... switch control means , 74... Central control device, 76... High frequency signal input / reception signal extraction means, and 78.

Claims (12)

Single or multiple surface acoustic wave circuits that are continuously extended in an annular shape by a part of a spherical shape, and in which surface acoustic waves are excited and the excited surface acoustic waves can circulate in the extending direction. A plurality of substrates including a surface having;
Provided in each of the surface acoustic wave circuit of the surface of each of the plurality of substrates, the surface acoustic wave is excited based on the high frequency signal, and the excited surface wave is converted into the corresponding surface acoustic wave circuit. A plurality of surface acoustic wave / excitation / detection means that circulate along and detect the surface acoustic wave that has circulated and generate a reception signal;
Multiple surface acoustic waves / excitation / detection means simultaneously input high-frequency signals in the same phase, and multiple surface acoustic waves / excitation / detection from multiple surface acoustic waves that circulate the surface acoustic wave circuit of multiple substrates High-frequency signal input / reception signal extraction means for extracting a plurality of reception signals emitted by the means; and
Measuring means for measuring predetermined characteristics of the surface acoustic wave corresponding to each received signal from each of the plurality of received signals at different times;
Equipped with a,
When a high-frequency signal is simultaneously input in the same phase to a plurality of surface acoustic wave / excitation / detection means, the duration of the high-frequency signal input in the same phase at the same time is all of the plurality of surface acoustic waves excited by the high-frequency signal. Shorter than the time required to make one round of the corresponding surface acoustic wave circuit,
A surface acoustic wave measuring device.   Each of the plurality of received signals is converted into digital data by a single analog-to-digital conversion means at different times, and each predetermined characteristic of the surface acoustic wave in each of the plurality of received signals after being converted into digital data has The surface acoustic wave measurement apparatus according to claim 1, wherein the measurement is performed at different times by the measurement unit.   The high-frequency signal input / reception signal extraction means cuts out reception signals obtained by performing different laps on each substrate at different times with respect to signals excited by surface acoustic waves that circulate in the circulation paths of the respective substrates. The surface acoustic wave measuring device according to claim 1 or 2. The measuring means measures a predetermined characteristic of the surface acoustic wave corresponding to each received signal at different times by giving different phase delays to each of the plurality of received signals;
The surface acoustic wave measurement device according to claim 1, wherein the surface acoustic wave measurement device is a surface acoustic wave measurement device.   5. The surface acoustic wave measurement device according to claim 1, wherein the surface acoustic wave / excitation / detection means includes a comb electrode. A surface acoustic wave circuit that is provided in at least one of the plurality of surface acoustic wave circuits, has a sensitivity corresponding to the amount and type of the substance, and corresponds to the degree of sensitivity to the amount and type of the substance. It further includes a sensitive element that has a predetermined influence on the surface acoustic wave that circulates,
The surface acoustic wave measurement device according to claim 1, wherein the surface acoustic wave measurement device is a surface acoustic wave measurement device.   The surface acoustic wave measurement device according to claim 6, wherein the predetermined substance to which the sensitive element is sensitive is at least one kind of predetermined gas.   The surface acoustic wave measuring apparatus according to any one of claims 1 to 7, wherein the predetermined characteristic of the surface acoustic wave measured by the measuring unit is a phase of the surface acoustic wave.   8. The surface acoustic wave measurement device according to claim 1, wherein the predetermined characteristic of the surface acoustic wave measured by the measuring unit is the intensity of the surface acoustic wave. 9.   The surface acoustic wave measurement apparatus according to claim 1, wherein the predetermined characteristics of the surface acoustic wave measured by the measuring unit are both the phase and the intensity of the surface acoustic wave.   The predetermined characteristic of the surface acoustic wave measured by the measuring means is a time or a speed required to circulate the surface acoustic wave circuit, according to any one of claims 1 to 7. The surface acoustic wave measuring apparatus as described. Based on the input of the high frequency signal to all of the plurality of surface acoustic wave / excitation / detection means, a predetermined number of the received signals or the predetermined number of times emitted from each of the plurality of surface acoustic wave / excitation / reception means Averaging means for averaging the predetermined characteristics of the surface acoustic wave of the predetermined number of times corresponding to the received signal;
The surface acoustic wave measurement device according to claim 1, wherein the surface acoustic wave measurement device is a surface acoustic wave measurement device.

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